TW200907109A - Cascade laminar flow etching device - Google Patents
Cascade laminar flow etching device Download PDFInfo
- Publication number
- TW200907109A TW200907109A TW96128219A TW96128219A TW200907109A TW 200907109 A TW200907109 A TW 200907109A TW 96128219 A TW96128219 A TW 96128219A TW 96128219 A TW96128219 A TW 96128219A TW 200907109 A TW200907109 A TW 200907109A
- Authority
- TW
- Taiwan
- Prior art keywords
- optical glass
- solution
- stage
- waterfall
- laminar flow
- Prior art date
Links
- 238000005530 etching Methods 0.000 title claims abstract description 30
- 239000005304 optical glass Substances 0.000 claims abstract description 37
- 239000011521 glass Substances 0.000 claims description 41
- 238000000034 method Methods 0.000 claims description 11
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000003860 storage Methods 0.000 claims description 3
- OYLGJCQECKOTOL-UHFFFAOYSA-L barium fluoride Chemical compound [F-].[F-].[Ba+2] OYLGJCQECKOTOL-UHFFFAOYSA-L 0.000 claims description 2
- 229910001632 barium fluoride Inorganic materials 0.000 claims description 2
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims description 2
- 230000003628 erosive effect Effects 0.000 claims 1
- 238000001459 lithography Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 30
- 239000007921 spray Substances 0.000 description 12
- 239000000047 product Substances 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 8
- 239000007788 liquid Substances 0.000 description 7
- XJHCXCQVJFPJIK-UHFFFAOYSA-M caesium fluoride Chemical compound [F-].[Cs+] XJHCXCQVJFPJIK-UHFFFAOYSA-M 0.000 description 6
- 238000005507 spraying Methods 0.000 description 6
- 239000007795 chemical reaction product Substances 0.000 description 3
- 206010036790 Productive cough Diseases 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 230000036632 reaction speed Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 210000003802 sputum Anatomy 0.000 description 2
- 208000024794 sputum Diseases 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 210000004556 brain Anatomy 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003682 fluorination reaction Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
Landscapes
- Surface Treatment Of Glass (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96128219A TW200907109A (en) | 2007-08-01 | 2007-08-01 | Cascade laminar flow etching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96128219A TW200907109A (en) | 2007-08-01 | 2007-08-01 | Cascade laminar flow etching device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200907109A true TW200907109A (en) | 2009-02-16 |
| TWI352748B TWI352748B (https=) | 2011-11-21 |
Family
ID=44723291
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96128219A TW200907109A (en) | 2007-08-01 | 2007-08-01 | Cascade laminar flow etching device |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200907109A (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112645603A (zh) * | 2021-01-15 | 2021-04-13 | 赣州帝晶光电科技有限公司 | 一种瀑布流式化学蚀刻专用治具及超薄玻璃的制备方法 |
-
2007
- 2007-08-01 TW TW96128219A patent/TW200907109A/zh not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112645603A (zh) * | 2021-01-15 | 2021-04-13 | 赣州帝晶光电科技有限公司 | 一种瀑布流式化学蚀刻专用治具及超薄玻璃的制备方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI352748B (https=) | 2011-11-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |