WO2022037523A1

WO2022037523A1 - Unlocking mechanism for semiconductor processing apparatus and semiconductor processing apparatus

Info

Publication number: WO2022037523A1
Application number: PCT/CN2021/112751
Authority: WO
Inventors: 孙晋博
Original assignee: 北京北方华创微电子装备有限公司
Priority date: 2020-08-21
Filing date: 2021-08-16
Publication date: 2022-02-24
Also published as: KR102571465B1; CN111968934A; TWI771154B; JP7402379B2; TW202208738A; KR20230011437A; JP2023537342A

Abstract

Disclosed in the present application are an unlocking mechanism for a semiconductor processing apparatus and a semiconductor processing apparatus. The unlocking mechanism is used for opening or closing a lock body structure on a sealing door of a chip storage box, and comprises a key and a driving device, wherein the key can move into or out of a key groove of the lock body structure, and matches the key groove in an inserted manner; the driving device is connected to the key and is used for driving the key, when the sealing door is in a closed state, to rotate from an initial position to a first preset position which can enable the sealing door to be in an openable state, and driving the key, when the sealing door is in the openable state, to rotate from the first preset position to a second preset position which can enable the sealing door to be in the closed state; and the driving device is further used for driving the key to rotate from the second preset position to the initial position after the driving device drives the key to rotate from the first preset position to the second preset position, and the key does not make contact with the key groove at the initial position. The above solution can solve the problem that a wafer is easily contaminated during the unlocking process.

Description

Unlock mechanism of semiconductor processing equipment, semiconductor processing equipment

technical field

The present application relates to the technical field of semiconductor processing equipment, and in particular, to an unlocking mechanism of semiconductor processing equipment and semiconductor processing equipment.

Background technique

In semiconductor processing equipment, there are very high requirements for core process parameters such as film formation uniformity, film formation quality, metal ion contamination control and particle contamination control. In the manufacturing process of wafers, the contamination of particles is one of the main reasons that affect the production yield of wafers, so it is necessary to strictly control the contamination of wafers by particles.

At present, in order to control the contamination of wafers by particles, wafer storage boxes (or referred to as wafer boxes) are generally used to store and transport wafers in a semiconductor production process workshop. The existing film storage box includes a box body with an opening on one side and a box cover for closing the opening, the box cover can be movably connected with the box body, and the box cover also has a lock body structure. The movement of the mechanism controls the locking or unlocking of the sealing door by the lock body structure, so as to be able to control the switching of the box cover between the closed state and the openable state.

Specifically, the key of the unlocking structure is usually inserted into the key slot of the lock body structure, and the box cover is switched between the closed state and the open state by rotating the key. However, when the key needs to be taken out from the key slot, The contact between the key and the keyway will cause friction, and the particles generated by the friction may contaminate the wafer, thereby affecting the production yield of the wafer.

SUMMARY OF THE INVENTION

The present application discloses a semiconductor processing equipment, which can solve the problem that the particles generated during the unlocking process easily contaminate the wafer.

In order to solve the above-mentioned problems, the application adopts the following technical solutions:

The embodiment of the present application discloses an unlocking mechanism for semiconductor processing equipment, the unlocking mechanism is used to open or close a lock body structure on a sealed door of a film storage box, the unlocking mechanism includes a key and a driving device, and the key can be moved into Or remove the key slot of the lock body structure, and the key is inserted and matched with the key slot;

The driving device is connected with the key, and is used for driving the key to rotate from an initial position to a first preset position that can make the sealing door open when the sealing door is in a closed state; When the airtight door is in the openable state, driving the key to rotate from the first preset position to a second preset position capable of making the airtight door in the closed state;

The drive device is further configured to drive the key to rotate from the second preset position to the second preset position after the drive device drives the key to rotate from the first preset position to the second preset position. the initial position, the key and the key slot are not in contact with the key slot in the initial position.

As another technical solution, an embodiment of the present application further discloses a semiconductor processing equipment, including a sealing door of a storage box and an unlocking mechanism, wherein a lock body structure is provided on the sealing door, and the unlocking mechanism is used to open or When closing the lock body structure, it is characterized in that the unlocking mechanism adopts the aforementioned unlocking mechanism disclosed in the embodiments of the present application.

The technical solution adopted in this application can achieve the following beneficial effects:

In the technical solution of the unlocking mechanism of the semiconductor processing equipment disclosed in the present application, the driving device is connected to the key, and is used to drive the key to rotate from the initial position to the first preset position that can make the sealing door open when the sealing door is in the closed state. When the sealing door is in the openable state, the drive key is rotated from the first preset position to the second preset position that can make the sealing door in the closed state, so that the sealing door can be opened and closed. switch between. At the same time, the above-mentioned driving device is also used for driving the key to rotate from the above-mentioned second predetermined position to the initial position after the driving device drives the key to rotate from the first predetermined position to the second predetermined position, and the key and the key slot are in the initial position No contact, that is to say, the above-mentioned driving device first drives the key to rotate to the second preset position to ensure that the sealing door is closed, and then drives the key to rotate from the second preset position to the original position. The key slots are not in contact. At this time, when the key is taken out from the key slot, it is not easy to generate friction between the key and the key slot, so as to reduce the generation of particulate matter, reduce the particle contamination of the wafer, and improve the production yield of the wafer. The final solution The problem of easily contaminating the wafer during the unlocking process.

The semiconductor processing equipment disclosed in the present application, by using the above-mentioned unlocking mechanism disclosed in the embodiment of the present application, can reduce the generation of particulate matter, reduce the pollution of the wafer by the particulate matter, thereby improve the production yield of the wafer, and finally solve the problem of easy contamination during the unlocking process. Wafer problem.

Description of drawings

The drawings described herein are used to provide further understanding of the present application and constitute a part of the present application. The schematic embodiments and descriptions of the present application are used to explain the present application and do not constitute an improper limitation of the present application. In the attached image:

FIG. 1 is a schematic structural diagram of a semiconductor processing apparatus disclosed in an embodiment of the present application;

2 is a schematic structural diagram of a film storage box disclosed in an embodiment of the application;

3 is a schematic structural diagram of a lock body structure disclosed in an embodiment of the application in a locked state;

Fig. 4 is the positional relationship diagram of the key and the key slot;

5 is a schematic structural diagram of the lock body structure disclosed in an embodiment of the application in an unlocked state;

6 is a partial structural schematic diagram of the unlocking mechanism disclosed in the embodiment of the present application from a viewing angle;

FIG. 7 is a partial structural schematic diagram of the unlocking mechanism disclosed in the embodiment of the application from another perspective;

Fig. 8 is the partial enlarged schematic diagram of Fig. 3;

Fig. 9 is the partial enlarged schematic diagram of Fig. 5;

FIG. 10A is a motion process diagram of the driving device disclosed in the embodiment of the application in the first stroke;

FIG. 10B is a motion process diagram of the driving device disclosed in the embodiment of the application in the second stroke;

Description of reference numbers:

100-chamber section;

200-storage box, 210-box body, 220-sealed door, 230-lock body structure, 231-key slot, 232-turntable, 232a-arc slot, 233-lock lever, 233a-slider;

300-unlocking mechanism, 310-key, 311-connecting part, 320-driving device, 321-telescopic mechanism, 322-first link, 323-second link, 330-linkage mechanism, 340-limiting part, 341 -Limit block, 342-stop block.

detailed description

In order to make the objectives, technical solutions and advantages of the present application clearer, the technical solutions of the present application will be clearly and completely described below with reference to the specific embodiments of the present application and the corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of the present application, but not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

The terms "first", "second" and the like in the description and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It is to be understood that data so used may be interchanged under appropriate circumstances so that embodiments of the application can be practiced in sequences other than those illustrated or described herein. In addition, the objects distinguished by "first", "second", etc. are usually one type, and the number of objects is not limited. For example, the first object may be one or more than one. In addition, "and/or" in the description and claims indicates at least one of the connected objects, and the character "/" generally indicates that the associated objects are in an "or" relationship.

The technical solutions disclosed in the various embodiments of the present application will be described in detail below through specific embodiments and application scenarios with reference to the accompanying drawings.

Referring to FIG. 1 , an embodiment of the present application discloses a semiconductor processing equipment. The disclosed semiconductor processing equipment includes a chamber part 100 and an unlocking mechanism 300 . Generally speaking, the chamber part 100 may include a transfer chamber, a process chamber, etc. , the storage box 200 used by the semiconductor processing equipment is located outside the chamber part 100. As shown in FIG. 2 and FIG. The door 220 is provided with a lock body structure 230 for locking or unlocking the sealing door 220 so that it can be in a closed state or an openable state. The so-called closed state means that the sealing door 220 is in a closed position with the box body 210, The state where the sealing door 220 cannot be opened under the locking of the lock body structure 230 ; the so-called openable state refers to the state where the sealing door 220 is in a closed position with the box body 210 , but the sealing door 220 can be opened. The unlocking mechanism 300 is used to open or close the above-mentioned lock body structure 230 to realize the locking or unlocking of the sealing door 220 by the lock body structure 230 .

In the specific working process, the wafers are initially placed in the cassette 200, and the cassette 200 is transferred by the corresponding manipulator to the carrier set on the front side of the unlocking mechanism 300 (as shown in FIG. The position of the film box 200), and then, the lock body structure 230 is unlocked by the unlocking mechanism 300, so that the lock body structure 230 unlocks the sealing door 220, so that the sealing door 220 can be opened. The robot in 100 transfers the wafers in the storage box 200 to the wafer boat in the chamber part 100, and then the wafer is sent into the chamber part 100 for processing by the wafer boat. After the wafer processing is completed, it passes through the chamber part. The robot in 100 puts the wafer back into the storage box 200, then closes the sealing door 220, and then closes the lock body structure 230 through the unlocking mechanism 300, so that the lock body structure 230 locks the sealing door 220, and the process is completed. .

Specifically, as shown in FIG. 3 , FIG. 6 and FIG. 7 , the lock body structure 230 is provided with a key slot 231 , the unlocking mechanism 300 includes a key 310 and a driving device 320 , the key 310 can be moved into or out of the key slot 231 ; In the key connection described above, after the key 310 is moved into the key slot 231, the key 310 can be driven to rotate by the driving device 320 to drive the key slot 231 to rotate accordingly. In order to facilitate the moving in or out of the key 310, the size of the key slot 231 is slightly larger than that of the key 310, that is, there is a gap between the key 310 and the key slot 231, which makes the rotation angle of the key 310 and the key slot 231 different. For example, as shown in FIG. 4 , when the key 310 is rotated counterclockwise from a horizontal state by an angle of θ (ie, 90°), the key 310 is in a vertical state, and the key slot 231 is only in a vertical state due to the existence of the gap between them. It can rotate with the key 310 to an angle of (θ-α), at this time, there is a difference α between the rotation angle of the key 310 and the key slot 231, and the size of the difference α is determined by the above-mentioned gap. Similarly, when the key 310 is rotated clockwise from the vertical state by an angle of θ (ie, 90°), there is also a difference α between the rotation angles of the key 310 and the key slot 231 . Due to the existence of the difference α, the lock body structure 230 cannot be locked or unlocked normally because the key slot 231 is not rotated in place, so that the sealed door 220 cannot be normally opened or closed.

In order to solve the above problem, the driving device 320 is used to rotate the driving key 310 from the initial position to the first preset position that can make the sealing door 220 open when the sealing door 220 is in the closed state; when the sealing door 220 is in the openable state In the state, the driving key 310 is rotated from the first preset position to the second preset position which can keep the sealing door 220 in the closed state. Specifically, the above-mentioned first preset position satisfies: ensuring that the sealing door 220 is in an openable state, that is, can be normally opened; the above-mentioned second preset position satisfies: ensuring that the sealing door 220 is in a closed state, that is, can be normally closed .

When the key slot 231 is in a vertical state, the airtight door 220 is in a closed state; when the key slot 231 is in a horizontal state, the airtight door 220 is in an openable state, and when the airtight door 220 needs to be switched from the closed state to the openable state, Insert the key 310 into the key slot 231, at this time the key 310 is in a vertical state, and the position corresponding to this state is the initial position; then, the key 310 is driven by the driving device 320 to rotate clockwise from the vertical state (θ+α ) angle, the key 310 is in the first preset position, and the key slot 231 can rotate with the key 310 by an angle θ, that is, reach a horizontal state, so that the sealed door 220 can be switched to an openable state. When the sealing door 220 needs to be switched from the open state to the closed state, the key 310 is driven by the driving device 320 to rotate counterclockwise from the first preset position by an angle (θ+2α), and the key 310 is in the above-mentioned first preset position. In the second preset position, the key slot 231 can be rotated with the key 310 by an angle θ, that is, the vertical state is reached, so that the sealing door 220 can be switched to the closed state. Thereby, it can be ensured that the sealing door 220 can be normally opened or closed.

On this basis, the drive device 320 is further configured to rotate the drive key 310 from the second preset position to the initial position after the drive device 320 drives the key 310 to rotate from the first preset position to the second preset position, The key 310 is not in contact with the key slot 231 in the above-described initial position. Specifically, when the key 310 is in the above-mentioned second preset position, there is an included angle (ie, the difference α) between the key 310 and the key slot 231 in the vertical state, causing the key 310 and the key slot 231 to contact each other (eg, 4), at this time, if the key 310 is taken out from the key slot 231, the key 310 will rub against the key slot 231 to generate particulate matter, which may cause the particulate matter to contaminate the wafer. Therefore, by driving the key 310 to rotate from the second preset position to the initial position by the driving device 320, the key 310 can be brought into a vertical state, so that the key 310 does not contact the key slot 231, and is taken out from the key slot 231 at this time. When the key 310 is used, friction is not easily generated between the key 310 and the key slot 231, thereby reducing the generation of particulate matter, reducing the particle contamination of the wafer, thereby improving the production yield of the wafer, and finally solving the problem of easily contaminating the wafer during the unlocking process. .

In the specific working process, the key 310 is moved into the key slot 231, so that the key 310 is inserted and matched with the key slot 231, and then the driving device 320 starts to work to drive the key 310 to rotate to the above-mentioned first preset position, so as to ensure The sealing door 220 can be opened normally. After the sealing door 220 is opened, the wafers in the storage box 200 are transferred to the chamber part 100 by the robot for processing. After the wafer processing is completed, the wafers are put back by the robot. into the storage box 200. At this time, the key 310 is driven by the driving device 320 to rotate from the first preset position to the second preset position to ensure that the sealing door 220 can be closed normally, and then the key is driven by the driving device 320. 310 is rotated from the second preset position to the above-mentioned initial position, so that the key 310 does not contact the key slot 231, and then the key 310 is taken out from the key slot 231 to complete the process.

Therefore, the unlocking mechanism 300 disclosed in the present application can not only ensure that the sealing door 220 can be normally opened or closed, but also can reduce the generation of particulate matter, reduce the pollution of the wafer by the particulate matter, thereby improving the production yield of the wafer, and finally solve the problem of unlocking It is easy to contaminate the wafer during the process.

Optionally, the above-mentioned driving device 320 includes a telescopic mechanism 321 and a link mechanism, wherein the telescopic mechanism 321 is used to drive the above-mentioned link mechanism to move according to a preset first stroke and a second stroke, and the link mechanism is connected with the key 310. . It is assumed that when the key slot 231 is in a vertical state, the sealing door 220 is in a closed state; when the key slot 231 is in a horizontal state, the sealing door 220 is in an openable state, as shown in FIG. 10A , when it is necessary to turn the sealing door 220 from the closed state When switching to the openable state, insert the key 310 into the key slot 231, at this time the key 310 is in a vertical state, and the position corresponding to this state is the initial position (ie, the position of (1) in FIG. 10A ).

During the above-mentioned first stroke, the telescopic mechanism 321 always drives the above-mentioned link mechanism to move along the first linear direction (ie, the direction A in FIG. 10A ), so that the link structure can drive the key 310 from the initial position along the first Rotate in one direction (ie, counterclockwise in FIG. 10A ) to the above-mentioned second preset position (not shown in the figure), and then from the second preset position in a second direction opposite to the first direction (ie, , the clockwise direction in FIG. 10A ) is rotated to the above-mentioned first preset position (that is, the position of (3) in FIG. 10A ), at this time, the key slot 231 can reach the horizontal state, thereby realizing the self-closing state of the sealing door 220 Switch to open state. It should be noted that, as shown in FIG. 10A , in the process of rotating the key 310 from the initial position to the above-mentioned first preset position, when the key 310 is rotated to a horizontal state (ie, the position of (2) in FIG. 10A ) When the key slot 231 is not rotated to the horizontal state, the sealing door 220 cannot be opened normally, and when the key 310 continues to rotate from the horizontal state to the above-mentioned first preset position, the key slot 231 is rotated to the horizontal state. The door 220 can be opened normally.

When the sealing door 220 needs to be switched from the openable state to the closed state, as shown in FIG. 10B , in the second stroke, the telescopic mechanism 321 is always along the second linear direction opposite to the first linear direction (that is, as shown in FIG. 10B ). The direction B in 10A drives the link mechanism to move, so that the link structure can drive the key 310 from the above-mentioned first preset position (ie, the position shown in (3) in FIG. 10A ) along the first direction (ie , counterclockwise in FIG. 10B ) to the above-mentioned second preset position (ie, the position of (2) in FIG. 10B ), and then from the second preset position along the second direction (ie, in FIG. 10B ) clockwise direction) to return to the above-mentioned initial position, so that the sealing door 220 is switched from the open state to the closed state. It should be noted that, as shown in FIG. 10B , in the process of rotating the key 310 from the first preset position to the above-mentioned second preset position, when the key 310 is rotated to the vertical state (ie, (1) in FIG. 10B ) When the key slot 231 is not rotated to the vertical state, the sealing door 220 cannot be closed normally, and when the key 310 continues to rotate from the vertical state to the above-mentioned second preset position, the key slot 231 is rotated to the In the vertical state, the sealing door 220 can be normally closed at this time.

Table 1 is the correspondence table between the rotation direction, position and angle of the key and the state of the airtight door in the first process and the second process.

钥匙方向key direction	钥匙位置key location	钥匙角度key angle	密封门状态Sealed door status
--	初始位置initial position	0°0°	正常闭合状态normal closed state
逆时针counterclockwise	第二预设位置second preset position	-5°-5°	正常闭合状态normal closed state
顺时针Clockwise	水平位置horizontal position	90°90°	非正常可开状态abnormal open state
顺时针Clockwise	第一预设位置first preset position	95°95°	正常可开状态normal open state
逆时针counterclockwise	初始位置initial position	0°0°	非正常闭合状态Abnormal closed state
逆时针counterclockwise	第二预设位置second preset position	-5°-5°	正常闭合状态normal closed state
顺时针Clockwise	初始位置initial position	0°0°	正常闭合状态normal closed state

It can be seen from the above Table 1 that in the above-mentioned first stroke, the telescopic mechanism 321 always drives the above-mentioned link mechanism to move in the first linear direction, and the key 310 is driven by the link mechanism to rotate counterclockwise first, and then rotate clockwise. That is, the direction of rotation has changed; in the above-mentioned second stroke, the telescopic mechanism 321 always drives the above-mentioned link mechanism to move in the second linear direction, and the key 310 is driven by the link mechanism to rotate counterclockwise first and then clockwise. , the rotation direction has also changed, and in the second stroke, this change in the rotation direction can realize the rotation of the key 310 from the second preset position to the initial position, so that the key 310 and the key slot 231 are not in contact with the above-mentioned initial position At the same time, since the telescopic mechanism 321 can keep the same direction unchanged, the telescopic mechanism 321 does not need to be turned in the middle, does not need to extend and retract multiple times, and does not need multi-point positioning, which not only simplifies the movement of the telescopic mechanism 321, but also facilitates Under the control of the staff, the telescopic mechanism 321 is not easily damaged, and either a linear motor or an air cylinder can be selected as the telescopic mechanism 321, so that the selection range of the telescopic mechanism 321 can be expanded. In practical applications, the first stroke may be the retraction stroke of the telescopic mechanism 321 , and the second stroke may be the extension stroke of the telescopic mechanism 321 .

There can be many kinds of link mechanisms for realizing the above solution. For example, as shown in FIG. 6 and FIG. 7 , the link mechanism includes a first link 322 and a second link 323 , wherein the first link of the first link 322 is the first link 322 . The end is hinged with the telescopic rod of the telescopic mechanism 321 , the second end of the first link 322 is hinged with the first end of the second link 323 , and the key 310 is connected with the second end of the second link 323 . Driven by the telescopic mechanism 321, the first link 322 can drive the first end of the second link 323 to rotate around the second end of the second link 323 in the first direction or the second direction. The rod 323 can drive the key 310 to rotate concentrically, that is, the rotation center of the second link 323 coincides with the rotation center of the key 310 .

During the first or second stroke, the telescopic mechanism 321 drives the first link 322 to move, so that the first link 322 drives the second link 323 to rotate in the first direction or the second direction, thereby driving the key 310 Rotate in the first direction or the second direction. In practical applications, the structure and size of the first link 322 and the second link 323 can be designed according to specific needs, so that the key 310 can achieve the rotation direction, position and angle in the first and second processes.

Usually, in order to improve the stability of the airtight door 220, the airtight door 220 is usually provided with at least two lock body structures 230, and the at least two lock body structures 230 can make the airtight door 220 more stable when the airtight door 220 is in a closed state It is connected to the box body 210. In order to facilitate the unlocking mechanism 300 to unlock at least two lock body structures 230 at the same time and improve the unlocking efficiency, optionally, the key slot 231, the key 310 and the second link 323 can be at least two , the second link 323 is connected with the keys 310 in one-to-one correspondence, and each key 310 can be moved into or out of its corresponding key slot; as shown in FIG. 6 and FIG. 7 , the unlocking mechanism 300 may also include a linkage mechanism 330, At least two of the second links 323 are connected through the linkage mechanism 330 , the second end of the first link 322 is hinged with the first end of one of the second links 323 , and driven by the telescopic mechanism 321 , the first link The 322 can drive the at least two second connecting rods 323 to rotate synchronously through the linkage mechanism 330 , thereby driving the at least two keys 310 to rotate synchronously, thereby realizing the simultaneous unlocking of the at least two lock body structures 230 .

It can be known from the above structure and working process that the unlocking mechanism 300 has at least two keys 310, and the at least two keys 310 can rotate synchronously, so that the at least two lock body structures 230 on the sealing door 220 can be unlocked or closed synchronously. , thereby improving the unlocking efficiency. At the same time, the setting of the linkage mechanism 330 can realize that a single driving device 320 simultaneously drives at least two keys 310 to rotate synchronously, thereby not only reducing the structural complexity of the unlocking mechanism 300, but also reducing the cost of the unlocking mechanism 300.

Optionally, the second link 323 may include a body and a connecting portion 311 , the second end of the first link 322 is hinged with the body, and the linkage mechanism 330 is connected with the connecting portion 311 of each second link 323 . The key 310 rotates concentrically with the body, and the connecting portion 311 can provide a connection position for the linkage mechanism 330 and the second link 323, which is convenient for the linkage mechanism 330 to be connected with the second link 323, so as to facilitate the installation of the unlocking mechanism 300 by the staff and reduce the designer's Design difficulty.

As described above, the driving device 320 can synchronously drive the at least two second links 323 to rotate through the linkage mechanism 330 . Optionally, the linkage mechanism 330 can include a connecting rod, and each connecting portion 311 is hinged with the connecting rod. When one of the connecting parts 311 rotates, the connecting rod is driven to move, thereby driving the other connecting parts 311 to rotate. The linkage mechanism 330 has a simple structure, is easy to set up, has a low cost, and has a better transmission effect of the connecting rod. Further, the connecting rod can be a telescopic rod, which is convenient for the staff to adjust the rotation angle of the key 310, so that the key 310 can be completely unlocked or locked.

In order to improve the accuracy of unlocking or locking of the key 310 and avoid excessive rotation of the key 310, optionally, the unlocking mechanism 300 may further include a limiting portion 340, and the limiting portion 340 may be used to limit the telescopic rod of the telescopic mechanism 321 according to the above-mentioned section. The distance moved by one stroke or the second stroke, that is, the displacement of the telescopic mechanism 321 along the first linear direction or the second linear direction, so as to avoid excessive rotation of the key 310, so that the key 310 can be rotated to a predetermined position more accurately, Thus, the accuracy of unlocking or locking of the key 310 is improved.

Optionally, the limiter 340 may include a limit block 341 and a stop block 342, the limit block 341 may be fixedly arranged, and the stop block 342 may be provided on the telescopic rod, and can be used when the telescopic rod presses the above-mentioned first stroke or During the movement of the second stroke, it is in contact with the limit block 341 to prevent the telescopic rod from continuing to move. The limit process is simple and the limit is reliable. Further, the stopper block 342 can be an elastic block or an elastic piece is provided on the stopper block 342 to achieve elastic limit and avoid hard contact.

In the embodiment of the present application, the telescopic mechanism 321 can be of various types, such as a hydraulic telescopic rod. Optionally, the telescopic mechanism 321 can be a linear motor or an air cylinder. The driving of the linear motor and the cylinder is reliable and the technology is mature, which is beneficial to improve the stability of the unlocking mechanism 300 .

Optionally, as shown in FIG. 3 and FIG. 5 , the lock body structure 230 may include a key slot 231 , a turntable 232 and a lock lever 233 , wherein the lock lever 233 is movably connected with the sealing door 220 and can be moved to make the sealing door 220 The locked position in the closed state (ie, the position of the lock lever 233 in FIG. 3 ), or the unlocked position in which the sealing door 220 is openable (ie, the position of the lock lever 233 in FIG. 5 ). Specifically, as shown in FIG. 3 , one end of the locking rod 233 protrudes to the outside of the side relative to the side of the sealing door 220 so as to be able to extend into the corresponding fixing groove in the box body 210 , so as to realize the locking of the sealing door 220 lock. As shown in FIG. 5 , one end of the locking rod 233 is retracted to the inner side of the side edge of the sealing door 220 so as to be able to move out from the corresponding fixing groove in the box body 210 , thereby realizing the unlocking of the sealing door 220 .

The turntable 232 is movably connected with the lock lever 233, and the turntable 232 is fixedly connected with a connecting piece, and the connecting piece is provided with the above-mentioned key slot 310; when the above-mentioned driving device 320 drives the key 310 in the key slot 310 to rotate, the key 310 passes through the It cooperates with the key slot 310 to drive the turntable 232 to rotate, so that the turntable 232 synchronously drives the lock rod 233 to move to the locking position or the unlocking position. The structure of the lock body structure 230 of this structure is simple and reliable, and is convenient to set up, so that the structural complexity of the unlocking mechanism 300 can be reduced, and the design difficulty of the designer can be reduced.

There are various ways for the turntable 232 to be movably connected to the locking rod 233. For example, as shown in FIG. 8 and FIG. 9, the turntable 232 is provided with an arc-shaped groove 232a; It is movably connected with the turntable 232 and can rotate along the arc-shaped groove 232 a , and the other end of the sliding piece 233 a is fixedly connected with the locking rod 233 . The sliding member 233a is, for example, a protrusion disposed on the locking rod 233 and protruding relative to the rod body of the locking rod 233. The protrusion penetrates the arc-shaped groove 232a and can rotate along the arc-shaped groove 232a.

Optionally, there are a plurality of lock bars 233 and are arranged in pairs, and the pair of two lock bars 233 are arranged at intervals in the vertical direction in FIGS. 3 and 5 , and a turntable 232 is arranged at the interval between them. For example, as shown in FIG. 3 and FIG. 5 , there are two pairs of locking rods 233 , and correspondingly, there are two turntables 232 . Corresponding to each turntable 232, the above-mentioned arc grooves 232a are two, and are arranged symmetrically with respect to the rotation center of the turntable 232, and there are two sliding members 233a, and one end of the two is respectively connected with the pair of two locking bars 233. , the other ends of the two are movably connected with the turntable 232 and can rotate along the two arc-shaped grooves 232a respectively.

As shown in FIG. 8 , when the key slot 231 is in a vertical state, the sliding member 233a is located at one end of the arc-shaped slot 232a. When the key slot 231 is driven clockwise by the key 310, the turntable 232 rotates clockwise accordingly. At the same time, the sliding member 233a slides along the arc-shaped groove 232a to drive the locking rod 233 to move. As shown in FIG. 9 , the paired two locking rods 233 move toward each other until the sliding member 233a slides to the position of the arc-shaped groove 232a. At the other end, the turntable 232 drives the locking rod 233 to move through the sliding cooperation of the sliding member 233a and the arc groove 232a, which can further reduce the structural complexity of the unlocking mechanism 300 and the design difficulty of designers.

Of course, in practical applications, the turntable 232 can also use any other structure to drive the lock rod 233 to move. For example, the turntable 232 can be provided with a gear, the lock rod 233 can be provided with a rack, and the turntable 232 can be driven by the meshing of the gear and the rack. The lock lever 233 moves. For another example, the turntable 232 and the locking rod 233 may also use a cam mechanism, a crank-slider structure, a screw transmission mechanism, and the like.

As another technical solution, the embodiment of the present application also discloses a semiconductor processing equipment. Taking the semiconductor equipment shown in FIG. 1 as an example, the disclosed semiconductor processing equipment includes a chamber part 100 and an unlocking mechanism 300. Generally speaking, The chamber part 100 may include a transfer chamber, a process chamber, etc., and the storage box 200 used by the semiconductor processing equipment is located outside the chamber part 100 . As shown in FIG. 2 and FIG. 3 , the storage box 200 includes a box body 210 With the sealing door 220 movably connected with the box body 210, the sealing door 220 is provided with a lock body structure 230 for locking or unlocking the sealing door 220 so that it can be in a closed state or an openable state. The unlocking mechanism 300 is used to open or close the lock body structure 230 to achieve locking or unlocking of the sealing door 220 by the lock body structure 230 , and the unlocking mechanism adopts the unlocking mechanism disclosed in the embodiments of the present application.

To sum up, in the unlocking mechanism of the semiconductor processing equipment and the technical solution of the semiconductor processing equipment disclosed in the present application, the driving device is connected with the key, and is used to drive the key to rotate from the initial position to the sealing position when the sealing door is in the closed state. The door is in the first preset position of the openable state; when the sealed door is in the openable state, the drive key is rotated from the first preset position to the second preset position that can make the sealed door in the closed state, thereby sealing can be achieved The door is switched between the open state and the closed state. At the same time, the above-mentioned driving device is also used for driving the key to rotate from the above-mentioned second predetermined position to the initial position after the driving device drives the key to rotate from the first predetermined position to the second predetermined position, and the key and the key slot are in the initial position No contact, that is to say, the above-mentioned driving device first drives the key to rotate to the second preset position to ensure that the sealing door is closed, and then drives the key to rotate from the second preset position to the original position. The key slots are not in contact. At this time, when the key is taken out from the key slot, it is not easy to generate friction between the key and the key slot, so as to reduce the generation of particulate matter, reduce the particle contamination of the wafer, and improve the production yield of the wafer. The final solution The problem of easily contaminating the wafer during the unlocking process.

The above embodiments of this application mainly describe the differences between the various embodiments. As long as the different optimization features of the various embodiments are not contradictory, they can be combined to form better embodiments. No longer.

The above descriptions are merely examples of the present application, and are not intended to limit the present application. Various modifications and variations of this application are possible for those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of this application shall be included within the scope of the claims of this application.

Claims

An unlocking mechanism for semiconductor processing equipment, the unlocking mechanism is used to open or close a lock body structure on a sealed door of a film storage box, characterized in that the unlocking mechanism includes a key and a driving device, the key can be moved in or out The key slot of the lock body structure is removed, and the key is inserted and matched with the key slot;

The driving device is used to drive the key to rotate from an initial position to a first preset position that can make the sealed door open when the sealed door is in a closed state; when the sealed door is in the open state In the openable state, driving the key to rotate from the first preset position to a second preset position capable of making the sealing door in the closed state;

The drive device is further configured to drive the key to rotate from the second preset position to the second preset position after the drive device drives the key to rotate from the first preset position to the second preset position. the initial position, the key and the key slot are not in contact with the key slot in the initial position.
The unlocking mechanism according to claim 1, wherein the driving device comprises a telescopic mechanism and a link mechanism, wherein,

The telescopic mechanism is used to drive the link mechanism to move according to a preset first stroke and a second stroke, and the link mechanism is connected with the key;

During the first stroke, the telescopic mechanism always drives the link mechanism to move in the first linear direction, so that the link mechanism can drive the key to rotate in the first direction from the initial position. to the second preset position, and then rotated from the second preset position in a second direction opposite to the first direction to the first preset position, so that the sealing door is automatically closed from the the state is switched to the openable state;

During the second stroke, the telescopic mechanism always drives the link mechanism to move in a second linear direction opposite to the first linear direction, so that the link mechanism can drive the key to first automatically move. The first preset position rotates along the first direction to the second preset position, and then returns to the original position along the second direction from the second preset position, so that the sealing door Switching from the open state to the closed state.
The unlocking mechanism according to claim 2, wherein the link mechanism comprises a first link and a second link, and the first end of the first link is hinged with the telescopic rod of the telescopic mechanism, The second end of the first connecting rod is hinged with the first end of the second connecting rod, and the key is connected with the second end of the second connecting rod;

Driven by the telescopic mechanism, the first link can drive the first end of the second link to surround the second end of the second link in the first direction or the second direction rotate, and at the same time, the second connecting rod can drive the key to rotate concentrically.
The unlocking mechanism according to claim 3, wherein the key slot, the key and the second connecting rod are all at least two, and the second connecting rod is connected to the key in a one-to-one correspondence , each of the keys can be moved into or out of the corresponding key slot; the unlocking mechanism further includes a linkage mechanism, wherein at least two of the second links are connected through the linkage mechanism, and the first The second end of the connecting rod is hinged with the first end of one of the second connecting rods, and under the driving of the telescopic mechanism, the first connecting rod can drive at least two of the second connecting rods through the linkage mechanism The connecting rods rotate synchronously.
The unlocking mechanism according to claim 4, wherein each of the second links includes a body and a connecting portion, the second end of the first link is hinged with the body, and the linkage mechanism is connected to the body. The connecting portions of each of the second links are connected.
The unlocking mechanism according to claim 5, wherein the linkage mechanism comprises a connecting rod, and each of the connecting portions is hinged with the connecting rod.
The unlocking mechanism according to any one of claims 2 to 6, characterized in that, the unlocking mechanism further comprises a limit portion, and the limit portion is used to limit the telescopic rod of the telescopic mechanism to press the first The distance traveled by the stroke or the second stroke.
The unlocking mechanism according to claim 7, wherein the limiting part comprises a limiting block and a stopping block, the limiting block is fixedly arranged, the stopping block is arranged on the telescopic rod, and During the movement of the telescopic rod according to the first stroke or the second stroke, the telescopic rod can be in contact with the limiting block, so as to prevent the telescopic rod from continuing to move.
The unlocking mechanism according to any one of claims 2 to 6, wherein the telescopic mechanism is a linear motor or an air cylinder.
The unlocking mechanism according to any one of claims 1 to 6, wherein the lock body structure comprises a turntable and a lock lever, wherein the lock lever is movably connected with the sealing door and can be moved to enable the airtight door is in the locked position of the closed state, or the airtight door is in the unlocked position of the openable state;

The turntable is movably connected with the lock lever, and the turntable is fixedly connected with a connecting piece, and the connecting piece is provided with the key slot; the driving device drives the key located in the key slot to rotate When the key is turned on, the key drives the turntable to rotate, so that the turntable synchronously drives the lock rod to move to the locked position or the unlocked position.
The unlocking mechanism according to claim 10, wherein the turntable is provided with an arc-shaped groove; the unlocking mechanism further comprises a sliding member, one end of the sliding member is movably connected with the turntable, and can move along the The arc groove rotates, and the other end of the sliding piece is fixedly connected with the locking rod.
A semiconductor processing equipment, comprising a sealing door of a storage box and an unlocking mechanism, wherein a lock body structure is arranged on the sealing door, and the unlocking mechanism is used to open or close the lock body structure, characterized in that the lock body structure is The unlocking mechanism adopts the unlocking mechanism described in any one of claims 1-12.