CN101219736B - Conveying vehicle for plate shaped article - Google Patents
Conveying vehicle for plate shaped article Download PDFInfo
- Publication number
- CN101219736B CN101219736B CN2007101598686A CN200710159868A CN101219736B CN 101219736 B CN101219736 B CN 101219736B CN 2007101598686 A CN2007101598686 A CN 2007101598686A CN 200710159868 A CN200710159868 A CN 200710159868A CN 101219736 B CN101219736 B CN 101219736B
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- mentioned
- accommodation space
- side wall
- discharge
- conveying vehicle
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
- B65G13/02—Roller-ways having driven rollers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G21/00—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
- B65G21/20—Means incorporated in, or attached to, framework or housings for guiding load-carriers, traction elements or loads supported on moving surfaces
- B65G21/22—Rails or the like engaging sliding elements or rollers attached to load-carriers or traction elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G23/00—Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
- B65G23/02—Belt- or chain-engaging elements
- B65G23/04—Drums, rollers, or wheels
- B65G23/08—Drums, rollers, or wheels with self-contained driving mechanisms, e.g. motors and associated gearing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Handcart (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Ventilation (AREA)
Abstract
The invention discloses a carriage for a planar article that maintains high cleanness of a plurality of planar articles received in a storage space while moving the plurality of planar articles. The storage space that is of a rectangular parallelepiped shape for storing the plurality of planar articles that is set horizontally and spaced vertically and substantially parallel to each other is provided in a state shielded from the outside. A cleaned air ventilation means (13) is provided for ventilating cleaned air from a side wall part (15a) corresponding to a side wall part in a side peripheral part of the storage space toward a side wall part (15b) in such a manner that ventilation of the cleaned air is realized through passing between adjacent planar articles of the plurality of planar articles. Cleaned air discharging openings (16) are formed in an end part side portion (14b) of a rectangular bottom (14) of the storage space adjacent to the side wall part (15b) and an end part side portion (14c) adjacent to a side wall part (15c) that is adjacent to the side wall part (15a) for discharging cleaned air to the outside of the storage space.
Description
Technical field
The invention relates to and make the rectangular-shaped accommodation space of a plurality of plate-like articles to take in the above-below direction devices spaced apart and with state arranged side by side along the posture of horizontal direction, be set up with the state with outside crested, via the above-mentioned a plurality of plate-like articles that are incorporated in above-mentioned accommodation space in abutting connection with article each other and the ventilation place of a side wall portion of the side wall portion from the side perimembranous of the above-mentioned accommodation space conveying vehicle for plate shaped article that the drafting apparatus that purifies air that ventilates is set up that will purify air to side wall portion is relative therewith side wall portion.
Background technology
Conveying vehicle for plate shaped article as above-mentioned, its purify air drafting apparatus by via a plurality of plate-like articles that are incorporated in accommodation space in abutting connection with article will purify air each other ventilation, remove dust from a plurality of plate-like articles, make a plurality of plate-like articles of being incorporated in accommodation space in peace and quiet environment carrying.
Existing conveying vehicle for plate shaped article, end side place in the rectangular-shaped bottom in accommodation space, relative with a side wall portion in ventilation place, formation the purifying air of the outside that is expelled to accommodation space that will purify air discharged and used peristome, discharge with peristome through purifying air thus, arrange and to be discharged to the guide path of the bottom that is directed to car body of purifying air of the outside of accommodation space, by this guide path, be expelled to the outside with being directed to purifying air of vehicle bottom from the discharge orifice of vehicle bottom.(for example, referring to Patent Document 1).
[patent documentation 1] Japanese kokai publication hei 11-322068 communique
Summary of the invention
The problem that invention institute wish solves
In above-mentioned existing conveying vehicle for plate shaped article, outlet opening section is arranged at the end side place of the bottom of the side wall portion adjacency relative with the side wall portion in the place that ventilates because purify air, and the side wall portion that purifying air becomes from the ventilation place flows to the side wall portion that side wall portion is relative therewith.At this moment, purify air by with the upset of the side wall portion of the side wall portion adjacency in ventilation place etc., in the side wall portion in ventilation place, a side of the center side of its transverse width direction is flowed easily.Therefore, because close to the side of the side wall portion of the side wall portion adjacency in ventilation place, making the mobile difficulty that becomes that purifies air fully, can't accommodation space all across, make the ventilation that purifies air fully, the doubt of the cleanliness factor of a plurality of plate-like articles that can't highly keep being incorporated in accommodation space is arranged.
The present invention is conceived to above-mentioned shortcoming, Yi Bian Yi Bian its objective is the cleanliness factor that a plurality of plate-like articles that can highly keep being incorporated in accommodation space are provided, the conveying vehicle for plate shaped article of carrying these a plurality of plate-like articles.
The technological means of dealing with problems
In order to reach this purpose, what the First Characteristic of relevant conveying vehicle for plate shaped article of the present invention consisted of is, a plurality of plate-like articles are set up with the state with outside crested with the rectangular-shaped accommodation space that state arranged side by side is taken in the above-below direction devices spaced apart with the posture along horizontal direction, via the above-mentioned a plurality of plate-like articles that are incorporated in above-mentioned accommodation space in abutting connection with article each other, the ventilation place of a side wall portion from the side perimembranous of the above-mentioned accommodation space drafting apparatus that purifies air that ventilates that will purify air to side wall portion is relative therewith side wall portion is arranged in the conveying vehicle for plate shaped article
End side place in the rectangular-shaped bottom in above-mentioned accommodation space, relative with a side wall portion in above-mentioned ventilation place and and the end side place of the side wall portion adjacency in above-mentioned ventilation place, purifying air to discharge and be formed with peristome the above-mentioned outside that is expelled to above-mentioned accommodation space of purifying air.
That is, purify air to discharge and use peristome, because end side place forming in the rectangular-shaped bottom not only in accommodation space, relative with a side wall portion in ventilation place, and also form in the end side place with the side wall portion adjacency in ventilation place, purify air not only and to flow to the side wall portion that side wall portion is relative therewith from the side wall portion in ventilation place, and also flow energetically for the side wall portion with the side wall portion adjacency in ventilation place.
Therefore, can accommodation space all across, make the ventilation that purifies air fully, Yi Bian Yi Bian reach the cleanliness factor that a plurality of plate-like articles that keep being incorporated in accommodation space can be provided highly, the conveying vehicle for plate shaped article of carrying these a plurality of plate-like articles.
What the Second Characteristic of relevant conveying vehicle for plate shaped article of the present invention consisted of is, in the rectangular-shaped bottom in above-mentioned accommodation space, with the end side place of the side wall portion adjacency in above-mentioned ventilation place, purifying air to discharge and be formed with peristome the above-mentioned outside that is expelled to above-mentioned accommodation space of purifying air.
That is, having by according to the upset of plate-like articles etc., to purifying air that the side wall portion in ventilation place flows, purifying air of this type of is to hinder the doubt of flowing that purifies air of being ventilated by the drafting apparatus that purifies air.
Therefore, by in the rectangular-shaped bottom in accommodation space, with the end side place of the side wall portion adjacency in ventilation place, can purify air to discharge by formation and use peristome, be expelled to energetically the outside of accommodation space in the discharge that purifies air with peristome.Therefore, because can discharge the outside that be expelled to energetically accommodation space with peristome by purifying air to purifying air of flowing of the side wall portion in ventilation place, can prevent from hindering flowing of purifying air of being ventilated by the drafting apparatus that purifies air.Its result, will by purifying air of being ventilated of the drafting apparatus that purifies air accommodation space all across, the ventilation transfiguration is easy, can positively highly keep the cleanliness factor of a plurality of plate-like articles.
What the 3rd feature of relevant conveying vehicle for plate shaped article of the present invention consisted of is, discharge with peristome, will be discharged to the lid of the bottom that is directed to car body of purifying air of the outside of above-mentioned accommodation space via above-mentioned purifying air, with under the state that links to each other at the above-mentioned side wall portion with the side perimembranous that covers above-mentioned accommodation space, and below via its lower end edge portion, will purify air is set up under the mobile state towards the outside.
That is, by lid only is set, discharges with peristome via purifying air, the purifying air of outside that is discharged to accommodation space can be directed to the bottom of car body, and via the below of the lower end edge portion of lid, can be mobile towards the outside with purifying air.
Therefore, there is no need newly to establish the guide path that is directed to vehicle bottom with purifying air the peristome to outside of flowing that maybe will purify air, can reach the simplification of formation.
What the 4th feature of relevant conveying vehicle for plate shaped article of the present invention consisted of is, at least a portion among the Zhou Fangxiang in above-mentioned lid, and than the place above its lower end edge portion, via above-mentioned purify air to discharge with peristome, the outside discharge of discharging to the horizontal foreign side of car body that purifies air that will be discharged from be formed with opening.
That is, not only will discharge via purifying air purifying air of being discharged from peristome via the below of the lower end edge portion of lid, to flows outside, and can discharge with opening, to the discharge of the horizontal foreign side of car body via the outside.
By only discharging purifying air of to be discharged from peristome via purifying air via the below of the lower end edge portion of lid, to flows outside, the quantitative change volume that purifies air that is guided below the lower end edge portion of lid, can positively make purifies air is expelled to and outsidely becomes difficult.Again, be expelled to the outside flow velocity that purifies air and accelerate, purify air in the upset of the walking road surface of conveying vehicle for plate shaped article, the doubt that the dust on its walking road surface is rolled is also arranged.
Yet, because discharging purifying air of will being discharged from peristome via purifying air discharges with opening, can discharge to the horizontal foreign side of car body via the outside, the amount that purifies air of the below of the lower end edge portion that is directed to lid is lacked as far as possible, can discharge purifying air of to be discharged from peristome via purifying air and positively be expelled to the outside, and can prevent the generation of rolling of the dust as above-mentioned.
What the 5th feature of relevant conveying vehicle for plate shaped article of the present invention consisted of is, the mode that above-mentioned accommodation space is taken in the article holder that makes a plurality of plate-like articles of maintenance under the state that makes spacing parallel arranging at above-below direction is configured, with the side wall portion of the side wall portion adjacency in above-mentioned ventilation place in the side perimembranous of above-mentioned accommodation space be to move into for taking out of of above-mentioned article holder, but be configured with as the freely openable.
That is, because accommodation space is to keep the article holder of a plurality of plate-like articles to take in to make under the state that makes spacing parallel arranging at above-below direction, a plurality of plate-like articles are positively kept in the article holder, at a plurality of plate-like articles in abutting connection with article each other make purify air ventilation on one side.Again, the side wall portion of a side wall portion adjacency by only making the ventilation place in the side perimembranous with accommodation space opens and closes, and can carry out moving into for the taking out of of article holder of accommodation space.
Therefore, on one side can make a plurality of plate-like articles positively keep and carry at peace and quiet environment, Yi Bian can easily carry out loading and loading and unloading for a plurality of plate-like articles of plate-like articles transport trolley.
What the 6th feature of relevant conveying vehicle for plate shaped article of the present invention consisted of is that in the bottom of above-mentioned accommodation space, the carrying conveyer that makes above-mentioned article holder load carrying is set up.
That is, because the carrying conveyer is arranged at the bottom of accommodation space, can support under the state of article holder the article holder to be taken at accommodation space by carrying conveyer mounting.By with carrying conveyer mounting carrying article holder, can carry out moving into for the taking out of of article holder of accommodation space again.
Therefore, carry the article holder by only loading with the carrying conveyer, on one side can carry out moving into for the taking out of of article holder of accommodation space, Yi Bian highly keep the cleanliness factor of a plurality of plate-like articles.
Description of drawings
Fig. 1 is the planar view of the track route of expression conveying vehicle for plate shaped article;
Fig. 2 is the block diagram of conveying vehicle for plate shaped article;
Fig. 3 is the block diagram of article holder;
The longitudinal section of Fig. 4 for seeing at the cross-car Width of conveying vehicle for plate shaped article;
Fig. 5 is the sectional elevation of conveying vehicle for plate shaped article;
The longitudinal section of Fig. 6 for seeing at the cross-car Width of conveying vehicle for plate shaped article; And
The longitudinal section that Fig. 7 sees for Width before and after the car body of conveying vehicle for plate shaped article.
The main element nomenclature
1～plate-like articles transport trolley; 4～car body;
10～plate-like articles; 11～article holder;
13～drafting apparatus purifies air; 12～accommodation space;
14a, 14b, 14c～end side place; 14～bottom;
15a, 15b, 15c～side wall portion; 17～lid;
16～purify air to discharge and use peristome; 18～outside the discharge used opening;
19～carrying conveyer; 20～driven roller;
24～electro-motor; 25～connection shaft;
30～gear door.
The specific embodiment
Below based on the embodiment that illustrates relevant conveying vehicle for plate shaped article of the present invention.
This plate-like articles transport trolley 1 as shown in Figure 1 as, in clean room, automatically walk along track route 2, carry respectively at a plurality of workstations 3 and be configured as the plate-like articles.
Although diagram is omitted, at clean room, from the ground board that the smallpox board is formed to a plurality of hole section, the ventilation that will purify air is configured the dust that swims as discharging below the ground board.
Above-mentioned track route 2 is to be set up as a plurality of workstations 3.A plurality of workstations 3 are configured according to the conveyer that freely loads the carrying plate-like articles respectively, are set along track route 2 devices spaced apart.Again, on the track route 2, because 1 walking of plate-like articles transport trolley does not arrange hole section at the ground board, the intensity of consolidated floor section.
Although diagram is omitted, the driving wheel in the running wheel 5 is configured by pair of driving wheels body disconnected from each other and juxtaposed.About driving the each side of wheel body, DYN dynamic CD-ROM drive motor is directly linked, two drive wheel bodys respectively positive reverse back turn and be set up as the driving.Again, by giving difference or rotary actuation on contrary direction reciprocally at two speed of revolutionss that drive wheel bodys, vertical axis around change the direction of car body 4, the on one side formation of walking freely on one side.Again, aspect CD-ROM drive motor, the rotation demoder that detects rotation amount is set up.
Above-mentioned projection connects light accepting part 7, and in the rear side of car body 4, the projection that extends to upper side from the central portion of transverse width direction connects light accepting part and is supported with the upper end of support 8.Again, projection connect light accepting part 7 with laser in the four directions to projection light, accept as the laser of reflecting body 6 reflections, to be configured.Reflecting body 6 is wall sections that utilize clean room etc., is set up a plurality of along track route 2.
At above-mentioned car body 4, the control part 9 of the walking of control conveying vehicle for plate shaped article 1 is set up.This control part 9 is based on by projection and connects the reflected light information that light accepting part 7 is accepted, and detects the position of conveying vehicle for plate shaped article 1, makes plate-like articles transport trolley 1 as track route 2 walkings, is configured as the walking of control conveying vehicle for plate shaped article 1.
Caption, at control part 9, remembered as layout (layout map) relevant for the position information of the track route 2 of the position information that comprises a plurality of reflecting bodys 6.Above-mentioned control part 9 connects light accepting part 7 by projection, and laser projection is extremely cubic, from the angle that connect the laser that light accepting part 7 accepts by projection etc., calculation is for angle and the distance of the car body 4 of the conveying vehicle for plate shaped article 1 of reflecting body 6, based on this layout that detects information and remembered, as the present position of trigonometric survey calculation conveying vehicle for plate shaped article 1, be configured.
Again, control part 9 is based on the present position of the plate-like articles transport trolley 1 of calculation, along track route 2, as walking vehicle body 4 walkings, when control drives the action of CD-ROM drive motor of wheel, based on the detection information of rotary encoder, be configured as the travel distance of management conveying vehicle for plate shaped article 1.
The article of conveying vehicle for plate shaped article 1 carrying are the plate-like articles 10 of glass substrate etc.Again, as shown in Figure 3 as, keep in the above-below direction devices spaced apart and under state arranged side by side the article holder 11 of a plurality of plate-like articles 10 to be set up.This article holder 11 is set up and makes in the horizontal direction the 11d of support sector of relative union body 11c line (wire) shape connected to each other to consist of by a plurality of union body 11c of the upper frame body 11a that forms with reticulation and lower frame body 11b, link upper frame body 11a and lower frame body 11b and in union body 11c above-below direction devices spaced apart.Again, under the state of being supported by each 11d of support sector mounting, make plate-like articles 10 in the above-below direction devices spaced apart and keep side by side, in top, bottom and the sidepiece of article holder 11 whole, can make to be configured as the Air Flow.
Above-mentioned car body 4, as shown in Figure 4 to 7 as, covered by lid 17, the hollow space in the inside of this lid 17, under the state that covers with the outside, the accommodation space 12 of square Fang Tizhuan is formed.This accommodation space 12 is configured as the article holder 11 that can freely take in a plurality of plate-like articles 10 of maintenance.
Again, the ventilation place of the side wall portion 15a of the car body front side in the side perimembranous of accommodation space 12 is set up to will the purify air fan filter unit (being designated hereinafter simply as FFU) 13 of the drafting apparatus that purifies air that ventilates of the side wall portion 15b of car body rear side as the side wall portion 15a of car body front side from then on.FFU13 is via air cleaning filter, will purify air to be configured as ventilating, and in the side wall portion 15a of car body front side, under cross-car Width state arranged side by side, is set up two.Again, FFU 13, via the article holder 11 maintained a plurality of plate-like articles 10 that are contained at accommodation space 12 in abutting connection with article each other, will purify air is configured as ventilating.
The bottom 14 of above-mentioned accommodation space 12 as shown in Figure 5 as, be formed with rectangular-shaped, in its end side place of 14, bottom, the purifying air to discharge of the outside that purifying air in the accommodation space 12 is expelled to accommodation space 12 is formed with peristome 16.This purifies air and discharges with peristome 16 in bottom 14, and the end side place 14b of the car body rear side of the side wall portion 15b adjacency of the end side place 14a of the car body front side of the side wall portion 15a adjacency of car body front side and car body rear side and and the end side place 14c of the cross-car side of the side wall portion 15c adjacency of the cross-car side of the side wall portion 15a adjacency of car body front side form respectively.Again, purifying air to discharge is configured with the opening of peristome 16 with the lengthwise shape, and the four directions of rectangular-shaped bottom 14 is set up to discharge the state that surrounds with peristome 16 by purifying air.
Above-mentioned lid 17 as Fig. 6 and shown in Figure 7 as, discharge with peristome 16 via purifying air, be set up as the bottom that is directed to car body 4 that purifies air of outside of accommodation space 12 being discharged to.Again, lid 17 is under the state that links with the side wall portion in the side perimembranous that coats accommodation space 12, and via being set up under the below of its lower end edge portion, the state that flows towards the outside that will purify air.
Although above-mentioned lid 17 via the below of its lower end edge portion, will purify air and flow towards the outside, but above the lower end edge portion than lid 17, will discharge via purifying air the outside discharge of discharging to cross-car foreign side that purifies air that is discharged from peristome 16 and be formed with opening 18.That is, the outside discharge with opening 18, in the Zhou Fangxiang of lid 17, the place of cross-car side is being set up than accommodation space 12 lower side and than the lower end edge portion upper side of lid 17.
Again, the outside discharge with opening 18 is configured with opening 18b by the first outside discharge with opening 18a and the second outside discharge.The first outside discharge, is formed with strip at the car body fore-and-aft direction being set up with opening 18b upper side than the second outside discharge with opening 18a.The second outside discharge with opening 18b is so that a plurality of hole sections rectangular-shaped being formed arranged side by side is set up a plurality of in car body fore-and-aft direction devices spaced apart.
In the bottom 14 of above-mentioned accommodation space 12, as Fig. 5～shown in Figure 7, the carrying conveyer 19 of mounting carrying article holder 11 is set up.The carrying direction that this carrying conveyer 19 makes article holder 11 is configured more than 20 roller conveyers arranged side by side of driven roller as the cross-car Width in the carrying direction.
Above-mentioned driven roller 20 is the driven roller of shorter shape, supported with freely rotating respectively at the supporting frame 38 of pair of right and left, with the state of the direction devices spaced apart of carrying direction quadrature under, be set up pair of right and left.Be configured as carrying conveyer 19 is carried under the state that the driven roller 20 by pair of right and left is supported the both ends mounting of article holder 11 again.Be respectively at carrying direction a plurality of driven rollers 20 arranged side by side, be moved and driven by revolution at longitudinally by the positive motion belt 23 that hangs at the driving wheel body 21 of the pars intermedia that is disposed at the carrying direction and devices spaced apart is configured on the carrying direction a plurality of driven wheel body 22.Again, by driving connection shaft 25 with the carrying conveyer with electro-motor 24 revolutions, the driven roller 20 of pair of right and left is driven integratedly by revolution, mounting carrying article holder 11.
To be its upper ends be set up as more outstanding than bottom 14 upper sides of accommodation space 12 above-mentioned driven roller 20, article holder 11 is accommodated in is configured as the accommodation space 12.
Above-mentioned carrying conveyer 19 drives by the revolution of rotation with electro-motor 26, is supported with the conveyer support sector 28 that base station 27 rotations are set up freely in rotation.Again, rotation is with base station 27, and lifting is supported freely by the lifting mechanism 41 that is moved with the revolution driving of electro-motor 40 by lifting.
As above-mentioned, carrying conveyer 19 rotates freely with the revolution driving of electro-motor 26 by rotation, and lifting is set up freely with the revolution driving of electro-motor 40 by lifting.
With the side perimembranous of above-mentioned accommodation space 12 in the side wall portion 15c of cross-car side of side wall portion 15a adjacency of car body front side in ventilation place, be to move into for taking out of of article holder 11, be configured freely and open and close.
That is, as shown in Figure 4 as, but the side wall portion 15c of the cross-car side of side's side of cross-car Width is configured with the gear door (shutter) 30 of freely openable.Again, in Fig. 4, gear door 30 states of closing represent with solid line, keep off 30 state of opening and are represented by dotted lines.
The left and right sides of the bottom of gear door 30 is to be supported with lifting guide body 32.But the lifting guide body 32 of pair of right and left is to be set up movably along guide rails 33 free liftings by guide rollers 31 respectively.In the lifting guide body 32 of pair of right and left, respectively the driving wheel body above being disposed at 34 and be disposed at below the part of the positive motion belt 39 that hangs of driven wheel body 35 be fixed.Drive wheel body 34 and be bonded by connection shaft 36 each other, by with electro-motor 37 connection shaft 36 revolutions being driven with the gear door, driven by integratedly revolution.Again, by with electro-motor 37 connection shaft 36 revolutions being driven with gear door, make lifting guide body 32 liftings of pair of right and left, make to be configured as 30 switchings of gear door.
Again, in gear door 30 states of closing, arrange as the gap in abutting connection with the place in the lower side of gear door 30, the first outside discharge set with opening 18a.Therefore, use opening 18a by this first outside discharge, closed the gear door at 30 o'clock, the operator can prevent from clamping finger.
The walking of above-mentioned control part 9 control conveying vehicle for plate shaped article 1, and by the carrying action of control carrying transfer cart 19 and the on-off action of gear door 30, in a plurality of workstations 3, carry out being configured as the transportation processing of the workstation 3 carrying article holders 11 of carrying purpose from the workstation 3 of carrying starting point.
The action of relevant above-mentioned transportation processing is described.
Above-mentioned control part 9 moves to corresponding to as the stop position of workstation 3 of carrying starting point, controls the walking of tabular article carrying car 1.Above-mentioned control part 9, conveying vehicle for plate shaped article 1 moves to stop position, by making the gear door with electro-motor 37 actions, makes gear door 30 breakdown actions.Afterwards, control part 9 is in the workstation 3 of carrying starting point, and conveyer is moved, and makes the 19 carrying actions of carrying conveyer, article holder 11 is received from the workstation 3 of carrying starting point, by carrying conveyer 19 article holder 11 is carried to carrying with till the appropriate location.Again, when accepting article holder 11 from the workstation 3 of carrying starting point, control part 9 is based on the detection information of the outer various sensors of figure, detect in workstation 3, for height or the angle of the carrying conveyer 19 of conveyer, in workstation 3, for the words of conveyer from the skew of suitable transfer position, make rotation move the position adjustment of carrying conveyer 19 with electro-motor 26 and lifting with electro-motor 40.
Again, control part 9 by making the gear door with electro-motor 37 actions, makes and keeps off door 30 closing movements till using the appropriate location by 19 carrying article holders 11 to the carryings of carrying conveyer, is accommodated in the article holder 11 of accommodation space 12.
Afterwards, control part 9 is to move to the mode corresponding to the stop position of the workstation 3 of carrying purpose, the walking of control conveying vehicle for plate shaped article 1, plate-like articles transport trolley 1 moves to the words corresponding to the stop position of the workstation 3 of carrying purpose, with the carrying starting point workstation 3 time identical, after making gear door 30 breakdown actions, make the 19 carrying actions of carrying conveyer, article holder 11 is unloaded at the workstation 3 of carrying purpose.
Above-mentioned control part 9 is aspect FFU 13, makes in the walking of conveying vehicle for plate shaped article 1 and conveying vehicle for plate shaped article 1 stops, and between workstation 3, the transfer of article holder 11 is medium, be configured as the often action in the transportation processing.Again, make gear door 30 breakdown actions, be open under the outside state at accommodation space 12, the ventilation that purifies air by according to FFU 13 can prevent towards the intrusion of the dust of accommodation space 12.
Again, the action of FFU 13 can only be moved in the walking of conveying vehicle for plate shaped article 1, about whether moving FFU 13 for can suitably changing.
Take in article holder 11 at above-mentioned accommodation space 12, close in the state of gear door 30, relevant from the flowing of purifying air of being ventilated of FFU 13, based on Fig. 5～Fig. 7 explanation.In Fig. 5～Fig. 7, flowing of purifying air represented with arrow again.
Above-mentioned FFU 13 from the side wall portion 15a of car body front side by a plurality of plate-like articles 10 of being kept by article holder 11 in abutting connection with article each other as, ventilation will purify air.Again, purify air, in the time of mobile to the side wall portion 15b of car body rear side, also the side wall portion 15c to the cross-car side flows.Mobile the purifying air of side wall portion 15b to the car body rear side, discharge with peristome 16 via purifying air of being formed of the end side place 14b at the car body rear side of the bottom 14 of the side wall portion 15b of its car body rear side adjacency, be discharged from the outside lower side of accommodation space 12.Mobile the purifying air also of side wall portion 15c to the cross-car side, discharge with peristome 16 via purifying air of being formed of the end side place 14c in the cross-car side of the bottom 14 of the side wall portion 15c of its cross-car side adjacency, be discharged from the outside lower side of accommodation space 12.
From purifying air that FFU 13 ventilates, also have by according to the upset of plate-like articles 10 etc., flowing to the side wall portion 15a of car body front side again.Purifying air also of this type of discharged with peristome 16 via purifying air of being formed of the end side place 14a of 14 the car body front side in the bottom, is discharged from the outside lower side of accommodation space 12.
As above-mentioned, from purifying air that FFU 13 ventilates, on one side the accommodation space 12 of square Fang Tizhuan all across and ventilated, in the bottom 14 of rectangular-shaped accommodation space 12, discharge from purifying air of being formed of the whole end side place 14a～14c in its four directions and to be discharged to peristome 16 below the outside of accommodation space 12.
Discharge with peristome 16 via purifying air, be discharged to the purifying air of outside lower side of accommodation space 12, its part is discharged to cross-car foreign side with opening 18b from the first outside discharge with opening 18a and the second outside discharge.Again, a remaining part, the below via the lower end edge portion of lid 17 is discharged to the outside.
As above-mentioned, not only below the lower end edge portion of lid 17, by being discharged to cross-car foreign side with opening 18b from the first outside discharge with opening 18a and the second outside discharge, via the discharge that purifies air with peristome 16, can positively be discharged to the purifying air towards the discharge of outside of outside lower side of accommodation space 12.
[other embodiment]
(1) in the above-described embodiments, in the bottom 14 of rectangular-shaped accommodation space 12, although arrange to purify air at whole end side place 14a in its four directions～14c and discharge with peristome 16, do not arrange to purify air to discharge at the end side place 14a with the car body front side of the side wall portion 15a adjacency of car body front side and can implement with peristome 16.
(2) in the above-described embodiments, although lid 17 is discharged with peristome 16, will be discharged to as the bottom that is directed to car body 4 that purifies air of outside lower side of accommodation space 12 via purifying air, but for example, setting discharge via purifying air with peristome 16, will be discharged to accommodation space 12 outside lower side the bottom that is directed to car body 4 of purifying air guide path also can, relevant how the guiding purify air and can suitably change.
(3) in the above-described embodiments, although in the place of the cross-car side of lid 17 outside the discharge with opening 18 is set, make outside the discharge be configured in which position with opening 18 and can suitably change.Relevantly outside discharge setting number and can suitably change with opening 18 again.
(4) in the above-described embodiments, although carrying conveyer 19 is set in the bottom 14 of accommodation space 12, replace this carrying conveyer 19, the shifting apparatus of the V shape that possesses the fork (fork) that can freely advance and retreat is set and can implements.Between workstation 3, the shifting apparatus that arranges for transfer article holder 11 can adapt to various shifting apparatus.
(5) in the above-described embodiments, although FFU 13 is configured in the side wall portion 15a of car body front side, also can be at the side wall portion 15b of car body rear side configuration FFU 13.
(6) in the above-described embodiments, although make the discharge orifice peristome 16 that purifies air as the opening of the longer shape of same width, purify air to discharge and suitably to change with peristome 16.For example, make purifying air of forming of the end side place 14c with the cross-car side of the side wall portion 15c adjacency of cross-car side and discharge with peristome 16, as narrow at car body front side width more and in the wide shape of car body rear side width more, in the car body front side, suppress purifying air of volume and be discharged from towards the outside of accommodation space 12, can make by purifying air as far as possible of ventilating of FFU 13 by a plurality of plate-like articles 10 in abutting connection with article each other.
Claims (8)
1. conveying vehicle for plate shaped article, with the state of outside crested under rectangular-shaped accommodation space is set, in order to a plurality of plate-like articles are being taken under above-below direction spacing parallel arranging state with the posture along horizontal direction, described conveying vehicle for plate shaped article comprises:
Drafting apparatus (13) purifies air, be arranged in the conveying vehicle for plate shaped article, make purify air via the above-mentioned a plurality of plate-like articles that are incorporated in above-mentioned accommodation space in abutting connection with article each other, the ventilation place of the first side wall section (15a) from the side perimembranous of above-mentioned accommodation space ventilates towards relative the second side wall portion (15b) of the first side wall section therewith;
Be formed in the rectangular-shaped bottom in the above-mentioned accommodation space, with discharge first peristome that purifies air of the outside that is expelled to above-mentioned accommodation space of being used for above-mentionedly purifying air in the first end side place (14b) of above-mentioned the second side wall portion (15b) institute adjacency; And
Be formed on discharge second peristome that purifies air of the outside that is expelled to above-mentioned accommodation space of being used for above-mentionedly to purify air in the second end side place (14c) of the 3rd side wall portion (15c) the institute adjacency of the first side wall section in the rectangular-shaped bottom in the above-mentioned accommodation space and above-mentioned (15a) adjacency.
2. conveying vehicle for plate shaped article as claimed in claim 1, wherein said conveying vehicle for plate shaped article also comprises:
Be formed in the rectangular-shaped bottom in the above-mentioned accommodation space, with the discharge that purifies air of the outside that is expelled to above-mentioned accommodation space of being used for above-mentionedly purifying air in the 3rd end side place (14a) of institute of above-mentioned the first side wall section (15a) adjacency with the 3rd peristome.
3. conveying vehicle for plate shaped article as claimed in claim 1, wherein said conveying vehicle for plate shaped article also comprises lid (17), this lid is with under the state that links to each other at above-mentioned the second side wall portion (15b) with the side perimembranous that covers above-mentioned accommodation space, and under the below of the lower end edge portion of above-mentioned the second side wall portion (15b), the state that flows towards the outside that purifies air, arrange, in order to discharging the purifying air of outside that is expelled to above-mentioned accommodation space with the first peristome and be directed to the bottom of car body via above-mentioned purifying air.
4. conveying vehicle for plate shaped article as claimed in claim 3, wherein said conveying vehicle for plate shaped article also comprises outside the discharge with opening (18), be formed at least a portion among the Zhou Fangxiang in the above-mentioned lid, and than the place above the lower end edge portion of described lid, in order to will via above-mentioned purify air to discharge with the first peristome and purify air discharge purifying air to the discharge of the horizontal foreign side of car body with the discharge of the second peristome.
5. such as claim 1,2,3 or 4 described conveying vehicle for plate shaped article, wherein above-mentioned accommodation space is that the mode of taking in the article holder consists of, and above-mentioned article holder is at the above-below direction spacing parallel arranging, in order to keeping a plurality of plate-like articles,
Wherein, described the 3rd side wall portion (15c) in the side perimembranous of above-mentioned accommodation space is moved into for taking out of of above-mentioned article holder, but consists of in the mode of freely openable.
6. conveying vehicle for plate shaped article as claimed in claim 5, wherein said conveying vehicle for plate shaped article also comprise the carrying conveyer that loads the above-mentioned article holder of carrying, and this carrying conveyer is arranged on the bottom of above-mentioned accommodation space.
7. conveying vehicle for plate shaped article as claimed in claim 2, wherein said conveying vehicle for plate shaped article also comprises lid (17), this lid is with under the state that links to each other at above-mentioned the second side wall portion (15b) with the side perimembranous that covers above-mentioned accommodation space, and under the below of the lower end edge portion of above-mentioned the second side wall portion (15b), the state that flows towards the outside that purifies air, arrange, in order to discharging the purifying air of outside that is expelled to above-mentioned accommodation space with the first peristome and be directed to the bottom of car body via above-mentioned purifying air.
8. conveying vehicle for plate shaped article as claimed in claim 7, wherein said conveying vehicle for plate shaped article also comprises outside the discharge with opening (18), be formed at least a portion among the Zhou Fangxiang in the above-mentioned lid, and than the place above the lower end edge portion of described lid, in order to discharging with the first peristome, purify air to discharge with the second peristome and purify air and discharge purifying air to the discharge of the horizontal foreign side of car body with the discharge of the 3rd peristome via above-mentioned purifying air.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007002544A JP4310712B2 (en) | 2007-01-10 | 2007-01-10 | Plate-shaped article carrier |
| JP002544/07 | 2007-01-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101219736A CN101219736A (en) | 2008-07-16 |
| CN101219736B true CN101219736B (en) | 2013-04-17 |
Family
ID=39629867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007101598686A Expired - Fee Related CN101219736B (en) | 2007-01-10 | 2007-12-25 | Conveying vehicle for plate shaped article |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4310712B2 (en) |
| KR (1) | KR20080065903A (en) |
| CN (1) | CN101219736B (en) |
| TW (1) | TWI406804B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5585236B2 (en) * | 2010-06-23 | 2014-09-10 | 村田機械株式会社 | Tracked cart system |
| CN106219176A (en) * | 2016-07-29 | 2016-12-14 | 芜湖新泉汽车饰件系统有限公司 | The conveying arrangement of instrument board |
| TWI643799B (en) * | 2017-12-01 | 2018-12-11 | 瑩耀科技股份有限公司 | Semiconductors transfer system |
| JP7115356B2 (en) * | 2019-02-25 | 2022-08-09 | 株式会社ダイフク | Goods transport equipment |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63300524A (en) * | 1987-05-29 | 1988-12-07 | Nec Corp | Holding mechanism for transferring wafer cassette |
| JPH0610234U (en) * | 1992-07-13 | 1994-02-08 | 日本信号株式会社 | Linear motor non-collecting drive type transfer device |
| JPH07291133A (en) * | 1994-04-28 | 1995-11-07 | Sony Corp | Carriage device |
| JP3090088B2 (en) * | 1997-02-07 | 2000-09-18 | 富士電機株式会社 | Clean room fan filter unit |
| JPH1179389A (en) * | 1997-09-16 | 1999-03-23 | Mitsui Eng & Shipbuild Co Ltd | Substrate glass inspection processing system |
| JP3287337B2 (en) * | 1999-07-14 | 2002-06-04 | 日本電気株式会社 | Fan filter unit |
| JP3788296B2 (en) * | 2001-09-10 | 2006-06-21 | 株式会社ダイフク | Goods storage equipment for clean rooms |
| TWI327128B (en) * | 2003-07-08 | 2010-07-11 | Daifuku Kk | Plate-shaped work piece transporting apparatus |
| WO2005045920A1 (en) * | 2003-11-06 | 2005-05-19 | Shinko Electric Co., Ltd. | Device for carrying in and out boards, board carrying method and device therefor |
-
2007
- 2007-01-10 JP JP2007002544A patent/JP4310712B2/en not_active Expired - Fee Related
- 2007-10-16 TW TW096138642A patent/TWI406804B/en not_active IP Right Cessation
- 2007-11-22 KR KR1020070119648A patent/KR20080065903A/en not_active Application Discontinuation
- 2007-12-25 CN CN2007101598686A patent/CN101219736B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| TW200829492A (en) | 2008-07-16 |
| CN101219736A (en) | 2008-07-16 |
| JP4310712B2 (en) | 2009-08-12 |
| JP2008168982A (en) | 2008-07-24 |
| TWI406804B (en) | 2013-09-01 |
| KR20080065903A (en) | 2008-07-15 |
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