TW201024444A - Rotatable sputter target base, rotatable sputter target, coating installation, method of producing a rotatable sputter target, target base connection means, and method of connecting a rotatable target base device for sputtering installations to a target - Google Patents

Abstract

A rotatable target base device for sputtering installations is provided, wherein the target base device is adapted for receiving thereon a solid target cylinder, the rotatable target base device comprising a target base cylinder (4) having a lateral surface (3), a middle part (12), a first end region (7) and a second end region (9) opposite to the first end region, wherein at least one of the first and the second end regions has a maximum outer diameter substantially equal to or less than the outer diameter of the middle part.

Description

201024444 VI. Description of the Invention: TECHNICAL FIELD OF THE INVENTION Embodiments of the present invention generally relate to sputtering apparatus. More specifically, it relates to a rotatable target holder device, a rotatable target, a coating device, a method of manufacturing a rotatable target, a target holder connection device, and a method of connecting a rotatable target holder device. In particular, embodiments of the present invention relate to a rotatable target holder device for a sputtering apparatus, a rotatable target for a sputtering apparatus, a coating apparatus, and a rotatable target for manufacturing a sputtering apparatus Method of connecting a rotatable target holder device for a sputtering apparatus to a target holder connection of a target holder support, and connecting a rotatable target holder device for a sputtering apparatus to a target holder support Method 0 of the prior art [Prior Art] Film deposition of the material on the substrate can be achieved in a number of ways, for example by evaporating or extinguishing the coating material in a vacuum chamber. Typical examples of thin film deposition by subtractive are sputter deposition applications in solar wafer fabrication or semiconductor device fabrication. When operating a sputtering cathode, a plasma is created and the plasma ions are accelerated onto a target of the coating material to be deposited on the substrates. This bombardment of the target by the beta causes the coating. The material atoms are ejected and deposited as a deposited film on the substrate under the sputtering cathode. In order to obtain an increased 201024444 deposition rate, a magnetic field-enhanced cathode has been proposed, which may also be referred to as magnetron sputtering. A typical magnetic field enhanced sputtering cathode can include a planar target plate and an array of magnets mounted in a fixed position relative to the target plate. The magnetic field provided by the magnets establishes the path or region along which the sputtering of the target plate material occurs. Other typical magnetic field enhanced sputtering cathodes include a cylindrical rotatable

A tube, such as a backing tube, has a layer of dry material applied to its outer surface. A magnetic device, which may include an array magnet, is disposed inside the tube and provides a magnetic field. The tube is rotatable about its longitudinal axis so that it can be rotated relative to the magnetic device to selectively bring different portions or sections of the dry material thereon to the position opposite the magnets and within the magnetic field . In the case of a rotatable magnetron sputtering cathode, a material such as a dry material coated on a surface other than the backing tube can be quickly (for example, "two outer (four) shots without (for example, within one week) depletion or consumption. [Summary of the invention] According to the above-mentioned rotary dry material seat device, the second part of the patent scope can be rotated as the patent application _12 coating = 9 items of rotatable dry materials The manufacture of 13 items can be rotated: for example, the target holder connection device of the patent application No. 14 5 201024444, and the method of connecting the rotatable target holder device according to claim 18 of the patent application. Example [providing a rotatable target holder device for a sputtering apparatus] wherein the target holder device is adapted to receive a physical target cylinder thereon. The rotatable target holder assembly includes a target holder cylinder, The utility model has a side surface, an intermediate portion, a first end region and a second end region opposite to the first end region, wherein at least one of the first end region and the second end region has a substantially equal or a smaller outer diameter than the outer diameter of the intermediate portion. According to another Embodiments provide a rotatable target for a sputtering apparatus that includes a rotatable target holder device adapted to receive thereon a physical target cylinder, the rotatable target holder assembly The utility model comprises a target seat cylinder having a side surface, an intermediate portion, a first end region and a second end region opposite to the first end region, wherein the first end region and the second end region are at least One has a maximum outer diameter that is substantially equal to or less than the outer diameter of the intermediate portion, and the rotatable target holder has a solid target cylinder disposed on a side of the target housing cylinder. According to another embodiment Providing a coating apparatus comprising a rotatable material holder device 'where the target holder device is adapted to receive a solid dry material cylinder thereon', the rotatable target holder assembly comprising a target holder cylinder, Having a side, an intermediate portion, a first end region, and a second end region opposite the first end region, wherein at least one of the first end region and the second end region has a substantially equal or Less than the middle part The maximum outer diameter of the diameter. 6 201024444 According to another embodiment, a method of making a rotatable target for a sputtering apparatus is provided, comprising the steps of providing a rotatable target holder device, the rotatable target holder The apparatus is adapted to receive thereon an actual target cylinder, the rotatable target holder comprising a target seat cylinder having a side, an intermediate portion, a first end region, and a first end region a second end region, wherein at least one of the first end region and the second end region has a maximum outer diameter on a large hip that is equal to or smaller than an outer diameter of the intermediate portion; providing a solid target cylinder; The solid target cylinder is disposed on a side of the dry metal seat cylinder. According to still another embodiment, a target base connecting device for connecting a rotatable dry material seat device for a sputtering apparatus to a target seat support is provided. And comprising at least one component selected from the group consisting of: a fixed joint and a fixing groove provided in the dry material seat device, the fixed joint being adapted to at least partially fill the fixing groove; a holding device adapted to surround the fixed joint and one of the target seat supports adjacent to the target seat support Φ struts, a fixed clamp included in the fixed joint and adapted to be at least partially filled a fixing groove provided in the target seat device; and a fixing collar included in the fixing joint and having an internal thread disposed in a fixing groove provided in the target seat device One of the external threads corresponds to one end, wherein the fixing groove is provided at one end of the target holder device. According to an embodiment, there is provided a method of attaching a rotatable target holder device for a sputtering apparatus to a target holder support, comprising the steps of: providing a rotatable handle holder device wherein the dry material holder device is adapted Receiving a physical target cylinder at its 7 201024444, the rotatable target holder assembly including a dry material seat cylinder having a side, an intermediate portion, a first end region, and a first end region opposite the first end region a second end region, wherein at least one of the first end region and the second end region has a maximum outer diameter substantially equal to or smaller than an outer diameter of the intermediate portion; providing a target holder connection device comprising The fixed clamp 'includes a plurality of annular segmented jaw members, the jaw members being adapted to be closed into a clamp ring, and a plurality of annular segment clamping housings Forming a plurality of annular segmented clamping members and a member of a segment support member adjacent to the dry material support ring; and closing the plurality of annular segmented clamp members into a clamp ring And the target holder is attached And at least one of the first end εΐ and the second end region of the rotatable dry material holder; the clamp ring is adjacent to a dry material support ring of one of the dry material support members; and the plurality of An annular segmented clamping housing is mounted on the abutting clamp ring and the target seat support ring to position the annular segmented clamping housing and the annular segmented clamping members to each other Location. Other features and details are apparent from the scope of the dependent claims, the description and the drawings. Embodiments are also directed to apparatus for implementing the disclosed methods and including apparatus components for performing the described method steps. Moreover, the embodiments are also directed to methods of operating the described devices or fabricating the described devices. It may include a method step to implement the function of the device or to manufacture the components of the device. The method steps can be via hardware components, objects

S 201024444 (firmware ), software, computer controlled by a suitable software program, any combination thereof, or in any other manner. [Embodiment] Various embodiments will now be described in detail, and one or more examples thereof are illustrated in the drawings. The examples are provided by way of explanation and are not intended to limit the invention. Without limitation, 'in the following, a sputtering application is described that describes a rotatable target holder device, a rotatable target, a coating device, a method of manufacturing a rotatable target, a target holder connection, and a connection rotatable Examples and embodiments of a method of placing a material holder. Typically, the rotatable dry material holder and the target holder attachment comprise a vacuum compatible material and the coating apparatus is a vacuum coating apparatus. Typical applications of the embodiments described herein are, for example, sputter deposition applications in the production of displays such as LCDs, TFT displays, and organic light emitting diodes (OLEDs), fabrication of solar wafers, and semiconductor devices. In the description of the following figures, the same component symbols refer to the same components. In general, only the differences with respect to individual embodiments are described. The target seat cylinder of the 'rotatable dry material holder' will hereinafter be referred to as a backing baeking cylinder or a backing tube, without limitation. The rotatable target, for example, will include a backing tube and a solid target dome. 9 201024444 According to an embodiment, a rotatable coffin holder apparatus for a sputtering apparatus is provided, wherein the target holder apparatus is adapted to receive a physical target cylinder thereon. The rotatable target holder apparatus comprises: a target holder cylinder having a side, an intermediate portion, a first end region, and a second end region opposite the first end region, wherein at least one of the first end region and the second end region There is a maximum outer diameter that is substantially equal to or smaller than the outer diameter of the intermediate portion. For example, the target holder device is adapted to concentrically arrange a solid target cylinder on the target holder cylinder. Further, the solid target cylinder may be a hollow cylinder or a plurality of cylinders arranged one after another on the column of the dry material seat. Hollow cylinders. Typically, a rotatable target is formed by arranging the solid target cylinder on the target seat cylinder. The rotatable target holder assembly can be used to mount a rotatable target substantially vertically in a sputtering apparatus. Typically, the side of the target seat cylinder can be understood as a cylindrical or cylindrical cover. Embodiments disclosed herein allow for the provision of a target that can be a solid cylinder (eg, a solid target material tube) on a backing cylinder (eg, a backing tube) because accessing the backing cylinder At least one end is

By joining the backing tube provided on the sputter cathode, it can be designed to be used as a joint, and a solid dry material can be used as a joint material 201024444. Furthermore, in contrast to the backing cylinder used for the time-lapse material, the use of the == embodiment allows a plurality of cylindrical (e.g. tubular) solids or (four) sleeves for joining or non-joining dry materials to be arranged on a back. It is possible to line the cylinder. Moreover, in accordance with embodiments disclosed herein, the rotatable (four) material holder device and the back-post can be reused and can be restored simply by replacing the cylindrical material. This is especially true for rotatable targets that have target material that is rapidly depleted during coating applications. 1 schematically shows a rotatable target for a sputtering apparatus according to an example of an embodiment disclosed herein. The rotatable target 1 generally includes a rotatable target holder device 2 and a The tubular solid target 5' of the solid target cylinder is also referred to herein as the target 5. In an example of the embodiments disclosed herein, the internal control of the solid target cylinder 5 can be substantially equal to or greater than the outer diameter of the intermediate portion of the target seat cylinder. Typically, the dry material 5 can have an outer diameter of from about 1 mm to about 200 mm, more typically from about 130 mm to about 170 mm, and most typically about 145 mm. The inner diameter of the dry material 5 can range from about 8 mm to about 180 mm, more typically from about 11 mm to about 150 mm, and most typically about 133 mm. The target may have a thickness in the range of from about 2 mm to about 30 mm. Typically, the material 5 can have a thickness of from about 3 to 20 mm, more typically from about 5 to 17 mm, and most typically from about 6 to 12 mm. Additionally, the length of the material 5 can range from about 240 mm to about 3500 mm, more typically from about 1360 mm to about 1400 mm, from about 1560 to about 1600 mm, from about 1660 mm to about 1700 mm, from about 2 to about 1 mm to about 2050 mm, or about 2500 mm to about 2540 mm. The outer diameter of the back 201024444 liner 4 in the intermediate portion 12 (i.e., in the region of the side 3) may range from about 80 mm to about 180 mm, more typically from about no mm to about 15 mm, most commonly It is about 133 mm. The inner diameter of the backing tube 4 can range from about 60 m to about 160 mm, more typically from about 90 mm to about 13 mm, and most typically about us mm. Typically, the length of the backing tube 4 can range from about 300 mm to about 3600 mm.

More typically about 1440 mm, about 1640 mm, about 1740 mm, about 2090 mm' is about 2240 mm, about 2580 mm, or about 3600 mm. In some examples of embodiments disclosed herein, the outer diameter and/or inner diameter of the intermediate portion 12 of the backing tube 4 is substantially constant over the length of the intermediate portion 12. Moreover, in some examples of embodiments disclosed herein, the outer diameter and/or inner diameter of the target 5 is substantially constant over the length of the target 5, which is further schematically shown in FIG. The rotatable target holder device 2 of the rotatable target 1 is shown, and the target 5 is not disposed thereon. The rotatable (four) seat device 2 comprises a liner 4. In some of the four embodiments disclosed herein, at least one of the end regions of the backing tube has a maximum outer diameter that is substantially equal to or less than the outer diameter of the intermediate portion. The backing tube 4 of the present example has an intermediate portion 12 attached to the side 3 and has a first end region 7 and a second end portion 9. In the present example, the end zone 7 and the second end zone 9 each have a maximum outer diameter that is substantially equal to the outer diameter of the intermediate portion at the side 3 of the backing f4. And 9 may have an opening, core. In addition, the backing tube 4 may include an internal space 6 for receiving 12 201024444 at least one element selected from the group consisting of a magnet device and a cooling system. In one example of an embodiment disclosed herein, the rotatable target holder assembly can include at least one stem holder attachment adapted to connect the stem holder to a stripless seat. Accordingly, at least one of the material holder attachment means can be disposed at at least one of the first end region and the second end region of the target holder assembly. In a variation of this example, at least one of the target holder attachment means can be a moveable person. In some examples of embodiments disclosed herein, one end region or both end regions of the base of the base of the target block device may have a maximum outer diameter that is substantially equal to or smaller than the outer diameter of the intermediate portion, and may There is a material connection device. Therefore, for example, in the examples shown in Figs. 1 and 2, the material 5 can be easily mounted at the dry material seat device 2 shown in Fig. 1, even if the inner diameter of the target 5 is substantially equal to or Only slightly larger than the outer diameter of the backing tube 4. This is due to the fact that the target 5 is mounted to one end of the backing tube 'the end has a maximum outer diameter that is substantially equal to or smaller than the outer diameter of the intermediate portion of the backing tube'. The device can be moved. The target 5 can then be placed concentrically on the backing tube 4 and pushed parallel to the axis of rotation of the backing tube 4 to a desired position. In the present example, the longitudinal center axis of the backing tube 4 is its axis of rotation. The target holder attachment means can be adapted to connect the target holder cylinder to a target holder support. In an example of the embodiments disclosed herein, a target holder connection device may be disposed in each of the first end region and the second end region to connect the 13 201024444 dry material base cylinder and the two (four) materials into the push piece. One of the target holders or the portion of the target holder is a portion of the rotating target holder that can be further provided with a supply of, for example, a cooling fluid to the interior space of the target holder cylinder. Or electricity supply. According to a typical example, the first end region and the second end region of the column of the light material seat are located; one may be adapted to be provided with a target holder connection.

According to a typical example disclosed herein, the at least one (four) seat attachment means may comprise - a clamping means adapted to connect the wire holder to the - (four) seat support. More generally, the at least the material attachment means can comprise a fixed joint and a fixed recess provided in the base of the target seat, the fixed joint being adapted to at least partially fill the fixed recess. In addition, the clamping device may be adapted to surround one of the fixed joint and the four-seat support member in the adjacent (four) seat material connection device, the fixed joint may be formed as a fixed clamp, which may have an inner periphery thereof a protrusion that matches the fixed groove. At least m of the first end region and the second end region of the target holder cylinder are fixed grooves provided in the side surface of the dry material I cylinder. According to another embodiment, there is provided a dry material joint connection device for connecting a rotatable dry soil holder apparatus for a sputtering apparatus to a dry material holder support, comprising at least one selected from the group consisting of: Component: a fixed joint and a fixing groove provided in the target seat device, the fixed joint being adapted to at least partially fill the fixing groove; a clamping device adapted to surround the fixed joint and a dry material seat One of the support members abuts the target seat support connecting device; a fixed clamp included in the fixed 201024444 joint and adapted to at least partially fill one of the fixing grooves provided in the target seat device; and a fixed a collar included in the fixed joint and having an internal thread 'corresponding to one of the external threads provided in the fixing groove', the fixing groove being provided in the target seat device, wherein the fixing groove It is disposed at one end of the target holder device. As shown in the example of Fig. 2, the dry material cylinder 4, also referred to herein as the backing tube, includes a recess 1 at each of the end regions 7 and 9. As described above, in the present example, the first end zone 7 and the second end zone 9 each have a maximum outer diameter which is substantially equal to the outer diameter of the intermediate portion. The grooves 1 are disposed in the side 3 of the backing tube 4. According to a typical example of the greedy embodiment disclosed herein, the groove 10 is annular. A clamping device adapted to connect a target holder device for a sputtering apparatus to a target holder support according to embodiments disclosed herein, and the embodiment disclosed herein includes the clamping device as a target The rotatable target holder device of the socket connection device can be used to clamp a dry-backed cylinder in one of the coating and/or sputtering sigh systems (for example, a rotatable drive system), Figure 3a and Figure 3b illustrates a typical example of an embodiment disclosed herein. The rotatable target holder device 2 shown in Figure 2 is provided with two target holder connections 11. In the present example, the first end region 7 and the second end region 9 of the backing tube 4 are each provided with a target holder connecting device 1 . Typically, or two target holder connecting devices U can be moved from the backing tube 4 . In this embodiment, each of the materialless joint attachment devices U is movable and includes a fixed clamp formed as a clamp 15 of a 201024444 as a fixed joint and a clamped outer casing 18 as a holding device. In the examples shown in Figs. 3a to 3g, the clamp 17 and the clamp outer casing 18 are annular. Generally, in accordance with an embodiment of the embodiments disclosed herein, the target seat cylinder is a tubular seat cylinder, and at least one selected from the group consisting of the target holder, the clamping device, the fixed clamp, the fixed groove, and the The components of the group of the material support connecting members may be in a ring shape. Moreover, in embodiments disclosed herein, the clamping device and/or the fixed clamp can each comprise a segmented structure. Fig. 3a shows a typical example of the backing tube 4 and the target holder connecting means u of the rotatable target holder unit 2 in an assembled state. In the present example, the backing tube 4 is joined at each end region to a target holder support 15 having an annular flange 16 as a target holder support. The tubular solid target 5 of the rotatable target 1 is not shown. Further, at each of the end regions 7 and 9, an annular nipper 17 is clamped to the backing tube. Each of the jaws 17 has an inner projection 19 and an inner diameter 'to provide an inner projection 19 of the respective annular yoke 17 in each of the annular recesses 1''. Section 3c is a cross-sectional view of the inner projection 19 of the annular clamp 17 and one of the contacts 17 of the clamp 17 where the clamp 17 can abut the flange μ of the target holder support. Further, in the assembled state as shown in Fig. 3a, an annular holding casing 18 having an outer diameter larger than the outer diameter of the caliper 17 is fitted to each of the tongs 17. Clamping housing 18 is further illustrated in Figure 3f and includes an outer ring having two annular traversing elements 27 disposed on each side. The width of the outer casing 18 (i.e., the width of the ring 25) is such that it spans the sum of the widths of the jaws 17 and the flanges 16 of the support member 15 of the dry material seat 16 201024444. Thus, in the assembled state, the two annular straddle members 27 enclose the sweet mouth and the flange 16, which may include a vacuum seal (not shown), and the backing tube is held by a clamping tension 4 sister seat support members 15 are fixed to each other. Therefore, a vacuum sealed seal can be formed between the backing tube 4 and each of the light-seat member members 15 using the two (four) material holder connecting means u.

In a typical example of the embodiments disclosed herein, the width of the gripping shell "eg, the width of the ring 25" T is equal to or slightly less than the sum of the widths of the nipples η and the flanges 16. Thus, the clamps 17 and An interference fit or press fit is provided between the combination of the flanges μ and the clamp housing 18. Thus, the clamp housings 18 can be secured to the clamps 17 and the flanges 16 which are abutted against each other by press fit. In the present example, the height of the clamp 17 (i.e., the size of the annular collar of the clamp 17 perpendicular to the longitudinal axis of the backing tube 4 when the clamp 17 is mounted on the backing tube 4) is generally associated with the flange. The height of the annular collar of 16 is identical. Therefore, the clamp 17 and the flange 16 can be aligned at their outer periphery. For example, the height of the annular collar of the scent 17 can range from about 1 mm to about mm. Typically, the jaws can include a plurality of segmented jaw members, and/or the clamp housing can include a plurality of segmented clamping housings. More generally, the jaws can include an annular segmented jaw member And/or the clamping housing may comprise an annular segment clamping housing. The clamping jaw and the clamping housing may be annular. Generally, the 'annular segmented elements have the following lengths and radii: when longitudinally aligned with each other and viewed, the observer sees a ring. Most commonly, the 17 201024444 annular segmented jaw elements and/or the The annular segmented clamping housing may be semi-annular 'also referred to herein as a semi-circular shape. Further, the segmented jaw members or annular segmented jaw members may be hinged to each other and/or The segmented clamping housing or the annular segment clamping housing are hinged to each other. According to embodiments disclosed herein, the target holder attachment device includes a clamping device that allows for mounting on a target holder assembly ( For example, a bonded or non-joined solid cylindrical target on a back tube is secured in an existing clamping system of one of the coating devices. In one example of the embodiment, the material holder connection device can include a A fixed clamp comprising a plurality of segmented jaw members and/or a clamp housing comprising a plurality of segmented clamping housings. However, in some embodiments the fixed clamp and/or the clamp may be shouted out Each made a complete piece. This piece can have a flexible knot Constructing the sweetness of the fixing clip and/or the clamping shell respectively concentrically disposed on the shoe and material holder device and mounted on the clamp in the target holder device. As explained above, The target holder attachment means of the embodiment does not require a spring. Therefore, the material holder attachment means of the embodiments disclosed herein can be easily mounted on the backing tube and the target holder when they abut each other. When using the target holder attachment device of the embodiments disclosed herein, no additional fixation (e.g., using a screw cap) is required to mount the rotatable target including the backing tube in the coating apparatus. In addition, the target holder connection The segmented structure of the embodiment of the apparatus also facilitates easier installation of the backing tube on the dry material support. In the example of Figures 3a to 3g, the clamp 17 has two semi-circular clamps. The element 21 acts as a segmented jaw element 21 which is hinged to each other using a money 18 201024444. The semicircular jaw member 2i can be closed into a loop, as illustrated by the top view of the display jaw 17 and the top view of Fig. 3e. Further, as shown in the figures and 3g, the clamp housing of the present example includes two semi-circular clamp housings 23 as a segmented clamping housing. The semi-circular cool. The outer casing 23 is joined to each other in a field at the hinge 24 and can be closed into a loop, for example, forming a clamp collar. According to the present example, the semi-circular gripping shells 23 can be fastened to each other by means of a fastener 45. According to the present example of the embodiment disclosed herein, the segmented structure of the clamp 17 closes the two semicircular sweet elements 21 around the back tube 4 while positioning the dog 19 in the annular groove. 1 〇. In the examples of the embodiments disclosed herein, the inner diameter of the closed pinch 17 (e.g., substantially equal to or slightly larger than the diameter of the groove 10) is suitably selected to provide a good match between the pinch 17 and the groove 1'. Furthermore, the clamping device of the embodiments described herein has dimensions that allow the clamping device to be mounted around the target holder connection and one of the target holders and the support member to abut the target holder support. And inner diameter. For example, as shown in Fig. 3a, when the jaws 17 and the flanges 16 abut each other, the width and inner diameter of the clamp housing 18 allow it to be mounted around the jaws 17 and flanges 16 of the target holder 15. In one example of the 3f and the illustrated figures, the clamping housing 18 includes two semi-circular clamping housings 23 each having an outer semi-circular member 28 and a side surface attached to the outer semi-circular member 28. The upper two sides are semi-circular across the element 29. The outer ring formed by the outer semi-circular member 28 when the clamping outer casing 18 is closed may have an inner diameter greater than the outer diameter of the jaws 17 and the outer diameter of the flange 16. In addition, the inner diameter of the two annular spans 70 formed by the semi-circular spanning element 29 when closed 19 201024444 clamps the outer casing: 18 can be matched to or greater than the backing tube 4 and the target seat support 15 The outer diameter of the flange socket, as shown in Fig. 3a, the flanges 16 are respectively mounted in the flange socket. According to one example of an embodiment disclosed herein, the target holder connection and/or the dry holder support can include a chamfered clamping zone. For example, a clamp of one of the target holder attachment means and/or a connector of the target holder support (e.g., a connecting ring or an annular collar) may have a chamfered outer clamping zone. Additionally, one of the target holder attachment means (e.g., the holding housing 18) can have a chamfered inner clamping zone. As indicated by Fig. 4, the clamp 17 on the back tube 4 and the flange 16 of the target holder support 15 may have a chamfered edge, according to one of the examples shown in Figs. 3a to 3g. 'There are thus chamfered sides 30, 31, respectively. The chamfer of the tongs 17 is disposed opposite the contact side 13 of the tongs 17. In addition, the chamfered side 31 of the flange 16 is positioned opposite the contact side of the flange 16 (i.e., the flange side, which will contact the contact side 13 of the clamp 17). Moreover, when the clip 17 abuts the flange 16, the annular traverse member 27 of the grip housing 18 can be tilted accordingly to span the chamfered sides 3 and 3j. Therefore, when the clamp 17 is mounted on the backing tube 45 and the flange 16, the annular traverse element 27 can fix the clamp 17 and the projection 6 in a vacuum tight manner, and can include a vacuum seal (not shown). They are adjacent to each other and the holding outer casing 18 is clamped thereon. When the clamp 17 is mounted on the backing tube 4, the chamfered side surface 30 of the grip button bore 17 can have an angle of inclination associated with the side 3 of the backing tube 4, with a range of 20 201024444 of about 100. With about 120. Between, usually about 105. . The chamfered side 31 of the flange 16 can have an angle of inclination associated with the flanged socket of the dry material support #15, which ranges from about 100. With about 120. Between the two, generally about 105°, the annular traverse element 27 of the clamping outer casing 18 can have a tilt angle that is consistent with or even smaller than the inclination angle of the side faces 3〇, 3丨. When the clamp housing 18 is assembled on the clamp 17 and the flanges 16 abut each other, a clamping tension can be formed. For example, a spanning element 27 can have an angle of inclination associated with the ring 25, which ranges from about 95. Between about and about, it is usually about 1.5. The other cross member 27 can have an angle of inclination associated with the ring 25, which ranges from about 95. With about 12 baht. Between, usually about 1〇5. . Therefore, when the #clamp outer|18 is fixed by the dust person and is held by the combination of the clamp 17 and the flange 16, the inclination angle of the cross member 27 can be increased and then the inclination of the side 3〇, 31 can be increased. The phase provides a clamping tension. Due to the chamfered misalignment zones, the mounting of the material holder attachment means can be facilitated, for example, in the example of Fig. 4, the chamfered sides Φ 30, 31 and the backup y The outer casing 18 is advanced to the adjacent projections and projections 16, 16. Therefore, it is convenient to attach the rotatable dry soil holder to the dry material holder support 15. == Another example of the disclosed embodiment 'The rotatable dry material seating one (four) seat connecting device may comprise - dry material fixed loading device - the fixed device is optionally located in the interval of the fixed sweet spot The figure is illustrated in the figure and differs from the 3rd to 3rd § diagrams in that a spacer 40 is attached to the scent 17 as a spacer 21 201024444 device as shown in FIG. 5 when The backing tube 4 is sweet with a sandwich of spacers 40! 7 The spacer 4 is disposed on the side 3 of the adjacent backing tube 4 when assembled. Therefore, when the wire 5 is concentrically disposed on the side 3, it is located between the two spacers 40 in which the dry material $ is fixed at its position. One or both of the spacers 40 may be in the shape of a ring. In an alternate embodiment, one or both of the spacers 4 can each include a plurality of spacer elements that are flanked by the sweetness. According to another example, the door spacers 4G or both may be the width of the spacer ring spacers 40 that are separately provided in addition to the clamps 17 (i.e., when the clamps 17 are assembled on the backing tube 4) The width in the direction in which the axis of rotation of the lining f 4 is parallel may range from about 2 mm to about 50 mm, and more typically from about 2 〇 mm to about 40 mm. The height of the spacer 4 (i.e., the dimension perpendicular to the width of the spacer and perpendicular to the side 3 of the backing tube 4 when the tongs 17 are assembled on the f liner #4) may be from about 15 mm to about 5 〇. Within the range of mm. Furthermore, the one or more spacers 40 provide a gap between the clamping housing 18 and the coffin 5. The gaps can have a width generally ranging from about 2 mm to about 5 mm, more typically from about 20 mm to about 40 mm. Therefore, the thermal expansion of the target 5 parallel to the axis of rotation of the backing tube 4 (i.e., the 'vertical axis' in this example) is possible and the detrimental effects of such thermal expansion can be avoided. Furthermore, an optimum position, e.g., a central position, of the tubular solid target 5 parallel to the axis of rotation of the rotatable target 1 can be achieved. The spacer 40 holds the target 5 in a fixed position, although a gap is provided between the clamping surface 18 and the target 5. 22 201024444 In a variant of the example, when the target 5 is placed on the side 3, in the backing tube, only one fixing device comprising a clamp 17 having a spacer 4 can be provided in the backing tube 4 One end. For example, the spacer-free sweetness 17 can be mounted in the other end region of the backing tube 4. Accordingly, a gap is provided between the material 5 and one of the clamping housings 18 of the connecting device that connects the backing tube 4 to the target holder support 15. For example, in accordance with a typical example of the embodiments disclosed herein, when the rotatable target 1 is vertically assembled in a coating apparatus for sputtering applications, a clamp 17 including a spacer 40 is placed on the backing tube The end zone of 4 is placed at the bottom of the rotatable target 1 comprising the backing tube 4 and the target 5. This is especially useful for non-bonded targets' because the spacers 40 act as a fixed shoulder to hold the non-joined target in place. More specifically, when the non-engaged target is mounted with one or more of the engagement rings, the (or the) engagement ring can be held in its position by the spacer(s) 4, respectively. Thus, the embodiments and examples of the embodiments disclosed herein are suitable for mounting the rotatable target 1 substantially vertically on a sputtering apparatus. This is particularly applicable to target holder attachments including one or more spacers 40. An example, because the spacers 40 provide one of the tubular solid targets 5, respectively, for reliable positioning, alignment, centering, and just fixation. In still another variation of the example of the target holder attachment device shown in Fig. 5, the clamp 16 including the spacer 40 and the flange 16 of the target holder support 15 may have the same as described above with respect to Fig. 4. Corner side. Moreover, when the flange 16 abuts the pinch 17, the annular traverse member 27 of the clamp housing 18 can be tilted accordingly to span the chamfered side 3 and the chamfered side 3^. 23 201024444 In addition, the inner diameter of the two annular traversing elements 27 formed by the lateral semi-circular cross member 29 can be appropriately adjusted when the outer casing 18 is closed. For example, in the assembled state, the inner diameter of the spanning member 27 of the clamping housing 18 facing the target may match or be greater than the outer diameter of the spacer 4'. As a typical example of the target material used in the embodiments disclosed herein, the material 5 may include oxidized samarium (IT〇) or ruthenium, such as ... or 3N quality 'which may be doped with boron' such as Z-600. In accordance with another embodiment, a method of making a rotatable target for a sputtering apparatus is provided, the method comprising the steps of: providing a rotatable target holder apparatus for a sputtering apparatus, wherein the target holder apparatus is adapted Receiving a solid target cylinder thereon, the rotatable target holder device comprising a target holder cylinder having an intermediate portion attached to a side surface, and additionally having a first end region and a first end region a second end region, wherein at least one of the first end region and the second end region has a maximum outer diameter substantially equal to or smaller than an outer diameter of the intermediate portion; providing a solid target cylinder; The solid target cylinder is disposed on the side of the target seat cylinder. The method, for example, after the step of configuring the solid target cylinder, may further comprise the step of installing a dry material seat attachment means at at least one of the first end region and the second end region of the target seat cylinder. Typically, the solid target cylinder can be a hollow cylinder or a plurality of hollow solid cylinders disposed adjacent to one another. The solid target cylinder or the plurality of solid cylinders may be concentrically disposed on the target seat cylinder. Typically, the rotatable target is formed by combining the solid target cylinder with the target holder cylindrical set 24 201024444 in accordance with another embodiment above. The rotatable target can be used for a substantially vertical assembly of one of the sputtering devices in a sputtering apparatus. In an example of the embodiment described herein, the backing tube 4 « subsequent 'shown in FIG. 2 is provided concentrically placed on the tubular end target 5, for example on the second end zone 9, parallel to the backing tube 4 The central axis (i.e., the 'one axis of rotation' in this example) moves and is centrally disposed thereon. Subsequently, at the end region 7 and the end region 9 of the backing tube 4, a pinch 17 comprising two spliced semicircular jaw members 21 can be concentrically placed as a material holder connecting means. In this position, the projection 19 of each of the clamps 17 fills one of the grooves 1 of the backing tube 4. By closing the abutment flange 16 around the clamp 17 and the target seat support, each clamp 17 can be secured to the backing tube 4 to 'clamp one of the outer casings 18 and fasten it by fasteners 45. . Thus, the tubular solid target 5 is placed between the jaws 17 to provide a rotatable target 1. In a variant of the above example, after the tubular target 5 is placed concentrically on the backing tube 4, only one fixed jaw 17 can be mounted in one of the end regions of the backing tube 4. This can be done, for example, when restoring the rotatable target 1 to place a depleted dry material 5 (as will be described below). The above variant of the method can also be used if the other end region of the backing tube 4 is provided with a target holder connection or any other end piece, such as a flange welded to the other end region of the backing tube 4. According to yet another embodiment, a method of restoring a switchable material for a sputtering apparatus can be provided, comprising the steps of providing a rotatable target for a reduction device, the rotatable target comprising a rotatable target Seat 25 201024444 is configured to include a materialless cylinder having an intermediate portion with a side surface and additionally having a first end region and a second end region opposite the first end region, wherein the first end At least one of the zone and the second end zone has a maximum outer diameter substantially equal to or less than an outer diameter of the intermediate portion, the rotatable target block device having an entity disposed on a side of the target seat cylinder a target cylinder and a target holder connecting device disposed on the at least one end region; the target holder connecting device is detached from the at least one end region of the target holder cylinder; the solid material is unloaded from the cylinder Providing another solid material cylinder; arranging the other solid material cylinder on the side of the dry material seat cylinder; and mounting the target seat connecting device in the at least one end region of the target seat cylinder. The target holder attachment means of this embodiment may be one of the clamps 17 and the clamped outer casing 18 for any of the examples described above. For example, the second end region 9 of the backing tube 4 has a maximum outer diameter that is substantially equal to or smaller than the outer diameter of the intermediate portion 12. Thus, a tubular solid target slab 5 (e.g., it may have an inner diameter that is slightly larger than the outer diameter of the intermediate portion of the backing tube) may be disposed concentrically in the second end region 9. It is placed on the side 3 of the backing tube 4. Subsequently, it can be placed in the desired position by moving or pushing it along the axis of rotation of the backing tube (i.e., in this example, the longitudinal axis) on the backing e4. In addition, the solid dry cylinder can be a hollow cylinder. The solid material cylinder can be concentrically disposed on the target seat cylinder. Typically, the rotating target is restored in accordance with the above-described embodiments by processing and combining the solid target cylinder with the target holder cylinder. 26 201024444 The embodiments disclosed herein allow a cylindrical target (which can be a solid target material tube) to be placed on a backing cylinder (eg, a back tube) because access to the backing cylinder is at least One end is possible. This is attributed to the structure of the backing cylinder wherein at least one end region of the backing cylinder has a maximum outer diameter that is substantially equal to or smaller than the outer diameter of the intervening portion of the backing cylinder. The target can be designed to be used as a bonded or non-bonded target. With the embodiments disclosed herein, a cylindrical or tubular solid target having an inner diameter that matches the outer diameter of the side of the interfitting portion can be easily placed on the backing cylinder. Thus, in some instances of the embodiment, costly engagement of a physical target with a backing cylinder can be avoided, eliminating the need for expensive bonding materials. In another example t, the solid dry material can be bonded to the backing tube provided on the sputtering cathode. Furthermore, in contrast to the backing tube used to blast the target, the use of the embodiments disclosed herein enables the use of a plurality of cylindrical or tubular solid materials or dry material casings for joining or non-joining dry materials. It is possible. Moreover, in accordance with embodiments not disclosed herein, the rotatable dry soil holder assembly and the backing tube can each be reused and can be restored only by swapping the cylindrical talleners. This is particularly suitable for rotatable slabs having a target material that is rapidly depleted during coating applications. Furthermore, the rotatable (four) seat device can be used to vertically assemble a rotatable dry material on a sputtering apparatus. . In addition, 'because some examples according to the embodiment seven t W can provide one or more target holders with a target fixture - your ridge history is set to allow it to be in the cylindrical solid dry material and sister seat The connecting device has a gap, and thus the coefficient of thermal expansion between the cylindrical material and the target material may be different. In addition to this, in the example of the embodiment, the target includes a target connection device, and the target may Fixed to the backing cylinder or just centered or aligned at the desired position on the backing cylinder. According to one example of an embodiment disclosed herein, the target holder attachment device can include a fixed clamp that includes a plurality of suitable An annular segmented jaw member closed into a clamp ring; and a detent device comprising a plurality of annular segmented clamps adapted to enclose a plurality of annular segmented jaw members that are closed into a clamp ring Holding the housing and one of the target holders adjacent to the target holder support ring, at least one of the plurality of annular segmented clamp members includes an adjustment device adapted to clamp the plurality of annular segments Holding the outer casing Adjacent to the clamp ring and the target seat support ring, such that the annular knife holder clamping housing and the annular segment clamping members are disposed at mutually offset peripheral positions, wherein the adjusting device is as the case may be Provided on the outer periphery of at least one of the annular segmental caliper elements. For example, 'in the example of the target holder connecting device u shown in Figures 3a to 3g', the replacement clamp 17 and the clamping housing 18, the fixed clamp may include the clamp 17 〇 and the clamping housing 18 所示 shown in Figures 6a to 6e. As an adjusting device, a pin 172 may be arranged in a semicircle of the clamp 17〇. The outer periphery of the element 21, for example between the ends of a sandwiched sweet element 21, is generally in the middle of the semicircle across the element 21, as shown in Figures 第 and 6c. The clamping housing 18 can be in two The free ends of the semi-circular clamping shells 23 comprise two openings ι 82, each having an opening 182 from each end 184. The position of the clamping housing 180' is shown in the cross-sectional view of Figure 6e. As shown in Fig. 6d, in the closed state, 28 201024444 opening 182 is at the free end ι8 of the clamping housing 180. A combined opening 183 is formed at the interface of 4. When the clamping housing 180 is closed about the clamp 170, a pin 172 is formed to fill the combined opening 183, which is a combination of one of the openings 182. Or 'in one of the above examples' The adjusting device can be a mark (not shown) such as a colored dot, and the pin 172 is positioned on the outer periphery of a semicircular member 21 of the clamp 170. The clamping peripheral 180' can be formed, for example. There is a length of the clamping housing 23 to provide a gap between the free ends 184 when it is closed. This clearance allows the outer periphery of the underlying semicircular member 21 to be closed when the clamping member 180 is closed about the clamping jaw 170. An optical inspection is performed to check if the mark is below the gap of the clamping housing 18. In another embodiment, a method of attaching a rotatable target holder device for a sputtering apparatus to a target holder support is provided, comprising the steps of: providing a rotatable dry material holder for a sputtering apparatus Wherein the target holder means is adapted to receive a solid target cylinder thereon, the rotatable target holder means comprising a target holder cylinder having a side surface, an intermediate portion, a first end region and a a second end region ′ opposite the first end region, wherein at least one of the first end region and the second end region has a largest outer diameter equal to or smaller than an outer diameter of the intermediate portion; a target holder attachment device comprising a fixed clamp comprising a plurality of annular segmented jaw members adapted to be closed into a clamp ring; and a plurality of annular segmented clamping housings At least one of the plurality of annular segmented clamping members is adapted to surround a plurality of annular segmented clamping members and a target holder support member 29 201024444 that are closed to form a lost clamp ring. Depending on the situation, an adjustment device is included. The adjusting device is adapted to fit the plurality of annular segment clamping housings on the abutting clamp ring and the dry material support ring to enable the annular segment to clamp the outer casing and the annular segment clamps The component is disposed at a peripheral position offset from each other, wherein the adjusting device is disposed on an outer periphery of at least one of the annular segmented clamping members according to a condition; by closing the plurality of annular segment clamping members Synthesizing a clamp ring • mounting the target mount connector at least one of a first end region and a first end region of the rotatable target mount; the clamp loop abutting to a target support a target support ring; and mounting the plurality of annular, such as a segment, clamping housing on the abutting clamp ring and the carrier support ring to clamp the annular segments to the outer casing and the like The annular segmented jaw members are disposed at mutually offset positions. Therefore, according to the examples illustrated in Figs. 6a to 6e, the backing tube 4 and the target holder φ connection device including the clamp 170 and the clamp housing 180 can be provided. Subsequently, the clamp 170 is fitted in one of the first end region and the second end region of the backing tube 4 by closing the semicircular jaw member 21 around the recess 10 of the back tube 4. Thereafter, the clamp ring 17 is abutted to the coffin support ring 16 of the target holder support 15. The semi-circular clamping housing 23 is disposed about the closure clamp 170 and the adjacent target holder support ring 16 so that the pin 172 is positioned in the opening 183 of the clamping housing ι8〇. The clamp housing 180 is then used to secure the clamp housing 180 about the closure clamp 17 and the adjacent target holder support ring 16. Since the pin 172 is positioned in the opening 183 at the interface between the free ends 184, the semicircular clamping members 23 of the outer casing 30 201024444 and the semicircular members 21 of the clamps 17 can be placed on each other. Offset the perimeter position. For example, as shown in Fig. 6b, if the pin 172 is attached to the middle of the semicircle of the jaw member 21, the semicircular member 23 and the semicircular member 21 may have a width of 9 inches. Radius offset. This means that the interface between the semicircular jaw members 21 is prevented from being placed under the interface between the semicircular clamping shells 23. Therefore, the clamping pressure can be evenly distributed. Further, a vacuum sealing fixture is provided from the backing tube 4 to the target holder support 16, which may include a vacuum seal (not shown) and may avoid a hole positioned in the holder. The same matter suitable for the modification of the above examples includes a mark as an adjusting device. In order to provide an offset, when the clamping housing 18 () is assembled around the clamp 170, the operator must ensure that the backing tube 4 and the target holder connection of the present example are mounted on the target holder support 15 Visible in the gap between the closed semi-circular clamping shells 23. According to another embodiment, there is provided a target holder connecting device for connecting a rotatable target holder device for a sputtering apparatus to a target holder support, comprising a fixed joint, the fixed joint including a fixed collar An internal thread corresponding to an external thread provided in a fixing groove provided in the target holder device, wherein the fixing groove is provided at one end of the target holder device. Additionally, the at least one target holder attachment means can include a gripping means adapted to enclose one of the fixed joint and a target holder support adjacent the target holder support. Figure 7 is a schematic cross-sectional view of a target holder cylinder 200 of a rotatable target holder assembly in accordance with an embodiment of the presently disclosed embodiments. 31 201024444 This example differs from the example shown in Fig. 2 in that the end zone 7 comprises a groove 1〇〇 placed at the outermost end of the end zone 1〇〇 instead of the groove 10. Accordingly, the recess 100 is annular and is disposed at the outermost end of the target housing cylinder 2 and surrounds the opening 80 of the target holder cylinder 200. The groove 100 is provided with an external thread 1〇1 in the periphery of the groove 100. Figures 8a and 8b schematically illustrate cross-sectional views of the rotatable dry soil holder apparatus shown in Figure 7, providing an example of a dry material holder attachment apparatus in accordance with the disclosed embodiment. As shown in Fig. 8a, the handle attachment means of the present example includes a fixed collar 270, also referred to herein as a collar 270' that fits over the target seat cylinder 200 at the recess 1''. To this end, the fixed collar 270 has an internal thread 271 corresponding to the external thread 101 provided in the recess 1' of the target holder 2'. As shown in FIG. 8b, when the collar 270 and the flange 16 abut each other, the clamping housing 18 shown in FIGS. 3f and 3g can be mounted as a clamping device on the target cylinder 200. The collar 270 and the flange 16 _ of the target holder support 15 are provided. In the examples of embodiments disclosed herein, the inner diameter of the fixed collar 270 is suitably selected, for example, substantially equal to or slightly larger than the diameter of the groove 1 以 to provide good alignment of the collar 270 and the groove 1 match. In addition, the clamping housing 18 has dimensions and an inner diameter that allow the clamping housing 18 to be mounted about the collar 270 and the flange 16 of the target holder support 15 when the collar 270 and the flange 16 abut each other. In the present example, the clamping housing 18 includes two semi-circular clamping housings 23 each having an outer semi-circular member 28 and two chamfered sides semi-circular across which the sides are attached to the semi-circular member 28. Element 29. When the clamping housing 18 is closed by the outer semicircular element 28 32 201024444

The outer ring 25 may be formed to have an inner diameter greater than the outer diameter of the collar 27 and the outer diameter of the flange 16. Moreover, the inner diameter of the two annular traversing elements 27 formed by the side semi-circular spanning elements 29 when closing the clamping shell 18 can be matched to or greater than one of the backing tube 4 and the target seat support 15 The outer diameter of the rim socket is fitted with a flange 1 6 in the flange socket. Figure 9 also shows a fixed collar 270, which shows the internal thread 27. Further, the fixed collar 270 can have a chamfered side 3〇 And spacer 4, as described above with respect to the example of Figure 4. In the present embodiment of the embodiment, the flange 16 of the fixed collar 270 and the target holder support 15 have chamfered edges to form chamfered sides 30, 31, respectively. The chamfered side surface 30 of the fixed collar 27 is disposed opposite the contact side 13 of the collar 270. In addition, the chamfered side 31 of the flange 16 is positioned opposite the contact side of the flange 16 (i.e., the flange side that is in contact with the contact side 13 of the collar 270). Moreover, when the collar 270 is adjacent the flange 16, the annular traverse member 27 of the clamp housing 18 can be tilted accordingly to span the chamfered sides 3 and 31. Therefore, when the collar 270 is mounted on the backing tube 45 and the flange 16, the annular cross member 27 can be vacuum-tightly fixed to the collar 27 and the flange ι6, which may include a vacuum seal (not shown) Shown, they abut each other and hold the clamping housing 18 thereon. In Fig. 8c, one of the fixed collars 270 is shown deformed, and the modification includes one or more recesses 272' provided in the outer periphery of the fixed collar 270, for example, a plurality of holes 272. The aperture 272 is intended to permit the salvation of a tool to facilitate assembly of the fixed collar 270 into the recess 1 of the target holder cylinder 200. 33 201024444 In accordance with other examples (not shown) of the embodiments disclosed herein, the fixed collar 270 may not be provided with a chamfered side 3〇 and/or a spacer 4〇. In this case, the clamp housing 18 is adapted and can be formed as shown in Fig. 33. Moreover, in some examples of embodiments (not shown), the clamping device used in the examples of Figures 7 through 9 may include a plurality of segmented clamping housings that are adapted to enclose the stationary collar and One of the target holder members is adjacent to the dry material holder support attachment means, for example as described above with respect to Figures 3f and 3g and as shown in Figures 3f and 3g. In another example (not shown) of the embodiment, the fixed collar 27A shown in Figs. 8a to 8c and Fig. 9 may include an elongated spacer 40. The elongate spacer 40 can have a region that abuts, for example, the chamfered side 30, having a smaller outer diameter to engage the grip housing 8 . According to other examples of embodiments described herein, the target holder cylinder can be provided with a material holder attachment means as described above in each of the end regions 7 and 9. For example, the stem block cylinder may be provided with a recess 1 in the end regions, a retaining collar 270 and/or a clamping housing 18 or 180. In another example, the target seat cylinder may be provided with a recess 1 〇, a fixed caliper 17 or 170 and/or a clamping housing u or 180 in both end regions. In another example, the target seat cylinder may be provided with a recess 1 , a fixed collar 270 and/or a clamping housing 18 or 180 in one end region and a recess in the other end region. 10. A fixed clamp 17 or 170 and/or a clamping housing 18 or 180. In other examples, the target seat cylinder can be provided with a target holder connection as described above in only one end region 7 or 9. For example, 34 201024444 the target seat cylinder may be provided with a recess 100, a fixed collar 270 and/or a clamping housing 18 or 180 in only one end region, or a recess 10, a fixed clamp 17 or 170 and/or a clamping housing 18 or 180. Moreover, in some examples of embodiments described herein, the spacer 40 can have a height at its free end ranging from about 15 mm to about 50 mm, i.e., when assembled on the target block cylinder 4. The dimension is perpendicular to the side 3 of the target crucible 4 to reliably support the target cylinder. In this case, in the case of a substantially vertically assembled combined rotatable target, when the spacer 4 is part of the bottom target holder connection connected to a bottom target holder, and for example directly positioned to the target Below the cylinder or below the bottom target cylinder" Furthermore, in the case of a vertically assembled combined rotatable target, the target holder cylinder can be held in its upper end region, the upper end region having an upper end One of the material holders is connected to the second material holder. In this case, a gap may be provided between the target cylinder at the upper or outermost surface of the target cylinder and the target holder connection. ❹ In a typical example of an embodiment, 'the combined rotatable target is substantially vertically assembled'. Generally, in the case of a substantially vertical assembly, the rotatable dry material can comprise a method according to the embodiments described herein. The target collar attachment of the fixed collar of the example is retained at its lower end and can be retained at its upper end by a target mount attachment that includes a fixed clamp according to an example of embodiments described herein. According to an embodiment, a rotatable target holder apparatus for a sputtering apparatus is provided, wherein the dry material holder apparatus is adapted to receive a physical target cylinder thereon. The rotatable target holder apparatus includes a target holder a cylinder having 35 201024444 a side, an intermediate portion, a first end region, and a second end region opposite the first end region, wherein at least one of the first end region and the second end region has A maximum outer diameter that is substantially equal to or less than the outer diameter of the intermediate portion. According to a modification of the above embodiment, the target holder means further comprises at least one target holder attachment means adapted to connect the target holder cylinder to a dry material holder support and to be movable. Φ According to a modification of one of the above embodiments and its modifications, at least one of the first end zone and the second end zone is adapted to be provided with one of the target holder attachment means. According to a modification of any one of the above embodiments and its modifications, the at least one target holder connection means includes a clamping device adapted to connect the target holder to a target holder support. According to a modification of any one of the above embodiments and its modifications, the at least one target holder connecting device comprises a fixing joint and a fixing (four) provided on the (four) seat cylindrical towel, the fixing joint being adapted to at least The fixing groove is partially filled. According to a modification of any one of the above embodiments and its modifications, the at least one (four) seat connecting device comprises a clamping device adapted to surround the set joint and the (four) seat support - Adjacent (four) seat support connecting device. According to a modification of any of the above-mentioned embodiments and their modifications, the fixed joint comprises a fixed clamp adapted to at least partially fill the fixed recess. According to another modification of the above-mentioned embodiment and its modification, any one of the claims of the invention, the fixed joint includes a fixed collar having an internal thread 'and one of the fixing grooves The external thread corresponds to the fixed groove, and the fixing groove is disposed at one end of the target seat cylinder. According to a modification of any one of the above embodiments and the modification, at least one of the first end region and the first end region includes a *__ fixing groove, and the fixing groove is disposed on the target In the side of the cylinder. According to a modification of any one of the above embodiments and its modifications, the twisted material base connecting means comprises at least one element selected from the group consisting of: or a fixed clamp having a suitable fit a plurality of segmented clamping members for synthesizing a clamp; or a holding device having a device adapted to enclose one or the fixed jaw and one of the target holders adjacent to the target holder support a clamping housing; or a clamping device having a segmented air-clamping element adapted to enclose a plurality of closed or one of the fixed jaws and one of the target holders abutting the target holder support a clamping housing; or a clamping device having a plurality of segmented clamping housings adapted to enclose one or the fixed jaw and one of the target holders adjacent to the target holder support; Or the clamping device having a plurality of segmented clips adapted to enclose a plurality of segmented jaw members that are closed into one or the fixed jaw and one of the target holder supports abutting the target holder support Holding the outer casing; or the clamping device, Having a clamping housing adapted to enclose one or the fixed collar and one of the target holder supports adjacent one of the target holder attachment members; and one or the detent device having a fit to enclose one or One of the stationary collar and one of the target holder supports a plurality of segmented clamping housings adjacent the dry material holder support. 37 201024444 According to one of the modifications of the above-described embodiments and their modifications, the plurality of segmented jaw members are hinged to each other and/or the plurality of segmented clamping shells are hinged to each other. According to a modification of the above-mentioned embodiments and modifications thereof, the target seat cylinder is a tubular seat cylinder ' and at least one of them is selected from the dry material seat connecting device, the clamping device, the fixed joint, and (4) The component of the group of the fixed groove and the target holder supporting device is in the form of a ring according to one of the above embodiments and a modification thereof, the at least one target holder connecting device comprises a coffin fixing The device fixing device is optionally a spacer device disposed on at least one component selected from the group consisting of a fixed joint of the target holder connecting device, a fixed clamp and a fixed collar. According to a modification of one of the above embodiments and its modifications, the rotatable target holder means is adapted to mount a rotatable target substantially vertically in a sputtering apparatus. According to a modification of one of the above embodiments and its modifications, the target holder cylinder includes an internal space for accommodating at least one element selected from the group consisting of a free magnet device and a cooling system. In accordance with another embodiment, a rotatable target for a sputtering apparatus is provided that includes a rotatable handle holder device adapted to receive a solid target cylinder thereon. The rotatable target holder assembly includes a a target holder cylinder having a side surface, an intermediate portion, a first end region, and a second end region opposite the first end region, wherein the first end region and the second end portion of the second 38 201024444 end region One has a large outer diameter equal to or smaller than the outer diameter of the intermediate portion; the rotatable target holder device has a solid target cylinder disposed on the side of the target seat cylinder. According to a modification of another embodiment above, the rotatable target holder device has at least one target holder attachment device mounted on at least one of the first end region and the second end region. According to one of the above embodiments and modifications thereof, one example of the workpiece fixing device of the rough material base connecting device provides a gap between the solid target cylinder and the target seat support member . Modification according to one of the above embodiments and its modifications, the solid target cylinder is tubular and positioned between the first end region and the second end region. According to one of the above alternative embodiments and any of its modifications, the solid materialless cylinder is adjusted (eg, centered) by at least one of the 'shoestock seat attachment means by the abutment to the And operating at least one of the target fixing devices. According to one of the above embodiments and modifications thereof, the inner diameter of the solid material cylinder is substantially equal to or larger than the outer diameter of the intermediate portion of the target seat cylinder. In accordance with another embodiment, a coating apparatus is provided that includes a rotatable shoe material holder device, wherein the target holder device is adapted to receive a solid dry material cylinder thereon, the rotatable dry material holder including a rectangular column having a side, an intermediate portion, a first end region and a second end region opposite the first end region, wherein the first end region and the second end 39 201024444 end region At least one of the plurality has a maximum outer diameter that is substantially equal to or less than an outer diameter of the intermediate portion. This embodiment can be combined with any of the other embodiments disclosed herein or modifications thereof. According to yet another embodiment, a method of manufacturing a rotatable target for a sputtering apparatus is provided comprising the steps of providing a rotatable target holder device, wherein the target holder assembly is adapted to receive a physical dance thereon a cylindrical body, the rotatable target holder device comprising a target holder cylinder having a side, an intermediate portion, a first end region and a second end region opposite to the first end region, wherein At least one of the first end region and the second end region has a maximum outer diameter substantially equal to or smaller than an outer diameter of the intermediate portion; providing a solid target cylinder; arranging the solid target cylinder in the lightweight material On the side of the seat cylinder; optionally, after the step of disposing the solid column, includes a step of installing a first end zone and the second end zone of the target block cylinder Target holder connection device. This embodiment can be combined with any of the other embodiments disclosed herein or a modification thereof. According to a further embodiment, there is provided a target holder connection device for connecting a rotatable target holder device for a subtractive device to a target holder support, comprising at least one element selected from the group consisting of: a fixing joint and a fixing groove provided in the dry material seat device, the fixing joint being adapted to at least partially fill the fixing groove; a clamping device adapted to surround the fixing joint and a target seat support One of the members is adjacent to the dry material support support; a fixed clamp is included in the fixed joint and adapted to at least partially fill a fixed recess 201024444 slot provided in the target mount, and a fixed sleeve a ring 'included in the fixed joint and having an internal thread' corresponding to an external thread provided in a fixing groove provided in the dry material seat device, wherein the fixing groove is provided on the target One end of the seat device. According to a modification of another embodiment above, the dry material holder attachment means comprises at least one element selected from the group consisting of: a fixed clamp having a plurality of segmented clips adapted to be closed into a clip a clamping member, a clamping device having a clamping housing adapted to surround one of the fixing jaws and one of the material holder supports adjacent to the target holder support; the clamping device having a suitable a clamping housing surrounding a plurality of segmented clamping members closed to a fixed clamp and a target holder supporting member adjacent to the target holder supporting device; the clamping device having a plurality of suitable for surrounding the fixing One of the clamp and one of the target holders abuts the segmented clamping housing of the target holder support; the clamping device has a plurality of segments that are adapted to surround the plurality of segments that are closed to the fixed jaw One of the component and one of the dry material support members abuts the segmented clamping housing of the target holder support connecting device; the clamping device has a one adjacent to the fixed collar and one of the target holders Target holder support The clamping housing 'and the clamping device' of the attachment device have a plurality of segmented clamping housings adapted to enclose the fixed collar and one of the target holder supports adjacent the target holder support. According to a further variant of the above further embodiment, the fixed sweetness comprises a plurality of annular segmented clamping elements adapted to be closed into a loop, and the clamping device comprises the plural adapted to enclose the closed-clamping ring One of the plurality of annular segmented clamping members, at least one of the plurality of annular segmented clamping members, the one of the plurality of annular segmented clamping members, the one of the plurality of annular segmented clamping members An adjustment device adapted to fit the plurality of annular segmented clamping housings to the abutting clamp ring and the target seat support ring for the annular segments to grip the outer casing and the annular segments The segment clamping element is disposed at a peripheral position offset from each other, wherein the adjusting device is optionally disposed on an outer periphery of at least one of the annular segmented clamping members.

According to one of the above further embodiments and the modifications thereof, the plurality of segmented jaw members or the annular segment members are hinged to each other, and wherein the plurality of segments are clamped to the outer casing or the ring The segmented clamping housings are hinged to each other. According to a modification of any one of the above embodiments and the modifications, the target holder connecting device comprises a target fixing device, and the target fixing device is a spacer device as the case may be, the spacer device is provided Provided on at least one element selected from the group consisting of a fixed joint, a fixed clamp, and a fixed collar. According to an embodiment, a rotatable target holder device for a sputtering apparatus is attached to a target holder support A method comprising the following steps: providing a rotatable (four) seat device 'where the sister material device is adapted to be attached thereto' body (four) 81 column 'the rotatable dry material seat device comprises - a target seat cylinder, Having a side, an intermediate portion, a first end region, and a second end region opposite the first end region, wherein at least one of the first end region and the second end region has a substantially equal or a maximum outer diameter that is smaller than the outer diameter of the intermediate portion; a supply-dry material holder connection 42 201024444 'includes a fixed clamp that includes a plurality of annular segmented clamp members' of the plurality of annular segment clamps Sweet element suitable for closing a clamp ring; and a plurality of annular segment clamping housings. The plurality of annular segment clamping housings are adapted to enclose a plurality of annular segmented clamping members and a target holder that are closed into a clamp ring One of the support members abuts the target holder support ring; the first of the rotatable target holders is assembled by closing the plurality of annular segment loss elements into a pinch ring And at least one of the end region and the second end region; the clamp ring abutting to a target holder support ring of a target seating support; and assembling the plurality of annular segment clamping housings The abutting clamp ring and the target seat support ring are disposed to position the annular segment clamping housing and the annular segment clamping members at mutually offset peripheral positions. This embodiment can be combined with any of the other embodiments disclosed herein or modifications thereof. According to a modification of any of the above embodiments and its modifications, the rotatable stem holder means is adapted to mount a rotatable dry material substantially vertically in a sputtering apparatus. According to a modification of any one of the above embodiments and its modifications, the target holder cylinder includes an internal space for accommodating at least one element selected from the group consisting of a magnet device and a cooling system. According to a modification of one of the above embodiments and its modifications, the inner diameter of the solid target cylinder is substantially equal to or larger than the outer diameter of the intermediate portion of the target seat circle. The written description uses examples to disclose the invention, including the best mode, and the invention can be made and utilized by those skilled in the art. Although the present invention has been described in terms of various specific embodiments, it will be apparent to those skilled in the art that the invention can be practiced in the spirit and scope of the invention. In particular, the examples of the embodiments and the mutually non-repulsive features of the above-described implementation day 1 or its modifications may be combined with each other. The scope of the patent is defined by the scope of the patent application, and may include other examples of those skilled in the art. Such other examples are intended to be within the scope of the patent application. While the above is directed to the embodiments of the present invention, other and further embodiments of the present invention may be devised without departing from the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS The above detailed description of the embodiments of the present invention can be understood by reference to the detailed description of the embodiments of the present invention. The following description relates to the accompanying drawings in connection with the embodiments of the invention.

Some of the above-described embodiments will be described in more detail in the following description of exemplary embodiments with reference to the following drawings in which: FIG. 1 schematically shows a sputtering apparatus according to an example of embodiments disclosed herein A cross-sectional view of a rotatable target holder assembly comprising a solid target cylinder; Figure 2 is a schematic view showing a rotatable paper of the example shown in the target holder cylinder of the first seat assembly

Tgl · circle, 44 201024444 Figures 3a through 3g schematically illustrate a rotatable dry soil holder device as shown in Fig. 1 provided with an example of a target holder connection device, and according to the implementation disclosed herein 1 is a cross-sectional view and a plan view of a material holder connecting device; FIG. 4 is a view schematically showing a rotatable target holder shown in FIG. 1 provided with another example of a material holder connecting device according to an embodiment disclosed herein; A cross-sectional view of the device; FIG. 5 is a cross-sectional view of the rotatable target holder device shown in Fig. 1 provided with another example of the extension 9-seat connection device according to the embodiments disclosed herein; Figure 6e schematically shows a cross-sectional circle and a top view of another example of a target holder connection device in accordance with embodiments disclosed herein; Figure 7 schematically shows an example according to embodiments disclosed herein. A cross-sectional view of a target holder cylinder of a rotatable target holder device; Figures 8a through 8c schematically illustrate a seventh figure shown with an example of a target holder connection device according to the Φ embodiment disclosed herein. Cutaway view of the rotatable target holder Fig. 9 is a schematic cross-sectional view showing the dry seat connecting device according to the example shown in Fig. 8a. It is contemplated that elements of an embodiment may be utilized in other embodiments without further elaboration. [Main component symbol description] 45 201024444 1 Rotatable target 2 Rotatable material holder 3 Side 4 Target seat cylinder/backing tube 5 Tubular solid target/target/solid target cylinder 6 Internal space 7 First End zone 9 second end zone

10 groove 11 target holder connection 12 intermediate part 13 contact side 15 target holder support 16 annular flange / flange / adjoining target holder support ring 17 clamp 18 clamping device / clamping housing 19 opening /Internal projections/protrusions 20 Hinge 21 Semicircular clamping element 23 Clamping housing 24 Hinge 25 Ring 27 Annular straddle element 28 Outer semicircular element 46 201024444 29 Cross element 30 隹!) Corner side 31 Chamfer side 40 slit spacer 45 fastener 80 opening 100 groove 101 external thread 170 clamp / clamp ring 172 pin 180 clamping housing 182 opening 183 combination opening 184 free end 200 target seat cylinder 270 fixed collar / collar / fixed Joint 271 internal thread 272 groove / hole 47

Claims (1)

201024444 VII. Patent application scope: 1. A rotatable target holder device for a sputtering apparatus, wherein the target holder device is adapted to receive a solid dry material cylinder thereon, the rotatable dry material holder device comprising at least : a material base cylinder (4) having a side (3), an intermediate portion (12), a first end region (7) and a second end region (9) opposite the first end region And wherein at least one of the first end region and the second end region has a maximum outer diameter substantially equal to or less than an outer diameter of the intermediate portion, further comprising at least one target holder connection (27〇 And 18) adapted to connect the coarse metal seat cylinder to a dry material seat support and movable, wherein the at least one target base connection device comprises at least: a fixed joint (270); and a target disposed on the target a fixing groove (100) in the cylinder of the material, the fixing joint being adapted to at least partially fill the fixing groove, and wherein the fixing joint comprises a fixing collar (270) having an internal thread ( 271), and the fixing groove A set of external threads 1〇〇) (101) corresponding to the 'wherein the fixing groove (1〇〇) provided on one end of the member from the cylindrical seat (4). 2. The rotatable target holder device of claim 1, wherein the fixing groove is disposed in the side of the target holder cylinder, and/or wherein the at least one target holder connection device comprises at least: The clamping device 48 201024444 (18) is adapted to surround the fixed joint and one of the target holder supports adjacent the target holder support. 3. The rotatable stone holder device of any one of clause 1 or 2, wherein the target holder connection device comprises at least one element selected from the group consisting of: the holder a device having a clamping housing (18) adapted to surround the stationary collar 270 and one of the target holders adjacent the target holder support; and the clamping device And having a plurality of segmented clamping shells (23) adapted to surround one of the stationary collar and one of the target holders to abut the target holder support. 4. The rotatable target holder device of any one of clause 1 or 2, wherein the target holder cylinder is a tubular seat cylinder, and/or at least one of which is selected from the target holder The components of the device, the clamping device, the fixed joint, the fixing groove and the material holder supporting device are annular. 5. The rotatable target holder device of claim 3, wherein the plurality of segmented clamping housings are hinged to each other. 6. The rotatable material holder device of any one of claims 1 or 2 wherein at least one of the dry material holders comprises a material fixture. The invention relates to a rotatable coffin holder device according to claim 6 , wherein the material fixing device is a spacer device, and the spacer device is provided on at least one selected from the group consisting of the fixed joint and the fixed collar. On the components of the group. A rotatable target for a sputtering apparatus, comprising: a rotatable dry material holder device according to any one of claims 1 to 7 of the invention, the rotatable dry material holder device There is a solid target cylinder disposed on the side of the target block cylinder. 9. The rotatable target for a sputtering apparatus according to claim 8, wherein the rotatable target holder has a target mounted on at least one of the first end region and the second end region At least one of the seat attachment means and/or the dry material holding means of the base member attachment means provides a gap between the solid dry material cylinder and the target seat support. 10. The rotatable target of claim 8 or 9, wherein the solid target cylinder is tubular and/or positioned between the first end region and the second end region, and/or At least one of the target holder attachment means is adjusted by being disposed adjacent to at least one of the target fixtures. A coating apparatus comprising a rotatable target holder device as in the first to seventh aspects of the patent application. 50 201024444 12. A method of manufacturing a rotatable target for a sputtering apparatus, comprising the steps of: providing a rotatable target holder device as in claims 1 to 7 of the patent application, providing a physical target a material cylinder, and the solid target cylinder is disposed on the side of the target seat cylinder. 13. The method of claim 12, after the step of configuring the solid dry cylinder, the method comprising the steps of: at least one of the first end region and the second end region of the target block cylinder One of the target holder attachment devices is mounted. 14. A target holder connecting device for connecting a rotatable target holder device for a sputtering apparatus to a target holder support, comprising at least: a fixed connector (270) and a target holder a fixing groove (1〇〇) in the device, the fixing joint being adapted to at least partially fill the fixing groove; and a fixing collar (270) included in the fixing joint and having an internal thread (271) Corresponding to an external thread (101) provided in the fixing groove (100), wherein the fixing groove (100) is provided at one end of the dry material seat device. 15. The target holder connection device of claim 14, comprising at least: 51 201024444 a clamping device (18) adapted to surround the fixed joint and one of the material support members adjacent to the target holder Support connecting device. 16. The target holder connection device of claim 15 which comprises at least one component selected from the group consisting of: the clamping device having a clamping housing adapted to surround the stationary shaft One of a ring and a target holder supporting member abutting the target holder support connecting device; and the clamping device having a plurality of segmented clamping housings adapted to surround the fixed collar and a target holder One of the adjacent target holder support attachment means. 17. The target holder connection of claim 16, wherein the plurality of segmented clamping housings are hinged to each other. ^ =^Please request the 14th position of the 14th position of the patent range Wherein the middle seat connecting device comprises- (four) fixing device, and/or: wherein the target fixing device is a spacer device, the spacer device is provided; at least one component selected from the group consisting of a joint and a collar is formed . ' 52