200948601 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種透過高溫液體進行加熱及均等加壓 而進行被加工物成型的裝置。 【先前技術】 現有將被加工物收容於麼力容器中，在密封該壓力容 ΟBACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for forming a workpiece by heating and uniformly pressurizing a high-temperature liquid. [Prior Art] The workpiece is stored in a force container, and the pressure capacity is sealed.
器的狀態下供給液體並透過液體向被加工物施加虔力而成 型的裝置。此時，能夠透過液體加壓而實現均等加壓。並 且，如果液體為高溫液體，則可以一邊進行加熱一邊進行 加壓。像這樣的一邊進行加熱一邊進行加壓的裝置有專利 文件1中所記載的裝置。 ,利用此類裝置，進行積層電容器等積層電子元件的成 1二積層電容器是透過將規定形狀的導體片和陶瓷坯片相 互交替疊合、加壓，同時加熱而使各層間的黏合劑硬化， =經過燒結喊而製造的。規定形狀的導體成為電極，而 ^結的料層絲絕賴。實際上，是將其切成規定的形 ’乍為電路元件使用。在將導體片和陶瓷坯片積層的狀 態下，該坯片柔軟，不定形。 ^所（的述片’在力13·111'前狀態為不定形的被加工物 工結束為止使其保持規定形狀的模具 。在所述的 根且:情況下’為了使加卫前的積層片保持為板狀，作 加工札用承載⑦些片的板狀構件。如果在壓力容器内使 〇从及模具上升至加工時的規定溫度，會使佔用壓 200948601 容器的時間變長，而不能提高生產率。在專利文獻2中’ 公開了一種在加壓成型之前預熱被加工物以及保持裝置， 從而縮短壓力容器佔用時間的技術。 【專利文獻1】實公平4-44358號公報 ’ 【專利文獻2】特開2002-35995號公報 【發明内容】 在加熱、加壓程序結束之後，由於模具變熱，有時會 / 衫響將被加工物從模具中取出的操作。此外，當再次使用 〇 變熱的模具時，由於被加工物受到來自模具的熱而過早變 熱，從而與模具變冷時的溫度上升過程不同。因此，例如 在裝置運行初期和運行後經過充分時間後，與溫度相關的 加工條件變得不同，有時會使產品的品質變得不穩定。 本發明的目的在於穩定用於保持被加工物模具的溫 度。 本發明的均等加壓成型裝置為，將從壓力容器中取出 〇 安裝被加工物的模具之後，浸潰於貯存在冷卻槽中的液體 中進行冷卻。由於被加工物從模具中取出前已冷卻，在從 該模具中取出的操作中，該模具不熱而使操作變得容易。 ， 此外，可以將冷卻槽設置在，將從壓力容器取出安裝 於模具的被加工物，自該均等加壓成型裝置搬出位置的下 方。 此外，可以在被加工物的搬出位置和冷卻槽之間，配 置用空氣吹去附著在從冷卻槽取出的被加工物上液滴的除 6 200948601 水部。 再者，本發明提供一種均等加壓成型裝置，具有·· 搬入位置，其為搬入被加工物的位置； 預熱位置’其為對搬入的被加工物的進行預熱的位置； 加壓成塑位置’其為對預熱後的被加工物進行加熱以 及均等加壓成型的位置； : 出位置’其為取出加麗成型後的被加工物的位置； P 搬送襞置，其將該被加工物，從搬入位置經由預熱位 置和加壓成型位置向搬出位置搬送，搬送時的位置間的執 跡不重複且為單方向，並且，在不需要預熱時，使搬送裝 置反向移動，將被加工物從搬入位置直接搬送至加壓成型 位置。 其次，本發明亦提供一種均等加壓成型裝置，是將被 加工物收容於灌滿液體的壓力容器中，密封壓力容器並透 過液體進行加壓以及加熱的裝置，其包括： ❹ 恆溫槽，貯存有用於保溫壓力容器的液體，且壓力容 器浸潰在該液體中； • 預熱槽，貯存有被加工物被收容於壓力容器之前，浸 潰被加工物並進行預先加熱的液體； 曹 單一的系，將怪溫槽的液體送至壓力容器和預熱槽， 並使液體在恆溫槽和壓力容器、恆溫槽和預熱槽之間循 胃環 9 送液控制裝置，其控制向壓力容器以及預熱槽的流體 供給，其中，送液控制裝置控制成，當液體被送至壓力容 200948601 器時’流體也被送至預熱槽。 【實施方式】 以下按照附圖對本發明的實施方式進行說明。第 =表示均等加壓成型裝置10各操作位置大概配置的俯視 。如圖所不，旋轉臂12具有三叉形，在各臂的前端支撐 有承载被加卫物保制托架的旋轉台14。圖示右下方的旋 轉台14的位置為’搬人加工前的被加王物及搬出加工後的 被加工物的搬入_搬出位置位置16。此外，圖式左方的台的 位置為預熱被加工物的預熱位置18。在旋轉台Μ的下方 設置有貯存預熱用液體的預熱槽2G。被加I物以被承載於 $架上面的狀態，被投入到預熱槽2〇中進行預熱，具體内 容將在後面說明。而且，圖式右上方的旋轉台14的位置 為，進行加壓成型的加壓成型位置22。在該旋轉台14的 下方，设置有壓力容器24。在壓力容器24中，貯存有作 ^壓力工作媒介的液體。而且，壓力容器24被浸潰在怪溫 曰26内的液體中。而且，對該均等加壓成型裝置1〇進行 俯硯時，即在第一圖的俯視圖中，對從壓 心工物進行冷卻的冷卻位置28，與搬入-搬出位置 :相同的位置《實際上冷卻位置28位於搬入_搬出位置16 的下方，而貯存用於冷卻被加工物等液體的冷卻槽，被設 置在圖式右下方旋轉台14的下方。 第二圖為表示均等加壓成型裝置1〇的搬入_搬出位置 16以及冷卻位置28部分的示意圖。當旋轉台14位於圖中 200948601 所示位置時，承載了多個被加工物的托架32被放置在旋轉 台14上面，進行被加工物向該成型裝置1〇之搬入。作為 被加工物的’由導體和陶瓷坯體片相互交替積層構成的積 層體34 (參照第二圖），因為加工前柔軟、變形，所以被 支持在使該積層體34保持一定形狀的模具36 (參照第三 圖）上。如圖3所示，積層體34呈大致方形的平板狀，在 模具36上設置有恰好裝入積層體34的凹部38。被加工物， : 即該積層體34被安裝在模具36上，多個積層體34被收容 P 於托架32中。以此狀態下，托架32被放置在旋轉台14上。 被輸送至冷卻位置28的積層體34係為在歷力容器24中被 加熱、加壓並被取出的物體，對冷卻位置28的說明隨後進 行。在搬入-搬出位置16中，放置在旋轉台14上的托架透 過旋轉臂12的轉動而被輸送至預熱位置18。 第四圖為表示均等加壓成型裝置10的預熱位置18以 及加壓成型位置22部分的示意圖。至於其他的部分將概略 參 地表示。托架32從搬入-搬出位置16透過旋轉台14的旋 轉而被送至預熱位置18。旋轉台14的旋轉是藉由液壓缸 構成的旋轉液壓缸40之往復運動，透過齒輪齒條副機構 42變換成旋轉運動’轉動轉柱44、旋轉臂12、旋轉台14 ' 而達到。當托架32被送至預熱位置is時，與透過由液壓 缸構成的懸掛式液壓知：46下降的吊鉤48卡合，進而透過 懸掛式液壓缸46被吊起。旋轉台14被旋轉而從托架32的 正下方退避。吊鉤48吊著托架32下降，在升降臺50上放 置托架32。升降臺50透過由液壓缸構成的升降液壓缸52 200948601 下降’由此托架32被投入至預熱槽20中。在預熱槽20中， 貯存有被升溫至規定溫度的液體例如水，積層體34、模具 36以及托架32，在被投入到加壓成型位置22之前，透過 該液體預先被加熱。在規定時間的加熱結束之後，升降臺 50上升，進而托架32成為被吊鉤48吊著的狀態。在其下 面退避的旋轉台14被送來，透過吊釣48的下降，托架 32被放置在旋轉台14上。於是，透過旋轉台14的旋轉， 保持著積層體34以及模具36的托架32被輸送至加壓成型 位置22。 在加壓成型位置22上，托架32與固定在壓力容器的 上蓋54底部之吊鉤56卡合。上蓋54，透過鏈條58被吊 下，並透過上蓋支撐柱6〇内的升降電機而進行升降。上蓋 54使托架32稍微上升，接著旋轉台14旋轉並從托架32 的正下方退避。而當旋轉台14退避時，上蓋下降，將保持 著積層體34、模具36的托架32投入到壓力容器24中。 第五圖圖5為表示預熱位置18以及加壓成型位置22, 尤其是壓力容器24及其周圍結構的概略圖。在上蓋54中， 二置有供後述銷62貫通的銷孔61，並且還設置有連接上 蓋Μ的底面及銷孔61的循環孔幻。被上蓋54书著的托 架％ ’與上蓋54 —同下降並被投入到壓力容器％中，當 上蓋=4塞住容器的開口部時，62被插入到銷孔6ι並^； 通上蓋54,如第六圖所示地密封壓力容器24。另一方面， 在屋力容器24處於開放狀態時，循環路閥％被打開，恆 溫槽26令的液體透過循環泵64被送至壓力容器24中。而 200948601 從壓力容器24溢出的液體，則再次回到恆溫槽％。壓力 容器24即使處於被上I 54蓋住的狀態，當銷62未被插入 至銷孔61時，流體透過循環孔63返回至怪溫槽％，進而 維持液體的環流狀態。由此，可對被上蓋54吊放到壓力容 器中的被加工物的溫度進行更為精確的控制。當銷62被插 入至上蓋的銷孔61，循環孔63被塞住時，循環路閥“則 被關閉。 P 由於被投入到壓力容器24中的積層體34 (被加工 物）、模具36以及托架32已經被預熱，溫度被升高，因此 在積層體34被浸潰到液體中之後，可以儘快開始加壓。在 關閉循環路閥66之後，驅動升壓泵68，將恆溫槽％内的 液體送至壓力容器24，以增加容器内的壓力。當達到規定 的壓力時，該壓力被維持規定時間。在此期間，透過液體 的加熱及加壓，積層體34被加壓成型並硬化。當經過規定 時間後’循環路閥66被開放，從而開放壓力容器24内的 ❹ 壓力。在升壓泵68的吐出侧設置有止回閥7〇 ’防止當升 壓果68未運行時的回流。 e 在壓力釋放之後，銷62被拔掉，使托架32與上蓋54 ， 一同上升，並使旋轉台14旋轉，放置於其上。然後，使旋 轉台14旋轉，將保持著被加工物的托架32輸送至搬入_搬 出位置16。 在循環泵64的吐出侧，用於將液體送至預熱槽20的 預熱槽送液管72連接在循環路閥66的前面。在由該預熱 送液管72形成的預熱槽送液路上，設置有用於調節送入預 11 200948601 熱槽20液體流量的兩個閥74、76。透過這兩個閥74、76 調節流向預熱槽20的送液量。作為其中一個閥的預熱槽送 液路主閥74，當循環路閥66關閉時開啟，而當開啟時則 被關閉。也就是，這些閥66、74中的一個處於開啟狀態。 於是，當流體未被送入壓力容器24時，流體則被送入預熱 槽20，由此對預熱槽内的流體溫度進行控制。在預熱槽20 中剩餘的液體，則透過連通開口 78溢出而回到恆溫槽26 中〇 : 設置在預熱槽送液路上的另一個閥，預熱槽送液路副 ◎ 閥76與主閥74並列配置。副閥76是在主閥74關閉時， 為了維持規定量的流體被送入預熱槽20而設置的。當循環 路閥66和副閥76同時開啟時，透過副閥76的流量被設定 在小於循環路閥66的流量，從而優先將壓力容器24中的 溫度管理。但是，即使在此時，因預熱槽20中也有流體的 送入，所以也能夠防止或抑制預熱槽20的温度降低。在本 實施方式中，副閥76雖然處於常時開啟狀態，但是也可以 q 設置成當主閥74開啟時關閉的形態。此外，為了能夠對應 該均等加壓成型裝置10的運行條件的變更，副閥76上設 有能夠調整流量的閥。但是，也可以用不能進行流量調整 ： 的結構，例如阻尼孔，或只能開啟和關閉的閥等來代替， ： 進而謀求結構的簡易化。此外，設置主閥74和副閥76兩 個閥是為了在向壓力容器24供給流體的同時於向預熱槽 20輸送液體時，容易進行小流量的調整，如果只用主閥也 能夠對小流量進行良好的流量調整，也可以採用僅具備主 12 200948601 閥的結構。A device in which a liquid is supplied in a state of a device and a force is applied to the workpiece through the liquid. At this time, uniform pressurization can be achieved by pressurization of the liquid. Further, if the liquid is a high temperature liquid, it can be pressurized while heating. The apparatus described in Patent Document 1 is a device for performing pressurization while heating. In this type of device, a two-layer capacitor having a laminated electronic component such as a multilayer capacitor is formed by alternately superposing and pressurizing a conductor piece and a ceramic green sheet having a predetermined shape, and heating the adhesive to cure the adhesive between the layers. = Made by sintering shouting. The conductor of the prescribed shape becomes the electrode, and the layer of the junction is absolutely unreliable. In fact, it is cut into a prescribed shape, which is used for circuit components. The green sheet is soft and amorphous in a state in which the conductor piece and the ceramic green sheet are laminated. ^ (The piece "Before the force 13·111' is a mold that maintains a predetermined shape until the end of the workpiece being processed. In the case of the root: in order to make the layer before the reinforcement The sheet is kept in a plate shape and used as a plate-like member for carrying a plurality of sheets for processing. If the crucible is raised from the mold and the mold to the specified temperature during processing, the time for occupying the pressure of 200948601 may become longer, and In the patent document 2, a technique of preheating a workpiece and a holding device before press molding to shorten the occupation time of the pressure vessel is disclosed. [Patent Document 1] Shi Fair No. 4-44358' [Liquid 2] JP-A-2002-35995 SUMMARY OF THE INVENTION [After the completion of the heating and pressurizing process, the mold may be heated and the operation of taking out the workpiece from the mold may be performed. When the hot mold is heated, the workpiece is heated too early due to the heat from the mold, which is different from the temperature rise process when the mold is cooled. Therefore, for example, in the initial stage of operation of the apparatus After a sufficient period of time, the temperature-related processing conditions become different, and the quality of the product may become unstable. The object of the present invention is to stabilize the temperature for holding the mold of the workpiece. The molding apparatus is configured to remove the mold from which the workpiece is to be removed from the pressure vessel, and then dipped in the liquid stored in the cooling tank for cooling. Since the workpiece is cooled before being taken out of the mold, in the mold In the take-out operation, the mold is not heated and the operation is facilitated. Further, the cooling tank may be provided to take out the workpiece attached to the mold from the pressure vessel, from the position where the uniform press molding device is carried out. Further, between the unloading position of the workpiece and the cooling tank, the water portion of the workpiece deposited on the workpiece taken out from the cooling tank can be blown off by air, and the water portion of the liquid crystal can be removed. Further, the present invention provides an equalization. The press molding apparatus has a loading position which is a position at which the workpiece is loaded, and a preheating position 'which pre-processes the workpiece to be loaded. The position of the pressurized plastic forming position is the position where the preheated workpiece is heated and uniformly pressurized; the position is 'the position of the workpiece after the removal of the Kelly; P transport The workpiece is conveyed from the loading position to the carry-out position via the preheating position and the press molding position, and the execution between the positions at the time of conveyance is not repeated and is unidirectional, and when preheating is not required, The conveyance device is moved in the reverse direction, and the workpiece is directly conveyed from the loading position to the press molding position. Next, the present invention also provides an equal pressure molding device for accommodating the workpiece in a pressure vessel filled with liquid. A device for sealing a pressure vessel and applying pressure and heating through a liquid, comprising: 恒温 a thermostatic bath storing a liquid for holding the pressure vessel, and the pressure vessel is immersed in the liquid; • a preheating tank storing the workpiece Before being contained in a pressure vessel, the liquid is impregnated and pre-heated; Cao's single system sends the liquid in the temperature tank to the pressure vessel and the preheating tank. And a liquid supply control device is arranged between the constant temperature tank and the pressure vessel, the constant temperature tank and the preheating tank, which controls the fluid supply to the pressure vessel and the preheating tank, wherein the liquid supply control device is controlled to be When the liquid is sent to the pressure capacity 200948601, the fluid is also sent to the preheating tank. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The first = is a plan view in which the respective operation positions of the equal pressure molding device 10 are roughly arranged. As shown in the figure, the swivel arm 12 has a trigeminal shape, and a rotary table 14 for supporting the bracket to be secured is supported at the front end of each arm. The position of the rotary table 14 at the lower right side of the figure is the loading/unloading position 16 of the workpiece to be processed before the handling and the loading/unloading of the workpiece after the processing. Further, the position of the table on the left side of the drawing is a preheating position 18 for preheating the workpiece. A preheating tank 2G for storing a liquid for preheating is provided below the rotary table. The object to be loaded is placed on the top of the rack, and is put into the preheating tank 2 to be preheated, and the specific contents will be described later. Further, the position of the rotary table 14 at the upper right of the drawing is a press molding position 22 for press molding. Below the turntable 14, a pressure vessel 24 is provided. In the pressure vessel 24, a liquid as a working medium for pressure is stored. Moreover, the pressure vessel 24 is immersed in the liquid in the weir temperature 曰26. Further, when the uniform press molding apparatus 1 is tilted, that is, in the plan view of the first drawing, the cooling position 28 that is cooled from the core material is at the same position as the loading-unloading position: The cooling position 28 is located below the loading/unloading position 16, and a cooling tank for storing a liquid such as a workpiece is stored below the lower right turntable 14 of the drawing. The second drawing is a schematic view showing a portion of the loading/unloading position 16 and the cooling position 28 of the equal pressure molding apparatus 1A. When the rotary table 14 is located at the position shown in 200948601 in the drawing, the carriage 32 carrying a plurality of workpieces is placed on the rotary table 14 to carry the workpiece into the molding apparatus 1. The laminated body 34 (see the second drawing) which is formed by alternately laminating the conductor and the ceramic green sheet as the workpiece is supported by the mold 36 which holds the laminated body 34 in a predetermined shape because it is soft and deformed before the processing. (Refer to the third figure). As shown in Fig. 3, the laminated body 34 has a substantially square flat plate shape, and a concave portion 38 in which the laminated body 34 is placed is provided on the mold 36. The workpiece, that is, the laminated body 34 is attached to the mold 36, and the plurality of laminated bodies 34 are housed in the holder 32. In this state, the carriage 32 is placed on the rotary table 14. The layered body 34 conveyed to the cooling position 28 is an object that is heated, pressurized, and taken out in the calendar container 24, and the description of the cooling position 28 is subsequently performed. In the carry-in/out position 16, the carriage placed on the turntable 14 is conveyed to the warm-up position 18 by the rotation of the rotary arm 12. The fourth drawing is a schematic view showing a portion of the preheating position 18 of the equal pressure molding apparatus 10 and the portion of the press molding position 22. As for the other parts, it will be outlined. The carriage 32 is sent to the warm-up position 18 from the carry-in/out position 16 by the rotation of the turntable 14. The rotation of the rotary table 14 is achieved by the reciprocating motion of the rotary cylinder 40 constituted by the hydraulic cylinder, and is converted into the rotational motion 'rotational column 44, the rotary arm 12, and the rotary table 14' by the rack-and-pinion mechanism 42. When the bracket 32 is sent to the warm-up position is, it is engaged with the hook 48 which is lowered by the suspension type hydraulic pressure constituted by the hydraulic cylinder, and is lifted by the suspension hydraulic cylinder 46. The turntable 14 is rotated to retreat from directly below the bracket 32. The hook 48 is lowered by the bracket 32, and the bracket 32 is placed on the lifting platform 50. The lift table 50 is lowered by the lift cylinder 52 200948601 constituted by a hydraulic cylinder. Thus, the bracket 32 is put into the preheating tank 20. In the preheating tank 20, a liquid heated to a predetermined temperature, for example, water, a layered body 34, a mold 36, and a bracket 32 are stored, and the liquid is previously heated by the liquid before being placed in the press molding position 22. After the heating for a predetermined period of time has elapsed, the elevating table 50 is raised, and the bracket 32 is suspended by the hook 48. The rotary table 14 which is retracted below is sent, and the carriage 32 is placed on the rotary table 14 by the lowering of the sling 48. Then, the carrier 32 holding the laminated body 34 and the mold 36 is conveyed to the press molding position 22 by the rotation of the turntable 14. In the press forming position 22, the bracket 32 is engaged with a hook 56 fixed to the bottom of the upper cover 54 of the pressure vessel. The upper cover 54 is suspended by the chain 58 and lifted and lowered by the lifting motor in the upper cover support column 6〇. The upper cover 54 slightly raises the bracket 32, and then the rotary table 14 rotates and retreats from directly below the bracket 32. On the other hand, when the turntable 14 is retracted, the upper cover is lowered, and the carrier 32 holding the laminated body 34 and the mold 36 is put into the pressure vessel 24. Fig. 5 is a schematic view showing the preheating position 18 and the press forming position 22, in particular, the pressure vessel 24 and its surrounding structure. In the upper cover 54, two pin holes 61 through which the pin 62 to be described later are inserted are provided, and a circulation hole which connects the bottom surface of the upper cover and the pin hole 61 is also provided. The bracket %' which is covered by the upper cover 54 is lowered with the upper cover 54 and is put into the pressure container %. When the upper cover=4 plugs the opening of the container, 62 is inserted into the pin hole 6 and the upper cover 54 is opened. The pressure vessel 24 is sealed as shown in the sixth figure. On the other hand, when the house container 24 is in the open state, the circulation path valve % is opened, and the liquid in the constant temperature tank 26 is sent to the pressure vessel 24 through the circulation pump 64. And 200948601 the liquid overflowing from the pressure vessel 24 is returned to the bath % again. Even if the pressure vessel 24 is in the state of being covered by the upper I 54 , when the pin 62 is not inserted into the pin hole 61 , the fluid passes through the circulation hole 63 and returns to the strange temperature groove %, thereby maintaining the circulation state of the liquid. Thereby, the temperature of the workpiece to be lifted into the pressure vessel by the upper cover 54 can be more precisely controlled. When the pin 62 is inserted into the pin hole 61 of the upper cover, and the circulation hole 63 is plugged, the circulation path valve is "closed. P" due to the laminated body 34 (work to be processed), the mold 36, which is put into the pressure container 24, The bracket 32 has been preheated and the temperature is raised, so that after the laminated body 34 is immersed in the liquid, the pressurization can be started as soon as possible. After the circulation path valve 66 is closed, the booster pump 68 is driven to increase the bath The liquid inside is sent to the pressure vessel 24 to increase the pressure inside the vessel. When the predetermined pressure is reached, the pressure is maintained for a predetermined period of time. During this period, the laminate 34 is press-formed by the heating and pressurization of the liquid. After the lapse of a predetermined period of time, the 'circulation valve 66 is opened to open the pressure in the pressure vessel 24. The check valve 7 is provided on the discharge side of the booster pump 68 to prevent the booster 68 from being operated. After the pressure is released, the pin 62 is pulled out, causing the bracket 32 to rise together with the upper cover 54, and the rotary table 14 is rotated and placed thereon. Then, the rotary table 14 is rotated and will remain The carrier 32 of the workpiece is transported to the moving The carry-out position 16. On the discharge side of the circulation pump 64, the preheating tank liquid supply pipe 72 for supplying the liquid to the preheating tank 20 is connected to the front surface of the circulation path valve 66. The preheating liquid supply pipe 72 is formed. The preheating tank liquid supply path is provided with two valves 74, 76 for adjusting the liquid flow rate of the feed tank 11 200948601. The two valves 74, 76 are used to adjust the amount of liquid supplied to the preheating tank 20. The preheating tank liquid supply main valve 74 of one of the valves is opened when the circulation path valve 66 is closed, and is closed when it is opened. That is, one of the valves 66, 74 is in an open state. When not being fed into the pressure vessel 24, the fluid is sent to the preheating tank 20, thereby controlling the temperature of the fluid in the preheating tank. The liquid remaining in the preheating tank 20 overflows through the communication opening 78 and returns. To the thermostatic bath 26: Another valve provided on the preheating tank liquid supply path, the preheating tank liquid supply path ◎ valve 76 is arranged in parallel with the main valve 74. The sub valve 76 is when the main valve 74 is closed, in order to maintain A prescribed amount of fluid is supplied to the preheating tank 20. When the circulation path valve 66 and the sub valve 76 are provided When the time is on, the flow rate through the sub-valve 76 is set to be smaller than the flow rate of the circulation path valve 66, so that the temperature in the pressure vessel 24 is preferentially managed. However, even at this time, there is fluid supply in the preheating tank 20. Therefore, it is also possible to prevent or suppress the temperature drop of the preheating tank 20. In the present embodiment, the sub-valve 76 is normally open, but may be provided in a form that is closed when the main valve 74 is opened. The sub-valve 76 is provided with a valve capable of adjusting the flow rate in response to the change of the operating condition of the equal pressure molding apparatus 10. However, it is also possible to use a structure in which flow rate adjustment is not possible, such as a orifice, or only opening and closing. Instead of a valve or the like, the structure is simplified. Further, the two valves of the main valve 74 and the sub-valve 76 are provided to facilitate the adjustment of the small flow rate when the liquid is supplied to the preheating tank 20 while supplying the fluid to the pressure vessel 24, and can be small if only the main valve is used. The flow is subject to good flow adjustment, and it is also possible to use a structure with only the main 12 200948601 valve.
PP
針對第二圖對冷卻位置28上的操作進行說明。自加壓 成型位置22送來的托架32被設置在搬入_搬出位置丨6，即 冷卻位置28正上方的，利用升降液壓缸84進行升降的吊 釣86吊上。升降液壓缸84吊起托架32，而旋轉台^旋 轉而退避出托架32的正下方。升降液壓缸84使牦& 32下 降，將積層體34浸潰於冷卻槽30中如水的液體中^經過 規定時間之後，吊起托架32，用鼓風機88吹入空氣，吹 掉附著在積層體34、模具36以及技架32上的液然後， 再二人將托架32吊到比旋轉台14尚的位置，使旋轉a μ旋 轉’並將托架放置在旋轉台14上。 / 在冷卻位置28中，設置有對冷卻槽3〇中的液體進行 冷卻的冷卻單元90。冷卻單元90將低溫製冷劑循環設置 於冷卻槽30中的換鱗圈92内’從而降低冷卻槽中的液 體溫度。另外，還設置有檢測冷卻槽液體溫度的溫度傳感 器94,根據該傳感器的檢測值’對冷名罝 〇 又 ^ < |平兀yu進行控制〇 從經由冷卻位置28再次回到搬入_搬出位置“的托架 32中，將積層體34以安裝於模具36的狀態取出。缺後， 將經過加工的積層體34從模具36中敢下，1『 '' 丁取下，送至下—道程 序。接著’在模具36中，新的未加工的積顧％被安裝 並搬入。 在本實施方式中，旋轉台14可在12〇。範圍旋轉，當 將托架32送至下一個位置後’其返回前面的位置，接收下 一個托架32。此外’旋轉台U從第—圖中的位置轉動6〇 13 200948601 的位置為退避位置。在加壓成型位置22進行加壓成型 時，與其同時在預熱位置18進行預熱。此外，在搬入-搬 出位置16以及冷卻位置28中，被加壓成型的積層體“與 模具36 —同先被冷卻，冷卻後連同托架32 一起被搬出。 然後，接下來被加工的、安裝在模具36上的積層體34以 收容於托架32的狀態被搬入。 當旋轉台14旋轉時，三個旋轉台14分別將托架32搬 入下一個位置。此外，當著眼於其中一個托架32時，各位 ' 置之間的移動呈圓弧形，而移動方向為’第—圖中的順時 Q 針方向。 以。上，本實施方式的均等加壓成型裝置1〇，透過大致 在120範圍内向正、反方向旋轉的旋轉台14搬運托架 而該旋轉台14也可以向一方向連續轉動。此外，也可以將 搬入和搬出的位置獨立配置。 另外對不需要預熱的被加工物進行加愿成型時，可 以使旋轉台14逆轉，從搬入-搬出位置16直接送至加壓成 塑位置22。在加壓成型結束後，使旋轉台14向正向旋轉，鰱 返回搬入-搬出位置16。此外’在加壓成型後需要冷卻的情 況下，也可以將預熱槽20作為冷卻槽利用。在這種情況 ， 下’停止預熱槽20和怪溫槽26之間的液體循環，分別獨 ： 立進行溫度管理。在加工成型後，再次使旋轉台14逆轉， 使托架32移動至預熱槽20上方的位置，並投入到預熱槽 20中進行冷卻。在冷卻結束後，使旋轉台14 架32復位至搬入-搬出位置16。 14 200948601 第七圖為在各位置處理的時間流程圖。⑷表示搬入 搬出位置16以及冷卻位置28中的處理。首先，使旋轉台 14旋轉’接收來自加壓成型位置22的托架32。接著使托 架32上升，一度使旋轉台14退避。然後，使托架&下降， 投入到冷卻槽30。冷卻規定時間之後，使托架32上升並 進行除水。進一步使托架上升’復位退避的旋轉台14，並 :在旋轉台14上放置托架32。自此，托架32被搬出，而新 P 的把架32被搬人，且被放置在旋轉台14上。然後，使旋 轉自14再次退避。該退避是為了在其他的位置上進行托架 升•防止旋轉台成為阻礙。然後，待機到下一個循環過 程為止。但是，在待機期間，與其他位置的處理相關聯， 旋轉台14裝載著托架32進行旋轉。 鵪 (b)表不預熱位置18的處理。使旋轉台14旋轉，这 入-搬出位置16接收托架32並使其上升，且使旋轉台】 避。該旋轉台14的旋轉和退避，與其他的位置同步” ^托架32的狀態退避規料間。在經過狀時間之/ 拓f架32下降，投入到預熱槽。在預熱結束之後，福 2 32上升，復位退避的旋轉台14，並在其上放置托架 制;Ϊ間可以變更。在控制該均等加壓成型裝置操作的担 哕丄透過輸入的預熱時間算出預熱前待機時間。姻 該待機時間和預熱時間，控制預熱位置中的操作。 ⑷表示加㈣型位置22的處理。使旋轉台14旋轉， =預熱位置丨8接收域32並使其上升，且使旋轉台_ 。該旋轉台14的旋轉和退避，與其他的位置同步。將托 15 200948601 架32以吊在上蓋54下方的狀態，使其下降，a上上蓋。 透過升壓泵68增加麗力^2 φ 口 ⑽靨六一么 ㈣奋器24中的壓力，保持了規定時 間的壓力之後，進行減屬。 叮 上升，彳、s 打開上盍54的同時使托架32 轉台14上。Hi台14，使托架32下降，放置在旋 位置的操Utr置復位旋轉台14的操作，與預熱The operation at the cooling position 28 will be described with respect to the second diagram. The cradle 32 fed from the press molding position 22 is placed at the carry-in/out position 丨6, that is, directly above the cooling position 28, and the hoisting 86 that is lifted and lowered by the lift cylinder 84 is suspended. The lift cylinder 84 lifts the bracket 32, and the rotary table rotates to retreat directly below the bracket 32. The lift cylinder 84 lowers the 牦& 32, and the laminate 34 is immersed in the liquid such as water in the cooling tank 30. After a predetermined period of time, the bracket 32 is lifted, the air is blown by the blower 88, and the layer is blown off and adhered to the laminate. The body 34, the mold 36, and the liquid on the gantry 32 are then hoisted by the cradle 32 to a position other than the rotary table 14 to rotate a μ and to place the carriage on the rotary table 14. / In the cooling position 28, a cooling unit 90 that cools the liquid in the cooling tank 3A is provided. The cooling unit 90 circulates the low temperature refrigerant in the scale ring 92 in the cooling tank 30 to reduce the liquid temperature in the cooling tank. Further, a temperature sensor 94 for detecting the temperature of the liquid in the cooling bath is provided, and the cold value is controlled based on the detected value of the sensor, and is returned to the carry-in position by the cooling position 28. In the bracket 32, the laminated body 34 is taken out in a state of being attached to the mold 36. After the absence, the processed laminated body 34 is dare to go down from the mold 36, and 1 "'' is taken off and sent to the lower side. Then, 'in the mold 36, the new raw product % is installed and carried in. In the present embodiment, the rotary table 14 can be rotated in the range of 12 ,, after the carriage 32 is sent to the next position. 'It returns to the front position and receives the next bracket 32. In addition, the position of the rotary table U is rotated from the position in the first figure to 6〇13 200948601 as the retracted position. When the press forming position 22 is press-formed, At the same time, the preheating is performed at the preheating position 18. Further, in the carry-in/out position 16 and the cooling position 28, the pressure-molded laminated body "is cooled together with the mold 36, and is cooled together with the carrier 32. . Then, the laminated body 34 attached to the mold 36 to be processed next is carried in a state of being housed in the bracket 32. When the rotary table 14 is rotated, the three rotary tables 14 respectively move the carriage 32 to the next position. Further, when focusing on one of the brackets 32, the movement between the pieces is a circular arc shape, and the moving direction is the clockwise Q-pin direction in the figure. To. In the equal pressure molding apparatus 1 of the present embodiment, the carriage is conveyed by the rotary table 14 that rotates in the forward and reverse directions substantially in the range of 120, and the rotary table 14 can be continuously rotated in one direction. In addition, it is also possible to arrange the positions for loading and unloading independently. Further, when the workpiece to be processed which does not require preheating is subjected to shaping, the turntable 14 can be reversely rotated and sent directly from the carry-in/out position 16 to the press molding position 22. After the press molding is completed, the turntable 14 is rotated in the forward direction, and 鲢 is returned to the carry-in/out position 16. Further, in the case where cooling is required after press molding, the preheating tank 20 may be used as a cooling tank. In this case, the liquid circulation between the preheating tank 20 and the weir temperature tank 26 is stopped, and temperature management is separately performed. After the forming, the rotary table 14 is again reversed, the carriage 32 is moved to a position above the preheating tank 20, and is put into the preheating tank 20 for cooling. After the cooling is completed, the turntable 14 frame 32 is returned to the carry-in/out position 16. 14 200948601 The seventh picture shows the time flow chart processed at each position. (4) shows the processing in the carry-in/out position 16 and the cooling position 28. First, the rotary table 14 is rotated to receive the carriage 32 from the press molding position 22. Then, the carriage 32 is raised, and the rotary table 14 is once retracted. Then, the tray & is lowered and put into the cooling bath 30. After cooling for a predetermined period of time, the carriage 32 is raised and water removal is performed. Further, the carriage is raised to "reset the retracted turntable 14" and the carriage 32 is placed on the turntable 14. From then on, the carriage 32 is carried out, and the carriage 32 of the new P is carried and placed on the rotary table 14. Then, the rotation is again retracted from 14. This retreat is to raise the bracket at other positions. • Prevent the rotating table from becoming a hindrance. Then, wait until the next cycle. However, during standby, in association with the processing at other locations, the rotary table 14 is loaded with the carriage 32 for rotation.鹌 (b) The process of not preheating position 18 is indicated. The turntable 14 is rotated, and the in-and-out position 16 receives the carriage 32 and raises it, and the rotary table is prevented. The rotation and retraction of the rotary table 14 are synchronized with the other positions. ^ The state of the carrier 32 is retracted between the specifications. The elapsed time/down frame 32 is lowered and put into the preheating tank. After the warm-up is completed, Fu 2 32 rises, resets the retracted turntable 14 and places the bracket on it; the turn can be changed. The standby operation before the preheating is calculated by controlling the operation of the equal press molding device. The standby time and the warm-up time control the operation in the warm-up position. (4) indicates the processing of the (four)-type position 22. The rotary table 14 is rotated, the pre-heating position 丨8 receives the field 32 and raises it, and Rotating table _. The rotation and retraction of the rotating table 14 are synchronized with other positions. The holder 15 200948601 is suspended from the lower cover 54 to lower it, and the upper cover is closed. Force ^2 φ mouth (10) 靥 一 ( 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 Hi stage 14, lowering the bracket 32 and placing it in the rotary position Utr counter reset operation operation of the rotary table 14, preheating
Q 〇 =本實施方μ，將預熱槽與冷卻槽分別設置，在一 的加工程序中，可以將預熱和冷卻同時進行。但是， 右只需進行任何一方，則可以去掉本實施方式的預熱槽20 和冷部槽3G的任何-方。例如，在只具備預熱槽2〇的結 冓的If况下，當需要預熱時，在第一圖中向右旋轉搬送被 加工物’在預熱之後，投入到壓力容器，而在需要冷卻的 情況下，向左旋轉進行搬送，將從壓力容器取出的被加工 物才又入到作為冷卻槽使用的預熱槽内。在將預熱槽作為冷 部槽使用時，灌滿該冷卻槽的液體而不與恆溫槽的液體共 用。因此，較佳是設置使預熱槽（冷卻槽）的液體獨立循 環’進行溫度管理的液體回路裝置。 【圖式簡單說明】 第一圖為表示本發明實施方式均等加壓成型裝置大概 結構的俯視圖。 第二圖為表示本發明實施方式均等加壓成型裝置的搬 入-搬出位置以及冷卻位置部分的側視圖。 第二圖為表示作為被加工物的積層體和保持積層體的 16 200948601 模具示意圖。 第四圖為表示本發明實施方式均等加壓成型裝置的預 熱位置以及加壓成型位置部分的主視圖。 第五圖為加壓成型位置壓力容器的大概結構圖，特別 是表示容器處於開放狀態的示意圖。 第六圖為加壓成型位置的壓力容器的大概結構圖，特 別是表示容器處於關閉狀態的示意圖。 ; 第七圖為表示在各位置處理操作的時間流程圖。 【主要元件符號說明】 ίο均等加壓成型裝置 12旋轉臂 14旋轉台 16搬入-搬出位置 18預熱位置 φ 20預熱槽 22加壓成型位置 24壓力容器 26恆溫槽Q 〇 = In this embodiment, the preheating tank and the cooling tank are separately provided, and in one processing procedure, preheating and cooling can be simultaneously performed. However, any one of the preheating tank 20 and the cold section tank 3G of the present embodiment can be removed by simply performing either of the right sides. For example, in the case of a case with only the preheating tank 2〇, when preheating is required, the workpiece is rotated to the right in the first drawing, and after being preheated, it is put into the pressure vessel, and is needed. In the case of cooling, the material is rotated to the left and transported, and the workpiece taken out from the pressure vessel is again introduced into the preheating tank used as the cooling tank. When the preheating tank is used as a cold tank, the liquid of the cooling tank is filled without being shared with the liquid of the bath. Therefore, it is preferable to provide a liquid circuit device for temperature management in which the liquid of the preheating tank (cooling tank) is independently circulated. BRIEF DESCRIPTION OF THE DRAWINGS The first drawing is a plan view showing a schematic configuration of an equal pressure molding apparatus according to an embodiment of the present invention. The second drawing is a side view showing a loading-unloading position and a cooling position portion of the uniform press molding apparatus according to the embodiment of the present invention. The second figure is a schematic view of a mold which is a laminate of a workpiece and a laminate that holds the laminate. Fig. 4 is a front elevational view showing a preheating position and a press forming position portion of the equal pressure molding apparatus according to the embodiment of the present invention. The fifth drawing is a schematic view of the pressure vessel at the pressure forming position, and particularly shows a schematic view of the container in an open state. The sixth drawing is a schematic view of the pressure vessel in the press forming position, in particular, a schematic view showing the container in a closed state. The seventh diagram is a time flow chart showing the processing operations at each location. [Main component symbol description] ίο Equal pressure molding device 12 Rotating arm 14 Rotary table 16 Loading-unloading position 18 Preheating position φ 20 Preheating tank 22 Pressurization molding position 24 Pressure vessel 26 Thermostatic bath
V : 28冷卻位置 30冷卻槽 32托架 34積層體 36模具 17 200948601 38凹部 40旋轉液壓缸 42邊輪齒條副機構 44轉動轉柱 46懸掛式液壓缸 48吊鉤 50升降臺 52升降液壓缸 54上蓋 56吊釣 58鏈條 60支撐柱 61鎖孔 62銷 63循環孔 64循環泵 66循環路閥 68升壓泵 70止回閥 72預熱槽送液管 74主閥 76副閥 78連通開口 84升降液壓缸 200948601 86吊鉤 88鼓風機 90冷卻單元 92換熱線圈 94溫度傳感器V: 28 Cooling position 30 Cooling trough 32 Bracket 34 Laminated body 36 Mold 17 200948601 38 Recessed 40 Rotary hydraulic cylinder 42 Side rack and pinion mechanism 44 Rotating rotating column 46 Suspended hydraulic cylinder 48 Hook 50 Elevating table 52 Elevating hydraulic cylinder 54 upper cover 56 hanging fishing 58 chain 60 support column 61 lock hole 62 pin 63 circulation hole 64 circulation pump 66 circulation road valve 68 boost pump 70 check valve 72 preheating tank liquid supply pipe 74 main valve 76 sub valve 78 communication opening 84 Lifting hydraulic cylinder 200948601 86 hook 88 blower 90 cooling unit 92 heat exchange coil 94 temperature sensor