JPH0353840Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] This invention relates to a hot water isostatic pressurizing device, and more specifically, to cooling steam rising from hot water in a tank in a hot water isostatic pressurizing device. This is a hot water isostatic pressurizer with a simple structure, which effectively prevents hot water vapor in the tank from flowing out of the hot water isostatic pressurizer, and is equipped with a lid that can be easily attached and removed. It relates to a pressurizing device.

[Prior Art and its Problems] Conventionally, there is an isostatic pressurizing device as a device for manufacturing a multilayer circuit board formed by laminating a plurality of circuit boards, for example.

This isostatic pressurizing device stores a plurality of layers of circuit boards in a pressure vessel immersed in hot water in a tank, and then pressurizes the circuit boards into the pressure vessel by pressurizing the circuit boards. Pressure is applied, which allows them to be integrated.

In addition, this isostatic pressurizing device is designed to prevent steam from hot water in the tank from flowing out of the isostatic pressurizing device.
A cover is provided to cover the upper opening of the tank.

However, when loading a pressurized object into the pressure vessel, the cover must be removed. Then, the hot water vapor spreads throughout the room in which this isostatic pressurization device is installed. As a result, the steam rising from inside the tank poses a problem in the work of filling pressurized objects into the pressure vessel.

Furthermore, the steam that spreads into the room can cause other equipment to become damp, causing them to malfunction.

A conventional hot water isostatic pressurizing device includes a cylindrical hot water tank made of metal and having an opening at the top, and a pressure vessel immersed in hot water in the hot water tank. A pressurized object is stored in this pressure vessel, and the pressure vessel is isostatically pressurized by heating the inside of this pressure vessel with hot water in the hot water tank and pressurizing hot water into the pressure vessel. It had a structure.

In a hot water isostatic pressurizing device with such a structure, the steam rising from the hot water in the hot water tank flows out of the hot water tank, and the outflowing steam flows into the room where the hot water isostatic pressurizing device is installed. There was a problem in that it caused other equipment to malfunction. Furthermore, the leaked steam fills the room, making it difficult to operate the hot water isostatic pressurizing device and making it difficult to perform other tasks in the room.

In order to solve this problem, the applicant proposed a hot water isostatic pressurizing device having a cooling corrugated pipe arranged at a position higher than the hot water level in the hot water tank (Utility Model Application No. 62). -Refer to Publication No. 43284).

However, the hot water isostatic pressure pressurizing device according to the above proposal has the problem that it is very difficult to attach and detach the cooling pipe in the limited space inside the hot water tank, and it is difficult to install and remove the cooling pipe in the limited space inside the hot water tank. When removing the cooling corrugated tube from the hot water tank or when reassembling the disassembled cooling corrugated tube in the hot water tank, there is a problem that the cooling corrugated tube may be accidentally deformed;
Furthermore, it is not possible to completely cool the steam rising from the surface of the hot water in the hot water tank and completely prevent it from flowing out of the hot water tank. There still remained problems such as the inability to completely prevent leakage, and the need for troublesome bending of the pipes in order to manufacture the cooling corrugated pipes. In addition, in the hot water isostatic pressure pressurizing device according to the above proposal, since a cooling corrugated pipe is installed in the hot water tank, if a foreign object enters between the cooling corrugated tubes from outside the hot water tank, it will be removed. Another problem was that it was very difficult to remove.

The present invention has been made to solve the above problems.

That is, the purpose of this invention is to solve the above-mentioned problems, effectively prevent the steam from hot water in the hot water tank (hereinafter referred to as the tank) from flowing out of the tank, and to easily attach and detach the tank. can also be
It is an object of the present invention to provide a hot water isostatic pressure pressurizing device equipped with a cooling lid that does not easily deform even if it hits other members during attachment and detachment.

[Means for solving the above-mentioned problems] The outline of this invention for solving the above-mentioned problems is as shown in FIG. In a hot water isostatic pressurizing device 4 that stores a pressurized object and pressurizes the pressurized object isostatically by pressurizing hot water 2 into the pressure vessel 3, the pressure vessel 3 is immersed in the hot water 2. Said tank 1
The refrigerant flows in a zigzag pattern through the through hole 7, which is opened so that the upper part of the pressure vessel 3 projects, and which is arranged so as to close the tank opening 1a above the liquid level of the hot water 2. This hot water isostatic pressure pressurizing device is characterized in that it has a lid body 5 equipped with a baffle plate (not shown in FIG. 1) arranged so that the hot water is isostatically pressurized.

The tank 1 can be configured to accommodate hot water 2 heated by an appropriate heating means and a pressure vessel 3.

If this hot water isostatic pressurizing device 4 is used to integrally laminate a large number of circuit boards, it is preferable that the hot water 2 is pure water or a fluorine-based inert liquid.

The pressure vessel 3 has vertical dimensions such that the opening for taking in and out the pressurized object is higher than the liquid level of the hot water 2 inside the tank 1 and higher than the upper surface of the lid 5, which will be described later. is immersed in the hot water 2 and housed in the tank 1.

The pressurized object may be, for example, a circuit board, but is not particularly limited as long as it needs to be pressurized at high temperature and high pressure.

The lid body 5 is located above the liquid level of the hot water 2,
The refrigerant can pass through the tank 1 in a zigzag pattern, and the tank opening 1a formed by housing the pressure vessel in the tank 1 can be closed. There are no particular restrictions as long as the steam rising from the water can be cooled.

FIG. 1 shows an example of the lid 1. As shown in FIG. 1st
The lid 5 in the figure has a through hole 7 through which the upper part of the pressure vessel 3 protrudes when the pressure vessel 3 is accommodated in the tank 1.

In addition to the example shown in FIG. 1, examples of the lid 5 include a housing 6 with a rectangular plane as shown in FIG. 3, and a housing 8 with a circular plane as shown in FIG.

Further, as shown in FIG.
When closing the lid opening 1a, the semi-circular side surfaces 7a and 7b are opposed to each other and a circular through hole 7 is formed.
is formed, and the upper part of the pressure vessel 3 is made to protrude from this through hole 7. The lid 5 of this embodiment is composed of two divided parts 6a and 6b. In this case, there is an advantage that the installation work is simple.

Furthermore, in the lid body 5, FIGS.
Baffle plates 9 of various patterns as shown in the figure can be alternately provided as appropriate, and in this case, cooling efficiency can be improved.

Water is usually sufficient as the refrigerant.

[Effect] Next, the operation of this invention will be explained.

When the water in the tank 1 housing the pressure vessel 3 is heated to a predetermined temperature, for example 80° C., by an appropriate heating means, steam rises from the surface of the hot water 2. Above the hot water 2, on the top surface of the tank 1, there is a lid 5.
Since a housing 6 is provided in which a refrigerant flows in a zigzag pattern, the vapor is cooled by the housing 6, condenses, and returns to liquid.

As a result, steam rising from the surface of the hot water 2 does not flow out of the tank 1.

[Example] Next, a specific example of this invention will be described with reference to the drawings.

In the hot water isostatic pressurizing device 10 shown in FIG. 2, a pressure vessel 13 is immersed in a tank 12 containing hot water 11 so that the upper part thereof is exposed above the liquid level of the hot water 11. This hot water 11 is heated to a predetermined temperature, for example, 80° C., by a heater 14 disposed in the tank 12. Near the inner peripheral surface of this tank 12, the hot water 11
A lid body 5 is disposed above the liquid level, and this lid body 5 has a structure that supplies cooling water from its cooling water inlet (IN) and discharges the heat-exchanged cooling water from its cooling water outlet (OUT). It is becoming.

On the other hand, a discharge pipe 16 having one end opened into the tank 12 is attached to the tank 12.
The branch pipes are branched in the middle, and the tip openings of each branch pipe are connected to the circulation pump 17 and the boost pump 18, respectively. Further, an introduction pipe 19a having an opening at one end near the bottom surface of the pressure vessel 13 is connected to the pressure vessel 13.
3, this introduction pipe 19a is branched in the middle, and the branched branch pipe 19b is connected to the circulation pump 18 via the pressure boost pump 17 and an air-driven valve 20. Further, the introduction pipe 19b between the circulation pump 17 and the valve 20 is branched and connected to a supply pipe 22 whose one end opens into the tank 12 via an air-driven on-off valve 21. are doing.

In addition, other branch pipes 19 branched from the introduction pipe 19a
c is an air-driven drain valve 20 connected in parallel.
1 and 202, it is connected to an inlet pipe 29 whose one end opening faces the hot water surface.

The pressure vessel 13 has an opening 23 in its upper part, and a lid 25 having a rack 24 detachably attached to the lower surface of the opening 23 is hermetically sealed in the opening 23. It is becoming possible to do this. Further, the upper peripheral surface of the pressure vessel 13 has a first through hole 26 that penetrates in the diametrical direction, and the first through hole 26 has a closure pin 2.
7 penetrates.

This first through hole 26 has a function as an opening through which the hot water 11 inside the pressure vessel 13 overflows. Other functions will be described later.

The lid 25 is provided with a second through hole 28 on its circumferential surface, which corresponds to the first through hole 26 when the lid 25 is attached to the opening 23 .

The lid 25 is connected to an elevating cylinder 30, which is an elevating mechanism, via a support (not shown).

The lifting cylinder 30 has a first switching valve 3
It is pneumatically driven via 2.

The closure pin 27 is coupled to a horizontally moving cylinder 33 which is a reciprocating mechanism, and this horizontally moving cylinder 33 is pneumatically driven by a second switching valve 34.

Each of the first switching valve 32 and the second switching valve 34 connects an air supply pipe 35 for feeding air and an exhaust pipe 36 for discharging air.

Note that 37 is a drain valve for removing water pressure within the pressure vessel 13.

Next, the operation of the hot water isostatic pressurizing device 10 having the above configuration will be explained.

A predetermined amount of water, particularly pure water or a fluorine-based inert liquid, is placed in the tank 12, and the water is heated by the heater 14 to a predetermined temperature of, for example, 80° C. hot water 11.

Steam rises from this hot water 11. However, since there is a lid 5 above the liquid level of the hot water 11 through which the refrigerant flows, the air above the liquid level is cooled by the lid 5. The rising steam is cooled by this cooled air or by the lid 5.
The steam condenses and returns to hot water 11. Therefore, during the following pressure molding process, the steam rising from the hot water 11 does not flow out of the tank 12, and other equipment outside the apparatus can be prevented from being adversely affected by the steam.

The pressure molding process is as follows.

In the initial state, the lid 25 with the rack 24 attached to its bottom is positioned above the pressure vessel 13, and the closure pin 27 is retracted from the opening 23.

Next, the valve 20 is opened by pneumatic operation, and the circulation pump 18 is driven to drain the hot water 1 in the tank 12 through the discharge pipe 16 and the introduction pipes 19a, 19b.
1 is introduced into the pressure vessel 13. Circulation pump 18
If the drive continues, the hot water 11 will flow into the pressure vessel 13.
is supplied, and finally the first through hole 2
The hot water 11 overflowing from tank 12 is overflowing from tank 12.
Go back inside. In other words, the hot water 11 is circulated between the tank 12 and the pressure vessel 13 by the circulation mechanism. By continuing the circulation of this hot water 11,
The pressure vessel 13 is heated from inside and outside the pressure vessel 13 to reach a predetermined temperature, for example, 80°C.

When the pressure vessel 13 reaches a predetermined temperature, the circulation pump 18 is stopped and the valve 20 is closed.

A plurality of layers, for example, 30 layers of circuit boards are placed in a bag on the rack 24.

The first switching valve 32 is set to the C2 state, and the lifting cylinder 30 is driven to descend, and the lid 25 is
is attached to the opening 23. Once the lid 25 is attached to the opening 23, the first switching valve 32 is set to the B2 state, and the second switching valve 34 is set to the C3 state, and the horizontal movement cylinder 33 is driven to move the closure pin 27 horizontally. As a result, the closure pin 27 passes through the first through hole 26 and the second through hole 28, and the lid 25 is attached to the opening 23 in an airtight manner. At this time, the rack 24 is housed within the pressure vessel 13.

After that, the boost pump 17 is driven and the discharge pipe 16 is
The hot water 11 in the tank 12 is then pressurized into the pressure vessel 13 via the introduction pipes 19a and 19b. Hot water 11
is press-fitted into the pressure vessel 13 until the inside reaches a predetermined pressure.

By press-fitting the hot water 11, the multiple layers of circuit boards placed on the rack 24 are isotropically pressurized at a predetermined temperature and formed into an integrated circuit board.

After the pressure inside the pressure vessel 13 reaches a predetermined pressure, the boost pump 17 is stopped and the on-off valve 2 is closed.
1 is opened and the circulation pump 18 is driven, the hot water 11 in the tank 12 is circulated into the tank 12 via the supply pipe 22. Thereby, the hot water 11 in the tank 12 maintains a uniform temperature distribution without stagnation in the tank 12 and creating a temperature gradient.

After maintaining the pressure inside the pressure vessel 13 at a predetermined pressure for a certain period of time while driving the boost pump 17, the water pressure inside the pressure vessel 13 is released by opening the drain valves 201 and 202.

The second switching valve 34 is set to the A3 state and the horizontal movement cylinder 33 is driven to move the closure pin 27 backward and remove it from the second through hole 28.

The second switching valve 34 is set to the B2 state to set the closure pin 35 to the initial state, and the first switching valve 32 is set to the A2 state and the lifting cylinder 30 is driven to raise the lid 25. When the lid 25 reaches the top dead center, turn the first switching valve 32 to B2.
condition and activate the fall prevention mechanism.

A 30-layer integrated circuit board is taken out from the rack 24 and obtained.

The above steps are steps for molding one multilayer circuit board.

According to the apparatus of this embodiment, the pressure vessel can be heated to a predetermined high temperature more quickly than the conventional apparatus, and the inside of the pressure vessel can be maintained at a predetermined high temperature even during pressurization. In addition, the plate-shaped member cools the steam rising from the hot water and prevents the steam from leaking outside the tank, so the steam can have an adverse effect on other equipment in the room where this hot water isostatic pressure pressurization device is installed. can be prevented. Therefore, according to the apparatus of this embodiment, it is possible to perform isostatic pressure molding under higher temperature conditions than in the past while eliminating the defects caused by hot water vapor.

[Effects] According to this invention, since the lid is provided above the hot water in the tank and has a hollow space through which the refrigerant can pass, the steam rising from the hot water in the tank can be efficiently cooled. be able to. In addition, since this lid body is placed so as to completely close the tank opening, in combination with its cooling effect, it effectively prevents the steam from the hot water from leaking out of the tank and prevents it from leaving the equipment. It is possible to prevent the harmful effects of steam on other equipment.

In addition, the lid can be easily attached to and removed from the tank opening.
Since the structure of the lid is simple, it has various advantages such as being easy to manufacture.

[Brief explanation of drawings]

FIG. 1 is an explanatory longitudinal cross-sectional view showing one aspect of this invention, FIG. 2 is an explanatory view showing one embodiment of this invention,
FIG. 3 is a plan view of the cooling device shown in FIG. 1, and FIGS. 4 to 8 are plan explanatory views showing other aspects of this invention. 1...tank, 2...hot water, 3...pressure vessel, 4...
...Hot water isostatic pressurizing device, 5...Lid, 6...Housing, 10...Hot water isostatic pressurizing device, 11...Hot water, 12...Tank, 13...Pressure vessel.

Claims (1)

[Claims for Utility Model Registration] A pressurized object is stored in a pressure vessel immersed in hot water in a tank, and hot water is isostatically pressurized on the pressurized object by pressurizing the hot water into the pressure vessel. In the isostatic pressurizing device, an upper part of the pressure vessel protrudes and is arranged to close a tank opening above the hot water level of the tank in which the pressure vessel is immersed in hot water. 1. A hot water isostatic pressurizing device characterized by having a lid having a through-hole opened in the shape of a hole and a baffle plate arranged so that a refrigerant flows in a zigzag manner.