TW201008659A - Liquid-material coating device, and method of assembling the same - Google Patents

Abstract

To provide a liquid-material coating device that can shorten its coating time and can easily be assembled. The defect correcting device includes a movable plate 15 that can move within a plane between a substrate 6 and an observation lens barrel 1a lying parallel to the substrate 6, and a plurality of object lenses 17 and a plurality of coating units 18 disposed on the lower face of the movable plate 15, with each of a plurality of through-holes 15a of the movable plate 15 and its female screw segment 15b coaxially disposed with each of a plurality of guide holes 16a of a guide plate 16. Hence, its ink-coating time is shortened by causing the plurality of coating units 18 to individually apply different species of ink 22 each having a different color. The object lens 17 can easily be mounted by inserting the upper end of a casing 17a of the object lens 17 into the guide hole 16a.

Description

201008659 VI. Description of the Invention: [Technical Field] The present invention relates to a liquid material coating apparatus and a combination method thereof, particularly relating to a liquid material coating of a liquid material coated on a fine area on a substrate. Device and method of combination thereof. More specifically, the present invention relates to a liquid material applying apparatus used in a defect correcting apparatus which applies a correction ink to a white defect of a liquid crystal color filter substrate for correction, and a combination method thereof. [Prior Art] In recent years, as the number of LCDs (liquid crystal screens) has increased and the number of elements has increased, the number of elements has increased. It has become difficult to manufacture Lcd without any defects, and the probability of occurrence of defects has increased. In order to increase the productivity in this case, the defect correction device which corrects the defects generated in the process of the color filter substrate of the LCD becomes indispensable in the production line. Figures 9(a) to 9(c) are diagrams showing defects generated in the process of the color filter substrate of the LCD. In the figures 9(a) to 9(c), the color filter substrate includes a transparent substrate, a lattice pattern formed on the surface thereof and called a black matrix 51, and a complex array of r (red) halogen. 52, g (green) pixel 53 and B (blue) pixel 54. In the process of the color filter substrate, a white defect 55 which is formed by the color of the pixel and the black matrix 51 as shown in Fig. 9(a) is generated, and is adjacent to the image as shown in Fig. 9(b). The black color defect 56' which is formed by infiltrating the halogen from the halogen mixed color or black matrix 51 is a foreign matter defect or the like which is caused by foreign matter adhering to the pixel as shown in Fig. 9(c). 2075-10433-PF 3 201008659 One of the methods for correcting the white defect 55 is to attach the ink of the same color as the pixel having the color defect to the tip end of the coating: and then attach it to the coating needle. The tip color defect 55 is corrected for correction. Further, a method for correcting the black=56 foreign matter defect 57 is a method in which the defect portion is subjected to laser cutting to form a rectangular white defect 55, and the ink is attached to the tip end portion of the coating needle by the coating mechanism 1. It is applied to the white defect 55 for correction. Fig. 10 is a perspective view showing the structure of a conventional coating mechanism and omitting a part thereof. In the i. In the figure, the ink application mechanism includes a coating needle 61 for ink application and a coating needle driving cylinder 62 for vertically driving the coating needle 61. The application needle 61 passes through the application needle holder 64 and the fixed base 65, and is provided at the tip end portion of the drive shaft 63 of the application needle drive cylinder 62. Further, the ink application mechanism includes a horizontally disposed rotary table top 66, and a plurality of ink tanks 67 to 7 are arranged in the circumferential direction on the rotary table 66, and a cleaning device 71 is provided on the rotary table 66. And an air purging device 72. At the center of the rotating table top 66, a rotating shaft 73 is provided. Further, a concave corner portion 74 through which the coating needle 61 passes when coating is applied is formed on the rotating table surface 66. For the ink tanks 67 to 70, R (red), G (green), B (blue), and black ink are suitably injected. The cleaning device 71 is for removing the ink adhering to the application needle 61. The air purging device 72 is for blowing the cleaning liquid adhering to the application needle 61. Further, the ink application mechanism includes an index motor 75 that rotates the rotary shaft 73 of the rotary table 66, and an index plate 76 that rotates with the rotary shaft 73 and detects the rotary table 66 through the index plate 76. The index of the rotational position is sensed by the sensor 77, through the index plate 76, to check whether the 2075-10433-PF 4 201008659 rotational position of the rotating table top 66 is restored to the origin homing sensor 7 §. The motor 75 is controlled in accordance with the output of the sensors 77, 78, and rotates the table top 66 so that any one of the concave corner portion 74, the ink tanks 67 to 70, the cleaning device 71, and the air purging device 72 is located at the application needle. 61 below. Next, the operation of the ink application mechanism will be described. First, the tip end portion of the application needle 61 is positioned at a position above the defect portion of the color filter substrate by a positioning device not shown. Then, the desired ink tank (e.g., ink tank 67) is moved under the coating needle 61 by the motor 75 rotating the rotary table 66. Then, the application needle 61 is driven in the up and down direction by the application needle driving cylinder 62, so that the ink adheres to the tip end portion of the application needle 61. Then, the rotary table top 66 is rotated by the motor 75, and the concave corner portion η is moved below the application needle 61. Then, the application needle 61 is driven in the vertical direction by the application needle driving cylinder 62, and the ink adhering to the tip end portion of the application needle 61 is then applied to the defective portion of the color filter substrate. When the application needle 61 is cleaned, the rotary table 66 is rotated by the motor 75, and the cleaning device 71 is moved below the application needle 61. Then, the application needle 61 is driven in the vertical direction by the application needle driving cylinder 62, and the ink adhering to the application needle 61 is washed. Then, the rotary table 66 is rotated by the motor 5 to move the air purging device 72 below the coating needle 61. Then, the application needle 61 is driven by the application needle to drive the application needle 61 in the vertical direction to blow off the cleaning liquid adhering to the application needle 61 (see Patent Document). [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei 9-236933 (Description of the Invention) 2075-10433-PF 5 201008659 [Problems to be Solved by the Invention] In the case of 'only one coating needle is provided', the coating needle 61 is washed. However, there is a problem that the correction time becomes long whenever the color of the correction ink is changed once in the conventional ink application mechanism 61'. Therefore, the main object of the present invention is to provide a liquid material coating apparatus which can shorten the coating and which can be easily combined, and a combination method thereof. [Means for Solving the Problem] The liquid material application device of the present invention is a fine material (four) liquid material for use on a substrate, which is characterized in that it includes a viewing lens barrel for observing a fine region, and is provided to be a movable plate that moves between the substrate and the observation lens barrel and parallel to the substrate, a plurality of objective lenses disposed under the movable plate, and a plurality of liquid materials disposed under the movable plate and respectively attached to the tip end of the coating needle a coating unit applied to the fine area, and a driving device, the moving device moves the movable plate when the fine area is observed, and the objective lens selected from the plurality of objective lenses is disposed under the observation lens barrel, and is coated in the fine area When the liquid material is applied, the driving device moves the movable plate and disposes the coating unit selected from the plurality of coating units under the observation lens barrel. Each of the objective lenses includes an objective lens body, a cylindrical outer casing portion for holding and accommodating the objective lens body, and a cylindrical male screw portion ' provided on the upper end surface of the outer casing portion and having an outer diameter smaller than the outer casing portion, formed on the lower surface of the movable plate. a guiding hole corresponding to the objective lens and inserted into the upper end portion of the corresponding outer casing of the objective lens, and a through hole for passing the optical axis of the corresponding objective lens in the center of the guiding hole, the inner circumferential surface of the through hole 'Forming a female screw portion for screwing the male screw portion of the corresponding objective lens. 2075-10433-PF 6 201008659 Ideally, the movable plate is formed by vertically overlapping the upper movable plate and the lower guide plate, and the through hole and the female screw portion are formed on the upper movable plate, and the guide hole passes through the lower guide plate, and the upper portion is movable The position of the plate and the lower guide plate is adjusted so that the through hole is coaxial with the guide hole and fixed to each other. Further, preferably, the movable plate is formed by vertically overlapping the upper movable plate and the lower guide plate, and the through hole penetrates the upper movable plate and the lower guide plate, and the female screw portion and the guide hole are formed in the lower guide plate, and the upper portion is movable. The position of the plate and the lower guide _ guide plate is adjusted so that the through hole is coaxial with the guide hole and fixed to each other. Further, ideally, on the movable plate, corresponding guide holes are provided correspondingly, and a top hole is formed along a direction perpendicular to a center line of the corresponding guide hole, and the screw member for fixing the corresponding objective lens is screwed to the item On the hole. Further, the method of assembling a liquid material application device according to the present invention is for combining the above-described liquid material application device, which is characterized in that it is formed on the front end surface of the cylindrical elastic body which is thicker than the outer casing portion of the objective lens. a circular hole having a diameter smaller than an outer diameter of the outer casing portion, and a base tool portion of the elastic body is formed to be thinner than the front end portion, and the lower end portion of the outer casing portion of the objective lens is fitted into the hole of the front end surface of the mounting tool by the hole The mounting tool holds the objective lens, inserts the upper end portion of the outer casing portion into the corresponding guiding hole, and rotates the base end portion of the mounting tool to screw the male screw portion to the female screw portion. Desirably, the mounting tool is removed from the outer casing portion by using a belt gripping portion formed of a belt member and including a belt grip portion having an outer diameter larger than an outer diameter of the outer casing of the objective lens and a base plate fixing the belt grip portion at one end thereof. The belt grip portion is covered on the outer peripheral surface of the outer casing portion so that the base plate is inclined toward the circumferential direction of the outer casing portion to enhance the gripping force of the belt grip portion and lock the male screw 2075-10433-PF 7 201008659 portion of the objective lens. [Effect of the Invention] In the liquid material coating skirt of the present invention, a movable plate movable in a plane parallel to the substrate between the substrate and the observation lens barrel is provided, and a plurality of objective lenses and a plurality of objects are disposed under the movable plate The coating unit moves the movable plate while observing the fine area, and arranges the desired objective lens under the observation lens barrel. When the liquid material is applied on the fine area, the movable plate is moved to move the desired coating unit to the observation mirror. Below the tube. Therefore, it is possible to reduce the application time by coating a plurality of liquid materials on a plurality of coating units, thereby eliminating the need to change the type of the liquid material for each change of the liquid material. Further, under the movable plate, each objective lens is disposed correspondingly to form a guiding hole for inserting an upper end portion of the outer casing portion of the corresponding objective lens, and a center for forming an optical axis for passing the corresponding objective lens is formed at the center of the guiding hole. The through hole has a female screw portion for screwing the male screw portion of the corresponding objective lens on the inner circumferential surface of the through hole. Therefore, when the upper end portion of the outer casing of the objective lens is inserted into the guide hole, the inclination of the objective lens disappears, and the male screw portion can be easily screwed to the female screw portion, so that the combination can be easily performed. Further, in the method of assembling the liquid material applying device of the present invention, when the hole at the front end surface of the mounting tool is inserted into the lower end portion of the outer casing portion of the objective lens, since the mounting tool is composed of an elastic body, it can be strongly held Objective lens. In this state, if the upper end of the outer casing of the objective lens is inserted into the guide hole and the base end of the mounting tool is rotated by hand, the outer diameter of the base end portion will be smaller than the front end portion, so that the hand can not interfere with the surrounding portion. Easy to lock in the case of an objective lens

2075-10433-PF 8 201008659 Objective lens. Further, 'the use of a belt gripping member and a belt gripping portion having an outer diameter larger than the outer diameter of the outer casing portion of the objective lens and a locking tool for fixing the base plate of the belt gripping portion to one end thereof, and removing the mounting tool from the outer casing portion, The outer peripheral surface of the outer casing portion covers the belt grip portion 'the base plate is inclined toward the circumferential direction of the outer casing portion, whereby the holding force of the belt grip portion can be enhanced and the male screw portion of the objective lens can be locked. [Embodiment] Fig. 1 is a view showing the overall configuration of a defect correction device according to an embodiment of the present invention. In the first drawing, the defect correction device includes a correction head including an observation optical system 1, a CCD camera 2, a cutting laser device 3, an ink application device 4, and an ink curing light source 5, and the correction head is provided. a Z-axis table 7 that moves in a direction (z-axis direction) perpendicular to the liquid crystal color filter substrate 6 to be corrected, and a 瘫X-axis table 8 on which the Z-axis table 7 is mounted and moved in the X-axis direction. A γ-axis table top 9 on which the substrate 6 is mounted and moved in the γ-axis direction, a control computer for controlling the operation of the entire device, and a screen for displaying information such as images captured by the camera (2) The operation panel 12 for inputting an instruction from the operator to the control computer 10. The observation optical system 1 is used to observe the surface state of the substrate 6 and the state of the correction ink applied by the ink application mechanism 4. The image observed by the observation optical system is converted into an electronic signal by the CCD camera 2 and displayed on the screen 11. The cutting laser device 3 irradiates the unnecessary light on the substrate 6 through the observation optical system to irradiate the laser light to remove it.

2075-10433-PF 9 201008659 The ink application mechanism 4 applies a correction ink to white defects generated on the substrate 6. In the direction of selection of the ink curing light source 5, if the ink is of an ultraviolet curing type, it is possible to select an ultraviolet ray for illumination, and if the ink is a thermosetting type, a halogen lamp can be optionally mounted. When the ink is used, the corrected ink irradiation wavelength and the hardening mode of the ink are used to harden the ink. In addition, 'this device structure is one example, and it may be a structure called a lifting gantry type', in which the Z-axis table 7 on which the system such as the observation optical system i is mounted is mounted on the X-axis table top 8, and then The x-axis table top 8 is mounted on the gamma-axis table top 9 so that the Z-axis table top 7 can be moved in the χγ direction as long as the 2-axis table top 7 on which the system such as the observation optical system W is mounted is moved along the substrate 6 to be corrected. The structure of the direction of movement, which structure can be. Fig. 2 is a stand diagram showing the important parts of the optical system and the ink application mechanism 4, and Fig. 3 is an enlarged view of the important part viewed from the direction of the second figure. In FIGS. 2 and 3, the defect correction device includes a movable plate (1) guide plate 16, a plurality of (for example, one) objective lenses 17 having different magnifications, and a plurality of inks for applying different colors (for example, 5) coating unit 18. The movable plate 15 is disposed between the lower end of the observation barrel & and the substrate 6 of the observation optical system 1 so as to be movable in the z-axis direction and the γ-axis direction. The optical axis of the observation lens barrel 1a is disposed in the x-axis direction X perpendicular to the axial direction and the x-axis direction, and a plurality of through holes 15a for passing through the optical axis of the objective lens are formed on the movable plate 15. A plurality of through holes are arranged in two rows at intervals of γ axis. Each objective lens 17 as shown in Fig. 3 includes an objective lens body (not shown) and used

2075-10433-PF 10 201008659 The cylindrical outer casing portion 17a of the objective lens body and the cylindrical male screw portion 17b provided on the upper end surface of the outer casing portion 17a and having an inner diameter smaller than the outer diameter of the outer casing portion 17& A female screw portion 15b for screwing the male screw portion 17b of the corresponding objective lens 17 is formed on the inner peripheral surface ' of the through hole i5a of the movable plate 15.

The guide plate 16 covers a region where a plurality of through holes 15a are formed below the movable plate 15, and is fixed to the lower side of the movable plate 15. On the guide plate 16, a plurality of guide holes 16a for inserting the upper end portions of the outer casing portions 7a of the plurality of objective lenses 7 are formed. The positions of the movable plate 15 and the guide plate 16 are adjusted so that the through hole 15a and the guide hole 16a are coaxial and fixed to each other. The inner diameter of the guide hole 16a is formed to be slightly larger than the outer shape of the outer casing portion 17a of the objective lens 7. Thus, on the one hand, it can be kept approximately perpendicular to the outer casing portion 1 to 3, and on the other hand, the upper end portion of the outer casing portion 17a can be inserted and guided. The hole 16a rotates the outer casing portion 17a. Therefore, when the upper end portion of the outer casing portion 17a is inserted into the guide hole 16a in the assembling operation, the inclination of the objective lens 17 disappears, and the male screw portion 17b can be easily screwed to the female screw portion 15b. Further, on the guide plate 16, a plurality of top holes 丨 6b having a plurality of small diameters are formed corresponding to the plurality of guide holes 16a. Each of the top holes 丨 6b is formed in a direction perpendicular to the center line of the corresponding guide hole 16a, and communicates with the inner peripheral surface of the guide hole 16a from the side of the guide plate μ. The stopper member 9 which is screwed at the outer peripheral portion is screwed to each of the top holes i6b. The tip end portion of the stopper member is formed of an elastic body or a soft metal. After the male screw portion i (4) of the objective lens i 7 is joined to the female screw portion 15b, the stopper (4) is locked, whereby the objective lens can be firmly fixed. In addition, in Fig. 3, the top hole 16b is located in the vicinity of the coating unit in which the coating unit is disposed, and the screw can be screwed to the vicinity of the stopper member 19, and

2075-104 33-PF 201008659 Between the early elements 18, the top hole is provided in the gap in the direction of the guide hole i6a. Further, the plurality of coating units 18 are fixed to the movable plate at a predetermined interval along the γ-axis direction. Below the 15th, a plurality of (five in the figure) coating units 18 are respectively disposed adjacent to a plurality of (five in the figure) objective lenses π. Each of the coating units 18 includes a coating as shown in FIG. The needle 2 is placed on the ink container 21. As shown in Fig. 4, a hole 21a is provided in the bottom of the ink container 21 to correct the ink 22. The hole 21a is set to a small size in which the ink 22 does not flow out. A holding portion 21b is provided, and an ink container fixing pin 23 is provided on the holding portion 21b. The opening of the ink container 21 is closed by a lid 24, and the lid 24 is provided with a hole 24a. The coating needle 20 has a tip end portion 2 The stepped shape of the small-diameter portion 2 on the side of the 〇a and the large-diameter portion 20c on the side of the proximal end portion is set such that the diameter of the small-diameter portion 2〇b is slightly smaller than the diameter of the hole 21a of the ink container 21, and the large-diameter portion The diameter of 2〇c is set to be slightly smaller than the diameter of the hole 24a of the cover 24. Referring back to Fig. 3, the base end of the coating needle 2 is fixed to the coating. On the needle holder 25, the application needle holder 25 is attached to the tip end portion of the cantilever 26, and the ink container 21 is attached to the tip end of the cantilever 27 through the ink container fixing pin 23. The ink container fixing pin 23 is fixed to the cantilever 27 The upper end of the cantilever 27 is supported by the cantilever 26 by a sliding mechanism (not shown) so as to be movable up and down. The base end of the cantilever 26 can be moved up and down by the sliding mechanism 28. The manner of movement is supported by the support table 29. The upper end of the support table 29 is fixed to the lower side of the movable plate 15. At the lower end of the support table 29, there is a stopper 3〇 for restricting movement below the suspension arms 26, 27, at the support table On the 29th, a cylinder 31 for moving the lower end of the base end portion of the boom 26 up and down is mounted.

2075-10433-PF 12 201008659 Figs. 5(a) to 5(c) are views showing the operation of the coating unit 18. In standby mode, as shown in Fig. 5(a), the cantilever 26 is held at the upper limit position by the cylinder 31, and the cantilever 27 is suspended from the cantilever 26, and at this time, the distance between the cantilever arms 26, 27 is above and below. To the maximum, as shown in Fig. 4, the tip end portion 20a of the coating needle 20 is immersed in the ink 22. When ink application is performed using the coating unit 18, the suspension arms 26, 27 are lowered to the lower limit position by the cylinder 31. At this time, the cantilever 27 is in contact with the cantilever 26 first.

The distance from the stopper 30' to the upper and lower directions between the cantilevers 26, 27 is the smallest W. As shown in Fig. 5(b), the tip end portion 20a of the coating needle 20 penetrates the hole 21a of the ink container 21, from The bottom of the ink container 21 protrudes. The ink 22 is attached to the tip end portion 20a of the projecting needle 20 which is protruded. Next, as shown in Fig. 5(c), the movable plate 15 is lowered by the z-axis table 7, and the tip end portion 20a of the coating needle 20 is brought into contact with the defective portion of the substrate 6, and the ink is applied to the defective portion of the substrate 6. twenty two. Next, the movable plate 15 is raised by the Z-axis table 7 to drive the cylinder 31 to house the coating needle 20 in the ink container 21. If # this, the ink application operation at one time ends. Next, the driving method of the movable panel 15 will be described. The movable plate 15 is mounted on the XY table top 32 as shown in Fig. 6, and the XY table 32 is mounted on the Z-axis table top 7 of Fig. 1 . By observing the defect of the surface of the substrate 6 by the XY table 32, the movable plate 15 is moved so that the optical axis of the objective lens 17 selected from the plurality of objective lenses 17 coincides with the optical axis of the viewing lens barrel la, when coated on the defect When the correction ink 22 is applied, the movable plate 15 is moved so that the central axis of the coating needle 20 of the coating unit 18 selected from the plurality of coating units 18 coincides with the optical axis of the observation barrel 1a. 2075-10433 2 PF 13 201008659 Further, each of the objective lenses 17 fixes the movable plate 15' by the screw portions 15b, 17b having a low positional accuracy, so that the position of each objective lens 17 is subtly fixed to the shifted position from the designed position. In order to correct the subtle positional shift of the objective lens 17, a scale 32a for detecting the XY coordinate (the position of the movable plate 15) is mounted on the χ γ table 32 which drives the movable plate 15 in the XY direction, even if the objective lens 1 is switched. 7' also corrects the position of each objective lens 17 without shifting the observation center position of the correction target substrate 6. Specifically, the operation panel is operated such that the optical axis of the observation lens barrel 3 is placed on a predetermined position (for example, a white defect) on the correction target substrate 6 to operate the operation panel so that the predetermined position reaches the center of the observation range. 12, the objective lens 17 is moved by the movable plate 15, and the XY coordinate at which the predetermined position reaches the center is stored as a moving position of the objective lens 17 with respect to the observation lens barrel la, and is stored in the control computer casing. From the next time, the control computer 10 controls the XY table 32 to cause the χ γ coordinates detected by the scale 32a to be stored and stored after receiving the command to make the optical axis of the objective lens 17 coincide with the optical axis of the viewing lens barrel. The XY coordinates are identical. This initial setting is performed for each objective lens 17. Thus, the position of the female screw portion 15b provided on the movable plate 15 does not require mechanical precision processing and setting, and it is not necessary to use a mechanical mechanism for correction. The mechanism of the position of the objective lens 17. This point is also the same for the coating unit 18. By offsetting the position of the observation center and the position of the application needle 20, the coordinates can be applied without shifting the position of the observation center. The ink 22 is applied. Therefore, it is not necessary to provide a mechanical correction mechanism for the application of the early element 18. However, in the defect correction device, the interval of the objective lens 7 is narrow, so that it is not easy to manually hold the objective lens 17 by hand. The screw portion 17b is screwed and fixed to the movable

2075-10433-PF 201008659 Board 1 5 female screw part 1 5b. The combination method of the defect correcting device will be described below. Fig. 7 shows the structure of the mounting tool 35 used in the combined method of the defect correcting device. In Fig. 7, the mounting tool 35 has a circular hole 35a having an inner diameter smaller than the outer diameter of the outer casing portion 17a at the front end face of the cylindrical elastic body which is thicker than the outer casing portion 17a of the objective lens 17, and has an elastic base. The end portion is formed in a shape thinner than the tip end portion. The lower end portion of the outer casing portion 17a of the objective lens 17 is fitted into the hole 35a of the front end surface of the mounting tool 35, and the outer casing portion 17a of the objective lens 17 is inserted into the corresponding guiding hole 16a by the elastic force of the mounting tool 35. The base end portion 35b of the mounting tool 35 is rotated by hand, and the male screw portion 17b is screwed to the female screw portion 15b. Fig. 8 shows the structure of the locking tool 40 used in the combination of the defect correcting means. In Fig. 8, the locking tool 40 includes an endless belt member 41 and a rectangular base plate 42. One of the belt members 41 is folded up and down, and the short side of the leading end of the base plate 42 is provided with a right angle. The Φ folded portion of the belt member 41 is held by the tip end portion of the base plate 42 and the intermediate member 43, and then held by the two fixing plates 44, 45. The leading end portion projecting from the tip end of the base plate 42 of the belt member 41 constitutes a belt grip portion 41a having an inner diameter slightly larger than the outer diameter of the outer casing portion 17a of the objective lens 17. Further, a length adjusting rod 46 is inserted from the inner side of the rear end portion 41b projecting from the rear end of the intermediate member 43 of the belt member 41, and both ends of the length adjusting rod 46 are fixed to the two fingers 47a at the tip end of the adjusting plate 47. , 47b. The adjustment plate 47 is fixed to the rear end portion of the base plate 42. The position of the adjustment plate 47 can be finely adjusted along the length of the base plate 42. By fine-tuning the position of the adjustment plate 47, the size of the belt grip portion 41a can be adjusted by the micro 2075-10433-PF 15 201008659. After the male screw portion 17b of the objective lens 17 is screwed to the female screw portion 151 of the movable plate 15 by using the mounting tool 35 shown in Fig. 7, the mounting tool 35 is removed, and the outer surface of the outer casing portion i7a of the objective lens 17 is removed. The belt gripping portion 41a' covering the locking tool 4' is such that the rear end portion of the base plate 42 is inclined toward the circumferential direction of the outer casing portion 17a. Thereby, the holding force of the belt grip portion 41a can be reinforced and the male screw portion 17b' of the objective lens 17 can be locked to firmly fix the objective lens π to the movable panel 15. In the present embodiment, 'a movable plate 15 that is movable in a plane between the substrate 6 and the observation barrel ia and parallel to the substrate 6 is provided, and a plurality of objective lenses 17 and a plurality of coatings are disposed under the movable plate 15 The unit 18 moves the movable plate 15 when the defective portion of the substrate 6 is observed, so that the desired objective lens 17 is disposed under the observation lens barrel la, and when the correction ink 22 is applied to the defective portion, the movable plate 15 is moved to make the desired The coating unit 18 is moved below the viewing barrel 1 & By applying a plurality of kinds of the correction inks 22' to the plurality of coating units 18, the need to wash the coating needles 2 for each change of the type of the correction ink 22 can be eliminated, so that the coating time can be shortened. . Further, on the movable plate 15, a through hole 15a for passing the light of the objective lens 7 and a female screw portion 5b for screwing the male screw portion 17b are formed on the guide plate 16 to be formed on the guide plate 16. The guide hole 16a' through hole 15a, the female screw portion 15b, and the guide hole i6a of the upper end portion of the outer casing portion 17a of the insertion objective lens 17 are disposed coaxially. Then, when the upper end portion of the outer casing portion 17a of the objective lens 17 is inserted into the guide hole i6a, the inclination of the objective lens 17 disappears, and the male screw portion i 7b can be easily screwed to the female screw portion 15b, and the combination can be easily performed. Further, when the lower end portion of the outer casing portion 17a of the objective lens 17 is inserted into the front end face of the mounting tool 2075-10433-PF 16 201008659 35, the mounting tool 35 is composed of an elastic body, and the objective lens 17 is held by force. In this state, if the upper end of the objective lens 17 is inserted into the guide hole Ua and the base end of the mounting tool 35 is rotated by hand, the outer diameter of the base end portion 35b is smaller than the front end portion, so that it can be In the case of interference with the surrounding objective lens 17, the objective lens 17 is easily locked. Further, the mounting tool 35 is removed from the outer casing portion 17a of the objective lens 17, and the belt grip portion is covered on the outer peripheral surface of the outer casing portion Ha, so that the base plate is stored in the circumferential direction of the outer casing "P17a", whereby the belt grip portion can be reinforced. Hold the force and lock the male screw portion 17b of the objective lens 17. Further, in the present embodiment, the female screw portion 15b' is formed on the movable plate 15, but the metal plate forming the female screw portion (10) may be fixed to the movable plate π or may be formed under the guide plate 16. a guide hole for inserting the upper end of the outer casing portion 17a of the objective lens 17 is provided with a through hole at the center of the bottom of the guide hole, and a female screw portion 15b is formed on the inner circumferential surface of the through hole to form a movable plate 15 Through hole 15a. In this case, since the guide hole and the female screw portion 15b are formed coaxially, the positional adjustment of the movable plate 15 and the guide plate 16 with high precision becomes unnecessary. Further, the movable plate 15 and the guide plate 16 may be integrally formed, and a guide hole may be formed in the lower surface of the movable plate 15, and a through hole 15a' is formed in the center of the bottom of the guide hole in the through hole 5a. The circumferential surface forms the female screw portion. In this case, the positional adjustment of the movable plate 15 and the guide plate 16 becomes completely unnecessary. The embodiments disclosed herein exemplify all of the features, but are not intended to be limiting of the invention. The scope of the present invention is not by the above description but by

2075-10433-FT 17 201008659 The scope of the patent application is to be construed as limiting all changes that are equivalent to the scope of the claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the overall configuration of a defect correcting device of one embodiment of the present invention. Fig. 2 is a view showing important portions of the observation optical system and the ink application mechanism shown in Fig. i. Fig. 3 is an enlarged view of an important part of the observation optical system and the ink application mechanism of Fig. 2 viewed from the direction A. Fig. 4 is a cross-sectional view showing the structure of the ink container shown in Fig. 3. Figs. 5(a) to 5(c) are views showing the operation of the coating unit shown in Fig. 3. Fig. 6 is a block diagram showing the method of disturbing the movable plate shown in Fig. 3. Fig. 7 is a view showing the structure of a mounting tool for assembling the objective lens shown in Fig. 3 to a movable plate, and a method of using the same. Figure 8 shows the locking device for locking the objective lens shown in Figure 3. Figures 9(a) to 9(c) are diagrams showing defects occurring on the color filter. Fig. 10 is a view showing the structure of an ink application mechanism for applying a correction ink to a white defect shown in Fig. 9(a). [Main component symbol description] 2075-10433-PF 18 201008659 1 Observation optical system la Observation lens barrel 2 CCD camera 3 Laser device for cutting 4 Ink coating device 5 Light source for ink hardening 6 Liquid crystal color filter substrate 7 Z axis Desktop 8 X-axis desktop 9 Y-axis desktop 10 Control computer 11 Screen 12 Operation panel 15 Movable plate 1 5 a through hole • 15b female screw portion 16 Guide plate 16a guide hole 16b top hole 17 Objective lens 17a Housing portion 17b male screw Portion 18 Coating unit 19 Stopping member 2075-10433-PF 19 201008659 19a Tip end portion 201 Coating needle 2 0a Tip end portion 20b Small diameter portion 20c Large diameter portion 21 Ink container 21a Hole 21b Holding portion 22 Correcting ink 23 Ink container fixing Pin 24 Cover 24a Hole 25 Coating Needle Holder 26, 27 Cantilever 28 Slide Mechanism 29 Support Table 30 Stopper 31 Cylinder 32 XY Tabletop 32a Ruler 35 Mounting Tool 35a Round Hole 35b Base End 40 Locking Tool

2075-10433-PF 201008659

41 Belt member 41a Belt gripping portion 41b Rear end portion 42 Base plate 43 Intermediate member 44, 45 fixing plate 46 Length adjusting rod 47 Adjustment plate 47a, 47b Finger 51 Black matrix 52 R 5 5 3 G 54 54 B 昼55 White defect 56 Black defect 57 Foreign object defect 61 Coating needle 62 Application needle drive steam red 63 Drive shaft 64 Coating needle holder 65 Fixing base 66 Rotating tabletop 67~70 Ink tank 71 Cleaning device 2075-10433-PF 21 201008659 72 Air Purging Device 7 3 Rotary Shaft 74 Recessed Corner 75 Motor 76 Index Board 77 Index Sensor 78 Origin Return Sensor

2075-10433-PF

Claims (1)

201008659 VII. Patent application scope: 1. A liquid material coating device for coating a liquid material on a fine area on a substrate, comprising: an observation lens barrel for observing the above-mentioned fine area; the movable plate is set to be Moving between the substrate and the observation tube and parallel to the substrate; a plurality of objective lenses are disposed under the movable plate; and the plurality of coating units are disposed under the movable plate and are respectively attached to Applying the liquid material at the tip end of the application needle to the fine area; and driving means 'When the fine area is observed, moving the movable plate and arranging the objective lens selected from the plurality of objective lenses on the observation tube Bottom 'When the liquid material is applied to the fine area, the movable plate is moved and the coating unit selected from the plurality of coating units is disposed under the observation tube; Φ is characterized by: The objective lens includes an objective lens body, a cylindrical outer casing portion for holding and housing the objective lens body, and is disposed on the outer casing portion a cylindrical male screw portion having an end surface and an inner diameter smaller than an outer diameter of the outer casing portion, and a guide surface corresponding to each objective lens and inserted into an upper end portion of the outer casing portion of the corresponding objective lens is formed on the lower surface of the movable plate a hole 'in the center of the guiding hole, forming a through hole for passing the optical axis of the corresponding objective lens, and forming a female screw for screwing the male screw portion of the corresponding objective lens on the inner circumferential surface of the through hole unit. The liquid material coating device according to the first aspect of the invention, wherein the movable plate is formed by the upper and lower movable portions and the lower portion of the upper through hole and the female screw portion. The upper portion allows the guide hole to pass through the lower guide plate, and the position of the upper lower guide plate is adjusted to be upper and lower, and the upper plate and the above are fixed to each other. The through hole is coaxial with the guide hole and 3. The liquid material coating device according to the first aspect of the patent application, wherein: the movable plate is formed by vertically overlapping the upper movable plate and the lower guide plate. The through hole penetrates the upper movable plate and the lower guide plate, and the female screw portion and the guide hole are formed in the lower guide plate, and positions of the upper movable plate and the lower guide plate are adjusted to the through hole. It is coaxial with the above guiding holes and fixed to each other. 4. The liquid material coating device of claim H, wherein, on the movable plate, corresponding guiding holes are provided, and a top hole is formed along a direction perpendicular to a center line of the corresponding guiding hole. a screw element for fixing the corresponding objective lens is screwed to the top hole. The combination method of the liquid material coating device is used to combine any of the items 1 to 4 of the patent application scope. A liquid material application device characterized in that a circular hole having an inner diameter smaller than an outer diameter of the outer casing portion is formed on a front end surface of the cylindrical elastic body having a larger outer diameter than the outer surface of the objective lens. The base end portion of the elastic body is formed by a mounting tool that is thinner than the tip end portion, and the lower end portion of the outer portion of the objective lens is fitted into the hole of the front end surface of the mounting tool, and the objective lens is held by the mounting device. Upper 2075-10433-PF1 24 201008659 The upper end portion of the outer casing portion is inserted into the base end portion of the corresponding tool, and the inside of the male screw hole is rotated to the above-mentioned female screw portion. 6. As in the ninth aspect of the patent application, the grading of the liquid material coating device, the BAX / 4 nine / formed by the belt member and including the outer diameter of the outer casing portion having an inner diameter larger than the objective lens a belt gripping portion and a locking tool for holding the base plate of the belt Pil/t at the middle end thereof, and removing the above-mentioned mounting tool from the outer casing portion to cover the belt grip portion on the outer peripheral surface of the outer casing portion, so that the base plate tends to be inclined The circumferential direction of the outer casing portion reinforces the holding force of the belt gripping portion and locks the male screw portion of the objective lens. μ 2075-10433-95 25