CN102265376A - Rotatable sputter target base, rotatable sputter target, coating installation, method of producing a rotatable sputter target, target base connection means, and method of connecting a rotatable target base device for sputtering installations to a tar - Google Patents
Rotatable sputter target base, rotatable sputter target, coating installation, method of producing a rotatable sputter target, target base connection means, and method of connecting a rotatable target base device for sputtering installations to a tar Download PDFInfo
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- CN102265376A CN102265376A CN2009801526026A CN200980152602A CN102265376A CN 102265376 A CN102265376 A CN 102265376A CN 2009801526026 A CN2009801526026 A CN 2009801526026A CN 200980152602 A CN200980152602 A CN 200980152602A CN 102265376 A CN102265376 A CN 102265376A
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- 238000004544 sputter deposition Methods 0.000 title claims abstract description 48
- 238000000034 method Methods 0.000 title claims description 32
- 239000011248 coating agent Substances 0.000 title claims description 18
- 238000000576 coating method Methods 0.000 title claims description 18
- 238000009434 installation Methods 0.000 title abstract description 5
- 230000011218 segmentation Effects 0.000 claims description 69
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 239000007787 solid Substances 0.000 abstract 1
- 238000012986 modification Methods 0.000 description 26
- 230000004048 modification Effects 0.000 description 26
- 239000013077 target material Substances 0.000 description 16
- 239000000463 material Substances 0.000 description 10
- 230000002093 peripheral effect Effects 0.000 description 6
- 238000000429 assembly Methods 0.000 description 4
- 230000000712 assembly Effects 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 2
- 238000004062 sedimentation Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000005477 sputtering target Methods 0.000 description 2
- 238000000427 thin-film deposition Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 101150064138 MAP1 gene Proteins 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
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- 230000003287 optical effect Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3435—Target holders (includes backing plates and endblocks)
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
A rotatable target base device for sputtering installations is provided, wherein the target base device is adapted for receiving thereon a solid target cylinder, the rotatable target base device comprising a target base cylinder (4) having a lateral surface (3), a middle part (12), a first end region (7) and a second end region (9) opposite to the first end region, wherein at least one of the first and the second end regions has a maximum outer diameter substantially equal to or less than the outer diameter of the middle part.
Description
Technical field
Embodiments of the invention relate generally to sputtering equipment.More particularly, relate to method, the target seat jockey of rotatable target base device, rotatable target, coating equipment, the rotatable target of manufacturing and the method that connects rotatable target base device.Particularly, the rotatable target base device that the method that embodiments of the invention relate to the rotatable target base device that is used for sputtering equipment, the rotatable target, coating equipment, the manufacturing that are used for sputtering equipment is used for the rotatable target of sputtering equipment, the rotatable target base device that will be used for sputtering equipment are connected to the target seat jockey of target seat support member and will be used for sputtering equipment is connected to the method for target seat support member.
Background technology
The thin film deposition of material on substrate can realize in many ways, for example realizes by evaporation or sputter coating material in a vacuum chamber.The representative instance of the thin film deposition by sputter is to make or the sputtering sedimentation of semiconductor device in producing used at solar wafer (solar wafer).
When operation during one cathodic sputtering, set up a plasma and the ion of this plasma accelerated to and desire to be deposited on the target of the coating material on this substrate.Cause the atom of this coating material to penetrate to the bombardment of this target, the atom of ejaculation is deposited on the substrate below this sputter cathode as a deposited film.Be to promote deposition rate, proposed to use the negative electrode of magnetic field-intensification, also the use to the negative electrode of magnetic field-intensification can be called magnetron sputtering.
The sputter cathode of typical magnetic field-intensification can comprise a planar targets plate and be assemblied in the magnet array of a fixed position with respect to this target plate.Set up the path or the zone of the sputter generation of target plate material by the magnetic field that described magnet provides.
The sputter cathode that other typical magnetic field is strengthened comprises a cylindric rotatable pipe, and a backing pipe (backing tube) for example, this backing pipe have a target bed of material that is coated on this backing tube outer surface.The magnetic device that can comprise magnet array is disposed at inner and this magnetic device of this pipe one magnetic field is provided.This pipe can be around the rotation of the longitudinal axis of this pipe, so that this pipe can rotate optionally the different piece or the section of the target material on this tube outer surface brought to position relative with this magnet and in this magnetic field with respect to this magnetic device.
In the manufacturing of rotatable magnetic control sputtering cathode, target material for example can be coated on the outer surface of a backing pipe by injection.In addition, the target material of typical sputtering target material can be by (for example in a week) exhaustion or consumption fast.
Summary of the invention
In view of the above problems, the invention provides method, the target seat jockey of rotatable target base device, rotatable target, coating equipment, the rotatable target of manufacturing and the method that connects rotatable target base device.
According to an embodiment, a kind of rotatable target base device that is used for sputtering equipment is provided, wherein this target base device is suitable for receiving entity target cylinder on this target base device, this rotatable target base device comprises target seat cylinder, this target seat cylinder has the side, pars intermedia, first end region and second end region relative with this first end region, wherein this first end region and this second end region have one of at least and are substantially equal to or less than the maximum outside diameter of the external diameter of this pars intermedia, also comprise at least one target seat jockey, this at least one target seat jockey is suitable for that this target seat cylinder is connected to the target seat support member and this at least one target seat jockey is removable, wherein this at least one target seat jockey comprises: permanent joint and be located at fixed groove in this target seat cylinder, this permanent joint is suitable for filling at least in part this fixed groove, and wherein this permanent joint comprises the fixedly axle collar, fixedly the axle collar has internal thread, this internal thread is corresponding with the external screw thread that is provided with in this fixed groove, and wherein this fixed groove is located at the end of this target seat cylinder.
According to another embodiment, a kind of rotatable target that is used for sputtering equipment is provided, this rotatable target comprises rotatable target base device, this target base device is suitable for receiving entity target cylinder on this target base device, this rotatable target base device comprises target seat cylinder, this target seat cylinder has the side, pars intermedia, first end region and second end region relative with this first end region, wherein this first end region and this second end region have one of at least and are substantially equal to or less than the maximum outside diameter of the external diameter of this pars intermedia, this rotatable target base device has the entity target cylinder on the side that is disposed at this target seat cylinder, this rotatable target seat also comprises at least one target seat jockey, this at least one target seat jockey is suitable for that this target seat cylinder is connected to the target seat support member and this at least one target seat jockey is removable, wherein this at least one target seat jockey comprises: permanent joint and be located at fixed groove in this target seat cylinder, this permanent joint is suitable for filling at least in part this fixed groove, and wherein this permanent joint comprises the fixedly axle collar, fixedly the axle collar has internal thread, this internal thread is corresponding with the external screw thread that is provided with in this fixed groove, and wherein this fixed groove is located at the end of this target seat cylinder.
According to another embodiment, a kind of coating equipment is provided, this coating equipment comprises rotatable target base device, wherein this target base device is suitable for receiving entity target cylinder on this target base device, this rotatable target base device comprises target seat cylinder, this target seat cylinder has the side, pars intermedia, first end region and second end region relative with this first end region, wherein this first end region and this second end region have one of at least and are substantially equal to or less than the maximum outside diameter of the external diameter of this pars intermedia, this rotatable target seat also comprises at least one target seat jockey, this at least one target seat jockey is suitable for that this target seat cylinder is connected to the target seat support member and this at least one target seat jockey is removable, wherein this at least one target seat jockey comprises: permanent joint and be located at fixed groove in this target seat cylinder, this permanent joint is suitable for filling at least in part this fixed groove, and wherein this permanent joint comprises the fixedly axle collar, fixedly the axle collar has internal thread, this internal thread is corresponding with the external screw thread that is provided with in this fixed groove, and wherein this fixed groove is located at the end of this target seat cylinder.
According to another embodiment, provide a kind of manufacturing to be used for the method for the rotatable target of sputtering equipment, this method may further comprise the steps: rotatable target base device is provided, this rotatable target base device is suitable for receiving entity target cylinder on this rotatable target base device, this rotatable target base device comprises target seat cylinder, this target seat cylinder has the side, pars intermedia, first end region and second end region relative with this first end region, wherein this first end region and this second end region have one of at least and are substantially equal to or less than the maximum outside diameter of the external diameter of pars intermedia, this rotatable target seat also comprises at least one target seat jockey, this at least one target seat jockey is suitable for that this target seat cylinder is connected to the target seat support member and this at least one target seat jockey is removable, wherein this at least one target seat jockey comprises: permanent joint and be located at fixed groove in this target seat cylinder, this permanent joint is suitable for filling at least in part this fixed groove, and wherein this permanent joint comprises the fixedly axle collar, fixedly the axle collar has internal thread, this internal thread is corresponding with the external screw thread that is provided with in this fixed groove, and wherein this fixed groove is located at the end of this target seat cylinder; Entity target cylinder is provided; And this entity target cylinder is disposed on the side of this target seat cylinder.
According to another embodiment, provide a kind of rotatable target base device that will be used for sputtering equipment to be connected to the target seat jockey of target seat support member, this target seat jockey comprises: permanent joint and be located at fixed groove in this target base device, and this permanent joint is suitable for filling at least in part this fixed groove; Clamping device, this clamping device be suitable for surrounding this permanent joint and target seat support member in abutting connection with target seat support member jockey; And the fixing axle collar, in this permanent joint, comprise this fixedly axle collar, and should be fixedly the axle collar have internal thread, this internal thread be located at this target base device in fixed groove in set external screw thread corresponding, wherein this fixed groove is located at the end of this target base device.
By apparent further feature of claims, this specification and accompanying drawing and details.
Embodiment also relates in order to implement disclosed method and to comprise the device of the equipment unit that is used to carry out described method step.In addition, embodiment also relates to the method for operating described equipment or making described equipment.Embodiment can comprise in order to the function of implementing this equipment or make the method step of the parts of this equipment.This method step can be via nextport hardware component NextPort, firmware (firmware), software, carry out by the program control computer of suitable software, aforesaid combination in any or with any alternate manner.
Description of drawings
Therefore, but the above detailed description feature structure of detail knowledge embodiment, more than the more specific description of embodiments of the invention of simple general introduction can be with reference to the example of embodiment.The accompanying drawing relevant with embodiments of the invention below described.In the foregoing description some will be described with reference to the following drawings in the description of following exemplary embodiments in more detail, wherein:
Fig. 1 schematically shows the cutaway view of the rotatable target base device that comprises entity target cylinder that is used for sputtering equipment;
Fig. 2 is the cutaway view of the target seat cylinder of the rotatable target base device shown in the displayed map 1 schematically;
Fig. 3 a to Fig. 3 e schematically illustrates the rotatable target base device shown in Figure 1 of the example that is provided with target seat jockey, and the cutaway view and the vertical view of this target seat jockey, and Fig. 3 f and Fig. 3 g show the clamping device according to embodiment disclosed herein;
Fig. 4 schematically shows the cutaway view of the rotatable target base device shown in Figure 1 of another example that is provided with target seat jockey;
Fig. 5 schematically shows the cutaway view of the rotatable target base device shown in Figure 1 of another example that is provided with target seat jockey;
Fig. 6 a to Fig. 6 e schematically shows the cutaway view and the vertical view of another example of target seat jockey;
Fig. 7 schematically shows the cutaway view according to the target seat cylinder of the rotatable target base device of an embodiment disclosed by the invention;
Fig. 8 a to Fig. 8 c schematically illustrates the cutaway view that is provided with according to the rotatable target base device shown in Figure 7 of the target seat jockey of embodiment disclosed by the invention;
Fig. 9 schematically shows the cutaway view according to the target seat jockey shown in Fig. 8 a.
The key element of an embodiment of imagination can advantageously be used under situation about not being described in further detail in other embodiments.
Embodiment
Now will be in detail with reference to various embodiment, one or more being illustrated in the accompanying drawing among this embodiment.Each embodiment provides in the mode of explaining, and is not intended to limit the present invention.
Under the situation of limiting protecting scope not; hereinafter, relate to the embodiment that sputter applications is described the method for rotatable target base device, rotatable target, coating equipment, the rotatable target of production, target seat jockey and connected the method for rotatable target base device.Usually, this rotatable target base device and this target seat jockey comprise the vacuum compatible material, and this coating equipment is a vacuum coating installation.The typical case of embodiment of the present invention for example is applied as and uses at the sputtering sedimentation of producing display, the manufacturing solar wafer such as LCD, TFT display and OLED (Organic Light Emitting Diode) and produce in the semiconductor device.
In following description to accompanying drawing, the same components symbol refers to same components.Generally speaking, difference about indivedual embodiment is only described.
Under the situation of limiting protecting scope not, hereinafter, the target seat cylinder of rotatable target base device for example will be called as backing cylinder (backing cylinder) or backing pipe (backing tube).Rotatable target for example will comprise backing pipe and entity target cylinder.
According to an embodiment, a kind of rotatable target base device that is used for sputtering equipment is provided, wherein this target base device is suitable for receiving entity target cylinder on this target base device, this rotatable target base device comprises: target seat cylinder, this target seat cylinder has side, pars intermedia, first end region and second end region relative with this first end region, and wherein this first end region and this second end region have one of at least and be substantially equal to or less than the maximum outside diameter of the external diameter of this pars intermedia.
For example, this target base device be suitable for entity target cylindrical-concentric be configured on this target seat cylinder.In addition, this entity target cylinder can be a hollow cylinder or a plurality of hollow cylinders of successive configurations on this target seat cylinder.Usually, by being configured on this target seat cylinder, this entity target cylinder forms rotatable target.This rotatable target base device can be used for rotatable target substantially vertically is installed in the sputtering equipment.Usually, the side of this target seat cylinder can be regarded as the cover of cylinder barrel or cylinder.
Embodiment disclosed by the invention can provide a kind of target, and this target can be the entity target cylinder (for example entity target material pipe) on backing cylinder (for example backing pipe), because can be near at least one end of this backing cylinder.This is owing to the structure of this backing cylinder, and wherein at least one end region of this backing cylinder has and is substantially equal to or less than the maximum outside diameter of the external diameter of the pars intermedia of this backing cylinder.Therefore, the cylindrical entity target with internal diameter that the external diameter with the pars intermedia of this backing cylinder is complementary can be placed on this backing cylinder easily with one heart.This target can be through design as engaging or disengaged target.Therefore, in certain embodiments, the entity target can be located on the backing pipe of sputter cathode via joint, and described joint may need grafting material.In addition, opposite with the backing cylinder that is used for through spraying target, use embodiment disclosed by the invention to make or be used to engage or the target sleeve arrangement of disengaged target becomes possibility on the backing cylinder a plurality of cylindric (for example tubulose) entity targets.In addition, according to embodiment disclosed by the invention, this rotatable target base device and the backing cylinder is reusable and can just restore by changing cylindric target.This measure especially is fit to have the rotatable target of the target material that is exhausted fast during application.
Fig. 1 schematically shows the rotatable target 1 that is used for sputtering equipment.This rotatable target 1 generally includes rotatable target base device 2 and as the tubulose entity target 5 of entity target cylinder, also claims that herein this tubulose entity target is a target 5.
In embodiment disclosed by the invention, the internal diameter of this entity target cylinder 5 can be substantially equal to or greater than the external diameter of the pars intermedia of this target seat cylinder.Usually, target 5 can have about 100mm to about 200mm, extremely about 170mm, the external diameter of the most about 145mm of about 130mm more typically.The internal diameter of target 5 can be at about 80mm to about 180mm, more typically about 110mm extremely in the scope of about 150mm, typically be about 133mm most.The thickness of this target can be at about 2mm to the scope of about 30mm.Usually, target 5 can have about 3 to 20mm, more typically about 5 to 17mm, the most about thickness of 6 to 12mm.In addition, the length of target 5 can be at about 240mm to about 3500mm, more typically about 1360mm be to about 1400mm, about 1560 to about 1600mm, about 1660mm extremely about 2050mm or about 2500mm extremely in the scope of about 2540mm of about 1700mm, about 2010mm extremely.The external diameter of the backing pipe 4 in (promptly in the zone of side 3) can be at about 80mm to about 180mm, more typically about 110mm extremely in the scope of about 150mm, typically be about 133mm most in pars intermedia 12.The internal diameter of backing pipe can be at about 60mm to about 160mm, more typically about 90mm extremely in the scope of about 130mm, typically be about 125mm most.Usually, the length of backing pipe can be more typically about 1440mm at about 300mm to the scope of about 3600mm, be about 1640mm, is about 1740mm, is about 2090mm, is about 2240mm, is about 2580mm, or is about 3600mm.In embodiment more disclosed by the invention, the external diameter and/or the internal diameter of the pars intermedia 12 of backing pipe are essentially constant on the length of pars intermedia 12.In addition, in embodiment more disclosed by the invention, the external diameter and/or the internal diameter of entity target cylinder 5 are essentially constant on the length of target.
The rotatable target base device 2 that further schematically shows rotatable target 1 shown in Figure 1 among Fig. 2 does not dispose target 5 on the rotatable target base device 2 of this rotatable target 1.This rotatable target base device 2 comprises backing pipe 4.In embodiment more disclosed by the invention, at least one end region of this backing pipe has and is substantially equal to or less than the maximum outside diameter of the external diameter of this pars intermedia.
The backing pipe 4 of the example shown in Fig. 1 has the pars intermedia 12 with side 3, and further has first end region 7 and second end region 9.First end region 7 and second end region 9 all have the maximum outside diameter that is substantially equal to usually at the external diameter of this pars intermedia at 3 places, side of backing pipe 4.In addition, backing pipe 4 can have opening 80,19 in each end region 7 and 9.In addition, backing pipe 4 can comprise that an inner space 6 is selected from assembly in the group that is made up of magnet arrangement and cooling system in order to hold at least one.
In embodiment disclosed by the invention, this rotatable target base device can comprise at least one target seat jockey that is suitable for this target seat cylinder is connected to the target seat.Therefore, at least one target seat jockey can be located at locating one of at least of first end region of this target base device and second end region.In the distortion of present embodiment, at least one target seat jockey is movably.
In embodiment more disclosed by the invention, end region of the target seat cylinder of this target base device or two end region can have and be substantially equal to or less than the maximum outside diameter of the external diameter of this pars intermedia, and can be provided with target seat jockey.
Therefore, target easily can be installed in target base device place, even the internal diameter of target is substantially equal to or only be slightly larger than the external diameter of backing pipe.This is because target is installed in the end of this backing pipe, and this end has and is substantially equal to or less than the maximum outside diameter of the external diameter of the pars intermedia of this backing pipe, this target seat jockey can be removed.Target can be placed on one heart subsequently on the backing pipe 4 and with the rotating shaft parallel of this target and backing pipe be pushed into desired location.In certain embodiments, the vertical central axis of backing pipe is the rotating shaft of this backing pipe.
This target seat jockey can be suitable for this target seat cylinder is connected to the target seat support member.In an embodiment disclosed by the invention, can respectively provide a target seat jockey in first end region and second end region, so that this target seat cylinder is connected with two target seat support member.In another embodiment, in this target seat support member one or two can be the part of rotary target material seat drive system, and one or two in this target seat support member can further provide for example supply or the power supply supply of cooling fluid to the inner space of this target seat cylinder.
According to an exemplary embodiments, first end region of this target seat cylinder and second end region one of at least can be suitable for being provided with a target seat jockey.
According to exemplary embodiments disclosed by the invention, this at least one target seat jockey can comprise that one is suitable for this target seat cylinder is connected to the clamping device of target seat support member.More typically, this at least one target seat jockey can comprise permanent joint and be located at fixed groove in this target seat cylinder that this permanent joint is suitable for filling at least in part this fixed groove.In addition, this clamping device can be suitable for surrounding this permanent joint and target seat support member in abutting connection with target seat support member jockey.First end region of this target seat cylinder and second end region can comprise one of at least the fixed groove in the side of being located at this target seat cylinder.
According to another embodiment, provide a kind of rotatable target base device that will be used for sputtering equipment to be connected to the target seat jockey of target seat support member, this target seat jockey comprises that at least one is selected from the assembly of the group that is made up of following assembly: permanent joint and be located at fixed groove in this target base device, and this permanent joint is suitable for filling at least in part this fixed groove; Clamping device, this clamping device be suitable for surrounding this permanent joint and target seat support member in abutting connection with target seat support member jockey; Reach the fixedly axle collar, in this permanent joint, comprise this fixedly axle collar, and should be fixedly the axle collar have internal thread, the external screw thread that this internal thread corresponds in the fixed groove to be provided, this fixed groove is arranged in this target base device, and wherein this fixed groove is located at end of this target base device.
Shown in example among Fig. 2, the target seat cylinder 4 that also is called the backing pipe among the present invention is distinguished 7 and 9 places endways and is respectively comprised a groove 10.As mentioned above, in this example, first end region 7 and second end region 9 all have the maximum outside diameter of the external diameter that is substantially equal to this pars intermedia.This groove 10 is located in the side 3 of backing pipe 4.According to the representative instance of embodiment disclosed by the invention, groove 10 in the form of a ring.
Be connected to the clamping device of target seat support member according to the disclosed target base device that is suitable for being used for sputtering equipment of the embodiment of the invention, and the embodiment of the invention disclosed comprise this clamping device as the rotatable target base device of target seat jockey can be respectively applied for be clamped in apply and/or system's (for example rotatable drive system) of sputtering equipment in target backing cylinder.
Fig. 3 a and Fig. 3 b illustrate an example, and wherein the rotatable target base device 2 shown in Fig. 2 is provided with two target seat jockeys 11.In this example, first end region 7 of backing pipe 4 and second end region 9 respectively are provided with a target seat jockey 11.Usually, one or two target seat jockey 11 can remove from backing pipe 4.In this example, each target seat jockey 11 for removable and comprise the stationary clamp that is shaped to clamp 17 as permanent joint and clamping shell 18 as clamping device.
In the example shown in Fig. 3 a to Fig. 3 g, clamp 17 and clamping shell 18 are in the form of a ring.Usually, according to embodiment disclosed by the invention, this target seat cylinder is the tubular holder cylinder, and at least one be selected from the assembly of the group that forms by this target seat jockey, this clamping device, this fixed groove and this target seat support member jockey can be in the form of a ring.In addition, in embodiment disclosed by the invention, this clamping device can comprise segmental structure.
Fig. 3 a illustrates the backing pipe 4 of the rotatable target base device 2 under confined state and the representative instance of target seat jockey 11.In this example, backing pipe 4 is connected to the target seat support member 15 that has as the collar flange 16 of target seat support member jockey in each end region.The tubulose entity target 5 of rotatable target 1 is not shown at drawing.In addition, at each end region 7 and 9 places, a ring-type clamp 17 is retained to this backing pipe.Each clamp 17 has inner projection 19 and internal diameter, so that be provided with the inner projection 19 of corresponding ring-type clamp 17 in each annular recess 10.The cutaway view of figure 3c shows the inner projection 19 of ring-type clamp 17 and the contact side 13 of clamp 17, and wherein clamp 17 can be abutted to the flange 16 of this target seat support member.In addition, under the confined state shown in Fig. 3 a, on each clamp 17, be equipped with ring-type clamping shell 18, the external diameter that this ring-type clamping shell 18 has greater than the external diameter of clamp 17.What clamping shell 18 further illustrated and be included in each side setting in Fig. 3 f has the outer shroud 25 of two ring-types across assembly 27.The width of clamping shell 18 (promptly encircling 25 width) is crossed over the summation of clamp 17 with the width of flange 16 of target seat support member 15 for this clamping shell 18.Therefore, under this confined state, these two ring-types are surrounded clamp 17 and flange 16 across assembly 27, and by clamping tension force backing pipe 4 and target seat support member 15 are interfixed, and this flange 16 can comprise the vacuum seal (not shown).Therefore, can use two target seat jockeys 11 between backing pipe 4 and each target seat support member 15, to form vacuum-tight seal (vacuum tight seal).
In a representative instance, the width of clamping shell 18 (for example encircling 25 width) can be equal to or slightly less than the summation of the width of clamp 17 and flange 16.Therefore, can between the combination of clamp 17 and flange 16 and clamping shell 18, an interference engagement be set or be pressed into and cooperate.Thereby clamping shell 18 can be fixed to by being pressed into and cooperate on the fixing clamp 17 and flange 16 that adjoins each other.
In this example, the height of clamp 17 (promptly when clamp 17 is assemblied on the backing pipe 4, perpendicular to the size of the ring-type axle collar of the clamp 17 of the longitudinal axis of backing pipe 4) is consistent with the height of the ring-type axle collar of flange 16 usually.Therefore, clamp 17 can align with the neighboring of flange at this clamp with flange 16.For example, the height of the ring-type axle collar of clamp 17 can be at about 10mm to the scope of about 50mm.
Usually, this clamp can comprise a plurality of segmentation grip modules, and/or this clamping shell can comprise a plurality of segmentation clamping shells.More generally, this clamp can comprise ring-type segmentation grip module, and/or this clamping shell can comprise ring-type segmentation clamping shell.This clamp and this clamping shell can be in the form of a ring.Generally speaking, the ring-type segmented assemblies has following length and radius: when mutual vertically alignment and when observed, the observer sees a ring.The most typically, this ring-type segmentation grip module and/or this ring-type segmentation clamping shell can be semicircular, also are called semicircle in this article.In addition, this segmentation grip module or ring-type segmentation grip module be twisting mutually, and/or this segmentation clamping shell or the mutual twisting of ring-type segmentation clamping shell.
According to embodiment disclosed by the invention, this target seat jockey comprises clamping device, and this target seat jockey is allowed and is fixed in the existing grasping system of coating equipment being installed in the joint of (for example on a backing pipe) on the target base device or the disengaged cylindric target of entity.In one embodiment, this target seat jockey can comprise the clamping shell of a plurality of segmentation clamping shells.Yet in certain embodiments, this clamping shell can respectively be made complete one.This part can have flexible structure, is configured in this clamping shell on this target base device respectively with one heart and is installed on the clamp of this target base device to allow.
As mentioned above, the disclosed target seat of embodiment of the invention jockey does not need spring.Therefore, the disclosed target seat of embodiment of the invention jockey can easily be installed on backing pipe and the target seat support member when adjoining each other.In addition, when using the disclosed target seat of embodiment of the invention jockey, in coating equipment, do not need other fixing (for example using cap nut) that the rotatable target that comprises the backing pipe is installed.In addition, the segmental structure of the embodiment of this target seat jockey also promotes more easily the backing pipe to be installed on the target seat support member.
In the example shown in Fig. 3 a to Fig. 3 g, clamp 17 has two semicircle grip modules 21 as segmentation grip module 21, and described two semicircle grip modules 21 utilize a hinge 20 mutual twistings.This semicircle grip module 21 can be closed into a ring, the clamp 17 shown in the vertical view of Fig. 3 d and Fig. 3 e.In addition, shown in Fig. 3 f and Fig. 3 g, clamping shell 18 comprises that two semicircle clamping shells 23 are as segmentation clamping shell.Semicircle clamping shell 23 is stranded mutually and can be closed into ring at a hinge 24 places, for example forms the clamp axle collar.According to this example, this semicircle clamping shell 23 can utilize securing member 45 and be fastening mutually.
According to present embodiment, the segmental structure of clamp 17 is allowed these two semicircle grip modules 21 around backing pipe 4 and closure is positioned at projection 19 in the annular recess 10 simultaneously.In the disclosed example of the embodiment of the invention, the internal diameter (for example this internal diameter is substantially equal to or is slightly larger than the diameter of groove 10) of suitably selecting closed clamp 17 is to provide the matched well of clamp 17 with groove 10.
In addition, the disclosed clamping device of the embodiment of the invention has and allows size and the internal diameter in abutting connection with target seat support member jockey installed of this clamping device around the permanent joint of this target seat jockey and target seat support member.In the embodiment shown in Fig. 3 f and Fig. 3 g, clamping shell 18 comprises two semicircle clamping shells 23, these two semicircle clamping shells 23 have separately outer semicircle assembly 28 and side attachment outside this two side semicircles on semicircle assembly 28 across assembly 29.The outer shroud 25 that is formed by outer semicircle assembly 28 when closed clamping shell 18 can have the internal diameter greater than the external diameter of the external diameter of clamp 17 and flange 16.In addition, two ring-types that formed across assembly 29 by semicircle when closed clamping shell 18 can be matched with across the internal diameter of assembly 27 or greater than the external diameter of the flange socket of backing pipe 4 and target seat support member 15, shown in Fig. 3 a, flange 16 is installed on respectively in this flange socket.
According to one embodiment of present invention, this target seat jockey and/or this target seat support member can comprise chamfering (chamfered) clamp area.For example, the connector of this target seat support member (for example connecting ring or the ring-type axle collar) can have the outer clamp area of chamfering.In addition, the clamping device of this target seat jockey (for example the clamping shell 18) can have clamp area in the chamfering.As shown in Figure 4, according to the distortion of example shown in Fig. 3 a to Fig. 3 g, the clamp 17 on backing pipe 4 and the flange 16 of target seat support member 15 can have bevel edge, thereby form chamfering side 30,31 respectively.The chamfering side 30 of clamp 17 and the 13 relative arrangements of the contact side of clamp 17.In addition, the chamfering side 31 of flange 16 is oppositely arranged with the contact side (the flange side that soon contacts with the contact side 13 of clamp 17) of flange 16.In addition, when clamp 17 and flange 16 in abutting connection with the time, the ring-type of clamping shell 18 can correspondingly tilt across assembly 27, so that across chamfering side 30 and 31.Therefore, when being installed in the clamp 17 on the backing pipe 45 and can comprising that the flange 16 of a vacuum seal (not shown) adjoins each other, and when clamping shell 18 was clamped on this clamp 17 and the flange 16, ring-type can vacuum tightness mode stationary clamp 17 and flange 16 across assembly 27.
When being installed in clamp 17 on the backing pipe 4, the chamfering side 30 of clamp 17 can have the inclination angle relevant with the side 3 of backing pipe 4, and this tilt angle ranges is generally about 105 ° between about 100 ° and about 120 °.The chamfering side 31 of flange 16 can have the inclination angle relevant with the flange socket of target seat support member 15, and this tilt angle ranges is generally about 105 ° between about 100 ° and about 120 °.The ring-type of clamping shell 18 can have with ring 25 relevant inclinations angle with side 30,31 across assembly 27 compares unanimity or even littler inclination angle.Therefore, in the time of on clamping shell 18 being assemblied in the clamp that is adjacent to each other 17 and flange 16, can form a clamping tension force.For example, can have and ring 25 relevant inclinations angle across assembly 27, this tilt angle ranges is between about 95 ° and about 120 °, be generally about 105 °, another can have across assembly 27 and encircle 25 relevant inclinations angle, and this tilt angle ranges is generally about 105 ° between about 95 ° and about 120 °.Therefore, when clamping shell 18 cooperates fixing and when being clamped in the combination of clamp 17 and flange 16 via being pressed into, across the inclination angle of assembly 27 can increase and subsequently can with side 30,31 the inclination angle consistent, therefore clamping tension force is provided.
Because this chamfering clamp area can promote the installation of this target seat jockey.For example, in the example of Fig. 4, chamfering side 30,31 and chamfering ring-type are allowed across assembly 27 clamping shell 18 are advanced on the clamp 17 and flange 16 of adjacency.Therefore, can easily rotatable target base device 2 be fixed to target seat support member 15.
According to another embodiment disclosed by the invention, at least one target seat jockey of this rotatable target base device can comprise the target fixture, and this target fixture is alternatively for being located at the sept device at stationary clamp place.The sept example has been shown among Fig. 5, and with the difference shown in Fig. 3 a to Fig. 3 g be a sept 40 as this sept device attached on the clamp 17.As shown in Figure 5, when clamp 17 assemblings that backing pipe 4 and two comprised sept 40, sept 40 is located on the side 3 of backing pipe 4.Therefore, when being located at target 5 on the side 3 with one heart, this target 5 is positioned between two septs 40 in this example, and these two septs 40 are fixed in position at target 5 with target 5.In the sept 40 one or two can be in the form of a ring.In an alternate example, one or two in the sept 40 can comprise the spacer elements of a plurality of side attachment on clamp separately.According to another example, one or two in the sept 40 can be the spacer loops that is provided with separately except that clamp 17.The width of sept 40 (promptly when being assemblied in clamp 17 on the backing pipe 4 with the direction of the rotating shaft parallel of backing pipe 4 on width) can be to the scope of about 50mm at about 2mm, and more preferably can be extremely in the scope of about 40mm at about 20mm.The height of sept 40 (promptly vertical with the width of this sept and when being assemblied in clamp 17 on the backing pipe 4 size vertical with the side 3 of backing pipe 4) can be at about 15mm to the scope of about 50mm.
In addition, these one or more septs 40 provide the gap between clamping shell 18 and target 5.This gap can have common about 2mm to about 50mm, more typically at about 20mm width in the scope of about 40mm extremely.Therefore, may there be target 5 and the parallel thermal expansion of rotating shaft backing pipe 4 (that is, the longitudinal axis in this example), and can avoid the ill-effect of this thermal expansion.In addition, can reach the optimum position of the rotating shaft parallel of tubulose entity target 5 and rotatable target 1, for example the center.Sept 40 remains on the fixed position with target 5, although have the gap between clamping shell 18 and target 5.
In the distortion of this example, when target 5 was placed on the side 3, in this backing pipe, only one comprised that the fixture of the clamp 17 with sept 40 can be located at an end of backing pipe 4.The clamp 17 that does not for example have sept can be installed in another end region of backing pipe 4.Therefore, provide a gap between a clamping shell 18 of target 5 and this jockey, this jockey is connected to target seat support member 15 with backing pipe 4.
For example, according to representative instance of the present invention, when rotatable target 1 vertically is assemblied in the coating unit that is used for sputter applications, will comprise that the clamp 17 of sept 40 is located at the end region of backing pipe 4, this backing pipe is placed in the bottom of the rotatable target 1 that comprises backing pipe 4 and target 5.This is particularly useful for disengaged target, because sept 40 serves as fixedly shoulder disengaged target is remained on the position of this disengaged target.More particularly, when disengaged target is installed with one or more adapter rings, should can remain in the position of this (a bit) adapter ring by (a plurality of) sept 40 respectively by (a bit) adapter ring.
Therefore, the embodiment of disclosure of the Invention is suitable for vertical substantially being assemblied in the sputtering equipment of rotatable target 1.This is particularly useful for comprising the example of the target seat jockey of one or more septs 40, because the reliable location, aligning, placed in the middle and steadily fix of tubulose entity target 5 should (a bit) sept 40 be provided respectively.
In the another distortion of the example of target seat jockey shown in Figure 5, comprise that the clamp 17 of sept 40 and the flange 16 of target seat support member 15 can have the described chamfering of Fig. 4 side as mentioned.In addition, when flange 16 and clamp 17 in abutting connection with the time, the ring-type of clamping shell 18 can correspondingly tilt across assembly 27, so that across chamfering side 30 and chamfering side 31.In addition, can correspondingly adjust when closed clamping shell 18 two ring-types forming across assembly 29 by the side semicircle internal diameter across assembly 27.For example, under confined state, can be matched with or greater than the external diameter of sept 40 towards the internal diameter across assembly 27 of the clamping shell 18 of target.
As the representative instance of employed target material among the embodiment disclosed by the invention, target 5 can comprise tin indium oxide (ITO) or silicon, for example 5N or 3N quality, and this target 5 can mix with boron, for example Z-600.
According to another embodiment, provide a kind of manufacturing to be used for the method for the rotatable target of sputtering equipment, this method may further comprise the steps: the rotatable target base device that is provided for sputtering equipment, wherein this target base device is suitable for receiving entity target cylinder on this target base device, this rotatable target base device comprises target seat cylinder, this target seat cylinder has the pars intermedia with the side, and this target seat cylinder further has first end region and second end region relative with this first end region, and wherein this first end region and this second end region have one of at least and be substantially equal to or less than the maximum outside diameter of the external diameter of this pars intermedia; Entity target cylinder is provided; And this entity target cylinder is configured on this side of this target seat cylinder.This method for example can further comprise after this entity target cylinder in configuration: one of at least locate to install target seat jockey in this first end region of this target seat cylinder and this second end region.This can be selected the target base device to be further adapted for this target seat cylinder is connected to target seat support member and at least one removable target seat jockey, wherein this at least one target seat jockey comprises permanent joint and is located at fixed groove in this target seat cylinder, this permanent joint is suitable for filling at least in part this fixed groove, wherein this permanent joint comprises the fixedly axle collar with internal thread, the external screw thread that this internal thread corresponds in the fixed groove to be provided, this fixed groove is located at an end of this target seat cylinder.Usually, this entity target cylinder can be hollow cylinder or a plurality of hollow entity cylinder that adjoins each other and be provided with.This entity target cylinder or this a plurality of entity cylinders can be configured on this target seat cylinder with one heart.Usually, by with this entity target cylinder and the combination of target seat cylinder, form this rotatable target according to above another embodiment.This rotatable target can be used for the basic vertical assembling of the sputtering target material in the sputtering equipment.
In an example, provide the backing pipe 4 shown in Fig. 2.Subsequently, tubulose entity target 5 for example is placed on second end region 9 with one heart, the central shaft (being the rotating shaft in this example) that is parallel to backing pipe 4 moves, and medially is placed on this backing pipe.Subsequently, can settle the clamp 17 that comprises two hinged semicircle grip modules 21 as target seat jockey with one heart at the end region 7 and end region 9 places of backing pipe 4.In this position, the projection 19 of each clamp 17 is filled each groove 10 of backing pipe 4.By around the adjacent flanges 16 closed clamping shells 18 of clamp 17 and this target seat support member in the lump by securing member 45 with clamp 17 fastenings, each clamp 17 can be fixed on the backing pipe 4.Therefore, tubulose entity target 5 is placed between the clamp 17, and rotatable target 1 is provided.
In the distortion of above example, place with one heart tubulose target 5 on backing pipe 4 after, only stationary clamp 17 can be installed in an end region of backing pipe 4.This can be for example carries out when restoring rotatable target 1 when placing the target of exhausting 5 (as will be described below).If another end region of backing pipe 4 has been provided with target seat jockey or any other end piece, for example be soldered to the flange of another end region of backing pipe 4, also can use the above-mentioned distortion of this method.
According to another embodiment, can provide a kind of recovery to be used for the method for the rotatable target of sputtering equipment, may further comprise the steps: the rotatable target that is provided for sputtering equipment, this rotatable target comprises rotatable target base device, this rotatable target base device comprises target seat cylinder, target seat cylinder has the pars intermedia with the side, and further have first end region and second end region relative with first end region, wherein this first end region and this second end region have one of at least and are substantially equal to or less than the maximum outside diameter of the external diameter of this pars intermedia, and this rotatable target base device has the entity target cylinder on the side that is configured in this target seat cylinder and is configured in target seat jockey on this at least one end region; This target seat jockey this at least one end region from this target seat cylinder is unloaded; This entity target cylinder is unloaded; Another entity target cylinder is provided; This another entity target cylinder is configured on this side of this target seat cylinder; And this at least one end region place that this target seat jockey is installed in this target seat cylinder.
For example, second end region 9 of backing pipe 4 has and is substantially equal to or less than the maximum outside diameter of the external diameter of pars intermedia 12.Therefore, tubulose entity target 5 (for example this tubulose entity target 5 can have the internal diameter of the external diameter of the pars intermedia that is slightly larger than this backing pipe) can be by being disposed on the side 3 that is placed on backing pipe 4 on second end region 9 with one heart.Subsequently, can be by these tubulose entity target 5 rotating shafts along this backing pipe (being the longitudinal axis in this example) being moved on backing pipe 4 or promoting and this tubulose entity target 5 is placed in desired location.
In addition, the entity target cylinder of the embodiment of the invention can be hollow cylinder.This entity target cylinder can be configured on this target seat cylinder with one heart.Usually, according to above another embodiment,, restore this rotatable target by handling and making up this entity target cylinder and target seat cylinder.
Embodiment disclosed by the invention allows cylindric target (this cylindric target can be entity target material pipe) is located on the backing cylinder (for example backing pipe), because can be near at least one end of (access from) this backing cylinder.This is owing to the structure of this backing cylinder, and wherein at least one end region of this backing cylinder has and is substantially equal to or less than the maximum outside diameter of the external diameter of the pars intermedia of this backing cylinder.This target can be through design as engaging or disengaged target.According to embodiment disclosed by the invention, the cylindric or tubulose entity target with internal diameter that the external diameter with the side of this pars intermedia matches can easily be placed on this backing cylinder.Therefore, in certain embodiments, can avoid the entity target to engage, more no longer need to use expensive grafting material with the costliness of backing cylinder.In other example, the entity target can be located on the backing pipe of sputter cathode by joint.In addition, opposite with the backing pipe that is used to spray target, use embodiment disclosed by the invention to make or be used to engage or the target sleeve arrangement of disengaged target becomes possibility on the backing pipe a plurality of cylindric or tubulose entity targets.In addition, according to embodiment disclosed by the invention, this rotatable target base device and the backing pipe is reusable respectively and can be only restore by this cylindric target of transposing.This is particularly suited for having the rotatable target of the target material of exhausting fast during application.In addition, this rotatable target base device can be used for being assemblied in the sputtering equipment rotatable target perpendicular.
In addition, according to some embodiment, because one or more target seat jockeys with target fixture can be provided, this target seat jockey is allowed between this cylindrical entity target and this target seat jockey gapped, therefore can be different at this backing cylinder material and the thermal coefficient of expansion between this target material.In addition, in the embodiment that comprises this target seat jockey, this target can be fixed to this backing cylinder or just placed in the middle or align in desired location on this backing cylinder.
According to an example disclosed by the invention, this target seat jockey can comprise stationary clamp, and this stationary clamp comprises a plurality of ring-type segmentation grip modules that are suitable for being closed into clamp ring; And clamping device, this clamping device comprise a plurality of ring-type segmentation clamping shells that are suitable for surrounding a plurality of ring-type segmentation grip modules that are closed into clamp ring and target seat support member in abutting connection with target seat supports ring, these a plurality of ring-type segmentation grip modules comprise one of at least adjusting device, this adjusting device is suitable for these a plurality of ring-type segmentation clamping shells are assemblied in this on clamp ring and target seat supports ring, so that this ring-type segmentation clamping shell and this ring-type segmentation grip module are located on the peripheral position of mutual biasing, wherein this adjusting device is located on the neighboring of at least one this ring-type segmentation grip module alternatively.
For example, in the example of the target seat jockey 11 shown in Fig. 3 a to Fig. 3 g, except clamp 17 and clamping shell 18, this stationary clamp can comprise clamp 170 shown in Fig. 6 a to Fig. 6 e and clamping shell 180.As adjusting device, pin 172 can be located on the neighboring of semicircle assembly 21 of clamp 170, for example between the end of grip module 21, usually in centre, shown in Fig. 6 b and Fig. 6 c across the semicircle of assembly 21.Clamping shell 180 can comprise two openings 182 at free end 184 places of two semicircle clamping shells 23, at each free end 184 place an opening 182 is arranged respectively.There is shown clamping shell 180 at analysing and observe of Fig. 6 e, and show the position of opening 182.Shown in Fig. 6 d, under closure state, opening 182 is in the formation combined openings at the interface 183 of the free end 184 of clamping shell 180.When clamping shell 180 centers on clamp 170 closures, can form pin 172 to fill combined openings 183, combined openings 183 is the combination of opening 182.
Perhaps, in the distortion of above example, this adjusting device can be the mark (not shown), and color dot is for example arranged, and replaces pin 172 to be positioned on the neighboring of a semicircle assembly 21 of clamp 170.Can form this clamping shell 180, for example this clamping shell 180 can have the length of clamping shell 23, to provide the gap between free end 184 when this clamping shell 180 is closed.This gap allows when clamping shell 180 centers on clamp 170 closures optical detection to be carried out in the neighboring of the semicircle assembly 21 that underlies, and marks whether to be positioned at this below, gap of clamping shell 180 to check this.
In another embodiment, provide a kind of rotatable target base device that will be used for sputtering equipment to be connected to the method for target seat support member, may further comprise the steps: the rotatable target base device that is provided for sputtering equipment, wherein this target base device is suitable for receiving entity target cylinder on this target base device, this rotatable target base device comprises target seat cylinder, this target seat cylinder has side surface, pars intermedia, first end region and second end region relative with this first end region, wherein this first end region and this second end region have one of at least and are substantially equal to or less than the maximum outside diameter of the external diameter of this pars intermedia; The target seat that comprises stationary clamp jockey is provided, this stationary clamp comprises a plurality of ring-type segmentation grip modules and a plurality of ring-type segmentation clamping shell, these a plurality of ring-type segmentation grip modules are suitable for being closed into clamp ring, these a plurality of ring-type segmentation clamping shells be suitable for surrounding a plurality of ring-type segmentation grip modules that are closed into clamp ring and target seat support member in abutting connection with target seat supports ring, these a plurality of ring-type segmentation grip modules comprise one of at least adjusting device alternatively, this adjusting device is suitable for these a plurality of ring-type segmentation clamping shells are assemblied in this on clamp ring and target seat supports ring, so that this ring-type segmentation clamping shell and this ring-type segmentation grip module be located on the peripheral position of mutual biasing, wherein this adjusting device is located at least one the neighboring of this ring-type segmentation grip module alternatively; This target seat jockey being assemblied in first end region of this rotatable target base device and second end region by making these a plurality of ring-type segmentation grip modules be closed into clamp ring locates one of at least; This clamp ring is abutted to the target seat supports ring of target seat support member; And should be assemblied in this on clamp ring and target seat supports ring by a plurality of ring-type segmentation clamping shells, so that this ring-type segmentation clamping shell and this ring-type segmentation grip module are located on the peripheral position of mutual biasing.
Therefore, according to the example shown in Fig. 6 a to Fig. 6 e, backing pipe 4 can be provided and comprise clamp 170 and the target seat jockey of clamping shell 180.Subsequently, by semicircle grip module 21 is closed and clamp 170 is assemblied in one of first end region of backing pipe 4 and second end region around the groove 10 of backing pipe 4.Afterwards, clamp ring 170 is abutted to the target seat supports ring 16 of target seat support member 15.The semicircle clamping shell 23 of clamping shell 180 is settled around closed clamp 170 and in abutting connection with target seat supports ring 16, so that pin 172 is positioned in the opening 183 of clamping shell 180.Subsequently, use securing member 45 that clamping shell 180 is centered on closed clamp 17 and fastening in abutting connection with target seat supports ring 16.Because pin 172 is positioned in the opening at the interface 183 between free end 184, so the semicircle clamp assemblies 23 of clamping shell 18 and the semicircle assembly 21 of clamp 17 are located on the peripheral position of mutual biasing.For example, shown in Fig. 6 b, as if the centre of pin 172 attached to the semicircle of grip module 21, then semicircle assembly 23 and semicircle clamp assemblies 21 can have 90 ° radial offset.This means and avoid and to be placed under the interface between the semicircle clamping shell 23 at the interface between the semicircle grip module 21.Therefore, clamp pressure can evenly distribute.In addition, the vacuum tightness anchor clamps of backing pipe 4 to target seat support member 16 are set, these vacuum tightness anchor clamps can comprise the vacuum seal (not shown), and can avoid being positioned the leakage in these anchor clamps.
The phase jljl that is applicable to the distortion of above example comprises the mark as adjusting device.For skew is provided, when with clamping shell 180 during around clamp 170 assemblings, the operator that the target seat jockey of backing pipe 4 and this example is installed in target seat support member 15 places must guarantee that as seen this be marked in the gap between closed semicircle clamping shell 23.
According to another embodiment, provide a kind of rotatable target base device that will be used for sputtering equipment to be connected to the target seat jockey of target seat support member, this target seat jockey comprises permanent joint, this permanent joint comprises the fixedly axle collar, should be fixedly the axle collar have and be located at the corresponding internal thread of external screw thread in the fixed groove in this target base device, wherein this fixed groove is located at the end of this target base device.In addition, this at least one target seat jockey can comprise clamping device, this clamping device be suitable for surrounding this permanent joint and target seat support member in abutting connection with target seat support member jockey.
Fig. 7 schematically shows the cutaway view according to the target seat cylinder 200 of the rotatable target base device of an embodiment disclosed by the invention.This example is that with the difference of example shown in Figure 2 end region 7 comprises the groove 100 rather than the groove 10 of the outermost end that is placed in end region 100.Therefore, groove 100 in the form of a ring, this groove is located at the outermost end of target seat cylinder 200 and around the opening 80 of target seat cylinder 200.Groove 100 has the external screw thread 101 at the periphery place of groove 100.
Fig. 8 a and Fig. 8 b schematically show the cutaway view of the rotatable target base device shown in Fig. 7, provide according to the disclosed target seat of embodiment of the invention jockey.Shown in Fig. 8 a, the target seat jockey of present embodiment comprises the fixedly axle collar 270, this paper also claim this fixedly the axle collar be the axle collar 270, this fixedly the axle collar can be assemblied on the target seat cylinder 200 at groove 100 places.For this reason, fixedly the axle collar 270 has and the external screw thread 101 corresponding internal threads of being located in the groove 100 of target base device 200 271.Shown in Fig. 8 b, when the axle collar 270 and flange 16 adjoined each other, the clamping shell 18 shown in Fig. 3 f and Fig. 3 g can be assemblied on the flange 16 of the axle collar 270 that is installed on the target seat cylinder 200 and target seat support member 15 as clamping device.In embodiment disclosed by the invention, suitably select the fixedly internal diameter of the axle collar 270, for example be substantially equal to or be slightly larger than the diameter of groove 100, so that the matched well to the axle collar 270 and groove 100 to be provided.In addition, clamping shell 18 has allow size and the internal diameter that clamping shell 18 is installed around the flange 16 of the axle collar 270 and target seat support member 15 when the axle collar 270 and flange 16 adjoins each other.In this example, clamping shell 18 comprises two semicircle clamping shells 23, has outer semicircle assembly 28 and two side attachment chamfering side semicircle to the semicircle assembly 28 separately across assembly 29.The outer shroud 25 that is formed by outer semicircle assembly 28 when closed clamping shell 18 can have the internal diameter greater than the external diameter of the external diameter of the axle collar 270 and flange 16.In addition, two ring-types that formed across assembly 29 by the side semicircle when closed clamping shell 18 can be matched with across the internal diameter of assembly 27 or greater than the external diameter of the flange socket of backing pipe 4 and target seat support member 15, assemble each flange 16 respectively in this flange socket.
The Fig. 9 that shows internal thread 271 also shows the fixedly axle collar 270.In addition, fixedly the axle collar 270 can have chamfering side 30 and sept 40, and is described about the example of Fig. 4 as mentioned.In the present embodiment, fixedly the flange 16 of the axle collar 270 and target seat support member 15 has bevel edge, thereby forms chamfering side 30,31 respectively.The fixedly contact side 13 relative arrangements of the chamfering side 30 of the axle collar 270 and the axle collar 270.In addition, contact side (soon the contacting the flange side) relative positioning of the chamfering side 31 of flange 16 and flange 16 with the axle collar 270 contact sides 13.In addition, when the axle collar 270 and flange 16 were adjacent, the ring-type of clamping shell 18 can correspondingly tilt across assembly 27, so that across chamfering side 30 and 31.Therefore, when being installed in the axle collar 270 on the backing pipe 45 and can comprising that the flange 16 of vacuum seal (not shown) adjoins each other, and when being clamped in clamping shell 18 on this axle collar 270 and the flange 16, ring-type across assembly 27 can the vacuum tightness mode the fixedly axle collar 270 and flange 16.
In Fig. 8 c, show the fixedly distortion of the axle collar 270, this distortion comprises the groove 272 in one or more neighborings of being located at the fixing axle collar 270, for example a plurality of holes 272.Hole 272 is intended to allow the engagement of instrument, to promote the fixedly assembling of the axle collar 270 in the groove 100 of target seat cylinder 200.
According to embodiment (not shown) disclosed by the invention, the said fixing axle collar 270 can not have chamfering side 30 and/or sept 40.In the case, clamping shell 18 is through adjusting and can forming shown in Fig. 3 a.
In addition, in some embodiment (not shown), the clamping device that is used for the embodiment of Fig. 7 to Fig. 9 can comprise a plurality of segmentation clamping shells, these a plurality of segmentation clamping shells be suitable for surrounding this fixedly the axle collar and target seat support member in abutting connection with target seat support member jockey, shown in for example addressing about Fig. 3 f and Fig. 3 g as mentioned.
In another embodiment (not shown), Fig. 8 a to Fig. 8 c and the fixedly axle collar 270 shown in Figure 9 can comprise long and narrow sept 40, for example have with reference to 40 described structure and the effects of the sept shown in the figure 5.This long and narrow sept 40 for example can have the zone with chamfering side 30 adjacency, and this zone has less external diameter with engagement clamping shell 18.
According to embodiment of the present invention, this target seat cylinder can have aforesaid target seat jockey in each end region 7 and 9 places.For example, this target seat cylinder can be provided with groove 100, the fixedly axle collar 270 and/or clamping shell 18 or 180 in two end region.In another example, be provided with groove 100, the fixedly axle collar 270 and/or clamping shell 18 or 180 during this target seat cylinder can be distinguished endways, and be provided with groove 10, stationary clamp 17 or 170 and/or clamping shell 18 or 180 in another end region.In other example, this target seat cylinder can only be provided with an aforesaid target seat jockey in end region 7 or 9.For example, this target seat cylinder can be only be provided with groove 100, the fixedly axle collar 270 and/or clamping shell 18 or 180 an end region.
In addition, in embodiment more as herein described, sept 40 can have at the free end of this sept at the height of about 15mm to the scope of about 50mm side 3 sizes of target seat cylinder 4 (promptly on being assemblied in target seat cylinder 4 time perpendicular to) to support this target cylinder reliably.This situation under the situation of the rotatable target of perpendicular assembly, when sept 40 for the part of the bottom target seat jockey that is connected to bottom target seat support member and for example directly be positioned below this target cylinder or be especially to need below this bottom target cylinder.In addition, under the situation of the rotatable target of vertical assembly, this target seat cylinder can be remained on this target seat cylinder upper end district, this upper end district has the second target seat jockey at upper targets seat support member place.In the case, can between the upper end of this target cylinder or uppermost target cylinder and this target seat jockey, provide the gap.
In an embodiment, the rotatable target of this combination substantially perpendicularly assembles.Usually, under the situation of perpendicular assembling, this rotatable target can remain on this rotatable target lower end by comprising the target seat jockey according to the fixedly axle collar of embodiment described herein, and can remain on this rotatable target upper end by comprising the target seat jockey according to the stationary clamp of embodiment described herein.
According to one embodiment of present invention, a kind of rotatable target base device that is used for sputtering equipment is provided, wherein this target base device is suitable for receiving entity target cylinder on this target base device, this rotatable target base device comprises target seat cylinder, this target seat cylinder has side, pars intermedia, first end region and second end region relative with this first end region, and wherein this first end region and this second end region have one of at least and be substantially equal to or less than the maximum outside diameter of the external diameter of this pars intermedia.
In an above embodiment, this target base device further comprises at least one target seat jockey, and this at least one target seat jockey is suitable for that this target seat cylinder is connected to the target seat support member and this at least one target seat jockey is removable.
According to the modification of above arbitrary embodiment and above arbitrary embodiment, this first end region and this second end region one of at least are suitable for being provided one of this target seat jockey.
According to the modification of above arbitrary embodiment and above arbitrary embodiment, this at least one target seat jockey comprises clamping device, and this clamping device is suitable for this target seat cylinder is connected to the target seat support member.
According to the modification of an above embodiment and above arbitrary embodiment, this at least one target seat jockey comprises permanent joint and is located at fixed groove in this target seat cylinder that this permanent joint is suitable for filling at least in part this fixed groove.
According to the modification of above arbitrary embodiment and above arbitrary embodiment, this at least one target seat jockey comprises clamping device, this clamping device be suitable for surrounding this permanent joint and target seat support member in abutting connection with target seat support member jockey.
Modification according to an above embodiment and above arbitrary embodiment, this permanent joint comprises a fixing axle collar, fixedly the axle collar has internal thread, and this internal thread is corresponding with the external screw thread in being located at this fixed groove, and wherein this fixed groove is located at the end of this target seat cylinder.
According to the modification of above arbitrary embodiment and above arbitrary embodiment, this first end region and this second end region comprise that one of at least fixed groove, this fixed groove be located in the side of this target seat cylinder.
Modification according to above arbitrary embodiment and above arbitrary embodiment, this target seat jockey comprises one or this clamping device, one or this clamping device have be suitable for surrounding one or the clamping shell in abutting connection with target seat support member jockey of this stationary clamp and target seat support member, one or this clamping device have and be suitable for surrounding one or a plurality of segmentation clamping shells in abutting connection with target seat support member jockey of this stationary clamp and target seat support member.
According to the modification of above arbitrary embodiment and above arbitrary embodiment, the mutual twisting of these a plurality of segmentation clamping shells.
Modification according to above arbitrary embodiment and above arbitrary embodiment, this target seat cylinder is the tubular holder cylinder, and wherein at least one assembly that is selected from the group that is made up of this target seat jockey, this clamping device, this permanent joint, this fixed groove and this target seat support member jockey is in the form of a ring.
Modification according to above arbitrary embodiment and above arbitrary embodiment, at least one target seat jockey comprises the target fixture, this target fixture is the sept device alternatively, and this sept device is located at least one and is selected from by the permanent joint of this target seat jockey, and fixedly on the assembly of the group that forms of the axle collar.
According to the modification of above arbitrary embodiment and above arbitrary embodiment, this rotatable target base device is suitable for being assemblied in the sputtering equipment rotatable target perpendicular.
According to the modification of above arbitrary embodiment and above arbitrary embodiment, this target seat cylinder comprises the inner space, and this inner space is in order to hold the assembly that at least one is selected from the group that is made up of magnet arrangement and cooling system.
According to another embodiment, a kind of rotatable target that is used for sputtering equipment is provided, this rotatable target comprises the rotatable target base device according to the embodiment of the invention that is suitable for receiving entity target cylinder on rotatable target base device, this rotatable target base device comprises target seat cylinder, this target seat cylinder has side, pars intermedia, first end region and second end region relative with this first end region, and wherein this first end region and this second end region have one of at least and be substantially equal to or less than the maximum outside diameter of the external diameter of this pars intermedia; This rotatable target base device has the entity target cylinder on this side that is configured in this target seat cylinder.
According to the modification of above another embodiment, this rotatable target base device has at least one and is installed in this first end region and this second end region target seat jockey on one of at least.
According to the modification with take up an official post another embodiment and above arbitrary embodiment, the target fixture of this target seat jockey provides the gap between this entity target cylinder and this target seat support member.
According to the modification with take up an official post another embodiment and above arbitrary embodiment, this entity target cylinder in a tubular form and be positioned between this first end region and this second end region.
According to the modification with take up an official post another embodiment and above arbitrary embodiment, this entity target cylinder is adjusted (for example placed in the middle) by the target seat jockey that at least one is abutted at least one target fixture.
According to the modification with take up an official post another embodiment and above arbitrary embodiment, the internal diameter of this entity target cylinder is substantially equal to or greater than the external diameter of this pars intermedia of this target seat cylinder.
According to another embodiment, a kind of coating equipment is provided, this coating equipment comprises the rotatable target base device according to the embodiment of the invention, wherein this target base device is suitable for receiving entity target cylinder on this target base device, this rotatable target base device comprises: target seat cylinder, this target seat cylinder has side, pars intermedia, first end region and second end region relative with this first end region, and wherein this first end region and this second end region have one of at least and be substantially equal to or less than the maximum outside diameter of the external diameter of this pars intermedia.This embodiment can combine with the modification of any other embodiment disclosed by the invention or any other embodiment.
According to another embodiment, provide a kind of manufacturing to be used for the method for the rotatable target of sputtering equipment, may further comprise the steps: the rotatable target base device according to the embodiment of the invention is provided, wherein this target base device is suitable for receiving entity target cylinder on this target base device, this rotatable target base device comprises target seat cylinder, this target seat cylinder has the side, pars intermedia, first end region and second end region relative with this first end region, wherein this first end region and this second end region have one of at least and are substantially equal to or less than the maximum outside diameter of the external diameter of this pars intermedia; Entity target cylinder is provided; This entity target cylinder is configured on this side of this target seat cylinder; Alternatively, after the step of this entity target cylinder of configuration, comprise a step: target seat jockey is installed on one of at least in this first end region of this target seat cylinder and this second end region.Present embodiment can combine with the modification of any other embodiment disclosed by the invention or any other embodiment.
According to another embodiment, provide a kind of rotatable target base device that will be used for sputtering equipment to be connected to the target seat jockey of target seat support member, this target seat jockey comprises that at least one is selected from the assembly of the group that is made up of following assembly: permanent joint and be located at fixed groove in this target base device, and this permanent joint is suitable for filling at least in part this fixed groove; Clamping device, this clamping device be suitable for surrounding this permanent joint and target seat support member in abutting connection with target seat support member jockey; And the fixing axle collar, in this permanent joint, comprise this fixedly axle collar, and have internal thread, this internal thread be located at this target base device in fixed groove in external screw thread corresponding, wherein this fixed groove is located at the end of this target base device.
The stationary clamp of permanent joint can be suitable for being filled with at least in part the fixed groove in the target base device.This target seat jockey comprises that at least one is selected from the assembly of the group that is made up of following assembly: stationary clamp, this stationary clamp have a plurality of segmentation grip modules that are suitable for being closed into clamp; Clamping device, this clamping device have the clamping shell in abutting connection with target seat support member jockey that is suitable for surrounding this stationary clamp and target seat support member; Clamping device, this clamping device have and are suitable for surrounding a plurality of segmentation grip module of stationary clamp and clamping shells in abutting connection with target seat support member jockey of target seat support member of being closed into; Clamping device, this clamping device have a plurality of segmentation clamping shells in abutting connection with target seat support member jockey that are suitable for surrounding this stationary clamp and target seat support member; Clamping device, this clamping device have a plurality of a plurality of segmentation grip module of this stationary clamp and segmentation clamping shells in abutting connection with target seat support member jockey of target seat support member of being closed into that are suitable for surrounding; Clamping device, this clamping device have and are suitable for surrounding this fixedly clamping shell in abutting connection with target seat support member jockey of the axle collar and target seat support member; And clamping device, this clamping device has a plurality of this fixedly segmentation clamping shells in abutting connection with target seat support member jockey of the axle collar and target seat support member that are suitable for surrounding.
This stationary clamp can comprise a plurality of ring-type segmentation grip modules that are suitable for being closed into clamp ring, and this clamping device can comprise and is suitable for surrounding these a plurality of ring-type segmentation grip modules that are closed into clamp ring and a plurality of ring-type segmentation clamping shells in abutting connection with target seat support member connecting ring of target seat support member, at least one of these a plurality of ring-type segmentation grip modules comprises and is suitable for these a plurality of ring-type segmentation clamping shells are assemblied in this adjusting device on clamp ring and the target seat supports ring, so that this ring-type segmentation clamping shell and this ring-type segmentation grip module are located on the peripheral position of mutual biasing, wherein this adjusting device is located on the neighboring of at least one this ring-type segmentation grip module alternatively.
According to the modification of above arbitrary embodiment and above arbitrary embodiment, these a plurality of segmentation clamping shells or the mutual twisting of ring-type segmentation clamping shell.
Modification according to above arbitrary embodiment and above arbitrary embodiment, this target seat jockey comprises the target fixture, this target fixture is the sept device alternatively, and this sept device is located at least one and is selected from by permanent joint, and fixedly on the assembly of the group that forms of the axle collar.
According to an embodiment, provide a kind of rotatable target base device that will be used for sputtering equipment to be connected to the method for target seat support member, this method may further comprise the steps: rotatable target base device is provided, wherein this target base device is suitable for receiving entity target cylinder on this target base device, this rotatable target base device comprises target seat cylinder, this target seat cylinder has the side, pars intermedia, first end region and second end region relative with this first end region, wherein this first end region and this second end region have one of at least and are substantially equal to or less than the maximum outside diameter of the external diameter of this pars intermedia; Target seat jockey is provided, this target seat jockey comprises stationary clamp, this stationary clamp comprises a plurality of ring-type segmentation grip modules, these a plurality of ring-type segmentation grip modules are suitable for being closed into clamp ring, and a plurality of ring-type segmentation clamping shells, these a plurality of ring-type segmentation clamping shells be suitable for surrounding a plurality of ring-type segmentation grip modules that are closed into clamp ring and target seat support member in abutting connection with target seat supports ring; By should being closed into clamp ring by a plurality of ring-type sectional splint assemblies, and with this target seat jockey be assemblied in this first end region of this rotatable target base device and this second end region one of at least on; This clamp ring is abutted to the target seat supports ring of target seat support member; And should be assemblied in this on clamp ring and target seat supports ring by a plurality of ring-type segmentation clamping shells, so that this ring-type segmentation clamping shell and this ring-type segmentation grip module are located on the peripheral position of mutual biasing.
According to the modification of above arbitrary embodiment and above arbitrary embodiment, this rotatable target base device is suitable for being assemblied in the sputtering equipment rotatable target perpendicular.
According to the modification of above arbitrary embodiment and above arbitrary embodiment, this target seat cylinder comprises the inner space, and this inner space is in order to hold the assembly that at least one is selected from the group that is made up of magnet arrangement and cooling system.
According to the modification of above arbitrary embodiment and above arbitrary embodiment, the internal diameter of this entity target cylinder is substantially equal to or greater than the external diameter of the pars intermedia of this target seat cylinder.
Description of the invention uses embodiment to come open the present invention's (comprising best mode), and also makes those of ordinary skills can use the present invention.Though described the present invention according to various specific embodiments, one of skill in the art will recognize that the present invention can implement in the modification in the spiritual scope of claim.Especially, the feature structure do not repelled each other of the modification of the foregoing description or the foregoing description can make up mutually.Protection scope of the present invention is limited by the scope of claim, and can comprise other example that those of ordinary skills can expect.This type of other example is intended in the scope of the application's claim protection.
Though foregoing description is at embodiments of the invention, other and more embodiment of the present invention can design under the situation that does not break away from basic protection range of the present invention, and protection range is determined by the scope of following claim.
Claims (17)
1. rotatable target base device that is used for sputtering equipment, wherein this target base device is suitable for receiving entity target cylinder on this target base device, and this rotatable target base device comprises:
Target seat cylinder, this target seat cylinder has side, pars intermedia, first end region and second end region relative with this first end region, wherein this first end region and this second end region have one of at least and are substantially equal to or less than the maximum outside diameter of the external diameter of this pars intermedia
This rotatable target base device further comprises at least one target seat jockey, and this at least one target seat jockey is suitable for this target seat cylinder is connected to the target seat support member, and this at least one target seat jockey is removable,
Wherein this at least one target seat jockey comprises:
Permanent joint; And
Be located at the fixed groove in this target seat cylinder, this permanent joint is suitable for filling at least in part this fixed groove, and
Wherein this permanent joint comprises the fixedly axle collar, this fixedly the axle collar have internal thread, this internal thread is corresponding with the external screw thread that is provided with in this fixed groove, wherein this fixed groove is located at the end of this target seat cylinder.
2. rotatable target base device as claimed in claim 1,
Wherein this fixed groove is located in this side of this target seat cylinder, and/or wherein this at least one target seat jockey comprises: clamping device, this clamping device be suitable for surrounding this permanent joint and target seat support member in abutting connection with target seat support member jockey.
3. as the arbitrary described rotatable target base device of claim 1 to 2, wherein this target seat jockey comprises the assembly that at least one is selected from the group that is made up of following assembly:
This clamping device with a clamping shell, this clamping shell be suitable for surrounding this fixedly the axle collar and target seat support member in abutting connection with target seat support member jockey; And
This clamping device with a plurality of segmentation clamping shells, these a plurality of segmentation clamping shells be suitable for surrounding this fixedly the axle collar and target seat support member in abutting connection with target seat support member jockey.
4. as arbitrary described rotatable target base device in the claim 1 to 3, wherein this target seat cylinder is the tubular holder cylinder, and/or wherein at least one assembly that is selected from the group that is made up of this target seat jockey, this clamping device, this permanent joint, this fixed groove and this target seat support member jockey is in the form of a ring.
5. as claim 3 or 4 described rotatable target base devices, the mutual twisting of these a plurality of segmentation clamping shells wherein.
6. as arbitrary described rotatable target base device in the claim 1 to 5, wherein this at least one target seat jockey comprises the target fixture.
7. rotatable target base device as claimed in claim 6, wherein this target fixture is the sept device, this sept device is located at least one and is selected from by this permanent joint and this fixedly on the assembly of the group that forms of the axle collar.
8. rotatable target that is used for sputtering equipment, this rotatable target comprises: as arbitrary described rotatable target base device in the claim 1 to 7, this rotatable target base device has the entity target cylinder on this side that is disposed at this target seat cylinder.
9. the rotatable target that is used for sputtering equipment as claimed in claim 8, this rotatable target base device has at least one that is installed on target seat jockey that this first end region and this second end region locate one of at least, and/or wherein this target fixture of this target seat jockey provides the gap between this entity target cylinder and this target seat support member.
10. the rotatable target that is used for sputtering equipment as claimed in claim 8 or 9, wherein this entity target cylinder in a tubular form, and/or be positioned between this first end region and this second end region, and/or adjust by being abutted at least one this target fixture by at least one this target seat jockey.
11. a coating equipment, this coating equipment comprise as the described rotatable target base device of claim 1 to 7.
12. a manufacturing is used for the method for the rotatable target of sputtering equipment, the method includes the steps of:
Provide as the described rotatable target base device of claim 1 to 7;
Entity target cylinder is provided; And
This entity target cylinder is disposed on this side of this target seat cylinder.
13. method as claimed in claim 12, after the step of this entity target cylinder of configuration, the method includes the steps of:
One of at least this target seat jockey is installed in this first end region of this target seat cylinder and this second end region on.
14. the rotatable target base device that will be used for sputtering equipment is connected to the target seat jockey of target seat support member, this target seat jockey comprises:
Permanent joint and be located at fixed groove in this target base device, this permanent joint is suitable for filling at least in part this fixed groove; And
Fixedly the axle collar comprises this fixedly axle collar in this permanent joint, and fixedly the axle collar has internal thread, and this internal thread is corresponding with the external screw thread that is provided with in this fixed groove, and wherein this fixed groove is located at the end of this target base device.
15. target seat jockey as claimed in claim 14, this target seat jockey comprises:
Clamping device, this clamping device be suitable for surrounding this permanent joint and target seat support member in abutting connection with target seat support member jockey.
16. target seat jockey as claimed in claim 15, this target seat jockey comprises the assembly that at least one is selected from following assembly:
This clamping device with clamping shell, this clamping shell be suitable for surrounding this fixedly the axle collar and target seat support member in abutting connection with target seat support member jockey; And
It has this clamping device of a plurality of segmentation clamping shells, these a plurality of segmentation clamping shells be suitable for surrounding this fixedly the axle collar and target seat support member in abutting connection with target seat support member jockey.
17. as the described target seat of claim 14 to 16 jockey, wherein these a plurality of segmentation clamping shells are stranded mutually, and/or
Wherein this target seat jockey comprises the target fixture, and/or
Wherein this target fixture is the sept device, and this sept device is located at least one and is selected from by the fixing assembly of the group that forms of the axle collar of this permanent joint and this.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP08167573.8 | 2008-10-24 | ||
| US12/258,243 | 2008-10-24 | ||
| EP08167573A EP2180501A1 (en) | 2008-10-24 | 2008-10-24 | Rotatable sputter target base, rotatable sputter target, coating installation, method of producing a rotatable sputter target, target base connection means, and method of connecting a rotatable target base device for sputtering installations to a target base support |
| US12/258,243 US20100101948A1 (en) | 2008-10-24 | 2008-10-24 | Rotatable sputter target base, rotatable sputter target, coating installation, method of producing a rotatable sputter target, target base connection means, and method of connecting a rotatable target base device for sputtering installations to a target base support |
| PCT/EP2009/064013 WO2010046485A1 (en) | 2008-10-24 | 2009-10-23 | Rotatable sputter target base, rotatable sputter target, coating installation, method of producing a rotatable sputter target, target base connection means, and method of connecting a rotatable target base device for sputtering installations to a target base support |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102265376A true CN102265376A (en) | 2011-11-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009801526026A Pending CN102265376A (en) | 2008-10-24 | 2009-10-23 | Rotatable sputter target base, rotatable sputter target, coating installation, method of producing a rotatable sputter target, target base connection means, and method of connecting a rotatable target base device for sputtering installations to a tar |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JP5762964B2 (en) |
| KR (1) | KR20110089290A (en) |
| CN (1) | CN102265376A (en) |
| SG (1) | SG195563A1 (en) |
| TW (1) | TWI476290B (en) |
| WO (1) | WO2010046485A1 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103397301A (en) * | 2013-07-17 | 2013-11-20 | 中国南玻集团股份有限公司 | Cylinder rotating silver target and preparation method thereof |
| CN106683988A (en) * | 2016-12-28 | 2017-05-17 | 惠科股份有限公司 | Target device |
| CN107075664A (en) * | 2014-11-07 | 2017-08-18 | 应用材料公司 | The Integral type rotary target of high performance-price ratio |
| CN107584201A (en) * | 2017-10-31 | 2018-01-16 | 宁波江丰电子材料股份有限公司 | A kind of target vacuum diffusion bonding system and method |
| CN109628899A (en) * | 2019-01-24 | 2019-04-16 | 苏州罗纳尔材料科技有限公司 | Rotate zinc-magnesium target and preparation method thereof |
| CN113025971A (en) * | 2021-03-01 | 2021-06-25 | 宁波江丰电子材料股份有限公司 | Tube target material and application thereof |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7245661B2 (en) * | 2019-01-30 | 2023-03-24 | Ｊｓｗアフティ株式会社 | Target, deposition apparatus, and method for manufacturing deposition object |
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| JPS53163352U (en) * | 1977-05-31 | 1978-12-21 | ||
| JPH07228967A (en) * | 1994-02-17 | 1995-08-29 | Mitsubishi Materials Corp | Long-sized cylindrical sputtering target |
| US5591314A (en) * | 1995-10-27 | 1997-01-07 | Morgan; Steven V. | Apparatus for affixing a rotating cylindrical magnetron target to a spindle |
| EP0969238A1 (en) * | 1998-06-29 | 2000-01-05 | Sinvaco N.V. | Vacuum tight coupling for tube sections |
| DE19958666C2 (en) * | 1999-12-06 | 2003-10-30 | Heraeus Gmbh W C | Device for the detachable connection of a cylindrical tubular target part to a receiving part |
| JP4614037B2 (en) * | 2000-09-08 | 2011-01-19 | Ａｇｃセラミックス株式会社 | Cylindrical target |
| AU2003248835A1 (en) * | 2002-07-02 | 2004-01-23 | Academy Precision Materials A Division Of Academy Corporation | Rotary target and method for onsite mechanical assembly of rotary target |
| DE10231203B4 (en) * | 2002-07-10 | 2009-09-10 | Interpane Entwicklungs-Und Beratungsgesellschaft Mbh | Target support assembly |
| WO2004085902A1 (en) * | 2003-03-25 | 2004-10-07 | Bekaert Advanced Coatings | Universal vacuum coupling for cylindrical target |
| US20060278519A1 (en) * | 2005-06-10 | 2006-12-14 | Leszek Malaszewski | Adaptable fixation for cylindrical magnetrons |
| KR101137906B1 (en) * | 2006-08-03 | 2012-05-03 | 삼성코닝정밀소재 주식회사 | Rotatable target assembly |
| ES2375235T3 (en) * | 2008-02-15 | 2012-02-28 | Bekaert Advanced Coatings Nv. | VACUUM COUPLING WITH MULTIPLE SCREENS. |
-
2009
- 2009-10-23 WO PCT/EP2009/064013 patent/WO2010046485A1/en active Application Filing
- 2009-10-23 CN CN2009801526026A patent/CN102265376A/en active Pending
- 2009-10-23 JP JP2011532651A patent/JP5762964B2/en not_active Expired - Fee Related
- 2009-10-23 TW TW098136026A patent/TWI476290B/en active
- 2009-10-23 SG SG2013077268A patent/SG195563A1/en unknown
- 2009-10-23 KR KR1020117011813A patent/KR20110089290A/en active Search and Examination
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103397301A (en) * | 2013-07-17 | 2013-11-20 | 中国南玻集团股份有限公司 | Cylinder rotating silver target and preparation method thereof |
| CN107075664A (en) * | 2014-11-07 | 2017-08-18 | 应用材料公司 | The Integral type rotary target of high performance-price ratio |
| CN106683988A (en) * | 2016-12-28 | 2017-05-17 | 惠科股份有限公司 | Target device |
| CN106683988B (en) * | 2016-12-28 | 2019-05-24 | 惠科股份有限公司 | Target device |
| CN107584201A (en) * | 2017-10-31 | 2018-01-16 | 宁波江丰电子材料股份有限公司 | A kind of target vacuum diffusion bonding system and method |
| CN107584201B (en) * | 2017-10-31 | 2019-11-26 | 宁波江丰电子材料股份有限公司 | A kind of target vacuum diffusion bonding system and method |
| CN109628899A (en) * | 2019-01-24 | 2019-04-16 | 苏州罗纳尔材料科技有限公司 | Rotate zinc-magnesium target and preparation method thereof |
| CN113025971A (en) * | 2021-03-01 | 2021-06-25 | 宁波江丰电子材料股份有限公司 | Tube target material and application thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20110089290A (en) | 2011-08-05 |
| TWI476290B (en) | 2015-03-11 |
| JP2012506489A (en) | 2012-03-15 |
| SG195563A1 (en) | 2013-12-30 |
| TW201024444A (en) | 2010-07-01 |
| WO2010046485A1 (en) | 2010-04-29 |
| JP5762964B2 (en) | 2015-08-12 |
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Application publication date: 20111130 |