M420040 五、新型說明： 【新型所屬之技術&域¥;; ' [0001] 本新型為有關一種卡匣固定裝置，尤指一種可調式的卡 匣固定裝置。 【先前技術】 [0002] 目前一般的晶圓製造廠内，皆使用卡匣（cassette)來暫 時存放晶圓，使晶圓得以存放於該卡匣内，然後成批地 由一個製程區移至下一個製程區，達到方便輸送的需求 ，當欲對該晶圓進行相關的製程作業時，如測試、分類 等，再依靠一機械手臂對該卡匣内的該晶圓進行取放的 動作，而為了使該機械手臂能順利地完成取放的動作， 該卡匣通常會固定於一卡匣固定裝置上，以避免卡匣的 晃動影響晶圓的取放作業。 [0003] 習知的卡匣固定裝置如日本專利公開特許第1 992024936 號所示，其為了固定卡匣避免晃動，在卡匣底面向下延 伸凸出複數定位柱，而於放置該卡匣的平台上預設了符 合複數該定位柱容置的複數溝槽，使該卡匣得藉由該定 位柱卡入該溝槽的形式，而達到定位的效果，同樣的， 在日本專利公開特許第1 999 1 63081號中，為了固定卡匣 ，在卡匣底面向下延伸凸出設有Η型定位條，而於放置該 卡匣的平台上預設了符合該Η型定位條容置的複數溝槽， 並以該Η型定位條卡入該複數溝槽的形式，達到定位效果 [0004] 然而，上述的固定结構，於該卡匣放入該平台上時，由 於該定位柱或Η型定位條，必需向下卡入對應的該溝槽中 ，因此卡匣勢必向下位移，震動到置於卡匣内的晶圓， 表單编號Α0101 第4頁/共36頁 產生了晶圓因此受損的問題。 - _ · . - , - . 【新型内容】 _…_ [0005] 本新型的主要目的，在於解決習知的卡匣固定裝置，於 卡匣向下卡入該卡匣固定裝置時，位於卡匣内的晶圓會 受到震動的影響而產生受損的情形。 [0006] 本新型的另一目的，在於提供一種只需簡易調整，即可 承載多種規格、尺寸之卡匣的卡匣固定裝置。 [0007] 為達上述目的，本新型提供一種可調式卡匣固定裝置， 包含有—S平台、一第一定位組以及一第二定位組。 該卡匣平台包括一容置面及設於該容置面的一第一左溝 槽與一第一右溝槽及一第二左溝槽與一第二右溝槽，該 第一左溝槽與該第一右溝槽分別與該第二左溝槽及該第 二右溝槽相距一縱向間距。 [0008] 該第一定位組包括一第一左活動柱以及一第一右活動柱 ，該第一左活動柱及該第一右活動柱分別設於該第一左 溝槽及該第一右溝槽，且該第一左活動柱與該第一右活 動柱相距一第一橫向間距；該第二定位組包括一第二左 活柱以及一第二右活動柱，該第二左活動柱與該第二右 活動柱分別設於該第二左溝槽與該第二右溝槽，且該第 二左活動柱與該第二右活動柱相距一第二橫向間距。 [0009] 其中，該第二橫向間距大於該第一橫向間距，且該第一 定位組及該第二定位組具有一第一定位狀態及一第二定 位狀態，該第一定位狀態令該第一左活動柱與該第一右 活動柱高於該容置面且該第二左活動柱及該第二右活動 表單編號A010I 第5頁/共36頁 M420040 柱低於該容置面，而該第二定位狀態令該第二左活動柱 ••與該第二浍詰動柱高於該·容置面且該第一左洁動柱及該 第一右活動柱低於該容置面。 [〇αι〇] 為達上述目的，本新型提供另一種可調式卡匣固定裝置 ，用以固定·—，包含有·—^匣平台、一前定位單元 以及一後定位單元。該卡匣平台供該卡匣放置，並具有 一前緣以及一相對該前緣的後緣，該前定位單元固定於 該前緣，而該後定位單元位於該後緣且與該前定位單元 之間形成一容置空間，並包含有一承載座、一固定臂以 及一第一定位臂，該固定臂固定於該承載座，並延伸至 該容置空間，該第一定位臂樞接於該承載座，以相對該 承載座進行一第一轉動行程，該固定臂及該第一定位臂 分別具有遠離該承載座的一定位端與一第一定位端，且 該第一定位臂具有一大於該固定臂的臂長。 [0011] 其中，該第一定位臂於該第一轉動行程中具有一收納位 置以及一限位位置，該收納位置令該第一定位端位移至 該容置空間外而供該定位端與該前定位單元之間形成一 第一定位間距，而該限位位置令該第一定位端位於該容 置空間内而與該前定位單元之間形成一小於該第一定位 間距的第二定位間距。 [0012] 綜上所述，本新型藉由該第一定位組以及該第二定位組 所具有的該第一定位狀態及該第二定位狀態，以及該第 一定位臂於該第一轉動行程中所具有的該收納位置及該 限位位置，分別以該第一左活動柱、該第一右活動柱、 該第二左活動柱以及該第二右活動柱不同的高低位置搭 表單编號Α0101 第6頁/共36頁 Μ42ϋϋ4ϋ 配’還有該固定臂及該第一定位臂分別與該前定位單元 之間形成的該第一定位間距及該第二定位間距達到可 固定不同尺寸之卡£的效果，且由於該第—左活動桂、 該第-右活動柱、該第二左活動柱、該第二右活動柱可 進行高低的調整，並與該前定位單元及該後定位單元分 別以抵靠的方式固定該卡g於前、後、左、右的位移， 因為不會有卡匣為了固定而卡入凹槽的程序，解決習知 卡E於卡人固㈣產生上下震動的問題，避免晶圓因此 受知的情形。 【實施方式】 [⑽13]有關本新型的詳細說明及技術内容，現就配合圖式說明 如下： 剛4參閱「圖1」所示，為本新型第一實施例的立體示意圖 ，如圖所示：本新型為一種可調式卡匣固定裝置，包含 有一卡匣平台10、一第一定位組2〇以及一第二定位組3〇 。该卡匣平台10包括一前緣12、一相對該前緣12的後緣 13、一介於該前緣丨2與該後緣丨3之間的側緣14、一容置 面11以及δ免於該容置面11的一第一左溝槽112與一第一右 溝槽113及一第二左溝槽115與一第二右溝槽116，該容 置面11介於該前緣12以及該後緣13之間，且該前緣12設 有一前定位單元40，該側緣14設置有一侧板141，一後定 位單元50樞接於該側板141上，並樞轉至該後緣13的位置 ’而該第一左溝槽112與該第一右溝槽ι13分別與該第二 左溝槽115及該第二右溝槽116相距一縱向間距η。 [0015]該第一定位組20包括一第一左活動柱21以及一第一右活 Α0101 帛 7 頁/共 36 頁 M420040 動柱23，該第一左活動柱21及該第一右活動柱23分別設 於該第一1溝槽112及該第一右溝槽113，且該第一左活 動柱21與該第一右活動柱23相距一第一橫向間距P1 ;該 第二定位組30包括一第二左活動柱31以及一第二右活動 柱33，該第二左活動柱31與該第二右活動柱33分別設於 該第二左溝槽115與該第二右溝槽116，且該第二左活動 柱31與該第二右活動柱33相距一第二橫向間距P2，且該 第二橫向間距P2大於該第一橫向間距P1。 [0016] 請搭配參閱「圖2A」及「圖2B」所示，「圖2A」為本新 型第一實施例的檔止栓位於釋放位置的示意圖，「圖2B 」為本新型第一實施例的擋止栓位於限制位置的示意圖 ，該第一定位組20還包括一第一左升降單元22以及一第 一右升降單元24，該第一左升降單元22及該第一右升降 單元24分別供該第一左活動柱21及該第一右活動柱23相 對該容置面11垂直位移，而該第二定位組30還包括一第 二左升降單元32以及一第二右升降單元34，該第二左升 降單元32及該第二右升降單元34分別供該第二左活動柱 31及該第二右活動柱33相對該容置面11垂直位移。 [0017] 由於該第一左升降單元22、該第一右升降單元24、該第 二左升降單元32以及該第二右升降單元34具有相同的作 動結構，以下皆以該第一左升降單元22搭配該第一左活 動柱21來舉例說明，而該第一右升降單元24搭配該第一 右活動柱23、該第二左升降單元32搭配該第二左活動柱 31以及該第二右升降單元34搭配該第二右活動柱33則不 再贅述，如下所述，該第一左升降單元22包含有一基座 表單編號A0101 第8頁/共36頁 221、一套筒部222、一墊片228以及一彈性元件223，該 基座221與.·該套筒部222’連接，在此身4體成型，並同設 » · 於該墊片228上，該套筒部222具有一容納該第一左活動 柱21的活動空間，該彈性元件223設於該活動空間内而承 載該第一左活動柱21，並於底端抵觸該墊片228使該第一 左活動柱21得以藉由該彈性元件223的伸縮於該活動空間 ，中，進行上下的垂直位移，在此實施例中，該彈性元件 223為一彈簧。 [0018] 該第一左升降單元22還包括一擋止栓224，該套筒部222 的環壁開設一穿孔2221，該擋止栓224活動穿設於該穿孔 2221中，且該第一左活動柱21凹設有一擋止槽2U，該 擋止槽211對應該擋止栓224，令該擋止栓224於該穿孔 2221中活動，分別具有一釋放位置以及一限制位置，於 該釋放位置，該擂止栓224位於該擋止槽211外，並使該 第一左活動柱21因該彈性元件223的推升，而高於該容置 面11，而於該限制位置，該檔止栓224插入該擋止槽211 内，使該第一左活動柱21壓縮該彈性元件223，而低於該 容置面11。再者，該擋止栓224還穿設有一限位孔2241 ，一限位件2242插入該限位孔2241中，防止該擋止栓 224脫出該穿孔2221，限制該擋止栓224於該穿孔2221中 移動，另外，該第一左活動柱21的周壁向外凸設有一擋 止部212，該套筒部222的内壁於開口的周沿向内延伸形 成一凸出的内簷2222，當該擋止栓224於該釋放位置時， 該第一左活動枉21受該彈性元件223的推升高於該容置面 11，該擋止部212抵靠該内簷2222，限制該第一左活動 柱21脫出該套筒部222外。 表單編號A0101 第9頁/共36頁 [0019] 再請搭配參閱「圖1」’於使用時，該第一定位組2〇及該 ，.·集二定位組3〇具有一第一定位狀態及-一‘案二定位狀態， 該第一定位狀態令該第一左活動柱21與該第一右活動柱 23高於該容置面1丨且該第二左活動柱31及該第二右活動 柱33低於該容置面η，且該第一左活動柱21及該第一右 活動柱23分別會凸出該容置面u，並相距該第一橫向間 距P1，將一於底面左、右兩側各凸設有一-定位翼81a、 81b的卡匣80置於該容置面η上，且該兩定位翼813、 81b間隔的距離穩合對應該第一橫向間距？1，使該第一左 活動柱21及該第一右活動柱2 3各自抵靠位於左、右兩側 的該定位翼81a、81b内側，固定該第一卡匣80於左、右 兩方向的位移’接著再藉由該前定位單元4〇及該後定位 單元50分別抵靠該卡匣8〇的前、後端，然後於前、後方 向©定該卡匣80，因而在該卡匣80不受任何震動的情況 下，固定了該卡匣80。 [0020] 而該第二定位狀態令該第二左活動柱31與該第二右活動 柱33高於該容置面11且該第一左活動柱21及該第一右活 動柱23低於該容置面11，故該第二左活動柱31及該第二 右活動柱33分別會凸出該容置面11，並相距該第二橫向 間距P2 ’將另一於底面左、右兩側各凸設有一定位翼8ia 、81b的卡匣80置於該容置面11上，且該兩定位翼813、 81b間隔的距離穩合對應該第二橫向間距P2，使該第二左 活動柱31及該第二右活動柱33各自抵靠位於左、右兩側 的該定位翼81 a、81 b内侧，然後於左、右方向固定該卡 匣80，接著再藉由該前定位單元40及該後定位單元50分 別抵靠該卡匣80的前、後端’然後於前、後方向固定該 表單编號A0101 第10頁/共36頁 M420040 卡匣80，因而在該卡匣80不受任何震動的情況下，固定 了該卡匣80，要满士緙期的，由於不:同尺冲的卡鼠8() ... ; 其所具的兩定位翼81a、81b相距不同的距離，因此該可 調式卡匣80固定裝置藉由切換該第一定位狀態及該第二 定位狀態，即可分別以該第一定位組2〇的該第一橫向間 距P1及該第二定位組3〇的該第二橫向間距p2對應兩種不 同尺寸的卡匣80進行固定，若欲固定三種不同尺寸的卡 匣80使用，則可再加設一第三定位組及所搭配的第三左 溝槽與第三右溝槽。 [0021] 請搭配參閱「圖3」所示，為本新型第二實施例的立體示 意圖，如圖所示：在此實施例中，與第一實施例相較之 下，其特徵在於該第一左溝槽112及該第一右溝槽113相 互連通，形成一第一滑槽111，該第二左溝槽115及該第 二右溝槽116也相互連通，形成一第二滑槽114，且與該 第一滑槽111的方向平行；而該第1左升降單元22與該第 一右升降單元24則設於該第一滑槽ill内滑動，且該第一 左活動柱21與該第一右活動柱23之間相距一第一可變間 距，同樣的，該第二左升降單元32及該第二右升降單元 34設於該第二滑槽114内滑動，且該第二左活動柱31與該 第二右活動柱33之間相距一第二可變間距。 [0022] 咕搭配參閱「圖3」及「圖4」所示，「圖4」為本新型第 二實施例的定位調整件及卡匣檢知器設置示意圖，在第 二實施例中，該第一左升降單元22、該第一右升降單元 24、該第二左升降單元32、該第二右升降單元34不僅各 包含了該基座221、該套筒部222、該墊片228、該彈性 表單编號A0101 第11頁/共36頁 元件223以及該擋止栓224，更包含了一定位調整件225 、一卡ΕI知器2 2.6 i乂及二檢知器固、定件2〕2-7 -以該第二 左升降單元22舉例說明，該定位調整件225與該套筒部 222連接，在此為一體成型，對應該第一滑槽111的位置 ，沿著遠離該第一右升降單元24的方向延伸，並具有一 長孔，該長孔供一螺絲（圖未示）穿入，鎖固該定位調整 件225於該第一滑槽111中，間接固定該基座221於該第 一滑槽111中的位置；該檢知器固定件227具有一第一承 載面2271以及一相鄰的第二承載面2272，該基座221藉 由該墊片228對應固定於該第一承載面2271上，而該卡匣 檢知器226位於該第二承載面2272上，使該卡匣檢知器 226與該基座221相鄰設置。 [0023] 在此實施例中，於使用時，由於該第一左升降單元22及 該第一右升降單元24得以在該第一滑槽111中移動，因此 該第一可變間距可依欲固定的一卡匣80，調整成適合固 定該卡匣80之兩定位翼81a、81b的距離，接著各以該螺 絲穿入該定位調整件225的該長孔中，將該第一左升降單 元22及該第一右升降單元24鎖固於該第一滑槽111中，使 該第一左活動柱21及該第一右活動柱2 3可穩定地限制該 卡匣80於左、右兩方向的移動，並使該卡匣檢知器226的 位置，對應該卡匣80的該兩定位翼81a、81b，檢測該卡 匣80是否位於該第一左活動柱21及該第一右活動柱23上 ，同樣的，該第二左活動柱31與該第二右活動柱33於該 第二滑槽114中，也是依同樣的方式操作，據此，該可調 式卡匣固定裝置即可自由調整該第一左活動柱21及該第 一右活動柱23之間的該第一可變間距，還有該第二左活 表單编號A0101 第12頁/共36頁 M420040 動柱31及該第二右活動柱33之間的該第二可變間距以 .配合‘11^各種輯&寸的該卡£ 8 G，並檢知該卡謂是 否存在β _]請參閱「圖5j所示，為本新型第三實施例的立體示意圖 ，如圖所示：在此實施例中，該可調式卡匣固定裝置用 以固定-卡_ ’包含有—卡£平台1()、—前定位單元 4〇、一後定位單元50、一左定位單元6〇以及一右定位單 兀70，該卡匣平台1〇具有一前緣12、一相對該前緣12的 後緣13以及一介於該前緣12與該後緣13之間的側緣14， 該側緣14連接設置有一侧板14ι，該前定位單元4〇設置於 該則緣12，該後緣13設有一第三被吸附件131，該後定位 單兀50設有一對應該第三被吸附件131吸附的第三吸附件 512，該後定位單元5〇藉由與該側板141柩接，枢轉至該 後緣13的位置，以該第三吸附件5丨2與該第三被吸附件 131對應吸附而定位於該後緣13，且該後定位單元5〇與該 則疋位早元40之間形成一容置空間9〇(示於圖7A及圖7B) ，該左定位單元60以及該右定位單元7〇設於該卡匣平台 10上，並介於該前定位單元4〇與該後定位單元5〇之間。 [0025]請搭配參閱「圖6」所示，為本新型第三實施例的後定位 單元的部分組件立體示意圖，該後定位單元5〇包含有一 承載座51、一固定臂52以及一第一定位臂53，該後定位 單元50以該承載座51與該側板141樞接，該承載座51包 含一定位調整座511，該固定臂52固定於該定位調整座 511上’並延伸至該容置空間9〇(示於圖7A及圖7B)，該 第一定位臂53樞接於該定位調整座511，以相對該定位調 表單编號A0101 第13頁/共36頁 * [0026] 整座511進行一第一轉動行程，該固定臂52及該第一定位 的臂53鈇別具¥遠離該定'位調整座5 Π的2定位端5 21與一 第一定位端531，且該第一定位臂53的臂長大於該固定臂 52的臂長，要進一步說明的是，該固定臂52與該定位調 整座511固定的一端包含一與該定位調整座511相接的臂 長調整部522，該臂長調整部522具有一調整長孔5221以 及至少一搭配該調整長孔5221鎖合的螺絲5222，而該第 一定位臂53與該定位調整座511樞接的一端包含一與該定 位調整座511樞接的第一樞接部534以及一與該第一樞接 部534相接的第一臂長調整部535，該第一臂長調整部 535具有一第一調整長孔5351以及至少一搭配該調整長孔 5351鎖合的第一螺絲5352。再者，該第一定位臂53於樞 接該定位調整座511的一端分別設有一第一吸附件5 3 2以 及一第二吸附件533，而該定位調整座511分別設置有一 對應該第一吸附件532吸附的第一被吸附件5111以及一對 應該第二吸附件533吸附的第二被吸附件5112。 請搭配參閱「圖7A」及「圖7B」所示，「圖7A」為本新 型第三實施例的收納位置俯視示意圖，「圖7B」為本新 型第三實施例的限位位置俯視示意圖，於使用時，先以 該左定位單元60以及該右定位單元70於左右方向固定該 卡匣80，接著，由於該第一定位臂53於該第一轉動行程 中具有一收納位置以及一限位位置，該收納位置由該第 一定位臂53樞轉至指向上方，使該第一定位端531位移至 該容置空間90外，且該第一吸附件532與該第一被吸附件 5111對應吸附，輔助該第一定位臂53順利定位而不晃動 ，令該定位端521與該前定位單元40之間形成一第一定位 表單编號A0101 第14頁/共36頁 間距SI，而該限位位置由該第一定位臂53樞轉至指向該 前定位單元4;0，使該第一定位端5 31位於該容置空間9 0内 . · . * ，且該第二吸附件533與該第二被吸附件5112對應吸附， 輔助該第一定位臂53順利定位而不晃動，令該第一定位 端531與該前定位單元40之間形成一第二定位間距S2，且 該第二定位間距S2小於該第一定位間距S1，據此，由於 該第一定位間距S1與該第二定位間距S2的不同，因此得 . . · . . . \ «· . 以藉由該第一定位臂53的樞轉以該第一定位間距S1或是 該第二定位間距S2來對應容置兩種不同尺寸的卡匣80， 並於前、後方向固定該卡匣80，而在該卡匣80不受任何 震動的情況下，以前、後、左、右抵靠的方式固定了該 卡匣80，再者，該固定臂52還可調整該臂長調整部522中 的該螺絲5222於該調整長孔5221的鎖合位置，進一步微 調該第一定位間距S1的大小，得以更彈性的與不同尺寸 的該卡匣80搭配固定，同理，該第一定位臂53也可藉由 該第一臂長調整部535達到微調該第二定位間距S2之大小 的效果。 [0027] 再請搭配參閱「圖6」，而若欲固定三種不同尺寸的卡匣 80使用，則可在該定位調整座511上再樞接一第二定位臂 54，且該第二定位臂54的臂長大於該第一定位臂53的臂 長，並具有一遠離該定位調整座511的第二定位端541， 該第二定位臂54以相對該定位調整座511進行一第二轉動 行程，在該第二轉動行程之中，該第二定位臂54具有一 定位位置，該定位位置由該第二定位臂54指向該前定位 單元40，且該第二定位端541位於該容置空間90内並與該 前定位單元40之間形成一第三定位間距，該第三定位間 表單編號A0101 第15頁/共36頁 M420040 距則會小於該第二定位間距S2，以對應固定一尺寸更小 …々.、-的卡0匣:80。要特別說明七―是，該固定眢52-的臂長、會小於 、 該第一定位臂53及該第二定位臂54的臂長，用以固定最 大尺寸的該卡匣80，同樣的，該第二定位臂54與該定位 調整座511樞接的一端也包含一與該定位調整座511樞接 的第二枢接部542以及一與該第二枢接部542相接的第二 臂長調整部543，該第二臂長調整部543具有一第二調鲞 長孔5431以及至少一搭配該第二調整長孔5431鎖合的第 二螺絲5432，並以該第二臂長調整部543來微調該第三定 位間距的大小。 [0028] 請參閱「圖8」所示，「圖8」為本新型第四實施例的立 體示意圖，在此實施例中，將該第一定位組20、第一滑 槽111、該第二定位組30、該第二滑槽114、該第三定位 組、該第三滑槽搭配具有該固定臂52、該第一定位臂53 及該第二定位臂54的該後定位單元50使用，使該可調式 卡匣80固定裝置在固定晶元卡匣80時，不僅可依卡匣80 的尺寸大小調整，穩固的固定該卡1£80，並藉由多組化 的搭配，達到適用固定多種不同尺寸之卡匣80的模組化 功能。 [0029] 綜上所述，由於本新型藉由該第一定位組、該第一滑槽 、該第二定位組、該第二滑槽、該第三定位組' 該第三 滑槽以及具有該固定臂、該第一定位臂及該第二定位臂 的該後定位單元相互搭配，以抵靠的方式於前、後、左 、右固定該卡匣，解決習知卡匣於卡入時產生上下震動 的問題，避免晶圓因此受損的情形，並達到可適用多種 表單编號A0101 第16頁/共36頁 尺寸之卡匣的模組化功能，因此本新型極具進步性及符 合申請辦型.！·和的要件.，奉;依^法7提/出申請：祈鈞局早曰 賜准專利，實感德便。 [0030] 以上已將本新型做一詳細說明，惟以上所述者，僅爲本 新型的一較佳實施例而已，當不能限定本新型實施的範 圍。即凡依本新型申請範圍所作的均等變化與修飾等， 皆應仍屬本新型的專利涵蓋範圍内％ 【圖式簡單說明】 [0031] 圖1，為本新型第一實施例的立體示意圖。 [0032] 圖2A，為本新型第一實施例的擋止栓位於释放位置的示 意圖。 [0033] 圖2B，為本新型第一實施例的擋止栓位於限制位置的示 意圖。 [0034] 圖3，為本新型第二實施例的立體示意圖。 [0035] 圖4，為本新型第二實施例的定位調整件及卡匣檢知器設. 置示意圖。 [0036] 圖5,為本新型第三實施例的立體示意圖。 [0037] 圖6，為本新型第三實施例的後定位單元的部分組件立體 示意圖。 [0038] 圖7A，為本新型第三實施例的收納位置俯視示意圖。 [0039] 圖7B，為本新型第三實施例的限位位置俯視示意圖。 [0040] 圖8，為本新型第四實施例的立體示意圖。 表單编號A0101 第17頁/共36頁 M420040 ^ - [0041]' 【主要元件符號說明】 J .卡 &平台 .： ·- 2- ?c )ij [0042] 11 :容置面 [0043] 111 :第一滑槽 [0044] 112 :第一左溝槽 [0045] 113 :第一右溝槽 [0046] 114 :第二滑槽 [0047] 115 :第二左溝槽 [0048] 116 :第二右溝槽 [0049] 12 :前緣 [0050] 13 :後緣 [0051] 131 :第三被吸附件 [0052] 14 :側緣 [0053] 141 :側板 [0054] 2 0 :第一定位組 [0055] 21 :第一左活動柱 [0056] 211 :擋止槽 [0057] 212 :擋止部 [0058] 22 :第一左升降單元 [0059] 221 :基座 表單编號A0101 第18頁/共36頁 M420040M420040 V. New description: [New technology] & domain ¥;; ' [0001] The present invention relates to a cassette fixing device, and more particularly to an adjustable cassette fixing device. [Prior Art] [0002] At present, in general wafer manufacturers, cassettes are used to temporarily store wafers, so that the wafers can be stored in the cassettes and then moved in batches from one process area to The next process area, to meet the needs of convenient transportation, when the relevant process of the wafer is to be performed, such as testing, sorting, etc., and then relying on a robotic arm to pick up and release the wafer in the cassette, In order to enable the robot arm to smoothly perform the pick-and-place operation, the cassette is usually fixed to a cassette fixing device to prevent the shaking of the cassette from affecting the pick-and-place operation of the wafer. [0003] A conventional latching device is disclosed in Japanese Patent Laid-Open No. 1 992 024 936. In order to prevent the shackle from being swayed, a plurality of positioning posts are extended downwardly on the bottom surface of the cassette, and the latch is placed on the bottom of the cassette. A plurality of grooves corresponding to the plurality of positioning rods are preset on the platform, so that the card is inserted into the groove by the positioning post to achieve the positioning effect, and the same is disclosed in Japanese Patent Laid-Open No. In the case of 1 999 1 63081, in order to fix the cassette, a 定位-type positioning strip is extended downwardly on the bottom surface of the cassette, and a plurality of locating strips corresponding to the locating type positioning strip are preset on the platform on which the cassette is placed. The groove is inserted into the plurality of grooves in the form of the plurality of grooves to achieve the positioning effect. [0004] However, the above fixed structure is when the card is placed on the platform, due to the positioning column or the type The positioning bar must be snapped into the corresponding groove, so the card tends to be displaced downward, vibrating to the wafer placed in the cassette, and the form number Α0101 page 4/36 page is generated. Damaged problem. - _ · . - , - . [New content] _..._ [0005] The main purpose of the present invention is to solve the conventional cassette fixing device, which is located when the cassette is snapped down into the cassette fixing device. Wafers in the crucible can be damaged by vibration and cause damage. Another object of the present invention is to provide a cassette fixing device capable of carrying cassettes of various specifications and sizes with simple adjustment. [0007] In order to achieve the above object, the present invention provides an adjustable cassette fixing device comprising an -S platform, a first positioning group and a second positioning group. The cassette platform includes a receiving surface and a first left groove and a first right groove and a second left groove and a second right groove disposed on the receiving surface, the first left groove The slot and the first right groove are spaced apart from the second left groove and the second right groove by a longitudinal distance. [0008] The first positioning group includes a first left movable column and a first right movable column, and the first left movable column and the first right movable column are respectively disposed on the first left groove and the first right a first lateral movable column and the first right movable column are spaced apart from each other by a first lateral distance; the second positioning group includes a second left living column and a second right movable column, the second left movable column The second right movable column is disposed at the second left groove and the second right groove, respectively, and the second left movable column is spaced apart from the second right movable column by a second lateral distance. [0009] The second positioning interval is greater than the first lateral spacing, and the first positioning group and the second positioning group have a first positioning state and a second positioning state, the first positioning state a left activity column and the first right activity column are higher than the accommodating surface, and the second left activity column and the second right activity form number A010I page 5 / 36 pages M420040 column is lower than the accommodating surface, and The second positioning state is such that the second left movable column is higher than the second accommodating column and the first left cleaning column and the first right moving column are lower than the accommodating surface . [〇αι〇] In order to achieve the above object, the present invention provides another adjustable cassette fixing device for fixing, including a platform, a front positioning unit and a rear positioning unit. The cassette platform is disposed for the cassette and has a leading edge and a trailing edge opposite the leading edge, the front positioning unit is fixed to the leading edge, and the rear positioning unit is located at the trailing edge and the front positioning unit An accommodating space is formed between the first positioning arm and the first positioning arm, and the first positioning arm is fixed to the accommodating space, and the first positioning arm is pivotally connected to the locating seat. The first positioning arm and the first positioning arm respectively have a positioning end and a first positioning end away from the carrier, and the first positioning arm has a larger diameter than the first positioning arm. The arm of the fixed arm is long. [0011] wherein the first positioning arm has a receiving position and a limiting position in the first rotating stroke, the receiving position shifting the first positioning end to the outside of the receiving space for the positioning end and the A first positioning distance is formed between the front positioning units, and the limiting position is such that the first positioning end is located in the receiving space and forms a second positioning distance smaller than the first positioning distance between the front positioning unit and the front positioning unit. . [0012] In summary, the first positioning state and the second positioning state of the first positioning group and the second positioning group, and the first positioning arm of the first positioning arm The storage position and the limit position of the first left movable column, the first right movable column, the second left movable column and the second right movable column are respectively numbered in the form of a high and low position. Α0101 Page 6 of 36 Μ42ϋϋ4ϋ With 'the fixed arm and the first positioning arm and the front positioning unit respectively formed between the first positioning spacing and the second positioning spacing to achieve a fixed size card The effect of £, and because the first-left active gui, the first-right active column, the second left movable column, the second right movable column can be adjusted in height, and the front positioning unit and the rear positioning unit Fix the displacement of the card g in front, back, left and right respectively by means of abutment, because there is no procedure for the card to be inserted into the groove for fixing, and the conventional card E is solved for the up and down vibration of the card holder (4) Problem, avoiding the wafer being known situation. [Embodiment] [(10)13] The detailed description and technical contents of the present invention will now be described with reference to the following figures: As shown in Fig. 1 , a schematic view of the first embodiment of the present invention is shown in the figure. The present invention is an adjustable cassette fixing device comprising a cassette platform 10, a first positioning group 2〇 and a second positioning group 3〇. The cassette platform 10 includes a leading edge 12, a trailing edge 13 opposite the leading edge 12, a side edge 14 between the leading edge 丨2 and the trailing edge 丨3, a receiving surface 11 and a delta free A first left trench 112 and a first right trench 113 and a second left trench 115 and a second right trench 116 are disposed on the front surface 12 of the receiving surface 11 . And the front edge 12 is provided with a front positioning unit 40. The side edge 14 is provided with a side plate 141. A rear positioning unit 50 is pivotally connected to the side plate 141 and pivoted to the rear edge. The first left trench 112 and the first right trench ι13 are spaced apart from the second left trench 115 and the second right trench 116 by a longitudinal pitch η. [0015] The first positioning group 20 includes a first left movable column 21 and a first right living frame 0101 帛 7 pages / 36 pages M420040 moving column 23, the first left movable column 21 and the first right movable column The first left movable column 21 and the first right movable column 23 are spaced apart from each other by a first lateral distance P1; the second positioning group 30 is respectively disposed on the first 1st groove 112 and the first right groove 113. The second left movable column 31 and the second right movable column 33 are disposed on the second left groove 115 and the second right groove 116 respectively. And the second left movable column 31 is spaced apart from the second right movable column 33 by a second lateral distance P2, and the second lateral spacing P2 is greater than the first lateral spacing P1. [0016] Please refer to "FIG. 2A" and "FIG. 2B" as shown in FIG. 2A. FIG. 2A is a schematic view showing the stopper of the first embodiment in a release position, and FIG. 2B is a first embodiment of the present invention. The first positioning unit 20 further includes a first left lifting unit 22 and a first right lifting unit 24, and the first left lifting unit 22 and the first right lifting unit 24 respectively The first left movable column 21 and the first right movable column 23 are vertically displaced relative to the receiving surface 11 , and the second positioning group 30 further includes a second left lifting unit 32 and a second right lifting unit 34 . The second left lifting unit 32 and the second right lifting unit 34 respectively vertically displace the second left movable column 31 and the second right movable column 33 with respect to the receiving surface 11 . [0017] Since the first left lifting unit 22, the first right lifting unit 24, the second left lifting unit 32, and the second right lifting unit 34 have the same actuation structure, the first left lifting unit is as follows 22 is exemplified with the first left movable column 21, and the first right lifting unit 24 is matched with the first right movable column 23, the second left lifting unit 32 is matched with the second left movable column 31 and the second right The lifting unit 34 is not described in detail with the second right moving column 33. As described below, the first left lifting unit 22 includes a base form number A0101, page 8 of 36 pages 221, a sleeve portion 222, and a a spacer 228 and an elastic member 223, the base 221 is connected to the sleeve portion 222', and the body 4 is integrally formed and disposed on the spacer 228. The sleeve portion 222 has a sleeve portion 222. The movable space of the first left movable column 21 is disposed in the movable space to carry the first left movable column 21, and the bottom end is in contact with the spacer 228 to enable the first left movable column 21 By the expansion and contraction of the elastic member 223 in the movable space, the upper and lower sag Straight displacement, in this embodiment, the resilient member 223 is a spring. [0018] The first left lifting unit 22 further includes a stopping bolt 224. The ring wall of the sleeve portion 222 defines a through hole 2221, and the stopping bolt 224 is movably disposed in the through hole 2221, and the first left The movable column 21 is recessed with a stopping groove 2U. The stopping groove 211 corresponds to the stopping bolt 224, and the stopping bolt 224 is movable in the through hole 2221, and has a releasing position and a limiting position respectively. The stop bolt 224 is located outside the stop groove 211, and the first left movable column 21 is higher than the receiving surface 11 by the pushing of the elastic member 223, and the stop position is at the limit position. The plug 224 is inserted into the stopping groove 211, so that the first left movable column 21 compresses the elastic member 223 below the receiving surface 11. Furthermore, the stop bolt 224 is further provided with a limiting hole 2241, and a limiting member 2242 is inserted into the limiting hole 2241 to prevent the blocking bolt 224 from coming out of the through hole 2221, and the blocking bolt 224 is restrained. The peripheral wall of the first left movable column 21 is outwardly convexly provided with a stopping portion 212. The inner wall of the sleeve portion 222 extends inwardly at a periphery of the opening to form a protruding inner ridge 2222. When the stop bolt 224 is in the release position, the first left movable jaw 21 is pushed by the elastic member 223 to the receiving surface 11 , and the stopping portion 212 abuts against the inner bore 2222 to limit the first A left movable column 21 is released from the outside of the sleeve portion 222. Form No. A0101 Page 9 of 36 [0019] Please refer to "Figure 1" for use. In use, the first positioning group 2〇 and the .. 2 positioning group 3〇 have a first positioning state. And a second positioning state, the first positioning state is such that the first left movable column 21 and the first right movable column 23 are higher than the receiving surface 1 and the second left movable column 31 and the second The right movable column 33 is lower than the accommodating surface η, and the first left movable column 21 and the first right movable column 23 respectively protrude from the accommodating surface u, and are apart from the first lateral spacing P1, and A latch 80 having a positioning wing 81a, 81b protruding from the left and right sides of the bottom surface is placed on the receiving surface η, and the distance between the two positioning wings 813, 81b is stable corresponding to the first lateral spacing? 1. The first left movable column 21 and the first right movable column 23 are respectively abutted against the inner side of the positioning wings 81a, 81b on the left and right sides, and the first cassette 80 is fixed in the left and right directions. The displacement 'follows' then the front positioning unit 4 and the rear positioning unit 50 respectively abut the front and rear ends of the cassette 8〇, and then the card 80 is fixed in the front and rear directions, thus the card The cassette 80 is fixed without any vibration. [0020] The second positioning state is such that the second left movable column 31 and the second right movable column 33 are higher than the receiving surface 11 and the first left movable column 21 and the first right movable column 23 are lower than The accommodating surface 11 is such that the second left movable column 31 and the second right movable column 33 respectively protrude from the accommodating surface 11 and are spaced apart from the second lateral distance P2 ′ A latch 80 having a positioning wing 8ia, 81b is disposed on the receiving surface 11, and the distance between the two positioning wings 813, 81b is stable corresponding to the second lateral spacing P2, so that the second left active The column 31 and the second right movable column 33 each abut against the inside of the positioning wings 81 a, 81 b on the left and right sides, and then fix the cassette 80 in the left and right directions, and then the front positioning unit 40 and the rear positioning unit 50 respectively abut the front and rear ends of the cassette 80 and then fix the form number A0101 page 10/36 pages M420040 cassette 80 in the front and rear directions, thus in the cassette 80 Without any vibration, the card 80 is fixed, and it is necessary to be full of menstrual period, because it is not: the same rushing kangaroo 8 () ...; its two positioning The wings 81a, 81b are separated by different distances. Therefore, the adjustable cassette 80 fixing device can respectively switch the first positioning state and the second positioning state to the first lateral spacing of the first positioning group 2 The second lateral spacing p2 of the P1 and the second positioning group 3〇 is fixed by two different sizes of the cassette 80. If the three different sizes of the cassette 80 are to be fixed, a third positioning group may be further added. And the third left groove and the third right groove are matched. [0021] Please refer to FIG. 3 for a schematic perspective view of the second embodiment of the present invention, as shown in the figure: in this embodiment, compared with the first embodiment, the feature is A first groove 111 and a first right groove 113 are connected to each other to form a first sliding groove 111. The second left groove 115 and the second right groove 116 also communicate with each other to form a second sliding groove 114. And the direction of the first sliding slot 111 is parallel; and the first left lifting unit 22 and the first right lifting unit 24 are disposed in the first sliding slot ill, and the first left movable column 21 is The first right movable column 23 is spaced apart from the first variable pitch. Similarly, the second left lifting unit 32 and the second right lifting unit 34 are disposed in the second sliding slot 114, and the second The left movable column 31 and the second right movable column 33 are separated by a second variable pitch. [0022] Referring to FIG. 3 and FIG. 4, FIG. 4 is a schematic view showing the arrangement of the positioning adjustment member and the cassette detecting device according to the second embodiment of the present invention. In the second embodiment, the second embodiment The first left lifting unit 22, the first right lifting unit 24, the second left lifting unit 32, and the second right lifting unit 34 not only include the base 221, the sleeve portion 222, the spacer 228, The flexible form number A0101, page 11 / page 36 element 223 and the stop bolt 224 further include a positioning adjustment member 225, a card holder I 2.6 i 乂 and two detectors, and a fixed member 2 2-7 - Illustrated by the second left lifting unit 22, the positioning adjusting member 225 is connected to the sleeve portion 222, and is integrally formed therein, corresponding to the position of the first sliding slot 111, along the distance away from the first A right lifting unit 24 extends in a direction and has a long hole. The long hole is inserted into a screw (not shown) to lock the positioning adjusting member 225 in the first sliding slot 111 to indirectly fix the base. a position in the first sliding slot 111; the detector fixing member 227 has a first bearing surface 2271 and an adjacent second The bearing surface 2272 is fixed to the first bearing surface 2271 by the spacer 228, and the click detector 226 is located on the second bearing surface 2272, so that the latch detector 226 It is disposed adjacent to the base 221. [0023] In this embodiment, in use, since the first left lifting unit 22 and the first right lifting unit 24 are movable in the first sliding slot 111, the first variable spacing can be a fixed one of the latches 80 is adjusted to fix the distance between the two positioning wings 81a, 81b of the latch 80, and then the screws are inserted into the long holes of the positioning adjuster 225, and the first left lifting unit is 22 and the first right lifting unit 24 is locked in the first sliding slot 111, so that the first left movable column 21 and the first right movable column 23 can stably limit the cassette 80 to the left and right. The movement of the direction and the position of the click detector 226, the two positioning wings 81a, 81b corresponding to the cassette 80, detecting whether the cassette 80 is located at the first left movable column 21 and the first right activity Similarly, the second left movable column 31 and the second right movable column 33 in the second sliding slot 114 are also operated in the same manner, according to which the adjustable cassette fixing device can be Freely adjusting the first variable spacing between the first left movable column 21 and the first right movable column 23, and the second Left Live Form No. A0101 Page 12 of 36 M420040 The second variable spacing between the moving column 31 and the second right moving column 33 is matched with the '11^ various series & inch of the card £8 G, and detecting whether the card has β or not. Please refer to FIG. 5j, which is a perspective view of the third embodiment of the present invention, as shown in the figure: in this embodiment, the adjustable cassette fixing device For fixing - card _ 'includes - card platform 1 (), - front positioning unit 4 〇, a rear positioning unit 50, a left positioning unit 6 〇 and a right positioning unit 70, the cassette platform 1 The utility model has a front edge 12, a rear edge 13 opposite to the front edge 12, and a side edge 14 between the front edge 12 and the rear edge 13. The side edge 14 is connected with a side plate 14ι, the front positioning unit 4〇 is disposed at the edge 12, the trailing edge 13 is provided with a third adsorbing member 131, and the rear positioning unit 50 is provided with a pair of third adsorbing members 512 which should be adsorbed by the third adsorbed member 131, and the rear positioning unit 5〇 is pivoted to the position of the trailing edge 13 by being spliced to the side plate 141, and the third adsorbing member 5丨2 is sucked corresponding to the third adsorbed member 131. And positioning the trailing edge 13 , and the rear positioning unit 5 〇 and the 早 position early 40 form an accommodating space 9 示 (shown in FIGS. 7A and 7B ), the left positioning unit 60 and the right The positioning unit 7 is disposed on the cassette platform 10 and is interposed between the front positioning unit 4〇 and the rear positioning unit 5〇. [0025] Please refer to “Figure 6” for the third type of the present invention. A perspective view of a part of the rear positioning unit of the embodiment. The rear positioning unit 5 includes a carrier 51, a fixed arm 52, and a first positioning arm 53. The rear positioning unit 50 uses the carrier 51 and the side plate 141. The first positioning is performed on the positioning adjustment seat 511 and extends to the accommodating space 9 示 (shown in FIGS. 7A and 7B ). The first positioning is performed. The arm 53 is pivotally connected to the positioning adjustment seat 511 to perform a first rotation stroke with respect to the positioning adjustment form number A0101, page 13 / 36 pages. [0026] The fixed arm 52 and the first positioning The arm 53 is different from the fixed positioning seat 5 Π 2 positioning end 5 21 and a first positioning end 531, and the first The arm length of the arm 53 is greater than the arm length of the fixed arm 52. It is further described that the fixed end of the fixed arm 52 and the positioning adjuster 511 includes an arm length adjusting portion 522 that is in contact with the positioning adjusting seat 511. The arm length adjusting portion 522 has an adjusting long hole 5221 and at least one screw 5222 that is engaged with the adjusting long hole 5221. The end of the first positioning arm 53 pivotally connected to the positioning adjusting base 511 includes a positioning position. a first pivoting portion 534 pivotally connected to the adjusting base 511 and a first arm length adjusting portion 535 that is connected to the first pivoting portion 534. The first arm length adjusting portion 535 has a first adjusting elongated hole 5351 and At least one first screw 5352 that is engaged with the adjustment slot 5351. Further, the first positioning arm 53 is respectively provided with a first adsorption member 523 and a second adsorption member 533 at one end of the positioning adjustment seat 511, and the positioning adjustment seat 511 is respectively provided with a pair of first The first adsorbed member 5111 adsorbed by the adsorbing member 532 and the second adsorbed member 5112 adsorbed by the second adsorbing member 533. Referring to FIG. 7A and FIG. 7B, FIG. 7A is a schematic plan view of a storage position according to a third embodiment of the present invention, and FIG. 7B is a schematic plan view of a limit position according to a third embodiment of the present invention. In use, the left positioning unit 60 and the right positioning unit 70 first fix the cassette 80 in the left-right direction, and then, because the first positioning arm 53 has a storage position and a limit in the first rotation stroke. Positioned, the storage position is pivoted to the upper side by the first positioning arm 53 to displace the first positioning end 531 to the outside of the accommodating space 90, and the first absorbing member 532 corresponds to the first absorbing member 5111. Adsorption, assisting the first positioning arm 53 to be smoothly positioned without shaking, so that a first positioning form number A0101 14th/36 pages spacing SI is formed between the positioning end 521 and the front positioning unit 40, and the limit is The position of the second positioning arm 53 is pivoted to the front positioning unit 4; 0, so that the first positioning end 5 31 is located in the accommodating space 90. The second absorbing member 533 is The second adsorbed member 5112 is correspondingly adsorbed to assist the first positioning. The second positioning distance S2 is formed between the first positioning end 531 and the front positioning unit 40, and the second positioning distance S2 is smaller than the first positioning distance S1, according to which The first positioning distance S1 is different from the second positioning distance S2, so that the first positioning distance S1 or the first positioning arm 53 is pivoted by the first positioning arm S1. The two positioning pitches S2 are correspondingly accommodating two different sizes of the cassettes 80, and the cassettes 80 are fixed in the front and rear directions, and the cassettes 80 are free from any vibration, before, after, left, and right. The latch 80 is fixed in abutting manner, and the fixing arm 52 can also adjust the locking position of the screw 5222 in the arm length adjusting portion 522 to the adjusting long hole 5221 to further finely adjust the first positioning pitch. The size of the S1 can be more flexibly fixed with the different sizes of the cassette 80. Similarly, the first positioning arm 53 can also finely adjust the size of the second positioning interval S2 by the first arm length adjusting portion 535. Effect. [0027] Please refer to FIG. 6 again, and if the three different sizes of the cassette 80 are to be fixed, a second positioning arm 54 can be pivotally connected to the positioning adjustment seat 511, and the second positioning arm is The arm length of the arm 54 is greater than the arm length of the first positioning arm 53 and has a second positioning end 541 away from the positioning adjusting seat 511. The second positioning arm 54 performs a second rotation stroke with respect to the positioning adjusting seat 511. The second positioning arm 54 has a positioning position, the positioning position is directed by the second positioning arm 54 to the front positioning unit 40, and the second positioning end 541 is located in the accommodating space. A third positioning distance is formed between the first positioning unit 40 and the front positioning unit 40. The third positioning form number A0101 is 15 pages/36 pages M420040 is smaller than the second positioning distance S2 to correspond to a fixed size. Smaller...々.,- card 0匣:80. In particular, the arm length of the fixed jaw 52- will be smaller than the arm length of the first positioning arm 53 and the second positioning arm 54 for fixing the largest size of the cassette 80. Similarly, An end of the second positioning arm 54 pivotally connected to the positioning adjusting base 511 also includes a second pivoting portion 542 pivotally connected to the positioning adjusting base 511 and a second arm connected to the second pivoting portion 542. The second arm length adjusting portion 543 has a second adjustable length hole 5431 and at least one second screw 5432 matched with the second adjusting long hole 5431, and the second arm length adjusting portion 543 to fine tune the size of the third positioning pitch. [0028] Please refer to FIG. 8 and FIG. 8 is a perspective view of a fourth embodiment of the present invention. In this embodiment, the first positioning group 20, the first sliding slot 111, and the second The positioning group 30, the second sliding slot 114, the third positioning group, and the third sliding slot are used by the rear positioning unit 50 having the fixed arm 52, the first positioning arm 53, and the second positioning arm 54. When the adjustable cassette 80 is fixed in the wafer card 80, the card can be adjusted not only according to the size of the card 80, but also securely fixes the card 1 £80, and is matched by a plurality of groups. The modular function of the card 80 of various sizes. [0029] In summary, the present invention has the first positioning group, the first sliding slot, the second positioning group, the second sliding slot, the third positioning group, the third sliding slot, and The fixing arm, the first positioning arm and the rear positioning unit of the second positioning arm are matched with each other to fix the card in front, back, left and right in abutting manner, so as to solve the problem that the conventional card is stuck The problem of up and down vibration is generated, the wafer is damaged, and the modular function of a plurality of forms of the form number A0101, page 16 / 36 pages is adopted, so the present invention is highly progressive and conforms Application type.! · And the elements., Feng; according to the law 7 to mention / out of the application: the praying bureau early 曰 grant the patent, the real sense of virtue. The present invention has been described in detail above, but the above is only a preferred embodiment of the present invention, and the scope of the present invention is not limited. That is, the equal changes and modifications made in accordance with the scope of the present application should remain within the scope of the patent of the present invention. [FIG. 1] FIG. 1 is a perspective view of the first embodiment of the present invention. 2A is a schematic view of the stop bolt of the first embodiment of the present invention in a release position. [0032] FIG. 2B is a schematic view of the stop bolt of the first embodiment of the present invention in a restricted position. [0033] FIG. 3 is a perspective view of a second embodiment of the present invention. 4 is a schematic diagram of a positioning adjustment member and a cassette detecting device according to a second embodiment of the present invention. 5 is a perspective view of a third embodiment of the present invention. 6 is a perspective view showing a part of components of a rear positioning unit according to a third embodiment of the present invention. 7A is a top plan view of a storage position according to a third embodiment of the present invention. 7B is a top plan view of a limit position according to a third embodiment of the present invention. 8 is a perspective view of a fourth embodiment of the present invention. Form No. A0101 Page 17 of 36 M420040 ^ - [0041]' [Major component symbol description] J. Card & Platform.: ·- 2- ?c )ij [0042] 11 : accommodating surface [0043] 111: first chute [0044] 112: first left groove [0045] 113: first right groove [0046] 114: second chute [0047] 115: second left groove [0048] 116 : second right groove [0049] 12 : leading edge [0050] 13 : trailing edge [0051] 131 : third adsorbed member [0052] 14 : side edge [0053] 141 : side plate [0054] 2 0 : a positioning group [0055] 21: first left movable column [0056] 211: stop groove [0057] 212: stopper [0058] 22: first left lifting unit [0059] 221: base form number A0101 Page 18 of 36 M420040
[0060] 222 ： 套筒部 [0061] 2221 :穿孔 [0062] 2222 :内簷 [0063] 223 ： 彈性元件 [0064] 224 : 擋止栓 [0065] 2241 :限位孔 [0066] 2242 :限位件 [0067] 225 : 定位調整件 [0068] 226 : 卡匣檢知器 [0069] 227 : 檢知器固定件 [0070] 2271 :第一承載面 [0071] 2272 :第二承載面 [0072] 228 : :墊片 [0073] 23 ： 第一右活動柱 [0074] 24 ： 第一右升降單元 [0075] 30 ： 第二定位組 [0076] 31 ： 第二左活動柱 [0077] 32 : 第二左升降單元 [0078] 33 ： 第二右活動柱 [0079] 34 ： 第二右升降單元 表單編號A0101 第19頁/共36頁 M420040 [0080] 40 :前定位單元 [0081] —50 ·:後定位單羌‘— [0082] 51 :承載座 [0083] 511 :定位調整座 [0084] 5111 :第一被吸附件 [0085] 5112 :第二被吸附件 [0086] 512 :第三吸附件 [0087] 52 :固定臂 [0088] 521 :定位端 [0089] 522 :臂長調整部 [0090] 5221 :調整長孔 [0091] 5222 :螺絲 [0092] 53 :第一定位臂 [0093] 5 31 :第一定位端 [0094] 532 :第一吸附件 [0095] 533 :第二吸附件 [0096] 534 :第一框接部 [0097] 535 :第一臂長調整部 [0098] 5351 :第一調整長孔 [0099] 5352 :第一螺絲 表單编號A0101 第20頁/共36頁 [0100]M420040 [0101] [0102] [0103] [0104] [0105] [0106]222: sleeve portion [0061] 2221: perforation [0062] 2222: inner crucible [0063] 223: elastic member [0064] 224: stopper bolt [0065] 2241: stopper hole [0066] 2242 : limit Position [0067] 225 : Positioning adjustment member [0068] 226 : Jam detector [0069] 227 : Detector fixing member [0070] 2271: First bearing surface [0071] 2272: Second bearing surface [0072 ] 228 : :shield [0073] 23 : first right movable column [0074] 24 : first right lifting unit [0075] 30 : second positioning group [0076] 31 : second left movable column [0077] 32 : Second left lifting unit [0078] 33 : Second right moving column [0079] 34 : Second right lifting unit form number A0101 Page 19 / Total 36 pages M420040 [0080] 40 : Front positioning unit [0081] - 50 · : Rear positioning unit — '— [0082] 51 : Carrier [0083] 511 : Positioning adjustment seat [0084] 5111 : First adsorbed member [0085] 5112 : Second adsorbed member [0086] 512 : Third adsorption [0087] 52 : Fixed arm [0088] 521 : Positioning end [0089] 522 : Arm length adjusting part [0090] 5221 : Adjusting long hole [0091] 5222 : Screw [0092] 53 : First positioning arm [0093]5 31 : first positioning end [0094] 532 : first adsorbing member [0095] 533 : second adsorbing member [0096] 534 : first frame connecting portion [0097] 535 : first arm length adjusting portion [0098] 5351 : First Adjustment Long Hole [0099] 5352 : First Screw Form No. A0101 Page 20 / Total 36 Pages [0100] M420040 [0102] [0103] [0104] [0105] [0106]
[0107] [0108] [0109] [0110] [0111] [0112][0110] [0112] [0112] [0112]
[0113] [0114] [0115] 54 :第二定位臂 d 341 :第二定位端 542 :第二樞接部 543 :第二臂長調整部 5431 :第二調整長孔 5432 :第二螺絲 60 :左定位單元 70 :右定位單元 80 :卡匣 81a、81b :定位翼 90 :容置空間 Η :縱向間距 Ρ1 :第一橫向間距 Ρ2 :第二橫向間距 51 :第一定位間距 52 :第二定位間距 表單编號Α0101 第21頁/共36頁[0115] 54: second positioning arm d 341: second positioning end 542: second pivoting portion 543: second arm length adjusting portion 5431: second adjusting long hole 5432: second screw 60 : left positioning unit 70: right positioning unit 80: cassettes 81a, 81b: positioning wings 90: housing space Η: longitudinal spacing Ρ1: first lateral spacing Ρ2: second lateral spacing 51: first positioning spacing 52: second Positioning Pitch Form No. Α0101 Page 21 of 36