CN105005165B

CN105005165B - Method and apparatus for dropping liquid material

Info

Publication number: CN105005165B
Application number: CN201510300279.XA
Authority: CN
Inventors: 生岛和正
Original assignee: Musashi Engineering Inc
Current assignee: Musashi Engineering Inc
Priority date: 2007-10-30
Filing date: 2008-10-27
Publication date: 2021-07-09
Anticipated expiration: 2028-10-27
Also published as: CN104401137B; CN105005165A; CN101883640A; HK1203456A1; WO2009057268A1; TWI473664B; KR20100087729A; HK1213999A1; JP5244366B2; KR101579200B1; TW200927303A; CN104401137A; JP2009106857A

Abstract

The invention provides a method, a program and a device for dripping a liquid material, which can increase the moving speed of a nozzle and improve the productivity in a technology for dripping the liquid material while relatively moving the nozzle and a substrate at a certain speed. The present invention provides a method for dropping a liquid material and an apparatus for carrying out the method, wherein a plurality of works having dropping points are arranged on a substrate, and the liquid material is dropped by transmitting a discharge signal to a discharge device while relatively moving a nozzle of the discharge device and the substrate at a constant speed so that the nozzle traverses a straight path a plurality of times in a longitudinal direction or in a transverse direction on the plurality of works, characterized in that the shortest distance (L) between the dropping points on each straight path is the shortest distance (L)_o) At different times, the shortest distance (L) between the dropping points in a straight path is calculated_o) And the time (f) required for the discharge device to perform one discharge_o) According to (L)_o/f_o) The relative movement speed of the nozzle and the substrate is set for each linear path.

Description

Method and apparatus for dropping liquid material

The present application is a divisional application of the chinese patent application entitled "method and apparatus for dripping liquid material" with application No. 200880119046.8, application date being 2008, 10, and 27.

Technical Field

The present invention relates to a method, a program, and an apparatus for dropping a liquid material, and more particularly, to the following method, program, and apparatus: for a single substrate of a plurality of identical panels (also referred to as workpieces) arranged regularly, the dropping device is moved in parallel in a plane facing the surface to be dropped of the substrate, and the liquid material is dropped only in the region to be dropped while the dropping device is moved in a straight path from one end of the substrate to the other end of the substrate without stopping the movement across the region to be dropped present between the panels.

Background

Conventionally, in a step of bonding two opposing substrates to form a panel (cell) having a liquid crystal layer therebetween, a method (vacuum injection method) of injecting a liquid crystal using a vacuum chamber after bonding the two substrates has been used.

However, in the case of a large panel, it may take more than one day to inject only a long time. Therefore, in recent years, a method (one drop fill method) of dropping liquid crystal onto one substrate before bonding and then bonding them has attracted attention in accordance with a demand for improvement in productivity due to an increase in the size of a panel. This method does not require an injection port required for the vacuum injection method, and therefore, can save a sealing step for clogging the injection port and can shorten the injection time, thereby remarkably improving productivity.

When a plurality of panels are arranged on one substrate, a plurality of discharge heads perform a dropping operation. When panels are arranged in a plurality of rows and columns on one substrate, from the viewpoint of control and the like, it is common to arrange the same number or about the same number of dropping heads as the rows (or columns) on a straight line parallel to the rows (or columns) and perform the dropping operation by operating the dropping heads in the column direction (or row direction) for each column (or each row).

This one drop fill method is used in a process for manufacturing a small panel having a size of several inches, in addition to a large panel having a size of several tens of inches.

As a liquid material dropping device, for example, a liquid material dropping device disclosed in patent document 1 includes: a member capable of detecting the relative position of the liquid substance supply member and the substrate; and a control unit for controlling the discharge timing of the liquid material according to the detected position information; controlling the discharge timing by the control means while relatively moving the liquid material supply means and the substrate; and relatively moving the liquid material supply member and the substrate at a relative movement speed and a discharge time interval between the liquid material supply member and the substrate determined according to the drop position interval; the liquid substance supply means has a plurality of storage chambers, and means for operating the liquid substance take-out and discharge in parallel.

Patent document 1: japanese patent No. 3973209

Disclosure of Invention

(problems to be solved by the invention)

As in patent document 1, when the nozzle and the substrate are relatively moved to perform the dropping operation, there is a problem that the moving speed of the nozzle is limited by a discharge operation time (time required for performing 1-drop discharge) and a distance between dropping points. For example, the discharge operation time (f)_o) 0.2 second, minimum distance between dropping points (L)_o) At 10mm, the maximum moving speed of the nozzle was 50mm/sec (═ L)_o/f_o)。

That is, in the case of a dropping pattern having a long and short distance between dropping points, the minimum dropping distance L is used_oWhen the moving speed of the nozzle is calculated (the shortest distance among the distances between the dropping points), the moving time of the distance between the dropping points becomes an obstacle in a long portion, and there is a problem that productivity is lowered. Although the moving speed of the nozzle on the substrate cannot be changed, it is very difficult to control the dropping point of the liquid material, and therefore, it is necessary to maintain the moving speed of the nozzle on the substrate constant. For example, in the case of a dropping pattern in which the distance between dropping points L1 was 10mm and the distance between dropping points L2 was 20mm, the minimum dropping distance was 10mm, and therefore, it was necessary to move the nozzle at 50 mm/sec. In this manner, if the distance L2 between the dropping points is greater than L1 by a certain amount or more, the influence on productivity is large.

In particular, when a plurality of panels are arranged on one substrate like a small panel, the number of drops inevitably increases, and the interval between the drops becomes narrow, and in this case, the productivity is remarkably reduced. When panels are arranged on one substrate without wasting space, the distance between the panels is also narrowed, and the drop point interval is narrowed, which causes the same problem.

In order to solve the above-described problems, an object of the present invention is to provide a method, a program, and an apparatus for dripping a liquid material, which can increase the moving speed of a nozzle and improve productivity in a technique for dripping a liquid material while relatively moving the nozzle and a substrate at a constant speed.

(means for solving the problems)

Method for dropping liquid material according to aspect 1 of the present inventionThe method comprises arranging a plurality of workpieces having dropping points on a substrate, and dropping a liquid material onto the plurality of workpieces while relatively moving a nozzle and the substrate at a constant speed so that the nozzle provided in a discharge device traverses or crosses a plurality of times in a straight path, wherein the method for dropping a liquid material is characterized in that the shortest distance (L) between the dropping points on the straight path is the shortest distance between the dropping points_o) At different times, the shortest distance (L) between the dropping points in a straight path is calculated_o) And the time (f) required for the discharge device to perform one discharge_o) According to L_o/f_oThe relative movement speed of the nozzle and the substrate is set for each linear path.

A method of dropping a liquid material according to claim 2 of the present invention is characterized in that, in the case where a workpiece has a plurality of dropping points in the aspect of the present invention 1, a dropping order of one discharge is set for one workpiece in one linear path movement of the nozzle, and the shortest distance (L) in the dropping order is followed_o) The relative movement speed of the nozzle and the substrate is set.

A method for dropping a liquid material according to claim 3 of the present invention is a method for dropping a liquid material in which a plurality of works having a plurality of dropping points are arranged on a substrate, and the liquid material is dropped on the plurality of works while relatively moving a nozzle and the substrate at a constant speed so that the nozzle provided in a discharge device traverses or crosses a plurality of times in a linear path, wherein a dropping order of one discharge is set for one work during movement of the nozzle in one linear path, and a shortest distance (L) in the dropping order is calculated_o) And the time (f) required for the discharge device to perform one discharge_o) According to L_o/f_oThe relative movement speed of the nozzle and the substrate is set.

A method for dropping a liquid material according to claim 4 of the present invention is characterized in that, in the invention according to

claim

2 or 3, when the nozzle moves in a straight path on the dropping points in one line or one column, the dropping order in which the nozzle moves in one line or one column in a straight path is set only by the same number of times as the number of dropping points in one line or one column.

A method for dropping a liquid material according to claim 5 is characterized in that in any one of claims 1 to 4, a time required for moving the substrate in a straight path in a vertical direction on the substrate and a time required for moving the substrate in a straight path in a horizontal direction on the substrate are calculated, and a moving direction of the straight path is determined in accordance with the calculated times.

The program according to claim 6 is for causing a liquid material dropping apparatus to carry out the liquid material dropping method according to any one of claims 1 to 5.

The liquid material dripping device according to claim 7 of the present invention includes: a discharge device having a nozzle capable of discharging a liquid material; a stage on which a substrate is placed; a driving mechanism capable of relatively moving the spitting device and the platform; and a control unit capable of controlling these operations; the liquid material dropping device is characterized in that when the control unit drops the liquid material on a plurality of workpieces having dropping points arranged on a substrate while relatively moving a nozzle and the substrate at a constant speed such that the nozzle of the discharge device traverses or crosses a plurality of times in a straight path, the control unit drops the liquid material on the workpieces having the dropping points on the substrate at a minimum distance (L) between the dropping points on the straight path_o) At different times, the shortest distance (L) between the dropping points in a straight path is calculated_o) And the time (f) required for the discharge device to perform one discharge_o) According to L_o/f_oThe relative movement speed of the nozzle and the substrate is set for each linear path.

In the liquid material dripping device according to claim 8 of the present invention, in the case where the workpiece has a plurality of dripping points in the 7 th aspect of the present invention, the control unit sets a dripping order of one discharge for one workpiece in the movement of one linear path of the nozzle, and follows the shortest distance (L) in the dripping order_o) The relative movement speed of the nozzle and the substrate is set.

The liquid material dripping device according to claim 9 of the present invention includes: a discharge device having a nozzle capable of discharging a liquid material; a stage on which a substrate is placed; a driving mechanism capable of relatively moving the spitting device and the platform; and a control unit capable of controlling these operations; the liquid materialThe dropping device according to (1) is characterized in that, when the control unit drops the liquid material on a plurality of works arranged on the substrate and having a plurality of dropping points while relatively moving the nozzle and the substrate at a constant speed such that the nozzle of the discharge device traverses or crosses over a plurality of times in a linear path, the control unit sets a dropping order of one discharge for one work during the movement of one linear path of the nozzle, and calculates the shortest distance (L) in the dropping order_o) And the time (f) required for the discharge device to perform one discharge_o) According to L_o/f_oThe relative movement speed of the nozzle and the substrate is set.

A liquid material dripping apparatus according to claim 10 of the present invention is characterized in that, in the 8 th or 9 th aspect of the present invention, when the nozzle moves on the straight path on the dripping spots in one line or one row, the control unit sets a dripping order in which the nozzle moves on one line or one row on the straight path only as many times as the number of the dripping spots in one line or one row on one workpiece.

In the liquid material dripping device according to claim 11 of the present invention, in any one of claims 7 to 10, the control unit calculates a time required for the substrate to move in a straight path in the vertical direction and a time required for the substrate to move in a straight path in the horizontal direction, and determines the moving direction of the straight path in accordance with the calculated times.

The liquid material dropping device according to claim 12 is characterized in that, in any one of claims 7 to 11, the discharge device discharges the liquid material by moving a plunger, which slides in close contact with an inner surface of a metering portion communicating with a nozzle having a discharge port, by a desired amount.

(Effect of the invention)

According to the present invention, the moving speed of the nozzle can be increased, and the productivity of the one-drop coating can be improved.

Drawings

FIG. 1 is an explanatory view of a case of a dropping pattern of the present invention.

Fig. 2 is a diagram illustrating a dropping path in a conventional method.

Fig. 3 is a diagram illustrating a dropping path according to a first embodiment of the present invention.

Fig. 4 is a diagram illustrating a dropping path according to a second embodiment of the present invention.

FIG. 5 is a schematic perspective view of a dropping device for carrying out the method of the present embodiment.

Fig. 6 is a schematic view of a discharge device for carrying out the method of the present embodiment.

Fig. 7 is an explanatory view showing an example of a dropping pattern in the method of the present embodiment.

Fig. 8 is an enlarged view of a part of fig. 7.

Description of the symbols

101 substrate

102 panel

103 point of dripping

104 drip area

105 non-dripping area

501 dripping device

502 platform

503 XYZ driving mechanism

601 discharge device

602 measuring section

603 plunger

604 spray nozzle

605 spitting valve

606 storage container

607 liquid supply valve

608 screw shaft

609 motor

610 hole

611 to discharge the port.

Detailed Description

As shown in fig. 1, a preferred embodiment for implementing the present invention is explained by an example in which 3 patterns are arranged in a row.

(object of dripping)

In fig. 1, the positions of the dropping points 103 are indicated by P1 to P12.

A plurality of panels 102 are arranged on a substrate 101, and each panel is vertically and horizontally dividedFour dropping points 103 are provided at intervals of L2. The panels 102 are arranged at a distance L3. The shortest dropping distance L of the dropping points 103 of the 2 panels 102 adjacent to the vertical direction_oL1(L1 < L2).

(drip path)

(A) When the liquid is dropped onto the panels 102A to 102C by a conventional method, the nozzle moves along a path shown by an arrow in fig. 2. In fig. 2, the solid line indicates the dropping operation, and the broken line indicates the movement-only operation. Here, the minimum dripping distance L_oIs L2.

In the method shown in fig. 2, the dropping operation is performed on each panel 102. That is, first, the first panel 102A was dripped from P1 to P2, P11 and P12. After completion of dropping of panel 102A, panel 102B moves from end point P12 to start point P3 of 2 nd panel 102B. Next, the second panel 102B was dripped from P3 to P4, P9 and P10. After completion of dropping of panel 102B, the panel moves from end point P10 to start point P5 of panel 102C of the 3 rd sheet. Finally, the 3 rd panel 102C was dripped from P5 to P6, P7 and P8 to complete the operation.

In this method, it is necessary to change the movement direction of the nozzle at all 4 dropping points 103 provided on a 1-piece panel, and since the nozzle movement is stopped at an instant of time at each dropping point 103, the time loss of acceleration/deceleration of the nozzle is large, and it is difficult to shorten the time (operating time) required for dropping the entire liquid.

(B) When the same dropping point as that in fig. 2 is dropped by the first embodiment of the present invention, the dropping path is as shown in fig. 3. Here, the minimum dripping distance L_oIs L1.

In the first aspect of the present invention, the substrate 101 moves in a straight path from one end to the other end, and traverses the non-dripping region 105 between the panel 102A and the panel 102B or between the panel 102B and the panel 102C. From the starting point P1, the droplets were dropped while moving the nozzle from P2, P3, P4, P5, and P6. Subsequently, the dropping was carried out while moving the nozzle from P7 in the opposite direction to P8, P9, P10, P11, and P12. In the first embodiment, the moving speed of the nozzle can be kept constant between P1 to P6 and between P7 to P12, and the entire length of the moving path of the nozzle is shorter than that of (a), so that the time (operating time) required for dropping the entire nozzle can be shortened as compared with the method (a).

The first way has the particularly advantageous effect that the minimum dripping distance L is provided per column (or per row)_oIn a different situation. For example, the minimum dropping distance L in the first row (corresponding to P1-P6 in FIG. 3)_o10mm and the minimum dropping distance L of the 2 nd row (corresponding to P7-P10 of FIG. 3)_oIn the case of 30mm, the moving speed of the nozzles in the second row can be theoretically 3 times the moving speed of the nozzles in the first row. At this time, the minimum dropping distance L from the time of moving in a straight line path in the column direction_oIn the direction of the line, the minimum dropping distance L when the liquid is moved in a straight line path_oWhen the difference in (b) is large, the moving speed of the nozzle may be increased by moving the nozzle in a linear path in the row direction.

(C) When the same dropping point as that in fig. 2 is dropped by the second embodiment of the present invention, the dropping path is as shown in fig. 4. Here, the minimum dripping distance L_oIs L3.

In the above mode (B), the minimum dropping distance L is used_oThe distance L1 in fig. 1 is the limit of increasing the nozzle moving speed. Therefore, in the second embodiment, in the unidirectional movement in which the substrate moves in a linear path from one end to the other end, one drop is dropped on one panel 102 to make the minimum drop distance L_oThe length becomes longer. That is, the dropping was performed in the order of P1, P3, and P5 in the 1 st movement of the linear path, and the dropping was performed in the order of P6, P4, and P2 in the 2 nd movement of the linear path. That is, when the nozzle makes one round trip in the vertical direction on the substrate, the dropping of the dropping dots arranged in the vertical direction (the dropping dots in one row) is completed. Subsequently, the nozzle was moved to the adjacent row, and the liquid was dropped in the order of P12, P10, and P8, and then folded back, and dropped in the order of P7, P9, and P11.

The effects of the second embodiment will be described below as a specific example. For example, L1 is 10mm and L2 is 20mm in FIG. 1. The moving speed of the nozzle can theoretically be 3 times (L3/L1). On the other hand, since the number of times of movement of the linear path is 2 times, if the time required for the folding back is not considered, it can be said that the effect of time reduction is 1.5 times.

On a straight path, L3/L when taking into account the fold-back time in a drop pattern with 2 drop-off points per panel_oThe second mode can be said to achieve an advantageous effect when the number of times of movement is 1.2 times or more, preferably 1.5 times or more, and more preferably 2.0 times or more, than in the linear path.

The same holds true for a drop pattern having 3 or more drop dots per panel on one straight path. L3/L when the number of drops on a straight path is 10 or more_oThe second aspect can be said to achieve an advantageous effect when the number of times of movement is 1.6 times or more, preferably 2.4 times or more, and more preferably 3.2 times or more, as compared to the number of times of movement in the linear path.

The present invention will be described in detail below with reference to examples, but the present invention is not limited to any of the examples.

Examples

(dripping device)

Fig. 5 is a schematic perspective view of a dropping device 501 for carrying out the method of the present embodiment.

The dropping device 501 of the present embodiment includes: a plurality of discharge devices 601 capable of dropping a liquid material; a stage 502 on which the substrate 101 to which the liquid material is dropped can be placed; and an XYZ drive mechanism 503 in which the discharge device 601 is disposed and which relatively moves the discharge device 601 in XYZ directions on the stage 502. In the present embodiment, 3 discharge devices 601 are provided, but the number of the discharge devices may be changed according to the size of the substrate 101 or the number of the panels 102, and for example, 2 or less or 4 or more may be provided.

The discharge device 601 of the present embodiment is a plunger-type discharge device that moves a plunger that moves forward and backward while being in close contact with a metering tube, and that moves forward and backward at high speed to eject a liquid material from a discharge port.

As shown in fig. 6, the discharge device 601 includes: a tubular metering portion 602; a plunger 603 inscribed in the metering section 602; a nozzle 604 having a discharge port 611; a discharge valve 605 for communicating/blocking the metering section 602 and the nozzle 604; a storage container 606 for storing a liquid material; a liquid supply valve 607 for connecting/disconnecting the storage container 606 and the metering section 602; and a motor 609 that drives the plunger 603 by driving the screw shaft 608.

(discharge step)

In the discharge step by the discharge device 601, first, the liquid material is filled. First, the plunger 603 is moved to a position near the hole 610 connected to the liquid supply valve 607 and the metering portion 602 and not beyond (a position slightly above the hole 610 in fig. 6). Then, the liquid supply valve 607 is opened to communicate the reservoir 606 with the metering portion 602, and the plunger 603 is moved backward. Then, the liquid material in the storage container 606 flows into the metering portion 602 through the liquid supply valve 607, and when the plunger 603 moves back to the uppermost end, the filling is completed.

Next, the discharge of the filling liquid material is performed by opening the discharge valve 605 and moving the plunger 603 in and out according to a desired discharge amount. The ejection by the advancing and retracting operation of the plunger 603 is performed by rapidly accelerating, then rapidly stopping the motor 609, and further rapidly stopping the plunger 603. The liquid material in the metering portion 602 is discharged from the tip of the nozzle 604 by the inertial force applied by the rapid movement and rapid stop of the plunger 603. After the plunger 603 moves to the lowermost end, the discharge valve 605 is closed, the liquid supply valve 607 is opened, and the plunger 603 is moved backward to fill the liquid material.

As described above, the liquid material is filled into the measuring portion 602 from the storage container 606, and the liquid material in the measuring portion 602 is discharged from the nozzle 604, and the dripping operation is repeated.

Since the measuring portion 602 can be filled with the liquid material discharged a plurality of times, the amount of the liquid material filled into the measuring portion 602 can be determined according to the use, for example, 1 panel or 1 substrate.

(example of one drop pattern)

Fig. 7 and 8 show an example of a dropping pattern in which specific numerical values are written. Fig. 7 is a view showing the entire substrate 101, and fig. 8 is a partially enlarged view thereof.

In the dropping pattern shown in FIG. 7, 1.5-inch-sized panels 102 of 20 rows in the vertical direction and 17 columns in the horizontal direction were arranged on a substrate 101 of 750mm in the horizontal direction and 620mm in the vertical direction. 5 drops 103 were set at 10mm intervals in the vertical and horizontal directions on 1 panel 102. The panels 102 are arranged at a spacing of about 31mm in the longitudinal direction and about 44mm in the transverse direction.

(moving speed of nozzle)

When considering the case where the panel 102 in a row is subjected to the dropping operation by 1 discharge device 601, the moving speed of the nozzle in the dropping operation is as follows in the respective methods (a) to (C) described above) in fig. 2 to 4. And, a discharge cycle f_oThe discharge time was 0.2 seconds for each 1 discharge.

In the method (A) illustrated in FIG. 2, the minimum dropping distance L is used_o10mm, so the maximum speed is 50mm/sec (═ L)_o/f_o)。

In the method (B) illustrated in FIG. 3, the minimum dropping distance L is determined by the minimum dropping distances of the n1 th and n3 th columns_o10mm, the maximum moving speed of the nozzle was 50mm/sec, and the minimum dropping distance L of the n2 th row_oSince the flow rate was 31mm, the moving speed of the nozzle during dripping was 155 mm/sec.

In the method (C) illustrated in FIG. 4, since the drop point intervals in all the rows n1 to n3 are 31mm, the movement speed at the time of dropping by the nozzle is 155 mm/sec.

Further, since the moving speed of the nozzle 604 on the substrate 101 is constant, the nozzle 604 moves from a slightly front side of the starting point, and the nozzle 604 extends from the substrate 101 to be folded at the folding back point.

(working hours)

In the case of coating 20 panels by the methods (a) to (C), the time (operating time) taken from the start to the end of the dropping operation calculated at the above speeds is as follows.

In the method (A), the working time of 20 panels was 30.1 seconds.

In this method, the dropping was carried out in the order of a11 → a12 → a21 → a31 → a32 → a 13. When the movement of each point between a11 → c11 is about 0.2 seconds, respectively, the coating time for 1 panel is about 0.8 seconds. The time taken for the movement between the panels is, for example, about 0.74 seconds since the distance between c11 and a13 is about 37 mm. Therefore, the working time of 20 panels is (0.2 sec × 20) + (0.74 sec × 19) to 30.1 sec.

In the method (B), the working time of 20 panels was 27.8 seconds.

In this method, the dropping was carried out in the order of a11 → a12 → a13 → a14 → … → a22 → a21 → a31 → a 32. The coating working time of columns a1 and a3 is (10 [ mm ]. times.20) + (21 [ mm ]. times.10)/50 [ mm/sec ]. times.2 columns of about equal to 24 seconds. The coating time of column a2 is (31 [ mm ] X19)/155 [ mm/sec ]. about.3.8 seconds. Thus, the working time for 20 panels was 27.8 seconds, which is 24+3.8 seconds. When the movement of the folded-back portion is about 0.6 second, the operating time of 20 panels is 27.8 seconds +0.6 seconds × 2, which is 29 seconds.

In the method (C), the operation time of 20 panels was 19.0 seconds.

In this method, the dropping is performed in the order of a11 → a13 → a15 → … → a140 → a → c138 → … → a12 → a21 → a22 → … → a220 → a339 → a337 → … → a338 → a 340. The operating time taken for the movement in a straight path is (31 [ mm ] 19)/155 [ mm/sec ] approximately equal to 3.8 seconds. Since the a1 line and the a3 line move in two linear paths and the a2 line moves in one linear path, the number of times of movement in the linear path is 5. Therefore, the total operating time is 3.8 seconds × 5 to 19.0 seconds. When the movement of the folded portions of the a1 row and the a3 row was about 0.4 second and the folding of the a2 row was about 0.6 second, the operating time of 20 panels was 21.0 seconds, which was 19.0 seconds +2.0 seconds.

From the above results, it was confirmed that the above (B) and (C) in the dropping method according to the present example can shorten the operation time as compared with the dropping method (a).

Further, by moving the nozzle 604 in a straight path in the lateral direction, the working time can be shortened.

The dropping method described above is merely an example, but the present invention is not limited to this example. For example, the number of drops may be changed depending on the desired amount of the liquid material. Further, the arrangement of the dropping points may be changed depending on the number of the dropping points, the spread of the liquid material in the panel, or the like. It is to be understood that the above numerical values are changed when the size of the substrate or the panel is changed.

(availability in industry)

The present invention is applicable to a type of discharge method in which the liquid material is separated from the discharge device and then brought into contact with the work, and for example, the present invention can be applied to a jet type in which the liquid material is caused to fly from the tip of the nozzle at the valve seat and collide with the valve body, a continuous jet type, a demand (demand) type, or the like.

Claims

1. A liquid material dripping device is provided with: a discharge device having a nozzle for discharging a liquid material; a stage on which a substrate is placed; a drive mechanism for moving the discharge device and the platform relative to each other; and a control unit for controlling these operations; said dripping device of liquid material is characterized in that,

the discharge device comprises a metering part communicated with a nozzle with a discharge port and filled with liquid material capable of being discharged for multiple times, and a plunger sliding closely to the inner surface of the metering part, wherein the liquid material is discharged by repeatedly moving the plunger in and out by a desired amount and stopping the movement,

the control unit may move the nozzle and the substrate relative to each other through a dropping path along which the nozzle of one discharge device crosses over or crosses over a straight path a plurality of times on a plurality of identical panels having a plurality of dropping points arranged on the substrate with the non-dropping region interposed therebetween, drop the liquid material while moving the nozzle at a constant moving speed of the nozzle in the straight path, move from a front edge of the dropping point serving as a starting point, and fold over the substrate at a folding point to make the moving speed of the nozzle in the straight path constant,

in the movement of the first straight path (a1) of the dripping paths, the dripping order is set, and the shortest distance L between dripping points in the dripping order is used_o1And a pre-calculated time f required for the discharge device to perform one-drop discharge_oAccording to L_o1/f_oSetting the relative moving speed of the nozzle and the substrate (V1),

shortest distance L between dropping points_o2During the movement of the second straight line path (a2) longer than the first straight line path (a1), the dropping order is set, and the shortest distance L between the dropping points in the dropping order is used_o2And a pre-calculated time f required for the discharge device to perform one-drop discharge_oAccording to L_o2/f_oSetting the relative moving speed of the nozzle and the substrate (V2),

a relative movement speed (V2) of the nozzle and the substrate on the second linear path (a2) is fast compared to a relative movement speed (V1) of the nozzle and the substrate on the first linear path (a 1).

2. A dripping device of a liquid material according to claim 1,

in the first straight line path (a1), the order of dripping by a plurality of discharges is set for one panel.

3. A dripping device of a liquid material as claimed in claim 1 or 2,

in the second linear path (a2), the order of dropping of one droplet is set for one panel.

4. The liquid material dripping device according to claim 1 or 2, wherein the discharge device comprises: a discharge valve for communicating or blocking the nozzle and the metering section; a storage container storing a liquid material; a liquid supply valve for communicating or blocking the storage container and the metering section; and a driving device for driving the plunger.