TW201100678A - Gas supply unit and gas supply device - Google Patents

Gas supply unit and gas supply device Download PDF

Info

Publication number
TW201100678A
TW201100678A TW099120792A TW99120792A TW201100678A TW 201100678 A TW201100678 A TW 201100678A TW 099120792 A TW099120792 A TW 099120792A TW 99120792 A TW99120792 A TW 99120792A TW 201100678 A TW201100678 A TW 201100678A
Authority
TW
Taiwan
Prior art keywords
flow path
valve
block
opening
carrier gas
Prior art date
Application number
TW099120792A
Other languages
English (en)
Chinese (zh)
Inventor
Keisuke Kato
Shigenobu Nishida
Toshikazu Miwa
Takashi Inoue
Original Assignee
Ckd Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ckd Corp filed Critical Ckd Corp
Publication of TW201100678A publication Critical patent/TW201100678A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Details Of Valves (AREA)
TW099120792A 2009-06-30 2010-06-25 Gas supply unit and gas supply device TW201100678A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009155903A JP2011012724A (ja) 2009-06-30 2009-06-30 ガス供給ユニット及びガス供給装置

Publications (1)

Publication Number Publication Date
TW201100678A true TW201100678A (en) 2011-01-01

Family

ID=43391087

Family Applications (1)

Application Number Title Priority Date Filing Date
TW099120792A TW201100678A (en) 2009-06-30 2010-06-25 Gas supply unit and gas supply device

Country Status (4)

Country Link
JP (1) JP2011012724A (ja)
KR (1) KR20110001944A (ja)
CN (1) CN101937834A (ja)
TW (1) TW201100678A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6145433B2 (ja) * 2014-07-25 2017-06-14 Ckd株式会社 流体供給装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0332858Y2 (ja) * 1987-01-12 1991-07-11
JP2000035148A (ja) * 1998-07-22 2000-02-02 Hitachi Metals Ltd 集積形流体制御装置
JP4244254B2 (ja) * 1999-04-30 2009-03-25 株式会社キッツエスシーティー 集積化ガス制御装置
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置
JP2004340199A (ja) * 2003-05-14 2004-12-02 Fujikin Inc 加熱装置付き流体制御装置

Also Published As

Publication number Publication date
KR20110001944A (ko) 2011-01-06
CN101937834A (zh) 2011-01-05
JP2011012724A (ja) 2011-01-20

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