TW201008659A - Liquid-material coating device, and method of assembling the same - Google Patents

Liquid-material coating device, and method of assembling the same Download PDF

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Publication number
TW201008659A
TW201008659A TW98113584A TW98113584A TW201008659A TW 201008659 A TW201008659 A TW 201008659A TW 98113584 A TW98113584 A TW 98113584A TW 98113584 A TW98113584 A TW 98113584A TW 201008659 A TW201008659 A TW 201008659A
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Taiwan
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objective lens
hole
movable plate
outer casing
liquid material
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TW98113584A
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Chinese (zh)
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Akira Matsushima
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Ntn Toyo Bearing Co Ltd
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Publication of TW201008659A publication Critical patent/TW201008659A/en

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Abstract

To provide a liquid-material coating device that can shorten its coating time and can easily be assembled. The defect correcting device includes a movable plate 15 that can move within a plane between a substrate 6 and an observation lens barrel 1a lying parallel to the substrate 6, and a plurality of object lenses 17 and a plurality of coating units 18 disposed on the lower face of the movable plate 15, with each of a plurality of through-holes 15a of the movable plate 15 and its female screw segment 15b coaxially disposed with each of a plurality of guide holes 16a of a guide plate 16. Hence, its ink-coating time is shortened by causing the plurality of coating units 18 to individually apply different species of ink 22 each having a different color. The object lens 17 can easily be mounted by inserting the upper end of a casing 17a of the object lens 17 into the guide hole 16a.

Description

201008659 六、發明說明: 【發明所屬之技術領域】 本發明是關於一種液狀材料塗敷裝置及其組合方 法’特別是關於一種在基板上之微細區域塗敷液狀材料的 液狀材料塗敷裝置及其組合方法。更明確地說,本發明為 在液晶彩色濾光片基板之白色缺陷上塗敷修正墨水以進行 修正的缺陷修正裝置所使用的液狀材料塗敷裝置及其組合 方法。 【先前技術】 近年來’隨著LCD(液晶螢幕)之大型化、高精細化, 晝素數目也增多’要毫無缺陷地製造出Lcd變得困難,缺陷 的發生機率也增多了起來。若要在此種情況下提高產能, 修正在LCD之彩色濾光片基板之製程中所產生之缺陷的缺 陷修正裝置在生產線中變得不可或缺。 第9(a)圖至第9(c)圖為表示在LCD之彩色濾光片基板 之製程中所產生之缺陷的圖。在第9(a)圖至第9(c)圖中, 彩色濾光片基板包含透明基板、在其表面形成且稱為黑色 矩陣51的格子狀圏案、複數組的r(紅色)晝素52、g(綠色) 畫素53及B(藍色)畫素54。在彩色濾光片基板之製程中,會 產生如第9(a)圖所示因畫素、黑色矩陣51之色彩脫落而變 成的白色缺陷55、如第9(b)圖所示與相鄰之晝素混色或黑 色矩陣51從滲入晝素而產生的黑色缺陷56 '如第9(c)圖所 示因異物附著於畫素上而產生的異物缺陷等。 2075-10433-PF 3 201008659 其中一種用來修正白色缺陷55的方法為藉 ^與有*色缺祕存在之畫素同色的墨水附著於塗敷 :之先端部,再將附著於塗敷針之先端部 色缺陷55上以進行修正。又,其中-種用來修正黑= 56異物缺陷57的方法為,對缺陷部分進行雷射切割以形 成矩形之白色缺陷55後,藉由塗敷機構1附著於塗敷針 之先端部的墨水塗敷於該白色缺陷55上以進行修正。 第10圖為表示習知之塗敷機構之結構且省略其中一 部分的立體圖。在第i。圖中,該墨水塗敷機構包含墨水塗 敷用之塗敷針61及用來垂直驅動塗敷針61之塗敷針驅動汽 缸62。塗敷針61透過塗敷針夾持器64及固定基底65,設置 於塗敷針驅動汽缸62之驅動軸63之先端部。 又,該墨水塗敷機構包含水平設置之旋轉桌面66,在 旋轉桌面66上,於圓周方向依序配置複數個墨水槽67〜7〇 , 再者,在旋轉桌面66上,設置洗淨裝置71及空氣吹掃裝置 72。在旋轉桌面66的中心,設有旋轉軸73。又,在旋轉桌 面66上’形成進行塗敷時使塗敷針61通過的凹角部74。針 對墨水槽67〜70,適宜地注入R(紅色)、G(綠色)、B(藍色) 及黑色墨水。洗淨裝置71用來去除附著於塗敷針61上的墨 水’空氣吹掃装置72用來吹散附著於塗敷針61上的洗淨液。 再者’該墨水塗敷機構包含使旋轉桌面66之旋轉軸73 旋轉的索引用馬達75,而且,設有與旋轉軸73—起旋轉的 索引板76、透過索引板76檢測出旋轉桌面66之旋轉位置的 索引用感測器77、透過索引板76檢查是否使旋轉桌面66之 2075-10433-PF 4 201008659 旋轉位置恢復至原點的原點歸位用感測器7 §。馬達7 5根據 感測器77,78之輸出而被控制,旋轉旋轉桌面66,使凹角 部74、墨水槽67〜70、洗淨裝置71及空氣吹掃裝置72中任一 者位於塗敷針61下方。 接著’說明該墨水塗敷機構的動作。首先,藉由未圖 示出來之定位裝置,在彩色濾光片基板之缺陷部上方之既 疋位置定位塗敷針61之先端部。然後,藉由馬達75旋轉旋 ❹ 轉桌面66,使所要之墨水槽(例如墨水槽67)移動到塗敷針 61下方。然後,藉由塗敷針驅動汽缸62使塗敷針61沿著上 下方向受到驅動,使墨水附著於塗敷針61之先端部上。 然後’藉由馬達75使旋轉桌面66旋轉,將凹角部η移 動到塗敷針61下方。然後,藉由塗敷針驅動汽缸62使塗敷 針61沿著上下方向受到驅動,附著於塗敷針61之先端部的 墨水於是塗敷至彩色濾光片基板之缺陷部上。 當進行塗敷針61之洗淨時,藉由馬達75使旋轉桌面66 ® 旋轉,將洗淨裝置71移動到塗敷針61下方。然後,藉由塗 敷針驅動汽缸62使塗敷針61沿著上下方向受到驅動,洗淨 附著於塗敷針61上之墨水。然後,藉由馬達了5使旋轉桌面 66旋轉’將空氣吹掃裝置72移動到塗敷針61下方。然後, 藉由塗敷針驅動汽缸62使塗敷針61沿著上下方向受到驅 動’吹散附著於塗敷針61上之洗淨液(參照專利文獻〗)。 [專利文獻1]特開平9-236933號公報 【發明内容】 2075-10433-PF 5 201008659 【發明所欲解決的課題】 中’僅設置一根塗敷針 ’就得洗淨塗敷針61, 然而,在習知之墨水塗敷機構 61 ’每當改變修正墨水之色彩一次 所以存在著修正時間變長的問題。 因此’本發明之主要目的為提供—種可縮短塗敷時 又可簡單組合之液狀材料塗敷裝置及其組合方法。 【用以解決課題的手段】 本發明之液狀材料塗敷裝置為用來在基板上之微細 區域㈣液狀材料’其特徵在於:包括用來觀察微細區域 的觀察鏡筒、设置成可在基板與觀察鏡筒之間且與基板平 行的平面内移動的可動板、複數個設置於可動板下面的物 鏡、複數個設置於可動板下面且可分別將附著於塗敷針先 端之液狀材料塗敷於微細區域的塗敷單元、及驅動裝置, 當觀察微細區域時,該驅動裝置使可動板移動並將從複數 個物鏡中所選出之物鏡配置於觀察鏡筒下方,當在微細區 域塗敷液狀材料時,該驅動裝置使可動板移動並將從複數 個塗敷單元中所選出之塗敷單元配置於觀察鏡筒下方。各 物鏡包含物鏡本體及用來保持及收納物鏡本體的圓筒狀外 殼部、設於外殼部之上端面且外徑比外殼部小的圓筒狀公 螺絲部’在可動板下面,形成與各物鏡對應設置且用來插 入所對應之物鏡之外殼部之上端部的導引孔,在導引孔中 央,形成用來通過所對應之物鏡之光轴的貫通孔,在貫通 孔之内周面’形成用來螺合所對應之物鏡之公螺絲部的母 螺絲部。 2075-10433-PF 6 201008659 理想上,可動板由上下重疊之上部可動板及下部導引 板所構成,貫通孔及母螺絲部形成於上部可動板,導引孔 貫通下部導引板,上部可動板及下部導引板之位置調整至 貫通孔與導引孔同轴並相互固定。 又,理想上,可動板由上下重疊之上部可動板及下部 導引板所構成,貫通孔貫通上部可動板及下部導引板,母 螺絲部及導引孔形成於下部導引板,上部可動板及下部導 _ 引板之位置調整至貫通孔與導引孔同轴並相互固定。 又,理想上,在可動板上,對應設置各導引孔,沿著 與所對應之導引孔之中心線垂直的方向形成頂孔,用來固 定所對應之物鏡的螺絲元件螺合至項孔上。 又,本發明之液狀材料塗敷裝置之組合方法為用來組 合如上述之液狀材料塗敷裝置,其特徵在於:在比物鏡之 外殼部粗之圓柱狀彈性體之先端面上形成内徑小於外殼部 之外徑的圓形孔,使用彈性體之基端部形成得比先端部細 • 的安裝工具,將物鏡之外殼部之下端部嵌入安裝工具之先 端面之孔上,藉由安裝工具保持物鏡,將外殼部之上端部 插入所對應之導引孔内,旋轉安裝工具之基端部,使公螺 絲部螺合至母螺絲部。 理想上,使用由皮帶元件所形成且包含内徑大於物鏡 之外殼部之外徑的皮帶把持部及將皮帶把持部固定在其中 一端的基底板的鎖緊工具,從外殼部卸除安裝工具,在外 殼部之外周面覆蓋皮帶把持部’使基底板傾向外殼部之圓 周方向,以增強皮帶把持部之把持力並鎖緊物鏡之公螺絲 2075-10433-PF 7 201008659 部。 【發明效果】 在本發明之液狀材料塗敷裳置中,設置可在基板與觀 察鏡筒之間且與基板平行之平面内移動的可動板,在可動 板下面設置複數個物鏡及複數個塗敷單元,當觀察微細區 域時,移動可動板,將所要之物鏡配置於觀察鏡筒下方, 當在微細區域上塗敷液狀材料時,移動可動板,將所要之 塗敷單元移動至觀察鏡筒下方。於是,可藉由在複數個塗 敷單元上分別塗敷複數種之液狀材料,免除每變更—次液 狀材料之種類就得洗淨塗敷針的需要,所以,可縮短塗敷 時間。 又,在可動板下面,對應設置各物鏡,形成用來插入 所對應之物鏡之外殼部之上端部的導引孔,在導引孔之中 央,形成用來通過所對應之物鏡之光轴的貫通孔,在貫通 孔之内周面上,形成用來螺合所對應之物鏡之公螺絲部的 母螺絲部。於是,當將物鏡之外殼部之上端部插入導引孔 時,物鏡之傾斜消失,可輕易將公螺絲部螺合至母螺絲部, 於是可輕易進行組合。 又’在本發明之液狀材料塗敷裝置之組合方法中,當 對安裝工具之先端面之孔插入物鏡之外殼部之下端部時, 由於安裝工具由彈性體構成,所以,可強力地把持物鏡。 在此狀態下’若將物鏡之外殼部之上端部插入導引孔並用 手旋轉安裝工具之基端部,基端部之外徑會小於先端部, 所以,可在手不會干涉到周圍之物鏡的情況下,輕易鎖緊201008659 VI. Description of the Invention: [Technical Field] The present invention relates to a liquid material coating apparatus and a combination method thereof, particularly relating to a liquid material coating of a liquid material coated on a fine area on a substrate. Device and method of combination thereof. More specifically, the present invention relates to a liquid material applying apparatus used in a defect correcting apparatus which applies a correction ink to a white defect of a liquid crystal color filter substrate for correction, and a combination method thereof. [Prior Art] In recent years, as the number of LCDs (liquid crystal screens) has increased and the number of elements has increased, the number of elements has increased. It has become difficult to manufacture Lcd without any defects, and the probability of occurrence of defects has increased. In order to increase the productivity in this case, the defect correction device which corrects the defects generated in the process of the color filter substrate of the LCD becomes indispensable in the production line. Figures 9(a) to 9(c) are diagrams showing defects generated in the process of the color filter substrate of the LCD. In the figures 9(a) to 9(c), the color filter substrate includes a transparent substrate, a lattice pattern formed on the surface thereof and called a black matrix 51, and a complex array of r (red) halogen. 52, g (green) pixel 53 and B (blue) pixel 54. In the process of the color filter substrate, a white defect 55 which is formed by the color of the pixel and the black matrix 51 as shown in Fig. 9(a) is generated, and is adjacent to the image as shown in Fig. 9(b). The black color defect 56' which is formed by infiltrating the halogen from the halogen mixed color or black matrix 51 is a foreign matter defect or the like which is caused by foreign matter adhering to the pixel as shown in Fig. 9(c). 2075-10433-PF 3 201008659 One of the methods for correcting the white defect 55 is to attach the ink of the same color as the pixel having the color defect to the tip end of the coating: and then attach it to the coating needle. The tip color defect 55 is corrected for correction. Further, a method for correcting the black=56 foreign matter defect 57 is a method in which the defect portion is subjected to laser cutting to form a rectangular white defect 55, and the ink is attached to the tip end portion of the coating needle by the coating mechanism 1. It is applied to the white defect 55 for correction. Fig. 10 is a perspective view showing the structure of a conventional coating mechanism and omitting a part thereof. In the i. In the figure, the ink application mechanism includes a coating needle 61 for ink application and a coating needle driving cylinder 62 for vertically driving the coating needle 61. The application needle 61 passes through the application needle holder 64 and the fixed base 65, and is provided at the tip end portion of the drive shaft 63 of the application needle drive cylinder 62. Further, the ink application mechanism includes a horizontally disposed rotary table top 66, and a plurality of ink tanks 67 to 7 are arranged in the circumferential direction on the rotary table 66, and a cleaning device 71 is provided on the rotary table 66. And an air purging device 72. At the center of the rotating table top 66, a rotating shaft 73 is provided. Further, a concave corner portion 74 through which the coating needle 61 passes when coating is applied is formed on the rotating table surface 66. For the ink tanks 67 to 70, R (red), G (green), B (blue), and black ink are suitably injected. The cleaning device 71 is for removing the ink adhering to the application needle 61. The air purging device 72 is for blowing the cleaning liquid adhering to the application needle 61. Further, the ink application mechanism includes an index motor 75 that rotates the rotary shaft 73 of the rotary table 66, and an index plate 76 that rotates with the rotary shaft 73 and detects the rotary table 66 through the index plate 76. The index of the rotational position is sensed by the sensor 77, through the index plate 76, to check whether the 2075-10433-PF 4 201008659 rotational position of the rotating table top 66 is restored to the origin homing sensor 7 §. The motor 75 is controlled in accordance with the output of the sensors 77, 78, and rotates the table top 66 so that any one of the concave corner portion 74, the ink tanks 67 to 70, the cleaning device 71, and the air purging device 72 is located at the application needle. 61 below. Next, the operation of the ink application mechanism will be described. First, the tip end portion of the application needle 61 is positioned at a position above the defect portion of the color filter substrate by a positioning device not shown. Then, the desired ink tank (e.g., ink tank 67) is moved under the coating needle 61 by the motor 75 rotating the rotary table 66. Then, the application needle 61 is driven in the up and down direction by the application needle driving cylinder 62, so that the ink adheres to the tip end portion of the application needle 61. Then, the rotary table top 66 is rotated by the motor 75, and the concave corner portion η is moved below the application needle 61. Then, the application needle 61 is driven in the vertical direction by the application needle driving cylinder 62, and the ink adhering to the tip end portion of the application needle 61 is then applied to the defective portion of the color filter substrate. When the application needle 61 is cleaned, the rotary table 66 is rotated by the motor 75, and the cleaning device 71 is moved below the application needle 61. Then, the application needle 61 is driven in the vertical direction by the application needle driving cylinder 62, and the ink adhering to the application needle 61 is washed. Then, the rotary table 66 is rotated by the motor 5 to move the air purging device 72 below the coating needle 61. Then, the application needle 61 is driven by the application needle to drive the application needle 61 in the vertical direction to blow off the cleaning liquid adhering to the application needle 61 (see Patent Document). [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei 9-236933 (Description of the Invention) 2075-10433-PF 5 201008659 [Problems to be Solved by the Invention] In the case of 'only one coating needle is provided', the coating needle 61 is washed. However, there is a problem that the correction time becomes long whenever the color of the correction ink is changed once in the conventional ink application mechanism 61'. Therefore, the main object of the present invention is to provide a liquid material coating apparatus which can shorten the coating and which can be easily combined, and a combination method thereof. [Means for Solving the Problem] The liquid material application device of the present invention is a fine material (four) liquid material for use on a substrate, which is characterized in that it includes a viewing lens barrel for observing a fine region, and is provided to be a movable plate that moves between the substrate and the observation lens barrel and parallel to the substrate, a plurality of objective lenses disposed under the movable plate, and a plurality of liquid materials disposed under the movable plate and respectively attached to the tip end of the coating needle a coating unit applied to the fine area, and a driving device, the moving device moves the movable plate when the fine area is observed, and the objective lens selected from the plurality of objective lenses is disposed under the observation lens barrel, and is coated in the fine area When the liquid material is applied, the driving device moves the movable plate and disposes the coating unit selected from the plurality of coating units under the observation lens barrel. Each of the objective lenses includes an objective lens body, a cylindrical outer casing portion for holding and accommodating the objective lens body, and a cylindrical male screw portion ' provided on the upper end surface of the outer casing portion and having an outer diameter smaller than the outer casing portion, formed on the lower surface of the movable plate. a guiding hole corresponding to the objective lens and inserted into the upper end portion of the corresponding outer casing of the objective lens, and a through hole for passing the optical axis of the corresponding objective lens in the center of the guiding hole, the inner circumferential surface of the through hole 'Forming a female screw portion for screwing the male screw portion of the corresponding objective lens. 2075-10433-PF 6 201008659 Ideally, the movable plate is formed by vertically overlapping the upper movable plate and the lower guide plate, and the through hole and the female screw portion are formed on the upper movable plate, and the guide hole passes through the lower guide plate, and the upper portion is movable The position of the plate and the lower guide plate is adjusted so that the through hole is coaxial with the guide hole and fixed to each other. Further, preferably, the movable plate is formed by vertically overlapping the upper movable plate and the lower guide plate, and the through hole penetrates the upper movable plate and the lower guide plate, and the female screw portion and the guide hole are formed in the lower guide plate, and the upper portion is movable. The position of the plate and the lower guide _ guide plate is adjusted so that the through hole is coaxial with the guide hole and fixed to each other. Further, ideally, on the movable plate, corresponding guide holes are provided correspondingly, and a top hole is formed along a direction perpendicular to a center line of the corresponding guide hole, and the screw member for fixing the corresponding objective lens is screwed to the item On the hole. Further, the method of assembling a liquid material application device according to the present invention is for combining the above-described liquid material application device, which is characterized in that it is formed on the front end surface of the cylindrical elastic body which is thicker than the outer casing portion of the objective lens. a circular hole having a diameter smaller than an outer diameter of the outer casing portion, and a base tool portion of the elastic body is formed to be thinner than the front end portion, and the lower end portion of the outer casing portion of the objective lens is fitted into the hole of the front end surface of the mounting tool by the hole The mounting tool holds the objective lens, inserts the upper end portion of the outer casing portion into the corresponding guiding hole, and rotates the base end portion of the mounting tool to screw the male screw portion to the female screw portion. Desirably, the mounting tool is removed from the outer casing portion by using a belt gripping portion formed of a belt member and including a belt grip portion having an outer diameter larger than an outer diameter of the outer casing of the objective lens and a base plate fixing the belt grip portion at one end thereof. The belt grip portion is covered on the outer peripheral surface of the outer casing portion so that the base plate is inclined toward the circumferential direction of the outer casing portion to enhance the gripping force of the belt grip portion and lock the male screw 2075-10433-PF 7 201008659 portion of the objective lens. [Effect of the Invention] In the liquid material coating skirt of the present invention, a movable plate movable in a plane parallel to the substrate between the substrate and the observation lens barrel is provided, and a plurality of objective lenses and a plurality of objects are disposed under the movable plate The coating unit moves the movable plate while observing the fine area, and arranges the desired objective lens under the observation lens barrel. When the liquid material is applied on the fine area, the movable plate is moved to move the desired coating unit to the observation mirror. Below the tube. Therefore, it is possible to reduce the application time by coating a plurality of liquid materials on a plurality of coating units, thereby eliminating the need to change the type of the liquid material for each change of the liquid material. Further, under the movable plate, each objective lens is disposed correspondingly to form a guiding hole for inserting an upper end portion of the outer casing portion of the corresponding objective lens, and a center for forming an optical axis for passing the corresponding objective lens is formed at the center of the guiding hole. The through hole has a female screw portion for screwing the male screw portion of the corresponding objective lens on the inner circumferential surface of the through hole. Therefore, when the upper end portion of the outer casing of the objective lens is inserted into the guide hole, the inclination of the objective lens disappears, and the male screw portion can be easily screwed to the female screw portion, so that the combination can be easily performed. Further, in the method of assembling the liquid material applying device of the present invention, when the hole at the front end surface of the mounting tool is inserted into the lower end portion of the outer casing portion of the objective lens, since the mounting tool is composed of an elastic body, it can be strongly held Objective lens. In this state, if the upper end of the outer casing of the objective lens is inserted into the guide hole and the base end of the mounting tool is rotated by hand, the outer diameter of the base end portion will be smaller than the front end portion, so that the hand can not interfere with the surrounding portion. Easy to lock in the case of an objective lens

2075-10433-PF 8 201008659 物鏡。 再者’使用由皮帶元件所構成且包含内徑大於物鏡之 外殼部之外徑的皮帶把持部及皮帶把持部固定於其中一端 的基底板的鎖緊工具,從外殼部卸除安裝工具,在外殼部 之外周面覆蓋皮帶把持部’使基底板傾向外殼部之圓周方 向,藉此,可增強皮帶把持部之把持力並鎖緊物鏡之公螺 絲部。 【實施方式】 第1圖為表示本發明其中一實施型態之缺陷修正裝置 之整體結構的圖。在第1圖中,該缺陷修正裝置包括由觀察 光學系統1、CCD相機2、切割用雷射裝置3、墨水塗敷裝置4 及墨水硬化用光源5所構成的修正頭部、使此修正頭部沿著 與修正對象之液晶彩色濾光片基板6垂直的方向(z軸方向) 移動的Z轴桌面7、搭载Z軸桌面7並使其沿著X軸方向移動的 癱 X軸桌面8、搭載基板6並使其沿著γ轴方向移動的γ轴桌面 9、用來控制整個裝置之動作的控制用電腦1〇、用來顯示匸⑶ 相機2所拍攝到之影像等資訊的螢幕丨丨、用來在控制用電腦 10輸入來自操作者之指令的操作面板12。 觀察光學系統1用來觀察基板6之表面狀態及墨水塗 敷機構4所塗敷出之修正墨水的狀態等。觀察光學系統丄所 觀察到之影像藉由CCD相機2轉換為電子信號,顯示於螢幕 11。切割用雷射裝置3透過觀察光學系統丨對基板6上之不需 要之部位照射雷射光以去除之。2075-10433-PF 8 201008659 Objective lens. Further, 'the use of a belt gripping member and a belt gripping portion having an outer diameter larger than the outer diameter of the outer casing portion of the objective lens and a locking tool for fixing the base plate of the belt gripping portion to one end thereof, and removing the mounting tool from the outer casing portion, The outer peripheral surface of the outer casing portion covers the belt grip portion 'the base plate is inclined toward the circumferential direction of the outer casing portion, whereby the holding force of the belt grip portion can be enhanced and the male screw portion of the objective lens can be locked. [Embodiment] Fig. 1 is a view showing the overall configuration of a defect correction device according to an embodiment of the present invention. In the first drawing, the defect correction device includes a correction head including an observation optical system 1, a CCD camera 2, a cutting laser device 3, an ink application device 4, and an ink curing light source 5, and the correction head is provided. a Z-axis table 7 that moves in a direction (z-axis direction) perpendicular to the liquid crystal color filter substrate 6 to be corrected, and a 瘫X-axis table 8 on which the Z-axis table 7 is mounted and moved in the X-axis direction. A γ-axis table top 9 on which the substrate 6 is mounted and moved in the γ-axis direction, a control computer for controlling the operation of the entire device, and a screen for displaying information such as images captured by the camera (2) The operation panel 12 for inputting an instruction from the operator to the control computer 10. The observation optical system 1 is used to observe the surface state of the substrate 6 and the state of the correction ink applied by the ink application mechanism 4. The image observed by the observation optical system is converted into an electronic signal by the CCD camera 2 and displayed on the screen 11. The cutting laser device 3 irradiates the unnecessary light on the substrate 6 through the observation optical system to irradiate the laser light to remove it.

2075-10433-PF 9 201008659 墨水塗敷機構4對產生於基板6上之白色缺陷塗敷修 正墨水。在墨水硬化用光源5的選擇方向,若墨水為紫外線 硬化型,可選擇搭裁紫外線照明,若墨水為熱硬化型,可 選擇搭載鹵素燈。當使用墨水硬化用光 缺陷之修正墨水照射波長與墨水之硬化方式對 正墨水得以硬化。 參 此外’此裝置結構為其中一例,其亦可為一種稱為起 重台架方式的結構’其中,將搭載有觀察光學系統i等系統 之Z轴桌面7搭載於X軸桌面8上,然後將χ轴桌面8搭載於γ 軸桌面9上,使Z轴桌面7可沿著χγ方向移動只要是使搭載 有觀察光學系W等系統之2軸桌面7相對於修正對象之基 板6沿著ΧΥ方向移動的結構,何種結構都可以。 土 ❿ 第2圖為表不觀察光學系以及墨水塗敷機構4之重要 部位的立艘圖,第3圖為從第2圖之Α方向觀看重要部位的放 大圖。在第2圖及第3圖_,該缺陷修正裝置包括可動板⑴ 導引板16、倍率不同之複數個(例如1〇個)物鏡17及用來塗 敷不同色彩之墨水的複數個(例如5個)塗敷單元18。 可動板15在觀察光學系統1之觀察鏡筒&之下端與基 板6之間,以可沿著χ轴方向及γ轴方向移動之方式而設置。 觀察鏡筒1a之光軸配置於似軸方向及Υ軸方向垂直的Ζ軸 方向X,在可動板15上,形成複數個分別用來通過物鏡 ?之光軸的貫通孔15a。複數個貫通孔…沿著γ軸方向以既 疋之間隔配置成2行。 各物鏡17如第3圖所示’包含物鏡本體(未圖示)、用2075-10433-PF 9 201008659 The ink application mechanism 4 applies a correction ink to white defects generated on the substrate 6. In the direction of selection of the ink curing light source 5, if the ink is of an ultraviolet curing type, it is possible to select an ultraviolet ray for illumination, and if the ink is a thermosetting type, a halogen lamp can be optionally mounted. When the ink is used, the corrected ink irradiation wavelength and the hardening mode of the ink are used to harden the ink. In addition, 'this device structure is one example, and it may be a structure called a lifting gantry type', in which the Z-axis table 7 on which the system such as the observation optical system i is mounted is mounted on the X-axis table top 8, and then The x-axis table top 8 is mounted on the gamma-axis table top 9 so that the Z-axis table top 7 can be moved in the χγ direction as long as the 2-axis table top 7 on which the system such as the observation optical system W is mounted is moved along the substrate 6 to be corrected. The structure of the direction of movement, which structure can be. Fig. 2 is a stand diagram showing the important parts of the optical system and the ink application mechanism 4, and Fig. 3 is an enlarged view of the important part viewed from the direction of the second figure. In FIGS. 2 and 3, the defect correction device includes a movable plate (1) guide plate 16, a plurality of (for example, one) objective lenses 17 having different magnifications, and a plurality of inks for applying different colors (for example, 5) coating unit 18. The movable plate 15 is disposed between the lower end of the observation barrel & and the substrate 6 of the observation optical system 1 so as to be movable in the z-axis direction and the γ-axis direction. The optical axis of the observation lens barrel 1a is disposed in the x-axis direction X perpendicular to the axial direction and the x-axis direction, and a plurality of through holes 15a for passing through the optical axis of the objective lens are formed on the movable plate 15. A plurality of through holes are arranged in two rows at intervals of γ axis. Each objective lens 17 as shown in Fig. 3 includes an objective lens body (not shown) and used

2075-10433-PF 10 201008659 來保持及收納物鏡本體的圓筒狀外殼部17a、設於外殼部 17a之上端面且内徑小於外殼部17&之外徑的圓筒狀公螺絲 部17b。在可動板15之貫通孔i5a之内周面’形成用來螺合 所對應之物鏡1 7之公螺絲部17b的母螺絲部1 5b。2075-10433-PF 10 201008659 The cylindrical outer casing portion 17a of the objective lens body and the cylindrical male screw portion 17b provided on the upper end surface of the outer casing portion 17a and having an inner diameter smaller than the outer diameter of the outer casing portion 17& A female screw portion 15b for screwing the male screw portion 17b of the corresponding objective lens 17 is formed on the inner peripheral surface ' of the through hole i5a of the movable plate 15.

導引板16覆蓋了形成可動板15下面之複數個貫通孔 15a的區域,固定於可動板15之下面。在導引板16上,形成 複數個分別用來插入複數個物鏡丨7之外殼部丨7a之上端部 的導引孔16a。可動板15和導引板16之位置調整至貫通孔 15a和導引孔16a同轴並相互固定。 導引孔16a之内徑形成得比物鏡丨7之外殼部17a之外 形稍大’如此’一方面可保持與外殼部1?3約略垂直,一方 面可將外殼部17a之上端部插入導引孔16a以旋轉外殼部 17a。因此,當在組合作業中將外殼部17a之上端部插入導 引孔16a時,物鏡17之傾斜會消失,可輕易將公螺絲部17b 螺合至母螺絲部15b。 又,在導引板16上,分別對應複數個導引孔16a而形 成複數個小徑之頂孔丨6b。各頂孔丨6b沿著與所對應之導引 孔16a之中心線垂直之方向而形成,從導引板μ之側面連通 導引孔16a之内周面。在外周部進行螺絲加工之止動元件 9螺〇至各頂孔i6b。止動元件“之先端部以彈性體或 軟質金屬形成。將物鏡i 7之公螺絲部i㈣合至母螺絲部 15b後,鎖緊止動元㈣,藉此,可堅固地固定物鏡”。 另,第3圖中,頂孔16b位於塗敷單元“的 設置各塗敷單元的狀態下 可螺合止動元件19 附近,在已 ,也可以於The guide plate 16 covers a region where a plurality of through holes 15a are formed below the movable plate 15, and is fixed to the lower side of the movable plate 15. On the guide plate 16, a plurality of guide holes 16a for inserting the upper end portions of the outer casing portions 7a of the plurality of objective lenses 7 are formed. The positions of the movable plate 15 and the guide plate 16 are adjusted so that the through hole 15a and the guide hole 16a are coaxial and fixed to each other. The inner diameter of the guide hole 16a is formed to be slightly larger than the outer shape of the outer casing portion 17a of the objective lens 7. Thus, on the one hand, it can be kept approximately perpendicular to the outer casing portion 1 to 3, and on the other hand, the upper end portion of the outer casing portion 17a can be inserted and guided. The hole 16a rotates the outer casing portion 17a. Therefore, when the upper end portion of the outer casing portion 17a is inserted into the guide hole 16a in the assembling operation, the inclination of the objective lens 17 disappears, and the male screw portion 17b can be easily screwed to the female screw portion 15b. Further, on the guide plate 16, a plurality of top holes 丨 6b having a plurality of small diameters are formed corresponding to the plurality of guide holes 16a. Each of the top holes 丨 6b is formed in a direction perpendicular to the center line of the corresponding guide hole 16a, and communicates with the inner peripheral surface of the guide hole 16a from the side of the guide plate μ. The stopper member 9 which is screwed at the outer peripheral portion is screwed to each of the top holes i6b. The tip end portion of the stopper member is formed of an elastic body or a soft metal. After the male screw portion i (4) of the objective lens i 7 is joined to the female screw portion 15b, the stopper (4) is locked, whereby the objective lens can be firmly fixed. In addition, in Fig. 3, the top hole 16b is located in the vicinity of the coating unit in which the coating unit is disposed, and the screw can be screwed to the vicinity of the stopper member 19, and

2075-104 33—PF 201008659 塗敷早元18之間,朝導引孔i6a的方向的空隙設置頂孔“^ 此外,複數個塗敷單元18沿著γ軸方向以既定之間隔 固定於可動板15之下面。複數個(在圖中為5個)塗敷單元18 分別與複數個(在圖中為5個)物鏡π鄰接而配置。各塗敷單 元18如第3圖所示,包含塗敷針2〇及墨水容器21。 如第4圖所示,在墨水容器21底部設有孔21a,修正墨 水22。孔21a設定為墨水22不會流出之小尺寸。在墨水容器 21之侧部,設有保持部21b,在保持部21b上,設有墨水容 器固定銷23。墨水容器21之開口部以蓋24來閉合,蓋24上 設有孔24a。 塗敷針20具有由先端部2〇a那侧之小徑部2及基端 側部之大徑部20c所組成的階梯形狀,小徑部2〇b之直徑設 定得比墨水容器21之孔21a之直徑稍小,大徑部2〇c之直徑 設定得比蓋24之孔24a之直徑稍小。 返回第3圖,塗敷針2〇之基端部固著於塗敷針夾持器 25上,塗敷針夾持器25安裝於懸臂26之先端部,墨水容器 21透過墨水容器固定銷23安裝於懸臂27之先端。墨水容器 固定銷2 3被固定於懸臂27上之磁鐵(未圖示)吸附。 懸臂27之基端部藉由滑動機構(未圖示)以可上下移 動之方式受到懸臂26支持,懸臂26之基端部藉由滑動機構 28以可上下移動之方式受到支持台29支持。支持台29之上 端固定於可動板15之下面。在支持台29之下端,設有限制 朝懸臂26,27之下方移動的止動器3〇,在支持台29上,搭 載了使懸臂26之基端部之下端上下移動的汽缸31。2075-104 33-PF 201008659 Between the early elements 18, the top hole is provided in the gap in the direction of the guide hole i6a. Further, the plurality of coating units 18 are fixed to the movable plate at a predetermined interval along the γ-axis direction. Below the 15th, a plurality of (five in the figure) coating units 18 are respectively disposed adjacent to a plurality of (five in the figure) objective lenses π. Each of the coating units 18 includes a coating as shown in FIG. The needle 2 is placed on the ink container 21. As shown in Fig. 4, a hole 21a is provided in the bottom of the ink container 21 to correct the ink 22. The hole 21a is set to a small size in which the ink 22 does not flow out. A holding portion 21b is provided, and an ink container fixing pin 23 is provided on the holding portion 21b. The opening of the ink container 21 is closed by a lid 24, and the lid 24 is provided with a hole 24a. The coating needle 20 has a tip end portion 2 The stepped shape of the small-diameter portion 2 on the side of the 〇a and the large-diameter portion 20c on the side of the proximal end portion is set such that the diameter of the small-diameter portion 2〇b is slightly smaller than the diameter of the hole 21a of the ink container 21, and the large-diameter portion The diameter of 2〇c is set to be slightly smaller than the diameter of the hole 24a of the cover 24. Referring back to Fig. 3, the base end of the coating needle 2 is fixed to the coating. On the needle holder 25, the application needle holder 25 is attached to the tip end portion of the cantilever 26, and the ink container 21 is attached to the tip end of the cantilever 27 through the ink container fixing pin 23. The ink container fixing pin 23 is fixed to the cantilever 27 The upper end of the cantilever 27 is supported by the cantilever 26 by a sliding mechanism (not shown) so as to be movable up and down. The base end of the cantilever 26 can be moved up and down by the sliding mechanism 28. The manner of movement is supported by the support table 29. The upper end of the support table 29 is fixed to the lower side of the movable plate 15. At the lower end of the support table 29, there is a stopper 3〇 for restricting movement below the suspension arms 26, 27, at the support table On the 29th, a cylinder 31 for moving the lower end of the base end portion of the boom 26 up and down is mounted.

2075-10433-PF 12 201008659 第5(a)圖至第5(c)圖為表示塗敷單元18之動作的 圖。待機時’如第5(a)圖所示,藉由汽缸31使懸臂26保持 在上限位置,懸臂27懸掛在懸臂26上的狀態,此時,在懸 臂26,27之間之上下方向之距離為最大,如第4圖所示’塗 敷針20之先端部20a浸潰在墨水22中。 當使用塗敷單元18進行墨水塗敷時,藉由汽缸31使懸 臂26,27下降至下限位置。此時,懸臂27比懸臂26先接觸2075-10433-PF 12 201008659 Figs. 5(a) to 5(c) are views showing the operation of the coating unit 18. In standby mode, as shown in Fig. 5(a), the cantilever 26 is held at the upper limit position by the cylinder 31, and the cantilever 27 is suspended from the cantilever 26, and at this time, the distance between the cantilever arms 26, 27 is above and below. To the maximum, as shown in Fig. 4, the tip end portion 20a of the coating needle 20 is immersed in the ink 22. When ink application is performed using the coating unit 18, the suspension arms 26, 27 are lowered to the lower limit position by the cylinder 31. At this time, the cantilever 27 is in contact with the cantilever 26 first.

到止動器30 ’在懸臂26,27之間之上下方向之距離為最 W 小’如第5(b)圖所示,塗敷針20之先端部20a貫通墨水容器 21之孔21a,從墨水容器21之底部突出。在突出之塗敷針20 之先端部20a上’附著有墨水22。 接著,如第5(c)圖所示,藉由z軸桌面7使可動板15下 降,使塗敷針20之先端部20a與基板6之缺陷部接觸,在基 板6之缺陷部上塗敷墨水22。接著,藉由Z轴桌面7使可動板 15上升’驅動汽缸31將塗敷針20收納於墨水容器21内。如 # 此,一次的墨水塗敷作業結束。 接下來說明可動板15之驅動方式。可動板15如第6圖 所示,搭載於XY桌面32上,該XY桌面32搭載於第1圖之Z軸 桌面7上。藉由XY桌面32,當觀察基板6表面之缺陷時,使 可動板15移動,使從複數個物鏡17中所選出之物鏡17之光 軸與觀察鏡筒la之光轴一致,當在缺陷上塗敷修正墨水22 時,使可動板15移動,使從複數個塗敷單元18中所選出之 塗敷單元18之塗敷針20之中心軸與觀察鏡筒la之光轴一 致。 2075-10433二PF 13 201008659 此外’各物鏡17藉由位置精度低之螺絲部15b,17b固 定可動板15’所以’各物鏡17之位置從所設計之位置微妙 地固定於已偏移之位置。為了修正此物鏡17之微妙位置偏 移’在沿著XY方向驅動可動板15之χγ桌面32上,安裝用來 檢測該XY座標(可動板15之位置)的量尺32a,即使切換了物 鏡1 7 ’也在不使修正對象基板6之觀察中心位置偏移的情況 下’修正各物鏡17之位置。 具體來說’操作操作面板以將觀察鏡筒丨3之光軸配 置於修正對象基板6上預先決定之位置(例如白色缺陷) 後’為使預先決定之位置到達觀察範圍之中心,操作操作 面板12,透過可動板15使物鏡17移動,將預先決定之位置 到達中心後之XY座標作為物鏡17相對於觀察鏡筒la之移動 位置,儲存於控制用電腦丨〇中。從下次開始,控制用電腦 10當接收到使物鏡17之光軸與觀察鏡筒“之光軸一致的指 令後,控制XY桌面32以使量尺32a所檢測出之χγ座標與所儲 存之XY座標一致。此種初始設定針對各物鏡17而進行。 藉此’設於可動板15之母螺絲部15b之位置不需要機 械鬲精度加工及設定,亦無必要使用機械式機構設置用來 修正物鏡17之位置的機構。此點對塗敷單元18也相同,藉 由錯存觀察中心位置和塗敷針20之位置一致時的以座標, 可在不偏移觀察中心位置的情況下,塗敷墨水22。藉此, 亦不需要針對塗敷早元18設置機械式修正機構。 不過’在此缺陷修正裝置中’物鏡丨7之間隔狭小,所 以,不容易僅用手將物鏡17之公螺絲部17b螺合固定至可動The distance from the stopper 30' to the upper and lower directions between the cantilevers 26, 27 is the smallest W. As shown in Fig. 5(b), the tip end portion 20a of the coating needle 20 penetrates the hole 21a of the ink container 21, from The bottom of the ink container 21 protrudes. The ink 22 is attached to the tip end portion 20a of the projecting needle 20 which is protruded. Next, as shown in Fig. 5(c), the movable plate 15 is lowered by the z-axis table 7, and the tip end portion 20a of the coating needle 20 is brought into contact with the defective portion of the substrate 6, and the ink is applied to the defective portion of the substrate 6. twenty two. Next, the movable plate 15 is raised by the Z-axis table 7 to drive the cylinder 31 to house the coating needle 20 in the ink container 21. If # this, the ink application operation at one time ends. Next, the driving method of the movable panel 15 will be described. The movable plate 15 is mounted on the XY table top 32 as shown in Fig. 6, and the XY table 32 is mounted on the Z-axis table top 7 of Fig. 1 . By observing the defect of the surface of the substrate 6 by the XY table 32, the movable plate 15 is moved so that the optical axis of the objective lens 17 selected from the plurality of objective lenses 17 coincides with the optical axis of the viewing lens barrel la, when coated on the defect When the correction ink 22 is applied, the movable plate 15 is moved so that the central axis of the coating needle 20 of the coating unit 18 selected from the plurality of coating units 18 coincides with the optical axis of the observation barrel 1a. 2075-10433 2 PF 13 201008659 Further, each of the objective lenses 17 fixes the movable plate 15' by the screw portions 15b, 17b having a low positional accuracy, so that the position of each objective lens 17 is subtly fixed to the shifted position from the designed position. In order to correct the subtle positional shift of the objective lens 17, a scale 32a for detecting the XY coordinate (the position of the movable plate 15) is mounted on the χ γ table 32 which drives the movable plate 15 in the XY direction, even if the objective lens 1 is switched. 7' also corrects the position of each objective lens 17 without shifting the observation center position of the correction target substrate 6. Specifically, the operation panel is operated such that the optical axis of the observation lens barrel 3 is placed on a predetermined position (for example, a white defect) on the correction target substrate 6 to operate the operation panel so that the predetermined position reaches the center of the observation range. 12, the objective lens 17 is moved by the movable plate 15, and the XY coordinate at which the predetermined position reaches the center is stored as a moving position of the objective lens 17 with respect to the observation lens barrel la, and is stored in the control computer casing. From the next time, the control computer 10 controls the XY table 32 to cause the χ γ coordinates detected by the scale 32a to be stored and stored after receiving the command to make the optical axis of the objective lens 17 coincide with the optical axis of the viewing lens barrel. The XY coordinates are identical. This initial setting is performed for each objective lens 17. Thus, the position of the female screw portion 15b provided on the movable plate 15 does not require mechanical precision processing and setting, and it is not necessary to use a mechanical mechanism for correction. The mechanism of the position of the objective lens 17. This point is also the same for the coating unit 18. By offsetting the position of the observation center and the position of the application needle 20, the coordinates can be applied without shifting the position of the observation center. The ink 22 is applied. Therefore, it is not necessary to provide a mechanical correction mechanism for the application of the early element 18. However, in the defect correction device, the interval of the objective lens 7 is narrow, so that it is not easy to manually hold the objective lens 17 by hand. The screw portion 17b is screwed and fixed to the movable

2075-10433-PF 201008659 板1 5之母螺絲部1 5b。以下將說明此缺陷修正裝置之組合方 法0 第7圖表示在此缺陷修正裝置之組合方法中所使用之 安裝工具35的結構。在第7圖中,此安裝工具35在比物鏡17 之外殼部1 7a粗之圓柱狀彈性體之先端面形成内徑小於外 殼部1 7a之外徑的圓形孔35a,具有彈性體之基端部形成得 比先端部細的形狀。將物鏡17之外殼部17a之下端部嵌入安 謇 裝工具35之先端面之孔35a,藉由安裝工具35之彈力把持物 鏡17’將物鏡17之外殼部17a插入對應之導引孔16a,用手 旋轉安裝工具35之基端部35b,將公螺絲部17b螺合至母螺 絲部1 5 b。 第8圖表示此缺陷修正裝置之組合方法中所使用之鎖 緊工具40的結構《在第8圖中,此鎖緊工具40包含環狀之皮 帶元件41及長方形之基底板42。皮帶元件41之一部分上下 折疊,基底板42之先端之短邊設有直角。皮帶元件41中之 Φ 折疊部分受到基底板42之先端部與中間元件43夾持,然後 又受到2片固定板44,45夾持而固定。 從皮帶元件41中之基底板42之先端突出的先端部構 成内徑稍微大於物鏡17之外殼部1 7a之外徑的皮帶把持部 41a。又,在從皮帶元件41中之中間元件43之後端突出的後 端部41b之内側’有長度調整棒46插入,長度調整棒46之兩 端固定於調整板47之先端之2個指部47a, 47b上。調整板47 固定於基底板42之後端部。調整板47之位置可沿著基底板 42之長度方向進行微調’藉由微調調整板47之位置,可微 2075-10433-PF 15 201008659 調皮帶把持部41a之尺寸。 使用第7圖所示之安裝工具3 5使物鏡1 7之公螺絲部 17b螺合至可動板15之母螺絲部151)後,卸除安裝工具35, 在物鏡17之外殼部i7a之外周面覆蓋鎖緊工具4〇之皮帶把 持部41a ’使基底板42之後端部傾向外殼部17a之圓周方 向。藉此’可加強皮帶把持部41 a之把持力並鎖緊物鏡17 之公螺絲部17b ’進而堅固地將物鏡π固定於可動板15上。 在本實施型態中’設置可在基板6和觀察鏡筒ia之間 且與基板6平行之平面内移動的可動板15,在可動板15之下 面’設置複數個物鏡17及複數個塗敷單元18,當觀察基板6 之缺陷部時’使可動板15移動,使所要之物鏡17配置於觀 察鏡筒la下方,當在缺陷部塗敷修正墨水22時,使可動板 15移動’使所要之塗敷單元18移動至觀察鏡筒1&下方。於 疋’藉由使複數個塗敷單元18分別塗敷複數種之修正墨水 22 ’可免除每改變一次修正墨水22的種類就洗淨塗敷針2〇 的需要,所以,可縮短塗敷時間。 又’在可動板15上,形成用來通過物鏡丨7之光輛的貫 通孔1 5a及用來螺合公螺絲部1 7b之母螺絲部丨5b,在導引板 16上,形成用來插入物鏡17之外殼部17a之上端部的導引孔 16a ’貫通孔15a、母螺絲部15b及導引孔i6a配置成同軸。 於是’當將物鏡17之外殼部17a之上端部插入導引孔i6a 時,物鏡1 7之傾斜消失,可輕易將公螺絲部i 7b螺合至母螺 絲部1 5b,進而可輕易進行組合。 又’當將物鏡17之外殼部17a之下端部插入安裝工具 2075-10433-PF 16 201008659 35之先端面之子丨故 d5a時,由於安裝工具35由彈性體構成,所 °力地把持物鏡17。在此狀態下,若將物鏡17之外 ^之上端部插人導引孔Ua並用手旋轉安裝工具35之 基端°M5b ’基端部35b之外徑會小於先端部,所以,可在 會干涉到周圍之物鏡17的情況下’輕易鎖緊物鏡17。 再者,從物鏡17之外殼部17a卸除安裝工具35,在外 殼部Ha之外周面覆蓋皮帶把持部-,使基底板儲向外 殼》P 17a之圓周方向,藉此,可增強皮帶把持部仏之把持 力並鎖緊物鏡17之公螺絲部17b。 此外,在本實施型態中,於可動板15上形成母螺絲部 15b ’但亦可將形成母螺絲部⑽之金屬板固定於可動板π 上 又,亦可在導引板16之下面形成用來插入物鏡17之外 殼部17a之上端的導引孔,在該導引孔之底部之中央設置貫 通孔,於該貫通孔之内周面形成母螺絲部15b,在可動板15 •上形成貫通孔15a。在此情況下,導引孔和母螺絲部15b已 形成同軸所以,可動板15和導引板16之高精度之位置調 整變得不需要。 又亦可使可動板1 5和導引板16形成為一體,在可動 板15之下面形成導引孔,在該導引孔之底部之中央形成貫 通孔15a ’在該貫通孔】5a之内周面形成母螺絲部〗5卜在此 情況下’可動板15和導引板16之位置調整變得完全不需要。 此次所揭示之實施型態例示了所有的特點,但不成為 本發明之限制。本發明之範圍並非藉由上述說明而是藉由2075-10433-PF 201008659 Board 1 5 female screw part 1 5b. The combination method of the defect correcting device will be described below. Fig. 7 shows the structure of the mounting tool 35 used in the combined method of the defect correcting device. In Fig. 7, the mounting tool 35 has a circular hole 35a having an inner diameter smaller than the outer diameter of the outer casing portion 17a at the front end face of the cylindrical elastic body which is thicker than the outer casing portion 17a of the objective lens 17, and has an elastic base. The end portion is formed in a shape thinner than the tip end portion. The lower end portion of the outer casing portion 17a of the objective lens 17 is fitted into the hole 35a of the front end surface of the mounting tool 35, and the outer casing portion 17a of the objective lens 17 is inserted into the corresponding guiding hole 16a by the elastic force of the mounting tool 35. The base end portion 35b of the mounting tool 35 is rotated by hand, and the male screw portion 17b is screwed to the female screw portion 15b. Fig. 8 shows the structure of the locking tool 40 used in the combination of the defect correcting means. In Fig. 8, the locking tool 40 includes an endless belt member 41 and a rectangular base plate 42. One of the belt members 41 is folded up and down, and the short side of the leading end of the base plate 42 is provided with a right angle. The Φ folded portion of the belt member 41 is held by the tip end portion of the base plate 42 and the intermediate member 43, and then held by the two fixing plates 44, 45. The leading end portion projecting from the tip end of the base plate 42 of the belt member 41 constitutes a belt grip portion 41a having an inner diameter slightly larger than the outer diameter of the outer casing portion 17a of the objective lens 17. Further, a length adjusting rod 46 is inserted from the inner side of the rear end portion 41b projecting from the rear end of the intermediate member 43 of the belt member 41, and both ends of the length adjusting rod 46 are fixed to the two fingers 47a at the tip end of the adjusting plate 47. , 47b. The adjustment plate 47 is fixed to the rear end portion of the base plate 42. The position of the adjustment plate 47 can be finely adjusted along the length of the base plate 42. By fine-tuning the position of the adjustment plate 47, the size of the belt grip portion 41a can be adjusted by the micro 2075-10433-PF 15 201008659. After the male screw portion 17b of the objective lens 17 is screwed to the female screw portion 151 of the movable plate 15 by using the mounting tool 35 shown in Fig. 7, the mounting tool 35 is removed, and the outer surface of the outer casing portion i7a of the objective lens 17 is removed. The belt gripping portion 41a' covering the locking tool 4' is such that the rear end portion of the base plate 42 is inclined toward the circumferential direction of the outer casing portion 17a. Thereby, the holding force of the belt grip portion 41a can be reinforced and the male screw portion 17b' of the objective lens 17 can be locked to firmly fix the objective lens π to the movable panel 15. In the present embodiment, 'a movable plate 15 that is movable in a plane between the substrate 6 and the observation barrel ia and parallel to the substrate 6 is provided, and a plurality of objective lenses 17 and a plurality of coatings are disposed under the movable plate 15 The unit 18 moves the movable plate 15 when the defective portion of the substrate 6 is observed, so that the desired objective lens 17 is disposed under the observation lens barrel la, and when the correction ink 22 is applied to the defective portion, the movable plate 15 is moved to make the desired The coating unit 18 is moved below the viewing barrel 1 & By applying a plurality of kinds of the correction inks 22' to the plurality of coating units 18, the need to wash the coating needles 2 for each change of the type of the correction ink 22 can be eliminated, so that the coating time can be shortened. . Further, on the movable plate 15, a through hole 15a for passing the light of the objective lens 7 and a female screw portion 5b for screwing the male screw portion 17b are formed on the guide plate 16 to be formed on the guide plate 16. The guide hole 16a' through hole 15a, the female screw portion 15b, and the guide hole i6a of the upper end portion of the outer casing portion 17a of the insertion objective lens 17 are disposed coaxially. Then, when the upper end portion of the outer casing portion 17a of the objective lens 17 is inserted into the guide hole i6a, the inclination of the objective lens 17 disappears, and the male screw portion i 7b can be easily screwed to the female screw portion 15b, and the combination can be easily performed. Further, when the lower end portion of the outer casing portion 17a of the objective lens 17 is inserted into the front end face of the mounting tool 2075-10433-PF 16 201008659 35, the mounting tool 35 is composed of an elastic body, and the objective lens 17 is held by force. In this state, if the upper end of the objective lens 17 is inserted into the guide hole Ua and the base end of the mounting tool 35 is rotated by hand, the outer diameter of the base end portion 35b is smaller than the front end portion, so that it can be In the case of interference with the surrounding objective lens 17, the objective lens 17 is easily locked. Further, the mounting tool 35 is removed from the outer casing portion 17a of the objective lens 17, and the belt grip portion is covered on the outer peripheral surface of the outer casing portion Ha, so that the base plate is stored in the circumferential direction of the outer casing "P17a", whereby the belt grip portion can be reinforced. Hold the force and lock the male screw portion 17b of the objective lens 17. Further, in the present embodiment, the female screw portion 15b' is formed on the movable plate 15, but the metal plate forming the female screw portion (10) may be fixed to the movable plate π or may be formed under the guide plate 16. a guide hole for inserting the upper end of the outer casing portion 17a of the objective lens 17 is provided with a through hole at the center of the bottom of the guide hole, and a female screw portion 15b is formed on the inner circumferential surface of the through hole to form a movable plate 15 Through hole 15a. In this case, since the guide hole and the female screw portion 15b are formed coaxially, the positional adjustment of the movable plate 15 and the guide plate 16 with high precision becomes unnecessary. Further, the movable plate 15 and the guide plate 16 may be integrally formed, and a guide hole may be formed in the lower surface of the movable plate 15, and a through hole 15a' is formed in the center of the bottom of the guide hole in the through hole 5a. The circumferential surface forms the female screw portion. In this case, the positional adjustment of the movable plate 15 and the guide plate 16 becomes completely unnecessary. The embodiments disclosed herein exemplify all of the features, but are not intended to be limiting of the invention. The scope of the present invention is not by the above description but by

2075-10433-FT 17 201008659 申請專利範圍來界定’卩包含具有與申請專利範圍同等意 義及範圍的所有變更。 ' 【圖式簡單說明] 第1圖為表示本發明其中一實施型態之缺陷修正裝置 之整體結構的圖。 第2圖為表示第i圖所示之觀察光學系統及墨水塗敷 機構之重要部位的圖。 第3圖為從A方向觀看第2圖戶斤示之觀察光學系統及墨 水塗敷機構之重要部位的放大圖。 第4圖為表示第3圖所示之墨水容器之結構的剖面圖。 第5(a)圖至第5(c)圖為表示第3圖所示之塗敷單元之 動作的圖。 第6圖為方塊圖’表示骚動第3圖所示之可動板的方 法。 第7圖表示將第3圖所示之物鏡組裝至可動板的安裝 工具的結構及其使用方法。 第8圖表示用來鎖緊第3圖所示之物鏡的鎖緊裝置。 第9(a)圖至第9(c)圖為表示彩色濾光片上產生缺陷 的圖。 第10圖表示在第9(a)圖所示之白色缺陷上塗敷修正 墨水的墨水塗敷機構的結構。 【主要元件符號說明】 2075-10433-PF 18 201008659 1 觀察光學系統 la 觀察鏡筒 2 CCD相機 3 切割用雷射裝置 4 墨水塗敷裝置 5 墨水硬化用光源 6 液晶彩色滤光片基板 7 Z軸桌面 8 X轴桌面 9 Y軸桌面 10 控制用電腦 11 螢幕 12 操作面板 15 可動板 1 5 a貫通孔 • 15b母螺絲部 16 導引板 16a導引孔 16b頂孔 17 物鏡 17a外殼部 17b公螺絲部 18 塗敷單元 19 止動元件 2075-10433-PF 19 201008659 19a 先端部 201 塗敷針 2 0a 先端部 20b 小徑部 20c 大徑部 21 墨水容器 21a 孔 21b 保持部 22 修正墨水 23 墨水容器固定銷 24 蓋 24a 孔 25 塗敷針夾持器 26, 27懸臂 28 滑動機構 29 支持台 30 止動器 31 汽缸 32 XY桌面 32a 量尺 35 安裝工具 35a 圓形孔 35b 基端部 40 鎖緊工具2075-10433-FT 17 201008659 The scope of the patent application is to be construed as limiting all changes that are equivalent to the scope of the claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the overall configuration of a defect correcting device of one embodiment of the present invention. Fig. 2 is a view showing important portions of the observation optical system and the ink application mechanism shown in Fig. i. Fig. 3 is an enlarged view of an important part of the observation optical system and the ink application mechanism of Fig. 2 viewed from the direction A. Fig. 4 is a cross-sectional view showing the structure of the ink container shown in Fig. 3. Figs. 5(a) to 5(c) are views showing the operation of the coating unit shown in Fig. 3. Fig. 6 is a block diagram showing the method of disturbing the movable plate shown in Fig. 3. Fig. 7 is a view showing the structure of a mounting tool for assembling the objective lens shown in Fig. 3 to a movable plate, and a method of using the same. Figure 8 shows the locking device for locking the objective lens shown in Figure 3. Figures 9(a) to 9(c) are diagrams showing defects occurring on the color filter. Fig. 10 is a view showing the structure of an ink application mechanism for applying a correction ink to a white defect shown in Fig. 9(a). [Main component symbol description] 2075-10433-PF 18 201008659 1 Observation optical system la Observation lens barrel 2 CCD camera 3 Laser device for cutting 4 Ink coating device 5 Light source for ink hardening 6 Liquid crystal color filter substrate 7 Z axis Desktop 8 X-axis desktop 9 Y-axis desktop 10 Control computer 11 Screen 12 Operation panel 15 Movable plate 1 5 a through hole • 15b female screw portion 16 Guide plate 16a guide hole 16b top hole 17 Objective lens 17a Housing portion 17b male screw Portion 18 Coating unit 19 Stopping member 2075-10433-PF 19 201008659 19a Tip end portion 201 Coating needle 2 0a Tip end portion 20b Small diameter portion 20c Large diameter portion 21 Ink container 21a Hole 21b Holding portion 22 Correcting ink 23 Ink container fixing Pin 24 Cover 24a Hole 25 Coating Needle Holder 26, 27 Cantilever 28 Slide Mechanism 29 Support Table 30 Stopper 31 Cylinder 32 XY Tabletop 32a Ruler 35 Mounting Tool 35a Round Hole 35b Base End 40 Locking Tool

2075-10433-PF 2010086592075-10433-PF 201008659

41 皮帶元件 41a 皮帶把持部 41b 後端部 42 基底板 43 中間元件 44, 45固定板 46 長度調整棒 47 調整板 47a, 47b指部 51 黑色矩陣 52 R晝素 5 3 G畫素 54 B晝素 55 白色缺陷 56 黑色缺陷 57 異物缺陷 61 塗敷針 62 塗敷針驅動汽红 63 驅動軸 64 塗敷針夾持器 65 固定基底 66 旋轉桌面 67〜70墨水槽 71 洗淨裝置 2075-10433-PF 21 201008659 72 空氣吹掃裝置 7 3 旋轉軸 74 凹角部 75 馬達 76 索引板 77 索引用感測器 78 原點回歸用感測器41 Belt member 41a Belt gripping portion 41b Rear end portion 42 Base plate 43 Intermediate member 44, 45 fixing plate 46 Length adjusting rod 47 Adjustment plate 47a, 47b Finger 51 Black matrix 52 R 5 5 3 G 54 54 B 昼55 White defect 56 Black defect 57 Foreign object defect 61 Coating needle 62 Application needle drive steam red 63 Drive shaft 64 Coating needle holder 65 Fixing base 66 Rotating tabletop 67~70 Ink tank 71 Cleaning device 2075-10433-PF 21 201008659 72 Air Purging Device 7 3 Rotary Shaft 74 Recessed Corner 75 Motor 76 Index Board 77 Index Sensor 78 Origin Return Sensor

2075-10433-PF2075-10433-PF

Claims (1)

201008659 七、申請專利範圍: 1. 一種液狀材料塗敷裝置,用來在基板上之微細區域 塗敷液狀材料,包括: 觀察鏡筒,用來觀察上述微細區域; 可動板’設置成可在上述基板與上述觀察鏡筒之間且 與上述基板平行的平面内移動; 複數個物鏡,設置於上述可動板下面; 參 複數個塗敷單元’設置於上述可動板下面且可分別將 附著於塗敷針先端之上述液狀材料塗敷於上述微細區域; 及 驅動裝置’當觀察上述微細區域時,使上述可動板移 動並將從上述複數個物鏡中所選出之物鏡配置於上述觀察 鏡筒下方’當在上述微細區域塗敷上述液狀材料時,使上 述可動板移動並將從上述複數個塗敷單元中所選出之塗敷 單元配置於上述觀察鏡筒下方; Φ 其特徵在於: 各物鏡包含物鏡本體及用來保持及收納上述物鏡本體 的圓筒狀外殼部、設於上述外殼部之上端面且内徑比上述 外殼部之外徑小的圓筒狀公螺絲部,在上述可動板下面, 形成與各物鏡對應設置且用來插入所對應之物鏡之上述外 殼部之上端部的導引孔’在上述導引孔中央,形成用來通 過所對應之物鏡之光轴的貫通孔,在上述貫通孔之内周 面’形成用來螺合所對應之物鏡之上述公螺絲部的母螺絲 部。 2075-10433-PF 23 201008659 Η2·如申請專利範圍第1項之液狀材料塗敷裝置,其中, 、動扳由上下重疊之上部可動板及下部 成’上述貫通孔及上述母螺絲部形成於上述上部可 上述導引孔貫通上述下部導引板,上述上部 下部導引板之位置調整至上诚言、淑 板及上述 相互固定。 34貫通孔與上述導引孔同轴並 3.如申請專利範圍第1項之液狀材料塗敷裝置,並中, :逑可動板由上下重叠之上部可動板及下部導引板所構 成、:上述貫通孔貫通上述上部可動板及上述下部導引板, 上述母螺絲部及上述導引孔形成於上述下部導引板, 上述上部可動板及上述下部導引板之位置調整至上述 貫通孔與上述導引孔同軸並相互固定。 4.如申請專利H圍第w之液狀材料塗敷裝置,其中, 在上述可動板上,對應設置各導引孔,沿著與所對應之導 引孔之中心線垂直的方向形成頂孔, 用來固定所對應之物鏡的螺絲元件螺合至上述頂孔 上0 5. -種液狀材料塗敷裝置之組合方法,用來組合如申 請專利範圍第1至4項中任-項之液狀材料塗敷裝置,其特 徵在於:在比上述物鏡之祕k 規<上述外殼部粗之圓柱狀彈性體之 先端面上形成内徑小於上述外殼部之外徑的圓形孔,使用 上述彈性體之基端部形成得比先端部細的安裝工具, 將上述物鏡之上述外般部之下端部嵌入上述安裝工具 之先端面之孔上’藉由上述安^具保持上述物鏡,將上 2075-10433—PF1 24 201008659 述外殼部之上端部插入所對應之 工具之基端部’使上述公螺絲 孔内’旋轉上述文骏 e , ^ 1 %合至上述母螺絲部。 6.如申請專利範圍第5 ^ 疋液狀材料塗敷裝置之級合 ' '、中,使用由皮帶元件所來B A X / 4九/成且包含内徑大於上述 物鏡之上述外殼部之外徑的皮帶把持部及將上述皮帶把持 Pil/t在其中端的基底板的鎖緊工具,從上述外殼部卸 除上述安裝工具’在上述外殼部之外周面覆蓋上述皮帶把 持部,使上述基底板傾向上述外殼部之圓周方向,以増強 上述皮帶把持部之把持力並鎖緊上述物鏡之上述公螺絲 部。 μ 2075-10433-95 25201008659 VII. Patent application scope: 1. A liquid material coating device for coating a liquid material on a fine area on a substrate, comprising: an observation lens barrel for observing the above-mentioned fine area; the movable plate is set to be Moving between the substrate and the observation tube and parallel to the substrate; a plurality of objective lenses are disposed under the movable plate; and the plurality of coating units are disposed under the movable plate and are respectively attached to Applying the liquid material at the tip end of the application needle to the fine area; and driving means 'When the fine area is observed, moving the movable plate and arranging the objective lens selected from the plurality of objective lenses on the observation tube Bottom 'When the liquid material is applied to the fine area, the movable plate is moved and the coating unit selected from the plurality of coating units is disposed under the observation tube; Φ is characterized by: The objective lens includes an objective lens body, a cylindrical outer casing portion for holding and housing the objective lens body, and is disposed on the outer casing portion a cylindrical male screw portion having an end surface and an inner diameter smaller than an outer diameter of the outer casing portion, and a guide surface corresponding to each objective lens and inserted into an upper end portion of the outer casing portion of the corresponding objective lens is formed on the lower surface of the movable plate a hole 'in the center of the guiding hole, forming a through hole for passing the optical axis of the corresponding objective lens, and forming a female screw for screwing the male screw portion of the corresponding objective lens on the inner circumferential surface of the through hole unit. The liquid material coating device according to the first aspect of the invention, wherein the movable plate is formed by the upper and lower movable portions and the lower portion of the upper through hole and the female screw portion. The upper portion allows the guide hole to pass through the lower guide plate, and the position of the upper lower guide plate is adjusted to be upper and lower, and the upper plate and the above are fixed to each other. The through hole is coaxial with the guide hole and 3. The liquid material coating device according to the first aspect of the patent application, wherein: the movable plate is formed by vertically overlapping the upper movable plate and the lower guide plate. The through hole penetrates the upper movable plate and the lower guide plate, and the female screw portion and the guide hole are formed in the lower guide plate, and positions of the upper movable plate and the lower guide plate are adjusted to the through hole. It is coaxial with the above guiding holes and fixed to each other. 4. The liquid material coating device of claim H, wherein, on the movable plate, corresponding guiding holes are provided, and a top hole is formed along a direction perpendicular to a center line of the corresponding guiding hole. a screw element for fixing the corresponding objective lens is screwed to the top hole. The combination method of the liquid material coating device is used to combine any of the items 1 to 4 of the patent application scope. A liquid material application device characterized in that a circular hole having an inner diameter smaller than an outer diameter of the outer casing portion is formed on a front end surface of the cylindrical elastic body having a larger outer diameter than the outer surface of the objective lens. The base end portion of the elastic body is formed by a mounting tool that is thinner than the tip end portion, and the lower end portion of the outer portion of the objective lens is fitted into the hole of the front end surface of the mounting tool, and the objective lens is held by the mounting device. Upper 2075-10433-PF1 24 201008659 The upper end portion of the outer casing portion is inserted into the base end portion of the corresponding tool, and the inside of the male screw hole is rotated to the above-mentioned female screw portion. 6. As in the ninth aspect of the patent application, the grading of the liquid material coating device, the BAX / 4 nine / formed by the belt member and including the outer diameter of the outer casing portion having an inner diameter larger than the objective lens a belt gripping portion and a locking tool for holding the base plate of the belt Pil/t at the middle end thereof, and removing the above-mentioned mounting tool from the outer casing portion to cover the belt grip portion on the outer peripheral surface of the outer casing portion, so that the base plate tends to be inclined The circumferential direction of the outer casing portion reinforces the holding force of the belt gripping portion and locks the male screw portion of the objective lens. μ 2075-10433-95 25
TW98113584A 2008-05-12 2009-04-24 Liquid-material coating device, and method of assembling the same TW201008659A (en)

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JP2008124673A JP2009273962A (en) 2008-05-12 2008-05-12 Liquid-material coating device, and method of assembling the same

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