TW201111790A - High-frequency vertical probe card structure - Google Patents
High-frequency vertical probe card structure Download PDFInfo
- Publication number
- TW201111790A TW201111790A TW98131188A TW98131188A TW201111790A TW 201111790 A TW201111790 A TW 201111790A TW 98131188 A TW98131188 A TW 98131188A TW 98131188 A TW98131188 A TW 98131188A TW 201111790 A TW201111790 A TW 201111790A
- Authority
- TW
- Taiwan
- Prior art keywords
- probe
- card structure
- conductive
- insulating material
- probe card
- Prior art date
Links
- 239000000523 sample Substances 0.000 title claims abstract description 99
- 239000011810 insulating material Substances 0.000 claims abstract description 24
- 238000012360 testing method Methods 0.000 claims abstract description 23
- 239000004020 conductor Substances 0.000 claims abstract description 19
- 239000000463 material Substances 0.000 claims description 16
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 239000004033 plastic Substances 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 2
- 230000003139 buffering effect Effects 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- 210000002784 stomach Anatomy 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 abstract description 2
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 16
- 238000005259 measurement Methods 0.000 description 4
- 229920002799 BoPET Polymers 0.000 description 2
- 239000005041 Mylar™ Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 241000255925 Diptera Species 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW98131188A TW201111790A (en) | 2009-09-16 | 2009-09-16 | High-frequency vertical probe card structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW98131188A TW201111790A (en) | 2009-09-16 | 2009-09-16 | High-frequency vertical probe card structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201111790A true TW201111790A (en) | 2011-04-01 |
| TWI405971B TWI405971B (enExample) | 2013-08-21 |
Family
ID=44909012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW98131188A TW201111790A (en) | 2009-09-16 | 2009-09-16 | High-frequency vertical probe card structure |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW201111790A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106124808A (zh) * | 2016-08-30 | 2016-11-16 | 四川汉舟电气股份有限公司 | 一种高性能组合仪表的测量控制模块 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3486841B2 (ja) * | 2000-08-09 | 2004-01-13 | 日本電子材料株式会社 | 垂直型プローブカード |
| CN100442057C (zh) * | 2002-04-16 | 2008-12-10 | 日本发条株式会社 | 导电接触探头 |
| TWI313753B (en) * | 2006-09-11 | 2009-08-21 | Jung Tang Huang | Vertical probe card |
| TWM362994U (en) * | 2006-11-21 | 2009-08-11 | Wen-Yu Lv | Probe card |
| JP2008157831A (ja) * | 2006-12-26 | 2008-07-10 | Japan Electronic Materials Corp | プローブカード |
-
2009
- 2009-09-16 TW TW98131188A patent/TW201111790A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TWI405971B (enExample) | 2013-08-21 |
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