200927303 六、發明說明： 【發明所屬之技術領域】 本發明係關於液體材料之滴下方法及程式暨裝置，更 為關於對規酵列的複數個相同面板（亦稱紅件）之―: 基板，在和基板靖向的_下面之面岐滴下裝置平行地 移動，撗越存在於各面板間的非滴下對象區域而自基板之—200927303 VI. Description of the Invention: [Technical Field] The present invention relates to a liquid material dropping method and a program and apparatus, and more particularly to a substrate of a plurality of identical panels (also referred to as red parts) The device is moved in parallel with the drip device under the _ lower surface of the substrate, and the 撗 is present in the non-dropping object region between the panels from the substrate.
端至另—端途中砰止地—面使滴下裝置以直祕徑移動 另一面則僅在滴下對象區域滴下液體材料，如此 式暨装置。 夂程 【先前技術】 以往，在貼合二片相對㈣基板，而在其_成液晶層之 面板（cell)的步驟，係在貼合二片基板後❹真空槽 液晶之方法（真空注入法）。 料’對大㈣面板财有僅纽人時間就要錢一天以 上者。因此，近年來，隨著面板的大型化對提高生產性要求 等，而已被注目一種在貼合前於一邊的基板上滴下液晶後再 貼合之方法（滴下注人法）。此—方法由於不需要真空注入 法所需之注入口，而可節省注入口堵塞之密封步驟且可縮短 注入時間，因此，其可袼外提高生產性。 在一片基板上排列複數個面板時，係以複數個吐出頭來實 施滴下作業。在一片基板上排列複數列、複數行的面板時， 從控制上的觀點等’一般係在和列（或行）的平行之-條直線 097141556 200927303 上配設和列（或行）相同數量或大約數量的滴下頭，而在每- 行（或每-列）之行方向（或列方向）使其動作而實施滴下作 業。 此一滴下庄入法除了數十英对大小的大型面板外，也被使 ‘躲製造數料大小的小型面板之步驟。 ，綠物質滴下裝置，例如有在專敎獻丨賴示之具備 有：可檢測出液狀物質供給手段和基板的相對位置之手段； ©及依.、、、所檢測出之位置資訊而控制液狀物質的吐出時機之 控制手段；而控制手段其吐㈣機之㈣，係在使液狀物質 供給手段和基板作相對移動之期間中所實施；又，根據滴下 位置間隔所決定的液狀物質供給手段和基板的相對移動速 度及吐出時間間隔而使液狀物質供給手段和基板作相對 移動；又’液狀物質供給手段具有複數個儲備室，同時，其 具有液狀物質的取出與吐出並行動作之手段。 ❹（專利文獻D日本專利第3973209號公報 【發明内容】 (發明所欲解決之問題） 如專利文獻1虽使喷嘴和基板一面相對移動而一面實施 滴下動作時，噴嘴的移動速度有被吐出工作時間（cycle time)(實施1滴吐出所需要的時間）和滴下點間距離而受 限制之問題。例如’吐出工作時間（f。）為Q 2秒，最小滴 下點間距離（L。）為10_時，喷嘴的最大移動速度為50mm/ 097141556 200927303 秒（= Lo/f〇)。 亦即，滴下點間距離有長短的滴下圖案時，依據最小滴下 距離L。（滴下賴轉巾最短的輯）算㈣嘴之移 度時’則滴下點間距離在長的部位之移動時間變成障礙而有 生產性降低之問題。雖然亦非不能使基板上之噴 度成為可變動者，但因要控财體材料的落下點非常困難: 因此，必需使基板上之噴嘴的移動速度維持—定的移動速 度。例如，滴下點間距離L1為1〇,而滴下點間距離L2 為20咖’如此之滴下圖案時，則由於最小滴下距離為1〇咖， 因此，必需以50丽/秒移動喷嘴。如上述，滴下點間距離Μ 比L1大-定程度以上時，則其對生產性的影響很大。 ❹ 特別是如小型面板般在一片基板上排列多數個面㈣, 滴下數必然❹’而各滴下點間之_變狹窄，而在該情況 下則其生產性之降低很明顯。如對—片基板不浪費空間地排 列面板時’則面板間的距離也變狹窄，而因滴下點間隔變狹 窄’因此’也有同樣的情形發生。 - 為了解決上述課題，本發明之目的為使噴嘴和基板以一定 Λ 速度一面相對移動一面實施液體材料的滴下之技術中，提供 一種可使喷嘴的移動速度高速化，且可提高生產性之液體材 料之滴下方法及程式暨裝置。 (解決問題之手段） 第1發明，係在基板上排列複數個具有滴下點的工件，使 097141556 5 200927303 v、有吐出裴置的喷嘴以直線路徑複數次縱越或橫越在複數 個工件上而使喷嘴和基板以一定速度一面相對移動並一面 滴下液體柯料之方法中，其特徵為，在各個直線路徑滴下點 間的最紅距離（L。）不同時，於―個直線路徑中算出滴下點 '間之最短m離（Lo)、以及吐出裝置實施一次吐出所需要之 (〇)，並依照Lo/fo而在各個直線路徑設定嘴嘴和基 板的相對移動速度，如此的液體材料之滴下方法。 €> 、第2發明’使在第i發明中’在工件具有複數個滴下點時， ;喷嘴之—個直線路徑之移動中，設定對一個工件實施一次 吐出之滴下順序’而在其滴下順序中依照最短距離CL〇)而 6又疋噴嘴和基板之相對移動速度，如此為其特徵。 第3發明’係在基板上排列複數個具有複數個滴下點之工 件，使具有吐出裝置的噴嘴以直祕徑複數切越或橫越在 複數個工件上而使喷嘴和基板以一定速度一面相對移動一 面滴下液體材料之方法中，其特徵為，在喷嘴之—個直線路 徑之移動中，設定對一個工件實施一次吐出之滴下順序，在 -其^下m序中算出最短距離（⑹及吐出裝置實施—次吐出 '所需要之時間（f〇)，而依照L〇/f〇設定嘴嘴和基板的相對 移動速度，如此的液體材料之滴下方法。 第4發明’係在第2或第3發明十，喷嘴在一列或一行的 二點上以直線路徑之移動時，在—個工件中僅以和_歹; 饤的滴下點數相同的次數，設定喷嘴以直線路徑移動一列 097141556 6 200927303 或一行之滴下順序。 板系在第1至4項中任一項之發明中，算出在基 板之縱方向以直線路徑移動所需要 橫方“聽路郷動㈣要之時間，从基板上之 2蚊直線路徑之移動方向 而依照所算出之時間 ❺ 巾:=:，係為在液體材料之滴下I置實施第1至5發明 發明的液體材料之滴下方法的程式。 第7發明係一種液體材滴 ㈣液體材料之喷嘴的吐出裝置:及，載置具備有:具有可 =吐出裝置和平台相對移動之驅動機構;？=及等 其特徵為，前述控制部，在具有複數個被 _在基板上的滴下點之卫件上，以具有吐 直線路徑複數次縱越或橫越而使喷嘴和基板以：在 參 ==面_體材料時，在各個直線路徑滴； 的最短距離α〇)不同時，在一個直線路徑 之最短距離u〇)及吐出裝卜欠吐出所^二: 而依照L〇/f〇在各個直線路徑設定嘴嘴和基板的相對移動 速度，如此為特徵之液體材料之滴下襞置。 第8發明’係在第7之發明中，前述控制部，當工件具有 複數個滴下點時’在嘴嘴之—個直線路徑之移動中，設定對 -個工件實施-次吐出之滴下順序，而在其滴下順序=依照 最短距離（Lo)設定嘴嘴和基板之相對移動速度。 097141556 7 200927303 第9發明係一種液體材料之滴下裝置，其具備有：具有可 吐出液體材料之喷嘴的吐出裝置；及，載置基板之平台；及， 可使0土出裳置和平台相對移動之驅動機構；及’可控制此等 動作之控制部；其特徵為 ，前述控制部’在具有複數個被排 列於基板上的複數個滴下點的工件上，以具有吐出裴置的喷 嘴在直線路徑複數次縱越或橫越而使喷嘴和基板以一定速 度一面相對移動一面滴下液體材料之時，使喷嘴在一個直線 ❹路徑之移動中，設定對一個 工件實施一次吐出之滴下順序， 而在其滴下順序中算出最短距離（Lo)及吐出裝置實施一次 吐出所需要之時間（f〇)，並依照Lo/fo而設定喷嘴和基板 之相對移動速度，如此為特徵之液體材料之滴下裝置。 第10發明，係第8或9項之發明中，前述控制部係，喷 嘴在一列或一行的滴下點上以直線路徑移動時，在一個工件 中僅和一列或一行的滴下點數相同的次數，設定噴嘴在一列 ❹或一行以直線路徑移動之滴下順序。 第11發明，係在第7至10項中任一項之發明中，前述控 制部係’算出基板上在縱方向以直線路徑移動所需要之時; •及基板上在橫方向以直線路徑移動所需要的時間，並依照所 异出之時間決定直線路徑之移動方向，如此為其特徵。 第12發明，係在第7至π項中任一項之發明中，&、 T，月述吐 出裝置係以和具有吐出口之喷嘴連通的計量叫^ π甸隹、接滑 動之柱塞按所希望量移動而吐出液體材料，如此為其特俨 097141556 0 200927303 (發明效果） 根據本發明，可使噴喈+ 貧灣之移動速度增大，且在滴下塗佈 可使生產性提高。 【實施方式】 3個圖案之例說明本發明之實施形 如圖1所示以一行排列 態。 (滴下對象）From the end to the other end, the grounding surface allows the dripping device to move in a straight path. On the other side, the liquid material is dropped only in the dropping object area.先前程[Prior Art] In the past, a method of laminating two opposing (four) substrates and a cell of the liquid crystal layer is a method of laminating the vacuum cells after bonding two substrates (vacuum injection method) ). It is expected that the money for the big (four) panel will only cost more than one day. For this reason, in recent years, with the increase in the size of the panel to improve the productivity, etc., attention has been paid to a method in which the liquid crystal is dropped on the substrate before the bonding and then adhered (dropping method). This method improves the productivity by eliminating the need for the injection port required for the vacuum injection method, thereby saving the sealing step of the plugging of the injection port and shortening the injection time. When a plurality of panels are arranged on a single substrate, a plurality of ejection heads are used to perform the dropping operation. When a plurality of columns of a plurality of rows and a plurality of rows are arranged on a single substrate, from the viewpoint of control, etc., generally, the number of columns (or rows) is the same as that of the parallel line-line 097141556 200927303 of the column (or row) or Approximately the number of drops is dropped, and the dropping operation is performed by moving in the direction of each row (or column direction) (or column direction). In addition to the large panels of tens of inches in size, this drop-in method is also a step to hide the small panels of the size. The green substance dropping device, for example, is provided with a means for detecting the relative position of the liquid material supply means and the substrate; and controlling the position information detected by . The control means of the discharge timing of the liquid substance; and the control means (4) of the spit (4) is carried out during the period in which the liquid substance supply means and the substrate are relatively moved; and the liquid is determined according to the interval of the dropping position The liquid material supply means and the substrate are relatively moved by the relative movement speed of the material supply means and the substrate and the discharge time interval; and the liquid substance supply means has a plurality of storage chambers, and at the same time, the liquid substance is taken out and discharged. The means of parallel action. (Problems to be Solved by the Invention) In Patent Document 1, when the nozzle and the substrate are relatively moved while moving, the movement speed of the nozzle is discharged. The cycle time (the time required to perform one drop of discharge) and the distance between the drops are limited. For example, 'discharge work time (f.) is Q 2 seconds, and the minimum drop point distance (L.) is At 10_, the maximum moving speed of the nozzle is 50mm/ 097141556 200927303 seconds (= Lo/f〇). That is, when the dropping pattern has a long distance between the points, the minimum dropping distance L is based on the minimum dropping distance. ()) (4) When the mouth is moved, the moving time of the distance between the dropping points becomes a hindrance and the productivity is lowered. Although the degree of spray on the substrate cannot be changed, it is necessary. It is very difficult to control the falling point of the material: Therefore, it is necessary to maintain the moving speed of the nozzle on the substrate at a constant moving speed. For example, the distance L1 between the dropping points is 1 〇, and the distance between the dropping points is L2. When the pattern is dropped by 20 cafés, since the minimum dropping distance is 1 〇, it is necessary to move the nozzle at 50 liters/second. As described above, when the distance between the dropping points is larger than L1, it is more than It has a great influence on productivity. ❹ In particular, if a large number of panels are arranged on a single substrate (4), the number of drops is inevitably 而 and the gap between the drops is narrow, and in this case, the productivity is The reduction is remarkable. If the panel is arranged without wasting space on the substrate, the distance between the panels is also narrowed, and the same is true because the spacing of the dropping dots is narrowed. Therefore, in order to solve the above problems, the present invention has been made. The purpose of the method is to provide a method for dropping a liquid material which can increase the moving speed of a nozzle and improve the productivity, and a method and a device for dripping a liquid material while moving the nozzle and the substrate at a constant speed. (Means for Solving the Problem) According to the first aspect of the invention, a plurality of workpieces having dripping points are arranged on a substrate, and 097141556 5 200927303 v A method in which a linear path is vertically or horizontally traversed over a plurality of workpieces to relatively move the nozzle and the substrate at a constant speed while dropping the liquid material, and is characterized in that the reddish distance between the points is dropped on each straight path. (L.) At the same time, the shortest m-off (Lo) between the dripping points and the (〇) required for the discharge device to perform one discharge are calculated in one straight path, and are set in each straight path in accordance with Lo/fo. The relative movement speed of the nozzle and the substrate, the dropping method of the liquid material. [J], the second invention 'in the i-th invention, when the workpiece has a plurality of dropping points; the movement of the straight path of the nozzle In the case of setting the dropping order of one ejection to one workpiece, and the relative moving speed of the nozzle and the substrate in accordance with the shortest distance CL〇 in the dropping order, it is characterized by this. According to a third aspect of the invention, a plurality of workpieces having a plurality of dropping points are arranged on a substrate, and a nozzle having a discharge device is cut at a plurality of straight paths or traversed over a plurality of workpieces so that the nozzle and the substrate are opposed to each other at a constant speed. In the method of moving the liquid material while dropping, the movement sequence of one nozzle is set in the movement of the straight path of the nozzle, and the shortest distance is calculated in the m-order ((6) and the discharge. The device performs the time required for the first discharge (f〇), and sets the relative movement speed of the nozzle and the substrate according to L〇/f〇, such a method of dropping the liquid material. The fourth invention is based on the second or the second 3 invention ten, when the nozzle moves in a linear path at two points of one column or one row, the nozzle is set to move in a straight path by a line of the same number of times as the number of drops of 歹 歹; 097 097141556 6 200927303 In the invention of any one of the items 1 to 4, the time required to move in a linear path in the longitudinal direction of the substrate is calculated as "the time required to listen to the road (4). The method of applying the dropping method of the liquid material according to the first to fifth inventions of the present invention to the dropping of the liquid material is based on the calculated time of the movement of the two mosquitoes on the substrate. The invention relates to a discharge device for a nozzle of a liquid material droplet (four) liquid material, and a mounting mechanism including: a drive mechanism capable of relative movement of the discharge device and the platform; ?= and the like, wherein the control unit has a plurality of The nozzle and the substrate are placed on the guard member of the dropping point on the substrate by a plurality of times of traversing or traversing, and the nozzle and the substrate are placed on each straight path when the surface is in the surface of the surface. The shortest distance α〇) is not the same, the shortest distance u〇 in a straight path, and the spitting out the discharge. 2: According to L〇/f〇, the relative movement speed of the nozzle and the substrate is set in each straight path, so According to a seventh aspect of the invention, in the seventh aspect of the invention, in the control unit, when the workpiece has a plurality of dropping points, the movement of the linear path of the nozzle is set to - Workpiece implementation - times The order of dropping is discharged, and in the order of dropping = the relative moving speed of the nozzle and the substrate is set according to the shortest distance (Lo). 097141556 7 200927303 The ninth invention is a dripping device for a liquid material, which is provided with: a liquid material capable of being discharged a nozzle discharge device; and a platform on which the substrate is placed; and a drive mechanism that can move the ground and the platform relative to each other; and a control unit that can control such operations; and the control unit In a workpiece having a plurality of dropping points arranged on a substrate, a nozzle having a discharge port is vertically or traversed in a linear path, and the liquid material is dropped while the nozzle and the substrate are relatively moved at a constant speed. At this time, in the movement of the straight line ❹ path, the dropping order of one discharge to one workpiece is set, and the shortest distance (Lo) and the time required for the discharge device to perform one discharge are calculated in the dropping order (f〇 ), and according to Lo / fo to set the relative movement speed of the nozzle and the substrate, such a feature of the liquid material dripping device. According to a tenth aspect of the invention, in the eighth aspect or the ninth aspect, the control unit is configured to move the same number of times of one row or one row in a workpiece when the nozzle moves in a linear path at a dropping point of one column or one row. , set the order in which the nozzles are moved in a linear path in a row or row. According to a seventh aspect of the invention, the control unit is configured to calculate a time required for the substrate to move in a linear path in the longitudinal direction; and to move the substrate in a linear path in the lateral direction. The time required, and the direction of movement of the straight path is determined according to the time of the eclipse, which is characterized by this. According to a twelfth aspect of the invention, in the invention of any one of the seventh to the third aspect, the <, T, the monthly discharge device is connected to the nozzle having the discharge port, and is connected to the nozzle The liquid material is discharged by moving in a desired amount, so that it is particularly suitable for 097141556 0 200927303 (Effect of the Invention) According to the present invention, the moving speed of the sneeze + poor bay can be increased, and the productivity can be improved by dripping coating. [Embodiment] An example of three patterns will be described in the form of a row as shown in Fig. 1. (dropping the object)
❿ 在圖1中，以P1〜pl9 + _ U表示滴下點103之位置。 在基板m其被排列有複數片的面板1〇2，而對每一片面 板縱橫各別隔開L2_ 間1^设置四點的滴下點103。各面板 102各以間距L3相隔的# π， 的位置被配置。又，鄰接縱方向之2 片面板102的滴下點; 叫之最短滴下距離L〇為L1(L1<L2)。 (滴下路徑） ()藉1知的方法在面板職〜1G2C上實施滴下時，喷 嘴係在如圖2之箭頭的路徑移動。圖2中實線表示滴下動 作’虛線則表示僅有移動的動作。此處，最小滴下距離L〇 為L2。 圖2所示之方法，係在母片面板1 〇2實施滴下動作。亦即， 首先在第1片面板102A從P1朝P2、pii、pi2實施滴下。 又，在面板102A滴下完成後，自終了點pi〗朝第2片面板 102B之開始點P3移動。其次，在第2片面板1〇2B&p3朝 P4、P9、Pi〇實施滴下。在面板i〇2b滴下終了時，自終了 097141556 9 200927303 點P10朝第3片面板102C之開始點P5移叙 s 。最後，|始 片面板102C從P5朝P6、P7、P8實施滴卞 第3 r，而完成動作 在此一方法中，於被設在1片面板上少 ° 工< 4個全部滴 103’必需使喷嘴的移動方向變動，而由於 點 么在各個滴下點1〇3 喷嘴之移動瞬間停止，喷嘴的加速·減速 * κ時間損失很大， 因此，要使全體的滴下時間（工作時間）縮短甚為困難 ❹ (B)根據本發明之第一態樣當以如圖2相同的:下:而實 施滴下時其滴下路㈣如圖3所示。此處，最小滴下距離 Lo 為 L1 〇 在本發明之第一態樣中，係自基板1〇1之—端至另一端以 直線路徑移動，而橫越過面板職和面板聰之間或面板 刪和面板職之間之非滴下區域1Q5。從開始點之ρι 朝、P3、P4、P5、P6 一面使喷嘴移動而一面實施滴下。 接著從P7向相反方向朝p8、p9、pi〇、m、打2使喷嘴一 移動而面實施滴下。在第一態樣中於p卜P6間及p7 ^12間可使噴嘴之移動速度保持一定，且由於噴嘴的移動 /王長也比（A)為短，因此，其比（A)之方法可縮短全體 之滴:所需要的時間（工作時間，tacttime)。 距第*癌樣特别有利之效果’係在每行（或每列）最小滴下 £離為不同的情形。例如’第-行（對應於圖3之P1〜 的最〗’商下距離Lo為l〇mm，第2行（對應於圖3之P7 )的最小滴下距離Lo為30mm時，理論上可使第二行 097141556 200927303 之噴嘴的移動迷度構成為第 :。：如和在行方向以直線路徨移動時的最小滴;:3 離^^ =而在列方向以直線略經移動時的最小滴下距 -提的嘴2 ，麻财向以直㈣狀移動，以 杈四噴鳴之移動速度，如此亦可。 从 -HE據本翻之第二減而對和圖2__下 滴下時之滴下路役為如圖4所示 實施 ❹為L3。 此處’最小滴下距離Lo ❹ 上述（B)之態樣中，由於最小滴下距離L。為圖i之距離 L1 ’因此，喷嘴移動速度之高速化有其界限。因而，在第— 態樣中，自基板之-端至另-端以直線路徑移動之單向移: 中’在-片面板1〇2實施各-滴之滴下而使最小滴下距離 L〇變長。亦即，在第！次之直線路徑的移動以ρι、p3、朽 的順序實施滴下，而在第2次之直線路徑的移動以p6、p4、 P2之順序實施滴下。亦即，喷嘴在基板上的縱方向一來回 時則完成排在縱方向的滴下點（一行上之滴下點）之、高下 接著使喷嘴移動至鄰行，以P12、Pl〇、P8之順序滴;下再 折回而以P7、P9、P11之順序實施滴下。 以下以具體例說明第二態樣之效果。例如，在圖丨中li 為10mm，L2為20mm。則噴嘴之移動速度在理論上可成為3 倍（=L3/L1)。另一方面，由於直線路徑之移動次數為2倍， 因此，如不考慮折回所需的時_’财說時_短之效果 097141556 11 200927303 為1. 5倍。 固直線路徑上，如各面板具有2個滴下點之滴下圖 的1 9徂考慮折回時間時’L3/L。比在直線路徑之移動次數 則了一^上’最好係丨.5倍以上，而更好是2.0倍以上時， 則可^二態樣可達财利之效果。 ❹ 0直線路授上’如各面板具有3個以上的滴下點之滴 -、亦可持同樣的看法。在—個直線路#上滴下點數如有 10個以上時，L3/L。比在直線路徑之移動次數的1.6倍以 上，最好為2.4倍以上，更好為3.2倍以上時，則可說第二 態樣可達到有利之效果。 以下雖然藉實施例詳細說明本發明，但本發明並不受限於 任一實施例。 [實施例] (滴下裝置） 圖5係為了實施本實施例的方法之滴下裝置5〇1的概略斜 視圖。 本實施例之滴下裝置501，其具備有：可滴下液體材料之 複數個吐出裝置601;及，可載置被滴下液體材料的基板ιοί 之平台502;及，可使配設吐出裝置601之平台502上朝χγζ 方向相對移動之XYZ驅動機構503。在本實施例中，雖然設 有3個吐出裝置601，但其安裝數量可依照基板101的大小 或面板102的數量而變更，例如，其可設置2個以下或4 097141556 12 200927303 個以上均可 本實施例之吐出装置601，係使密接於計量管内而進退移 動之柱塞高速地進出移動以自吐出口飛滴（嘴滴 = 料之柱塞型的吐出裝置。 材 如圖6所示’吐出裝置6〇1，其具備有：管形狀的計量部 602 ;及，内接於計量部6〇2之柱塞6〇3 ;及具有吐出口 611之喷嘴604 ;及，連通·遮斷計量部6〇2與噴嘴之 ® 吐出閥605 ;及，貯留液體材料之貯留容器606 ;及，連通. 遮斷貯留容器606與計量部6〇2之液體供給閥6〇7 ;及，使 螺桿軸608驅動而驅動柱塞6〇3之馬達609。 (吐出步驟） 自吐出裝置601之吐出步驟，係首先實施液體材料之填 充。首先，使柱塞603朝向連接至液體供給閥6〇7與計量部 602之孔610的附近且不超越之位置（在圖6中為比孔61〇 © 稍上方之位置）移動。然後，打開液體供給閥607 ,使貯留 容器606和計量部602連通，再使柱塞603後退移動。於是 •貯留容器606内的液體材料通過液體供給閥607流入計量部 602’而當柱塞603後退至最上端時即為填充終了。 其次’填充液體材料之吐出，係打開吐出閥6〇5，而因應 於柱塞603所希望之吐出量以實施進出移動。利用柱塞6〇3 之進出動作所作的吐出，係在急速加速後，使馬達609急遽 地停止，再急速地使柱塞603停止以實施。計量部602内的 097141556 13 200927303 液體材料’因柱塞603急速移動及急速停止所賦予之慣性力 而自喷嘴604前端被吐出。柱塞6〇3移動至最下端後，則關 閉吐出閥605，打開液體供給閥607，使柱塞6〇3後退移動 以填充液體材料。 如上所述，自貯留容器向計量部6〇2填充液體材料， -並使計量部602内的液體材料自喷嘴6〇4吐出，如此反覆實 施滴下作業。 ❹ 由於向計量部602内其可填充複數次吐出量的液體材 料，因此，填充至計量部6 〇 2内的液體材料之量例如可因應 於1片面板份或1片基板份等用途而作決定。 (滴下圖案之例） 圖7及圖8表示記有具體數值之滴下圖案的一例。圖7 表示基板101全體之圖，圖8係其一部份擴大之圖。 圖7表示之滴下圖案係在橫750mm、縱620_大小之基板 ❿101，配置縱20列、橫17行的h 5时大小之面板⑽。在i 片面板102上縱橫各以隔有1〇酿間隔而設定5點滴下點 •⑽。面板1()2所排狀_係向縱方向大約31咖，向橫方 向大約44mm。 (喷嘴之移動速度） 如考慮幻個吐出裝置601對一行的面板1〇2糊下動作 之情形時’在圖2〜圖4所說明之各別方法（上述〇〇〜（C) 之方法）中’滴下動作中的喷嘴之移動速度如下所示。又， 097141556 200927303 吐出週期f〇對每1次吐出係為〇. 2秒。 圖2例示之上述（A)的方法中，由於最小滴下距離l0 為10mm ’因此’最大速度為5〇mm/sec ( =Lo/f〇)。 圖3例示之上述（B)的方法中，由於第ni行及第n3行 之最小滴下距離Lo為l〇mm，因此，喷嘴之最大移動速度為 5(hnm/sec’由於第n2行之最小滴下距離[〇為31麵，因此， 喷0^之滴下日年移動速度為15 5mm/sec。 ❹ 圖4例示之上述（C)的方法中，由於第ηι〜η3之全部行 之滴下點間隔為31mm，因此，喷嘴之滴下時移動速度為 155mm/sec ° 又，由於基板101上之喷嘴6〇4的移動速度為一定，因此， 喷嘴604自起點之稍微前邊起移動，而在折回地點喷嘴6〇4 自基板101上超出而折回。 (工作時間） 當藉由上述（A)〜⑻之方法塗佈2()片面板時，自上 述速度所計算之滴下動作開始至終了為止所花的時間（工作 時間）為如下所示。 上述（A)之方法中，2〇片面板的工作時間為3〇·ι秒。 在此方法中，以all—al2—a21〜a31Hal3之_ 實施滴下。allm間之各關移動各別為大約2秒時， 則1片面板之塗佈時間大約為G 8秒。面板間之移動所花的 時間例如’ell和al3的距離大約為37mm時則為大約^ 097141556 15 200927303 秒。因此’ 20片面板之工作時間為（〇. 2 &χ2〇) + (0·74 秒 χ19) =3〇· 1 秒。 上述（Β)之方法中，20片面板的工作時間為27. 8秒。 在此方法中’以 all—al2—al3-^ai4+..->a22—a21— a31-»a32之順序實施滴下。al行和a3行之塗佈的工作時間 係（10〔丽〕x2〇) +(21〔咖〕xio)/^〔mm/sec〕“行 与24秒。a2行之塗佈的工作時間係（31〔咖〕χ19) /155 〔mm/sec〕与3.8秒。因此，20片面板之工作時間為24 + 3. 8秒= 27. 8秒。又，折回部份之移動大約為〇. 6秒時，則 20片面板之工作時間為27. 8秒+ 0.6秒X2==29秒。 a^cl38 上述（C)之方法中，20片面板的工作時間為19· 〇秒。 在此方法中，以 all — al3~-al5〜...4al4〇 ’ ^a338 花的:c al2—a21—a224 …—a220—a339—a337- ❿ — a340之順序實施滴下。在一個直線路徑之移動所 作時間係（31〔mm〕xl9) /155〔mm/sec'i μ 斤 Λ J ’°5. 8 争> β 丄 於al行和a3行在二個直線路經移動，a2行在 由 徑移動，因此，在直線路徑之移動次數為5次。個直線路 的工作時間為3. 8秒x5= 19. 0秒。又，力。w ’合計 行之折 〇. 6秒 秒 牡ai行、⑸ 回部份的移動大約為0.4秒，在a2行之折回大約 時’則20片面板的工作時間為19. 〇秒+ 2 〇秒二為 由以上的結果可確認依照本實施例之滴下方法 ’υ粆。 及（C)，其比滴下方法（Α)可縮短工作時間。、中上迷 097141556 16 200927303 又，勿庸贅言，利用嘴嘴604在直線路徑的移動使其在橫 方向實施，如此亦可縮翅工作時間。 以上說明之滴下方法僅為一例而已，但本發明並不受限於 此例。例如，根據所希望之液體材料的量而改變滴下點數亦 -可。又，料减滴數或對岐⑽體材料所擴散之情 •形等而改Μ下點之配置的情況。又，當然如基板或面板的 尺寸變更時’上述之數值亦會改變。 ❿（產業上之可利用性） 本發明可適用於液體材料自吐出裝置離開後接觸至工件 之型式的吐出方式者，例如，其可實施於在閥座使液體材料 自喷嘴前端飛出而衝突閥體之噴射式、連續喷射方式或依需 要量（demand)方式之喷注型式等。 【圖式簡單說明】 圖1表示本發明之滴下圖案例的說明圖。 © 圖2係說明以往的方法之滴下路經圖。 圖3係說明本發明之第一態樣的滴下路徑圖。 圖4係說明本發明之第二態樣的滴下路徑圖。 圖5係實施本實施例的方法之滴下裝置的概略斜視圖。 圖6係實施本實施例的方法之吐出裝置的概略圖。 圖7表示實施本實施例的方法之滴下圖案的―例之說明 圖。 β 圖8係圖7之一部份擴大圖。 097141556 17 200927303❿ In Fig. 1, the position of the dropping point 103 is indicated by P1 to pl9 + _ U. On the substrate m, a plurality of panels 1〇2 are arranged, and a dropping point 103 of four dots is provided for each of the panels in a vertical and horizontal direction. Each of the panels 102 is disposed at a position of #ππ separated by a pitch L3. Further, the dropping point of the two sheets 102 in the longitudinal direction is adjacent; the shortest dropping distance L〇 is L1 (L1 < L2). (Dropping path) () When the drip is performed on the panel member ~1G2C by a known method, the nozzle moves in the path of the arrow as shown in FIG. The solid line in Fig. 2 indicates the dripping action, and the broken line indicates the movement only. Here, the minimum dropping distance L 〇 is L2. In the method shown in Fig. 2, the dropping operation is performed on the mother panel 1 〇2. That is, first, the first sheet panel 102A is dropped from P1 toward P2, pii, and pi2. Further, after the completion of the dropping of the panel 102A, the movement from the end point pi to the start point P3 of the second sheet 102B is performed. Next, the second panel 1〇2B&p3 is dropped toward P4, P9, and Pi. When the panel i〇2b is dropped, the end of the 097141556 9 200927303 point P10 is shifted to the starting point P5 of the third panel 102C. Finally, the |slices panel 102C performs the third drip from P5 to P6, P7, and P8, and the completion of the operation is performed in one method, and is less on the one panel < 4 all drops 103' It is necessary to change the moving direction of the nozzle, and since the movement of the nozzle is stopped at the time of each drop point 1〇3, the acceleration/deceleration* κ time loss of the nozzle is large, so that the entire dripping time (working time) is shortened. It is very difficult. (B) According to the first aspect of the present invention, when the drip is carried out in the same manner as in Fig. 2, the dripping path (4) is as shown in Fig. 3. Here, the minimum dropping distance Lo is L1. In the first aspect of the present invention, it is moved from the end to the other end of the substrate 1〇1 in a straight path, and across the panel and the panel or between the panels Non-drop area 1Q5 between the panel and the panel. Dropping is performed while moving the nozzle from the starting point of ρι, P3, P4, P5, and P6. Then, from P7, in the opposite direction, p8, p9, pi, m, and 2 are moved so that the nozzle is moved and the surface is dropped. In the first aspect, the moving speed of the nozzle can be kept constant between p and P6 and p7^12, and since the movement/king length of the nozzle is also shorter than (A), the method of the ratio (A) is Can shorten the whole drop: the time required (working time, tacttime). A particularly advantageous effect from the *cancer sample is the case where the minimum drop in each row (or column) is different. For example, the 'first line (corresponding to the most recent P1 of Fig. 3) 'the lower distance Lo is l〇mm, and the minimum drop distance Lo of the second line (corresponding to P7 of Fig. 3) is 30 mm, theoretically The movement of the nozzle of the second line 097141556 200927303 is composed of:: the smallest drop when moving in a straight line in the row direction; 3 is the smallest when moving slightly in a straight line in the column direction Dropping the distance - the mouth 2 is lifted, and the money is moved in a straight (four) shape to move the speed of the four spurts, so that it can be subtracted from the second of the -HE according to the second and the bottom of the figure 2__ The drip road is implemented as shown in Fig. 4. The minimum drop distance Lo ❹ In the above (B), the minimum drop distance L is the distance L1 of the figure i. Therefore, the nozzle moving speed is The speeding has its limit. Therefore, in the first aspect, the one-way movement from the end-to-end of the substrate to the other end is performed in a straight path: in the 'in-sheet panel 1〇2, each drop-drop is applied The minimum drip distance L〇 becomes longer, that is, the movement of the linear path in the second time is performed in the order of ρι, p3, and decay, and in the second The movement of the linear path is carried out in the order of p6, p4, and P2, that is, when the nozzle is turned back and forth in the longitudinal direction on the substrate, the dropping point (the dropping point on one line) in the longitudinal direction is completed, and then the height is continued. Move the nozzle to the adjacent row, and drop it in the order of P12, P1〇, and P8; then fold back and perform the dropping in the order of P7, P9, and P11. The effect of the second aspect will be described below by way of a specific example. For example, in the figure The middle li is 10mm and the L2 is 20mm. The movement speed of the nozzle can be theoretically 3 times (=L3/L1). On the other hand, since the number of movements of the straight path is 2 times, if the folding back is not considered When the time _ 'financial statement _ short effect 097141556 11 200927303 is 1. 5 times. On the solid straight path, such as each panel has 2 drops of the drop of the figure below the figure 9 ~ consider the foldback time 'L3 / L. The number of movements in the straight path is one of the best 'more than 5 times, and more preferably more than 2.0 times, then the two-state can achieve the effect of profit. ❹ 0 straight line grants 'such as Each panel has more than three drop points - and can hold the same view. When there are 10 or more drops on the line #, L3/L is 1.6 times or more, preferably 2.4 times or more, and more preferably 3.2 times or more, in the linear path. The present invention will be described in detail below by way of examples, but the invention is not limited to any of the embodiments. [Examples] (Dropping device) FIG. 5 is a dripping method for carrying out the method of the present embodiment. A schematic oblique view of the device 5〇1. The dripping device 501 of the present embodiment includes a plurality of ejection devices 601 that can drip the liquid material, and a platform 502 on which the substrate ιοί to which the liquid material is dropped can be placed; The XYZ drive mechanism 503 on the stage 502 on which the discharge device 601 is disposed is relatively moved in the direction of χγζ. In the present embodiment, although three ejection devices 601 are provided, the number of mountings may be changed according to the size of the substrate 101 or the number of the panels 102. For example, it may be set to 2 or less or 4 097 141 556 12 2009 27303 or more. In the discharge device 601 of the present embodiment, the plunger that is in close contact with the inside of the measuring tube is moved in and out at a high speed to fly away from the discharge port (a nozzle type discharge device of the nozzle drop material is shown in Fig. 6). The discharge device 6〇1 includes a tube-shaped measuring unit 602, a plunger 6〇3 inscribed in the measuring unit 6〇2, and a nozzle 604 having a discharge port 611; and a communication/interruption metering a portion of the nozzles 605 and the nozzles of the nozzles 605; and a storage container 606 for storing the liquid material; and, communicating with the liquid supply valve 6〇7 that blocks the storage container 606 and the metering unit 6〇2; The motor 609 that drives the plunger 6〇3 is driven by the 608. (Discharge step) The discharge step of the discharge device 601 is first performed by filling the liquid material. First, the plunger 603 is oriented to be connected to the liquid supply valve 6〇7 and metered. The vicinity of the hole 610 of the portion 602 and not beyond The movement is made at a position slightly above the hole 61〇© in Fig. 6. Then, the liquid supply valve 607 is opened to allow the storage container 606 to communicate with the metering portion 602, and the plunger 603 is moved backward. Thus, the storage container 606 is in the storage container 606. The liquid material flows into the metering portion 602' through the liquid supply valve 607, and is filled when the plunger 603 is retracted to the uppermost end. Next, the discharge of the liquid material is opened, and the discharge valve 6〇5 is opened, and the plunger 603 is used. The discharge amount is desired to be moved in and out. The discharge by the plunger 6〇3 is rapidly stopped, and the motor 609 is suddenly stopped, and the plunger 603 is quickly stopped to be implemented. 097141556 13 200927303 The liquid material is discharged from the front end of the nozzle 604 due to the inertial force imparted by the rapid movement and rapid stop of the plunger 603. After the plunger 6〇3 is moved to the lowermost end, the discharge valve 605 is closed, and the liquid supply valve is opened. 607, the plunger 6〇3 is moved backward to fill the liquid material. As described above, the liquid material is filled from the storage container to the metering portion 6〇2, and the liquid material in the metering portion 602 is made from the nozzle. 6〇4 is discharged, and the dropping operation is repeated in this way. ❹ Since the liquid material can be filled in the metering unit 602 in a plurality of discharge amounts, the amount of the liquid material filled into the metering unit 6 〇 2 can be, for example, one piece. It is determined by the use of a panel portion or a substrate portion. (Example of Drop Pattern) FIGS. 7 and 8 show an example of a drop pattern having a specific numerical value. FIG. 7 shows a whole of the substrate 101, and FIG. Fig. 7 shows a panel (10) in which the dropping pattern is a substrate ❿101 having a width of 750 mm and a size of 620 Å, and is arranged at a length of 20 columns and 17 rows of h 5 . On the i-sheet panel 102, the dots are set at intervals of one brewing interval (1). The panel 1 () 2 is arranged in a row of about 31 coffee in the longitudinal direction and about 44 mm in the lateral direction. (The moving speed of the nozzle) When considering the case where the phantom discharge device 601 operates on the panel 1〇2 of one line, the respective methods described in FIGS. 2 to 4 (the method of the above 〇〇~(C)) The moving speed of the nozzle in the middle drop operation is as follows. Further, 097141556 200927303 The discharge cycle f〇 is 〇. 2 seconds for each discharge. In the method of the above (A) illustrated in Fig. 2, since the minimum dropping distance l0 is 10 mm', the maximum speed is 5 〇mm/sec (=Lo/f〇). In the method of the above (B) illustrated in Fig. 3, since the minimum dropping distance Lo of the ni-th row and the n-th row is l〇mm, the maximum moving speed of the nozzle is 5 (hnm/sec' due to the minimum of the n-th row The dropping distance [〇 is 31 faces, therefore, the moving speed of the day of the spray 0^ is 15 5 mm/sec. ❹ In the method of the above (C) illustrated in Fig. 4, the dot spacing of all the rows of the ηι to η3 is Since it is 31 mm, the moving speed of the nozzle drops is 155 mm/sec °. Since the moving speed of the nozzle 6〇4 on the substrate 101 is constant, the nozzle 604 moves from the front side of the starting point, and the nozzle is turned back at the point of return. 6〇4 is over and folded back from the substrate 101. (Working time) When the 2 () sheet is coated by the above methods (A) to (8), the flower is taken from the start of the dropping operation calculated from the above speed. The time (working time) is as follows. In the method of the above (A), the operating time of the two cymbal panel is 3 〇·ι sec. In this method, 滴 is performed as _all_al2—a21 to a31Hal3. When all the movements between allm are about 2 seconds, then one panel is painted. The time is about G 8 seconds. The time spent moving between the panels, for example, when the distance between ell and al3 is about 37mm, it is about ^ 097141556 15 200927303 seconds. Therefore, the working time of the 20 panels is (〇. 2 & Χ2〇) + (0·74 sec χ 19) = 3 〇 · 1 sec. In the above method, the working time of the 20-panel panel is 27. 8 seconds. In this method, 'all-al2-al3- ^ai4+..->a22—a21—a31-»a32 The order of the dripping. The working time of the coating of the a line and the line a3 is (10[丽]x2〇) +(21[咖]xio)/^ [mm/sec] "Line and 24 seconds. The working time of the coating of a2 line is (31 [coffee] χ 19) / 155 [mm/sec] and 3.8 seconds. Therefore, the working time of 20 panels is 24 + 3 8 seconds = 27. 8 seconds. Again, the movement of the folded back portion is approximately 〇. At 6 seconds, the working time of the 20-piece panel is 27. 8 seconds + 0.6 seconds X2 == 29 seconds. a^cl38 above ( In the method of C), the working time of 20 panels is 19·〇 seconds. In this method, all — al3~-al5~...4al4〇' ^a338 flowers: c al2—a21—a224 ...— A220—a339—a337- ❿ — the order of a340 is dripped The time made by the movement of a straight path (31 [mm]xl9) / 155 [mm/sec'i μ Λ J '° 5. 8 & β β al al al al al al al al al al al al al al al al al al al al al al After moving, the a2 line is moved by the path, so the number of movements in the straight path is 5 times. The working time of a straight line is 3. 8 seconds x 5 = 19. 0 seconds. Again, force. w 'Total line breaks. 6 seconds seconds, the ai line, (5) the back part of the movement is about 0.4 seconds, when the a2 line is folded back about 'the 20 pieces of the panel's working time is 19. leap seconds + 2 leap seconds Second, from the above results, the dropping method according to the present embodiment can be confirmed. And (C), which can shorten the working time than the dropping method (Α). In the middle, fans 097141556 16 200927303 Moreover, it is needless to say that the movement of the nozzle 604 in the straight path is carried out in the lateral direction, so that the working time can be reduced. The dropping method described above is only an example, but the present invention is not limited to this example. For example, it is also possible to change the number of drops depending on the amount of liquid material desired. In addition, it is the case that the number of drops is reduced or the distribution of the 岐(10) body material is changed. Further, of course, when the size of the substrate or the panel is changed, the above numerical value also changes. ❿ (Industrial Applicability) The present invention can be applied to a type of discharge method in which a liquid material comes into contact with a workpiece after leaving the discharge device, and for example, it can be implemented in a valve seat to cause liquid material to fly out from the nozzle front end. The injection type of the valve body, the continuous injection method, or the injection type according to the demand type. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is an explanatory view showing an example of a dropping pattern of the present invention. © Fig. 2 is a diagram showing the drop path of the conventional method. Fig. 3 is a view showing a dropping path of the first aspect of the present invention. Fig. 4 is a view showing a dropping path of the second aspect of the present invention. Fig. 5 is a schematic perspective view showing a dropping device for carrying out the method of the embodiment. Fig. 6 is a schematic view showing a discharge device for carrying out the method of the present embodiment. Fig. 7 is an explanatory view showing an example of a dropping pattern for carrying out the method of the embodiment. β Figure 8 is a partial enlarged view of Figure 7. 097141556 17 200927303
【主要元件符號說明】 101 基板 102 面板 102A 、 102B 、 102C 面板 103 滴下點 104 滴下區域 105 非滴下區域 501 滴下裝置 502 平台 503 XYZ驅動機構 601 吐出裝置 602 計量部 603 柱塞 604 喷嘴 605 吐出閥 606 貯留容器 607 液體供給閥 608 螺桿軸 609 馬達 610 孔 611 吐出口 097141556 18[Main component symbol description] 101 substrate 102 panel 102A, 102B, 102C panel 103 dropping point 104 dropping area 105 non-dropping area 501 dripping device 502 platform 503 XYZ driving mechanism 601 discharging device 602 measuring portion 603 plunger 604 nozzle 605 spout valve 606 Storage container 607 liquid supply valve 608 screw shaft 609 motor 610 hole 611 discharge port 097141556 18