200946243 六、發明說明： 【發明所屬之技術領域] 本發明係關於—種精度佳地使液賊料微量滴下或飛滴 而排出的裝置及方法，更具體而言，係關於—種在不降低排 出精度下可使塗佈作業中之再抽吸動作達到最小極限的排 出裝置及方法。 【先前技術】 Ο 作為精度佳地使液體材料微量滴下或飛滴而排出的f知 裝置，例如本案申請人所開發之專利文獻所揭示的裝 置。 上述習知排出裝置係藉由使抽吸於計量部中的液體材 料，藉由水密不透水配置的柱塞進行間歇性複數次前進動 作，在每次前進動作飛翔排出液滴的排出方式。 (專利文獻1)日本專利特開2003-190871說公報 ❹（專利文獻2)日本專利特開2004-160314鞔公報 (專利文獻3)日本專利特開2004-160276鱿公報 (專利文獻4)日本專利特開2〇〇5—4〇770號公報 【發明内容】 (發明所欲解決之問題） 習知裝置之排出方式在抽吸於計量管的量受到限制，而有 無法抽吸工件整體所需要量之液體材料的情況。在此情況 下，必須在塗佈作業途中進行再抽吸動作，而有生產性降低 098105617 3 200946243 的問題。 此處，當增大計量管之尺寸則會有如下問題： 亦即’當增大計量管之直徑而增加液體材料之吸入量，則 柱塞之直杈亦必然變大，因而隨柱塞之稍微移動便會有大量 液體材料滴下，結果會有難以進行微量排出的問題。 另方面，當增長計量管之長度，除會導致裝置大型化之 外，亦會有難以提高排出精度的問題。 本發明之目的在於提供一種不降低排出精度下即可使塗 佈作業中之再抽吸動作達到最小極限的排出裝置及方法。 (解決問題之手段） 本發明的裝置為如下構成。亦即： 第1發明的液體材料之排出裴置，係具備有液體材料之儲 存部、柱塞插通的複數計量部、柱塞驅動裝置、及與各計量 部一對一對應的複數噴嘴；其將已充填至計量部的液體材料 以複數次進行排出的液體材料之排出裝置；其特徵在於，上 述柱塞驅動裝置為使全部柱塞同時進退移動的一柱塞驅動 裝置。 第2發明係就第1發明中，上述計量部構成為全部相同容 量。 第3發明係就第1或2發明中，分別對上述計量部設置有 具有使計量部與噴嘴相連通的第一位置及使計量部與儲存 部相連通的第二位置之切換閥，並設有可將各切換閥之位置 098105617 , 200946243 同時進行切換的一閥驅動裝置。 第4發明係就第3發明中，上述柱塞驅動裝置及上述闕驅 動裝置相對於上述複數計量部被配置在鉛直方向。 第5發明係就第3或4發明中，其設置配設有上述切換闕 的塊體’在該塊體設有從上述儲存容_各切關分支流入 液體材料的流路。 第6發明係就第5發明中，上述計量部由可裝接於上述塊 ©體的計量管所構成，且為相互鄰接配置。 第7發明係就第5發明中，於上述塊體形成有計量部。 第8發明魏第7發明巾，於上述塊_成有儲存部。 第9發明的塗佈裝置，係具備有設有平台的架台、及在架 台上延伸且可朝一方向移動的框體，在該框體設有第 中任一發明的排出裝置。 王δ ❿ 本發明的方法為如下構成。亦即： 第10發明的液體材料之排出方法，係從儲存部 =:_材料，_複進行柱塞之進二 上述汁Ϊ部内之液體材料以複數次 出的液體材料⑽出方法；其特徵在於，其設置有複數= 裝置使複數柱塞同二嘴’並透過-柱塞壤動 體材料。 贱同賴ίϋ所有計量部内之液 第11發明係就㈣發财，分別對上料量部設有具有 098105617 200946243 使計量部與喷嘴相連通的第一位置及使計量部與儲存部相 連通的第二位置之切換閥’一邊透過一驅動裝置同時切換各 切換閥，一邊排出液體材料。 (發明效果） 根據本發明’可精度佳地從複數喷嘴滴下微量之液體材 料。 再者，藉由二驅動源可構成裝置，更藉由將其縱向配置， 可細長地構成裝置。 再者，因為可使所供應之液體材料在裝置内分支而導入於 複數計量部中，因而可減少儲存部内所殘留液體材料之量， 可不浪費地使用液體材料。 【實施方式】 本發明之最匈態’例如為—種具備有相鄰接配置之複數 計量部的液體材料之排出裝置，其中，上述計量部分別具備 有柱塞與噴嘴’且具備有使複數柱塞同時進退移動的驅動農 置。 上述冲夏部為暫時儲存經由柱塞之進出移動而從喷嘴排 晋”::之二間，其體積大小構成為適於精度佳地排出微 部設置為複數的理由在於不是使單-計量200946243 VI. Description of the Invention: [Technical Field] The present invention relates to a device and a method for accurately discharging a liquid thief material by dripping or flying droplets, and more specifically, A discharge device and method that minimizes the re-pumping operation during the coating operation with a minimum accuracy. [Prior Art] Ο A device for accurately discharging a liquid material by dripping or dropping a liquid material, for example, a device disclosed in the patent document developed by the applicant of the present invention. In the above-described conventional discharge device, the liquid material sucked into the metering portion is intermittently moved forward by a plunger which is watertight and impervious to water, and the discharge mode of the liquid droplets is discharged in each forward movement. Japanese Patent Laid-Open No. 2004-190871 (Patent Document 2) Japanese Patent Laid-Open No. 2004-160314A (Patent Document 3) Japanese Patent Laid-Open Publication No. 2004-160276A (Patent Document 4) Japanese Patent Japanese Laid-Open Patent Publication No. Hei No. Hei. No. Hei. No. Hei. No. Hei. No. 2-5-770. SUMMARY OF THE INVENTION The problem of the conventional device is limited in the amount of suction to the measuring tube, and there is a need to be able to suck the entire workpiece. The amount of liquid material. In this case, it is necessary to carry out the re-suction operation during the coating operation, and there is a problem that the productivity is lowered by 098105617 3 200946243. Here, when the size of the measuring tube is increased, there is the following problem: that is, when the diameter of the measuring tube is increased to increase the suction amount of the liquid material, the straight squeezing of the plunger is inevitably large, and thus the plunger When it is slightly moved, a large amount of liquid material is dripped, and as a result, there is a problem that it is difficult to perform a minute discharge. On the other hand, when the length of the measuring tube is increased, in addition to the large size of the device, there is a problem that it is difficult to improve the discharge accuracy. SUMMARY OF THE INVENTION An object of the present invention is to provide a discharge apparatus and method which can minimize the re-suction operation in a coating operation without lowering the discharge accuracy. (Means for Solving the Problem) The device of the present invention has the following constitution. In other words, the liquid material discharge device of the first aspect of the invention includes a storage portion having a liquid material, a plurality of metering portions through which the plunger is inserted, a plunger driving device, and a plurality of nozzles corresponding to the respective metering portions in one-to-one correspondence; A liquid material discharge device that discharges the liquid material that has been filled into the metering portion in plural times; wherein the plunger driving device is a plunger driving device that moves all the plungers forward and backward. According to a second aspect of the invention, in the first aspect of the invention, the measuring unit is configured to have the same capacity. According to a third aspect of the invention, in the first or second aspect of the invention, the metering unit is provided with a switching valve having a first position that allows the metering unit to communicate with the nozzle and a second position that connects the metering unit and the storage unit, and is provided There is a valve driving device that can simultaneously switch the positions of the switching valves 098105617 and 200946243. According to a third aspect of the invention, the plunger driving device and the crucible driving device are disposed in a vertical direction with respect to the plurality of measuring units. According to a fifth aspect of the present invention, in the third or fourth aspect of the invention, the block body in which the switching 阙 is disposed is provided, and the block is provided with a flow path into which the liquid material flows from the storage container. According to a sixth aspect of the invention, the measuring unit is configured by a measuring tube attachable to the block body and disposed adjacent to each other. According to a seventh aspect of the invention, in the fifth aspect, the measuring unit is formed in the block. According to the eighth invention, the seventh invention invention has the storage unit in the block. The coating device according to a ninth aspect of the invention includes a gantry having a platform, and a frame extending over the gantry and movable in one direction, and the casing is provided with the discharge device of any one of the inventions. Wang δ ❿ The method of the present invention is constructed as follows. That is, the liquid material discharging method of the tenth invention is a method of discharging the liquid material (10) from the storage portion=:_material, the liquid material in the above-mentioned juice portion into the plurality of times, and the liquid material (10); In that it is provided with a plurality of devices = means for the plurality of plungers to be the same as the two nozzles and to pass through - the plunger body material.第 赖 ϋ 液 液 液 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第The switching valve of the second position discharges the liquid material while simultaneously switching the respective switching valves through a driving device. (Effect of the Invention) According to the present invention, a small amount of liquid material can be dripped from a plurality of nozzles with high precision. Furthermore, the device can be constructed by two driving sources, and the device can be formed elongated by longitudinally arranging them. Further, since the supplied liquid material can be branched into the apparatus and introduced into the plurality of measuring portions, the amount of the liquid material remaining in the storage portion can be reduced, and the liquid material can be used without waste. [Embodiment] The most arbitrage state of the present invention is, for example, a liquid material discharge device including a plurality of metering portions arranged adjacent to each other, wherein the metering portion is provided with a plunger and a nozzle, respectively The plunger moves forward and backward to move the farm. The reason why the above-mentioned rushing portion is temporarily stored from the nozzle by the movement of the plunger is ":", and the volume is configured to be suitable for the precision of the discharge portion. The reason for the plural is that the single-metering is not performed.
098105617 05617 文、/JtL 200946243 入各計量管中的流路。作為上述計量部之其他構成，可揭示 出在計量塊體中設置複數計量孔與從儲存容器使液體材料 分支流入於各計量孔中的流路之態樣。不管何種態樣，喷嘴 前端之水平方向位置均對齊配置。 使計量部與喷嘴一對一對應構成之理由在於就從一個計 里部分支滴入二個喷嘴的態樣中，因計量部内由柱塞加壓的 液體材料之微妙流體均衡，會有液體不會均等地流動於雙方 β 之喷嘴的情況。針對此點，若構成為各計量部分別具有喷 嘴’則可使從各計量部至噴嘴排出口的流路達到全部相同之 封閉形狀（但，亦可介設切換閥），因此可精度佳地施行排出。 再者，當在液體材料充填時將柱塞前端與切換閥間的容量 設為相等，則使在計量部内滑動的柱塞同時進出而施行排 出’可使隨柱塞的進出所產生流_之體積減少達到相同比 例。亦可設為將所有計量部設為相同容量，從所有喷嘴同時 罾排&同量之液體材料。 再者’若在柱塞之前端部設置較桿更寬的密封部（大徑突 起部），則滑動面積縮小，因而可使柱塞高速移動。此時， 使計量部與喷嘴相連通的流路最好構成為實質直線。 ^者，最好上述計量部分別具備有切換閥，並具備有將各 :間同時進行切換的驅動裝置。切換閥可為滑動型、單向 走轉型、或往復作動旋轉型之任—種。 以下’利用實施例詳細說明本發明，惟本發明並不受該等 098105617 200946243 實施例任何限制。 [實施例1] 《整體構成》 由圖至圖4說明本實施例之裝置。另外，圖4中，在柱 塞B31之背面设有桂塞A3Q，在喷嘴咖之背面設有喷嘴 A55在闕B58之背面設有閥A57，在閥播設孔B62之背面 設有閥插設孔A61。 本實施例之排出裝置中，在基座1〇上安裝有板AU、板 B12及板C13而構成框體，在上述框體配設⑴柱塞驅動部、 [2]柱塞部、[3]液送部及[4]閥部。 [1] 柱塞驅動部係由馬達A20、滑座2卜及滑件22所構成。 柱塞驅動部係構成藉由固定在板B12的馬達A2〇之旋轉驅 動，使滑件22可在固定於基座1〇的滑座21上朝滑座21 之延伸方向移動自如。柱塞驅動部之各元件係相對於基座 10之中心轴成線對稱配置。 [2] 柱塞一部分係由柱塞a3〇、柱塞B31、計量管A32、及 計量管B33所構成。 於柱塞部中，柱塞A30與柱塞B31分別經由螺絲A34與螺 絲B35而各自固定於柱塞驅動部之滑件22。構成為柱塞A3〇 可後接滑動地插入至計量管A32之内壁面’桂塞B31可密接 滑動地插入至計量管B33之内壁面。 計量管A32及計量管B33係裝接固定至閥體5〇上面所穿 098105617 » 200946243 設的孔中’藉由馬達A20之驅動，使柱塞A30及柱塞B31 分別密接於計量管A32及計量管B33之内壁面而進行滑動。 此處’柱塞A30及柱塞B31各自之計量管侧前端，為了確 實地在計量管内密接，而可構成較柱塞轴本體部直徑更寬的 直徑（亦即設置密封部）。 計量管A32與計量管B33係相對於基座1〇之中心軸成線 對稱且相互接近保持配置。如此，於本實施例中不會使一個 ❹計量管增長或加寬，#由設置複數而增加排出量防止排出 裝置之大型化。 本實施例之裝置構成為藉由馬達A2G之旋轉動作而使柱 =30:柱細同時在計量管内進行前進移動或後退移動 二合當柱塞A30在計量管似内進行前進移動時， 亦會同時在計量管哪内進行前進移動，而♦ ==A32内進行後退移動時柱 : °十里官B33内進行後退移動。 由鍺存容器4q及㈣輸送管41所構成。 使上_存容由健存液難材料的錯存容器4〇、及 成。_與間趙5〇相連通的液趙輪送管41所構 存容器〜延伸_ 由從到達儲存容器40上 所供應之空壓作 端之壓力供應管42 脚晴 贿存谷器40内所儲存之液體材制 9 200946243 送至閥體50。 儲存容器40係傾斜載置在板B12上，由板All受支撐本 體部而可裝卸地保持固定。 [4]闕部係由閥體50、馬達B51、齒輪組52、轴A53、軸 B54、喷嘴A55、嘴嘴B56、及旋轉檢測機構7〇所構成。 闊部構成為藉由受基座10所支撐之馬達B51的旋轉驅 動’經由齒輪組52，使並列配置的二個軸（即軸A53與轴B54) 進行旋轉’並使固定在板C13之閥體5〇的閥插設孔A61及 闕插設孔B62内所配設的二個閥（即閥A57與閥B58)可旋轉 自如。各閥係具備有使各計量管與各喷嘴相連通的貫通孔、 及在與該貫通孔正交之周面朝閥之長度方向（水平方向）延 伸的溝槽’該各溝槽與各閥插設孔之内壁面互相作用而構成 使各計量管與儲存容器40相連通的流路。 旋轉檢測機構70係由感測器71與檢測板72所構成。檢 測板72為具有缺口的圓盤，隨馬達B51之旋轉而進行旋轉。 構成為檢測板72位於形成「Γ7」字狀之作為光感測器的感 測器71之凹部。感測器71中，凹部上端為發光部，凹部下 端則成為受光部’藉由檢測板72之缺口，可使由上述發光 部所發出的光，對於上述受光部投光或遮光。藉此，根據來 自發光部的光對感測器71之受光部開始遮光之位置、或開 始投光之位置，而控制閥B58之旋轉位置。 在閥體50之底部可裝卸地配設喷嘴A55與噴嘴B56。 098105617 10 200946243 在閥體50上面穿設的孔中，裝接固定計量管a與β。另 外，當然在閥體50上面所穿設的孔本本體部亦可構成為計 量管。 閥體50中設置具有分支路徑的流路’該分支路徑用以將 經與液體輪送管41相連通的液體材料供應口 59所供應之液 體材料，分別輸送至閥Α57與閥Β58。如此，因為構成為經 所供應之閥體50分支而流入於計量管Α與Β，因此不需要 〇 設置複數儲存容器。 軸A53構成為可裝卸地連結於閥A57(另外，圖2及圖4 中，轴A53係位於軸B54之背面）。閥A57藉由軸A53之旋 轉動作’而可取得使計量管A32與液體輸送管41相連通的 第一位置、及使計量管A32與喷嘴A55相連通的第二位置。 軸B54構成為可裝卸地連結於閥B58。閥B58藉由轴 之旋轉動作，而可取得使計量管B33與液體輸送管41相連 β通的第位置、及使計量管Β33與喷嘴Β56相連通的第二位 置。 闊Α57與閥Β58構成為藉由馬達Β51之旋轉動作，而可同 時地j各自之第-位置與第二位置進行切換。 且δ ’馬達A20、馬達恥丨係連接於控制裝置6〇，根據上 述控制裝置6G之指令產生動作。 本貝施例之聚置係具備有二個馬達。而且，由其一 馬達使複數柱塞同時進行移動，並由另一馬達使複數闕同時 098105617 200946243 產生動作。於如此構成中，馬達綱與馬達刷經由滑件而 上下配置。藉由如此配置，便可㈣置細長地形成。另外， 馬達A20與馬達B51最好配置於基座 υ之中心或中心附沂 之同轴上。 处 當在沿ΧΥ方向移動的移動機器人搭裁複數本滴下裝置 時’此種細長構成可增加滴下裝置之搭栽數量，因而較佳。 再者’因為料二㈣達可賴有料與所相產生動 作，因而可輕量地構絲置’在搭載有上述滴下裝置的塗佈 裝置中’於使滴下裝置朝X方向或γ方向騎移動之情況時 均達便利。 《液材排出作業》 使馬達Β51進订轉動動作’將閥Α57與閥Β58設置於第— 位置處’並使計量管Α32及計量管Β33 *別連通於液體輪送 管4卜 接著，使馬達Α20產生旋轉動作，使柱塞Α3〇與柱塞 後退移動’在計量管Α32及計量營Β33中吸入必要量的液體 材料。 接著，使馬達Β51產生動作以使閥Α57及閥β58位於第2 位置處，使计量管與噴嘴相連通。亦即，使計量管Α32與喷 嘴Α55相連通’並使計量管Β33與喷嘴β56相連通。 為了排出所希望量之液體材料，使馬達Α2〇產生旋轉動 作，使柱塞Α30及柱塞Β31前進移動規定量，從喷嘴Α55 098105617 200946243 及喷嘴B56排出液體材料。 此時，柱塞A30及柱塞B31藉由急速前進後接續急遽停 止，可精度佳地從噴嘴中滴下微少量之液體材料。藉由急速 前進後接續急遽停止之動作，tfj*連續地滴下液體材料。 為可使液體材料連續滴下，當然事先必須抽吸必要量。 此處’藉由柱塞之急遽前進後所接續之急遽停止，而精度 佳地從喷嘴中滴下微少量之液體材料。例如藉由使密接於計 ❹ 量管之内壁面而進行滑動的柱塞之進出移動與停止進出，而 調整從與上述計量管相連通的排出口所排出之液滴的排出 量，如此液滴量之調整方法，為調整從上述進出移動的柱塞 開始減速起至停止為止的移動速度以使從上述排出σ所排 出之液滴在每次排出時均保持一定量之液滴量之調整方 法，此處，使上述柱塞後退移動而將液材從儲存容器中吸人 於上述計量管内，藉由重複進行上述柱塞之進出移動與停止 ® 進出，而將上述計量管内之液體材料分開複數次進行排$。 另外，關於該排出方法，本案申請人在專利文獻4已有所揭 示。 在施行所希望次數之滴下動作後’再度使馬達B51進行轉 動動作，將閥A57與閥B58設置於第一位置，並藉由重複上 述所說明的動作，可連續施行排出作業。 搭載有複數本實施例滴下裝置1的塗佈裝置5，係如圖5 所示。 098105617 13 200946243 塗佈裝置5係具備有架台7、可動框體 ，該架”係具有妬件的平台6，該可動= 係由架台1上所固設的-對支樓體支樓，並橫跨架台i之短 邊方向（X方向），該可動框體B82係同樣地橫跨架台1之X 方向。在可動框體A81與可動框體別2之侧面 在X方向可移動自如地安裳有複數滴下裂置！。滴下震;; 由排出裝置與使排出裝置可朝上下方 的Ζ方向驅動農置所構成下方向（Ζ方向）移動自如 © 平藉由X導軌構成可朝χ ==Γ又藉由配設有χ導軌的γ滑件與γ導執而構 杜# ^ °移動自如。另外’亦可於平台6設置用以使工 月方向移動而定位於既定角度的θ旋轉手段。作為x 方向及Y方向之導執’可例示出具備有線性馬達 性滑軌之構成，惟不受限於此構成，例如亦可構成為在滑座 具備有馬達與連動於馬達而進行旋轉的滾珠螺桿，在 備有連動於滾珠螺桿的旋轉而進行直進移動的螺帽。 本實施例重要處在於非為從—計量管分支滴下於二嘴嘴 卩H十篁管及柱塞構成為1個組合，排中 裝置具備有複數此種組合。 在從-計量管分支滴下於二喷嘴的態樣中，因計量管 柱塞加廢的液體材料之微妙流體均衡，會有流體無法均等地 流動至雙讀嘴的如，但藉由本實_的構成，可確實地 滴下液體材料。 耳地 098105617 14 200946243 本實施例中，例示配置有二喷嘴的排出裝置構成，惟本實 施例的技術思想當然亦涵蓋配置有二以上喷嘴的排出裝置 態樣。 再者’因為喷嘴、計量管及柱塞為一個組合，因此當然亦 需要與喷嘴數量相同數目的計量管與柱塞。 [實施例2] 《整體構成》 ， ❿ 由圖6至圖8說明實施例2之裝置。另外，圖8中，在柱 塞Β31之背面具有柱塞Α30，在噴嘴Β56之背面具有噴嘴 Α55 ’在閥Β58的背面具有閥Α57，在閥插設孔Β62之背面 具有閥插設孔Α61，在計量孔Β65之背面具有計量孔Α64。 本實施例之排出裝置就具備有閥插設孔Α61與Β62、儲存 部63、及形成有計量孔Α64與Β65的計量塊體36之處係不 同於實施例1之排出裝置。 ® 計量塊體36係固定於板C13,上面設有供柱塞Α31與Β31 插入的孔，侧面設有與液體輸送管41相連通的液體材料供 應口 59。從液體材料供應口 59所供應的液體材料，暫時儲 存於在計量塊體36内部所形成的儲存部63中。儲存部63 中所儲存的液體材料係經由在閥Α57與閥Β58各自周面所形 成的溝槽而輸送至計量孔Α64與計量孔Β65。本排出·裝置的 液體抽吸步驟與實施例1相同，儲存部63與計量孔々64及 計量孔Β65保持相連通狀態，利用馬達Α20使柱塞Α30與柱 098105617 15 200946243 塞B31同時後退移動而施行。 本排出裝置之液體排出步驟亦與實施例1相同。首先，藉 由支撐於基座10的馬達B51之旋轉驅動，經由齒輪植52 使並列配置的二軸（即軸A53與軸B54)進行旋轉，藉此使各 計量孔與各喷嘴透過設於各閥的貫通孔相連通。然後，利用 馬達A20使柱塞A30與柱塞B31同時急遽前進，接著急遽停 止，藉此精度佳地從喷嘴滴下微少量之液體材料。此動作係 重覆複數次而施行排出作業至經抽吸至計量孔a64與b65 内的液體材料耗盡為止。 在本實施例之排出裝置中亦可將計量孔、柱塞及噴嘴配置 二個以上。又，本實施例之排出裝置當然亦可搭载於實施例 1之塗佈裝置5。 (產業上之可利用性） 本發明適用於平面顯示器製造步驟’例如液晶面板製造步 驟中之液晶滴下步驟等領域。 【圖式簡單說明】 圖1為實施例1滴下裝置之疋面外觀圖。 圖2為圖1所示裝置之側面外觀圖。 圖3為圖2中虛線位置之正面剖視圖。 圖4為圖1中虛線位置之側面剖視圖。 圖5為搭載有圖1所示之滴下裝置的塗佈裝置之立體圖。 圖6為實施例2滴下裝置之je面外觀圖。 098105617 200946243 圖7為圖6所示裝置之侧面外觀圖。 圖8為圖7虛線位置之正面剖視圖。 【主要元件符號說明】098105617 05617 text, /JtL 200946243 into the flow path in each metering tube. As another configuration of the measuring unit, it is possible to disclose a configuration in which a plurality of metering holes are provided in the metering block and a flow path in which the liquid material branches into the metering holes from the storage container. Regardless of the aspect, the horizontal position of the front end of the nozzle is aligned. The reason why the metering portion and the nozzle are configured in one-to-one correspondence is that in the case where two nozzles are dropped from one meter portion, the delicate fluid of the liquid material pressurized by the plunger in the metering portion is equalized, and there is a liquid. It will flow equally to the nozzles of both sides of β. In this regard, if each of the measuring portions has the nozzles, the flow paths from the respective measuring portions to the nozzle discharge ports can be made to have the same closed shape (however, the switching valve can be disposed), so that the accuracy can be accurately performed. Execution. Further, when the capacity between the tip end of the plunger and the switching valve is made equal when the liquid material is filled, the plunger that slides in the metering portion is simultaneously moved in and out to perform the discharge, so that the flow can be generated as the plunger enters and exits. The volume reduction reaches the same ratio. It is also possible to set all the measuring sections to the same capacity and to simultaneously align and equalize the same amount of liquid material from all the nozzles. Further, if a sealing portion (large diameter protruding portion) wider than the rod is provided at the end portion of the plunger, the sliding area is reduced, so that the plunger can be moved at a high speed. At this time, it is preferable that the flow path that connects the metering portion and the nozzle is formed as a substantially straight line. Preferably, each of the measuring units includes a switching valve, and a driving device that simultaneously switches each of the measuring units. The switching valve can be a sliding type, a one-way transition, or a reciprocating rotary type. The invention is described in detail by the following examples, but the invention is not limited by the examples of the 098105617 200946243. [Embodiment 1] <<Overall Configuration>> The apparatus of this embodiment will be described with reference to Fig. 4 . Further, in Fig. 4, a plug A3Q is provided on the back surface of the plunger B31, a nozzle A55 is provided on the back surface of the nozzle coffee, a valve A57 is provided on the back surface of the 阙B58, and a valve insertion is provided on the back surface of the valve opening hole B62. Hole A61. In the discharge device of the present embodiment, the plate AU, the plate B12, and the plate C13 are attached to the base 1A to form a frame, and the frame body is provided with (1) a plunger driving portion, a [2] plunger portion, and [3]. ] Liquid delivery section and [4] valve section. [1] The plunger drive unit is composed of a motor A20, a slider 2, and a slider 22. The plunger driving portion is configured to be driven by rotation of the motor A2 fixed to the plate B12, so that the slider 22 can be moved in the extending direction of the slider 21 on the carriage 21 fixed to the base 1A. The components of the plunger drive portion are arranged in line symmetry with respect to the central axis of the base 10. [2] A part of the plunger is composed of a plunger a3, a plunger B31, a measuring tube A32, and a measuring tube B33. In the plunger portion, the plunger A30 and the plunger B31 are respectively fixed to the slider 22 of the plunger driving portion via the screw A34 and the screw B35, respectively. The plunger A3 is configured to be slidably inserted into the inner wall surface of the measuring tube A32. The cassia plug B31 is slidably inserted into the inner wall surface of the measuring tube B33. The measuring tube A32 and the measuring tube B33 are attached and fixed to the valve body 5 所 above the 098105617 » 200946243. The hole is provided by the motor A20, so that the plunger A30 and the plunger B31 are respectively closely connected to the measuring tube A32 and the metering The inner wall surface of the tube B33 is slid. Here, the tip end of each of the plunger A30 and the plunger B31 on the side of the measuring tube can be formed to have a larger diameter (i.e., a sealing portion) than the diameter of the plunger shaft body portion in order to be surely adhered to the inside of the measuring tube. The metering tube A32 and the metering tube B33 are line-symmetrical with respect to the central axis of the base 1〇 and are disposed close to each other. Thus, in the present embodiment, one of the weir gauge tubes is not enlarged or widened, and # is increased by the number of sets to increase the discharge amount. The apparatus of the present embodiment is configured such that when the motor A2G rotates, the column = 30: the column is fine and the forward movement or the backward movement movement is performed in the measuring tube. When the plunger A30 moves forward within the measuring tube, At the same time, the forward movement is carried out in the measuring tube, and when the movement is reversed in ♦ == A32, the column is moved backwards in the B33. It consists of a storage container 4q and (4) a delivery tube 41. The upper _ storage capacity is made up of the erroneous container 4 of the stagnation liquid material. _Construction container 41 connected to the liquid Zhao-turning pipe 41 connected to the room 〜5 延伸 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The stored liquid material system 9 200946243 is sent to the valve body 50. The storage container 40 is placed on the plate B12 at an inclination, and is detachably held and fixed by the plate A1 being supported by the body. [4] The crotch portion is composed of a valve body 50, a motor B51, a gear train 52, a shaft A53, a shaft B54, a nozzle A55, a nozzle B56, and a rotation detecting mechanism 7A. The wide portion is configured to be driven by the rotation of the motor B51 supported by the susceptor 10 to rotate the two shafts arranged in parallel (ie, the shaft A53 and the shaft B54) via the gear train 52 and to fix the valve on the plate C13. The two valves (ie, valve A57 and valve B58) disposed in the valve insertion hole A61 and the cymbal insertion hole B62 of the body 5 are rotatable. Each of the valves includes a through hole that allows each of the measuring tubes to communicate with each of the nozzles, and a groove that extends in a longitudinal direction (horizontal direction) of the valve perpendicular to the through hole, the grooves and valves The inner wall surfaces of the insertion holes interact to form a flow path for connecting the respective measuring tubes to the storage container 40. The rotation detecting mechanism 70 is composed of a sensor 71 and a detecting plate 72. The detecting plate 72 is a disk having a notch and is rotated in accordance with the rotation of the motor B51. The detecting plate 72 is formed in a concave portion of the sensor 71 as a photosensor which is formed in a "Γ7" shape. In the sensor 71, the upper end of the concave portion is a light-emitting portion, and the lower end of the concave portion serves as a light-receiving portion. The light emitted by the light-emitting portion can be projected or blocked by the light-receiving portion by the light-receiving portion. Thereby, the rotational position of the valve B58 is controlled based on the position of the light from the light-emitting portion to the light-receiving portion of the sensor 71 to start light-shielding or the position at which the light-emitting is started. A nozzle A55 and a nozzle B56 are detachably disposed at the bottom of the valve body 50. 098105617 10 200946243 In the hole penetrating above the valve body 50, the metering tubes a and β are attached and fixed. Further, of course, the hole body portion that is bored on the valve body 50 may be configured as a metering tube. The valve body 50 is provided with a flow path having a branch path for conveying the liquid material supplied from the liquid material supply port 59 communicating with the liquid transfer pipe 41 to the valve port 57 and the valve port 58, respectively. Thus, since it is configured to flow into the metering tube and the weir through the branch of the supplied valve body 50, it is not necessary to provide a plurality of storage containers. The shaft A53 is configured to be detachably coupled to the valve A57 (in addition, in FIGS. 2 and 4, the shaft A53 is located on the back surface of the shaft B54). The valve A57 can obtain a first position in which the measuring tube A32 communicates with the liquid delivery tube 41 and a second position in which the measuring tube A32 communicates with the nozzle A55 by the rotation operation of the shaft A53. The shaft B54 is configured to be detachably coupled to the valve B58. The valve B58 is rotated by the shaft to obtain a first position at which the measuring tube B33 is connected to the liquid delivery tube 41, and a second position for communicating the measuring tube 33 with the nozzle Β56. The wide cymbal 57 and the valve cymbal 58 are configured to be switched by the rotation of the motor cymbal 51, and at the same time, the first position and the second position of each of the j. Further, the δ' motor A20 and the motor shame are connected to the control unit 6A, and an operation is performed in accordance with an instruction from the control unit 6G. The concentrating system of the present embodiment has two motors. Moreover, the plurality of plungers are simultaneously moved by one of the motors, and the other motor causes the plurality of turns to simultaneously act 098105617 200946243. In such a configuration, the motor unit and the motor brush are arranged up and down via the slider. With this configuration, it is possible to form (4) in an elongated manner. Further, the motor A20 and the motor B51 are preferably disposed on the center of the base or on the coaxial side of the center. When the mobile robot moving in the ΧΥ direction plucks a plurality of dropping devices, such an elongated configuration can increase the number of tiling devices, and thus is preferable. In addition, because the second (four) material can act in the same direction, it can be lightly placed in the coating device equipped with the above-mentioned dropping device to move the dropping device in the X direction or the γ direction. The situation is convenient. "Liquid discharge operation" causes the motor cymbal 51 to perform the rotational rotation operation 'Set the valve Α 57 and the valve Β 58 at the first position' and the metering tube 32 and the metering tube * 33 are connected to the liquid transfer tube 4, and then the motor The crucible 20 generates a rotating motion to move the plunger Α3〇 and the plunger backward to 'take in the necessary amount of liquid material in the metering tube 32 and the metering chamber 33. Next, the motor cymbal 51 is actuated to position the valve cymbal 57 and the valve β58 at the second position to allow the metering tube to communicate with the nozzle. That is, the metering tube 32 is brought into communication with the nozzle bowl 55 and the metering tube 33 is communicated with the nozzle β56. In order to discharge a desired amount of liquid material, the motor Α2〇 is rotated, and the plunger Α30 and the plunger Β31 are moved forward by a predetermined amount to discharge the liquid material from the nozzles 55 098105617 200946243 and the nozzle B56. At this time, the plunger A30 and the plunger B31 are stopped by rapid advancement, and a small amount of liquid material can be dripped from the nozzle with high precision. The tfj* continuously drops the liquid material by rapidly advancing and then stopping the rapid stop. In order to allow the liquid material to continuously drip, it is of course necessary to pump the necessary amount in advance. Here, the rapid stoppage of the plunger after the rapid advancement is performed, and a small amount of liquid material is dripped from the nozzle with high precision. For example, by moving the plunger in and out of the inner wall surface of the metering tube to move in and out, the discharge amount of the liquid droplet discharged from the discharge port communicating with the metering tube is adjusted, so that the droplet Method for adjusting the amount of liquid droplets by adjusting the moving speed from the start of the above-described movement of the plunger to the stop of the movement of the plunger from the above-described discharge σ to maintain a certain amount of liquid droplets discharged each time the discharge σ is discharged Here, the plunger is moved backward to suck the liquid material from the storage container into the measuring tube, and the liquid material in the measuring tube is divided into plural by repeating the movement, stopping, and stopping of the plunger. Perform a row of $. Further, regarding the discharge method, the applicant of the present invention has already disclosed it in Patent Document 4. After the drip operation of the desired number of times is performed, the motor B51 is again rotated, the valve A57 and the valve B58 are set to the first position, and the discharge operation can be continuously performed by repeating the above-described operation. A coating device 5 equipped with a plurality of dropping devices 1 of the present embodiment is shown in Fig. 5. 098105617 13 200946243 The coating device 5 is provided with a gantry 7 and a movable frame, and the frame is a platform 6 having a shackle. The movable body is a branch of the slab which is fixed on the gantry 1 and is horizontally In the short-side direction (X direction) of the gantry i, the movable frame B82 is similarly traversed in the X direction of the gantry 1. The movable frame body A81 and the side surface of the movable frame body 2 are movably movable in the X direction. There are multiple drops and splits! Dropping the shock;; The lower direction (Ζ direction) is freely moved by the discharge device and the discharge device can be driven upwards and downwards in the direction of the ©. The flat can be formed by the X guide rail == The Γ Γ Γ 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配 配The guide for the x-direction and the Y-direction can be exemplified as a configuration including a linear motor-type slide rail. However, the configuration is not limited thereto. For example, the slide holder may be provided with a motor and a motor coupled to rotate. The ball screw is provided with the rotation of the ball screw The nut that moves in. The important part of this embodiment is that the branch is not dropped from the measuring tube branch, and the two nozzles and the plunger are combined into one combination, and the row device has a plurality of such combinations. - the branch of the metering tube is dropped in the pattern of the two nozzles, and the delicate fluid balance of the liquid material added by the metering tube plunger may cause the fluid to flow unevenly to the double reading nozzle, but by the configuration of the present invention, The liquid material can be reliably dropped. Ear 098105617 14 200946243 In the present embodiment, a discharge device configured with two nozzles is exemplified, but the technical idea of the present embodiment naturally also covers a discharge device configuration in which two or more nozzles are disposed. 'Because the nozzle, the metering tube and the plunger are a combination, it is of course also necessary to have the same number of metering tubes and plungers as the number of nozzles. [Embodiment 2] "Overall Configuration", 实施 Example 2 will be described with reference to Figs. In addition, in Fig. 8, a plunger Α 30 is provided on the back surface of the plunger Β 31, and a nozzle Α 55 ′ is provided on the back surface of the nozzle Β 56. The valve Α 57 is provided on the back surface of the valve Β 58, and the back surface of the valve insertion hole 62 is provided. The valve insertion hole 61 has a metering hole 64 on the back surface of the metering hole 65. The discharge device of this embodiment is provided with a valve insertion hole 61 and a weir 62, a storage portion 63, and a metering block formed with the metering holes 64 and 65. The body 36 is different from the discharge device of Embodiment 1. The metering block 36 is fixed to the plate C13, and is provided with a hole for inserting the plunger 31 and the crucible 31, and a liquid communicating with the liquid delivery tube 41 on the side. The material supply port 59. The liquid material supplied from the liquid material supply port 59 is temporarily stored in the storage portion 63 formed inside the metering block 36. The liquid material stored in the storage portion 63 is via the valve 57 and the valve. The grooves formed by the circumferential faces of the weirs 58 are sent to the metering orifices 64 and the metering orifices 65. The liquid suction step of the discharge device is the same as that of the first embodiment, and the storage portion 63 is kept in communication with the metering orifice 64 and the metering orifice 65, and the plunger 30 is retracted simultaneously with the column 098105617 15 200946243 by the motor Α20. Implementation. The liquid discharge step of the discharge device is also the same as in the first embodiment. First, by the rotational driving of the motor B51 supported by the susceptor 10, the two shafts arranged in parallel (ie, the shaft A53 and the shaft B54) are rotated via the gear implant 52, whereby the metering holes and the nozzles are transmitted through the respective nozzles. The through holes of the valve are in communication. Then, the plunger A30 and the plunger B31 are simultaneously advanced by the motor A20, and then stopped abruptly, whereby a small amount of liquid material is dripped from the nozzle with high precision. This operation is repeated several times to perform the discharge operation until the liquid material sucked into the metering holes a64 and b65 is exhausted. In the discharge device of this embodiment, the metering hole, the plunger, and the nozzle may be disposed in two or more. Further, the discharge device of the present embodiment can of course be mounted on the coating device 5 of the first embodiment. (Industrial Applicability) The present invention is applicable to the field of manufacturing steps of a flat panel display, for example, a liquid crystal dropping step in a liquid crystal panel manufacturing step. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a top plan view of the dripping device of the first embodiment. Figure 2 is a side elevational view of the apparatus of Figure 1. Figure 3 is a front cross-sectional view of the position of the broken line in Figure 2. Figure 4 is a side cross-sectional view of the position of the broken line in Figure 1. Fig. 5 is a perspective view of a coating device on which the dropping device shown in Fig. 1 is mounted. Fig. 6 is a perspective view showing the je surface of the dripping device of the second embodiment. 098105617 200946243 Figure 7 is a side elevational view of the device of Figure 6. Figure 8 is a front cross-sectional view of the position of the broken line of Figure 7. [Main component symbol description]
1 滴下裝置 5 塗佈裝置 6 平台 7 架台 10 基座 11 板A 12 板B 13 板C 20 馬達A 21 滑座 22 滑件 30 柱塞A 31 柱塞B 32 計量管A 33 計量管B 34 螺絲A 35 螺絲B 36 計量塊體 40 儲存容器 098105617 17 200946243 41 液體輸送管 42 壓力供應管 43 液體輸送管 44 液體材料 50 閥體 51 馬達B 52 齒輪組 53 軸A 54 轴B 55 喷嘴A 56 喷嘴B 57 閥A 58 閥B 59 液體材料供應口 60 控制裝置 61 闊插設孔A 62 閥插設孔B 63 儲存部 64 計量孔A 65 計量孔B 70 旋轉檢測機構 71 感測器1 Dropping device 5 Coating device 6 Platform 7 Stand 10 Base 11 Plate A 12 Plate B 13 Plate C 20 Motor A 21 Slide 22 Slide 30 Plunger A 31 Plunger B 32 Metering tube A 33 Metering tube B 34 Screw A 35 Screw B 36 Metering block 40 Storage container 098105617 17 200946243 41 Liquid delivery pipe 42 Pressure supply pipe 43 Liquid delivery pipe 44 Liquid material 50 Valve body 51 Motor B 52 Gear set 53 Axis A 54 Axis B 55 Nozzle A 56 Nozzle B 57 Valve A 58 Valve B 59 Liquid material supply port 60 Control device 61 Wide insertion hole A 62 Valve insertion hole B 63 Storage part 64 Metering hole A 65 Metering hole B 70 Rotation detecting mechanism 71 Sensor
098105617 18 200946243 72 檢測板098105617 18 200946243 72 Test board
81 可動框體A81 movable frame A
82 可動框體B 098105617 1982 movable frame B 098105617 19