JP4216034B2

JP4216034B2 - Liquid substance dropping apparatus and method

Info

Publication number: JP4216034B2
Application number: JP2002294158A
Authority: JP
Inventors: 眞一荻本
Original assignee: Shibaura Mechatronics Corp
Current assignee: Shibaura Mechatronics Corp
Priority date: 2002-10-07
Filing date: 2002-10-07
Publication date: 2009-01-28
Anticipated expiration: 2022-10-07
Also published as: JP2004122086A

Description

【０００１】
【発明の属する技術分野】
本発明は液晶等の液状物質滴下装置および方法に関する。
【０００２】
【従来の技術】
例えば、液晶を間に介在させた状態で２枚のガラス基板を貼り合わせる基板貼合わせ工程においては、貼り合わせの前段階で、液晶滴下装置を用いて一方のガラス基板の上に必要量の液晶を滴下することが行なわれる。
【０００３】
そして、従来、液晶滴下装置は、基板と液晶滴下ディスペンサとを相対的に移動させ、１枚の基板上に予め設定した滴下パターン、例えば、滴下位置を何行何列に配列し、各滴下位置での滴下量を何mlにするか等により決定されるパターンで液晶を滴下することとしている。
【０００４】
【発明が解決しようとする課題】
従来技術では、液晶滴下装置による基板への滴下動作の良否を当該基板への滴下作業中にチェックしていない。このため、液晶滴下装置の滴下量にばらつきを生じた場合、液晶の基板上に滴下すべき滴下量に対する実際の滴下量の過少、過多等に起因する不都合を後工程で発見するものになり、作業効率や歩留りの低下を招く。
【０００５】
本発明の課題は、基板への液状物質の滴下状態の良否を当該基板への滴下工程段階でチェックし、歩留りを向上することにある。
【０００６】
【課題を解決するための手段】
請求項１の発明は、液状物質を基板に滴下する液状物質滴下装置において、前記基板上の複数の滴下位置に対して設定された滴下量で液状物質を滴下する液状物質滴下手段と、この液状物質滴下手段と前記基板とを相対的に移動させる移動手段と、前記基板上の各滴下位置に滴下された液状物質の実際の滴下量を検出する液状物質検出手段と、この液状物質検出手段にて検出された前記液状物質の実際の滴下量を積算する積算手段と、前記基板に対して設定された滴下位置の位置情報と前記液状物質検出手段にて検出された各滴下位置に滴下された前記液状物質の実際の滴下量の情報とを記憶する記憶手段と、前記積算手段で得られた前記基板上に滴下された液状物質の実際の総量と前記基板上に対して滴下される前記液状物質の設定された総量とを比較し、前記実際の総量が前記設定された総量に対して不足していた場合には、前記記憶手段に記憶された情報に基づいて前記液状物質滴下手段と前記移動手段を制御し、前記基板に滴下された各液状物質によって基板面上に作用される荷重の合力が前記基板面上において作用する位置が前記基板における液状物質の滴下領域の中心位置に近づくように不足する量の液状物質を基板上に滴下する制御手段と、を有するようにしたものである。
【０００７】
請求項２の発明は、請求項１に記載の液状物質の滴下装置において、前記制御装置は、前記記憶手段に記憶された情報に基づいて、滴下量が不足している滴下位置に対して、当該滴下位置において不足している量の液状物質を滴下するように前記液状物質滴下手段と前記移動手段を制御するようにしたものである。
【０００８】
請求項３の発明は、請求項１又は２に記載の液状物質の滴下装置において、前記液状物質検出手段は、前記液状物質滴下手段が前記基板に液状物質を滴下する毎に前記基板に滴下された液状物質の実際の滴下量を検出し、前記積算手段は、前記液状物質検出手段が液状物質の実際の滴下量を検出する毎に検出された前記実際の滴下量を積算し、前記制御装置は、前記基板に対して所定数の前記液状物質を滴下した時点での、前記積算手段によって算出された積算滴下量と予定された滴下量の積算値とを比較し、前記算出された積算滴下量が予定された滴下量の積算値を超過している場合には、超過した液状物質の量に応じて、その後の滴下位置の数、および滴下位置に対する前記液状物質の滴下量の少なくともいずれか一方を減ずるように前記液状物質滴下手段と前記移動手段を制御するようにしたものである。
【０００９】
請求項４の発明は、液状物質を基板上に滴下する液状物質滴下方法において、基板に対して設定された滴下位置に液状物質を滴下する滴下工程と、前記滴下位置に滴下された液状物質の実際の滴下量を検出する検出工程と、前記検出工程で検出された実際の滴下量をその滴下量の前記液状物質が滴下された滴下位置の位置情報とともに記憶する記憶工程と、前記検出工程で検出された前記実際の滴下量を積算する積算工程と、前記積算工程で得られた前記基板に滴下された前記液状物質の実際の総量と前記基板に滴下される液状物質の設定された総量とを比較し、前記実際の総量の過不足を判定する第１の判定工程と、前記判定工程で前記実際の総量の不足が判定されたことを条件に、前記記憶工程で記憶された情報に基づいて、前記実際の滴下量が設定された滴下量に対して不足している滴下位置に、不足している量の液状物質を追加滴下する補正滴下工程と、を有するようにしたものである。
【００１０】
請求項５の発明は、請求項４に記載の液状物質の滴下方法において、前記検出工程は、前記滴下工程にて前記基板に前記液状物質が滴下される毎に実行され、前記積算工程は、前記検出工程にて前記液状物質の実際の滴下量が検出される毎に実行されるものであり、さらに、前記基板に対して所定数の前記液状物質を滴下した時点での、前記積算工程で算出された積算滴下量と前記液状物質が滴下された滴下位置に対する予定された滴下量の積算値とを比較し、算出された積算滴下量の過不足を判定する第２の判定工程と、この第２の判定工程で、前記算出された積算滴下量の超過が判定されたとき、超過した液状物質の量に応じて、その後の滴下位置の数、および各滴下位置に対する前記液状物質の滴下量の少なくともいずれかを減ずる工程と、を有するようにしたものである。
【００１２】
請求項１〜５の本発明によれば下記(a)の作用がある。
(a)基板に滴下された液状物質の実際の滴下量を検出し、この実際の滴下量から基板に滴下された液状物質の実際の総量を求め、これを基板に滴下される液状物質の設定された総量と比較し、実際の総量が不足していたときには、不足する量の液状物質を基板に滴下するようにしたので、液状物質の滴下量不足に起因する製品不良が防止でき、歩留りを向上させることができる。
【００１３】
請求項１の発明によれば下記(b)の作用がある。
(b)基板に滴下された液状物質の実際の総量が基板に滴下される液状物質の設定された総量に対して不足していたときには、記憶した液状物質の滴下位置と液状物質の実際の滴下量の情報に基づいて、前記基板に滴下された各液状物質によって基板面上に作用される荷重の合力が前記基板面上において作用する位置が基板における液状物質の滴下領域の中心位置に近付くように、不足する量の液状物質を基板上に滴下するようにしたので、基板上での液状物質の分布を滴下領域の中心に関してほぼ対称に得ることができ、基板上で液状物質の均一な広がりを得ることができる。
【００１４】
請求項２、４の発明によれば下記(c)の作用がある。
(c)基板に滴下された液状物質の実際の総量が基板に滴下される液状物質の設定された総量に対して不足していたときには、記憶した液状物質の滴下位置と液状物質の実際の滴下量の情報に基づいて、滴下量が不足する滴下位置に対して、その滴下位置において不足している量の液状物質を滴下するようにしたので、基板上での液状物質の分布を滴下領域の中心に関してほぼ対称に得ることができ、基板上で液状物質の均一な広がりを得ることができる。
【００１５】
請求項３、５の発明によれば下記(d)の作用がある。
(d)基板に対して所定数の液状物質を滴下した時点での、液状物質の積算滴下量が、液状物質の予定された滴下量の積算値を超過していたときには、その後の滴下位置の数、および滴下位置に対する液状物質の滴下量の少なくともいずれか一方を減ずるようにしたので、基板に滴下された液状物質の実際の総量が設定された総量を超過することによる不良を未然に防ぐことができる。
【００１６】
【発明の実施の形態】
図１は液状物質滴下装置を示す模式図、図２は液状物質滴下装置を示すブロック図、図３は基板への液状物質の滴下パターンを示す模式図、図４は滴下された液状物質の断面積の測定方法を示す模式図、図５は滴下された液状物質の滴下量の測定方法を示す模式図、図６は滴下された液状物質の断面積の測定方法の他の例を示す模式図である。
【００１７】
液状物質滴下装置１００は、図１に示す如く、基板１を搬送する基板搬送ステージ１０と、液状物質滴下ディスペンサ２０（液状物質滴下手段）と、液状物質検出装置３０（液状物質検出手段）とを有し、基板１上に予め定めた所定の滴下パターンで液晶等の液状物質（Ｌ）を滴下する。
【００１８】
基板１への液状物質の滴下パターンは、図３に示す如く、滴下領域内に多数の滴下位置２を何行何列で配列し、各滴下位置２での滴下量（体積又は質量）を例えば0.10mlにする等で決定する。
【００１９】
基板搬送ステージ１０は、Ｘ軸駆動部、Ｙ軸駆動部を備えた移動装置１１を有し、基板１を液状物質滴下ディスペンサ２０と液状物質検出装置３０のそれぞれに対しＸ方向とＹ方向に相対的に移動させる。移動装置１１の各駆動部はサーボモータにより構成される。
【００２０】
液状物質滴下ディスペンサ２０は、基板１上の滴下位置に対し設定された量の液状物質を滴下する。液状物質滴下ディスペンサ２０は、Ｘ軸駆動部、Ｙ軸駆動部、Ｚ軸駆動部を備えた移動装置２１を有し、基板搬送ステージ１０上の基板１に対しＸ方向とＹ方向とＺ方向に相対的に移動する。移動装置２１の各駆動部はサーボモータにより構成される。
【００２１】
液状物質検出装置３０は、液状物質が所定位置に滴下されたことを確認する。
この液状物質検出装置３０は、例えば、レーザ光の反射を利用して基板１や液状物質との対向間隔を計測可能な光学的距離センサを有して構成される。
【００２２】
そして、液状物質検出装置３０は、液状物質滴下ディスペンサ２０に対して、移動装置２２を介して、液状物質滴下ディスペンサ２０の周りを回動自在に設けられる。これにより、液状物質検出装置３０は、液状物質滴下ディスペンサ２０による基板１への滴下作業中、その計測位置が、液状物質滴下ディスペンサ２０に関して基板１に対する液状物質滴下ディスペンサ２０の相対移動方向（矢印Ａ方向）の後方側で、かつ相対移動方向において液状物質滴下ディスペンサ２０の吐出口２２とほぼ同一直線上となるように位置付けることが可能とされる。
【００２３】
液状物質滴下装置１００は、図２に示す如く、基板搬送ステージ１０、液状物質滴下ディスペンサ２０、液状物質検出装置３０を制御する制御装置４０を有する。制御装置４０は、マン・マシンインターフェイス４１とメインコントローラ４２を有し、搬送コントローラ４３を介して基板搬送ステージ１０（移動装置１１）を制御し、液状物質吐出コントローラ４４を介して液状物質滴下ディスペンサ２０（移動装置２１）を制御し、液状物質検出コントローラ４５を介して液状物質検出装置３０を制御する。
【００２４】
また、制御装置４０は、液状物質検出装置３０とともに、液状物質滴下ディスペンサ２０から基板１上に滴下された液状物質の滴下量を下記(a)〜(c)のいずれかの手法で測定する滴下量測定手段を構成する。
【００２５】
(a)滴下された液状物質における中央部を横切る直線に沿って切断した断面積を算出し、この断面積をもとに求めた液状物質の体積から液状物質の滴下量を得る。
【００２６】
すなわち、図５（Ａ）〜（Ｅ）に示すように、液状物質検出装置３０は、基板１に対する液状物質滴下ディスペンサ２０の相対移動方向（矢印Ａ方向）に対する後方側に位置しており、液状物質滴下ディスペンサ２０の矢印Ａ方向への移動によって、基板１上に滴下された液状物質上を通過する。このとき、液状物質検出装置３０は、図４に示すように、予め設定された距離間隔ｄ毎に基板１（液状物質）との対向間隔を計測する。
【００２７】
このときの各計測点Ｐ１、Ｐ２・・・Ｐｎでの測定値から、測定点毎の液状物質の高さｈ１、ｈ２・・・ｈｎを求める。液状物質の高さは、基板１との対向間隔の測定値Ｒ０を基準とすれば、各計測点Ｐ１、Ｐ２・・・Ｐｎでの測定値Ｒ１、Ｒ２・・・Ｒｎを測定値Ｒ０から減算することで容易に求めることができる。求めた特定点Ｐ１、Ｐ２・・・Ｐｎ毎の液状物質の高さｈ１、ｈ２・・・ｈｎと測定点間の距離ｄとに基づいて下記式(1)から液状物質の中央部の断面積Ｓを近似的に算出する。
【００２８】
Ｓ＝Ｑ１＋Ｑ２・・・＋Ｑｎ …(1)
Ｑｉ＝ｈｉ×ｄ（ｉ＝１〜ｎ）
【００２９】
そして、求めた断面積Ｓと、予め実験等により求めておいた、滴下された液状物質の中央部での断面積と液状物質の体積との相関関係に基づいて滴下された液状物質の体積を近似的に求める。求めた液状物質の体積から滴下量を得る。
【００３０】
(b)滴下された液状物質のほぼ中央を横切る直線と液状物質の端部とが交わる位置ａ、ｂを検出し、この端部位置ａ、ｂ間の距離をもとに求めた液状物質の体積から液状物質の滴下量を得る。
【００３１】
すなわち、液状物質検出装置３０を、基板１の表面との対向間隔以上であればＯＦＦ信号、基板１の表面との対向間隔より少であればＯＮ信号を出力するように設定しておく。そして、図５（Ａ）〜（Ｅ）に示すように、基板１に対する液状物質滴下ディスペンサ２０の相対移動によって、液状物質検出装置３０が基板１上に滴下された液状物質の上を通過する間、液状物質検出装置３０にて連続的に基板１（液状物質）との対向間隔を計測し、液状物質検出装置３０の出力がＯＦＦからＯＮに転じるタイミング（図５（Ｂ））、ＯＮからＯＦＦに転じるタイミング（図５（Ｄ））、およびそれぞれのタイミングでの液状物質検出装置３０と基板１との相対位置に基づいて、液状物質の端部位置ａ、ｂを求める。
【００３２】
そして、求めた端部位置ａ、ｂ間の距離と、予め実験等により求めておいた、滴下された液状物質の端部位置ａ、ｂ間の距離と液状物質の体積との相関関係に基づいて滴下された液状物質の体積を近似的に求める。求めた液状物質の体積から滴下量を得る。
【００３３】
ここで、手法(a)によれば、たとえば、環境温度の変化や液状物質の経時的な変化等により液状物質の粘度が変動し、滴下された液状物質の広がり具合が変化した場合であっても、広がり具合の変動に対する断面積の変化量は、液状物質の外形の変化量に比べて小さいことから、端部位置ａ、ｂの間隔に基づいて体積を求める手法(b)に比べて、滴下された液状物質の体積を正確に求めることができ、液状物質の滴下量を正確に求めることができる。
【００３４】
一方、手法(b)によれば、液状物質の２つの端部位置ａ、ｂを検出するだけで良いので、多数の測定点毎に液状物質の高さの計測を必要とする手法(a)に比べて制御装置４０の負担の軽減が図れ、液状物質の体積を迅速に求めることが可能となり、液状物質の滴下量を迅速に求めることができる。
【００３５】
これら(a)、(b)の手法は、品質重視、生産性重視等の生産計画等の情報から選択することができる。
なお、本実施の形態では、(a)の手法を選択した例で説明する。
【００３６】
また、制御装置４０は、液状物質検出装置３０により液状物質が正しく滴下されていないことを検出したときに、下記(A)〜(C)の補正動作により、基板１上の任意の位置に、任意の滴下量の液状物質を滴下する滴下補正手段を兼用する。
【００３７】
すなわち、制御装置４０は、上述の手法(a)を用いて、滴下位置２毎に滴下された液状物質の実際の滴下量を求め、求めた滴下量を積算部（不図示）において積算するとともに、滴下位置毎の滴下量を、記憶部（不図示）に各滴下位置の位置情報と対で記憶する。
【００３８】
基板１に対する液状物質の滴下が完了した時点で、積算部にて積算された液状物質の実際の滴下量の総量（滴下総量）と、予め設定された基板１上に滴下すべき液状物質の滴下量（基準滴下総量）とを制御装置４０の有する比較部（不図示）で比較し、滴下された液状物質の実際の滴下総量が基準滴下総量に達しているか否かを判定する。
【００３９】
実際の滴下総量が基準滴下総量に満たないと判定された場合には、不足分の液状物質を基板１上に滴下する。
【００４０】
具体例としては、例えば、次の(A)〜(C)のいずれかの手段を用いることが考えられる。
【００４１】
(A)基準滴下総量に対する実際の滴下総量の不足分を予め設定した領域内に滴下する。
【００４２】
基板１上に不足分の液状物質を滴下する領域を予め設定しておき、その領域内に不足分の液状物質をまとめて、或いは分割して滴下する。例えば、この領域としては、基板の中央部や、シール材３に沿う周辺部に設定することができる。
【００４３】
また、この領域は、基板１上に一つだけでも良く、また複数設けても良い。
さらに、記憶部に記憶された滴下位置情報と滴下位置毎の滴下量の情報に基づいて得られる滴下量が過小或いは過多の滴下位置の分布状態から不足分の液状物質を滴下する領域を決定するようにしても良い。この場合、不足分の液状物質を滴下することによって、基板１上に滴下されて分布された各液状物質によって基板１面上に作用される荷重の合力が基板１面上において作用する位置が、基板１上の滴下領域１ａの中心位置に近付くように液状物質を滴下することが考えられる。この場合、例えば、液状物質の滴下量の過小な滴下位置が多く存在する位置に不足分の液状物質を滴下する領域を設定するようにすれば良い。
【００４４】
なおここで、各液状物質によって基板１面上に作用される荷重の合力が基板１面上において作用する位置は、基板１上に滴下された各液状物質の平面視における重心位置（ｃ１、ｃ２、ｃ３、・・・ｃｎ）と各液状物質の重量（ｗ１、ｗ２、ｗ３、・・・ｗｎ）とに基づいて幾何学的な計算手法によって求めることが可能である。
【００４５】
(B)滴下量が不足する滴下位置２に不足分の液状物質を滴下する。
１滴あたり0.10mlの液状物質を60点滴下する滴下パターンの場合であって、記憶部に記憶された各滴下位置２とその滴下位置２での滴下量のデータから、滴下量が0.05mlの滴下位置２、つまり滴下量が0.05ml不足している滴下位置２が１箇所だけ存在していたことが確認された場合、滴下量が不足している滴下位置２と同位置に不足分である0.05mlの液状物質を滴下する。
【００４６】
なお、滴下量が不足する滴下位置２が複数存在するときには、各滴下位置２に不足分の液状物質を滴下する。
【００４７】
(C)滴下量が不足する隣接した複数の滴下位置を１つのグループとし、液状物質をまとめて滴下する。
【００４８】
１滴あたり0.10mlの液状物質を60点滴下する滴下パターンの場合であって、記憶部に記憶された各滴下位置２とその滴下位置２での滴下量のデータから、図３（Ａ）に示すように、滴下量が0.05mlの滴下位置２が２箇所（符号ａ、ｂ）隣接して存在していた場合、２つの滴下位置ａ、ｂの中間位置ｃに不足分である0.10mlの液状物質を滴下する。
【００４９】
また、図３（Ｂ）に示すように、２つの滴下位置ａ、ｂそれぞれの滴下量の不足分が同量ではなく、例えば、一方の滴下位置ａの不足分が0.04ml、他方の滴下位置ｂの不足分が0.08mlで、合計0.12mlであった場合、不足分の液状物質の滴下位置ｃを、２つの滴下位置ａ、ｂの間で、かつ各滴下位置ａ、ｂまでの距離の比が、不足分の液状物質の体積比の逆数となる位置、つまり、距離ａ−ｃ：距離ｂ−ｃが２：１（0.08：0.04）となる位置に設定し、この位置に0.12mlの液状物質を滴下する。
【００５０】
なお、本実施の形態においては、上述の手段（Ａ）を適用した例で説明する。
液状物質滴下装置１００は以下の如くに動作する。
【００５１】
(1)基板搬送ステージ１０により基板１を滴下開始位置に位置付ける。基板１は滴下領域の周囲にシール材３を塗布されている。
【００５２】
(2)液状物質滴下ディスペンサ２０を滴下開始位置に位置付ける。
(3)液状物質滴下ディスペンサ２０の液状物質吐出口に対し、基板１に定めた滴下パターンの各滴下位置を順に位置付けるように、移動装置１１により基板搬送ステージ１０を移動する。液状物質滴下ディスペンサ２０の液状物質吐出口から基板１の各滴下位置に液状物質を滴下する。つまり、制御装置４０は、移動装置１１の各駆動部を構成するサーボモータのエンコーダの出力値、および液状物質滴下ディスペンサ２０の移動装置の各駆動部を構成するサーボモータの出力値から基板１と液状物質滴下ディスペンサ２０との相対的な位置を検出しており、この位置情報と予め設定されている基板１上の滴下位置２の位置情報とに基づいて、各滴下位置２に液状物質滴下ディスペンサ２０が位置付けられるタイミングで液状物質滴下ディスペンサ２０に吐出指令を出力するのである。
【００５３】
(4)基板１に対する液状物質滴下ディスペンサ２０の相対移動方向に関して後方側に配置された液状物質検出装置３０は、上述(3)の滴下作業中、液状物質滴下ディスペンサ２０が液状物質を基板１上の所定の滴下位置２に滴下を完了してから次の滴下位置２に移動する間に、所定の滴下位置２に滴下された液状物質上を通過する。このとき、液状物質検出装置３０は、基板１或いは液状物質との対向間隔に応じた計測値を出力する。そして、制御装置４０は、液状物質検出装置３０の計測値に基づいて、上述の手法(a)により、液状物質の実際の滴下量を求め、求めた滴下量を記憶部に滴下位置の位置情報と対で記憶する。また同時に、積算部において各滴下位置の実際の滴下量を積算する。
【００５４】
なお、液状物質検出装置３０は、液状物質滴下ディスペンサ２０による滴下作業中、設定された間隔毎に基板１との対向間隔を常時計測するものでも、液状物質検出装置３０が滴下された液状物質上を通過する期間中とその前後の所定期間で対向間隔を計測するものでも、いずれでも良い。
【００５５】
(5)基板１の全ての滴下位置に対して液状物質の滴下が完了した後、比較部により、積算部にて積算された液状物質の実際の滴下総量と基準滴下総量とを比較する。
【００５６】
この比較の結果、実際の滴下総量が基準滴下総量の許容範囲内であれば、後工程、例えば、基板１の貼合わせ工程へ基板１を搬送する。
【００５７】
また、実際の滴下総量が基準滴下総量の許容範囲に満たない場合には、上述の手段(A)にて、基板１上の予め設定された領域に不足分の液状物質を滴下する。
【００５８】
また、実際の滴下総量が基準滴下総量の許容範囲を超えていた場合、後工程の基板１の貼合わせ時に、貼り合わされた２枚の基板間から液状物質が溢れ出る不具合が発生するおそれがあるため、警報等によりその旨を作業者に報知し、基板１の取り除きを促す。
【００５９】
本実施の形態によれば以下の作用がある。
▲１▼基板１への液状物質の滴下工程段階で、各滴下位置に滴下された液状物質の実際の滴下量を確認することにより、基板に対する液状物質の滴下総量の過不足を判定することができる。そして、滴下総量が過小であれば、不足する量の液状物質を基板に滴下し、過多であれば、警報を発し、その基板の基板貼り合わせ工程への搬送を阻止する。したがって、液状物質の滴下総量の過小、或いは過多に起因して貼り合わされた基板が不良となることが防止でき、この結果、歩留りを向上させることができる。
【００６０】
▲２▼液状物質滴下ディスペンサ２０と液状物質検出装置３０との移動手段を単一の移動手段２１により共通化した。従って、液状物質滴下装置１００を簡素化できる。
【００６１】
▲３▼液状物質の滴下総量が過小であった場合に、不足分の液状物質を滴下することによって、滴下された各液状物質によって基板１面上に作用される荷重の合力が基板１面上において作用する位置が基板１上の滴下領域１ａの中心位置に近付くように、不足分の液状物質を滴下する領域の位置を記憶部に記憶した滴下位置情報と滴下位置毎の滴下量の情報に基づいて設定すれば、基板貼り合わせ工程において、基板１上での液状物質の均一な広がりを得ることができるので、貼り合わされた基板の製品品質を向上させることができる。
【００６２】
つまり、各液状物質によって基板１面上に作用される荷重の合力が基板１面上において作用する位置が基板１上の滴下領域１ａの中心位置に対して位置ずれしていると言うことは、位置ずれの方向とは反対側において液状物質の滴下量が不足していることを示す。そこで、滴下領域１ａにおいて液状物質が不足している部分に対して不足分の液状物質を滴下することで、基板貼り合わせ工程での液状物質の均一な広がりを得ることができるのである。
【００６３】
なおこれは、手段(B)および(C)を用いた場合も同様である。
つまり、手段(B)においては、液状物質の滴下量が不足している滴下位置２に対してその滴下位置２で不足している量の液状物質を追加滴下することから、結果的に、各滴下位置２に対して設定された量の液状物質が滴下される。この結果、基板貼り合わせ工程で、各滴下位置２で液状物質が過不足なく広がることができるので、基板１上での液状物質の均一な広がりを得ることができるのである。
【００６４】
また、手段(C)においては、液状物質の滴下量が不足する隣接した複数の滴下位置を１つのグループとして、そのグループ内で不足している量の液状物質を、グループ内の各滴下位置２で不足している液状物質の量に基づいて決定した各滴下位置２に近接する位置に追加滴下することから、基板貼り合わせ工程で、前記グループ内での液状物質の広がり具合の不足を追加滴下した液状物質の広がりで補うことができるので、結果として、基板１上での液状物質の均一な広がりを得ることができるのである。
【００６５】
▲４▼滴下された液状物質の実際の滴下量を測定することにより、液状物質の滴下量の過少、過多を正しく判定できる。
【００６６】
▲５▼液状物質を滴下する工程と、液状物質の実際の滴下量を検出する工程とを並行して行なうことによっても、作業効率を向上できる。
【００６７】
以上、本発明の実施の形態を図面により詳述したが、本発明の具体的な構成はこの実施の形態に限られるものではなく、本発明の要旨を逸脱しない範囲の設計の変更等があっても本発明に含まれる。例えば、上記の実施の形態において、基板１の全ての滴下位置に対して液状物質の滴下が完了した後、比較部により液状物質の実際の滴下総量と基準滴下総量とを比較し、この比較の結果、実際の滴下総量が基準滴下総量の許容範囲を超えていた場合に、その旨を作業者に報知するようにした例で説明したが、下記のようにしても良い。
【００６８】
すなわち、制御装置４０は、積算部にて液状物質の実際の滴下量が積算される度に、その積算結果（積算滴下量）と基準積算滴下量、すなわち、滴下済みの滴下位置に予定された滴下量で液状物質が滴下された場合の積算滴下量とを比較する。そして、積算滴下量≦基準積算滴下量の場合には、その後の滴下が予定されている各滴下位置に対して予定された滴下量で継続して液状物質を滴下する。
【００６９】
他方、積算滴下量＞基準積算滴下量の場合には、その後の滴下が予定されている各滴下位置、予定された滴下量等の滴下データの修正を実行する。つまり、このまま予定された滴下位置に予定どおりの滴下量で液状物質を滴下すると、滴下総量が基準滴下総量を上回り、後の貼合わせ工程で液状物質の溢れ出し等の不良が生じると予測される場合には、超過分に相当する量だけ液状物質の滴下量を減らすように、滴下データに修正を加える。
【００７０】
この滴下データの修正は、例えば、下記（ｉ）〜（ｉｉｉ）のいずれかの手段を用いて行なうことが考えられる。
【００７１】
(i)液状物質の超過分に相当する量を、液状物質が未滴下の滴下位置の一つの滴下位置に対する滴下量から減じ、その滴下位置に対して減じた滴下量で液状物質を滴下する。
【００７２】
(ii)液状物質の超過分に相当する量を液状物質が未滴下の滴下位置の数で除算し、その商に相当する量を各滴下位置に対する予定された滴下量から減ずる。
【００７３】
（ｉｉｉ）液状物質が未滴下の滴下位置の数から、液状物質の超過分に相当する量を一つの滴下位置に対する予定滴下量で除算した商に応じた数を減らし、残りの数の滴下位置に上記未滴下の滴下位置が配置される領域内に均等に配置する。
【００７４】
このように構成することで、基板１に滴下された液状物質の滴下量（滴下総量）が過多になることによる不良が未然に防止できるので、歩留りをさらに向上させることができる。
【００７５】
なお、上記の手段（ｉｉｉ）において、液状物質の超過分に相当する量を一つの滴下位置に対する予定滴下量で除算した商に余りが生じる場合には、この余りに対して上述の手段（ｉ）または（ｉｉ）を適用することができる。
【００７６】
また、上述の変形例において、積算部にて液状物質の実際の滴下量が積算される度に、積算滴下量と基準積算滴下量との比較を行なうように説明したが、滴下作業の序盤から中盤までは、その後の滴下位置に対する滴下量のばらつき等により、滴下データに修正を加えなくとも、積算滴下量の超過分が相殺されることもあるので、滴下位置の残数が少なくなった終盤のみで上記比較を行なうようにしても良い。
【００７７】
また、積算滴下量と基準積算滴下量との比較結果に基づいて滴下データを修正する例で説明したが、例えば、積算滴下量と基準滴下総量とを比較して求めた両者の差分の量と、液状物質が未滴下の滴下位置に対する予定された滴下量の総量とに基づいて、滴下データを修正するようにしても良い。
【００７８】
また、液状物質の滴下量は、体積で求めても、重量で求めても、いずれでも良い。
【００７９】
また、上述の手法(a)においては、液状物質の中央部のみの断面積から液状物質の体積を求めたが、液状物質を複数箇所で切断する切断線に沿う断面毎に断面積を求め、この断面積と切断線の間隔に基づいて液状物質の体積を求めるようにしても良い。
【００８０】
例えば、図６（Ａ）、（Ｂ）に示すように、等間隔で設定した７つの切断線Ｌ１〜Ｌ７毎に、手法(a)と同様にして、液状物質の高さを測定し、切断線Ｌ１〜Ｌ７毎に液状物質の断面積Ｓ１〜Ｓ７を求める。そして、求めた断面積と各切断線Ｌ１〜Ｌ７の間隔ｔとに基づく、下記式(2)から、液状物質の体積Ｖを近似的に求める。
【００８１】
Ｖ＝Ｃ１＋Ｃ２＋・・・＋Ｃ７ …(2)
ここで、Ｃｉ＝Ｓｉ×ｔ（ｉ＝１〜７）
【００８２】
なおこの場合、液状物質検出装置３０は、切断線に対応した数の距離センサを設けることが好ましい。
【００８３】
また、上記実施の形態では、液状物質検出装置３０を、光学的距離センサを用いて構成されたものとして説明したが、例えば、ＣＣＤカメラなどの撮像装置を用いるものであっても良い。この場合、ＣＣＤカメラを用いて滴下された液状物質を真上から撮像して得た画像データに基づいて、液状物質の滴下面積（真上から見た面積）を算出し、滴下面積と体積との相関関係とに基づいて、液状物質の体積を近似的に求めることができる。なお、滴下面積と体積との相関関係は、実験等により求めることが可能である。
【００８４】
また、上記実施の形態では、液状物質滴下ディスペンサ２０と液状物質検出装置３０を単一の移動装置２１で移動させる例で説明したが、互いに個別の移動装置を設けても良い。
【００８５】
また、上記実施の形態では、移動装置１１および移動装置２１がともにＸ軸駆動部とＹ軸駆動部を有する例で説明したが、Ｘ軸駆動部とＹ軸駆動部は、双方の移動装置１１、２１で合わせて１つずつ有していれば、基板１に対する液状物質の滴下作業を行なうことが可能である。
【００８６】
また、上記実施の形態では、滴下された液状物質の実際の滴下量を液状物質滴下ディスペンサ２０による滴下作業中に並行して検出する例で説明したが、液状物質滴下ディスペンサ２０による滴下作業が完了した後に、滴下された液状物質の滴下量を検出するようにしてもよい。
【００８７】
【発明の効果】
以上のように本発明によれば、基板への液状物質の滴下状態の良否を当該基板への滴下工程段階でチェックし、歩留りを向上させることができる。
【図面の簡単な説明】
【図１】図１は液状物質滴下装置を示す模式図である。
【図２】図２は液状物質滴下装置を示すブロック図である。
【図３】図３は基板への液状物質の滴下パターンを示す模式図である。
【図４】図４は滴下された液状物質の断面積の測定方法を示す模式図である。
【図５】図５は滴下された液状物質の滴下量の測定方法を示す模式図である。
【図６】図６は滴下された液状物質の断面積の測定方法の他の例を示す模式図である。
【符号の説明】
１基板
２滴下位置
１０基板搬送ステージ
１１移動装置（移動手段）
２０液状物質滴下ディスペンサ（液状物質滴下手段）
２１移動装置（移動手段）
３０液状物質検出装置（液状物質検出手段）
４０制御装置
１００液状物質滴下装置[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an apparatus and method for dropping a liquid substance such as liquid crystal.
[0002]
[Prior art]
For example, in the substrate laminating process in which two glass substrates are bonded together with liquid crystal interposed therebetween, a required amount of liquid crystal is placed on one glass substrate by using a liquid crystal dropping device in the pre-bonding stage. Is dropped.
[0003]
Conventionally, the liquid crystal dropping device relatively moves the substrate and the liquid crystal dropping dispenser, arranges the dropping pattern set in advance on one substrate, for example, the dropping positions in rows and columns, and each dropping position. The liquid crystal is dripped in a pattern determined by how many ml the dripping amount is.
[0004]
[Problems to be solved by the invention]
In the prior art, the quality of the dropping operation on the substrate by the liquid crystal dropping device is not checked during the dropping operation on the substrate. For this reason, when variation occurs in the dropping amount of the liquid crystal dropping device, it becomes a matter of finding inconveniences caused by the actual dropping amount with respect to the dropping amount to be dropped on the liquid crystal substrate, inconvenience due to the subsequent process, This leads to a decrease in work efficiency and yield.
[0005]
It is an object of the present invention to check the quality of the dropping state of the liquid substance on the substrate at the stage of dropping the substrate to improve the yield.
[0006]
[Means for Solving the Problems]
According to a first aspect of the present invention, there is provided a liquid substance dropping device for dropping a liquid substance onto a substrate, a liquid substance dropping means for dropping the liquid substance in a dropping amount set for a plurality of dropping positions on the substrate, and the liquid A moving means for relatively moving the substance dropping means and the substrate, a liquid substance detecting means for detecting an actual dropping amount of the liquid substance dropped at each dropping position on the substrate, and the liquid substance detecting means Integrating means for integrating the actual dripping amount of the liquid substance detected by Storage means for storing position information of the dropping position set with respect to the substrate and information of an actual dropping amount of the liquid substance dropped at each dropping position detected by the liquid substance detecting means; The actual total amount of the liquid material dropped on the substrate obtained by the integrating means is compared with the set total amount of the liquid material dropped on the substrate, and the actual total amount is set. If the total amount is insufficient, the liquid substance dropping means and the moving means are controlled based on the information stored in the storage means, and each liquid substance dropped on the substrate is controlled on the substrate surface. An insufficient amount of liquid material is dropped on the substrate so that the position where the resultant force of the load acting on the substrate acts on the substrate surface approaches the center position of the liquid material dropping region on the substrate. And a control means.
[0007]
The invention of claim 2 The liquid substance dropping device according to claim 1, wherein the control device is insufficient at the dropping position with respect to a dropping position where the dropping amount is insufficient based on information stored in the storage means. The liquid substance dropping means and the moving means are controlled to drop a certain amount of liquid substance. Is.
[0008]
The invention of claim 3 3. The apparatus for dropping a liquid material according to claim 1, wherein the liquid substance detecting means is an actual drop of the liquid substance dropped on the substrate every time the liquid substance dropping means drops the liquid substance on the substrate. Detecting the amount, and the integrating means integrates the actual dropping amount detected each time the liquid substance detecting means detects the actual dropping amount of the liquid substance, and the control device applies to the substrate. When the predetermined number of the liquid substances are dropped, the integrated drop amount calculated by the integration means is compared with the integrated value of the scheduled drop amount, and the calculated drop amount is calculated. In the case where the integrated value of the liquid substance is exceeded, the liquid state is reduced so that at least one of the number of subsequent dropping positions and the dropping amount of the liquid substance with respect to the dropping position is reduced according to the amount of excess liquid substance. Substance dripping means And to control said moving means Is.
[0009]
The invention of claim 4 In a liquid substance dropping method for dropping a liquid substance on a substrate, a dropping step of dropping the liquid substance on a dropping position set with respect to the substrate and an actual dropping amount of the liquid substance dropped on the dropping position are detected. A detection step, a storage step for storing the actual dropping amount detected in the detection step together with position information of a dropping position where the liquid substance of the dropping amount is dropped, and the actual dropping detected in the detection step An integration step of integrating the amount, and an actual total amount of the liquid substance dropped on the substrate obtained in the integration step is compared with a set total amount of the liquid substance dropped on the substrate; Based on the information stored in the storage step, on the condition that a first determination step for determining whether the total amount is excessive or insufficient, and that the actual total amount is insufficient in the determination step, the actual dripping amount is determined. Was set A dropping position which is insufficient for the lower amount, a correction dropping step of adding dropwise a liquid substance quantities missing, and to have the Is.
[0010]
The invention of claim 5 5. The liquid substance dropping method according to claim 4, wherein the detection step is executed each time the liquid substance is dropped on the substrate in the dropping step, and the integrating step is performed in the liquid detection step. It is executed every time when the actual amount of substance dropped is detected, and further, when the predetermined number of liquid substances are dropped onto the substrate, In the second determination step, the second determination step of comparing the planned drop amount integrated value with respect to the dropping position where the liquid substance has been dropped, and determining the excess or deficiency of the calculated integrated drop amount, A step of reducing at least one of the number of subsequent dropping positions and the dropping amount of the liquid substance for each dropping position according to the amount of the excess liquid substance when it is determined that the calculated cumulative dropping amount is exceeded. And have It is a thing.
[0012]
Claims 1 to 5 According to the present invention, (a) There is an effect of.
(a) The actual amount of the liquid substance dropped on the substrate is detected, and the actual total amount of the liquid substance dropped on the substrate is obtained from the actual amount of dripping, and this is set to the set total amount of the liquid substance dropped on the substrate. Compared to the above, when the actual total amount is insufficient, an insufficient amount of liquid material is dripped onto the substrate, so that product defects due to insufficient amount of liquid material can be prevented and yield can be improved. Can do.
[0013]
Claim 1 According to the invention of (b) There is an effect of.
(b) When the actual total amount of the liquid substance dropped on the substrate is insufficient with respect to the set total amount of the liquid substance dropped on the substrate, the memorized liquid substance dropping position and the actual amount of liquid substance dropped Based on the above, the position where the resultant force of the load applied on the substrate surface by each liquid material dropped on the substrate approaches the center position of the liquid material dropping region on the substrate is insufficient. Since the amount of liquid material is dropped on the substrate, the distribution of the liquid material on the substrate can be obtained almost symmetrically with respect to the center of the dropping region, and the liquid material can be uniformly spread on the substrate. Can do.
[0014]
Claim 2, 4 According to the invention of (c) There is an effect of.
(c) When the actual total amount of the liquid substance dropped on the substrate is insufficient with respect to the set total amount of the liquid substance dropped on the substrate, the memorized liquid substance dropping position and the actual drop amount information of the liquid substance are stored. Based on the above, since the liquid material in the amount that is deficient at the drip position is dropped with respect to the drip position where the drip amount is short, the distribution of the liquid material on the substrate is almost the same as the center of the drip region. It can be obtained symmetrically, and a uniform spread of the liquid substance can be obtained on the substrate.
[0015]
Claim 3, 5 According to the invention of (d) There is an effect of.
(d) When the cumulative amount of liquid material dropped when a predetermined number of liquid substances are dropped on the substrate exceeds the cumulative value of the planned amount of liquid material dropped, the number of subsequent dropping positions, and Since at least one of the dropping amount of the liquid material with respect to the dropping position is reduced, it is possible to prevent a failure due to the actual total amount of the liquid material dropped on the substrate exceeding the set total amount.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
1 is a schematic diagram showing a liquid material dropping device, FIG. 2 is a block diagram showing the liquid material dropping device, FIG. 3 is a schematic diagram showing a dropping pattern of the liquid material on the substrate, and FIG. FIG. 5 is a schematic diagram showing a method for measuring an area, FIG. 5 is a schematic diagram showing a method for measuring a dropped amount of a dropped liquid substance, and FIG. 6 is a schematic diagram showing another example of a method for measuring a cross-sectional area of the dropped liquid substance. It is.
[0017]
As shown in FIG. 1, the liquid substance dropping device 100 includes a substrate transfer stage 10 for transferring the substrate 1, a liquid substance dropping dispenser 20 (liquid substance dropping means), and a liquid substance detecting device 30 (liquid substance detecting means). A liquid substance (L) such as liquid crystal is dropped on the substrate 1 in a predetermined dropping pattern.
[0018]
As shown in FIG. 3, the dropping pattern of the liquid substance onto the substrate 1 is arranged in a number of rows and columns with a number of dropping positions 2 in the dropping area, and the dropping amount (volume or mass) at each dropping position 2 is, for example, Determine by making 0.10ml.
[0019]
The substrate transfer stage 10 has a moving device 11 having an X-axis drive unit and a Y-axis drive unit, and the substrate 1 is relatively relative to the liquid material dropping dispenser 20 and the liquid material detection device 30 in the X direction and the Y direction, respectively. Move. Each drive part of the moving apparatus 11 is comprised by the servomotor.
[0020]
The liquid substance dropping dispenser 20 drops a set amount of liquid substance with respect to the dropping position on the substrate 1. The liquid substance dropping dispenser 20 has a moving device 21 having an X-axis drive unit, a Y-axis drive unit, and a Z-axis drive unit, and is in the X, Y, and Z directions with respect to the substrate 1 on the substrate transfer stage 10. Move relatively. Each drive unit of the moving device 21 is constituted by a servo motor.
[0021]
The liquid substance detection device 30 confirms that the liquid substance has been dropped at a predetermined position.
The liquid substance detection device 30 includes an optical distance sensor that can measure the distance between the substrate 1 and the liquid substance by using reflection of laser light, for example.
[0022]
The liquid substance detection device 30 is provided so as to be rotatable around the liquid substance dropping dispenser 20 via the moving device 22 with respect to the liquid substance dropping dispenser 20. As a result, during the dropping operation of the liquid substance dropping dispenser 20 onto the substrate 1, the liquid substance detection device 30 has a measurement position relative to the substrate 1 with respect to the liquid substance dropping dispenser 20. The discharge port 22 of the liquid substance dropping dispenser 20 can be positioned so as to be substantially on the same straight line in the relative movement direction.
[0023]
As shown in FIG. 2, the liquid material dropping device 100 includes a control device 40 that controls the substrate transfer stage 10, the liquid material dropping dispenser 20, and the liquid material detection device 30. The control device 40 includes a man-machine interface 41 and a main controller 42, controls the substrate transfer stage 10 (moving device 11) via the transfer controller 43, and the liquid material dropping dispenser 20 via the liquid material discharge controller 44. The (moving device 21) is controlled, and the liquid material detection device 30 is controlled via the liquid material detection controller 45.
[0024]
In addition, the control device 40, together with the liquid material detection device 30, measures the dropping amount of the liquid material dropped onto the substrate 1 from the liquid material dropping dispenser 20 by any one of the following methods (a) to (c). Constitutes a quantity measuring means;
[0025]
(a) A cross-sectional area cut along a straight line crossing the central portion of the dropped liquid substance is calculated, and a dripping amount of the liquid substance is obtained from the volume of the liquid substance determined based on the cross-sectional area.
[0026]
That is, as shown in FIGS. 5A to 5E, the liquid substance detection device 30 is located on the rear side with respect to the relative movement direction (arrow A direction) of the liquid substance dropping dispenser 20 with respect to the substrate 1. When the substance dropping dispenser 20 moves in the direction of arrow A, it passes over the liquid substance dropped on the substrate 1. At this time, as shown in FIG. 4, the liquid material detection device 30 measures the facing distance to the substrate 1 (liquid material) for each preset distance interval d.
[0027]
From the measured values at each of the measurement points P1, P2,... Pn at this time, the heights h1, h2,. The height of the liquid substance is obtained by subtracting the measurement values R1, R2,... Rn at the measurement points P1, P2,. This can be easily obtained. Based on the calculated heights h1, h2... Hn of the liquid material for each specific point P1, P2. S is approximately calculated.
[0028]
S = Q1 + Q2 ... + Qn (1)
Qi = hi × d (i = 1 to n)
[0029]
Then, the volume of the dropped liquid substance is calculated based on the correlation between the calculated cross-sectional area S and the cross-sectional area at the center of the dropped liquid substance and the volume of the liquid substance, which has been obtained in advance through experiments or the like. Obtain approximately. The dripping amount is obtained from the determined volume of the liquid substance.
[0030]
(b) The positions a and b where the straight line crossing almost the center of the dropped liquid material and the end of the liquid material intersect are detected, and the liquid material obtained based on the distance between the end positions a and b is detected. The amount of liquid substance dropped is obtained from the volume.
[0031]
In other words, the liquid substance detection device 30 is set to output an OFF signal if it is greater than or equal to the facing distance from the surface of the substrate 1 and to output an ON signal if it is smaller than the facing distance from the surface of the substrate 1. Then, as shown in FIGS. 5A to 5E, while the liquid material detection device 30 passes over the liquid material dropped on the substrate 1 by the relative movement of the liquid material dropping dispenser 20 with respect to the substrate 1. The liquid substance detection device 30 continuously measures the distance between the substrate 1 (liquid material) and the timing at which the output of the liquid material detection device 30 turns from OFF to ON (FIG. 5B), from ON to OFF. The end positions a and b of the liquid material are determined based on the timing of turning to (FIG. 5D) and the relative position between the liquid material detection device 30 and the substrate 1 at each timing.
[0032]
Then, based on the correlation between the obtained distance between the end positions a and b and the distance between the end positions a and b of the dropped liquid substance and the volume of the liquid substance, which has been obtained in advance through experiments or the like. Approximate the volume of the liquid material dropped. The dripping amount is obtained from the determined volume of the liquid substance.
[0033]
Here, according to the technique (a), for example, when the viscosity of the liquid material fluctuates due to a change in the environmental temperature or a change over time of the liquid material, and the spread of the dropped liquid material changes. However, since the amount of change in the cross-sectional area with respect to the variation in the extent of spread is smaller than the amount of change in the outer shape of the liquid substance, compared to the method (b) for obtaining the volume based on the interval between the end positions a and b, The volume of the dropped liquid substance can be accurately determined, and the amount of liquid substance dropped can be accurately determined.
[0034]
On the other hand, according to the method (b), since it is only necessary to detect the two end positions a and b of the liquid material, the method (a) that requires measurement of the height of the liquid material at each of a large number of measurement points. Compared to the above, the burden on the control device 40 can be reduced, the volume of the liquid material can be quickly determined, and the amount of liquid material dropped can be quickly determined.
[0035]
These methods (a) and (b) can be selected from information such as production plans such as quality-oriented and productivity-oriented.
In the present embodiment, an example in which the method (a) is selected will be described.
[0036]
Further, when the control device 40 detects that the liquid material is not properly dropped by the liquid material detection device 30, the control device 40 can be moved to an arbitrary position on the substrate 1 by the following correction operations (A) to (C). It also serves as a dripping correction means for dripping an arbitrary dripping amount of liquid substance.
[0037]
That is, the control device 40 obtains the actual amount of liquid substance dropped at each dropping position 2 by using the method (a) described above, and accumulates the obtained amount of dripping in an accumulator (not shown). The drop amount for each drop position is stored in a storage unit (not shown) as a pair with the position information of each drop position.
[0038]
When the dropping of the liquid material to the substrate 1 is completed, the total amount of the liquid material actually accumulated by the integrating unit (total amount of dripping) and the dropping of the liquid material to be dripped onto the substrate 1 set in advance. The amount (reference drop total amount) is compared with a comparison unit (not shown) of the control device 40, and it is determined whether or not the actual drop total amount of the dropped liquid substance has reached the reference drop total amount.
[0039]
When it is determined that the actual total dropping amount is less than the reference total dropping amount, a deficient liquid substance is dropped onto the substrate 1.
[0040]
As a specific example, for example, it is conceivable to use any one of the following means (A) to (C).
[0041]
(A) A deficiency of the actual dripping total amount with respect to the reference dripping total amount is dropped into a preset region.
[0042]
A region for dropping the deficient liquid substance on the substrate 1 is set in advance, and the deficient liquid material is dropped in a divided or divided manner in the area. For example, this region can be set at the central portion of the substrate or the peripheral portion along the sealing material 3.
[0043]
Further, only one region or a plurality of regions may be provided on the substrate 1.
Further, a region for dropping the deficient liquid substance is determined from the distribution state of the dropping position where the dropping amount obtained based on the dropping position information stored in the storage unit and the dropping amount information for each dropping position is too small or excessive. You may do it. In this case, by dropping the deficient liquid material, the position where the resultant force of the load applied on the surface of the substrate 1 by each liquid material dropped and distributed on the substrate 1 acts on the surface of the substrate 1, It is conceivable that the liquid material is dropped so as to approach the center position of the dropping region 1a on the substrate 1. In this case, for example, an area for dropping the deficient liquid material may be set at a position where there are many dripping positions where the dripping amount of the liquid material is too small.
[0044]
Here, the position where the resultant force of the load applied on the surface of the substrate 1 by each liquid substance acts on the surface of the substrate 1 is the position of the center of gravity (c1, c2) of each liquid material dropped on the substrate 1 in plan view. , C3,... Cn) and the weight (w1, w2, w3,... Wn) of each liquid substance can be obtained by a geometric calculation method.
[0045]
(B) A deficient liquid substance is dropped into the drip position 2 where the drip amount is insufficient.
In the case of a drop pattern in which 60 points of 0.10 ml of liquid substance are dropped per drop, the drop amount is 0.05 ml from the drop position 2 stored in the storage unit and the drop amount data at the drop position 2. When it is confirmed that there is only one dropping position 2, i.e., a dropping position 2 where the dropping amount is 0.05 ml short, the amount is insufficient at the same position as the dropping position 2 where the dropping amount is insufficient. Drip 0.05 ml of liquid material.
[0046]
In addition, when there are a plurality of dropping positions 2 where the dropping amount is insufficient, an insufficient amount of liquid material is dropped at each dropping position 2.
[0047]
(C) A plurality of adjacent dripping positions where the amount of dripping is insufficient is taken as one group, and liquid substances are dripped together.
[0048]
In the case of a dropping pattern in which 60 points of 0.10 ml of liquid substance are dropped per drop, the data shown in FIG. 3 (A) is based on the dropping position 2 stored in the storage unit and the dropping amount data at the dropping position 2. As shown in the figure, when there are two dropping positions 2 (symbols a and b) adjacent to each other at a dropping amount of 0.05 ml, 0.10 ml of a deficiency is placed at an intermediate position c between the two dropping positions a and b. Drop liquid material.
[0049]
Further, as shown in FIG. 3B, the drip amount of each of the two drip positions a and b is not the same amount, for example, the deficiency of one drip position a is 0.04 ml, and the other drip position. When the deficiency of b is 0.08 ml and the total is 0.12 ml, the drip position c of the deficient liquid substance is set between the two drip positions a and b and the distance to each drip position a and b. The position where the ratio is the reciprocal of the volume ratio of the deficient liquid substance, that is, the distance ac: distance bc is set to 2: 1 (0.08: 0.04). Drop liquid material.
[0050]
In the present embodiment, the above-described means ( A ) Will be described as an example.
The liquid substance dropping device 100 operates as follows.
[0051]
(1) The substrate 1 is positioned at the dropping start position by the substrate transfer stage 10. The substrate 1 is coated with a sealing material 3 around the dropping area.
[0052]
(2) Position the liquid substance dropping dispenser 20 at the dropping start position.
(3) The substrate transport stage 10 is moved by the moving device 11 so that the dropping positions of the dropping pattern determined on the substrate 1 are sequentially positioned with respect to the liquid substance discharge port of the liquid substance dropping dispenser 20. The liquid substance is dropped from the liquid substance discharge port of the liquid substance dropping dispenser 20 to each dropping position of the substrate 1. That is, the control device 40 determines the substrate 1 from the output value of the encoder of the servo motor that constitutes each driving unit of the moving device 11 and the output value of the servo motor that constitutes each driving unit of the moving device of the liquid substance dropping dispenser 20. The relative position with respect to the liquid substance dropping dispenser 20 is detected, and based on this position information and the position information of the dropping position 2 on the substrate 1 set in advance, the liquid substance dropping dispenser is set at each dropping position 2. A discharge command is output to the liquid substance dropping dispenser 20 at the timing when 20 is positioned.
[0053]
(4) The liquid substance detection device 30 disposed on the rear side with respect to the relative movement direction of the liquid substance dropping dispenser 20 with respect to the substrate 1 allows the liquid substance dropping dispenser 20 to dispose the liquid substance on the substrate 1 during the dropping operation of (3) above. After the completion of the dropping at the predetermined dropping position 2, the liquid substance dropped at the predetermined dropping position 2 is passed while moving to the next dropping position 2. At this time, the liquid substance detection device 30 outputs a measurement value corresponding to the facing distance from the substrate 1 or the liquid substance. And the control apparatus 40 calculates | requires the actual dripping amount of a liquid substance by the above-mentioned method (a) based on the measured value of the liquid substance detection apparatus 30, and stores the calculated dripping amount in the storage unit as position information of the dropping position. And memorize in pairs. At the same time, the actual dropping amount at each dropping position is integrated in the integrating unit.
[0054]
Note that the liquid substance detection device 30 is a device that constantly measures the distance between the substrate 1 at every set interval during the dropping operation by the liquid substance dropping dispenser 20. Any one may be used which measures the facing interval during a period passing through and a predetermined period before and after the period.
[0055]
(5) After the dropping of the liquid material is completed at all the dropping positions of the substrate 1, the comparison unit compares the actual total dropping amount of the liquid substance accumulated in the accumulation unit with the reference total dropping amount.
[0056]
As a result of this comparison, if the actual total dropping amount is within the allowable range of the reference total dropping amount, the substrate 1 is transferred to a subsequent step, for example, a bonding step of the substrate 1.
[0057]
Further, when the actual total dropping amount is less than the allowable range of the reference dropping total amount, the deficient liquid substance is dropped onto a predetermined region on the substrate 1 by the above-described means (A).
[0058]
Further, when the actual total amount of dripping exceeds the allowable range of the reference total amount of dripping, there is a possibility that the liquid material overflows between the two bonded substrates when bonding the substrate 1 in the subsequent process. Therefore, the operator is notified of this by an alarm or the like, and the removal of the substrate 1 is urged.
[0059]
According to this embodiment, there are the following operations.
(1) In the step of dropping the liquid material onto the substrate 1, it is possible to determine whether the total amount of liquid material dropped on the substrate is excessive or insufficient by checking the actual amount of liquid material dropped onto each dropping position. it can. If the total dripping amount is too small, an insufficient amount of liquid substance is dropped on the substrate, and if it is excessive, an alarm is issued to prevent the substrate from being transferred to the substrate bonding step. Therefore, it is possible to prevent the bonded substrates from being defective due to an excessive or excessive drop amount of the liquid substance, and as a result, the yield can be improved.
[0060]
(2) The moving means between the liquid substance dropping dispenser 20 and the liquid substance detecting device 30 is shared by a single moving means 21. Therefore, the liquid substance dropping device 100 can be simplified.
[0061]
(3) When the total amount of the liquid material dropped is too small, by dropping the insufficient amount of the liquid material, the resultant force of the load exerted on the surface of the substrate 1 by the dropped liquid material is In the drop position information stored in the storage unit and the drop amount information for each drop position, the position of the area where the deficient liquid substance is dropped is stored so that the position acting on the substrate 1 approaches the center position of the drop area 1a on the substrate 1. If it sets based on it, in the board | substrate bonding process, since the uniform spreading | diffusion of the liquid substance on the board | substrate 1 can be obtained, the product quality of the board | substrate bonded together can be improved.
[0062]
In other words, the position where the resultant force of the load applied on the surface of the substrate 1 by each liquid substance acts on the surface of the substrate 1 is shifted from the center position of the dropping region 1a on the substrate 1. This indicates that the amount of liquid material dropped is insufficient on the side opposite to the direction of displacement. Therefore, the liquid material in the substrate bonding step can be uniformly spread by dropping the liquid material in an insufficient amount to the portion where the liquid material is insufficient in the dropping region 1a.
[0063]
This also applies to the case where means (B) and (C) are used.
That is, in the means (B), since the amount of the liquid material that is deficient at the drip position 2 is additionally dropped to the drip position 2 where the drip amount of the liquid material is deficient, as a result, An amount of liquid material set for the dropping position 2 is dropped. As a result, the liquid material can spread without excess or deficiency at each dropping position 2 in the substrate bonding step, so that a uniform spread of the liquid material on the substrate 1 can be obtained.
[0064]
Further, in the means (C), a plurality of adjacent dropping positions where the dropping amount of the liquid substance is insufficient are taken as one group, and an insufficient amount of the liquid substance is added to each dropping position 2 in the group. In addition, since the additional dropping is performed at a position close to each dropping position 2 determined based on the amount of the liquid material which is insufficient in step 2, the insufficient spreading of the liquid material in the group is additionally dropped in the substrate bonding step. As a result, a uniform spread of the liquid substance on the substrate 1 can be obtained.
[0065]
(4) By measuring the actual amount of the dropped liquid substance, it is possible to correctly determine whether the amount of the liquid substance dropped is excessive or excessive.
[0066]
(5) The work efficiency can also be improved by performing the step of dripping the liquid substance in parallel with the step of detecting the actual dripping amount of the liquid substance.
[0067]
Although the embodiment of the present invention has been described in detail with reference to the drawings, the specific configuration of the present invention is not limited to this embodiment, and there are design changes and the like without departing from the gist of the present invention. However, it is included in the present invention. For example, in the above embodiment, after the dropping of the liquid material is completed at all the dropping positions of the substrate 1, the comparison unit compares the actual dropping total amount of the liquid material with the reference dropping total amount. As a result, the example in which the actual drop total amount exceeds the allowable range of the reference drop total amount to notify the operator of that fact has been described, but the following may be used.
[0068]
That is, every time the actual dripping amount of the liquid substance is accumulated in the accumulating unit, the control device 40 is scheduled at the accumulating result (integrated dripping amount) and the reference accumulated dropping amount, that is, the dripping position after dropping. The cumulative amount of drops when the liquid substance is dropped in the amount of drops is compared. When the cumulative dropping amount ≦ the reference cumulative dropping amount, the liquid material is continuously dropped at the dropping amount scheduled for each dropping position where the subsequent dropping is scheduled.
[0069]
On the other hand, in the case of cumulative dropping amount> reference cumulative dropping amount, correction of dropping data such as each dropping position where the subsequent dropping is scheduled and the scheduled dropping amount is executed. In other words, if the liquid material is dropped at the planned dropping position as planned, the total dropping amount exceeds the reference total dropping amount, and it is predicted that defects such as overflow of the liquid material will occur in the subsequent bonding step. In this case, the dripping data is corrected so that the dripping amount of the liquid substance is reduced by an amount corresponding to the excess amount.
[0070]
For example, any one of the following (i) to (iii) of It is conceivable to carry out using means.
[0071]
(i) The amount corresponding to the excess amount of the liquid substance is subtracted from the dropping amount with respect to one dropping position of the dropping position where the liquid substance has not been dropped, and the liquid substance is dropped with the dropping amount reduced with respect to the dropping position.
[0072]
(ii) Divide the amount corresponding to the excess amount of the liquid substance by the number of dropping positions where the liquid substance has not been dropped, and subtract the amount corresponding to the quotient from the planned dropping amount for each dropping position.
[0073]
(Iii) From the number of dropping positions where the liquid substance has not been dropped, the amount corresponding to the excess liquid substance is One The number corresponding to the quotient divided by the planned dropping amount with respect to the dropping position is reduced, and the number of dropping positions that are not dropped is arranged evenly in the remaining number of dropping positions.
[0074]
With such a configuration, defects due to an excessive amount of liquid substance dropped onto the substrate 1 (total amount dropped) can be prevented in advance, and the yield can be further improved.
[0075]
In the above means (iii), the amount corresponding to the excess of the liquid substance is One In the case where there is a remainder in the quotient divided by the planned drop amount with respect to the drop position, the above-described means (i) or (ii) can be applied to this remainder.
[0076]
Further, in the above-described modification, each time the actual dripping amount of the liquid substance is accumulated in the accumulating unit, it has been described that the accumulated dripping amount and the reference accumulated dripping amount are compared. Until the middle, due to variations in the amount of dripping with respect to the subsequent dripping position, the excess of the accumulated dripping amount may be offset without correction of the dripping data. The comparison may be performed only with the above.
[0077]
In addition, the example in which the drop data is corrected based on the comparison result between the integrated drop amount and the reference integrated drop amount has been described. For example, the difference between the two obtained by comparing the integrated drop amount and the reference drop total amount and Further, the dropping data may be corrected based on the total amount of dropping amount with respect to the dropping position where the liquid substance is not dropped.
[0078]
Moreover, the dripping amount of the liquid substance may be obtained either by volume or by weight.
[0079]
Further, in the above-described method (a), the volume of the liquid material was determined from the cross-sectional area of only the central portion of the liquid material, but the cross-sectional area was determined for each cross section along the cutting line for cutting the liquid material at a plurality of locations. You may make it obtain | require the volume of a liquid substance based on the space | interval of this cross-sectional area and a cutting line.
[0080]
For example, as shown in FIGS. 6A and 6B, the height of the liquid substance is measured and cut in the same manner as in the method (a) for each of the seven cutting lines L1 to L7 set at equal intervals. The cross-sectional areas S1 to S7 of the liquid material are obtained for each of the lines L1 to L7. Then, the volume V of the liquid substance is approximately obtained from the following equation (2) based on the obtained cross-sectional area and the interval t between the cutting lines L1 to L7.
[0081]
V = C1 + C2 + ... + C7 (2)
Here, Ci = Si × t (i = 1 to 7)
[0082]
In this case, the liquid substance detection device 30 has a number corresponding to the cutting line. of It is preferable to provide a distance sensor.
[0083]
In the above embodiment, the liquid substance detection device 30 has been described as being configured using an optical distance sensor. However, for example, an imaging device such as a CCD camera may be used. In this case, based on the image data obtained by imaging the liquid material dropped using a CCD camera from directly above, the drop area (area viewed from directly above) of the liquid material is calculated. Based on this correlation, the volume of the liquid substance can be approximately calculated. The correlation between the dropping area and the volume can be obtained by experiments or the like.
[0084]
In the above embodiment, the liquid substance dropping dispenser 20 and the liquid substance detection device 30 are moved by the single moving device 21. However, separate moving devices may be provided.
[0085]
In the above embodiment, the moving device 11 and the moving device 21 are both described as having the X-axis driving unit and the Y-axis driving unit. However, the X-axis driving unit and the Y-axis driving unit are both moving devices 11. , 21, the liquid material can be dropped onto the substrate 1.
[0086]
In the above embodiment, the example in which the actual dropping amount of the dropped liquid substance is detected in parallel during the dropping operation by the liquid substance dropping dispenser 20 has been described. However, the dropping operation by the liquid substance dropping dispenser 20 is completed. After that, the dropped amount of the dropped liquid substance may be detected.
[0087]
【The invention's effect】
As described above, according to the present invention, it is possible to check the quality of the dropping state of the liquid substance on the substrate at the stage of the dropping step onto the substrate and improve the yield.
[Brief description of the drawings]
FIG. 1 is a schematic view showing a liquid substance dropping device.
FIG. 2 is a block diagram showing a liquid substance dropping device.
FIG. 3 is a schematic diagram showing a dropping pattern of a liquid substance onto a substrate.
FIG. 4 is a schematic diagram showing a method for measuring a cross-sectional area of a dropped liquid substance.
FIG. 5 is a schematic diagram showing a method for measuring a dripping amount of a dropped liquid substance.
FIG. 6 is a schematic view showing another example of a method for measuring a cross-sectional area of a dropped liquid substance.
[Explanation of symbols]
1 Substrate
2 Dropping position
10 Substrate transfer stage
11 Moving device (moving means)
20 Liquid substance dropping dispenser (Liquid substance dropping means)
21 Moving device (moving means)
30 Liquid substance detection device (liquid substance detection means)
40 Control device
100 Liquid substance dripping device

Claims

In a liquid material dropping device for dropping a liquid material on a substrate,
A liquid substance dropping means for dropping a liquid substance in a dropping amount set for a plurality of dropping positions on the substrate;
Moving means for relatively moving the liquid substance dropping means and the substrate;
Liquid substance detection means for detecting the actual amount of liquid substance dropped at each dropping position on the substrate;
Integrating means for integrating the actual dripping amount of the liquid substance detected by the liquid substance detecting means;
Storage means for storing the position information of the dropping position set with respect to the substrate and information on the actual dropping amount of the liquid substance dropped at each dropping position detected by the liquid substance detecting means;
The actual total amount of the liquid substance dropped on the substrate obtained by the integrating means is compared with the set total amount of the liquid substance dropped on the substrate, and the actual total amount is the set value. If the total amount is insufficient, the liquid material dropping means and the moving means are controlled based on the information stored in the storage means, and the liquid surface dropped on the substrate is used to control the substrate surface. Control means for dropping an insufficient amount of liquid material onto the substrate so that the position at which the resultant force of the load acting on the substrate surface is close to the center position of the liquid material dropping region on the substrate;
A liquid substance dropping device comprising:

Based on the information stored in the storage unit, the control device drops the liquid substance in an amount that is deficient at the drip position with respect to a drip position where the drip amount is deficient. 2. The liquid substance dropping device according to claim 1 , wherein the dropping means and the moving means are controlled.

The liquid substance detecting means detects an actual dropping amount of the liquid substance dropped on the substrate every time the liquid substance dropping means drops the liquid substance on the substrate,
The integrating means integrates the actual dripping amount detected each time the liquid substance detecting means detects the actual dripping amount of the liquid substance,
The control device compares the integrated drop amount calculated by the integration unit at the time when a predetermined number of the liquid substances are dropped onto the substrate and the integrated value of the planned drop amount, and calculates the calculated value. If the accumulated drop amount exceeds the planned drop amount, the number of subsequent drop positions and the drop amount of the liquid substance relative to the drop position are determined according to the amount of excess liquid substance. 3. The liquid substance dropping device according to claim 1, wherein the liquid substance dropping unit and the moving unit are controlled so as to reduce at least one of them.

In a liquid substance dropping method in which a liquid substance is dropped on a substrate,
A dropping step of dropping a liquid substance at a dropping position set with respect to the substrate;
A detection step of detecting an actual dropping amount of the liquid substance dropped at the dropping position;
A storage step of storing the actual dropping amount detected in the detection step together with position information of a dropping position where the liquid substance of the dropping amount is dropped,
An integration step of integrating the actual amount of dripping detected in the detection step;
The actual total amount of the liquid substance dropped on the substrate obtained in the integrating step is compared with the set total amount of the liquid substance dropped on the substrate to determine whether the actual total amount is excessive or insufficient. 1 determination step;
Based on the information stored in the storage step, on the condition that the actual total amount is determined to be insufficient in the determination step, the actual droplet amount is insufficient with respect to the set droplet amount. A correction drip process in which a deficient amount of liquid material is further dropped at a position;
A liquid substance dripping method characterized by comprising:

The detection step is performed each time the liquid substance is dropped on the substrate in the dropping step,
The integration step is performed each time the actual dripping amount of the liquid substance is detected in the detection step,
Furthermore, at the time when a predetermined number of the liquid substances are dropped onto the substrate, an integrated drop amount calculated in the integration step, and an integrated value of a predetermined drop amount with respect to a dropping position where the liquid substance is dropped, And a second determination step of determining whether the calculated integrated drop amount is excessive or insufficient,
In the second determination step, when it is determined that the calculated cumulative drop amount has been exceeded, the number of subsequent drop positions and the drop of the liquid substance at each drop position are determined according to the amount of excess liquid substance. Reducing at least one of the amounts;
The liquid substance dripping method according to claim 4 , comprising: