TW201100744A - Method for measuring external shape of rectangular plate-like object, and method for calibrating relative position of image-capturing means - Google Patents

Abstract

Provided is a method for measuring the external shape of a rectangular plate-like object being conveyed by use of a shape measurement device which is provided with four image-capturing means previously arranged corresponding to the four corners of the rectangular plate-like object and a storage means for storing the relative coordinates of the respective four image-capturing means. The method is provided with a step of determining whether or not the rectangular plate-like object has reached a measurement section, a step of causing the four image-capturing means to capture the images including the corner portions at the respective four corners of the rectangular plate-like object having reached the measurement section, a step of computing corner post coordinates which are coordinate values from image original point of the four corners of the rectangular plate-like object on the basis of the captured images, and a step of computing the lengths of the four sides and the squareness of the four corners of the rectangular plate-like objects on the basis of the computed corner post coordinates and the relative coordinates stored in the storage means.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for measuring a shape (a size, a perpendicularity of four corners, and the like) of a rectangular plate such as a glass plate, and more particularly to an uninterrupted measurement. A method of measuring the shape (size, squareness of the four corners, etc.) of a rectangular plate such as a glass plate conveyed on a line. [Prior Art] In the field of glass plates such as glass plates for liquid crystal displays, glass plates for plasma displays, glass plates for field emission displays, and glass plates for flat panel display panels such as organic EL (Electro Luminescence) 'Requires a short-time, high-precision and high-efficiency measurement of the shape of the rectangular glass plate (size and the perpendicularity of the four corners, etc.) in a non-contact manner. As a device that satisfies this requirement, a photographing glass plate is proposed, and according to the A shape measuring device that automatically measures the shape (size, and the perpendicularity of the four corners) of the glass plate (for example, see Patent Document 丨). Fig. 10 is a front elevational view of the shape measuring device disclosed in Patent Document 1. Fig. 11 is a side view of the shape measuring device disclosed in Patent Document 1. As shown in FIG. 10 and FIG. 11, the shape measuring apparatus 1A disclosed in Patent Document 1 includes an x-axis guide rail 1 extending in the X-axis direction, a x-axis guide rail 104 extending in the γ-axis direction, and an image pickup mechanism 1〇. 6. A motor (not shown) or the like that moves the imaging unit 1〇6 in the χγ direction along the parallel shaft guide 102 and the x-axis guide rail 1〇4. As shown in FIG. 11, in the shape measuring apparatus 1A, while the imaging mechanism 106 is moved in the ΧΥ direction, the edge of the glass plate 110 which is carried in an inclined posture and supported by the 146522.doc 201100744 inspection table 108 is photographed. And based on the image taken, etc., the shape (the size and the perpendicularity of the four corners, etc.) of the glass plate 自动0 is automatically measured. [PRIOR ART DOCUMENT] [Patent Document 1] Japanese Laid-Open Patent Publication No. 2007-205724 [Draft of the Invention] [Problems to be Solved by the Invention] However, the shape measuring apparatus 100 is configured to move in the χγ direction. Since the image pickup unit 106 photographs the edge of the glass sheet 11 or the like, the glass sheet 110 must be fixed to the inspection table 1〇8 for a fixed period of time, so that a plurality of glass sheets that cannot be continuously conveyed to the assembly line are not required. The shape measurement is performed separately, which results in a time-consuming measurement, and the feedback on the manufacturing conditions is slow when the defect occurs. Therefore, there is a problem that the yield cannot be improved. The present invention has been made in view of the above circumstances, and an object of the invention is to provide a measuring method capable of continuously measuring the shape (size, squareness of four corners, etc.) of a rectangular plate such as a glass plate conveyed on a water line. [Means for Solving the Problem] In order to attain the above object, the present invention provides a method for measuring a shape of a person other than a rectangular plate, which is measured by a shape measuring device to be shaped by a shape measurement; In the shape, the shape measurement includes four imaging phases arranged in advance corresponding to the four corners of the rectangular plate, and a memory phase structure for storing the relative coordinates of the respective four imaging mechanisms M. ^ r 曰爻, the measuring method The method includes the following steps: determining whether the above-mentioned rectangular opening 146522.doc 201100744 has reached the above-mentioned measuring area; and determining that the rectangular plate has reached the above-mentioned measuring area, using the above four imaging mechanisms , taking an image of the corners of each of the four corners of the rectangular plate that has reached the measurement area; calculating the four corners of the rectangular plate according to the image taken as described above; and the coordinate value of the distance from the origin , that is, the coordinate of the chord; calculating the moment according to the angular column coordinates of the rectangular plate calculated above and the relative coordinates stored in the memory mechanism Calculating the length of each of the four sides of the plate; and calculating the four corners of the rectangular plate according to the calculated angular column coordinates, the relative coordinates stored in the memory mechanism, and the calculated length dimension Verticality. According to the above configuration, instead of moving the imaging mechanism κ γ direction as before, the four imaging mechanisms arranged in advance corresponding to the four corners of the rectangular plate are synchronized (or substantially synchronously) to each of the four corners including the rectangular plate. The image of the corner is calculated from the shape of the rectangular plate (the length of each of the four sides of the rectangular plate and the perpendicularity of each of the four corners of the rectangular plate). Therefore, it is possible to continuously measure the shape of each of a plurality of rectangular plate shapes conveyed on the assembly line, thereby improving the surface yield. Furthermore, the method for measuring the shape of the outer shape of the present invention may further comprise the steps of: comparing the calculated length dimension and the perpendicularity with a predetermined standard value; and determining the shape of the rectangular plate according to the comparison result. The pros and cons. According to the above configuration, the shape and shape of the rectangular plate can be made 146522.d〇c 201100744 Further, the outer shape measuring method j of the present invention further includes the following steps: according to the standard rectangular plate for correction The pre-measured length and the four corners of the standard rectangular plate for correction are respectively measured by the verticality of the pre-measurement, and the four corners of the rectangular plate are respectively corrected for the perpendicularity of the pre-measurement. a mechanism for capturing a corner of each of the four corners of the standard rectangular plate for correction; and calculating an angular column coordinate of each of the four corners of the standard rectangular plate for correction according to the photographing; and, according to the above operation The correction of the rectangular column of the standard rectangular plate, the corrected verticality, and the four sides of the standard rectangular plate for correction are respectively determined by the pre-measured length dimension, and the respective coordinates of the four camera bodies are supervised. Coexisting in the above memory mechanism. According to the above configuration, it is possible to calculate a rectangular plate shape by using a predetermined rectangular plate shape of a predetermined (predetermined) correction rectangular plate shape using the respective length dimensions of the four sides and the vertical direction of each of the four corners (rectangular plate shape) The relative coordinates of the four imaging mechanisms based on the respective length dimensions of the four sides and the perpendicularity of the four corners of the rectangular plate. Further, since the step of correcting the perpendicularity of each of the four corners of the rectangular plate is measured, the length of each of the four sides of the standard rectangular plate for correction and the perpendicularity of each of the four corners are included. Measurement errors, which also cancel each other out. Therefore, the relative coordinates of each of the four imaging mechanisms can be calculated with higher precision. Further, the present invention provides a method for correcting the relative position of an imaging mechanism, which is a relative coordinate of four imaging mechanisms in the shape correcting device, 146522.doc -6-201100744, which includes a rectangular plate in advance. The above four imaging mechanisms are disposed at the four corners, and the correction method is characterized in that the method includes the following steps: pre-measuring the four sides of the standard rectangular plate for correction, the length dimension, and the standard rectangular plate for the correction The four corners are respectively corrected by the straightness of the pre-measured & measured, and the four corners of the rectangular plate are respectively corrected for the perpendicularity of the pre-measurement; and the four imaging mechanisms of the above-mentioned correction are used to photograph the four corners of the standard rectangular plate for correction. An image of a corner; an angular column coordinate of each of the four corners of the quasi-rectangular plate shape calculated according to the image of the above-mentioned 〇(4); and a corner post coordinate of the standard rectangular plate according to the above-mentioned calculated correction, The corrected verticality and the length of the four sides of the standard rectangular plate for correction described above are respectively determined in advance. The relative coordinates of the four imaging mechanisms are calculated. According to the above configuration, the standard rectangular plate for correction (known) can be calculated by using the length dimension of each of the four sides and the perpendicularity of each of the four corners. The shape of the outer shape of the plate (the length of each of the four sides of the rectangular plate and the perpendicularity of each of the four corners of the rectangular plate) is the relative coordinate of each of the four imaging mechanisms based on the calculation. The four corners of the rectangular plate are respectively subjected to a predetermined degree of perpendicularity, so that even if the length dimension of each of the four sides of the standard rectangular plate for correction and the perpendicularity of each of the four corners are included in the measurement error, the measurement error is also included. Therefore, the relative coordinates of the four imaging mechanisms can be calculated with higher precision. [Effect of the Invention] As described above, according to the present invention, it is possible to provide an uninterrupted measurement in the shape of 146522.doc 201100744 (size and flow) Determination of the squareness of the four corners of a rectangular plate such as a glass plate conveyed on the line, etc.) [Embodiment] The present invention is a preferred embodiment of the method for measuring the shape and shape of a rectangular plate according to the present invention. The shape measuring device is suitable for measuring the shape and shape of a rectangular plate according to the present embodiment. Fig. 2 is a view for explaining a general manufacturing procedure of the glass sheet. Fig. 3 is a plan view of the vicinity of the shape measuring area 32 on the measurement line %. [Outline of the shape measuring device] The board system is usually manufactured by the following steps: a cutting step of cutting a sheet glass manufactured to a predetermined thickness into a predetermined size; an abfering step of chamfering the cut glass sheet; and a washing and drying step, The glass plate after chamfering is cleaned and dried; and the measuring step (measurement line) is used to measure the shape of the glass plate after washing and drying. The shape measuring apparatus 1 of the present embodiment is a device for measuring the shape of the glass plate, and as shown in Fig. 3, the shape measuring region 32 is provided on the measurement line 3A. The dried glass plate 3 is, for example, a rectangular glass plate having a length L (number m) x a width w (several m) as shown in Fig. 3. Hereinafter, the operation glass plate is transported on the measurement line 3 by a known transport mechanism (not shown) and passes through the shape measuring area 32. The shape measuring device 1 continuously measures the shape of the working glass plate 34 passing through the shape measuring portion 32 without interruption (the respective length dimensions of the four sides of the working glass plate 34 and the perpendicularity of each of the four corners 146522.doc 201100744, etc.). [Configuration of Shape Measuring Device] As shown in Fig. 1, the shape measuring device 10 includes an image processing device 12 and four illumination mechanisms 16 via an LED (Light Emitting Diode) power supply 14 and a predetermined interface. (not shown) is connected to the image processing device 12; four imaging units 18C0 to 18C3 are connected to the image processing device I2 via a predetermined interface (not shown); and the sensor 20 is regulated. An interface (not shown) is connected to the image processing device 12; The image processing device 12 includes an operation and control unit 12a such as an MPU (Micro Processing Unit) or a CPU (Central Processing Unit), and a RAM (Random Access Memory) or a ROM. (Re ad Only Memory, etc.), etc. In the image processing apparatus 12, the arithmetic control unit i2a functions as a control unit for controlling the illumination units 16 and the image pickup units 18C0 to 18C3, and an operation glass plate 34 by executing a predetermined program read in the memory unit 12b. The arithmetic mechanism of the external shape and the like functions. Illumination mechanism 16 is for illuminating the four corners of working glass panel 34 and includes illumination means such as a plurality of LED light sources (not shown) arranged in a ring shape. As shown in Fig. 1, the illumination mechanism 16 is disposed at four locations corresponding to the four corners of the work glass plate 34. Illumination mechanism 16 illuminates the four corners of working glass sheet 34 in accordance with control from image processing split 12. The imaging mechanisms 18C0 to 18C3 are used to photograph the four corners of the working glass plate 34, and include, for example, a CCD (Charge Coupled Device) type or a CMOS (Complementary Metal Oxide Semiconductor, 146522.doc 201100744 complementary metal oxide semiconductor) type. An imaging device of an imaging element (for example, resolution: tens of μηη/pic). The imaging units 18c to 18C3 converge on the respective viewing angles C1 to C4 (see FIG. 3, FIG. 3, FIG. 4, etc.) of the four corners of the working glass plate 34 (for example, the field of view: several tens of 111111>< The method of 10111111) is arranged at four locations corresponding to the four corners of the working glass plate 34. The camera frames 18C0 to 18C3 capture images ρι to ρ4 including the corner portions C1 to C4 of the four corners of the work glass plate 34 in accordance with the control from the image processing device 12. Fig. 5 shows an example of images ρι to ρ4 taken by the respective image pickup mechanisms 18C0 to 18C3. The captured images P1 to P4 are loaded into the image processing device 12. The sensor 20 is for detecting whether or not the working glass plate 34 of the measuring object has reached the measurement area 32 (the prescribed shooting position), and is, for example, a photo interrupter. When the sensor 20 detects the edge 34a (edge) of the transport direction of the working glass sheet, the detection signal of this condition is notified to the image processing apparatus 12. The image processing apparatus that has received this notification ^ Each of the illumination mechanisms 16 is controlled to illuminate the four corners of the working glass plate 34 that has reached the measurement zone 32. At the same time, the respective imaging mechanisms 18C0 to 18C3 are controlled to capture the corners of the four corners of the working glass plate 34. C. Image of C4. [Relative coordinate calculation processing using standard glass plate for correction (correction method)] Next, with reference to Fig. 6, the calculation of each of the four imaging units 18C0 to 18C3 using the standard glass plate for correction will be described. The processing of the relative coordinates. Fig. 6 is a flowchart for explaining the processing of calculating the relative coordinates of the respective four imaging mechanisms 18C0 to 18C3. The following processing is performed by the image processing apparatus 12 (transport 146522.doc •10·201100744) The control unit executes the predetermined program read into the memory unit 12b, etc. As shown in Fig. 4 and Fig. 7, the four sides of the standard glass plate for correction are each long. 纟 Sizes El, E 2. The EF, the shape, and the perpendicularity Z1 to z4 of each of the four corners of the standard glass plate for the correction are measured in advance using a correction gauge such as a linear gauge (6) coffee (4), and are stored in the memory mechanism m or the like as shown in Table (10). The "perpendicularity of 0" refers to the difference between the inner corners of the four corners of the standard glass plate 36 for correcting at right angles, and the angle between the corners of the four corners of the standard glass plate 36 for correction. In the present embodiment, the angles of the four corners of the standard glass plate 36 for correction are used. The correction is made when the points on the standard glass plate 36 for correction of 1000 mm apart from each other are 1000 mm and the corners C1 to C4 of the four corners of the standard glass plate which are corrected at the right angles of each of the four corners are corrected by 1000 mm. The distance (mm) of the point on the standard glass plate is used as the verticality. Further, the standard glass plate for correction may be used when the inner corners of the four corners of the standard glass plate 36 for correction are at right angles to the inner corners of the hypothetical four corners. The difference (rad) of the inner corners (right angles) of each of the four corners of 36 is used as the verticality. [Table 1] Ε2 EF Ε1 ER Side length 2 EF Ε1 ER C1 C2 C3 C4 Verticality Ζ1 Ζ.2 Ζ3 Ζ4 However, these measured values itself In particular, the verticality 4) already includes 146522.doc -11 · 201100744 measurement error (offset error of the correction gauge). The measurement errors are offset each other so that the inner corners of the four corners of the standard glass plate 36 are corrected and become four right angles. The vertical degrees Z1 to Z4 are corrected (step S10). Specifically, the perpendicularities Z 1 to Z 4 are corrected in the manners shown in Tables 2, 1, and 3 below. [Table 2] C1 C2 C3 C4 Verticality Z1 Z2 Z3 Z4 丄丄>1 丄RAD R1# R2# R3# R4# 丄丄Ί*· sum=0 R1 R2 R3 R4 DWSn-Zn/1000 (where n=l~4)

Rn#—ATAN(DWSn) (where n=l~4) aR—(Rl#+R2#+R3#+R4#)/4.0 (where n=l~4)

Rn—Rn#-aR (where n=l~4) In Table 2, DWSn-Zn/1000 represents the distance between the perpendicularity Z1 to Z4 divided by the perpendicularity measurement point and the corners C1 to C4 of each of the four corners. 1 000 mm of the obtained / 1 / 1000 ~ / 4 / 1000, respectively substituted into the variable 0 \ ^ 81 ~ 0 Jia 84. Further, in Table 2, Rn#-ATAN (DWSn) indicates that the internal angles ATAN (DWS1 to DWS4) of the radians (RAD) of the corner portions C1 to C4 are substituted into the variables R1# to R4#, respectively. Further, in Table 2, aR-(Rl#+R2#+R3#+R4#)/4.0 indicates the inner angle ATAN (DWS1 to DWS4) which is radiant (RADized) of the above 146522.doc -12- 201100744. The average is substituted into the variable aR. Further, in Table 2, Rn_Rn#-aR indicates that the values obtained by subtracting the variable aR from the variables R1# to R4# are substituted into the variables R1 to R4, respectively. Thereby, even if the error is included in the measured value of the inner angle of the correction standard glass plate 36, the sum of the measured values of the inner angles of the standard glass plate for correction is not satisfied when R1#+R2#+R3#+R4# cannot be zero. R1+R2+R3+R4 will also become zero as described below.

Rl+R2+R3+R4=(Rl#-aR)+(R2#-aR) + (R3#-aR)+(R4#-aR)

=Rl#+R2#+R3#+R4#-4xaR =0 [number i]

Rl+R2+R3+R4=0 ...〇 Next, import the approximate relationship (R3+R4)*(EF+ER)/2= (E2-E1) ...© (Rl+R2)*(EF +ER)/2 and (E1-E2) (derived by Q) and 2) are defined as AR12 = 2*(E1-E2)/(EF+ER) If AR12 is used, then R3+R4=-AR12 Here, The value obtained by proportionally distributing R3+R4 is R3*=R3*(-AR12)/(R3+R4) where |R3+R4|>0.000001 R4*=R4*(-AR12)/(R3+R4) , |AR12|>0.000001 In addition to the condition, if R3*=R3, R4*=R4 is used, then R3*+R4*=(-AR12)= R3+R4 ... 2 is the same R1*=R1*(AR12) /(R1+R2) where |R1+R2|>0.000001 146522.doc •13· 201100744 R2* =R2*(AR12)/(R1+R2) and, |AR12|>0.000001 R1 * +R2* = (AR12) ^ R1+R2 That is, Rl*+R2*+R3*+R4* and Rl+R2+R3+R4=0 ...1 are satisfied. Thus, the Rn* is used as the approximate correction angle. [Table 3] C1 C2 C3 C4 sum=0 R1 R2 R3 R4 丄丄 丄 近似 Approximate correction angle R1* R2* R3* R4* AR12 = 2*(E1-E2)/(EF+ER)

Rn* =Rn*(AR12/(Rl+R2)) ...(n=l, 2)

Rm 氺=Rm*(-AR12/(R3+R4)) ."(m=3, 4) In the above processing, at least any of |R3+R4|>0.000001 or |AR12|>0.000001 is not satisfied. In the case of one, let R3* and R4* be zero. Further, when at least one of |R1+R2|>0.000001 or |AR12|>0.000001 is not satisfied, both R1* and R2* are made zero. The above processing is premised on making the correction standard glass plate 36 an approximately parallelogram, and the difference between the lengths of the opposite sides is the difference between the angles of the opposite sides of the side to be compared (180 degrees in the case of a perfectly parallelogram). Therefore, the length difference between the long sides and the length difference between the short sides are corrected by assigning the difference ratio to the value of the original angle and reflecting the difference in the side length to the perpendicularity. By this processing, the approximate correction angles R1* to R4* are calculated and stored in the memory 146522.doc -14-201100744 mechanism 12b. Next, the image processing device 12 controls the respective illumination mechanisms 16 to illuminate the four corners of the standard glass plate 36 for correction. At the same time, each of the image pickup units 18C0 to 18C3 is controlled to capture an image including the corner portions C1 to C4 of the four corners of the correction standard glass plate 36. Each of the illumination units 16 lights up according to the control from the image processing apparatus 12, and illuminates the four corners of the standard glass plate 36 for correction. Further, each of the image pickup units ❹ 18C0 to 18C3 captures images P1 to P4 including the corner portions ci to C4 of each of the four corners of the standard glass plate for correction 16 according to the control from the image processing device 12 (step S12). . Fig. 5 shows an example of images P1 to P4 captured by the respective image pickup mechanisms 18C0 to i8C3. The captured image 卩丨~ is loaded into the image processing apparatus 12. Next, based on the captured images p 1 to p4 , the image processing device 12 calculates the coordinates of the corners of the four corners of the standard glass plate 36 for correction, which are respectively spaced from the origin of the image, that is, the corner post coordinates (hereinafter referred to as CP). Coordinates cipx to C4PX, 〇C1PY to C4PY, and chamfer sizes (hereinafter referred to as CC sizes) C1LX to C4LX, C1LY to C4LY (steps S14 and S16). For example, 'specified image processing is performed on each of the images p 1 to P 4 , whereby each edge (horizontal edge EH, vertical edge EV, oblique edge EB) is detected as shown in FIG. 5, and horizontal·vertical is obtained. The intersection of the edge eh, EV and the inclined edge EB (step S14). Based on the intersections and the like, the cp coordinates C1PX to C4PX, C1PY to C4PY, and CC sizes C1LX to C4LX, C1LY to C4LY are calculated (step S16). Next, the image processing device 12 is based on the calculated standard glass 146522.doc -15-201100744, the CP coordinates C1PX to C4PX, C1PY to C4PY of the glass plate 36, and the standard glass plate for correction stored in the memory mechanism 12b. The four sides of 36 are respectively calculated by the pre-measured length dimensions El, E2, ER, EL, and the approximate correction angles Rl*, R2*, R3*, R4* stored in the memory mechanism 12b, and the four imaging mechanisms 18C0 to 18C3 are respectively operated. The relative coordinates S0 to S3 are stored in the memory mechanism 12b (step S18). Specifically, the relative coordinates S0 to S3 of the four imaging units 18C0 to 18C3 are calculated by the equations shown in Table 4 below. [Table 4] XY so E2+C2PX-C4PX+ER*Sin(Rl*) C2PY-C4PY+ER*Cos(Rl*) S1 E2+C2PX-C1PX C2PY-C1PY S2 C2PX-C3PX-EF*Sin(R2* C2PY-C3PY+ EF*Cos(R2*) S3 0 0 By the above processing, the relative coordinates S0 to S3 of the four imaging units 18C0 to 18C3 are calculated and stored in the memory unit 12b. Fig. 8 shows the relationship between the relative coordinates SO to S3, the approximate correction angles R1*, R2*, and the like of the four imaging mechanisms 18C0 to 18C3. [Method for measuring the shape of the working glass sheet] Next, a method of measuring the shape of the working glass sheet 34 conveyed by the shape measuring unit 32 by the shape measuring device 10 having the above configuration will be described with reference to Fig. 9 . Fig. 9 is a flow chart for explaining a method of measuring the outer shape of the working glass plate 34. The following processing is realized by image processing 146522.doc -16 · 201100744, and 12 (operation control means) performs the reading into the memory mechanism 12b or the like. Further, the memory unit 12b stores in advance the relative coordinates s 〇 s s3 of the four imaging unit ages (10). Further, as for the stored relative coordinates SG, as long as the image pickup mechanisms 18CG to 18C3 are arranged in the same configuration as before, the previously stored relative coordinates_3 can be read from the memory mechanism 12b and used. That is, as long as the imaging mechanisms 18CO to 18C3 are configured in the same configuration as before, the previously stored relative coordinates SG to S3 can be reused without having to perform the steps of the IS-first image processing device 12 every time. Whether or not the glass plate 34 has reached the measurement zone 32 (step S20). When the image processing apparatus 丨2 determines that the working glass plate 34 of the measurement target has reached the predetermined imaging position of the crotch region 32 (7) (v S20. YES), that is, the self-sensor 2 receives the detection signal. When the notification ' indicates that the end edge (edge) of the conveyance direction of the panel 34 is made, the illumination mechanism 16 is controlled to illuminate the four corners of the work glass plate 34 that reaches the measurement zone. At the same time, each control is controlled. The imaging mechanisms 18C0 to 18C3' capture images of the corners C1-C4 of the four corners of the working glass plate 34. Each of the illumination mechanisms 16 is illuminated according to control from the image processing device 2, and the working glass is illuminated. Further, each of the image pickup mechanisms 18C0 to 18C3 captures images pl to p4 including the corner portions C1 to C4 of the four corners of the work glass plate 34 in accordance with control from the image processing device 12 (Fig. 5). The images P1 to P4 are identical (step S22). The captured images p 1 to p4 are loaded into the image processing device u. Next, the image processing device 12 is based on the image. Like pl~p4, Yun 146522.doc 201100744 Calculating working glass plate 3 The cp coordinates clpx~c4px, clPy c4Py and CC size clLx~c4Lx of each of the four corners of the four corners (step, S26). For example, by performing image processing on each image 卩丨~1, and FIG. 5 In a different manner, each edge (horizontal edge eh, vertical edge EV, and oblique edge EB) is detected, and the intersection of the horizontal vertical edge eh and the oblique edge EB is obtained (step S24). Based on the intersections, etc. Cp coordinates clPx to c4Px, cipy to c4Py, and cc sizes clLx to c4Lx, clLy to c4Ly (step S26). The human image processing device 12 is based on the CP coordinates of the operated working glass plate 34, clPx~c4Px, ciPy. ～c4Py and the relative coordinates S0 to S3 stored in the memory unit 12b calculate the length dimensions E1, E2, ER, and EL of the four sides of the working glass plate, and store them in the memory unit i2b (step S28). Specifically, the respective length dimensions E1, E2, ER, and EL of the four sides of the working glass plate 34 are calculated by the following formula. 146522.doc -18- 201100744 [Number 2]

E2 = | EF = |. I -c2Px SIX clPx -y ~ + + C1»C2 1 -c2Py S1Y clPy =SQR[(clPx — c2Px + SIX)' 2 + (clPy - c2Py + S1Y)A 2] 1 - c2Px S2X c3Px -> = + + C2*C3 1 —c2Py S2Y c3Py =SQR[(c3Px - c2Px + S2X)A 2 + (c3Py - c2Py + S2 Υ)Λ 2] 1 -clPx [SOX-SIY] c4Px&quot ;l -> = + + C1*C4 1 -clPy S0Y-S1Y_ c4Pyj ER = -c2Px S2X c3Px tit = —ττ"> = + + 1 C2*C3 1 -c2Py S2Y c3Py =SQR[(c4Px - clPx + SOX - S1X)A 2 + (c4Py - clPy + SOY - S1Y)A 2] 1 { c4Px "S0X-S2X] -c3Px"l ϋΐ = —FT'rd > = + + 1 C3*C4 1 c4Py [ s〇Y-S2yJ -c3Py" =SQR[(c4Px - c3Px + SOX - S2X)A 2 + (c4Py - c3Py + SOY - S2Υ)Λ 2 By the above processing, the respective lengths of the four sides of the working glass plate 34 are calculated. The sizes El, Ε2, ER, EL are stored in the memory mechanism 12b. Next, the image processing device 12 is based on the calculated CP coordinates clPx~c4Px, clPy~c4Py, the target coordinates S0~S3 stored in the memory mechanism 12b, and the calculated length dimensions El, E2. ER, EL, and the respective vertical degrees Z 1 to Z4 of the four corners of the working glass plate 34 (step S28). Specifically, the inner angles rl to r4 of the radians (RAD) of the corner portions of the working glass plate 34 are calculated by the following formula, and the four corners of the working glass plate 34 are calculated based on the inner angles rl to r4. The respective vertical degrees Z1-Z4. 146522.doc -19- 201100744 [Number 3] rl = A cos C2«C1 C1*C4

E2*ER '(clPx - c2Px + SIX) * (c4Px - clPx + SOX - SIX) A cos

+ (clPy - c2Py + S1Y) * (c4Py - clPy + SOY - SIY) E2*ER Ζλ = r2 = A cos tan(7r/2-rl)*1000 Λ — +[ C2.C1 >* C3«C2

E2*EF '(clPx - c2Px + SIX) * (c2Px - c3Px - S2X) A cos

+ (clPy - c2Py + S1Y) * (c2Py - c3PyY - S2 Y) E2*EF Z2 = tan r3 = A cos (π/2-Γ2)*1000 C3.C4 C3*C2 A cos E1*EF (c4Px - c3Px + SOX - S2X)* (c2Px - c3Px - S2X) -(c4Py - c3Py + SOY - S2Y)* (c2Py - c3Py - S2Y) ei*ef Z3 = tan(7t/2 - r3) * 1000 C1*C4 R4 = A cos C3*C4

E1*ER (c4Px - c3Px + SOX - S2X) * (c4Px - clPx + SOX - SIX) ' A cos -(c4Py - c3Py + SOY - S2Y) * (c4Py - clPy + SOY - S1Y)

E2*ER Z4 = tan(7i/2 - r4)*1000 By the above processing, the respective perpendicularities Z 1 to Z 4 of the four corners of the working glass plate 34 are calculated and stored in the memory mechanism 12b. Next, the image processing device 12 compares the length dimensions El, E2, ER, EL and the perpendicularity Z1 to Z4 of the four sides of the calculated working glass plate 34 with a predetermined standard value (setting range). And based on the result of the comparison 146522.doc -20- 201100744, it is determined whether the calculated length dimension E1, E2, ER, el and vertical χΖΙ Z4 在 are within the standard value (set range), that is, the working glass plate 34 is Determining the pros and cons of the shape and shape (step s3〇) ^ Also, if the length scale of the operation is sneaked by ^ and the verticality is ~ in the standard value (set range) (step S30·· YES), then The image processing apparatus 12 returns to step S20' and then repeats the processing of steps S20 to S30 for the working glass sheet 34 that has reached the measurement area 32. That is, the shape measurement of each of the plurality of working glass sheets 34 (see Fig. 3) on the measurement line 3 is continuously performed. On the other hand, if the calculated length dimensions El, E2, ER, EL and the perpendicularity Z 1 to Z4 are not within the set range (step S3 〇: N 〇), the image processing apparatus 12 displays by using the display 22. Alert, etc., to inform this situation. As described above, according to the method for measuring the shape of the working glass sheet according to the present embodiment, it is not necessary to move the image pickup mechanisms 18C0 to 18C3 in the XY direction as before, and the crucible is configured to correspond to the four corners of the work glass plate 34 in advance. The imaging units 18C0 to 18C3 simultaneously (or substantially synchronously) capture images including the corner portions C1 to C4 of the four corners of the working glass plate 34, and calculate the working glass plate 34 based on the captured images pi to P4 and the like. The outer shape (the respective length dimensions of the four sides of the working glass plate 34 and the perpendicularity of each of the four corners of the rectangular plate) are (steps S20 to S28). Therefore, it is possible to continuously perform shape measurement on the plurality of working glass sheets 34 (see Fig. 3) conveyed on the measurement line 3A, thereby improving the yield. Further, according to the method for measuring the shape of the working glass sheet according to the present embodiment, the pre-measured (known) standard glass for correction can be used by using the respective length dimensions of the four sides and the perpendicularity of each of the four corners 146522.doc • 21-201100744. The plate 36 calculates the relative coordinates of the four imaging mechanisms 18C0 to 18C3 which are the basis of the calculation of the outer shape of the working glass plate 34 (the respective length dimensions of the four sides of the working glass plate 34 and the perpendicularity of each of the four corners). Further, the "method for measuring the shape of the working glass sheet according to the present embodiment" includes the step S10 of the perpendicularity measured in advance in the four corners of the standard glass plate 36 for correction, and therefore, the standard glass plate for correction is measured in advance. The length of each of the four sides of the 36 and the verticality of each of the four corners contain measurement errors. The measurement errors also cancel each other out. Therefore, the relative coordinates of the four imaging mechanisms 18c 〇 18C3 can be calculated with higher precision. Next, the modification will be described. In the above embodiment, the example in which the measurement target is the standard glass plate 36 for correction of the four corners shown in Fig. 5 or the operation glass plate 34 has been described, but the present invention is not limited thereto. For example, even if the standard glass plate 36 or the working glass plate 修正 for the correction of the four corners without the chamfer angle shown in FIG. 3 or the like is used, the CP coordinates C1PX to C4px, clpY to C4pY, and the image pickup mechanism 18C0 can be calculated in the same manner. ～18C3 respective relative coordinate training ～83, and then the length of each of the four sides of the working glass plate 34 E1 'E2, er, EL and the four corners of the working glass plate 34 respectively, and in the above embodiment, The example in which the measurement target is a glass plate subjected to a cutting step, a chamfering step, a cleaning and a drying step has been described, and the present invention is not limited thereto. For example, the glass plate before the cutting step, the glass plate after the cutting step and before the chamfering step, and the glass plate before the chamfering step and before the washing and drying step of 146522.doc -22-201100744 can be used as the measurement object. Further, in the above-described embodiment, an example in which the relative coordinates S0 to S3 of the four imaging units 18C to Cong are calculated by the processing of steps S10 to S18 has been described, but the present invention is not limited thereto. For example, if the relative coordinates of the four camera units 1 8C〇~1 are measured in advance, the pre-measured relative coordinates s〇~S3 may be used to measure the shape of the working glass plate 34 (steps) S2〇~幻幻)). Further, in the above-described embodiment 11, an example in which the rectangular plate member of the object is a glass plate has been described. However, the present invention is not limited thereto. It can also be applied to other rectangular plates such as wood boards, metal plates, and resin plates. The above embodiments are merely examples of the various aspects. The invention is not to be construed as limited by the disclosure. The present invention can be embodied in other various forms without departing from the spirit or essential characteristics thereof. The present application has been described in detail with reference to the specific embodiments thereof, and the invention may be modified or modified within the spirit and scope of the invention. This application is based on the patent application filed on February 18, 2009 (Japanese Patent Application 2009_035732), which is incorporated herein by reference. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a system configuration diagram of a shape measuring apparatus used in a method for measuring a shape of a rectangular plate outside the present embodiment. Fig. 2 is a view for explaining a general manufacturing procedure of a glass plate. Fig. 3 is a plan view showing the vicinity of the shape measurement area 3 2 on the measurement line 30. 146522.doc -23- 201100744 Fig. 4 is a view for explaining the positional relationship between the four sides and the corner portions of the correction standard glass plate 36 and the image pickup mechanisms 18C0 to 18C3. Fig. 5 is an image P1 to P42 imaged by each of the image pickup units 18C0 to 18C3. Fig. 6 is a flowchart for explaining processing for calculating the relative coordinates of each of the four image pickup units 18C to 18C3. Fig. 7 is a view for explaining the relationship between the respective lengths El, E2, ER, EL of the four sides of the standard glass plate 36 for correction and the perpendicularity to Z4 of the four corners of the standard glass plate 36 for correction. Fig. 8 is a view for explaining the relationship between the relative coordinates S0 to S3, the approximate correction angles R1*, R2*, and the like of the four imaging units 丨8c 〇 8C3. Fig. 9 is a flow chart for explaining a method of measuring the shape of the outer glass sheet 34. Fig. 10 is a front elevational view of the shape measuring device disclosed in Patent Document 1. Fig. 11 is a side view of the shape measuring device disclosed in Patent Document 1. [Description of main component symbols] 10 Shape measuring device 12 Image processing split 12a Calculation and control mechanism 12b Memory mechanism 14 Led power supply 16 Illumination mechanism 20 Sensor 30 Measuring line 146522.doc -24- 201100744 32 Measuring area 34a End edge 36 Correction standard glass plate Cl ~ C4 corner

146522.doc 25-

Claims (1)

201100744 VII. Patent application scope··1: A method for measuring the shape and shape of a rectangular plate, which is a shape of a rectangular plate that is conveyed by a shape measuring device, and which has a shape The cymbal device includes four imaging mechanisms arranged in advance corresponding to the rectangular plate angle, and a memory mechanism for storing the relative coordinates of each of the four imaging mechanisms; the measuring method is characterized by the following steps: determining whether the rectangular plate is The measurement area has been reached; when it is determined that the rectangular plate has reached the measurement area, the four imaging mechanisms are used to capture the corners of the four corners of the plate including the moment that has reached the measurement area. The image of the portion; calculating the coordinate value of the four corners of the rectangular plate from the origin of the image, that is, the corner post coordinate; according to the angular column coordinate of the calculated rectangular plate Calculating a relative coordinate stored in the memory mechanism, calculating a length dimension of each of four sides of the rectangular plate; and Calculation of the coordinates by corner posts, stored in said memory means in the relative coordinates, and said calculating of the length by the computation of the four corners of the rectangular plate-shaped respective verticality. 2. The method for measuring a shape of a rectangular plate according to claim 1, further comprising the steps of: comparing the calculated length dimension and the perpendicularity with a predetermined standard value; and determining the above according to the comparison result. The shape of the rectangular plate is 146522.doc 201100744. The method for measuring the shape of the rectangular plate outside the month 1 or 2 further includes the following steps: pre-measuring the four sides of the standard rectangular plate for correction. The four corners of the standard rectangular plate are corrected by the pre-measured Fanu Lju-r-, and the four corners of the rectangular plate are respectively measured by the pre-measured verticality; with the above four camera mechanisms, the shooting includes the above Correcting an image of each corner of each of the four corners of the standard rectangular plate; and calculating an angular column coordinate of each of the four corners of the standard rectangular plate for correction according to the image taken as described above; and 4. Correcting the relative coordinates of the four imaging mechanisms by using the square length coordinates of the standard rectangular plate, the corrected verticality, and the four sides of the standard rectangular plate for correction, respectively, and Stored in the above memory mechanism. A method for correcting a relative position of an imaging mechanism, wherein the relative coordinate of four imaging mechanisms in the shape determining device includes the four imaging mechanisms arranged in advance corresponding to four corners of a rectangular plate. The correction method is characterized in that the method comprises the steps of: correcting the rectangle according to the length dimension of each of the four sides of the standard rectangular plate for correction and the four corners of the standard rectangular plate for correction. The angles of the four corners of the plate are measured first; and the images of the corners of the four corners of the plate for the correction of the standard moment 146522.doc 201100744 are imaged by using the above four imaging mechanisms; For example, calculating the corner post coordinates of each of the four corners of the standard rectangular plate for correction; and the corner post coordinates of the standard rectangular plate for correction according to the above operation, the corrected verticality, and the standard rectangular plate for the correction The four sides of the object are calculated by the pre-measured length dimension Respective configuration relative coordinates. Ο 〇 146522.doc