JP2008229565A - Coating apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To highly precisely adjust the pitch of a plurality of nozzles of a coating apparatus without coating a substrate with a flowable material. <P>SOLUTION: In the coating apparatus 1, an organic EL liquid is applied on a test coating surface of a resin tape held by a tape holding part in each of two test coating stage parts 21 of a test coating unit 2 by moving a coating head 14 in the main scanning direction while continuously discharging the organic EL liquid from the plurality of the nozzles 17. The nozzle pitch is detected based on an image of a pattern of the organic EL liquid on a test coating surface which is obtained by a CCD camera 13 and the pitch in the secondary scanning direction of the plurality of the nozzles 17 is adjusted by a pitch adjusting mechanism 3 based on the detected result. As a result, the pitch in the secondary scanning direction of the plurality of nozzles 17 in the coating apparatus 1 is highly precisely adjusted without applying organic EL liquid on the substrate 9. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a coating apparatus that applies a flowable material to a substrate.

  2. Description of the Related Art Conventionally, an organic EL display device using an organic EL (Electro Luminescence) material has been developed. For example, in the production of an active matrix drive type organic EL display device using a polymer organic EL material, a glass substrate is used. (Hereinafter simply referred to as “substrate”), formation of TFT (Thin Film Transistor) circuits, formation of ITO (Indium Tin Oxide) electrodes as anodes, formation of barrier ribs, fluid materials including hole transport materials (Hereinafter referred to as “hole transport liquid”), formation of a hole transport layer by heat treatment, flowable material containing an organic EL material (hereinafter referred to as “organic EL liquid”), heat treatment The organic EL layer, the cathode, and the insulating film are sequentially sealed.

  In the manufacture of an organic EL display device, as one of devices for applying a hole transport liquid or an organic EL liquid to a substrate, as shown in Patent Document 1 and Patent Document 2, a plurality of fluid materials are continuously discharged. An apparatus for applying a fluid material to a substrate by moving a nozzle relative to the substrate is known.

  In the apparatuses of Patent Document 1 and Patent Document 2, a plurality of nozzles are moved in the main scanning direction, and the substrate is moved in the sub-scanning direction each time the nozzle is moved in the main scanning direction. A flowable material is applied in stripes to the grooves between the plurality of partition walls formed in the application region. In the coating apparatus of Patent Document 1 and Patent Document 2, three nozzles are integrally held by a holding member, and the holding member is rotated around a support shaft perpendicular to the substrate to rotate the three nozzles. By reducing the pitch in the sub-scanning direction, the application pitch of the fluid material can be reduced.

On the other hand, in Patent Document 3, one nozzle is moved in the main scanning direction, and each time the nozzle is moved in the main scanning direction, the substrate is moved in the sub-scanning direction, so that the coating region on the substrate is moved. An applicator is disclosed that applies a fluid material in stripes to grooves formed between a plurality of formed partition walls. In the coating apparatus of Patent Document 3, the organic EL liquid is applied to a mask provided between the nozzle and the substrate, and the inclination of the substrate is based on the application locus of the organic EL liquid on the mask and the image data of the grooves on the substrate. To correct the main scanning direction of the nozzle and the direction in which the groove extends.
JP 2002-75640 A JP 2003-10755 A JP 2004-74050 A

  By the way, in such an apparatus, the pitch adjustment of the nozzle is usually performed manually by an operator, and the adjustment result is also confirmed by directly observing the application result by the operator, but it is difficult to adjust the pitch with high accuracy. Therefore, the work time and labor required for the adjustment are also great. In addition, test application such as pitch detection before adjustment and confirmation of adjustment results may be performed on the non-application area of the product substrate, but if the number of nozzles is large, test application may be performed. The required width becomes larger than the width of the non-application area, and the nozzle pitch cannot be adjusted.

  The present invention has been made in view of the above problems, and an object of the present invention is to adjust the pitch of a plurality of nozzles of a coating apparatus with high accuracy without applying a flowable material to a substrate.

  The invention described in claim 1 is a coating apparatus that applies a fluid material to a substrate, and includes a substrate holding unit that retains the substrate, and a plurality of fluid materials that are continuously discharged toward the main surface of the substrate. And the plurality of nozzles are moved relative to the substrate in a main scanning direction parallel to the main surface of the substrate, and the substrate is moved each time movement in the main scanning direction is performed. A nozzle scanning mechanism that moves relative to a plurality of nozzles in a sub-scanning direction parallel to the main surface and perpendicular to the main scanning direction, and a fluid material from the plurality of nozzles when not applied to the substrate. A test application portion having a test application surface to be test-applied, and the test application portion is advanced and retracted with respect to a path of relative movement of the plurality of nozzles in the main scanning direction, and the plurality of nozzles and the test application are applied during test application. Paint the distance between The test application portion advancing / retreating mechanism for equalizing the distance between the plurality of nozzles and the main surface of the substrate at the time, and the plurality of nozzles applied to the test application surface by relative movement in the main scanning direction An imaging unit that acquires an image of a pattern of a flowable material, a pitch detection unit that detects a pitch of the plurality of nozzles in the sub-scanning direction based on an image acquired by the imaging unit, and the plurality of nozzles A pitch adjustment mechanism that adjusts the pitch in the sub-scanning direction, and a test application surface exchange mechanism that replaces the test application surface of the test application unit with a new test application surface.

  A second aspect of the present invention is the coating apparatus according to the first aspect, wherein the test application surface overlaps only a part of a path of relative movement of the plurality of nozzles in the main scanning direction at the time of test application. ing.

  Invention of Claim 3 is a coating device of Claim 1 or 2, Comprising: The board | substrate rotation mechanism which rotates the said board | substrate holding part centering on the rotating shaft perpendicular | vertical to the said main surface of the said board | substrate, Another imaging unit that acquires an image of a pattern of the flowable material applied to another test application surface provided apart from the test application surface in the main scanning direction, the imaging unit, and the other imaging The nozzle scanning mechanism based on the image of the flowable material pattern acquired by the unit, and the image of the positioning mark on the main surface of the substrate acquired by the imaging unit and the other imaging unit. A substrate position adjusting unit configured to adjust a relative position of the substrate with respect to the plurality of nozzles by controlling the substrate rotating mechanism;

  The invention according to claim 4 is the coating apparatus according to claim 3, wherein the other test application surface is replaced with a new test application surface separately from the test application surface. A coating surface exchange mechanism is further provided.

  Invention of Claim 5 is a coating device in any one of Claim 1 thru | or 4, Comprising: The drive part which drives the said pitch adjustment mechanism, The said drive part based on the detection result of the said pitch detection part And an adjustment mechanism control unit for controlling.

  A sixth aspect of the present invention is the coating apparatus according to any one of the first to fifth aspects, wherein each distance between two nozzles adjacent to each other in the sub-scanning direction is detected by the pitch detection unit. The pitch adjustment mechanism adjusts the distances by moving all of the plurality of nozzles or all but one of the nozzles individually in the sub-scanning direction.

  Invention of Claim 7 is a coating device in any one of Claim 1 thru | or 6, Comprising: The said test application part is a tape holding part holding a part of resin tape, The said test application surface Is the partial main surface of the resin tape, and the test application surface exchange mechanism includes a tape supply unit that feeds the resin tape to the test application unit.

  The invention according to claim 8 is the coating apparatus according to claim 7, wherein the test application unit fixes the test application surface of the resin tape on a holding plane parallel to the main surface of the substrate. A tape fixing part is provided.

  Invention of Claim 9 is the coating device in any one of Claim 1 thru | or 6, Comprising: The said test application surface made the wettability with respect to a fluid material equivalent to the said main surface of the said board | substrate. It is a main surface of a test piece, and the test application part is a test piece holding part for holding the test piece.

  A tenth aspect of the present invention is the coating apparatus according to the ninth aspect, wherein the test application unit is in contact with the test application surface of the test piece and is perpendicular to the test application surface. A test application surface contact portion for determining the position of the application surface, wherein the test application surface exchange mechanism holds a plurality of standby test pieces on the opposite side of the test application surface from the test application surface; A test piece housing portion that urges the test application surface contact portion through the plurality of standby test pieces; and a test piece extraction portion that takes out the test piece from the test application portion.

  In the present invention, the pitch of the plurality of nozzles can be adjusted with high accuracy without applying the flowable material to the substrate. In the invention of claim 2, the usage amount of the test application surface can be reduced. In the third and fourth aspects of the invention, the position of the substrate can be adjusted with high accuracy.

  In the invention of claim 5, the pitch of the plurality of nozzles can be automatically adjusted. In the invention of claim 6, each distance between adjacent nozzles can be individually adjusted. In the invention of claim 7, the test application surface can be easily exchanged. According to the eighth to tenth aspects of the present invention, the pitch of the plurality of nozzles can be detected with high accuracy.

  FIG. 1 is a plan view showing a coating apparatus 1 according to the first embodiment of the present invention, and FIG. 2 is a front view of the coating apparatus 1. The coating apparatus 1 is an apparatus that applies a flowable material including a pixel forming material for a flat display device to a glass substrate 9 for flat display devices (hereinafter simply referred to as “substrate 9”). In the present embodiment, in the coating apparatus 1, a fluid material containing an organic EL material (hereinafter referred to as “organic EL liquid”) is provided on a substrate 9 for an organic EL (Electro Luminescence) display device of an active matrix driving system. Applied.

  As shown in FIGS. 1 and 2, the coating apparatus 1 includes a substrate holding unit 11 that holds a substrate 9, and a predetermined direction parallel to the main surface of the substrate 9 (that is, the Y direction in FIG. 1). And a substrate moving mechanism 12 that horizontally moves in the “sub-scanning direction” and a substrate rotating mechanism 12 a that rotates the substrate holding portion 11 around a rotation axis perpendicular to the main surface of the substrate 9. . The substrate holding unit 11 includes a heating mechanism (not shown) using a heater.

  The coating apparatus 1 also includes two imaging unit moving mechanisms 13a that individually move the two CCD cameras 13 that are two imaging units arranged on the substrate 9 in the sub-scanning direction, and a substrate holding unit. 11, a coating head 14 that is a discharging mechanism that continuously discharges organic EL liquid from a plurality of nozzles 17 toward a (+ Z) side main surface (hereinafter referred to as “upper surface”) 91 of the substrate 9 on the substrate 11. 14 is a head moving mechanism 15 that horizontally moves 14 in a direction parallel to the main surface of the substrate 9 and perpendicular to the sub-scanning direction (that is, the X direction in FIG. 1 and hereinafter referred to as “main scanning direction”). 14 in the sub-scanning direction of the plurality of nozzles 17 and the two liquid receiving parts 16 that are provided on both sides of the substrate holding part 11 and receive the organic EL liquid from the coating head 14 with respect to the moving direction (that is, the X direction). Includes a pitch adjustment mechanism 3 for adjusting that pitch, as shown in FIG. 1, it comprises a test coating unit 2 which organic EL liquid from the coating head 14 is tested coating. Moreover, the coating device 1 is provided with the control part 10 which controls these structures.

  As with a normal computer, the control unit 10 includes a CPU that performs various arithmetic processes, a RAM that stores programs to be executed and a work area for arithmetic processes, a ROM that stores basic programs, and a fixed disk that stores various information In this configuration, a display for displaying various information to the worker and an input unit such as a keyboard and a mouse are connected. FIG. 3 is a block diagram showing, together with other configurations, functions realized when the CPU of the control unit 10 performs arithmetic processing according to a program. The pitch detection unit 101, the adjustment mechanism control unit 102, and the substrate in FIG. The position adjustment unit 103 corresponds to a function realized by a CPU or the like. Note that these functions may be realized by a plurality of computers.

  In the coating head 14 shown in FIG. 1, the 16 nozzles 17 are arranged substantially linearly with respect to the X direction in FIG. 1 (that is, the main scanning direction) and at the same time in the Y direction in FIG. In the scanning direction). In the present embodiment, the distance in the sub-scanning direction between the two adjacent nozzles 17 is the pitch between the barrier ribs formed in advance in the main scanning direction on the coating region of the substrate 9 (hereinafter referred to as “the barrier rib pitch”). "). In the coating apparatus 1, when the organic EL liquid is not applied to the substrate 9, a test application of the organic EL liquid is performed on the test application unit 2, and the pitch adjusting mechanism 3 is controlled based on the result of the test application. The distance in the sub-scanning direction between the plurality of nozzles 17 is adjusted. A method for adjusting the pitch of the nozzles 17 will be described later.

  4 and 5 are a front view and a plan view showing a part of the coating head 14, respectively. As shown in FIGS. 4 and 5, the coating head 14 includes 16 nozzles 17 that continuously discharge the organic EL liquid toward the upper surface 91 (see FIG. 1) of the substrate 9, and the 16 nozzles. The nozzle attachment part 141 to which is attached is provided. The nozzle mounting portion 141 includes a back plate portion 1411 substantially perpendicular to the Y direction, and a horizontal portion substantially perpendicular to the Z direction fixed to the lower end portion of the back plate portion 1411 (that is, the (−Z) side end portion). 1412.

  Each of the 16 nozzles 17 is movably attached to a guide groove 142 extending in the (+ Y) direction (that is, the sub-scanning direction) from the (−Y) side edge of the horizontal portion 1412. On the −X) side, a nozzle lock portion 173 that locks the position of the nozzle 17 with respect to the nozzle mounting portion 141 is provided.

  In the coating apparatus 1 shown in FIG. 1, the coating head 14 is moved from the plurality of nozzles 17 by the head moving mechanism 15 in a state where the 16 nozzles 17 are fixed to the nozzle mounting portion 141 (see FIGS. 4 and 5). The substrate 9 is moved in the sub-scanning direction ((+ Y)) by the substrate moving mechanism 12 every time the coating head 14 moves in the main scanning direction while discharging the organic EL liquid continuously. Step). Then, the relative movement of the plurality of nozzles 17 in the main scanning direction and the sub-scanning direction with respect to the substrate 9 is repeated, so that the organic EL liquid is applied to the upper surface 91 of the substrate 9 in stripes. In the coating apparatus 1, the head moving mechanism 15 and the substrate moving mechanism 12 are each a nozzle scanning mechanism that moves the 16 nozzles 17 relative to the substrate 9 together with the nozzle mounting portion 141 in the main scanning direction and the sub-scanning direction. Become.

  In the coating apparatus 1, the pitch adjusting mechanism 3 is provided separately from the coating head 14 on the (+ X) side of the substrate holding unit 11, and the 16 nozzles 17 and the nozzle mounting portion 141 (see FIGS. 4 and 4). 5) is moved independently of the pitch adjusting mechanism 3 by the head moving mechanism 15 of the nozzle scanning mechanism. In other words, the pitch adjusting mechanism 3 is disposed independently of the relative movement of the coating head 14 with respect to the substrate 9 by the nozzle scanning mechanism.

  The pitch adjustment mechanism 3 includes a plurality (16 in the present embodiment) of adjustment heads respectively corresponding to the plurality of nozzles 17. FIGS. 6 and 7 are a plan view and a left side view, respectively, showing one adjustment head 30 located closest to the (−X) side of the plurality of adjustment heads of the pitch adjustment mechanism 3 and a part of the coating head 14. It is. In FIG. 6, the illustration of the nozzle lock portion 173 shown in FIGS. 4 and 5 is omitted for easy understanding of the drawing. In FIG. 7, in order to facilitate understanding of the drawing, a part of the nozzle mounting portion 141 and the nozzle 17 is shown in a cross section including the central axis of the nozzle 17. In the pitch adjustment mechanism 3, the structures of the plurality of adjustment heads 30 are all the same.

  As shown in FIGS. 6 and 7, the adjustment head 30 causes the first fixing portion 311 and the second fixing portion 314 to contact the horizontal portion 1412 of the nozzle mounting portion 141 from the (+ Y) side and the (−Y) side. Mounting portion fixing mechanism 31 for fixing nozzle mounting portion 141, nozzle contact portion 32 that contacts nozzle 17 from the (−Y) side (that is, one side in the sub-scanning direction), and the side opposite to nozzle contact portion 32 (That is, the (+ Y) side of the nozzle 17 and the other side in the sub-scanning direction), the nozzle urging mechanism 33 that urges the nozzle 17 toward the nozzle contact portion 32, and the nozzle urging mechanism 33. A contact portion moving mechanism 34 for adjusting the position in the sub-scanning direction of the nozzle contact portion 32 with which the nozzle 17 biased by the contact is contacted.

  In the pitch adjusting mechanism 3, the nozzle locking portion 141 is fixed by the lock portion operating mechanism (not shown) in a state where the nozzle mounting portion 141 is fixed between the first fixing portion 311 and the second fixing portion 314 of the mounting portion fixing mechanism 31. The air cylinder 332 connected to the stepping motor 343 of the contact portion moving mechanism 34 and the regulator 333 of the nozzle urging mechanism 33 is unlocked by the lock 173 (see FIGS. 4 and 5). It is driven by the mechanism control unit 102 (see FIG. 3). Accordingly, the nozzle contact portion 32 and the rod 331 of the nozzle urging mechanism 33 contact the nozzle 17 from the (−Y) side and the (+ Y) side, respectively, and the contact portion moving mechanism 34 causes the nozzle contact portion 32 to be ( By moving in the + Y) direction, the nozzle 17 moves in the (+ Y) direction while being urged by the nozzle urging mechanism 33 to the nozzle contact portion 32. When the nozzle 17 moves by a desired distance, the nozzle lock unit 173 is operated again by the lock unit operation mechanism, and the position of the nozzle 17 is locked.

  When the nozzle pitch is adjusted in the coating apparatus 1 shown in FIG. 1, the eighth nozzle 17 from the (−X) side is set as the reference nozzle, and the reference nozzle is moved by the lock portion operation mechanism of the pitch adjustment mechanism 3. The locks of the other 15 nozzles are released as necessary. Then, the fifteen nozzles 17 are moved in the sub-scanning direction, and the positions of the nozzles 17 are adjusted so that the distances of the nozzles 17 from the reference nozzle in the sub-scanning direction become a predetermined distance. The position adjustment of the nozzle 17 by the pitch adjustment mechanism 3 (that is, the adjustment of the distance between the nozzles) is performed from the image of the organic EL liquid that has been test-applied to the test application unit 2 by the pitch detector 101 of the controller 10 shown in FIG. Based on the inter-nozzle distances detected by (i.e., based on the detection result of the pitch detection unit 101), the contact portion moving mechanism 34 (see FIGS. 6 and 7) of the pitch adjustment mechanism 3 is used as the adjustment mechanism control unit. This is performed under the control of 102.

  As shown in FIG. 1, the test coating unit 2 is provided on the (+ Y) side of the substrate holding unit 11, and is separated from the X direction and is arranged at approximately the same position in the Y direction, In addition, a central liquid receiving portion 22 is provided that extends in the X direction between the two test application stage portions 21 and has both end portions fixed to the test application stage portion 21. Each test application stage unit 21 is attached to the rail 121 of the substrate moving mechanism 12 via a slider 211 (see FIGS. 8 and 9) so as to be movable in the Y direction. It is fixed to the holding part 11. In the coating apparatus 1, when the substrate holding unit 11 is moved in the Y direction by the substrate moving mechanism 12, the test coating unit 2 is also moved in the Y direction together with the substrate holding unit 11.

  8 and 9 are a left side view and a rear view, respectively, showing the (+ X) side test application stage section 21. FIG. 8 and 9, a part of the substrate moving mechanism 12 is also drawn, and in FIG. 9, a part of the central liquid receiver 22 is also drawn. 8 and 9, for convenience of illustration, the housing 212 of the test application stage unit 21 is drawn in a section, and in FIG. 9, the resin tape 213 is also drawn in a section (FIGS. 13 and 15). The same applies to the above). In the coating apparatus 1, the (−X) side test coating stage unit 21 shown in FIG. 1 has the same structure as the (+ X) side test coating stage unit 21 shown in FIGS. 8 and 9.

  As shown in FIGS. 8 and 9, the test application stage unit 21 includes a slider 211 that is movably attached to a rail 121 of the substrate moving mechanism 12, a housing 212 that is fixed on the slider 211, and a test application of organic EL liquid. Resin tape 213 which is a test application member to be performed, tape holding unit 214 which holds a portion where the test application of resin tape 213 is performed on the upper portion of housing 212, and an unused (that is, test application of organic EL liquid has been performed) Not used) The tape supply unit 215 that holds the roll-shaped resin tape 213 and feeds the resin tape 213 to the tape holding unit 214, and the used resin tape 213 on which the test application of the organic EL liquid has been performed The tape collection part 216 which winds and collect | recovers these parts is provided. In the present embodiment, a PPS (polyphenylene sulfite) resin tape is used as the resin tape 213.

  As shown in FIG. 9, the test application stage unit 21 also includes a motor 2171 and a worm gear 2172 that rotate the tape supply unit 215 and the tape collection unit 216, and an outer side disposed on the (+ X) side of the tape holding unit 214. The liquid receiving part 218 is provided, and the outer liquid receiving part 218 is slightly more than the resin tape 213 held by the tape holding part 214 together with the central liquid receiving part 22 disposed on the (−X) side of the tape holding part 214. It arrange | positions below (namely, (-Z) side).

  In the test application stage unit 21, the motor 2171 is driven to rotate the tape supply unit 215 and the tape recovery unit 216 counterclockwise in FIG. 8 by a predetermined angle. As a result, the resin tape 213 is fed in the (+ Y) direction by a predetermined length in the tape holding unit 214, and an unused portion of the resin tape 213 is positioned in the tape holding unit 214. As shown in FIG. 8, the test application stage unit 21 includes a sensor 2151 that detects the end of the resin tape 213 fed out from the tape supply unit 215 between the tape supply unit 215 and the tape holding unit 214. A sensor 2161 for detecting that a predetermined amount of the resin tape 213 has been wound around the tape collecting unit 216 is provided in the vicinity of the tape collecting unit 216.

  In the test application stage unit 21 shown in FIGS. 8 and 9, some (+ Z) side main surfaces held by the tape holding unit 214 of the resin tape 213 are formed from a plurality of nozzles 17 (see FIG. 1). The test application surface 2131 on which the organic EL solution is applied by test application is provided, and the tape holding unit 214 that holds the part of the resin tape 213 is a test application unit having the test application surface 2131. Further, the tape supply unit 215 and the tape recovery unit 216 for supplying and recovering the resin tape 213 form a test application surface exchange mechanism for exchanging the test application surface 2131 of the test application unit with a new test application surface. In other words, the test application unit 2 includes two test application surfaces 2131 that are provided apart from each other in the main scanning direction, and two test application surfaces that individually replace the two test application surfaces 2131 with new test application surfaces. An exchange mechanism is provided.

  FIG. 10 is a plan view showing the vicinity of the tape holding unit 214 shown in FIGS. 8 and 9. As shown in FIGS. 8 to 10, the tape holding unit 214 is disposed on the (−Z) side of the resin tape 213 (that is, the side opposite to the test application surface 2131) and adsorbs the resin tape 213. 2141, disposed on the (+ Z) side of the resin tape 213 (that is, disposed so as to face the test application surface 2131), and presses the portion in the vicinity of the test application surface 2131 of the resin tape 213 toward the tape adsorbing portion 2141. And a pressing part moving mechanism 2144 for moving the tape pressing part 2142 and the pressing part lifting mechanism 2143 in the Y direction.

  The tape adsorbing part 2141 is provided with a holding plane 2145 that holds the resin tape 213 and is parallel to the upper surface 91 (see FIG. 1) of the substrate 9 on the substrate holding part 11, and the tape pressing part 2142 is as shown in FIG. Two claw portions 2146 extending in the X direction are provided on the (+ Y) side and the (−Y) side of the test application surface 2131 of the resin tape 213. In the tape holding part 214 shown in FIGS. 8 to 10, the tape pressing part 2142 is lowered by the pressing part raising / lowering mechanism 2143, so that the tape holding part 214 is slightly bent so as to protrude toward the (+ Z) side on the tape suction part 2141. The resin tape 213 is pressed toward the holding plane 2145 of the tape adsorbing part 2141 by the two claw parts 2146.

  Then, when the resin tape 213 is vacuum-sucked by the tape suction part 2141, the test application surface 2131 of the resin tape 213 is fixed in a smooth state on the holding plane 2145 of the tape suction part 2141, and the upper surface 91 of the substrate 9. (See FIG. 1). In the test application stage part 21, the tape adsorbing part 2141 and the tape pressing part 2142 are tape fixing parts for fixing the test application surface 2131 of the resin tape 213. The tape pressing portion 2142 is lifted by the pressing portion lifting mechanism 2143 and separated from the resin tape 213 after being attracted by the tape attracting portion 2141 and moved in the (+ Y) direction by the pressing portion moving mechanism 2144. Retreat from the test application surface 2131.

  Next, preparation work in the coating apparatus 1 before the organic EL liquid is applied to the substrate 9 will be described. In the coating apparatus 1, as a preparatory work, the pitch (hereinafter referred to as “nozzle pitch”) of the plurality of nozzles 17 of the coating head 14 shown in FIG. 1 is adjusted, and the relative position of the substrate 9 with respect to the nozzles 17 is adjusted. After the adjustment, an organic EL liquid is applied to the substrate 9. FIG. A and FIG. B is a diagram showing a flow of preparation work (that is, adjustment of the nozzle pitch and position adjustment of the substrate 9) in the coating apparatus 1. FIG.

  In the coating apparatus 1, first, the substrate holding unit 11 moves in the (−Y) direction from the position illustrated in FIG. 1, so that the two test coating stage units 21 of the test coating unit 2 as illustrated in FIG. The plurality of nozzles 17 of the coating head 14 are located at the test coating position below the movement path in the main scanning direction (that is, the path of relative movement with respect to the substrate 9). At this time, the two test application stage portions 21 are respectively positioned below the two CCD cameras 13 (step S11).

  In the coating apparatus 1, the substrate moving mechanism 12 causes the tape holding unit 214 (see FIGS. 8 to 10), which is the two test coating units of the test coating unit 2, to move along the main scanning direction of the plurality of nozzles 17. It is a test application part advance / retreat mechanism that advances and retracts. Note that the test application unit 2 does not necessarily have to be moved together with the substrate holding unit 11, and other test application unit advancing / retreating mechanisms (for example, a rodless cylinder or the substrate moving mechanism 12) driven independently of the substrate moving mechanism 12. The test application unit 2 may be moved back and forth with respect to the movement path of the plurality of nozzles 17 in the main scanning direction by other moving elements provided on the rail 121.

  When the test application unit 2 is located at the test application position, the discharge of the organic EL liquid is started from the plurality of nozzles 17 of the application head 14 toward the (+ X) side liquid receiver 16, and the head moving mechanism 15 is driven. The movement of the coating head 14 is started. Then, while the same type of organic EL liquid is continuously discharged from the plurality of nozzles 17 toward the substrate 9, the coating head 14 extends from the (+ X) side liquid receiving part 16 to a two-dot chain line in FIG. As shown, the resin tape held by the tape holding part 214 in each test application stage part 21 of the test application unit 2 by moving in the main scanning direction onto the liquid receiving part 16 on the (−X) side. The organic EL liquid is applied in a stripe pattern on the test application surface 2131 (see FIGS. 8 to 10) of 213 (step S12).

  At this time, since the test application surface 2131 of the resin tape 213 is set to the same height as the upper surface 91 of the substrate 9 on the substrate holding part 11 as described above, the test of the plurality of nozzles 17 and the resin tape 213 in the Z direction is performed. The distance between the application surface 2131 is equal to the distance between the plurality of nozzles 17 and the upper surface 91 of the substrate 9 when the organic EL liquid is applied to the substrate 9. Further, between the two test application stage portions 21, the organic EL liquid discharged from the nozzle 17 is received by the central liquid receiving portion 22, and the test application surface 2131 and the liquid receiving portion 16 of each test application stage portion 21 are received. In the meantime, the organic EL liquid is received by the outer liquid receiver 218 (see FIG. 9).

  Subsequently, the test application surface 2131 of each test application stage unit 21 is imaged by the CCD camera 13, and an image of the stripe pattern of the organic EL liquid applied to the test application surface 2131 is acquired to detect the pitch of the control unit 10. It is sent to the unit 101 (see FIG. 3) (step S13).

  In the pitch detection unit 101, the center line of each line of the organic EL liquid is obtained based on the image acquired by the (+ X) side CCD camera 13, and each distance in the sub-scanning direction between the adjacent center lines (that is, the distance) Each distance between two nozzles 17 adjacent to each other in the sub-scanning direction) is detected as a nozzle pitch (step S14). The detection of the nozzle pitch by the pitch detection unit 101 may be performed based on the images acquired by the (−X) side CCD camera 13, and the images acquired by the two CCD cameras 13 respectively. It may be performed based on both (for example, an average value of pitches of the nozzles 17 obtained from both images is set as a nozzle pitch).

  Then, the distance between each of the eighth nozzle 17 from the (−X) side that is the reference nozzle and the other 15 nozzles 17 is obtained, and a predetermined nozzle pitch (as described above, In the embodiment, it is a distance equal to three times the partition wall pitch, and hereinafter, it is confirmed whether or not it is necessary to adjust the position of each nozzle 17 based on “target nozzle pitch”) (step S15). When the relative position of each nozzle 17 with respect to the reference nozzle is a predetermined position, the control unit 10 determines that the adjustment of the nozzle position is unnecessary, and the nozzle pitch adjustment operation ends.

  Conversely, when it is determined that the nozzle position needs to be adjusted, 15 nozzles 17 other than the reference nozzle (hereinafter referred to as “moving nozzles”) based on the distance between the nozzles obtained as described above. ) In the sub-scanning direction (hereinafter simply referred to as “movement amount”) is obtained by the pitch detection unit 101. In the following description, it is assumed that all 15 moving nozzles are determined to require adjustment of the nozzle position.

  When the movement amount of each nozzle 17 is obtained, after the discharge of the organic EL liquid from the coating head 14 is stopped, the coating head 14 is moved to the (+ X) side by the head moving mechanism 15, and the two in FIG. As indicated by the dotted line, the position is located at the adjustment position facing the pitch adjustment mechanism 3. Subsequently, in each adjustment head 30 of the pitch adjustment mechanism 3, the horizontal portion 1412 of the nozzle attachment portion 141 is changed by the first fixing portion 311 and the second fixing portion 314 of the attachment portion fixing mechanism 31 shown in FIGS. The nozzle mounting portion 141 is fixed by being sandwiched from the (−Y) side and the (+ Y) side.

  Next, the lock operation mechanism of each adjustment head 30 releases the lock of each moving nozzle by the nozzle lock unit 173 so that each moving nozzle can move in the sub-scanning direction. Then, the adjustment mechanism control unit 102 (see FIG. 3) of the control unit 10 controls the stepping motor 343 of the contact portion moving mechanism 34 that is the drive unit of the pitch adjustment mechanism 3 in the adjustment head 30 corresponding to each moving nozzle. Then, the nozzle 17 is moved in the sub-scanning direction according to the movement amount obtained by the pitch detection unit 101 in a state where the nozzle 17 is urged by the nozzle urging mechanism 33 (step S151). When the movement of each moving nozzle in the sub-scanning direction is completed, the position of each moving nozzle is locked again by the lock unit operating mechanism. If there are 15 moving nozzles for which position adjustment is determined to be unnecessary, the moving nozzles are not unlocked and are not moved in the sub-scanning direction.

  Thereafter, when the first fixing portion 311 and the second fixing portion 314 of the attachment portion fixing mechanism 31 are separated from the horizontal portion 1412 of the nozzle attachment portion 141, the fixing of the nozzle attachment portion 141 of the coating head 14 is released. The application head 14 shown in FIG. 12 moves onto the (+ X) side liquid receiver 16, and the discharge of the organic EL liquid from the plurality of nozzles 17 is started.

  As described above, in the coating apparatus 1, all the nozzles 17 (that is, all moving nozzles) except one reference nozzle are individually moved in the sub-scanning direction according to the moving amount obtained by the pitch detection unit 101. Thus, the nozzle pitch is adjusted. In the present embodiment, the nozzle pitch is adjusted in the range of 120 μm to 700 μm. In the coating apparatus 1, all of the 16 nozzles 17 may be individually moved in the sub-scanning direction to adjust the nozzle pitch.

  When the movement of the moving nozzle in the sub-scanning direction is finished, in each test application stage unit 21 of the test application unit 2, the adsorption of the resin tape 213 by the tape adsorption unit 2141 shown in FIGS. The tape pressing unit 2142 is moved in the (−Y) direction by the moving mechanism 2144 and is positioned above the tape adsorbing unit 2141 as shown in FIG. Subsequently, when the motor 2171 shown in FIG. 9 is driven, the resin tape 213 is fed in the (+ Y) direction by a predetermined length in the tape holding part 214 shown in FIGS. 2131 is located on the tape adsorbing portion 2141.

  Next, the tape pressing portion 2142 is lowered by the pressing portion lifting mechanism 2143 to press the resin tape 213 toward the tape suction portion 2141, and the resin tape 213 is sucked by the tape suction portion 2141, so that the test application surface is Is replaced with a new test application surface 2131 and fixed on the holding plane 2145 (step S152). When the resin tape 213 is adsorbed, the tape pressing part 2142 is retracted from the test application surface 2131.

  When the test application surface 2131 is replaced, the process returns to step S12, and the application head 14 is moved in the (−X) direction while discharging the organic EL liquid from the plurality of nozzles 17, and the two test application units 2 of the test application unit 2 are moved. An organic EL liquid is applied to the test application surface 2131 (step S12). Subsequently, an image of the pattern of the organic EL liquid on the test application surface 2131 is acquired by the CCD camera 13, and the nozzle pitch is detected by the pitch detection unit 101 to confirm whether or not the nozzle position needs to be readjusted ( Steps S13 to S15). Then, the nozzle 17 is moved in the sub-scanning direction by the pitch adjustment mechanism 3, the test application surface 2131 is replaced (steps S151 and S152), and the test application surface 2131 until it is determined that adjustment of the nozzle position is unnecessary. The application of the organic EL liquid to the nozzle, the detection of the nozzle pitch, and the necessity confirmation of the nozzle position adjustment (steps S12 to S15) are repeated.

  When the adjustment of the nozzle pitch is completed, two images of the pattern of the organic EL liquid on the test coating surface 2131 acquired last by the two CCD cameras 13 (that is, an image when it is determined that the adjustment of the nozzle pitch is unnecessary). And hereinafter referred to as “final image”), the position in the sub-scanning direction in the pattern image of the organic EL liquid is obtained by the substrate position adjusting unit 103 (see FIG. 3) of the control unit 10. Subsequently, with reference to the final image captured by the (+ X) side CCD camera 13, the amount of shift in the sub-scanning direction of the pattern position in the final image captured by the (−X) side CCD camera 13 (hereinafter referred to as the “-X” side CCD camera 13). , Referred to as “positional deviation amount”) (step S16).

  Next, the (−X) side imaging unit moving mechanism 13 a is controlled by the substrate position adjusting unit 103, so that the (−X) side CCD camera 13 moves in the sub-scanning direction by a distance equal to the positional deviation amount. Thus, the relative positions of the two CCD cameras 13 are adjusted (step S17). As a result, a straight line connecting the centers of the imaging regions of the two CCD cameras 13 is parallel to the line of the organic EL liquid applied by the application head 14. Specifically, when the pattern of the organic EL liquid in the final image by the (−X) side CCD camera 13 is shifted to the (−Y) side as compared to the (+ X) side final image, The −X) CCD camera 13 is moved in the (−Y) direction, and when it is shifted to the (+ Y) side, it is moved in the (+ Y) direction. The position adjustment of the CCD camera 13 in the coating apparatus 1 may be performed by moving the (+ X) side CCD camera 13 while the (−X) side CCD camera 13 is fixed. The CCD camera 13 may be moved.

  When the position adjustment of the CCD camera 13 is completed, the substrate 9 is moved in the (+ Y) direction together with the substrate holding unit 11 and the test coating unit 2 by the substrate moving mechanism 12, and the substrate 9 is moved to 2 as shown by the solid line in FIG. It is located below the two CCD cameras 13 (step S18). At this time, on the upper surface 91 of the substrate 9, two positioning marks 93 (see FIG. 12) provided in the vicinity of the two corners on the (+ Y) side and in the non-application region outside the application region are respectively It is located in the imaging area of the two CCD cameras 13. On the substrate 9, straight lines connecting the centers of the two positioning marks 93 are parallel to the plurality of grooves in the application region.

  Subsequently, the two CCD cameras 13 are controlled by the substrate position adjusting unit 103, and two positioning marks 93 on the substrate 9 are imaged (step S19). Next, the distance in the sub-scanning direction between the centers of the positioning marks 93 is obtained based on the images of the two positioning marks 93, and the distance in the main scanning direction between the centers of the positioning marks 93 stored in advance is obtained. Based on this, the amount of deviation (ie, inclination) in the rotational direction of the substrate 9 is obtained. Then, the substrate rotating mechanism 12a is controlled by the substrate position adjusting unit 103 based on the shift amount of the substrate 9 in the rotation direction, and the substrate 9 rotates, whereby the two positioning marks 93 in the sub-scanning direction with respect to the CCD camera 13 are detected. The relative positions are made equal (step S20).

  As described above, in the coating apparatus 1, the relative positions in the sub-scanning direction with respect to the plurality of nozzles 17 of the two CCD cameras 13 (the lines of the organic EL liquid ejected from and applied onto the substrate 9) are made equal to each other. ing. Therefore, by making the relative positions of the two positioning marks 93 in the sub-scanning direction with respect to the CCD camera 13 equal to each other, the organic material discharged from the plurality of nozzles 17 of the two positioning marks 93 (applied on the substrate 9). The relative positions in the sub-scanning direction with respect to the EL liquid line are made equal to each other. That is, the grooves between the partition walls of the coating region on the substrate 9 are parallel to the movement trajectory of the plurality of nozzles 17 in the main scanning direction.

  As described above, in the coating apparatus 1, the image of the organic EL liquid pattern acquired by the two CCD cameras 13 and the image of the positioning mark 93 on the upper surface 91 of the substrate 9 acquired by the two CCD cameras 13. The substrate moving mechanism 12 and the substrate rotating mechanism 12a are controlled by the substrate position adjusting unit 103 (see FIG. 3) of the control unit 10 to adjust the relative positions of the substrate 9 with respect to the plurality of nozzles 17. .

  When the position adjustment of the substrate 9 is completed, the head moving mechanism 15 causes the coating head 14 to move in the main scanning direction while continuously discharging the organic EL liquid from the plurality of nozzles 17. Each time the movement to is performed once, the substrate moving mechanism 12 steps the substrate 9 in the sub-scanning direction ((+ Y) direction). The relative movement of the plurality of nozzles 17 in the main scanning direction and the sub-scanning direction with respect to the substrate 9 is repeated until the substrate 9 is positioned at the application end position indicated by the two-dot chain line in FIG. An organic EL solution is applied to the substrate 9 in a stripe shape.

  As described above, in the coating apparatus 1, the organic EL liquid is applied to the test application surface 2131 of the test application unit 2, and the pattern image of the organic EL liquid on the test application surface 2131 acquired by the CCD camera 13 is displayed. The nozzle pitch is detected based on the detection result, and the pitch adjustment mechanism 3 adjusts the pitch of the plurality of nozzles 17 in the sub-scanning direction based on the detection result. Thereby, the pitch (namely, nozzle pitch) in the subscanning direction of the plurality of nozzles 17 of the coating apparatus 1 can be adjusted with high accuracy without applying the organic EL liquid to the substrate 9.

  As a result, the relationship between the number of nozzles and the size of the non-application area (that is, the size of the area required for the test application and the size on the substrate is different from the case where the nozzle pitch is adjusted by performing test application on the non-application area on the substrate. The nozzle pitch can be adjusted with high accuracy without considering the relationship with the size of the test coatable area. Therefore, the structure of the coating apparatus 1 is particularly suitable for a coating apparatus having a large number (for example, eight or more) of nozzles. In addition, in the coating apparatus 1, since the test coating is not performed on the substrate, particles that may be generated from the organic EL material after the test-coated organic EL liquid is dried can be prevented. Can improve the quality.

  In the coating apparatus 1, the distance in the Z direction between the nozzle 17 and the test application surface 2131 at the time of test application is the Z direction between the nozzle 17 and the upper surface 91 of the substrate 9 at the time of applying the organic EL liquid to the substrate 9. Therefore, the discharge distance of the organic EL liquid at the time of applying the organic EL liquid to the substrate 9 becomes equal to the discharge distance at the time of test application. If there is a large difference in the discharge distance between the application to the substrate and the test application, the pitch of the lines of the plurality of applied organic EL liquids may change, but the application according to the present embodiment In the apparatus 1, since the influence by the difference in the discharge distance at the time of application | coating to the board | substrate 9 and test application | coating can be prevented, a nozzle pitch can be adjusted more highly accurately. In the coating apparatus 1, the distance in the Z direction between the nozzle 17 and the test coating surface 2131 at the time of test coating is within a range in which the influence of the difference in discharge distance with respect to the line pitch of the organic EL liquid is prevented. Even if the distance in the Z direction between the nozzle 17 and the upper surface 91 of the substrate 9 when the organic EL liquid is applied to the substrate 9 is slightly different, these distances can be regarded as substantially equal.

  In the test application stage unit 21, the test application surface 2131 is the main surface of the resin tape 213, and the resin tape 213 is fed out to the tape holding unit 214 by the tape supply unit 215. The test application surface 2131 (after application has been performed) can be easily replaced with a new unused test application surface. In the tape holding unit 214, the test application surface 2131 of the resin tape 213 is fixed and flattened by the tape adsorbing unit 2141 and the tape pressing unit 2142, and the distance between the test application surface 2131 and the plurality of nozzles 17 is kept constant. Thus, the nozzle pitch can be detected with higher accuracy.

  In the test application unit 2, the test application surface 2131 of the test application stage unit 21 overlaps only a part of the path of relative movement of the plurality of nozzles 17 in the main scanning direction during the test application by the application head 14. In other words, the test application surface 2131 is arranged only in a part in the main scanning direction on the movement path of the plurality of nozzles 17 by the head moving mechanism 15. For this reason, the area of the test application surface on which the organic EL liquid is applied can be reduced, and the amount of the test application surface 2131 used can be reduced. As a result, the cost required for adjusting the nozzle pitch can be reduced.

  In the coating apparatus 1, the nozzle pitch is automatically adjusted by controlling the contact portion moving mechanism 34 of the pitch adjustment mechanism 3 based on the nozzle pitch detected by the pitch detection portion 101 of the control portion 10 by the adjustment mechanism control portion 102. Can be adjusted. As a result, the nozzle pitch can be adjusted with higher accuracy, and the work time and labor required for adjusting the nozzle pitch can be reduced. Further, the pitch adjusting mechanism 3 moves all other than the one of the plurality of nozzles 17 (or all of the plurality of nozzles 17) individually in the sub-scanning direction. Each distance in the scanning direction can be adjusted individually and with high accuracy.

  In the coating apparatus 1, an image of an organic EL liquid pattern applied to two test application surfaces 2131 that are separated in the main scanning direction, and two positioning marks 93 that are separated from each other in the main scanning direction on the substrate 9. The relative position of the substrate 9 with respect to the nozzles 17 is adjusted based on the image of the substrate 9 so that the lines of the organic EL liquid applied by the plurality of nozzles 17 and the plurality of grooves in the application region of the substrate 9 are accurately parallel. The position of the substrate 9 can be adjusted with high accuracy. Moreover, since the position adjustment of the board | substrate 9 can be performed using the structure for adjustment of a nozzle pitch, the structure of the coating device 1 can also be simplified.

  Furthermore, two tape holding parts 214 for fixing the two test application surfaces 2131 respectively by two test application stage parts 21 having the same structure, and two tape supply parts for exchanging the two test application surfaces 2131 respectively. By configuring 215 and the tape collection unit 216, the structure of the coating apparatus 1 can be further simplified.

  Next, a coating apparatus according to the second embodiment of the present invention will be described. The coating apparatus according to the second embodiment includes two test coating stage parts 21a having a different structure from the test coating stage part 21 shown in FIGS. Other configurations are the same as those of the coating apparatus 1 shown in FIGS. 1 to 7, and the same reference numerals are given in the following description.

  FIG. 13 is a left side view showing the (+ X) side test application stage portion 21a. In FIG. 13, a part of the substrate moving mechanism 12 is also drawn. In the coating apparatus according to the second embodiment, the (−X) side test coating stage section 21a also has the same structure as the (+ X) side test coating stage section 21a shown in FIG.

  As shown in FIG. 13, the test application stage unit 21 a includes a slider 211 that is movably attached to the rail 121 of the substrate moving mechanism 12, a housing 212 that is fixed on the slider 211, and a test in which a test application of organic EL liquid is performed. A test piece 213a which is an application member, a test piece holding part 214a for holding the test piece 213a in the upper part of the housing 212, and an unused (that is, organic EL liquid test application is performed on the (-Z) side of the test piece 213a. (Not) a plurality of test pieces 213b (hereinafter referred to as "standby test piece 213b"), which is a magazine for stacking and holding a test piece storage portion 215a and a test piece 213a held by the test piece holding portion 214a (+ Y ) Extrusion mechanism 216a that is a cylinder that pushes in the direction, and test piece holder 21 by means of extrusion mechanism 216a. Comprising a specimen collection unit 217a for receiving the test piece 213a extruded from a.

  The test piece 213a is formed of a material that has the same wettability with respect to the organic EL liquid as that of the substrate 9, and is formed of the same material as that of the substrate 9 in this embodiment. Further, on the (+ Z) side main surface of the test piece 213a, a thin film equivalent to a thin film (for example, a layer of a hole transport material described later) formed on the substrate 9 before the application of the organic EL liquid is formed. As a result, the wettability of the main surface on the (+ Z) side of the test piece 213a and the upper surface 91 of the substrate 9 with respect to the organic EL liquid is made equal (that is, substantially equal). Note that by appropriately selecting the material of the test piece 213a, the (+ Z) side main surface of the test piece 213a and the upper surface 91 of the substrate 9 can be formed without forming a thin film on the (+ Z) side main surface of the test piece 213a. The wettability with respect to the organic EL liquid may be equivalent.

  In the test application stage portion 21a, the main surface on the (+ Z) side of the test piece 213a is a test application surface 2131 on which the organic EL liquid from the plurality of nozzles 17 (see FIG. 1) is applied. A test piece holding part 214 a that holds 213 a is a test application part having a test application surface 2131.

  FIG. 14 is a plan view showing the vicinity of the test piece holder 214a. As shown in FIG. 13 and FIG. 14, the test piece holding part 214a is in contact with the test application surface 2131 of the test piece 213a and is positioned on the test application surface 2131 in the Z direction (that is, the direction perpendicular to the test application surface 2131). A test application surface abutting portion 2147 having a substantially rectangular frame shape. The test piece 213a of the test piece holding part 214a is tested through a plurality of standby test pieces 213b by the test piece housing part 215a on the opposite side (that is, (−Z) side) of the test application surface 2131 of the test piece 213a. It is pressed toward the application surface contact portion 2147 and is urged by the test application surface contact portion 2147.

  In the test application stage unit 21a, when the extrusion mechanism 216a is driven, the test piece 213a in contact with the test application surface contact part 2147 is pushed out in the (+ Y) direction and taken out from the test piece holding part 214a. . The uppermost standby test piece 213b among the plurality of standby test pieces 213b accommodated in the test piece accommodating portion 215a is urged by the test application surface contact portion 2147 of the test piece holding portion 214a. A new test piece 213a held by the test piece holding part 214a is formed, and the (+ Z) side main surface of the test piece 213a becomes a new test application surface 2131. That is, in the test application stage unit 21a, the extrusion mechanism 216a is a test piece extraction unit that takes out the test piece 213a from the test piece holding unit 214a, and the test piece storage unit 215a and the extrusion mechanism 216a are the test piece holding unit 214a. This test application surface exchange mechanism replaces the test application surface 2131 with a new test application surface.

  The flow of preparatory work (that is, adjustment of the nozzle pitch and position adjustment of the substrate 9) in the coating apparatus according to the second embodiment is that the replacement of the test coating surface 2131 in step S152 is due to the feeding out of the resin tape 213. The second embodiment is the same as the first embodiment except that the test piece 213a is changed to a replacement one.

  In the coating apparatus according to the second embodiment, as in the first embodiment, the organic EL liquid is applied to the test application surface 2131 of the test application unit 2 (see FIG. 1). The nozzle pitch is detected based on the pattern image of the organic EL liquid, and the pitch of the plurality of nozzles 17 (see FIG. 1) in the sub-scanning direction is adjusted based on the detection result. Thereby, the pitch (namely, nozzle pitch) in the sub-scanning direction of the plurality of nozzles 17 of the coating apparatus can be adjusted with high accuracy without applying the organic EL liquid to the substrate 9 (see FIG. 1).

  In the coating apparatus according to the second embodiment, in particular, the test application surface 2131 is the main surface of the test piece 213a that has the wettability with respect to the organic EL liquid equal to that of the upper surface 91 of the substrate 9, thereby providing a test application surface. By preventing measurement errors due to the difference in wettability between 2131 and the upper surface 91 of the substrate 9, the nozzle pitch can be detected with high accuracy.

  In the test application stage portion 21a, a test piece storage portion 215a for storing a plurality of standby test pieces 213b is provided on the (−Z) side of the test piece 213a, and the test piece 213a is pushed out from the test piece holding portion 214a by the extrusion mechanism 216a. As a result, the new test piece 213a is urged by the test application surface abutting portion 2147 of the test piece holding portion 214a, and the new test application surface 2131 is arranged. Accordingly, the test application surface 2131 can be easily replaced, the distance between the test application surface 2131 and the plurality of nozzles 17 can be kept constant, and the nozzle pitch can be detected with higher accuracy. Can do.

  As mentioned above, although embodiment of this invention has been described, this invention is not limited to the said embodiment, A various change is possible.

  For example, in the test application stage unit 21 of the coating apparatus 1 according to the first embodiment, the test holding surface 2131 is smooth by adsorbing the resin tape 213 only by the suction force of the tape adsorption unit 2141 in the tape holding unit 214. In this case, the tape pressing unit 2142, the pressing unit elevating mechanism 2143, and the pressing unit moving mechanism 2144 are omitted, and only the tape adsorbing unit 2141 is a tape fixing unit that fixes the test application surface 2131 of the resin tape 213. May be. Further, the test application surface 2131 of the resin tape 213 may be fixed by pressing by the tape pressing unit 2142 without performing suction by the tape suction unit 2141.

  In the preparatory work in the coating apparatus 1, the movement of the nozzle 17 by the pitch adjusting mechanism 3 in step S151 and the replacement of the test coating surface 2131 in step S152 may be performed in parallel, and step S152 is performed before step S151. (The same applies to the second embodiment). Further, the positioning mark imaged in step S18 does not necessarily need to be a positioning-only mark provided in the non-application area. For example, a partition mark in the application area or a wiring formed in the non-application area is used. The portion may be a positioning mark.

  In the pitch adjustment mechanism 3, the plurality of adjustment heads 30 are not necessarily provided, and the position adjustment of the plurality of nozzles 17 in the sub-scanning direction may be sequentially performed by one adjustment head 30. In this case, the plurality of nozzles 17 are sequentially moved to positions corresponding to the adjustment head 30 by the movement of the coating head 14 by the head moving mechanism 15. When one nozzle 17 among the plurality of nozzles 17 is used as a reference nozzle, position adjustment by the adjustment head 30 with respect to the reference nozzle is not performed. Further, the reference nozzle may be fixed to the nozzle mounting portion 141 so as not to move in the sub-scanning direction.

  In the coating apparatus according to the above-described embodiment, it is not always necessary that all the nozzles 17 (or all the nozzles 17 other than one nozzle 17) be individually moved in the sub-scanning direction, and a plurality of nozzles By rotating the nozzle mounting portion, to which 17 is fixed so as not to be moved, by a different pitch adjustment mechanism different from the pitch adjustment mechanism 3 by a slight angle around a rotation axis perpendicular to the upper surface 91 of the substrate 9. The nozzle pitch in the sub-scanning direction may be changed. Further, the adjustment of the nozzle pitch in the coating apparatus may be performed by the operator manually operating the pitch adjustment mechanism based on the detection result of the nozzle pitch.

  In the coating apparatus, when the position adjustment of the substrate 9 is performed by another mechanism different from the configuration used for adjusting the nozzle pitch, the test coating unit 2 may be provided with only one test coating stage unit. Good. Even in this case, the nozzle pitch can be adjusted with high accuracy without applying the organic EL liquid to the substrate 9 as in the above embodiment.

  FIG. 15 is a rear view showing another example of the test application unit 2a using the resin tape 213. FIG. The test application unit 2a shown in FIG. 15 differs from the test application stage part 21 shown in FIGS. 8 and 9 by 90 ° and has a test application stage part larger than the width in the X direction (ie, main scanning direction) of the substrate. Only one 21b is provided. In the tape holding part 214 at the upper part of the test application stage part 21b, the resin tape 213 extends in the X direction by a length substantially equal to the width in the X direction of the substrate.

  In the test application unit 2a, the organic EL liquid is applied over the entire length in the X direction of the resin tape 213 in the tape holding unit 214, and the two test application surfaces 2131 in the vicinity of both ends in the X direction of the resin tape 213 are tapes. When the image is captured by the CCD camera while being fixed by the suction unit 2141, the nozzle pitch is detected and information necessary for adjusting the position of the substrate is obtained as in the above embodiment.

  In the test application stage portion 21b, the resin tape 213 is formed in an annular shape, and is sent counterclockwise in FIG. 15 when one test application is completed. As a result, the used test application surface 2131 is replaced with a new test application surface. Further, the used test application surface 2131 can be used as a new test application surface by spraying the cleaning liquid by the spray 2191 and removing the organic EL material adhering thereto by the air knife 2192. In the test application stage unit 21b, a tape supply unit and a tape recovery unit are provided on the (+ X) side and the (−X) side, respectively, and the used test application surface is wound and recovered. Also good.

  In the coating apparatus according to the above embodiment, instead of the movement of the substrate 9 and the substrate holding unit 11 by the substrate moving mechanism 12, the coating head 14 moves in the sub-scanning direction, whereby the coating head for the substrate 9 in the sub-scanning direction. A relative movement with respect to 14 may be performed. Further, instead of the movement of the coating head 14 by the head moving mechanism 15, the substrate 9 and the substrate holder 11 move in the main scanning direction, so that the coating head 14 moves relative to the substrate 9 in the main scanning direction. Also good.

  In the coating apparatus according to the above embodiment, the number of nozzles 17 provided in the coating head 14 is not limited to 16, but may be three or more. In the coating apparatus, for example, three types each including three types of organic EL materials having different colors from red (R), green (G), and blue (B) from three nozzles 17 provided in the coating head 14. These organic EL liquids may be simultaneously ejected and applied to the substrate 9. In this case, the distance between the adjacent two nozzles in the sub-scanning direction is adjusted to be equal to the partition wall pitch.

  In the coating apparatus, a fluid material (hereinafter referred to as “hole transport liquid”) containing a hole transport material that is a pixel forming material may be applied to the substrate 9. Here, the “hole transport material” is a material that forms a hole transport layer of an organic EL display device, and the “hole transport layer” is a positive electrode that is formed into an organic EL layer formed of an organic EL material. It means not only a narrowly defined hole transport layer that transports holes, but also includes a hole injection layer that injects holes.

  The coating device is not necessarily used only for coating an organic EL liquid or a hole transport liquid for an organic EL display device. For example, for a substrate for a flat display device such as a liquid crystal display device or a plasma display device. In addition, it may be used when a fluid material including other types of pixel forming materials such as a coloring material and a fluorescent material is applied.

  In such application of an organic EL liquid or a hole transport liquid to a substrate for an organic EL display device, or application of a fluid material containing a pixel forming material to another substrate for a flat display device, the application position of the fluid material High positional accuracy is required. As described above, since the coating apparatus can adjust the pitch of the plurality of nozzles 17 with high accuracy, the application of the organic EL liquid or the hole transport liquid to the substrate for the organic EL display apparatus, and other flat display apparatuses It is particularly suitable for application of a flowable material containing a pixel forming material to a substrate for use.

  In addition to the substrate for flat display devices, the above coating device is used for coating various types of flowable materials on various substrates such as glass substrates and ceramic substrates for magnetic disks and optical disks, and semiconductor substrates. May be.

It is a top view of the coating device concerning a 1st embodiment. It is a front view of a coating device. It is a block diagram which shows the function of a control part. It is a front view which shows a part of application | coating head. It is a top view which shows a part of application | coating head. It is a top view which shows a part of adjustment head and application | coating head. It is a left view which shows a part of adjustment head and application | coating head. It is a left view of a test application stage part. It is a rear view of a test application stage part. It is a top view which shows the tape holding | maintenance part vicinity. It is a figure which shows the flow of the preparation work in a coating device. It is a figure which shows the flow of the preparation work in a coating device. It is a top view of a coating device. It is a left view of the test application | coating stage part which concerns on 2nd Embodiment. It is a top view which shows the test piece holding | maintenance part vicinity. It is a rear view of another test application | coating stage part.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Application | coating apparatus 3 Pitch adjustment mechanism 9 Substrate 11 Substrate holding part 12 Substrate movement mechanism 12a Substrate rotation mechanism 13 CCD camera 15 Head movement mechanism 17 Nozzle 21, 21a, 21b Test application stage part 34 Contact part movement mechanism 91 Upper surface 93 For positioning Mark 101 Pitch detection unit 102 Adjustment mechanism control unit 103 Substrate position adjustment unit 213 Resin tape 213a Test piece 213b Standby test piece 214 Tape holding unit 214a Test piece holding unit 215 Tape supply unit 215a Test piece container 216 Tape recovery unit 216a Extrusion mechanism 343 Stepping motor 2131 Test application surface 2141 Tape suction part 2142 Tape pressing part 2145 Holding plane 2147 Test application surface contact part S11-S20, S151, S152 Steps

Claims (10)

An application device for applying a flowable material to a substrate,
A substrate holder for holding the substrate;
A plurality of nozzles for continuously discharging a flowable material toward the main surface of the substrate;
The plurality of nozzles move relative to the substrate in a main scanning direction parallel to the main surface of the substrate, and each time the movement in the main scanning direction is performed, the substrate becomes the plurality of nozzles. A nozzle scanning mechanism that moves relative to the sub-scanning direction parallel to the main surface and perpendicular to the main scanning direction;
A test application portion having a test application surface on which the flowable material from the plurality of nozzles is test-applied when not applied to the substrate;
The test application unit is moved forward and backward with respect to the path of relative movement of the plurality of nozzles in the main scanning direction, and the distance between the plurality of nozzles and the test application surface at the time of test application is the plurality of nozzles at the time of application. And a test application part advancing / retreating mechanism that is equal to the distance between the main surface of the substrate and
An imaging unit that acquires an image of a pattern of the flowable material applied to the test application surface by relative movement of the plurality of nozzles in the main scanning direction;
A pitch detection unit that detects pitches of the plurality of nozzles in the sub-scanning direction based on an image acquired by the imaging unit;
A pitch adjusting mechanism that adjusts the pitch of the plurality of nozzles in the sub-scanning direction;
A test application surface exchange mechanism for exchanging the test application surface of the test application part with a new test application surface;
A coating apparatus comprising: The coating apparatus according to claim 1,
The coating apparatus, wherein at the time of test coating, the test coating surface overlaps only a part of a path of relative movement of the plurality of nozzles in the main scanning direction. The coating apparatus according to claim 1 or 2,
A substrate rotation mechanism for rotating the substrate holding portion around a rotation axis perpendicular to the main surface of the substrate;
Another imaging unit for acquiring an image of a pattern of the flowable material applied to another test application surface provided apart from the test application surface in the main scanning direction;
An image of the flowable material pattern acquired by the imaging unit and the other imaging unit, and a positioning mark on the main surface of the substrate acquired by the imaging unit and the other imaging unit. A substrate position adjusting unit that adjusts a relative position of the substrate with respect to the plurality of nozzles by controlling the nozzle scanning mechanism and the substrate rotating mechanism based on an image;
A coating apparatus further comprising: The coating apparatus according to claim 3,
The coating apparatus further comprising another test application surface exchange mechanism for exchanging the other test application surface with a new test application surface separately from the test application surface. The coating apparatus according to any one of claims 1 to 4,
A drive unit for driving the pitch adjustment mechanism;
An adjustment mechanism control unit that controls the drive unit based on a detection result of the pitch detection unit;
A coating apparatus further comprising: A coating apparatus according to any one of claims 1 to 5,
Each distance between two nozzles adjacent to each other in the sub-scanning direction is detected by the pitch detection unit,
4. The coating apparatus according to claim 1, wherein the distances are adjusted by the pitch adjusting mechanism by individually moving all of the plurality of nozzles or all other than the nozzles individually in the sub-scanning direction. The coating apparatus according to any one of claims 1 to 6,
The test application part is a tape holding part that holds a part of the resin tape, and the test application surface is the main part of the part of the resin tape,
The coating apparatus, wherein the test coating surface exchange mechanism includes a tape supply unit that feeds the resin tape to the test coating unit. The coating apparatus according to claim 7,
The said application | coating part is provided with the tape fixing | fixed part which fixes the said test application surface of the said resin tape on the holding plane parallel to the said main surface of the said board | substrate. The coating apparatus according to any one of claims 1 to 6,
The test application surface is a main surface of a test piece whose wettability to a flowable material is equivalent to the main surface of the substrate;
The coating apparatus, wherein the test application unit is a test piece holding unit for holding the test piece. The coating apparatus according to claim 9, wherein
The test application portion includes a test application surface abutting portion that contacts the test application surface of the test piece and determines a position of the test application surface in a direction perpendicular to the test application surface;
The test application surface exchange mechanism is
A test piece for holding a plurality of standby test pieces on the opposite side of the test application surface of the test piece and urging the test pieces toward the test application surface contact portion via the plurality of standby test pieces. A containment section;
A test piece take-out part for taking out the test piece from the test application part;
A coating apparatus comprising:

Images