KR101711849B1 - Method and apparatus for acquiring image of inner plane - Google Patents

Method and apparatus for acquiring image of inner plane Download PDF

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KR101711849B1
KR101711849B1 KR1020150102790A KR20150102790A KR101711849B1 KR 101711849 B1 KR101711849 B1 KR 101711849B1 KR 1020150102790 A KR1020150102790 A KR 1020150102790A KR 20150102790 A KR20150102790 A KR 20150102790A KR 101711849 B1 KR101711849 B1 KR 101711849B1
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lens
image
sensor unit
camera sensor
distance
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KR20170012613A (en
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최성진
홍지화
한근우
박필화
이택규
전일문
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주식회사 에프에스티
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9515—Objects of complex shape, e.g. examined with use of a surface follower device
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/954—Inspecting the inner surface of hollow bodies, e.g. bores
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0638—Refractive parts
    • G01N2201/0639—Sphere lens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/103—Scanning by mechanical motion of stage

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  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
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  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Studio Devices (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

The present invention relates to an optical apparatus for acquiring an inner surface image. In the prior art, since a focal plane can be aligned only when an optical system including a subject surface, a camera sensor, and a lens is installed in parallel, In case of insufficient image, the internal image could not be acquired. The present invention relates to a camera device, a camera, a lens, a variable optical tube for adjusting an angle and a distance of the sensor, a motion controller for moving the target surface to be always in a focal point by motion control, The entire upper and lower portions of the focal plane can be set as the focal point region by setting the installation position and the angle of the optical system and the object plane in such a condition that the effect of the spike plug can be obtained, It is possible to obtain a curved surface, a corner, or a curved image as well as an entire image on the inner surface by always moving it to the side of a candle.

Description

TECHNICAL FIELD [0001] The present invention relates to an optical apparatus for acquiring an inner image,

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an optical device for acquiring an inner image, and more particularly, to an optical device for acquiring an image of a corner or a curved region as well as a whole image of an inner surface of a subject, To an optical apparatus for internal image acquisition.

In general, there are inspection apparatuses using optical devices as one of methods for inspecting products in the manufacturing process of the product or in the state of the finished product. In a conventional optical inspection apparatus, the camera sensor and the lens are installed in parallel with respect to the image acquisition target surface of the target object so that the target can be focused on the target surface.

1 (a) to 1 (c) are conceptual views of a camera installation of a general optical inspection apparatus.

Fig. 1 (A) shows a case where the object plane 1 of the object is a vertical plane, and Figs. 1 (B) and 3 (C) show an example in which the object plane 1 is inclined to the inside or outside angle. As shown in the drawings, all of the conventional techniques are provided with the lens 2 and the camera 3 in parallel with respect to the object surface 1.

A clear image can be obtained only when the object plane 1 is installed at a position parallel to the lens 2 and the camera 3. [ If the object, the lens 2, and the camera 3 are not located on a parallel line, only a part of the object is focused.

Therefore, when the lens and the camera can not be placed in parallel, it is impossible to obtain a clear image of the entire object plane from which the image is to be acquired.

In the case where only a part of the object is focused, it is necessary to scan the position of the optical system while moving the optical system in order to obtain an image of the entire object, and it is difficult to obtain an image of a part such as a corner or a curved shape of the object.

However, if there is not enough space, such as the inner surface of a frame or a ring structure, the object plane, the lens, and the camera can not be positioned in parallel in the conventional method. Accordingly, since the focus can be focused only on a part of the inner surface of the object, it is necessary to acquire the image of the target surface by scanning the optical system while moving up and down the optical system, which is time consuming and difficult to obtain high quality images.

Korean Patent Laid-Open Publication No. 2015-0005405 (Jan. 2015) discloses an illumination system used for optical inspection, an inspection system and an inspection method using the same, wherein the lens and the camera are arranged parallel to the upper surface of the inspection table And the illumination arrangement is illuminated obliquely on the left and right sides. The camera arrangement structure for acquiring the image of the upper surface of the inspection table is also a parallel arrangement of the camera, the lens and the object plane. Accordingly, the description of the prior art document is not suitable as an optical inspection apparatus for obtaining an inner image lacking space.

Korean Patent Laid-Open Publication No. 2015-0005405 (Jan. 201, 2014)

An object of the present invention is to provide an optical apparatus for acquiring a high-quality image of a target object in the case where the space is insufficient, such as the inner surface of a frame or a ring structure.

Further, the present invention is intended to make it possible to acquire an image of a corner or a curved region as well as an entire image of the inner surface by only one rotation of the object plane by allowing the entire surface of the inner surface to be focused.

According to the present invention, there is provided an optical device for internal-

A camera sensor unit for capturing an image of a target surface for image acquisition of a target object;

A lens disposed between the camera sensor unit and the object surface;

A variable lens barrel for integrally connecting the camera sensor unit and the lens, the variable lens barrel for adjusting the distance between the camera sensor and the lens and the inclination angle of the sensor;

A motion control means for loading the object at a photographing position and moving the object by motion control so that the object plane of the object coincides with the focal plane;

And an illuminating device for illuminating the object in parallel or oblique to the object surface

The variable lens barrel has a means for adjusting a distance between the lens and the camera sensor unit and an angle between the lens and the camera sensor unit.

Further, according to the present invention,

The distance between the lens and the sensor (V), the distance between the lens and the sensor (V), the distance between the lens and the hinge (J) And the angle? Of the surface satisfies the following formula (1).

Figure 112015070486791-pat00001
... (1)

According to the present invention, since the camera sensor unit using the line sensor, the lens, and the focal plane extending the inner surface of the target object are provided at distances and angles of specific conditions, So that it is possible to obtain a high-quality image even if the camera, the lens, and the object plane are not in parallel with each other.

Further, the present invention has the effect of acquiring an image of the entire inner surface by moving the object only by one rotation locus by moving the object itself by the motion control so that the object plane becomes the focal plane.

Also, according to the present invention, it is possible to acquire a full image of an inner surface only by moving a trajectory of an object without moving an optical system, thereby maximizing an inspection speed and acquiring an image even if a curved surface such as a round or a circle is encountered.

In addition, according to the present invention, since the light is illuminated in parallel or oblique direction with respect to the surface to be inspected, the amount of light reflection on the clean inner surface and the protruding portion is changed due to light scattering at the protruding portion, thereby simplifying image analysis.

2 is a block diagram of an optical apparatus for obtaining an inner image according to the present invention.
FIG. 3 and FIG. 4 are explanatory views of installation conditions of an optical apparatus for obtaining an inner image according to the present invention;
Fig. 5 is an explanatory diagram for setting the installation conditions of the camera sensor unit, the lens, and the object plane of the optical device according to the invention; Fig.
6 (a) and 6 (b) are views for explaining the installation of the optical system according to the present invention;
7 is an explanatory diagram for explaining a lighting direction of the present invention;
FIG. 8 is an explanatory view of movement and inspection of an object by motion control according to the present invention; FIG.
9 (a) and 9 (b) are application examples of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 2 is a block diagram of an optical apparatus for acquiring an inner image according to the present invention, and FIG. 3 is an explanatory diagram of an installation condition of an optical apparatus for acquiring an inner image according to the present invention.

As shown therein,

A camera sensor unit 10 for capturing an image of a target surface 1a for acquiring an image of the target object 1;

A lens (20) disposed between the camera sensor unit (10) and the object surface;

A variable lens barrel 30 for integrally connecting the camera sensor unit 10 and the lens 20 and adjusting the distance between the camera sensor unit 10 and the lens 20 and the inclination angle of the camera sensor unit 10, )and;

A motion control means (40) for loading the object (1) at a photographing position and moving the object by motion control so that the object surface (1a) of the object (1) coincides with the focal plane;

And an illumination device (50) for illuminating the object surface (1a) of the object (1).

The variable lens barrel 30 is provided with a distance and angle adjusting means for adjusting the distance between the lens 20 and the camera sensor unit 10 and the angle between the lens 20 and the camera sensor unit 10 .

The angle adjusting means is configured to tilt the camera sensor unit 10 to adjust the angle between the lens and the camera sensor unit.

Further, according to the present invention,

The distance between the lens and the sensor (V), the distance between the lens and the sensor (V), the distance between the lens and the hinge (J) And the angle? Of the surface satisfies the following formula (1).

Figure 112015070486791-pat00002
... (1)

3 and 4 are explanatory views of an installation condition of an optical device for acquiring an inner image according to the present invention, and FIG. 5 is a view showing a relationship between a camera sensor part of the optical device according to the present invention, And setting the installation conditions so as to be obtained.

5 (a), the camera sensor unit 10 is a line sensor, and the lens 20 is a lens having a focal length f. An angle? And a distance v connecting an extension line of the camera sensor unit 10 and an extension line of the lens 20 are set. At this time, the point at which the two extension lines meet is referred to as A, and the portion of the optical system in which the image is focused exists necessarily on a plane passing through the point A.

Therefore, the present invention is characterized in that the variable lens barrel 30 is rotatable with respect to the center of the camera sensor unit 10, and the angle of attachment of the lens 20 and the distance between the lens 20 and the camera sensor unit 10 v so that the angle &thetas; and the distance v are adjusted according to the setting conditions.

A straight line parallel to the extension line of the lens 20 at the focal length f of the lens 20 and a straight line parallel to the extension line of the camera sensor 10 at the center of the lens 20 Find the point B where they meet. At this time, the distance between the center of the lens 20 and the point B is equal to J.

Figure 112015070486791-pat00003

As shown in Fig. 5 (c), when a straight line passing through the points A and B is connected, this point forms a plane of sharp focus.

According to this condition, the lens angle of the variable lens barrel 30 and the distance between the lens and the camera sensor unit are adjusted as shown in FIGS. 5A to 5C.

6 (a) and 6 (b) are explanatory diagrams of the installation of the optical system according to the present invention.

As shown in FIG. 6, the position of the optical system, which is an integral structure of the camera sensor unit 10 and the lens 20, is adjusted so that the focal plane passing through the points A and B coincides with the inspection plane (object plane) of the inspection object. This relation condition is established so as to satisfy the condition of Equation (1).

On the other hand, the present invention provides a lighting device (50) for illuminating a target surface (1a) of a target object, wherein the lighting device is installed such that parallel or oblique illumination is possible. That is, the lighting device 50 is configured to include tilting means to make the illumination direction parallel or inclined.

7 is an explanatory view for explaining the illumination direction of the present invention.

As shown in (a) of FIG. 7, the illumination device 50 is located at the upper end of the surface to be inspected a of the object, and when projections or protruding foreign objects protrude from the object surface 1a, And a tilting means 51 for adjusting the tilting angle. As shown in (B) of FIG. 7, the incidence angle of the illumination is adjusted by adjusting the vertical inclination within the angle range of the optical axis of the camera optical system at an angle parallel to the inspection target surface 1a.

In addition, the present invention comprises a motion control means (40) for moving a target object such that the target surface coincides with the focal plane by movement through motion control.

Fig. 8 is an explanatory view of movement and inspection of an object by motion control according to the present invention. Fig.

An optical system including a camera sensor unit 10 and a lens 20 and a variable lens barrel 30 is provided so as to be opposed to the object surface 1a and the illumination unit 50 is installed at the upper portion of the object surface 1a , And a motion control means (40) for moving the object plane (1a) by the motion control so as to coincide with the focus plane of the optical system is provided. The image acquired by the camera sensor unit 10 of the optical system is acquired by the image acquisition unit in the inspection image reading apparatus 100 and is subjected to image processing by the image processing unit, .

The motion control means 40 is constituted by an x-axis, a y-axis and a rotation axis so that the inspection target surface 1a can be moved in a motion-controlled manner so as to always coincide with the focal plane of the optical system. Therefore, it is possible to acquire an image on both a straight line surface and a curved line surface.

9A and 9B are diagrams for explaining application examples of the present invention. In the case of acquiring an inner surface image of a rectangular frame as shown in Fig. 9A, the focal plane of the inner surface of the frame is divided into two regions, It is not necessary to move the optical system up and down, and the entire image can be obtained by motion-moving the object. Likewise, in the case of a circular inner surface as shown in FIG. 9 (B), the entire upper and lower portions of the inner surface become the focal plane, and the inner surface full image can be obtained by rotating the object once by motion control.

Therefore, the present invention can acquire and inspect an inner surface image even in the cases of (a) and (b) of FIG. 9 in which the optical system can not be placed parallel to the object plane as well as the inner surface image, It is possible to obtain the entire inner surface image only by moving it by the motion control, and the whole inspection time can be remarkably shortened.

1: object 1a: target face
10: camera sensor part 20: lens
30: variable lens barrel 40: motion controller
50: illuminating device 51: tilting means
100: Inspection image reading device

Claims (5)

An optical apparatus for acquiring and inspecting an image of an object to be inspected,
A camera sensor unit 10 for capturing an image of a target surface 1a for acquiring an image of the target object 1;
A lens (20) disposed between the camera sensor unit (10) and the object surface;
A variable lens barrel 30 for integrally connecting the camera sensor unit 10 and the lens 20 and adjusting the distance between the camera sensor unit 10 and the lens 20 and the inclination angle of the camera sensor unit;
A motion control means (40) for loading the object (1) at a photographing position and moving the object by motion control so that the object surface (1a) of the object (1) coincides with the focal plane;
And an illumination device (50) for illuminating the object surface (1a) of the object (1)
The camera sensor unit 10 uses a line sensor;
A distance adjusting means for adjusting a distance between the lens 20 and the camera sensor unit 10 and an angle adjusting means for adjusting the angle of the lens and the camera sensor unit by tilting the camera sensor unit 10;
Further comprising a tilting means provided at an upper end of the object surface (1a) of the object to adjust an incident angle of illumination of the object surface (1a).
delete delete The optical apparatus according to claim 1,
The distance between the lens and the object surface (V), the distance between the lens and the hinge (J), the distance (V ') of the lens from the extension line of the sensor, and the distance between the sensor The angle? Of the object plane satisfies the following formula (1)
Figure 112015070486791-pat00004
... (1)
Is set so as to satisfy the following equation: < EMI ID = 1.0 >
delete
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102001342B1 (en) * 2018-08-14 2019-07-17 김정덕 Lens surface inspection device
KR20230120283A (en) 2022-02-09 2023-08-17 주식회사 에프에스티 Method and device for inspecting baseplate of a reticle pod
KR20230136979A (en) 2022-03-21 2023-10-04 주식회사 에프에스티 Device for inspecting a reticle pod

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Publication number Priority date Publication date Assignee Title
JP7182935B2 (en) * 2018-07-30 2022-12-05 キヤノン株式会社 IMAGING DEVICE, CONTROL METHOD AND PROGRAM
KR102196791B1 (en) * 2019-07-02 2020-12-30 마르코 카루소 Image acquisition device with adjustable focal plane
CN111551563A (en) * 2020-06-08 2020-08-18 苏州华兴源创科技股份有限公司 Multi-view detection device and system for display panel

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JP2011085494A (en) * 2009-10-16 2011-04-28 Nikon Corp Surface inspection device
JP2012211842A (en) * 2011-03-31 2012-11-01 Mitsutoyo Corp Shape measuring apparatus
JP2015115918A (en) 2013-12-16 2015-06-22 新日鐵住金株式会社 Imaging apparatus and imaging method

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US6236454B1 (en) * 1997-12-15 2001-05-22 Applied Materials, Inc. Multiple beam scanner for an inspection system
MY161697A (en) 2011-12-28 2017-05-15 Toray Battery Separator Film Polyolefin microporous film and method for producing same

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
JP2011085494A (en) * 2009-10-16 2011-04-28 Nikon Corp Surface inspection device
JP2012211842A (en) * 2011-03-31 2012-11-01 Mitsutoyo Corp Shape measuring apparatus
JP2015115918A (en) 2013-12-16 2015-06-22 新日鐵住金株式会社 Imaging apparatus and imaging method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102001342B1 (en) * 2018-08-14 2019-07-17 김정덕 Lens surface inspection device
KR20230120283A (en) 2022-02-09 2023-08-17 주식회사 에프에스티 Method and device for inspecting baseplate of a reticle pod
KR20230136979A (en) 2022-03-21 2023-10-04 주식회사 에프에스티 Device for inspecting a reticle pod

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