TW200908194A - Component carrier device, electronic component testing device, and method for recognizing optimal distance in component carrier device - Google Patents

Abstract

A device carrier (310) has :an adsorption head (320) which adsorbs and holds an IC device; a vacuum pressure sensor (330) which detects the presence/absence of adsorption of the IC device by the adsorption head (320); an actuator (318a) which moves the adsorption head (320); and a controller (340) which controls the movement operation of the adsorption head (320). The controller (340) controls the actuator (318a) to move the adsorption head (320) depending on the result of detection by the vacuum pressure sensor (330), or sets the distance between the position (A) of starting movement and the position of the adsorption head (320) after moved to be an optimal distance.

Description

200908194 IX. Description of the Invention: [Technical Fields of the Invention] The present invention relates to a circuit for testing an integrated circuit formed on a semiconductor wafer, a semiconductor wafer, and a brush circuit board (hereinafter also representative & a component handling device for picking and placing an IE component in an electronic component testing device of the ic device, an electronic component testing device including the device, and an optimum distance for the component handling device to make the up and down distance of the adsorption head an optimum value [Prior Art] In the process of the Ic component, an electronic component test device is used in order to test the 1C element seven: 11 肊 or function in the packaged state. The IC component is carried into the electronic component testing device by loading the IC component before the test or the tray of the 1C component to be retested (hereinafter referred to as a custom tray) into the electronic component testing device. In general, the Ic component housed in the custom tray carried in the loading device is replaced with a tray that is transported in the electronic component testing device by a component conveying device that sucks and holds the 1C component by the adsorption head (hereinafter referred to as = The IC component housed in the test tray in this manner is subjected to high-temperature or low-temperature thermal stress in a 7-piece test device, and is then electrically contacted by the contact portion to be tested. After the test of the IC 70 is completed, the IC device of the test A is replaced with the test tray of the loaded IC component by the component handling device.

2247-9575-PF 5 200908194 Customized pallets for test results, and classified into good or defective products. In the electronic component testing device, the setting of the optimum distance for the up and down movement of the adsorption head in the adsorption operation of the ic device is performed, for example, when the type of the IC component before the start of the general operation of the electronic component test device is switched, or repaired. Waiting time. Conventionally, the optimum distance for moving down on the suction head has been set using a dummy tray that mimics the tray in which the 1C component is housed. That is, the operator measures the scale of the dial to the dummy tray by visually checking the scale of the dial indicating gauge, etc., and then inputs the measured value by manual operation to obtain the optimum distance. Settings. However, the measurement and setting of such an optimum distance by manual work is cumbersome and time consuming. Therefore, it is difficult to measure and set the optimum distance for all the operating ranges of the adsorption heads on the custom tray and the test tray, and since the setting is performed only at a representative position, the accuracy is not necessarily good. Further, since the dummy tray is used for measurement and setting, there is a case where warpage or dimensional deviation occurs in the dummy tray. In the case where accurate measurement and setting cannot be performed. [Invention] The object of the present invention is to provide A component transfer device, an electronic component test device, and an optimum distance recognition method that are high-precision and easy to recognize the up-and-down distance of the adsorption means. (1) In order to achieve the object, according to the first aspect of the present invention, The component conveying device (refer to the third paragraph of the patent application) is used to adsorb and move the object to be transported, including: adsorption means, adsorption

2247-9575-PF 200908194 Maintaining the object to be transported; Checking the object to be transported' · Moving the hand/handcuff, detecting whether or not the adsorption means has an adsorption means, controlling the movement of the adsorption means, and controlling the detection means The hand=moving action; the control means controls the movement of the moving means by the second moving means according to the moving means, and the second moving position and the moving distance are started. The distance between the positions of the hand & is identified as the most :: invention' control means according to the detection means =::: as a result, the moving means moves the adsorption means, or else the optimum distance. Therefore, the distance between the position of the hand and the position of the hand is determined. The === that is not particularly limited, and the control means can set the distance between the positions of the adsorption means according to the detection hand to be optimally adsorbed and held by the adsorption means. At the time, the control means controls the moving means to cause the moving means to reproduce the second item of the set patent application. X 乂 佳 (In the invention, although the invention is not particularly limited, the control means: the j: l adsorption means adsorbs and holds the object to be transported, so that the = test;: the two brothers!! 1 a predetermined distance, and in the case where the detection means detects that the far-adsorption means has adsorbed and holds the object to be transported, the moving position and the detecting means detect that the adsorption means has been adsorbed with:

The distance between the positions of the means of the (4) means when transporting the body is identified as the most 2247-9575-PF 200908194 (refer to the third item of the patent application scope). In the invention, although the invention is not particularly UP h -.g. . ^ ^ , the control means does not detect the adsorption means by the means of the detection means that the first means of transporting the body is such that the adsorption is only / mouth of the younger brother 1 direction moves 筮6 .8|| 5_ the first 疋 distance, and the detection means detects that the absorbing means has sucked and holds the 忒 carried object, the moving hand makes the adsorption After moving the second predetermined distance along the second direction of the cultivator, the distance between the positions of the adsorption means after the start of the movement of the tooth σ # & moving the second predetermined distance is 丨I i &amp ;丄,,, Screening is better for better distance (refer to item 4 of the patent application scope). In the invention, the 帛2 direction system and the second direction of the second direction are preferably shorter than the first predetermined distance (refer to the fifth item of the patent application). The absorbing hand & 彳 开始 开始 开始 开始 开始 开始 吸附 吸附 吸附 吸附 吸附 吸附 吸附 吸附 吸附 吸附 吸附 吸附 吸附 吸附 吸附 吸附 吸附 吸附 吸附 吸附 吸附 吸附 吸附Then, the control means recognizes the distance between the start of the movement position and the position slightly moved from the suction position of the conveyed body as the optimum distance. Due to the towel, the optimum distance can be identified so that the suction hand can more accurately adsorb the object to be transported. In the invention, the second direction system and the second direction are opposite to each other, and the second predetermined distance is shorter than the first predetermined distance (refer to the sixth item of the patent application). When the object to be transported with weak mechanical strength is adsorbed, the object to be transported may be damaged by the pressing force of the adsorbing means. Therefore, it is required that the adsorption means does not push and adsorbs the object to be transported. Therefore, in the present invention, when the optimal distance is recognized, the movement will start from the beginning.

2247^9575-PF 8 200908194 The position-to-ratio detection means is still slightly away from the position at which the object to be transported is detected. The distance from the position of the object to be transported is recognized as the optimum distance. Therefore, in the normal operation, the adsorption means is moved from the start movement position to the position where the minute interval is provided between the adsorption means and the object to be conveyed, and then the object to be conveyed is sucked up by suction. Therefore, the object to be transported can be adsorbed without being pressed by the object to be transported, and damage can be effectively prevented from occurring when the object to be transported having weak mechanical strength is adsorbed. The present invention is not particularly limited, and the control means controls the moving means such that the moving means moves the adsorption means in a third direction that is not parallel to the second direction and the second direction (refer to the patent application scope). Item 7). Although the invention is not particularly limited, the direction of gravity is preferably parallel (refer to item 8 of the patent scope). Although the invention is not particularly limited, it is preferable to recognize the optimum distance at substantially a plurality of positions in the plane of the third direction plane (see item 9 of the straight range). The ',, and the stipulations can be used to create the maximum distance that can be used to identify the adsorption mechanism of the object to be transported at a plurality of locations. μ needle pass; the overall circumference of the dry circumference of 1 identifies the optimal distance. In the invention, although Β|| κ0 - is particularly limited, the reference body used to identify the best is used instead of 兮β Α I. ...the carrier is better (refer to the patent application scope. In the invention, although the adsorption of the temple body is not contacted), the vacuum source is not limited. The adsorption means has: and the vacuum is generated by the system; and the piping is

2247-9575-PF 200908194 The absorbing pad is connected to the vacuum source; the smuggling method makes the absorbing pad move relatively 翏 (refer to claim 1 of the patent application scope). (2) In order to achieve this object, according to the second aspect of the present invention, an electronic open/, ^ 疋 测试 test device including a component carrying device is provided (refer to the 12th item of the application 4) The tested electric power is tested on the test head by pressing 70 pieces of the test head 4' and pressing the wheel of the tested electronic component into the contact portion to electrically contact the contact portion, a. ^ 卞兀The piece is tested by the system to be tested with the electronic component. In the present invention, the component mounting apparatus of the present invention is used for the conveyance of the electronic component to be tested in the electronic component measuring device, and the optimum distance for the downward movement of the adsorption means can be automatically recognized. ^ The mouth, the identification of the good distance is easy to work 'can shorten the preparation time. Further, by using the electronic component to be tested which is the actual test object for the identification of the optimum distance, instead of false (four), the optimum distance can be identified and set. In order to achieve the object, according to a third aspect of the present invention, a method for identifying an optimum distance is provided (refer to the third section of the patent application), which comprises an adsorption means for adsorbing and holding a carrier, and the adsorption means The component transporting device of the moving moving means identifies the optimum distance of the movement of the adsorbing means when the adsorbing means sucks the transported object, and includes: detecting step of detecting whether the adsorbing means adsorbs the transported object; = a step of moving the moving means according to the detection result in the detecting step = the adsorbing means; and the identifying step, based on the detecting step: the detecting result, the moving position is started and the moving means is moved The adsorption

2247-9575-PF 10 200908194 The distance between the locations of the means is identified as the optimal distance. In the present invention, according to the detection of the helmet, the 'eyes, the 吸附 from the 邛耵 邛耵 邛耵 孤 孤 孤 孤 、 、 、 、 、 , , , , , , , , , , , , , , , , , , , , , , , , , , In addition, or in the identification step, the position is moved to the distance after the movement, and the moving distance of the position of the other means is recognized as the attack distance. Thus ^ # ^ ^ automatically and easily recognizes the daunting action distance of the adsorption means. Although the invention is not particularly limited, the fourth material _A further includes a step of the distance between the adsorption handcuffs after the movement of the moving hand k and the movement of the moving hand k according to the detection of the detection step. When the optimum distance is set and the f 4 adsorption means adsorbs and holds the object to be transported, the optimum distance set by the moving means is preferably (refer to Patent Application No. 14). Although the invention is not particularly limited, in the detecting step, the adsorption means does not detect the adsorption and holding of the object to be transported, and in the moving step, the moving means moves the adsorption means in the first direction by a predetermined distance; In the detecting step, it is detected that the adsorption means has adsorbed and held the object to be transported, and the position between the start position of the movement and the position of the adsorption means when the detection means detects that the adsorption means has adsorbed and held the object to be transported It is better to recognize the distance as the best distance (refer to item 15 of the patent application scope). Although the invention is not particularly limited, in the detection step, the adsorption means does not detect the adsorption and holding of the object to be transported. In the moving step, the moving means sets the adsorption means along the first side (four) first. The detecting step detects that the adsorption means has adsorbed and holds the object to be transported, and in the '^ moving step, the moving means causes the adsorption means to follow the second

2247-9575-PF 11 200908194 Directional movement 2nd fixed distance position and shift (4) 2nd identification step, the distance of the adsorption means after starting to move the second brother 2: the best distance Good (refer to the patent scope (4)). The present invention is not particularly limited, and the second direction system and the first door direction 'the second predetermined distance 龅 φ s are shorter than the predetermined distance of the fourth brother 1 (refer to the reference item 17 of the scope of the application) ). ..., after the adsorption step detects the adsorption of the object to be transported by the adsorption means, the adsorption means is slightly lower in the spear-step process.

Move slightly to push the object to be transported. Then, the A recognition step recognizes the distance between the start of the movement, the movement position, and the position at which the axis of the adsorption detection position of the object to be conveyed is multi-moved as the optimum distance. Therefore, the suction means can more reliably recognize the suction distance of the conveyed body as the optimum distance. The present invention is not particularly limited, and the second direction and the ith direction in the opposite direction m are shorter than the ith distance (see item 18 of the patent application). When the object to be transported with weak mechanical strength is adsorbed, the object to be transported may be damaged by the pressing force of the adsorbing means. Therefore, it is necessary that the adsorption means does not push and adsorb the object to be transported. Therefore, in the recognition step, the distance from the start of the movement position to the position at which the suction detecting position of the conveyed body is slightly separated from the position of the object to be conveyed is recognized as the optimum distance for the lowering of the suction means. Therefore, in general, if the adsorption means is moved from the start moving position to a position where a minute interval is provided between the adsorption means and the object to be transported, the object to be transported is sucked up by suction. Therefore, it is possible to effectively prevent the damage by using the adsorption means without adsorbing the conveyed body and adsorbing and transporting the 2247-9575-PF 12 200908194 body. And the case where the object to be transported having a weak mechanical strength is generated can be used. The invention is not particularly limited. In the moving step, the moving means 3 is further aligned with the first direction and the second direction. The α-th moving is preferable (refer to item 19 of the patent application scope). Although the invention is not particularly limited, the first and second directions are substantially parallel to the direction (refer to the second aspect of the patent application). The level of the flat portion is not particularly limited, and the identification step is preferably performed in a plurality of positions substantially parallel to the third direction. The patents of the June, June patents are capable of performing the identification step at a plurality of positions, and can obtain a good distance for moving up and down in the range of the suction movement of the object to be transported. Although the first use of the factory is not particularly limited, it is preferable to use the special body to identify the optimum distance instead of the object to be transported (refer to the patent application scope [Embodiment], and the implementation of the present invention will be described based on the drawings. Fig. 1 is a view showing an electronic component testing device of the present invention, an electronic component testing device, a schematic diagram of a schematic view, and a drawing of an electronic component according to an embodiment of the present invention. The perspective view of the Shih 4 device, the D chart is not in the processing method of the tray of the yak test device according to the embodiment of the present invention, and the electronic device measurement of the embodiment of the invention is omitted. Pallet used in the ancient nightmare m Kenting 7L 仟 仟 device

2247-9575-PF 13 200908194 An exploded perspective view of the storage device, and a fifth perspective view of the δ clothing tray for the electronic component testing device of the embodiment of the present invention. An exploded perspective view of a test tray used in an electronic component testing device of the present invention, and a sectional view of a component handling device according to an embodiment of the present invention, the eighth brother FIG. 3 is a block diagram showing a control system of a component transport device according to an embodiment of the present invention. FIG. 3 is a view for explaining a method of processing a tray for an electronic component in the present embodiment. In fact, there is a plan to indicate that the 仵 is arranged in the vertical direction. Therefore, the mechanical (three-dimensional) structure will be described with reference to Fig. 2. The electronic component of the present embodiment is measured and placed at 1 ' In the case of stress applied to the ic component at a local or low temperature temperature, use the test head 5 and the tester 6 to test (check) the IC component difference, ώ $ , L ^ when τ _ § Ground action' and according to The test result is a device for classifying IC components. The test of the I c component of the electronic component test device 1 'from the loading of a plurality of 订 Α 订 订 订 订 订 订 订 订 订 订 订You are apricot; it is executed in the test tray TST which is transported in the processing state 1. As shown in Fig. 1, the space 8 is placed at the lower part of the processor 1 and the test head 5 is exchangeably arranged. This is the workstation 8. The socket 50 is disposed on the test head 5, and is connected via the cable 7 and the test β D 6. However, via the opening formed in the device base 101 of the write write 1, the Tr is ] The gap between the 1C and the test head 5 is electrically contacted, and the 1C component can be tested according to the electrical signal from the tester 6. In addition, the type of the IC component is changed. At the same time, the socket of the type I c component of this type is exchanged, the shape of the trench or the number of pins is exchanged.

2247-9575-PF 14 200908194 Cup f The processor 1 of the present embodiment is as shown in Fig. 2 and Fig. 3, and the components of the package are: storage unit, and the system is to be tested in the future, and the test will be completed. Hey. Component classification and storage; loading section 1. The 〇' is sent from the IC component supplied from the storage unit 200 to the chamber portion (10), and includes the test head 5; and the unloading unit 4, and the IG components that have been tested by the system (10) are sorted and taken out. The following are the parts of the δ 儿明 processor 1. <Storage part 200> r...Save #200 includes: storing $2〇1 before the test, storing the custom tray KST (LDKST) that has received the 1C component before the test; after the test, the storage 202' is stored and stored in response to The custom tray KST (ULKST) of the π component classified by the test result; and the tray transfer arm can store the customized tray KST that has been housed before and after the test of the Ic component. The storage device 2 (Π, 202', as shown in Fig. 4, includes a frame-shaped tray support frame 203; and an elevator 204, which is moved from the lower portion of the tray support frame 2〇3 to the upper portion. 2〇3, a plurality of custom pallets KST are stacked, and only the stacked custom pallets KST are moved up and down by the elevator 204. Further, in the custom pallet KST of the present embodiment, as shown in FIG. The accommodating portions of the 1C elements are arranged in 14 rows and 13 rows. In the present embodiment, as shown in Figs. 2 and 3, two of them are stored as STK ~ β in the pre-test storage 2〇1, and two are The empty tray storage STK - Ε is placed next to it. Each empty tray storage STK - Ε stack is sent to the empty custom tray KST of the unloading section 400. Next to the empty tray storage STK-E, 8 storage Stk 2247-9575-PF 15 200908194 1 'STK — 2' ··· &gt; ctj/ 〇^ , — 8 is set in the test memory 202, in accordance with the test results up to 8 categories and stored. 'Because the storage STK-B, stored in the crying ςτκ 1 〇 tray storage material is STK-Η and Since the structure is the same, the number of each of the weeks t can be appropriately adjusted according to the need. The a transfer 205 exchanges the custom tray (10) between the storage unit 200 and the loading unit 30 0 or 4 〇 ° which will be described later. The custom pallet KST is handed over to the second fork] 4 first #,] the pallet shifting arm 205 is used to take out the custom pallet KST stored in the storage STK. 蛀裟Μ # ^ 1 picker, the pallet shifting arm 205 holding the custom pallet KST °: The portion 300 of the portion 300 or the window portion 370, 470 of the unloading portion 400 is lowered to move up. Then, the disc transfer arm 205 is picked up from the setting plate: two! m, and the customized tray KST θ; ° taken out from the reservoir STK is again on the sill. The setting plate of the new customized tray KST is placed on the loading tray 300 or the window portions 37〇, 47〇 of the unloading portion 400, and on the other hand, the tray transfer arm 205 is stored in the customized tray KST picked up from the setting sheet. In the corresponding storage STK. <Loading Unit 3〇〇>: The customized tray m is moved from the lower side of the apparatus base to the loading by the tray transfer between the storage unit 2〇〇 and the apparatus base ι〇: The window part of the two places is 37〇. Next, in this loading section, the component is moved, and the device is loaded with the 1 (the component is temporarily moved to the correction).

Ser) 36〇' Here, the positional relationship of the iC elements to each other is corrected. Then, the component carrier Ή n 罝 310 and the IC component ’ transferred by the aligner 360 are replaced by the test tray m stopped at the loading unit 300.

2247-9575-PF 16 200908194 The test trays TST are arranged at intervals in the square frame 7 as shown in Fig. 6 (n, in which the frame u 702 is flat and the m is opposite to the side 7G1 - pQ2 of the frame 7G1 The two sides and the frame are full of 勑Η Μ 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自 各自The two mounting pieces 7 are re-played in the insert accommodating portion 704. In each of the insert accommodating portions 7〇4, one insert 71 〇 is received in each of the inserts, and the insert 71 is smashed by the fixing member 705. m The standby state is mounted on the two pieces of mounting pieces 703. Thus, at the inserts 71 〇 λ, 71 η % 邛, an insert is formed for mounting the insert 710 on the mounting piece 703. 〇 6. The insert 710 is shown in the figure of the drawing, and is divided into 4 rows and 16 rows in i test. 64 disks are added and arranged, and in addition, each insert 710 is set to the same shape and the same size. The 1" piece is accommodated in each of the inserts 71. The insert 71. The accommodating part is determined according to the shape of the element to be accommodated, and the example shown in Fig. 6 It is a square recess. 1 The loading unit 300 includes two window portions 370 'the component carrying device 31 〇 and the j corrector 360. The component carrying device 31 将 can be placed on the tray of the chimney P 3 70 The Ic element accommodated in the KST is temporarily moved to the corrector 360 and then replaced with the test tray TST. The component carrying device 310, as shown in Figs. 2 and 7, includes: 2 Y-axis directions 311 parallel to each other. , the system is mounted on the device base j 〇j; the movable arm 312 can reciprocate between the test tray TST and the custom tray KST by using the two supports 311 and a motor (not shown) (this direction is set The γ axis direction); and the adsorption head 320 are held by the movable arm 312

2247-9575-PF 17 200908194 The movement can be moved along the x-axis. As shown in Fig. 7, the base member 315 is attached to the lower portion of the movable arm. The base member 3'15 is provided with an actuator 318a of a motor or the like, and a through hole 315a' is formed to penetrate the drive shaft 318b of the actuator 3 through the hole. The ball screw joint 31Sc is attached to the front end side of the rib of the drive shaft 31, and the ball screw joint 31Sc is fixed to the adsorption head 32〇. Further, the linear guide rail 316a is fixed to the base ^ on the rail 31 6a along the z-axis direction The sliding member 3! 6b is slid to the support member 32A of the adsorption head 320. The adsorption head 320 includes a supporting member 32〇a “and an accessory 32〇c and an elastic member. The adsorption 塾32〇c is composed of a substantially cylindrical body portion (10) and a soft pad portion composed of a synthetic resin material. The small-diameter portion 320e having a smaller outer diameter than the other portions is formed on the upper portion of the main body portion 32〇d. Further, the inner portion 32〇 is continuously formed from the lower side of the pad portion 320f and the main body portion 32〇d. The inner hole 320gg is communicated by the pipe 32〇i and the vacuum pump 333. The bead hole 3 2 0 b is formed on the support member 3 2 〇a , and the small k 邛 320e of the body portion 3 2 〇d is inserted into the through hole 32 〇 b, and is adsorbed. The pad 32〇c is held by the support member 3 to be movable up and down. Further, the 'elastic member 3· is inserted between the support member 32 0a and the body portion 32Qd, and the elastic member 咄 applies the body portion to the support member 32〇a downward. As the elastic member 320h, a coil spring made of metal or a bellows-shaped spring member made of a synthetic resin material or the like can be used. The inner hole 3 2 〇g through the fitting 3 2 0 1 and the adsorption head 3 2 利用The connected "pump 3 3 3" produces a suction of the adsorption head 320. And the use of the pipe set to 3 2 〇 i

2247-9575-PF 18 200908194 The reverse vacuum pressure sensor 330 measures the pipe 32. This judges whether the adsorption head 320 has an adsorption IC element. The hole % device 340 communicates the data of the pressure value measured by the true second pressure sensor 33. As shown in Fig. 8, the control unit 340 can be connected to the component transporting device 310 and the vacuum pump 333 in a controlled manner with the switch. By the control device state (4), the component handling device 310 shifts the adsorption head 32 toward the χγζ direction, and the control device 340 controls the 〇N/〇FF of the vacuum pump 333. <Room portion 100> In the chamber portion 100, the 1C element accommodated in the above-described test tray TST is tested. As shown in FIGS. 2 and 3, the chamber portion 100 is composed of the following members, and the soak chamber 110' applies a target high-temperature or low-temperature temperature stress to the ic element loaded in the test tray TST; test t 12 〇, the 1 is in a state in which the thermal stress is applied to the soak chamber 11 (the element contacts the test head 5, and the unsoak chamber 130 removes thermal stress from the IC element tested in the test chamber 12〇. soak to 11 is arranged to protrude upward from the test chamber j 2〇 as shown in Fig. 2. The plurality of test trays TST are lowered in the soak chamber 11 by a vertical conveyance device (not shown). In the case where the test of the Ic component housed in the test tray TST in the test chamber ι2 is not completed, the vertical conveyance device is stopped, and waits until the end of the test. Mainly during this waiting, high temperature or low temperature heat is applied to the IC component. stress.

Then, the test tray TST after the application of the thermal stress is transferred to the test chamber 120 by the vertical conveyance device and the conveyance belt (not shown). In the test chamber 120, the test head 5 is placed in the center of the test head, and the tray TST is moved to the top of the test head 5, and the wheel is inserted into the terminal and the test head 5 by the _ _ _ The contact terminals of the socket 50 are in contact with each other by electric rolling, and the IC component is tested. κ The result of this test is memorized in accordance with the identification number of the T-type pallet TST and the address determined by the deduction in the test tray TST. The number of the 1C component of the 所 所 u u u u u u u u u u so so so so Similarly, it is arranged to protrude upward from the test chamber m, and as shown in the schematic view of Fig. 3, a vertical transport device is provided. In this unsoak room 130, you soak to 11 〇 has been applied to the unloading part of the 1C component that has been removed from the room after using the air supply to remove the C component eight fine two degrees. 4〇〇. One person 11 ΰ has applied a low level to the 1C component, and in the case of a soak room... a case of 'm dish', heating the IC 70 piece with a warm air or a heater, etc., after the temperature of the surname π m... The 7 IC 7L piece is moved to the unloading section 4〇〇. . , , , and π which are carried into the test tray TST from the main base 1 Q 1 and U1 are formed on the upper portion of the soak chamber 11〇. — Take the sample, and the outlet shape for moving the test tray TST to the main base 101 is _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The upper part. Then, at the king base 101, set 丨t^τςτ^ to make the test TST from the chamber 1 〇〇屮λ &amp; i ^ ^ ^ 1 〇 2 via these inlets or outlets; Benefit handling device 1 02. The pallet handling device 1 0 2 is for example rotated by a rotating roller from the _-room m; By using the pallet transport device (10), the loading unit_ is returned to the _!: phase measuring tray TST via the unloading unit 400 &lt; w s〇ak room j1〇 〇

2247-9575-PF 20 200908194 <Unloading unit 4〇〇> The section 400 is moved from the test tray to the unloading section - the 1C of the KST is replaced by the custom pallet according to the test result. As shown in Fig. 2, in the main pedestal window portion ym of the unloading portion, "the order tray KST that has been transported from the storage portion 200 to the unloading portion 4" faces the upper surface of the main surface 101 of the top surface L. . Further, the buffer unit 405. Further, it is placed between the test tray TST of the unloading unit 400 and the window portion 406. The unloading unit 400 includes a component conveying device 41 that replaces the tested 1C component from the test tray TST to the customized carrier handling device (10) and the component handling device described above is: Detailed descriptions thereof are omitted. Figure 9 is a diagram showing an electronic component testing device according to an embodiment of the present invention.

Flow of each step of the method for identifying the optimal distance of the component handling device

Fig. 10A to ι〇Ε_ 后主-+ L is a cross-sectional view showing the operation of the component transporting apparatus when the optimum distance is not recognized in the first embodiment of the present invention. The method of recognizing the optimum distance in the first embodiment of the present invention will be described with reference to Fig. 9 to Fig. 1QE. In the U-shaped embodiment, it is explained that in order to reliably adsorb the IC, the position of the adsorption head 32〇 from the adsorption sensing position of the 1C element is recognized as the optimum distance. An example of the situation.

When the hunting operation is started by the operation of the work, the original device, the flute w η, and the A J are started to operate. First, the vacuum pump 333 starts to take the second step (step S1). Then, the A DB s/』 ύ is sucked into the vacuum pump 333 via the pipe 320 i and the inner hole 32 〇g of the adsorption head 320 is emptied.

2247-9575-PF 21 200908194 Gas becomes the adsorption head r Next, the control device 340 judges whether or not the adsorption head 32 has adsorbed a member (step S2). In the case where the 1C element has been adsorbed, the air pressure is continuously increased by the vacuum pump 333 even when the air is not in the state of the inner hole 32Og, and the air pressure inside the hole 320g and the pipe 320i is greatly reduced. On the other hand, when the 1C element is not adsorbed, the air is supplied to the side 320g and the pipe 320 i even during the inhalation, so the pressure does not change greatly. In the present embodiment, the vacuum pressure sensor 33Q is used. When the air pressure is measured and the measured air pressure value is transmitted to the control device i 34G, and the predetermined waste force value Ui threshold value is measured, the control device 34 determines that the adsorption head 320 has adsorbed the IC component. . j is off _ ^ On the other hand, in the head 320 where the measured value is equal to or greater than the predetermined pressure value (second threshold), the IC element is not adsorbed. Control clothing _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ ~20mm (step §3).

element. After the end of the movement, the process returns to step S2, and the presence or absence of the adsorption 1C step S2 and the step S3 is detected. The adsorption head repeats the step, and the mother-person successively descends 10 to 20_ in step S3. : After '1' as shown in the (10) figure, the step S2 detects that T Ir ^ stops the first movement (step S4). The case (YES in step S2), stop ^ ^ ^ 4 31 0 ^ ^ ^ ^ ^ 320 as the 1 0 C figure jin; . _ no, in the adsorption pad 320c and 1C components

2247-9575-PF 22 200908194 Abutment state 'When the workpiece handling device 310 moves the support member 32〇a from the adsorption detection position B to the position where the drop is, for example, 5_ (position 〇. Component Wei from the money (four) position β again When the distance of the suction head 32 is pushed, the pressure of the adsorption head 32 is stronger than that at the time of the adsorption detection. Further, when this is pushed, the pressure is slightly retracted to the upper side than the elastic member. In the step S6, The control device 34〇 recognizes the distance from the start movement position: the final position c of the support member 320a as the optimum distance, and the double=good distance, and presets the actuator to control to the L value in advance. After the good distance, the vacuum pump 333 is stopped: 1. Step S7) 'As shown in Fig. 1D, the adsorption head 32 is raised and the movement start position A is returned to the brake (step s 8). In the second embodiment, since the vertical movement distance of the adsorption head 320 of the component transporting device (4) can be automatically optimized, it is possible to reduce the preparation time by performing the troublesome work of the conventional manual work. Further, in the present embodiment, since the ic individual of the actual test object is used, the vertical movement distance can be optimized with high precision. After the above operation is completed, the adsorption head 32 is moved in the horizontal direction. The operations of steps S3 to S8 are repeated at a plurality of positions of the order tray LMST. Thus, by setting the optimum distance at a plurality of positions, the optimum distance can be recognized as a whole in the operating range of the adsorption head 320.

Further, in the present embodiment, although the identification setting of the optimum distance of the order tray LMST is described, the present invention is not particularly limited. The suction head (four) may be carried on the test tray m or the corrector 36G. 2247-9575 -PF 23 200908194 Optimization of the down distance. Further, in the present embodiment, only the case in which the shipping device 310 adsorbs 5 ft. 32 〇 is carried out, and the device is transported to the unloading unit 400. set up. In addition, in the present embodiment, although the distance between the start of the movement position A and the position C after the second movement is recognized as the optimum distance, the second movement may not be performed. The position between the position of the situation and the position of the adsorption detection position 6 is recognized as the optimal distance. The η 11A ® 帛 11B is a cross-sectional view showing the operation of the component conveying device when the optimum distance is recognized in the second embodiment of the present invention. . Next, a method of recognizing the optimum distance of the electronic component testing apparatus according to the second embodiment of the present invention will be described with reference to Fig. 9 and the first to the eleventh to eleventh. A thin and mechanically weak IC component may utilize a suction head during adsorption (32G is less damaged). Therefore, the ic element does not contact the adsorption member 320 when adsorbed, and is sucked up by suction from a slightly separated position. The adsorption is preferably maintained.

Therefore, in the present embodiment, at the time of the recognition of the optimum distance, the second movement is performed so as to slightly retreat from the suction sensing point of the IC element to the movement start position A side. By doing so, the distance from the start of the movement position a to the position slightly away from the ic element can be recognized as the optimum distance above the adsorption head 320. Identification of the optimal distance of the % shape in the present embodiment, and the first embodiment

2247-9575-PF 24 200908194 Only step S5 is different. In the present embodiment, in step S5, as in the first! In the figure A, the non-adsorbing head 3 2 0 is moved upward from the adsorption detecting position B to the leaving element, for example, only 1 to 5 mm. Next, in step '11', as shown in Fig. 11B, the control device 34 recognizes the distance from the start of the movement position A to the position C after the second movement as the suction head 32. The best distance to move down. Therefore, even if it is a 1C τ piece having a weak mechanical strength, it is possible to automatically and easily recognize a good distance which can be adsorbed and held without damage. The embodiments described above are described in order to facilitate the understanding of the present invention and are not intended to limit the present invention. Therefore, in the above description, each element disclosed in the embodiments includes all design changes or equivalents belonging to the technical scope of the invention. &quot;Dry to dry In this embodiment, only the actual test is used to take the distance. However, the present invention is not particularly limited, and a dummy tray (reference body) of a molded piece may be used for identification. Alternatively, it is also possible to use the actual object to identify the identification accuracy of the distance. The simple description of the component test device shows the electronic component of the electronic embodiment of the present invention. Fig. 2 is a schematic view showing a first embodiment of the electronic component testing apparatus of the three-dimensional one of the test apparatus.

2247-9575-PF 25 200908194 M丨尔衣 shows the invention « π &lt;bei-π defeat "V-electric thousand yuan used in the exploded perspective view of the IG storage. Fig. 1 is a perspective view showing a custom tray used in an electronic unit according to an embodiment of the present invention. Fig. 6 is an exploded perspective view showing a type 5 pallet for use in an electronic component according to an embodiment of the present invention. Fig. 7 is a view showing a component transporting surface of an embodiment of the present invention. 'straight section

C Fig. 8 is a block diagram showing a system of the embodiment of the present invention. Control of component handling device Figure 9 is a component handling device

The flow of each step of the method for recognizing the optimum distance of the electronic component testing device according to the embodiment of the present invention is not limited to the case of identifying the optimum distance in the first embodiment of the present invention. $ , / Sectional view of the operation of the transport device (1).

Fig. 10B is a cross-sectional view (No. 2) showing the operation of the component transporting apparatus when the optimum distance is recognized in the first embodiment of the present invention. 10(图图#矣一+丄a) The goods and the table are not in the cross-sectional view (3) of the operation of the device conveying device for identifying the optimal distance of the first embodiment of the present invention. The 1st 0D figure is shown in The first embodiment of the invention identifies the optimal distance

Sectional view of the action of the component handling I# w I % when leaving the time (4). In the first embodiment of the present invention, a cross-sectional view (5) of the operation of recognizing the "/" edge or the setting of the optimum distance is shown in the first embodiment of the present invention. The second embodiment of the present invention recognizes the optimal distance

2247-9575-PF 26 200908194 Cross-sectional view of the operation of the component handling device in time (1). Fig. 11B is a plan view (No. 2) showing the operation of the component transporting apparatus when the optimum distance is recognized in the second embodiment of the present invention. [Description of main component symbols] 1 electronic component testing device 1 0 0 chamber portion 20 0 storage portion 30 0 loading portion 31 0 component conveying device 320 adsorption head 320a supporting member 320b through hole 3 2 0 c adsorption head 320d main body portion 320e diameter Part 3 2 0 f pad 320g inner hole 320h elastic member 320 i pipe 330 vacuum pressure sensor 333 vacuum pump 340 control device 3 6 0 corrector 2247-9575-PF 27 200908194 370 window portion 400 unloading portion KST custom tray TST Test tray 2247-9575-PF 28

Claims (1)

200908194 X. Patent application scope: 1. A component transporting device is used for adsorbing and holding a transported object, including: an adsorption means for adsorbing and holding the object to be transported; and a detecting means for detecting whether the adsorbing means adsorbs the object a moving means for moving the adsorption means; and a technical hand length for controlling a movement of the moving means; the control means controlling the moving means to move the adsorption by the moving means based on the detection result of the detecting means The means, or the control means, identifies the distance between the start of the movement position and the position of the adsorption means by the movement of the moving means as the optimum distance. 2. The component handling device according to the scope of the patent application, wherein the control means can adjust the distance between the position of the adsorption means after the movement of the movement means and the movement of the movement means according to the inspection condition of the detection means When the optimum distance ' is set and the holding means is adsorbed and held by the adsorption means', the control means controls the moving means to cause the moving means to reproduce the set optimal distance. 3. The component handling device according to the ninth aspect of the invention, wherein the protection means is Λ I, wherein the detecting means does not detect that the adsorption means adsorbs and holds the object to be transported, so that the adsorption means is along the first! Moving the ith predetermined distance; the detecting means detects that the absorbing means has adsorbed and held the object to be transported. 'The starting moving position and the detecting means detect that the absorbing means has adsorbed and held the object to be transported The distance between the positions of the adsorption means 2247-9575-PF 29 200908194 is identified as the optimum distance. 4. If the component handling device of the first application of the patent scope is applied, the control means is 未a衩, the adsorption means is not detected by the detecting means, and the holding body is attached to the object to be adsorbed. The means moves the predetermined distance along the second side ^, π; the detecting means detects that the adsorption means only holds and holds the object to be transported, and the moving means moves the adsorption means in the second direction After the predetermined distance is 2, the distance between the start movement position and the position of the adsorption means after moving the second predetermined distance is recognized as the optimum distance. 5. The (4) handling device of claim 4, wherein the second direction is the same direction as the 帛1 direction, and the second predetermined distance is shorter than the i; the predetermined distance is shorter. 6. For the component handling device of claim 4, the second direction and the 帛! In the opposite direction of the direction, the second predetermined distance is shorter than the first predetermined distance. 7. The component handling device of claim 4, wherein the control means controls the moving means such that the moving means moves the adsorption means to a third direction that is not parallel to the first direction and the second direction . 8. The component handling device of claim 4, wherein the first and second directions are substantially parallel to the direction of gravity. 9. The component handling device of claim 7, wherein the optimum distance is identified at a plurality of locations substantially parallel to the plane parallel to the third direction. 1 如. For the component handling device of claim 1 of the patent scope, 2247-9575-PF 30 200908194 is used to identify a dedicated reference body for the optimum distance, and the soil dry bottle is used to replace the carrier. 11. The element of claim 1, wherein the adsorption means has: an adsorption pad in contact with the object to be transported; a vacuum source to generate a vacuum; and a pipe 'to make the adsorption pad and the The vacuum source is connected. The moving means moves the adsorption pad. / 12. An electronic component testing device for pressing an n(1) die member against a contact portion of a test head, and causing the tested electronic component W to dry out into the terminal and the contact portion for electrical contact, and testing The electronic component to be tested, the system to be tested, the component to be tested, and the component handling device according to any one of claims 1 to 11.丨3· A method for identifying an optimum distance, wherein the element transporting means including the adsorption means for adsorbing and holding the object to be transported and the moving means for moving the adsorbing means are recognized when the adsorbing means adsorbs and holds the object to be transported The optimal distance of the movement of the adsorption means includes: a detecting step of detecting whether the adsorption means adsorbs the object to be transported; and a moving step of moving the moving hand slave to the adsorption means according to the detection result in the detecting step; And the 'individual' is based on the detection result in the detecting step, and identifies the distance between the start of the movement position and the position of the adsorption means by the movement of the moving means as the optimum distance. 14. The method for identifying an optimum distance according to claim 13 of the patent application, further comprising a setting step, according to the detection result in the detecting step, 2247-9575-PF 31 200908194, starting the moving position and borrowing the moving means The distance between the positions of the adsorption means after the movement is set to an optimum distance; and when the adsorption means adsorbs and holds the object to be transported, the moving means reproduces the optimum distance set by the setting step. 15. The method for identifying an optimum distance of the patent application scope 13 or 14 wherein the adsorption means does not detect the adsorption and holding of the object to be transported in the detecting step, in the moving step, (4) moving means The adsorption means moves the first predetermined distance along the first direction; in the detecting step, it is detected that the adsorption means has adsorbed and maintained the condition of the conveyed body', and the starting movement position and the detecting means are different in the identification step The distance between the positions of the adsorption means when the adsorption means has adsorbed and held the object to be transported is recognized as the optimum distance. 16. The identification phase of the optimal distance of (4) (4) of the patent application scope, wherein the adsorption means does not detect the adsorption and holding of the object to be transported in the detecting step, in the moving step, the moving means makes the adsorption means Moving the first distance along the first direction; ^ the detecting step detects that the adsorption means has adsorbed and holds the carried in the moving step, and the moving means causes the adsorption means to move along the initial position = multi-moving second predetermined distance After the 'identification step', the distance between the position and the movement of the second predetermined distance is recognized as the optimum distance. In the basin, the identification method of the best distance of the 16-member patent shackle, the ::=2 direction system and the first direction in the same direction' is the second predetermined distance shorter than the established distance of the brother. 2247-9575-PF 32 200908194 where =2 = the best method for identifying the range of the 16th item, which is more than the first: :::: the first direction is opposite, the second is from ": 2, 7 patent range 】The identification of the best distance of 6 items h The first direction and the 4th (fourth) segment can move the adsorption means toward the direction of the direction and the parallel direction of the third direction. Or it is the best of the first and fourth (4) 16 items. In other ways, U and 2 are substantially parallel to the direction of gravity. ' ° Shen Qing Patent Fan Park ig where in essence and the third line:: the distance identification method, the identification step. Execution of a plurality of positions 2 2. As in the patent application method, the identification object to be used to identify the best distance is the carrier. The special ^ reference body' replaces the 2247-9575-PF 33