CN1962083B - Discharge method - Google Patents
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- CN1962083B CN1962083B CN2006101445258A CN200610144525A CN1962083B CN 1962083 B CN1962083 B CN 1962083B CN 2006101445258 A CN2006101445258 A CN 2006101445258A CN 200610144525 A CN200610144525 A CN 200610144525A CN 1962083 B CN1962083 B CN 1962083B
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Abstract
A discharge method is provided to discharge a liquid containing a functional material from a plurality of nozzles of a droplet discharge head to a plurality of film formation regions of a discharge medium in synchronization with a relative movement of the discharge medium and the droplet discharge head. The discharge method includes performing a first discharge step in which the liquid is discharged from a plurality of nozzles in a nozzle row so that the liquid is not discharged simultaneously from adjacent nozzles positioned over the film formation regions, and performing a second discharge step in which the liquid is discharged from a plurality of nozzles in the nozzle row in a different combination from the nozzles used in the first discharging step so that the liquid is not discharged simultaneously from adjacent nozzles positioned over the film formation regions.
Description
Technical field
The present invention relates to spray jet method with mobile aqueous body and manufacture method, electro-optical device and the electronic equipment that has used the chromatic filter of this jet method.
Background technology
Have the jet method of mobile aqueous body as ejection, known have a kind of aqueous body that will contain the colorized optical filtering modulator material to be ejected on the substrate, makes the method (patent documentation 1) of chromatic filter.
In the manufacture method of above-mentioned chromatic filter, according to making nozzle rows be arranged in the mode of the direction of regulation, make the relative substrate of a plurality of droplet discharging heads and opposed with a plurality of nozzles that aqueous body can be sprayed as drop.And, adopted following method: the state that does not spray aqueous body with nozzle (not using nozzle) from the regulation zone that is positioned at the nozzle rows both ends, substrate and droplet discharging head are relatively moved on one side, aqueous body suitably is ejected into the assigned position on the substrate from nozzle (use nozzle) on one side, forms chromatic filter.Thus, owing to do not use the many nozzles of spray volume that are positioned at regulation zone, nozzle rows both ends to carry out the ejection of aqueous body, so, can spray aqueous body more equably.
And also known a kind of chromatic filter that is not limited to has mobile aqueous body by ejection, can critically form the droplet ejection apparatus of the functional membrane with good fine pattern and the manufacture method (patent documentation 2) of device on substrate.
In the manufacture method of this device, with the camera that utilizes droplet ejection apparatus to possess, the result that the drop movement of the aqueous body when falling within on the substrate to bullet is taken continuously can determine best aqueous body ejection condition as the basis.
Patent documentation 1: the spy opens the 8th page in 2003-159787 communique
Patent documentation 2: the spy opens the 3rd page in 2004-290799 communique
In fact spray volume from the aqueous body of a plurality of nozzles ejection of above-mentioned droplet discharging head exists deviation between nozzle.If this deviation is big, then inequality can take place in the formed film in ejection back, for example if chromatic filter then exists the problem of irregular colour.
Reason as the spray volume inequality between this nozzle can be enumerated, producing mechanism's (for example piezoelectric element or heating element heater etc.) when applying driving voltage to being used for from nozzle sprays aqueous body as drop energy, driving voltage between the adjacent nozzles produces deviation, promptly so-called electrical interference (crosstalk).And, can enumerate, deviation can take place in the deviation etc. of supplying with the stream shape of aqueous body under the state of supplying with aqueous body, make the pressure of ejection drop or speed different so-called machinery between nozzle disturb.
Summary of the invention
The present invention proposes in view of above-mentioned problem, its purpose is to provide the deviation that can reduce the spray volume between the adjacent nozzle, spray the jet method of aqueous body with stable spray volume, and the manufacture method, electro-optical device and the electronic equipment that have adopted the chromatic filter of this jet method.
Jet method of the present invention, with relatively moving synchronously of goods and droplet discharging head, from a plurality of nozzles of droplet discharging head the film of goods is formed the aqueous body that the zone ejection comprises functional material, comprise: the first ejection operation, according to from the nozzle rows that a plurality of nozzles constitute, not forming the mode that the relevant adjacent nozzle in zone sprays described aqueous body simultaneously, select employed nozzle to spray with film; With the second ejection operation,, select to spray with the nozzle of the first ejection operation various combination according to not from forming the mode that the relevant adjacent described nozzle in zone sprays described aqueous body simultaneously with film.
From the spray volume of the aqueous body of a plurality of nozzles ejection of droplet discharging head, between adjacent nozzles,, electrical interference or machinery has deviation because of disturbing.According to this method, in the first ejection operation, select employed nozzle according to from nozzle rows, not forming the mode that the relevant adjacent nozzle in zone sprays aqueous body simultaneously with film, form the zone at the film of goods and spray the aqueous body that contains functional material.Then, in the second ejection operation,, select to spray with the nozzle of the first ejection operation various combination according to not from forming the mode that the relevant adjacent nozzle in zone sprays aqueous body simultaneously with film.Therefore, in ejection once, always do not spray aqueous body simultaneously from forming the relevant adjacent nozzle in zone with film.And, in ejection formerly and the follow-up ejection, the combination difference of the nozzle of the aqueous body of ejection in the nozzle rows.Thus, compare with the situation that sprays aqueous body from adjacent nozzles simultaneously, owing to be difficult to produce electricity or machinery disturbs, so, can reduce the deviation of the spray volume between adjacent nozzle.That is, adopt such jet method, can spray aqueous body, form the zone at film and form the uniform film that constitutes by functional material with stable spray volume.
And, preferably have and divide the wall part that a plurality of films form the zone on the surface of described goods, in the first ejection operation and the second ejection operation, when selected nozzle is relevant with wall part, do not use this nozzle.
According to this method, in the first ejection operation and the second ejection operation, when selected nozzle is relevant with wall part, do not use this nozzle.Therefore, the mode that is difficult to drip in wall part according to the aqueous body that sprays sprays.Thus, can suppress to drip and be not accommodated in film in wall part and form in the zone, cause desired spray volume change from the aqueous body of nozzle ejection.That is, can form the zone and form the film more uniformly that constitutes by functional material at film.
And, in jet method of the present invention, further preferably form the zone, and the drop of ejection drips when wall part when aqueous body is ejected into film as drop from selected nozzle, do not use the nozzle of this drop of ejection.Thus since with the size of nozzle is judged whether that as benchmark the situation of dripping in wall part compares, with the drop of ejection as benchmark, so, the drop of ejection is not dripped in wall part.That is, adopt such jet method, can spray aqueous body, form the zone at film and form the film more uniformly that constitutes by functional material with more stable spray volume.
In addition, described droplet discharging head has makes aqueous body produce mechanism as drop from a plurality of energy that a plurality of nozzles spray, a plurality of energy produce mechanism and are electrically connected with a driving mechanism that produces drive waveforms with specified period, in the first ejection operation and the second ejection operation, impose on the energy corresponding by the driving mechanism drive waveforms that the select time sequence is different in turn and produce mechanism, the ejection drop with employed nozzle.
According to this method, in the first ejection operation and the second ejection operation, from the beginning the driving mechanism drive waveforms that the select time sequence is different in turn imposes on the energy corresponding with employed nozzle and produces mechanism, makes aqueous body be ejected as drop.Therefore, the energy to adjacent nozzle produces the not identical drive waveforms of application time sequence of mechanism.Thus, because electrical interference does not take place between nozzle, so, the spray volume deviation that can suppress to cause by electrical interference.
In addition, described droplet discharging head has makes aqueous body produce mechanism as drop from a plurality of energy that a plurality of nozzles spray, a plurality of energy produce mechanism and are electrically connected with a driving mechanism that produces a plurality of drive waveforms in 1 cycle, in the first ejection operation and the second ejection operation, select the drive waveforms that time series is different in a plurality of drive waveforms to impose on the energy generation mechanism corresponding, ejection drop in turn by a driving mechanism with employed nozzle.
According to this method, in the first ejection operation and the second ejection operation, from the beginning the different drive waveforms of time series in driving mechanism a plurality of drive waveforms of selecting in turn to be produced by 1 cycle imposes on the energy corresponding with employed nozzle and produces mechanism, makes aqueous body be ejected as drop.Therefore, the energy of adjacent nozzle produces mechanism and is not applied in the identical drive waveforms of time series.Thus, because electrical interference does not take place between nozzle, so, can suppress the spray volume deviation that causes because of electrical interference.And, owing to a plurality of drive waveforms produced in one-period, so, in one-period, can proceed to secondary ejection at least.In addition, by changing the ejection frequency, can in one-period, carry out than the ejection more than twice.That is, can the aqueous body of ormal weight be ejected into film and form the zone with the shorter time.
And, same film is formed the zone carry out described first ejection operation and the described second ejection operation.Thus, owing to stable spray volume aqueous body is ejected into same film and forms the zone, so, can reduce same film and form and form inequality because of the uneven film that causes of spray volume in the zone.
The invention provides a kind of jet method, according to nozzle rows with a plurality of nozzles and the relative scanning that is ejected thing, from described nozzle the described thing that is ejected is sprayed aqueous body, according to the group unit that constitutes by the mutual at least not described nozzle of adjacency that described nozzle rows comprised, set timing with described scan-synchronized, spray described aqueous body, described timing is different between a plurality of described group.
According to this jet method, do not spray simultaneously owing to belong to mutually not between on the same group the adjoining nozzles, so integral body can reduce machinery and disturb.Thus, the characteristic deviation between the nozzle that can relative remission causes because of interference sprays aqueous body with stable spray volume.
And in described jet method, described nozzle rows has described group more than 3.
According to this jet method, because nozzle rows has group more than 3, so the average nozzle that can further enlarge each group thus, can further reduce machinery and disturb at interval.
In addition, in described jet method,, constitute described group according to constituting described group the quantity of described nozzle about equally mode between described a plurality of groups.
If it is unequal between group to constitute the quantity and the distribution density of nozzle, then the meeting that influences because of machinery between nozzle and electrical interference creates a difference between group, and the deviation of spray volume takes place.In this jet method, can avoid this problem.
In addition, described jet method, by select with the time cut apart the part of a plurality of drive waveforms of generation, offer the energy that is configured in described nozzle inboard and produce mechanism, spray described aqueous body; According to and the described group of described drive waveforms of selecting accordingly mutual unduplicated mode between described a plurality of groups, carry out the selection of described drive waveforms.
According to this jet method, owing to can make each group regularly different by the driving feed system of a system, so, can utilize simple hardware construction to obtain above-mentioned effect.
And, in described jet method,, carry out the selection of described drive waveforms according to corresponding with described group and the described drive waveforms that can select is periodic mode regularly.
According to this jet method, owing to make a nozzle spray aqueous body with periodic timing, so regularly the ejection condition between is the same, can make the drop amount in the scanning direction stabilisation.
And, in described jet method,, carry out the selection of described drive waveforms according to corresponding with described group and described drive waveforms that can select is the mode of acyclic timing.
According to this jet method, because the ejection condition is different according to each ejection timing, so, the change that can produce spray volume (configuration amount of aqueous body) in the scanning direction.Thus,, appended the inequality with the composition of its quadrature, formed the inequality of disperseing with two-dimensional approach with respect to the inequality of the configuration amount that forms because of the characteristic deviation between nozzle.Because the inequality that such two-dimensional approach disperses is lower than (1 dimension) uneven visuognosis of wire, so, have and make uneven inconspicuous effect.
The manufacture method of chromatic filter of the present invention, be used to make have on substrate and divide a plurality of films and form the wall part in zone and be present in the chromatic filter that described a plurality of film forms the multiple color element in zone, use the jet method of foregoing invention, to contain different color elements and form the multiple aqueous body of material as functional material, be ejected into described a plurality of film from a plurality of nozzles of droplet discharging head and form the zone, form described multiple color element.
According to this method, can spray aqueous body with stable spray volume owing to used, form the jet method that the zone forms the uniform films that is made of functional material at film, so, can make the chromatic filter that is formed uniformly multiple color element.
Electro-optical device of the present invention possesses the manufacture method of the chromatic filter that has adopted foregoing invention and the chromatic filter made.Thus, owing to possess the chromatic filter that is formed uniformly multiple color element, so, the few electro-optical devices that possess high display quality of unfavorable condition such as irregular colour can be provided.
Electronic equipment of the present invention is equipped with the electro-optical device of foregoing invention.Thus, because the electro-optical device that carries possesses the few high display qualities of unfavorable condition such as irregular colour, so, can provide and can carry out the electronic equipment that colour attractive in appearance shows.
Description of drawings
Fig. 1 is the approximate three-dimensional map of expression droplet ejection apparatus.
Fig. 2 (a) is the approximate three-dimensional map of structure of expression droplet discharging head, (b) is the general view of configuration of a plurality of nozzles of expression droplet discharging head.
Fig. 3 is the block diagram that the expression control device reaches the electricity formation of each one that is associated with control device.
Fig. 4 is the plane of expression chromatic filter.
Fig. 5 is the flow chart of the manufacture method of expression chromatic filter.
Fig. 6 (a)～(f) is the general profile chart of the manufacture method of expression chromatic filter.
Fig. 7 (a) is the plane of the liquid ejection method of expression embodiment 1, (b) is the figure that concerns between expression drive waveforms and the control signal.
Fig. 8 (a) is the plane of the liquid ejection method of expression embodiment 2, (b) is the figure that concerns between expression drive waveforms and the control signal.
Fig. 9 is the summary exploded perspective view of expression liquid crystal indicator.
Figure 10 is the stereogram of expression portable information processing device.
Figure 11 is the plane of configuration of the color element of expression chromatic filter.
Figure 12 is that the group of expression in the nozzle rows constitutes and the fall figure of position of drop bullet.
Figure 13 is the figure of the relation of expression drive waveforms and control signal.
Figure 14 is the figure of the comparative example of the expression effect that is used to illustrate second embodiment.
Figure 15 is that the group of expression in the nozzle rows constitutes and the fall figure of position of the bullet of drop.
Figure 16 is the figure of the variation of expression the 3rd embodiment.
Among the figure: 1-is ejected thing and as the glass substrate of substrate, the 2-film forms the zone, 3,3R, 3G, 3B-color element, the 4-wall part, the 10-chromatic filter, the 20-droplet discharging head, the 22-nozzle, 22a, 22b-nozzle rows, 29-produces the piezoelectric element of mechanism as energy, and 30,31,31a, 31b, 32,34,35,35a, 35b-drop, 200-is as the liquid crystal indicator of electro-optical device, 300-is as the portable information processing device of electronic equipment, a1, a2, a3, a4, a5-nozzle, and W-is as the goods (work) that are ejected thing.
The specific embodiment
Embodiments of the present invention, to the manufacture method of the chromatic filter that used the droplet ejection apparatus that possesses droplet discharging head, be illustrated as the liquid crystal indicator of the electro-optical device that has used this chromatic filter and as the portable information processing device that is equipped with the electronic equipment of this liquid crystal indicator, wherein said droplet discharging head sprays as drop aqueous body from nozzle.
(first embodiment)
＜droplet ejection apparatus 〉
At first, based on Fig. 1～Fig. 3 droplet ejection apparatus is described.Fig. 1 is the approximate three-dimensional map of expression droplet ejection apparatus.
As shown in Figure 1, droplet ejection apparatus 100 is that aqueous body is sprayed as drop, forms the device of the film that is made of aqueous body on goods W, comprising: the stand (stage) 104 that goods W is carried out mounting; With head unit 101, it has aqueous body is ejected into by a plurality of droplet discharging heads 20 (with reference to Fig. 2) of the goods W of mounting as drop.
And droplet ejection apparatus 100 possesses: be used for along the directions X axis of guide 102 of sub scanning direction (directions X) driving head unit 101 and the directions X CD-ROM drive motor 103 that the directions X axis of guide 102 is rotated.And possess: be used for engaging the Y direction CD-ROM drive motor 106 that rotates to the Y direction axis of guide 105 of stand 104 guiding with the Y direction axis of guide 105 along main scanning direction (Y direction).In addition, possess the base station 107 that the directions X axis of guide 102 and the Y direction axis of guide 105 is configured in top, possess control device 108 in the bottom of this base station 107.
And possess: cleaning mechanism 109 is used to that a plurality of droplet discharging heads 20 of head unit 101 are cleaned (recovering to handle); With heater 111, be used to heat the aqueous body after the ejection, make solvent evaporation, drying.In addition, on cleaning mechanism 109, also possesses Y direction CD-ROM drive motor 110.
Have a plurality of from a plurality of nozzles 22 aqueous bodies of ejection and be coated to the droplet discharging head 20 (with reference to Fig. 2) of goods W in the head unit 101.And, utilize these a plurality of droplet discharging heads 20, can spray aqueous body individually according to the ejection voltage that provides by control device 108.To narrate in the back for this droplet discharging head 20.
Unqualified for directions X CD-ROM drive motor 103, it for example can be stepper motor etc., if supply with the drive pulse signal of X-directions from control device 108, then make 102 rotations of the directions X axis of guide, the head unit that engages with the directions X axis of guide 102 101 is moved along directions X.
Equally, also unqualified for Y direction CD-ROM drive motor 106,110, it for example can be stepper motor etc., if supply with the drive pulse signal of Y direction from control device 108, then engage rotation, the stand 104 and the cleaning mechanism 109 that possess Y direction CD-ROM drive motor 106,110 are moved along the Y direction with the Y direction axis of guide 105.
Cleaning mechanism 109 carries out following processing when droplet discharging head 20 is cleaned,, move to the position in the face of head unit 101 that is, connects airtight with the nozzle face of droplet discharging head 20, attracts the gland of aqueous body not to handle (capping); The nozzle face that is attached with aqueous body is carried out the wiping of wiping and handle (wiping); From droplet discharging head 20 all nozzles spray the preparation ejection of aqueous body or receive aqueous body not to and with the processing of its discharge.Omitted the detailed description of cleaning mechanism 109 at this.
Heater 111 is unqualified, for example can be the mechanism that utilizes lamp annealing that goods W is heat-treated, and it carries out evaporation drying to the aqueous body that is ejected on the goods W, and is used to change the heat treatment of film forming.The power connection of this heater 111 and disconnection are all by control device 108 controls.
The coating action of droplet ejection apparatus 100 is as described below: carry the drive pulse signal of regulation from control device 108 to directions X CD-ROM drive motor 103 and Y direction CD-ROM drive motor 106, head unit 101 is relatively moved along main scanning direction (Y direction) along sub scanning direction (directions X), stand 104.Then, during this relatively moves, provide ejection voltage, spray aqueous body to the regulation zone of goods W with the drop form, apply from each droplet discharging head 20 from control device 108.
From the spray volume of the drop of each droplet discharging head 20 ejections, can adjust by the size of the ejection voltage that provided by control device 108.
Fig. 2 is the skeleton diagram of the structure of expression droplet discharging head.Fig. 2 (a) is the approximate three-dimensional map of structure of expression droplet discharging head, and Fig. 2 (b) is the general view of configuration of a plurality of nozzles of expression droplet discharging head.In addition, in order clearly to constitute, this figure have been carried out suitable amplification or dwindled.
Shown in Fig. 2 (a), droplet discharging head 20 is so-called piezoelectricity mode ink guns of three-layer structure, by the nozzle plate 21 with a plurality of nozzles 22; Container panel 23, it comprises and its division portion 24 that divides of 22 pairs of replies of each nozzle, is formed with aqueous body stream; With oscillating plate 28, has the piezoelectric element (piezo) 29 that produces mechanism as energy.Division portion 24 and oscillating plate 28 by nozzle plate 21 and container panel 23 constitute a plurality of pressure generating chamber 25.Each nozzle 22 is communicated with each pressure generating chamber 25 respectively.And, on oscillating plate 28, dispose a plurality of piezoelectric elements 29 accordingly with each pressure generating chamber 25.
In container panel 23, be provided with public stream 27, be used for temporarily retaining the aqueous body of supplying with from storage (tank) (omitting diagram) by the supply hole 28a that is formed on oscillating plate 28.In addition, the aqueous body that is filled in public stream 27 is fed into each pressure generating chamber 25 by supply port 26.
Shown in Fig. 2 (b), droplet discharging head 20 has two nozzle rows 22a, 22b, has a plurality of (180) diameter to be approximately the nozzle 22 of 28 μ m with spacing P1 assortment respectively.And two nozzle rows 22a, 22b sow discord apart from the state of injector spacing P2 of half of P1 with mutual mistake, are disposed at nozzle plate 21.Under this situation, spacing P1 is approximately 140 μ m.Therefore, if from observing with the direction of nozzle rows 22a, 22b quadrature, then 360 nozzles 22 are in the state that the injector spacing P2 with about 70 μ m arranges.In addition, when the actual ejection of aqueous body, do not use 10 nozzles 22 of nozzle rows 22a, 22b both end sides.This is because consider with other nozzle 22 and compare, and is difficult to stablize from the spray volume of the nozzle 22 that is positioned at both end sides.Therefore, the effective nozzle total length with droplet discharging head 20 of two nozzle rows 22a, 22b is injector spacing P2 * 319 (being approximately 22mm).In addition, the interval of nozzle rows 22a, 22b is approximately 2.54mm.
Fig. 3 is the block diagram that the electricity of expression control device and each one of being associated with control device constitutes.As shown in Figure 3, control device 108 comprises: input buffer storage 120, accept the ejection data of aqueous body from external information processing; With handling part 122, the ejection data that temporarily are stored in input buffer storage 120 are launched in storing mechanism (RAM) 121, transmit control signal to each one of association.Also comprise: scanning driving part 123, receive control signal from handling part 122, position control signal is sent to directions X CD-ROM drive motor 103 and Y direction CD-ROM drive motor 106; As a drive division 124 of a driving mechanism, the same control signal that receives from handling part 122 sends to droplet discharging head 20 with drive voltage pulses (drive waveforms).
Handling part 122 will form the relevant position control signal in zone with film and send to scanning driving part 123 from the ejection data that storing mechanism 121 is stored.Scanning driving part 123 receives this control signal, and position control signal is sent to directions X CD-ROM drive motor 103, and droplet discharging head 20 is moved along the X-direction as sub scanning direction.And, position control signal is sent to Y direction CD-ROM drive motor 106, the stand 104 that maintains goods W is moved along the Y direction as main scanning direction.Thus, droplet discharging head 20 and goods W are relatively moved, so that the drop 30 of aqueous body is ejected into the desired position of goods W from droplet discharging head 20.
In addition, handling part 122 forms the zone and sprays aqueous body fluid and drip 30 data transaction and become 4 ejection data bitmaps by each nozzle 22 with what kind of bullet density that falls being illustrated in film from the ejection data that are stored in storing mechanism 121, sends to a drive division 124.And, according to specifying the data that the nozzle rows 22a of droplet discharging head 20, which nozzle 22 in the 22b driven (ON-OFF), with when sending " (timing) detection signal constantly " that the piezoelectric element 29 of droplet discharging head 20 is applied drive voltage pulses, promptly latch (LAT) signal and channel (CH) signal and send to a drive division 124.Drive division 124 receives these control signals, and appropriate drive voltage pulses is sent to droplet discharging head 20, thus, and from the drop 30 of the aqueous body of nozzle 22 ejections.
In the present embodiment, handling part 122 sends LAT signal and CH signals according to not forming the mode that adjacent nozzles 22 regional extent sprays aqueous body simultaneously from film to a drive division 124.And a drive division 124 can be corresponding with the LAT signal, with the cycle generation drive voltage pulses of regulation.And handling part 122 relatively moves synchronously with goods W and droplet discharging head 20, is applied in mode to the piezoelectric element 29 corresponding with employed nozzle 22 according to the different drive waveforms of time series, and the CH signal is sent to a drive division 124.
＜chromatic filter 〉
Below, according to Fig. 4 chromatic filter is described.Fig. 4 is the plane of expression chromatic filter.
As shown in Figure 4, chromatic filter 10 has on the surface as the glass substrate 1 of transparency carrier a plurality of films is formed zone 2 wall parts of dividing 4.Form in the zone 2 at each film, be formed with three looks (R: redness, G: green, B: color element 3 blueness).Each color element 3R, 3G, 3B are configured between the homochromy color element 3 with linearity.That is, chromatic filter 10 has the color element 3 of striped mode.
The manufacture method of＜chromatic filter 〉
Then, according to Fig. 5 and Fig. 6 the manufacture method of the chromatic filter of present embodiment is described.Fig. 5 is the flow chart of the manufacture method of expression chromatic filter, and Fig. 6 (a)～(f) is the general profile chart of the manufacture method of expression chromatic filter.And the manufacture method of the chromatic filter 10 of present embodiment is to use aforesaid droplet ejection apparatus 100, has adopted the manufacture method of liquid ejection method described later.
As shown in Figure 5, the manufacture method of the chromatic filter 10 of present embodiment comprises: the operation (step S1) that forms wall part 4 at glass substrate 1; With the operation (step S2) that the surface of the glass substrate 1 that is formed with wall part 4 is handled.Also comprise: to the glass substrate after the surface treatment 1, ejection comprises the operation (step S3) that different color elements forms the multiple aqueous body of material as functional material; With the aqueous body after the ejection is carried out drying and makes color element 3 immobilized operations (step S4).And, comprising:, form the operation (step S5) of planarization layer according to the mode that covers formed wall part 4 and color element 3; With the operation (step S6) that on planarization layer, forms transparency electrode.
The step S1 of Fig. 5 is the operation that forms wall part 4.In step S1, shown in Fig. 6 (a), at first, form the first wall part 4a according to the mode that the division film forms zone 2 on the surface of glass substrate 1.As the formation method,, according to the surface of cover glass substrate 1 with have the mode of light-proofness, form the metal film of Cr or Al etc. or the film of metallic compound by vacuum vapour deposition or sputtering method.Then, the coating photoresist also forms the mode of regional 2 openings according to film, by photoetching process expose, development, etching.Further, form material by the photosensitive wall part that applies about 2 λ m thickness, and adopt photoetching process to expose, develop equally, on the first wall part 4a, form the second wall part 4b.Wall part 4 becomes the two layers of cofferdam structure of what is called that are made of the first wall part 4a and the second wall part 4b.In addition, wall part 4 is not limited to this, also can only be to use the photonasty wall part with light-proofness to form one deck structure of the second wall part 4b of material formation.Then, enter into step S2.
The step S2 of Fig. 5 is a surface treatment procedure.In step S2, in mode the surface of glass substrate 1 is handled, so that in the aqueous body ejection operation of back, the aqueous body bullet of ejection drops on film and forms the wetting expansion of meeting behind the zone 2 with lyophily.And the mode that has lyophobicity according to the portion of the crown at least of the second wall part 4b is handled, even so that a part of bullet of the aqueous body after the ejection is fallen the second wall part 4b, also can make it be accommodated in film and form in the zone 2.
As surface treatment method, the glass substrate 1 that is formed with wall part 4 is carried out O
2As the plasma treatment of handling gas with fluorine is that gas is as the plasma treatment of handling gas.That is, film forms zone 2 and is handled by lyophily, and afterwards, the surface (comprising wall) of the second wall part 4b that is made of photoresist is handled by lyophoby.In addition, have lyophobicity, then also can omit the latter's processing if form the material self of the second wall part 4b.Then, enter step S3.
The step S3 of Fig. 5 is the operation of the aqueous body of ejection.In step S3, shown in Fig. 6 (b), will be formed with wall part 4 and by the stand 104 of surface-treated glass substrate 1 mounting in droplet ejection apparatus 100.Then, relatively move (to main scanning direction) synchronously, comprise the nozzle 22 of droplet discharging head 20 that color element forms the aqueous body of material and form zone 2 ejection drops 30 to film from being filled with mounting has the stand 104 of glass substrate 1 and a droplet discharging head 20.Be ejected into total spray volume that film forms the aqueous body in zone 2, by in advance based on the ejection data of ejection number of times etc., control to a drive division 124 transmission appropriate control signals from the handling part 122 of control part 108, so that the thickness that the drying process (step S4) in the back can obtain stipulating.Detailed jet method will be narrated in the back.Then, enter step S4.
The step S4 of Fig. 5 is a drying process.In step S4, shown in Fig. 6 (c), the glass substrate 1 that 111 pairs of heaters that utilize droplet ejection apparatus 100 to be possessed are ejected aqueous body heats, and from aqueous evacuator body solvent composition, will form color element 3 immobilizations that material constitutes by color element.
In the present embodiment, at first, contain the aqueous body of R (redness) color element formation material and make its drying by form zone 2 ejections at film, form color element 3R, then, according to the order of G (green), B (blueness), by spraying the aqueous body that comprises different colours key element formation material in turn and carrying out drying, shown in Fig. 6 (d), formed color element 3R, 3G, the 3B of three looks thus.In addition, be not limited to this, for example also can adopt in the ejection operation of step S3, the multiple aqueous body that will comprise different colours key element formation material respectively is filled into different droplet discharging head 20, and each droplet discharging head 20 is equipped on head unit 101, form the aqueous body of zone 2 ejections from each 22 pairs of desired films of nozzle.Then, set glass substrate 1 in the dry decompression dry device, carry out the method for drying under reduced pressure constant the carrying out of the vapour pressure that can make solvent.
The jet method of＜aqueous body 〉
Here, based on embodiment, the jet method that forms 2 ejections aqueous body in zone at film is described in detail.
(embodiment 1)
Fig. 7 is the summary pie graph of the liquid ejection method of expression embodiment 1.Fig. 7 (a) is the plane of expression jet method, and Fig. 7 (b) is the figure of the relation of expression drive waveforms and control signal.
Shown in Fig. 7 (a), the jet method of embodiment 1 is to form the approximately parallel state of nozzle rows 22a of zone 2 long side direction and droplet discharging head 20 along main scanning direction (Y direction) jet method that relatively move, that be known as so-called transverse scan with film.Form zone 2 at the film that is arranged in sub scanning direction (directions X), it is relevant that the nozzle a1 among the nozzle rows 22a and nozzle a2 and the film on top form zone 2, and it is regional 2 relevant that nozzle a4 and nozzle a5 and the film of bottom form.And, with the relevant state configuration droplet discharging head 20 of nozzle a3 and wall part 4.
The jet method of embodiment 1 comprises: the first ejection operation, and according to not from forming the mode that zone 2 relevant adjacent nozzle a1, a2 and nozzle a4, a5 spray aqueous body simultaneously, select employed nozzle a1, a4 to spray with film; With the second ejection operation,, select to spray with first nozzle a2, the a5 that sprays the operation various combination according to not from forming the mode that zone 2 relevant adjacent nozzle a1, a2 and nozzle a4, a5 spray aqueous body simultaneously with film.In addition, in the first ejection operation and the second ejection operation, do not use the nozzle a3 relevant with wall part 4.
Therefore, shown in Fig. 7 (a), in the first ejection operation, the film that falls within top from drop 31 bullets of the aqueous body of nozzle a1 ejection forms zone 2.And the film that falls within the bottom from drop 34 bullets of the aqueous body of nozzle a4 ejection forms zone 2.Next door portion 4 places are not ejected aqueous body.Because film forms the surface of the glass substrate 1 in zone 2 and is handled by lyophilyization, so, drop 31, the 34 wetting expansions that bullet falls behind.For color element 3 being formed the thickness of regulation, even this moment is because spray volume is not enough, so carry out the second ejection operation.In the second ejection operation, according to the mode that does not spray aqueous body simultaneously, select nozzle a2, a5 with the first ejection operation various combination from adjacent nozzle a1, a2 and nozzle a4, a5, ejection drop 32,35 and bullet fall within each film and form zone 2.That is, nozzle a1, a4 are first group the nozzles that constitutes among the nozzle rows 22a, and nozzle a2, a5 are second group the nozzles that constitutes among the nozzle rows 22a, carry out its ejection (the first ejection operation/second ejection operation) in the mutual different moment.
Certainly, form in the zone 2 too, in the first and second ejection operations, spray from other nozzles of nozzle rows 22a at other films of the color element 3 that is formed with same color along directions X.In addition, under the situation that can synchronously further spray, as long as select nozzle a1, a4 to spray once more with the main scanning of Y direction.Even so, when not reaching the spray volume of necessity, forming zone 2 by the film at the color element 3 that is formed with same color carries out after main scannings of aqueous body ejection finish, carry out after directions X subscan droplet discharging head 20, carrying out once more main scanning repeatedly, thus, each film that can be equably the aqueous body of ormal weight be ejected into same color forms zone 2.
Then, the selection of the drive waveforms (drive voltage pulses) that applies for the piezoelectric element of employed nozzle describes.Shown in Fig. 7 (b), for example a drive division 124 of control device 108 is corresponding to LAT signal (pulse), with cycle transmission drive waveforms A1, A2, the A3～An of 20kHz.These drive waveforms A1, A2, A3～An are respectively according to by offering the mode drive waveforms that design, that have same shape and size that piezoelectric element 29 sprays the drop of ormal weight.And, be the selected drive waveforms A1 of signal CH1 by CH signal from handling part 122, be applied to and the corresponding piezoelectric element 29 of employed nozzle a1, a4 in the first ejection operation.And, be the selected drive waveforms A2 of signal CH2 by CH signal from handling part 122, be applied to and the corresponding piezoelectric element 29 of employed nozzle a2, a5 in the second ejection operation.Carry out repeatedly first the ejection operation, second the ejection operation situation under too, make with film according to the different drive waveforms of time series and to form the mode that zone 2 relevant adjacent nozzles do not spray aqueous body simultaneously, select employed nozzle by LAT signal and CH signal, carry out the ejection of drop.
In the ejection condition enactment of the droplet ejection apparatus 100 of present embodiment, synchronously spray the relative velocity along the main scanning of Y direction of aqueous body with the relative moving speed of stand 104 and droplet discharging head 20, be set to about 200mm/ second.Therefore, if will be based on the LAT signal and drive waveforms A1, the A2 that produces, the cycle of A3～An are made as 20kHz, then the needed time of one-period be 0.05 μ second.Thus, rate of travel of droplet discharging head 20 is 10 μ m during this.So between drop 31,34 that falls along the main scanning direction bullet and the drop 32,35 is 10 μ m at interval.In fact, the film that is ejected aqueous body forms the big or small of all kinds of zone 2.Therefore, consider based on main scanning and the drop that bullet falls at interval, as long as determine the ejection number of times of main scanning direction.
And, though wall part 4 handled by lyophoby, thereby form in the zone 2 even aqueous body bullet falls also can be accommodated in film, but, because the spacing P1 of nozzle 22 and film form the interval integral multiple not necessarily of the directions X in zone 2, so the position of the nozzle 22 relevant with wall part 4 not necessarily.Therefore, when the aqueous body from nozzle 22 ejection dripped in wall part 4, aqueous body is accommodated in two films that clip wall part 4, and to form in the zone 2 which be indefinite.In order to form the aqueous body that zone 2 correctly sprays ormal weight at film, preferably spray aqueous body according to not dripping in the mode of wall part 4.
In addition, the amount (volume or weight) from the drop 30 of nozzle 22 ejection of droplet discharging head 20 can change according to the size (current potential) of the drive waveforms (drive voltage pulses) that is applied to corresponding piezoelectric element 29.Therefore, even under not relevant with wall part 4 state of nozzle 22, based on drive waveforms, the drop 30 from this nozzle ejection also can drip in wall part 4 sometimes.On the contrary, even be under the state relevant with wall part 4 at nozzle 22, by drive waveforms, the drop 30 from this nozzle ejection also can not drip in wall part 4 sometimes.So, in the present embodiment, when the drop from selected nozzle 22 ejections drips in wall part 4, more specifically, when the drop 30 of bullet before falling forms diameter when approximate spherical corresponding to wall part 4, make the ejection data according to the mode of not using this nozzle.Thus, can form the aqueous body that zone 2 stably sprays ormal weight at film.
In addition, in the foregoing description 1, though shown in Fig. 7 (a), nozzle a1, a4 are selected in the first ejection operation, also can at first select nozzle a2, a5.And, also can at first select in the operation when the ejection of postorder, to select nozzle a2, a4 after nozzle a1, a5 spray drop in first ejection.Thus, the drop bullet is fallen and wetting expansion if form regional long side direction at each film, then the back can fall according to carrying out bullet near near the mode the central portion.Thus, by at first making the drop bullet fall near the corner portion that film that drop is difficult to wetting expansion forms zone 2 and making its wetting expansion, can further provide aqueous body equably.
(embodiment 2)
Fig. 8 is the skeleton diagram of the liquid ejection method of expression embodiment 2.The plane of Fig. 8 (a) expression jet method, Fig. 8 (b) is the figure of the relation of expression drive waveforms and control signal.The liquid ejection method of embodiment 2 is that a kind of drive division 124 sends a plurality of (2) drive waveforms in 1 cycle with respect to embodiment 1, optionally the piezoelectric element corresponding with employed nozzle 29 is applied the method for this drive waveforms.
Shown in Fig. 8 (a), the liquid ejection method of embodiment 2 comprises: first operation, according to not from forming the mode that zone 2 relevant adjacent nozzle a1, a2 and nozzle a4, a5 spray aqueous body simultaneously, select employed nozzle a1, a5 to spray with film; With the second ejection operation,, select to spray with first nozzle a2, the a4 that sprays the operation various combination according to not from forming the mode that zone 2 relevant adjacent nozzle a1, a2 and nozzle a4, a5 spray aqueous body simultaneously with film.In addition, identical with embodiment 1, in the first ejection operation and the second ejection operation, do not use the nozzle a3 relevant with wall part 4.
More specifically, shown in Fig. 8 (b), a drive division 124 sends two drive waveforms (for example drive waveforms A1 and drive waveforms B1) based on the LAT signal in one-period.The cycle of LAT signal is identical with embodiment 1, is 20kHz.For example, in the first ejection operation, the drive waveforms A1 that will be selected by the signal CH1 as the CH signal imposes on the piezoelectric element 29 corresponding with employed nozzle a1, a5, makes drop 31a and drop 35a bullet fall within each film and forms zone 2.In the second ejection operation, the drive waveforms B1 that will be selected by the signal CH2 as the CH signal imposes on the piezoelectric element 29 corresponding with employed nozzle a2, a4, makes drop 32 and drop 34 bullets fall within each film and forms zone 2.And, carrying out the first ejection operation repeatedly, the drive waveforms A2 that will be selected by the signal CH1 as the CH signal imposes on the piezoelectric element 29 corresponding with employed nozzle a1, a5, makes drop 31b and drop 35b bullet fall within each film and forms zone 2.When all ejections, do not spray aqueous body simultaneously from forming zone 2 relevant adjacent nozzle a1, a2 and nozzle a4, a5 with film.
Under this situation, the interval of drop 31a, 35a that bullet falls by each ejection and drop 32,34 and the interval of drop 32,34 and drop 31b, 35b are embodiment 1 half 5 μ m.Therefore, the jet method of embodiment 2 is compared with the jet method of embodiment 1, even with identical main scanning speed, also can make more drop bullet fall within film and form zone 2.That is, the aqueous body that can shorten ormal weight is ejected into the time that film forms zone 2.In addition, the combination of employed nozzle is not limited to this, in the first ejection operation and the second ejection operation, also exist to use the situation of the local nozzle that has repeated.
By the way, in embodiment 1, double to be set at 40kHz if will send the cycle of drive waveforms, then can obtain the effect identical with embodiment 2, but, based on the intrinsic frequency characteristic of droplet discharging head 20, if improve the cycle (driving frequency) of drive waveforms, then can't follow the trail of the movement of the piezoelectric element 29 that is applied in drive waveforms, the drop amount that might cause spraying is not an ormal weight.Embodiment 2 has considered such unfavorable condition, works out the sending method that realizes control signal based on the handling part 122 of control part 108.
If adopt the jet method of the foregoing description 1 or embodiment 2, then can form zone 2 ejections at each film and comprise the aqueous body that color element forms material with stable spray volume, form uniform color element 3.
Then, the subsequent handling in the manufacture method of chromatic filter 10 is described.The step S5 of Fig. 5 is that planarization layer forms operation.In step S5, shown in Fig. 6 (e), form planarization layer 6 according to the mode that covers wall part 4 and each color element 3R, 3G, 3B.Can enumerate as the formation method, by coating acrylic resins such as spin-coating method, rolling methods and make its dry method.In addition, also can adopt after the coating photonasty acrylic resin, make the method for its curing by irradiation ultraviolet radiation.Thickness is approximately 100nm.Then, enter step S6.
The step S6 of Fig. 5 is that transparency electrode forms operation.In step S6, shown in Fig. 6 (f), film forming is by the transparency electrode 7 of formations such as ITO (Indium Tin Oxide) on planarization layer 6.Can enumerate as film build method, conductive materials such as ITO as target (target), are carried out the method for evaporation or sputter in a vacuum.In this case, thickness is approximately 10nm.According to the electro-optical device that uses chromatic filter 10, formed transparency electrode 7 is processed into the shape (pattern) of suitable necessity.
Manufacture method according to above-mentioned chromatic filter 10, can will comprise multiple aqueous body that the different colours key element forms material with stable spray volume is ejected into film as drop 30 and forms zone 2, thus, can make the chromatic filter 10 with multiple color element 3R, 3G, 3B, described color element 3R, 3G, 3B have been lowered because the unfavorable conditions such as irregular colour that ejection causes.
＜electro-optical device 〉
Below, based on accompanying drawing 9, the liquid crystal indicator as the electro-optical device of present embodiment is described.Fig. 9 is the summary exploded perspective view of expression liquid crystal indicator.
As shown in Figure 9, the liquid crystal indicator 200 of present embodiment comprises: the display panels 220 of TFT (Thin FilmTransistor) infiltration type and the lighting device 216 that display panels 220 is thrown light on.Display panels 220 comprises: have counter substrate 201 as the chromatic filter of color element, have the device substrate 208 of a TFT element 211 that is connected with pixel electrode 210 in three terminals and by the liquid crystal (omitting diagram) of a pair of substrate 201 and 208 clampings.And the surface at a pair of substrate 201,208 of the exterior side that becomes display panels 220 disposes the upper deflection board 214 and the lower polarizing plate 215 that make the light polarization that sees through.
Counter substrate 201 is made of transparent materials such as glass, is divided into rectangular a plurality of films in the face side of holding liquid crystal by wall part 204 and forms in the zone, as multiple color element, is formed with chromatic filter 205R, 205G, the 205B of RGB three looks.Wall part 204 comprises: had the metal of light-proofness or the lower floor cofferdam 202 that is known as black matrix that its oxide-film constitutes and be formed on the lower floor cofferdam 202 cofferdam, upper strata 203 that (in the accompanying drawing down) is made of organic compound by Cr etc.And counter substrate 201 comprises: as the overlay (OC layer) 206 of planarization layer, and chromatic filter 205R, 205B, 205G that it covers wall part 204 and is divided by wall part 204; With opposite electrode 207, it forms in the mode that covers OC layer 206, is made of ITO nesa coatings such as (Indium Tin Oxide).Counter substrate 201 adopts the manufacture method manufacturing of the chromatic filter 10 of above-mentioned embodiment to form.
Device substrate 208 is made of transparent materials such as glass equally, comprising: the face side that clips liquid crystal via dielectric film 209 form rectangular pixel electrode 210 and with a plurality of TFT elements 211 of pixel electrode 210 corresponding formation.In three terminals of TFT element 211, two terminals of other that are connected with pixel electrode 210 are not with the state of mutually insulated, and are configured to cancellate scan line 212 according to the mode of surrounding pixel electrode 210 and are connected with data wire 213.
Lighting device 216 for example uses white LED, EL, cold-cathode tube etc. as light source, so long as possess can with from the light of these light sources towards the structures such as LGP, diffuser plate and reflecting plate that display panels 220 penetrates, then can use equipment arbitrarily.
The counter substrate 201 that possesses owing to the liquid crystal indicator 200 of present embodiment has chromatic filter 205R, 205G, the 205B that the manufacture method of the chromatic filter 10 that uses above-mentioned embodiment is made, so this liquid crystal indicator 200 has the few high display qualities of demonstration unfavorable condition such as irregular colour.
In addition, display panels 220 is not limited to TFT element 211 as active component, also can be equipment with TFD (Thin Film Diode) element, and, if possess the equipment of chromatic filter, then also can be the passive liquid crystal indicator that disposes according to the interlaced mode of electrode that constitutes pixel at least one side's substrate.And last lower polarizing plate 214,215 also can be the equipment that makes up with the optically functional films such as phase-contrast film that use with the purpose of improving view angle dependency etc.
(electronic equipment)
Below, with reference to accompanying drawing 10, the portable information processing device as the electronic equipment of present embodiment is described.Figure 10 is the stereogram of expression portable information processing device.
As shown in figure 10, the portable information processing device 300 of present embodiment comprises: information processor main body 301 and display part 303 with keyboard with key supporting 302.In display part 303, be equipped with few liquid crystal indicators with high display quality 200 such as irregular colour.
The effect of above-mentioned embodiment is as described below.
(1) in the liquid ejection method of the embodiment 1 of above-mentioned embodiment, in the first ejection operation, according to from nozzle rows 22a, not forming the mode that zone 2 relevant adjacent nozzle a1, a2 and nozzle a4, a5 spray aqueous body simultaneously with film, select employed nozzle a1, a4, form zone 2 ejections at the film of glass substrate 1 and contain the aqueous body that color element forms material.Then, in the second ejection operation,, select to spray with first nozzle a2, the a5 that sprays the operation various combination according to not from forming the mode that zone 2 relevant adjacent nozzle a1, a2 and nozzle a4, a5 spray aqueous body simultaneously with film.Therefore, in ejection once, always do not spray aqueous body simultaneously from forming zone 2 relevant adjacent nozzle a1, a2 and nozzle a4, a5 with film.And, in ejection formerly and the follow-up ejection, spray the selection difference of the nozzle of aqueous body.And the corresponding piezoelectric element 29 of nozzle of selected use when spraying applies the different drive waveforms of time series in the drive waveforms that a drive division 124 sends with cycle of 20kHz with each.And then, according to not controlling to dividing the mode that film forms the aqueous body of wall part 4 ejections in zone 2.Thus, compare, disturb owing to be difficult to produce the electricity and the machinery of droplet discharging head 20 with the situation that sprays aqueous body from adjacent nozzles a1, a2 and nozzle a4, a5 simultaneously, so, the deviation of the spray volume between adjacent nozzle can be reduced.That is, adopt such jet method, can spray aqueous body, form zone 2 formation at film and form the uniform color element 3 that material constitutes by color element with stable spray volume.
(2) liquid ejection method of the embodiment 2 of above-mentioned embodiment is with respect to the jet method of embodiment 1, drive division 124 sends a plurality of (2) drive waveforms in one-period, based on the CH signal, when formerly spraying and during follow-up ejection, the drive waveforms that the time series in a plurality of drive waveforms is different is applied in to the piezoelectric element corresponding with the nozzle of selected use 29.Therefore, compare, even identical main scanning speed also can make more drop 30 bullets fall within film and form zone 2 with the jet method of embodiment 1.That is, the aqueous body that can shorten ormal weight is ejected into the time that film forms zone 2.
(3) because the manufacture method of the chromatic filter 10 of above-mentioned embodiment, adopted the liquid ejection method of the foregoing description 1 or the foregoing description 2, so, can will comprise multiple aqueous body that the different colours key element forms material with stable spray volume is ejected into film as drop 30 and forms zone 2, thus, can make the multiple color element 3R that has the unfavorable conditions such as irregular colour that cause of ejection and be reduced, the chromatic filter 10 of 3G, 3B.
(4) because the liquid crystal indicator 200 as electro-optical device of above-mentioned embodiment possesses counter substrate 201, described counter substrate 201 has the manufacture method of the chromatic filter 10 that adopts above-mentioned embodiment and chromatic filter 205R, the 205G, the 205B that make, so, the bad few liquid crystal indicators with high display quality 200 of demonstration such as irregular colour can be provided.
(5) because the portable information processing device 300 as electronic equipment of above-mentioned embodiment, be equipped with liquid crystal indicator 200 with high display quality at display part 303, so, can provide and can carry out the colored portable information processing device 300 that shows to information such as literal and images attractive in appearancely.
Variation outside the above-mentioned embodiment is as described below.
The liquid ejection method of (variation 2) above-mentioned embodiment is not limited to embodiment 1 and embodiment 2.For example, when the quantity that on main scanning direction, forms zone 2 relevant nozzles 22 with film for a long time, can adopt the jet method that makes up embodiment 1 and embodiment 2.Like this, because can be the drop bullet being fallen with 10 μ m, the different interval of 5 μ m, so, can be according to the mode that changes based on employed nozzle, adjust the drop bullet that film is formed zone 2 position that falls.That is, can change the bullet position that falls according to being difficult to produce the uneven mode of ejection.
The liquid ejection method of (variation 3) above-mentioned embodiment is not limited to shown in embodiment 1 and embodiment 2 like that, forms the situation of the aqueous body of zone 2 ejections at same film.For example, film form the zone continuous or approaching along main scanning direction, when this film is formed zone ejection and contains the aqueous body of same functional material, also can adopt described liquid ejection method.Therefore, used the film formation of the liquid ejection method of above-mentioned embodiment to be not limited to chromatic filter, for example, if used the aqueous body that contains the metal line material, contain the aqueous body that is orientated film formation material, then also can be applied to the formation method of metal line, alignment films.
(variation 4) is not limited to this by the constituting of chromatic filter 10 of the manufacture method manufacturing of the chromatic filter 10 of above-mentioned embodiment.Figure 11 is the plane of the color element configuration of expression chromatic filter.The chromatic filter 10 of present embodiment is respectively along the be arranged in a straight line so-called striped mode of shape of same direction with different color element 3R, 3G, 3B shown in Figure 11 (a).For example, the configuration of the delta pattern mode of the mosaic mode of Figure 11 (b) and Figure 11 (c) also can be adopted the manufacture method of the chromatic filter 10 of above-mentioned embodiment.In addition, different color elements 3 is not limited to three kinds of colors, also can be the above formations of 4 kinds of colors.
(variation 5) utilized the electro-optical device of the chromatic filter of being made by the manufacture method of the chromatic filter 10 of above-mentioned embodiment 10 to be not limited to liquid crystal indicator 200.For example, can enumerate chromatic filter 10 and possess substrate with each color element 3R, 3G of chromatic filter 10, a plurality of organic EL luminous elements that 3B is corresponding, the top emission type organic EL display that the mode that can not enter according to moisture etc. seals.
The electronic equipment that (variation 6) is equipped with liquid crystal indicator 200 is not limited to portable information processing device 300.For example, can be preferably use as the image indication mechanism of the video recorder of portable telephone, the portable information device that is known as PDA (PersonalDigital Assistants) or portable terminal device, desktop PC, Digital Still Camera, vehicle mounted monitor, DV, LCD TV, visiting type and direct-view monitoring type, automobile navigation apparatus, pager, electronic notebook, computer, word processor, work station, video telephone set, POS terminating machine etc., in all electronic equipments, can carry out demonstration attractive in appearance.
(second embodiment)
Below, with reference to Figure 12, Figure 13, be the center with difference with first embodiment, second embodiment of the invention is described.
Figure 12 is that the group of expression in the nozzle rows constitutes and the fall figure of position of drop bullet.Figure 13 is the figure of the relation of expression drive waveforms and control signal.
In Figure 12, each nozzle of nozzle rows 22a constitutes the first～three group respectively.That is, the nozzle that has been invested numeral 1～3 among the figure constitutes the first～three group respectively, narrate if the group number of the orientation (Y direction) of nozzle rows 22a put in order, and then be 1,2,3,2,3,1,3,1,2 ... (following circulation).Constitute by such group, belong between same group the nozzle mutually not adjacency, in addition, the quantity of nozzle that belongs to group between each group about equally.
In Figure 13, the ON/OFF data (ejection data) of each nozzle that is latched according to the timing with control signal LAT are selected drive waveforms A1～C2 ... a part offer the piezoelectric element of corresponding setting with each nozzle.And, spray drop from nozzle with the timing that is supplied to drive waveforms.In addition, drive waveforms A1～C2 ... it is respectively the waveform that the mode of drop of the ejection ormal weight according to being provided for piezoelectric element 29 (with reference to Fig. 2) designs with same shape and size.
Here, the selection of the drive waveforms that the first～three group shower nozzle is related, the supply of drive waveforms control signal CH1～CH3 regularly carries out according to the rules.Promptly, the drive waveforms A1 of the timing of first system, A2 ... be provided for the piezoelectric element of first group of nozzle, the drive waveforms B1 of the timing of second system, B2 ... be provided for the piezoelectric element of second group of nozzle, the drive waveforms C1 of the timing of the 3rd system, C2 ... be provided for the piezoelectric element of the 3rd group of nozzle.
Like this, in the present embodiment, each is associated the supply system's (is the relative sequence of benchmark with control signal LAT) regularly by making the drive waveforms in each group, makes can not cause ejection repetition regularly between group.Thus, machinery disturbs and suitably to be reduced, and makes that characteristic deviation relaxes relatively between the nozzle that causes because of interference.And, because the timing of each system is periodically, so the ejection condition is the same between each ejection regularly, thus, can make drop amount relative scanning direction stabilisation.
In this second embodiment, because the nozzle of nozzle rows 22a constitutes three groups, so the formation nozzle number of each group is lacked than first embodiment, the nozzle equispaced in the group is compared with first embodiment and is broadened.Thus, can further realize depending on the reduction of the machinery interference of the degree of approach between nozzle.In addition, though generally speaking, has the also big more tendency of effect that the many more interference of number reduce of cutting apart of group.But because as can be known,, then can obtain the essence effect of same degree, therefore,, adopt the formation of 3 groups in the present embodiment in view of the easiness etc. of control if group is more than 3 according to experiment.
Turning back to Figure 12 once more, in this jet method, is prerequisite with the scanning of nozzle rows 22a and glass substrate, forms at film under the nozzle scan track in zone 2 the drop bullet is fallen.Because the ejection of drop is regularly cut by every component based on said method,, between the nozzle sets of correspondence, be offset along the scanning direction generation so the bullet of drop falls the position as shown in the figure.In addition, 1～3 the numeral that falls in the drop bullet that the position invests among the figure, the system number (with reference to Figure 13) of the drive waveforms supply timing that expression is relevant with its drop ejection.
In this embodiment, form zone 2 and the position of nozzle relation according to film, spray driving nozzle (among the figure by thick line represent, below be called drive nozzle) and do not spray fully driving nozzle (among the figure by fine rule represent, below be called the nozzle that stops) in nozzle rows 22a, produce a little irregular.Here, if the nozzle that is conceived to stop is observed putting in order of its nozzle, then become 1,2,3,1,2,3 of rule ..., the quantity and the distribution density of the nozzle (driving nozzle) of this expression formation group do not differ widely between group in fact, but about equally.
Figure 14 is the figure of expression comparative example that is used to illustrate the effect of second embodiment.
In this comparative example, putting in order of the group number of the orientation of nozzle rows 22a (Y direction) is 1,2,3 ... (following circulation).Here, if the nozzle that is conceived to stop is observed putting in order of its group, then become 1,1,1,2,2,3,3,3 brokenly ...The nozzle (driving nozzle) of the essence of this expression formation group is counted and is distributed in and produced deviation between the group.
Constitute if become such group, it is poor to produce between group owing to the influence of machinery between nozzle and electrical interference, becomes the main cause that the spray volume deviation takes place.That is, the formation of the group in second embodiment (with reference to Figure 12) has been considered such situation.
For convenience's sake, above-mentioned explanation only is conceived to nozzle rows 22a, still, in fact in the position that the spacing of nozzle rows 22a is replenished, also carries out same ejection from nozzle rows 22b (with reference to Fig. 2).And in order to form the aqueous body of zone 2 configuration (filling) ormal weights at film, the situation of ejection insufficient total amount is a lot of in single pass, in fact carries out above-mentioned scanning by forming regional repeated multiple times at same film, reaches ormal weight.
Like this, under repeatedly scanning and situation about spraying by a plurality of nozzles, preferably make a film form zone 2 related nozzle dispersionization or regularly decentralized, in other words, do not make the supply system deviation regularly of the drive waveforms that is associated in chien shih ejection sweep time.If a plurality of films form zone 2 each, all there is ejection remarkable deviation regularly, then its reason is the configuration inequality of aqueous body.In addition, even form in the zone, when scanning a plurality of nozzle simultaneously, if, then can become uneven reason because of the system of selection of drive waveforms makes ejection regularly deviation take place at same film.This can think, under situation about as present embodiment, spraying intermittently, in the initial ejection and follow-up ejection after having passed through between stand-down, difference has taken place in the state (pressure loss etc.) of public stream 27 (with reference to Fig. 2), causes the change of spray volume.
(the 3rd embodiment)
Then, with reference to Figure 15,16, be that the center describes the 3rd embodiment of the present invention with difference with second embodiment.
Figure 15 is that the group of expression in the nozzle rows constitutes and the fall figure of position of drop bullet.
In this embodiment as shown in figure 15, adopted long side direction the describe mode consistent that makes film form zone 2 with main scanning direction.And the drop that forms zone 2 at a film sprays, and uses a nozzle to carry out.
Each nozzle of nozzle rows 22a constitutes the first～three group respectively, and the nozzle that is subordinated to the first～three group carries out the ejection of drop with the timing (with reference to Figure 13) of first～the 3rd system respectively.Thus, identical with the situation of second embodiment, realized the reduction disturbed between nozzle having relaxed characteristic deviation between the nozzle that causes because of interference relatively.
And, since the supply of the related drive waveforms of each group regularly (ejection regularly) have periodically (with reference to Figure 13), so as shown in the figure, the drop after the ejection falls with bullet uniformly-spaced along main scanning direction.In addition, the bullet of representing with imaginary line in the position relevant with wall part 4 position that falls is for convenience ejection periodicity regularly to be carried out sense of vision explanation and expression, does not represent that in fact the drop bullet falls within this position.
In addition, in this variation, arrange nozzle rows 22a for the short side direction that forms zone 2 along film, forming the situation that zone 2 long side direction carries out main scanning along film is illustrated, but, arrange nozzle rows 22a at the long side direction that forms zone 2 along film, the short side direction that forms zone 2 along film carries out also having same effect under the situation of main scanning.
Figure 16 is the figure of the variation of expression the 3rd embodiment.
In this variation, the ejection of each group is regularly irregular, if be conceived to one group, according to the 3rd system, second system, first system ... the order of (following circulation) constitutes drive waveforms and supplies with corresponding relation regularly.Under this situation, because by each ejection timing ejection condition difference, so, the change that on main scanning direction, produces spray volume (configuration amount of aqueous body).Thus, cause the characteristic deviation between nozzle,, increased the inequality with the composition of its quadrature, thus, formed the inequality of disperseing with two-dimensional approach with respect to the inequality of the configuration amount that forms at sub scanning direction.Because the inequality that such two-dimensional approach disperses is lower than (1 dimension) uneven visuognosis of wire, so, uneven inconspicuous effect had.
Claims (6)
1. jet method with relatively moving synchronously of goods and droplet discharging head, forms the aqueous body that the zone ejection comprises functional material from a plurality of nozzles of described droplet discharging head to the film of goods, comprising:
The first ejection operation according to not forming the mode that the relevant adjacent nozzle in zone sprays described aqueous body simultaneously with described film from the nozzle rows that described a plurality of nozzles constitute, selects employed nozzle to spray; With
The second ejection operation according to not from forming the mode that the relevant adjacent described nozzle in zone sprays described aqueous body simultaneously with described film, is selected to spray with the nozzle of the described first ejection operation various combination.
2. jet method according to claim 1 is characterized in that, has on the surface of described goods to divide the wall part that a plurality of described films form the zone,
In described first ejection operation and the described second ejection operation, when selected nozzle is relevant with described wall part, do not use this nozzle.
3. jet method according to claim 2, it is characterized in that, form the zone when described aqueous body is ejected into described film as drop from described selected nozzle, and the ejection described drop drip when described wall part, do not use the ejection this drop described nozzle.
4. according to any described jet method in the claim 1～3, it is characterized in that, described droplet discharging head has makes described aqueous body produce mechanism as described drop from a plurality of energy that described a plurality of nozzles spray, described a plurality of energy produces mechanism and is electrically connected with a driving mechanism that produces drive waveforms with specified period
In described first ejection operation and the described second ejection operation, impose on the described energy corresponding by described the driving mechanism described drive waveforms that the select time sequence is different in turn and produce mechanism with employed described nozzle, spray described drop.
5. according to any described jet method in the claim 1～3, it is characterized in that, described droplet discharging head has makes described aqueous body produce mechanism as described drop from a plurality of energy that described a plurality of nozzles spray, described a plurality of energy produces mechanism and is electrically connected with a driving mechanism that produces a plurality of drive waveforms in 1 cycle
In described first ejection operation and the described second ejection operation, selecting the different drive waveforms of time series in described a plurality of drive waveforms to impose on the described energy corresponding with employed described nozzle in turn by described driving mechanism produces mechanism, sprays described drop.
6. according to any described jet method in the claim 1～3, it is characterized in that, same described film is formed the zone carry out described first ejection operation and the described second ejection operation.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005327924 | 2005-11-11 | ||
| JP2005327924 | 2005-11-11 | ||
| JP2005-327924 | 2005-11-11 | ||
| JP2006239879 | 2006-09-05 | ||
| JP2006239879A JP2007152339A (en) | 2005-11-11 | 2006-09-05 | Ejection method, manufacturing method of color filter, electro-optical device and electronic equipment |
| JP2006-239879 | 2006-09-05 |
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| JP5244366B2 (en) * | 2007-10-30 | 2013-07-24 | 武蔵エンジニアリング株式会社 | Liquid material dripping method, program and apparatus |
| CN102200662A (en) * | 2011-06-30 | 2011-09-28 | 深圳市华星光电技术有限公司 | Method and device for coating alignment films |
| WO2015116154A1 (en) | 2014-01-31 | 2015-08-06 | Hewlett-Packard Development Company, L.P. | Interdigitated primitives |
| JP6684397B2 (en) * | 2015-04-02 | 2020-04-22 | エムテックスマート株式会社 | Fluid ejection method and fluid film formation method |
| JP6925746B2 (en) * | 2017-12-15 | 2021-08-25 | 住友重機械工業株式会社 | Membrane forming device and film forming method |
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| CN1435318A (en) * | 2002-01-30 | 2003-08-13 | 精工爱普生株式会社 | Liquid drop jet head, jet method and device optoelectronic device and mfg. method |
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| JP2967052B2 (en) * | 1995-09-08 | 1999-10-25 | キヤノン株式会社 | Method and apparatus for manufacturing color filter |
| JP2003159787A (en) * | 2001-11-28 | 2003-06-03 | Seiko Epson Corp | Ejection method and its apparatus, electro-optic device, method and apparatus for manufacturing the device, color filter, method and apparatus for manufacturing the filter, device with substrate, and method and apparatus for manufacturing the device |
| JP2004122744A (en) * | 2002-07-31 | 2004-04-22 | Seiko Epson Corp | Driver of liquid drop ejection head, film deposition system, driving method of liquid drop ejection head, process for depositing film, and process for manufacturing electronic apparatus and device |
| JP4289172B2 (en) * | 2004-02-19 | 2009-07-01 | セイコーエプソン株式会社 | Discharge device |
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| CN101430396B (en) | 2011-08-31 |
| CN1962083A (en) | 2007-05-16 |
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