JP5995658B2 - Vibration noise correcting apparatus and method for optical inspection system - Google Patents
Vibration noise correcting apparatus and method for optical inspection system Download PDFInfo
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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Description
本発明は、光学検査技術に関するものであり、より詳しくは、振動ノイズによる誤検知を防ぐことができる、光学検査システム用振動ノイズ補正装置及び方法に関するものである。 The present invention relates to an optical inspection technique, and more particularly to a vibration noise correcting apparatus and method for an optical inspection system that can prevent erroneous detection due to vibration noise.
光学検査システムとは、例えば、印刷回路基板、偏光フィルム、光学フィルム、位相差フィルム、離型フィルムなど、各種シート状製品の外観をカメラで撮影し、撮影された映像に基づき該当製品の欠陥、埃、異物、及びムラなどの不良があるか否かを検出するシステムのことである。 Optical inspection system is, for example, the appearance of various sheet-like products such as printed circuit boards, polarizing films, optical films, retardation films, release films, etc., and the defects of the corresponding products based on the captured images, It is a system that detects whether there are defects such as dust, foreign matter, and unevenness.
シート状製品は、一般的にロール・ツー・ロール（Roll-to-Roll）方式によって移動されることになるが、この時、モータの周期的な振動又は外部衝撃による不規則的な振動が生じることが有り得る。この場合、振動ノイズによって、光学検査システムで誤検知が発生するようになる。 Sheet products are generally moved by a roll-to-roll method, but at this time, periodic vibrations of the motor or irregular vibrations due to external impacts occur. There is a possibility. In this case, erroneous detection occurs in the optical inspection system due to vibration noise.
例えば、偏光フィルムの場合、製造過程において染料の不均一な染着や、接着不良などによって偏光フィルムの延伸方向に筋状のムラが発生することがあるが、ムラが発生した偏光フィルムを光学カメラで撮影すると、撮影された映像はムラの発生した部分に明度のばらつきが発生するようになる。 For example, in the case of a polarizing film, streaky unevenness may occur in the stretching direction of the polarizing film due to non-uniform dyeing or poor adhesion during the manufacturing process. When the image is taken with, brightness variation occurs in a portion where unevenness occurs in the photographed image.
しかしながら、検査過程で振動ノイズが発生した場合にも、撮影された映像に明度のばらつきが発生するようになる。即ち、図１に示すように、偏光フィルムの移動中に振動ノイズが発生すると、撮影された映像の中で振動ノイズが発生した部分に明度のばらつきが示されることを確認できる。ここで、Ｍ／Ｄ方向とは、偏光フィルムの移動方向を示すものである。この場合、明度のばらつきがムラによって発生したものか、或いは振動ノイズによって発生したものかの判断が難しくなり、誤検知が発生することになる。従って、検査過程中に振動ノイズが発生した時、振動ノイズによる誤検知を防止できる手段が求められている。 However, even when vibration noise occurs in the inspection process, variations in brightness occur in the captured image. That is, as shown in FIG. 1, when vibration noise is generated during the movement of the polarizing film, it can be confirmed that a variation in brightness is shown in the portion where the vibration noise is generated in the captured image. Here, the M / D direction indicates the moving direction of the polarizing film. In this case, it is difficult to determine whether the variation in brightness is caused by unevenness or caused by vibration noise, and erroneous detection occurs. Therefore, there is a need for means that can prevent erroneous detection due to vibration noise when vibration noise occurs during the inspection process.
本発明は、振動ノイズによる誤検知を防止できる光学検査システム用振動ノイズ補正装置及び方法を提供することにその目的がある。 An object of the present invention is to provide a vibration noise correction apparatus and method for an optical inspection system that can prevent erroneous detection due to vibration noise.
１．本発明の一実施形態による光学検査システム用振動ノイズ補正装置は、被検査物に一定の明度で光を照射する第１の照明部と、前記被検査物に振動ノイズが発生した場合、前記被検査物に前記第１の照明部と同一の明度で光を照射できるよう設置された第２の照明部と、前記第１の照明部及び第２の照明部を一定速度で交互にオン（ON）／オフ（OFF）させる照明制御部と、前記第１の照明部及び第２の照明部が照らす前記被検査物の第１の画像及び第２の画像を取得する撮影部と、前記被検査物に振動ノイズが発生した場合、前記第１の画像を前記第２の画像に差し替える映像処理部とを備える。 1. A vibration noise correcting apparatus for an optical inspection system according to an embodiment of the present invention includes: a first illumination unit that irradiates light with a constant brightness on an object to be inspected; and when vibration noise is generated on the object to be inspected. The second illumination unit installed to irradiate the inspection object with light having the same brightness as the first illumination unit, and the first illumination unit and the second illumination unit are alternately turned on at a constant speed (ON ) / OFF (illumination control unit), imaging unit for acquiring the first and second images of the inspected object illuminated by the first illumination unit and the second illumination unit, and the inspected object And a video processing unit that replaces the first image with the second image when vibration noise is generated in the object.
２．前記項目１において、前記映像処理部は、前記第１の画像に示された欠陥の欠陥幅が既設定された欠陥幅を超過するという条件、及び前記第１の画像に示された欠陥の欠陥長さが既設定された欠陥長さ未満であるという条件のうち、少なくとも一つの条件を満たす場合、前記被検査物に前記振動ノイズが発生したと判断する。 2. In the item 1, the video processing unit has a condition that a defect width of the defect shown in the first image exceeds a preset defect width, and a defect defect shown in the first image. If at least one of the conditions that the length is less than the preset defect length is satisfied, it is determined that the vibration noise has occurred in the inspection object.
３．前記項目１において、前記撮影部は、前記第１の照明部が照らす前記被検査物の第１の画像を取得する第１の撮影部、及び前記第２の照明部が照らす前記被検査物の第２の画像を取得する第２の撮影部を備える。 3. In the item 1, the imaging unit includes a first imaging unit that acquires a first image of the inspection object illuminated by the first illumination unit, and an inspection object illuminated by the second illumination unit. A second imaging unit that acquires a second image is provided.
４．前記項目１において、前記光学検査システム用振動ノイズ補正装置は、前記第１の照明部及び第２の照明部の照度値を測定する照度測定部をさらに備える。 4). In the item 1, the vibration noise correcting apparatus for an optical inspection system further includes an illuminance measurement unit that measures illuminance values of the first illumination unit and the second illumination unit.
５．前記照明制御部は、前記照度測定部の照度値の測定の結果、前記第１の照明部及び第２の照明部の照度値が初期照度値と異なる場合、前記第１の照明部及び第２の照明部の照度値を前記初期照度値に維持させる。 5. When the illuminance value of the first illuminating unit and the second illuminating unit is different from the initial illuminance value as a result of the measurement of the illuminance value of the illuminance measuring unit, the illumination control unit The illuminance value of the illumination unit is maintained at the initial illuminance value.
６．本発明の一実施形態による光学検査システム用振動ノイズ補正方法は、照明制御部が第１の照明部及び第２の照明部を一定速度で交互にオン（ON）／オフ（OFF）させる段階と、撮影部が前記第１の照明部及び第２の照明部が照らす被検査物の第１の画像及び第２の画像を取得する段階と、前記被検査物に振動ノイズが発生した場合、映像処理部が前記第１の画像を前記第２の画像に差し替える段階とを備えるものであり、前記第２の照明部は、前記振動ノイズが発生した場合、前記被検査物に前記第１の照明部と同一明度で光を照射できるよう設置される。 6). The vibration noise correcting method for an optical inspection system according to an embodiment of the present invention includes a step in which an illumination control unit alternately turns on (OFF) a first illumination unit and a second illumination unit at a constant speed. A step in which the imaging unit acquires the first image and the second image of the inspection object illuminated by the first illumination unit and the second illumination unit, and when vibration noise occurs in the inspection object, a video A processing unit that replaces the first image with the second image, and the second illumination unit has the first illumination on the inspection object when the vibration noise occurs. It is installed so that it can irradiate light with the same brightness.
７．前記項目６において、前記第１の画像を前記第２の画像に差し替える段階は、前記映像処理部が前記被検査物に振動ノイズが発生したか否かを判断する段階を備えるものであり、前記映像処理部は、前記第１の画像に示された欠陥の欠陥幅が既設定された欠陥幅を超過するという条件、及び前記第１の画像に示された欠陥の欠陥長さが既設定された欠陥長さ未満であるという条件のうち、少なくとも一つの条件を満たす場合、前記被検査物に前記振動ノイズが発生したと判断する。 7). In the item 6, the step of replacing the first image with the second image includes a step in which the video processing unit determines whether vibration noise has occurred in the inspection object, The video processing unit is preset with a condition that a defect width of the defect shown in the first image exceeds a preset defect width, and a defect length of the defect shown in the first image. If at least one condition is satisfied among the conditions that the defect length is less than the defect length, it is determined that the vibration noise has occurred in the inspection object.
８．前記項目６において、前記第１の照明部及び第２の照明部を一定速度で交互にオン（ON）／オフ（OFF）させる段階以後に、照度測定部が前記第１の照明部及び第２の照明部の照度値を測定する段階と、前記第１の照明部及び第２の照明部の測定された照度値が初期照度値と異なる場合、前記照明制御部が前記第１の照明部及び第２の照明部の照度値を前記初期照度値で維持させる段階とをさらに備える。 8). In the item 6, after the step of alternately turning on (ON) / off (OFF) the first illumination unit and the second illumination unit at a constant speed, the illuminance measurement unit performs the first illumination unit and the second illumination unit. Measuring the illuminance value of the illuminating unit, and when the measured illuminance values of the first illuminating unit and the second illuminating unit are different from the initial illuminance value, the illumination control unit includes the first illuminating unit and Maintaining the illuminance value of the second illumination unit at the initial illuminance value.
本発明によると、検査過程中に振動ノイズが発生した場合、振動ノイズによる明度のばらつきが示された被検査物の第１の画像の代わりに、振動ノイズによる明度のばらつきが示されていない被検査物の第２の画像に差し替えて検査を遂行することによって、振動ノイズによる誤検知を防ぐことができるようになる。これによって、光学検査システムの信頼性及び正確性を向上させることができるようになる。 According to the present invention, when vibration noise occurs during the inspection process, instead of the first image of the inspected object in which the variation in brightness due to the vibration noise is shown, the variation in brightness due to the vibration noise is not shown. By performing the inspection by replacing the second image of the inspection object, erroneous detection due to vibration noise can be prevented. As a result, the reliability and accuracy of the optical inspection system can be improved.
以下、図２乃至図４を参照して、本発明の光学検査システム用振動ノイズ補正装置及び方法の具体的な実施形態を説明する。しかしながら、これらは例示としての実施形態に過ぎず、本発明はこれらに制限されるものではない。 A specific embodiment of the vibration noise correcting apparatus and method for an optical inspection system of the present invention will be described below with reference to FIGS. However, these are merely exemplary embodiments, and the present invention is not limited thereto.
本発明の説明にあたって、本発明に関わる公知技術に関する具体的な説明が、本発明の要旨を不要に逸脱し得ると判断される場合は、その詳細な説明を省略する。そして後述する用語は、本発明における機能を考慮して定義された用語であり、これは使用者、運用者の意図、又は慣例などによって変わり得る。従って、その定義は本明細書の全般にわたって記載された内容に基づいて定義されるべきである。 In the description of the present invention, when it is determined that a specific description related to a known technique related to the present invention can deviate from the gist of the present invention unnecessarily, a detailed description thereof will be omitted. The terms described later are terms defined in consideration of the functions in the present invention, and may vary depending on the user, the intention of the operator, the custom, and the like. Therefore, the definition should be defined based on the contents described throughout the specification.
本発明の技術的思想は、特許請求の範囲の記載により決められ、以下の実施形態は、進歩的な本発明の技術的思想を、本発明が属する技術分野における通常の知識を有する者に対して効率的に説明するための一手段に過ぎない。 The technical idea of the present invention is determined by the description of the scope of claims, and the following embodiments are intended for those who have ordinary knowledge in the technical field to which the present invention belongs. It is only a means to explain efficiently.
図２は、本発明の一実施形態による光学検査システム用振動ノイズ補正装置の概略的な構成を示した図である。 FIG. 2 is a diagram showing a schematic configuration of a vibration noise correcting apparatus for an optical inspection system according to an embodiment of the present invention.
図２を参照すると、振動ノイズ補正装置１００は、第１の照明部１０２、第２の照明部１０４、照明制御部１０６、撮影部１０８、映像処理部１１０、及び照度測定部１１２を備える。 Referring to FIG. 2, the vibration noise correction apparatus 100 includes a first illumination unit 102, a second illumination unit 104, an illumination control unit 106, an imaging unit 108, a video processing unit 110, and an illuminance measurement unit 112.
第１の照明部１０２は、照明制御部１０６によってオン（ON）又はオフ（OFF）動作が制御される。ここで、第１の照明部１０２による照明を通じて撮影部１０８が取得した映像を、第１の画像という。 The first illumination unit 102 is controlled to be turned on (ON) or off (OFF) by the illumination control unit 106. Here, the video acquired by the imaging unit 108 through illumination by the first illumination unit 102 is referred to as a first image.
第２の照明部１０４は、照明制御部１０６によってオン（ON）又はオフ（OFF）動作が制御される。この時、第２の照明部１０４は、第１の照明部１０２と交互にオン（ON）又はオフ（OFF）にされる。即ち、第２の照明部１０４は、第１の照明部１０２がオン（ON）になればオフ（OFF）になり、第１の照明部１０２がオフ（OFF）になればオン（ON）になる。 The second lighting unit 104 is controlled to be turned on (ON) or off (OFF) by the lighting control unit 106. At this time, the second illumination unit 104 is turned on (ON) or off (OFF) alternately with the first illumination unit 102. That is, the second lighting unit 104 is turned off when the first lighting unit 102 is turned on, and is turned on when the first lighting unit 102 is turned off. Become.
ここで、第２の照明部１０４による照明を通じて撮影部１０８が取得した映像を、第２の画像という。この時、第２の照明部１０４は振動ノイズが発生した場合、第２の画像の明度レベルが第１の画像の明度レベルと同一になる位置及び角度に予め調節され設置される。 Here, the video acquired by the imaging unit 108 through illumination by the second illumination unit 104 is referred to as a second image. At this time, when vibration noise is generated, the second illumination unit 104 is adjusted and installed in advance at a position and an angle at which the brightness level of the second image becomes the same as the brightness level of the first image.
具体的には、正常状態で第１の照明部１０２による照明が照らす地点を第１の検査地点とし、振動ノイズが発生した状態で第２の照明部１０４による照明が照らす地点を第２の検査地点とするならば、第２の検査地点で撮影部１０８によって取得した第２の画像の明度レベルが、第１の検査地点で撮影部１０８によって取得した第１の画像の明度レベルと同一になるように、第２の照明部１０４の位置及び角度を予め調節し設置する。換言すれば、第２の照明部１０４は振動ノイズが発生した場合、シート状製品１５０に第１の照明部１０２と同一明度で光を照射できるように予め調節され設置される。 Specifically, the point where the illumination by the first illumination unit 102 illuminates in the normal state is the first inspection point, and the point where the illumination by the second illumination unit 104 illuminates in the state where vibration noise is generated is the second inspection. In this case, the brightness level of the second image acquired by the imaging unit 108 at the second inspection point is the same as the brightness level of the first image acquired by the imaging unit 108 at the first inspection point. As described above, the position and angle of the second illumination unit 104 are adjusted and installed in advance. In other words, the second illumination unit 104 is adjusted and installed in advance so that when vibration noise occurs, the sheet-like product 150 can be irradiated with light with the same brightness as the first illumination unit 102.
第１の検査地点と第２の検査地点とは、例えば、数μｍ程度の差しか存在しないが、同一の照明を通じて第１の検査地点と第２の検査地点とで取得した映像では明度のばらつきが発生し、該当の明度のばらつきがシート状製品１５０の欠陥によるものか、或いは振動ノイズによるものかが区別し難くなる。 The first inspection point and the second inspection point, for example, have a difference of about several μm, for example, but in the image acquired at the first inspection point and the second inspection point through the same illumination, the brightness varies. And it becomes difficult to distinguish whether the variation in brightness is due to defects in the sheet-like product 150 or due to vibration noise.
ここで、本発明の実施形態では、第２の検査地点で取得した第２の画像の明度レベルが、第１の検査地点で取得した第１の画像の明度レベルと同一になるように、第２の照明部１０４の位置及び角度を予め調節することによって、シート状製品１５０の欠陥検査の途中に振動ノイズが発生したとしても、撮影部１０８が正常状態と同一の明度レベルの第２の画像を取得することができるようになる。この場合、第２の画像には振動ノイズによる明度のばらつきは発生しなくなり、シート状製品１５０の欠陥による明度のばらつきのみが示されるため、振動ノイズによる誤検知を防ぐことができるようになる。これに対する詳しい説明は後述する。 Here, in the embodiment of the present invention, the brightness level of the second image acquired at the second inspection point is the same as the brightness level of the first image acquired at the first inspection point. By adjusting the position and angle of the second illumination unit 104 in advance, even if vibration noise occurs during the defect inspection of the sheet-like product 150, the second image having the same brightness level as that in the normal state is obtained by the imaging unit 108. Will be able to get. In this case, variation in brightness due to vibration noise does not occur in the second image, and only variation in brightness due to defects in the sheet-like product 150 is shown, so that erroneous detection due to vibration noise can be prevented. A detailed description thereof will be described later.
照明制御部１０６は、第１の照明部１０２及び第２の照明部１０４のオン（ON）又はオフ（OFF）の動作を制御する。この時、照明制御部１０６は、一定速度（例えば、秒当たり４０Ｈｚ）で第１の照明部１０２及び第２の照明部１０４を交互にオン（ON）又はオフ（OFF）させる。即ち、照明制御部１０６は、一定速度で第１の照明部１０２をオン（ON）及び第２の照明部１０４をオフ（OFF）させた後、第１の照明部１０２をオフ（OFF）とし、且つ第２の照明部１０４をオン（ON）とする操作を繰り返し遂行する。 The illumination control unit 106 controls the ON (ON) or OFF (OFF) operation of the first illumination unit 102 and the second illumination unit 104. At this time, the illumination control unit 106 alternately turns on (OFF) the first illumination unit 102 and the second illumination unit 104 at a constant speed (for example, 40 Hz per second). That is, the lighting control unit 106 turns on the first lighting unit 102 and turns off the second lighting unit 104 at a constant speed, and then turns off the first lighting unit 102. In addition, an operation of turning on the second lighting unit 104 is repeatedly performed.
また、照明制御部１０６は、照度測定部１１２の測定結果によって第１の照明部１０２及び第２の照明部１０４の出力を調節し、第１の照明部１０２及び第２の照明部１０４の照度値が一定になるように維持させる。 Further, the illumination control unit 106 adjusts the outputs of the first illumination unit 102 and the second illumination unit 104 according to the measurement result of the illuminance measurement unit 112, and the illuminance of the first illumination unit 102 and the second illumination unit 104. Keep the value constant.
撮影部１０８は、コンベアなどの移動手段によって移動するシート状製品１５０を撮影する。その時、撮影部１０８は、第１の照明部１０２の照明による第１の画像、及び第２の照明部１０４の照明による第２の画像を交互に連続して取得することになる。ここで、シート状製品１５０の欠陥検査の途中に振動ノイズが発生した場合、第１の画像には振動ノイズによる明度のばらつきが示されることになるが、第２の画像には振動ノイズによる明度のばらつきが示されなくなる。 The photographing unit 108 photographs the sheet-like product 150 that is moved by moving means such as a conveyor. At that time, the photographing unit 108 alternately and continuously acquires the first image by the illumination of the first illumination unit 102 and the second image by the illumination of the second illumination unit 104. Here, when vibration noise occurs during the defect inspection of the sheet-like product 150, the first image shows a variation in lightness due to vibration noise, but the second image has lightness due to vibration noise. The variation of is no longer shown.
映像処理部１１０は、第１の画像を通じて振動ノイズの発生有無を判断することができる。この時、映像処理部１１０は振動ノイズの発生状態によって、第１の画像又は第２の画像を検査用映像として使用する。 The video processing unit 110 can determine whether vibration noise is generated through the first image. At this time, the video processing unit 110 uses the first image or the second image as an inspection video depending on the generation state of vibration noise.
例えば、映像処理部１１０は、図３に示すように、第１の画像に示された欠陥１５１の欠陥幅ｄｘが既設定された欠陥幅ｋ１を超過するか否かを確認し、振動ノイズの発生有無を判断することができる。一般的に、振動ノイズによって第１の画像に示される欠陥（即ち、明度のばらつき）は、実際シート状製品のムラによる欠陥より第１の画像の幅方向で長く示されるようになる。従って、映像処理部１１０は、第１の画像に示された欠陥１５１の欠陥幅ｄｘが既設定された欠陥幅ｋ１を超過すれば、振動ノイズが発生したものと判断する。 For example, as shown in FIG. 3, the video processing unit 110 confirms whether or not the defect width dx of the defect 151 shown in the first image exceeds the preset defect width k1, and generates vibration noise. It can be determined whether or not it occurs. In general, a defect (that is, variation in brightness) shown in the first image due to vibration noise becomes longer in the width direction of the first image than a defect caused by unevenness of the actual sheet-like product. Accordingly, if the defect width dx of the defect 151 shown in the first image exceeds the preset defect width k1, the video processing unit 110 determines that vibration noise has occurred.
映像処理部１１０は、振動ノイズの発生有無をより正確に判別するため、第１の画像に示された欠陥１５１の欠陥長さｄｙが、既設定された欠陥長さｋ２より短いか否かをさらに確認することができる。一般的に、振動ノイズによって第１の画像に示される欠陥（即ち、明度のばらつき）は、実際シート状製品のムラによる欠陥より第１の画像の長さ方向で短く示されるようになる。従って、映像処理部１１０は、第１の画像に示された欠陥１５１の欠陥長さｄｙが既設定された欠陥長さｋ２より短い場合、振動ノイズが発生したものと判断する。 The image processing unit 110 determines whether or not the defect length dy of the defect 151 shown in the first image is shorter than the preset defect length k2 in order to more accurately determine whether or not vibration noise is generated. Further confirmation can be made. In general, a defect (that is, variation in brightness) shown in the first image due to vibration noise is shown to be shorter in the length direction of the first image than a defect caused by unevenness of the actual sheet-like product. Accordingly, when the defect length dy of the defect 151 shown in the first image is shorter than the preset defect length k2, the video processing unit 110 determines that vibration noise has occurred.
ここでは、（１）第１の画像に示された欠陥の欠陥幅ｄｘ＞既設定された欠陥幅ｋ１、及び（２）第１の画像に示された欠陥の欠陥長さｄｙ＜既設定された欠陥長さｋ２、の二つの条件を満たす場合、振動ノイズが発生したと判断したが、これに限定されるものではなく、（１）の条件及び（２）の条件のうち、少なくとも一つを満たす場合は、振動ノイズが発生したものと判断することもできる。 Here, (1) the defect width dx of the defect shown in the first image> the preset defect width k1, and (2) the defect length dy <shown in the first image <the preset However, the present invention is not limited to this, but at least one of the conditions (1) and (2) is satisfied. If the condition is satisfied, it can be determined that vibration noise has occurred.
映像処理部１１０は、振動ノイズが発生した場合、第１の画像を第２の画像に差し替え、検査用映像として使用することができる。ここで、第２の照明部１０４の位置及び角度は予め調節されているため、第２の画像の明度レベルは第１の画像の明度レベルと同一になる。このように、振動ノイズが発生した時、第１の画像を第２の画像に差し替えれば、振動ノイズによる明度のばらつきは示されず、シート状製品１５０の欠陥による明度のばらつきのみが示される検査用映像を得ることができるようになる。 When vibration noise occurs, the video processing unit 110 can replace the first image with the second image and use it as an inspection video. Here, since the position and angle of the second illumination unit 104 are adjusted in advance, the brightness level of the second image is the same as the brightness level of the first image. Thus, when vibration noise occurs, if the first image is replaced with the second image, the brightness variation due to the vibration noise is not shown, but only the brightness variation due to the defect of the sheet-like product 150 is shown. You will be able to get a video.
例えば、コンベアベルトを駆動させるモータにより周期的に振動ノイズが発生する場合、映像処理部１１０は振動ノイズの発生周期によって、第１の画像と第２の画像とを周期的に結合し、検査用映像として使用することができる。そして、振動ノイズが非周期的に発生する場合、映像処理部１１０は第１の画像を基本映像とし、振動ノイズが発生した部分のみを第２の画像に差し替えて検査用映像として使用することができる。 For example, when vibration noise is periodically generated by a motor that drives the conveyor belt, the video processing unit 110 periodically combines the first image and the second image according to the generation period of the vibration noise, for inspection. Can be used as a picture. When vibration noise is generated aperiodically, the video processing unit 110 may use the first image as a basic image and replace only the portion where the vibration noise is generated with the second image as an inspection image. it can.
ここで、照明制御部１０６は、例えば、秒当たり４０Ｈｚの速い速度で第１の照明部１０２及び第２の照明部１０４を交互にオン（ON）又はオフ（OFF）させるため、第１の画像及び第２の画像は連続的に撮影されることになり、一定時点で撮影された第１の画像と第２の画像とは、殆ど差が生じなくなる。従って、振動ノイズが発生した部分で第１の画像の代わりに第２の画像を差し替えて検査用映像として使用することを阻止しない。 Here, the illumination control unit 106 turns on the first illumination unit 102 and the second illumination unit 104 alternately at a high speed of 40 Hz per second, for example, so that the first image is turned on. The second image is taken continuously, and there is almost no difference between the first image and the second image taken at a certain time. Therefore, it is not prevented that the second image is replaced in place of the first image and used as an inspection image in a portion where vibration noise is generated.
一方、本明細書では、撮影部１０８が第１の画像と第２の画像との両方を取得すると説明したが、これに限定されるものではなく、第１の撮影部が第１の照明部１０２による照明を通じて第１の画像を取得し、第２の撮影部が第２の照明部１０４による照明を通じて第２の画像を取得するように具現することもできる。 On the other hand, in the present specification, it has been described that the photographing unit 108 acquires both the first image and the second image. However, the present invention is not limited to this, and the first photographing unit is the first illumination unit. The first image may be acquired through illumination by the 102, and the second imaging unit may be implemented to acquire the second image through illumination by the second illumination unit 104.
また、本明細書では、映像処理部１１０が第１の画像を通じて振動ノイズが発生したか否かを判断すると説明したが、これに限定されるものではなく、別途の構成を通じて振動ノイズの発生有無を判断することもできる。例えば、別途の振動センサーを通じて振動ノイズの発生有無を判断することもできる。 Further, in the present specification, it has been described that the video processing unit 110 determines whether or not vibration noise is generated through the first image. However, the present invention is not limited to this, and whether or not vibration noise is generated through a separate configuration. Can also be judged. For example, it is possible to determine whether vibration noise is generated through a separate vibration sensor.
照度測定部１１２は、第１の照明部１０２及び第２の照明部１０４の照度値を測定して照明制御部１０６に伝達する。これは第１の照明部１０２及び第２の照明部１０４の照度値を同一に維持させるためのものであり、第１の照明部１０２及び第２の照明部１０４の照度値が初期照度値と異なる場合、照明制御部１０６は第１の照明部１０２及び第２の照明部１０４の出力を調節し、第１の照明部１０２及び第２の照明部１０４の照度値が初期照度値を維持するようにする。 The illuminance measurement unit 112 measures the illuminance values of the first illumination unit 102 and the second illumination unit 104 and transmits them to the illumination control unit 106. This is to keep the illuminance values of the first illumination unit 102 and the second illumination unit 104 the same, and the illuminance values of the first illumination unit 102 and the second illumination unit 104 are the same as the initial illuminance value. If they are different, the illumination control unit 106 adjusts the outputs of the first illumination unit 102 and the second illumination unit 104, and the illuminance values of the first illumination unit 102 and the second illumination unit 104 maintain the initial illuminance value. Like that.
第１の照明部１０２及び第２の照明部１０４は、外部操作又は該当ランプの寿命などの問題によって初期照度値を逸脱し得る。従って、照度測定部１１２で第１の照明部１０２及び第２の照明部１０４の照度値をリアルタイムで測定することによって、第１の照明部１０２及び第２の照明部１０４の照度値を一定に維持させてくれる。 The first illuminating unit 102 and the second illuminating unit 104 may deviate from the initial illuminance value due to problems such as external operation or the lifetime of the lamp. Therefore, by measuring the illuminance values of the first illumination unit 102 and the second illumination unit 104 in real time by the illuminance measurement unit 112, the illuminance values of the first illumination unit 102 and the second illumination unit 104 are made constant. Let me maintain.
表１は、本発明の一実施形態による光学検査システム用振動ノイズ補正装置で、振動発生有無による検査地点、照明状態、及び検査用映像を示した表である。 Table 1 is a table showing an inspection point, an illumination state, and an inspection image according to presence or absence of vibration in the vibration noise correcting apparatus for an optical inspection system according to an embodiment of the present invention.
表１を参照すると、正常状態では、第１の検査地点で第１の照明部１０２による照明で取得した第１の画像が検査用映像として使用され、振動ノイズ状態では第２の検査地点で第２の照明部１０４による照明で取得した第２の画像が検査用映像として使用されることが確認できる。 Referring to Table 1, in the normal state, the first image acquired by the illumination by the first illumination unit 102 at the first inspection point is used as the inspection image, and in the vibration noise state, the first image is obtained at the second inspection point. It can be confirmed that the second image acquired by the illumination by the second illumination unit 104 is used as the inspection video.
図４は、本発明の一実施形態による光学検査システム用振動ノイズ補正方法を示したフローチャートである。 FIG. 4 is a flowchart illustrating a vibration noise correcting method for an optical inspection system according to an embodiment of the present invention.
図４を参照すると、第１の照明部１０２を設置した後、振動ノイズが発生した時、シート状製品１５０に第１の照明部１０２と同一明度で光を照射するように、第２の照明部１０４を設置する（段階Ｓ１０１）。 Referring to FIG. 4, after the first illumination unit 102 is installed, the second illumination is performed so that when vibration noise occurs, the sheet-like product 150 is irradiated with light with the same brightness as the first illumination unit 102. The unit 104 is installed (step S101).
次に、照明制御部１０６が一定速度で第１の照明部１０２及び第２の照明部１０４を交互にオン（ON）又はオフ（OFF）させる（段階Ｓ１０３）。 Next, the illumination control unit 106 turns on (ON) or off (OFF) the first illumination unit 102 and the second illumination unit 104 alternately at a constant speed (step S103).
次に、撮影部１０８が第１の照明部１０２及び第２の照明部１０４の照らす、シート状製品１５０の第１の画像及び第２の画像を取得する（段階Ｓ１０５）。 Next, the imaging unit 108 acquires a first image and a second image of the sheet-like product 150 illuminated by the first illumination unit 102 and the second illumination unit 104 (step S105).
次に、映像処理部１１０が、第１の画像を通じて振動ノイズの発生有無を判断する（段階Ｓ１０７）。第１の画像において、振動ノイズによる明度のばらつきはシート状製品１５０の実際の欠陥による明度のばらつきとは異なるパターンを有して示されるため、振動ノイズの発生有無を判断することができるようになる。例えば、映像処理部１１０は、第１の画像に示された欠陥の欠陥幅及び欠陥長さを通じて、振動ノイズの発生有無を判断することができる。 Next, the video processing unit 110 determines whether vibration noise is generated through the first image (step S107). In the first image, the brightness variation due to the vibration noise is shown with a pattern different from the brightness variation due to the actual defect of the sheet-like product 150, so that it is possible to determine whether or not the vibration noise is generated. Become. For example, the video processing unit 110 can determine whether vibration noise is generated through the defect width and the defect length of the defect shown in the first image.
段階Ｓ１０７の判断結果、振動ノイズが発生した場合、映像処理部１１０は第１の画像を第２の画像に差し替えて検査用映像として使用する（段階Ｓ１０９）。 If vibration noise occurs as a result of the determination in step S107, the video processing unit 110 replaces the first image with the second image and uses it as an inspection video (step S109).
段階Ｓ１０７の判断結果、振動ノイズが発生していない場合、映像処理部１１０は第１の画像を検査用映像として使用する（段階Ｓ１１１）。 If no vibration noise is generated as a result of the determination in step S107, the video processing unit 110 uses the first image as an inspection video (step S111).
本発明の実施形態によると、検査過程中に振動ノイズが発生した場合、振動ノイズによる明度のばらつきが示された第１の画像の代わりに第２の画像を使用して検査を遂行することによって、振動ノイズによる誤検知を防ぐことができるようになる。これによって、光学検査システムの信頼性及び正確性を向上させることができるようになる。 According to an embodiment of the present invention, when vibration noise occurs during the inspection process, the inspection is performed using the second image instead of the first image showing the variation in brightness due to the vibration noise. In addition, false detection due to vibration noise can be prevented. As a result, the reliability and accuracy of the optical inspection system can be improved.
以上、代表的な実施形態を通じて本発明について詳しく説明したが、本発明が属する技術分野における通常の知識を有する者は、上述した実施形態に対して本発明の範疇から逸脱しない範囲内で、様々な変形が可能であることを理解する。従って、本発明の権利範囲は、説明した実施形態に限定して定めてはならず、後述する特許請求の範囲のみならず、この特許請求の範囲と均等なものなどによって定められなければならない。 As described above, the present invention has been described in detail through typical embodiments. However, those having ordinary knowledge in the technical field to which the present invention belongs can be variously modified without departing from the scope of the present invention. Understand that various modifications are possible. Accordingly, the scope of rights of the present invention should not be defined only by the embodiments described, but should be defined not only by the claims described later, but also by the equivalents of the claims.
１０２：第１の照明部
１０４：第２の照明部
１０６：照明制御部
１０８：撮影部
１１０：映像処理部
１１２：照度測定部
102: First illumination unit 104: Second illumination unit 106: Illumination control unit 108: Imaging unit 110: Video processing unit 112: Illuminance measurement unit
Claims (8)
前記被検査物に振動ノイズが発生した場合、前記被検査物に前記第１の照明部と同一の明度で光を照射できるよう設置された第２の照明部と、
前記第１の照明部及び第２の照明部を一定速度で交互にオン（ON）／オフ（OFF）させる照明制御部と、
前記第１の照明部及び第２の照明部が照らす前記被検査物の第１の画像及び第２の画像を取得する撮影部と、
前記被検査物に振動ノイズが発生した場合、前記第１の画像を前記第２の画像に差し替える映像処理部と
を備える、光学検査システム用振動ノイズ補正装置。 A first illuminating unit that irradiates the inspection object with light at a constant brightness;
When vibration noise occurs in the inspection object, a second illumination unit installed so that the inspection object can be irradiated with light with the same brightness as the first illumination unit;
An illumination control unit for alternately turning on (ON) / off (OFF) the first illumination unit and the second illumination unit at a constant speed;
An imaging unit for acquiring a first image and a second image of the inspection object illuminated by the first illumination unit and the second illumination unit;
A vibration noise correction apparatus for an optical inspection system, comprising: a video processing unit that replaces the first image with the second image when vibration noise occurs in the inspection object.
前記第２の照明部が照らす前記被検査物の第２の画像を取得する第２の撮影部を備える、請求項１に記載の光学検査システム用振動ノイズ補正装置。 The imaging unit acquires a first imaging unit that acquires a first image of the inspection object illuminated by the first illumination unit, and a second image of the inspection object illuminated by the second illumination unit. The vibration noise correction apparatus for an optical inspection system according to claim 1, further comprising a second imaging unit that performs the operation.
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| JP2013108975A (en) | 2013-06-06 |
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