TW200932375A - Liquid material coating device and defect correction apparatus using the coating device - Google Patents

Abstract

The object of the present invention is to provide a liquid material coating device capable of shortening the coating time. The solution of the present invention is that in a defect correction apparatus, a movable plate 42 is movably provided between a substrate 5 and an observation cone 31a and in a plane parallel to the substrate 5, and a plurality of object lenses 2 and a plurality of coating units are provided below the movable plate 42. To observe the defect on the surface of the substrate 5, the movable plate 42 is moved to dispose the desired object lens 2 under the observation cone 31a. To coat correction ink 20 to the defect, the movable plate 42 is moved to dispose the desired coating unit 43 under the observation cone 31a. Therefore, by making a plurality of coating units coat inks 20 of different colors, there is no need to clean a coating needle 11 each time the color of the ink 20 is changed, so that the ink coating time is shortened.

Description

15(a) to (c) are shown in 200932375. 9. Description of the Invention: The present invention relates to a liquid material application device and a defect correction device using the same. In particular, there is a liquid material application device for applying a liquid material to a fine region on a substrate, and a defect correction device using the same. More specifically, the present invention relates to a defect correction device which is modified by applying a correction liquid to a white defect of a liquid crystal color filter substrate. [Prior Art] In recent years, as the size of LCD (Liquid Crystal Display) has increased and the number of pixels has increased, the number of pixels has increased, making it difficult to manufacture LCDs without defects, and the probability of occurrence of defects has gradually increased. In order to improve the yield under such conditions, there is no shortage of defect correction means for correcting defects occurring in the process of the color filter of the LCD in the production line. ---, V 〇 叼 叼 图 图 。 。 。 。 。 。 。 。. In the 15th (a) to (c), the color filter includes: a bright substrate, a lattice pattern called black_51 formed on the surface thereof, and a plurality (four) (red) pixel (four) (green) pixel. Μ and B (blue) pixels 54. In the color of the pixel or black array 51 of the color filter, as shown in the figure i5(a), the white defect 55 of the color drop is desired, or the color and adjacent pixels are not as shown in the 15th (b) figure. A color defect, or a black defect 56, or a pixel defect 57 or the like as in the 15th (th). 15(C) is not shown, the foreign matter is attached to the pixel. As a method of correcting the white defect 55, there is an ink application mechanism.

2075-9995-PF 5

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200932375 The color and white defect gc; Mm main ^, pixel-like ink attached to the coating needle. P' is a method in which the ink adhered to the end portion before the application of the needle is applied to the white defect and corrected. Further, as a method of correcting the black defect 56 or the foreign matter defect 57, after the defective portion is subjected to laser cutting to form a rectangular white defect 55, the ink adhered to the end portion before the application needle is applied by the ink application mechanism. A method of correcting the white defect 55. Fig. 16 is a perspective view showing a part of the structure of the conventional ink application mechanism. In the drawing of Fig. 16, the ink application mechanism includes a coating needle 61 for ink application and a coating needle driving cylinder 62 for vertically driving the coating needle 61. The application needle 61 is provided at the distal end portion of the drive shaft 63 of the application needle drive cylinder 62 via the application needle holder 64 and the holder 65. Further, the present ink application mechanism includes a horizontally disposed rotary working port 66'. A plurality of ink tanks 67 to 70 are sequentially disposed on the rotary table 66 in the circumferential direction, and a cleaning device is disposed on the rotary table 66. 71 and an empty oxygen flushing device 72. The rotating shaft 73 is also erected at the center of the rotary table 66. Further, a notch portion 74 for passing the coating needle 61 is formed on the rotary table 66 when the ink is applied. R (red), G (green), B (blue), and black ink are appropriately injected into the ink tanks 67 to 70, respectively. The cleaning device 71 is for removing the ink adhering to the application needle 61, and the air rinsing device 72 is for blowing off the cleaning liquid adhering to the application needle 61. Further, the ink application mechanism includes an indexing motor 75 for rotating the rotating shaft 73 of the rotary table 66, and an indexing plate 76 for rotating with the rotating shaft 73; and an indexing sensor 77, For detecting the rotational position of the rotary table 66 via the indexing plate 76; and the origin returning 2075-9995~PF 6 200932375 sensor 78 for detecting via the indexing plate 76 The rotational position of the rotary table 66 is returned to the origin. The switch 75 is controlled to rotate the rotary table 66 in accordance with the outputs of the sensors, and the notch portion 74, the ink tank 67 70 cleaning device 71, and the air rinsing device 72 are below the coating needle 61. The position of:: Following the action of this ink application mechanism. First, the defect of the non-plate is used: the front end of the coating needle 61 is positioned at the predetermined position of the color chopper base and the m-side. Next, the (4) 75 is used to rotate the desired ink tank (for example, 67) to the coating, and the coating needle 6 is driven by the coating needle 62, and the ink is attached to the coating needle 6i. Front end. Second 75: Γ, 66 rotation, and... Coating needle: After: ι action, 'Use the coating needle to drive the 2 drive ink coating to attach the front end of the coating needle 61 to the color filter The defective portion of the photoconductor substrate. ❹ When cleaning the application needle 61, the motor is rotated to wash the crucible w7, and the rotary table 66 is driven by the needle driving cylinder 62 to drive the coating number: below the needle 61. Then The ink adhered to the upper surface 61 is washed away by applying the dz drive coating needle 61. Then, the application needle 66 is rotated by the horse:=, and the air rinsing device 72 is moved to 5 to make the rotary table privately coated. Next, under the AGO, the needle (four) cylinder 62 drives the coating needle 61 to feed the needle, and the heart is applied to the needle. The attached cleaning liquid (for example, the movement on the surface is shown in the figure 'Blowing No. 236933). SUMMARY OF THE INVENTION].

2075-9995-PF 7 200932375 [Problem to be Solved by the Invention] However, in the conventional ink application mechanism, only the nipple application needle 61 is provided, and since the application needle 61 is cleaned every time the color of the correction ink is changed, it has Fixed a problem with longer time. Accordingly, the main object of the present invention is to provide a liquid material application device which can shorten the application time and a defect correction device using the same. [Means for Solving the Problem] The liquid material coating device of the present invention applies a liquid material to a fine region on a substrate, and is characterized by comprising: a viewing lens barrel for observing a fine region; and a movable plate; The substrate can be moved in a plane parallel to the substrate between the substrate and the viewing tube; a plurality of objective lenses are disposed under the movable plate; a plurality of coating units are disposed under the movable plate for respectively attaching The liquid material at the front end of the application needle is applied to the fine region; and the first driving means moves the movable plate while observing the fine region, and the selected objective lens of the plurality of objective lenses is disposed on the observation mirror Below the canister, in the case where a liquid material is applied to the fine region, the movable plate is moved, and the selected one of the plurality of coating units is disposed under the observation lens barrel. The movable plate is disposed to be movable in the first and second directions orthogonal to each other, and the first driving means preferably moves the movable plate in the first and second directions. Preferably, the method further includes: detecting means 'detecting the position of the movable plate; and means for memorizing, detecting the result of the memory detecting means; and detecting, by the detecting means, the optical axis of each objective lens and the optical axis of the observation lens barrel by the first driving means - approximately 2075-9995-PF 8 200932375, the first position of the movable plate at the time of coincidence, and the second position of the movable plate when the tip end of the coating needle of each coating unit and the optical axis of the observation lens tube substantially coincide with each other, and The memory is used to pre-memorize the test results. The i-th driving means operates based on the detection result of the detecting means and the memory content of the memory means. When the fine area is observed, the movable plate is moved to the first position corresponding to the selected objective lens, and the fine area is applied. In the case of a liquid material, the movable plate is moved to a second position corresponding to the selected coating unit. Further preferably, the calculation means includes a case where another fine region of the liquid material is to be applied at a position other than the observation center in the observation range of the observation lens barrel, and the calculation from the observation center to the other fine region is calculated. i and the distance in the 2nd direction; the first! The driving means moves the movable plate (four)' to move the front end of the selected coating unit from the observation center to the other fine area based on the calculation result of the calculation means. Further preferably, the movable plate is provided so as to be movable toward the crucible (the direction is moved; the plurality of objective lenses and the plurality of coating units are arranged in a row in the first direction in the lower direction of the movable plate; and the first driving means is such that the movable plate is oriented Further preferably, the method further includes: an i-th detecting means for detecting a position of the movable plate in the first direction; and an i-th memory means for detecting a detection result of the detecting means; and detecting, by the i-th detecting means The first driving means sets the first position when the optical axis of each objective lens and the optical axis of the observation lens barrel substantially coincide with each other, and the first position of the optical axis of the coating needle of each coating unit The position of the direction is roughly the same as that of the movable plate in the first time. The first detection result is used to memorize the detection result.

2075-9995-PF 9 200932375 The driving method is based on the memory content of the detection result of the detection method of the 丨洛丨弟1, the name of the gaze, the spear 丄 手段 手段 means to correspond to the selected object 锫 哲," The first position of the second mirror is surveyed, and the liquid material m is applied to the fine region to move the movable plate to the second position of the misalignment. Pen writing early 兀

Further preferably, the second driving means further moves the observation lens barrel, the movable plate, and the first driving means in a second direction orthogonal to the first direction in a plane parallel to the substrate; the f2 detecting means is The position of the second direction of the movable plate is detected; and the second memory means stores the detection result of the second detection hand, and the detection means by the 帛2 detection means is used to detect the optical axis of each objective lens and the observation tube. The position of the optical axis in the j-th direction is substantially the same as the position of the 帛3 of the movable plate when the optical axis of each objective lens and the position of the second region in the second direction are substantially matched by the second driving means, and each of the movable driving means The tip end of the coating needle of the coating unit and the position of the optical axis of the observation lens barrel in the first direction substantially coincide with each other, and the position of the tip end of the coating needle of the coating unit and the second direction of the fine region is substantially the same by the second driving means. The fourth position of the movable plate at the time of coincidence is used to store the detection result in advance by the second memory means. The second driving means operates based on the detection result of the second detecting means and the memory content of the second s memory means, and when the fine area is observed, the movable plate is moved to the third position corresponding to the selected objective lens. In the case where the liquid material is applied to the fine region, the movable plate is moved to the fourth position corresponding to the selected coating unit. It is also preferable to include a calculation means for the case where the micro-region 2075-9995-PF 10 200932375 is applied to the liquid crystal material at a position other than the observation center in the observation range of the observation cylinder, and the calculation is performed from the observation. The distance from the center to the first and second directions of the other fine regions; the first and second driving means move the movable plate according to the calculation result of the calculation means, so that the front end of the coating needle of the selected coating unit is The observation center moves over the other fine areas. Further preferably, the movable plate is arranged to be rotatable; the plurality of objective lenses and the plurality of coating units are arranged in a row along a circle centered on the rotating shaft of the movable plate; and the optical axis of the viewing barrel and the rotating shaft of the movable plate are parallel The ground is arranged to separate only the radius of the circle; the first driving means rotates the movable plate. Further preferably, the first detecting means detects the rotation angle of the movable plate and the first memory means, and stores the detection result of the first detecting means; and detects, by the first detecting means, the first driving means When the optical axis of the objective lens and the optical axis of the observation lens barrel substantially coincide with each other, the first rotation angle of the movable plate and the movable plate of the front end of the coating needle of each coating unit and the optical axis of the observation lens barrel are substantially the same 2 The angle of rotation is used, and the detection result is memorized in advance using the first memory means. The first driving means operates based on the detection result of the first detecting means and the memory content of the first memory means, and when the fine area is observed, the movable plate is rotated only by the first rotation angle corresponding to the selected objective lens. When the liquid material is applied to the fine region, the movable plate is rotated only by the second rotation angle corresponding to the selected coating unit. Further preferably, the second driving means moves the observation lens barrel, the movable plate, and the first driving means in a direction parallel to the substrate; the second detecting means detects the position of the movable plate; and the second memory means And detecting the detection result of the second detecting means by the second detecting means, and detecting, by the second detecting means, the optical axis of each of the objective lens axis and the observation lens barrel substantially coincident by the first driving means 2075-9995-PF 11 200932375 and by the second driving means The first position of the movable plate when the light extraction and the fine area of the objective lens are substantially matched, and the first driving means, the front end of the coating needle of each coating unit and the optical axis of the observation lens barrel are substantially matched, and the second position is obtained. The turbulent means preliminarily stores the detection result by the second memory means by making the tip end of the application needle of the coating unit substantially coincide with the fine area. The f 2 driving means operates based on the detection result of the second detecting means and the memory content of the second memory means, and when the fine area is observed, the movable plate is moved to the third position corresponding to the selected objective lens, and © The optical axis and the fine area of the objective lens are substantially identical, and in the case where the liquid material is applied to the fine area, the movable plate is moved to the second position corresponding to the selected coating unit, and the coating needle of the coating unit is applied. The front end and the fine area are substantially identical to each other, and it is preferable to include a calculation means for the case where m is coated with other fine areas of the liquid material at a position other than the observation center in the observation range of the observation barrel. The distance and direction from the center to the other fine areas; the f 2 driving means moves the movable plate according to the calculation result of the calculation means to move the front end of the coating needle of the selected coating unit from the observation center to the other fine area Above. Further preferably, the coating unit is selected such that the coating needle to which the liquid material is attached at the front end protrudes downward. 4 includes a second driving means for causing the observation barrel, the movable plate, and the first driving hand and the lower team. The slave is lowered, and the front end of the coating needle is brought into contact with the fine area. Further, the defect correction package of the present invention is characterized in that it includes the liquid material coating device; the fine area is a field; and the fine pattern formed on the substrate is 2075-9995-PF 12 200932375 defective portion 'liquid material It is used to correct the correction fluid of the defective part. [Effect of the Invention] The liquid material application device and the defect correction device of the present invention are provided with a movable plate that can move in a plane parallel to the substrate between the substrate and the observation lens barrel, and a plurality of objective lenses and a plurality of The coating unit is disposed under the movable plate, and moves the movable plate while observing the fine area, and arranges the desired objective lens under the observation lens barrel, and applies the liquid material to the fine area to make the movable plate. Move and move the desired coating unit to the τ of the observation cylinder. Therefore, by coating a plurality of coating units with a plurality of liquid materials, it is possible to shorten the coating time because it is not necessary to change the type of the liquid material each time to clean the coating needle. [Embodiment] Before explaining an embodiment of the present invention, a defect correction device which is the basis of the present invention will be described. Fig. 1 is a view showing a main P blade of the defect correcting device. Fig. 1 is a view showing an optical system 3 including an observation lens barrel 1 and a plurality of objective lenses 2 having different magnifications. = rotator not shown, the desired objective lens 2 of the plurality of objective lenses 2 can be selected, and the selected objective lens 2 is moved to the observation system 3 system to be loaded, and the observation head is planted on the Z-axis table 4. Correction of the target liquid The first substrate 5 and the objective lens 2 are mounted on the ΧΥ table (not shown). The substrate 5 is moved toward the y mm z τ ^ by the ΧΥ table toward the y mm z τ ^, and the axis = the table 4 moves the observation optical system 3 toward the ζ axis direction, and the focus of the objective lens 2 is moved. Arbitrarily aligned with the surface of the substrate 5

2〇75~9995-PF 13 200932375 position, and can be viewed in a magnified view. The Z-axis table 4 is also loaded with an ink application mechanism 6. As shown in the second (a) and (b), the ink application mechanism 6 includes four sets of prad, R, G, Β and black, and 7L 7 to 10' coating units 7 to 1 Coated needle

Fixture and ink container 13. The coating units 7, 8 are mounted on the I stage 14, and the coating units q, in## & 9 10 are mounted on the X2 table 15, as shown in the summer diagram, the tables U, 15 are loaded on the z pumping The table 16 is mounted on the y-axis table I?. The application needle 11 selected for coating is moved to the same position in the Y-axis direction as the defect position of the coating needle 11 by the Y-axis table 17, and the z-axis table 16 is used. Any one of the coating units 7 to 10 including the selected coating needle 11 is lowered in the vertical direction to be inserted under the objective lens 2, and the coating sheet tg7 to 10 containing the selected coating needle u is loaded. Any one of the 工作1 table 14 or the yoke 2 table 15 is moved toward the objective lens 2 to the same position as the X-axis direction of the defect position where the coating needle n is applied, whereby the objective lens 2 and the liquid crystal color can be inserted. Between the filter substrates 5 . The coating unit 7 includes two arms 18 and 19 as shown in the second (a) and (b). The application needle holder 12 is attached to the front end of the arm is, and the ink container 13 is attached to the front end of the arm 19, and the application needle n is inserted into the ink container 13. As shown in Fig. 3, the hole i3a is opened to the bottom of the ink container 13, and the ink 20 is injected. The hole 13a is set to a small size in which the ink 20 cannot flow out. The holding portion 21 is provided at a side portion of the ink container 13, and an ink container fixing pin 22 for fixing the ink container 13 to the arm 19 via a magnet (not shown in Figs. 2075-9995'PF 14 200932375) is provided in the holding portion 21. The front end portion β?〇ρ, οπ The opening portion of the ink tank 13 is closed by the shy 23, and the hole 23a is opened to the cover (2). And the cover: the needle U has a stage shape 'which is composed of the front worm u and the large diameter portion He fixed to the coated needle detachment 12, and the diameter of the lb is set to be larger than the hole of the ink container u. Straight: The glaze is smaller, and the straight k, 〇, ^ 仫 of the large diameter portion 1 lc is set to be smaller than the diameter of the ink container 13 < the hole Z3a. Returning to the second (a) (b) diagram, the base end portion of the armula 9d is supported by the sliding mechanism 24 so that the central portion of the arm is up and up β can be moved up and the base end portion of the arm 18 Supported by the sliding mechanism 25, the support base 26 can be moved up and down. An industrial actuator that restricts movement below the arms 18, 19 is placed at the lower end of the bracket 26, and the lower end of the base end portion of the arm 18 is loaded and loaded on the support base 26. Next, the operation of the defect correction device will be described. While waiting, the arm 18 is held at the upper limit position by the cylinder 28 and the arm 19 is suspended from the arm. At this time, the distance between the arms 18 and 19 in the upper and lower directions becomes maximum. As shown in Fig. 3, the tip end portion Ua of the coating needle u is immersed in the ink 2''. At the time of correction, as shown in Fig. 4, in step 51, the operator specifies the position at which the ink is applied to the defect displayed on the monitor screen (not shown). In step S2, it is confirmed whether or not the objective lens 2 used for observation is the objective lens 2 into which the application needle can be inserted, i.e., whether it is the objective lens 2 having a magnification of 1〇. When the magnification of the objective lens 2 is, for example, 20 times, the rotation of the rotator is performed at step δ3, and the objective lens 2 is switched to the objective lens 2 of 10 times. At step s4, the objective lens 2 of the rotator is confirmed. The completion of the switching is performed in the case where the switching of the objective lens 2 2075-9995-PF 15 200932375 is completed, and the case where the H mirror 2 is driven G times in the boat kneeling & S5 is in the step correction position. ...17' to move the desired coating needle to the defect position. In the step... the arm is lowered to the lower limit 19, the upper arm 19 is in contact with the stopper 27 earlier than the arm 18, and the arm 18, The distance between the upper and lower directions becomes the most 1* # « 55 I The other end of the needle 11 is lla ^ The ink "H13 hole 13a' is attached to the protruding coating from the bottom ink 20 of the ink ^ 13" ❹ς7 The tip end portion 11a of the needle 11 is fixed. Then, the needle u is lowered on the needle z-axis table 4, and the coated tip end portion contacts the defective portion of the substrate 5 = ink 2. The substrate 5 is applied to the substrate 5. In the step of stepping up, the application needle U is raised, and in the step, the driving needle 28 is placed in the ink container 13. In step 86 (3), the ink application is finished. _ There are a plurality of defects in the defect portion. "Because the ink is coated with ❿Γ', it is confirmed in step S11' whether or not there is a lower coating position, in the case of setting: in step (4) 2, profit... (10) moving the substrate 5, and then performing steps S6 to si〇e By repeating this movement, two St: all of the defective portions of the ink are applied. In the step S11, the case where the coating position is missing is "retracted from the defect correction position" in the step m, and the correction is completed in the step SU. The water 20 is inked: the coating mechanism 6 can clean the coating needle u by changing the color of the applied ink ^0 every time, so that the correction period can be shortened by the first cleaning time. Yes, yes because the coating needle u is inserted directly under the objective lens 2

2075-9995-PF 16 200932375 Injecting and applying ', it is necessary to prevent the objective lens 2 from interfering with the objective lens 2 in the state where the interference with the objective lens 2 is avoided (the observation surface from the correction target substrate 5 to the objective lens ratio) The higher the working distance is, the shorter the distance is. The lower end distance is different. The selection of the coating mechanism 6' of the material r 2 depends on the relationship with the working distance. 'Requires 2: 窣: can be 1〇 or less 'for example' It is necessary to switch the objective lens 2 to 1 from the case where the application is performed using a 20-time objective lens 1 =; After the magnification is applied, the application needle 11 is inserted. Since the object (4) and (4) are in the rotator for the objective lens ==, it is necessary to arrange the coating needle U outside the object === in order to avoid the interference of the ratcheting of the objective lens 2 when waiting. From the usual waiting position, waiting for the rotation of the rotator for switching the objective lens 2 to be completed, the ink 20 is applied to the defective portion immediately below the objective lens 2. Material change time 2 = shortening the correction period shortening the correction period shortens the cutting of the objective lens 2: the interference range of the two objective lenses 2 to the time when the objective lens 2 is inserted directly under the coating 2 . In other words, the correction period increases the amount of time. Further, the ink application mechanism 6 of Fig. 1 has a larger number of drive shafts than the mechanism, and also has a problem that the device price becomes expensive. Ben: The Department of Health managed to solve this problem. [First Embodiment] Fig. 5 is a view showing a defect repair and an overall structural view of a Jth embodiment of the present invention. In Fig. 5, the defect correction device comprises: a repair head; an observation optical system 3 (10) camera 32, a cutting laser device

, ink coating mechanism 34 and ink curing light source%; Z

2075-9995-PF 17 200932375 The shaft table 36' moves the correction head to the vertical direction (the x-axis direction) of the liquid crystal color chopper substrate 5 to be corrected; the fork table is loaded with the spindle table 36. And moving the ^-axis table 38 toward the x-axis direction, moving the substrate 5 and moving in the γ-axis direction; controlling the computer; controlling the overall operation of the device; and displaying the image captured by the camera 32 by the monitor 4G And the operation panel 4 is for inputting an instruction from the operator to the control computer 39. The observation optical system 31 is for observing the surface state of the substrate 5 or the state of the correction ink 20 applied by the ink application mechanism 34. The image observed by the observation optical system 31 is converted into an electrical signal by the camera 32, and is not displayed on the monitor 40. The cutting laser device 33 irradiates the unnecessary portion on the substrate 5 by observing the prior art system 31. The ink application mechanism 34 applies the U ink 2G to the white film (4) generated by the substrate 5 and corrects it. The ink hardening light source 35 includes, for example, a laser, and the ink application mechanism 34 emits light to be hardened. Recording (4) Positive Ink 20 Irradiation of Rays In addition, the structure of the apparatus is, for example, a structure called 'the Z-axis table on which the observation optical system 31 is mounted, and the X-axis table 37 is loaded, and then χ ^ 7 , the port 37 is loaded on the boring axis and the observation optics is shown in Fig. 6 is a perspective view showing the main part of the observation optical system, s). The 7th (a) VII of the coating mechanism 34 is from Fig. 6 Look at the direction

2075-9995-PF 18 200932375 The diagram of the main part is a diagram showing the ink application operation. In Fig. 6 and Figs. 7(a) to (c), the defect correcting device comprises: a movable plate 42, a plurality of (e.g., five) objective lenses 2 having different magnifications, and ink for applying different colors. A plurality of (for example, five) coating units 43. The movable plate 42 is provided to be movable between the lower end of the observation lens barrel 31a of the observation optical system 31 and the substrate 5 in the z-axis direction and the γ-axis direction: Further, five through-holes 42a are formed in the movable plate 42, and their respective corresponding The objective lens 2 is 5 。. The five through holes 42a are arranged at a predetermined interval in the γ-axis direction. Each of the objective lenses 2 is fixed to the lower surface of the movable plate 42 in such a manner that its optical axis and the center line of the corresponding through hole are formed. Further, the optical axis of the observation lens barrel Mg and the optical axis of each objective lens 2 are arranged in the Z direction which is perpendicular to the sense axis direction and the ¥ axis direction. Further, the five coating units 43 are fixed to the lower surface of the movable plate 42 so as to be spaced apart from each other in the γ-axis direction. Each of the five coating units is disposed so as to be adjacent to the five objective lenses. Each of the coating units 43 is shortened as shown in the first section to the horizontal direction of the arms 18 and 19 of the coating unit 7 shown in Fig. 3 Further, the cylinder 28 is disposed above the arms 18, 18, 19, and the device configuration is changed from the k-wide type to the vertical type. This is because the objective lens 2 and the coating unit 43' are vertically shifted in order to quickly switch. It is more advantageous than the horizontal type. The movable plate 42 is mounted on the XY table 44 as shown in Fig. 8, and the XY table 44 is mounted on the Z-axis table 36 of Fig. 5. "The table 44 is attached to When the defect of the surface of the substrate 5 is observed, the movable plate 42 is moved to make the optical axis of the selected objective lens 2 of the five objective lenses 2 coincide with the optical axis of the observation lens barrel 313, and the correction ink 20 is applied to the defect. Happening,

2075-9995-PF 19 200932375 The movable plate 42 is moved, and the central axis of the cymbal and the observation tube that oscillate the coating needle 11 of the selected application needle 11 of the five coating units 43 are caused. The optical axis of 31a is the same. In addition, since each of the yoke _ 0 objective lens 2 has a low positional accuracy screw (not shown in the movable plate 42, the position of the objective lens 2 is fixed to the position slightly deviated from the position of the setting + ^ ^ °. In order to correct the subtle positional deviation of the objective lens 2, the χ γ table 44 that drives the movable plate 42 in the γ direction toward the Yv, is loaded with "44a for detecting the χ γ coordinate to correct the respective objective lens 2 The position ' is such that the position of the observation center of the correction target substrate 5 is not shifted even when the objective lens 2 is switched. Specifically, the operation panel 41 is operated to arrange the optical axis of the observation lens barrel 31a on the correction target c, and the substrate 5 The position of the cymbal (for example, the white defect 55) is followed by the operation of the operation panel 41 in order to bring the predetermined position to the center of the observation range, the objective lens 2 is moved via the movable plate 42, and the predetermined position is brought to the center of the χ γ coordinate The control computer 39 is stored as a movement position with respect to the objective lens 2 of the observation lens barrel 3 la. Next, the control computer 39 instructs the optical axis of the objective lens 2 to coincide with the optical axis of the observation lens barrel 31 & , control XY table 4 4. The χ-coordinates detected by the ruler 44a are aligned with the stored XY coordinates. This initial setting is performed for each of the five objective lenses 2. Therefore, the position of the objective lens mounting screws provided on the movable plate 42 is not required. It is mechanically processed and set with high precision. Moreover, it is not necessary to use a mechanical mechanism to set the mechanism for correcting the position of the objective lens. This also applies to the coating unit 43 by the position of the observation center and the position of the coating needle 11. The XY coordinates of the time can be applied to the center of the inspection center without deviation. 2075-9995-PF 20 200932375 Therefore, it is not necessary to mechanically provide the correction mechanism to the coating unit 43. In the case of applying ink, as shown in Fig. 7(a), the desired coating needle is moved to the observation center position by the XY table 44, and as shown in Fig. 7(b), the cylinder 28 is used. The arms 18, 19 are lowered, and the leading end of the coating needle 11 is protruded from the bottom of the ink container 13, and as shown in Fig. 7 (c, the movable plate 42 is lowered by the z-axis table 36, and the coating needle 11 is applied. After the front end contacts the defective portion on the surface of the correction target substrate 5, the ink 20 is applied.

As shown in Fig. 9, the case where there is a white defect 3555 in addition to the observation center in the observation range of the monitor 4〇, the distance from the observation to the white defect 55 in the X-axis direction and the Y-axis direction are calculated. The distance is moved by the XY working port 44 so that the movable plate 42 is moved toward the XYs, and the coating needle u is moved from the observation center to the upper side of the white defect 55, and then the coating shown in the seventh (4) to (c) is performed. action. Calculation of the distance between the white defect 55 and the observation center, rooting

The image captured by the machine 32 is performed by the control computer 39, and the second drawing is a flow indicating the ink application operation of the defect correction device == Fig. 4, for example, for the monitor 4. Defects that are not visible in the screen. Specify the position of the coating 纟 #束^录墨* 2G position. The application needle u is moved to the application position 2, and the movable plate 42 is moved to drive the cylinder 28 by the first step S23' of the application needle U, and the z-axis is brought into contact with the correction target substrate 5 to be coated. The front end f of the needle 11 is like the substrate 5, and the correction target substrate 5 is coated in step S25.

2075-9995-PF 21 200932375 Ink 2 0. In step S26, the Z-axis table 36 is raised, and the coating needle u is moved to the upper side of the correction target substrate 5. In step S27, the cylinder 28 is driven, and the tip end portion 11a of the coating needle U is accommodated in the ink container. Ip3 Θ. Thus, the ink application once is completed. Then, in step S28, it is confirmed whether or not there is a next application position, and in the case where there is a next application position, steps S22 to S27 are repeated. In step S28, the ink application is completed without the next application position. In the first embodiment, as shown in the seventh (a) to (c), since it is not necessary to insert the needle u directly under the objective lens 2, it is possible to immediately change the magnification of the objective lens 2 that is currently observed. The coating needle U is moved to the application position. Therefore, it is not necessary to wait for the end of the rotation of the objective lens 2 by the rotator as in the defect correcting device shown in Fig. 1 to shorten the correction period by the waiting time. Further, since the objective lens 2 and the application needle u have no interference, the application needle 11 can be disposed in the vicinity of the objective lens 2 with respect to the observation position. Therefore, the moving distance of the coating needle 11 is short, and there is no movement in the axial direction when the coating (4) is moved to the coating position, since the correction period can be shortened by the movement time in the Z-axis direction. In the case where the month b is moved in the χ γ direction of the movable plate 42, the movement of the coating needle 11 in the case where there are a plurality of application positions (step S22) is performed on the large χ γ ΛΪ main table of the apparatus body. In case of shortening the correction period. According to the first embodiment of the present invention, it is possible to correct the defect of the actual figure. Again, as in the first

2075-9995-PF 200932375 6 shows that the switching of the objective lens 2 and the movement of the coating unit 43 can be performed by the same driving mechanism, since the coating-only driving mechanism as shown in Fig. i is not required (the table 14~ 17), so it can also reduce the cost of the device. [Second Embodiment]

Fig. 11 is a view showing a main part of a defect correction device according to a second embodiment of the present invention, and is a view in comparison with Fig. 6. In the first drawing, the defect correcting means and the phase # point of the defect correcting device i of Fig. 6 are replaced by the movable plate 42 which is movable in the X-axis direction and the Y-axis direction so as to be movable only in the Y-axis direction. The movable plate 45 has a plurality of (three in the u-th) objective lenses 2 and a plurality of (three in the eleventh) coating units 43 arranged in a row in the γ-axis direction at a predetermined interval on the movable plate 45. below. As shown in Fig. 12, the movable plate 45 is moved in the γ-axis direction by the γ-axis table 46. The shaft table 46 is mounted on the table 36. This Υ axis work a # 乍D 46 has a detection Y coordinate (movable plate 45

Ruler 46a. Further, in the movable plate 45, three through holes 各自 of the pair = are formed. The three through holes 45a are arranged toward the γ axis side at a predetermined interval. Each of the objective lenses hx is fixed to the lower surface of the movable plate so that the optical axis thereof coincides with the center line of the corresponding through hole 45a. See the second lack of subsidence: f device, because the movable & 45 can not be used relative to the observation and =5: / movement, so can not use the observation mirror _ axis square (four) repair mirror 2 or painted to 3! In this case, when the selected objective lens 2 is moved to the position of the observation lens barrel, the first axis observation lens of the objective lens 2 is offset in the X-axis direction, and the front axis of the lens barrel is tilted toward the offset (four) to check the center position. Offset toward the X axis. Again,

2075-9995-PF 23 200932375 : = 43 The movement also deviates toward the "axis direction, and = for the position where the indicated coating position is shifted toward the W direction" is the defect correction device by means of the device The X-axis port 37 of the cymbal is corrected in the X-axis direction, and a function equivalent to that of the mechanism shown in Fig. 6 is obtained. Specifically, the operation panel 41 is operated to arrange the optical axis of the observation lens barrel 31a in the correction. After a predetermined position (for example, white defect π) on the target substrate 5, the operation panel 41 is operated to bring the predetermined position to the center of the observation range, and is oriented by the movable plate ^(4) 2 by the γ-axis table 46. Moving in the γ-axis direction while moving the objective lens 2 in the squeezing direction via the movable plate 45 by the boring table 37, and the γ coordinate and X detected by the rule 46a of the γ-axis table 46 when coming to the center at a predetermined position The fork coordinate detected by the ruler 37a of the shaft table 37 is stored in the control computer as a moving position with respect to the objective lens 2 of the observation lens barrel 31a. From the lower side to the lower side, the optical axis and observation of the objective lens 2 are instructed by the control computer 39. The optical axis of the lens barrel In the case of the control table 46, 37, the Y coordinate and the X coordinate detected by the ruler, ... are identical to the stored Y coordinate and the χ coordinate. This initial setting is performed for each of the three objective lenses 2. The same is set for each of the three coating units 43. Further, as shown in Fig. 9, in the observation range of the facet of the monitor 40, in addition to the observation center, there is a case where the white defect m 55 is present, and the calculation is performed. The distance from the center of the white defect 55 to the axis direction of the white defect 55 and the distance in the crotch direction are shifted by the Y-axis table 46 in the γ-axis direction by the Y-axis table 46, and the z-axis table 37 is used. · The movable slats are oriented at a distance of 2075-9995-PF 24 200932375 X in the axial direction, and the coating needle 11 is viewed from the upper side of the immersion 5 5; 隹 only r r;,, coating action. White defect Μ ^ The calculation of the distance between the observation centers shown in (a) to (c) is performed by the control computer 39 based on the image taken by the CCD camera 32. Even in the first effect. However, the type of X-axis table is longer

(2) In the second embodiment, the second embodiment is also used. Since the movement of the apparatus main body 37 is performed in the X direction, the cycle is longer than the third embodiment [third embodiment] ❹ Fig. 13 The diagram of the main part of the defect correction device according to the third embodiment of the present invention is shown in a comparison with the eleventh figure. In Fig. 13, the difference between the defect correction device and the defect correction of the 帛u diagram is that the movable plate 45 movable in the Y-axis direction is replaced by the movable plate π, and the plurality of objective lenses 2 and the plurality of coatings are applied. The unit 43 is disposed on the lower surface of the movable plate 47 along a circle centered on the rotation axis of the rotating plate 47, and is arranged in parallel with the rotation axis of the rotating plate 47 in parallel with the rotating shaft of the rotating plate 47. Separate the radius of the circle. As shown in Fig. 14, the movable plate 47 is rotated by the rotary table 48, and the rotary table 48 is mounted on the z-axis table 36 of Fig. 5. This rotary table 48 has a rule 48a for detecting the angle of rotation of the movable plate 47. Further, a plurality of through holes 47a each corresponding to the plurality of objective lenses 2 are formed in the movable plate 47'. The plurality of through holes 47a are arranged in a predetermined interval in the circumferential direction. Each of the objective lenses 2 is fixed to the positive needle of the movable plate 47 such that its optical axis coincides with the line 2075-9995-PF 25 200932375 of the corresponding through hole 47a. The rotating plate 47 is fixed to the substrate 5 It is inclined, and the surface of the substrate 5 is parallel to the inside of the ink container 13 of the coating unit 43, and can be rotated at a holding level. The liquid level of the crucible is always kept in the defect correction device, because the relative orientation of the inspection cylinder 3U and the relative movement of the observation cylinder 3U and the movable plate 47 cannot be utilized, so that the unit Y w 1 cannot be utilized. The objective lens 2 whose position is selected in the η-axis direction of the X-axis direction of the objective lens 2 or the saponification 43 is moved to the position of the observation lens barrel 31a, and the position of the observation surface is washed toward the X-axis. Direction offset. In other words, the movement is also directed toward the X-axis direction and the γ-axis direction, and the coating position indicated by 兀 is toward the X-axis direction and the γ-axis direction. The pair is opposite to the core application. Here, the defect correction device, the X-axis table, the axis The table 38 performs the position 佟JL of the second device body, and the position of the -n, the position in the direction of the predetermined axis is 'positive', and can be obtained as shown in Fig. 6. Specifically, when the operation panel 41 is operated and the axis of the operation panel 41 is placed on the correction target substrate 5 and the light of the lens barrel 313 is observed, the position of the 旌Μ * is preliminarily (for example, the white defect 55). The moxibustion rotates the rotary table 48 to dispose the desired cylinder & objective lens 2 under the viewing mirror 31a. Next, in order to make the pre-center, the operation panel 41 is operated (4) to observe the range movable plate 4, the objective lens 2 is moved 7 in the X-axis direction, and the table 37 is moved to the objective lens 2 via the rotating plate 47 via the table 38. When using the position of the Y-Peacock to come to the observation center, move in the direction? w Workbench 48 feet · 48a

2075-9995-PF 26 200932375 The detected rotation angle, the γ coordinate detected by the ruler 38a of the Y-axis table 38, and the X coordinate detected by the ruler 37a of the X-axis table 37 are stored in the control computer 39' as opposed to The moving position of the objective lens 2 of the lens barrel 31a is observed. Next, when the control computer 39 instructs the optical axis of the objective lens 2 to coincide with the optical axis of the observation lens barrel 31a, the table 仏, 38, 37 is controlled so that the rotation angle detected by the rulers 48a, 38a, 37a The gamma coordinates and the χ coordinates are consistent with the stored rotation angle, gamma coordinates, and semantic coordinates. This initial setting is made for each of the three objective lenses 2. Further, the same settings are made for each of the three coating units 43. Further, as shown in Fig. 9, in the observation range of the face of the monitor 4, the white defect 55 is present in addition to the observation center, and the distance from the observation center to the X-axis direction of the white defect 55 and the γ-axis are calculated. The distance in the direction is such that the movable plate 47 moves only the distance 'in the cuff direction' in the x-axis direction by the X-axis table 37, and the movable plate 47 is moved by the γ-axis table 38 only in the y-axis direction. After the coating needle is moved from the observation center to the upper side of the white defect 55, the coating operation shown in Figs. 7(a) to 4(4) is performed. The calculation of the distance between the white defect 55 and the observation center is performed by the control computer 3 according to the image taken by the CCD camera 32. Even in the third embodiment, the same effects as those of the first embodiment can be obtained. In the third embodiment, since the large X-axis table 37 and the γ-axis table 38 of the apparatus main body are moved in the x-axis direction and the cymbal direction, the period is longer than that of the first embodiment. Further, in the defect correction device of the second and third embodiments, although 2075*9995'PF 27 200932375' is repaired, the correction does not need to apply a positive cycle longer than that of the defect correction device of the first embodiment. The defect correction device is short. Further, since the drive mechanism (stages 14 to 17) can reduce the price of the device, it should be understood that the embodiments disclosed herein are exemplified in all matters, and are not intended to be limiting. The scope of the present invention is defined by the scope of the claims, and all modifications within the meaning and scope of the claims are included. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a main part of a defect correction device which is the basis of the present invention. Fig. 2(a)(b) is a view showing the configuration of the coating unit shown in Fig. i. Fig. 3 is a cross-sectional view showing the structure of the ink container shown in Fig. 2(a) and (b). Fig. 4 is a flow chart showing the ink application operation of the defect correction device shown in Figs. 1 to 3; Fig. 5 is a view showing the overall configuration of a defect correction device according to a first embodiment of the present invention. Fig. 6 is a view showing the main part of the defect correction device shown in Fig. 5. The seventh (a) to (c) drawings show the operation of the ink application mechanism shown in Fig. 6. Figure 8 is a block diagram showing a driving method of the movable plate shown in Fig. 6.

2075-9995-PF 28 200932375 Figure. Fig. 9 is a view showing a white defect on the surface of the substrate displayed on the face of the monitor shown in Fig. 5. Fig. 10 is a flow chart showing the ink application operation of the defect correction device shown in Figs. 5 to 8; Fig. 11 is a view showing a main part of a defect correction screen according to a second embodiment of the present invention. Fig. 12 is a block diagram showing the driving method of the movable plate shown in Fig. u. Figure 13 is a view showing a main part of a defect correction device according to a third embodiment of the present invention. Fig. 14 is a block diagram showing a driving method of the rotating plate shown in Fig. 13. Figs. 15(a) to 5(c) are diagrams showing various defects occurring on the surface of the liquid crystal color filter substrate to be corrected by the defect correction device. & Fig. 16 is a view showing a conventional ink application mechanism. [Main component symbol description] 1, 31a observation lens barrel, 2 objective lens, 3, 31 observation optical system, 4, 16, 36 Z-axis table, 5 liquid crystal color filter substrate, 6, 34 ink coating * mechanism, 2075-9995-PF 29 200932375 7~10, 43 coating unit, 11 coating needle, 11 a front end, lib small diameter portion, 11c large diameter portion, 12 coating needle holder, 13 ink container, 13a hole, © 14 XI Workbench, 15 X2 Workbench, 17, 38, 46 Y-Axis Workbench, 18, 19 Arm, 20 Ink, 21 Holder, 22 Ink Container Mounting Pin, 23 Cover, 2 3 a Hole, 24, 25 Sliding mechanism, 26 support base, 27 stoppers, 28 cylinders, 32 CCD camera, 33 cutting laser device, • 3 5 ink curing light source,

2075-9995-PF 30 200932375 37 X-axis table, ruler, 37a, 38a, 44a, 46a, 48a 39 Control computer, 40 monitor, 41 operation panel, 42, 45 movable plate, 42a, 45a, 47a through hole , 44 XY table,

47 rotating plate, 48 rotary table, 51 black array, 52 R pixels, 53 G pixels, 54 B pixels, 55 white defects, 56 black defects, 57 foreign object defects, 62 coated needle drive cylinders, 63 drive shafts, 64 coats Needle clamp, 65 fixed base, 66 rotary table, 67~70 ink tank, 71 cleaning device,

2075-9995-PF 31 200932375 72 Air rinsing device, 73 shaft, 74 notch, 75 motor, 76 indexing plate, 77 indexing sensor, 78 home position return sensor. ❹ 2075-9995-PF 32

Claims (1)

0 200932375 X. Patent application scope: 1. A liquid material coating device 'applies a liquid material to a fine area on a substrate, characterized in that: the observation lens barrel is used to observe the fine area; the movable plate ' is arranged to be movable in a plane parallel to the substrate between the substrate and the viewing tube; Φ a plurality of objective lenses are disposed under the movable plate; a plurality of coating units are disposed on the movable The lower surface of the plate is used to apply the liquid material attached to the front end of the coating needle to the fine region; and the first driving means 'is to observe the fine region, and move the movable plate' to The selected objective lens of the plurality of objective lenses is disposed under the viewing lens barrel, and in the case where the liquid material is applied to the fine area, the movable plate is moved to be in the plurality of coating units The coated early element of Lu is placed under the viewing tube. 2. The liquid material application device according to claim 1, wherein the movable plate is disposed to be movable in the first and second directions orthogonal to each other, and the first driving means causes the movable plate to face The first and second directions move. 3. The liquid material coating device of claim 2, wherein the method further comprises: detecting means 'detecting the position of the movable plate; and means for memorizing 'memorizing the detection means, k fruit; 2075-9995 - PF 33 200932375 The detection means is used to detect the first axis of the movable plate by which the optical axis of each objective lens and the optical axis of the observation lens barrel are substantially the same by the detecting means! a position, and a second position of the movable plate that is applied to the front end of the coating needle and the optical axis of the observation lens, and the memory detection means pre-memorize the detection result; The driving means operates based on the detection result of the detecting means and the memory content of the memory means, and in the case of observing the fine area, moving the movable plate to the first corresponding to the selected objective lens and applying the fine area In the case of the liquid material, the movable plate is moved to the second position corresponding to the selected coating unit. 4. The liquid material application device of claim 3, further comprising a calculation means, wherein the liquid material is to be applied at a position other than the observation center in the observation range of the observation lens barrel In the case of the fine region, the distance from the observation center to the first and second directions of the other fine regions is calculated. The first driving means moves the movable plate according to the calculation result of the calculation means, and the selected coating is applied. The front end of the application needle of the application unit is moved from the observation center to above the other fine areas. 5. The liquid material application device of claim 1, wherein the movable plate is disposed to be movable toward a first direction; the plurality of objective lenses and the plurality of coating units are oriented in a row toward the first direction The first driving means moves the movable plate in the second direction. 6_ The liquid material coating device of claim 5, wherein 2075-9995-PF 34 200932375 further comprises: the first detecting means 'detecting the position of the movable plate in the first direction; and the first The memory means stores the detection result of the first detecting means; and the first detecting means detects that the optical axis of each objective lens and the optical axis of the viewing lens barrel substantially coincide with each other in the i-th direction by the first driving means. The i-th position of the movable plate and the second position of the movable plate of the front end of the coating needle of each coating unit and the optical axis of the observation lens are substantially the same 'The first detection method is based on the detection result of the first detection means and the memory content of the first storage means, and the first driving means is operated by the first i-memory means. In the case where the movable plate is moved to the second position ' corresponding to the selected objective lens, and the liquid material is applied to the fine region, the movable plate is moved to the corresponding coating unit. 2 location. 7. The liquid material application device of claim 6, further comprising: a second driving means for causing the observation lens barrel, the movable plate, and the urging means to face in a plane parallel to the substrate Moving in the second direction orthogonal to the first direction; the second detecting means 'detecting the position of the movable plate in the second direction; and ° 'the second memory means storing the detection result of the second detecting means The second detecting means detects that the optical axis of each of the objective lenses 2075-9995-PF 35 200932375 and the optical axis of the viewing tube substantially coincide with each other in the first direction by the first driving means, and the second driving is used by the second driving means. And a third position of the movable plate when the wire of each objective lens and the position of the fine region in the second direction substantially coincide with each other, and a front end of the coating needle of each coating unit by the first driving means Observing the position of the optical axis of the lens barrel in the first direction substantially, and by the second driving means, the position of the front end of the coating needle of the coating sheet 7 and the second direction of the fine area is substantially At the time of the fourth position of the movable plate, and benefit The detection result is stored in advance by the second memory means. The second driving means operates based on the detection result of the second detecting means and the memory content of the second memory means, and the movable area is observed when the fine area is observed. The plate is moved to the third position corresponding to the selected objective lens, and in the case where the liquid material is applied to the fine region, the movable plate is moved to the fourth position corresponding to the selected coating unit. 8. The liquid material application device of claim 7, further comprising a calculation means, wherein the liquid material is to be applied at a position other than the center of view in the observation range of the observation lens barrel In the case of the ==, the distance from the observation center to the other micro-second direction is calculated; the first and second driving means move the movable plate according to the calculation result of the calculation means to make the selection The front end of the application needle of the coating unit is moved from the observation center to above the other fine areas. a liquid material coating device, wherein the movable plate is set to be rotatable as in the scope of the patent application; the element is along the plurality of objective lenses and the plurality of coating numbers 2075-9995-PF 36 200932375 The circular axes centered on the shaft of the plate are arranged in a row; the optical axis of the observation lens barrel and the rotation axis of the movable plate are arranged in parallel so as to separate only the radius of the circle; the first driving means rotates the movable plate. 10. The liquid material application device according to claim 9, further comprising: a first detecting means for detecting a rotation angle of the movable plate; and a first memory means for memorizing the detection of the first detecting means As a result, the first detecting means detects the first rotation angle of the movable plate when the optical axis of each objective lens and the optical axis of the observation lens are substantially aligned by the first driving means, and the coating unit a second rotation angle of the movable plate when the tip end of the coating needle and the optical axis of the observation lens substantially coincide with each other, and the detection result is previously stored by the first memory means; the first driving means is based on the ith detection The detection result of the means and the memory content of the first memory means are operated. When the fine area is observed, the movable plate is rotated only by the ith rotation angle corresponding to the selected objective lens, and the fine area is coated. The condition of the liquid material enables the Also includes: The position of the potential plate; and the detection result of the detection means; 2075-9995-PF 200932375, the second detection means detects that the optical axis of each object # and the optical axis of the observation lens are substantially one brother by the i-th driving means The first position of the movable plate by the wire and the fine (4) of the objective lens by the second condensing hand, and the front end of the coating needle of each coating unit by the first driving means and the observation The optical axis of the lens barrel is substantially the same, and the second position of the movable plate is substantially equal to the second end of the coating unit when the coating material is substantially aligned with the second portion, and the second memory means pre-stores the The second driving means operates based on the detection result of the second detecting means and the memory content of the second memory means, and when the fine area is observed, the movable plate is moved to the objective lens corresponding to the selection. a third position, such that the optical axis of the objective lens and the fine area are substantially uniform, and in the case where the liquid material is applied to the fine area, the movable plate is moved to a coating unit corresponding to the selection 2nd position' And the end region of the substantially uniform coating of the fine needle of the coating unit. 12. The liquid material coating device of claim 11, wherein the liquid material coating device further comprises a calculation means, wherein the liquid material is to be applied at a position other than the observation center in the observation range of the observation lens barrel. In the case of the fine area, the distance and direction from the observation center to the other fine area are calculated. The second driving means moves the movable plate according to the calculation result of the calculation means, so that the selected coating unit is The front end of the application needle is moved from the observation center to above the other fine areas. 13. The liquid material coating device according to claim 1, wherein the coating unit of the selected one of 2075-9995-PF 38 200932375 has the needle attached to the front end and protrudes downward; a driving means for lowering the viewing lens barrel, the movable plate, and the first driving means to bring the leading end of the coating needle into contact with the fine area 14, a defect correcting device comprising: claim 1 a liquid material coating device of any one of the three squadrons; The fine region is a defect portion of the fine pattern formed on the substrate; and the liquid material is used for repairing the correction liquid of the defect portion. 2075-9995-PF 39