JP7402379B2 - Semiconductor processing equipment unlock mechanism, semiconductor processing equipment - Google Patents

Description

The present application relates to the technical field of semiconductor processing equipment, and particularly relates to an unlocking mechanism for semiconductor processing equipment and semiconductor processing equipment.

In semiconductor processing equipment, important process parameters such as uniformity of film formation, quality of film formation, suppression of metal ion contamination, and suppression of particle contamination are very strongly required. In wafer manufacturing, particulate contamination is one of the main factors affecting wafer production yield, and therefore it is necessary to strictly control particle contamination on wafers.

Currently, wafers are commonly accommodated and transferred in chip storage boxes (also referred to as wafer cassettes) within semiconductor production process workplaces to limit particle contamination of wafers. A conventional chip storage box includes a box body having an opening on one side and a cover for sealing the opening, the cover being movably connected to the box body, and the cover further having a locking body structure. Under normal circumstances, the movement of the unlocking mechanism controls locking or unlocking of the sealing door by the lock body structure, thereby controlling switching between the closed state and the openable state of the cover.

Specifically, normally, the key of the unlocking structure is inserted into the keyway of the lock body structure, and the key is rotated to realize switching between the closed state and the openable state of the cover. When the key needs to be removed from the groove, contact friction occurs between the key and the keyway, and particles generated by the friction may contaminate the wafer and further affect the production yield of the wafer.

The present application discloses a semiconductor processing apparatus, which can solve the problem that particles are generated during the unlocking process and easily contaminate the wafer.

In order to solve the above problem, the present application adopts the following technical solutions.

Embodiments of the present application disclose an unlocking mechanism of semiconductor processing equipment for opening and closing a lock body structure on a sealing door of a chip storage box, and the unlocking mechanism includes a key and a driving device, and the key is connected to the can be moved in and out of a key groove of a lock body structure, and the key is inserted into and engaged with the key groove,
The driving device is connected to the key, and rotates the key from an initial position to a first predetermined position capable of opening the sealed door when the sealed door is in the closed state. , used for rotationally driving the key from the first predetermined position to a second predetermined position that can bring the sealed door into the closed state when the sealed door is in the openable state,
The drive device is further configured to rotate the key from the second predetermined position to the initial position after the drive device rotationally drives the key from the first predetermined position to the second predetermined position. and the key does not come into contact with the keyway and the initial position.

As another technical solution, the embodiment of the present application further includes a sealing door of the chip receiving box and an unlocking mechanism, the sealing door is provided with a lock body structure, and the unlocking mechanism is configured to lock the locking door. Disclosed is a semiconductor processing apparatus used for opening and closing a main body structure, wherein the unlocking mechanism uses the unlocking mechanism disclosed in the embodiments of the present application.

The technical solution used in this application has the following beneficial effects.

In the technical solution of the unlocking mechanism of semiconductor processing equipment disclosed in the present application, the driving device is connected to the key, and when the sealing door is in the closed state, the key can open the sealing door from the initial position. and when the sealed door is in the openable state, the key is moved from the first predetermined position to a second predetermined position that can bring the sealed door into the closed state. It is used for rotational driving, thereby making it possible to realize switching between the openable state and the closed state of the sealing door. At the same time, the driving device is further used to rotationally drive the key from the second predetermined position to the initial position after the driving device rotationally drives the key from the first predetermined position to the second predetermined position, The key groove does not contact the initial position, that is, the driving device rotates the key from the second predetermined position to the initial position after rotationally driving the key to the second predetermined position to ensure closing of the sealed door. Since the key does not come into contact with the keyway at the initial position, when the key is taken out from the keyway at this time, friction is less likely to occur between the key and the keyway, thereby reducing the generation of particles. It can reduce particle contamination on wafers, further improve wafer production yield, and finally solve the problem that wafers are easily contaminated during the unlocking process.

By using the above unlocking mechanism disclosed in the embodiments of the present application, the semiconductor processing apparatus disclosed in the present application reduces the generation of particles, reduces contamination of wafers by particles, and further improves the production yield of wafers. This ultimately solves the problem of wafers being easily contaminated during the unlocking process.

The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application, and the illustrative embodiments of the present application and their descriptions are used to explain the present application and do not overshadow the present application. It is not limited to. In the drawing,
1 is a schematic structural diagram of a semiconductor processing apparatus disclosed in an embodiment of the present application. FIG. 2 is a schematic structural diagram of a chip storage box disclosed in an embodiment of the present application. FIG. 2 is a schematic structural diagram of the lock body structure disclosed in the embodiment of the present application in a locked state. It is a positional relationship diagram of a key and a keyway. FIG. 2 is a schematic structural diagram of the lock body structure disclosed in the embodiment of the present application in an unlocked state. FIG. 3 is a schematic structural diagram of a part of the unlocking mechanism disclosed in the embodiment of the present application from one perspective. FIG. 3 is a schematic structural diagram of a part of the unlocking mechanism disclosed in the embodiment of the present application from another perspective. FIG. 4 is a partially enlarged schematic diagram of FIG. 3; 6 is a partially enlarged schematic diagram of FIG. 5. FIG. FIG. 3 is a movement diagram of the drive device disclosed in the embodiment of the present application during a first stroke; FIG. 6 is a movement diagram of the drive device disclosed in the embodiment of the present application during a second stroke;

In order to make the objectives, technical solutions and advantages of the present application more clear, the following will clearly and completely explain the technical solutions of the present application with reference to specific embodiments of the present application and corresponding drawings. Obviously, the described embodiments are only some, but not all, embodiments of the present application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without any creative efforts fall within the protection scope of this application.

In the specification and claims of this application, the terms "first", "second", etc. are used to distinguish between similar objects and are not used to describe a particular order or sequential order. It is to be understood that the data so used may be interchanged where appropriate, such that the embodiments of the present application may be practiced in an order other than that illustrated or described herein. The divided objects such as "first" and "second" are usually of the same type, and the number of objects is not limited. For example, there may be one first object, or there may be multiple objects. It may be. In addition, in the specification and claims, "and/or" indicates at least one of the connected objects, and the character "/" generally indicates that the related objects before and after it have the relationship of "or". shows.

Hereinafter, technical solutions disclosed in each embodiment of the present application will be described in detail by specific embodiments and their application scenes with reference to the drawings.

As shown in FIG. 1, an embodiment of the present application discloses a semiconductor processing apparatus, and the disclosed semiconductor processing apparatus includes a chamber part 100 and an unlocking mechanism 300. Generally, the chamber part 100 is a transmission chamber, a process The chip storage box 200 used in the semiconductor processing apparatus is located outside the chamber part 100, and as shown in FIGS. 2 and 3, the chip storage box 200 includes a box body 210 and the box body. 210, the sealing door 220 includes a lock body structure 230 for locking or unlocking the sealing door 220 into a closed or openable state. The closed state refers to a state where the sealing door 220 is in a position where it locks with the box body 210 and the sealing door 220 cannot be opened due to the lock of the lock body structure 230, and the openable state is: This refers to a state in which the sealing door 220 is in a position where it locks with the box body 210, but the sealing door 220 can be opened. The unlocking mechanism 300 is used to open and close the lock body structure 230 so that the lock body structure 230 locks or unlocks the sealed door 220.

In a specific work process, a wafer is first placed in the chip storage box 200, and a corresponding manipulator moves the chip storage box 200 onto a mounting table provided on one side of the front end of the unlocking mechanism 300 (for example, in FIG. The lock body structure 230 is unlocked by the unlocking mechanism 300 so that the lock body structure 230 is unlocked, and the lock body structure 230 is then unlocked by the lock body structure 230. 220 can be opened, and in this state, the wafer in the chip storage box 200 is transferred to the wafer boat in the chamber part 100 by the manipulator in the chamber part 100, and then sent into the chamber part 100 by the wafer boat. After the wafer processing is completed, the wafer is put into the chip storage box 200 again by the manipulator in the chamber part 100, and then the sealing door 220 is closed and the lock body structure 230 is closed by the unlocking mechanism 300. , the lock body structure 230 locks the sealing door 220 and completes the process.

Specifically, as shown in FIGS. 3, 6 and 7, a keyway 231 is formed in the lock body structure 230, the unlocking mechanism 300 includes a key 310 and a drive device 320, and the key 310 is inserted into the keyway. After the driving device is connected to the key and the key 310 is moved into the keyway 231, the driving device 320 rotates the key 310 to move the keyway 231 along with it. It can be rotated by rotating. In order to conveniently move the key 310 in and out, the dimension of the key groove 231 is slightly larger than the dimension of the key 310, that is, there is a gap between the key 310 and the key groove 231, and in this way , the rotation angles of the key 310 and the keyway 231 are different. For example, as shown in FIG. 4, when the key 310 is rotated by a θ angle (i.e., 90°) in a counterclockwise direction from a horizontal state, the key 310 is in a vertical state and there is a gap between the two. Therefore, the keyway 231 can only rotate by an angle of (θ-α) with the key 310, and at this time, there is a difference α between the rotation angles of the key 310 and the keyway 231, and the size of the difference α is equal to the above-mentioned gap. determined by. Similarly, when the key 310 rotates by an angle θ (ie, 90°) clockwise from the vertical position, there is a difference α between the rotation angles of the key 310 and the keyway 231. Due to the existence of the difference α, the lock body structure 230 cannot be normally locked or unlocked because the keyway 231 does not rotate to a predetermined position, and as a result, the sealed door 220 cannot be opened or closed normally.

In order to solve the above problem, the driving device 320 rotates the key 310 from an initial position to a first predetermined position that can make the sealed door 220 openable when the sealed door 220 is in the closed state. The key 310 is used to rotate the key 310 from a first predetermined position to a second predetermined position where the sealing door 220 can be closed when the sealing door 220 is in an openable state. Specifically, the first predetermined position satisfies the condition that the sealing door 220 is in an openable state, that is, ensuring that it can be opened normally, and the second predetermined position satisfies the condition that the sealing door 220 is in a closed state. In other words, it satisfies the requirement to ensure normal closure.

When the keyway 231 is in a vertical state, the sealing door 220 is in a closed state, and when the keyway 231 is in a horizontal state, the sealing door 220 is in an openable state, and the sealing door 220 is in a closed state. When it is necessary to switch from the openable state to the openable state, the key 310 is inserted into the keyway 231, at this time the key 310 is in the vertical state, the position corresponding to this state is the initial position, and then the drive device 320 When the key 310 is rotated clockwise from the vertical position by an angle of (θ+α), the key 310 is in the first predetermined position, and the keyway 231 rotates by an angle of θ along with the key 310, that is, in the horizontal state. , thereby switching the sealed door 220 to an openable state. When it is necessary to switch the sealed door 220 from the openable state to the closed state, when the key 310 is rotated by an angle (θ+2α) from the first predetermined position in the counterclockwise direction by the driving device 320, the key 310 is in the second predetermined position, the key groove 231 can rotate by an angle of θ with the key 310, that is, be in the vertical position, thereby switching the sealing door 220 to the closed state. This ensures that the sealing door 220 can be opened and closed normally.

Based on this, the drive device 320 further rotationally drives the key 310 from the second predetermined position to the initial position after the drive device 320 rotationally drives the key 310 from the first predetermined position to the second predetermined position. In particular, the key 310 does not come into contact with the keyway 231 at the initial position. Specifically, when the key 310 is in the second predetermined position, there is an included angle (i.e., a difference α) between the key 310 and the key groove 231 in the vertical state, and as a result, the key 310 and the key groove 231 are mutually separated. (see FIG. 4), and at this time, if the key 310 is taken out from the keyway 231, friction will occur between the key 310 and the keyway 231, generating particles, which may contaminate the wafer. . Therefore, by rotationally driving the key 310 from the second predetermined position to the initial position by the driving device 320, the key 310 can be placed in the vertical state and the key 310 and the key groove 231 can be prevented from coming into contact with each other. When the key 310 is taken out from the keyway 231, friction is less likely to occur between the key 310 and the keyway 231, thereby reducing the generation of particles and contaminating the wafer with particles, and further improving the production yield of the wafer. This ultimately solves the problem of wafers being easily contaminated during the unlocking process.

In the specific working process, the key 310 is moved into the key groove 231, the key 310 is inserted into the key groove 231 and engaged, and then the driving device 320 starts to operate, and the key 310 is moved into the first key groove 231. After the sealing door 220 is opened, the wafer in the chip storage box 200 is transferred into the chamber part 100 by the manipulator. After the wafer processing is completed, the wafer is put back into the chip storage box 200 by the manipulator, and at this time, the drive device 320 rotates the key 310 from the first predetermined position to the second predetermined position. , ensuring that the sealing door 220 can be closed normally, and then rotating the key 310 from the second predetermined position to the initial position using the driving device 320 to prevent the key 310 and the keyway 231 from coming into contact with each other. , then remove the key 310 from the keyway 231 to complete the process.

Thereby, the unlocking mechanism 300 disclosed in the present application can ensure that the sealing door 220 can be opened and closed normally, and at the same time reduce the generation of particles and reduce the contamination of particles to the wafer, and further It can improve the wafer production yield, and finally solve the problem that the wafer is easily contaminated during the unlocking process.

Optionally, the driving device 320 includes a telescopic mechanism 321 and a link mechanism, the telescopic mechanism 321 is used to move and drive the link mechanism based on a preset first stroke and a second stroke, and the telescopic mechanism 321 is used to move and drive the link mechanism based on a preset first stroke and a second stroke. A mechanism is connected to key 310. Assuming that the keyway 231 is in the vertical state, the sealed door 220 is in the closed state, and when the keyway 231 is in the horizontal state, the sealed door 220 is in the openable state, as shown in FIG. 10A. When it is necessary to switch the sealed door 220 from the closed state to the openable state, the key 310 is inserted into the keyway 231, and at this time the key 310 is in the vertical state, and the corresponding position of the state is the initial position (i.e. , (1) position in FIG. 10A).

In the first stroke, the telescopic mechanism 321 always drives the link mechanism to move along the first linear direction (that is, the direction A in FIG. 10A), so that the link mechanism drives the key 310 to the initial position. to the second predetermined position (not shown) along a first direction (i.e., counterclockwise in FIG. 10A), and then from the second predetermined position to a second direction opposite to the first direction. (i.e., clockwise in FIG. 10A) to the first predetermined position (i.e., the position shown in (3) in FIG. 10A), and at this time, the keyway 231 is in a horizontal state. This allows the sealing door 220 to switch from the closed state to the openable state. As shown in FIG. 10A, when the key 310 rotates to the horizontal state (i.e., the position shown in (2) in FIG. 10A) in the process of rotating the key 310 from the initial position to the first predetermined position, the key The groove 231 is not rotated horizontally, and at this time, the sealed door 220 cannot be opened normally, and when the key 310 is continuously rotated from the horizontal position to the first predetermined position, the keyway 231 is not rotated horizontally. At this time, the sealing door 220 can be opened normally.

When it is necessary to switch the sealing door 220 from the openable state to the closed state, as shown in FIG. 10B, in the second stroke, the telescoping mechanism 321 always moves in the second linear direction ( That is, by driving the link mechanism to move along direction B) in FIG. 10A, the link mechanism drives the key 310 to move from the first predetermined position (i.e., the position shown in (3) in FIG. 10A). After rotating it along the first direction (i.e., counterclockwise direction in FIG. 10B) to the second predetermined position (i.e., the position shown in (2) in FIG. 10B), the second predetermined position is rotated in the second direction. (that is, in the clockwise direction in FIG. 10B) to the initial position, and the sealing door 220 is switched from the openable state to the closed state. Note that, as shown in FIG. 10B, when the key 310 rotates to the vertical state (i.e., the position shown in (1) in FIG. 10B) in the process of rotating the key 310 from the first predetermined position to the second predetermined position, , the key groove 231 is not rotated to the vertical position, and at this time, the sealing door 220 cannot be closed normally, and when the key 310 is continuously rotated from the vertical position to the second predetermined position, the key groove 231 is not rotated to the vertical position. rotates to a vertical position, and at this time, the sealing door 220 can be closed normally.

As is clear from Table 1 above, in the first stroke, the telescopic mechanism 321 always drives the link mechanism to move along the first linear direction, and after the key 310 rotates counterclockwise due to the drive of the link mechanism. , rotates clockwise, that is, the rotation direction changes, and in the second stroke, the telescoping mechanism 321 always drives the link mechanism to move along the second linear direction, and the key 310 is rotated by the drive of the link mechanism. After the clockwise rotation, the key 310 rotates clockwise and the rotation direction also changes, and in the second stroke, the key 310 rotates from the second predetermined position to the initial position, and the key 310 rotates from the second predetermined position to the initial position. 310 does not come into contact with the keyway 231 and the above-mentioned initial position, and the telescopic mechanism 321 can be maintained in the same direction without changing its direction. There is no need to steer, there is no need to extend and retract multiple times, and there is no need to position at multiple points, which simplifies the movement of the telescoping mechanism 321 and facilitates operator control. is less likely to be damaged, and both a linear motor and a cylinder can be used as the telescoping mechanism 321, thereby widening the selection range of the telescoping mechanism 321. In actual application, the first stroke may be a backward stroke of the telescopic mechanism 321, and the second stroke may be an extension stroke of the telescopic mechanism 321.

There are various link mechanisms for realizing the above-mentioned solution. For example, as shown in FIGS. 6 and 7, the link mechanism includes a first link 322 and a second link 323, and the first end of the first link 322 is The second end of the first link 322 is hinged to the first end of the second link 323 , and the key 310 is connected to the second end of the second link 323 . When the telescopic mechanism 321 is driven, the first link 322 drives the first end of the second link 323 to rotate around the second end of the second link 323 along the first direction or the second direction. At the same time, the second link 323 can drive the key 310 to rotate concentrically, that is, the rotation center of the second link 323 overlaps the rotation center of the key 310.

In the first stroke or the second stroke, the telescopic mechanism 321 moves the first link 322, and the first link 322 drives the second link 323 to rotate along the first direction or the second direction. , thereby driving the key 310 to rotate along the first direction or the second direction. In actual application, the structure and dimensions of the first link 322 and the second link 323 may be changed according to specific needs, so that the key 310 can achieve the rotational direction, position and angle in the above first stroke and second stroke. can be designed.

In normal cases, in order to improve the stability of the sealing door 220, the sealing door 220 is usually provided with at least two lock body structures 230, and the at least two lock body structures 230 are in the closed state of the sealing door 220. The sealing door 220 can be stably connected to the box body 210 when Optionally, each of the keyway 231, the key 310, and the second link 323 may be at least two in number, and the second link 323 is connected to the key 310 in one-to-one correspondence, and each key 310 can be moved in and out of the corresponding keyway, and as shown in FIGS. 6 and 7, the unlocking mechanism 300 may further include an interlocking mechanism 330, in which at least two second links 323 are interlocked. The second end of the first link 322 is hingedly connected to the first end of one of the second links 323 , and when the telescoping mechanism 321 is driven, the first link 322 is connected by the interlocking mechanism 330 to the first end of the second link 323 . The second link 323 can be driven to rotate synchronously, thereby realizing at least two keys 310 to be driven to rotate synchronously, and at least two lock body structures 230 to be unlocked simultaneously.

As is clear from the above structure and working process, the unlocking mechanism 300 has at least two keys 310, and the at least two keys 310 can rotate synchronously, so that at least two keys on the sealing door 220 The two lock body structures 230 can be synchronously unlocked or locked, and the unlocking efficiency can be improved. At the same time, the installation of the interlocking mechanism 330 can realize that the single driving device 320 drives at least two keys 310 simultaneously and rotates synchronously, thereby reducing the structural complexity of the unlocking mechanism 300. At the same time, the cost of the unlocking mechanism 300 can be reduced.

Optionally, the second links 323 may include a body and a connecting portion 311, with the second end of the first link 322 being hingedly connected to the body, and an interlocking mechanism 330 being connected to the connecting portion 311 of each second link 323. be done. The key 310 rotates concentrically with the main body, and the connecting part 311 provides a connection position for the interlocking mechanism 330 and the second link 323, making the connection between the interlocking mechanism 330 and the second link 323 convenient, thereby This facilitates the installation of the unlocking mechanism 300 by an operator and reduces the difficulty of the designer's design.

As mentioned above, the driving device 320 can synchronously drive and rotate at least two second links 323 by the interlocking mechanism 330, and optionally, the interlocking mechanism 330 may include a connecting rod, and each connecting portion 311 are both hinged to the connecting rod. When one of the connecting parts 311 rotates, it drives the connecting rod to move, thereby driving the other connecting part 311 to rotate. This interlocking mechanism 330 is simple in structure, convenient to install, low cost, and has a relatively good transmission effect of the connecting rod. Furthermore, the connecting rod may be a telescopic rod, so that the operator can conveniently adjust the rotation angle of the key 310, and the key 310 can be fully unlocked or locked.

In order to improve the accuracy of unlocking or locking the key 310 and avoid over-rotation of the key 310, the unlocking mechanism 300 may optionally further include a position regulating part 340, and the position regulating part 340 is a telescopic mechanism. The distance that the telescopic rod 321 moves based on the first stroke or the second stroke, that is, the amount of displacement of the telescopic mechanism 321 along the first linear direction or the second linear direction is limited, and excessive rotation of the key 310 is prevented. It may also be used to avoid rotation of the key 310 into a predetermined position, thereby improving the accuracy of unlocking or locking the key 310.

Alternatively, the position regulating part 340 may include a stopper 341 and a stop block 342, the stopper 341 may be fixedly provided, and the stop block 342 is provided on the telescopic rod, and the telescopic rod is connected to the first stroke. Alternatively, the telescopic rod may be prevented from continuously moving by contacting the stopper 341 during the movement based on the second stroke. This position regulation process is simple and reliable. Furthermore, the stop block 342 may be an elastic block or may be provided with elastic parts to achieve elastic position regulation and avoid harsh contact.

In the embodiments of the present application, the type of telescoping mechanism 321 is various, for example a hydraulic telescoping rod, and optionally the telescoping mechanism 321 may be a linear motor or a cylinder. The linear motor and cylinder drive is reliable and the technology is mature, which is advantageous for improving the stability of the unlocking mechanism 300.

Optionally, as shown in FIGS. 3 and 5, the lock body structure 230 may further include a keyway 231, a rotary disk 232, and a lock lever 233, the lock lever 233 being movably connected to the sealing door 220, and a locked position (i.e., the position of the lock lever 233 in FIG. 3) where the sealed door 220 is in a closed state, or an unlocked position (i.e., the position of the lock lever 233 in FIG. 5) where the sealed door 220 is in an openable state. ) can be moved. Specifically, as shown in FIG. 3, one end of the locking lever 233 is attached to the side of the sealing door 220 so that it can extend into the corresponding fixing groove in the box body 210. 220, thereby achieving locking of the sealing door 220. As shown in FIG. 5, one end of the locking lever 233 is retracted inside the side of the sealing door 220 so that it can be separated from the corresponding fixing groove in the box body 210, so that the sealing door 220 Achieve unlocking.

The rotary disk 232 is movably connected to the lock lever 233, and the rotary disk 232 is fixedly connected to a connecting part, the connecting part is provided with the key groove 231 , and the driving device 320 is located in the key groove 310. The key 310 rotates the rotary disk 232 by interlocking with the keyway 310 so that when the key 310 is rotationally driven, the rotary disk 232 synchronizes and drives the lock lever 233 to the locking position or the unlocking position. Drive rotation. The lock body structure 230 having such a structure is simple, reliable, and convenient to install, thereby reducing the complexity of the structure of the unlocking mechanism 300 and reducing the difficulty of the designer.

There are various methods of movable connection between the rotary disk 232 and the lock lever 233. For example, as shown in FIGS. 8 and 9, the rotary disk 232 has an arcuate groove 232a, and the unlocking mechanism 300 has a It further includes a sliding member 233a movably connected to the rotary disk 232, rotatable along the arcuate groove 232a, and having the other end fixedly connected to the lock lever 233. The sliding member 233a may include, for example, a protrusion provided on the lock lever 233 and protruding from the lever body of the lock lever 233, the protrusion being bored in the arcuate groove 232a, and It can rotate along the arcuate groove 232a.

Optionally, the lock levers 233 are plural and are provided in pairs, and the two lock levers 233 in the pair are provided with an interval in the vertical direction in FIGS. 3 and 5, and the distance between them is For example, in FIGS. 3 and 5, two pairs of lock levers 233 are provided, and in this case, there are two corresponding rotary disks 232. Corresponding to each rotary disk 232, there are two arcuate grooves 232a, which are provided symmetrically with respect to the rotation center of the rotary disk 232, and two sliding members 233a, one end of which is provided. are respectively connected to a pair of lock levers 233, and the other ends of both are movably connected to a rotary disk 232, so that they can each rotate along two arcuate grooves 232a.

As shown in FIG. 8, when the keyway 231 is in a vertical state, the sliding member 233a is located at one end of the arcuate groove 232a, and when the keyway 231 rotates clockwise under the drive of the key 310, 232 rotates clockwise accordingly, and at the same time, the sliding member 233a slides along the arcuate groove 232a, driving the lock lever 233 to move, and as shown in FIG. The lock levers 233 move toward each other until the sliding member 233a slides onto the other end of the arcuate groove 232a, and the rotary disk 232 slides into the lock lever by slidingly fitting the sliding member 233a and the arcuate groove 232a. 233 is moved and driven, the complexity of the structure of the unlocking mechanism 300 can be further reduced, and the difficulty level of the designer's design can be reduced.

Of course, in practical applications, the rotary disk 232 may have any other structure to drive the lock lever 233, for example, the rotary disk 232 may be provided with a gear, the lock lever 233 may have a rack, etc. The rotary disk 232 drives the lock lever 233 to move through engagement between the gear and the rack. Alternatively, for example, the rotary disk 232 and the lock lever 233 can be further realized by a cam mechanism, a crank slider structure, a spiral transmission mechanism, or the like.

As another technical solution, the embodiment of the present application further provides a semiconductor processing device, taking the semiconductor device shown in FIG. 1 as an example, the disclosed semiconductor processing device includes a chamber part 100 and an unlocking mechanism 300. Generally, the chamber unit 100 may include a transmission chamber, a process chamber, etc., and a chip storage box 200 used in the semiconductor processing equipment is located outside the chamber unit 100, as shown in FIGS. 2 and 3. , the chip storage box 200 includes a box body 210 and a sealing door 220 movably connected to the box body 210, and the sealing door 220 is configured to lock or unlock the sealing door 220 to be in a closed state or an open state. A lock body structure 230 is provided for enabling. The unlocking mechanism 300 is used to open and close the locking body structure 230 to realize locking or unlocking of the sealed door 220 by the locking body structure 230, and the unlocking mechanism is not disclosed in the embodiments of the present application. Use the above unlocking mechanism.

As described above, in the unlocking mechanism for semiconductor processing equipment and the technical solution for semiconductor processing equipment disclosed in the present application, the driving device is connected to the key, and when the sealed door is in the closed state, the driving device is connected to the key. The key is rotated from an initial position to a first predetermined position where the sealed door can be opened, and when the sealed door is in the openable state, the key is moved from the first predetermined position to the closed state. The second predetermined position can be used to rotate the sealing door to a second predetermined position, thereby realizing switching between the openable state and the closed state of the sealing door. At the same time, the driving device is further used to rotationally drive the key from the second predetermined position to the initial position after the driving device rotationally drives the key from the first predetermined position to the second predetermined position, The key groove does not contact the initial position, that is, the driving device rotates the key from the second predetermined position to the initial position after rotationally driving the key to the second predetermined position to ensure closing of the sealed door. Since the key does not come into contact with the keyway at the initial position, when the key is taken out from the keyway at this time, friction is less likely to occur between the key and the keyway, thereby reducing the generation of particles. It can reduce particle contamination on wafers, further improve wafer production yield, and finally solve the problem that wafers are easily contaminated during the unlocking process.

In the above embodiments of the present application, the emphasis is on the differences between the embodiments, but unless there is a conflict, different optimization features between the embodiments may be combined with better embodiments. Considering the brevity of the sentence flow, the explanation is omitted here.

The above are merely examples of the present application, and do not limit the present application. Various modifications and changes can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc. made without departing from the spirit and principles of this application are to be included within the scope of the claims.

100 Chamber part 200 Chip storage box 210 Box body 220 Sealing door 230 Lock body structure 231 Keyway 232 Turning plate 232a Arc-shaped groove 233 Lock lever 233a Sliding member 300 Unlock mechanism 310 Key 311 Connection part 320 Drive device 321 Telescopic mechanism 322 First link 323 Second link 330 Interlocking mechanism 340 Position regulating section 341 Stopper 342 Stopping block

Claims (11)

An unlocking mechanism of semiconductor processing equipment for opening and closing a lock body structure on a sealing door of a chip storage box, the unlocking mechanism including a key and a drive device, the key being in a keyway of the lock body structure. the key is inserted into and engaged with the keyway;
The driving device rotates the key from an initial position to a first predetermined position capable of opening the sealed door when the sealed door is in a closed state; used for rotationally driving the key from the first predetermined position to a second predetermined position that can bring the sealed door into the closed state when the door is in the openable state;
The drive device is further configured to rotate the key from the second predetermined position to the initial position after the drive device rotationally drives the key from the first predetermined position to the second predetermined position. and the key is not in contact with the keyway and the initial position, and the key is removed from the keyway;
The drive device includes a telescoping mechanism and a link mechanism,
The telescopic mechanism is used to move and drive the link mechanism based on a preset first stroke and a second stroke, and the link mechanism is connected to the key,
In the first stroke, the link mechanism always moves the link mechanism along the first linear direction to switch the sealed door from the closed state to the openable state. , driving the key to rotate it from the initial position along a first direction to the second predetermined position, and then rotating the key from the second predetermined position along a second direction opposite to the first direction. Can be rotated into position,
In the second stroke, the telescoping mechanism always moves the link mechanism along a second linear direction opposite to the first linear direction, thereby changing the sealed door from the openable state to the closed state. To switch, the link mechanism drives the key to rotate from the first predetermined position along the first direction to the second predetermined position, and then from the second predetermined position to the second direction. An unlocking mechanism for a semiconductor processing apparatus, characterized in that the unlocking mechanism can be returned to the initial position along the line . The link mechanism includes a first link and a second link, a first end of the first link is hingedly connected to a telescoping rod of the telescoping mechanism, and a second end of the first link is connected to a first end of the second link. a second end of the second link, the key being hingedly connected to the second end of the second link;
The first link may drive the first end of the second link to rotate around the second end of the second link along the first direction or the second direction by driving the telescoping mechanism. 2. The unlocking mechanism according to claim 1 , wherein the second link is capable of driving the key to concentrically rotate the key. Each of the keyway, the key, and the second link is at least two, and the second link is connected to the key in a one-to-one correspondence, and each key is connected to the corresponding keyway. The unlocking mechanism further includes an interlocking mechanism, wherein at least two of the second links are connected by the interlocking mechanism, and a second end of the first link is connected to one of the second links. The first link is hingedly connected to a first end of the link mechanism, and when the telescoping mechanism is driven, the first link can drive at least two of the second links by the interlocking mechanism to cause them to rotate synchronously. 2. The unlocking mechanism described in 2 . Each of the second links includes a main body and a connecting part, a second end of the first link is hingedly connected to the main body, and the interlocking mechanism is connected to the connecting part of each of the second links. The unlocking mechanism according to claim 3 , characterized in that: 5. The unlocking mechanism according to claim 4 , wherein the interlocking mechanism includes a connecting rod, and each of the connecting portions is hingedly connected to the connecting rod. According to any one of claims 1 to 5 , the telescopic mechanism further includes a position regulating portion for restricting a distance that the telescopic rod of the telescopic mechanism moves based on the first stroke or the second stroke. Unlock mechanism as described. The position regulating portion includes a stopper and a stop block, the stopper is fixedly provided, the stop block is provided on the telescoping rod, and the telescoping rod moves based on the first stroke or the second stroke. 7. The unlocking mechanism according to claim 6 , wherein the telescoping rod can be prevented from continuously moving by contacting the stopper during the unlocking process. The unlocking mechanism according to any one of claims 1 to 5 , wherein the telescoping mechanism is a linear motor or a cylinder. The lock body structure includes a rotary disk and a lock lever, and the lock lever is movably connected to the sealing door, and is in a locked position to place the sealing door in the closed state, or to open the sealing door. To the unlocked position, you can move it to the state,
the key, wherein the rotary disk is movably connected to the lock lever, the rotary disk is fixedly connected to a connecting part, the connecting part is provided with the key groove, and the drive device is located in the key groove; The key is characterized in that the key rotationally drives the rotary disk so that the rotary disk synchronously moves the lock lever to the lock position or the unlock position when the key rotates the lock lever. The unlocking mechanism according to any one of items 1 to 5 . An arcuate groove is formed in the rotary disk, and the lock body structure has one end movably connected to the rotary disk and is rotatable along the arcuate groove, and the other end fixed to the lock lever. 10. The unlocking mechanism according to claim 9 , further comprising a sliding member connected to the unlocking mechanism. A semiconductor processing apparatus including a sealing door of a chip storage box and an unlocking mechanism, the sealing door is provided with a lock body structure, and the unlocking mechanism is used to open and close the lock body structure, A semiconductor processing apparatus characterized in that the unlocking mechanism uses the unlocking mechanism according to any one of claims 1 to 10 .

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