TW201017734A - Method of rapidly removing irregular die integrated circuit pattern - Google Patents

Method of rapidly removing irregular die integrated circuit pattern Download PDF

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Publication number
TW201017734A
TW201017734A TW97140378A TW97140378A TW201017734A TW 201017734 A TW201017734 A TW 201017734A TW 97140378 A TW97140378 A TW 97140378A TW 97140378 A TW97140378 A TW 97140378A TW 201017734 A TW201017734 A TW 201017734A
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TW
Taiwan
Prior art keywords
wafer
integrated circuit
laser light
pattern
circuit pattern
Prior art date
Application number
TW97140378A
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English (en)
Chinese (zh)
Other versions
TWI361452B (enExample
Inventor
zhan-hao Zhang
Original Assignee
Trend Laser Technology Co Ltd
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Filing date
Publication date
Application filed by Trend Laser Technology Co Ltd filed Critical Trend Laser Technology Co Ltd
Priority to TW97140378A priority Critical patent/TW201017734A/zh
Publication of TW201017734A publication Critical patent/TW201017734A/zh
Application granted granted Critical
Publication of TWI361452B publication Critical patent/TWI361452B/zh

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
TW97140378A 2008-10-22 2008-10-22 Method of rapidly removing irregular die integrated circuit pattern TW201017734A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW97140378A TW201017734A (en) 2008-10-22 2008-10-22 Method of rapidly removing irregular die integrated circuit pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW97140378A TW201017734A (en) 2008-10-22 2008-10-22 Method of rapidly removing irregular die integrated circuit pattern

Publications (2)

Publication Number Publication Date
TW201017734A true TW201017734A (en) 2010-05-01
TWI361452B TWI361452B (enExample) 2012-04-01

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW97140378A TW201017734A (en) 2008-10-22 2008-10-22 Method of rapidly removing irregular die integrated circuit pattern

Country Status (1)

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TW (1) TW201017734A (enExample)

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Publication number Publication date
TWI361452B (enExample) 2012-04-01

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