TW200913008A - Substrate processing apparatus and method of manufacturing device - Google Patents

Substrate processing apparatus and method of manufacturing device Download PDF

Info

Publication number
TW200913008A
TW200913008A TW097119725A TW97119725A TW200913008A TW 200913008 A TW200913008 A TW 200913008A TW 097119725 A TW097119725 A TW 097119725A TW 97119725 A TW97119725 A TW 97119725A TW 200913008 A TW200913008 A TW 200913008A
Authority
TW
Taiwan
Prior art keywords
low temperature
vacuum chamber
pump
temperature pump
compartment
Prior art date
Application number
TW097119725A
Other languages
English (en)
Chinese (zh)
Inventor
Toshikazu Oki
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Publication of TW200913008A publication Critical patent/TW200913008A/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70841—Constructional issues related to vacuum environment, e.g. load-lock chamber
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling

Landscapes

  • Epidemiology (AREA)
  • Public Health (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Atmospheric Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Physical Vapour Deposition (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Drying Of Semiconductors (AREA)
TW097119725A 2007-06-04 2008-05-28 Substrate processing apparatus and method of manufacturing device TW200913008A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007148622A JP2008300806A (ja) 2007-06-04 2007-06-04 基板処理装置、露光装置及びデバイス製造方法

Publications (1)

Publication Number Publication Date
TW200913008A true TW200913008A (en) 2009-03-16

Family

ID=39769412

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097119725A TW200913008A (en) 2007-06-04 2008-05-28 Substrate processing apparatus and method of manufacturing device

Country Status (5)

Country Link
US (1) US20080299493A1 (enExample)
EP (2) EP2000854A3 (enExample)
JP (1) JP2008300806A (enExample)
KR (1) KR20080106859A (enExample)
TW (1) TW200913008A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008300806A (ja) 2007-06-04 2008-12-11 Canon Inc 基板処理装置、露光装置及びデバイス製造方法
WO2011075110A1 (en) * 2008-11-19 2011-06-23 Brooks Automation, Inc. Process chamber with intergrated pumping
JP5538931B2 (ja) 2010-02-04 2014-07-02 キヤノン株式会社 捕獲器、真空容器、処理装置、及びデバイス製造方法
JP6316759B2 (ja) * 2015-01-21 2018-04-25 東京エレクトロン株式会社 ガス供給系清浄化方法および基板処理装置
SG11201908803XA (en) * 2017-04-11 2019-10-30 Asml Netherlands Bv Lithographic apparatus and cooling method
US12217945B2 (en) 2019-09-06 2025-02-04 Lam Research Corporation Sorption chamber walls for semiconductor equipment
EP4575644A1 (en) * 2023-12-19 2025-06-25 ASML Netherlands B.V. Vessel configured to receive a radiation beam with a cold trap for contamination capture

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638587A (en) * 1979-09-01 1981-04-13 Nec Corp Vacuum device
US4464342A (en) * 1982-05-14 1984-08-07 At&T Bell Laboratories Molecular beam epitaxy apparatus for handling phosphorus
JPH01237365A (ja) * 1988-03-15 1989-09-21 Toshiba Corp クライオポンプ装置
JPH0749084A (ja) * 1993-08-05 1995-02-21 Hitachi Ltd クライオポンプ
JPH07208332A (ja) * 1994-01-07 1995-08-08 Anelva Corp スパッタリング装置におけるクライオポンプ再生方法
US5520002A (en) * 1995-02-01 1996-05-28 Sony Corporation High speed pump for a processing vacuum chamber
NL9500225A (nl) * 1995-02-07 1996-09-02 Hauzer Techno Coating Europ B Werkwijze voor het regenereren van cryocondensatiepomppanelen in een vacuümkamer, vacuümkamer geschikt voor het uitvoeren van de werkwijze en een inrichting voor het coaten van produkten voorzien van een dergelijke vacuümkamer.
US5644568A (en) 1995-03-15 1997-07-01 Motorola, Inc. Method and apparatus for organizing and recovering information communicated in a radio communication system
JPH10121224A (ja) * 1996-10-18 1998-05-12 Anelva Corp クライオポンプを用いたスパッタリング装置の動作方法及びその装置
JPH11200031A (ja) * 1997-12-25 1999-07-27 Applied Materials Inc スパッタリング装置及びその高速真空排気方法
JP4274648B2 (ja) * 1999-09-29 2009-06-10 住友重機械工業株式会社 クライオポンプの制御装置
EP1491955A1 (en) * 2003-06-27 2004-12-29 ASML Netherlands B.V. Lithographic projection apparatus and device manufacturing method
JP4370924B2 (ja) * 2003-08-27 2009-11-25 株式会社ニコン 真空装置、真空装置の運転方法、露光装置、及び露光装置の運転方法
JP2005101537A (ja) * 2003-08-29 2005-04-14 Canon Inc 露光装置及びそれを用いたデバイスの製造方法
KR20060095763A (ko) * 2003-10-21 2006-09-01 가부시키가이샤 니콘 환경 제어장치, 디바이스 제조장치, 디바이스 제조방법, 및노광장치
JP2005353986A (ja) 2004-06-14 2005-12-22 Canon Inc 露光装置
KR20060088817A (ko) * 2005-01-28 2006-08-07 가부시키가이샤 이빔 기판처리장치 및 기판처리방법
JP2006222198A (ja) * 2005-02-09 2006-08-24 Canon Inc 露光装置
JP2008300806A (ja) 2007-06-04 2008-12-11 Canon Inc 基板処理装置、露光装置及びデバイス製造方法

Also Published As

Publication number Publication date
US20080299493A1 (en) 2008-12-04
KR20080106859A (ko) 2008-12-09
JP2008300806A (ja) 2008-12-11
EP2161351A1 (en) 2010-03-10
EP2000854A2 (en) 2008-12-10
EP2000854A3 (en) 2009-09-23

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