CN101219736A - Conveying vehicle for plate shaped article - Google Patents
Conveying vehicle for plate shaped article Download PDFInfo
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- CN101219736A CN101219736A CNA2007101598686A CN200710159868A CN101219736A CN 101219736 A CN101219736 A CN 101219736A CN A2007101598686 A CNA2007101598686 A CN A2007101598686A CN 200710159868 A CN200710159868 A CN 200710159868A CN 101219736 A CN101219736 A CN 101219736A
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- mentioned
- side wall
- accommodation space
- wall portion
- article
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
- B65G13/02—Roller-ways having driven rollers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G21/00—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
- B65G21/20—Means incorporated in, or attached to, framework or housings for guiding load-carriers, traction elements or loads supported on moving surfaces
- B65G21/22—Rails or the like engaging sliding elements or rollers attached to load-carriers or traction elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G23/00—Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
- B65G23/02—Belt- or chain-engaging elements
- B65G23/04—Drums, rollers, or wheels
- B65G23/08—Drums, rollers, or wheels with self-contained driving mechanisms, e.g. motors and associated gearing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Handcart (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Ventilation (AREA)
Abstract
The invention discloses a porter for slaty objects, which, on one hand, highly keeps the cleanliness factor of a plurality of slaty objects accepted in an accepting space, and on another hand, conveys porter for slaty objects. The resolving method comprises: separating the slaty objects with a space in up-down direction along the horizontal direction to form parallel cuboid containing space and be covered at outside, disposing a rarefied air draught arrangement for rarefying air and draught from a side wall part 15a to another side wall part 15b in side walls of the containing space through the space among the slaty objects abutted with each other, and forming an end side region 14b abutted on the side wall part 15b in the rectangle bottom of the containing space, a end side region 14c abutted on the side wall part 15c abutted on the side wall part 15a, and a clean air discharge port for discharging the clean air outof the containing space.
Description
Technical field
The invention relates to and make the rectangular-shaped accommodation space of a plurality of plate-like articles to take in the above-below direction devices spaced apart and with state arranged side by side along the posture of horizontal direction, be set up with state with outside crested, via the above-mentioned a plurality of plate-like articles that are incorporated in above-mentioned accommodation space in abutting connection with article will purify air each other ventilate as, the ventilation place of a side wall portion of the side wall portion from the side perimembranous that the is equivalent to above-mentioned accommodation space conveying vehicle for plate shaped article that the drafting apparatus that purifies air that ventilates is set up that will purify air to side wall portion is relative therewith side wall portion.
Background technology
Conveying vehicle for plate shaped article as above-mentioned, its purify air drafting apparatus by via a plurality of plate-like articles that are incorporated in accommodation space in abutting connection with article will purify air each other ventilation, remove dust from a plurality of plate-like articles, make a plurality of plate-like articles of being incorporated in accommodation space in peace and quiet environment carrying.
Existing conveying vehicle for plate shaped article, the end side place of side wall portion adjacency in the rectangular-shaped bottom in accommodation space, relative with a side wall portion in the place that is equivalent to ventilate, formation will purify air and be expelled to the exterior discharge peristome that purifies air of accommodation space, discharge with peristome through purifying air thus, the guide path of the exterior bottom that is directed to car body of purifying air that will be discharged to accommodation space is set, by this guide path, be expelled to the outside from the discharge orifice of car body bottom with being directed to purifying air of car body bottom.(for example, referring to Patent Document 1).
[patent documentation 1] Japanese kokai publication hei 11-322068 communique
Summary of the invention
The problem that invention institute desire solves
In above-mentioned existing conveying vehicle for plate shaped article, outlet opening portion is set at the end side place of the bottom of the side wall portion adjacency relative with the side wall portion in the place that is equivalent to ventilate because purify air, and the side wall portion that purifying air becomes from the place that is equivalent to ventilate flows to the side wall portion that side wall portion is relative therewith.At this moment, purify air by with the upset of the side wall portion of the side wall portion adjacency in the place that is equivalent to ventilate etc., in the side wall portion in place that is equivalent to ventilate, a side of the center side of its transverse width direction is flowed easily.Therefore, because approaching and the side of the side wall portion of the side wall portion adjacency in the place that is equivalent to ventilate, making the mobile difficulty that becomes that purifies air fully, can't accommodation space all across, make the ventilation that purifies air fully, the doubt of the cleanliness factor of a plurality of plate-like articles that can't highly keep being incorporated in accommodation space is arranged.
The present invention is conceived to above-mentioned shortcoming, Yi Bian Yi Bian its objective is the cleanliness factor that a plurality of plate-like articles that can highly keep being incorporated in accommodation space are provided, the conveying vehicle for plate shaped article of carrying these a plurality of plate-like articles.
The technological means of dealing with problems
In order to reach this purpose, what first feature of relevant conveying vehicle for plate shaped article of the present invention constituted is, a plurality of plate-like articles are set up with the state with outside crested with the rectangular-shaped accommodation space that state arranged side by side is taken in the above-below direction devices spaced apart with the posture along horizontal direction, via the above-mentioned a plurality of plate-like articles that are incorporated in above-mentioned accommodation space in abutting connection with article will purify air each other ventilate as, the ventilation place of a side wall portion from the side perimembranous that is equivalent to above-mentioned accommodation space will purify air to side wall portion is relative therewith side wall portion in the conveying vehicle for plate shaped article that the drafting apparatus that purifies air that ventilates is set up
The end side place of side wall portion adjacency in the rectangular-shaped bottom in above-mentioned accommodation space, relative with the cooresponding side wall portion in above-mentioned ventilation place and and be equivalent to the end side place of side wall portion adjacency of a side wall portion adjacency in above-mentioned ventilation place, with above-mentioned purify air be expelled to above-mentioned accommodation space exterior purify air to discharge be formed with peristome.
That is, purify air to discharge and use peristome, because the end side place of side wall portion adjacency in the rectangular-shaped bottom not only in accommodation space, relative with the cooresponding side wall portion in ventilation place forms, and also form in end side place with the side wall portion adjacency of the side wall portion adjacency in the place that is equivalent to ventilate, purify air not only and to flow to the side wall portion that side wall portion is relative therewith, and also flow energetically for side wall portion with the cooresponding side wall portion adjacency in ventilation place from the side wall portion in the place that is equivalent to ventilate.
Therefore, can accommodation space all across, make the ventilation that purifies air fully, Yi Bian Yi Bian reach the cleanliness factor that a plurality of plate-like articles that keep being incorporated in accommodation space can be provided highly, the conveying vehicle for plate shaped article of carrying these a plurality of plate-like articles.
What second feature of relevant conveying vehicle for plate shaped article of the present invention constituted is, in the rectangular-shaped bottom in above-mentioned accommodation space, with the end side place of the cooresponding side wall portion adjacency in above-mentioned ventilation place, with above-mentioned purify air be expelled to above-mentioned accommodation space exterior purify air to discharge be formed with peristome.
That is, having by according to the upset of plate-like articles etc., to purifying air that the side wall portion in the place that is equivalent to ventilate flows, purifying air of this type of is to hinder the doubt of flowing that purifies air of being ventilated by the drafting apparatus that purifies air.
Therefore, by in the rectangular-shaped bottom in accommodation space, with the end side place of the cooresponding side wall portion adjacency in ventilation place, can purify air to discharge by formation and use peristome, be expelled to the outside of accommodation space in the discharge that purifies air with peristome energetically.Therefore, because purifying air of the side wall portion to the place that is equivalent to ventilate can being flowed discharged the outside that is expelled to accommodation space with peristome energetically by purifying air, can prevent to hinder flowing of purifying air of being ventilated by the drafting apparatus that purifies air.Its result, will by purifying air of being ventilated of the drafting apparatus that purifies air accommodation space all across, the ventilation transfiguration is easy, can positively highly keep the cleanliness factor of a plurality of plate-like articles.
What the 3rd feature of relevant conveying vehicle for plate shaped article of the present invention constituted is, discharge with peristome, the lid of the exterior bottom that is directed to car body of purifying air that will be discharged to above-mentioned accommodation space via above-mentioned purifying air, be with under the state that links to each other at above-mentioned side wall portion with the side perimembranous that covers above-mentioned accommodation space, and below via its lower end edge portion, will purify air is set up under the mobile state towards the outside.
That is, by lid only is set, discharges with peristome via purifying air, exterior the purifying air that is discharged to accommodation space can be directed to the bottom of car body, and via the below of the lower end edge portion of lid, can be mobile towards the outside with purifying air.
Therefore, there is no need newly to establish the guide path that is directed to the car body bottom with purifying air and maybe will purify air and flow, can reach the simplification of formation to exterior peristome.
What the 4th feature of relevant conveying vehicle for plate shaped article of the present invention constituted is, at least a portion among the Zhou Fangxiang in above-mentioned lid, and than the suitable place above its lower end edge portion, via above-mentioned purify air to discharge with peristome, the outside discharge of discharging that purifies air that will be discharged to the horizontal foreign side of car body be formed with opening.
That is, not only will discharge purifying air of being discharged from peristome via purifying air via the below of the lower end edge portion of lid, to flows outside, and can discharge with opening, to the discharge of the horizontal foreign side of car body via the outside.
By only discharging purifying air of to be discharged from peristome via the below of the lower end edge portion of lid, to flows outside via purifying air, the quantitative change volume that purifies air that is guided below the lower end edge portion of lid, can positively make purifies air is expelled to and outsidely becomes difficult.Again, be expelled to the exterior flow velocity that purifies air and accelerate, purify air, the doubt that the dust on its walking road surface is rolled is also arranged in the upset of the walking road surface of conveying vehicle for plate shaped article.
Yet, because discharging purifying air of will being discharged from peristome via purifying air discharges with opening, can discharge to the horizontal foreign side of car body via the outside, the amount that purifies air of the below of the lower end edge portion that is directed to lid is lacked as far as possible, can discharge purifying air of to be discharged from peristome via purifying air and positively be expelled to the outside, and can prevent the generation of rolling of the dust as above-mentioned.
What the 5th feature of relevant conveying vehicle for plate shaped article of the present invention constituted is, above-mentioned accommodation space is configured in the mode that the article that make a plurality of plate-like articles of maintenance under the state that makes spacing parallel arranging at above-below direction keep body to take in, with the side wall portion of the side wall portion adjacency in above-mentioned ventilation place in the side perimembranous that is equivalent to above-mentioned accommodation space be to move into for above-mentioned article keep taking out of of body, but be configured with as the freely openable.
That is, because accommodation space is to make the article that keep a plurality of plate-like articles keep body to take under the state that makes spacing parallel arranging at above-below direction, can make a plurality of plate-like articles keep body positively to keep on one side at article, at a plurality of plate-like articles in abutting connection with article each other make purify air ventilation on one side.Again, open and close, can carry out keeping taking out of of body to move into for the article of accommodation space by the side wall portion that only makes and be equivalent to a side wall portion adjacency in the ventilation place in the side perimembranous of accommodation space.
Therefore, on one side can make a plurality of plate-like articles positively keep and carry at peace and quiet environment, Yi Bian can easily carry out loading and loading and unloading for a plurality of plate-like articles of plate-like articles transport trolley.
What the 6th feature of relevant conveying vehicle for plate shaped article of the present invention constituted is that in the bottom of above-mentioned accommodation space, the carrying conveyer that makes above-mentioned article keep body to load carrying is set up.
That is, because the carrying conveyer is arranged at the bottom of accommodation space, can support that article keep keeping body to take at accommodation space article under the state of body by carrying conveyer mounting.By keeping body, can carry out keeping taking out of of body to move into for the article of accommodation space with carrying conveyer mounting carrying article again.
Therefore, keep body by only carrying article with carrying conveyer mounting, on one side can carry out keeping taking out of of body to move into for the article of accommodation space, Yi Bian highly keep the cleanliness factor of a plurality of plate-like articles.
Description of drawings
Fig. 1 is the planar view of the track route of expression conveying vehicle for plate shaped article;
Fig. 2 is the block diagram of conveying vehicle for plate shaped article;
Fig. 3 keeps the block diagram of body for article;
The longitudinal section of Fig. 4 for being seen at the cross-car Width of conveying vehicle for plate shaped article;
Fig. 5 is the sectional elevation of conveying vehicle for plate shaped article;
The longitudinal section of Fig. 6 for being seen at the cross-car Width of conveying vehicle for plate shaped article; And
The longitudinal section that Fig. 7 sees for Width before and after the car body of conveying vehicle for plate shaped article.
The main element nomenclature
1～plate-like articles transport trolley; 4～car body;
10～plate-like articles; 11～article keep body;
13～drafting apparatus purifies air; 12～accommodation space;
14a, 14b, 14c～end side place; 14～bottom;
15a, 15b, 15c～side wall portion; 17～lid;
16～purify air to discharge and use peristome; 18～outside the discharge used opening;
19～carrying conveyer; 20～driven roller;
24～electro-motor; 25～connection shaft;
30～retaining door.
The specific embodiment
Below based on the embodiment that illustrates relevant conveying vehicle for plate shaped article of the present invention.
This plate-like articles transport trolley 1 as shown in Figure 1 as, in clean room, walk automatically along track route 2, carry respectively at a plurality of workstations 3 and be configured as the plate-like articles.
Though diagram is omitted, at clean room, from the ground board that the smallpox board is formed to a plurality of hole portion, the ventilation that will purify air is configured the dust that swims as discharging below the ground board.
Above-mentioned track route 2 is to be set up as a plurality of workstations 3.A plurality of workstations 3 are configured according to the conveyer of free mounting carrying plate-like articles respectively, are set along track route 2 devices spaced apart.Again, on the track route 2, because 1 walking of plate-like articles transport trolley is not provided with hole portion at the ground board, the intensity of consolidated floor portion.
Though diagram is omitted, the drive wheels in the running wheel 5 is configured by pair of driving wheels body disconnected from each other and juxtaposed.About driving the each side of wheel body, DYN dynamic CD-ROM drive motor is directly linked, and two drive wheel body can be set up as the just contrary respectively revolution driving.Again, by two drive give on the speed of revolutions of wheel bodys difference or reciprocally on reversing sense rotation drive, on one side around vertical axis, change the direction of car body 4, the formation of walking freely on one side.Again, aspect CD-ROM drive motor, the rotation demoder that detects rotation amount is set up.
Above-mentioned projection connects light accepting part 7, and in the rear side of car body 4, the projection that extends to upper side from the central portion of transverse width direction connects light accepting part and is supported with the upper end of support 8.Again, projection connect light accepting part 7 with laser in the four directions to projection light, accept as reflecting body 6 laser light reflected, to be configured.Reflecting body 6 is wall portions that utilize clean room etc., is set up a plurality of along track route 2.
At above-mentioned car body 4, the control part 9 of the walking of control conveying vehicle for plate shaped article 1 is set up.This control part 9 is based on by projection and connects the reflected light information that light accepting part 7 is accepted, and detects the position of conveying vehicle for plate shaped article 1, makes plate-like articles transport trolley 1 as track route 2 walkings, is configured as the walking of control conveying vehicle for plate shaped article 1.
Caption,, remembered as layout (layout map) relevant for the position information of the track route 2 of the position information that comprises a plurality of reflecting bodys 6 at control part 9.Above-mentioned control part 9 connects light accepting part 7 by projection laser is projected to the four directions, from the angle that connects the laser that light accepting part 7 accepts by projection etc., calculation is for the angle and the distance of the car body 4 of the conveying vehicle for plate shaped article 1 of reflecting body 6, based on this layout that detects information and remembered, as the present position of trigonometric survey calculation conveying vehicle for plate shaped article 1, be configured.
Again, control part 9 is based on the present position of the plate-like articles transport trolley 1 of calculation, along track route 2, as walking vehicle body 4 walkings, in the time of the action of the CD-ROM drive motor of controlling and driving wheel,, be configured as the travel distance of management conveying vehicle for plate shaped article 1 based on the detection information of rotary encoder.
The article of conveying vehicle for plate shaped article 1 carrying are the plate-like articles 10 of glass substrate etc.Again, as shown in Figure 3 as, keep in the above-below direction devices spaced apart and under state arranged side by side the article of a plurality of plate-like articles 10 to keep body 11 to be set up.These article keep body 11 to be set up and to make the 11d of support sector of relative in the horizontal direction union body 11c line (wire) shape connected to each other to constitute by a plurality of union body 11c of the upper frame body 11a that forms with reticulation and lower frame body 11b, binding upper frame body 11a and lower frame body 11b and in union body 11c above-below direction devices spaced apart.Again, under the state of supporting by each 11d of support sector mounting, plate-like articles 10 is kept side by side in the above-below direction devices spaced apart, keep among top, bottom and sidepiece whole of body 11, can make to be configured as the air flows at article.
Above-mentioned car body 4, as shown in Figure 4 to 7 as, cover by lid 17, at the in-to-in hollow space of this lid 17, under the state that covers with the outside, the accommodation space 12 of square Fang Tizhuan is formed.This accommodation space 12 keeps being configured as the body 11 can freely take in the article that keep a plurality of plate-like articles 10.
Again, the ventilation place of the side wall portion 15a of the car body front side in being equivalent to the side perimembranous of accommodation space 12 is set up to will the purify air fan filter unit (being designated hereinafter simply as FFU) 13 of the drafting apparatus that purifies air that ventilates of the side wall portion 15b of car body rear side as the side wall portion 15a of car body front side from then on.FFU 13 is via air cleaning filter, will purify air to be configured as ventilating, and in the side wall portion 15a of car body front side, under cross-car Width state arranged side by side, is set up two.Again, FFU 13, via the article that are contained at accommodation space 12 keep body 11 maintained a plurality of plate-like articles 10 in abutting connection with article each other, will purify air is configured as ventilating.
The bottom 14 of above-mentioned accommodation space 12 as shown in Figure 5 as, be formed with rectangular-shaped, in its end side place of 14, bottom, with purifying air in the accommodation space 12 be expelled to accommodation space 12 exterior purify air to discharge be formed with peristome 16.This purify air discharge with peristome 16 in bottom 14 and the end side place 14b of the car body rear side of the side wall portion 15b adjacency of the end side place 14a of the car body front side of the side wall portion 15a adjacency of car body front side and car body rear side and and the end side place 14c of the cross-car side of the side wall portion 15c adjacency of the cross-car side of the side wall portion 15a adjacency of car body front side form respectively.Again, purifying air to discharge is configured with the opening of peristome 16 with the lengthwise shape, and the four directions of rectangular-shaped bottom 14 is set up to discharge the state that surrounds with peristome 16 by purifying air.
Above-mentioned lid 17 as Fig. 6 and shown in Figure 7 as, discharge with peristome 16 via purifying air, be set up as the exterior bottom that is directed to car body 4 that purifies air of accommodation space 12 being discharged to.Again, lid 17 is under the state that links with the side wall portion in the side perimembranous that coats accommodation space 12, and via being set up under the below of its lower end edge portion, the state that flows towards the outside that will purify air.
Though above-mentioned lid 17 via the below of its lower end edge portion, will purify air and flow towards the outside, but above lower end edge portion, will discharge the outside discharge of discharging that purifies air that is discharged from peristome 16 via purifying air and be formed with opening 18 to cross-car foreign side than lid 17.That is outside the discharge with opening 18 in the Zhou Fangxiang of lid 17, is equivalent to the place of cross-car side, is being set up than accommodation space 12 lower side and than the lower end edge portion upper side of lid 17.
Again, the outside discharge with opening 18 is configured with opening 18b by first outside the discharge with the opening 18a and second outside the discharge.The first outside discharge, is formed with strip at the car body fore-and-aft direction being set up with opening 18b upper side than second outside the discharge with opening 18a.Second outside the discharge with opening 18b is so that a plurality of hole portions rectangular-shaped being formed arranged side by side is set up a plurality of in car body fore-and-aft direction devices spaced apart.
In the bottom 14 of above-mentioned accommodation space 12, as Fig. 5～shown in Figure 7, mounting carrying article keep the carrying conveyer 19 of body 11 to be set up.This carrying conveyer 19 makes the carrying direction of article maintenance body 11 as the cross-car Width, in the carrying direction more than 20 roller conveyers arranged side by side of driven roller is configured.
Above-mentioned driven roller 20 is the driven roller of shorter shape, supported with freely rotating respectively at the supporting frame 38 of pair of right and left, with the state of the direction devices spaced apart of carrying direction quadrature under, be set up pair of right and left.Again, carrying conveyer 19 makes article keep being configured as the carrying under the state of both ends mounting support of body 11 at the driven roller 20 by pair of right and left.At carrying direction a plurality of driven rollers 20 arranged side by side is respectively, by being moved and being driven by revolution at longitudinally at the driving wheel body 21 of the pars intermedia that is disposed at the carrying direction and the positive motion belt 23 that hangs on a plurality of driven wheel body 22 that devices spaced apart is configured on the carrying direction.Again, by driving connection shaft 25 with the carrying conveyer with electro-motor 24 revolutions, the driven roller 20 of pair of right and left is driven integratedly by revolution, mounting carrying article keep body 11.
To be its upper ends be set up as more outstanding than bottom 14 upper sides of accommodation space 12 above-mentioned driven roller 20, makes article keep body 11 to be accommodated under the state by a plurality of driven roller 20 mounting supports and be configured as the accommodation space 12.
Above-mentioned carrying conveyer 19 drives by the revolution of rotation with electro-motor 26, is supported with the conveyer support sector 28 that base station 27 rotations are set up freely in rotation.Again, rotation is with base station 27, and lifting is supported freely by the lifting mechanism 41 that is moved with the revolution driving of electro-motor 40 by lifting.
As above-mentioned, carrying conveyer 19 rotates freely with the revolution driving of electro-motor 26 by rotation, and lifting is set up freely with the revolution driving of electro-motor 40 by lifting.
With the side perimembranous that is equivalent to above-mentioned accommodation space 12 in the side wall portion 15c of cross-car side of side wall portion 15a adjacency of car body front side in ventilation place, be to move into for article keep taking out of of body 11, be configured freely and open and close.
That is, as shown in Figure 4 as, but the side wall portion 15b of the cross-car side of side's side of cross-car Width is configured with the retaining door (shutter) 30 of freely openable.Again, in Fig. 4, retaining door 30 closing state represent that with solid line the state that retaining door 30 is opened is represented by dotted lines.
The left and right sides of the bottom of retaining door 30 is to be supported with lifting guide body 32.But the lifting guide body 32 of pair of right and left is to be set up movably along guide rails 33 free liftings by guide rollers 31 respectively.In the lifting guide body 32 of pair of right and left, respectively the driving wheel body above being disposed at 34 and be disposed at below the part of the positive motion belt 39 that hangs of driven wheel body 35 be fixed.Drive wheel body 34 and be bonded by connection shaft 36 each other,, driven by revolution integratedly by with electro-motor 37 connection shaft 36 revolutions being driven with the retaining door.Again,, make lifting guide body 32 liftings of pair of right and left, make to be configured as 30 switchings of retaining door by with electro-motor 37 connection shaft 36 revolutions being driven with retaining door.
Again, in retaining door 30 closing state, be provided with as the gap in abutting connection with the place in the lower side of retaining door 30, first outside the discharge set with opening 18a.Therefore, use opening 18a by this first outside discharge, closed the retaining door at 30 o'clock, the operator can prevent to clamp finger.
The walking of above-mentioned control part 9 control conveying vehicle for plate shaped article 1, and by the carrying action of control carrying transfer cart 19 and the on-off action of retaining door 30, in a plurality of workstations 3, carry out as the transportation processing of the workstation 3 carrying article maintenance bodies 11 of carrying purpose, being configured from the workstation 3 of carrying starting point.
The action of relevant above-mentioned transportation processing is described.
Above-mentioned control part 9 moves to corresponding to as the stop position of workstation 3 of carrying starting point, controls the walking of tabular article carrying car 1.Above-mentioned control part 9, conveying vehicle for plate shaped article 1 moves to stop position, by making the retaining door with electro-motor 37 actions, makes retaining door 30 breakdown actions.Afterwards, control part 9 is in the workstation 3 of carrying starting point, and conveyer is moved, and makes the 19 carrying actions of carrying conveyer, make article keep body 11 to receive, keep body 11 to be carried to carrying article with till the appropriate location by carrying conveyer 19 from the workstation 3 of carrying starting point.Again, when the workstation 3 of carrying starting point is accepted article and is kept body 11, control part 9 is based on the detection information of the outer various sensors of figure, detect in workstation 3, for the height or the angle of the carrying conveyer 19 of conveyer, in workstation 3, for the words of conveyer from suitable transfer offset, make rotation move the position adjustment of carrying conveyer 19 with electro-motor 40 with electro-motor 26 and lifting.
Again, control part 9 keeps body 11 to carrying with till the appropriate location by carrying conveyer 19 carrying article, moves with electro-motor 37 by making the retaining door, makes retaining door 30 closing movements, and the article that are accommodated in accommodation space 12 keep body 11.
Afterwards, control part 9 is to move to the mode corresponding to the stop position of the workstation 3 of carrying purpose, the walking of control conveying vehicle for plate shaped article 1, plate-like articles transport trolley 1 moves to the words corresponding to the stop position of the workstation 3 of carrying purpose, with the carrying starting point workstation 3 time identical, after making retaining door 30 breakdown actions, make the 19 carrying actions of carrying conveyer, make article keep body 11 to unload at the workstation 3 of carrying purpose.
Above-mentioned control part 9 is aspect FFU 13, makes in the walking of conveying vehicle for plate shaped article 1 and conveying vehicle for plate shaped article 1 stops, and between workstation 3, article keep that the transfer of body 11 is medium, be configured as the action often in the transportation processing.Again, make retaining door 30 breakdown actions, be open under the exterior state at accommodation space 12, the ventilation that purifies air by according to FFU 13 can prevent towards the intrusion of the dust of accommodation space 12.
Again, the action of FFU 13 can only be moved in the walking of conveying vehicle for plate shaped article 1, about whether moving FFU 13 for can suitably changing.
Take in article at above-mentioned accommodation space 12 and keep body 11, close in the state of retaining door 30, relevant from the flowing of purifying air of being ventilated of FFU 13, based on Fig. 5～Fig. 7 explanation.In Fig. 5～Fig. 7, flowing of purifying air represented with arrow again.
Above-mentioned FFU 13 from the side wall portion 15a of car body front side by a plurality of plate-like articles 10 of keeping body 11 by article and keeping in abutting connection with article each other as, ventilation will purify air.Again, purify air, when the side wall portion 15b of car body rear side flowed, also the side wall portion 15c to the cross-car side flowed.To purifying air that the side wall portion 15b of car body rear side flows, discharge with peristome 16 via purifying air of being formed of the end side place 14b at the car body rear side of the bottom 14 of the side wall portion 15b of its car body rear side adjacency, be discharged from the outside lower side of accommodation space 12.To purifying air also that the side wall portion 15c of cross-car side flows, discharge with peristome 16 via purifying air of being formed of the end side place 14c in the cross-car side of the bottom 14 of the side wall portion 15c of its cross-car side adjacency, be discharged from the outside lower side of accommodation space 12.
From purifying air that FFU 13 ventilates, also have by according to the upset of plate-like articles 10 etc., flowing to the side wall portion 15a of car body front side again.Purifying air also of this type of discharged with peristome 16 via purifying air of being formed of the end side place 14a of 14 the car body front side in the bottom, is discharged from the outside lower side of accommodation space 12.
As above-mentioned, from purifying air that FFU 13 ventilates, on one side the accommodation space 12 of square Fang Tizhuan all across and ventilated, in the bottom 14 of rectangular-shaped accommodation space 12, discharge from purifying air of being formed of the whole end side place 14a～14c in its four directions and to be discharged to peristome 16 below the outside of accommodation space 12.
Discharge with peristome 16 via purifying air, be discharged to the purifying air of outside lower side of accommodation space 12, its part is discharged to cross-car foreign side with opening 18b from first outside the discharge with the opening 18a and the second outside discharge.Again, a remaining part, the below via the lower end edge portion of lid 17 is discharged to the outside.
As above-mentioned, not only below the lower end edge portion of lid 17, by being discharged to cross-car foreign side with opening 18b from first outside the discharge with the opening 18a and second outside the discharge, via the discharge that purifies air with peristome 16, can positively be discharged to the purifying air of outside lower side of accommodation space 12 towards exterior discharge.
[other embodiment]
(1) in the above-described embodiments, in the bottom 14 of rectangular-shaped accommodation space 12, though be provided with to purify air at whole end side place 14a in its four directions～14c and discharge, be not provided with to purify air to discharge at end side place 14a and can implement with peristome 16 with the car body front side of the side wall portion 15a adjacency of car body front side with peristome 16.
(2) in the above-described embodiments, though lid 17 is discharged with peristome 16, will be discharged to as the bottom that is directed to car body 4 that purifies air of outside lower side of accommodation space 12 via purifying air, but for example, setting discharge via purifying air with peristome 16, will be discharged to accommodation space 12 outside lower side the bottom that is directed to car body 4 of purifying air guide path also can, relevant how the guiding purify air and can suitably change.
(3) in the above-described embodiments, though in the place of the cross-car side that is equivalent to lid 17 outside the discharge with opening 18 is set, making outside discharge be configured in which position with opening 18 can suitably change.Relevantly outside discharge setting number and can suitably change with opening 18 again.
(4) in the above-described embodiments,, replace this carrying conveyer 19, the shifting apparatus of the V shape that possesses the fork (fork) that can freely advance and retreat is set and can implements though carrying conveyer 19 is set in the bottom 14 of accommodation space 12.Between workstation 3, the shifting apparatus that keeps body 11 to be provided with for the transfer article can adapt to various shifting apparatus.
(5) in the above-described embodiments, though FFU 13 is configured in the side wall portion 15a of car body front side, also can be at the side wall portion 15b of car body rear side configuration FFU 13.
(6) in the above-described embodiments, though make the discharge orifice peristome 16 that purifies air, purify air to discharge and suitably to change with peristome 16 as the opening of the longer shape of same width.For example, make purifying air of forming of the end side place 14c with the cross-car side of the side wall portion 15c adjacency of cross-car side and discharge with peristome 16, as narrow at car body front side width more and in the wide shape of car body rear side width more, in the car body front side, suppress purifying air of volume and be discharged from towards the outside of accommodation space 12, can make by purifying air as far as possible of ventilating of FFU 13 by a plurality of plate-like articles 10 in abutting connection with article each other.
Claims (6)
1. a conveying vehicle for plate shaped article makes a plurality of plate-like articles be set up with the state with outside crested with the rectangular-shaped accommodation space that state arranged side by side is taken in the above-below direction devices spaced apart with the posture along horizontal direction,
Via the above-mentioned a plurality of plate-like articles that are incorporated in above-mentioned accommodation space in abutting connection with article will purify air each other ventilate as, the ventilation place of a side wall portion from the side perimembranous that is equivalent to above-mentioned accommodation space will purify air to side wall portion is relative therewith side wall portion in the conveying vehicle for plate shaped article that the drafting apparatus that purifies air that ventilates is set up
The end side place of side wall portion adjacency in the rectangular-shaped bottom in above-mentioned accommodation space, relative with the cooresponding side wall portion in above-mentioned ventilation place and and be equivalent to the end side place of side wall portion adjacency of a side wall portion adjacency in above-mentioned ventilation place, with above-mentioned purify air be expelled to above-mentioned accommodation space exterior purify air to discharge be formed with peristome.
2. conveying vehicle for plate shaped article as claimed in claim 1, wherein in the rectangular-shaped bottom in above-mentioned accommodation space, with the end side place of the cooresponding side wall portion adjacency in above-mentioned ventilation place, with above-mentioned purify air be expelled to above-mentioned accommodation space exterior purify air to discharge be formed with peristome.
3. conveying vehicle for plate shaped article as claimed in claim 1 or 2, wherein discharge with peristome, the lid of the exterior bottom that is directed to car body of purifying air that will be discharged to above-mentioned accommodation space via above-mentioned purifying air, under the state that links to each other at above-mentioned side wall portion with the side perimembranous that covers above-mentioned accommodation space, and below its lower end edge portion, purifying air is set up under the mobile state towards the outside.
4. conveying vehicle for plate shaped article as claimed in claim 3, at least a portion among the Zhou Fangxiang in above-mentioned lid wherein, and than the suitable place above its lower end edge portion, via above-mentioned purify air to discharge with peristome, the outside discharge of discharging that purifies air that will be discharged to the horizontal foreign side of car body be formed with opening.
5. as claim 1,2,3 or 4 described conveying vehicle for plate shaped article, wherein above-mentioned accommodation space is to be configured in the mode that the article that make a plurality of plate-like articles of maintenance under the state that makes spacing parallel arranging at above-below direction keep body to take in,
Move into for above-mentioned article keep taking out of of body with the side wall portion of the side wall portion adjacency in above-mentioned ventilation place in the side perimembranous that is equivalent to above-mentioned accommodation space, but be configured with as the freely openable.
6. conveying vehicle for plate shaped article as claimed in claim 5, wherein in the bottom of above-mentioned accommodation space, the carrying conveyer that makes above-mentioned article keep body to load carrying is set up.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007002544A JP4310712B2 (en) | 2007-01-10 | 2007-01-10 | Plate-shaped article carrier |
| JP002544/07 | 2007-01-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101219736A true CN101219736A (en) | 2008-07-16 |
| CN101219736B CN101219736B (en) | 2013-04-17 |
Family
ID=39629867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007101598686A Expired - Fee Related CN101219736B (en) | 2007-01-10 | 2007-12-25 | Conveying vehicle for plate shaped article |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4310712B2 (en) |
| KR (1) | KR20080065903A (en) |
| CN (1) | CN101219736B (en) |
| TW (1) | TWI406804B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102310992A (en) * | 2010-06-23 | 2012-01-11 | 村田机械株式会社 | The track mounted jumbo system |
| CN106219176A (en) * | 2016-07-29 | 2016-12-14 | 芜湖新泉汽车饰件系统有限公司 | The conveying arrangement of instrument board |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI643799B (en) * | 2017-12-01 | 2018-12-11 | 瑩耀科技股份有限公司 | Semiconductors transfer system |
| JP7115356B2 (en) | 2019-02-25 | 2022-08-09 | 株式会社ダイフク | Goods transport equipment |
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| GB2321862A (en) * | 1997-02-07 | 1998-08-12 | Fuji Electric Co Ltd | Fan filter unit with separate access means to ventilation fan and gas absorption filter |
| JPH1179389A (en) * | 1997-09-16 | 1999-03-23 | Mitsui Eng & Shipbuild Co Ltd | Substrate glass inspection processing system |
| JP2001025624A (en) * | 1999-07-14 | 2001-01-30 | Nec Corp | Fan filter unit |
| CN1405072A (en) * | 2001-09-10 | 2003-03-26 | 株式会社大福 | Apparatus for keeping articles in clean room |
| US20050005583A1 (en) * | 2003-07-08 | 2005-01-13 | Daifuku Co., Ltd. | Plate-shaped work piece transporting apparatus |
| WO2005045920A1 (en) * | 2003-11-06 | 2005-05-19 | Shinko Electric Co., Ltd. | Device for carrying in and out boards, board carrying method and device therefor |
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| JPS63300524A (en) * | 1987-05-29 | 1988-12-07 | Nec Corp | Holding mechanism for transferring wafer cassette |
| JPH0610234U (en) * | 1992-07-13 | 1994-02-08 | 日本信号株式会社 | Linear motor non-collecting drive type transfer device |
| JPH07291133A (en) * | 1994-04-28 | 1995-11-07 | Sony Corp | Carriage device |
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2007
- 2007-01-10 JP JP2007002544A patent/JP4310712B2/en not_active Expired - Fee Related
- 2007-10-16 TW TW096138642A patent/TWI406804B/en not_active IP Right Cessation
- 2007-11-22 KR KR1020070119648A patent/KR20080065903A/en not_active Application Discontinuation
- 2007-12-25 CN CN2007101598686A patent/CN101219736B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2321862A (en) * | 1997-02-07 | 1998-08-12 | Fuji Electric Co Ltd | Fan filter unit with separate access means to ventilation fan and gas absorption filter |
| JPH1179389A (en) * | 1997-09-16 | 1999-03-23 | Mitsui Eng & Shipbuild Co Ltd | Substrate glass inspection processing system |
| JP2001025624A (en) * | 1999-07-14 | 2001-01-30 | Nec Corp | Fan filter unit |
| CN1405072A (en) * | 2001-09-10 | 2003-03-26 | 株式会社大福 | Apparatus for keeping articles in clean room |
| US20050005583A1 (en) * | 2003-07-08 | 2005-01-13 | Daifuku Co., Ltd. | Plate-shaped work piece transporting apparatus |
| WO2005045920A1 (en) * | 2003-11-06 | 2005-05-19 | Shinko Electric Co., Ltd. | Device for carrying in and out boards, board carrying method and device therefor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102310992A (en) * | 2010-06-23 | 2012-01-11 | 村田机械株式会社 | The track mounted jumbo system |
| CN106219176A (en) * | 2016-07-29 | 2016-12-14 | 芜湖新泉汽车饰件系统有限公司 | The conveying arrangement of instrument board |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101219736B (en) | 2013-04-17 |
| TWI406804B (en) | 2013-09-01 |
| JP4310712B2 (en) | 2009-08-12 |
| KR20080065903A (en) | 2008-07-15 |
| TW200829492A (en) | 2008-07-16 |
| JP2008168982A (en) | 2008-07-24 |
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| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
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Granted publication date: 20130417 Termination date: 20181225 |