200914815 九、發明說明 【發明所屬之技術領域】 本發明係關於以背光照射液晶面板而以攝影裝置觀察 液晶面板的內部缺陷的型式之液晶面板檢査方法及裝置。 【先前技術】 以背光照射液晶面板而以攝影裝置觀察液晶面板的內 部的雜職等缺陷的型式的液晶面板檢查裝置係屬已知。這 樣的檢查裝置所存在的問題，是把附著於液晶面板表面的 雜物誤認爲是液晶面板的內部缺陷，而把良品之液晶面板 判定爲不良品。關於液晶面板的零件，作爲揭示出這樣的 防止誤認的努力，已知有以下之專利文獻1與專利文獻2 〇 〔專利文獻1〕日本專利特開平1 0 - 246705號公報 〔專利文獻2〕日本專利特開平1 0 — 1 76995號公報 專利文獻1係關於液晶面板的彩色濾光片之檢查方法 ’可以區別彩色濾光片的缺陷與附著於表面的雜物。在此 檢查方法’於彩色濾光片之一方側配置照明裝置，以此照 明裝置照売彩色爐光片之一方側，由彩色爐光片之另一側 以c C D攝影機攝影透過光的影像。根據此攝影影像，取 得彩色濾光片的突起缺陷與黑缺陷的位置資訊（亦即，取 得明亮的影像中的陰影位置）。如果發現這樣的缺陷時， 可以對該缺陷存在的位置吹出空氣，吹噴壓縮空氣（air b 1 〇 w )。藉此，可以把不是很強固地附著於彩色濾光片的 -4- 200914815 異物吹掉。空氣吹噴之後，再度攝影影像。在空氣吹噴前 後的影像之間進行差分處理，以適當的閾値進行2倍化處 理，可以抽出被吹跑而不見的異物。藉此，可以解決可簡 單除去的異物造成不良品的誤判的問題。 專利文獻2係關於液晶面板的透明玻璃基板之檢查方 法，可以區別玻璃基板的缺陷與附著於表面的雜物。此檢 查方法使用4種檢查部，玻璃基板依序通過4種檢查部。 在個別的檢查部，於玻璃基板之一方側配置照明裝置，於 另一方側配置攝影裝置。第1檢查部與第4檢查部係使用 直接透過法攝影透過影像，第2檢查部與第3檢查部係使 用間接透過法攝影透過影像。於第3檢查部與第4檢查部 之間配置有離子式的除塵器，玻璃基板通過此除麈器時， 附著於玻璃基板表面背面的塵埃被除去。關係到本申請案 的部分，在於比較第1檢查部的攝影影像與第4檢查部的 攝影影像。於第1檢查部的影像，除了玻璃基板的「表傷 」與「背傷」與「氣泡」以外，附著於表面的「塵埃」均 以暗資訊呈現。在第4檢查部的影像，因爲塵埃已被除去 ，所以僅剩下玻璃基板的「表傷」、「背傷」與「氣泡」 出現。亦即，藉由比較第1檢查部的影像與第4檢查部的 影像，可以正確地認識玻璃基板的「表傷」、「背傷」與 「氣泡」的位置或狀態。在此專利文獻2，爲了要除去表 面的雜物，不只吹噴空氣，還使用除塵器。以空氣吹掉麈 埃的話，還有塵埃再度附著於液晶玻璃之虞。 前述2件習知技術，係關於針對構成液晶面板的零件 -5 - 200914815 (彩色濾光片或玻璃基板）之檢查方法。對此，下個專利 文獻3則是已知之被揭示的針對在夾著液晶的狀態下之液 晶面板之可以區別其內部缺陷與表面的雜物之檢查方法。 〔專利文獻3〕日本專利特開2007 — 86563號公報 此專利文獻3，係針對沒有偏光板的狀態之液晶面板 ，檢查以設在檢查裝置的1對偏光板夾住液晶面板而檢查 液晶面板者。此檢查裝置，比較以背光照明時之透過影像 與以傾斜照明來照明時之透過影像，而可以區別液晶面板 的內部雜物與外部雜物。 【發明內容】 〔發明所欲解決之課題〕 前述專利文獻1與專利文獻2，針對彩色濾光片或玻 璃基板，可以區別其自身的缺陷與附著於其表面的雜物。 然而，將這樣的技術適用於在一對透明基板之間夾著液晶 之液晶面板且在沒有偏光板的狀態之液晶面板的檢查時， 會有以下的問題。專利文獻1與專利文獻2，均將彩色濾 光片或玻璃基板的表面所附著的雜物，作爲明亮的畫面中 的暗資訊來檢測出。但是，在明亮影像中的暗資訊，與在 暗畫面（黑畫面）中的亮點資訊比較起來，是很難確認的 〇 此外，在專利文獻1，如果於影像中發現缺陷，則把 空氣吹出口移到該缺陷的位置，對準缺陷的位置集中地吹 噴壓縮空氣。如此一來，吹掉了附著於表面的雜物。亦即 -6 - 200914815 ，在專利文獻1，需要把空氣吹出口移動到缺陷位置的技 術手段。另一方面’專利文獻2，使用離子式除塵器，來 取除附著於表面的雜物。根據專利文獻2，採氣流式的話 有使塵埃再附著之虞。要實施此專利文獻2之技術，則有 必要準備離子式之除麈器。 前述專利文獻3，爲了區別液晶面板的內部雜物與外 部雜物，除了背光之外還需要傾斜照明。亦即，業界希望 能夠有更爲簡便的構造。 本發明的目的，在於提供使用攝影裝置檢查液晶面板 的缺陷的場合，可以使用簡單的手段，且可以作爲黑畫面 中的亮點資訊而確認雜物的影像，使得可以區別附著於液 晶面板的表面的雜物影像，與液晶面板的缺陷影像之液晶 面板檢查方法及裝置。 〔供解決課題之手段〕 本發明之液晶面板檢查方法，具備以下（a )至（e ) 爲止的階段：（a )於一對透明基板之間夾著液晶層的液 晶面板且爲沒有偏光板的狀態之液晶面板配置於第1檢查 部，由液晶面板之一方側透過第1照明側偏光板照射照明 光，由液晶面板之另一方側透過第1攝影側偏光板攝影液 晶面板之第1影像，取得黑畫面之亮點位置之第1影像取 得階段；（b )由前述第1檢查部往第2檢查部搬送液晶 面板之搬送階段；（c )於前述第2檢查部配置液晶面板 ，對液晶面板的表面吹噴氣體之氣體吹噴階段；（d )由 -7- 200914815 被配置於前述第2檢查部的液晶面板之一方側透 明側偏光板照射照明光，由液晶面板之另一方側 攝影側偏光板攝影液晶面板之第2影像，取得黑 點位置之第2影像取得階段；（e )比較前述第 亮點位置與前述第2影像之亮點位置，在存在有 的亮點位置共通的亮點時判定在液晶面板存在有 定階段。 於第1檢查部與第2檢查部間的搬送途中， 隨著搬送的振動等影響導致在液晶面板的表面附 掉下來的可能性。進而，於第2檢查部，藉由對 的表面吹噴氣體，有使附著於液晶面板的表面之 來的可能性。亦即，藉由比較第1影像與第2影 區別黑畫面中所出現的亮點，是由於雜物所導致 還是起因於液晶面板的缺陷之亮點。亦即，針對 的亮點的位置不共通的亮點，判定爲係起因於雜 ’共通時判定爲液晶面板存在著缺陷。藉由使用 查方法，可以防止把良品誤認爲不良品。進而， 噴階段使液晶面板傾斜的話，雜物掉下來的機率 外’如果已有誤認率多少會有所增加的話，亦可 吹噴階段。 於搬送階段，可以使液晶面板在搬送路徑之 對水平面傾斜。如此一來，可以伴隨著搬送的振 使附著於液晶面板表面的雜物掉下來的可能性。 此外，本發明之液晶面板檢查裝置，係檢查 過第2照 透過第2 畫面之亮 1影像之 兩個影像 缺陷之判 有由於伴 著的雜物 液晶面板 雜物掉下 像，可以 的亮點， 兩個影像 物的亮點 這樣的檢 於氣體吹 提高。此 省略氣體 至少某處 動而提高 在一對透 -8 - 200914815 明基板間夾著液晶層之液晶面板且在沒有偏光板的狀態之 液晶面板之檢查裝置’具備以下（a)至（e) : (a)第1 檢查部，其係具備：載置液晶面板的第1檢查台，被配置 於液晶面板之一方側的第1照明裝置’被配置於液晶面板 與前述第1照明裝置之間的第1照明側偏光板，被配置於 液晶面板之另一方側之第1攝影裝置，被配置於液晶面板 與前述第1攝影裝置之間的第1攝影側偏光板，及由前述 第1攝影裝置所攝影的第1影像之中認識黑畫面中的亮點 位置之第1位置認識手段；（b )第2檢查部，其係具備 :載置液晶面板的第2檢查台，被配置於液晶面板之一方 側的第2照明裝置，被配置於液晶面板與前述第2照明裝 置之間的第2照明側偏光板，被配置於液晶面板之另一方 側之第2攝影裝置，被配置於液晶面板與前述第2攝影裝 置之間的第2攝影側偏光板，及由前述第2攝影裝置所攝 影的第2影像之中認識黑畫面中的亮點位置之第2位置認 識手段；（c )由前述第1檢查部往第2檢查部搬送液晶 面板之搬送裝置；（d )對被配置於前述第2檢查部的液 晶面板的表面吹噴氣體之氣體吹噴裝置；（e)比較前述 第1影像之亮點位置與前述第2影像之亮點位置，在存在 有兩個影像的亮點位置共通的亮點時判定在液晶面板存在 有缺陷之判定手段。 於此液晶面板檢查裝置，也與檢查方法之發明同樣， 可以爲以下之實施。（A )於氣體吹噴階段使液晶面板傾 斜的話’雜物掉下來的機率提高。（B )如果已有誤認率 -9- 200914815 多少會有所增加的話，亦可省略氣體吹噴階段。（C )可 以使液晶面板在搬送路徑之至少某處對水平面傾斜。 〔發明之效果〕 本發明發揮以下的功效。（1 )僅僅使用在2個影像 取得階段之間夾著搬送階段而取得兩個影像並對其進行比 較之簡單的手法，就可以區別附著於液晶面板的表面之雜 物的影像，與液晶面板的內部缺陷。（2 )因爲觀測黑畫 面之中的亮點，所以與觀測明亮畫面中的暗資訊（暗點） 相比，容易確認缺陷資訊或雜物資訊。（3 )於第2檢查 部對液晶面板的表面吹噴氣體，提高雜物掉落的可能性。 (4 )使液晶面板於搬送路徑之至少某處對水平面傾斜的 話，可以提高在搬送途中雜物掉落的可能性。 【實施方式】 以下，參照圖面詳細說明本發明之實施例。圖1係顯 示本發明之液晶面板檢查裝置之一實施例的整體觀的槪略 之立體例。此檢查裝置，係供檢查在一對透明的玻璃基板 間夾著液晶層的液晶面板的缺陷者。檢查對象的液晶面板 不具備偏光板。此檢查裝置具備第1檢查部10與第2檢 查部1 2以及在其間之搬送系。接著說明此檢查裝置之液 晶面板14的動向。於第1檢查部10以第1攝影裝置3 2 被攝影第1影像之液晶面板1 4，藉由搬送動作1 6搬送至 第1旋轉工作台1 8。在第1旋轉工作台1 8液晶面板1 4在 -10- 200914815 水平面內被旋轉90度，再藉由搬送動作20遞至機械臂（ robot)搬送部（未圖示）。機械臂搬送部係在搬送系與收 容匣23之間進行遞送液晶面板14者。液晶面板1 4藉由 機械臂搬送部的搬送動作22被搬送至第2旋轉工作台24 。被遞送到第2旋轉工作台2 4的液晶面板1 4，藉由根據 輥輸送帶（未圖示）之搬送動作26以及垂直於此搬送動 作2 6的方向上的搬送動作2 8而到達傾斜裝置（其傾斜動 作以符號2 9顯示）。液晶面板1 4藉由傾斜裝置而變成對 水平面傾斜。成爲傾斜姿勢的液晶面板1 4藉由搬送動作 30被搬送至第2檢查部12。在第2檢查部12藉由第2攝 影裝置3 4攝影液晶面板1 4之第2影像。 圖2係顯示第1檢查部的槪略之正面剖面圖。此第1 檢查部具備第1檢查台36，可以於此第1檢查台36載置 液晶面板1 4。於液晶面板1 4的下方配置第1照明裝置3 8 。於液晶面板14與第1照明裝置3 8之間配置有第1擴散 板40與第1照明側偏光板42。第1照明側偏光板42位於 第1擴散板4 0之上。於液晶面板14的上方配置第1攝影 裝置32。於液晶面板14與第1攝影裝置32之間配置有第 1攝影側偏光板44。在此實施例，藉由以2個偏光板 42,44夾住液晶面板14的構造，使在未對液晶面板施加電 壓的狀態（非點亮狀態）成爲黑畫面。這裡所謂的「黑畫 面的狀態」係指來自背面側的照明裝置的光，藉由以2個 偏光板夾住液晶面板的構造所遮斷，而在攝影裝置呈現黑 色畫面的狀態。以成爲這樣的黑畫面的狀態的方式，設定 -11 - 200914815 液晶面板之液晶層與2個偏光板之間的特定的光學關係。 使液晶面板成爲非點亮狀態，使用第1照明裝置3 8由下 方照明液晶面板14，以第〗攝影裝置32攝影液晶面板14 的話’於其黑色畫面上，液晶面板的缺陷或附著於液晶面 板的雜物會呈現爲亮點。如果液晶面板沒有缺陷，或者表 面沒有附著雜物的話，畫面上不會出現亮點。 第1攝影裝置3 2之輸出在影像處理部4 6以特定的閾 値被2倍化處理’而記錄亮點之有無以及亮點的位置。第 1影像處理部4 6的處理結果可以在第〗顯示部4 8顯示。 圖3係顯示第2檢查部的槪略之側面剖面圖。此第2 檢查部具備第2檢查台5 〇，可以於此第2檢查台5 0載置 液晶面板1 4。第2檢查台5 0之液晶面板搭載面5 2係以對 水平面夾角度Θ的方式傾斜。角度θ例如爲約70度。此 第2檢查部’除了使液晶面板成爲非點亮狀態之缺陷檢查 以外，還可以使液晶面板成爲點亮狀態而進行畫質檢查。 因爲第2檢查台5 0爲傾斜，所以作業員對液晶面板的目 視檢查變得容易。此第2檢查部，爲了畫質檢查之用，也 具備供對液晶面板施加電壓之探針裝置6 6。 於液晶面板1 4的右側下方配置第2照明裝置54。於 液晶面板1 4與第2照明裝置5 4之間配置有第2擴散板5 6 與第2照明側偏光板5 8。第2照明側偏光板5 8位於第2 擴散板5 6之上。於液晶面板1 4的左側上方配置第2攝影 裝置3 4。於液晶面板1 4與第2攝影裝置3 4之間配置有第 2攝影側偏光板60。與第1檢查部同樣，藉由以2個偏光 -12- 200914815 板5 8,6 0夾住液晶面板1 4的構造，在未對液晶面板施加 電壓的狀態（非點亮狀態）成爲黑畫面。亦即，以成爲這 樣的黑畫面的狀態的方式，設定液晶面板之液晶層與2個 偏光板之間的特定的光學關係。使液晶面板1 4成爲非點 亮狀態’使用第2照明裝置3 4由右側下方照明液晶面板 14 ’以第2攝影裝置3 4攝影液晶面板1 4的話，於其畫面 上，液晶面板的缺陷或附著於液晶面板的雜物會呈現爲亮 點。第2攝影裝置3 4 ’與第1檢查部之第1影像裝置同樣 ，被連接於第2影像處理部6 8，第2影像處理部6 8被連 接於第2顯示部70。 圖4係設置空氣吹噴裝置的狀態之第2檢查部的重要 部位之立體圖。在前述之圖3省略空氣吹噴裝置之圖示。 於圖4沿者液晶面板14的兩個長邊，於其斜向上方配置2 個空氣吹噴機構72。於斜向下方也配置同樣的兩個空氣吹 噴機構（未圖示）。這些空氣吹噴機構72相當於本發明 之氣體吹噴裝置。於圖4簡單顯示附屬於吹噴裝置的複數 吹噴單元82。這些吹噴單元82沿著液晶面板14的一個長 邊84以及一個短邊86排列。 圖6係空氣吹噴機構72之立體圖。此空氣吹噴機構 72具備細長的本體74。本體74的長度比液晶面板的長邊 還要長。於此本體74之一個面被形成多數開口 76。於本 體74的端面連接著空氣導入管78，於此空氣導入管導入 高壓空氣時，空氣由開口 76吹出。又，雖未圖示，但於 此空氣吹噴機構附屬著離子化裝置，可以使離子化的空氣 -13- 200914815 對液晶面板吹噴。 回到圖4，對於對水平面以角度Θ傾斜的姿勢之液晶 面板14，可以由合計4個空氣吹噴機構72將空氣80往液 晶面板1 4的表側的表面與背側的表面吹噴。藉此可以吹 掉附著於液晶面板1 4的表面的雜物。因爲液晶面板1 4爲 傾斜的，藉由空氣的流動而使雜物離開液晶面板的話，該 雜物很難再度附著於液晶面板。 圖5係由橫方向來看第2檢查部之空氣吹噴裝置的側 面圖。顯示來自4個空氣吹噴機構72的空氣80對傾斜姿 勢的液晶面板1 4吹噴的模樣。 其次，說明此檢查裝置的動作。於圖2之第1檢查部 ，藉由第1攝影裝置3 2取得液晶面板1 4之第1影像。該 第1影像，例如圖7(A)所示，在黑色畫面（圖中之陰 影87代表黑色畫面）之中，出現3個亮點8 8,90,92。於2 倍化處理之影像，亮點爲「1」，沒有亮點的地方爲「0」 。亮點，可能是起因於液晶面板的缺陷（例如被夾於2枚 玻璃基板之異物），或者起因於附著在液晶面板的表面之 雜物。於圖1，此液晶面板經由搬送動作1 6 2 0，2 2，2 6，2 8而 到達傾斜裝置之處。液晶面板1 4藉由傾斜裝置而使其對 水平面僅傾斜角度Θ。此角度Θ等於第2檢查部1 2的第2 檢查台的傾斜角度。如此般被調整成傾斜姿勢的液晶面板 Μ藉由搬送動作30被設置於第2檢查部12的第2檢查台 。伴隨著這一連串的搬送動作’有因爲振動等而使附著於 液晶面板的表面的雜物掉落的可能性。此外，在搬送途中 -14- 200914815 液晶面板成爲傾斜姿勢，所以雜物更爲容易掉落。接著， 於第2檢查部1 2，使用空氣吹噴裝置對傾斜姿勢的液晶面 板的表面吹噴空氣，藉以從液晶面板的表面吹掉沒有滑落 而殘留的雜物。 其後，在第2檢查部12取得第2影像後，例如，如 圖7(B)所示，於黑畫面中，出現2個亮點92,94。亮點 92在圖7 ( A )的第1影像中也出現。出現於圖7 ( a )的 第1影像中的亮點88,90從圖7(B)之第2影像出消失。 因此認爲亮點8 8,9 0是附著於液晶面板的表面的雜物所導 致的，這些雜物，藉由液晶面板的搬送，或者藉由對液晶 面板的空氣吹噴，而由液晶面板的表面消失。於圖7 ( B )的第2影像中，出現新的亮點94，但這是在圖7 ( A ) 之第1影像中所無，因此認爲是在液晶面板的表面新附著 的雜物。但是，在本發明之檢查裝置，有新的雜物附著的 可能性相當低。 取得圖7(B)之第2影像時，比較圖7(A)之第1 影像與圖7 ( B )之第2影像。具體而言，在第1影像與 第2影像之間’對各個畫素（亦即，液晶面板的各個相同 地點）進行2値資料的AND演算。藉此，如圖7 ( C )所 示，僅有在第1影像與第2影像兩方都成爲亮點的地點（ 亮點位置共通的地點）殘留爲亮點92。僅有第1影像與第 2影像之某一方的影像中出現的亮點8 8，9 0,9 4係起因於附 著在液晶面板的表面的雜物的亮點，藉由AND演算除去 -15- 200914815 藉由以上的處理，可以僅抽出液晶面板的缺陷 般所發現的「有缺陷的液晶面板」，實際上雖然也 於無法排除的表面雜物者（此爲正常產品）混於其 能性，即使如此，藉由使用本發明的檢查裝置，可 降低把原本爲良品誤判爲不良品的機率。 圖8係液晶面板沒有缺陷的場合之影像例。園 )係第1影像，出現亮點88,90。圖8 ( B )係第2 出現亮點94。圖8 ( C )係AND演算第1影像與第 後的影像。沒有發現亮點。在此場合，判定爲液晶 存在缺陷。 圖9係顯示本發明之實施例之液晶面板檢查方 續之流程圖。簡單地整理到此爲止所說明的動作。 明的話’係取得液晶面板的第1影像（步驟s 2 ) 面板在搬送路徑的至少某處是以對水平面成爲傾斜 搬送液晶面板（步驟S2 )，對傾斜姿勢的液晶面 空氣（步驟S3)，取得液晶面板的第2影像（步馬 ’比較第1影像與第2影像（步驟S5 )。第1影 得動作在圖2所示之第丨檢查部實施。包含傾斜姿 送動作’錯由圖1的搬送動作16,20,22,26,28,30而 其中’在由傾斜裝置往第2檢查部之搬送動作3 〇， 板係以傾斜的狀態被搬送。在傾斜姿勢的空氣吹噴 使用圖4所示的空氣吹噴機構72來實施。第2影 得動作在圖3所示之第2檢查部實施。第丨影像與 像之比較動作（影像間之AND演算）係附屬於檢 。如此 有起因 間的可 以大幅 d 8 ( A 影像， 2影像 面板不 法的手 若要說 ，液晶 的方式 板吹噴 I S4) 像的取 勢的搬 實施。 液晶面 動作， 像的取 第2影 查裝置 -16- 200914815 的電腦來實施。 本發明並不以前述實施例爲限，可以實施以下的變更 0 (1 )前述之實施例，第2檢查部傾斜，在第2檢查 部液晶面板係對水平面傾斜，但也可以使第2檢查部與第 1檢查部同樣成爲水平。在此場合，液晶面板由第1檢查 部往第2檢查部之搬送階段係保持於水平狀態。即使是這 樣的搬送型態，也有可能因爲伴隨著搬送的振動而使附著 於液晶面板的表面（特別是朝下的背側的表面）的雜物落 下，而可以發揮本發明的效果。 (2 )如果已有不良的誤認率多少會有所增加的話， 亦可省略空氣吹噴機構。在該場合，僅可以期待藉由搬送 液晶面扳而使附著於液晶面板表面的雜物落下之效果。 (3 )在前述實施例爲了得到「黑畫面的狀態」而使 液晶面板成爲非點亮狀態，但於第1檢查部或第2檢查部 ，或者於雙方之檢查部，使液晶面板成爲點亮狀態而取得 黑畫面亦可。只要能夠得到黑畫面，無論液晶面板與偏光 板所構成的光學系是何種構成均可’此外對於液晶面板施 加什麼樣的電氣訊號都沒有關係。 (4)在前述實施例，對液晶面板吹噴的氣體使用的 是空氣，但也可以使用乾燥氮氣等其他氣體。 【圖式簡單說明】 圖1係顯示本發明之液晶面板檢查裝置之一實施例的 -17- 200914815 整體觀的槪略之立體例。 圖2係顯示第丨檢查部的槪略之正面剖面圖。 圖3係顯示第2檢查部的槪略之側面剖面圖。 圖4係設置空氣吹噴（spraying)裝置的狀態之第2 檢查部的重要部位之立體圖。 圖5係由橫方向來看第2檢查部之空氣吹噴裝置的側 面圖。 圖6係空氣吹噴機構之立體圖。 圖7係影像例。 圖8爲其他之影像例。 圖9係顯示本發明之液晶面板檢查方法的手續之流程 圖。 f $要元件符號說明】 1 〇 :第1檢查部 12 :第2檢查部 1 4 :液晶面板 16,20,22,26,28,30:搬送動作 3 2 :第1攝影裝置 3 4 :第2攝影裝置 36:第1檢查台（stage) 3 8 :第1照明裝置 40 :第1擴散板 42 :第1照明側偏光板 -18 - 200914815 44 :第1攝影側偏光板 46 :第1影像處理部 4 8 :第1顯示部 50 :第2檢查台 5 2 :液晶面板搭載面 5 4 :第2照明裝置 5 6 :第2擴散板 5 8 :第2照明側偏光板 60 :第2攝影側偏光板 62 :第2影像處理部 64 :第2顯示部 6 8 :第2影像處理部 7 〇 :第2顯示部 72 :空氣吹噴機構 80 :空氣 8 8，9 0 :雜物導致之亮點 92 :缺陷導致之亮點 9 4 :新的雜物導致之亮點 -19-BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal panel inspection method and apparatus of a type in which an internal defect of a liquid crystal panel is observed by a photographing device by irradiating a liquid crystal panel with a backlight. [Prior Art] A liquid crystal panel inspection device of a type in which a liquid crystal panel is irradiated with a backlight and a defect such as a miscellaneous job in the inside of the liquid crystal panel is observed by a photographing device is known. A problem with such an inspection apparatus is that the foreign matter adhering to the surface of the liquid crystal panel is mistaken for the internal defect of the liquid crystal panel, and the liquid crystal panel of the good product is judged to be defective. Japanese Patent Laid-Open No. Hei 10-246705 (Patent Document 2) Japanese Patent Application Laid-Open No. Hei No. Hei. Patent Document 1 discloses a method for inspecting a color filter of a liquid crystal panel, which can distinguish between a defect of a color filter and a foreign matter adhering to a surface. In this inspection method, an illumination device is disposed on one side of the color filter, whereby the illumination device photographs one side of the color furnace light sheet, and the other side of the color furnace light sheet photographs the transmitted light image by a c C D camera. According to the photographic image, the positional information of the protrusion defect and the black defect of the color filter (i.e., the position of the shadow in the bright image) is obtained. If such a defect is found, air can be blown out at the position where the defect exists, and the compressed air (air b 1 〇 w ) is blown. Thereby, the foreign object -4-200914815 which is not strongly adhered to the color filter can be blown off. After the air is blown, the image is taken again. The difference between the images before and after the air blowing is differentially processed, and the external threshold is doubled with an appropriate threshold to extract foreign matter that is blown away. Thereby, it is possible to solve the problem of misjudgment of defective products by the foreign matter which can be easily removed. Patent Document 2 relates to a method of inspecting a transparent glass substrate of a liquid crystal panel, and can distinguish between defects of the glass substrate and foreign matter adhering to the surface. This inspection method uses four types of inspection units, and the glass substrate passes through four types of inspection units in sequence. In an individual inspection unit, an illumination device is disposed on one side of the glass substrate, and an imaging device is disposed on the other side. The first inspection unit and the fourth inspection unit use the direct transmission method to photograph the transmitted image, and the second inspection unit and the third inspection unit use the indirect transmission method to photograph the transmitted image. An ionic dust remover is disposed between the third inspection unit and the fourth inspection unit, and when the glass substrate passes through the eliminator, dust adhering to the back surface of the glass substrate is removed. The part related to this application is to compare the photographic image of the first inspection unit with the photographic image of the fourth inspection unit. In the image of the first inspection unit, in addition to the "strain" and "back injury" and "bubble" of the glass substrate, the "dust" attached to the surface is displayed in dark information. In the image of the fourth inspection unit, since the dust has been removed, only the "surface injury", "back injury" and "bubble" of the glass substrate remain. In other words, by comparing the image of the first inspection unit with the image of the fourth inspection unit, the position or state of the "surface injury", "back injury" and "bubble" of the glass substrate can be accurately recognized. In this Patent Document 2, in order to remove the foreign matter on the surface, not only air is blown but also a dust remover is used. When the air is blown off, the dust is again attached to the top of the liquid crystal glass. The above two conventional techniques relate to an inspection method for a component -5 - 200914815 (color filter or glass substrate) constituting a liquid crystal panel. In this regard, the next patent document 3 is a known inspection method for a liquid crystal panel in a state in which a liquid crystal is sandwiched, which can distinguish between internal defects and surfaces. [Patent Document 3] Japanese Patent Laid-Open Publication No. 2007-86563 (Patent Document 3) is a liquid crystal panel in a state where the polarizing plate is not provided, and the liquid crystal panel is inspected by sandwiching a pair of polarizing plates provided in the inspection device. . This inspection device can distinguish between internal debris and external debris of the LCD panel by comparing the transmitted image with backlight and the transmitted image with oblique illumination. [Problems to be Solved by the Invention] In Patent Document 1 and Patent Document 2, the color filter or the glass substrate can distinguish between its own defects and foreign matter adhering to the surface. However, such a technique is applied to the inspection of a liquid crystal panel in which a liquid crystal panel of a liquid crystal is sandwiched between a pair of transparent substrates and in a state where there is no polarizing plate, and the following problems occur. In Patent Document 1 and Patent Document 2, the foreign matter adhering to the surface of the color filter or the glass substrate is detected as dark information in a bright screen. However, the dark information in the bright image is difficult to confirm compared with the highlight information in the dark image (black screen). Further, in Patent Document 1, if a defect is found in the image, the air is blown out. Move to the location of the defect and focus on the location of the defect to blow the compressed air intensively. As a result, the foreign matter attached to the surface is blown off. That is, -6 - 200914815, in Patent Document 1, a technical means for moving the air outlet to the defect position is required. On the other hand, in Patent Document 2, an ion precipitator is used to remove foreign matter adhering to the surface. According to Patent Document 2, in the case of the air flow type, there is a possibility of reattaching the dust. To implement the technique of Patent Document 2, it is necessary to prepare an ion eliminator. According to the aforementioned Patent Document 3, in order to distinguish between internal debris and external foreign matter of the liquid crystal panel, oblique illumination is required in addition to the backlight. That is, the industry hopes to have a simpler construction. An object of the present invention is to provide a case where a defect of a liquid crystal panel is inspected by using a photographing device, and a simple means can be used, and an image of a foreign matter can be confirmed as a highlight information in a black screen so that the surface attached to the liquid crystal panel can be distinguished. A method and apparatus for inspecting a liquid crystal panel of a debris image and a defective image of a liquid crystal panel. [Means for Solving the Problem] The liquid crystal panel inspection method of the present invention includes the following steps (a) to (e): (a) a liquid crystal panel having a liquid crystal layer interposed between a pair of transparent substrates and having no polarizing plate The liquid crystal panel of the state is disposed in the first inspection unit, and the illumination light is transmitted through the first illumination side polarizing plate from one side of the liquid crystal panel, and the first image of the liquid crystal panel is imaged by the other side of the liquid crystal panel through the first imaging side polarizing plate. a first image acquisition stage in which the highlight position of the black screen is obtained; (b) a transport stage in which the first inspection unit transports the liquid crystal panel to the second inspection unit; (c) a liquid crystal panel is disposed on the second inspection unit, and the liquid crystal is disposed on the liquid crystal panel. (a) one side of the liquid crystal panel disposed on the second inspection unit from -7 to 200914815, the transparent side polarizing plate illuminates the illumination light, and the other side of the liquid crystal panel is photographed. The second image of the liquid crystal panel of the side polarizer is photographed, and the second image capturing stage of the black dot position is obtained; (e) comparing the bright spot position and the bright spot position of the second image, there is When the highlight position of the highlight position is common, it is determined that there is a certain stage in the liquid crystal panel. In the middle of the conveyance between the first inspection unit and the second inspection unit, the surface of the liquid crystal panel may be attached due to the influence of vibration or the like. Further, in the second inspection portion, the gas is blown on the surface of the pair to adhere to the surface of the liquid crystal panel. That is, by comparing the first image with the second image, the bright spots appearing in the black image are caused by the impurities or the defects of the liquid crystal panel. In other words, it is determined that the position of the bright spot is not common, and it is determined that the liquid crystal panel is defective due to the common state. By using the check method, it is possible to prevent a good product from being mistaken for a defective product. Further, if the liquid crystal panel is tilted in the spraying stage, the chance of the debris falling out may be blown out if the misidentification rate is increased. In the transfer stage, the liquid crystal panel can be tilted to the horizontal plane of the transport path. As a result, the possibility of the debris adhering to the surface of the liquid crystal panel falling off can be caused by the conveyance. Further, in the liquid crystal panel inspection apparatus of the present invention, it is possible to detect that two image defects of the bright one image transmitted through the second screen are reflected by the debris of the liquid crystal panel. The highlights of the two images are detected by the gas blow. In the inspection apparatus of the liquid crystal panel in which the liquid crystal panel in which the liquid crystal layer is sandwiched between the pair of transparent liquid crystal panels and the polarizing plate is present at least at some point, the following (a) to (e) are provided. (a) The first inspection unit includes a first inspection table on which the liquid crystal panel is placed, and the first illumination device ' disposed on one side of the liquid crystal panel is disposed between the liquid crystal panel and the first illumination device The first illumination-side polarizing plate is disposed on the other imaging device on the other side of the liquid crystal panel, and is disposed on the first imaging-side polarizing plate between the liquid crystal panel and the first imaging device, and the first imaging device The first position recognition means for recognizing the bright spot position in the black screen among the first images captured by the apparatus; (b) the second inspection unit including the second inspection table on which the liquid crystal panel is placed, and disposed on the liquid crystal panel The second illuminating device on one side is disposed on the second illuminating side polarizing plate between the liquid crystal panel and the second illuminating device, and is disposed on the other imaging device on the other side of the liquid crystal panel, and is disposed on the liquid crystal panel. With the aforementioned second a second imaging-side polarizing plate between the imaging devices, and a second position recognition means for recognizing a bright spot position in the black screen among the second images captured by the second imaging device; (c) the first inspection unit (d) a gas blowing device that blows a gas to a surface of a liquid crystal panel disposed in the second inspection portion; (e) comparing a bright spot position of the first image with a gas transfer device that transports the liquid crystal panel to the second inspection portion; In the bright spot position of the second image, when there is a bright spot common to the bright spot positions of the two images, it is determined that there is a defect in the liquid crystal panel. The liquid crystal panel inspection device is similar to the invention of the inspection method, and can be implemented as follows. (A) When the liquid crystal panel is tilted at the gas blowing stage, the probability of the debris falling is improved. (B) If there is an increase in the mis-recognition rate -9- 200914815, the gas blowing phase may be omitted. (C) The liquid crystal panel can be tilted to the horizontal plane at least somewhere in the transport path. [Effects of the Invention] The present invention exerts the following effects. (1) It is possible to distinguish between the image of the foreign matter attached to the surface of the liquid crystal panel and the liquid crystal panel by simply using a simple method of acquiring and comparing the two images between the two image acquisition stages. Internal defects. (2) Since the bright spots in the black screen are observed, it is easy to confirm the defect information or the debris information compared with the dark information (dark dots) in the observation of the bright screen. (3) The second inspection unit blows a gas onto the surface of the liquid crystal panel to increase the possibility of debris falling. (4) When the liquid crystal panel is tilted to the horizontal plane at least at some point in the transport path, it is possible to increase the possibility of debris falling during transport. [Embodiment] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing an overall view of an embodiment of an embodiment of a liquid crystal panel inspection apparatus of the present invention. This inspection apparatus is intended to inspect a defect of a liquid crystal panel in which a liquid crystal layer is sandwiched between a pair of transparent glass substrates. The liquid crystal panel of the inspection object does not have a polarizing plate. This inspection apparatus includes a first inspection unit 10 and a second inspection unit 12, and a transport system therebetween. Next, the movement of the liquid crystal panel 14 of this inspection apparatus will be described. In the first inspection unit 10, the liquid crystal panel 14 on which the first image is imaged by the first imaging device 3 2 is transported to the first rotary table 18 by the transport operation 16. The first rotary table 18 liquid crystal panel 14 is rotated by 90 degrees in the horizontal plane of -10 200914815, and is transferred to a robot transfer unit (not shown) by the transport operation 20. The arm transporting unit is configured to deliver the liquid crystal panel 14 between the transport system and the housing cassette 23. The liquid crystal panel 14 is transported to the second rotary table 24 by the transport operation 22 of the robot arm transport unit. The liquid crystal panel 14 that is delivered to the second rotary table 24 reaches the tilt by the transport operation 26 of the roller conveyor (not shown) and the transport operation 28 in the direction perpendicular to the transport operation 26 The device (the tilting action is shown by the symbol 2 9). The liquid crystal panel 14 is tilted to the horizontal plane by the tilting means. The liquid crystal panel 14 that is in the inclined posture is transported to the second inspection unit 12 by the transport operation 30. In the second inspection unit 12, the second image of the liquid crystal panel 14 is imaged by the second photographing device 34. Fig. 2 is a front cross-sectional view showing the outline of the first inspection unit. The first inspection unit includes a first inspection table 36, and the liquid crystal panel 14 can be placed on the first inspection table 36. The first illumination device 3 8 is disposed below the liquid crystal panel 14 . The first diffusion plate 40 and the first illumination-side polarizing plate 42 are disposed between the liquid crystal panel 14 and the first illumination device 38. The first illumination side polarizing plate 42 is located above the first diffusion plate 40. The first imaging device 32 is disposed above the liquid crystal panel 14. The first imaging side polarizing plate 44 is disposed between the liquid crystal panel 14 and the first imaging device 32. In this embodiment, the liquid crystal panel 14 is sandwiched by the two polarizing plates 42, 44, so that a state in which no voltage is applied to the liquid crystal panel (non-lighting state) becomes a black screen. Here, the "state of the black screen" means that the light from the illumination device on the back side is blocked by the structure in which the liquid crystal panel is sandwiched by the two polarizing plates, and the image forming apparatus is in a black state. The specific optical relationship between the liquid crystal layer of the liquid crystal panel and the two polarizing plates is set to -11 - 200914815 in such a manner as to be in a state of such a black screen. When the liquid crystal panel is turned off, the first illumination device 38 is used to illuminate the liquid crystal panel 14 from the lower side, and when the liquid crystal panel 14 is photographed by the first imaging device 32, the liquid crystal panel is defective or attached to the liquid crystal panel. The sundries will appear as bright spots. If the LCD panel is not defective, or if there are no foreign objects attached to the panel, no bright spots will appear on the screen. The output of the first imaging device 3 2 is double-processed by the image processing unit 46 at a specific threshold ′ to record the presence or absence of a bright spot and the position of the bright spot. The processing result of the first video processing unit 46 can be displayed on the first display unit 48. Fig. 3 is a side cross-sectional view showing the outline of the second inspection unit. The second inspection unit includes a second inspection stage 5, and the liquid crystal panel 14 can be placed on the second inspection stage 50. The liquid crystal panel mounting surface 5 2 of the second inspection table 50 is inclined so as to sandwich the horizontal plane. The angle θ is, for example, about 70 degrees. In addition to the defect inspection in which the liquid crystal panel is in a non-lighting state, the second inspection unit can perform an image quality inspection by setting the liquid crystal panel to a lighting state. Since the second inspection table 50 is inclined, it is easy for the operator to visually inspect the liquid crystal panel. The second inspection unit is provided with a probe device 66 for applying a voltage to the liquid crystal panel for image quality inspection. The second illumination device 54 is disposed below the right side of the liquid crystal panel 14. A second diffusion plate 5 6 and a second illumination side polarizing plate 58 are disposed between the liquid crystal panel 14 and the second illumination device 54. The second illumination side polarizing plate 58 is located above the second diffusion plate 56. The second imaging device 34 is disposed above the left side of the liquid crystal panel 14. The second imaging-side polarizing plate 60 is disposed between the liquid crystal panel 14 and the second imaging device 34. In the same manner as the first inspection unit, the liquid crystal panel 14 is sandwiched by two polarized light -12-200914815 plates 508, 60, and a black screen is displayed in a state where no voltage is applied to the liquid crystal panel (non-lighting state). . That is, a specific optical relationship between the liquid crystal layer of the liquid crystal panel and the two polarizing plates is set so as to be in a state of such a black screen. When the liquid crystal panel 14 is turned off in a non-lighting state by using the second illumination device 34 to illuminate the liquid crystal panel 14 by the second imaging device 34 from the right lower illumination liquid crystal panel 14', the liquid crystal panel is defective or The debris attached to the liquid crystal panel will appear as a bright spot. Similarly to the first video device of the first inspection unit, the second imaging device 3 4 ′ is connected to the second video processing unit 68, and the second video processing unit 68 is connected to the second display unit 70. Fig. 4 is a perspective view showing an important part of the second inspection unit in a state in which the air blowing device is installed. The illustration of the air blowing device is omitted in the foregoing FIG. In Fig. 4, two long sides of the liquid crystal panel 14 are disposed, and two air blowing mechanisms 72 are disposed obliquely upward. The same two air blowing mechanisms (not shown) are also disposed obliquely downward. These air blowing mechanisms 72 correspond to the gas blowing device of the present invention. The plurality of blowing units 82 attached to the blowing device are simply shown in Fig. 4. These blowing units 82 are arranged along one long side 84 and one short side 86 of the liquid crystal panel 14. FIG. 6 is a perspective view of the air blowing mechanism 72. This air blowing mechanism 72 is provided with an elongated body 74. The length of the body 74 is longer than the long side of the liquid crystal panel. A plurality of openings 76 are formed in one face of the body 74. An air introduction pipe 78 is connected to the end surface of the body 74. When the air introduction pipe introduces high-pressure air, the air is blown out by the opening 76. Further, although not shown, the air blowing means is attached to the ionizing means, and the ionized air - 13 - 200914815 can be blown onto the liquid crystal panel. Referring back to Fig. 4, the liquid crystal panel 14 which is inclined at an angle Θ to the horizontal plane can blow air 80 to the front surface and the back surface of the liquid crystal panel 14 by a total of four air blowing mechanisms 72. Thereby, the foreign matter adhering to the surface of the liquid crystal panel 14 can be blown off. Since the liquid crystal panel 14 is inclined, it is difficult for the foreign matter to adhere to the liquid crystal panel again by the flow of air to cause the foreign matter to leave the liquid crystal panel. Fig. 5 is a side view of the air blowing device of the second inspection portion as seen from the lateral direction. The air 80 from the four air blowing mechanisms 72 is shown to be blown to the liquid crystal panel 14 of the inclined posture. Next, the operation of this inspection apparatus will be described. In the first inspection unit of Fig. 2, the first image of the liquid crystal panel 14 is obtained by the first imaging device 32. This first image, for example, as shown in Fig. 7(A), has three bright dots 8, 8, 90, 92 in a black screen (the shadow 87 in the figure represents a black screen). For the image that is doubled, the highlight is "1", and the place without highlights is "0". The bright spots may be due to defects in the liquid crystal panel (for example, foreign matter sandwiched between two glass substrates) or due to foreign matter adhering to the surface of the liquid crystal panel. In Fig. 1, the liquid crystal panel reaches the tilting device via the transport operation 1 6 2 0, 2 2, 2 6, 2 8 . The liquid crystal panel 14 is tilted by an angle of only Θ to the horizontal plane by the tilting means. This angle Θ is equal to the inclination angle of the second inspection table of the second inspection unit 1 2 . The liquid crystal panel adjusted in the inclined posture in this manner is placed on the second inspection table of the second inspection unit 12 by the transport operation 30. Along with this series of conveyance operations, there is a possibility that the foreign matter adhering to the surface of the liquid crystal panel may fall due to vibration or the like. In addition, during the transfer -14- 200914815 The LCD panel is tilted, so debris is more likely to fall. Then, in the second inspection unit 12, air is blown onto the surface of the liquid crystal panel in the inclined posture by the air blowing device, whereby the foreign matter remaining without slipping off is blown off from the surface of the liquid crystal panel. Thereafter, after the second inspection unit 12 acquires the second video, for example, as shown in Fig. 7(B), two bright spots 92, 94 appear on the black screen. The highlight 92 also appears in the first image of Fig. 7 (A). The bright spots 88, 90 appearing in the first image of Fig. 7(a) disappear from the second image of Fig. 7(B). Therefore, it is considered that the highlights 8, 8 0 are caused by foreign matter adhering to the surface of the liquid crystal panel, and these impurities are transported by the liquid crystal panel or by air blowing the liquid crystal panel, and the liquid crystal panel is used. The surface disappears. In the second image of Fig. 7(B), a new bright spot 94 appears, but this is not present in the first image of Fig. 7(A), and therefore it is considered to be a foreign matter newly attached to the surface of the liquid crystal panel. However, in the inspection apparatus of the present invention, there is a relatively low possibility that new foreign matter adheres. When the second image of Fig. 7(B) is obtained, the first image of Fig. 7(A) and the second image of Fig. 7(B) are compared. Specifically, an AND calculation of two pieces of data is performed between the first image and the second image on each of the pixels (i.e., at the same place of the liquid crystal panel). As a result, as shown in Fig. 7(C), only the spot where the first image and the second image are bright spots (the spot where the highlight position is common) remains as the bright spot 92. Only the bright spots 8, 8 0, 9 4 appearing in the image of one of the first image and the second image are caused by the bright spots of the foreign matter attached to the surface of the liquid crystal panel, and are removed by AND calculation -15- 200914815 By the above processing, it is possible to extract only the "defective liquid crystal panel" which is found in the defect of the liquid crystal panel, and in fact, even if it is not possible to exclude surface debris (this is a normal product), even if it is mixed with its energy, even if As described above, by using the inspection apparatus of the present invention, it is possible to reduce the probability of erroneously determining a good product as a defective product. Fig. 8 is an example of an image in the case where the liquid crystal panel has no defects. Park) is the first image, with 88,90 highlights. Figure 8 (B) shows the second bright spot 94. Figure 8 (C) is an AND calculation of the first image and the second image. No highlights were found. In this case, it was determined that the liquid crystal was defective. Fig. 9 is a flow chart showing the inspection of the liquid crystal panel of the embodiment of the present invention. Simply organize the actions described so far. In the case of the first image of the liquid crystal panel (step s 2 ), the panel transports the liquid crystal panel to the horizontal plane at least at a certain position on the transport path (step S2 ), and the liquid crystal surface air in the inclined posture (step S3) Acquiring the second image of the liquid crystal panel (Step Horse' compares the first image and the second image (step S5). The first image capturing operation is performed in the second inspection unit shown in Fig. 2. The oblique posture sending operation is wrong. In the transport operation of 1, 2, 22, 26, 28, and 30, the transport function is carried out by the tilting device to the second inspection unit, and the plate is transported in an inclined state. The air blowing mechanism 72 shown in Fig. 4 is implemented. The second image capturing operation is performed in the second inspection unit shown in Fig. 3. The comparison operation between the second image and the image (AND calculation between images) is attached to the inspection. In this case, there is a large amount of d 8 (A video, 2 video panel illegal hand, if you want to say, liquid crystal mode plate blowing I S4) image of the action of the implementation. LCD surface action, the image takes the second shadow Check the device of the device-16-200914815 to implement. The present invention is not limited to the above-described embodiment, and the following changes can be made. (1) In the above-described embodiment, the second inspection unit is inclined, and the liquid crystal panel of the second inspection unit is inclined to the horizontal plane. However, the second inspection unit may be provided. In the same manner as the first inspection unit, the liquid crystal panel is maintained in a horizontal state from the first inspection unit to the second inspection unit. Even in such a transport mode, there is a possibility of vibration accompanying the transport. Further, the object attached to the surface of the liquid crystal panel (especially the surface on the back side of the lower side) can be dropped, and the effect of the present invention can be exerted. (2) If the bad misrecognition rate is increased, The air blowing mechanism can be omitted. In this case, only the effect of dropping the foreign matter adhering to the surface of the liquid crystal panel by the liquid crystal panel can be expected. (3) In the above embodiment, in order to obtain a "black screen state" When the liquid crystal panel is in a non-lighting state, the liquid crystal panel may be turned on in the first inspection unit or the second inspection unit or in both of the inspection units to obtain a black screen. It is possible to obtain a black screen regardless of the configuration of the optical system formed by the liquid crystal panel and the polarizing plate. Further, it does not matter what kind of electrical signal is applied to the liquid crystal panel. (4) In the foregoing embodiment, the liquid crystal panel is blown. The gas is air, but other gases such as dry nitrogen may be used. [Schematic Description of the Drawings] Fig. 1 is a perspective view showing an overall view of an embodiment of the liquid crystal panel inspection apparatus of the present invention. Fig. 2 is a front cross-sectional view showing the outline of the second inspection unit, Fig. 3 is a side cross-sectional view showing the second inspection unit, and Fig. 4 is a second inspection showing the state of the air blowing device. A perspective view of an important part of the department. Fig. 5 is a side view of the air blowing device of the second inspection portion as seen from the lateral direction. Figure 6 is a perspective view of the air blowing mechanism. Fig. 7 is an example of an image. Fig. 8 shows another example of the image. Fig. 9 is a flow chart showing the procedure of the liquid crystal panel inspection method of the present invention. f $Required symbol description] 1 〇: 1st inspection unit 12: 2nd inspection unit 1 4 : Liquid crystal panel 16, 20, 22, 26, 28, 30: Transport operation 3 2 : First imaging device 3 4 : 2 imaging device 36: first stage 3 8 : first illumination device 40 : first diffusion plate 42 : first illumination side polarizing plate -18 - 200914815 44 : first imaging side polarizing plate 46 : first image The processing unit 4 8 : the first display unit 50 : the second inspection table 5 2 : the liquid crystal panel mounting surface 5 4 : the second illumination device 5 6 : the second diffusion plate 5 8 : the second illumination side polarizing plate 60 : the second imaging Side polarizer 62 : Second image processing unit 64 : Second display unit 6 8 : Second image processing unit 7 〇 : Second display unit 72 : Air blowing mechanism 80 : Air 8 8 , 9 0 : Miscellaneous Highlight 92: Highlights caused by defects 9 4 : Highlights caused by new sundries -19-