CN109979866B

CN109979866B - Foup device

Info

Publication number: CN109979866B
Application number: CN201711455320.6A
Authority: CN
Inventors: 徐方; 华正雨; 何书龙; 边弘晔; 赵治国; 于大元
Original assignee: Shenyang Siasun Robot and Automation Co Ltd
Current assignee: Shenyang Siasun Robot and Automation Co Ltd
Priority date: 2017-12-28
Filing date: 2017-12-28
Publication date: 2021-03-26
Anticipated expiration: 2037-12-28
Also published as: CN109979866A

Abstract

The invention provides a foup device, which comprises a foup box, wherein the foup box is fixed on a substrate; further comprising: the upper end clamping mechanism is arranged on the substrate where the foup box is located, and the upper end clamping mechanism is arranged at the upper end of the foup box and used for clamping and fixing the foup box; the lower end fixing mechanism is installed on the substrate where the foup box is located, the lower end fixing mechanism is installed at the lower end of the foup box and used for fixing the foup box, and the lower end fixing device and the upper end clamping device are oppositely arranged so that the foup box cannot move in the vertical direction; and the automatic unlocking mechanism is used for automatically unlocking the foup box. The foup device provided by the invention can completely fix the foup box, is convenient to operate, and can automatically unlock the foup box.

Description

Foup device

Technical Field

The invention relates to an automatic mechanical device mainly applied to the industrial field, in particular to a foup device.

Background

In a semiconductor manufacturing plant, wafers are generally required to be efficiently transferred and positioned between different process modules on a production line, and an Equipment Front End Module (EFEM) is a key device for accomplishing the task, and is a bridge for connecting a material handling system and a wafer processing system, so that the wafers can be accurately transferred without being contaminated.

The Front end device of the equipment at least comprises a wafer box (Front Opening Unified Pod, short for Foup) for storing wafers, a Load Port (Load Port) for bearing the wafer box and an operating manipulator for taking out and containing the wafers from and into the wafer box, wherein the Load Port comprises a door opener and a bearing mechanism arranged on the door opener, when a transport trolley on a semiconductor production line moves to the Load Port, the wafer box is placed on the bearing mechanism of the Load Port manually or mechanically, then the door opener executes the box Opening action of the wafer box, and then the operating manipulator takes out the wafers in the wafer box and conveys the wafers to a machine table for corresponding processing, and after the wafers are processed, the operating manipulator takes the wafers into the wafer box.

A FOUP loading door apparatus is disclosed in the prior art, which includes a loading door body, a frame, a loading door motion system, and a wafer inspection part; the loading door motion system comprises a loading door connecting bracket, a lifting platform, a first X-direction moving mechanism, a first Y-direction moving mechanism and a turnover mechanism; the frame is rotatably connected with the loading door connecting bracket; the first X-direction moving mechanism comprises an X-direction moving part and an X-direction driving part, so that the loading door connecting bracket moves along the X direction relative to the lifting platform; the first Y-direction moving mechanism comprises a Y-direction lead screw assembly, and the lifting table is enabled to do lifting motion along a lead screw of the Y-direction lead screw assembly; the turnover mechanism comprises a turnover connecting structure and a turnover air cylinder, a cylinder rod of the turnover air cylinder is fixedly connected with a lower frame of the frame, and the frame can rotate relative to the loading door body. Such a FOUP loading door device has a complicated structure, and cannot be completely fixed to a FOUP, which is inconvenient in operation.

A wafer cassette conveying and loading system is disclosed in the prior art, and includes a wafer cassette, a conveying device, and a cassette opening device. The box cover is provided with two lock holes, the box opening plate is movably connected with two unlocking components corresponding to the lock holes, and the two unlocking components penetrate through the box opening plate and are in transmission connection with a first driving piece fixedly arranged on the rear side of the box opening plate. The output shaft of the fifth driving piece is directly connected with the moving piece, and the moving piece is driven to move up and down by the extension and contraction of the output shaft of the cylinder, so that the unlocking and locking of the box opening plate by the moving piece are realized. When the structure is applied, the left lock and the right lock can not be synchronously rotated, the mechanism is easily blocked and cannot be unlocked, and the reliability is poor.

With the rapid development of industrial automation, the automation degree of silicon wafer processing, silicon wafer box and silicon wafer carrying, taking and placing in the silicon wafer processing industry is very high. The transmission and processing of the silicon wafer in a vacuum environment are important means for ensuring the processing cleanliness of the silicon wafer, so that the vacuum sealing device is a key device of the silicon wafer processing technology. The automatic door for the foup box is an important transition part for connecting the inside and the outside of silicon wafer processing equipment, and the original automatic door for the foup box is generally opened inwards, so that the occupied space of a sealing door is large, the cost is high, and the sealing effect is poor.

Disclosure of Invention

In view of this, an embodiment of the present invention provides a foup device, including a foup cassette fixed on a substrate, the foup device further including: the upper end clamping mechanism is arranged on the substrate where the foup box is located, is arranged at the upper end of the foup box and is used for clamping and fixing the foup box; the lower end fixing mechanism is installed on the substrate where the foup box is located, the lower end fixing mechanism is installed at the lower end of the foup box and used for fixing the foup box, and the lower end fixing device and the upper end clamping device are oppositely arranged so that the foup box cannot move in the vertical direction; and the automatic unlocking mechanism is used for automatically unlocking the foup box.

Optionally, in some embodiments, the foup device provided by the present invention further comprises a nitrogen gas fill system for venting air within the foup cartridge.

Optionally, in some embodiments, the foup device provided by the present invention further comprises an automatic door system for automatic opening and closing of the foup cartridge.

Optionally, in some embodiments, the upper end clamp mechanism comprises: centre gripping mounting panel, guide rail slider mechanism, slider connecting plate, centre gripping backup pad, holder, go up the cylinder connecting plate, go up cylinder and cylinder backup pad, guide rail slider mechanism includes guide rail and upper end slider, the guide rail with the centre gripping mounting panel is fixed, the upper end slider with the slider connecting plate is fixed, the centre gripping backup pad is fixed on the slider connecting plate just the side of centre gripping backup pad with the slider connecting plate is fixed, it passes through to go up the cylinder backup pad is installed on the centre gripping mounting panel, the holder with the centre gripping backup pad is connected, go up the cylinder connecting plate with the centre gripping backup pad is fixed, go up the cylinder telescopic link stretch out and with it contacts to go up the cylinder connecting plate. The upper end clamping mechanism is fixed on the substrate on which the foup box is positioned through the clamping mounting plate.

Optionally, in some embodiments, the lower end fixing mechanism comprises: the device comprises a sliding support plate, a lower end sliding block, a slideway, a fixed support plate, a sliding cylinder, a lower cylinder connecting plate, a telescopic cylinder and a locking clamping block; the telescopic cylinder is fixed on the fixed supporting plate, a telescopic rod extends out of the telescopic cylinder, and the locking clamping block is fixed on the telescopic rod of the lower cylinder; the slide way is fixedly arranged above the fixed supporting plate, the slide block is arranged on the slide way, and the slide block can slide on the slide way; the sliding support plate is fixedly installed on the lower end sliding block and used for placing the foup box.

Optionally, in some embodiments, the automatic unlocking device comprises at least two sets of foup box automatic unlocking mechanisms, and the foup box automatic unlocking mechanisms are installed on a supporting plate of the foup box; a set of foup box automatic unlocking mechanism includes: lower cylinder, unblock connecting piece, key mount pad, key, bearing mount pad, key support base shaft, rolling bearing, the bearing mount pad is fixed or rotationally install in the backup pad, the afterbody of lower cylinder with the backup pad is connected, the head of lower cylinder with the one end of unblock connecting piece is connected, the other end of unblock connecting piece with the key mount pad is connected, the key in the key mount pad is connected, the key mount pad is installed on the bearing mount pad.

Optionally, in some embodiments, the nitrogen filling system comprises: 2 or more than 2 substrate gas inlet channels, wherein the substrate gas inlet channels are arranged on the substrate where the foup box is positioned, and one end of each substrate gas inlet channel is communicated with a nitrogen gas source and is used for transmitting nitrogen gas; the substrate surface of the substrate is provided with a plurality of air inlet holes, the air inlet holes of the air inlet blocks are respectively communicated with the substrate air inlet channel, a ventilation pipeline is arranged in the air inlet blocks, the ventilation pipeline is provided with a plurality of air blowing holes of the air inlet blocks, the air blowing holes of the air inlet blocks are communicated with the inside of the foup box, and the included angle between the air blowing direction of the air blowing holes of the air inlet blocks and the substrate surface of the substrate where the foup box is located is 40-50 degrees; and the substrate exhaust channel is arranged on the substrate where the foup box is positioned and used for exhausting air in the foup box.

Optionally, in some embodiments, the automatic door system comprises: the linear bearing is fixed on the substrate where the foup box is located; the floating gate cover plate is provided with a vacuum sucker, and the vacuum sucker is used for tightly sucking a rear cover of the foup box; the floating seal door is fixedly provided with a seal cylinder, a telescopic rod of the seal cylinder is in contact with a substrate where the foup box is located, a telescopic rod of the linear bearing is in contact with the floating seal door, and the floating seal door and the substrate where the foup box is located can move relatively; the transverse moving cylinder is provided with a transverse moving slide block, and the transverse moving slide block moves under the driving of the transverse moving cylinder; one end of the transverse moving cylinder connecting plate is connected with the floating sealing door, and the other end of the transverse moving cylinder is connected with a transverse moving sliding block on the transverse moving cylinder; the floating gate telescopic air cylinder is arranged on the floating sealing gate and connected with the floating gate cover plate, and a floating gate telescopic guide rail sliding block is arranged on one side or two sides of the floating gate telescopic air cylinder.

According to the technical scheme, the embodiment of the invention has the following advantages:

the foup device provided by the invention can completely fix the foup box, is convenient to operate, and can automatically unlock the foup box.

Drawings

FIG. 1 is a schematic diagram of a foup device according to an embodiment of the present invention;

FIG. 2 is a schematic diagram of a foup device according to another embodiment of the present invention;

FIG. 3 is a schematic diagram of an upper end clamping mechanism of the foup device according to an embodiment of the present invention;

FIG. 4 is a front view of an upper clamping mechanism of a foup device according to one embodiment of the invention;

FIG. 5 is a cross-sectional view of a lower end fixture of a foup device according to one embodiment of the present invention;

FIG. 6 is a schematic structural diagram of a lower end fixing mechanism of a foup device according to an embodiment of the present invention;

FIG. 7 is a schematic structural diagram of an automatic unlocking device of a foup device according to an embodiment of the present invention;

FIG. 8 is a schematic diagram of the nitrogen gas charging system of the foup device according to one embodiment of the present invention;

FIG. 9 is a structural rear view of a gas purging block of the nitrogen gas charging system of the foup device according to one embodiment of the present invention;

FIG. 10 is a schematic diagram of the configuration of the gas purging block of the nitrogen gas charging system of the foup device in accordance with one embodiment of the present invention;

fig. 11 is a schematic structural diagram of an automatic door system of a foup device according to an embodiment of the invention;

fig. 12 is a schematic rear view of an automatic door of a foup device according to an embodiment of the invention.

Reference numerals: 100. a foup device, 10, a foup box, 101, a back cover of the foup box, 102, a box body of the foup box, a base plate of which 1, the foup box is arranged, 20, an upper end clamping mechanism, 201, a clamping mounting plate, 202, a guide rail slide block mechanism, 2021, a guide rail, 2022, an upper end slide block, 203, a slide block connecting plate, 204, a clamping support plate, 205, a clamp, 206, a clamp fixing plate, 207, a reinforcing rib, 208, an upper air cylinder connecting plate, 209, an upper air cylinder, 2091, an upper air cylinder telescopic rod, 210, an air cylinder support plate, 211, an adjusting nut, 30, a lower end fixing mechanism, 301, a sliding support plate, 302, a lower end slide block, 303, a slide way, 304, a fixing support plate, 305, a sliding air cylinder, 1, a sliding air cylinder telescopic rod, 306, a telescopic air cylinder, 3061, a telescopic air cylinder telescopic rod, 307, a locking clamping block, 308, a lower air cylinder connecting plate, 40, an automatic unlocking device, 403. an unlocking connector, 404, a key mounting seat, 405, a key, 406, a bearing mounting seat, 410, an automatic unlocking mechanism of a foup box, 50, a nitrogen gas filling gas system, 501, a nitrogen gas charging elbow, 505, a gas blowing block, 5051, a gas blowing block gas blowing hole, 5052, a gas blowing block gas inlet hole, 5152, a first gas blowing block gas inlet hole, 5252, a second gas blowing block gas inlet hole, 506, a floating door sealing plate, 507, a substrate gas inlet channel, 5071, a first substrate gas inlet channel, 5072, a second substrate gas inlet channel, 508, a substrate gas outlet channel, 60, an automatic door system, 601, a sealing cover plate, 602, a floating sealing door, 603, a traversing cylinder connecting plate, 604, a traversing slider, 605, a traversing cylinder, 606, a traversing guide rail, 607, a sealing cylinder, 6071, a first sealing cylinder, 6072, a second sealing cylinder, 608, a linear bearing, 609, a sliding rail slider of a flexible guide rail of the floating door, 6091, The sliding device comprises a first floating door telescopic guide rail sliding block 6092, a second floating door telescopic guide rail sliding block 610 and a floating door telescopic cylinder.

Detailed Description

In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The terms "first," "second," "third," "fourth," and the like in the description and in the claims, as well as in the drawings, if any, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It will be appreciated that the data so used may be interchanged under appropriate circumstances such that the embodiments described herein may be practiced otherwise than as specifically illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

Fig. 1-2 provided in the embodiments of the present invention provide schematic structural diagrams of a foup device 100, which includes a foup box 10, where the foup box 10 is fixed on a substrate, and the foup device 100 of the present invention further includes: the upper end clamping mechanism 20 is installed on the substrate 1 where the foup box is located, and the upper end clamping mechanism 20 is installed at the upper end of the foup box 10 and used for clamping and fixing the foup box 10; the lower end fixing mechanism 30 is installed on the substrate 1 where the foup box is located, the lower end fixing mechanism 30 is installed at the lower end of the foup box 10 and used for fixing the foup box 10, and the lower end fixing mechanism 30 and the upper end clamping device 20 are oppositely arranged so that the foup box 10 cannot move in the vertical direction; and the automatic unlocking mechanism 40 is used for automatically unlocking the foup box 10.

In some specific embodiments, the foup device 100 provided by the present invention further includes a nitrogen fill system 50 for venting air from within the foup box.

In some embodiments, the foup device provided by the present invention further includes an automatic door system 60 for automatic opening and closing of the foup cartridge.

In some specific embodiments, as shown in fig. 3-4, the upper end gripping mechanism 20 includes: the clamping device comprises a clamping mounting plate 201, a guide rail slider mechanism 202, a slider connecting plate 03, a clamping support plate 204, a clamp holder 205, an upper air cylinder connecting plate 208, an upper air cylinder 209 and an air cylinder support plate 210, wherein the guide rail slider mechanism 202 comprises upper end sliders of

guide rails

2021 and 2022, the guide rails 2021 are fixed with the clamping mounting plate 201, the upper end sliders 2022 are fixed with the slider connecting plate 203, the clamping support plate 204 is fixed on the slider connecting plate 203, the side end of the clamping support plate 204 is fixed with the slider connecting plate, the upper air cylinder is mounted on the clamping mounting plate through the air cylinder support plate, the clamp holder is connected with the clamping support plate 204, the upper air cylinder connecting plate 208 is fixed with the clamping support plate 204, and an upper air cylinder telescopic rod 2091 extends out and is in contact with the upper air.

Further preferably, in some specific embodiments, in the upper clamping mechanism 20 of the present invention, a clamp fixing plate 206 is further disposed between the clamping support plate 204 and the clamp 205, the clamp fixing plate 206 is fixedly connected to the clamping support plate 204, and the clamp 205 is connected to the clamp fixing plate 206 through a thread. Further preferably, the depth of the thread holding the mushroom head 205 is adjusted by adjusting the nut 211

In some specific embodiments, in the upper clamping mechanism 20 of the present invention, the angle between the clamping support plate 204 and the upper slider connecting plate 203 is 90 °.

Further preferably, in some specific embodiments, in the upper clamping mechanism 20 of the present invention, the side ends of the clamping support plate 204 and the upper slider connecting plate 203 are fixed by the reinforcing ribs 207. Further preferably, the number of the reinforcing ribs 207 is 2. The holder 205 is shaped like a mushroom head, in which case it can be called a holding mushroom head. The number of the cylinder support plates 210 is 2 for fixing the upper cylinder 209. The guide rail sliding block mechanism 202 and the clamping mounting plate 201 are fixed through screws. The cylinder support plate 210 and the clamping mounting plate 201 are fixed by screws. The upper cylinder connecting plate 208 and the clamping support plate 204 are fixed by screws.

In some particular embodiments, it is preferred that the upper clamping mechanism 20 of the present invention be mounted at an upper end location of the foup cartridge 10, wherein, the clamping mounting plate 201 is fixed on the base plate 12, the guide rail 201 of the guide rail slide block mechanism 202 is fixed with the clamping mounting plate 201, the upper end 202 of the guide rail slide block mechanism 202 is fixed with the slide block connecting plate 203, the clamping supporting plate 204 is fixed on the slide block connecting plate 203 through screw connection, the reinforcing rib 207 is fixed with the slide block connecting plate 203 and the side surface of the clamping supporting plate 204, the upper air cylinder 209 is fixed on the clamping mounting plate 201 through two air cylinder supporting plates 10, the upper air cylinder telescopic rod 2091 is fixedly connected with the clamping supporting plate 204 through the upper air cylinder connecting plate 208, the clamping mushroom head 205 is connected with the clamp holder, the depth of the thread of the holding mushroom 205 is adjusted by the adjusting nut 211 to control the protrusion length, and the holder fixing plate 206 is fixed to the holding support plate 204 by a screw. The substrate of the invention is the substrate 1 where the foup box is located.

The method for fixing the foup box 10 by the upper end clamping mechanism 20 comprises the following steps: a fixing opening is formed in the foup box, the gripper 205 of the upper end gripping mechanism 20 is located right above the fixing opening, and the upper cylinder telescopic rod 2091 is controlled to extend out, so that the slider connecting plate 203 is driven to move downwards together until the gripper 205 goes deep into the fixing opening of the foup box, and the fixation of the foup box 10 is completed.

In some specific embodiments, as shown in fig. 5 to 6, the lower end fixing mechanism 30 includes: a sliding support plate 301, a lower end slide block 302, a slide way 303, a fixed support plate 304, a sliding cylinder 305, a lower cylinder connecting plate 308, a telescopic cylinder 306 and a locking clamping block 307; the telescopic cylinder 306 is fixed on the fixed supporting plate 304, a telescopic cylinder telescopic rod 3061 extends out of the telescopic cylinder 306, and the locking clamping block 307 is fixed on the telescopic cylinder telescopic rod 3061; the slide way 303 is fixedly arranged above the fixed support plate 304, the lower end slide block 302 is arranged on the slide way 303, and the lower end slide block 302 can slide on the slide way 303; the sliding support plate 301 is fixedly installed on the lower end slider 302, and the sliding support plate 301 is used for placing the foup box 10.

In some specific embodiments, in the lower end fixing mechanism 30 of the present invention, the sliding cylinder 305 includes a sliding cylinder extension rod 3051, and the sliding cylinder extension rod 3501 extends out of the sliding cylinder 305 and is fixedly connected to the sliding support plate 301 through the lower cylinder connecting plate 308.

In some specific embodiments, in the lower end fixing mechanism 30 of the present invention, the sliding support plate 301 is driven to slide toward the substrate 1 of the foup box by the relative sliding between the slide way 303 and the lower end slide block 302, so that the substrate 1 of the foup box contacts the foup box 10.

In some specific embodiments, in the lower fixing mechanism 30 of the present invention, the side of the box body 102 of the foup box is disposed on the substrate 1, and the box body 102 is in contact with the substrate 1. The locking clamp 307 is matched with the locking port in shape and size. The locking clamp 307 presses on the locking port of the foup box 102, and the foup box 10 is fixed on the sliding support plate 301 of the lower end fixing mechanism 30, so that the foup box 10 is limited to move in the vertical direction.

The foup box 10 is locked by the lower end fixing mechanism 30 provided by the invention, and a specific locking method can be described as follows: will foup box 10 places in the slip backup pad, be provided with the locking mouth on the box body of foup box, the locking clamp splice with the locking mouth cooperatees, and the lower cylinder telescopic link that is in flexible state stretches out to the inside of locking mouth, the slip telescopic link of slip cylinder stretch out back with the slip backup pad passes through lower cylinder connecting plate fixed connection, through the slip between slide and the lower extreme slider, drives the base plate direction removal at slip backup pad to foup box place, after the base plate contact at foup box and foup box place, can realize the locking of foup box up. In a specific working process, a locking port is formed in the lower end of a foup box placed on a sliding support plate 301, a locking clamping block 307 fixedly connected with a telescopic rod of a telescopic cylinder 306 is located right below the locking port of the foup box 10, the telescopic cylinder 306 is fixed on a fixed support plate 304, the telescopic rod of the telescopic cylinder 306 in a contraction state extends upwards to extend into the locking port of the foup box 10, then a telescopic rod 3051 of a sliding cylinder 305 extends, the telescopic rod of the sliding cylinder 305 and the sliding support plate 301 are fixedly connected through a lower cylinder connecting plate 308, the sliding support plate 301 is driven to slide towards a substrate 1 where the foup box is located through sliding between a slide rail 303 and a lower end slide block 302, when the foup box 10 is in contact with the substrate 1 where the foup box is located, the locking clamping block 307 just clamps the foup box 10 at this time, and locking and fixing of the foup box 10 is achieved.

If the foup box is mounted on the sliding support plate by other means, the sliding support plate is configured to limit the movement of the foup box in other directions than the up-down direction, but not in the up-down direction. By using the locking mechanism for the foup box, the locking clamping block can be locked on the end face of the foup box, specifically the upper end face or the lower end face, so that the foup box is fixed on the sliding support plate, the freedom degree of the foup box in the vertical direction is limited, the foup box is locked, and the subsequent operation on the foup box is facilitated.

In some specific embodiments, as shown in fig. 7, the automatic unlocking device 40 includes at least two sets of foup box automatic unlocking mechanisms 410, and the foup box automatic unlocking device 40 is installed on a support plate of the foup box; each set of foup cartridge automatic unlocking mechanisms 410 includes: the key assembly comprises a lower cylinder 402, an unlocking connecting piece 403, a key mounting seat 404, a key 405, a bearing mounting seat 406, a key support base shaft (not shown in the figure) and a rotating bearing (not shown in the figure), wherein the bearing mounting seat is fixedly or rotatably arranged on the supporting plate, the tail part of the lower cylinder 402 is connected with the supporting plate, the head part of the lower cylinder 402 is connected with one end of the unlocking connecting piece 403, the other end of the unlocking connecting piece 403 is connected with the key mounting seat 404, the key 405 is connected with the key mounting seat 404, and the key mounting seat 404 is arranged on the bearing mounting seat 406.

Each group of foup box automatic unlocking mechanisms 410 of the at least two groups of foup box automatic unlocking mechanisms 410 are the respective independent foup box automatic unlocking devices 40, and the foup box automatic unlocking mechanisms 410 are arranged in central symmetry, so that the occupied space is very small. Preferably, in the present invention, the key 405 and a cylinder connecting rod (not shown) are hinged, and the key can be directly driven to rotate through the cylinder connecting rod. In the prior art, the notch is matched with the pin, so that the technology has poor adaptability, dead points and easy clamping; the moving part is driven by the cylinder to move up and down to unlock the lock in the prior art, the structure cannot ensure that the left lock and the right lock can synchronously rotate in application, and once the lock is asynchronous, the mechanism is easily locked and cannot be unlocked, and the reliability of the existing unlocking structure is proved to be poor in practical application.

In some specific embodiments, in the automatic unlocking device of the present invention, the tail of the lower cylinder 402 is hinged to the support plate by a pin, and the head of the lower cylinder 402 is fixedly connected to one end of the unlocking connector 403.

In some specific embodiments, in the automatic unlocking device 40 of the present invention, the other end of the unlocking link 403 is hinged to the key mounting seat 404 by a pin.

In a specific embodiment, in the automatic unlocking device 40 of the present invention, the bearing mount 406 is fixed to the support plate.

In the automatic unlocking device 40 of the present invention, in a specific embodiment, the key support base shaft (not shown) is fixed to the support plate by screws.

In a specific embodiment, in the automatic unlocking device 40 of the present invention, the key mount 404 is rotatably coupled to the key support base shaft through the rotational bearing.

In a specific embodiment, in the automatic unlocking device 40 of the present invention, the foup box automatic unlocking device 40 is composed of two sets of foup box automatic unlocking mechanisms 410, and the two sets of foup box automatic unlocking mechanisms 410 are distributed in a central symmetry manner. The invention utilizes the two cylinders to control the opening of the two locks, solves the problems of high error rate and poor reliability of the original unlocking device, improves the success rate of automatic unlocking of the foup box, and has strong reliability and higher adaptability.

In a specific embodiment, in the automatic unlocking device 40 of the present invention, the lower cylinder 402 includes a lower cylinder telescopic rod 4021, which can be adjusted according to actual conditions, and the connection between the unlocking connection member 403 and the lower cylinder telescopic rod 4021 can be adjusted, so as to adjust the length of the lower cylinder telescopic rod 4021.

Specifically, the automatic unlocking device 40 of the present invention is mounted on the support plate 1, the bearing mount 406 is fixed on the support plate 1, the key support base shaft (not shown) is fixed to the support plate 1 by screws, the key mount 404 is rotatably connected to the key support base shaft (not shown) by a rotary bearing (not shown), the key 405 is fixedly connected to the key mount 404 by screws, the unlocking connector 403 is hinged to the key mount 404 by a pin, the unlocking connector 403 is fixedly connected to the head (front section) of the lower cylinder 402, and the tail of the lower cylinder 402 is hinged to the support plate by a pin.

In some specific embodiments, as shown in fig. 8-10, the nitrogen fill system 50 includes: 2 or more than 2 substrate gas inlet channels 507, wherein the substrate gas inlet channels 507 are arranged on the substrate 1 where the foup box is positioned, and one end of each substrate gas inlet channel 507 is communicated with a nitrogen gas source and used for transmitting nitrogen gas; the substrate air-blowing device comprises an air-blowing block 505, wherein the air-blowing block is fixedly connected with a substrate 1 where a foup box is located, one surface of the air-blowing block 505 is provided with 2 or more than 2 air-blowing block air inlets 5052, the air-blowing block air inlets 5052 are respectively communicated with a substrate air inlet channel 507, a ventilation pipeline is arranged inside the air-blowing block 505, the ventilation pipeline is provided with a plurality of air-blowing block air holes 5051, the air-blowing block air holes 5051 are communicated with the interior of the foup box 10, and an included angle between the air-blowing direction of the air-blowing block air holes 5051 and the substrate surface of the substrate 1 where the foup box is located is 40-50 degrees; and the substrate exhaust channel 508, wherein the substrate exhaust channel 508 is arranged on the substrate 1 on which the foup box is arranged and is used for exhausting air in the foup box.

In some embodiments, in the nitrogen filling system 50 of the present invention, a nitrogen gas charging elbow 501 is further connected to a head of the substrate gas inlet channel 507 for the nitrogen gas source. A nitrogen gas source inputs nitrogen gas from the nitrogen gas plenum elbow 501 into the substrate gas inlet passage 507.

In some embodiments, in the nitrogen filling system 50 of the present invention, the blown block blowing holes 5051 communicate with the inside of the foup box 10, and the blowing direction of the blown block blowing holes 5051 makes an angle of 45 ° with the plane of the substrate 1.

In some embodiments, the nitrogen filling system 50 of the present invention further comprises a floating door seal plate 506. When nitrogen is filled, a rear cover (not shown) of the foup box 10 is opened, and the floating door closing plate 506 and the interior of the foup box 10 form a sealed space (not shown); a sealing cover plate is fixed on the substrate 1, the sealing cover plate and the substrate exhaust passage 507 form an opening space, and the opening space is located in the sealing space. In the invention, the sealing cover plate plays a role of sealing, and is used for sealing the space and isolating one part from the outside.

In some embodiments, in the nitrogen filling system 50 of the present invention, the sealing cover plate is provided with an exhaust valve (not shown), and when the air in the foup box 10 is exhausted from the substrate exhaust channel 507 and enters the open space, the air is exhausted to the outside of the sealing space through the exhaust valve (not shown). Further preferably, the number of the sealing cover plates is two, and each sealing cover plate is provided with two exhaust valves (not shown in the figure). In some embodiments, the nitrogen filling system further comprises a pressure release valve (not shown) disposed on the substrate 1 for discharging excess nitrogen and maintaining the foup box 10 at a constant pressure. Further preferably, the number of the pressure relief valves (not shown in the figure) is two. The exhaust pressure of the exhaust valve is smaller than that of the pressure relief valve, after the inflation starts, the pressure of the sealed space is continuously increased, and the exhaust starts when the exhaust pressure of the exhaust valve is reached, however, the pressure of the sealed space can be continuously increased, and when the pressure reaches the exhaust pressure of the pressure relief valve, nitrogen is discharged from the pressure relief valve communicated with the substrate air inlet channel to balance the air pressure.

In some embodiments, in the nitrogen filling system 50 of the present invention, the gas blowing block 505 is fixedly connected to the sidewall of the substrate 1 on which the foup box 10 is located.

In some specific embodiments, in the nitrogen filling system 50 of the present invention, the number of the gas put-block gas inlet holes 5152 is 2, which are the first gas put-block gas inlet hole 51521 and the second gas put-block gas inlet hole 51522; the number of the substrate gas inlet passages 507 is 2, and is a first substrate gas inlet passage 5071 and a second substrate gas inlet passage 50721; the first air-blowing block intake hole 5152 is communicated with the first substrate intake passage 5071, and the second air-blowing block intake hole 5252 is communicated with the second substrate intake passage 5072.

Specifically, in the present invention, the foup box may be attached to the substrate 1 by other mechanisms, and in operation, the back cover of the foup box 10 is opened first, and the internal space of the foup box 10 is sealed by the floating door seal plate 506 to form a sealed space. Then, two substrate air inlet channels 507 inside the substrate 1 are connected with an air source (which can be a nitrogen gas source or an inert gas source), the air blowing setting block 505 is fixedly connected with the side wall of the substrate 1, two air blowing setting block air inlet holes 5152 of the air blowing setting block 505 are respectively communicated with the two substrate air inlet channels 507 inside the substrate 1, when the air source starts to inflate, nitrogen enters the air blowing setting block 505 through the substrate air inlet channels 507 and the air blowing setting block air inlet holes 5152, then air is blown into the foup box 10 through the air blowing setting block air blowing holes 5051 of the air blowing setting block 505, the air blowing direction of the air blowing setting block air blowing holes 5051 of the air blowing setting block 505 is 45 degrees with the plane of the substrate 1, the nitrogen in the upfo box 10 enters at an angle of 45 degrees, at this time, the air in the up box 10 is extruded to the position of the substrate air outlet channel 508, and the air enters a small opening space formed by the sealing cover plate fixed on the substrate 1 and the substrate air outlet channel 508 due to the increase of the, and then discharged to the outside through a discharge valve (not shown) installed on the sealing cover plate, thereby removing the air from the inside of the foup box 10 and completely filling the inside with nitrogen gas, and the substrate gas inlet passage 507 is communicated with a discharge valve (not shown) installed on the substrate 1, and when the internal space has an excessive pressure, the discharged nitrogen gas is discharged through the discharge valve (not shown).

A foup box air exhaust method utilizes the vacuum nitrogen filling system in the foup box provided by the invention, and comprises the following steps:

s101, opening a rear cover of the foup box, and sealing the inner space of the foup box through a floating door sealing plate to form a sealed space;

s102, when a nitrogen gas source starts to charge, nitrogen gas enters a gas blowing placement block through a substrate gas inlet channel and a gas blowing placement block gas inlet hole in sequence;

s103, transmitting nitrogen gas into the air blowing setting block to the interior of the foup box through the air blowing setting block air blowing holes of the air blowing setting block, wherein the included angle between the transmission direction of the nitrogen gas transmitted to the interior of the foup box by the air blowing setting block air blowing holes and the plane of the substrate where the foup box is located is 40-50 degrees, and at the moment, filling the nitrogen gas into the foup box in the direction of the included angle of 40-50 degrees with the plane of the substrate, so that the air in the foup box is extruded to the position of the substrate exhaust channel. Nitrogen is blown in along an angle of 40-50 degrees, and air is discharged along a symmetrical angle, so that the air in the foup box is extruded to the position of the substrate exhaust channel.

Further preferably, the foup box air discharging method further comprises the following steps:

s104, when the air pressure of the sealed space is overlarge, exhausting air to the outside through an exhaust valve arranged on a sealed cover plate; and/or when the internal air pressure of the foup box is overlarge, the nitrogen transmitted into the foup box is discharged through the pressure relief valve.

In some specific embodiments, as shown in fig. 11-12, the automatic door system 60 includes: the linear bearing 608 is fixed on the substrate 1 on which the foup box is arranged; the floating gate cover plate (not shown in the figure) is provided with a vacuum sucker, and the vacuum sucker is used for tightly sucking the rear cover 101 of the foup box; a sealing cylinder 607 is fixed on the floating sealing door 602, the telescopic rod of the sealing cylinder contacts with the substrate 1 where the foup box is located, the telescopic rod of the linear bearing contacts with the floating sealing door 602, and the floating sealing door 602 and the substrate 1 where the foup box is located can move relatively; a traversing cylinder 605, wherein a traversing slider 604 is arranged on the traversing cylinder 605, and the traversing slider 604 moves under the driving of the traversing cylinder 605; a traverse cylinder connecting plate 603, wherein one end of the traverse cylinder connecting plate 603 is connected with the floating sealing door 602, and the other end of the traverse cylinder 605 is connected with a traverse sliding block 604 on the traverse cylinder 605; the floating gate telescopic cylinder 610 is arranged on the floating sealing gate 602 and connected with the floating gate cover plate, and one side or two sides of the floating gate telescopic cylinder 610 are provided with floating gate telescopic guide rail sliders 609.

In some embodiments, in the automatic door system 60 of the present invention, a traverse cylinder 605 is part of a traverse cylinder 605, the traverse cylinder 605 drives the traverse cylinder to move, and the traverse cylinder 605 is fixed on the substrate 1 on which the foup cassette is placed. Preferably, the traverse guide 606 is disposed on the back of the substrate 1 on which the foup cassette is disposed, and the floating seal door 602 is disposed on the substrate 1 on which the foup cassette is disposed through the traverse guide 606, so that the floating seal door 602 and the substrate 1 on which the foup cassette is disposed are closely attached, and the traverse guide 606 can also guide the movement of the floating seal door 602.

Preferably, in some specific embodiments, in the automatic door system 60 according to the present invention, the number of the sealing cylinders 607 is 2, and the sealing cylinders 607 are respectively located at the upper and lower positions of the automatic door for the foup box, the sealing cylinders 607 are fixed to the floating sealing door 602, the telescopic rods of the sealing cylinders 607 are connected to the substrate 1 on which the foup box is located, the linear bearings 608 are fixed to the substrate 1 on which the foup box is located, and the telescopic cylinders of the linear bearings 608 are connected to the floating sealing door 602, so that a certain distance is left between the substrate 1 on which the foup box is located and the floating sealing door 602, and the relative movement is possible. When the floating gate telescopic cylinder 610 moves left and right, the floating gate telescopic guide rail sliding block 609 can be driven to move, and the floating gate telescopic guide rail sliding block 609 can be used for guiding the automatic unlocking device 40.

In some specific embodiments, in the automatic door system of the present invention, under the action of two seal cylinders 607 and four linear bearings 608, one end of each seal cylinder being fixed on the floating seal door 602, and the other end of each seal cylinder being fixed on the substrate 1 on which the foup box is located, the floating seal door 602 floats, the traverse cylinder connecting plate 603 fixedly connects the traverse slide block with the floating seal door 602, the floating seal door 602 is connected with the substrate 1 on which the foup box is located through the traverse guide rail 606, the floating seal door 602 and the connecting part thereof are removed together with the movement of the traverse slide block under the action of the traverse cylinder 605, so as to realize the automatic opening of the automatic door, the silicon wafers in the foup box can be directly acted by a tool, after the operation is finished, the floating sealing door 602 is returned to the sealing position along with the action of the transverse sliding block and the transverse air cylinder 605, the sealing of the floating seal door 602 and the substrate 1 on which the foup box is located is achieved by two sealing cylinders 607 and four linear bearings 608.

The foup box is a common foup box in the prior art or an improved scheme thereof and is used for containing silicon wafers. In the present invention, the foup box may be mounted on a lower end support mechanism provided with a column for fixing the foup box, and the foup box may be moved in the up-down direction when the lower end support mechanism alone is fixed, so that an upper end holding device may be fixed to the upper end of the foup box for complete fixing. The upper end clamping device, the foup box and the lower end supporting mechanism are all fixed on the substrate, and the foup box can be fixed on the substrate through other mechanisms.

In the present invention, preferably, in some specific embodiments, the automatic door system of the present invention further includes a sealant pad, which is disposed on the substrate 1 where the foup box is located, and the sealant pad abuts against one side of the foup box 10 for fixing the foup box 10, so as to realize the fixing and sealing of the foup box 10.

In some specific embodiments, in the automatic door system of the present invention, the number of the sealing cylinders 607 is 2, which are respectively located at the upper end and the lower end of the automatic door for a foup box, and are respectively referred to as a first sealing cylinder 6071 and a second sealing cylinder 6072.

In some embodiments, in the automatic door system of the present invention, a floating door retracting rail slider 609, which is respectively referred to as a first floating door retracting rail slider 6091 and a second floating door retracting rail slider 6092, is disposed on each side of the floating door retracting cylinder 610. The number of the vacuum suction cups is two.

In some embodiments, the automatic door system of the present invention further includes a back plate (not shown) installed outside the floating sealing door 602.

In some specific embodiments, in the automatic door system of the present invention, the number of the linear bearings 608 is 4, and the foup-box automatic door is provided two above and two below.

In some specific embodiments, in the automatic door system of the present invention, the floating door telescopic rail sliding blocks 609 at both sides of the floating door telescopic cylinder 610 are respectively denoted as a first floating door telescopic rail sliding block 6091 and a second floating door telescopic rail sliding block 6092, and the first floating door telescopic rail sliding block 6091 and the second floating door telescopic rail sliding block 6092 are disposed on the floating seal door 602 or the automatic unlocking device 40 of the foup box.

In some specific embodiments, the automatic foup box unlocking device 40 mounted on the floating door cover plate acts to unlock the lock on the back cover 101 of the foup box locked with the foup box 10, the back cover 101 of the foup box is sucked tightly by two vacuum suction cups fixed on the floating door cover plate, the floating door telescopic cylinder 610 is fixed on the floating seal door 602, at this time, the floating door telescopic cylinder 610 connected with the floating door cover plate is contracted, and the back cover 101 of the foup box is removed and moved to the inside under the action of two sets of floating door telescopic guide rail sliders 609. Under the action of two sealing cylinders 607 and four linear bearings 608, one end of which is fixed on the floating sealing door 602, and the other end of which is fixed on the substrate 1 where the foup box is located, the floating sealing door 602 floats, the traverse sliding block is fixedly connected with the floating sealing door 602 by a traverse cylinder connecting plate 603, the floating sealing door 602 is connected with the substrate 1 where the foup box is located by a traverse guide rail 606, the floating sealing door 602 and a connecting part thereof are removed together with the movement of the traverse sliding block under the action of the traverse cylinder 605, so that the automatic opening of the door is realized, and the tool can directly act on the silicon wafer in the foup box 10, and after the tool is finished, the floating sealing door 602 is retreated to the sealing position under the action of the transverse sliding block and the transverse moving cylinder 605, the sealing of the substrate 1 where the floating sealing door 602 and the foup box are located is realized under the action of the two sealing cylinders 607 and the four linear bearings 608, and the overall sealing performance is ensured.

The invention also provides an automatic opening and sealing method for the foup box, and the automatic door for the foup box provided by the invention comprises the following steps:

s101, a vacuum sucker fixed on a floating door cover plate tightly sucks a rear cover 101 of the foup box, a telescopic rod of a floating door telescopic cylinder connected with the floating door cover plate contracts to drive a sliding block of a telescopic guide rail of the floating door, and the rear cover 101 of the foup box is taken down and moved to the inside of the automatic door;

s102, floating the sealing door 602 under the action of the sealing cylinder 607 and the linear bearing 608;

s103, the transverse moving sliding block moves under the driving of the transverse moving cylinder 605, drives the floating sealing door 602 to move, and moves away the floating sealing door 602 and other components of the automatic door for the foup box, so that the automatic door for the foup box is automatically opened;

s104, the transverse moving sliding block moves under the driving of the transverse moving cylinder 605, drives the floating sealing door 602 to move, and retreats the floating sealing door 602 to a sealing position, so that the automatic door for the foup box is automatically closed.

In some embodiments, the floating seal gate 602 and the substrate 1 on which the foup cassette is located are sealed and can move relative to each other.

the foup device provided by the invention can completely fix the foup box, is convenient to operate, and can automatically unlock the foup box. The vacuum automatic door for silicon wafer transmission has the advantages of strong reliability, reasonable structure, convenient adjustment, smaller occupied space, better sealing effect in a vacuum environment and lower cost. The automatic opening and the automatic vacuum sealing of the foup box can be realized, the occupied space of the sealing door is reduced, the sealing effect is good, the structure is reasonable, and the cost is low.

It is clear to those skilled in the art that, for convenience and brevity of description, the specific working processes of the above-described systems, apparatuses and units may refer to the corresponding processes in the foregoing method embodiments, and are not described herein again.

In the several embodiments provided in the present application, it should be understood that the disclosed system, apparatus and method may be implemented in other manners. For example, the above-described apparatus embodiments are merely illustrative, and for example, the division of the units is only one logical division, and other divisions may be realized in practice, for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection through some interfaces, devices or units, and may be in an electrical, mechanical or other form.

The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.

To sum up, the content of the present specification should not be construed as limiting the invention, since the scope of the application and the detailed description of the invention may vary according to the concept of the embodiment of the present invention.

Claims

1. A foup device comprising a foup cassette, the foup cassette being fixed on a substrate, characterized by further comprising:

the upper end clamping mechanism is arranged on the substrate where the foup box is located, is arranged at the upper end of the foup box and is used for clamping and fixing the foup box;

the lower end fixing mechanism is mounted on the substrate where the foup box is located, the lower end fixing mechanism is mounted at the lower end of the foup box and used for fixing the foup box, and the lower end fixing mechanism and the upper end clamping mechanism are oppositely arranged so that the foup box cannot move in the vertical direction;

the automatic unlocking mechanism is used for automatically unlocking the foup box;

the lower end fixing mechanism includes: the device comprises a sliding support plate, a lower end sliding block, a slideway, a fixed support plate, a sliding cylinder, a lower cylinder connecting plate, a telescopic cylinder and a locking clamping block; the telescopic cylinder is fixed on the fixed supporting plate, a telescopic rod extends out of the telescopic cylinder, and the locking clamping block is fixed on the telescopic rod of the telescopic upper cylinder; the slide way is fixedly arranged above the fixed supporting plate, the lower end sliding block is arranged on the slide way, and the lower end sliding block can slide on the slide way; the sliding support plate is fixedly installed on the lower end sliding block and used for placing the foup box.

2. The foup device of claim 1, further comprising a nitrogen fill system for venting air within the foup cartridge.

3. A foup device according to claim 1 or 2, further comprising an automatic door system for automatic opening and closing of the foup cartridge.

4. The foup device of claim 1, wherein the upper end gripper mechanism comprises: centre gripping mounting panel, guide rail slider mechanism, slider connecting plate, centre gripping backup pad, holder, go up the cylinder connecting plate, go up cylinder and cylinder backup pad, guide rail slider mechanism includes guide rail and upper end slider, the guide rail with the centre gripping mounting panel is fixed, the upper end slider with the slider connecting plate is fixed, the centre gripping backup pad is fixed on the slider connecting plate just the side of centre gripping backup pad with the slider connecting plate is fixed, it passes through to go up the cylinder backup pad is installed on the centre gripping mounting panel, the holder with the centre gripping backup pad is connected, go up the cylinder connecting plate with the centre gripping backup pad is fixed, go up the cylinder telescopic link stretch out and with it contacts to go up the cylinder connecting plate.

5. The foup device of claim 1, wherein the automatic unlocking mechanisms comprise at least two sets of foup box automatic unlocking mechanisms mounted on a support plate of a foup box; a set of foup box automatic unlocking mechanism includes: lower cylinder, unblock connecting piece, key mount pad, key, bearing mount pad, key support base shaft, rolling bearing, the bearing mount pad is fixed or rotationally install in the backup pad, the afterbody of lower cylinder with the backup pad is connected, the head of lower cylinder with the one end of unblock connecting piece is connected, the other end of unblock connecting piece with the key mount pad is connected, the key in the key mount pad is connected, the key mount pad is installed on the bearing mount pad.

6. The foup device of claim 2, wherein the nitrogen fill system comprises: 2 or more than 2 substrate gas inlet channels, wherein the substrate gas inlet channels are arranged on the substrate where the foup box is positioned, and one end of each substrate gas inlet channel is communicated with a nitrogen gas source and is used for transmitting nitrogen gas; the substrate surface of the substrate is provided with a plurality of air inlet holes, the air inlet holes of the air inlet blocks are respectively communicated with the substrate air inlet channel, a ventilation pipeline is arranged in the air inlet blocks, the ventilation pipeline is provided with a plurality of air blowing holes of the air inlet blocks, the air blowing holes of the air inlet blocks are communicated with the inside of the foup box, and the included angle between the air blowing direction of the air blowing holes of the air inlet blocks and the substrate surface of the substrate where the foup box is located is 40-50 degrees; and the substrate exhaust channel is arranged on the substrate where the foup box is positioned and used for exhausting air in the foup box.

7. The foup device of claim 3, wherein the automatic door system comprises: the linear bearing is fixed on the substrate where the foup box is located; the floating gate cover plate is provided with a vacuum sucker, and the vacuum sucker is used for tightly sucking a rear cover of the foup box; the floating seal door is fixedly provided with a seal cylinder, a telescopic rod of the seal cylinder is in contact with a substrate where the foup box is located, a telescopic rod of the linear bearing is in contact with the floating seal door, and the floating seal door and the substrate where the foup box is located can move relatively; the transverse moving cylinder is provided with a transverse moving slide block, and the transverse moving slide block moves under the driving of the transverse moving cylinder; one end of the transverse moving cylinder connecting plate is connected with the floating sealing door, and the other end of the transverse moving cylinder is connected with a transverse moving sliding block on the transverse moving cylinder; the floating gate telescopic air cylinder is arranged on the floating sealing gate and connected with the floating gate cover plate, and a floating gate telescopic guide rail sliding block is arranged on one side or two sides of the floating gate telescopic air cylinder.