TW200924858A - Liquid material applying apparatus - Google Patents

Abstract

In a liquid material applying apparatus (1), an organic EL liquid is applied onto a testing surface of a resin tape held by a tape holding part in each of two test-applying stage parts (21) of a test-applying unit (2) by a liquid material applying head (14) moving in a main scan direction while continuously discharging the organic EL liquid from a plurality of nozzles (17). Nozzle pitches are detected on the basis of an image of an organic EL liquid pattern on the testing surface obtained by CCD camera (13). Pitches of a plurality of nozzles (17) in a sub scan direction are adjusted by a pitch adjusting mechanism (3) on the basis of the detection result of nozzle pitches. Accordingly it is possible to accurately adjust pitches of the plurality of nozzles (17) of the liquid material applying apparatus (1) in the sub scan direction without applying the organic EL liquid onto a substrate (9).

Description

200924858 IX. OBJECTS OF THE INVENTION: 1. Field of the Invention The present invention relates to a coating apparatus for coating a substrate with a fluid material. [Prior Art] It is known to develop an organic EL (Electr. (10) Coffee (10)) In the organic EL display device of the material, for example, in the manufacture of an organic active display device using a polymer organic germanium material, the glass substrate (hereinafter referred to as "substrate" only) is used. The following steps are performed: forming a TFT (ThinFilmTransistGr) circuit; forming an IT (Indium Tin Qxide) electrode as an anode; forming a partition; applying a fluid material including a hole transporting material (hereinafter, referred to as "hole transport" Liquid"); forming a hole transport layer by heat treatment; coating a fluid material containing an organic EL material (hereinafter referred to as "organic liquid"); forming an organic EL layer by heat treatment; forming a cathode; and forming an insulating film To seal. In the production of an organic EL display device, as a coating device for applying a hole transport liquid or an organic EL liquid to a substrate, it is disclosed in Japanese Patent Laid-Open Publication No. 2002-75640 (Japanese Patent No. 2002-75640) (4) As shown in Japanese Patent Publication No. 2003-10755 (Document 2), a plurality of nozzles for continuously discharging a fluid material are relatively moved with respect to a substrate, thereby applying a fluid material to the substrate. α is in the above documents 1 and 2 In the apparatus, the plurality of nozzles are moved in the main scanning direction and the substrate is moved in the sub-scanning direction whenever the nozzle moves in the main scanning direction, thereby coating the fluid material in a stripe shape 97106432 6 200924858 The film is placed in a groove between a plurality of partition walls in the coating region on the substrate. In the coating device of the above documents i and 2, the three nozzle bodies are held by the holding member. And the holding member is rotated around the support shaft perpendicular to the substrate to reduce the distance between the three nozzles in the sub-scanning direction, and the coating pitch of the fluid material can be narrowed. Japanese Patent Special 2〇 4_74〇5〇3) discloses a coating apparatus which has nozzles in the main scanning direction: swaying, and moving the substrate in the sub-scanning direction every time the nozzle moves in the main scanning direction, thereby The fluid material is applied in a stripe shape in a groove between the plurality of partition walls formed in the coated region on the substrate. In the coating apparatus of the above document 3, the organic EL liquid is applied onto a mask disposed between the nozzle and the substrate, and according to the coating trajectory of the organic sputum on the mask and the groove on the substrate The image data is used to correct the inclination of the substrate so that the main scanning direction of the nozzle coincides with the direction in which the groove extends. In the above-mentioned apparatus, the adjustment of the distance between the nozzles is performed by the manual operation of the operator, and the confirmation of the adjustment result is also performed by the worker directly observing the coating result, so that it is difficult to perform high precision. The distance between the work and the labor required for adjustment is also large. In addition, test coating such as when adjusting the interval between the month il and the confirmation of the adjustment result may be performed on the non-coated region of the substrate for the product, and when the number of nozzles is large, the test coating is performed. The required range is larger than the range of the non-coated area, so that the nozzle spacing adjustment cannot be performed. SUMMARY OF THE INVENTION This July is a coating apparatus for coating a substrate with a fluid material, the purpose of which is to accurately adjust the coating device without applying a fluid material to the substrate. The distance between the multiple nozzles. The coating apparatus of the present invention includes: a substrate holding portion for holding the substrate; a plurality of nozzles 'continuously discharging the fluid material toward the main surface of the substrate; and a nozzle scanning mechanism' for causing the plurality of nozzles to be in contact with the substrate The main scanning direction parallel to the main surface is relatively moved with respect to the substrate, and each time the substrate is moved in the main scanning direction, the substrate is parallel to the main surface and perpendicular to the main scanning direction with respect to the plurality of (4) The sub-scanning direction is relatively moved; the test coating portion has a test coating surface, and the test coated surface is tested for coating the fluid material from the plurality of nozzles when the substrate is not coated; the test coating portion The advancing and retracting mechanism causes the test coating unit to advance and retreat in the main scanning relative movement path in the plurality of nozzles so that the distance between the plurality of test coated surfaces at the time of test coating and the plural number at the time of coating The distance between the main faces of the substrate is equal; the imaging unit, == the relative movement of the plurality of nozzles in the main scanning direction And moving the image of the pattern of the fluid material of the test coated surface; detecting the plurality of full material plus the "pitch adjustment mechanism" between the mouths in the sub-scanning direction image, and dragging the coated surface Adjusting the pitch in the sub-scanning direction; and in the case of testing the above-mentioned coating-coated surface modifier material, the substrate is coated with high precision, and the substrate is not coated with the substrate. Medium == distance between the nozzles. The r-chamber device further includes: a substrate rotation 97106432 8 200924858 a rotation mechanism that rotates the substrate holding portion around a rotation axis perpendicular to the main surface of the substrate; and another imaging unit acquires An image of a pattern of another test coated surface that is disposed separately from the test coated surface in the main scanning direction, and a substrate position adjusting portion, according to the image capturing unit and the other image capturing unit a pattern of the pattern of the fluid material obtained by the portion, and a positioning mark on the main surface of the substrate obtained by the imaging unit and the other f-image And controlling the nozzle scanning mechanism and the substrate rotating mechanism to adjust a relative position of the substrate relative to the plurality of nozzles, thereby accurately adjusting a position of the substrate. Further preferred embodiment of the present invention In the embodiment, the test coating portion holds a tape holding portion of a part of the resin tape, the test coating surface is a main surface of the part of the tree-shaped enamel tape, and the test coated surface replacement mechanism includes the resin tape In the embodiment of the present invention, the test coating surface is the same as the test surface of the upper surface of the substrate, and the test coating surface is the same as the above-mentioned main surface of the substrate. The test coating section retains the test piece of the test piece described above with reference to the above-mentioned objects and other objects, features, aspects and advantages of the invention. [Embodiment] Fig. 1 is a view showing a coating package according to an i-th embodiment of the present invention, and Fig. 2 is a view showing a plan view of a device 1 for applying a nightmare. The coating apparatus 1 is a device for applying a fluid material including a pixel forming material for a flat display device to a glass substrate 9 (hereinafter simply referred to as "substrate 9") for a display device. In the present embodiment, the coating device i applies a fluid material containing an organic EL material to a substrate 9 for an active matrix driving type organic EL (Electro Luminescence) display device (hereinafter referred to as "organic germanium" and The soil 7 and the 1 侑 侑 保持 holding portion JJ, 保持 holding the substrate 9; the substrate moving mechanism 12, the substrate holding portion u is in a predetermined direction parallel to the main surface of the substrate 9 (that is, Y in the 1) The direction is shifted horizontally by I 1?, referred to as the sweeping direction"; and the substrate rotating machine 2 holding portion U is rotated by rotation perpendicular to the main surface of the substrate 9. The heating of the internal holder of the substrate holding portion u The apparatus (not shown). The coating apparatus 1 further includes: (10) a camera 13 and two imaging units; and two imaging unit moving mechanisms 13am.

The camera 13 advances the individual 丨 coating head 14 in the sub-scanning direction ^ 2 2 CCD β γ i ports, and faces the main surface from the plurality of nozzles 17 toward the base (four) side (hereinafter, referred to as "μ矣品, Ηι y y y (+z) discharge mechanism. 泠德,表表) 91 continuously discharges the organic el liquid discharge mechanism, and the coating head moving mechanism 15 causes the liquid receiving portion 16 to be in the coating direction") Horizontal movement; 2 is disposed in the substrate holding portion n $ moving direction (that is, the χ direction), the organic EL liquid, and the mechanism 3 connected from the coating head 14 to the plurality of nozzles 17 Sub 97106432 200924858 Adjust the distance between the sweeping directions. As shown in the figure, the right side of the coating head 14 is provided; and, in the case of the test of the organic EL money test (4), the second control unit 1 has a control unit 1 that controls the above configuration. Even the cerebral palsy, the structure of the control unit 10 is formed by the following parts. The Gpu of various arithmetic processing: the RAM of the work area executed by the memory _ different processing; the memory of the basic program 记忆 memory of various information a fixed disk; a display for the operator to display various secondary messages; and a CPU such as a keyboard and a mouse, etc., such as a CPU, etc., according to the program, the military, the military, and the other components. In Fig. 3, the function realized by =1^ is said to be the distance detection unit 1 〇1, 蜩 single 嫱 substrate position adjustment paste is equivalent to C 峨月b again, and the functions can also be realized by a plurality of computers.

On the head 14 of the Fanghu ,, the 16 nozzles 17 are arranged in a substantially straight line in the X ❹ in FIG. 1 and slightly in the main scanning direction), and slightly: in the γ direction ( That is, the sub-scanning direction is configured. The distance between the two nozzles 17 adjacent to the present embodiment in the sub-scanning direction, and the spacing between the partition walls in the main scanning direction formed on the coated region of the substrate 9 (hereinafter referred to as "Interval between partitions") The coating device i does not apply the organic liquid to the substrate 9: measurement = coating! The unit 2 performs the test coating of the (iv) liquid, and controls the pitch adjustment mechanism 3 by the root peaks 17, thereby adjusting the distance between the complex numbers L in the sub-scanning direction. The method of adjusting the pitch of the nozzles 17 is described below. ® 4 and Figure 5 (4) show a front view of a portion of the coating head 14 and a top view of 97106432 11 200924858. As shown in Fig. 4 and Fig. 5, the coating head 14 is provided with: 9 on the 9th (refer to (4) (7) continuous discharge of the organic rainbow liquid (7) j nozzle mounting portion (4) with the 16 (four) nozzle. The nozzle safety 2: 2 has: A level substantially perpendicular to the back plate portion 14U and the direction substantially perpendicular to the Υ direction: Z (that is, an end portion on the (-z) side) and a::: the nozzle 17 are movably attached to the horizontal portion The direction of the side _) (that is, the sub-scanning direction) is delayed. The position of the nozzle 17 (the nozzle locking portion Η 贞疋 17 is positioned relative to the nozzle mounting portion 141. 16 nozzles 17 are fixed on the spray = female ^ 141 (see _ 4 and Fig. 5) and continue to squirt organic =, === a plurality of nozzles 17 are moved in the main scanning direction, and each time ❹ Γ 2 = When the scanning direction is moved once, the substrate 9 is moved in the main scanning direction and the sub-sweeping relative to the substrate 9 from the base 4, and the organic EL liquid is applied to the surface 91 in a stripe shape. The coating head moving mechanism 15 of the cloth device 1 ί " the moving mechanism 12 is a nozzle scanning mechanism, respectively, so that 16 nozzles 17 == the mounting portion 141 together with the substrate 9 in the main sweep Relative movement in the square direction. ν = 'Coating device ' 'The pitch adjustment mechanism 3 is provided separately from the coating head 14 on the (+Χ) side of the substrate holding portion u, 16 nozzles 17 and nozzles 97106432 12 200924858 With the mounting portion 141 (refer to FIG. 4 and the moving mechanism 15 as described above, the coating head of the nozzle scanning mechanism of the pitch 2 is shifted, in other words, the pitch adjusting mechanism 3 is moved independently of the structure 3. 14#目1 is scanned by the nozzle The mechanism arranges the coating heads independently of the relative movement of the substrate 9. The pitch adjusting mechanism 3 is provided with a plurality of (respectively 16 in the present embodiment) and a plurality of mouths 17 corresponding to each other.整. 3 The whole head. Figure 6 and Figure 7 are the ones of the table, the top of the week, and the top of the coating head, which is located on the closest (-X) side. In order to facilitate understanding of a part of the top view and the view of the left side lock portion 173, the nozzle smear diagrams in FIGS. 4 and 5 are omitted. Moreover, the nozzle mount portion 141 and the nozzle 17 are easy to understand. 'Shows the section containing the central axis of the nozzle 17 on the twentieth day. The adjustment mechanism 3 is identical. In the mechanism 3, the structure of the plurality of adjustment heads 30 is as shown in Fig. 6 and Fig. 7, and the wedding 敕Q1 ° 周王头3〇 has: the mounting portion fixing mechanism 31, from the (+Y) side And (_γ) side, the flute is called Q1, and then the first fixing portion 311 and the second fixing portion c are connected to the horizontal portion ΐ4ΐ2 of the nozzle amphetrating portion 141 to fix the nozzle dressing portion 141; The plate abutting portion 32' is abutted from the (-γ) side (that is, the sub-sweeping area a is in contact with the nozzle 17; the nozzle pressing mechanism 33 is such that the nozzle = the opposite side of the nozzle abutting portion 32 (i.e., the nozzle 17) (9) side spray: connection; "two other sides" pressurizing the nozzle abutting portion 32; and abutting movement mechanism 34' abutting portion of the nozzle abutting against the nozzle 17 pressed by the nozzle pressing mechanism 33 32 is adjusted in the position of the sub-scanning direction. The spacing adjustment mechanism 3 in the nozzle An Mengmail] — 31 1 , loaded. The 卩(4) is fixed by the tying portion fixing mechanism 疋#311 and the second fixing portion 314 in a state of 97106432 13 924858, and is locked by the locking portion operating mechanism (the 173 (see FIGS. 4 and 5) is omitted). The timepiece lock motor (10) and the step 332 connected to the nozzle construction = moving mechanism 34 are received by the control unit i. The adjustment mechanism 4, 333 cylinders move. Thereby, the nozzle abutting portion 32 (see FIG. 3) is abutted against the (9) side and the (10) side from the (9) side and the (10) side, and the acting nozzle abutting portion 32 of the tapping portion moving mechanism 34 is abutting the nozzle. When the pressure _ 33 is applied, the mouth abutting portion mouth 17 moves in the direction. Next, when the nozzle 17 is moved to the pressure, the position of the nozzle 17 is again obtained by the distance of the locking portion operating mechanism toward (8). 173, when the nozzle spacing is adjusted in the coating device 1 with the locking side ==, the other 15 以外 other than the reference nozzle is moved upward from (m) the nozzle m, and then the 15 The nozzles 7 are positioned at the position of the sub-scanning side #方嘴 17 so that the distance between each of the nozzles 17 and the reference nozzle becomes a predetermined distance. Pitch adjustment machine = position adjustment of the (four) nozzle π (that is, the method is performed under the distance between the nozzles: the image of the EL liquid is measured according to the test coating unit 2) by the control unit shown in FIG. The distance detecting nozzle 101 detects the distance between the nozzles, and based on the distance ', 卩, according to the detection result of the spacing detecting unit 1〇1, the adjustment mechanism is used to control the offset of the pitch adjusting mechanism 3. The joint moving mechanism 34 (see FIGS. 6 and 7). 97106432 200924858 As shown in Fig. 1, the test coating is left _ ^ f cloth early 70 2 equipped with two test coating flat portions 21 ' on the (9) side of the substrate holding portion 11 and arranged to be separated upwards and ... Upwardly at the same position; and two: . extending between the two test coating platform sections 21 in the direction of the ,, : = both ends are fixed to the test coating platform sound " each test 21 via the slider 2] (see FIGS. 8 and 9), it is movably attached to the path 121 of the substrate moving mechanism 12 in the Y direction, and is fixed to the substrate holding portion 11jL via the connecting portion (1). In the coating apparatus 1, the base (four) holding portion = the substrate rm 冓 12 is moved in the γ direction, and the test coating early τ 2 is also moved in the γ direction together with the substrate holding portion u. Fig. 8 and Fig. 9 show the test coating platform portion 21 on the (+Χ) side, respectively. 8 and FIG. 9 also depict the substrate moving structure, and FIG. 9 also shows (4) the central liquid receiving portion 22 = two for convenience. 'Figure 8 and FIG. 9 depicting the test coating The cross section of the outer casing 212 (the same is true in Figs. 13 and 15). Also shown in Fig. 9 is a cross section of the resin tape 213. In the coating apparatus 1, the test coating stage portion 21 on the (-X) side shown in Fig. 1 also has substantially the same structure as the test coating stage portion 21 on the (10) side of Figs. 8 and 9 . As shown in FIG. 8 and FIG. 9, the test coating platform portion 2 ι is wounded: the slider (1), is movably mounted on the road 121 of the substrate moving mechanism 12; the outer casing - 212 is fixed to the slider 211 i; The tape 213 is a test coating member for performing test coating of an organic EL liquid; the tape holding portion is held at a portion where the resin tape 213 is tested and coated on the upper portion of the outer casing 212; the tape supply portion 215 is kept unmaintained. The roll of the resin tape 213 is used (that is, the test coating of the EL liquid of 97106432 15 200924858 is not applied), and the resin tape 213 is sent out and supplied to the tape holding portion 214; and the tape recovery 邛 216, The use of the coated resin tape 2丨3 was tested by an organic EL liquid. P 7 knife winding recovery. In the present embodiment, a pps (Polyphenylene Sulfide) resin tape is used as the resin tape 213. The coating platform unit 21 is provided with a horse, a horse, a horse, a horse, a horse, a horse, a horse, a horse, a horse, a horse, a horse, a horse, a horse, a horse, a horse, a horse, a horse. And disposed on the (+x) side of the tape holding portion 2U (on the (9) side, in the test coating platform portion 21, disposed on the (-X) side of the tape holding portion 214), the outer liquid receiving portion 218, and the outer side The liquid receiving portion 218 and the central liquid receiving portion 22 disposed on the (five) side of the portion 214 of the test coating platform portion 21 disposed on the side of the tape holding portion (the second side) are disposed by the tape. The resin tape 213 held by the portion 214 is also the (-Z) side. ^ 216 Second coating: the plate portion 21 tape supply portion 215 and the tape collecting portion knife are driven by the motor 2171 to rotate counterclockwise in Fig. 8 by _ 8 + a predetermined fish... u (four) $ movement (+ γ) side: The predetermined length is sent in the direction of the 'resin tape 213 于' in the tape holding portion 214, and the resin 9lq + Α & is located in the tape holding portion 214. As shown in Fig. 8 , the unused portion θ of the tape 213 is not provided. The test coating layer A 91 has a sensor 2151 which is supplied to the tape supply ΑσσΡ21, σ σ 215 and the tape holding portion 214. Further, the tape supply unit 21 is provided with a sensor 216 in the vicinity of the (5) receiving portion 216, and the tape is collected by the tape collecting portion 216. ', 97106432 200924858 In the test coating platform portion 21 shown in Figs. 8 and 9, the main surface of the portion (10) side held by the tape holding portion 214 of the belt 213 is subjected to test coating by a plurality of nozzles 17 (refer to 胄υ The test coated surface 213 of the spouted EL liquid is provided with the test coated surface MM: the test coated portion 214 which holds the above-mentioned one of the resin tape 213. Further, the resin tape 213 is supplied and recovered. The tape supply portion 216 and the tape portion 216 become the test coated surface replacement mechanism for testing the test coating portion; 2131 is replaced with a new test coated surface. In other words, the test coating unit 2 is provided in the main scanning direction. Two test coated surfaces 213 and two test coated surface replacement mechanisms for separately replacing the two test coated surfaces η" with the new test coated surface. FIG. 10 shows FIG. 8 and FIG. A plan view of the vicinity of the tape holding portion 214 shown in Fig. 9. As shown in Fig. 8 to Fig. 1A, the tape holding portion 214 includes a tape suction portion 214 disposed on the (_ζ) side of the resin tape 213 (that is, with the test coating) The opposite side of the cloth surface 2131), i adsorption resin glue 213; the tape is placed on the (10) side of the resin tape 213 (that is, disposed opposite to the test coated surface 2131), and is coated with the waste resin tape 213 toward the tape adsorption portion 2 (4). a portion near the cloth surface 2131; a pressing portion elevating mechanism 2143 that elevates and lowers the tape pressing portion 2142 in two directions; and a pressing portion moving mechanism 2144 that moves the tape pressing portion 2142 and the pressing portion elevating mechanism 2143 in the z-direction. The portion 2141 is provided with a top surface 91 of the substrate 9 on which the tree transfer belt 213 is held and held on the substrate 11 (see the holding plane 2145' parallel to the drawing). As shown in FIG. 10, the tape pressing portion 2142 is provided with a resin adhesive 97106432 200924858. The two claw portions 2146 extending in the χ direction on the (+γ) side and the (_γ) side of the test coated surface 2131. The tape holding portion 214 shown in Figs. 8 to 10 functions as a pressing portion lifting mechanism 2143. Then, the tape pressing portion 2142 is lowered, and the resin tape 213 slightly curved toward the (+Ζ) side on the tape suction portion 2141 is pressed by the two claw portions 2146 toward the accompanying plane 2145 of the tape suction portion 2141. ” Then, use tape The adhesive portion 2141 vacuum-adsorbs the resin tape 2U, whereby the test coated surface 2131 of the resin tape 213 is fixed to the holding plane 2145 of the tape suction portion 2141 in a smooth state, and the upper surface 91 of the substrate 9 (refer to The tape coating portion 2141 and the tape pressing portion 2142 in the test coating unit 21 are tape fixing portions for fixing the test coated surface 2131 of the resin tape 213. After the glue and the attachment 2141 are adsorbed to the resin tape 213, the tape pressing portion 2142 is lifted by the pressing portion lifting mechanism 2143, separated from the resin tape 213, and moved by the pressing portion moving mechanism 2144 in the (+Y) direction. 'Exit from test coated surface 2131. The preparation work of the coating device 1 before the organic EL liquid coating on the substrate 9 will be described by eight persons. The preparation operation of the coating device 1 adjusts the pitch (hereinafter referred to as "nozzle pitch") of the plurality of nozzles 17 of the coating head 14 shown in Fig. 1 in the sub-scanning direction, and the substrate 9 is After the relative position of the nozzle 17 is adjusted, the organic EL liquid is applied onto the substrate 9. Fig. 11A and Fig. UB are flowcharts showing the preparation work (adjustment of the nozzle pitch and position adjustment of the substrate 9) of the coating device i. The coating device 1_'firstly' moves the substrate holding portion 11 from the It of 97106432 18 200924858 shown in Fig. 1 to the 'moving' and the test coating unit 2 17 is placed on the second cloth platform portion 21 as shown in Fig. 12 The number of nozzles of the cloth head 14 is the test coating position below the moving path in the direction of the field (i.e., relative to the substrate g of the substrate g). At this time, the two test coatings = the mouth portion 21 are respectively located below the two coffee cameras 13 (step s (1). In the first step, the substrate moving mechanism 12 becomes the test coating portion advance and retreat mechanism". The tape holding portion 214 which is the two measuring portions of the cloth unit 2 (see FIGS. 8 to 8 ) is in the moving path in the main scanning direction at the time of the plurality of nozzles, and the test coating unit 2 does not necessarily The substrate holding portion 丨丨 moves together, and may be driven by another test coating portion advancing and retracting mechanism independently of the substrate moving mechanism 12 (for example, disposed on the stem 121 of the rodless cylinder or substrate moving mechanism 12) The other moving member) causes the test coating unit 2 to advance and retreat in the moving path of the plurality of nozzles 17 in the main scanning direction. When the test coating unit 2 is located at the test coating position, the plural from the coating head 14 is started. The nozzles 17 discharge the organic El liquid toward the liquid receiving portion 16 on the (+χ) side, and drive the coating head moving mechanism 15 to start the movement of the coating head 14. Then, the same organic EL liquid is continuously discharged from the plurality of nozzles 17 And as shown in Figure 12 As shown by the key line, the coating head 14 is moved in the main scanning direction on the liquid-receiving portion 16 on the (-X) side from the liquid receiving portion 16 on the () side, and is applied to the test coating unit 2 The test coating surface 2131 (see FIGS. 8 to 1A) of the resin tape 213 held by the tape holding portion 214 is applied to the test coating platform portion 21 in a stripe shape to apply the organic liquid (step S12). At this time, as described above, the test coated surface 2131 of the resin tape 213 has the same height as the upper surface 91 of the substrate 9 on the substrate holding portion 11 of the 97106432 19 200924858, so the test of the plurality of nozzles 17 and the resin tape 213 in the z direction is performed. The distance between the coated surfaces - 2131 and the number of nozzles 进行 coated with the organic EL liquid on the substrate 9 is equal to the distance between the upper surface 91 of the substrate 9. Further, in the two test coating platforms Between 21, the organic EL liquid discharged from the nozzle 17 is received by the central liquid receiving portion 22, and between the test coating surface 2131 and the liquid receiving portion 16 of each test coating platform portion η, the organic liquid is externally received by the liquid. The portion 218 (see Fig. 9) is taken up. Then, the CCD camera 13 is used to photograph each test coating platform test coated surface 213. The image of the striped pattern of the organic EL liquid applied on the test coated surface 2131 is obtained and transmitted to the control unit ι (see FIG. 3) (step S13). The pitch detecting unit 101 is based on (+χ) side (10) The image obtained by the camera 13 finds the center line of each line of the organic EL liquid, and checks the distance between the center lines in the sub-scanning direction (ie, the sub-scanning direction). The distance between the two nozzles 17 adjacent to each other is used as the nozzle pitch (step (4). Further, the detection of the nozzle pitch by the pitch detecting unit 1Q1 can be performed based on the image obtained by the CCD camera 13 on the (-X) side. Further, based on the two images obtained by the two CCD cameras 13, the average value of the distance between the nozzles 17 obtained from the two images may be used as the reference nozzle, that is, from the (_x) side. The distance between the other 15 nozzles 17 of the 8th nozzle 17 and according to the preset nozzle spacing (as described above, in the present embodiment, the distance is equal to 3 times the spacing of the partition walls 97106432 20 200924858) , hereinafter, referred to as "target nozzle pitch"), It is necessary to adjust the position of each nozzle 17 (step si 5). When it is confirmed that the relative position with respect to the reference nozzle is a predetermined position, the two nozzles 17 W judge that it is not necessary to perform the adjustment of the (four) position, and the nozzle = the whole part is completed. Adjustment of £: When it is judged that it is necessary to adjust the nozzle position, the distance between the nozzles of the waiter is 15 or less than the 15 nozzles other than the nozzle of the pitch detecting unit, and the R R is removed from the reference nozzle. The amount of movement required to move up in the sub-sweeping field (hereinafter, it is only referred to as "the amount of movement J is judged to be that the nozzle position center is required for each of the 15 moving nozzles. After the 'stopping of the coating head 14 to discharge the organic mechanism Λ = as indicated by the dotted line, on the respective adjustment heads 30 of the coating head movement adjustment mechanism 3: The mounting mechanism fixing unit (9) of the pitch adjusting mechanism 3 is configured to hold the ':2 and 2 fixing portions 314, and the mounting portion 141 is provided from the (-γ) side and the mounting portion 141. Fixing: The horizontal portion 1412' is used to move the nozzle next to each of the adjustment Mq moving nozzles to lock the locking portion operating mechanism to release the respective moving directions. (Ϊ: 73 locking 'and the moving nozzles are The sub-scan refers to FIG. 3), and the control unit 1 is used as the control unit. The stepping motor 343 of the abutting portion moving mechanism 34 97106432 21 200924858 of the adjusting portion of the adjusting head 3 corresponding to each moving nozzle, and the nozzle"/group nozzle abutting portion 32 The amount of movement obtained by the grin dusting mechanism 33 is swept = 'moving in the direction of the sub-::;^ according to the movement of the nozzle by the pitch detecting unit 1 (1 (steps. When each set is locked again) 1 At the end of the movement, the position of each moving nozzle is directly locked by the mandible. The maneuvering nozzle does not need to be in place. [月敕=#When judged by 15 removal, and from time to time, the movement of the mouth is not locked. The solution is removed and does not move in the sub-scanning direction. ❹ Thereafter, the first fixing portion 3 of the mounting portion fixing mechanism 31 is separated from the nozzle mounting 1 and the nozzle 2 of the second solid head 14 The horizontal portion (4) 2' is used to release the coating. The fixing of the P 141 is released. The cloth head 14 discharges the organic EL liquid from the nozzles 17 which are not on the liquid receiving portion 16 on the (10) side, and starts to apply from a plurality of sprays. In the cloth splitting 1, the movement amount obtained by the pitch detecting unit 101 is divided by i bases J丄01. Immediately, all the moving nozzles are in the mouths of all the nozzles of the sub-sweeping/spans (also in the direction of the nozzles in the direction of the drawing). In this embodiment, the nozzles are adjusted to adjust the nozzle spacing. Furthermore, the coating device 2: can be; = the inner helium is in the sub-scanning direction to perform a clear motion to adjust the nozzle when the moving nozzle moves in the sub-scanning direction: the two-pitch two unit 2 test coating On the platform portion 21, the adsorption of the wax-coated tape 2U of the coating belt 2141 of FIG. 8 to FIG. 2 is released by the action of the pressing mechanism 2144, as shown in FIG. 2142 (- Y) is moved in the direction of the tape suction portion 2" the pressing portion is driven by the motor 2171 shown in Fig. 9, and Fig. 8 to Fig. 1 shows the resin tape 213 in the tape holding portion 214 toward (+) The γ) direction is transmitted for a predetermined length, and a new test coated surface 2131 is placed on the tape adsorption portion 2141. Next, under the action of the pressing portion elevating mechanism 2143, the tape pressing portion 2142 is lowered and the resin tape 213 is pressed toward the tape suction portion 2141, and the resin tape 213 is adsorbed by the tape suction portion 2141, thereby testing the coating. The surface is replaced with a new test coated surface 2131 and fixed to the holding plane (step S152). After the resin tape 213 is adsorbed, the tape pressing portion 2142 is withdrawn from the test coated surface 2131.

After the test coated surface 2131 is replaced, the process returns to the step (10), and the coating head 14 - discharges the organic EL = motion from the plurality of nozzles 17, and applies the liquid on the two test coated surfaces 2131 of the test coating unit 2 (step S12). Then, the image image of the organic liquid to be measured is obtained by (10) the camera 13, and the nozzle pitch is checked by the pitch to confirm whether or not the nozzle position is required to be ==: S13 to S15). Then, the following operations are repeated, =1: there is no need to adjust the nozzle position, that is, the movement of the pitch adjustment mechanism 21 to the sub-scanning direction, and the replacement of the test coated surface (the coating of the organic EL liquid on the step) =) 'and test (4) of the coated surface 2131 nozzle position: the detection, and whether it is necessary to adjust the 罝 (steps S12 to S15). At the end of the adjustment of ::::: 'At the end of the two CCD cameras 13 (that is, the two images of the organic muscle pattern on the #: break:: 2131 are "the entire nozzle spacing in the final image" In the image, hereinafter, "), the pattern of the 胄EL& in the image is obtained in the sub-scanning direction by the substrate position adjustment 97106432 23 200924858 portion 1〇3 (see FIG. 3) of the control unit 1 The location. Then, based on the final image captured by the CCD camera 13 on the (8) side, the offset of the pattern position in the final image captured by the CCD camera 13 on the (_) side in the sub-scanning direction is obtained (hereinafter ' This is called "position offset" (step S16). Next, the imaging unit moving mechanism 13a on the (-X) side is controlled by the substrate position adjusting unit 103, and the (10) camera 13 on the (_) side moves in the sub-scanning direction ❹ by a distance equal to the positional shift amount, and the adjustment 2 The relative positions of the CCD cameras 13 (step S17). Thereby, the straight line connecting the centers of the imaging areas of the two CCD cameras 13 and the line of the organic sputum coated by the coating head 14 are flat. Specifically, when the pattern of the ccd camera on the side of the dice) is shifted to the L compared to the final image on the (8) side, the (10) camera 13 toward the (-X) side (Y) direction shift, ^ (+) side shift, (9) side (10) camera 13 in the (8) direction and then the position adjustment of the CCD camera 13 in the coating unit 1 can be adjusted on the (-) side (10) When the camera 13 is in the state of (4), the movement of the CCD camera 1 q & the bin V-. on the moving side is performed, and the position adjustment of the Lcc: phase 3 of the (10) camera 13 can also be ended. At the time of the substrate moving mechanism 12, two CCDs are struck toward the substrate holding portion 11 and the test coating unit 2, and as shown by the solid line in FIG. 1, the substrate 9 is located below one surface (step S18). . At this time, on the substrate 9 = domain ==. Two positioning marks 93 (refer to FIG. 12) and 97106432 24 200924858 are respectively placed in the imaging areas of the two CCD cameras 13. On the substrate 9, the straight line connecting the two positions with the mark 93 is parallel to the plurality of grooves of the coating area. Then, the two CCD cameras 13 image the two positioning marks 93 on the substrate 9 under the control of the substrate position adjusting unit 1 〇 3 (step S19). Then, the distance between the centers of the positioning marks 93 in the sub-scanning direction is obtained from the images of the two positioning marks 93, and the distance between the centers of the positioning marks 93 stored in advance in the main scanning direction is determined. The amount of shift (i.e., the inclination) of the substrate 9 in the rotational direction is obtained. Then, the substrate position adjusting unit 103 controls the substrate rotating mechanism 12a to rotate the substrate 9 in accordance with the amount of shift of the substrate 9 in the rotational direction, whereby the two positioning marks 93 are in the sub-scanning direction with respect to the CCD camera 13. The relative positions are equal (step S20). As described above, in the coating device i, the two CCD cameras i 3 are opposed to the plurality of nozzles 17 (the lines of the organic EL liquid discharged from the plurality of nozzles 17 and applied to the substrate 9) in the sub-scanning direction. The relative positions are equal to each other. Therefore, the relative positions of the two positioning marks 93 with respect to the CCD camera 13 in the sub-scanning direction are equal to each other, whereby the two positioning marks are made to be opposed to the plurality of nozzles 17 (discharged from the plurality of nozzles 17 and applied to the substrate 9) The relative positions of the upper organic EL liquid lines in the sub-scanning direction are equal to each other. That is, the grooves between the partition walls of the coating region on the substrate 9 are parallel with respect to the movement trajectories of the plurality of nozzles 17 in the main scanning direction. Thus, in the 'coating apparatus 1', based on the image of the organic EL liquid pattern obtained by the two CCD cameras 13 and the 97106432 25 200924858 obtained by the two CCD cameras 13 = the positioning mark 93 on the upper surface 91 of the board 9 The image moving mechanism 12 and the substrate rotating mechanism 12a are controlled by the substrate position adjusting portion of the control unit 1 (see FIG. 3), thereby adjusting the relative position of the substrate (one) to the plurality of nozzles 17. Then, when the position adjustment of the substrate 9 is completed, the coating head 14 intermittently discharges the organic EL liquid from the plurality of nozzles under the action of the coating head moving mechanism 15, and moves in the main scanning direction, and each When the coating head β 14 is moved in the main scanning direction, the substrate 9 is stepwise moved by the substrate moving mechanism 〇12 in the sub-scanning direction ((+Υ) direction). Then, the plurality of nozzles 17 repeatedly perform relative movement with respect to the substrate 9 in the main scanning direction and the sub-scanning direction until the substrate 9 is positioned at the coating end position indicated by the two-point key line in FIG. The liquid is applied to the substrate 9 in a stripe shape. As described above, the test coating surface 2131 of the test coating unit 2 is coated with the organic EL liquid by a coating device, and according to the organic sputum pattern on the test coated surface 2131 obtained by the CCD camera 13. The nozzle pitch is detected by the image, and based on the detection result, the pitch adjustment mechanism 3 is used to adjust the pitch of the plurality of nozzles 17 in the sub-scanning direction. Thereby, the pitch of the plurality of nozzles 17 of the coating device '1 in the sub-scanning direction (i.e., the inter-nozzle-distance) can be adjusted with high precision without applying the organic EL liquid to the substrate 9. The result is 'different from the case where the test coating is applied to the non-coated area on the & plate to adjust the nozzle pitch, regardless of the relationship between the number of nozzles and the size of the non-coated area (ie, test coating) In the case where the size of the area required for the cloth is related to the size of the testable coated area on the base 97106432 26 200924858, the nozzle pitch is adjusted with high precision. Therefore, the structure of the coating device is particularly suitable. A coating device having a plurality of nozzles (for example, eight or more) is provided. Further, in the coating apparatus 1 , since the substrate is not subjected to test coating, it is possible to prevent particles which may be generated from the organic cerium material after drying of the EL liquid which has been tested and coated, and to improve the coating quality of the substrate 9 . . In the coating device 1, the distance between the nozzle 17 and the upper surface 91 of the substrate 9 is between the nozzle 丨 7 and the test coated surface 2131 at the time of the test coating and the application of the organic EL liquid to the substrate 9 Since the distance in the z direction is equal, the discharge distance of the organic sputum when the organic EL liquid is applied onto the substrate 9 is equal to the discharge distance at the time of test coating. Assuming that the difference in the discharge distance between the coating on the substrate and the test coating is large, the distance between the lines of the plurality of coated organic EL liquids may vary, but in the coating device 1 of the present embodiment. 'It is possible to prevent the influence of the difference in the discharge distance between the application on the substrate 9 and the test coating, so that the inter-nozzle pitch can be adjusted with higher precision. Further, in the coating apparatus 1, as long as the influence of the difference in the line spacing of the discharge distance with respect to the organic EL liquid can be prevented, even between the nozzle 17 and the test coated surface 2131 at the time of test coating The distance in the Z direction and the distance between the nozzle 17 when the organic EL liquid is applied to the substrate 9 and the upper surface 91 of the substrate 9 are slightly different in the Z direction, and it can be considered that the above-distance is substantially equal. In the test coating platform unit 21, the test coated surface 2131 is used as the main surface of the resin tape 213, and the resin tape 213 is sent out to the tape holding portion 214 by the tape supply portion 215, whereby it can be easily used (that is, The test coated surface 2i 31 of the 97106432 27 200924858 test of the organic EL liquid was replaced with a new unused test coated surface. In the tape holding portion 214, the test coated surface 2131 of the resin tape 213 is fixed and flattened by the tape suction portion 2141 and the tape pressing portion 2142, and the distance between the test coated surface 2131 and the plurality of nozzles 17 is maintained. It is fixed, whereby the nozzle pitch can be detected with higher precision. In the test coating unit 2, the test coated surface of the coating platform portion 21 is tested.

When the test coating is applied by the coating head 14, 2131 overlaps with only a part of the relative movement paths of the plurality of nozzles 17 in the main scanning direction. In other words, on the moving road cucumber of the plurality of nozzles 17 which are applied by the coating movement mechanism 15, the test coating surface 2131 is placed on only a part of the main scanning direction, so that the test coated surface of the organic EL liquid can be applied. The area becomes smaller, and the amount of the test coated surface 2131 can be reduced. The result is a reduction in the cost of nozzle spacing adjustment. In the coating device 1, the abutting portion moving mechanism 34 of the pitch adjusting mechanism 3 is controlled by the adjusting mechanism control unit 102 based on the nozzle pitch detected by the distance detecting portion 1〇1 between the control units 10, thereby Automatically adjust the spray: spacing. As a result, the nozzle pitch can be adjusted with higher precision, and the work time and labor required for the adjustment can be reduced. Further, it is possible to adjust the proximity by using the pitch adjustment between the nozzles 17 and the individual movement in the direction. The distances in the direction of the field 1 field are carried out in the individual and high-precision coating device 1 according to the organic scanning + ^ QL horror coated on the surface of the main scanning direction according to the main scanning direction _ 2_ test coating 97106432 28 200924858 cloth surface 2131 The image of the sputum pattern and the shadow of the 2 mosquitoes (4) marks 93 arranged separately in the base and the main scanning direction are the relative positions of the substrates to the nozzles 17, thereby being coated by the solid and the nozzles 17. The plurality of grooves of the organic EL liquid line and the application region q of the substrate are accurately parallel, and the substrate can be adjusted with high precision. Further, since the position adjustment of the alumina board 9 can be adjusted by the nozzle pitch adjustment, the structure of the coating apparatus can be simplified.

Ο91More Steps - By means of two test coating platform portions 1 having the same structure, two tapes for fixing the two test coated surfaces 2131 are respectively kept warm: 214, and two test coated surfaces 2131 By replacing the two ' ▼ supply portions 215 and the two tape collecting portions 216 , respectively, the structure of the coating device 1 can be further simplified. Next, the coating apparatus according to the second embodiment of the present invention will be described. The coating device of the first embodiment I has two test coating platform portions 21 & which are different from the structure of the test coating flat opening 21 shown in Figs. 8 and 9 , and other configurations and those shown in Figs. 1 to 7 Coating | set! In the same way, the same symbols are denoted in the following description. Fig. 13 is a left side view showing the test coating platform portion 21 & (+χ) side. One portion of the substrate moving mechanism 12 is also depicted in FIG. In the coating apparatus of the second aspect, the test coating stage portion 21 of the (_χ) side has the same structure as the test coating stage portion 21a of the (+X) side shown in Fig. 13 . As shown in FIG. 13, the test coating platform portion 21a is provided with a slider 211 movably mounted on the rail 121 of the substrate moving mechanism 12; a housing 97106432 29 200924858 212 fixed to the slider 211; and a test piece 213a A test coating member for performing test coating of the organic anal solution; a test piece holding portion 2Ua for holding the test piece 213a on the upper portion of the outer casing 212; and a test piece containing 215a, which is attached to the test piece 213a (-Z) a side of a plurality of test pieces 213b (hereinafter referred to as "waiting test piece 213b") which are not used (that is, which have not been subjected to test coating of the organic EL liquid) are stacked and held by a magazine; The mechanism 216a is a cylinder that presses the test piece 213a held by the test piece holding portion 214a in the (+Y) direction; and the test piece recovery portion 鼙217a receives the pressure from the test piece holding portion 21 by the pressing mechanism 216a. Test piece 213a. The test piece 213a is formed of the same material as the substrate 9 with respect to the wetness of the organic EL liquid. In the present embodiment, it is formed of glass of the same material as the substrate 9. Further, on the main surface of the (10) side of the test piece 213a, a film similar to the film formed on the substrate 9 before application of the organic EL liquid (for example, a layer of the following hole transporting material) is formed, and the test piece 213a is formed. The (10) major side of the crotch side and the upper surface 91 of the substrate 9 are each wet with respect to the organic liquid (ie, substantially equal). Further, by appropriately selecting the material of the test piece 213a, the main surface of the (+z) side of the test piece 213& and the upper surface 91 of the substrate .9 are the same as the wettability of the organic EL liquid, respectively. A film is formed on the main surface of the (+Z) side of the 5 piece 213a. The test coating plate portion 21a towel, the main surface r of the (4) side of the test piece 213 & is for testing a plurality of nozzles 17 (refer to the test coated surface 2m of the organic crucible discharged from the drawing) The test piece holding the test piece is held by Deng 214a as a test coating part having the test coated surface 2131. 97106432 30 200924858 13 J t is a sheet holding portion 214 == surface abutting portion, 'which abuts the test piece 2ΐ3&amp The test hits and determines the Z direction (ie, the position of the test coated surface 2131 on the test coated surface 2131 J. The test piece holding portion 213; the wide: two pieces of the test by the test piece 2l3a The test piece accommodating portion 215a on the opposite side (i.e., the (9) side) of the cloth surface Ο 2131, and the plurality of waiting test pieces 213b are pressed toward the test coated surface abutting portion (10) to press the test coated surface. The pressing portion 2147 is pressed in the test coating unit portion 2a. The pressing mechanism 216 & is driven to abut against the test piece 213_(8) of the test coated surface abutting portion 2147 and is pressed out from the test piece _4β 9 7 / ' 4a is taken out. Next, it will be contained in the test piece to receive the 4215a + multiple waiting test pieces _ medium, the uppermost The test piece (10) is abutted against the test coated surface of the test piece holding portion 214a, and the pressure is changed to become the new test piece 213 & held in the test piece holding portion 214a, and the main surface of the (10) side of the test piece (10) As a new test on the surface 213, that is, the test coating platform animal "", the extrusion mechanism j16a becomes the test piece 2 from the test piece holding portion 21, etc. ^ Then 4 pieces are taken out 'test piece The accommodating portion 215& and the pressing mechanism are replaced with the test coating surface 2131 of the test piece holding portion 214a, and replaced with a new measuring " S-coated surface replacement mechanism for the coated surface. In the flow of the preparation operation of the cloth device (that is, the adjustment of the nozzle pitch and the position adjustment of the substrate 9), the replacement of the test coated surface 2131 in the step s152 shown in FIG. 11A refers to the use of the tree 97106432 31 200924858. The delivery of the adhesive tape 213 is the same as that of the first embodiment except that the replacement of the test piece 2l3a is changed by the 丨 丨 、 、 丨丨 丨丨 η η η 。 。 。 η η η η η η η η η η η The 纺 纺 spun silver to the 衮 相同 is the same as the first embodiment, The organic EL liquid is applied onto the coated surface 2i3i of the test coating unit 2 (refer to 0), and the nozzle pitch is detected according to the image of the organic liquid pattern on the test coated surface 213.1, and then the roots are picked up. As a result of the profit, the gentleman Dan adjusts the spacing of the plurality of nozzles 17 (see Fig. 1) on the field in the sub-scanning direction. This allows the substrate 9 (see Fig. I) to be organic. In the case of the liquid component & J section, the squeezing of the plurality of squeezing η of the coating device and the spacing of the double-mouth m-mouth i7 in the sub-scanning direction (ie, the nozzle) spacing). In the coating apparatus of the second embodiment, the test coated surface 2 ΐ 3 ι is used as the main surface of the test piece 231 a which is the same as the surface of the upper surface 9 i of the substrate 9 with respect to the wetness of the organic EL liquid. The measurement error or the like caused by the difference in the position of the surface 2i3i and the upper surface 91 of the substrate 9 can accurately detect the nozzle pitch. In the test coating platform portion, a test piece accommodating portion core in which a plurality of waiting test pieces 213b are accommodated on the (9) side of the test piece _ is provided, and the test piece is pressed out from the center of the test piece holding portion by the pressing mechanism 216a. _, and the new test piece 213a is pressed toward the test coated surface abutting portion 2147 of the test piece holding portion ma to configure a new test coated surface: : 13 to thereby easily replace the test coated surface 2 m And the distance between the test coated surface 2131 and the plurality of nozzles 1 7 » pg ^ 攸 double 1 back 嘎 17 can be kept fixed, and the nozzle pitch can be detected more accurately. The present invention is not limited thereto. The above embodiments of the present invention are described. 97106432 32 200924858 The above embodiments can be variously modified. For example, in the test coating platform portion 21 of the coating device 1 of the first embodiment, the resin tape 213 is adsorbed by the suction force of the tape adsorption portion 2141 in the tape holding portion 214 so that the test coated surface 2131 is When the state of the smoothing is fixed, the tape pressing portion 2丨42, the pressing portion lifting mechanism 2143, and the pressing portion moving mechanism 2144 may be omitted, and only the tape suction 1 2141 is used as the test coating for fixing the resin tape 2丨3. The ❹ tape fixing portion of the surface 2131. Moreover, the test coated surface 213 of the resin tape 2丨3 can be fixed by the pressing of the tape pressing portion 2142 without the need to adsorb the tape suction portion 2141. In this case, only the tape pressing portion 2142 becomes the tape fixing portion. . In the preparatory work of the shock setting 1, the movement of the nozzle π by the pitch adjustment mechanism 3 in step S151 may be performed in parallel with the replacement of the test in step S152, or the step of step S152 may be performed in step S152. Before S151 (the second embodiment is the same). In addition, the fixed image taken in step (10): the vertical number is not necessarily a positioning-specific mark placed on the non-coated area, for example, One part of the wiring formed on the partition wall or the non-coating area in the coating area is used as a positioning mark. One-filling mechanism 3-in' can use one adjusting head 30 to sequentially perform solid-sounding 17 Position adjustment in the sub-scanning direction 'Set a plurality of adjustment heads 30. This production: Brother is not, under this condition, 'multiple nozzles 1 7 Yishan coating head moving mechanism 15 pairs of coating nozzles 7 hunting The position corresponding to the 3〇 moves in sequence. One nozzle 17 of the I Shuo is used as a smile. When the plurality of nozzles 17 are used as the reference nozzles, the adjustment head 3〇 is not adjusted to the reference 97106432 33 200924858 ==. Further, the reference nozzle may be fixed to the nozzle mounting portion 141 so as not to move in the sub-scanning direction. In the coating shake of the above embodiment, it is not necessary to carry out the -17 (or, in addition to one nozzle 17, all the spray directions are individually moved, and the immovable slaves). The nozzle that moves a plurality of nozzles 17 is different from the pitch adjustment mechanism 3: under the action of the mechanism 'is perpendicular to the upper surface 91 of the substrate 9 :: only rotates a slight angle 'This can be used to change the nozzle pitch of the nozzle L in the sub-scanning direction. It is said that the pitch adjustment mechanism is manually operated. When the position adjustment of the substrate 9 is performed by another mechanism that is adjusted to the nozzle pitch, it is also possible to test =: = 1 test coating platform portion. In this case, the nozzle pitch can be accurately adjusted without applying the organic e liquid to the substrate 9. He made a tree-to-belt 213 test coating unit with a view of the other examples. For the test coating platform shown in FIG. 15 and FIG. 9 and FIG. 9 and only one substrate is provided (ie, the test coating platform having a larger width in the two directions) In the tape holding portion 214 of the upper portion of the test coating ==21b, the width of the tree cloth: the elongation r degree and the X direction of the substrate ^ is tested in the tape holding portion 214 coated early, throughout the resin tape 97106432 34 200924858, The organic sputum is applied to the entire length of the x-direction, and the two test coated surface tape attaching portions 2141 in the vicinity of the both ends in the X direction are fixed by the rrn... (4) with a suction, ab J is photographed by a CCD camera, and the information necessary for the position adjustment of the spray plate is detected in the same manner as the above-mentioned shell (four) state. In the base test coating platform portion 2ib, the splicing + I test coating is finished. In the case of Fig. l5: 3 is the shape of 'and' and the test coated surface 21l1 is used for further conveyance. Thus, the used test coated surface: the raw 4, sprayed with the sprayer 2191 ^ Wash the liquid and remove the attached organic EL material from the airknife (10) to be used as a new test coated surface The structure of the second embodiment may be a coating device in which the ❹m (four) plane is wound and the m (four) plane is wound on the (+χ) side and the (χ) side 3 supply unit and the (4) time portion. Instead of moving the substrate 9 and the substrate holding portion u, the substrate 9 and the substrate holding portion u are moved, and the substrate 9 in the sub-scanning direction is applied to the coating head 14 by the movement of the coating head 4 in the sub-scanning direction. In addition, instead of using the coating head 2 mechanism 15 to move the coating head 14, the substrate 9 and the substrate portion U are moved in the main scanning direction to perform the main scanning direction. The relative movement of the coating head 14 with respect to the substrate 9. In the coating apparatus of the above embodiment, the number of the nozzles 设置 provided on the coating head 14 is not limited to 16 or more, and the coating apparatus t, For example, it is also possible to use three nozzles 设置 disposed on the coating head 14, and to divide the three types of organic EL materials of red (R), green (G), and blue (Β) with different colors from each other in 97106432 35 200924858. The organic EL solution is simultaneously discharged and applied to the substrate 9. In this case, the adjacent two nozzles are in the sub-scan The distance in the direction is adjusted to be equal to the distance between the partition walls. 'In the above-mentioned coating device', a fluid material including a hole-forming material which is a pixel forming material (hereinafter referred to as "hole transport liquid") may be used. It is applied to the substrate 9. Here, the term "hole transport material" refers to a material in which a hole transport layer of an EL display device is formed, and the term "hole transport layer" does not mean only The narrow hole transport layer for transporting a hole in the organic EL layer formed of the organic EL material further includes a hole injection hole injection layer. The above coating device is not necessarily used only for the organic sputum for the organic EL display device or The application of the hole transporting liquid, for example, to a substrate for a flat display device such as a liquid crystal display device or an electric device, may be applied to a case where another type of pixel material such as a material: a fluorescent material is applied. In the above-mentioned substrate for the organic El & mm liquid and the hole transport liquid, there is a (4) row of substrates for the image surface display device; in the coating of the fluid material, the fluidity is required to be high. Positional accuracy. As mentioned above, due to coating

Si: Adjusting the distance between a plurality of nozzles, so it is especially suitable for the substrate that is used for the EL liquid and the hole for the organic EL liquid and the hole, and the substrate for the surface of the device is included. Coating of liquid materials. 97106432 36 200924858 In addition to the substrate for a flat display device, the above-mentioned coating device can also apply various kinds of fluid materials to various substrates such as a glass substrate, a ceramic substrate, or a semiconductor substrate. . The present invention has been described and illustrated in detail above, but the description above is merely exemplary and not limited. Therefore, it can be understood that various modifications and various forms are possible without departing from the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view of a coating apparatus according to a first embodiment. ° Figure 2 is a front view of the coating unit. Fig. 3 is a block diagram showing the function of the control unit. Figure 4 is a front elevational view showing a portion of the coating head. Fig. 5 is a plan view showing a part of a coating head. Fig. 6 is a plan view showing a part of the adjustment head and the coating head. Fig. 7 is a left side view showing a part of the adjustment head and the coating head. Figure 8 is a left side view of the test coating platform section. ❹ Figure 9 is a rear view of the test coating platform section. Fig. 1 shows a plan view of the vicinity of the tape holding portion. Fig. 11 is a flow chart showing the preparation work of the lanthanum coating device. Figure 12 is a plan view of the coating apparatus. Fig. 13 is a left side view of the test coating platform portion of the second embodiment. Fig. 14 is a plan view showing the vicinity of the test piece holding portion. Figure 15 is a rear view of another test coating platform section. [Main component symbol description] 1 Coating device 97106432 37 200924858

2 test coating unit 2a test coating unit 3 pitch adjustment mechanism 9 substrate 10 control unit 101 pitch detecting unit 102 adjustment mechanism control unit 103 substrate position adjusting portion 11 substrate holding portion 111 connecting portion 12 substrate moving mechanism 121 way 12a substrate rotation Mechanism 13 CCD camera 13a Imaging unit moving mechanism 14 Coating head 141 Nozzle mounting portion 142 Guide groove 1411 Back plate portion 1412 Horizontal portion 15 Coating head moving mechanism 16 Liquid receiving portion 17 Nozzle 173 Nozzle locking portion 97106432 38 200924858

21 Test coating platform portion 21a Test coating platform portion 21b Test coating platform portion 211 Slider 212 Housing 213 Resin tape 213a Test piece 213b Waiting for test piece 2131 Test coated surface 214 Tape holding portion 214a Test piece holding portion 2141 Tape adsorption 2142 tape pressing portion 2143 pressing portion lifting mechanism 2144 pressing portion moving mechanism 2145 holding surface 2146 claw portion 2147 test coating surface abutting portion 215 tape supply portion 215a test piece housing portion 2151 sensor 216 tape collecting portion 216a pressing mechanism 217a Test piece recovery unit 97106432 39 200924858 2161 Sensor 2171 Motor. 2172 娲 wheel. 218 Outer liquid receiving part 2191 Sprayer 2192 Air knife 22 Central liquid receiving part 30 Adjustment head 安装 31 Mounting part fixing mechanism 311 First fixing part 314 2 fixing portion 32 nozzle abutting portion 33 nozzle pressing mechanism 331 rod 332 cylinder _ 333 regulator 34 abutting portion moving mechanism 343 stepping motor 91 upper surface - 93 positioning mark 97106432 40

Claims (1)

200924858 X. Patent Application Range: 1 · A coating device is attached to a substrate-coated fluid material; the device is provided with: a substrate holding portion for holding the substrate; - a plurality of nozzles for continuously discharging toward the main surface of the substrate a fluid material; the nozzle scanning mechanism, wherein the plurality of nozzles are relatively moved relative to the substrate in a main scanning direction parallel to the main surface of the substrate, and each time the substrate is moved relative to the main scanning direction The plurality of nozzles are relatively moved in a sub-scanning direction parallel to the main surface and perpendicular to the main scanning direction; the test coating portion has a test coating surface on which the substrate is not coated Testing the coating of the fluid material from the plurality of nozzles; testing the coating portion advance and retreat mechanism to advance and retreat the plurality of nozzles in the relative movement path of the plurality of nozzles in the main scanning direction, so as to test the coating The distance between the plurality of nozzles and the test coated surface, and the above-mentioned complex at the time of coating The distance between the nozzles and the main surface of the substrate is equal; the imaging unit obtains an image of the pattern of the fluid material applied to the test coated surface by the relative movement of the plurality of nozzles in the main scanning direction The pitch detecting unit detects a pitch of the plurality of nozzles in the sub-scanning direction based on the image obtained by the imaging unit, and the pitch adjusting mechanism adjusts a pitch of the plurality of nozzles in the sub-scanning direction of 97106432 41 200924858; And testing the coated surface replacement mechanism to replace the test coating-cloth surface of the test coating portion with a new test coated surface. The coating device of claim 1, wherein the test coated surface partially overlaps one of the relative movement paths of the plurality of nozzles in the main scanning direction during the test coating. 3. The coating apparatus according to claim 1, further comprising: a substrate rotating mechanism that rotates the substrate holding portion about a rotation axis perpendicular to the main surface of the substrate; and another imaging unit Obtaining an image of a pattern of a fluid material applied on another test coated surface provided separately from the test coated surface in the main scanning direction; and a substrate position adjusting unit according to the image capturing unit and the other image capturing unit Controlling the nozzle scanning mechanism and the image by the image of the pattern of the fluid material obtained by the portion and the image of the position mark on the main surface of the substrate obtained by the imaging unit and the other imaging unit a substrate rotating mechanism for adjusting a relative position of the substrate relative to the plurality of nozzles. 4. The coating device of claim 3, further comprising: 'another test coated surface replacement mechanism that replaces the other test coated surface with the test coated surface individually New test coated surface. 5. The coating apparatus according to claim 2, wherein the distance detecting unit detects a distance between two nozzles adjacent to each other in the sub-scanning direction, 97106432 42 200924858 by the pitch adjusting mechanism All but one of the plural numbers are individually moved in the sub-scanning direction = the respective distances are adjusted. Secondly, in the case of the patent application range 丨 to 5, there is a coating device having the item, the driving portion driving the pitch adjusting mechanism; and the controlling mechanism controlling portion 'according to the above The detection result of the pitch detecting unit is used to manufacture the above-described driving unit. The coating device according to any one of claims 1 to 5, wherein the coating portion holds the tape holding portion of a portion of the resin tape, and the test coating surface is the resin tape. In the main surface of the part, the measurement coating surface replacement mechanism includes a tape supply unit that feeds the resin tape toward the test application unit. The coating device according to claim 7, wherein the test coating portion includes a tape fixing portion that fixes the test coated surface of the resin tape to the main substrate of the substrate The faces are parallel to the plane. 9. The coating apparatus according to claim 7, wherein the driving unit is configured to drive the pitch adjusting mechanism; and the adjusting mechanism control unit is configured to control the driving unit based on a detection result of the pitch detecting unit. 10. The coating device according to any one of claims 1 to 5, wherein: 97106432 43 200924858 wherein the test coating surface is relative to the wetness of the flow and the substrate The main surface of the same test piece on the main surface, and the above test (4) on the scale of the scale. 11. The coating device according to claim 10, wherein the coating application portion is provided with a test coated surface abutting portion, and the test coated surface abutting portion abuts the test coating of the test piece a cloth surface for determining a position of the test coated surface in a direction perpendicular to the test coated surface: the test coated surface replacing mechanism includes: a test piece receiving portion' on the test coated surface of the test piece a plurality of waiting test pieces are held on the opposite side, and the test piece is pressed toward the test coated surface abutting portion via the plurality of waiting test pieces; and the test piece take-out portion 'takes the test from the upper test paint The coating device according to the first aspect of the invention, further comprising: an eight-drive unit that drives the pitch adjustment mechanism; and an adjustment mechanism control unit that controls the detection result based on the detection result of the pitch detection unit Drive section. 97106432 44