CN205333529U - Surface detection device - Google Patents

Surface detection device Download PDF

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Publication number
CN205333529U
CN205333529U CN201520997399.5U CN201520997399U CN205333529U CN 205333529 U CN205333529 U CN 205333529U CN 201520997399 U CN201520997399 U CN 201520997399U CN 205333529 U CN205333529 U CN 205333529U
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CN
China
Prior art keywords
determinand
camera
microscope carrier
utility
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201520997399.5U
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Chinese (zh)
Inventor
张智海
易永祥
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Weisheng Suzhou Visual Information Science And Technology Ltd
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Weisheng Suzhou Visual Information Science And Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to CN201520997399.5U priority Critical patent/CN205333529U/en
Application granted granted Critical
Publication of CN205333529U publication Critical patent/CN205333529U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model relates to a surface detection device, including a microscope carrier for place the determinand, a light source system, be used for for the determinand provides the light source, one detects the camera for gather the light source system illumination image of determinand down, the unit of blowing for blow to the determinand surface and get rid of the foreign matter, a control unit for handle the image that detects the camera and gather, obtain the surface defect and the region that correspond. The utility model discloses reduce the adjustment that detects the empirical parameter, reduced the degree of difficulty of lighting system and the complexity of defect detecting algorithm, improved the degree of accuracy that detects simultaneously greatly.

Description

A kind of surface detection apparatus
Technical field
This utility model relates to a kind of surface detection apparatus。
Background technology
Surface testing, particularly the detection of surface tiny flaw, all can be removed foreign body by the ambient dust of body surface, lousiness etc. all the time and disturb。Foreign body feature in detection image can be removed due to ambient dust, lousiness etc. to be sufficiently close to surface tiny flaw (cheating point, scuffing, coating shedding etc. such as convex-concave), it is virtually impossible to correctly distinguish。So the accuracy of detection equipment can be caused not high, erroneous judgement is relatively big, has a strong impact on effect of detection equipment。
If image difference when only by multiple equal illumination of aeration cleaning gets rid of removable foreign body, can due to environmental effect, the fluctuation of light source, camera signal noise etc., the picture signal causing actual defects position fluctuates, so easily causing fail to judge (being excluded because of the difference of fluctuation) of actual defects。
Because above-mentioned defect, the design people, actively in addition research and innovation, to founding a kind of surface detection apparatus so that it is have more the value in industry。
Utility model content
For solving above-mentioned technical problem, the purpose of this utility model is to provide a kind of surface detection apparatus。
The technical solution of the utility model is as follows:
A kind of surface detection apparatus, it is characterised in that include following device:
One microscope carrier, is used for placing determinand;
One light-source system, for providing light source to described determinand;
One detection camera, for gathering the image of the lower determinand of light-source system illumination;
One insufflation unit, removes foreign body for being blown in determinand surface;
One control unit, for processing the image that detection collected by camera arrives, obtains surface defect and the region of correspondence。
Further, described light-source system comprises one or more different types of light source。
Further, described microscope carrier is translation microscope carrier。
Further, described microscope carrier be translation microscope carrier, be fixed on platform, rotate in microscope carrier any one。
Further, described detection camera is line scan camera or area array cameras。By such scheme, this utility model at least has the advantage that
This utility model decreases the adjustment of detection experience parameter, reduces the difficulty of lighting system and the complexity of defects detection algorithm, substantially increases the accuracy of detection simultaneously。
Described above is only the general introduction of technical solutions of the utility model, in order to better understand technological means of the present utility model, and can be practiced according to the content of description, below with preferred embodiment of the present utility model and coordinate accompanying drawing describe in detail as after。
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model;
Fig. 2 is flow chart of the present utility model;
Fig. 3 is when equal illumination, first image of shooting;
Fig. 4 is when equal illumination, second image of shooting;
Fig. 5 is the differential image of first and second。
Detailed description of the invention
Below in conjunction with drawings and Examples, detailed description of the invention of the present utility model is described in further detail。Following example are used for illustrating this utility model, but are not limited to scope of the present utility model。
Referring to Fig. 1, for this utility model detecting device, including, a microscope carrier 1, it is used for placing determinand 2;One light-source system 3, for providing light source to described determinand;One detection camera 6, for gathering the image of the lower determinand of light-source system illumination;One insufflation unit 4, removes foreign body for being blown in determinand surface;One control unit 5, for processing the image that detection collected by camera arrives, obtains surface defect and the region of correspondence。In determinand 2, typically contain dust 7, scuffing 8, lousiness 9, salient point 10。
Light-source system 3 in this utility model comprises one or more different types of light source。
In this utility model, microscope carrier 1 can be translation microscope carrier, and detection camera 6 is line scan camera, and process of taking pictures carries determinand 2 translation for translation microscope carrier and moves back and forth, line scan camera shoots the image of multiple determinands under light source lighting, and persistently blown in determinand surface by insufflation unit 4 simultaneously。
In this utility model, microscope carrier 1 can for fixed bearing stage, and camera is line scan camera, and the process of taking pictures is that camera is relatively fixed microscope carrier level altitude and moves reciprocatingly, line scan camera shoots the image of multiple determinands under light source lighting, and persistently blown in determinand surface by insufflation unit 4 simultaneously。
In this utility model, microscope carrier 1 can for for rotating microscope carrier, and camera is line area array cameras, and process of taking pictures is for rotating active below the online area array cameras of microscope carrier, line scan camera shoots the image of multiple determinands under light source lighting, and persistently blown in determinand surface by insufflation unit 4 simultaneously。
Referring to Fig. 2, for this utility model overhaul flow chart,
This utility model detection method is as follows:
Measured object being placed in microscope carrier and positions, opening light source and camera, with one or more lighting systems, shooting multiple images, blown in measured object surface by insufflation unit simultaneously, and determinand image when detection collected by camera is to multiple equal illumination, such as Fig. 3 and Fig. 4;Surface defect and the region of image is obtained by a control unit;Multiple images when control unit is to equal illumination carry out comparison in difference (difference refers to the GTG between the image of correspondence position or heterochromia), obtain diff area, within the diff area of image refers to center and the periphery specified width, which width scope thereof in image difference region;The threshold value A of setting regions calculating and conforming threshold value B, by control unit all differences region it is calculated by each image and judges: the difference value of the same diff area evaluation of movement images, if having the image evaluation in this region less than threshold value A, then the defect in this region is not judged to defect, the evaluation of diff area is average gray or the gray value summation of artwork each point in diff area, and the difference value of diff area evaluation is mean square deviation or the minimax difference of region evaluation;The difference value of the same diff area evaluation of movement images, if the numerical value that all images are in this diff area is all higher than being equal to threshold value A, then calculate all images difference value at the evaluation in this region, if difference value is judged to defect less than or equal to threshold value B, difference value is not judged to defect more than threshold value B。
As it is shown in figure 5, shown in Figure 5 by the difference of comparison diagram 3 and Fig. 4, Fig. 3 and Fig. 4。
The above is only preferred implementation of the present utility model; it is not limited to this utility model; should be understood that; for those skilled in the art; under the premise without departing from this utility model know-why; can also making some improvement and modification, these improve and modification also should be regarded as protection domain of the present utility model。

Claims (4)

1. a surface detection apparatus, it is characterised in that include following device:
One microscope carrier, is used for placing determinand;
One light-source system, for providing light source to described determinand;
One detection camera, for gathering the image of the lower determinand of light-source system illumination;
One insufflation unit, removes foreign body for being blown in determinand surface;
One control unit, for processing the image that detection collected by camera arrives, obtains surface defect and the region of correspondence。
2. a kind of surface detection apparatus according to claim 1, it is characterised in that: described light-source system comprises one or more different types of light source。
3. a kind of surface detection apparatus according to claim 1, it is characterised in that: described microscope carrier is translation microscope carrier, be fixed on platform, rotate in microscope carrier any one。
4. a kind of surface detection apparatus according to claim 1, it is characterised in that: described detection camera is line scan camera or area array cameras。
CN201520997399.5U 2015-12-03 2015-12-03 Surface detection device Expired - Fee Related CN205333529U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520997399.5U CN205333529U (en) 2015-12-03 2015-12-03 Surface detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201520997399.5U CN205333529U (en) 2015-12-03 2015-12-03 Surface detection device

Publications (1)

Publication Number Publication Date
CN205333529U true CN205333529U (en) 2016-06-22

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201520997399.5U Expired - Fee Related CN205333529U (en) 2015-12-03 2015-12-03 Surface detection device

Country Status (1)

Country Link
CN (1) CN205333529U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107941814A (en) * 2017-12-28 2018-04-20 南京联信自动化科技有限公司 A kind of detection case of planar surface pad pasting
CN110441323A (en) * 2019-07-11 2019-11-12 大族激光科技产业集团股份有限公司 The method for polishing and system of product surface

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107941814A (en) * 2017-12-28 2018-04-20 南京联信自动化科技有限公司 A kind of detection case of planar surface pad pasting
CN110441323A (en) * 2019-07-11 2019-11-12 大族激光科技产业集团股份有限公司 The method for polishing and system of product surface
CN110441323B (en) * 2019-07-11 2022-01-18 大族激光科技产业集团股份有限公司 Product surface polishing method and system

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160622

Termination date: 20181203

CF01 Termination of patent right due to non-payment of annual fee