JP2002164401A - Printed circuit board processing unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make insertion smooth into a keyhole for a key provided on a open/close means of a cover of a board container. SOLUTION: This invention has an overdrive correction means 31 for correcting the rotational angle deviation caused by the errors between the key 24 on the open/close means 7 of the cover of the board container 12 and the key hole 45 provided on the cover of the container 12 after closing the cover.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a substrate processing apparatus such as a semiconductor manufacturing apparatus.

[0002]

2. Description of the Related Art A conventional substrate processing apparatus such as a vertical diffusion / CVD apparatus is provided with a heating means, and a reaction chamber for processing a substrate, a substrate support (boat) for supporting the substrate in the reaction chamber, and Opening / closing means for opening and closing the lid of the substrate storage container for taking the substrate in and out of the substrate storage container, and a substrate transfer machine for taking out the substrate from the substrate storage container with the lid opened by the opening / closing means and transferring the substrate to a boat. Have been.

[0003] Such an apparatus is disclosed, for example, in JP-A-8-27.
No. 9546 and JP-A-9-306975.

In the former device, the substrate storage container is fixed to the opening / closing means of the lid by frictional engagement via the lid, and the closable substrate loading opening and the substrate storage container are simultaneously opened.
This is performed by lowering the lid and the opening / closing means together into the semiconductor processing apparatus.

In the latter device, the atmosphere between the lid of the substrate storage container and the opening / closing means of the lid is sealed from the other atmosphere, and the substrate is prevented from being contaminated by supplying N ₂ gas while evacuating. Things.

In such a substrate processing apparatus, a key is provided in the opening / closing means of the lid of the substrate storage container, and a keyhole is provided in the lid of the substrate storage container corresponding to the key. When the key is inserted into the keyhole and rotated, the key is released and the lid of the substrate storage container is opened, and the key is locked (locked) and the lid is closed. I have. Here, the keyhole is a member having a hole into which the key is inserted, and integrally rotating with the key when the key is inserted into the hole to open and close the lid of the substrate storage container. That is.

[0007]

In each of the conventional substrate processing apparatuses described in the above two publications, when the key of the lid of the substrate storage container is released or the key is locked, the key is released. The key inserted into the hole is simply rotated. For this reason, the key provided by the key provided in the opening / closing means of the lid of the substrate storage container and the key hole provided in the lid of the substrate storage container have a key rotation angle and a keyhole rotation angle that are different from each other. The hole may be insufficiently rotated. As a result, when the key of the opening / closing means is inserted into another opening / closing means by another opening / closing means, the keyhole is caused by the inclination of the keyhole caused by the insufficiently rotating state. Could not be inserted. When this happens,
This is an important problem because it lowers the operation rate and throughput of the substrate processing line.

SUMMARY OF THE INVENTION An object of the present invention is to solve the problem of insufficient rotation of a conventional keyhole provided in a lid of a substrate storage container, and to smoothly insert a key provided in opening / closing means of the lid of the substrate storage container into the keyhole. Accordingly, it is an object of the present invention to provide a substrate processing apparatus capable of improving the operation rate and throughput of a substrate processing line.

[0009]

In order to solve the above-mentioned problems, the present invention relates to a key provided in an opening / closing means for opening and closing a lid of a substrate storage container, and a keyhole provided in the lid of the substrate storage container. Provided is a substrate processing apparatus having a correction unit that corrects a deviation of a rotation angle caused by a dimensional difference by closing the lid of the substrate storage container by overdriving the key.

According to the present invention, there is provided a correction means for correcting the deviation of the rotation angle caused by the dimensional difference between the key and the keyhole by closing the lid of the substrate storage container and then overdriving the key. Insufficient rotation of the hole can be eliminated, and smooth insertion of the key into the keyhole can be realized. Thereby, the operation rate and throughput of the substrate processing line can be improved.

[0011]

Embodiments of the present invention will be described below in detail with reference to the drawings. In the drawings described below, those having the same functions are denoted by the same reference numerals, and the repeated description thereof will be omitted.

FIG. 4 is a perspective view of the overall configuration of a semiconductor manufacturing apparatus which is a substrate processing apparatus according to an embodiment of the present invention.

The substrate processing apparatus according to the present embodiment includes a reaction furnace (reaction chamber) 1 provided with a substrate (wafer) heating means, a reaction gas introduction means 2 for introducing a reaction gas into the reaction furnace 1, a reaction furnace Reaction gas exhaust means 3 for exhausting the reaction gas in 1;
It is a means for supporting a substrate, and a reaction furnace 1 for processing the substrate.
, A substrate storage container buffer storage unit 5 for storing a substrate storage container storing unprocessed substrates, and a boat elevating unit 6 for inserting or extracting the boat 4 into or from the reaction furnace 1. And a substrate storage container 12 for storing the substrates, and a substrate storage container 1 for transferring the substrates to the boat 4 or transferring the processed substrates from the boat 4.
2, a substrate storage container opening / closing means 7 for opening and closing the lid, a substrate alignment means 8 for aligning the substrates, and a substrate transfer means 9 for transferring substrates between the boat 4 and the opening / closing means 7 or the substrate alignment means 8. A substrate storage container load port, a substrate storage container transfer unit for transferring the substrate storage container between the load port and the opening / closing unit or the buffer storage unit, and a substrate storage container. Substrate information carrier 4
3 and a board information reading / writing means 15 for reading and writing information on the board information carrier 43.

FIG. 5 is a perspective view of the front appearance of the substrate storage container opening / closing means 7, FIG. 6 is a perspective view of the back appearance of the substrate storage container opening / closing means 7, and FIG. 7 is a main part of the substrate storage container opening / closing means 7 shown in FIG. It is a top view.

5, reference numeral 16 denotes an opening / closing base of the substrate storage container opening / closing means 7, reference numeral 18 denotes a substrate storage container mounting base on which the substrate storage container 12 (FIG. 4) is mounted, and reference numeral 17 denotes a substrate storage container. The mounting alignment member 19 has an arrow a
Substrate storage container linear guide to slide in the direction,
Reference numeral 20 denotes a linear guide base member.

As shown in FIG. 5, the substrate storage container opening / closing means 7 is provided with two or more (here, two) substrate load ports 13 on the upper and lower sides, and closing means 14 for each load port 13. Substrate storage container 12 in port 13
A board mapping sensor 42 (FIG. 6) for detecting the presence or absence of a board at each stage in (FIG. 4), and board information reading and writing for reading and writing information of a board stored in the board storage container 12 (FIG. 4). Means 15 are provided.

When the substrate storage container 12 is placed on the mounting base 18 and the mounting alignment member 17 shown in FIG. 5 by the substrate storage container transporting means 11 shown in FIG. The reading / writing means 15 turns the rotary actuator 21 as a driving source together with the arm 22 to a retreat position (indicated by a dashed line) at a predetermined angle θ in one direction of the arrow f so as not to prevent the arm of the transport means 11 from entering. I do. Then, after the substrate storage container 12 is placed on the alignment member 17, when the arm of the transfer means 11 returns to the original state, the information read / write means 15 is returned by the angle θ in the other direction of the arrow f, and returns to the original position. Then, reading and writing of information on the substrate stored in the substrate storage container 12 are performed. The information on the substrate is, for example, the history of the past process of the substrate, the type of the process to be processed from now on, and the information such as processed / unprocessed of a certain process. Thus, while being accessible from the substrate storage container transporter 11 in the substrate storage container opening / closing means 7,
A read / write operation of information on a substrate stored in the substrate storage container 12 is enabled.

Thereafter, as shown in FIG. 5, the substrate storage container 12 is opened and closed by an air cylinder 23.
(Movement A). The closing means 14 of the substrate load port 13 includes the substrate storage container 12
There are two keys 24 inserted into a keyhole provided on the lid of FIG. 4 for locking and unlocking the keys, and rotate in the direction of arrow b. Reference numeral 25 denotes a lid alignment member with the lid of the substrate storage container 12, and reference numeral 26 denotes lid suction means.

After the completion of the movement A, the lid of the substrate storage container 12 is sucked by the lid suction means 26, the key of the substrate storage container 12 is released by the rotation of the key 24, and the lid of the substrate storage container 12 can be opened. Then, the substrate is taken in and out.

In FIG. 6, reference numeral 27 denotes a pulley fixed to the key 24 (FIG. 5). 2 or more keys 2
4 are connected by a timing belt 28, and the reciprocating operation of the air cylinder 29 is the rotation operation b of the key 24. 30
Is a clamp member of the timing belt 28, and the clamp member 30 is fixed to the timing belt 28.
Reference numeral 31 denotes an overdrive correction unit for correcting a linear operation by overdrive of the air cylinder 29. These members 27, 28, 29, 30, 31 are attached to the back of the sealing means 14.

As shown in FIG. 6, the closing means 14 comprises a rotary actuator 37 and a closing means linear guide 38.
This enables the operation in the direction of arrow c. The closing means 14 includes an air cylinder 39 and a closing means linear guide 4.
0 enables the sliding operation in the direction of arrow d. The mapping sensor 42 is capable of turning in the direction of arrow e into the substrate storage container 12 by the rotary actuator 41 (FIG. 5).

FIG. 1 is a diagram showing a configuration of an overdrive correcting means 31 for a lid opening / closing key of a substrate storage container 12 provided in the substrate storage container opening / closing means 7 according to the embodiment of the present invention, FIG. 4B is a diagram showing a shift in a rotation angle between a keyhole provided in a lid of the substrate storage container 12 and a key of the substrate storage container opening / closing means 7.

As shown in FIG. 2A, the substrate storage container 1
In the relationship between the keyhole 45 provided in the lid 2 and the key 24 provided in the substrate storage container opening / closing means 7, there is a gap 46 having a width f. 2 (b), the keyhole 45
Is smaller than the rotation angle of the key 24, and the rotation angle is shifted. For example, in order to rotate the keyhole 45 by 90 °, it is necessary to rotate the key 24 by (90 + △ α) ° as shown in FIG. In addition, the key 24 is not kept rotated by (90 + △ α) °, but it is necessary to return the key 24 to △ α ° to return to the vertical state in order to prepare for the next alignment of the substrate storage container 12.

Therefore, in the substrate processing apparatus according to the present embodiment, as shown in FIG. 1, springs 32, rods 33, holders 34, By using a means consisting of a stopper 35 and using a solenoid valve 36 of a three-position pressure center to drive the air cylinder 29, the cylinder stroke of the air cylinder 29 is overdriven by △ l, and as a result, the latch key 24 is moved by △ α °. It has a configuration that can be overdriven.

FIGS. 3A to 3C are diagrams for explaining the operation sequence (order) of the keys in FIG. 1 and the principle thereof.
(A) shows the key hole insertion or removal, (b) the key release operation, and (c) shows the locking operation.

That is, FIG. 3A shows a state of the air cylinder 29 when the key 24 is in a vertical state.
In this state, the solenoid valve 36 uses the G port, and the air supply to the air cylinder 29 is performed by the D port and the E port of the cylinder 29.
Done from both ports. At this time, inside the cylinder 29, the rod 44 side and the rod
A differential pressure of the integral of the cross section is generated. As a result, the rod 44 of the air cylinder 29 applies a force F2 (= F4-
F3) hits the rod 33. The rod 33
The spring 32 is stationary while being extended by a predetermined length Δl by the force F1 (> F2) of the spring 32.

FIG. 3B shows the operation B of FIG.
Air cylinder 2 after key release of lid of substrate storage container 12)
9. In this state, the solenoid valve 36 uses the H port, and air is supplied only from the D port. In this state, the key 24 is in a horizontal state.

FIG. 3C shows the operation C of FIG.
Air cylinder 2 after key lock of lid of substrate storage container 12)
9. In this state, the solenoid valve 36 uses the F port, air is supplied only from the E port, the rod 33 is pushed in by the thrust F4 (> F1) of the air cylinder 29, and the key 24 is (90+
Δα) Rotate to °. At this time, the keyhole 45 of the substrate container 12 returns to the vertical state. After this, FIG.
Returning to the state of (a), the suction of the lid suction means 26 (FIG. 5) is released, and the substrate storage container 12 is separated from the sealing member 14. FIG. 3A to FIG.
It goes without saying that the operation of (c) is repeated.

However, between FIG. 3 (b) and (c),
As shown in FIG. 6, the operation c by the rotary actuator 37 and the linear guide 38, the sliding operation d of the sealing means 14 by the air cylinder 39 and the linear guide 40, and the storage of the substrate of the mapping sensor 42 of FIG. 6 by the rotary actuator 41 of FIG. There is a turning motion e into the container 12.

As described above, in the substrate processing apparatus of the present embodiment, the key 24 provided on the opening / closing means 7 for opening and closing the lid of the substrate storage container 12 and the keyhole 45 provided on the lid of the substrate storage container 12 After the cover of the substrate storage container 12 is closed, the key 24 is overdriven by providing overdrive correction means 31 for correcting the shift of the rotation angle caused by the dimensional difference of 45 can be reliably returned to the state before opening the lid, and any other substrate storage container opening / closing means 7 can be used.
Of the key 24 into the keyhole 45 can be performed smoothly. As a result, the operation rate and throughput of the substrate processing line can be improved.

Although the present invention has been specifically described based on the embodiments, the present invention is not limited to the above-described embodiments, and it is needless to say that various changes can be made without departing from the gist of the present invention. It is.

[0032]

As described above, according to the present invention,
After the lid of the substrate storage container is closed by the substrate storage container opening / closing means, the key hole of the substrate storage container is made vertical and the key is pulled out, the substrate storage container can be transported, and the smooth key of the opening / closing means for the key hole is opened. Since the insertion can be prompted, the key insertion error can be eliminated, and the operation rate and throughput of the substrate processing line can be improved.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating a configuration of an overdrive correction unit of a lid opening / closing key of a substrate storage container according to an embodiment of the present invention.

FIGS. 2 (a) and (b) are views showing a shift in a rotation angle between a keyhole of a lid of a substrate storage container and a key of a substrate storage container opening / closing means.

3 (a) to 3 (c) are diagrams for explaining the operation sequence and the principle of the key of FIG. 1; FIG. 3 (a) when a keyhole is inserted or withdrawn from the key; Time,
(C) shows the time of the locking operation.

FIG. 4 is an overall configuration perspective view of a semiconductor manufacturing apparatus which is a substrate processing apparatus according to an embodiment of the present invention.

FIG. 5 is a front external perspective view of a substrate storage container opening / closing means of the substrate processing apparatus of the present embodiment.

FIG. 6 is a rear perspective view of the back side of the substrate storage container opening / closing means of FIG. 5;

7 is a top view of a main part of the substrate storage container opening / closing means of FIG. 5;

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Reaction furnace (reaction chamber), 2 ... Reaction gas introduction means, 3 ... Reaction gas exhaust means, 4 ... Boat (substrate support), 5 ... Substrate storage buffer storage means, 6 ... Boat elevating means, 7 Substrate storage Container opening / closing means, 8: substrate alignment means, 9: substrate transfer means, 10: substrate storage container load port 11, substrate storage container transport means, 12: substrate storage container, 14: closing means,
15: Board information reading / writing means, 16: Opening / closing means base,
17: substrate storage container mounting alignment member; 18: substrate storage container mounting base; 19: substrate storage container linear guide;
Linear guide base member, 21: rotary actuator, 22: arm, 23: air cylinder, 24: key,
25: lid alignment member, 26: lid suction means, 27: pulley,
28 timing belt, 29 air cylinder, 30
Clamp member, 31 ... overdrive correcting means, 32
... Spring, 33 ... Rod, 34 ... Holder, 35 ... Stopper, 36 ... Solenoid valve, 37 ... Rotary actuator, 3
8 ... closing means linear guide, 39 ... air cylinder, 40 ...
Closing means linear guide, 41 ... rotary actuator,
42: substrate mapping sensor, 43: substrate information carrier, 4
4 ... rod, 45 ... keyhole, 46 ... gap.

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 5F031 CA02 DA08 FA01 FA11 FA15 GA49 MA28 MA30 NA10 5F045 AA03 DP19 DQ05 EB08 EN04 EN05

Claims (1)

[Claims] 1. The method according to claim 1, wherein a difference between a rotation angle caused by a dimensional difference between a key provided in the opening / closing means of the lid of the substrate storage container and a keyhole provided in the lid of the substrate storage container is provided. A substrate processing apparatus comprising: a correction unit that corrects the key by overdriving the key after closing the key.