TW200951446A - Probe unit - Google Patents

Probe unit

Info

Publication number
TW200951446A
TW200951446A TW098103566A TW98103566A TW200951446A TW 200951446 A TW200951446 A TW 200951446A TW 098103566 A TW098103566 A TW 098103566A TW 98103566 A TW98103566 A TW 98103566A TW 200951446 A TW200951446 A TW 200951446A
Authority
TW
Taiwan
Prior art keywords
movable base
probe unit
move
guided
elastic deformation
Prior art date
Application number
TW098103566A
Other languages
English (en)
Chinese (zh)
Inventor
Ryo Ujike
Original Assignee
Yamaichi Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamaichi Electronics Co Ltd filed Critical Yamaichi Electronics Co Ltd
Publication of TW200951446A publication Critical patent/TW200951446A/zh

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716Elastic
    • G01R1/06722Spring-loaded
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • G01R31/2872Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2879Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Measuring Leads Or Probes (AREA)
  • Liquid Crystal (AREA)
  • Tests Of Electronic Circuits (AREA)
TW098103566A 2008-02-05 2009-02-04 Probe unit TW200951446A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008025048A JP2009186262A (ja) 2008-02-05 2008-02-05 プローブユニット

Publications (1)

Publication Number Publication Date
TW200951446A true TW200951446A (en) 2009-12-16

Family

ID=41069661

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098103566A TW200951446A (en) 2008-02-05 2009-02-04 Probe unit

Country Status (3)

Country Link
JP (1) JP2009186262A (ko)
KR (1) KR20090086037A (ko)
TW (1) TW200951446A (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI614548B (zh) * 2013-10-28 2018-02-11 高雄晶傑達光電科技股份有限公司 點燈測試裝置
TWI739508B (zh) * 2020-07-09 2021-09-11 京元電子股份有限公司 具水平調整模組之測試設備

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103472601B (zh) * 2013-09-02 2016-06-15 京东方科技集团股份有限公司 一种检测设备及检测方法
KR102593612B1 (ko) * 2016-06-02 2023-10-26 주식회사 탑 엔지니어링 프로브 장치
JP2020118682A (ja) * 2019-01-23 2020-08-06 日置電機株式会社 信号処理ユニットおよび測定装置
WO2020153163A1 (ja) * 2019-01-23 2020-07-30 日置電機株式会社 信号処理ユニットおよび測定装置
JP7271283B2 (ja) * 2019-04-16 2023-05-11 株式会社日本マイクロニクス 検査用接続装置
CN110187151A (zh) * 2019-06-21 2019-08-30 东莞市沃德精密机械有限公司 无线充电装置的线圈排线测试设备
KR102141535B1 (ko) * 2020-03-03 2020-08-05 장용철 멀티 플라잉 프로브 테스터
KR102136689B1 (ko) * 2020-03-03 2020-07-22 장용철 탈부착이 가능한 프로브 베이스를 구비하는 플라잉 프로브 테스터

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI614548B (zh) * 2013-10-28 2018-02-11 高雄晶傑達光電科技股份有限公司 點燈測試裝置
TWI739508B (zh) * 2020-07-09 2021-09-11 京元電子股份有限公司 具水平調整模組之測試設備

Also Published As

Publication number Publication date
KR20090086037A (ko) 2009-08-10
JP2009186262A (ja) 2009-08-20

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