TW200948691A - Article storage facility - Google Patents
Article storage facility Download PDFInfo
- Publication number
- TW200948691A TW200948691A TW097151233A TW97151233A TW200948691A TW 200948691 A TW200948691 A TW 200948691A TW 097151233 A TW097151233 A TW 097151233A TW 97151233 A TW97151233 A TW 97151233A TW 200948691 A TW200948691 A TW 200948691A
- Authority
- TW
- Taiwan
- Prior art keywords
- air
- vehicle
- article storage
- width direction
- space
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/06—Storage devices mechanical with means for presenting articles for removal at predetermined position or level
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
- B65G1/0421—Storage devices mechanical using stacker cranes with control for stacker crane operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/06—Storage devices mechanical with means for presenting articles for removal at predetermined position or level
- B65G1/065—Storage devices mechanical with means for presenting articles for removal at predetermined position or level with self propelled cars
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/10—Storage devices mechanical with relatively movable racks to facilitate insertion or removal of articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F9/00—Devices for lifting or lowering bulky or heavy goods for loading or unloading purposes
- B66F9/06—Devices for lifting or lowering bulky or heavy goods for loading or unloading purposes movable, with their loads, on wheels or the like, e.g. fork-lift trucks
- B66F9/07—Floor-to-roof stacking devices, e.g. "stacker cranes", "retrievers"
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Transportation (AREA)
- Structural Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Civil Engineering (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
200948691 六、發明說明: 【發明所屬之技術領域3 發明領域 本發明係有關於一種物品收納設備,其設有物品收納 5架、物品搬送車、淨化空氣通風機構、空氣流動空間及分 隔壁,該物品收納架係具有複數個物品收納部者;該物品 搬送車係具有在前述物品收納架前方之搬送車移動空間之 地板Q卩行走的行走車架及相對於前述行走車架被支撑成升 降自如之物品移載裝置者;該淨化空氣通風機構係使淨化 1〇空氣從前述物品收納部之背部側朝前述搬送車移動空間流 動’以通過前述物品收納部,且使淨化空氣在前述搬送車 移動空間内流動至下方後,流動為從排氣部排出者;該空 乳流動空間係在對前述物品收納架之前述物品收納部分隔 成空氣無法流動,且對前述搬送車移動空間在空氣可流動 15之狀態下,在前述物品收納部之下方橫互前述物品收納架 之架橫向寬度方向之約略全長形成者;該分隔壁係設置於 前述搬送車移動空間之架橫向寬度方向端部,將前述搬送 車移動空間與外部分隔者。 C先前技術3 20 發明背景 此種物品收納設備係使物品搬送車沿物品收納架之架 橫向寬度方向行走,且使物品移戴裝置於上下方向升降, 將用以將用於液晶顯示器或電後顯示器之玻璃基板等液晶 顯示元件等以層積狀態收納之容器等物品在物品收納部與 200948691 對玻璃基板施行處理之物品處理裝置間搬送者。 並且其構造成設置淨化空氣通風機構,使淨化空氣從 納部之背部側朝搬送車移動空間流動,以通過物品 =:=述搬送車移動空間内流動至下方後,流動 ==,因物品搬送車於搬送車移動空間 地板部揚起之麵不易從搬送車移動空間逆流至 物时收納部側’而可將物品收納部維持在_少之環境。 。藉设置空氣流動空間’物品搬送車行走時,在行走車 架之行走方向前方财壓縮狀態之淨化空氣易流動至行走 10 15 車架之橫側邊侧之空氣錢空間,而可抑伽淨化空氣在 行走車架上方·動,塵埃在行走車架前方側揚起,構造 成即使以淨化空氣通風機構流動之淨化空氣之風力小,仍 可將物品㈣部維持在㈣少之環境(參照日本專利公開 公報2000-16518號)。200948691 VI. Description of the Invention: [Technical Field 3 of the Invention] Field of the Invention The present invention relates to an article storage apparatus provided with five articles storage, an article transport vehicle, a purified air ventilation mechanism, an air flow space, and a partition wall. The article storage rack has a plurality of article storage units; the article transporting vehicle has a traveling frame that travels on the floor Q of the transporting vehicle moving space in front of the article storage rack, and is supported to be lifted and lowered with respect to the traveling frame In the article transfer device, the purified air ventilation means causes the purge air to flow from the back side of the article storage portion toward the transport vehicle moving space to pass through the article storage portion, and to move the purified air in the transport vehicle After flowing in the space to the lower side, the flow is discharged from the exhaust unit; the empty milk flow space is such that air is not allowed to flow in the article storage portion of the article storage rack, and the moving space of the transport vehicle is air-permeable. In the state of 15, the cross-section of the article storage rack is transverse to the article storage portion The partition wall is formed at an approximately full length in the width direction; the partition wall is provided at an end portion in the lateral width direction of the transport space of the transport vehicle, and the transport space of the transport vehicle is separated from the outside. C prior art 3 20 BACKGROUND OF THE INVENTION The article storage device allows the article transporting vehicle to travel along the lateral width direction of the rack of the article storage rack, and causes the article shifting device to be lifted up and down in the up and down direction, which will be used for liquid crystal display or after electric An article such as a container such as a liquid crystal display element such as a glass substrate of a display that is stored in a stacked state is transported between the article storage unit and the article processing apparatus that performs processing on the glass substrate in 200948691. And it is configured to provide a purifying air ventilation mechanism, so that the purified air flows from the back side of the middle part to the moving space of the transporting vehicle, and flows through the article =:= in the moving space of the transporting vehicle, and then flows ==, because the article is transported In the case where the vehicle is raised on the floor of the moving space of the transporting vehicle, it is not easy to flow back from the moving space of the transporting vehicle to the storage unit side of the object, and the article storage unit can be maintained in a small environment. . By setting the air flow space when the article transport vehicle is walking, the purified air in the forward compressed state in the traveling direction of the traveling frame easily flows to the air money space on the lateral side of the walking frame of the 10 15 frame, and the air can be suppressed. Above the traveling frame, the dust rises on the front side of the traveling frame, and is constructed such that even if the wind of the purified air flowing through the air purifying mechanism is small, the article (4) can be maintained in the (4) less environment (refer to the Japanese patent). Published Gazette 2000-16518).
【明内J 發明揭示 發明欲解決之課題 然而,在上述習知之物品收納設備中,因物品搬送車 之行走,從搬送車移動空間流動至空氣流動空間之淨化空 20氣之一部份在空氣流動空間朝内侧流動至斜前方,在空氣 流動空間之車輛行走方向(架橫向寬度方向)之前方侧端部 處,隨著行走之物品搬送車接近,空氣流動空間内之淨化 空氣逐漸壓縮,該壓縮之淨化空氣往搬送車移動空間之膨 脹大,往搬送車移動空間膨脹而移動之淨化空氣以設置於 200948691 搬送車移動空間端部之分隔壁引導空 m ^认 至上方,地板部側之塵 ^易揚起。因而,為將物品收納部維持在塵埃少之環境, 而增大以淨化空氣通風機構流動之淨斤 5 ❹ 10 15 馨 20 本發明即是鑑於上述實際情心Π力目的在於 提供即使財心氣通關難^淨化”线力小, 仍易將物品收納部維持在塵埃少 用以欲解決課題之手段 職之物品收納設備。 為達纽目的’本發狀物設備做有物品收 _、物品搬送車、淨Μ氣通風機構、空氣流動空間及 分隔壁,該物品收納架健有複數個物品_部者;該物 品搬送車健有在前述物品_架前方之搬送車移動空間 之地板部行走的行走料及相對•述行走車㈣支樓成 升降自如之物品移«置者;該淨化空氣通風機構係使淨 化空氣從前述物品收納部之背部側朝前述搬送車移動空間 流動’以通過前述物品收納部’且使淨化空氣在前述搬送 車移動空間内流動至下方後,流動為從排氣部排出者;該 空氣流動空間係在對前述物品收納架之前述物品收納部分 隔成空氣無法流動,且對前述搬送車移動空間在空氣可流 動之狀態下,在前述物品收納部之下方橫亙前述物品收納 架之架橫向寬度方向之約略全長形成者;該分隔壁係設置 於前述搬送車移動空間之架橫向寬度方向端部,將前述搬 送車移動空間與外部分隔者,且於前述空氣流動空間内之 至少架橫向寬度方向之端部區域,設置於上下方向及架前 後寬度方向延伸之整流用構件。 5 200948691 即,由於於前述空氣流動空間内之至少架橫向寬度方 向之端部區域設置於上下方向及架前後寬度方向延伸之整 流用構件,故可抑制在空氣流動空間,淨化空氣流動至在 車輛行走方向比整流用構件還靠近前方側之處,而可減少 流動至空氣流動空間之車輛行走方向(架橫向寬度方向)之 前方側端部處之淨化空氣。因而,可抑制在空氣流動空間 之車輛行走方向(架橫向寬度方向)之前方側端部處,隨著行 走之物品搬送車接近,空氣流動㈣内之淨化空氣逐漸壓 縮,故淨化空氣往搬送車移触間之膨脹縮小,地板部側 10 之塵埃不易揚起。因而,即使以淨化空氣軌機構流動之 淨化空氣之風力小,仍易將物品收納部維持在塵埃少之環 境’而可提供祕物品收納部維持在塵埃少之環境之物品 收納設備。 在本發明之物品保管設備之實施形態中,前述整流用 15構件宜以於架橫向寬度方向排列之狀態設置複數個。 即,由於整流用構件以於架橫向寬度方向排列之狀態 設置複數個,故可以複數個整流用構件分散抑制在空氣流 動空間淨化空氣流動至在車輪行走方向比整流用構件還靠 近前方側之處,藉此,可抑制在各整流用構件之車輛行走 2〇方向之後方側,淨化空氣呈堡縮狀態,故淨化空氣往搬送 車移動空間之膨脹縮小,而可抑制地板部側之塵埃揚起, 即使以淨化空氣通風機構流動之淨化空氣之風力小,仍易 將物品收納部維持在塵埃少之環境。因而,可提供即使以 淨化空氣通風機構流動之淨化空氣之風力小,仍易將物品 200948691 收納部維持在塵埃少之環境的物品收納設備。 在本發明之物品保管設備之實施形態争,宜將前述複 數整流用構件中位於架橫向寬度方向之前述端部區域之端 部側整流用構件形成可通風之多孔狀,且將在前述複數整 5 流用構件中比前述端部侧整流用構件在架橫向寬度方向位 於中央侧之中央側整流用構件形成開口率小於前=端部側 整流用構件之可通風的多孔狀或無法通氣之無孔狀。 即,在空氣流動空間之端部側整流用構件之車輛行走 方向之前方側端部處壓縮的淨化空氣可經由端部側整流用 10構件,流動至車輛行走方向之後方側,而可抑制在空氣流 動空間之車輛行走方向之前方侧端部處淨化空氣呈壓縮狀 態,又’在空氣流動空間,朝車輛行走方向之前方側端部 處流動之淨化空氣以中央側整流用構件抑制往比其在車輛 行走方向還前方側之流動,故可抑制在車輛行走方向比中 15央側整流用構件還前方側之處,淨化空氣呈壓縮狀態。 疋故,藉設置端部侧整流用構件及中央侧整流用構 件’可抑制在空氣流動空間之車輛行走方向之前方側端部 處,淨化空氣呈壓縮狀態,淨化空氣往搬送車移動空間之 膨脹縮小,而可抑制地板部側之塵埃揚起,故即使以淨化 20空氣通風機構流動之淨化空氣之風力小,仍易將物品收納 部維持在塵埃少之環境。因而,可提供即使以淨化空氣通 風機構流動之淨化空氣之風力小,仍易將物品收納部維持 在塵埃少之環境之物品收納設備。 在本發明之物品保管設備之實施形態中,前述端部側 7 200948691 整流用構件㈣成與前妓氣軸㈣之架 之長度相同之長度,前述中央側整流_件形成在=2 寬度方向“柄部流用構件短,且以偏移至遠離前 述空氣流動空間内之架前後寬度方向之前述搬送車移動介 間之方向的狀態設置。 二 即’由於端部側整流用構件形成與空氣流動空間之 前後寬度方向之長度約略相同的長度,故鼓空氣流動二 之架前後寬度方向之約略所有範圍,而可減少流動至 10 ㈣走方向(架橫向寬度方向)之前方側端部 側之淨化空氧,且可使在端部側整流用構件之車輛行走方 向之前方側端部處壓縮之淨化空氣經由端部側整流用構 件流動至車輛仃走方向之後方側故可抑制在空氣流動 空間之車輛行走方向之前方側端部處淨化空氣呈壓縮狀 態。 又由於中央側整流用構件形成於架前後寬度方向較 端部側整流用構件短,且以偏移至與前述空氣流動空間内 之架前後寬度方向之搬送車移動空間所在之側相反側的狀 態設置,故在搬送車移動空間之架前後寬度方向之搬送車 移動空間側’在不設置中央側整流用構件下,可使淨化空 氣流通,故淨化空氣不易呈壓縮狀態,而可縮小淨化空氣 往搬送車移動空間之雜。再者,在搬送車移Μ間之虚 架前後寬度方向之搬送車移動空間側相反側之内側,因中 央側整流用構件,淨化空氣^壓縮狀態,故枝空氣流 動空間之内部設置淨化Μ通風機構之排氣部時,壓缩狀 200948691 而可縮小淨化空氣往搬送 I、之净化空氣易從排出部排出, 車移動空間之膨脹。 疋故[The present invention discloses a problem to be solved by the invention. However, in the above-mentioned conventional article storage device, a part of the purified air flowing from the moving space of the transporting vehicle to the air flowing space is in the air due to the traveling of the article transporting vehicle. The flow space flows toward the inner side to the oblique front side, and at the side end portion of the air flow space before the vehicle traveling direction (the lateral width direction), as the moving article transport vehicle approaches, the purified air in the air flow space is gradually compressed. The compressed air is compressed to the moving space of the transporting vehicle, and the moving air that is moved to the moving space of the transporting vehicle is set to the partition wall of the moving space at the end of the transporting space of the transporting vehicle at the end of 200948691. ^ Easy to rise. Therefore, in order to maintain the article storage portion in an environment with less dust, the net flow of the air purifying mechanism is increased. 5 10 15 The present invention is in view of the fact that the above-mentioned actual feelings are aimed at providing a good fortune. It is difficult to clean the line, and it is easy to keep the item storage unit in a dust storage device that is used for the purpose of solving the problem. a net helium ventilation mechanism, an air flow space, and a partition wall. The article storage rack has a plurality of articles _ parts; the article transporting the car has walking on the floor of the moving space of the transporting vehicle in front of the article _ frame Material and relative • The traveling vehicle (4) The building is moved into a freely movable item. The purifying air ventilation mechanism causes the purified air to flow from the back side of the article storage unit toward the transporting vehicle moving space to pass the aforementioned article storage unit. 'When the purified air flows downward in the moving space of the transport vehicle, the flow is discharged from the exhaust portion; the air flow space is in the foregoing The article storage portion of the product storage rack is separated from air so that the air cannot flow, and the transport space of the transport vehicle is formed in a state in which the air can flow, and the product storage portion is formed to extend over the entire width of the rack of the article storage rack. The partition wall is provided at an end portion in the lateral width direction of the transport space of the transport vehicle, and separates the transport space of the transport vehicle from the outside, and at least an end region in the lateral width direction of the air flow space. The rectifying member that is disposed in the vertical direction and the front-rear width direction of the rack is provided in the air flow space, and at least the end portion in the lateral width direction of the air flow space is provided in the vertical direction and the rectifying member extending in the front-rear width direction. Therefore, it is possible to suppress the air flow space, and the purified air flows to a position closer to the front side than the rectifying member in the traveling direction of the vehicle, and can reduce the traveling direction (the lateral width direction) of the vehicle before flowing to the air flow space. Purify the air at the department. Therefore, it can suppress the flow of air. At the front side end of the vehicle traveling direction (frame width direction), as the moving article transporting vehicle approaches, the purified air in the air flow (4) is gradually compressed, so the expansion of the purified air to the moving car is reduced. The dust on the floor side 10 is less likely to rise. Therefore, even if the wind of the purified air flowing through the clean air rail mechanism is small, it is easy to maintain the article storage portion in an environment with less dust, and the secret storage unit can be kept in dust. In the embodiment of the article storage device of the present invention, the rectifying member 15 is preferably provided in a plurality of states in which the rectifying members are arranged in the lateral width direction of the rack. That is, the rectifying member is oriented in the lateral width direction of the rack. Since a plurality of the arranging states are provided, the plurality of rectifying members can be dispersed and suppressed from flowing in the air flow space to the front side of the rectifying member in the traveling direction of the wheel, thereby suppressing the rectifying members. After the vehicle walks 2 〇 direction, the clean air is in a state of fortification, so the air is purified to the transport vehicle. Moving the expansion space narrowing, the floor dust can be suppressed side of raised portion, even clean air ventilation means to purify the air flow of the wind is small, the article still is easy to maintain at least the portion accommodating the dust environment. Therefore, it is possible to provide an article storage device in which the storage portion of the article 200948691 can be maintained in an environment with little dust even if the wind of the purified air flowing through the air purifying mechanism is small. In the embodiment of the article storage device of the present invention, it is preferable that the end-side rectifying member of the end portion in the lateral width direction of the plurality of rectifying members is formed into a ventilated porous shape, and (5) The flow-reducing member has a smaller opening ratio than the front-side rectifying member in the center-side rectifying member than the end-side rectifying member, and is ventilated or non-ventilated. shape. In other words, the purified air compressed at the end portion of the end portion side rectifying member in the vehicle traveling direction of the air flow space can flow to the rear side in the traveling direction of the vehicle via the end side rectifying member 10, and can be suppressed. In the air flow space, the purified air is compressed at the front side end of the vehicle traveling direction, and the purified air flowing in the air flow space toward the front side end of the vehicle traveling direction is suppressed by the central side rectifying member. Since the vehicle travels in the forward direction of the vehicle, it is possible to suppress the compressed air from being compressed when the vehicle travels in the forward direction of the middle-five side rectifying member. Therefore, by providing the end-side rectifying member and the center-side rectifying member', it is possible to suppress the compressed air from being compressed in the air-flow space before the vehicle traveling direction, and the purifying air expands toward the moving space of the transporting vehicle. By narrowing down, it is possible to suppress the dust on the side of the floor portion from rising. Therefore, even if the wind of the purified air flowing through the clean air blowing mechanism is small, it is easy to maintain the article storage portion in an environment with less dust. Therefore, it is possible to provide an article storage device in which the article storage portion is easily maintained in an environment with less dust even if the wind of the purified air flowing through the purge air ventilating mechanism is small. In the embodiment of the article storage device according to the present invention, the end portion side 7 200948691 rectifying member (4) has the same length as the length of the front xenon shaft (four), and the center side rectifying member is formed in the =2 width direction. The shank flow member is short and is disposed in a state of being displaced away from the direction in which the transfer vehicle moves between the front and rear width directions of the air flow space. Second, 'the end side rectifying member is formed and the air flow space is formed. The length of the front and rear width directions is approximately the same length, so that the width of the front and rear width directions of the air flow of the drum is about all the range, and the flow to the side of the side end side of the 10 (four) running direction (the lateral width direction) can be reduced. Oxygen, and the purified air compressed at the front end portion of the end side rectifying member in the vehicle traveling direction can be flown to the rear side of the vehicle in the vehicle traveling direction via the end side rectifying member, so that the air flow space can be suppressed. The purified air is compressed at the side of the front side of the vehicle in the traveling direction. The central side rectifying member is formed in the front and rear width direction of the frame. The end-side rectifying member is shorter than the side opposite to the side on which the transporting vehicle moving space in the front-rear width direction of the air flow space is located, so that the front and rear width directions of the transporting vehicle moving space are provided. In the moving space side of the transport vehicle, the clean air can be circulated without providing the central side rectifying member, so that the purified air is not easily compressed, and the cleaned air can be reduced to the moving space of the transport vehicle. The inner side of the moving space on the side opposite to the moving space of the front and rear of the moving frame in the width direction is cleaned by the central side rectifying member, so that the exhaust portion of the purifying and ventilating mechanism is installed inside the branch air flowing space. The compressed shape 200948691 can reduce the purifying air to the transport I, and the purified air is easily discharged from the discharge portion, and the vehicle moving space is expanded.
10 1510 15
20 由於藉設置端部側整流用構件及中央側整流用 二:有效地抑制在空氣流動空間,淨化空氣呈壓縮狀 :故可抑制地板部側之塵埃揚起,即使以淨化空氣通風 t構流動之淨化空氣之風力小,仍易將物品收納部維持在 埃少之環境。S而,可提供即使以淨化^氣通風機構流 動之淨化空氣找力小,㈣將物品收納部_在 之環境之物品收納設備。 、 致在本發明之物品保管設置之實施形態中,前述中央側 整流用構件之架前後寬度方向之前 ,丨之部份宜形成可通氣的多一與二= 工間所在之_反歉部份形成無法軌之無孔狀。 即,由於中央側整流用構件之架前後寬度方向之前述 搬^車移動空間所在之側之部份形成可通氣的多孔狀,且 與别述搬送車㈣空間所在之側相反側之部份形成無法通 氣之無孔狀’故在搬送車移動空間之架錢寬度方向之搬 送車移動空間側’淨化空氣流通至中央側整流用構件之搬 送車移動空間所在之側的部份,淨化空氣不易呈壓縮狀 態,故可縮小淨化空氣往搬送車移動空間之膨服。又,在 搬送車移動”之錢錢寬度方向之搬送轉動空間側 相反側之内側’淨化空氣不流通至中央側整流用構件之與 搬送車移動空間所在之側相反側之部份,而易呈壓縮狀 態’故於空氣流動空間之内部設置淨化空氣通風機構之排 9 200948691 氣部時,壓縮狀態之淨化空氣易從排出部排出,而可縮小 淨化空氣往搬送車移動空間之膨脹,而可抑制地板部侧之 塵埃揚起,即使以淨化空氣通風機構流動之淨化空氣之風 力小,仍易將物品收納部維持在塵埃少之環境。因而,可 5提供即使以淨化空氣通風機構流動之淨化空氣之風力小, 仍易將物品收納部維持在塵埃少之環境之物品收納設備。 在本發明之物品保管設備之實施形態中,前述整流用 構件且设置於在架橫向寬度方向比位於前述搬送車移動空 間之架橫向寬度方向端部的前述行走車架靠近中央部侧之 10 處。 即,物品搬送車在搬送車移動空間行走時,在行走車 架之車輛行走方向前方侧呈壓縮狀態之淨化空氣隨著物品 搬送車減速或停止,於車輛行走方向前方侧膨脹,所膨服 之淨化空氣之一部份以設置於搬送車移動空間之端部的分 15隔壁引導至架前後方向,而流動至空氣流動空間由於整 流用構件設置於在架橫向寬度方向比位於前述搬送車移動 空間之架橫向寬度方向端部之前述行走車架還中央部側之 處,而於整流用構件與搬送車移動空間之車輛行走方向之 ,前方侧端部處間形成寬廣空間,故流動至空氣流動空間之 淨化工氣不易呈壓縮狀態,而可縮小淨化空氣往搬送車移 動空間之膨脹,故可抑制地板部側之塵埃揚起,即使以淨 化空氣通風機構流動之淨化空氣之風力小,仍易將物品收 納部維持在塵埃少之環境。因而,可提供即使以淨化空氣 通風機構流動之淨化空氣之風力小,仍易將物品收納部維 200948691 持在塵埃少之環境之物品&納設備。 在本發明之物品保管設備之實施形態中,宜設有空氣 引導 °亥上氧引導體係在前述物品搬送車之行走方向觀 看在位於與月1述行走車架之車輛橫向寬度方向之端部侧 520 By providing the end-side rectifying member and the center-side rectifying member 2: effectively suppressing the air flowing in the space, the purified air is compressed: so that the dust on the floor portion side can be suppressed from rising, even if the air is ventilated by the purified air. The wind that purifies the air is small, and it is still easy to maintain the article storage unit in an environment of less. In addition, it is possible to provide an article storage device in which the article storage unit is in an environment in which the purifying air flowing through the purifying and ventilating mechanism is small. In the embodiment of the article storage arrangement of the present invention, before the front-rear width direction of the center-side rectifying member, the portion of the crucible should form a ventilated one and two = the part of the work room. Forms a non-porous shape that is untrackable. In other words, the portion of the side of the center-side rectifying member in the front-rear width direction on the side where the moving space of the moving vehicle is located forms a ventilated porous shape, and is formed on a portion opposite to the side where the space of the transport vehicle (4) is located. It is not ventilated, and it is not ventilated. Therefore, in the moving space side of the transport vehicle in the direction of the width of the transport space of the transport vehicle, the part where the clean air flows to the side where the moving space of the transport unit of the center side rectifying member is located is not easy to purify the air. The compressed state can reduce the expansion of the purified air to the moving space of the transport vehicle. In addition, the inside of the side opposite to the side of the transfer space in the direction of the money and the width of the transport of the transport vehicle does not flow to the portion of the center side rectifying member opposite to the side where the transport space of the transport vehicle is located, and is easy to present. In the compressed state, the clean air of the compressed air is easily discharged from the discharge portion when the air portion is installed in the air flow space. The compressed air in the compressed state is easily discharged from the discharge portion, and the expansion of the purified air to the moving space of the transport vehicle can be reduced, and the expansion can be suppressed. The dust on the side of the floor portion rises, and even if the wind of the purified air flowing through the clean air ventilating mechanism is small, it is easy to maintain the article accommodating portion in an environment with less dust. Therefore, it is possible to provide the purified air flowing even with the ventilating mechanism of the purified air. In the embodiment of the article storage device according to the present invention, the rectifying member is disposed in the lateral width direction of the rack and is located in the transport vehicle. The aforementioned traveling frame of the end portion of the moving space frame in the lateral width direction is located near 10 on the central portion side. In other words, when the article transport vehicle is traveling in the moving space of the transport vehicle, the purified air that is compressed in the forward direction of the vehicle in the traveling direction of the traveling frame is decelerated or stopped with the article transport vehicle, and is inflated in front of the vehicle traveling direction, and is swollen. One part of the purified air is guided to the front and rear direction of the rack by the partition wall 15 provided at the end portion of the moving space of the transport vehicle, and flows to the air flow space because the rectifying member is disposed in the lateral width direction of the rack than the moving space of the transport vehicle The traveling frame of the end portion in the lateral width direction is also at the center portion side, and a wide space is formed between the rectifying member and the traveling direction of the moving space of the transport vehicle, and a flow is formed to the air flow. The purification process of the space is not easy to be in a compressed state, and the expansion of the purifying air to the moving space of the transporting vehicle can be reduced, so that the dust on the side of the floor can be suppressed from rising, even if the wind of the purified air flowing through the purifying air ventilation mechanism is small, it is still easy. The article storage unit is maintained in an environment with little dust. Therefore, it can be provided even if the air is ventilated by a clean air. The air purifying air is small, and it is still easy to hold the article storage unit dimension 200948691 in an environment with less dust and environmental conditions. In the embodiment of the article storage device of the present invention, air guiding should be provided at the oxygen guiding The system is viewed at the end side of the lateral width direction of the vehicle in the traveling frame of the month in the traveling direction of the article transporting vehicle 5
10 1510 15
部份之上部高度相同的高度或比其靠近上方,且從架前後 方向^前賴送車義空間之―端輯突出至前述搬送車 移動工間内之狀態下,橫亙前述物品收納架之架橫向寬度 方向之約略全長而形成者。 又 即,由於設有空氣引導體,故淨化空氣不易從地板部 側抓動至工氣引導體之上方側,可抑制因物品搬送車之行 走,流動至空氣流動空間之淨化空氣之氣流混亂,在行走 車,之橫側或後方_埃揚起,故即使輯化空氣通風機 構流動之淨化空氣之風力小,仍易將物品收納部維持在塵 埃f之環境’是故’可提供較以淨化空氣通風機構流動 之#化空氣之風力小,仍易將物品收納部維持在塵埃少之 環境之物品收納設備。 在本發明之物品保管設備之實施形態中,前 導體之在架橫向寬度方向的端部 前述搬送車移動空間内大幅突出之狀域^其他部份朝 即,當物品搬送車在搬送車移動空間行 ==搬送車移動空間行走之際’在行走台車之 »别方侧呈壓縮狀悲之淨化空氣隨著物品 車輛行走方向前方側膨脹,所膨^淨化空氣 啊隔壁引導至上方’地板部側之塵埃隨此揚 20 200948691 起。然而,由於空氣引導體之在架橫向寬度部份之端部側 部份形成比起其他部份朝前述搬送車移動空間内大幅突出 之狀態,故可抑制在其搬送車移動空間之架橫向寬度方向 端部,以分隔壁引導至上方之淨化空氣流動至高於空氣引 5 導之側,是故,可提供可抑制在搬送車移動空間之架橫向 寬度方向端部,地板部側之塵埃揚起之物品收納設備。 在本發明之物品保管設備之實施形態中,宜於前述行 走車架形成在前述行走車架之車輛行走方向之兩端部開口 成可使空氣進出,且將該兩端之開口部間連通成可使空氣 1〇 流動的空氣流通路徑。 即,由於於行走車架形成空氣流動路徑,故在行走車 架之車輛行走方向前方側呈壓縮狀態之淨化空氣之量少, 故可使在行走車架之上方側流動之淨化空氣之量或流動至 空氣流動空間之淨化空氣之量減少。因而,可更抑制因淨 15化空氣在行走車架之上方側流動,在行走台車之前方側塵 埃揚起’以及流動至空氣流動空間之淨化空氣之氣流因物 品搬送車之行走而混亂’而在行走台車之橫側或後方側塵 埃揚起’故即使以淨化空氣通風機構流動之淨化空氣之風 力小’仍易將物品收納部維持在塵埃少之環境。因而可提 20供即使以淨化空氣通風機構流動之淨化空氣之風力小,仍 易將物品收納部維持在塵埃少之環境之物品收納設備。 在本發明之物品保管設備之實施形態中,前述空氣流 通路技宜形成於前述行走車架之底部並呈向下開口之凹溝 狀0 12 200948691 下開=由Γ錢通路卿成於前述行走轉之底部向 5 ❺ 10 15 ❹ 20 空氣流通路徑形成於行走車架之底部 俨内-诵之凹’即了,且此空氣流通路徑係在空氣流通路 料化空氣不致擴散至上方側者,故可課求形成 構之1^不易擴&至上方之空氣流通路徑之行走車架結 β單化。因而’可提供可謀求形成有淨化空氣不易擴 納設2之空氣流通路徑之行走車架結構簡單化的物品收 友在本發明之物品保管設備之實施形態中,宜於前述空 氣机通路;^内設置於上下方向及車輛行走方向延伸之整流 板0 即,由於於前述空氣流通路徑内設置於上下方向及車 輛行走方向延伸之整流板,故在空氣流通路徑内流動之淨 化空氣可整流成在車輛橫向寬度方向排列之層流狀,故可 抑制塵埃因從空氣流通路徑排出之淨化空氣而從地板部側 揚起。因而,可提供可抑制塵埃因從空氣流通路徑排出之 淨化空氣而從地板部側揚起的物品收納設備。 在本發明之物品保管設備之實施形態中,前述行走車 架之在車輛行走方向之兩端部宜分別具有在車輛行走方向 傾斜成朝車輛内側逐漸增高之上面、及位於前述上面之下 方,相對於前述上面之前端凹入至前述車輛内側之部份。 即’物品搬送車在搬送車移動空間行走時,在行走車 架之車輛行走方向前方側呈壓縮狀態之淨化空氣隨著物品 搬送車減速或停止’於車輛行走方向前方侧膨脹,膨脹之 13 200948691 空氣之一部份為分隔壁等其他物體引導至上方地板部側 之塵埃隨此揚起。然而,若行走車架具有上述構造,行走 車架之車輛行走方向前方側之淨化空氣限制行走車架下側 部份之空氣往行走車架之上方流動,行走車架之上侧部: 5則被引導至行走車架之上方,而在行走車架之車輛行走方 向前方侧淨化空氣不易呈壓縮狀態,故行走車架減速或停 止時,可抑制地板部側之塵埃揚起,是故,可提供可抑制 地板部側之塵埃隨著物品搬送車減速或停止而揚起之物品 收納設備。 10 【資施方式】 用以實施發明之最佳形態 以下,依據圖式,說明本發明之實施形態。 如第1圖〜第3圖所示’本發明之物品收納設備w設於已 清淨化之淨化空氣從天花板側朝地板側向下流通之降流式 15 無塵室1内’以將半導體製品或液晶顯示元件等製品之中間 產物(intermediate article of manufacture)等板狀體以裝載 狀態收納於容器C之狀態,保管在塵埃少之環境。液晶顯示 元件之例子有用於液晶顯示元件或電漿顯示器之玻璃基 板。在此實施形態中,構造成將容器C作為物品而搬送及保 20 管。 此外,第2圖係在第1圖之II-II截取之截面圖,第3圖係 在第1圖之III-III截取之截面圖。 就降流式之無塵室1加以說明,如第3圖所示,於無塵 室1之側壁18之地板部附近形成側壁吸引部2,於無塵室1之 14 200948691 天花板形成天花板吹出部3,在從天花板吹出部3吹出經由 侧壁吸引部2吸引之吸引空氣之形態下,設置使淨化空氣在 無塵室1循環之無塵室用循環通風機構F。此外,無塵室】 之地板部以無孔狀之混凝土構成。 5 無塵室用循環通風機構F係於側壁吸引部2設置側壁用 風扇過濾單兀4,於天花板吸出部3並列設置由η E pA過濾器 等構成之空氣過遽器5,於天花板吹出部3之上方側設置空 狀至6’以連接流路7將無塵室丨之下部與空氣室6連通連接。 又’於連接流路7將循環用送風機8設置成於無塵$1吸 10引作用,進-步,於連接流路7之循環用送風機8之空氣吐 出侧之部份設置預濾器9。 藉側壁用風扇過濾單元4及循環用送風機8之通風作 用,將無塵室1内之空氣吸引至連接流路7,該所吸引之空 轧在連接流路7流動,通過預濾器9予以清淨化後,流入至 15 空虱室6,進一步,通過空氣過濾器5予以清淨化後,從天 花板吹出部3朝無塵室1内向下吹出。 因而,無塵室1内之空氣一面通過側壁用風扇過濾單元 4、預濾器9及空氣過濾器5, 一面經由上述路徑循環,藉此, 平予淨化空氣以從天花板吹出部3往下方吹出之狀態供給 20 至無塵室1 ’無塵室1内維持清淨度高之狀態。 再者’於連接流路7之循環用送風機8之吸入側之部份 連接外部空氣取入流路10,並且於該外部空氣取入流路1〇 設置外部空氣取入調節用阻尼器11,於前述連接流路7之前 述循環用送風機8之吐出側之部份連接排氣流路12,並且於 15 200948691The height of the upper part is the same as the height of the upper part, and the front end of the front and rear direction of the frame is extended to the moving carriage in the transporting vehicle. The lateral width direction is formed to be approximately the entire length. In other words, since the air guiding body is provided, the purified air is less likely to be gripped from the floor portion side to the upper side of the working gas guiding body, and the airflow of the purified air flowing to the air flowing space can be suppressed from being disturbed by the traveling of the article transporting vehicle. In the moving car, the lateral side or the rear side _Eyang starts, so even if the wind of the purified air flowing through the air ventilating mechanism is small, it is easy to maintain the object accommodating part in the environment of the dust f. The air flowing through the air ventilating mechanism is small, and it is easy to maintain the article storage unit in an article storage device in an environment with little dust. In the embodiment of the article storage device according to the present invention, the front portion of the front conductor in the lateral width direction of the rack protrudes significantly in the moving space of the transport vehicle, and the other portion faces immediately, when the article transport vehicle moves in the transport vehicle. Line == When the moving space of the moving car is walking, the side of the traveling trolley is compressed. The clean air of the air is swelled with the front side of the moving direction of the article, and the air is swelled to the upper side of the floor. The dust will follow this from 20,4848,691. However, since the end portion side portion of the air guiding body at the lateral width portion of the frame is formed in a state in which the other portion is largely protruded toward the moving space of the transporting vehicle, the lateral width of the rack in the moving space of the transporting vehicle can be suppressed. At the end of the direction, the purified air guided to the upper side by the partition wall flows to the side higher than the air guide 5, so that it is possible to suppress the dust in the lateral width direction of the frame in the moving space of the transport vehicle, and the dust on the floor side is raised. Item storage equipment. In the embodiment of the article storage device of the present invention, it is preferable that the traveling frame is formed at both end portions of the traveling frame in the traveling direction of the traveling body so that air can enter and exit, and the opening portions of the both ends are connected to each other. An air circulation path that allows air to flow. That is, since the air flow path is formed in the traveling frame, the amount of purified air that is compressed in the front side of the traveling direction of the traveling frame of the traveling frame is small, so that the amount of purified air flowing on the upper side of the traveling frame or The amount of purified air flowing to the air flow space is reduced. Therefore, it is possible to further suppress the flow of the clean air on the upper side of the traveling frame, the dust rising on the side before the traveling trolley, and the airflow of the purified air flowing to the air flow space being confused by the walking of the article transporting vehicle. The dust rises on the lateral side or the rear side of the traveling trolley. Therefore, even if the wind of the purified air flowing through the purified air ventilating mechanism is small, it is easy to maintain the article storage portion in an environment where dust is small. Therefore, it is possible to provide an article storage device in which the article storage portion is easily maintained in an environment with less dust, even if the wind of the purified air flowing through the air purifying mechanism is small. In an embodiment of the article storage device of the present invention, the air flow path is preferably formed at the bottom of the traveling frame and has a downwardly open groove shape. 12 12 200948691 Opened by the money passage The bottom of the turn is 5 ❺ 10 15 ❹ 20 The air circulation path is formed in the bottom of the traveling frame, the inside of the traveling frame, and the air circulation path is such that the air flow path does not diffuse to the upper side. Therefore, it is possible to form a structure of the frame that is not easy to expand & the air circulation path to the upper side of the frame of the beta. Therefore, it is possible to provide an article for the purpose of simplifying the structure of the traveling frame in which the air circulation path of the air is not easily expanded. In the embodiment of the article storage device of the present invention, it is preferable to use the air passage; The rectifying plate 0 that is disposed in the vertical direction and the traveling direction of the vehicle is a rectifying plate that is disposed in the air flow path and extends in the vertical direction and the traveling direction of the vehicle. Therefore, the purified air flowing in the air flow path can be rectified into The laminar flow of the vehicle in the lateral width direction suppresses the dust from rising from the floor portion side due to the purified air discharged from the air flow path. Therefore, it is possible to provide an article storage apparatus which can suppress dust from being lifted from the floor portion side by the purified air discharged from the air flow path. In the embodiment of the article storage device of the present invention, the both ends of the traveling frame in the traveling direction of the vehicle preferably have an upper surface that is inclined toward the vehicle inner side in the traveling direction of the vehicle and a lower side of the vehicle, and are located below the upper surface. The front end is recessed to the inner side of the aforementioned vehicle. In other words, when the article transporting vehicle moves in the moving space of the transporting vehicle, the purified air in a compressed state on the front side of the traveling direction of the traveling frame of the traveling frame is decelerated or stopped with the article transporting vehicle, and expands in front of the vehicle traveling direction, and expands 13 200948691 One part of the air is guided by the other objects such as the partition wall to the side of the upper floor portion, and the dust rises therewith. However, if the traveling frame has the above-described configuration, the purified air on the front side of the traveling direction of the traveling frame limits the air flowing to the lower side of the traveling frame to the upper side of the traveling frame, and the upper side of the traveling frame: 5 It is guided to the upper side of the traveling frame, and the purified air on the front side of the traveling direction of the traveling frame is not easily compressed. Therefore, when the traveling frame is decelerated or stopped, the dust on the floor side can be suppressed from rising. Provided is an article storage device that can suppress the dust on the floor portion side from being raised or stopped as the article transport vehicle is decelerated or stopped. [Effects] The best mode for carrying out the invention Hereinafter, an embodiment of the present invention will be described based on the drawings. As shown in Fig. 1 to Fig. 3, the article storage device w of the present invention is installed in the clean room 1 in which the cleaned purified air flows downward from the ceiling side toward the floor side. In a state in which the sheet-like body such as an intermediate article of manufacture such as a liquid crystal display element is stored in the container C in a loaded state, it is stored in an environment where dust is small. An example of a liquid crystal display element is a glass substrate for a liquid crystal display element or a plasma display. In this embodiment, it is configured to transport and hold the container C as an article. Further, Fig. 2 is a cross-sectional view taken along line II-II of Fig. 1, and Fig. 3 is a cross-sectional view taken at III-III of Fig. 1. The downflow type clean room 1 will be described. As shown in Fig. 3, the side wall suction portion 2 is formed in the vicinity of the floor portion of the side wall 18 of the clean room 1, and the ceiling portion is formed in the clean room 1 14 200948691 3, in a form in which the suction air sucked by the side wall suction portion 2 is blown from the ceiling blowing portion 3, a clean room circulation ventilation mechanism F that circulates the purified air in the clean room 1 is provided. In addition, the floor portion of the clean room is made of non-porous concrete. 5 The clean room circulation ventilation mechanism F is provided with a side wall fan filter unit 4 in the side wall suction unit 2, and an air filter unit 5 including an η E pA filter or the like is arranged in parallel on the ceiling suction unit 3, and the ceiling blower unit is installed in the ceiling. The upper side of the 3 is provided with an empty shape to 6' to connect the flow path 7 to connect the lower portion of the clean room to the air chamber 6. Further, the circulation blower 8 is provided in the connection flow path 7 so as to be sucked by the dust-free $1, and the pre-filter 9 is provided in the portion on the air discharge side of the circulation blower 8 of the connection flow path 7. The air in the clean room 1 is sucked to the connection flow path 7 by the ventilation action of the fan filter unit 4 and the circulation blower 8 for the side wall, and the suctioned empty roll flows through the connection flow path 7 and is cleaned by the prefilter 9 After that, it flows into the 15 empty chamber 6, and after being cleaned by the air filter 5, it is blown downward from the ceiling blowing portion 3 toward the inside of the clean room 1. Therefore, the air in the clean room 1 passes through the side wall fan filter unit 4, the prefilter 9 and the air filter 5, and circulates through the path, thereby purifying the purified air to be blown downward from the ceiling blowing portion 3. State supply 20 to clean room 1 'The clean room 1 maintains a high degree of cleanliness. Further, the portion of the suction side of the circulation blower 8 of the connection flow path 7 is connected to the external air intake flow path 10, and the external air intake flow path 1 is provided with the external air intake adjustment damper 11, as described above. A portion of the discharge side of the circulation flow path 7 that is connected to the discharge side of the blower 8 is connected to the exhaust flow path 12, and is at 15 200948691
藉調節外部空氣取入量調節用阻尼器u及排氣量調節 用阻尼器13之各自之開度’將以前述無塵室用循環通風機 構F循環之無塵室!内之淨化空氣中之預定量與新鮮之空氣 接著,依第1圖〜第4圖,就物品收納設備…作說明。 =且與前馳送車移動空間15連通成”可流動狀態之 V〜、下’在刖述物品收細在β 1 /1 .a 前述物品收納設備w包含有具有複數個物品收納部14 物《η收納架s、纟有在前述物品收納架3前方之搬送車移 動空間之地板部行走之行走車架44及升降自如地支撑於 1«該行走台車44之物品移载裝置46之堆高式起重酬相當於 物品搬送車)、使淨化空氣從前述物品收納料之背部側朝 前述搬送車移動空間15流動,以通過前述物品收納部14, 且使淨化空氣在前述搬送車移動空間内15流動至下方後, $為從排氣部34排出之淨化空氣通風機構B、在分隔成與 ^物品收納架S之前述物品收納部14空氣無法流動之狀By adjusting the opening degree of each of the external air intake amount adjusting damper u and the exhaust gas amount adjusting damper 13 in the clean air in the clean room that is circulated by the above-described clean room circulation ventilating mechanism F The predetermined amount and the fresh air are then described in the article storage device according to the first to fourth figures. And connected to the front transporting vehicle moving space 15 to form a "flowable state V~, lower" in which the article is thinned at β 1 /1. The article storage device w includes a plurality of article storage portions 14 The η storage rack s, the traveling frame 44 that travels on the floor portion of the transporting vehicle moving space in front of the article storage rack 3, and the stacking and lowering of the article transporting device 46 of the traveling vehicle 44 The lift is equivalent to the article transport vehicle, and the purified air flows from the back side of the article storage material toward the transport vehicle movement space 15 to pass through the article storage unit 14 and the purified air is in the transport space of the transport vehicle. 15 flows to the lower side, and $ is the purified air ventilating mechanism B discharged from the exhaust unit 34, and the air cannot flow in the article accommodating portion 14 partitioned into the article storage rack S.
至前述搬送車移動空間 今架8之架橫向寬度之全 導體37,將該物品收納 15内的狀態下,以橫亙前述物品收納架8之 長或約略全長的狀態形成之空氣引導體37 16 200948691 設備W設置於無塵室1内。 在第i圖中Y顯示之方向係沿著架橫向寬度方向 式起重機V之行走方向之方向,以χ顯示之方向係沿著 後寬度方向與V之車輛橫向寬度方向之方向。 朱刚 5 ❹ 10 15 ❷ 20 在此實施形態中,將前述物品收納架3以使各自之 側相對之狀態且相互之_隔著要形成前職送車移^ 間15之狀態,設置於前述搬送車移動空間15之車辆橫^ 度方向(7架前後寬度方向之方向)之兩邊側之地板部 上’在邊等物品收納架S,於架橫向寬度方向及架上下 排列有複數個收納作為物品之容器C之物品收納部14。° 如此設置之-對物品收納架s之側周圍以上下方向之 兩端部開口之矩形筒狀周壁25包圍,以地板部封閉周壁25 之下端部之開口 ’以複數個收納架用風扇過渡單元33封閉 周壁25之上端部之開口。 又,周壁25以對各物品收納架3之架橫向寬度方向之端 部隔著間隔之狀態配置,藉此,形成搬送車移動㈣之外 側突出部15t及儲存空間16。》,周壁25以與各物品收納竿 S之架前後紐方向之後料料麵成㈣用空間19之 狀態配置。 即,搬送車移動空間15於架橫向寬度方向比物品收納S 突出至外側,於物品收納架8之架橫向寬度方向外側將储存 空間16設置成與物品收納架s於架橫向寬度方向排列。又, 於各物品收納架S之後部設置用以將從前述無塵室丨之天花 板吹出部3吹出之淨化空氣引導至物品收納部似流動用 17 200948691 空間19。 此外,周壁25設置於搬送車移動空間丨5之架橫向寬度 方向端部,構成將搬送車移動空間15與外部分隔之分隔壁。 如第1圖及第4圖所示’將於架橫向寬度方向比搬送車 5 移動空間15之物品收納架S突出至外側之外側突出部151與 儲存空間16以前隔壁體29分隔成空氣無法流動,此前隔壁 體29設置成將前述物品收納架S之各橫側部之前端緣部與 於前述周壁25間之架橫向寬度方向開口之開口部份以空氣 無法流動之狀態封閉。又,前隔壁體29以與架橫向寬度方 ❹ 10 向平行之姿勢設置。 以橫隔壁體17將各物品收納架S之物品收納部14與儲 存空間16分隔成空氣無法流動,此橫隔壁體17設置成將各 物品收納架S之架橫向寬度方向兩端部以空氣無法流動之 狀態封閉。又,橫隔壁體17以與架前後寬度方向平行之姿 ' 15 勢設置。 附帶一提,前隔壁體29及橫隔壁體17設置成比後述之 空氣引導用板狀體32高。 © 如第1圖所示,於前述周壁25之對應於各儲存空間16之 部份設置用以開關進出該儲存空間16之開口部的排氣空間 20 用門26,於前述周壁25之對應於搬送車移動空間15之外邊 突出部15t之部份設置用以開關進出搬送車移動空間15之 開口部之移動空間用門27。 此外,雖省略圖式,於前述儲存空間16設置控制物品 保管設備之運轉之控制裝置或分電盤等。 18 200948691 月'J述空氣流動空間31藉於比最下段之物品收納部丨4低 之處以水平之姿勢設置空氣引導用板狀體32,而形成於此 空氣引導用板狀體32與地板部間。 淨化空氣通風機構B之排氣部34以位於與空氣流動空 5 間31之架前後寬度方向之搬送車移動空間15所在之側相反 的内側以及空氣流動空間31與搬送車移動空間15之架橫向 寬度方向兩侧之狀態,形成於周壁25之對應於空氣流動空 ❹ 間31及搬送車移動空間15之處,此排氣部34具有周壁用風 扇過濾單元35。 10 ^ 别述空氣引導用板狀體32以無法通氣之無孔板構成, 以使架橫向方向之兩端部及遠離架前後寬度方向之搬送車 移動空間15之側的端部接觸周壁25之狀態設置,且對應於 ' —對物品收納架S’以於架前後寬度方向隔著間隔之狀態設 置一對。 15 一對空氣引導體板狀體32以搬送車移動空間15側之端 Q 部與行走車架44之車輛橫向寬度方向之端部側部份於上下 方向(即,平面觀看)重複之狀態,突出至搬送車移動空間15 内’以此突出部份形成空氣引導體37。 即,空間引導體37以在前述堆高式起重機ν之行走方向 2〇 觀看,以於前述行走車架44之架前後寬度方向之端部側部 份上方重複之狀態設置。 又,如第1圖及第4圖所示,空氣引導體37之在架橫向 寬度方向之端部側部份37a形成比起其他部份大幅朝前述 搬送車移動空間15内突出之狀態。 19 200948691 加以說明,空氣引導體37之端部側部份3 搬送車移動空間丨5之緒向方向料之前述行走車The air guide body 37 is formed in a state in which the entire conductor 37 of the horizontal width of the frame of the transporting vehicle moving space is placed in the article 15 in a state of being stored in the article 15 in a state in which the article storage rack 8 is long or approximately full length. The device W is disposed in the clean room 1. In the i-th figure, the direction indicated by Y is in the direction of the traveling direction of the crane V in the lateral width direction, and the direction in which the χ is displayed is in the direction of the width direction of the vehicle in the rear width direction and V. Zhu Gang 5 ❹ 10 15 ❷ 20 In the embodiment, the article storage rack 3 is placed in the state in which the front side transporting compartments 15 are formed in a state in which the respective sides are opposed to each other. In the horizontal direction of the vehicle moving direction 15 (the direction of the front and rear width directions of the vehicle), the article storage rack S on the side, such as the side, is arranged in the horizontal width direction and the rack. The article storage unit 14 as the container C of the article. In this way, a rectangular cylindrical peripheral wall 25 opening at both ends in the upper and lower directions around the side of the article storage rack s is surrounded, and the opening of the lower end portion of the peripheral wall 25 is closed by the floor portion to a plurality of fan transition units for the storage rack 33 closes the opening at the upper end of the peripheral wall 25. Further, the peripheral wall 25 is disposed in a state in which the end portions in the lateral width direction of the article storage rack 3 are spaced apart from each other, whereby the transport vehicle movement (four) outer side protruding portion 15t and the storage space 16 are formed. 》, the peripheral wall 25 is disposed in a state in which the material surface is formed into a space (19) after the front and rear directions of the racks are accommodated with each article. In other words, the transport vehicle moving space 15 protrudes outward from the article storage S in the lateral width direction of the rack, and the storage space 16 is disposed outside the rack width direction of the article storage rack 8 so as to be aligned with the article storage rack s in the lateral width direction of the rack. Further, in the rear portion of each article storage rack S, the purified air blown from the ceiling portion blowing portion 3 of the clean room chamber is guided to the article storage portion like flow 17 200948691 space 19. Further, the peripheral wall 25 is provided at the end portion of the transport vehicle moving space 丨5 in the lateral width direction, and constitutes a partition wall that partitions the transport vehicle moving space 15 from the outside. As shown in Fig. 1 and Fig. 4, the article storage rack S that protrudes from the transport vehicle 5 in the lateral width direction of the rack protrudes to the outer outer side protruding portion 151 and the storage space 16 before the partition wall 29 is separated into air. The partition body 29 is provided such that the opening end portion of each of the lateral side portions of the article storage rack S and the opening portion in the lateral width direction between the peripheral walls 25 are closed in a state where air cannot flow. Further, the front partition body 29 is provided in a posture parallel to the lateral width direction 10 of the rack. The article accommodating portion 14 of each article storage rack S and the storage space 16 are separated from each other by the horizontal partition body 17 so that the air cannot flow. The horizontal partition wall body 17 is provided so that the air in the lateral width direction of each article storage rack S cannot be aired. The state of flow is closed. Further, the horizontal partition wall 17 is provided in a posture of "15" parallel to the width direction of the front and rear of the rack. Incidentally, the front partition wall body 29 and the horizontal partition wall body 17 are provided higher than the air guiding plate-like body 32 to be described later. As shown in FIG. 1 , a door 26 for the exhaust space 20 for opening and closing the opening and exit of the storage space 16 is provided in a portion of the peripheral wall 25 corresponding to each of the storage spaces 16 , and the peripheral wall 25 corresponds to the peripheral wall 25 . A moving space door 27 for opening and closing the opening of the transporting vehicle moving space 15 is provided in a portion of the outer protruding portion 15t of the transporting vehicle moving space 15. Further, although the drawings are omitted, a control device or a distribution board that controls the operation of the article storage device is provided in the storage space 16. 18, 2009, the first part of the air flow space 31 is provided with the air guiding plate-like body 32 in a horizontal position at a lower position than the lowermost article storage portion 丨4, and is formed in the air guiding plate-like body 32 and the floor portion. between. The exhaust portion 34 of the purge air ventilating mechanism B is located on the inner side opposite to the side where the transport vehicle movement space 15 in the front-rear width direction of the frame of the air flow space 31 is located, and the lateral direction of the air flow space 31 and the transport vehicle movement space 15. The state of both sides in the width direction is formed in the peripheral wall 25 corresponding to the air flow space 31 and the transporting vehicle moving space 15, and the exhaust portion 34 has a peripheral wall fan filter unit 35. 10 ^ The air guiding plate-like body 32 is formed of a non-porous plate that cannot be ventilated, so that the end portions in the lateral direction of the frame and the end portion on the side of the moving vehicle moving space 15 away from the front-rear width direction of the frame contact the peripheral wall 25 The state is set, and corresponding to '-the article storage rack S' is provided in a pair between the front and rear width directions of the rack. 15 The air guide body plate-like body 32 is in a state in which the end portion Q portion on the side of the transport vehicle moving space 15 and the end portion side portion of the traveling frame 44 in the vehicle lateral width direction are repeated in the up-down direction (that is, in plan view). The air guiding body 37 is formed by projecting into the moving space 15 of the transport vehicle. In other words, the space guide body 37 is disposed in the traveling direction 2 of the stacking crane ν, and is disposed in a state in which the side portions of the end portion in the front-rear width direction of the traveling frame 44 are overlapped. Further, as shown in Fig. 1 and Fig. 4, the end portion side 37a of the air guiding body 37 in the lateral width direction of the rack is formed to protrude significantly into the transporting vehicle moving space 15 from the other portions. 19 200948691 It is to be noted that the end side portion 3 of the air guiding body 37 transports the moving space of the vehicle 丨5 to the direction of the preceding traveling vehicle
=向寬度方向中央部側及其附近,形成朝搬送車移L 5 10 15 20 ,内大幅突出之狀態,以與v於架橫向寬度方向重複。 附帶一提,空氣引導體37之其他部份亦可形成朝搬送 車移動空間丨5内稍微突出之狀態,以不卿於架橫向寬度方 向重複。 如第5圖及第1〇圖所示,於前述空氣流動空仙將以广 著上下方向之姿勢於架前後寬度方向延伸之錢用構^ ❿ 以於架橫向寬度方向排列之狀態設置複數個,此整流用構 件36設置成比位於前述空氣流動空間31之前述搬送車移動 空間15之架橫向寬度方向端部之前述行走車架料靠近架橫 向寬度方向中央部側。 將前述複數整流用構件36中位於架橫向寬度方向之端 部份之端部側整流用構件36a形成可通風之多孔狀,且將在 前述複數整流用構件36中比前述端部側整流用構件3以在 架橫向寬度方向位於中央側之中央側整流用構件36b形成 〇 無法通氣之無孔狀。 又,前述端部侧整流用構件36a形成與前述空氣流動空 間31之架前後寬度方向之長度相同之長度,前述中央側整 用構件36b形成在架前後寬度方向比前述端部側整流用 構件36a短,且以偏至與前述空氣流動空間31内之架前後寬 度方向之刖述搬送車移動空間15所在之側相反側的狀態設 置。 20 200948691 加以說明,端部側整流用構件36a以上下方向 成與空氣流動空間31之上下方向之長度相同,且架前形 度方向之長度與空氣流動空間31之架前後寬度 又问之長度 相同之多孔狀板構件構成,設置成不突出至搬送車移動* 間15,在架橫向寬度方向觀看,籠罩空氣流動空間& 有範圍。 工a之所 ❹ 10 端部側整流用構件36a比位在前述搬送車移動办門 之架橫向寬度方向端部之前述行走車架44靠近架橫向寬声 方向中央部側,且以位於空氣流動空間31之架橫向寬声= 向之一端部與另一端部之狀態,於空氣流動空間31設=— 對。 又,中央側整流用構件36b以上下方向之長度形成與空 氣流動空間31之上下方向之長度相同,且架前後寬度方向 之長度形成空氣流動空間31之架前後寬度方向之—半長度 15 左右之無孔狀板付構成,設置成偏至與空氣流動空間31之 搬送車移動空間15所在之侧相反之後侧的狀態,在架橫向 寬度方向觀看’籠罩空氣流動空間31後側一半之範圍。 中央側整流用構件36b以位於一對端部侧整流用構件 36a間之狀態’以於架橫向寬度方向等間隔之狀態於空氣流 20 動空間31設置複數個。 如第4圖及第5圖所示,於空氣流動空間31之比設置整 流用構件36之處靠近端部側之處設置以沿著上下方向之姿 勢於架前後寬度方向延伸之收納架側多孔狀板狀體38及以 沿著上下方向之姿勢於架橫向寬度方向延伸之移動空間側 21 200948691 多孔狀板狀體3 9。 加以說明’收納架側多孔狀板狀體38以將位於物品收 納架s下方之空氣流動空間31之架橫向寬度方向中央部與 位於儲存空間16下方之空氣流動空間31之架橫向寬度方向 5端部分隔成空氣可流動之狀態設置,移動空間側多孔狀板 狀體39以將空氣流動空間31之前述架橫向寬度方向端部與 搬送車移動空間15之外側突出部15t分隔成空氣可流動之 狀態設置。 又’收納架側多孔狀板狀體38以偏移至空氣流動空間 10 31後側之狀態與架前後寬度方向平行之姿勢設置,移動空 間侧多孔狀板狀體39以越往架橫向寬度方向中央部側,越 靠向後方側(遠離搬送車移動空間15之側)之狀態,相對於架 橫向寬度方向傾斜之姿勢設置。 收納架側多孔狀板狀體38與移動空間側多孔狀板狀體 15 39以使收納架側多孔狀板狀體38之一端部及移動空間側多 孔狀板狀體39之一端部與周壁接觸,且使收納架侧多孔狀 板狀體38之另一端與移動空間側多孔狀板狀體39之另一端 接觸之狀態設置。 附帶一提,收納架側多孔狀板狀體38及移動空間側多 2〇 孔狀板狀體39設置成低於空氣引導用板狀體32。又,收納 架側多孔狀板狀體38及移動空間側多孔狀板狀體39之開口 率(板狀體之總面積除以板狀體之開口部份之面積之值)設 定在30%。 將前述淨化空氣通風機構B設置成以收納架用風扇過 200948691 慮單元33之通風作用,將無塵室工内之淨化空氣向下吹至物 °收納n又備W内’將該吹出之淨化空氣以流動用空間⑺引 導’供給至物M收納部14,從背部側通過物品收納部“, $ &動至搬送車移動空間15,進一步,在搬送車移動空間15 下方流動’通過-對空氣引導體37間,流動至空氣流動 <間3卜以使$空氣流動空間31之淨化空氣經由排氣部μ 排出至物品收納設備~外之形態,使淨化空氣流動。 ® 〇〇即’使剛述淨化空氣通風機構B具有收納架用風扇過濾 單疋33、空氣流動空間31、空氣引導用板狀體32(空氣引導 體37)及排氣部44等而構成。 . 接著,就前述堆高式起重機V加以說明。 如第6圖〜第8圖所示,堆高式起重機乂構造成於沿著架 &向寬度方向在地板部上行走之行走車架44直立設置將物 15品移載用冑述物品移載襄置46在車輛行走方向(與架橫向 寬度相同之方向)之兩端部引導支撐成升降自如,作為前後 . —對支柱之中央支柱體45,以直立設置於此行走車架料之 中央支柱體45將物品載移裝置46引導支撐成升降自如。 前後一對中央支柱體45分別形成使車輛行走方向之兩 2〇 侧之面在平面觀看,於車輛行走方向凸出之曲形,以上部 0樞架47連結前後一對中央支柱體45之各上端部。此曲形之 例有圓弧、橢圓之一部份、淚珠(tear dr〇p)狀之—部份、流 線形狀等,但不限於此。 又,前後一對中央支柱體45亦可形成使車輛行走方向 之兩側之面不於車輛行走方向凸出之直線狀,如此,亦可 23 200948691 10 15 以車輛行走方向之兩側之面形成直線狀之角柱構成。 使前述行走車架具有位於車輛行走方向之兩端部,沿 車輛橫向寬度方向(與架前後寬度方向相同之方向)之姿勢 的前後一對支撐用部份咏、位於車輛橫向寬度方向之兩减 βρ ’ /σ車购走方向之姿勢之左右—對基台用部份*扑而換 成’平面觀看形狀形成矩形,切用部份仏及基台用部极 44b以支撐用部份构之車輛行走方向之端部重疊於基台用 端部樣之車輛橫向寬度方向端部之上方的形態設置。 於左右—對基台料份祕具有相對於以於車輛橫向 寬度方向排狀狀祕置麵板部上之左右-對行走軌道 42 ’於車柄行走方向具有―對行走輪4卜行走車架44構造 成藉以圖外之行走用馬達使行走輪41旋轉_,而沿行走 軌道42行走移動。 雨端!Γ走車架44形絲前述較車架44之車輛行走方 成㈣開口成空軋可進出’且將其兩端之開口部52b間連通 &:=====·=峨形成= toward the center portion side in the width direction and its vicinity, a state in which the transport L L 10 10 15 20 is moved toward the transport vehicle, and the inside is largely protruded, and is overlapped with v in the lateral width direction of the rack. Incidentally, the other portion of the air guiding body 37 may also be formed in a state of being slightly protruded toward the moving space 丨5 of the transporting vehicle, so as not to be repeated in the lateral width direction of the rack. As shown in Fig. 5 and Fig. 1 , in the air flow space, the money extending in the vertical direction of the frame in the vertical direction is arranged in a plurality of states in the horizontal width direction. The rectifying member 36 is disposed closer to the center portion side in the lateral width direction than the traveling frame material at the end portion in the lateral width direction of the transport vehicle moving space 15 of the air flow space 31. The end-side rectifying member 36a of the end portion of the plurality of rectifying members 36 in the lateral direction of the rack is formed into a ventilated porous shape, and the end rectifying member 36 is more than the end-side rectifying member. 3, the center side rectifying member 36b located on the center side in the lateral width direction of the rack is formed into a non-porous shape in which the crucible cannot be ventilated. In addition, the end side rectifying member 36a is formed to have the same length as the length of the air flow space 31 in the front-rear width direction, and the center side tempering member 36b is formed in the front-rear width direction than the end-side rectifying member 36a. It is short and is provided in a state opposite to the side on the side where the transporting vehicle moving space 15 is located, in the front-rear width direction in the air flow space 31. 20 200948691 It is to be noted that the end side rectifying member 36a has the same length in the up-down direction as the air flow space 31 in the up-down direction, and the length in the front-frame shape direction is the same as the front-rear width of the air flow space 31. The porous plate member is configured so as not to protrude to the transport vehicle movement*, and is viewed in the lateral width direction of the rack, and covers the air flow space & The end side rectifying member 36a is closer to the center portion side of the rack lateral wide direction than the traveling frame 44 positioned at the end portion in the lateral width direction of the rack of the transport vehicle moving door, and is located in the air flow. The horizontal width of the frame of the space 31 = the state of one end and the other end, and the air flow space 31 is set to =. Further, the length of the center-side rectifying member 36b in the vertical direction is the same as the length in the upper and lower directions of the air flow space 31, and the length in the front-rear width direction of the rack forms a half-length of about 15 in the front-rear width direction of the air flow space 31. The non-porous plate is configured to be biased to the rear side opposite to the side where the transport space 15 of the air flow space 31 is located, and the range of the rear half of the air flow space 31 is viewed in the lateral width direction of the rack. The center side rectifying member 36b is provided in a plurality of air flow 20 moving spaces 31 in a state where the pair of end side rectifying members 36a are disposed at equal intervals in the lateral width direction of the rack. As shown in FIG. 4 and FIG. 5, in the air flow space 31, the rectifying member 36 is provided near the end side, and the storage rack side perforated in the vertical direction of the rack in the vertical direction is provided. The plate-like body 38 and the moving space side 21 which extends in the lateral width direction of the frame in the vertical direction are 200948691 porous plate-like body 39. The storage rack-side porous plate-shaped body 38 is disposed such that the central portion in the lateral width direction of the air flow space 31 located below the article storage rack s and the air flow space 31 located below the storage space 16 are laterally oriented at the end of the width direction. In a state in which the air is in a flowable state, the space-side porous plate-like body 39 is partitioned to partition the lateral width direction end portion of the air flow space 31 from the outer side protrusion portion 15t of the transport vehicle moving space 15 into an air flowable portion. Status setting. Further, the storage rack-side porous plate-like body 38 is disposed in a posture shifted to the rear side of the air flow space 10 31 in a direction parallel to the front-rear width direction, and the space-side porous plate-like body 39 is moved in the lateral width direction of the frame. The center side is placed in a posture inclined to the lateral width direction in a state of being rearward (away from the side of the transporting vehicle moving space 15). The storage rack side porous plate-like body 38 and the moving space side porous plate-like body 15 39 are in contact with one end portion of the storage rack side porous plate-like body 38 and one end portion of the moving space side porous plate-like body 39 and the peripheral wall. The other end of the storage rack-side porous plate-like body 38 is placed in contact with the other end of the moving space-side porous plate-like body 39. Incidentally, the storage rack side porous plate-like body 38 and the moving space side multi-pronged plate-like body 39 are provided lower than the air guiding plate-like body 32. Further, the aperture ratio of the container-side porous plate-like body 38 and the moving-space-side porous plate-like body 39 (the total area of the plate-like body divided by the area of the opening portion of the plate-like body) is set at 30%. The purifying air ventilating mechanism B is arranged such that the venting action of the unit 33 is considered by the fan for the storage rack, and the purifying air in the clean room is blown downward to the object, and the sump is cleaned. The air is guided to the object M accommodating portion 14 by the flow space (7), passes through the article accommodating portion from the back side, moves to the transport vehicle moving space 15 from the back, and further flows through the transport vehicle moving space 15 Between the air guiding bodies 37, the air flows into the air to cause the purified air of the air flowing space 31 to be discharged to the outside of the article storage device via the exhaust portion μ, so that the purified air flows. The clean air ventilating mechanism B includes a storage fan filter unit 33, an air flow space 31, an air guiding plate body 32 (air guiding body 37), an exhaust unit 44, and the like. The stacker crane V is explained. As shown in Figs. 6 to 8 , the stacker crane is configured to stand upright 15 with the traveling frame 44 that travels on the floor portion in the width direction along the rack & Product transfer The article transfer device 46 guides the support at both ends of the vehicle traveling direction (the same direction as the lateral width of the frame) so as to be lifted and lowered as a front pillar. The center pillar body 45 of the pillar is erected on the traveling frame. The central pillar body 45 guides and supports the article loading device 46 to be lifted and lowered. The front and rear pair of central pillar bodies 45 respectively form a plane for viewing the two sides of the vehicle in the direction of travel, and protruding in the direction of travel of the vehicle. The upper part 0 pivot frame 47 connects the upper end portions of the pair of front and rear center pillar bodies 45. Examples of the curved shape include a circular arc, a part of an ellipse, a teardrop, a part, and a flow. The shape of the line or the like is not limited thereto. Further, the pair of front and rear center pillar bodies 45 may be formed in a straight line such that the sides of the vehicle traveling direction do not protrude in the traveling direction of the vehicle, and thus may be 23 200948691 10 15 The surface on both sides of the traveling direction of the vehicle is formed by a linear column. The traveling frame has both ends in the traveling direction of the vehicle, and is oriented in the lateral width direction of the vehicle (the same direction as the front-rear width direction). The front and back of the pair of support parts, the two sides of the lateral width direction of the vehicle minus βρ ' / σ, the direction of the car purchase direction, the part of the base is replaced by a 'flat view shape to form a rectangle, The cutting portion and the base portion 44b are provided so that the end portion of the supporting portion in the traveling direction of the vehicle is superposed on the end portion of the base end portion in the lateral direction of the vehicle. The base material has a structure for the left and right side of the secret panel portion in the lateral width direction of the vehicle, and the pair of traveling rails 42' have a structure for the traveling wheel 4 and the traveling frame 44. The traveling motor outside the figure rotates the traveling wheel 41 to move along the traveling rail 42. Rainy end! ΓTake frame 44-shaped wire, the vehicle traveling side of the frame 44 is formed. (4) The opening is vacant and can be moved in and out and the opening 52b at both ends thereof is connected. &:=====·==峨
向to
20 甚藉如上述’形成行走車架44,於行走車架44之左 下方料份4侃I且树後-敎撐料份44a之 :成凹溝仏,以此前後-對凹溝仏形成空氣流通路 右 向之=氣流通路徑如前後—對凹溝仏之車輛行走方 間之空:部^開口部汹’途中通過_對支揮用部份咏 …形‘4 ’將兩端開口部奶間連通成空氣可流動。 24 200948691 如第7圖及第1 〇(a)圖所示,於前述空氣流通路捏52内設 置以沿著上下方向之姿勢於車輛行走方向延伸(即於上下 方向及車輛行走方向延伸)之整流板53。 此整/瓜板53以於車輔橫向寬度方向排列之狀態設置複 5數個’以連結於支撐用部份44a之下面之狀態設置於前後一 對凹溝52a。 如第ό圖及第10(b)圖所示,前述行走車架44之車輛行走 方向之兩端側部份(一對支撐用端部4 4 a之外側部份)形成其 下側部份比上側部份凹入至車輛内側之狀態且上側部份之 1〇 上面呈位於車輛越内側越高之傾斜狀的狀態。 加以說明’前後一對支撐用部份44a設置成相對於左右 一對基台用部份44b突出至車輛行走方向之外側之狀態,藉 此’在行走車架44之車輛行走方向之兩端側部份形成其下 側部份44d比上側部份(傾斜之上面44c)之前端4和凹入至車 15 輛内側之狀態。 又,前後一對支撐用部份44a之比左右一對基台用部份 44b之突出至車輛行走方向外側之部份的上面44(;形成位於 車輛越内側,越高之傾斜狀之狀態,藉此,行走車架44之 車輛行走方向之兩端側部份形成其上側部份之上面44c呈 20 位於車輛越内側越高之傾斜狀的狀態。 如第7圖所示,支撐用部份44a形成其車輛橫向寬度方 向之兩侧之端部側部份比位於其間之中央部份更往下凹之 狀態,行走車架44全體亦形成其車輛橫向寬度方向之兩侧 之端部側部份比位於其間之中央部份更往下凹之狀態。 25 200948691 藉如此形成行走車架44,如第u圖所示,空氣引導體 37構造成與行走轉44之端部卿份於上下㈣重複且 低於車輛橫向寬度方向之中央部份的上面,並且於空氣引 導體37之搬送車移動空間15大幅突出之端部側部份^與 5行走車架44之中央部於車麵行走方向重複。 、 附帶-提’基台用部份44b之車輛行走方向兩端部形成 在平面觀看呈頭細形狀。 如第8圖及第12圖所示,呈沿車輛行走方向之形狀且上 下方向之長度與前述中央支枉體45相同或約略相同之作為 1〇整流板的輔助支柱體49於從前述中央支柱體45遠離車輛橫 向寬度方向之前述物品收納架S存在之側之處,朝向前述中 央支柱體45所在之側相反之側的外面形成在平面觀看,於 車輛橫向寬度方向凸出之曲形的狀態設置。 加以說明,輔助支柱體49以設置於從直立設置於行走 15 車架44之支撐用部份44a之車輛橫向寬度方向之中央部的 中央支柱體45遠離車輛橫向寬度方向之前述物品收納架s 所在之侧之處的狀態,直立設置於行走車架44之支撐用部 份44a之車輛橫向寬度方向之兩端部。 又,輔助支撐體49之内面形成沿車輛行走方向及上下 20 方向之平坦面,外面形成在平面觀看,於車輛橫向寬度方 向之物品收納架S所在之側凸出成圓弧狀之曲形,而形成在 平面觀看越往車輛行走方向之端部側越細之頭細形狀且沿 車輛行走方向及上下方向之扁平狀。 前述中央支柱體45設置前後一對,以將前述物品移载 26 200948691 裝置46在車輛行走方向之 如。 兩端Μ導❹成個別升降自 5 又,前述輔助支柱體49設置於於 離中央支柱體45之兩側處,左右兩倒 橫向寬度方向遠 之則述輔助支柱體4920 By the above-mentioned 'formation of the traveling frame 44, the left side of the traveling frame 44 is 4 侃I and the rear of the tree- 敎 料 4 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 44 Air flow path to the right = air flow path such as before and after - the space between the vehicles in the groove : : 部 部 部 部 部 开口 开口 开口 开口 开口 途 途 途 途 途 途 途 途 途 途 对 对 对 支 支 形 形 形 形 形 形 形 形 形 形 形The milk room is connected to the air to flow. 24 200948691 As shown in Fig. 7 and Fig. 1(a), the air flow passage pinch 52 is provided to extend in the vehicle traveling direction in the vertical direction (i.e., in the up and down direction and the vehicle traveling direction). Rectifier plate 53. The whole/squash plate 53 is provided in a state in which the plurality of carcasses 53 are arranged in the lateral direction of the vehicle in the lateral direction, and is disposed in the front and rear pair of grooves 52a in a state of being coupled to the lower side of the supporting portion 44a. As shown in the figure and the figure (b), the both ends of the traveling frame 44 in the traveling direction of the vehicle (the outer side portions of the pair of supporting ends 4 4 a) form the lower portion thereof. The upper side portion is recessed to the inner side of the vehicle, and the upper side of the upper side portion is in a state of being inclined higher on the inner side of the vehicle. It is to be noted that the front and rear pair of supporting portions 44a are provided so as to protrude to the outer side of the vehicle traveling direction with respect to the pair of left and right base portions 44b, thereby being 'on both end sides of the traveling frame 44 in the traveling direction of the vehicle. The portion is formed such that its lower side portion 44d is in a state of being recessed to the inner side of the vehicle 15 than the upper side portion (the inclined upper surface 44c). Further, the pair of front and rear support portions 44a are protruded to the upper surface 44 of the portion on the outer side in the vehicle traveling direction from the pair of right and left base portions 44b (the formation is located on the inner side of the vehicle, and the higher the inclination state is, Thereby, the upper end side portion of the traveling frame 44 in the traveling direction of the vehicle forms a state in which the upper surface 44c of the upper side portion is inclined at the inner side of the vehicle. As shown in Fig. 7, the supporting portion 44a forms a state in which the end side portions on both sides in the lateral width direction of the vehicle are more concave than the central portion located therebetween, and the entire traveling frame 44 also forms the end portions on both sides of the lateral width direction of the vehicle. The portion is more concave than the central portion located therebetween. 25 200948691 By forming the traveling frame 44 in this way, as shown in Fig. u, the air guiding body 37 is configured to be in upper and lower portions with the end of the walking turn 44 (4) Repeated and lower than the upper portion of the central portion in the lateral direction of the vehicle, and the end portion side portion of the transporting vehicle moving space 15 of the air guiding body 37 and the center portion of the traveling frame 44 of the vehicle are in the traveling direction of the vehicle surface. Repeat. The both ends of the abutment portion 44b in the traveling direction of the vehicle are formed in a plan view in a thin shape. As shown in Figs. 8 and 12, the shape in the traveling direction of the vehicle and the length in the up and down direction are the same as the central branch. The auxiliary pillar body 49, which is the same or approximately the same as the one-way fairing plate, faces the side where the article storage rack S is located away from the lateral width direction of the vehicle from the center pillar body 45, and faces the center pillar body 45. The outer side of the side opposite to the side is formed in a state of being curved in a plane view in the lateral width direction of the vehicle. In addition, the auxiliary pillar body 49 is provided on the support portion 44a which is provided from the stand 15 of the traveling 15 frame. The state in which the center pillar body 45 at the center portion in the lateral direction of the vehicle is away from the side of the article storage rack s in the lateral width direction of the vehicle is erected on the lateral width direction of the vehicle in the supporting portion 44a of the traveling frame 44. Further, the inner surface of the auxiliary support body 49 forms a flat surface along the traveling direction of the vehicle and the upper and lower directions 20, and the outer surface is formed in a plane view for the vehicle. The side of the article storage rack S in the width direction is convexly curved in an arc shape, and is formed in a thin shape which is thinner toward the end side of the traveling direction of the vehicle, and is in the traveling direction and the up and down direction of the vehicle. The central pillar body 45 is provided with a pair of front and rear to transfer the article 26 200948691. The device 46 is in the traveling direction of the vehicle. The two ends are guided to be lifted and lowered from 5, and the auxiliary pillar body 49 is disposed at From the two sides of the central pillar body 45, the left and right sides are opposite to each other in the lateral width direction, and the auxiliary pillar body 49 is described.
10 對應於前述前後-對令央支柱 以複數個棒狀連結體5〇連接中=置前後一對。 之輔助支柱體49,以中央支柱、柱體45與左右兩側 触及«筒.輔助支柱 支柱雜附二提輔輔助支㈣49形成於車輛行走方向比中央^體45長,輔助支柱體49之車翻行走 置成位於在車贿走杨財衫 ==又 =部還内側之處,辅助支柱體,車=: 貝1 ^位於在車树走方向比中央支柱體45之車輛行走 方向之外側端部還外側之處。 1510 Corresponding to the aforementioned front-back-to-center pillars, a plurality of rod-shaped connecting bodies 5〇 are connected to each other. The auxiliary pillar body 49 is formed by the central pillar, the column 45 and the left and right sides. The cylinder is supported by the auxiliary cylinder (the auxiliary pillar). The auxiliary pillar (49) 49 is formed in the vehicle traveling direction longer than the central body 45, and the auxiliary pillar body 49 is used. Turning over and walking is located in the place where the car is bribed away, and the auxiliary pillar body is in the inner side of the car. The department is still outside. 15
如第9圖所不’物品移餘置顿造成可對物品收納部 $移載谷器c’由以中央支柱體45引導支撑之升降台55、環 堯上下抽心旋轉自如之旋轉台56及將設置於該旋轉台56之 載置體設置成退出移動自如之連桿機構58構成叉式移載裝 置。 物品移載襄置46構造成可以旋轉台56之旋轉使載置體 57%轉移動’且以連桿機構58之伸縮切換成使載置體”退 至升降台55上之狀態(參照第9(a)圖)或使載置體57突出至 物110收納部14側之狀態(參照第9(b)圖)。 附帶—提’如第1圖及第2圖所示,由於令載置體57之 27 200948691 退出移動方向為車輛行走方向之狀態比起令載置的之退 出移動方向為車輛橫向寬度方向之狀態,物品移載裝置 岣特別是連桿機構58或栽置體57)之朝向車輛橫向寬度方 向之面較小’故物品移栽裝置46構造成在載置㈣之退出 5移動方向為沿車輛行走方向之狀態的狀態下,使堆高式起 重機V行走。 [其他實施形態] ⑴在上述實施形態中,將端部側整流用構件恤形成 與空氣流動空間31之架前後寬度方向之長度相同或約略相 ❹ 10同之長度’亦可將端部側整流用構件恤形成空氣流動空間 Μ之架前後寬度方向之長度之-半左右等,於架前後寬度 方向比空氣流動空間31短。 又’在上述實施形態中,將中央側整流用構件施形成 於架前後寬度方向比端部側整流用構件如短,亦可將中央 · 15側整流用構件36b形成於架前後寬度方向比端部側整流用 構件36a長’又,如第13圖所示,亦可形成於架前後寬度方 向與端部側整流用構件36a相同之長度。 ◎ (2)在上述實施形態中,將中央側整流用構件形成 無法通氣之無孔狀,亦可如第13⑷圖所示,與端部侧整流 2〇用構件36&同樣地,形成可通氣之多孔狀,又,亦可如第13(b) 圖所示,將中央側整流用構件36b之架前後寬度方向之搬送 車移動空間15所在之侧之部份形成可通氣之多孔狀且與 搬送車移動空間15所在之側相反側之部份形成無法通氣之 無孔狀。 28 200948691 此外’當中央侧整流構件36b形成具有可通氣之多孔狀 部份時’該部份之開口率可與端部側整流用構件36a之開口 率相同’亦可大於端部侧整流構件36a之開口率。 又,亦可將端部側整流用構件36a形成無法通氣之無孔 5 ❹ 10 15 ❿ 20 狀。 (3)在上述實施形態中,將整流用構件36設置於比位 於搬送車移動空間15之架橫向寬度方向端部之行走車架44 罪近架橫向寬度方向中央部之處,亦可將整流用構件設置 於比位於搬送車移動空間15之架橫向寬度方向端部之行走 車¥44罪近架橫向寬度方向端部之處,又,亦可於該等架 橫向寬度方向巾央部側與架橫向寬度方向端部侧之間以在 位於搬送車移動空間15之架橫向寬度方向端部之行走車架 44之橫侧邊排列之狀態設置。 (4)在上述實施开九喊中,將整流用構件36以於架橫向 ^度方向排列之狀態設置複數個,亦可將整流用構件%僅 設置於空氣流動空間15内之架橫向寬度方向之兩端部側處 之其中任-者。又,設置端部側整流用構件36a及中央側整 流用構件36b作為整流用構件36,亦可僅設置端部側整流用 構件36a作為整流用構件。 在上述實施形 &、、,由 工軋Ή导體37設置成在与 之行走方向觀看,於行走車架之橫向寬度方向: 在份之上部重複之狀態,亦可將空氣引導體37設; =品搬料V之行走方向崎,於行走車架之橫向寬) 向之兩端側部份之上部不重複之狀態。 29 200948691 (6)在上述實施形態中,办 走車架糾之底部形成向下開口之^:通路徑52形成於行 路觀形成在行走車㈣4之_·^可將空氣流通 亦可=:;—向:=。’ W)在上述實施形態中,於办 著上下方向通路徑52設置以沿 俗"土 、車輛仃走方向延伸之整流板53,亦可 於工軋&通路徑52設置以沿 車輛行走方向延伸之心板53 ^向寬度方向之姿勢於 内設置整流板53。 ^ 3’亦可不於空氣流通路徑52 10 15 20As shown in Fig. 9, the item storage unit is a movable table 55 that is supported by the center pillar body 45, and the rotary table 56 that is freely rotatable up and down. The carrier provided on the rotary table 56 is disposed to exit the movable link mechanism 58 to constitute a fork transfer device. The article transfer device 46 is configured to be capable of rotating the carrier 57 by a rotation of the rotary table 56 and switching the expansion and contraction of the link mechanism 58 to return the carrier to the lift table 55 (refer to the ninth aspect). (a) Fig. or a state in which the mounting body 57 is protruded to the side of the object housing portion 14 (refer to Fig. 9(b)). Attachment - As shown in Figs. 1 and 2, the order is placed 27 of the body 57 200948691 The state in which the exiting direction is the direction in which the vehicle travels is the state in which the exiting movement direction of the vehicle is the lateral width direction of the vehicle, and the article transfer device 岣, particularly the link mechanism 58 or the plant body 57) The surface of the vehicle in the width direction of the vehicle is small. The article loading device 46 is configured to move the stacker V in a state in which the movement direction of the loading (4) is 5 in the traveling direction of the vehicle. [Other Embodiments] (1) In the above-described embodiment, the end-side rectifying member t-shirt is formed to have the same length as the front-rear width direction of the air flow space 31 or approximately the same length as the end portion. Front and rear width of the air flow space In the above-described embodiment, the center-side rectifying member is formed in the front-rear width direction than the end-side rectifying member, for example, in the longitudinal direction of the frame. In addition, the center 15 side rectifying member 36b may be formed in the front-rear width direction of the end-side rectifying member 36a. Further, as shown in FIG. 13, it may be formed in the front-rear width direction and the end side. (2) In the above-described embodiment, the center-side rectifying member is formed into a non-porous shape that cannot be ventilated, and the rectifying member for the end side can be rectified as shown in Fig. 13 (4). In the same manner, the ventilated porous shape is formed, and as shown in Fig. 13(b), the side of the center side rectifying member 36b in the front-rear width direction of the transporting vehicle moving space 15 is also located. A portion that is ventilated and has a side opposite to the side on which the transporting vehicle moving space 15 is formed forms a non-venting non-porous shape. 28 200948691 In addition, 'when the central-side rectifying member 36b is formed with a ventilated porous portion' The opening ratio of the portion may be the same as the opening ratio of the end side rectifying member 36a. The opening ratio of the end side rectifying member 36a may be larger than the opening ratio of the end side rectifying member 36a. (3) In the above embodiment, the rectifying member 36 is disposed in the lateral width direction of the traveling frame 44 which is located at the end portion in the lateral width direction of the transport vehicle moving space 15 In the central portion, the rectifying member may be disposed at a position closer to the lateral width direction of the traveling vehicle than the end portion of the traveling vehicle moving space 15 at the end portion in the lateral width direction of the transport vehicle. The horizontal width direction direction central portion side and the horizontal width direction end side are disposed in a state of being arranged on the lateral side of the traveling frame 44 at the end portion of the transport vehicle moving space 15 in the lateral width direction. (4) In the above-described embodiment, the plurality of rectifying members 36 are arranged in a state in which the rectifying members 36 are arranged in the lateral direction of the frame, and the rectifying member % may be provided only in the lateral width direction of the frame in the air flow space 15. Any one of the ends of the two ends. Further, the end side rectifying member 36a and the center side rectifying member 36b are provided as the rectifying member 36, and only the end side rectifying member 36a may be provided as the rectifying member. In the above-described embodiment, the rolling contact conductor 37 is disposed so as to be viewed in the traveling direction thereof, and in the lateral width direction of the traveling frame: in the state where the upper portion is repeated, the air guiding body 37 may be provided. = = the direction of travel of the product V, the lateral width of the frame of the traveler) is not repeated on the upper part of the two ends. 29 200948691 (6) In the above embodiment, the bottom of the frame is formed to form a downward opening. The through path 52 is formed in the road view and formed on the traveling vehicle (4) 4 to allow air to circulate. - To: =. In the above-described embodiment, the rectifying plate 53 extending in the direction of the dirt and the vehicle is disposed in the vertical direction passage 52, and may be disposed on the rolling and passing path 52 to walk along the vehicle. The direction extending core plate 53 is provided with a rectifying plate 53 in a posture in the width direction. ^ 3' may not be in the air circulation path 52 10 15 20
二Τ'在上述實施形態中’將用以將搬送車移動空間15 寬==分隔壁25設置於搬送車移動空間^架橫向 寬度方向端部,亦可不設置分隔壁25。 ⑼在上述實麵態巾,將行走轉μ之車輛行走方 側部形成其下側部份較上側部份凹人至車輛内側 \,村使此下㈣份之下面位於車輛越_越低之 傾斜狀專適當變更形狀。In the above-described embodiment, the transport vehicle moving space 15 is widened = the partition wall 25 is provided at the end portion of the transport vehicle moving space in the lateral width direction, and the partition wall 25 is not provided. (9) In the above-mentioned solid surface towel, the side portion of the traveling side of the vehicle that turns to μ is formed to be lower than the upper side portion to the inner side of the vehicle, and the lower part of the vehicle is located below the (four) portion of the vehicle. The shape is appropriately changed by tilting.
又,在上述實施形態中,將行走車架44之車輛行走方 向之兩端㈣形成上㈣份之上面位於車減_越高之 傾斜狀,亦可形成上㈣份較下側部份狀至車_側之 狀態等適當變更形狀。 ⑽在上述實施形態中’於行走車架44相對於左右一 對行走軌道42設置錢—對行走輪4卜令設置於行走車架 44之行走輪41為4輪,亦可相對於左右—對行純道42設置 3輪以上之歧輪41,亦可於行走車架44相對於左右一對行 30 200948691 走軌道42設置於車輛前後方向排列之4個行走輪41,令設置 於行走車架44之行走輪41為8輪。 (11)在上述實施形態中,將淨化空氣通風機構之排氣 部設置於周壁之對應於空氣流動空間及搬送車移動空間之 5 處’將排氣部形成於空氣流動空間或搬送車移動空間之側 邊’亦可在設置於與地板部在上方隔著間隔之處的多孔狀 格子板上設置物品收納架及物品搬送車,以格子板構成淨 ^ 化空氣通風機構之排氣部,將排氣部形成於空氣流動空間 或搬送車移動空間之下方。此外,此時,亦可於周壁之對 1〇 應於空氣流動空間及搬送車移動空間之處形成淨化空氣通 風機構之排氣部。 【圏式簡單說明】 - 第1圖係顯示無塵室用物品保管設備之平面圖。 第2圖係在第1圖之π_ιΐ截取之截面圖。 15 第3圖係在第1圖之III-III截取之截面圖。 參 第4圖係顯示物品保管設備之主要部份之立體圖。 第5圖係顯示空氣流動空間之橫切平面圖。 第6圖係顯示堆高式起重機之側面圖。 第7圖係顯示堆高式起重機之正面圖。 2〇 第8圖係顯示堆高式起重機之平面圖。 第9(a)圖、第9(b)圖係堆高式起重機之作用圖。 第10(a)圖、第10(b)圖係顯示淨化空氣之流動者。 第11(a)圖、第11(b)圖係顯示淨化空氣之流動者。 第12圖係顯示淨化空氣之流動者。 31 200948691 第13(a)圖、第13(b)圖係顯示另一實施形態之空氣流動 空間之橫切平面圖。 【主要元件符號說明】 25.. .周壁 26.. .排氣空間用門 27.. .移動空間用門 29.. .前隔壁體 31.. .空氣流動空間 32.. .空氣引導用板狀體 33.. .收納架用風扇過濾單元 34.. .排氣部 35.. .周壁用風扇過濾單元 36.. .整流用構件 36a...端部側整流用構件 36b...中央側整流用構件 37…空氣引導體 37a...架橫向寬度方向之端部 側部份 38.. .收納架側多孔狀板狀體 39.. .移動空間側多孔狀板狀體 41.. .行走輪 42.. .行走轨道 44.. .行走車架 44a...支撐用部份Further, in the above-described embodiment, the upper end (four) of the traveling frame 44 in the vehicle traveling direction is formed on the upper side (four) of the upper portion, and the upper portion (four) portions are formed to be lower than the lower portion. The shape of the car_side is changed as appropriate. (10) In the above embodiment, 'the traveling frame 44 is provided with respect to the pair of right and left traveling rails 42. The traveling wheel 4 is arranged to be four wheels on the traveling wheel 41 of the traveling frame 44, and may be opposite to the right and left. The traveling lane 42 is provided with three or more wheels 34, and the traveling frame 44 is also disposed on the left and right pair of rows 30 200948691. The traveling track 42 is disposed on the four traveling wheels 41 arranged in the front-rear direction of the vehicle, so as to be disposed on the traveling frame. The walking wheel 41 of 44 is 8 wheels. (11) In the above embodiment, the exhaust portion of the purge air ventilating mechanism is provided at 5 of the peripheral wall corresponding to the air flow space and the transport space of the transport vehicle. 'The exhaust portion is formed in the air flow space or the transport vehicle moving space. The side of the side may be provided with an article storage rack and an article transporting vehicle provided on a porous grid plate spaced apart from the floor portion, and the exhaust portion of the air-ventilating mechanism may be formed by a grid plate. The exhaust portion is formed below the air flow space or the transport space of the transport vehicle. Further, at this time, the exhaust portion of the purge air ventilating mechanism may be formed in the air flow space and the transport space of the transport vehicle in the pair of peripheral walls. [Simplified explanation of the squat type] - Fig. 1 is a plan view showing the storage device for the clean room. Fig. 2 is a cross-sectional view taken at π_ιΐ in Fig. 1. 15 Fig. 3 is a cross-sectional view taken at III-III of Fig. 1. Fig. 4 is a perspective view showing the main part of the article storage device. Figure 5 is a cross-sectional plan view showing the air flow space. Figure 6 shows a side view of the stacker. Figure 7 shows a front view of the stacker. 2〇 Figure 8 shows the plan of the stacker. Figures 9(a) and 9(b) are diagrams of the operation of the stacker. Figures 10(a) and 10(b) show the flow of purified air. Figures 11(a) and 11(b) show the flow of purified air. Figure 12 shows the flow of purified air. 31 200948691 Figures 13(a) and 13(b) are cross-sectional plan views showing the air flow space of another embodiment. [Description of main component symbols] 25.. .Wall wall 26:.Exhaust space door 27.. Mobile space door 29.. Front partition body 31.. Air flow space 32.. Air guiding plate Shape 33.. Fan filter unit for storage rack 34.. Exhaust portion 35.. Fan filter unit for peripheral wall 36.. Rectifying member 36a... End side rectifying member 36b... Center Side rectifying member 37...air guiding body 37a...end side end portion 38 in the lateral width direction.. storage rack side porous plate member 39.. moving space side porous plate member 41.. Walking wheel 42.. Walking track 44.. Walking frame 44a... Supporting part
1.. .無塵室 2.. .側壁吸引部 3.. .天化板吹出部 4.. .側壁用風扇過濾單元 5.. .空氣過遽器 6.. .空氣室 7.. .連接流路 8.. .循環用送風機 9.. .預濾器 10.. .外部空氣取入流路 11.. .外部空氣取入量調節用阻 尼器 12.. .排氣流路 13.. .排氣量調節用阻尼器 14.. .物品收納部 15.. .搬送車移動空間 15t...外側突出部 16.. .儲存空間 17.. .橫隔壁體 18.. .側壁 19.. .流動用空間 32 200948691 44b...基台用部份 44c...上面 44d...下側部份 44e...前端 45.. .中央支柱體 46.. .物品移載裝置 47.. .上部框架 49.. .輔助支柱體 © 50...連結體 52.. .空氣流通路徑 52a...凹溝 52b...開口部 53.. .整流板 55.. .升降台 56.. .旋轉台 57.. .載置體 58.. .連桿機構 B. ..淨化空氣通風機構 C. ..容器 F...無塵室用循環通風機構 5.. .物品收納架 V. ..堆高式起重機 W. ..物品收納設備 X. ..方向 Y. ..方向 331.. Clean room 2.. Side wall suction part 3.. Tianhua plate blowing part 4.. Side wall fan filter unit 5.. Air filter 6.. Air chamber 7.. Connecting flow path 8.. circulating air blower 9. Pre-filter 10.. External air intake flow path 11. External air intake adjustment damper 12.. Exhaust flow path 13.. Damper for adjusting the exhaust gas amount 14.. Item accommodating portion 15.. Transporting vehicle moving space 15t...Outer protruding portion 16... Storage space 17.. Horizontal wall 18.. Side wall 19.. Flow space 32 200948691 44b...Abutment part 44c...Upper 44d...Bottom part 44e...Front end 45.. Center pillar body 46.. Item transfer device 47. .. Upper frame 49.. Auxiliary pillar body © 50... Connecting body 52.. Air flow path 52a... Groove 52b... Opening portion 53.. Rectifier 55.. Lift table 56 .. . Rotating table 57.. Loading body 58.. Linkage mechanism B. .. Purifying air ventilation mechanism C.. Container F... Clean room circulation ventilation mechanism 5.. Item storage rack V. .. Stacking crane W. .. Item storage equipment X. .. direction Y. .. direction 33
Claims (1)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008026882A JP4688001B2 (en) | 2008-02-06 | 2008-02-06 | Goods storage equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200948691A true TW200948691A (en) | 2009-12-01 |
TWI412477B TWI412477B (en) | 2013-10-21 |
Family
ID=40975535
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW097151233A TWI412477B (en) | 2008-02-06 | 2008-12-29 | Article storage facility |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4688001B2 (en) |
KR (1) | KR101184316B1 (en) |
CN (1) | CN101503140B (en) |
TW (1) | TWI412477B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6060822B2 (en) * | 2013-06-13 | 2017-01-18 | トヨタ自動車株式会社 | Transfer equipment and production system |
JP6631447B2 (en) * | 2016-09-09 | 2020-01-15 | 株式会社ダイフク | Article storage facility |
JP6631446B2 (en) | 2016-09-09 | 2020-01-15 | 株式会社ダイフク | Article storage facility |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000016518A (en) * | 1998-06-26 | 2000-01-18 | Murata Mach Ltd | Automated storage and retrieval system |
CN2390676Y (en) * | 1999-09-07 | 2000-08-09 | 黄富星 | Oil fume separate filtering apparatus |
JP2004269214A (en) * | 2003-03-11 | 2004-09-30 | Daifuku Co Ltd | Purified air circulating type storage equipment |
JP2006327773A (en) * | 2005-05-27 | 2006-12-07 | Murata Mach Ltd | Automated warehouse |
JP4780396B2 (en) * | 2006-03-02 | 2011-09-28 | 株式会社ダイフク | Goods storage facilities and goods storage facilities for clean rooms |
JP2007276987A (en) * | 2006-04-11 | 2007-10-25 | Murata Mach Ltd | Conveying device |
JP4666227B2 (en) * | 2006-06-27 | 2011-04-06 | 株式会社ダイフク | Goods storage facility |
JP2008007223A (en) * | 2006-06-27 | 2008-01-17 | Daifuku Co Ltd | Article storage facility |
-
2008
- 2008-02-06 JP JP2008026882A patent/JP4688001B2/en not_active Expired - Fee Related
- 2008-12-29 TW TW097151233A patent/TWI412477B/en not_active IP Right Cessation
-
2009
- 2009-02-05 CN CN2009100066173A patent/CN101503140B/en not_active Expired - Fee Related
- 2009-02-05 KR KR1020090009258A patent/KR101184316B1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
CN101503140B (en) | 2012-07-11 |
CN101503140A (en) | 2009-08-12 |
JP2009184787A (en) | 2009-08-20 |
TWI412477B (en) | 2013-10-21 |
JP4688001B2 (en) | 2011-05-25 |
KR101184316B1 (en) | 2012-09-19 |
KR20090086163A (en) | 2009-08-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101503141B (en) | Article collecting apparatus | |
KR101097734B1 (en) | Method for processing substrates | |
CN101143644B (en) | Substrate storage facility and substrate processing facility, and method for operating substrate storage | |
KR101125754B1 (en) | Article storage | |
CN101332934B (en) | Article sefe custody vault | |
KR100870610B1 (en) | Article storage facility | |
TWI726146B (en) | Article storage facility | |
TW200948691A (en) | Article storage facility | |
JP4780396B2 (en) | Goods storage facilities and goods storage facilities for clean rooms | |
CN101220978B (en) | Air purifying ventilation type article storing equipment | |
JP4780401B2 (en) | Goods storage equipment for clean rooms | |
TWI408091B (en) | Article storage facility | |
CN101219736A (en) | Conveying vehicle for plate shaped article | |
JP4811677B2 (en) | Goods storage equipment | |
JP2009107778A (en) | Conveying equipment for clean room |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |