200941632 九、發明說明 【發明所屬之技術領域】 本發明是關於將收容晶圓的FOUP固定在載台用的夾 緊機構。 【先前技術】 無塵室中，爲了收容電子裝置用的晶圓進行搬運或保 ❺ 管，使用 FOUP ( Front Open Unified Pod )。並且，FOUP 被固定在稱爲FOUP載入機（或者裝載埠）的介面機構。 並且，FOUP載入機中，使FOUP對接在對於半導體製造 裝置內部掩蔽著連通口的埠門，密閉連通FOUP的內部與 半導體裝置的內部，以FOUP及半導體製造裝置的內部爲 高浄化度，以其外側爲低淨化無塵度，可藉此抑制無塵室 的建設•運轉成本。 FOUP載入機中，有謀求對半導體內之異物微粒子的 Φ 混入防止的必要。因此，藉著設置·固定有FOUP的載台 從非對接位置移動到對接位置，可以使FOUP與璋門在密 閉狀態下對接。並且，爲了進行晶圓的進出，進行FOUP 的蓋部及埠門的開關。並且，有藉著保持著FOUP與半導 體裝置的密閉狀態程度的固定力，將FOUP預先固定在 FOUP載入機的載台上的必要。關於以上的FOUP的固定 ，在 SEMI ( Semiconductor Equipment and Naterials Internation )的規格中，有著針對FOUP載入機設置FOUP 夾緊機構的規定，此外也有著針對FOUP底部的夾緊用凹 200941632 部的形狀、該夾緊機構所求得的夾緊力等的規定。並且， 以上述規格爲依據的夾緊機構的例有（1)日本特開2003-297903號公報、（2)日本特開2005-129706號公報及（3 )日本特開2004-14001 1號公報所揭示的技術已爲人知。 文獻（1) 、 （2)的技術中，將夾緊用的爪部鉤掛在 ' FOUP底部的夾緊用凹部，並使得該爪部下降，將爪部推 壓在FOUP載入機的載台上固定FOUP。 0 又，文獻（3)中，記載有可進行FOUP設置方向調 整的FOUP載入機。該FOUP載入機中，在載台（連接板 及容器搭載片）上形成缺口，該缺口之中配置著可旋轉· 升降的筒狀部。該筒狀部的上端設置搭載著FOUP的搭載 板。並且，設置在載台下方的支撐片內設有驅動筒狀部的 馬達。根據以上的構成，可不須設置大的裝置（FOUP的 操作用的握把），可調整FOUP的設置方向，使得FOUP 的取出口正對於半導體製造裝置。 Φ 【發明內容】 , 設有FOUP載入機的無塵室中，可運用的空間極爲重 要，爲了使其儘可能地擴大，期待著可對於載台的下方空 間有效的活用。上述文獻（1 ) 、（ 2 )所揭示的夾緊機構 爲了驅動夾緊用的爪部，包含著汽缸與馬達等的致動器所 構成。並且，以上的致動器是被設置在固定FOUP的載台 下方空間。因此，載台的下方空間爲該等的致動器等所佔 有’而不能有效活用載台的下方空間。 -5- 200941632 又，如上述，文獻（1) 、 （2)所記載的夾緊機構由 於佔有載台的下方空間，載台的下方不能設置上述的筒狀 部或馬達。因此，不能運用如文獻（3 )的技術。 另外，使用文獻（1) 、（2)所記載夾緊機構的場合 ’將FOUP對接在埠門時，FOUP設置在載台之後，須進 行（1 )夾緊動作、（2 )對接動作的兩階段斷座，而必須 形成該兩階段量的循環時間。 0 因此，本發明的目的是提供可有效活用載台的下方空 間的夾緊機構。 另外，本發明的其他目的是提供在對接動作中進行夾 緊，藉此縮短循環時間的夾緊機構。 爲了達成上述目的，本發明的夾緊機構是將可收容晶 圓的FOUP固定在載台上，相對於基板處理裝置的連通口 開關用的埠門，對接固定在上述載台的上述FOUP，使上 述FOUP的內部與上述基板處理裝置的內部密閉連通的 φ FOUP載入機的將上述FOUP固定在上述載台用的夾緊機 構。並且，夾緊機構，具有：相對於FOUP載入機主體部 的上部，設置可朝著形成上述對接的方向的對接方向及與 0 該對接方向相反的非對接方向移動的板狀第1載台；相對 於上述第1載台的上部，設置可朝著上述對接方向及上述 非對接方向移動的板狀第2載台；藉著水平方向延伸且正 交在上述對接方向及上述非對接方向的轉軸，可旋轉地支 撐在上述第2載台上方的夾緊桿；使上述第2載台相對於 上述第1載台朝著上述非對接方向移動而作用的第1構件 -6 - 200941632 ;及第2構件。上述夾緊桿形成有朝著上述非對接方向突 出的夾緊用爪部’上述第2構件相對於上述夾緊桿作用使 上述夾緊用爪部朝下方向位移。上述FOUP的底部形成有 定位用凹部’上述第1載台形成有嵌入該定位用凹部的定 位用凸部，根據上述定位用凸部嵌入到上述定位用凹部， 使上述第1載台及上述FOUP形成一體可移動的狀態。並 且’上述夾緊用爪部被收容於形成在上述FOUP底部的夾 H 緊用凹部’上述第2載台相對於上述第丨載台朝著上述非 對接方向移動’上述夾緊用爪部使上述夾緊用凹部的上述 非對接方向側的內壁面朝著上述對接方向突出形成的被夾 緊部從上方向下方推壓，將上述FOUP固定在上述載台上 〇 根據以上的構成，在載台（第1載台及第2載台）的 下方，不設置汽缸或馬達等的致動器，即可夾緊FOUP， 因此不會佔有載台的下方空間。因此，可有效活用載台的 〇 下方空間。又，在對接動作中進行夾緊，可獲得循環時間 縮短的夾緊機構。 又，本發明所涉及的夾緊機構中，上述第1構件也可 以是連接上述第2載台與上述第1載台的彈性構件。藉此 ’可以簡易構成第1構件。在此，彈性構件爲可伸縮且高 彈性的構件，具體而言相當於金屬彈簧（螺旋彈簧等）、 樹脂彈簧、橡膠等。 又，本發明所涉及的夾緊機構也可以另外具備固定在 上述FOUP載入機主體部，且限制上述第2載台朝著上述 200941632 非對接方向移動的止動件。藉此，FOUP從上方下降而設 定時，夾緊用爪部可確實收容在夾緊用凹部的位置上可配 置夾緊用爪部。 又，本發明所涉及的夾緊機構，更具備：設置在上述 第1載台的第1接觸部與設置在上述第2載台，且相對於 上述第1接觸部配置在上述對接方向側的第2接觸部，上 述第1載台及上述FOUP朝著上述對接方向移動時，也可 φ 以藉上述第1接觸部推壓上述第2接觸部，使上述第1載 台、上述FOUP及上述第2載台形成一體移動。根據上述 ’第1載台、FOUP及第2載台形成一體移動時，藉著第 1接觸部對於第2接觸部的推壓，穩定第2載台的移動。 又’第2載台移動時，可減輕施加在夾緊桿的負荷。 又’本發明所涉及的夾緊機構中，上述第2構件是設 置在上述第2載台上部的彈性構件，上述夾緊桿上形成有 朝著上述對接方向突出的凸部，上述第2構件也可以被夾 ❹ 持在上述凸部與上述第2載台之間，從上方向下方推壓上 述凸部。藉此，可簡易構成第2構件。在此，彈性構件爲 可伸縮且具有高彈性的構件，具體而言，相當於金屬彈簧 (螺旋彈簧等）、樹脂彈簧、橡膠等。 又’本發明所涉及的夾緊機構中，也可以在上述第2 載台形成限制上述凸部朝上方向的位移量的限制部。藉此 一構成，限制夾緊桿的傾斜，因此即使夾緊力大的場合， 仍然可以使夾緊用爪部越過被夾緊部之上。 又’本發明所涉及的夾緊機構中，更具備可藉著朝水 -8- 200941632 平方向延伸且正交於上述對接方向及上述非對接方向的轉 軸可自由旋轉支撐的滾子，該滾子也可以配置在上述夾緊 用爪部的前端。藉此，在FOUP的夾緊時，夾緊用爪不可 容易越過被夾緊部，容易形成夾緊。 又，本發明所涉及的夾緊機構中，上述第2載台與上 述第1載台也可以經由沿著上述對接方向及上述非對接方 向所設置的線性運動導件連接。因此，藉著簡易的構成， 設置使第2載台可相對於第1載台的上部朝著對接方向及 非對接方向移動。 爲使本發明之目的、特徵及功效得以完備與明確化， 參閱以下附圖更具體詳細說明如下。 【實施方式】 以下’針對本發明的較佳實施形態，參閱圖示加以說 明。 〇 首先，使用第1圖及第2圖，針對包含本發明一實施 形態所涉及夾緊機構的FOUP載入機的整體構成說明如下 。第1圖、第2圖爲本發明的一實施形態所涉及F0UP載 入機的側面槪略圖，第2圖爲第1圖的A-A’箭頭方向上 面槪略圖。 (FOUP載入機） 本發明所涉及的FOUP載入機50是如第1圖表示， 爲連通FOUP ( Front Open Unified Pod) 2的內部與半導 200941632 體製造裝置（基板處理裝置）內部用的介面機構’ F〇UP2 相對於FOUP載入機50被固定。並且，FOUP載入機50 被設置在無塵室內。 FOUP載入機50中，FOUP載入機主體部50b上設置 有載台51，載台51上固定設置著可收容複數晶圓9的 FOUP2。此時，FOUP2藉著夾緊機構1的作用固定在載台 51上。又，FOUP載入機包含設置在半導體製造裝置側的 壁部50c，壁部50c形成有連通半導體製造裝置的連通口 5〇h，並設置埠門50d來屏蔽連通口 50h。載台51在設置 FOUP2的狀態下，相對於FOUP載入部50b設置使FOUP2 與埠門50d形成可朝著對接的方向（對接方向）及與此相 反的方向（非對接方向）移動。在此，載台51是包含後 述的載台底座（第1載台）及夾緊底座（第2載台）所構 成。又，本實施形態所涉及的夾緊機構1是如後述包含載 台1所構成。並且，FOUP載入機50相對於埠門50d使 FOUP2對接，之後開放淳門50d及FOUP2的蓋部2d (後 述），藉此密閉連通FOUP2的內部與半導體製造裝置的 內部。再者，FOUP2也可以收容一個晶圓。 接著，使用第1圖及第2圖針對FOUP2的構成說明 如下。FOUP2是作爲收容電子裝置用的晶圓9的搬運，或 保管之用，包含框體2b，與可相對於框體開關的蓋部2d 所構成。在此，FOUP2可運用於種種的基板的搬運及保管 。並且，框體2安裝著蓋部2d的狀態下，防止對於 FOUP2內部之異物微粒子的侵入及FOUP2內部的化學性 -10- 200941632 污染。又，框體2b的頂上部設有搬運用機器人 FOUP2時作爲把持用的把持部2z。另外，如第2 ，在FOUP2的底部形成有三處後述的定位用凹部 者’第2圖爲上面圖，原來的定位用凹部2a FOUP2的底部，雖是在隱藏不肯g看見，但是第2圖 說明而加以圖示。另外，在FOUP2的底部如第1 所表示，設有夾緊用凹部2h。又，如第2圖的B-之剖面槪略圖（省略表示剖面的斜線）的第5圖表 FOUP2中，形成有從夾緊用凹部2h的非對接方向 閱圖的箭頭方向）的內壁面朝著對接方向突出的被 2 c ° (夾緊機構） 接著，一邊參閱第3圖，針對夾緊機構1說明 第3圖是表示第2圖的B-B’位置的放大剖面槪略圖 表示剖面的斜線）。又，第3圖是省略FOUP2表 此，夾緊機構1包含載台51，載台51是包含載台 第1載台）3及夾緊底座（第2載台）4所構成。 針對各個詳細構成說明。 (載台底座） 載台底座3是形成板狀的構件，底部一體設有 動導件3g。又，FOUP載入機主體部50b的上部沿 方向及非對接方向設有軌道5 Or。並且，線性運動i 等搬運 圖表示 2a。再 是位在 是爲了 圖虛線 B’位置 示，在 側（參 夾緊部 如下。 (省略 示。在 底座（ 以下， 線性運 著對接 I件3g -11 - 200941632 與軌道5 Or彼此咬合，使線性運動導件3g沿著軌道5 (^移 動。根據上述’載台底座3相對於FOUP載入機主體部 5〇b的上部’設置可朝著對接方向及非對接方向移動。此 外’線性運動導件也可以形成與載台底座不同的構件，安 裝在載台底座上。 又’載台底座3的上部形成有定位用凸部3a。並且， 如第5圖表示’在F〇uP2設定在載台底座3的狀態下， φ 定位用凸部3a嵌入到FOUP2的定位用凹部2a內。又， 定位用凹部2a在第3圖中雖僅顯示1個，但是如第2圖 表示，載台底座3的上部，對應F〇uP2的3個定位用凹 部2a的位置上，形成有3個定位用凸部3a。原來在上面 圖的第2圖中’定位用凸部3a是位在隱藏不能看見的位 置，但是第2圖是爲了說明而加以圖示。並且，將定位用 凸部3a嵌入定位用凹部2a，藉此使載台底座3及FOUP2 形成一體移動的狀態。亦即，載台底座3在軌道50r上移 Q 動時’ FOUP2與載台底座3 —起移動。 又’載台底座3的上部，在軌道5〇Γ上設置載台底座 3的狀態下’設有沿著對接方向及非對接方向的軌道3r。 (夾緊底座） 接著’一邊參照第3圖，針對夾緊底座4說明如下。 夾緊底座4也是形成板狀的構件，底部一體設置線性運動 導件4g。並且’線性運動導件4g與軌道31彼此咬合，使 線性運動導件4g沿著軌道3r移動。根據上述，夾緊底座 -12- 200941632 4形成相對於載台底座3的上部設置可朝著對接方向及非 對接方向移動。又，使用以上的線性運動導件4g及軌道 3r’可藉著簡易的構成，設置使夾緊底座4可相對於載台 底座3的上部朝著對接方向及非對接方向移動。並且，線 性運動導件也可以形成與夾緊底座不同的構件，安裝在夾 ' 緊底座上。 又，夾緊底座4的上部可旋轉地支撐著夾緊桿5a。具 φ 體而言，在夾緊底座4的上部形成有支撐部4c。藉著安裝 在該支撐部4c的轉軸5c可旋轉地支撐著夾緊桿5a。在此 ’夾緊桿5a的轉軸5c是朝著水平方向延伸且正交於對接 方向及非對接方向。亦即，轉軸5c是朝垂直於第3圖的 紙面方向延伸’夾緊桿5a在第3圖中，形成可右旋轉及 左旋轉地轉動。又，夾緊桿5a形成有朝著對接方向突出 的夾緊用爪部5b。並在夾緊桿5a形成有朝著對接方向突 出的凸部5d。另外’夾持在凸部5d與夾緊底座4之間的 〇 位置上，設有作爲第2構件的螺旋彈簧5 S。螺旋彈簧5 s 是如第3圖表示’使軸方向與上下方向一致且縮短的狀態 下埋沒設置在夾緊底座4的上部。又，螺旋彈簧5s是包 含螺旋彈簧與設置在其端部的軸狀推壓部5k所構成。螺 旋彈簧5 s利用朝著彈簧伸長方向的彈力，可對於向上方 突出的推壓部5k賦予從上方向下方推壓的力所構成。並 且’螺旋彈簧5s將凸部5d經常地從上方向下方推壓，藉 以使夾緊桿5a賦予第3圖之右旋轉轉動的力。並且，其 結果’形成螺旋彈簧5s相對於夾緊桿5a的作用使夾緊用 -13- 200941632 爪部5b向下方位移。又，藉螺栓4t將限制部4a固定設 置在夾緊底座4上。將限制部4a的前端部分配置在凸部 5d的上方以相對於凸部5d在上下方向容許預定的位移量 ，藉此限制朝凸部5d上方向的位移量，即夾緊桿5a的可 旋轉角度。 ' 在此，補充夾緊用爪部5b及凸部5d的突出方向，爲 了可旋轉地支撐夾緊桿5a，本實施形態中，藉著夾緊用爪 φ 部5b夾緊FOUP2的狀態下（參閱第6圖、第7圖），突 出形成在非對接方向及對接方向。又，本實施形態中，夾 緊桿5a的可旋轉角度，即夾緊用爪部5b的可上下擺動寬 幅是以螺旋彈簧5s最爲縮短狀態的推壓部5k的位置及限 制部4a前端部的位置來決定，因此其寬幅不大。因此， FOUP2在以夾緊機構1夾緊的狀態（第6圖、第7圖）與 不夾緊FOUP2的狀態（第3圖〜第5圖）的雙方，夾緊用 爪部5b及凸部5d是位於夾緊桿5a分別朝著大致非對接 〇 方向及大致對接方向突出形成的狀態，與夾緊後的狀態比 較，夾緊用爪部5b是朝向下方位移的方向傾斜（參閱第3 圖〜第5圖）。 又，夾緊底座4向下方突出形成有第2接觸部4b，載 台底座3上設有第1接觸部3b。第1接觸部3b，包含： 固定設置在載台底座3上的支架部3h與沿著對接方向及 非對接方向朝支架部3h貫穿設置的支架3t。並且’調整 螺栓3t的旋轉量，可以調整螺栓3t的突出高度。又，第 2接觸部4b被配置在較第1接觸部3b更接近對接方向側 -14-200941632 IX. Description of the Invention [Technical Field] The present invention relates to a clamping mechanism for fixing a FOUP for accommodating a wafer to a stage. [Prior Art] In the clean room, FOUP (Front Open Unified Pod) is used to carry or hold the wafer for the electronic device. Also, the FOUP is fixed to an interface mechanism called a FOUP loader (or load port). Further, in the FOUP loader, the FOUP is docked in a door that shields the communication port inside the semiconductor manufacturing apparatus, and the inside of the FOUP and the inside of the semiconductor device are hermetically connected, and the inside of the FOUP and the semiconductor manufacturing apparatus is highly purified. The outside is low-purity and dust-free, which can suppress the construction and operation cost of the clean room. In the FOUP loader, there is a need to prevent Φ contamination of foreign particles in the semiconductor. Therefore, by moving and setting the stage with the FOUP fixed from the non-docking position to the docking position, the FOUP can be docked in the closed state. Further, in order to carry in and out of the wafer, the cover of the FOUP and the switch of the door are switched. Further, it is necessary to fix the FOUP to the stage of the FOUP loader in advance by a fixing force that maintains the degree of sealing of the FOUP and the semiconductor device. Regarding the fixing of the above FOUP, in the specification of SEMI (Semiconductor Equipment and Naterials Internation), there is a provision for setting the FOUP clamping mechanism for the FOUP loader, and also for the shape of the concave portion 200941632 for the bottom of the FOUP. The provision of the clamping force and the like obtained by the clamping mechanism. Further, examples of the clamp mechanism based on the above specifications include (1) JP-A-2003-297903, (2) JP-A-2005-129706, and (3) JP-A-2004-14001. The disclosed technology is well known. In the techniques of (1) and (2), the clamping claw portion is hooked on the clamping recessed portion at the bottom of the 'FOUP, and the claw portion is lowered to push the claw portion against the load of the FOUP loader. The FOUP is fixed on the stage. 0 Further, in the literature (3), a FOUP loader that can adjust the FOUP setting direction is described. In the FOUP loading machine, a notch is formed in the stage (the connecting plate and the container-mounted sheet), and a cylindrical portion that can be rotated and raised and lowered is disposed in the notch. The upper end of the tubular portion is provided with a mounting plate on which the FOUP is mounted. Further, a motor for driving the tubular portion is provided in the support piece provided below the stage. According to the above configuration, it is not necessary to provide a large device (the grip for operating the FOUP), and the direction in which the FOUP is set can be adjusted so that the outlet of the FOUP is directed to the semiconductor manufacturing apparatus. Φ [Invention] In the clean room with the FOUP loader, the space that can be used is extremely important. In order to expand it as much as possible, it is expected to be effective for the space below the stage. The clamp mechanism disclosed in the above documents (1) and (2) is configured to include an actuator such as a cylinder and a motor for driving the claw portion for clamping. Further, the above actuator is provided in a space below the stage where the FOUP is fixed. Therefore, the space below the stage is occupied by the actuators or the like, and the space below the stage cannot be effectively utilized. Further, as described above, the clamp mechanism described in the documents (1) and (2) is not provided with the above-described tubular portion or motor below the stage in the space below the stage. Therefore, the technique as in the literature (3) cannot be applied. In addition, when using the clamp mechanism described in documents (1) and (2), when the FOUP is docked to the door, the FOUP is placed after the stage, and (1) the clamping operation and (2) the docking operation are required. The stage is broken and the cycle time of the two-stage quantity must be formed. 0 Accordingly, it is an object of the present invention to provide a clamping mechanism that can effectively utilize the space below the stage. Further, another object of the present invention is to provide a clamping mechanism that clamps during a docking operation, thereby shortening the cycle time. In order to achieve the above object, the clamp mechanism of the present invention fixes the FOUP capable of accommodating the wafer on the stage, and closes the FOUP fixed to the stage with respect to the switch for the communication port of the substrate processing apparatus. The FOUP of the φ FOUP loader in which the inside of the FOUP is in close contact with the inside of the substrate processing apparatus is fixed to the clamping mechanism for the stage. Further, the clamp mechanism includes a plate-shaped first stage that is movable in a butting direction in which the butting direction is formed and a non-butting direction opposite to the butting direction with respect to the upper portion of the FOUP loader main body portion. Providing a plate-shaped second stage movable in the mating direction and the non-docking direction with respect to an upper portion of the first stage; extending in a horizontal direction and orthogonal to the mating direction and the non-butting direction a rotation shaft that rotatably supports a clamping rod above the second stage; and a first member -6 - 200941632 that moves the second stage toward the non-contacting direction with respect to the first stage; and The second member. The clamping lever is formed with a clamping claw portion that protrudes in the non-butting direction. The second member acts on the clamping lever to displace the clamping claw portion in a downward direction. a positioning recessed portion is formed in the bottom portion of the FOUP. The first stage is formed with a positioning convex portion that is fitted into the positioning recessed portion, and the positioning projection portion is fitted into the positioning recessed portion to make the first stage and the FOUP. Form an integrated movable state. Further, the gripping claw portion is housed in a clip H tight recessed portion formed at the bottom of the FOUP, and the second mount is moved toward the non-dutecting direction with respect to the second mount by the gripping claw portion. The inner wall surface on the non-butting direction side of the clamping recessed portion is pressed downward from the upper side toward the clamped portion formed in the abutting direction, and the FOUP is fixed to the stage, and according to the above configuration, Below the table (the first stage and the second stage), the FOUP can be clamped without providing an actuator such as a cylinder or a motor, so that the space below the stage is not occupied. Therefore, the space under the cymbal of the stage can be effectively utilized. Further, by clamping in the docking operation, a clamping mechanism with a reduced cycle time can be obtained. Further, in the clamp mechanism according to the present invention, the first member may be an elastic member that connects the second stage and the first stage. Thereby, the first member can be easily constructed. Here, the elastic member is a member that is stretchable and highly elastic, and specifically corresponds to a metal spring (such as a coil spring), a resin spring, rubber, or the like. Further, the clamp mechanism according to the present invention may further include a stopper that is fixed to the FOUP loader main body portion and that restricts movement of the second stage toward the non-dual direction of the 200941632. Thereby, the FOUP is lowered from the upper side and set, and the clamping claw portion can be surely accommodated in the position for clamping the recessed portion. Further, the clamp mechanism according to the present invention further includes: a first contact portion provided in the first stage and the second contact portion, and the first contact portion is disposed on the side of the butting direction with respect to the first contact portion In the second contact portion, when the first stage and the FOUP are moved in the mating direction, the second contact portion may be pressed by the first contact portion to cause the first stage, the FOUP, and the The second stage is integrally moved. When the first stage, the FOUP, and the second stage are integrally moved as described above, the movement of the second stage is stabilized by the pressing of the first contact portion with respect to the second contact portion. Further, when the second stage is moved, the load applied to the clamp rod can be reduced. Further, in the clamp mechanism according to the present invention, the second member is an elastic member provided on an upper portion of the second stage, and the clamp rod is formed with a convex portion that protrudes in the abutting direction, and the second member The convex portion may be sandwiched between the convex portion and the second stage, and the convex portion may be pressed from the upper side to the lower side. Thereby, the second member can be easily configured. Here, the elastic member is a member that is stretchable and has high elasticity, and specifically corresponds to a metal spring (such as a coil spring), a resin spring, rubber, or the like. Further, in the clamp mechanism according to the present invention, the second stage may form a restricting portion that restricts the amount of displacement of the convex portion in the upward direction. According to this configuration, the inclination of the clamp lever is restricted, so that even when the clamp force is large, the clamp claw portion can be passed over the clamped portion. Further, the clamping mechanism according to the present invention further includes a roller rotatably supported by a rotating shaft extending in the horizontal direction of the water -8-200941632 and orthogonal to the mating direction and the non-butting direction, the roller The child may be disposed at the front end of the clamping claw portion. Thereby, at the time of clamping of the FOUP, the clamping claw cannot easily pass over the clamped portion, and the clamping is easily formed. Further, in the clamp mechanism according to the present invention, the second stage and the first stage may be connected via a linear motion guide provided along the mating direction and the non-butt direction. Therefore, with a simple configuration, the second stage can be moved in the butting direction and the non-butting direction with respect to the upper portion of the first stage. In order to complete and clarify the objects, features and effects of the present invention, the following detailed description will be described in detail. [Embodiment] Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. First, the overall configuration of a FOUP loader including a clamp mechanism according to an embodiment of the present invention will be described below using Figs. 1 and 2 . Fig. 1 and Fig. 2 are side elevational views showing a FOUP loader according to an embodiment of the present invention, and Fig. 2 is a schematic cross-sectional view taken along the line A-A' of Fig. 1 . (FOUP Loader) The FOUP loader 50 according to the present invention is shown in Fig. 1 and is used for internal and semi-conducting 200941632 body manufacturing apparatus (substrate processing apparatus) for connecting FOUP (Front Open Unified Pod) 2. The interface mechanism 'F〇UP2' is fixed relative to the FOUP loader 50. Also, the FOUP loader 50 is placed in a clean room. In the FOUP loader 50, the FOUP loader main body portion 50b is provided with a stage 51 on which a FOUP 2 capable of accommodating a plurality of wafers 9 is fixed. At this time, the FOUP 2 is fixed to the stage 51 by the action of the clamp mechanism 1. Further, the FOUP loader includes a wall portion 50c provided on the side of the semiconductor manufacturing apparatus, the wall portion 50c is formed with a communication port 5?h communicating with the semiconductor manufacturing apparatus, and a card door 50d is provided to shield the communication port 50h. In the state in which the FOUP 2 is provided, the stage 51 is provided with respect to the FOUP loading unit 50b so that the FOUP 2 and the trick 50d can be moved in the direction of the butting (the butting direction) and the opposite direction (the non-butting direction). Here, the stage 51 is composed of a stage base (first stage) and a clamp base (second stage) which will be described later. Further, the clamp mechanism 1 according to the present embodiment is configured to include the stage 1 as will be described later. Further, the FOUP loader 50 abuts the FOUP 2 with respect to the card door 50d, and then opens the door 50d and the lid portion 2d (described later) of the FOUP 2, thereby sealingly connecting the inside of the FOUP 2 and the inside of the semiconductor manufacturing apparatus. Furthermore, FOUP2 can also house a wafer. Next, the configuration of the FOUP 2 will be described below using Figs. 1 and 2 as follows. The FOUP 2 is used for transporting or storing the wafer 9 for accommodating an electronic device, and includes a casing 2b and a lid portion 2d that can be opened and closed with respect to the casing. Here, FOUP2 can be used for the transportation and storage of various substrates. Further, in a state in which the lid portion 2d is attached to the casing 2, the intrusion of foreign matter particles inside the FOUP 2 and the chemical -10-200941632 contamination inside the FOUP 2 are prevented. Further, when the transport robot FOUP2 is provided on the top of the casing 2b, the grip portion 2z for gripping is provided. In addition, as shown in the second figure, three positioning recesses to be described later are formed at the bottom of the FOUP 2, and the second figure is the top view. The bottom of the original positioning recess 2a FOUP2 is hidden, but the second figure is hidden. The illustration is illustrated. Further, as shown in the first part of the FOUP 2, a clamping recess 2h is provided. Further, in the fifth graph FOUP2 of the B-section in FIG. 2 (the oblique line of the cross section is omitted), the inner wall surface of the fifth graph FOUP2 in which the non-butting direction of the clamping recess 2h is viewed is formed. 2 c ° (clamping mechanism) protruding in the butt direction. Next, referring to FIG. 3, the clamping mechanism 1 will be described. FIG. 3 is an enlarged cross-sectional view showing the position of the BB' in the second drawing. ). Further, Fig. 3 is a view in which the FOUP 2 is omitted. The clamp mechanism 1 includes a stage 51. The stage 51 includes a stage first stage 3 and a clamp base (second stage) 4. For each detailed structure description. (Mount base) The stage base 3 is a plate-shaped member, and a movable guide 3g is integrally provided at the bottom. Further, the upper portion of the FOUP loader main body portion 50b is provided with a rail 5 Or in the direction and the non-butting direction. Further, the conveyance map such as the linear motion i indicates 2a. The position is shown in the figure B' position on the dotted line, on the side (the clamping part is as follows. (Omitted. On the base (hereinafter, the linear transport docking I piece 3g -11 - 200941632 and the track 5 Or bite each other, so that The linear motion guide 3g moves along the track 5 (^. According to the above-mentioned 'the upper portion of the stage base 3 with respect to the FOUP loader main body portion 5b', it is movable in the butting direction and the non-docking direction. Further, 'linear motion The guide member may be formed in a different member from the stage base and mounted on the stage base. Further, the upper portion of the stage base 3 is formed with a positioning convex portion 3a. Further, as shown in Fig. 5, the setting is set at F〇uP2. In the state of the stage base 3, the φ positioning convex portion 3a is fitted into the positioning concave portion 2a of the FOUP 2. Further, the positioning concave portion 2a is shown only one in the third figure, but as shown in Fig. 2, the stage is shown. In the upper portion of the base 3, three positioning convex portions 3a are formed at positions corresponding to the three positioning concave portions 2a of the F〇uP2. In the second drawing of the above figure, the positioning convex portion 3a is in a position where it cannot be hidden. The position you saw, but the second picture is for illustration. Further, the positioning convex portion 3a is fitted into the positioning concave portion 2a, whereby the stage base 3 and the FOUP 2 are integrally moved. That is, when the stage base 3 is moved by the movement on the rail 50r, 'FOUP2 and the stage The base 3 is moved as it is. Further, the upper portion of the stage base 3 is provided with a track 3r along the butting direction and the non-butting direction in a state where the stage base 3 is placed on the rail 5 (clamping base). Referring to Fig. 3, the clamping base 4 will be described as follows. The clamping base 4 is also a plate-shaped member, and the bottom is integrally provided with a linear motion guide 4g. And the 'linear motion guide 4g and the rail 31 are engaged with each other to make the linear The moving guide 4g moves along the rail 3r. According to the above, the clamping base -12-200941632 4 is formed to be movable in the mating direction and the non-docking direction with respect to the upper portion of the stage base 3. Further, the above linear motion guide is used. The piece 4g and the rail 3r' can be arranged in such a manner that the clamping base 4 can be moved in the butting direction and the non-butting direction with respect to the upper portion of the stage base 3. Moreover, the linear motion guide can also be formed and clamped. bottom The different members are mounted on the clamp 'tight base. Further, the upper portion of the clamp base 4 rotatably supports the clamp rod 5a. In the case of the φ body, the support portion 4c is formed on the upper portion of the clamp base 4. The shaft 5c attached to the support portion 4c rotatably supports the clamp rod 5a. Here, the shaft 5c of the clamp rod 5a extends in the horizontal direction and is orthogonal to the mating direction and the non-butting direction. The rotating shaft 5c is extended toward the direction perpendicular to the plane of the drawing of Fig. 3. The clamping lever 5a is rotated in the right and leftward rotation in Fig. 3. Further, the clamping lever 5a is formed with a clamping that protrudes in the butting direction. The claw portion 5b is used. Further, the clamp rod 5a is formed with a convex portion 5d that protrudes in the butting direction. Further, a coil spring 5 S as a second member is provided at a position 〇 between the convex portion 5d and the clamp base 4. The coil spring 5 s is immersed in the upper portion of the clamp base 4 in a state where the axial direction is aligned with the vertical direction as shown in Fig. 3 . Further, the coil spring 5s is composed of a coil spring and a shaft-like pressing portion 5k provided at an end portion thereof. The coil spring 5 s is configured to exert a force that pushes upward from the upper side to the pressing portion 5k that protrudes upward by the elastic force in the direction in which the spring extends. Further, the coil spring 5s constantly presses the convex portion 5d from the upper side to the lower side, whereby the clamp rod 5a is given a right-rotational rotation force of the third figure. Further, as a result of the formation of the coil spring 5s with respect to the clamp rod 5a, the claw portion 5b for clamping -13 - 200941632 is displaced downward. Further, the restricting portion 4a is fixedly disposed on the clamp base 4 by the bolt 4t. The front end portion of the restricting portion 4a is disposed above the convex portion 5d to allow a predetermined displacement amount in the vertical direction with respect to the convex portion 5d, thereby restricting the amount of displacement toward the upper direction of the convex portion 5d, that is, the rotatable lever 5a is rotatable angle. Here, in order to rotatably support the clamp rod 5a in the protruding direction of the clamping claw portion 5b and the convex portion 5d, in the present embodiment, the FOUP 2 is clamped by the clamping claw φ portion 5b ( Referring to Fig. 6 and Fig. 7), the protrusion is formed in the non-butting direction and the docking direction. Further, in the present embodiment, the rotatable angle of the clamp lever 5a, that is, the swingable width of the clamp claw portion 5b is the position of the push portion 5k in which the coil spring 5s is most shortened, and the front end of the restricting portion 4a. The position of the department is determined, so its width is not large. Therefore, both the state in which the FOUP 2 is clamped by the clamp mechanism 1 (Fig. 6 and Fig. 7) and the state in which the FOUP 2 is not clamped (Figs. 3 to 5), the gripping claw portion 5b and the convex portion 5d is a state in which the clamp rods 5a are respectively protruded toward the substantially non-butting direction and the substantially butted direction, and the clamp claws 5b are inclined in the downward direction as compared with the clamped state (refer to Fig. 3). ~ Figure 5). Further, the second base portion 4b is formed to protrude downward from the clamp base 4, and the first base portion 3b is provided on the stage base 3. The first contact portion 3b includes a holder portion 3h fixed to the stage base 3 and a holder 3t penetratingly provided toward the holder portion 3h in the butting direction and the non-butting direction. Further, the amount of rotation of the bolt 3t can be adjusted by adjusting the amount of rotation of the bolt 3t. Further, the second contact portion 4b is disposed closer to the butting direction side than the first contact portion 3b -14-
200941632 。並且’載台底座3及FOUP2朝t 接觸部3b推壓第2接觸部4b， FOUP2及夾緊底座4形成一體移動· 5圖表示，FOUP2未被夾緊機構1序 使第2接觸部4b與第1接觸部3b不 7圖表示，FOUP2藉著夾緊機構1夾 觸部4b與第1接觸部3b是形成接觸 4b與第1接觸部3b接觸時的夾緊底 位置關係可藉著調整螺栓3t的旋轉舅 此外，在夾緊用爪部5b的前端 的方向延伸的轉軸5j，可旋轉地支彳 滾子5e在第3圖中可右旋轉及左旋幸 又，夾緊底座4設有連接部4f， 部3f，連接部4f與連接部3f是藉著 4s連接。亦即，夾緊底座4與載台庭 4s加以連接。並且，FOUP2在夾緊 彈簧4s在伸長的狀態下，即受到朝 設定。因此，螺旋彈簧4s使得夾緊 座3(即以載台底座3爲基準表示的 接方向移動。 又，FOUP載入機主體部50b 5 0s，在夾緊底座4形成有與止動件 觸部4m。詳細雖如後述，但是止動 緊底座4朝著非對接方向移動之用。 ί接方向移動時，第1 藉以使載台底座3、 =在此，如第3圖〜第 ί夾緊的狀態下，配置 7接觸，如第6圖、第 緊的狀態下，第2接 丨。並且，第2接觸部 座4與載台底座3的 t加以調整。 經由朝平行於轉軸5c 障著滾子5 e。因此， I地轉動。 載台底座3設有連接 :第1構件的螺旋彈簧 ί座3是藉著螺旋彈簧 前的初期狀態，螺旋 :縮短方向彈力的狀態 底座4相對於載台底 ]場合）作用朝著非對 的上部固定著止動件 5〇s接觸的止動件接 件50s是作爲限制夾 藉此，夾緊底座4藉 -15- 200941632 著螺旋彈簧4s的作用，即使賦予載台底座3朝著非對接 方向移動的力’在止動件50s的位置，由於止動件接觸部 4m與止動件50s接觸，因此使得夾緊底座4不能移動至 比止動件50s位置更接近非對接方向側。 在此，止動件50s，設置不與載台底座3接觸。爲此 ，止動件50s在第3圖中虛線表示的部份是避免與載台底 座3的接觸’並且迂迴形成可與夾緊底座4的止動件4的 φ 止動件接觸部4m接觸。又，止動件不限於以上的形態， 也可以設置貫穿設於載台底座的貫穿溝槽。又，止動件與 夾緊底座4的位置關係不限於上述，例如也可以止動件不 由下方’而是從側方、上方延伸，對於止動件與夾緊底座 4的接觸位置，也可以不是在夾緊底座4的非對接方向側 接觸。 又，止動件5 0s雖是直接固定在FOUP載入機主體部 50b，但是不限於此一形態。止動件50s也可以固定設置 〇 在不相對於基部（設置FOUP載入機主體部50b的基部） 移動之物（例如’載台底座3、夾緊底座4相對於設有 FOUP載入機主體部50b的基部移動），或固定在其他的 位置上。 (夾緊動作） 接著’一邊參閱桌4圖〜第7圖’針對以上所構成的 夾緊機構1的夾緊動作說明如下。第4圖〜第7圖爲第2 圖B-B’位置的剖面槪略圖，表示動作過程。又，第4圖〜 -16- 200941632 第7圖中，表示省略顯示剖面的斜線。 FOUP2被夾緊前的初期狀態中，螺旋彈簧4s是形成 伸長的狀態’又’螺旋彈簧5s是形成縮短的狀態。並且 ’夾緊用爪部5b (與夾緊狀態比較）是朝著下方位移的方 向傾斜。 首先’藉著未圖示的搬運用機器人，把持著FUOP2 的把持部2z ’朝著FOUP載入機50的夾緊機構1的上方 〇 搬運F0UP2 °並且’藉著搬運用機器人的動作，使FOUP2 朝著夾緊機構1的方向下降（參閱第4圖）。 並且’更使得FOUP2下降，將載台底座3的定位用 突部3a嵌入FOUP2底部的定位用凹部2a(參閱第5圖（ 箭頭方向C))內。藉此，將FOUP2設定在載台底座3上 ’設定後，載台底座3及FOUP2形成一體移動。在此， 如上述’夾緊底座4藉著螺旋彈簧4s賦予相對於載台底 座3朝著非對接方向移動的力。另一方面，由於設有止動 G 件50s ’夾緊底座4不會較止動件50s的位置更朝著非對 接方向移動。因此，FOUP2從上方下降設定到載台底座3 上時’夾緊用爪部5b與被夾緊部2c不會接觸，在夾緊用 爪部5b可收容在夾緊用凹部2h的位置上，可配置夾緊用 爪部5b。因此，FOUP2的設定時，夾緊用爪部5b可確實 被收容在夾緊用凹部2h內。 接著’藉搬運用機器人的動作，FOUP2與載台底座3 朝著對接方向移動（參閱第5圖（箭頭〇))。此時，夾 緊底座4藉著螺旋彈簧4s的作用，對於載台底座3賦予 -17- 200941632 朝著非對接方向移動的力，但是藉著固定設置在FOUP2 載入機主體部50b的止動件50s，限制朝著非對接方向的 移動。因此’夾緊底座4靜止在止動件50s與止動件接觸 部4m的接觸位置上’僅使得FOUP 2及載台底座3朝著對 接方向移動。此時’螺旋彈簧4s根據其彈性而縮短。並 且，在此是採用彈性構件的螺旋彈簧4s，因此可簡易的構 成形成第1構件。 φ 如上述’夾緊動作時的初期狀態中’夾緊用爪部5b 與（夾緊時）朝著非對接方向突出的狀態比較，形成朝下 方位移的方向傾斜。並藉著限制部4a，限制凸部5d朝著 上方的位移量。在此，藉著夾緊用爪部5b可確實地夾緊 FOUP2’夾緊力大較爲理想，並且夾緊用爪部5b的可旋 轉角度較大較爲理想（亦即’夾緊用爪部5b越是向下方 位移越大越好）。但是’夾緊用爪部5b的可旋轉角度大 的狀態下夾緊力一旦增大時，初期狀態下，夾緊用爪部5b 0 會朝下方形成大的位移狀態。因此，從夾緊時該等接觸角 度的觀點來看’夾緊用爪部5b跨越被夾緊部2c困難。 爲此’設置限制部4 a以藉此限制夾緊桿5 a的傾斜， 即使夾緊力大的場合’仍可以使夾緊用爪部5b跨在被夾 緊部2 c上。並且’限制部4 a藉著高度不同的其他限制部 的更換’或在限制部4a與夾緊底座4之間插入另外準備 的間隔件等’可以調整初期狀態的夾緊用爪部5 b的傾斜 。又’ FOUP2朝著對接方向移動，夾緊用爪部5b跨越被 夾緊部2c之上時’藉著滾子5e的作用，使夾緊用爪部5b -18 - 200941632 與被夾緊部2c順利接觸，因此夾緊用爪部可容易跨過被 夾緊部2 c ’容易形成夾緊。又，在此採用彈性構件的螺旋 彈簧5 S，可獲得簡易構成的第2構件。 並且’被夾緊部2c之上跨過夾緊用爪部5b之後，夾 緊底座4的位置在不變的狀態下，FOUP2及載台底座3更 朝著對接方向移動。換言之，夾緊底座4相對於載台底座 3朝著對接方向移動。並且，夾緊用爪部5b將被夾緊部 φ 2c從上方向下方推壓，藉以使F〇uP2固定在載台51 (載 台底座3及夾緊底座4)上（參閱第6圖）。又，在此一 時刻（參閱第6圖）第1接觸部3b與第2接觸部4b是形 成接觸的狀態。 根據上述’載台51 (載台底座及夾緊底座）的下方空 間50u內，不設置汽缸或馬達等的致動器，可進行f〇UP2 的夾緊’因此不會佔有載台51的下方空間50u(參閱第1 圖）。藉此，可有效活用載台51的下方空間50u，可有效 〇 活用FOUP2載入機主體部50b的內部空間50i。因此，例 如也可以將夾緊機構1運用在上述文獻（3)中所記載的 技術內。 又’不使用汽缸或馬達等的複雜機構的致動器，藉著 彈性構件所賦予旋轉力的夾緊用爪部5b，採用可推壓被夾 緊部2c的單純機構，藉此獲得製造•維持用之成本低的 夾緊機構。 接著，藉搬運用機器人的動作，使FOUP2更朝著對 接方向移動，到達對接位置，將FOUP2與埠門50d對接 -19- 200941632 (參閱第7圖）°此時’形成第1接觸部3b推壓 觸部4b。因此FOUP2朝對接方向移動時，隨之毒 3也朝著對接方向移動’更隨著載台底座3夾緊底 朝著對接方向移動。其結果，載台底座3、F〇uP2 底座形成一體移動。根據以上的構成，載台底 FO UP 2及夾緊底座形成一體移動時，第1接觸部 第2接觸部4b，藉此穩定夾緊底座4的移動。在財 φ ”即是例如與夾緊底座4根據被夾緊部2c推壓夾 而朝著對接方向移動的場合比較，夾緊底座4的穫 。因此，夾緊底座4的移動時，可減輕施予夾緊年j 負荷。 如上述’完成FOUP2的對接，隨後開放埠門 FOUP2的蓋部2d(後述），密閉連通FOUP2的內 導體製造裝置的內部。並且，FOUP2內的晶圓 藉著未圖示的基板搬運機器人取出，搬運到半導體 Q 置內部的預定位置。 如上述，夾緊機構1中，在對接動作中進行 的夾緊。因此，與夾緊動作及對接動作分別進行的 較，可獲得循環時間短的夾緊機構。 (變形例） 接著，針對本發明所涉及夾緊機構的變形例， 閱第8、9圖，一邊以上述實施形態不同的部份爲 明如下。第8圖爲第1變形例，第9圖爲第2變形 第2接 3台底座 座4也 及夾緊 座 3、 3b推壓 :”穩定 緊桿5a 丨定移動 ! 5a的 5〇d及 部與半 _板）9 製造裝 FOUP2 場合比 一邊參 中心說 例的放 -20- 200941632 大剖面槪略圖。再者，賦予符號200、204、204e、 205a 、 205b 、 205c 、 205d 、 205e 、 205s 、 300 、 304 、205a、305b、305c、305d、305e、305s 的部份是 實施形態中’相當於賦予符號1、4、4a、4c、5a、 、5d、5e、5s、1、4、4a、5a、5b、5c、5d、5e、5 份。 首先，針對第1變形例涉及的夾緊機構200, 0 圖表示，與上述實施形態在夾緊桿的構造上不同。 例涉及的夾緊桿205 a與上述實施形態不同，構成 。並且，夾緊桿2〇5a藉著安裝在支撐部2 04c的轉 轉地被支撐著。根據以上形態的夾緊機構2 0 0也可 與上述實施形態相同的效果。 又，針對第2變形例涉及的夾緊機構3 00，同 9圖表示，與上述實施形態在在夾緊的構造上不同 形例所涉及的夾緊桿3 0 5 a是與上述的實施形態不 ❹ 非設置在夾緊底座上部的支撐部（4c、204c )，而 撐在夾緊桿3 04主體部的上部。並且，同樣地夾緊；f 藉著轉軸3 05c可旋轉地被支撐著。根據以上形態 機構300也可以獲得與上述實施形態相同的效果。 以上，針對本發明的實施形態已作說明，但是 不僅限於上述的實施形態，在申請專利記載的範圍 行種種變更加以實施。 例如，上述的實施形態中，使用彈性構件作爲 第2構件。並且，第1構件具有相對於第2載台賦 204c、 、3 04 a 上述的 5b、5 c s的部 如第8 本變形 爲線性 軸可旋 以獲得 樣如第 。本變 同，並 是被支 旱 3 05a 的夾緊 本發明 內可進 第卜 予直線 -21 - 200941632 移動力的功能，第2構件具有相對於夾緊桿賦予旋轉力的 功能即可，該等可不限於彈性構件。例如，第1、第2構 件也可以是電子控制的機構（馬達等），或汽缸、油壓缸 等。並且，彈性構件在上述實施形態雖是使用螺旋彈簧， 但是在此的彈性構件，爲可伸縮且高彈性的構件，不限於 螺旋彈簧。因此也可以是樹脂彈簧、橡膠等。 以上之本發明較佳實施形態與圖式係僅作爲本發明技 0 術內容說明之用，並非用以限制本發明之權利範圍，因此 在不脫離本發明之精神主旨的前提下可進行種種的變形與 變更。 【圖式簡單說明】 第1圖爲包含本發明之一實施形態所涉及夾緊機構的 FOUP載入機的側面槪略圖。 第2圖爲第1圖的A-A’箭頭方向上面槪略圖。 Q 第3圖爲第2圖的B-B’位置的放大剖面槪略圖。 第4圖是表示FOUP搬運到夾緊機構上方的狀態，第 2圖的B-B’位置的剖面槪略圖。 第5圖是表示FOUP設定在載台底座的狀態，第2圖 的B-B’位置的剖面槪略圖。 第6圖是表示FOUP藉著夾緊機構夾緊的的狀態’第 2圖的B-B’位置的剖面槪略圖。 第7圖是表示F 0UP相對於埠門呈對接的狀態’第2 圖的B-B’位置的剖面槪略圖。 -22- 200941632 第8圖是表示夾緊機構的第1變形例的放大剖面槪略 圖。 第9圖是表示夾緊機構的第2變形例的放大剖面槪略 圖。 【主要元件符號說明】 1、200、3 0 0 :夾緊機構200941632. Further, the "mount base 3 and the FOUP 2 push the second contact portion 4b toward the t contact portion 3b, and the FOUP 2 and the clamp base 4 are integrally moved. FIG. 5 shows that the FOUP 2 is not subjected to the second contact portion 4b by the clamp mechanism 1 and The first contact portion 3b is not shown in Fig. 7, and the FOUP 2 can be adjusted by the clamping mechanism 4b and the first contact portion 3b when the contact 4b is in contact with the first contact portion 3b. In addition, the rotating shaft 5j extending in the direction of the front end of the clamping claw portion 5b rotatably supports the roller 5e. In the third drawing, the right rotation and the left rotation are performed. The clamping base 4 is provided with a connecting portion. 4f, part 3f, the connection part 4f and the connection part 3f are connected by 4s. That is, the clamping base 4 is coupled to the stage 4s. Further, the FOUP 2 is set toward the state in which the clamp spring 4s is in an extended state. Therefore, the coil spring 4s moves the clamp base 3 (i.e., the joint direction indicated by the stage base 3). Further, the FOUP loader main body portion 50b 50s is formed with the stopper portion at the clamp base 4 4m. Although it will be described later in detail, it is used to move the base 4 in the non-docking direction. When moving in the direction of the y, the first base is used to make the stage base 3, = here, as shown in Fig. 3 to ί In the state of the arrangement 7, the contact is arranged, as shown in Fig. 6, in the tight state, the second port is connected, and the second contact portion 4 and the stage base 3 are adjusted by t. The obstacle is blocked by parallel to the rotating shaft 5c. The roller 5 e. Therefore, the ground is rotated. The stage base 3 is provided with a connection: the coil spring of the first member ί the seat 3 is in the initial state before the coil spring, and the screw: the state in which the direction is elastic is shortened. The bottom of the table] occasionally acts as a limiting clip to the non-paired upper portion of the stop member 5 s s contacts. The clamping base 4 acts as a coil spring 4s by -15-200941632. Even if the force that gives the stage base 3 to move in the non-butting direction is at the position of the stopper 50s Since the stopper contacting portion 4m 50s in contact with the stopper member, so that the clamp can not move to the base 4 than the stopper 50s a position closer to the non-mating side direction. Here, the stopper 50s is disposed not in contact with the stage base 3. To this end, the portion of the stopper 50s indicated by the broken line in Fig. 3 is to avoid contact with the stage base 3 and to form a contact with the φ stopper contact portion 4m of the stopper 4 of the clamp base 4. . Further, the stopper is not limited to the above embodiment, and a through groove provided through the base of the stage may be provided. Moreover, the positional relationship between the stopper and the clamping base 4 is not limited to the above. For example, the stopper may extend from the side and the upper side without the lower portion, and the contact position of the stopper with the clamping base 4 may also be It is not in contact with the non-butting direction side of the clamp base 4. Further, although the stopper 50s is directly fixed to the FOUP loader main body portion 50b, it is not limited to this configuration. The stopper 50s may also be fixedly disposed so as not to move relative to the base (the base on which the FOUP loader main body portion 50b is disposed) (for example, the stage base 3 and the clamp base 4 are opposite to the FOUP loader body). The base of the portion 50b is moved, or fixed at another position. (Clamping operation) Next, referring to Table 4 to Figure 7, the clamping operation of the above-described clamping mechanism 1 will be described below. Fig. 4 to Fig. 7 are schematic sectional views showing the position of Fig. 2B-B', showing the operation process. Further, in Fig. 4 to -16 - 200941632, Fig. 7 shows a diagonal line in which the cross section is omitted. In the initial state before the FOUP 2 is clamped, the coil spring 4s is in a state of being stretched, and the coil spring 5s is formed in a shortened state. Further, the 'clamping claw portion 5b (compared to the clamped state) is inclined in the direction of being displaced downward. First, the handling unit 2z' holding the FUOP2 is transported to the top of the clamp mechanism 1 of the FOUP loader 50 by the transport robot (not shown), and the FOUP2 is moved by the operation of the transport robot. Lowering in the direction of the clamping mechanism 1 (see Fig. 4). Further, the FOUP 2 is lowered, and the positioning projection 3a of the stage base 3 is fitted into the positioning recess 2a at the bottom of the FOUP 2 (see Fig. 5 (arrow direction C)). Thereby, after the FOUP 2 is set on the stage base 3, the stage base 3 and the FOUP 2 are integrally moved. Here, the above-mentioned 'clamping base 4' imparts a force to move in the non-butting direction with respect to the stage base 3 by the coil spring 4s. On the other hand, since the stopper G member 50s is provided, the clamping base 4 does not move more toward the non-contacting direction than the position of the stopper 50s. Therefore, when the FOUP 2 is lowered from the upper side to the stage base 3, the 'clamping claw portion 5b does not contact the clamped portion 2c, and the clamp claw portion 5b can be accommodated in the clamp recess 2h. The clamping claw portion 5b can be disposed. Therefore, when the FOUP 2 is set, the clamping claw portion 5b can be surely accommodated in the clamping recess 2h. Then, by the operation of the transport robot, the FOUP 2 and the stage base 3 move in the butting direction (see Fig. 5 (arrow 〇)). At this time, the clamp base 4 imparts a force for moving the -17-200941632 toward the non-butting direction to the stage base 3 by the action of the coil spring 4s, but is fixed by the FOUP2 loader main body portion 50b. Piece 50s, restricting movement toward the non-docking direction. Therefore, the 'clamping base 4 is stationary at the contact position of the stopper 50s with the stopper contact portion 4m' only causes the FOUP 2 and the stage base 3 to move in the abutting direction. At this time, the coil spring 4s is shortened in accordance with its elasticity. Further, since the coil spring 4s using the elastic member is used here, the first member can be formed in a simple manner. φ is in the initial state at the time of the "clamping operation", and the clamping claw portion 5b is inclined in the direction of the lower displacement as compared with the state in which the clamping claw portion 5b protrudes in the non-butting direction. The amount of displacement of the convex portion 5d toward the upper side is restricted by the restricting portion 4a. Here, it is preferable that the clamping force of the FOUP 2' can be surely clamped by the clamping claw portion 5b, and the angle of rotation of the clamping claw portion 5b is large (i.e., 'clamping claw The more the portion 5b is displaced downward, the better.) However, when the clamping force is increased in a state where the rotatable angle of the clamping claw portion 5b is large, the clamping claw portion 5b0 is formed in a large displacement state downward in the initial state. Therefore, it is difficult for the clamping claw portion 5b to span the clamped portion 2c from the viewpoint of the contact angle at the time of clamping. For this reason, the restriction portion 4a is provided to restrict the inclination of the clamp rod 5a, and even when the clamping force is large, the clamp claw portion 5b can be straddled on the clamped portion 2c. Further, the 'restriction portion 4a is replaced by another restriction portion having a different height' or a separately prepared spacer or the like is inserted between the restriction portion 4a and the clamp base 4, and the clamping claw portion 5b in the initial state can be adjusted. tilt. Further, the 'FOUP 2 moves in the butting direction, and when the clamping claw portion 5b straddles the clamped portion 2c, the gripping claw portion 5b -18 - 200941632 and the clamped portion 2c are acted by the action of the roller 5e. Since it is in smooth contact, the clamping claw portion can easily form a clamp easily across the clamped portion 2c'. Further, by using the coil spring 5 S of the elastic member, a second member having a simple configuration can be obtained. Further, after the clamped portion 2c has traversed the clamp claw portion 5b, the position of the clamp base 4 is kept constant, and the FOUP 2 and the stage base 3 are moved in the butting direction. In other words, the clamping base 4 moves in the butting direction with respect to the stage base 3. Further, the clamping claw portion 5b presses the clamped portion φ 2c from the upper side to the lower side, thereby fixing the F〇uP2 to the stage 51 (the stage base 3 and the clamp base 4) (see Fig. 6). . Further, at this point (see Fig. 6), the first contact portion 3b and the second contact portion 4b are in contact with each other. According to the above-described 'lower space 50u of the stage 51 (stage base and clamping base), the actuator of the cylinder or the motor is not provided, so that the clamping of the f〇UP2 can be performed, so that the lower side of the stage 51 is not occupied. Space 50u (see Figure 1). Thereby, the space 52u below the stage 51 can be effectively utilized, and the internal space 50i of the FOUP2 loader main body portion 50b can be effectively utilized. Therefore, for example, the clamp mechanism 1 can be applied to the technique described in the above document (3). Further, the actuator that does not use a complicated mechanism such as a cylinder or a motor is manufactured by a simple mechanism that can press the clamped portion 2c by the clamping claw portion 5b that imparts a rotational force by the elastic member. Maintain a low cost clamping mechanism. Then, by the operation of the transport robot, the FOUP 2 is moved in the docking direction to reach the docking position, and the FOUP 2 is docked with the trick 50d -19-200941632 (see Fig. 7). At this time, the first contact portion 3b is pushed. Pressure contact portion 4b. Therefore, when the FOUP 2 moves in the butting direction, the poison 3 also moves toward the docking direction, and the base of the stage base 3 is moved toward the docking direction. As a result, the stage base 3 and the F〇uP2 base are integrally moved. According to the above configuration, when the stage bottom FO UP 2 and the clamp base are integrally moved, the first contact portion second contact portion 4b stabilizes the movement of the clamp base 4. In the case of the yelling, for example, when the clamping base 4 is moved in the butting direction according to the clamped portion 2c, the clamping base 4 is obtained. Therefore, the movement of the clamping base 4 can be alleviated. The clamping period j load is applied. As described above, the completion of the FOUP 2 is completed, and then the lid portion 2d (described later) of the door FOUP 2 is opened, and the inside of the inner conductor manufacturing device of the FOUP 2 is hermetically sealed. Moreover, the wafer in the FOUP 2 is not passed. The substrate transfer robot shown in the drawing is taken out and transported to a predetermined position inside the semiconductor Q. As described above, the clamp mechanism 1 performs the clamping during the docking operation. Therefore, compared with the clamp operation and the docking operation, respectively. A clamping mechanism having a short cycle time can be obtained. (Modification) Next, a modification of the clamp mechanism according to the present invention will be described below with reference to Figs. 8 and 9. The figure shows a first modification, and the ninth figure shows the second deformation. The second base 3 and the bases 4 and the clamps 3 and 3b are pressed: "The stabilizer 5a is fixed and moved! 5a's 5〇d and parts are Half_board) 9 manufacturing FOUP2 occasion than one side The center said that patients put -20-200941632 Coming to a large cross-section sketch. Furthermore, the portions assigned the symbols 200, 204, 204e, 205a, 205b, 205c, 205d, 205e, 205s, 300, 304, 205a, 305b, 305c, 305d, 305e, 305s are equivalent to the assigned symbols in the embodiment. 1, 4, 4a, 4c, 5a, 5d, 5e, 5s, 1, 4, 4a, 5a, 5b, 5c, 5d, 5e, 5 parts. First, the clamp mechanism 200, 0 shown in the first modification is different from the above-described embodiment in the structure of the clamp lever. The clamp lever 205a according to the example is different from the above embodiment. Further, the clamp lever 2〇5a is supported by the rotation of the support portion 248c. The clamp mechanism 2000 according to the above aspect can also have the same effects as those of the above embodiment. Further, the clamp mechanism 3 00 according to the second modification is the same as the above-described embodiment, and the clamp lever 3 0 a according to the configuration of the above-described embodiment is different from the above-described embodiment. It is not provided on the support portion (4c, 204c) at the upper portion of the clamp base, but is supported on the upper portion of the main body portion of the clamp rod 304. And, similarly clamped; f is rotatably supported by the rotating shaft 3 05c. According to the above-described mode mechanism 300, the same effects as those of the above embodiment can be obtained. Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various modifications are possible within the scope of the invention. For example, in the above embodiment, an elastic member is used as the second member. Further, the first member has a portion of 5b, 5c s as described above with respect to the second stage assignment 204c, and 307a, and the eighth embodiment is deformed to a linear axis to obtain a sample. The present invention is the same as the function of the movable force of the present invention, and the second member has a function of imparting a rotational force with respect to the clamp rod, and the second member has a function of imparting a rotational force with respect to the clamp rod. Etc. may not be limited to an elastic member. For example, the first and second members may be electronically controlled mechanisms (motors, etc.), or cylinders, hydraulic cylinders, and the like. Further, although the elastic member is a coil spring in the above embodiment, the elastic member is a member that is stretchable and highly elastic, and is not limited to a coil spring. Therefore, it may be a resin spring, rubber or the like. The above-described preferred embodiments and the drawings of the present invention are intended to be illustrative only, and are not intended to limit the scope of the present invention. Deformation and change. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side elevational view showing a FOUP loader including a clamp mechanism according to an embodiment of the present invention. Fig. 2 is a schematic diagram of the upper side of the arrow A-A' in the first figure. Q Fig. 3 is an enlarged cross-sectional view showing the position of B-B' in Fig. 2; Fig. 4 is a schematic cross-sectional view showing the state in which the FOUP is transported to the upper side of the clamp mechanism, and the position of B-B' in Fig. 2; Fig. 5 is a schematic cross-sectional view showing the state in which the FOUP is set on the stage base, and the position of B-B' in Fig. 2 is shown. Fig. 6 is a schematic cross-sectional view showing the state of the FOUP clamped by the clamp mechanism, at the position B-B' in Fig. 2; Fig. 7 is a schematic cross-sectional view showing the state of F 0UP in a state of being docked with respect to the cardia, and at the position of B-B' in the second figure. -22- 200941632 Fig. 8 is an enlarged cross-sectional schematic view showing a first modification of the clamp mechanism. Fig. 9 is an enlarged cross-sectional schematic view showing a second modification of the clamp mechanism. [Main component symbol description] 1,200,300 0: clamping mechanism
© 2：F〇UP 2a :定位用凹部 2 c :被夾緊部 2 w :非對接方向側的內壁面 3:載台底座（第1載台） 3 a :定位用凸部 3 b :第1接觸部 3r :軌道 Q 4:夾緊底座（第2載台） 4a :限制部 4b :第2接觸部 4g :線性運動導件 4s :螺旋彈簧 5a :夾緊桿 5b :夾緊用爪部 5c :轉軸（夾緊桿用） 5 d :凸部 -23- 200941632 5 e :滾子 5j :轉軸（滾子用） 5 s ’·螺旋彈簧（第2構件） 9 :晶圓 50 : FOUP載入機 50b : FOUP載入機主體部 5 0 d :埠門 5〇h :連通口 5 0 s :止動件 5 1 :載台© 2: F〇UP 2a : positioning recess 2 c : clamped portion 2 w : inner wall surface 3 on the non-butting direction side: mount base (first stage) 3 a : positioning projection 3 b : 1 contact portion 3r: rail Q 4: clamping base (second stage) 4a: restricting portion 4b: second contact portion 4g: linear motion guide 4s: coil spring 5a: clamping rod 5b: clamping claw 5c : Shaft (for clamping rod) 5 d : Projection -23- 200941632 5 e : Roller 5j: Shaft (for rollers) 5 s '·Coil spring (2nd member) 9 : Wafer 50 : FOUP Access machine 50b: FOUP loader main body part 5 0 d : 埠门 5〇h : communication port 5 0 s : stopper 5 1 : stage
-24--twenty four-