CN109979866A - A kind of foup device - Google Patents
A kind of foup device Download PDFInfo
- Publication number
- CN109979866A CN109979866A CN201711455320.6A CN201711455320A CN109979866A CN 109979866 A CN109979866 A CN 109979866A CN 201711455320 A CN201711455320 A CN 201711455320A CN 109979866 A CN109979866 A CN 109979866A
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- Prior art keywords
- foup
- cylinder
- foup box
- substrate
- box
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention provides a kind of foup device, including foup box, the foup box is fixed on substrate；Further include: upper end clamping device, the upper end clamping device are mounted on the substrate where the foup box, and the upper end clamping device is mounted on the upper end of the foup box, for gripping the foup box；Lower end fixed mechanism, the lower end fixed mechanism is mounted on the substrate where the foup box, and the lower end fixed mechanism is mounted on the lower end of the foup box, for fixing the foup box, and the fixing lower and the upper end clamping device are oppositely arranged so that the foup box can not move in the up-down direction；Automatic unlocking mechanism, for foup box described in automatic unlocking.Foup box can be completely fixed by foup device provided by the invention, facilitate operation, and can be with automatic unlocking foup box.
Description
Technical field
The present invention relates to a kind of automated machine devices for being mainly used in industrial circle more particularly to a kind of foup to fill
It sets.
Background technique
In semiconductor fabrication factory, wafer usually requires efficiently to be passed between technical modules different in the production line
Defeated and positioning, front equipment end device (Equipment Front End Module, abbreviation EFEM) exactly complete this task
Critical equipment is the bridge for connecting materials conveying system and wafer handling system, can make wafer under the conditions of not contaminated
Accurately transmitted.
Front equipment end device includes at least wafer cassette (Front Opening Unified Pod, letter for storing wafer
Claim Foup), the load port (Load Port) for carrying wafer cassette and for taking out and store wafer out of wafer cassette
Manipulator in wafer cassette, the load port include door opener and the load carrier that is arranged on door opener, when partly leading
Before travelling bogie on body production line moves to load port, by the carrying that wafer cassette is manually or mechanically placed into load port
In mechanism, then acted by the box of opening that door opener executes wafer cassette, and then the wafer in wafer cassette is taken out simultaneously by manipulator
It is delivered to board and carries out corresponding processing procedure, store wafer to wafer cassette after wafer working process, then by manipulator.
A kind of FOUP loading door gear is disclosed in the prior art, including one loads door body, a frame, a loading door fortune
Dynamic system and a wafer test section；Load door kinematic system include one load door connecting bracket, a lifting platform, one the oneth X to
Mobile mechanism, one first Y-direction mobile mechanism and a turnover mechanism；Frame, which is rotatablely connected with, loads door connecting bracket；The
One X includes an X to movable part and an X to drive part to mobile mechanism, makes to load door connecting bracket OQ t platform along X
To movement；First Y-direction mobile mechanism includes a Y-direction lead screw assembly, and lifting platform is made to do lifting fortune along the lead screw of Y-direction lead screw assembly
It is dynamic；Turnover mechanism includes a turnover connection structure, a tumble cylinder, and the cylinder rod of tumble cylinder and the lower frame of frame are fixed and connected
It connects, frame can be rotated relative to door body is loaded.This FOUP loads door gear, and structure is complicated, and can not be in the completely solid of FOUP
It is fixed, it is inconvenient.
It discloses a kind of wafer cassette conveying Load System in the prior art, including wafer cassette, conveying device and opens box device.
There are two lockholes for setting on the box cover, described to open two unlocking groups corresponding with the lockhole of flexible connection on box plate
Part, this two unlocking components open box plate described in and are fixed at first actuator opened on rear side of box plate
Transmission connection.It is disclosed in its specific embodiment, the output shaft of the 5th actuator is directly connected to movable part, passes through the output of cylinder
Axis is flexible, and movable part is driven to move up and down, and then realizes the unlock and locking of the split box plate of movable part.This structure is being applied
In, not can guarantee two locks in left and right can rotate synchronously, it is easy to lead to mechanism blockage, can not unlock, poor reliability.
With the fast development of industrial automation, in silicon wafer processing industry, the processing of silicon wafer, silicon box and silicon wafer carry,
The degree of automation of pick-and-place is very high.Silicon wafer transmits in vacuum environment and processing is to guarantee silicon wafer processing cleanliness important means,
Therefore vacuum sealing device is the key equipment of silicon chip process technology.Foup box is inside connection silicon wafer processing equipment with automatically-controlled door
With external important transition portion, original foup box generally adopts enabling with automatically-controlled door inwardly, hermatic door is caused to take up space greatly,
It is at high cost, poor sealing effect.
Summary of the invention
In view of this, the embodiment of the invention provides a kind of foup device, including foup box, the foup box are fixed on base
On plate, foup device of the invention further include: upper end clamping device, the upper end clamping device are mounted on where the foup box
Substrate on, and the upper end clamping device is mounted on the upper end of the foup box, for gripping the foup box；Lower end
Fixed mechanism, the lower end fixed mechanism are mounted on the substrate where the foup box, and the lower end fixed mechanism is installed
In the lower end of the foup box, for fixing the foup box, and the fixing lower and the upper end clamping device phase
To setting so that the foup box can not move in the up-down direction；Automatic unlocking mechanism, for foup box described in automatic unlocking.
Optionally, in some embodiments, foup device provided by the present invention further includes nitrogen fill system, and being used for will
Air discharge in foup box.
Optionally, in some embodiments, foup device provided by the present invention further includes automatic door unit, is used for foup
Box opens and closes automatically.
Optionally, in some embodiments, the upper end clamping device includes: clamping mounting plate, guide rail slide block mechanism, cunning
Block connecting plate, clamp standoff plate, clamper, upper cylinder connecting plate, upper cylinder and cylinder support plate, the guide rail slide block mechanism packet
Guide rail and upper end sliding block are included, the guide rail is fixed with the clamping mounting plate, and it is solid that the upper end sliding block is connected with the slide block plate
Fixed, the clamp standoff plate is fixed on the slider connecting plate and the side of the clamp standoff plate is connected with the slide block plate
Fixed, the upper cylinder is mounted on the clamping mounting plate by the cylinder supports plate, the clamper and the clamping
Support plate connection, the upper cylinder connecting plate fixes with the clamp standoff plate, the upper cylinder telescopic rod stretching and with it is described
Upper cylinder connecting plate is in contact.Upper end clamping device of the invention is fixed on the substrate where foup box by clamping mounting plate
On.
Optionally, in some embodiments, the lower end fixed mechanism include: sliding support plate, lower end sliding block, slideway,
Fixed support plate, sliding cylinder, lower cylinder connecting plate, telescopic cylinder and locking fixture block；The telescopic cylinder is fixed on described solid
Determine in support plate, telescopic rod is extended on the telescopic cylinder, the locking fixture block is fixed on the lower cylinder telescopic rod；Institute
The top that slideway is fixedly mounted on the fixed support plate is stated, the sliding block is mounted on the slideway, and the sliding block can be in institute
It states and is slided on slideway；The sliding support plate is fixedly mounted on the lower end sliding block, and the sliding support plate is for placing
Foup box.
Optionally, in some embodiments, the auto-unlocking device includes at least two groups foup box automatic unlocking mechanism,
The foup box automatic unlocking mechanism is mounted in a support plate of foup box；Under one group of foup box automatic unlocking mechanism includes:
Cylinder, unlock connector, key mounting base, key, bearing mounting base, key support standard shaft, rolling bearing, the bearing installation
Seat is fixed or is installed in rotation in the support plate, and the tail portion of the lower cylinder is connect with the support plate, the lower gas
The head of cylinder is connect with one end of the unlock connector, and the other end of the unlock connector and the key mounting base connect
It connects, the key is connected in the key mounting base, and the key mounting base is mounted on the bearing mounting base.
Optionally, in some embodiments, the nitrogen fill system includes: 2 or 2 above substrate inlet channels,
The substrate inlet channel is arranged on the substrate where foup box, one of the substrate inlet channel with Nitrogen source gases phase
It is logical, the transmission for nitrogen；Block is set in air blowing, and the air blowing is set block and is fixedly connected with the substrate where foup box, and the air blowing is set
The one side of block is equipped with 2 or 2 or more air blowings and sets block air inlet, and it is logical with the substrate air inlet respectively that block air inlet is set in the air blowing
Road communicates, and equipped with a ventilation pipe, the ventilation pipe is equipped with several air blowings and sets block air blowing for the inside for setting block of blowing
Hole, it is described air blowing set communicated in block gas hole and foup box and it is described blow set block gas hole blowing direction and foup box place
Substrate real estate between angle be 40 ° -50 °；Substrate exhaust passage, the substrate exhaust passage are arranged in foup box institute
Substrate on, discharge for the air in foup box.
Optionally, in some embodiments, the automatic door unit includes: linear bearing, and the linear bearing is fixed on
On substrate where foup box；Floating door cover plate, the floating door cover plate are equipped with vacuum chuck, and the vacuum chuck is for inhaling
The rear cover of tight foup box；Floating seal door, is fixed with sealing cylinder on the floating seal door, the sealing cylinder telescopic rod and
Substrate where foup box is in contact, and the telescopic rod of the linear bearing is in contact with the floating seal door, and the floating is close
Substrate where closure door and foup box can be with relative motion；Transverse cylinder is equipped with traversing sliding block in the transverse cylinder, described
Traversing sliding block moves under the driving of the transverse cylinder；Transverse cylinder connecting plate, one end of the transverse cylinder connecting plate with
The floating seal door connection, the other end of the transverse cylinder are connect with the traversing sliding block in the transverse cylinder；Floating gate
Telescopic cylinder, the floating gate telescopic cylinder are arranged on the floating seal door and are connected with the floating door cover plate,
The one or both sides of the floating gate telescopic cylinder are equipped with floating gate telescopic rail sliding block.
As can be seen from the above technical solutions, the embodiment of the present invention has the advantage that
Foup box can be completely fixed by foup device provided by the invention, facilitate operation, and can be with automatic unlocking foup
Box.
Detailed description of the invention
Fig. 1 is the structural schematic diagram according to the foup device of one embodiment of the invention；
Fig. 2 is the structural schematic diagram according to the foup device of another embodiment of the present invention；
Fig. 3 is the structural schematic diagram according to the upper end clamping device of the foup device of one embodiment of the invention；
Fig. 4 is the main view according to the upper end clamping device of the foup device of one embodiment of the invention；
Fig. 5 is the cross-sectional view according to the lower end fixed mechanism of the foup device of one embodiment of the invention；
Fig. 6 is the structural schematic diagram according to the lower end fixed mechanism of the foup device of one embodiment of the invention；
Fig. 7 is the structural schematic diagram according to the auto-unlocking device of the foup device of one embodiment of the invention；
Fig. 8 is the structural schematic diagram according to the nitrogen inflation system of the foup device of one embodiment of the invention；
Fig. 9 is the structure backsight that block is set according to the air blowing of the nitrogen inflation system of the foup device of one embodiment of the invention
Figure；
Figure 10 is the structural representation that block is set according to the air blowing of the nitrogen inflation system of the foup device of one embodiment of the invention
Figure；
Figure 11 is the structural schematic diagram according to the automatic door unit of the foup device of one embodiment of the invention；
Figure 12 is the rearview schematic diagram according to the automatically-controlled door of the foup device of one embodiment of the invention.
Appended drawing reference: 100, foup device, 10, foup box, 101, the rear cover of foup box, 102, the box body of foup box, 1,
Substrate where foup box, 20, upper end clamping device, 201, clamping mounting plate, 202, guide rail slide block mechanism, 2021, guide rail,
2022, upper end sliding block, 203, slider connecting plate, 204, clamp standoff plate, 205, clamper, 206, clamper fixed plate, 207,
Reinforcing rib, 208, upper cylinder connecting plate, 209, upper cylinder, 2091, upper cylinder telescopic rod, 210, cylinder supports plate, 211, adjusting
Nut, 30, lower end fixed mechanism, 301, sliding support plate, 302, lower end sliding block, 303, slideway, 304, fixed support plate, 305,
Sliding cylinder, 3051, sliding cylinder telescopic rod, 306, telescopic cylinder, 3061, telescopic cylinder telescopic rod, 307, locking fixture block,
308, lower cylinder connecting plate, 40, auto-unlocking device, 401, support plate, 402, lower cylinder, 403, unlock connector, 404, key
Spoon mounting base, 405, key, 406, bearing mounting base, 410, foup box automatic unlocking mechanism, 50, nitrogen fill out inflation system,
501, nitrogen inflates elbow, and 505, blow and set block, 5051, blow and set block gas hole, 5052, blow and set block air inlet, 5152, the
One, which blows, sets block air inlet, and 5252, second, which blows, sets block air inlet, 506, float gate sealing plate, 507, substrate inlet channel, 5071,
First substrate inlet channel, 5072, the second substrate inlet channel, 508, substrate exhaust passage, 60, automatic door unit, 601, close
Cover plate, 602, floating seal door, 603, transverse cylinder connecting plate, 604, traversing sliding block, 605, transverse cylinder, 606, traversing lead
Rail, 607, sealing cylinder, the 6071, first sealing cylinder, the 6072, second sealing cylinder, 608, linear bearing, 609, floating gate stretches
Contracting guide rail slide block, the 6091, first floating gate telescopic rail sliding block, the 6092, second floating gate telescopic rail sliding block, 610, floating gate
Telescopic cylinder.
Specific embodiment
In order to enable those skilled in the art to better understand the solution of the present invention, below in conjunction in the embodiment of the present invention
Attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is only
The embodiment of a part of the invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
The model that the present invention protects all should belong in member's every other embodiment obtained without making creative work
It encloses.
Description and claims of this specification and term " first ", " second ", " third ", " in above-mentioned attached drawing
The (if present)s such as four " are to be used to distinguish similar objects, without being used to describe a particular order or precedence order.It should manage
The data that solution uses in this way are interchangeable under appropriate circumstances, so that the embodiments described herein can be in addition to illustrating herein
Or the sequence other than the content of description is implemented.In addition, term " includes " and " having " and their any deformation, it is intended that
Cover it is non-exclusive include, for example, containing the process, method, system, product or equipment of a series of steps or units need not limit
In step or unit those of is clearly listed, but may include be not clearly listed or for these process, methods, produce
The other step or units of product or equipment inherently.
The Fig. 1-2 provided in the embodiment of the present invention gives a kind of structural schematic diagram of foup device 100, including foup
Box 10, the foup box 10 are fixed on substrate, foup device 100 of the invention further include: upper end clamping device 20, it is described on
On substrate 1 where holding clamping device 20 to be mounted on the foup box, the upper end clamping device 20 is mounted on the foup box
10 upper end, for gripping the foup box 10；Lower end fixed mechanism 30, the lower end fixed mechanism 30 are mounted on described
On substrate 1 where foup box, and the lower end fixed mechanism 30 is mounted on the lower end of the foup box 10, described in fixed
Foup box 10, and the fixing lower 30 and the upper end clamping device 20 are oppositely arranged so that the foup box 10 is upper
Lower section can not move upwards；Automatic unlocking mechanism 40, for foup box 10 described in automatic unlocking.
In some specific embodiments, foup device 100 provided by the present invention further includes nitrogen fill system 50, is used
It is discharged in by the air in foup box.
In some specific embodiments, foup device provided by the present invention further includes automatic door unit 60, is used for
Foup box opens and closes automatically.
In some specific embodiments, as shown in Figure 3-4, the upper end clamping device 20 includes: clamping mounting plate
201, guide rail slide block mechanism 202, slider connecting plate 03, clamp standoff plate 204, clamper 205, upper cylinder connecting plate 208, upper gas
Cylinder 209 and cylinder support plate 210, the guide rail slide block mechanism 202 include the upper end of guide rail 2021 and 2022 sliding block, the guide rail
2021 is fixed with the clamping mounting plate 201, and the upper end sliding block 2022 is connected with the slide block plate 203 and fixes, the clamping
Support plate 204 is fixed on the slider connecting plate 203 and the side of the clamp standoff plate 204 is connected with the slide block plate and consolidates
Fixed, the upper cylinder is mounted on the clamping mounting plate by the cylinder supports plate, the clamper and clamping branch
Fagging 204 connects, and the upper cylinder connecting plate 208 is fixed with the clamp standoff plate 204, and the upper cylinder telescopic rod 2091 is stretched
It is in contact out and with the upper cylinder connecting plate 208.
It is further preferred that in some specific embodiments, in upper end clamping device 20 of the invention, the clamping
Be additionally provided with clamper fixed plate 206 between support plate 204 and the clamper 205, the clamper fixed plate 206 with it is described
Clamp standoff plate 204 is fixedly connected, and the clamper 205 is connect by screw thread with the clamper fixed plate 206.It is further excellent
Selection of land adjusts the depth of thread of clamping mushroom head 205 by adjusting nut 211
In some specific embodiments, in upper end clamping device 20 of the invention, the clamp standoff plate 204 and institute
Stating the angle between upper end slider connecting plate 203 is 90 °.
It is further preferred that in some specific embodiments, in upper end clamping device 20 of the invention, the clamping
The side of support plate 204 and the upper end slider connecting plate 203 are fixed by reinforcing rib 207.It is further preferred that the reinforcement
The quantity of muscle 207 is 2.The shape of the clamper 205 is mushroom head, at this point it is possible to be referred to as clamping mushroom head.It is described
The quantity of cylinder supports plate 210 is 2, for fixing the upper cylinder 209.The guide rail slide block mechanism 202 and the clamping
It is fixed between mounting plate 201 by screw.It is solid by screw between the cylinder supports plate 210 and the clamping mounting plate 201
It is fixed.It is fixed between the upper cylinder connecting plate 208 and the clamp standoff plate 204 by screw.
In some specific embodiments, it is preferable that upper end clamping device 20 of the invention installs the upper end of foup box 10
Position, wherein clamping mounting plate 201 is fixed on the substrate 12, the guide rail 201 and clamping mounting plate 201 of guide rail slide block mechanism 202
Fixed, the upper end 202 of guide rail slide block mechanism 202 and slider connecting plate 203 are fixed, and clamp standoff plate 204 is connected by screw to solid
It is scheduled on slider connecting plate 203, reinforcing rib 207 and the side of slider connecting plate 203 and clamp standoff plate 204 are fixed, upper cylinder
209 are fixed on clamping mounting plate 201 by two cylinder supports plates 10, and upper cylinder telescopic rod 2091 passes through upper cylinder connecting plate
208 connect calmly with clamp standoff plate 204, and clamping mushroom head 205 is connect by screw thread with clamper fixed plate 206, pass through adjusting
Nut 211 adjusts the depth of thread of clamping mushroom head 205, controls extension elongation, and clamper fixed plate 206 is fixed by screws in
On clamp standoff plate 204.Substrate of the present invention is the substrate 1 where foup box.
Upper end clamping device 20 provided by the present invention is for fixing means when fixing foup box 10 comprising steps of described
Fixing port is offered on foup box, the clamper 205 of the upper end clamping device 20 is located at the surface of the fixing port, control
The upper cylinder telescopic rod 2091 stretches out, to drive the slider connecting plate 203 to move downwardly together, until the clamper
205 go deep into the fixing port of the foup box, complete the fixation of the foup box 10.
In some specific embodiments, as seen in figs. 5-6, the lower end fixed mechanism 30 includes: sliding support plate
301, lower end sliding block 302, slideway 303, fixed support plate 304, sliding cylinder 305, lower cylinder connecting plate 308, telescopic cylinder 306
With locking fixture block 307；The telescopic cylinder 306 is fixed on the fixed support plate 304, is stretched out on the telescopic cylinder 306
There is telescopic cylinder telescopic rod 3061, the locking fixture block 307 is fixed on the telescopic cylinder telescopic rod 3061；The slideway
303 are fixedly mounted on the top of the fixed support plate 304, and the lower end sliding block 302 is mounted on the slideway 303, described
Lower end sliding block 302 can slide on the slideway 303；The sliding support plate 301 is fixedly mounted on the lower end sliding block 302
On, the sliding support plate 301 is for placing foup box 10.
In some specific embodiments, in lower end fixed mechanism 30 of the invention, the sliding cylinder 305 includes sliding
It takes offence cylinder telescopic rod 3051, the sliding cylinder telescopic rod 3501 reaches the outside of the sliding cylinder 305 and by described
Lower cylinder connecting plate 308 is fixedly connected with the sliding support plate 301.
In some specific embodiments, in lower end fixed mechanism 30 of the invention, pass through slideway 303 and lower end sliding block
Opposite sliding between 302 drives 1 direction of the substrate sliding where the sliding support plate 301 to the foup box, to make
Substrate 1 where the foup box and foup box 10 contact.
In some specific embodiments, in lower end fixed mechanism 30 of the invention, the box body 102 of the foup box
Side is arranged on substrate 1, and the box body 102 is in contact with substrate 1.The shape of the locking fixture block 307 and the keeper
Shape and size match.The locking fixture block 307 is pressed in the keeper position of the foup box body 102, and the foup box 10 is solid
It is scheduled on the sliding support plate 301 of the lower end fixed mechanism 30, to limit the foup box 10 in the vertical direction
It is mobile.
Foup box 10 is locked using lower end fixed mechanism 30 provided by the present invention, specific locking method can be retouched
It states are as follows: the foup box 10 is placed on sliding support plate, keeper, the locking are provided on the box body of the foup box
Fixture block is matched with the keeper, and the lower cylinder telescopic rod in retracted position extend out to the inside of the keeper, described
The sliding extension bar of sliding cylinder is fixedly connected with the sliding support plate by lower cylinder connecting plate after stretching out, by slideway with
Sliding between the sliding block of lower end, the orientation substrate where driving sliding support plate to foup box is mobile, when until foup box with
After substrate contact where foup box, the locking of foup box can be realized.In the specific course of work, it is placed on sliding support
There is a keeper in the lower end of foup box on plate 301, and the locking fixture block 307 being fixedly connected with 306 telescopic rod of telescopic cylinder is in
Immediately below 10 keeper of foup box, telescopic cylinder 306 is fixed on fixed support plate 304, is now in the flexible of contraction state
The contraction pole of cylinder 306 stretches out upwards, extends to inside 10 keeper of foup box, and then, the sliding cylinder of sliding cylinder 305 is flexible
Bar 3051 stretches out, and the telescopic rod of sliding cylinder 305 is fixedly connected with sliding support plate 301 by lower cylinder connecting plate 308, passes through
Sliding between slideway 303 and lower end sliding block 302 drives 1 direction of the substrate sliding where sliding support plate 301 to foup box,
It is contacted when until foup box 10 with the substrate 1 where foup box, locks fixture block 307 at this time and just clamp foup box 10, realization pair
The effect of being locked of foup box 10.
If foup box is mounted on sliding support plate by other devices, the structure of sliding support plate can be limited
The movement in other directions of the foup box other than up and down direction, but the movement of foup box in the up-down direction can not be limited.And lead to
It crosses using foup box retaining mechanism of the invention, the locking fixture block can be locked in the end face of foup box, specifically may be used
For upper surface or lower end surface, to foup box is fixed on sliding support plate, to limit foup box up and down direction
Freedom degree, so that the locking to foup box is realized, convenient for the subsequent operation to foup box.
In some specific embodiments, as shown in fig. 7, the auto-unlocking device 40 include at least two groups foup box from
Dynamic unlocking mechanism 410, the foup box auto-unlocking device 40 are mounted in a support plate of foup box；Each group of foup box is certainly
Dynamic unlocking mechanism 410 includes: lower cylinder 402, unlock connector 403, key mounting base 404, key 405, bearing mounting base
406, key supports standard shaft (not shown), rolling bearing (not shown), and the bearing mounting base is fixed or be can be rotated
Ground is mounted in the support plate, and the tail portion of the lower cylinder 402 is connect with the support plate, the head of the lower cylinder 402
It is connect with one end of the unlock connector 403, the other end of the unlock connector 403 and the key mounting base 404 connect
It connects, the key 405 is connected in the key mounting base 404, and the key mounting base 404 is mounted on the bearing mounting base
On 406.
Every group of foup box automatic unlocking mechanism 410 of at least two groups foup box automatic unlocking mechanism 410 of the invention is each
It is the arrangement that is centrosymmetric between each foup box automatic unlocking mechanism 410 from independent foup box auto-unlocking device 40
, it takes up space very small.Preferably, in the present invention, key 405 and cylinder connecting rod (not shown) are hinged,
Key turns directly can be driven by cylinder connecting rod.And the prior art is fitted there are notch and pin cooperation, this technology is passed through
Answer performance poor, there are dead points, are easy card；It is moved up and down also by cylinder one movable part of driving in the prior art to unlock,
This structure not can guarantee two locks in left and right in the application and can rotate synchronously, once it is asynchronous, it is easy to lead to mechanism blockage, nothing
Method unlock, and existing this unlocking structure poor reliability is also demonstrated in practical application.
In some specific embodiments, in auto-unlocking device of the invention, the tail portion of the lower cylinder 402 passes through
Pin shaft and the support plate are hinged, and the head of the lower cylinder 402 is fixedly connected with one end of the unlock connector 403.
It is described to unlock the another of connector 403 in auto-unlocking device 40 of the invention in some specific embodiments
One end is hinged by pin shaft with the key mounting base 404.
In the particular embodiment, in auto-unlocking device 40 of the invention, the bearing mounting base 406 is fixed on institute
It states in support plate.
In the particular embodiment, in auto-unlocking device 40 of the invention, the key support standard shaft (does not show in figure
It is fixed out) with the support plate by screw.
In the particular embodiment, in auto-unlocking device 40 of the invention, the key mounting base 404 passes through described
Rolling bearing is rotatably coupled with key support standard shaft.
In the particular embodiment, in auto-unlocking device 40 of the invention, the foup box auto-unlocking device 40
It is made of two groups of foup box automatic unlocking mechanisms 410, this two groups of foup box automatic unlocking mechanisms 410 are centrosymmetric between each other
Distribution.The present invention controls the unlatching of two locks using two cylinders, and it is high, poor reliability to solve original tripper error rate
Problem improves the success rate of the automatic unlocking of foup box, and highly reliable, adaptability is higher.
In the particular embodiment, in auto-unlocking device 40 of the invention, the lower cylinder 402 is stretched including lower cylinder
Contracting bar 4021 can be adjusted according to the actual situation, the connection of the unlock connector 403 and the lower cylinder telescopic rod 4021
It is adjustable, so that the length of the lower cylinder telescopic rod 4021 be adjusted.
Specifically, the auto-unlocking device 40 in the present invention is mounted in support plate 1, and bearing mounting base 406 is fixed on branch
On fagging 1, key support standard shaft (not shown) is fixed with support plate 1 by screw, and key mounting base 404 passes through rotation axis
(not shown) and key support standard shaft (not shown) rotation connection are held, key 405 and key mounting base 404 pass through spiral shell
Nail is fixedly connected, and unlock connector 403 is hinged by pin shaft with key mounting base 404, unlock connector 403 and lower cylinder 402
Head (leading portion) be fixedly connected, the tail portion of lower cylinder 402 and the support plate are hinged by pin shaft.
In some specific embodiments, as seen in figs. 8-10, the nitrogen fill system 50 includes: 2 or 2 or more
Substrate inlet channel 507, the substrate inlet channel 507 are arranged on the substrate 1 where foup box, the substrate inlet channel
One of 507 communicates with Nitrogen source gases, the transmission for nitrogen；Block 505 is set in air blowing, and the air blowing is set where block and foup box
Substrate 1 is fixedly connected, and the one side that block 505 is set in the air blowing is equipped with 2 or 2 or more air blowings and sets block air inlet 5052, described to blow
Gas is set block air inlet 5052 and is communicated respectively with the substrate inlet channel 507, and the inside that block 505 is set in the air blowing is equipped with one and leads to
Feed channel, the ventilation pipe are equipped with several air blowings and set block gas hole 5051, and block gas hole 5051 and foup are set in the air blowing
It is communicated in box 10 and the air blowing is set between the blowing direction of block gas hole 5051 and the real estate of the substrate 1 where foup box
Angle is 40 ° -50 °；Substrate exhaust passage 508, the substrate exhaust passage 508 are arranged on the substrate 1 where foup box, use
In the discharge of the air in foup box.
In some specific embodiments, in nitrogen fill system 50 of the invention, the substrate inlet channel 507 is used
One in Nitrogen source gases access is also connected with nitrogen inflation elbow 501.Nitrogen source gases input nitrogen from nitrogen inflation elbow 501
To the substrate inlet channel 507.
In some specific embodiments, in nitrogen fill system 50 of the invention, block gas hole is set in the air blowing
5051 with communicated in foup box 10, and angle between 1 plane of blowing direction and substrate of block gas hole 5051 is set in the air blowing
It is 45 °.
In some specific embodiments, of the invention in nitrogen fill system 50 of the invention further includes float gate sealing plate
506.When filling nitrogen, the rear cover (not shown) of the foup box 10 is opened, the float gate sealing plate 506 and the foup
The inside of box 10 forms a sealing space (not shown)；Seal cover board, the seal cover board and institute are fixed on substrate 1
It states substrate exhaust passage 507 and forms an open space, the open space is located at the inside of the sealing space.In the present invention
In, seal cover board plays the role of sealing, is that sealing space is used to completely cut off an external part.
In some specific embodiments, in nitrogen fill system 50 of the invention, the seal cover board is equipped with row
Air valve (not shown), after entering the open space after air in foup box 10 is discharged by substrate exhaust passage 507,
The outside of the sealing space is discharged to by the exhaust valve (not shown) again.It is further preferred that the seal cover board
Quantity is two, sets that there are two exhaust valve (not shown)s on each seal cover board.In some specific embodiments, this hair
Nitrogen fill system provided by bright further includes relief valve (not shown), and the relief valve (not shown) is arranged in base
On plate 1, for extra nitrogen to be discharged, 10 constant pressure of foup box is kept.It is further preferred that the relief valve (not shown)
Quantity be two.The pressure at expulsion of exhaust valve is less than the pressure at expulsion of relief valve, and after inflation starts, the pressure of sealing space is not
It is disconnected to increase, start to be vented when reaching exhaust valve pressure at expulsion, still, seal cavity pressure will continue to increase, and pressure reaches pressure release
When the pressure at expulsion of valve, nitrogen is discharged from the relief valve being connected to substrate inlet channel, equilibrium air pressure.
In some specific embodiments, in nitrogen fill system 50 of the invention, block 505 and foup are set in the air blowing
The side wall of substrate 1 where box 10 is fixedly connected.
In some specific embodiments, in nitrogen fill system 50 of the invention, block air inlet is set in the air blowing
5152 quantity is 2, and block air inlet 51521 is set in the respectively first air blowing and block air inlet 51522 is set in the second air blowing；The base
The quantity of plate inlet channel 507 is 2, respectively first substrate inlet channel 5071 and the second substrate inlet channel 50721；Institute
State that block air inlet 5152 is set in the first air blowing and the first substrate inlet channel 5071 communicates, described second, which blows, sets block air inlet
5252 and the second substrate inlet channel 5072 communicate.
And specifically, it is preferable to ground, in the present invention, foup box can be bonded on substrate 1 by other mechanisms, when work, first
The rear cover of foup box 10 is opened, seals 10 inner space of foup box to form a sealing space by float gate sealing plate 506.So
Afterwards, two substrate inlet channels 507 inside substrate 1 are connect with gas source (can be Nitrogen source gases or noble gas source), and
Air blowing is set block 505 and is fixedly connected with the side wall of substrate 1, and two air blowings that block 505 is set in air blowing set block air inlet 5152 respectively at base
Two substrate inlet channels 507 inside plate 1 communicate, when gas source starts to inflate, nitrogen can by substrate inlet channel 507, blow
Gas sets block air inlet 5152 and sets block 505 into blowing, and then sets block gas hole 5051 to foup by the air blowing that block 505 is set in air blowing
It blows in box 10, blows and set airs blowing of block 505 to set the blowing direction of block gas hole 5051 be with 1 plane of substrate is in 45 degree of angles,
Nitrogen filling in foup box 10 is entered with 45 degree of angles, and the air in foup box 10 can be extruded to substrate exhaust passage at this time
508 position, then since the air pressure of entire enclosure space increases, air enters fixed seal cover board and substrate on substrate 1
Exhaust passage 508 is formed by a small open space, then (is not shown in figure by the exhaust valve being mounted on seal cover board
It is discharged outside out), so that the air inside foup box 10 be excluded completely, and full nitrogen can be filled up completely, substrate air inlet is logical
Road 507 is communicated with the relief valve (not shown) installed in substrate 1, and when inner space, air pressure is excessive, discharges into the nitrogen meeting come
It is discharged by relief valve (not shown).
A kind of foup box air-discharging method utilizes vacuum nitrogen fill system in foup box provided by the present invention, including step
It is rapid:
S101, the rear cover for opening foup box, seal the inner space of foup box to form a sealing by float gate sealing plate
Space；
S102, start to inflate when Nitrogen source gases, nitrogen passes sequentially through substrate inlet channel, blows to set block air inlet and enter and blow
Gas sets block；
S103, it enters to blow and sets nitrogen in block and set the air blowing of block by blowing and set block gas hole to the inside of foup box
Transmit nitrogen, blow set internal transmission nitrogen from block gas hole to foup box transmission direction and foup box where base plan
Between angle be 40 ° -50 °, at this point, nitrogen is packed into foup with the direction that the angle between base plan is 40 ° -50 °
In box, so that the air in foup box is extruded to the position of substrate exhaust passage.Nitrogen is blown into along 40 ° of -50 ° of angles,
And air can then be discharged along symmetric angle, so that the air in foup box is extruded to the position of substrate exhaust passage.
It is further preferred that the present invention also provides foup box air-discharging method further comprise the steps of:
S104, when the air pressure of the sealing space is excessive, air is arranged by the exhaust valve being mounted on seal cover board
To outside；And/or when foup box air pressure inside is excessive, transmits into the nitrogen in foup box and be discharged by relief valve.
In some specific embodiments, as depicted in figs. 11-12, the automatic door unit 60 includes: linear bearing 608,
The linear bearing 608 is fixed on the substrate 1 where foup box；Floating door cover plate, the floating door cover plate (do not show in figure
It is equipped with vacuum chuck out), the vacuum chuck is used to suck the rear cover 101 of foup box；Floating seal door 602, the floating
Sealing cylinder 607 is fixed on hermatic door 602, the substrate 1 where the sealing cylinder telescopic rod and foup box is in contact, described
The telescopic rod of linear bearing is in contact with the floating seal door 602, the substrate where the floating seal door 602 and foup box
1 can be with relative motion；Transverse cylinder 605 is equipped with traversing sliding block 604, the traversing sliding block 604 in the transverse cylinder 605
It is moved under the driving of the transverse cylinder 605；Transverse cylinder connecting plate 603, one end of the transverse cylinder connecting plate 603 with
The floating seal door 602 connects, the traversing sliding block 604 on the other end of the transverse cylinder 605 and the transverse cylinder 605
Connection；Floating gate telescopic cylinder 610, the floating gate telescopic cylinder 610 be arranged on the floating seal door 602 and with it is described
Floating door cover plate is connected, and is equipped with floating gate telescopic rail sliding block in the one or both sides of the floating gate telescopic cylinder 610
609。
In some specific embodiments, in automatic door unit 60 of the invention, traversing sliding block (not shown) category
In a part of transverse cylinder 605, transverse cylinder 605 allows to move to traversing slider-actuated, and transverse cylinder 605 is fixed on
On substrate 1 where foup box.Preferably, the back side of the substrate 1 where foup box, floating seal is arranged in traversing guide rail 606
Door 602 passes through on the substrate 1 where foup box is arranged in traversing guide rail 606, so that floating seal door 602 and foup box institute
Substrate 1 be bonded closely, traversing guide rail 606 can also play guiding role to the movement of floating seal door 602.
Preferably, in some specific embodiments, in automatic door unit 60 of the present invention, the sealing cylinder
607 quantity is 2, is located at the upper and lower position of foup box automatically-controlled door, and sealing cylinder 607 and floating seal door 602 are solid
Fixed, the telescopic rod of sealing cylinder 607 is ined succession the substrate 1 where foup box, and the substrate 1 where linear bearing 608 and foup box is solid
It is fixed, telescoping cylinder and floating seal door 602 connection of linear bearing 608, in this way, substrate 1 and floating seal door where foup box
There is certain distance between 602, it can be with relative motion.When floating gate telescopic cylinder 610 moves left and right, floating gate can be driven to stretch
The movement of contracting guide rail slide block 609, floating gate telescopic rail sliding block 609 can be used for the guiding of auto-unlocking device 40.
In some specific embodiments, in automatic door unit of the invention, one end is fixed on floating seal door 602,
The other end is fixed under the action of two sealing cylinders 607 and four linear bearings 608 on the substrate 1 where foup box, is floated
Dynamic sealing door 602 floats, and traversing sliding block is fixedly connected by transverse cylinder connecting plate 603 with floating seal door 602, floating seal
It is connected between substrate 1 where door 602 and foup box by traversing guide rail 606, as traversing sliding block is acted in transverse cylinder 605
Under movement, by floating seal door 602 and be connected thereto component and remove together, realize the automatic opening of automatically-controlled door, work can be used
Tool is directly acted on, with the effect of traversing sliding block and transverse cylinder 605, will float after completing operation with the silicon wafer in foup box
Hermatic door 602 returns to sealing station, realizes that floating is close under the action of two sealing cylinders 607 and four linear bearing 608
The sealing of substrate 1 where closure door 602 and foup box.
Foup box of the present invention is foup box or its improvement project common in existing, for holding silicon wafer.At this
In invention, it can be mounted on a lower end supporting mechanism in the foup box, be provided with column on the lower end supporting mechanism and be used for
The fixed foup box, when singly having lower end supporting mechanism to fix, foup box is also possible to move in above-below direction, therefore, in order to make
It is completely fixed, and can fix a upper end clamping device in the upper end of foup box.The upper end clamping device, foup box and lower end branch
Support mechanism is all fixed on substrate, and the foup box can be fixed on substrate by other mechanisms.
In the present invention, it is preferred to which automatic door unit of the invention further includes sealant in some specific embodiments
Pad, the seal gasket are arranged on the substrate 1 where foup box, and the seal gasket is against the side of foup box 10 for solid
Foup box 10 is determined, to realize the fixation and sealing of foup box 10.
In some specific embodiments, in automatic door unit of the invention, the quantity of the sealing cylinder 607 is 2
It is a, be located at the top and bottom of the foup box automatically-controlled door, be denoted as respectively for the first sealing cylinder 6071 and second it is close
Seal cylinder 6072.
In some specific embodiments, in automatic door unit of the invention, in the floating gate telescopic cylinder 610
Two sides are respectively provided with a floating gate telescopic rail sliding block 609, and it is floating to be denoted as the first floating gate telescopic rail sliding block 6091 and second respectively
Dynamic door telescopic rail sliding block 6092.The quantity of the vacuum chuck is two.
It further include rear cowl (not shown) in automatic door unit of the invention in some specific embodiments,
The rear cowl is mounted on the outside of the floating seal door 602.
In some specific embodiments, in automatic door unit of the invention, the quantity of the linear bearing 608 is 4
It is a, each up and down two of the foup box automatically-controlled door.
In some specific embodiments, in automatic door unit of the invention, the two of the floating gate telescopic cylinder 610
The floating gate telescopic rail sliding block 609 of side is denoted as the first floating gate telescopic rail sliding block 6091 respectively and the second floating gate stretches and leads
Rail sliding block 6092, the first floating gate telescopic rail sliding block 6091 and the second floating gate telescopic rail sliding block 6092 are arranged in institute
It states on floating seal door 602 or on the auto-unlocking device 40 of foup box.
In some specific embodiments, the foup box auto-unlocking device 40 being mounted on floating door cover plate is acted on, will
Lock on the rear cover 101 for the foup box locked with foup box 10 is opened, and is inhaled by two vacuum being fixed on floating door cover plate
Disk sucks the rear cover 101 of foup box, and floating gate telescopic cylinder 610 is fixed on floating seal door 602, at this time with floating door cover plate
The floating gate telescopic cylinder 610 of upper connection is shunk, under the action of two groups of floating gate telescopic rail sliding block 609 by foup box after
Lid 101 is removed and is moved to inside.One end is fixed on floating seal door 602, and the other end is fixed on the substrate 1 where foup box
Two sealing cylinders 607 and four linear bearings 608 under the action of, float floating seal door 602, transverse cylinder connection
Traversing sliding block is fixedly connected by plate 603 with floating seal door 602, is led between the substrate 1 where floating seal door 602 and foup box
Traversing guide rail 606 is crossed to connect, with movement of the traversing sliding block under the effect of transverse cylinder 605, by floating seal door 602 and and its
Connecting component is removed together, realizes the automatic opening of door, and tool can be applied directly on the silicon wafer in foup box 10, complete
Floating seal door 602 is returned to sealing station with the effect of traversing sliding block and transverse cylinder 605 by Cheng Hou, is sealed at two
The sealing that the substrate 1 where floating seal door 602 and foup box is realized under the action of cylinder 607 and four linear bearings 608, is protected
Demonstrate,prove whole leakproofness.
The present invention also provides a kind of automatic opening of foup box and encapsulating methods, and foup box provided by the present invention is utilized to use
Automatically-controlled door, comprising steps of
S101, the vacuum chuck being fixed on floating door cover plate suck the rear cover 101 of foup box, connect with floating door cover plate
Floating gate telescoping cylinder telescopic rod shrink, drive floating gate telescopic rail sliding block, the rear cover 101 of foup box is removed and is moved
To the inside of automatically-controlled door；
S102, under the action of sealing cylinder 607 and linear bearing 608, floating seal door 602 floats；
S103, traversing sliding block move under the driving of transverse cylinder 605, and drive the movement of floating seal door 602, will float
The other assemblies of dynamic sealing door 602 and the foup box automatically-controlled door are removed, and realize the automatic opening of foup box automatically-controlled door；
S104, traversing sliding block move under the driving of transverse cylinder 605, and drive the movement of floating seal door 602, will float
Dynamic sealing door 602 returns to sealing station, realizes being automatically closed for foup box automatically-controlled door.
In some specific embodiments, between the substrate 1 where the floating seal door 602 and foup box sealing and can
With relative movement.
As can be seen from the above technical solutions, the embodiment of the present invention has the advantage that
Foup box can be completely fixed by foup device provided by the invention, facilitate operation, and can be with automatic unlocking foup
Box.Highly reliable, structurally reasonable, easy to adjust to take up space smaller, sealing effect is more preferable in vacuum environment, cost is lower
Vacuum automatically-controlled door for chip transmission.The automatic opening and automatic vacuum sealing that foup box can be achieved, reduce hermatic door institute
It takes up space, sealing effect is good, structurally reasonable and at low cost.
It is apparent to those skilled in the art that for convenience and simplicity of description, the system of foregoing description,
The specific work process of device and unit, can refer to corresponding processes in the foregoing method embodiment, and details are not described herein.
In several embodiments provided herein, it should be understood that disclosed system, device and method can be with
It realizes by another way.For example, the apparatus embodiments described above are merely exemplary, for example, the unit
It divides, only a kind of logical function partition, there may be another division manner in actual implementation, such as multiple units or components
It can be combined or can be integrated into another system, or some features can be ignored or not executed.Another point, it is shown or
The mutual coupling, direct-coupling or communication connection discussed can be through some interfaces, the indirect coupling of device or unit
It closes or communicates to connect, can be electrical property, mechanical or other forms.
The unit as illustrated by the separation member may or may not be physically separated, aobvious as unit
The component shown may or may not be physical unit, it can and it is in one place, or may be distributed over multiple
In network unit.It can select some or all of unit therein according to the actual needs to realize the mesh of this embodiment scheme
's.
For those of ordinary skill in the art, thought according to an embodiment of the present invention, in specific embodiment and application
There will be changes in range, in conclusion the contents of this specification are not to be construed as limiting the invention.
Claims (8)
1. a kind of foup device, including foup box, the foup box is fixed on substrate, which is characterized in that further include:
Upper end clamping device, the upper end clamping device are mounted on the substrate where the foup box, and the upper end clamps
Mechanism is mounted on the upper end of the foup box, for gripping the foup box；
Lower end fixed mechanism, the lower end fixed mechanism is mounted on the substrate where the foup box, and the lower end is fixed
Mechanism is mounted on the lower end of the foup box, for fixing the foup box, and the fixing lower and upper end folder
Device is held to be oppositely arranged so that the foup box can not move in the up-down direction；
Automatic unlocking mechanism, for foup box described in automatic unlocking.
2. foup device according to claim 1, which is characterized in that further include nitrogen fill system, be used for foup box
Interior air discharge.
3. foup device according to claim 1 or 2, which is characterized in that further include automatic door unit, for foup box
It opens and closes automatically.
4. foup device according to claim 1, which is characterized in that the upper end clamping device include: clamping mounting plate,
Guide rail slide block mechanism, slider connecting plate, clamp standoff plate, clamper, upper cylinder connecting plate, upper cylinder and cylinder support plate, institute
Stating guide rail slide block mechanism includes guide rail and upper end sliding block, and the guide rail is fixed with the clamping mounting plate, the upper end sliding block with
The slider connecting plate is fixed, and the clamp standoff plate is fixed on the slider connecting plate and the side of the clamp standoff plate
It is connected with the slide block plate to fix, the upper cylinder is mounted on the clamping mounting plate by the cylinder supports plate, described
Clamper is connect with the clamp standoff plate, and the upper cylinder connecting plate is fixed with the clamp standoff plate, and the upper cylinder is stretched
Contracting bar is stretched out and is in contact with the upper cylinder connecting plate.
5. foup device according to claim 1, which is characterized in that the lower end fixed mechanism include: sliding support plate,
Lower end sliding block, slideway, fixed support plate, sliding cylinder, lower cylinder connecting plate, telescopic cylinder and locking fixture block；The flexible gas
Cylinder is fixed on the fixed support plate, and telescopic rod is extended on the telescopic cylinder, and the locking fixture block is fixed on described stretch
On contracting lower cylinder telescopic rod；The slideway is fixedly mounted on the top of the fixed support plate, and the lower end sliding block is mounted on institute
It states on slideway, the lower end sliding block can slide on the slideway；The sliding support plate is fixedly mounted on the lower end sliding block
On, the sliding support plate is for placing foup box.
6. foup device according to claim 1, which is characterized in that the auto-unlocking device includes at least two groups foup
Box automatic unlocking mechanism, the foup box automatic unlocking mechanism are mounted in a support plate of foup box；One group of foup box is automatic
Unlocking mechanism includes: lower cylinder, unlock connector, key mounting base, key, bearing mounting base, key support standard shaft, rotation axis
It holds, the bearing mounting base is fixed or is installed in rotation in the support plate, the tail portion of the lower cylinder and the support
Plate connection, the head of the lower cylinder are connect with one end of the unlock connector, the other end of the unlock connector and institute
The connection of key mounting base is stated, the key is connected in the key mounting base, and the key mounting base is mounted on the bearing peace
It fills on seat.
7. foup device according to claim 2, which is characterized in that the nitrogen fill system include: 2 or 2 with
Upper substrate inlet channel, the substrate inlet channel are arranged on the substrate where foup box, and the one of the substrate inlet channel
Head is communicated with Nitrogen source gases, the transmission for nitrogen；Block is set in air blowing, and the substrate where block and foup box are set in the air blowing fixes company
Connect, described blow sets the one side of block and is equipped with 2 or 2 or more and blows and sets block air inlet, the air blowing set block air inlet respectively with
The substrate inlet channel communicates, and the inside for setting block of blowing is equipped with a ventilation pipe, if the ventilation pipe is equipped with
Block gas hole is set in dry air blowing, and the air blowing is set to be communicated and the air blowing side of block gas hole is set in the air blowing in block gas hole and foup box
It is 40 ° -50 ° to the angle between the real estate of the substrate where foup box；Substrate exhaust passage, the substrate exhaust passage
It is arranged on the substrate where foup box, the discharge for the air in foup box.
8. foup device according to claim 3, which is characterized in that the automatic door unit includes: linear bearing, described
Linear bearing is fixed on the substrate where foup box；Floating door cover plate, the floating door cover plate is equipped with vacuum chuck, described
Vacuum chuck is used to suck the rear cover of foup box；Floating seal door is fixed with sealing cylinder on the floating seal door, described close
Substrate where envelope Telescopic-cylinder bar and foup box is in contact, and the telescopic rod of the linear bearing connects with the floating seal door
Touching, the substrate where the floating seal door and foup box can be with relative motion；Transverse cylinder is equipped in the transverse cylinder
Traversing sliding block, the traversing sliding block move under the driving of the transverse cylinder；Transverse cylinder connecting plate, the transverse cylinder connect
One end of fishplate bar is connect with the floating seal door, the traversing sliding block on the other end of the transverse cylinder and the transverse cylinder
Connection；Floating gate telescopic cylinder, the floating gate telescopic cylinder be arranged on the floating seal door and with the floating door closure
Plate is connected, and is equipped with floating gate telescopic rail sliding block in the one or both sides of the floating gate telescopic cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711455320.6A CN109979866B (en) | 2017-12-28 | 2017-12-28 | Foup device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711455320.6A CN109979866B (en) | 2017-12-28 | 2017-12-28 | Foup device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109979866A true CN109979866A (en) | 2019-07-05 |
| CN109979866B CN109979866B (en) | 2021-03-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711455320.6A Active CN109979866B (en) | 2017-12-28 | 2017-12-28 | Foup device |
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| Country | Link |
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Also Published As
| Publication number | Publication date |
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| CN109979866B (en) | 2021-03-26 |
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