JP2018169216A - Inspection device of attached substance - Google Patents

Abstract

To provide a device capable of inspecting an inner face of a cylindrical vessel in a state that an unevenness of the illumination light is less in an observation field even when it is not possible that illumination means and observation means are arranged in the cylindrical vessel and an observation direction is freely changed inside the vessel.SOLUTION: An inspection device of an attached substance attached to an inner face of a cylindrical vessel opened at an upper part includes: an imaging camera for imaging an imaging object area set on the inner face of the cylindrical vessel from an upper part side of the cylindrical vessel to obliquely downward of the cylindrical vessel; and an illumination part for illuminating illumination light from the upper side to the obliquely downward of the cylindrical vessel toward the imaging object area. The illumination part has an emission part for emitting the illumination light toward the imaging object area in a direction close to or away from a side face side of the cylindrical vessel with a center of the bottom of the cylindrical vessel as a reference, and is arranged above the position within less than one half of the distance up to the side face of the cylindrical vessel from a center of the bottom.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an apparatus for inspecting the presence / absence of foreign matter and residues attached to a cylindrical container and the amount of adhesion (so-called adhesion inspection).

  Previously proposed technology to inspect the inner surface of containers such as aluminum cans and drum cans for the presence of residues after cleaning and foreign matters such as dust and dust mixed from outside. Has been.

  For example, in order to inspect the inside of a drum can, a white illumination using a halogen lamp as a light source and a CCD camera are attached to a support arm equipped with two movable joints, inserted from the stopper of the drum can, and inside the drum can There has been proposed a form in which a movable joint is moved, an image is taken while appropriately adjusting the vertical position, turning position, and elevation angle of the CCD camera, and visually observed on a monitor (for example, Patent Document 1).

  Alternatively, a technique is known in which an illuminating unit and an imaging unit are arranged opposite to each other above a cylindrical container (hereinafter referred to as a cylindrical container), and illumination light is irradiated onto an imaging field using light reflected once in the container. (For example, Patent Document 2).

  Furthermore, in order to inspect foreign matter and the like attached to a container composed of an inner surface that reflects light, the illumination means and the imaging means are fixedly arranged obliquely downward to prevent generation of dust at a high resolution. A technique is known (for example, Patent Document 3).

JP 7-286971 A JP-A-3-225264 JP 2006-161317 A

  A technique such as Patent Document 1 is a configuration for performing observation by arranging an illumination unit and an observation unit in a container, and is suitable when the container to be imaged is relatively large. However, when the inside of the container is narrow and the movable joint cannot be freely moved, it is difficult to apply the technique.

  On the other hand, a technique such as Patent Document 2 can observe the inside of a container using an illumination unit and an observation unit arranged outside the cylindrical container. However, since this technique uses complex reflected light on the inner surface (side surface and bottom surface) of the cylindrical container, it depends on the size of the cylindrical container to be observed (that is, the curvature and height of the side surface). Therefore, it is necessary to arrange a plurality of illumination spots at optimum angles and positions. For this reason, if the position of the illumination means and the observation means is moved up and down, or the size of the cylindrical container is changed (so-called another type), the uniformity of the illumination light within the observation field is lost (for example, reflected light If they overlap, a pattern like a heart symbol appears), which hinders observation and inspection.

  Further, Patent Document 3 discloses that the illumination unit and the imaging unit are disposed obliquely downward in order to avoid observation of specularly reflected light, but for observing and inspecting the inner surface of the cylindrical container. No mention is made of an optimal arrangement of suitable illumination means and imaging means.

  Therefore, an object of the present invention is to provide illumination light and observation means within the observation field even when the illumination means and observation means are not arranged in the cylindrical container or the observation direction cannot be freely changed within the container. An object of the present invention is to provide an apparatus capable of inspecting the inner surface of a cylindrical container with less unevenness (inhomogeneity in luminance).

In order to solve the above problems, an aspect of the present invention is as follows.
In the inspection apparatus for deposits attached to the inner surface of a cylindrical container having a bottom surface and a curved side surface and the upper part being open,
An imaging camera for imaging an imaging target region set on the inner surface of the cylindrical container from the upper side of the cylindrical container obliquely downward;
An illumination unit that emits illumination light obliquely downward from the upper side of the cylindrical container toward the imaging target region;
The illumination unit is a direction in which the emitting unit from which illumination light is emitted toward the imaging target region approaches or moves away from the side surface side of the cylindrical container with respect to the center of the bottom surface of the cylindrical container, and from the center of the bottom surface. The deposit inspection apparatus is disposed above a position within a range of ½ or less of the distance to the side surface of the cylindrical container.

  Even if the illumination means and observation means are not arranged in the cylindrical container or the observation direction cannot be freely changed in the container, the illumination light is uneven in the observation field (nonuniform brightness). It is possible to inspect the inner surface of the cylindrical container with a small amount of.

It is the schematic which shows the whole structure of an example of the form which embodies this invention. It is a perspective view which shows the principal part of an example of the form which embodies this invention. It is the schematic which shows the example of a change of an example of the form which embodies this invention. It is a ray tracing figure in an example and the modification which embody the present invention. It is a schematic diagram which shows the influence of the brightness nonuniformity of the illumination light in an example and the modification which embody this invention. It is the schematic which shows the example of a change of an example of the form which embodies this invention.

  Hereinafter, modes for carrying out the present invention will be described with reference to the drawings. In each figure, the three axes of the orthogonal coordinate system are X, Y, and Z, the XY plane is the horizontal plane, and the Z direction is the vertical direction. In particular, in the Z direction, the direction of the arrow (above gravity) is expressed as up, and the opposite direction (under gravity) is expressed as down. A direction rotating around the Z direction as a central axis is called a θ direction.

FIG. 1 is a schematic diagram showing an overall configuration of an example of a form embodying the present invention.
FIG. 2 is a perspective view showing a main part of an example of a form embodying the present invention.
As shown in FIG. 2, the inspection apparatus 1 in this embodiment is an apparatus that inspects the deposit X attached to the inner surface of a cylindrical container (that is, a cylindrical cylindrical container) W.

  Note that the cylindrical container W to be inspected according to the present invention includes a circular bottom surface Wb and a cylindrical cylindrical side surface Ws, and an opening H on the opposite side (that is, the upper portion) from the bottom surface Wb. The thing which has is illustrated.

  Further, the inspection object according to the present invention is referred to as “attachment” including foreign matters such as dust and dust mixed from the outside, and residues after the container is cleaned. “Inspection of deposits” means determining the presence or absence of these deposits, counting the number of deposits, measuring the size, area, volume, amount, etc. of deposits. .

  A deposit inspection apparatus 1 according to the present invention includes an imaging camera 2, an illumination unit 3, an image correction unit 4, an inspection unit 5, an imaging position changing unit 7, a computer CN, and the like.

  The imaging camera 2 captures an imaging target region R set on the bottom surface Wb and the side surface Ws in the cylindrical container W and acquires an image. Specifically, the imaging camera 2 is configured to include a main body unit 20 provided with an imaging element and a lens 21 and capture an image within the angle of view indicated by the broken line S and within the depth of field F. The image is formed by imaging on the element. The main body 20 is attached to the mounting bracket B.

  In the state shown in FIG. 1, the imaging target region R by the imaging camera 2 can be distinguished into an imaging target region R1 set on the bottom surface Wb and an imaging target region R2 set on the side surface Ws. This is called a target area R.

  The illumination unit 3 irradiates the illumination light L1 toward the imaging target region R set on the bottom surface Wb and the side surface Ws in the cylindrical container W. Specifically, the illumination unit 3 includes a main body unit 30, a light source 31, an emission unit 32, and the like.

  The main body 30 is a cylindrical casing that constitutes the illumination unit 3, and a light source 31 is accommodated therein. The main body 30 is attached to the mounting bracket B.

  The light source 31 emits illumination light L1, and examples thereof include LEDs, laser diodes, fluorescent lamps, mercury lamps, metal halide illumination, and halogen illumination. The light source 31 exemplifies a configuration built in the main body 30 (so-called integrated type), but may be a separate configuration that guides light using an optical fiber or the like.

  The emitting unit 32 emits light emitted from the light source 31 toward the imaging target region R as illumination light L1. Specifically, the emitting portion 31 is configured by an optical element such as a lens or a filter attached to the opening of the main body portion 30.

  The image correction unit 4 performs corrected image processing (so-called shading correction, luminance unevenness correction, etc.) on the image acquired by the imaging camera 2 to generate corrected image data.

  For example, it is caused by the non-uniformity of the illumination light L1 due to the structure of the illumination unit 3 or the difference in distance between each part of the side surface Ws or the bottom surface Wb of the cylindrical container W set in the imaging target region R and the light source 31. As a result, the brightness of the acquired image becomes non-uniform (so-called shading occurs). Shading correction is a process for reducing such brightness non-uniformity and correcting the image so as to approach an image acquired as if a uniform illumination light was irradiated on a flat surface.

  The cylindrical container W has a three-dimensional shape, and the illumination light applied to the side surface Ws and the bottom surface Wb of the cylindrical container W includes direct light, primary reflected light, and multiple reflected light. The luminance of the image obtained by imaging the target region R becomes non-uniform (so-called luminance unevenness occurs). A process for reducing such non-uniformity is luminance unevenness correction. In the present application, the direct light refers to light that is emitted from the emission port 32 of the illumination unit 3 and directly reaches the imaging target region R set on the bottom surface Wb or the side surface Ws. On the other hand, the primary reflected light refers to light that is emitted from the emission port 32 of the illuminating unit 3, is reflected once by the side surface Ws or the bottom surface Wb of the cylindrical container W, and reaches the imaging target region R. On the other hand, the multiple reflected light refers to light that is irradiated from the emission port 32 of the illuminating unit 3 and is reflected a plurality of times by the side surface Ws and the bottom surface Wb of the cylindrical container W and reaches the imaging target region R.

  The image correction unit 4 performs such image correction (that is, improves luminance uniformity) and generates corrected image data.

  The inspection unit 5 inspects the adhered matter based on the image acquired by the imaging camera 2. Specifically, the inspection unit 4 performs predetermined image processing on the image that has been image-corrected by the image correction unit 4 (that is, corrected image data), and deposits based on the determination criteria that are registered in advance. The presence or absence of X is detected, the number of deposits is counted, and the size, area, volume, amount, etc. of the deposit X are measured. More specifically, it is composed of a part (that is, hardware) and an execution program (that is, software) of a computer CN having an image processing apparatus and an image processing function, and programmed to perform a desired inspection. Yes.

  The imaging position changing unit 7 adjusts the relative positions of the imaging camera 2 and the illumination unit 3 with respect to the cylindrical container W, and changes the position of the imaging target region R set in the cylindrical container W. Specifically, the imaging position changing unit 7 includes an elevating unit 71, a bending unit 72, a rotating unit 73, and the like.

  The raising / lowering part 71 moves the imaging camera 2 and the illumination part 3 to an up-down direction. Specifically, the elevating part 71 includes an arm part 71a and an elevating actuator 71b.

  The arm unit 71a moves the imaging camera 2 and the illumination unit 3 to predetermined positions or stops them at the positions. Specifically, a mounting bracket B for fixing the imaging camera 2 and the illumination unit 3 is attached to the end of the arm unit 71a.

  The lifting / lowering actuator 71b moves the arm portion 71a in the vertical direction or stops it at a predetermined height. Specifically, the lifting / lowering actuator 71b includes a direct acting actuator, an electric cylinder, a hydraulic cylinder, and the like, and is attached to the device frame 10f.

  The bending part 72 rotates the imaging camera 2 and the illumination part 3 to a predetermined angle (also referred to as an inclination angle with respect to the side surface Ws) or stops the imaging camera 2 and the illumination part 3 at that angle. Specifically, the bent portion 72 is composed of a rotation mechanism disposed between the mounting bracket B and the arm portion 71a, and rotates the imaging camera 2 and the illumination unit 3 in the direction indicated by the arrow ω. It is stationary at a predetermined angle. More specifically, the bending portion 72 has a configuration in which the fixing screw is loosened and rotated to a predetermined angle, and then the fixing screw is fastened again and fixed, or a mounting bracket (tilted at a predetermined angle ( A configuration of fixing using a so-called bracket) can be exemplified.

  The rotating unit 73 rotates the cylindrical container W in the θ direction. Specifically, the rotating unit 73 includes a mounting table 73a on which the cylindrical container W is mounted and fixed, and a rotating mechanism 73b that rotates the mounting table 73a. The rotation mechanism 73b includes a so-called direct drive motor, an index table, or the like, or a stepping motor, a combination of a servo motor and a gear, and the like, and is attached to the apparatus frame 10f.

FIG. 3 is a schematic diagram showing an example of a variation of an embodiment embodying the present invention.
The state shown in FIG. 3 shows a state where the arm portion 71a is raised with respect to the state shown in FIG.

  In the state shown in FIG. 3, the imaging target region R3 set on the side surface Ws near the opening H and the imaging target region R4 set on the bottom surface Wb are the imaging target region R by the imaging camera 2. Of the images acquired by changing the vertical position of the lifting actuator 71b (the so-called images with different imaging heights), the regions in which the overlapping imaging target regions R are imaged are included in any of the images. Whether to perform inspection is defined in advance.

  In addition to the above-described acquisition of images with different heights, the rotating mechanism 73b of the rotating unit 73 is rotated to rotate the cylindrical container W placed on the placing table 73a by a predetermined angle (for example, 90 degrees or 60 degrees). -It is also possible to acquire an image when it is stationary (an image with a different angle). Also in this case, as for the area where the overlapping imaging target area R is imaged, it is defined in advance which area to be inspected in which image. At this time, for example, an image with good pixel resolution of the imaging camera that captures the imaging target region R is selected, or an image with less luminance unevenness due to the influence of the primary reflected light is selected.

  Because of such a configuration, the deposit inspection apparatus 1 according to the present invention is set with the bottom surface Wb and the side surface Ws of the cylindrical container W divided into a plurality of divided imaging ranges, and the inner surface of the cylindrical container W is set. It is possible to inspect the adhering matter by acquiring an image without any trouble and acquiring an image. Then, an image captured at a certain height or angle and an image captured at another height or angle overlap (that is, a part of one divided imaging range is a part of another divided imaging range). (Overlapping state). This is preferable because it is possible to select and inspect an image that is expected to have a higher inspection accuracy, such as an image with high resolution and an image with less luminance unevenness of the illumination light L1.

[Lighting position]
Below, the positional relationship between the emission part 32 of the illumination part 3 and the opening part H of the cylindrical container W is described.

FIG. 4 is a ray tracing diagram in one example and a modification of the embodiment embodying the present invention.
FIG. 4 illustrates light that is reflected once by the side surface Ws of the cylindrical container W (that is, 1) among the illumination light L1 emitted from the illumination unit 3 disposed in the vicinity of the opening H of the cylindrical container W (details will be described later). Focusing on the secondary reflected light), a trace (ie, tracking) of how the primary reflected light reaches the bottom surface Wb is shown. In addition, the emission part 32 of the illuminating unit 3 is disposed above the opening H of the cylindrical container W, and the distance from the bottom surface Wb is 1.5 times the height of the side surface Ws (that is, the height). Has been. 4 (a) shows a ray traced state in which the emitting part 32 of the illuminating unit 3 is arranged immediately above the center C of the bottom surface Wb of the cylindrical container W. FIG. In (f), the illumination unit 3 is arranged to be shifted from the position to the side surface Ws of the cylindrical container W by a predetermined distance (1/5, 2/5, 1/2, 3/5, 4/5 of the radius r). A ray trace is shown in a state (that is, a state shifted to a position away from the side surface Ws side of the cylindrical container W where the imaging target region R is set (right side on the paper surface)). In these ray tracing diagrams, the portion where the lines overlap and looks dark is the state where the primary reflected light is densely irradiated, and the portion where the distance between the lines appears wide and light is the state where the primary reflected light is roughly irradiated. The white portion indicated by the symbol N represents a state where the primary reflected light has not reached.

  In addition, when actually observing the bottom surface Wb of the cylindrical container W with the imaging camera 2, the illumination light L1 emitted from the illumination unit 3 is reflected a plurality of times by the direct light or the opposite side surface Ws in addition to the light described above. Light (that is, multiple reflected light) is also included, but the luminance difference due to the bias of the primary reflected light has a strong influence on the inspection result.

  FIG. 5 is a schematic diagram showing the influence of luminance unevenness of illumination light in an example and a modified example embodying the present invention. FIGS. 5A to 5F correspond to the ray tracing diagrams shown in FIGS. 4A to 4F, and the portion shown in a block shape in the drawing is irradiated from the illumination unit 3. The part with the brightness nonuniformity by the primary reflected light of the illuminating light L1 is shown. It is possible to obtain a desired inspection result by performing the above-described image correction (that is, shading correction, luminance unevenness correction, and the like) for a portion with uneven brightness due to the primary reflected light of the illumination light L1. become. However, if there are many parts to be corrected or there are parts in which the difference in density is so large that correction cannot be performed, appropriate image correction cannot be performed and a desired inspection result cannot be obtained. In the case of the cylindrical container W, if the emission part 32 of the illuminating part 3 is just above the center of the bottom surface Wb or 1/2 of the radius r of the bottom surface Wb (the position shown in FIGS. 4A to 4D), it is desirable. The test results were obtained. However, if the emission part 32 of the illumination part 3 is outside the above-described range (that is, the position shown in FIGS. 4E and 4F), it is difficult to obtain a desired inspection result.

  In embodying the present invention, the emitting portion 32 of the illuminating unit 3 is disposed above the center C of the bottom surface Wb of the cylindrical container W, and the optical axis is oriented directly below (that is, the bottom surface Wb). The state of being inclined toward the imaging target region R is most preferable from the viewpoint of illuminance uniformity.

  However, the present invention is not limited to the above arrangement, and the emitting unit 32 of the illuminating unit 3 moves away from the side surface Ws side of the cylindrical container W in which the imaging target region R is set with respect to the center C of the bottom surface Wb of the cylindrical container W ( 2 (position indicated by a solid line in FIG. 2), and a position within a range of 1/2 or less of the distance from the center C of the bottom surface Wb to the side surface Ws of the cylindrical container W (that is, the radius r of the bottom surface). It may be arranged above. Such an arrangement is preferable because the primary reflected light reflected by the side surface Ws of the cylindrical container W gathers on the bottom surface Wb and the illuminance of the bottom surface Wb increases, which is advantageous for inspection. In this case, the illuminance unevenness occurs, but if it is within ½ of the bottom surface radius r from the center C of the bottom surface Wb, the illuminance unevenness is small and a desired inspection result can be obtained.

  In embodying the present invention, the emission unit 32 of the illumination unit 3 is not limited to the arrangement described above, and the cylindrical container in which the imaging target region R is set based on the center C of the bottom surface Wb of the cylindrical container W is used. The distance from the center C of the bottom surface Wb to the side surface Ws of the cylindrical container W (that is, the radius r of the bottom surface). ) May be disposed above a position within a range of 1/2 or less. With such an arrangement, the primary reflected light reflected by the side surface Ws of the cylindrical container W does not collect much on the bottom surface Wb, but since the deviation of illuminance is small, a desired inspection result can be obtained.

[Arrangement of imaging camera and illumination unit]
In the above description, the imaging camera 2 is disposed in a direction away from the imaging target region R set on the inner surface of the cylindrical container W relative to the emission unit 32 of the illumination unit 3 (that is, the emission of the illumination unit 3 when viewed from directly above). The configuration in which the imaging camera 2 is arranged farther from the imaging target region R than the unit 32 is shown. In implementing the present invention, if the imaging camera 2 and the illumination unit 3 are arranged in this manner, the side surface Ws and the bottom surface Wb are both exposed with an inclination angle with respect to the side surface Ws of the cylindrical container W. Arrangement within the depth of field F (that is, simultaneous imaging) is possible, and the imaging target region R can be easily set.

  However, the imaging camera 2 is not limited to the above arrangement, and the imaging camera 2 is arranged above the side surface Ws of the cylindrical container W where the imaging target region R is set and the emission unit 32 of the illumination unit 3 (that is, viewed from directly above). Thus, the emission unit 32 of the illumination unit 3 may be arranged farther from the imaging target region R than the imaging camera 2. (See Figure 6)

[Modification]
In the above description, the configuration in which the imaging camera 2 and the main body 30 of the illumination unit 3 are disposed close to each other and attached together to the mounting bracket B is illustrated. With such a configuration, it becomes easy to change the tilt angle, the imaging height, and the direction of the cylindrical container W with respect to the imaging target region R by the position angle adjusting unit 7, and the inner surface (the bottom surface Wb and the side surface of the cylindrical container W). Ws) can be inspected without any problem, which is preferable.

  However, the configuration is not limited to such a configuration, and the imaging camera 2 and the main body portion 30 of the illumination unit 3 may be each attached to a position angle adjustment unit arranged independently.

[Modification]
Note that, in the above description, the deposit inspection apparatus 1 includes the imaging position changing unit 7, and the imaging camera 2 acquires images with different heights and images with different angles (that is, imaging by dividing the imaging target region R). Configuration).

  However, in order to embody the present invention, it is not essential that the imaging camera 2 divides and captures the imaging target area R, and the entire area inside the cylindrical container W is imaged at once as the imaging target area. (For example, the structure provided with the super wide-angle lens, the fish-eye lens, etc.) may be sufficient.

[Modification]
In the above description, the adhered substance inspection apparatus 1 includes the image correction unit 4 and performs a shading correction, a luminance unevenness correction, and the like. With such a configuration, even when shading or luminance unevenness occurs in the imaging target region R, the inspection unit 5 performs shading correction or luminance unevenness correction on the image acquired by the imaging camera 2. It is more preferable because the deposit can be inspected based on the corrected image (that is, corrected image data).

  However, depending on the structure of the illumination unit 3 and the curvature and reflectance of the inner surface of the cylindrical container W to be inspected (depending on the material, surface roughness, coating, etc.), the effects of shading and luminance unevenness as described above are almost not affected. There may be no. In such a case, the image correction unit 4 is not an essential constituent requirement, and is omitted (that is, the inspection unit inspects the image acquired by the imaging camera 2), and the attached matter according to the present invention is omitted. An inspection device may be configured.

The above-described lifting actuator 71b and rotation mechanism 73b may be configured such that the vertical position (so-called height) and rotation angle are controlled based on control signals from the computer CN, the control device, and the like. A configuration in which the operator manually moves up and down and rotates may be employed. Further, the bent portion 72 is not limited to the semi-fixed type as described above, and may be configured to include an actuator and the like so that the rotation angle is controlled based on a control signal from the computer CN or the control device.

DESCRIPTION OF SYMBOLS 1 Inspection apparatus of adhering matter 2 Imaging camera 3 Illumination part 4 Image correction part 5 Inspection part 7 Position angle adjustment part 20 Main-body part (imaging camera)
21 Lens 30 Main unit (illumination unit)
31 Light source 32 Emission unit 71 Elevating unit 71a Arm unit 71b Elevating actuator 72 Bending unit 73 Rotating unit 73a Mounting table 73b Rotating mechanism B Mounting bracket CN Computer W Cylindrical container Wb Cylindrical container bottom Ws Cylindrical container side H Opening C Bottom Center r r radius of bottom surface S broken line R imaging target area F depth of field X deposit L1 illumination light N where primary reflected light has not reached

Claims (5)

In the inspection apparatus for deposits attached to the inner surface of a cylindrical container having a bottom surface and a curved side surface and the upper part being open,
An imaging camera for imaging an imaging target region set on the inner surface of the cylindrical container from the upper side of the cylindrical container toward an obliquely downward direction;
An illumination unit that emits illumination light obliquely downward from the upper side of the cylindrical container toward the imaging target region;
The illumination unit is configured such that an emission unit from which the illumination light is emitted toward the imaging target region is set on the side surface side of the cylindrical container in which the imaging target region is set with reference to the center of the bottom surface of the cylindrical container. In the direction of approaching or moving away from the center of the bottom surface and located above a position within half the distance from the center of the bottom surface to the side surface of the cylindrical container apparatus. In the illumination unit, the emitting unit from which the illumination light is emitted toward the imaging target region moves away from the side surface side of the cylindrical container set in the imaging target region with the center of the bottom surface of the cylindrical container as a reference. The deposit inspection apparatus according to claim 1, wherein the deposit inspection apparatus is disposed in a direction above a position equal to or less than ½ of a distance from a center of the bottom surface to a side surface of the cylindrical container. The appendix according to claim 1 or 2, wherein the imaging camera is disposed in a direction away from an imaging target region set on an inner surface of the cylindrical container with respect to the emitting unit of the illumination unit. Kimono inspection device. The imaging target area of the imaging camera is set in a state where the inner surface of the cylindrical container is divided into a plurality of divided imaging ranges, and a part of one divided imaging range exceeds a part of another divided imaging range. It is set to the state which wraps, The inspection apparatus of the deposit | attachment in any one of Claims 1-3 characterized by the above-mentioned. An image correction unit that corrects an image acquired by the imaging camera and generates corrected image data;
The inspection unit for comparing the luminance value of the inspection area set in the corrected image data with a preset threshold value to determine the presence or absence of an adhering substance in the inspection area. The deposit inspection apparatus according to claim 4.

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