CN102929105A - Exposure quality detection method - Google Patents

Exposure quality detection method Download PDF

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Publication number
CN102929105A
CN102929105A CN201210457509XA CN201210457509A CN102929105A CN 102929105 A CN102929105 A CN 102929105A CN 201210457509X A CN201210457509X A CN 201210457509XA CN 201210457509 A CN201210457509 A CN 201210457509A CN 102929105 A CN102929105 A CN 102929105A
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CN
China
Prior art keywords
exposure
galley
determining method
point
quality determining
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Pending
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CN201210457509XA
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Chinese (zh)
Inventor
王舜祺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maidia Printing Equipment (hangzhou) Co Ltd
Dainippon Screen Mt Hangzhou Co Ltd
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Maidia Printing Equipment (hangzhou) Co Ltd
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Application filed by Maidia Printing Equipment (hangzhou) Co Ltd filed Critical Maidia Printing Equipment (hangzhou) Co Ltd
Priority to CN201210457509XA priority Critical patent/CN102929105A/en
Publication of CN102929105A publication Critical patent/CN102929105A/en
Pending legal-status Critical Current

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Abstract

The invention provides an exposure quality detection method. The exposure quality detection method is characterized by comprising an exposure step of exposing a printing plate through a plate making device to form a check pattern, a measurement step of measuring the printing plate and the check pattern, and a judgment step of judging a measurement result.

Description

The exposure quality determining method
Technical field
The present invention relates to a kind of exposure quality determining method.
Background technology
In the past, in order to produce high-quality printed panel, the printed panel after detection exposes by automatic platemaker after plate-making usually judged whether the pattern that obtains by exposure satisfies quality standard.
About the quality testing to the printed panel after the exposure, the picture quality (quality of printed article) and the geometry precision/registration accuracy (exposure repeatability) that roughly detect the exposure on the printed panel and form, wherein, the index of geometry precision/registration accuracy comprises absolute dimension, image gradient, the linearity (inner crooked), exposure starting position, registration accuracy (registration).
As shown in figure 13, at the surface of substrate and the back side all in the situation of printed base plate, if the surface is different with the pattern gradient at the back side, the defective that do not overlap of the position of the pattern at the surperficial and back side of existence then.In addition, shown in Figure 14 A, Figure 14 B, in the situation that expose on the surface in order to make book, if the lines of inner pattern are crooked, then the size of printed matter pattern does not overlap.Like this, in the situation that carry out the multiple color printing, will produce the defective of misalignment.In addition, in the situation that the bad printed panel of exposure repeatability (registration accuracy) prints, same color also deviation can occur.
About the detection to These parameters, shown in Figure 15 A, 15B, to be evaluated galley 1 in the past and compare with standard galley 2, then be evaluated difference between the lines of galley 1 and standard galley 2 by microscopic examination, thus the printed panel after the exposure be carried out quality testing.But long by the time that this detection method is measured, and can not carry out high-precision correction.
Summary of the invention
The present invention proposes in view of the above problems, and its purpose is to provide a kind of exposure quality determining method that can carry out quality testing and can revise accurately the printed panel after the exposure fast.
In order to address the above problem, technical scheme 1 of the present invention provides a kind of exposure quality determining method, it is characterized in that, comprising: exposure process, and by automatic platemaker galley being exposed forms grid pattern; Measure operation, measure galley and described grid pattern; Judge operation, judge the measurement result of described mensuration.
In technical scheme 2, preferably in described judgement operation, judge at least one in absolute dimension, image gradient, the linearity, exposure starting position, the registration accuracy.
In technical scheme 3, preferably in judging the process of absolute dimension, determine 4 points on four jiaos of described galley, calculate distance between two adjacent points, each distance is compared with theoretical value.
In technical scheme 4, preferably in the process of process decision chart as gradient, several points of the regulation in the point of crossing of the lines of the described grid pattern of definite formation, then measure the line of the each point on the horizontal direction with respect to the gradient of parallel direction, and the line of the each point on the mensuration vertical direction vertical with horizontal direction is with respect to the gradient of vertical direction, measure in addition cornerwise length of described galley, they and theoretical value are compared.
In technical scheme 5, preferably in the process of judging the linearity, in the process of judging the linearity, determine the point of crossing of each lines of the formation grid pattern on the described galley, then determine the distance between at least two point of crossing on the lines that form grid pattern, should distance compare with theoretical value.
In technical scheme 6, preferably in the process of judging the exposure starting position, determine the exposure starting position with respect to the coordinate at described galley edge, whether judgement this coordinate in multiexposure, multiple exposure is identical.
In technical scheme 7, preferably in the process of judging registration accuracy, whether the linearity when judgement is carried out multiexposure, multiple exposure to described galley in each time exposure is identical.
In the past, will be evaluated galley and standard galley compares, then be evaluated difference between the lines of galley and reference substrate by microscopic examination, thus the printed panel after the exposure be carried out quality testing.But long by the time that this detection method is measured, and can not carry out high-precision correction.
According to the present invention, can shorten minute, and can revise accurately, thereby can avoid measuring and minute is long and the defective that can not carry out high-precision correction by in the past such detection method
Description of drawings
Fig. 1 is the main parallax stereogram of expression platemaking equipment of the present invention.
Fig. 2 is the rear perspective view of expression platemaking equipment of the present invention.
Fig. 3 is the main parallax stereogram behind the header board opened of expression platemaking equipment of the present invention.
Fig. 4 is the Local map of the inner structure of expression platemaking equipment of the present invention.
Fig. 5 is the side view of the recording drum of expression platemaking equipment of the present invention.
Fig. 6 is the schematic top plan view of the printed panel that produces of expression platemaking equipment.
Fig. 7 is the schematic diagram that expression detects the absolute dimension of printed panel.
Fig. 8 is the schematic diagram that expression detects the image gradient (rectilinearity) of printed panel.
Fig. 9 is the schematic diagram of the expression linearity (inner crooked) that detects the image of printed panel.
Figure 10 is the schematic diagram of the exposure starting position of the expression image that detects printed panel.
Figure 11 is the schematic diagram of the registration accuracy of the expression image that detects printed panel.
Figure 12 is the process flow diagram of expression detecting step of the present invention.
Figure 13 is the schematic diagram of the defective that causes because of image inclination of expression.
The schematic diagram of Figure 14 A, Figure 14 B defective that to be expression cause because of the linearity (inner crooked).
Figure 15 A, Figure 15 B are the schematic diagram of the existing exposure quality determining method of expression.
Embodiment
Below, with reference to accompanying drawing 1 ~ 5 explanation the present invention, describe as example as the situation of the platemaking equipment of Computer To Plate (CTP) device applying the present invention to.
Fig. 1 is the main parallax stereogram of expression platemaking equipment of the present invention.Fig. 2 is the rear perspective view of expression platemaking equipment of the present invention.Fig. 3 is the main parallax stereogram behind the header board opened of expression platemaking equipment of the present invention.Fig. 4 is the Local map of the inner structure of expression platemaking equipment of the present invention.Fig. 5 is the side view of the recording drum of expression platemaking equipment of the present invention.In addition, for convenience of explanation, define top of the present invention, below, left, right-hand, the place ahead, rear (with reference to Fig. 1) according to main direction under according to circumstances.
Be a kind of comprehensive, multi-disciplinary product at Computer To Plate equipment, be that light harvesting learns a skill, the new technology such as electronic technology, color digital image technology, computer software and hardware, exact instrument and galley technology, automatic technology, network technology is in the high-tech product of one.Computer To Plate (CTP) system architecture mainly is comprised of mechanical system, light path system, Circuits System 3 major parts.
When utilizing Computer To Plate equipment to make a plate, restraint original laser by the list that laser instrument produces, splitting beam system through multiplex optical fiber or complicated High Rotation Speed optics splits into the superfine laser beam of multi beam (normally 200 ~ 500 bundles) and passes through respectively acousto-optic modulator according to the information such as bright dark from the image information of computing machine, after the bright dark variation memory of laser beam modulated, form controlled light beam.After this controlled light beam is focused on again, make the little laser of hundreds of bundle directly be mapped to the galley surface and scan and cut blocks for printing.Carrying out after scanning cuts blocks for printing, forming the latent image of image in galley.Then, through developing, will directly print for offset press in galley from the image information reduction of computing machine.
Utilize Computer To Plate equipment to make a plate, compare with traditional plate-making, do not need to piece together hanger plate, color correction is fast, and printing setup time is short, thereby can economical with materials, artificial and working time etc.
The galley of Computer To Plate has silver salt galley, temperature-sensitive galley, photopolymerization galley and ink jet printing version.Silver salt galley mainly has silver salt and the compound galley of PS version, the diffused galley that makes progress and downward diffused galley three types.The compound direct galley of silver salt and PS version is mainly utilized the ISO of silver salt emulsion layer and the direct scanning imagery of laser that wide sense color range is finished galley.The compound galley complex structure of silver salt and PS version, and need many exposures and the aftertreatments such as (photographic fixing) of developing, technique is numerous and diverse.Upwards the direct galley of diffused is made of version base, silver salt emulsion layer and physical development stratum nucleare.Behind the laser scanning imaging, spread development.Do not have the upwards diffusion of silver ion of exposure area, under the effect of top layer physical development nuclei, be reduced into argent, become oil-wetted surface; The top layer of exposure area is emulsion layer still, has good water wettability.Diffused silver salt galley is made of the aluminum substrate with good hydrophilic surface, physical development stratum nucleare and silver salt emulsion layer downwards.Behind the laser scanning imaging, spread development.The silver ion of exposure area spreads downwards, is reduced into argent under the effect of bottom physical development nuclei, becomes last oil-wetted surface; Then emulsion layer is removed the exposed hydrophilic layer that out becomes of hydrophilic version primary surface of exposure area.Diffused silver salt galley has very high light sensitivity and sensitive volume downwards, and pressrun is also very high, is suitable for high-grade commercial printing.
Temperature-sensitive galley (infrared temperature-sensitive galley) is divided into the direct galley of thermal ablation type and the direct galley of non-thermal ablation type, and the direct galley of non-thermal ablation type is divided into the direct galley of heat exchange type, the direct galley of hot transfevent and the direct galley of thermal induced phase transition type.Thermal ablation galley is made of the Silica Surface layer of scolding oil, photothermal transformation layer (light-absorption layer), oleophylic bottom and version base.The Silica Surface layer will consist of final non-print surface, can be removed with the vaporization of photothermal transformation layer under the effect of heat, thereby make the exposed print surface of accepting printing ink that out becomes of following oleophilic layer.The Main Function of photothermal transformation layer is to absorb the luminous energy that scan laser sends, and effectively the transform light energy that absorbs is become heat energy, makes the temperature rising of the space of a whole page reach the vapourizing temperature level.Heat cross-linking galley is made of heat susceptible coating and hydrophilic version base.Heat susceptible coating generally has (alkali) water-soluble film-forming resin (for example, phenolics), temperature-sensitive crosslinking chemical and Infrared dyes to consist of; Hydrophilic version base can use and the duplicate aluminum plate foundation of traditional PS version.Heat transfer printing version and thermal induced phase transition galley all belong to no longer need that chemical processing just can print after the imaging without the direct galley of aftertreatment (Processless CTPlate), and in the laser scanning imaging process, can not produce ablation debris and steam fog the like waste yet.Photopolymerization galley has aluminum substrate, photographic layer and superficial layer to consist of usually.Photopolymerization layer is mainly swashed by polymerization single polymerization monomer (+oligomer), initiating agent, spectral sensitization and film-forming resin consists of.Initiating agent generally adopts the much higher first initiator system of quantum efficiency, and the effect of spectral sensitizer is the emission wavelength zone that effectively sensitive volume of initiating agent is extended to laser.
(one-piece construction)
Such as Fig. 1 ~ shown in Figure 3, platemaking equipment I of the present invention has casing 10, and this casing 10 has framework, at framework header board 101, rear plate 102, left plate 103, right plate 104, top board 105 and base plate 106 is installed, and forms thus the inner space of platemaking equipment.In addition, be provided with power switch S on the right side of header board 101, be provided with guidance panel at top board 105, and at top board 105 conducting part T is set.Being provided with forme at conducting part T sets with scale T1 and forme detecting sensor T2.
In addition, as shown in Figure 3, Figure 4, in the inner space of platemaking equipment I, be built-in with recording drum 20, record-header 30, control baseplate part (not shown), circuit part (not shown), the drive division (not shown) that recording drum 20 is driven and the drive division (not shown) that record-header 30 is driven.In addition, at left plate 103 1 extraction fan is installed, at right plate 104 3 drawing fans is installed, be formed with 2 drawing fans at rear plate 102, form thus cooling system.In addition, on rear plate 102, also be formed with peristome (vent port).
(recording drum)
Below, recording drum 20 is simply described.Fig. 5 is the side view of the recording drum of expression platemaking equipment of the present invention.With reference to Fig. 5, recording drum 20 is arranged within the platemaking equipment I, and by the driving force that motor (not shown) produces, this recording drum 20 rotates around cylinder axis.Be transmitted thus outside surface (annular surface) that the forme that comes was mounted and was wound in recording drum 20 on every side.
As for the structure on the outside surface that forme (image recording material) is stable at recording drum 20, comprise at least four register pins 201, front end anchor clamps 202 and tail end anchor clamps 203.Register pin 201 is fixed on the outside surface of recording drum 20, and is arranged as an end (being front end) that can be transmitted the forme that comes.Tail end anchor clamps 203 are constructed to and can unclamp from the outside surface of recording drum 20.When tail end anchor clamps 203 unclamped from recording drum 20, tail end anchor clamps 203 were kept by the first anchor clamps drive part (not shown).In case tail end anchor clamps 203 are attached on the recording drum 20, these tail end anchor clamps 203 are just clamped the other end (being tail end) that is transmitted the forme that comes at the outside surface of recording drum 20.
Rotary encoder 204 is attached on the turning axle of recording drum 20, to detect its position, various angle.In current cylindrical outer surface scanning device, define in advance first jiao of position X, second jiao of position Z and third angle position Q.Especially, front end anchor clamps 202 clamp at X place, first jiao of position; Second jiao of position Z is relevant with the location of tail end anchor clamps 203; And front end anchor clamps 202 to be clamped in Q place, third angle position released.As shown in Figure 5, limit the position at each angle with respect to predetermined datum line S.When recording drum 20 was in first jiao of position X, front end anchor clamps 202 were driven by the first anchor clamps drive part (not shown), to clamp the front end of forme.When recording drum 20 was in third angle position Q, front end anchor clamps 202 were driven by the second anchor clamps drive part (not shown), to unclamp the front end of nipped forme.When recording drum 20 was in second jiao of position Z, tail end anchor clamps 203 can be driven by the 3rd anchor clamps drive part (not shown), on the outside surface that is attached to recording drum 20, in order to clamp the tail end of forme.When recording drum 20 was in second jiao of position Z, the tail end anchor clamps 203 that are attached to like this on recording drum 20 outside surfaces can break away from outside surface by the 3rd anchor clamps drive part, unclamp thus the tail end of forme.Because the first to the 3rd anchor clamps drive part does not consist of substantial portion of the present invention, so will omit its specific descriptions.
And, as the structure that is used for keeping forme close contact recording drum 20 outside surfaces, the cylindrical outer surface scanning device comprises: a plurality of apertures and groove (hereinafter referred to as " sucker " and " bothrium "), and it is arranged on the outside surface of recording drum 20, is used for the absorption forme; Fan blower (not shown), it matches to set up vacuum system with sucker and bothrium; Compression roller (not shown), its be arranged at recording drum 20 near.Because sucker, bothrium, fan blower and compression roller do not consist of substantial portion of the present invention, so will omit its specific descriptions.
(record-header)
Below, record-header 30 will be described.As shown in Figure 4, record-header 30 is arranged on the worktable 60, and this worktable 60 is arranged near the recording drum 20.The driving force that this record-header 30 produces by conveying screw rod mechanism 61, mobile in the direction that is being parallel to recording drum 20 turning axles, and utilize light beam to scan forme, thus, record-header 30 carry out exposure-processed with recording image on forme.
Specifically, record-header 30 receives view data, and the laser that utilizes this view data to modulate towards recording drum 20 outputs.By the rotation of recording drum 20, this laser is along the circumferentially enterprising line scanning of galley on the outer peripheral face that is wound on recording drum 20 as main scanning direction.In addition, record-header 30 is transferred screw mechanism 61 drivings and moves in the upper constant speed of guide rail (not shown).Therefore, laser scans in galley along sub scanning direction (direction that is parallel to recording drum 20 turning axles).Thereby, be formed with to the two dimensional image as the circumferential of main scanning direction and sub scanning direction expansion in galley.Use the galley that is formed with like this image to print.
(to the test item of galley)
Galley P after the below illustrates and is exposed.As shown in Figure 6, galley P after being exposed forms the exposing patterns as grid pattern, wherein respectively vice direction of scanning and main sweep (two exposure directions) of X, Y, R1, R2, R3 represent respectively the galley exposure reference position on the recording drum 20.
About the quality testing to the printed panel after the exposure, the picture quality (quality of printed article) and the geometry precision/registration accuracy (exposure repeatability) that roughly detect the exposure on the printed panel and form, wherein, the index of geometry precision/registration accuracy comprises absolute dimension, image gradient, the linearity (inner crooked), exposure starting position, registration accuracy etc.
In the present invention, the device that utilizes the pattern detection of the galley that Dainippon Screen Mfg. Co., Ltd. makes to measure usefulness is that gauging machine detects, and this gauging machine is arranged in the sensing chamber that temperature and humidity is managed, thereby can measure accurately.
In addition, for galley detected, the desired precision of printed matter was 1/100mm, and with respect to this, the mensuration precision of the gauging machine among the present invention can be 1/10000mm, thereby can high-precisionly detect.In addition, gauging machine of the present invention has learning functionality, can be kept in the device carrying out the order of once measuring, and therefore, only galley need to be set and just can automatically measure.
In addition, detect software about computing, use the computing of Mei Diya (MTMC) company exploitation to detect software, can in 4 printings, detect above-mentioned 5 indexs simultaneously.
(to the detection method of each index)
1. about the detection to absolute dimension, as shown in Figure 7, determine 4 points on four jiaos of galley P, calculate distance X 1, X2, Y1, Y2 between two adjacent points, each distance is compared with theoretical value, confirm whether absolute dimension meets quality standard.
2. about the detection to the image gradient, as shown in Figure 8, several points of the regulation in the point of crossing of the lines of definite formation grid pattern, in this example, there are parallel with sub scanning direction 9 lines and 13 lines parallel with main scanning direction, wherein determine P1/1, P7/1, P13/1, P1/5, P7/5, P13/5, P1/9, P7/9, these 9 points of P13/9.Then measure some P1/1 on the galley P to the line of putting P13/1, point P1/5 is to the line of putting P13/5, the point P1/9 to the line of putting P13/9 with respect to R1, the gradient of the line of R2 on parallel direction, and measuring point P1/1 is to the line of putting P1/9, point P7/1 is to the line of putting P7/9, the point P13/1 to the line of putting P13/9 with respect to R1, the straight line gradient in vertical direction that the line of R2 is vertical, these two cornerwise length of measuring point P1/9 to P13/1 and P1/1 to P13/9 also, these gradients and length and theoretical value are compared, confirm whether the image gradient meets quality standard.
3. about the detection to the linearity (inner crooked), as shown in Figure 9, determine the point of crossing of each line of the formation grid pattern on the galley P, in this example, on main scanning direction, select a point of crossing every lines, on sub scanning direction, select a point of crossing every two lines.Then determine the length of the straight line that connects each summit and form, should distance compare with theoretical value, confirm the linearity of image.
4. in the prior art, usually a galley is carried out the exposure of 4 looks, namely a galley is carried out 4 exposures, guarantee so whether the starting position of each time exposure unanimously is very important.About the detection to the exposure starting position, as shown in figure 10, measure exposure reference position R1, R2, R3 and the exposure starting position P1/1 of each galley, calculate the distance at edge at the R3 place, exposure reference position of the distance at edge at exposure reference position R1, R2 place of exposure starting position P1/1 in each exposure process and galley and galley, determine thus the coordinate of exposure starting position P1/1, judge whether the exposure starting position in each time exposure process is consistent.
5. registration accuracy refers to repeatability, and detecting registration accuracy is in order to ensure when a galley being carried out 4 exposures, and the pattern after final 4 exposures overlaps.About the detection to registration accuracy, as shown in figure 11, take exposure reference position R1, R2, R3 as benchmark, as in the detection of image gradient, measure the point of regulation, by operational software the measurement length data in 4 exposures is overlapped, confirm whether registration accuracy meets quality standard.
(testing process)
About testing process, as shown in figure 12 at first, (1) by automatic platemaker galley is exposed to form grid pattern (S1), then, (2) measure the grid pattern (S2) that galley and exposure form by gauging machine, and automatically judge by operational software (Mei Diya makings) and to survey length result whether qualified (S3).In the situation that be judged to be qualifiedly, advance to next operation, be judged to be in the underproof situation, then the image correction value input automatic platemaker that will calculate by operational software is confirmed again from operation (1) beginning.
According to above-mentioned detection method, measure the grid pattern of galley and exposure formation by gauging machine, whether and it is qualified to survey long result by the automatic judgement of operational software (Mei Diya making), can shorten minute thus, and can revise accurately, thereby can avoid measuring and minute is long and the defective that can not carry out high-precision correction by in the past such detection method.
(other embodiments)
In the above-mentioned detection to the image gradient, select 9 point of crossing to detect, but be not limited to this, can select as required more point.
In addition, in the above-mentioned detection to the linearity (inner crooked), on main scanning direction, select a point of crossing every lines, on sub scanning direction, select a point of crossing every two lines, but be not limited to this, can select all point of crossing according to the precision needs.
Above-mentioned embodiment only for being used for the explanation embodiments of the invention, is not intended to limit the scope of the invention, and protection scope of the present invention is defined by the claims.Also comprise the meaning that is equal to claims and the whole change in the scope.

Claims (7)

1. an exposure quality determining method is characterized in that, comprising:
Exposure process, by automatic platemaker galley being exposed forms grid pattern;
Measure operation, measure galley and described grid pattern;
Judge operation, judge the measurement result of described mensuration.
2. exposure quality determining method as claimed in claim 1 is characterized in that, in described judgement operation, judges at least one in absolute dimension, image gradient, the linearity, exposure starting position, the registration accuracy.
3. exposure quality determining method as claimed in claim 2 is characterized in that, in judging the process of absolute dimension, determines 4 points on four jiaos of described galley, calculates distance between two adjacent points, and each distance is compared with theoretical value.
4. exposure quality determining method as claimed in claim 2, it is characterized in that, in the process of process decision chart as gradient, several points of the regulation in the point of crossing of the lines of the described grid pattern of definite formation, then measure the line of the each point on the horizontal direction with respect to the gradient of parallel direction, and the line of the each point on the mensuration vertical direction vertical with horizontal direction is measured cornerwise length of described galley in addition with respect to the gradient of vertical direction, and they and theoretical value are compared.
5. exposure quality determining method as claimed in claim 2, it is characterized in that, in the process of judging the linearity, determine the point of crossing of each lines of the formation grid pattern on the described galley, then determine the distance between at least two point of crossing on the lines that form grid pattern, should distance compare with theoretical value.
6. exposure quality determining method as claimed in claim 2 is characterized in that, in the process of judging the exposure starting position, determines the exposure starting position with respect to the coordinate at described galley edge, and whether judgement this coordinate in multiexposure, multiple exposure is identical.
7. exposure quality determining method as claimed in claim 2 is characterized in that, in the process of judging registration accuracy, whether the linearity when judgement is carried out multiexposure, multiple exposure to described galley in each time exposure is identical.
CN201210457509XA 2012-11-13 2012-11-13 Exposure quality detection method Pending CN102929105A (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1354391A (en) * 2000-08-14 2002-06-19 富士胶片株式会社 Portrait appraising method and lithographic printing quality management method
US20020192578A1 (en) * 2001-04-26 2002-12-19 Kabushiki Kaisha Toshiba Inspection method of photo mask for use in manufacturing semiconductor device
CN1751378A (en) * 2003-02-26 2006-03-22 株式会社尼康 Detection method for optimum position detection formula, alignment method, exposure method, device production method, device, and measurement and/or inspection apparatus
JP2006194702A (en) * 2005-01-12 2006-07-27 Think Laboratory Co Ltd Inspection device for gravure cylinder and inspection method using it
CN101373336A (en) * 2007-08-20 2009-02-25 中芯国际集成电路制造(上海)有限公司 Method for optimizing exposure device monitoring
WO2010095551A1 (en) * 2009-02-18 2010-08-26 旭硝子株式会社 Method for measuring external shape of rectangular plate-like object, and method for calibrating relative position of image-capturing means

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1354391A (en) * 2000-08-14 2002-06-19 富士胶片株式会社 Portrait appraising method and lithographic printing quality management method
US20020192578A1 (en) * 2001-04-26 2002-12-19 Kabushiki Kaisha Toshiba Inspection method of photo mask for use in manufacturing semiconductor device
CN1751378A (en) * 2003-02-26 2006-03-22 株式会社尼康 Detection method for optimum position detection formula, alignment method, exposure method, device production method, device, and measurement and/or inspection apparatus
JP2006194702A (en) * 2005-01-12 2006-07-27 Think Laboratory Co Ltd Inspection device for gravure cylinder and inspection method using it
CN101373336A (en) * 2007-08-20 2009-02-25 中芯国际集成电路制造(上海)有限公司 Method for optimizing exposure device monitoring
WO2010095551A1 (en) * 2009-02-18 2010-08-26 旭硝子株式会社 Method for measuring external shape of rectangular plate-like object, and method for calibrating relative position of image-capturing means

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Application publication date: 20130213