KR101386618B1 - Clamp mechanism - Google Patents

Abstract

The carrier base 3 is provided to be movable with respect to the upper part of the FOUP opener main body part 50b, and the clamp base 4 is provided to be movable with respect to the upper part of the carrier base 3. The clamp lever 5a is rotatably supported in the upper part of the clamp base 4 by the rotation shaft 5c, and the clamping latch 5b for clamp clamp 5a is formed. The carrier base 3 and the FOUP 2 are integrally moved. The FOUP 2 is fixed to the mounting table 51 by pressing the picked-up clamp portion 2c from the upper portion downward by pressing the clamped portion 5b accommodated in the clamped recess portion 2h.

FOUP, Carrier Base, Clamp Base, Clamp Lever, Clamp Engagement, Dock Direction, Undocking Direction,

Description

Clamp mechanism

The present invention relates to a clamp mechanism for fixing a FOUP containing a wafer to a mounting table (or mounting table).

In a clean room, Front Open Unified Pod may be used to receive, transport or store wafers for electronic devices. In order to communicate the inside of the FOUP and the inside of the semiconductor manufacturing apparatus, the FOUP is fixed to an interface mechanism called a FOUP opener (or load port). In the FOUP opener, the FOUP is docked in a port door that shields the communication port into the semiconductor manufacturing apparatus, and the interior of the FOUP and the semiconductor manufacturing apparatus are hermetically communicated to make the interior of the FOUP and the semiconductor manufacturing apparatus highly clean. The other side can be made low clean, and the cost of installation and operation of a clean room can be held down.

In the FOUP opener, it is necessary to aim to prevent the incorporation of foreign matter particles into the semiconductor. To this end, the mounting table on which the FOUP is installed and fixed is moved from the undocking position to the docking position, so that the FOUP and the port door are docked in a closed state. And the opening and closing of the FOUP cover and the port door is performed to carry out the wafer. At this time, it is necessary to fix the FOUP on the mounting table of the FOUP opener by a fixing force enough to maintain the sealed state of the FOUP and the semiconductor manufacturing apparatus. Regarding the fixing of the FOUP, the SEMI (Semiconductor Equipment and Materials International) standard stipulates the provision of the FOUP clamp mechanism in the FOUP opener, and also the shape of the clamp recess of the FOUP bottom. The clamp force required for the clamp mechanism is also prescribed. As examples of clamp mechanisms conforming to these standards, techniques disclosed in (1) JP 2003-297903, (2) JP 2005-129706, and (3) JP 2004-140011 are known. . In the technique described in Documents (1) and (2), as the clamping portion is hooked to the clamp recess of the bottom of the FOUP and the lowering portion is lowered, the locking portion is pressed against the mounting table of the FOUP opener to press the FOUP. It is fixed.

In addition, Document 3 describes a FOUP opener capable of adjusting the installation direction of the FOUP. In a FOUP opener, a notch is formed in a mounting table (connection plate and container mounting piece), and the cylindrical part which can rotate and move up and down is arrange | positioned at this notch. At the upper end of the cylindrical portion, a mounting plate on which a FOUP is mounted is provided. And the motor which drives a cylindrical part is provided in the support piece provided in the lower part of the mounting table. By such a configuration, it is possible to adjust the installation direction of the FOUP and position the outlet of the FOUP correctly with respect to the semiconductor manufacturing apparatus without having to install a large-scale device (hand for handling the FOUP).

In a clean room in which a FOUP opener is installed, the space that can be utilized is very important, and since it is better to be a little wider, it is preferable to effectively utilize the space below the mount table. The clamp mechanism disclosed in the above-mentioned documents (1) and (2) includes an actuator such as an air cylinder, a motor, or the like for driving the clamping portion. And such an actuator is provided in the lower space of the mounting table which fixes a FOUP. For this reason, the lower space of a mounting table is occupied by an actuator etc., and the lower space of a mounting table cannot be utilized effectively.

In addition, since the clamp mechanism described in Documents (1) and (2) occupies the lower space of the mounting table, the cylindrical portion and the motor cannot be provided below the mounting table. Therefore, it is not applicable to the technique like literature (3).

In addition, in the case of using the clamp mechanism described in Documents (1) and (2), in order to dock the FOUP to the port door, after the FOUP is installed on the mounting table, it is referred to as (1) clamp operation and (2) docking operation. Two stages of operation are required and as many as two cycles of cycling time are required.

It is therefore an object of the present invention to provide a clamp mechanism capable of effectively utilizing the lower space of the mounting table.

Another object of the present invention is to provide a clamp mechanism with a short cycle time by performing clamping during a docking operation.

In order to achieve the above object, the clamping mechanism of the present invention includes a FOUP capable of accommodating a wafer on a mounting table, and a port door for opening and closing a communication port into the substrate processing apparatus. A FOUP opener for docking a FOUP and sealingly communicating the inside of the FOUP with the inside of the substrate processing apparatus, the clamp mechanism for fixing the FOUP to the mounting table. The clamp mechanism includes a plate-shaped first mounting table that is provided to be movable in an docking direction that is the docking direction and an undocking direction that is opposite to the docking direction with respect to an upper portion of the FOUP opener body portion, and the first mounting table. With the upper plate-shaped second mounting table that is provided to be movable in the docking direction and the undocking direction, and a rotation axis extending in the horizontal direction and perpendicular to the docking direction and the undocking direction, A clamp lever rotatably supported at an upper portion of the second mount, a first member acting to move the second mount in the undocking direction with respect to the first mount, and a second member . The clamp lever is provided with a clamp engaging portion protruding in the undocking direction, and the second member acts on the clamp lever to displace the clamp engaging portion downward. A positioning recess is formed at the bottom of the FOUP, and a positioning protrusion is formed on the first mounting table to fit the positioning recess, and the positioning protrusion is positioned at the position. The first mounting table and the FOUP are integrally movable by being fitted to the crystal recess. And the clamp engaging portion is accommodated in the clamp recess formed at the bottom of the FOUP so that the second mount is moved in the undocking direction with respect to the first mount, and the clamp engaging portion is recessed for the clamp. The FOUP is fixed to the mounting table by suppressing the pick-clamp portion protruding toward the dock direction from the inner wall surface of the negative side in the dock direction.

According to this configuration, since the FOUP can be clamped below the mounting table (the first mounting table and the second mounting table) without installing an actuator such as an air cylinder or a motor, the space below the mounting table is not occupied. Therefore, the space below the mounting table can be utilized effectively. Further, by performing clamping during the docking operation, a clamp mechanism with a short cycle time can be obtained.

In the clamping mechanism according to the present invention, the first member may be an elastic member connecting the second mounting table and the first mounting table. Thereby, a 1st member can be made simple. Here, the elastic member is a flexible and highly elastic member, and specific examples thereof include metal springs (coil springs, etc.), resin springs, and rubber.

In addition, the clamp mechanism according to the present invention may further have a stopper fixed to the FOUP opener body part and further restricting the movement in the undocking direction of the second mount. According to this, when setting FOUP down and setting, the clamping part can be arrange | positioned in the position which can be reliably accommodated in the clamped recessed part.

Moreover, the clamp mechanism which concerns on this invention is the 1st contact part provided in the said 1st mounting stand, and the 2nd contact part provided in the said 2nd mounting stand, and arrange | positioned with respect to the said 1st contact part on the said dock direction side. Further, when the first mount and the FOUP moves in the dock direction, the first mount, the FOUP and the second mount are integrated as the first contact portion presses the second contact portion. You can also move. According to this, when the first mounting table, the FOUP, and the second mounting table move together as one body, the movement of the second mounting table is stabilized as the first contact portion presses the second contact portion. In addition, the load on the clamp lever when the second mount is moved is reduced.

Further, in the clamping mechanism according to the present invention, the second member is an elastic member provided on an upper portion of the second mounting table, and the clamp lever is provided with a convex portion protruding in the dock direction, and the second member is It is sandwiched between the said convex part and the said 2nd mounting base, and it can also press the said convex part toward upward from below. Thereby, a 2nd member can be comprised simply. Here, the elastic member is a stretchable and highly elastic member, and specific examples thereof include metal springs (coil springs and the like), resin springs, rubber and the like.

Moreover, in the clamp mechanism which concerns on this invention, the 2nd mounting table may be provided with the control part which regulates the displacement amount above the said convex part. Since the inclination of the clamp lever is limited by this configuration, even when the clamp force is increased, the clamping portion for the clamp can rise on the pick clamp.

Further, in the clamping mechanism according to the present invention, the clamp mechanism further includes a roller extending in the horizontal direction and rotatably supported by a rotation axis orthogonal to the dock direction and the undocking direction, and the roller includes the clamp engaging portion. It may be arranged at the tip. As a result, during clamping of the FOUP, the clamping catching portion rises to the picked-up clamp portion, which facilitates clamping.

Further, in the clamp mechanism according to the present invention, the second mounting table and the first mounting table may be connected via a linear motion guide provided along the dock direction and the undocking direction. Thereby, with a simple structure, a 2nd mounting table can be provided so that a movement to a dock direction and an undocking direction with respect to the upper part of a 1st mounting table is possible.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

First, an overall configuration of a FOUP opener including a clamp mechanism according to an embodiment of the present invention will be described with reference to FIGS. 1 and 2. 1, Fig. 2 is a side schematic view of a FOUP opener in accordance with one embodiment of the present invention, Figure 2 is a top schematic view according to ^AA, of Figure 1;

(FOUP opener)

As shown in FIG. 1, the FOUP opener 50 according to the present embodiment is an interface mechanism for communicating the inside of a front open unified pod (FOUP) 2 and the inside of a semiconductor manufacturing apparatus (substrate processing apparatus), The FOUP 2 is fixed relative to the FOUP opener 50. In addition, the FOUP opener 50 is provided in a clean room.

In the FOUP opener 50, a mounting table 51 is provided on the FOUP opener main body 50b, and a FOUP 2 capable of accommodating a plurality of wafers 9 is mounted on the mounting table 51. At this time, the FOUP 2 is fixed to the mounting table 51 by the action of the clamp mechanism 1. In addition, the FOUP opener 50 includes a wall portion 50c provided on the semiconductor manufacturing apparatus side, and the communication portion 50h is formed in the wall portion 50c to communicate with the semiconductor manufacturing apparatus. A port door 50d is provided to shield. The mounting table 51 is a FOUP opener which can be moved in a direction in which the FOUP 2 and the port door 50d dock (dock direction) and the opposite direction (undock direction) while the FOUP 2 is installed. It is provided with respect to the main body part 50b. Here, the mounting table 51 is configured to include a carrier base (first mounting table) and a clamp base (second mounting table) described later. In addition, the clamp mechanism 1 which concerns on this embodiment is comprised including the mounting base 51, as mentioned later. The FOUP opener 50 docks the FOUP 2 with respect to the port door 50d, and thereafter, by opening the cover part 2d (described later) of the port door 50d and the FOUP 2, the FOUP is opened. The inside of (2) and the inside of a semiconductor manufacturing apparatus are hermetically communicated. On the other hand, the FOUP may accommodate one wafer.

(FOUP)

Next, the structure of a FOUP is demonstrated using FIG.1 and FIG.2. The FOUP 2 is for accommodating, conveying, or storing a wafer 9 for an electronic device, and is configured to include a lid 2b and a lid 2d that can be opened and closed with respect to the lid 2b. Here, the FOUP 2 can be applied to the transfer and interpolation of various substrates. Then, in the state in which the lid portion 2d is mounted on the box 2b, intrusion of foreign particles into the inside of the FOUP 2 and chemical contamination inside the FOUP 2 are prevented. Moreover, the holding part 2z for holding | grip when the conveyance robot etc. conveys the FOUP 2 is provided in the top part of the box 2b. In addition, as shown in FIG. 2, the positioning recessed part 2a mentioned later is formed in three places in the bottom part of FOUP2. On the other hand, Fig. 2 is a top view, and since the original positioning recesses 2a are at the bottom of the FOUP 2, they are in a hidden position, but they are shown for explanation in Fig. 2. Moreover, as shown by the broken line in FIG. 1, the bottom part of the FOUP 2 is provided with the recessed part 2h for clamps. In addition, a cross-sectional schematic view of the ^BB, the position of 2 (oblique view showing a section is omitted) is as shown in Fig. 5, FOUP (2), the unloading dock direction side (degrees arrow of the recess (2h) for clamping The pick-clamp part 2c is formed so that it may protrude toward the dock direction from the inner wall surface 2w of the reference.

(Clamp mechanism)

Next, the clamping mechanism 1 is demonstrated, referring FIG. Figure 3 is a shows an enlarged cross-sectional schematic view of the ^BB, position 2 (not shaded representing the cross-section). In addition, in FIG. 3, FOUP2 is abbreviate | omitted and shown. Here, the clamp mechanism 1 includes a mounting table 51, and the mounting table 51 includes a carrier base (first mounting table) 3 and a clamp base (second mounting table) 4. do. Hereinafter, each detailed structure is demonstrated.

(Carrier base)

The carrier base 3 is a member formed on a plate, and a linear motion guide 3g is integrally provided at the bottom. Moreover, the rail 50r is provided in the upper part of the FOUP opener main body part 50b according to a docking direction and an undocking direction. The linear motion guide 3g and the rail 50r are engaged with each other, and the linear motion guide 3g moves along the rail 50r. As described above, the carrier base 3 is provided to be movable in the docking direction and the undocking direction with respect to the upper portion of the FOUP opener body portion 50b. On the other hand, the linear motion guide may be formed as a member separate from the carrier base, and may be mounted on the carrier base.

Moreover, the positioning convex part 3a is formed in the upper part of the carrier base 3. As shown in FIG. 5, in the state in which the FOUP 2 is set on the carrier base 3, the positioning convex portion 3a fits snugly to the positioning concave portion 2a of the FOUP 2. . In addition, although only one positioning recessed part 2a is shown in FIG. 3, as shown in FIG. 2, three positioning recesses of the FOUP 2 on the upper part of the carrier base 3 are shown. Three positioning convex portions 3a are formed at positions corresponding to the portions 2a. Originally in FIG. 2, which is a top view, the positioning convex portion 3a is hidden from the FOUP 2 and is invisible, but is shown in FIG. 2 for explanation. Then, as the positioning convex portion 3a fits into the positioning concave portion 2a, the carrier base 3 and the FOUP 2 are integrally movable. That is, when the carrier base 3 moves on the rail 50r, the FOUP 2 also moves along with the carrier base 3.

Moreover, the carrier base 3 is provided in the upper part of the carrier base 3 on the rail 50r, and the rail 3r is provided in the dock direction and the undocking direction.

(Clamp base)

Next, the clamp base 4 is demonstrated with reference to FIG. The clamp base 4 is also a member formed in a plate shape, and a linear motion guide 4g is integrally provided at the bottom. The linear motion guide 4g and the rail 3r mesh with each other, and the linear motion guide 4g moves along the rail 3r. As described above, the clamp base 4 is provided to be movable in the docking direction and the undocking direction with respect to the upper portion of the carrier base 3. In addition, by using the linear motion guide 4g and the rail 3r in this way, the clamp base 4 can be installed so that the upper part of the carrier base 3 can be moved to a dock direction and an undocking direction with a simple structure. On the other hand, the linear motion guide may be formed as a member separate from the clamp base and mounted on the clamp base.

Moreover, the clamp lever 5a is rotatably supported in the upper part of the clamp base 4. Specifically, the support part 4c is formed in the upper part of the clamp base 4, and the clamp lever 5a is rotatably supported by the rotating shaft 5c attached to the said support part 4c. Here, the rotation shaft 5c of the clamp lever 5a extends in the horizontal direction and is orthogonal to the dock direction and the undocked direction. That is, the rotation shaft 5c extends in the direction perpendicular to the surface of FIG. 3, and the clamp lever 5a is rotatable to the right and the left in FIG. 3. In addition, the clamp lever 5a is provided with a clamping portion 5b for protruding in the undocking direction. Moreover, the convex part 5d which protrudes in the dock direction is formed in the clamp lever 5a. The coil spring 5s is provided as a second member at the position sandwiched between the convex portion 5d and the clamp base 4. As shown in FIG. 3, the coil spring 5s is buried in the upper portion of the clamp base 4 in a shortened state so that the axial direction and the vertical direction coincide. Moreover, the coil spring 5s is comprised including the coil spring and the axial press part 5k provided in the end part. The coil spring 5s is configured to apply a force pushing downward from upward to the pressing portion 5k protruding upward by using the elastic force in the extending direction of the spring. And the coil spring 5s always pushes the convex part 5d upwards downward, and the force which makes the clamp lever 5a rotate to the right in FIG. 3 can be given. As a result, the coil spring 5s acts on the clamp lever 5a to displace the clamping portion 5b for the downward direction. In addition, the clamping part 4 is provided with the regulation part 4a fixed by the bolt 4t. The distal end portion of the restricting portion 4a is disposed above the convex portion 5d so as to allow a predetermined amount of displacement with respect to the convex portion 5d in the up and down direction, whereby the convex portion 5d is disposed upward. The amount of displacement, that is, the rotatable angle of the clamp lever 5a is regulated.

Here, the protruding directions of the clamping portion 5b for clamping and the convex portion 5d will be described further. Since the clamp lever 5a is rotatably supported, in this embodiment, in the state where the FOUP 2 is clamped by the clamping portion 5b for clamping (see FIGS. 6 and 7), the undocking direction And protruded in the dock direction. In addition, in the present embodiment, the rotatable angle of the clamp lever 5a, that is, the up-and-down swingable width of the clamping engaging portion 5b is determined by the pressure portion 5k in the state where the coil spring 5s is shortest. Since the position is determined by the position of the tip portion of the restricting portion 4a, the width thereof is not large. Therefore, in both the state in which the FOUP 2 is clamped by the clamp mechanism 1 (FIGS. 6 and 7) and the state in which the FOUP 2 is not clamped (FIGS. It can be said that the part 5b and the convex part 5d protrude from the clamp lever 5a in the substantially undocking direction and the substantially docking direction, respectively. Specifically, in the state where the FOUP 2 is not clamped, the clamping portion 5b for the clamp is inclined in the downwardly displaced direction (the right direction in FIG. 3) compared with the clamped state (FIG. 3). 3 to 5).

Moreover, the 2nd contact part 4b protrudes downward in the clamp base 4, and the 1st contact part 3b is provided on the carrier base 3. As shown in FIG. The first contact portion 3b includes a holder portion 3h fixedly installed on the carrier base 3 and a bolt 3t penetrated through the holder portion 3h in the docking direction and the undocking direction. And the height of protrusion of the bolt 3t can be adjusted by adjusting the rotation amount of the bolt 3t. In addition, the second contact portion 4b is disposed closer to the dock direction than the first contact portion 3b. Then, when the carrier base 3 and the FOUP 2 move in the dock direction, the carrier base 3, the FOUP 2, and the clamp base 4 are pressed by the first contact portion 3b pressing the second contact portion 4b. ) Is integrated to move. 3 to 5, the second contact portion 4b and the first contact portion 3b are arranged so as not to contact each other in a state where the FOUP 2 is not clamped by the clamp mechanism 1. 6 and 7, in the state where the FOUP 2 is clamped by the clamp mechanism 1, the second contact portion 4b and the first contact portion 3b come into contact with each other. In addition, when the 2nd contact part 4b and the 1st contact part 3b contact, the positional relationship of the clamp base 4 and the carrier base 3 can be adjusted by adjusting the rotation amount of the bolt 3t.

In addition, at the tip of the clamping portion 5b, the roller 5e is rotatably supported via the rotation shaft 5j extending in a direction parallel to the rotation shaft 5c. Therefore, the roller 5e can be rotated by right and left rotation in FIG.

Moreover, the connection part 4f is provided in the clamp base 4, and the connection part 3f is provided in the carrier base 3, and the connection part 4f and the connection part 3f mediate the coil spring 4s which is a 1st member. Is connected. That is, the clamp base 4 and the carrier base 3 are connected via the coil spring 4s. In addition, in the initial state before the FOUP 2 is clamped, the coil spring 4s is set in the extended state, i.e., under the elastic force in the shortening direction. Therefore, the coil spring 4s acts to move the clamp base 4 in the undocking direction with respect to the carrier base 3 (that is, when viewed from the carrier base 3 as a reference).

In addition, a stopper 50s is fixed to the upper portion of the FOUP opener main body portion 50b, and a stopper contact portion 4m in contact with the stopper 50s is formed in the clamp base 4. Although mentioned later in detail, the stopper 50s is for restricting the movement of the clamp base 4 in the undocking direction. Thereby, even if the clamp base 4 is applied to the carrier base 3 by the action of the coil spring 4s, and a force like moving in the undocking direction is provided, the stopper is at the position of the stopper 50s. Since the contact portion 4m is in contact with the stopper 50s, the clamp base 4 cannot move in the undocking direction than the position of the stopper 50s.

Here, the stopper 50s is provided so as not to contact the carrier base 3. Therefore, the part shown by the broken line in FIG. 3 of the stopper 50s is bypassed so that contact with the stopper contact part 4m of the clamp base 4 may be avoided further. In addition, the stopper 50s is not limited to this form, and may be provided to penetrate the through groove provided in the carrier base. In addition, the positional relationship of the stopper and the clamp base 4 is not limited to such a thing, For example, the stopper may extend from the side rather than the lower side, but may be extended to the position where the stopper and the clamp base 4 contact. Also, the clamp base 4 may not be in contact in the undocking direction side.

The stopper 50s is fixed directly to the FOUP opener main body 50b, but is not limited to this form. The stopper 50s does not move relative to the base (base where the FOUP opener main body 50b is installed) (for example, the carrier base 3 and the clamp base 4 have the FOUP opener main body). 50b may be fixed to the base on which it is provided), or may be fixed at other positions.

(Clamp operation)

Next, with reference to FIGS. 4-7, the clamp operation | movement of the clamp mechanism 1 comprised as mentioned above is demonstrated. 4 to 7 shows a cross-sectional schematic view, and the operation process of the ^BB, the position of Figure 2. 4-7, the diagonal line which shows a cross section is abbreviate | omitted and shown.

In the initial state before the FOUP 2 is clamped, the coil spring 4s is in an extended state, and the coil spring 5s is in a shortened state. Moreover, the clamping part 5b for clamps is inclined in the direction displaced downward (compared with the clamped state).

First, in the conveyance robot which is not shown in figure, the holding part 2z of the FOUP 2 is gripped, and the FOUP 2 is conveyed above the clamp mechanism 1 of the FOUP opener 50. The FOUP 2 is lowered below the clamp mechanism 1 by the operation of the transfer robot. (See FIG. 4).

Then, the FOUP 2 is lowered, and the positioning protrusions 3a of the carrier base 3 fit snugly to the positioning recesses 2a of the bottom of the FOUP 2 (see Fig. 5 (arrow C). )). Accordingly, the FOUP 2 is set on the carrier base 3, and after being set, the carrier base 3 and the FOUP 2 move together as one unit. Here, as described above, the clamp base 4 is applied with the same force as the coil spring 4s moving in the undocking direction with respect to the carrier base 3. On the other hand, since the stopper 50s is provided, the clamp base 4 cannot move toward the undocking direction than the position of the stopper 50s. Therefore, when the FOUP 2 is lowered from above and set on the carrier base 3, the clamping portion 5b for clamping and the clamped portion 2c do not contact, and the clamping portion 5b for clamping is used for clamping. The clamping part 5b for clamping can be arrange | positioned in the position which can be accommodated in the recessed part 2h. Therefore, at the time of setting the FOUP 2, the clamping locking portion 5b is reliably accommodated in the clamping recess 2h.

Next, the FOUP 2 and the carrier base 3 move in the dock direction by the operation of the transfer robot (see Fig. 5 (arrow D). At this time, the clamp base 4 is formed of the coil spring 4s). By the action, the force which moves to an undocking direction with respect to the carrier base 3 is provided, but the movement to an undocking direction is restrict | limited by the stopper 50s fixed to the FOUP opener main-body part 50b. Therefore, the clamp base 4 stops at the position where the stopper 50s and the stopper contact portion 4m contact, and only the FOUP 2 and the carrier base 3 move in the docking direction. 4 s) is shortened by elasticity, and by employing the coil spring 4 s as the elastic member, the first member can be made simple.

As described above, in the initial state at the time of the clamping operation, the clamping portion 5b for clamping is inclined in the downwardly displaced direction as compared with the state of protruding in the undocking direction (when clamping). In addition, the amount of displacement in the upward direction of the convex portion 5d is regulated by the restricting portion 4a. Here, in order to reliably clamp the FOUP 2 by the clamping locking portion 5b, the clamping force is preferably larger, and the rotatable angle of the clamping locking portion 5b is preferably larger (that is, The clamping portion 5b for the clamp may be largely displaced downwardly. However, if the clamping force is increased in a state in which the rotatable angle of the clamping locking portion 5b is large, the clamping locking portion 5b is largely displaced downward in the initial state. Therefore, when clamping, it becomes difficult to clamp the clamping portion 5b onto the clamped portion 2c in view of such a contact angle.

Therefore, by providing the restricting portion 4a and limiting the inclination of the clamp lever 5a, it is possible to lift the clamping portion 5b on the clamped portion 2c even when the clamping force is increased. It becomes possible. On the other hand, the clamping portion in the initial state by replacing the regulating portion 4a with another regulating portion having a different height, or inserting a spacer prepared separately between the regulating portion 4a and the clamp base 4. The tilt of (5b) can be adjusted. In addition, when the FOUP 2 moves in the dock direction and the clamping portion 5b ascends on the picked-up clamp portion 2c, the clamping portion 5b and the clamping portion 5b are actuated by the action of the roller 5e. Since the picked-up clamp part 2c contacts smoothly, the clamping part 5b for clamping becomes easy to get on the picked-up clamp part 2c, and a clamp becomes easy. In addition, by employ | adopting the coil spring 5s which is an elastic member here, a 2nd member can be made simple.

Then, after the clamping portion 5b for the clamp is lifted on the picked-up clamp portion 2c, the FOUP 2 and the carrier base 3 further move in the dock direction while the position of the clamp base 4 remains unchanged. . In other words, the clamp base 4 moves in the undocking direction with respect to the carrier base 3. And the clamping part 5b for clamping clamps the clamping part 2c downwards, and the FOUP 2 is fixed to the mounting table 51 (carrier base 3 and clamp base 4). (See Figure 6). At this point (see FIG. 6), the first contact portion 3b and the second contact portion 4b are in contact with each other.

As described above, since the FOUP 2 can be clamped without installing an actuator such as an air cylinder or a motor in the space 50u below the mounting table 51 (carrier base and clamp base), the mounting table 51 (50u) of the space below is not occupied (refer FIG. 1). Thereby, since 50u of spaces below the mounting table 51 can be utilized effectively, the whole internal space 50i of the FOUP opener main body part 50b can be utilized effectively. Therefore, for example, the clamp mechanism 1 can be applied also to the technique as described in the above-mentioned document (3).

In addition, by employing a simple mechanism for pushing the clamping portion 2c by the clamping portion 5b for which the rotational force is applied by the elastic member, without using an actuator of a complicated mechanism such as an air cylinder or a motor, An inexpensive clamp mechanism for maintenance can be obtained.

Next, by the operation of the transfer robot, the FOUP 2 moves in the docking direction, reaches the docking position, and the FOUP 2 docks with the port door 50d (see FIG. 7). At this time, the first contact portion 3b presses the second contact portion 4b. Therefore, when the FOUP 2 moves in the dock direction, the carrier base 3 also moves in the dock direction accordingly, and the clamp base 4 also moves in the dock direction along the carrier base 3. As a result, the carrier base 3, the FOUP 2 and the clamp base 4 are integrally moved. By this structure, when the carrier base 3, the FOUP 2, and the clamp base 4 move together as one body, the clamp base 4 is pressed by the first contact portion 3b pressing the second contact portion 4b. Is stable. Here, "stable" means that the movement of the clamp base 4 is, for example, compared with the case where the clamp base portion 2c moves in the dock direction by pressing the clamp lever 5a. It becomes stable. Therefore, when the clamp base 4 moves, the load on the clamp lever 5a is reduced.

As described above, the docking of the FOUP 2 is completed, and then, the port door 50d and the lid 2d (described later) of the FOUP 2 are opened to open the inside of the FOUP 2 and the semiconductor. The interior of the manufacturing apparatus is in closed communication. Then, the wafer (substrate) 9 in the FOUP 2 is taken out by a substrate conveying robot (not shown) and conveyed to a predetermined position inside the semiconductor manufacturing apparatus.

As described above, the clamp mechanism 1 clamps the FOUP 2 during the docking operation. Therefore, compared with the case where clamping operation and docking operation are performed separately, the clamp mechanism with a short cycle time can be obtained.

(Modified example)

Next, the modification of the clamp mechanism which concerns on this invention is demonstrated centering on a different part from said embodiment, referring FIG. 8, 9. FIG. 8 is an enlarged cross-sectional schematic diagram showing a first modification, and FIG. 9 showing a second modification. In addition, the part which attached | subjected the code | symbol 200, 204, 204a, 204c, 205a, 205b, 205d, 205e, 205s, 300, 304, 304a, 305a, 305b, 305c, 305d, 305e, 305s is respectively said to the said embodiment. In this case, the parts 1, 4, 4a, 4c, 5a, 5b, 5c, 5d, 5e, 5s, 1, 4, 4a, 5a, 5b, 5c, 5d, 5e, and 5s are attached.

First, with respect to the clamp mechanism 200 according to the first modification, as shown in FIG. 8, the structure of the clamp lever is different in the above embodiment. The clamp lever 205a which concerns on this modification is comprised linearly unlike the said embodiment. And the clamp lever 205a is rotatably supported by the rotating shaft 205c attached to the support part 204c. Also with the clamp mechanism 200 of this form, the same effect as the above embodiment can be obtained.

In addition, also in the clamp mechanism 300 which concerns on a 2nd modification, as shown in FIG. 9, the structure of a clamp lever differs in said embodiment. Unlike the above embodiment, the clamp lever 305a according to the present modification is supported on the upper portion of the main body portion of the clamp base 304, not on the supporting portions 4c and 204c provided on the upper portion of the clamp base. And similarly, the clamp lever 305a is rotatably supported by the rotating shaft 305c. Also with the clamp mechanism 300 of this form, the same effect as the above embodiment can be obtained.

As mentioned above, although embodiment of this invention was described, this invention is not limited to embodiment mentioned above, It can variously change and implement within the limit described in a claim.

For example, in the above embodiment, an elastic member is used as the first and second members. However, since the first member may have a function to which linear movement force is imparted to the second mounting table, and the second member may only have a function to which rotation force is imparted to the clamp lever. It is not limited. For example, the first and second members may be electronically controlled mechanisms (motors, etc.), air cylinders, hydraulic cylinders, or the like. In addition, although the coil spring was used as said elastic member in the said embodiment, an elastic member means a highly elastic member which can be stretched here, and is not limited to a coil spring. Therefore, resin spring, rubber, etc. may be sufficient, for example.

Although the present invention has been described in connection with the specific embodiments described above, it has been found that many alternatives, modifications will be apparent to those skilled in the art. Accordingly, the preferred embodiments of the present invention described above are intended to be illustrative rather than restrictive. Various changes may be made without departing from the spirit and scope of the invention as defined in the following claims.

1 is a side schematic view of a FOUP opener including a clamp mechanism in accordance with one embodiment of the present invention;

FIG. 2 is a schematic view of AA ^{, a} top surface of FIG. 1; FIG.

Figure 3 is a schematic enlarged cross section of the ^BB, the location of the two.

4 is a schematic cross-section of the FOUP is ^BB, position showing a state that has been conveyed upward in FIG. 2 of the clamp mechanism.

5 is a schematic cross-section of the FOUP is shown a state set in a carrier space, Fig. 2 of the ^BB, position.

Figure 6 is a schematic cross-section of the FOUP according to ^BB, showing the position of the clamped state, Fig. 2 by the clamp mechanism.

Figure 7 is a schematic cross-section of the FOUP according to ^BB, showing the position of the docked state, and Fig. 2 with respect to the port door.

8 is an enlarged cross-sectional schematic diagram showing a first modification of the clamp mechanism.

9 is an enlarged cross-sectional schematic diagram showing a second modification of the clamp mechanism.

[Description of Symbols]

1, 200, 300: clamp mechanism

2: FOUP

2a: recess for positioning

2c: pick-clamp part

2w: inner wall surface of the undocking side

3: carrier base (1st mount)

3a: Convex part for positioning

3b: first contact portion

3r: rail

4: clamp base (second mount)

4a: Regulatory Department

4b: second contact portion

4g: linear motion guide

4s: coil spring (first member)

5a: clamp lever

5b: Clamping part for clamp

5c: rotating shaft (for clamp lever)

5d: convex

5e: roller

5j: axis of rotation (for rollers)

5s: coil spring (second member)

9: wafer

50: FOUP Bottle Opener

50b: FOUP opener body

50d: port door

50h: communication port

50s: stopper

51: mounting table

Claims (8)

A FOUP capable of holding a wafer is fixed to a mounting table, and the FOUP fixed to the mounting table is docked to a port door that opens and closes a communication port into the substrate processing apparatus. A FOUP opener for communicating the inside of a device, comprising: a clamp mechanism for fixing the FOUP to the mounting table, A plate-shaped first mounting table provided so as to be movable in an undocking direction opposite to the docking direction which is the said docking direction and the said docking direction with respect to the upper part of a FOUP opener main body part, A plate-shaped second mounting table provided to be movable in the docking direction and the undocking direction with respect to an upper portion of the first mounting table; A clamp lever extending in a horizontal direction and rotatably supported on an upper portion of the second mounting table by a rotation axis orthogonal to the dock direction and the undocking direction; A first member acting to move the second mounting table in the undocking direction with respect to the first mounting table; Has a second member, The clamp lever is provided with a clamping portion for protruding in the undocking direction, The second member acts on the clamp lever to displace the clamping portion downward; A positioning recess is formed at the bottom of the FOUP, and a positioning convex portion is formed on the first mounting table to fit the positioning recess, and the positioning convex portion is formed at the positioning recess. By being fitted tightly, the first mounting table and the FOUP are integrally movable. The clamp engaging portion is accommodated in a clamp recess formed at the bottom of the FOUP, the second mounting table moves in the undocking direction with respect to the first mounting table, and the clamping locking portion is used for the clamp. The clamp mechanism is fixed to the mounting table by pressing the pick-up clamp portion projecting from the inner wall surface toward the dock direction toward the dock direction from the upper side downward. The clamping mechanism according to claim 1, wherein the first member is an elastic member connecting the second mounting table and the first mounting table. The clamp mechanism according to claim 1, further comprising a stopper fixed to said FOUP opener body part and at the same time limiting movement in said undocking direction of said second mounting table. The method of claim 1, wherein the first contact portion provided in the first mounting table, It is provided in the said 2nd mounting base, At the same time, it also has a 2nd contact part arrange | positioned toward the said undocking direction with respect to the said 1st contact part, When the first mounting table and the FOUP move in the dock direction, the first mounting section presses the second contact section so that the first mounting table, the FOUP, and the second mounting table move integrally. Clamp mechanism. The said 2nd member is an elastic member provided in the upper part of the said 2nd mounting base, The said clamp lever is provided with the convex part which protrudes in the said docking direction, The said 2nd member is pinched | interposed between the said convex part and the said 2nd mounting base, and presses the said convex part upwards from below. The clamp mechanism according to claim 5, wherein the second mounting table is provided with a restricting portion that regulates an amount of displacement in the upward direction of the convex portion. The roller according to claim 1, further comprising a roller extending in a horizontal direction and rotatably supported by a rotation axis orthogonal to the dock direction and the undocking direction, The said roller is arrange | positioned at the front-end | tip of the said clamping | locking part, The clamp mechanism characterized by the above-mentioned. The clamp mechanism according to claim 1, wherein the second mounting table and the first mounting table are connected via a linear motion guide provided along the dock direction and the undocking direction.

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