CN105548195A - Surface detection device and method - Google Patents
Surface detection device and method Download PDFInfo
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- CN105548195A CN105548195A CN201510883141.7A CN201510883141A CN105548195A CN 105548195 A CN105548195 A CN 105548195A CN 201510883141 A CN201510883141 A CN 201510883141A CN 105548195 A CN105548195 A CN 105548195A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention relates to a surface detection device and method. The device comprises: a carrying platform, which includes a positioning apparatus for fixing a to-be-detected object; a light source system, which is used for providing a light source to the to-be-detected object; a detection camera, which is used for acquiring the image of the to-be-detected object under the illumination of the light source system; a blowing unit, which is used for blowing the to-be-detected object surface to remove foreign matters; and a control unit, which is used for processing the image acquired by the detection camera so as to obtain a corresponding surface defect and area. The device and the method provided by the invention reduce the adjustment of detection experience parameters, lower the illumination mode difficulty and the complexity of defect detection algorithm, and also greatly improve the detection accuracy.
Description
Technical field
The present invention relates to a kind of surface detection apparatus and method.
Background technology
Surface testing, particularly surperficial tiny flaw detect, all the time all by the ambient dust of body surface, lousiness etc. can remove foreign matter disturb.Due to ambient dust, lousiness etc. can remove the feature of foreign matter in detected image and surperficial tiny flaw (cheating point, scuffing, coating shedding etc. as convex-concave) very close, almost cannot correctly distinguish.So the accuracy of checkout equipment can be caused not high, erroneous judgement is comparatively large, has a strong impact on effect of checkout equipment.
Because above-mentioned defect, the design people, actively in addition research and innovation, to founding surface detection apparatus and method, make it have more value in industry.
Summary of the invention
For solving the problems of the technologies described above, the object of this invention is to provide surface detection apparatus and method.
Technical scheme of the present invention is as follows:
Surface detection apparatus, is characterized in that, comprises with lower device:
One microscope carrier, comprises locating device, fixes determinand by described locating device;
One light-source system, for giving the illumination of described determinand surface source of light;
One detection camera, for gathering the image of the lower determinand of light-source system illumination;
One insufflation unit, removes foreign matter for blowing to determinand surface;
One control module, for the treatment of the image that detection camera collects, obtains corresponding surface imperfection and region.
Further, described insufflation unit is ion generator, and it blows to determinand surface by containing the gas of negative ions with certain pressure, blows off or the object of the removable foreign matter of translational surface to reach.
Further, described locating device by mechanism accommodate fixing, pilot hole is fixed, keep to the side fixing and vacuum suction fix in a kind of fixed form position.
Further, described light-source system comprises one or more dissimilar light source.
Further, described microscope carrier is fixed bearing stage.
Further, described detection camera is line scan camera.
Appearance detecting method, is characterized in that, comprises following steps:
S1: measured object is placed in microscope carrier and locates;
S2: open light source and camera, with one or more lighting systems, takes multiple images, and insufflation unit is blown to measured object surface simultaneously;
S3: the image under each lighting system of calculation control unit process, obtains corresponding surface imperfection and region;
S4: calculation control unit carries out comparison in difference to multiple images under equal illumination condition, obtains the information of diff area;
S5: the defect in diff area is removed by calculation control unit, remaining defect is exactly real defect.
Further, the difference of described image refers to GTG between the image of correspondence position or heterochromia.
Further, within the center that refers to image difference region, the diff area of described image and periphery specified width, which width scope thereof.
By such scheme, the present invention at least has the following advantages:
The present invention reduces the adjustment of detection experience parameter, reduce the difficulty of lighting system and the complexity of defects detection algorithm, substantially increase the accuracy of detection simultaneously.
Above-mentioned explanation is only the general introduction of technical solution of the present invention, in order to better understand technological means of the present invention, and can be implemented according to the content of instructions, coordinates accompanying drawing to be described in detail as follows below with preferred embodiment of the present invention.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is method flow diagram of the present invention;
Fig. 3 is under equal illumination condition, first image of shooting;
Fig. 4 is under equal illumination condition, second image of shooting;
Fig. 5 be first with the differential image of second.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples for illustration of the present invention, but are not used for limiting the scope of the invention.
See Fig. 1, be pick-up unit of the present invention, comprise, a microscope carrier 1, comprises locating device 11, fixes determinand 2 by locating device 11; One light-source system 3, provides light source for giving described determinand; One detection camera 6, for gathering the image of the lower determinand of light-source system illumination; One insufflation unit 4, removes foreign matter for blowing to determinand surface; One control module 5, for the treatment of the image that detection camera collects, obtains corresponding surface imperfection and region.In determinand 2, general containing dust 7, scuffing 8, lousiness 9, salient point 10.Insufflation unit 4 is ion generator, and it blows to determinand surface by containing the gas of negative ions with certain pressure, blows off or the object of the removable foreign matter of translational surface to reach; Locating device 11 by mechanism accommodate fixing, pilot hole is fixed, keep to the side fixing and vacuum suction fix in a kind of fixed form position; Light-source system comprises one or more dissimilar light source.
In the present invention, microscope carrier 1 can be translation microscope carrier, and detection camera 6 is line scan camera, and the process of taking pictures is that translation microscope carrier carries determinand 2 translation to-and-fro movement, line scan camera takes the image of multiple determinands under light illumination, and insufflation unit 4 continues to blow to determinand surface simultaneously.
In the present invention, microscope carrier 1 can for being fixed bearing stage, and camera is line scan camera, and the process of taking pictures is that the relative fixed bearing stage level altitude of camera moves reciprocatingly, line scan camera takes the image of multiple determinands under light illumination, and insufflation unit 4 continues to blow to determinand surface simultaneously.
See Fig. 2, be detection method process flow diagram,
Appearance detecting method, comprises following steps:
S1: measured object is placed in microscope carrier and locates;
S2: open light source and camera, with one or more lighting systems, takes multiple images, and insufflation unit is blown to measured object surface simultaneously;
S3: the image under each lighting system of calculation control unit process, obtains corresponding surface imperfection and region;
S4: calculation control unit carries out comparison in difference to multiple images under equal illumination condition, obtains the information of diff area;
S5: the defect in diff area is removed by calculation control unit, remaining defect is exactly real defect.
In the S4 of step images, difference refers to GTG between the image of correspondence position or heterochromia.
Within the center that in step S4, the diff area of image refers to image difference region and periphery specified width, which width scope thereof.
As Fig. 3 and Fig. 4, being respectively is under equal illumination condition, under first image of shooting and equal illumination condition, and second image of shooting; After the detection of control device, dust 7 and salient point 10 are detected in Figure 5.
The above is only the preferred embodiment of the present invention; be not limited to the present invention; should be understood that; for those skilled in the art; under the prerequisite not departing from the technology of the present invention principle; can also make some improvement and modification, these improve and modification also should be considered as protection scope of the present invention.
Claims (9)
1. surface detection apparatus, is characterized in that, comprises with lower device:
One microscope carrier, comprises locating device, fixes determinand by described locating device;
One light-source system, for giving the illumination of described determinand surface source of light;
One detection camera, for gathering the image of the lower determinand of light-source system illumination;
One insufflation unit, removes foreign matter for blowing to determinand surface;
One control module, for the treatment of the image that detection camera collects, obtains corresponding surface imperfection and region.
2. surface detection apparatus according to claim 1, is characterized in that: described insufflation unit is ion generator, and it blows to determinand surface by containing the gas of negative ions with certain pressure, blows off or the object of the removable foreign matter of translational surface to reach.
3. surface detection apparatus according to claim 1, is characterized in that: described locating device by mechanism accommodate fixing, pilot hole is fixed, keep to the side fixing and vacuum suction fix in a kind of fixed form position.
4. a kind of surface detection apparatus according to claim 1, is characterized in that: described light-source system comprises one or more dissimilar light source.
5. a kind of surface detection apparatus according to claim 1, is characterized in that: described microscope carrier is fixed bearing stage.
6. a kind of surface detection apparatus according to claim 1, is characterized in that: described detection camera is line scan camera.
7. appearance detecting method, is characterized in that, comprises following steps:
S1: measured object is placed in microscope carrier and locates;
S2: open light source and camera, with one or more lighting systems, takes multiple images, and insufflation unit is blown to measured object surface simultaneously;
S3: the image under each lighting system of calculation control unit process, obtains corresponding surface imperfection and region;
S4: calculation control unit carries out comparison in difference to multiple images under equal illumination condition, obtains the information of diff area;
S5: the defect in diff area is removed by calculation control unit, remaining defect is exactly real defect.
8. method according to claim 7, is characterized in that: the difference of described image refers to GTG between the image of correspondence position or heterochromia.
9. method according to claim 7, is characterized in that: within the center that the diff area of described image refers to image difference region and periphery specified width, which width scope thereof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510883141.7A CN105548195A (en) | 2015-12-03 | 2015-12-03 | Surface detection device and method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510883141.7A CN105548195A (en) | 2015-12-03 | 2015-12-03 | Surface detection device and method |
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| CN105548195A true CN105548195A (en) | 2016-05-04 |
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| CN201510883141.7A Pending CN105548195A (en) | 2015-12-03 | 2015-12-03 | Surface detection device and method |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107690066A (en) * | 2016-08-04 | 2018-02-13 | 和硕联合科技股份有限公司 | Display device dead pixel detection method and its detection device |
| CN107991318A (en) * | 2017-12-01 | 2018-05-04 | 西南交通大学 | A kind of high-precision detection device |
| CN108802050A (en) * | 2018-06-22 | 2018-11-13 | 宁波江丰电子材料股份有限公司 | Target vision inspection apparatus and method |
| CN109307675A (en) * | 2017-07-26 | 2019-02-05 | 凌云光技术集团有限责任公司 | A kind of product appearance detection method and system |
| WO2019113955A1 (en) * | 2017-12-15 | 2019-06-20 | 深圳市柔宇科技有限公司 | Sub-film defect detection method and sub-film defect detection device |
| CN110865083A (en) * | 2019-12-04 | 2020-03-06 | 深圳市汇万川塑胶薄膜有限公司 | Improved detection method for environment and lamplight in product appearance defect detection |
| WO2020191919A1 (en) * | 2019-03-26 | 2020-10-01 | 博众精工科技股份有限公司 | Appearance detection device and appearance detection method for product to be detected |
| CN112113952A (en) * | 2020-10-19 | 2020-12-22 | 温州大学 | Remote measuring device based on LIBS technology |
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Patent Citations (5)
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| JPH10176995A (en) * | 1996-12-18 | 1998-06-30 | Futec Inc | Method and apparatus for inspection for transparent object |
| JPH10246705A (en) * | 1997-03-05 | 1998-09-14 | Toppan Printing Co Ltd | Apparatus for inspecting color filter |
| CN101324713A (en) * | 2007-05-30 | 2008-12-17 | 日本麦可罗尼克斯股份有限公司 | Liquid crystal panel inspection method and apparatus |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107690066A (en) * | 2016-08-04 | 2018-02-13 | 和硕联合科技股份有限公司 | Display device dead pixel detection method and its detection device |
| CN109307675A (en) * | 2017-07-26 | 2019-02-05 | 凌云光技术集团有限责任公司 | A kind of product appearance detection method and system |
| CN107991318A (en) * | 2017-12-01 | 2018-05-04 | 西南交通大学 | A kind of high-precision detection device |
| CN107991318B (en) * | 2017-12-01 | 2024-01-05 | 西南交通大学 | High-precision detection device |
| WO2019113955A1 (en) * | 2017-12-15 | 2019-06-20 | 深圳市柔宇科技有限公司 | Sub-film defect detection method and sub-film defect detection device |
| CN108802050A (en) * | 2018-06-22 | 2018-11-13 | 宁波江丰电子材料股份有限公司 | Target vision inspection apparatus and method |
| WO2020191919A1 (en) * | 2019-03-26 | 2020-10-01 | 博众精工科技股份有限公司 | Appearance detection device and appearance detection method for product to be detected |
| CN110865083A (en) * | 2019-12-04 | 2020-03-06 | 深圳市汇万川塑胶薄膜有限公司 | Improved detection method for environment and lamplight in product appearance defect detection |
| CN112113952A (en) * | 2020-10-19 | 2020-12-22 | 温州大学 | Remote measuring device based on LIBS technology |
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Application publication date: 20160504 |