200902406 九、發明說明： 【發明所屬之技術領域】 本么明係關於振動式搬送裝置，特別是關於可適用於大 里搬送小型電子零組件（electronic components)時之振 動式搬送裝置的構造。 【先前技術】 -般’為了搬送電子元件等之小型零組件，在工廠内被 使用f種振動式搬㈣置。近年來此種振動式搬送裳置被 要=冋仏、.、α速度與尚供給精確度，而高速化及高性能化係 =田各之；^。X ’如上述之電子元件的供給場所，因被併 -又必/員有间精碟度之封裝（_nt ing)裝置及其他處理裝 :，因此，其被指摘有因振動式搬送裝置的振動而影變到 5動作的問題點。因此，從以前即被提議各種使 方'法^讀置所發生之振動儘可能不會傳導至外部的 收之提4中，—般雖係在基台介存橡勝或彈簣而吸 之振動一為了抑制自振動式搬送褒置漏出至外部 者。例如，曾被倡議藉-對彈性支持彈 件之一端連2台和搬送體’同時’使加振體的壓電元 牛之^連接至搬送體，並使另—端連接 物），而藉慣性體之反作用使搬送 置=重 參照以下專利文獻…)。又，也4二如’ 接且古-yfm丄I 曰破“ °義在基台上連 σ、邓伤之y字型加振體，而在y字—邊&Λ 支持^連接絲送體，且在另-邊的加 97115255 200902406 =:== 重物二使上述二個加振部份反相 裝置（例如，參照以下專利文獻3)。 持力又::曾被倡議藉基台在其中間部以具有支點之態樣支 力 使加振體的支點之一側連接至搬送體，而在 =簽照以下專利文獻4)。除此以外，也有以彈性^ =接搬送體與加振體之-側，同時使加振體之另一側連 而在此慣性體和基台之間再包： 、肢之衣置（例如，參照以下的專利文獻5、6、7 9 ) 6為人所知。在此等各振動式搬送裝置中，#由 -置被連接至加振體的慣性體（重物）時 二： 月& 反相振動，因此，其具有可抑制以 里被傳達至基台之優點。 (專利文獻1)日本專利特開2〇〇2_3〇2232號公報 (專利文獻2)日本專利特開平10-203624號公報 (專利文獻3)日本專利特開平6-345238號公報 (專利文獻4)日本專利特開平8_1〇8917號公報 (專利文獻5)曰本專利特開平9-142630號公報 (專利文獻6)日本專利特開平3-51210號公報 (專利文獻7)日本專利特開平4_153119號公報 (專利文獻8)日本專利實開瀬9號公報 (專利文獻9)日本專利實開平η瀬 【發明内容】 ％ (發明所欲解決之問題） 97115255 200902406 至=體在各二置中，搬送體藉由加振體而被連接 接二”因:7 於其藉由彈性支持體而被連 土口因此〜、不能充份地抑制自搬 動能量的流動（上述專利文獻〗、2及 之振 其可使振動能量之流出減低，但對加振料 =使用特殊的構造及形狀，而使製造成本增加，且=搬送 物必須調整振動特性等， #搬达 之情形（上述專利文獻3及4柔軟因應於狀況或環境 ^ )，又，由於被連接至加振 體之if ! 生體（重物）错由彈性支持體而 其基本上和以往藉由橡膠或 、、土口上， 同樣的狀況，因為振動能量的流;上，置基台為 基二之# 士 & 町，爪出狀況主要藉由慣性體和 基口之間的每性支持體之彈性特性而 能使傳達至設置面之垢叙处曰 因此’其有不 5、6 7 « 能4充份減低（上述專利文獻 5、6、7、8及9)之問題點。 判又馱 例如，在上述專利文獻 ― 振體之一邊的加捃^八〇 I、已揭不在Υ字型的加 違0加振口 Η刀和另_邊的加 數=:::=，，…在加振體= 振體例如墨電體破裂等受損傷的負載’而有加 而可提高其振動效率，同時二，動…外部之流出 式搬送裝置。 $對加振體可減輕負裁之振動 (解決問題之手段） 97115255 200902406 鑑於該實情，本發明之振動式搬送m且 其 台；被配置於上述基台上方之第ϋ 土 搬达體振動之加振體（vibratlngbody);被連接至上 1搬送體與上述加振體的一側部份 — ^ M 't 7Χ » ^ 間之弟〗彈性支持 體，被連接至上述加振體的另_側部份 端之慣性體；及，被連接至上诚其A t #成振動的自由 ^ Ά b 'f ^ ;L 土 σ舁上述加振體的一側 上述弟1彈性支持體之間之第2彈性支持體.而i :=其更具備有:第2搬送體;及，第3=二其 被連接在該第2搬送體以及上述加振體之上：一持二 份、上述第1彈性支持體及上述第2彈性 α貞’邛 根據本發明，加振體並 持體之間。 動，而係使在第i彈性支㈣及第t限制地使搬送體振 性支持俨a及第3弹性支持體與第2彈 性支持體的連接部位及慣性體 體的反作用0*eact_則較不會= = =，因此，搬送 外邱泣山+把# 得違至基台’而可減低對 卜:|且可提高振動之擴散效率，同時：盆 比以彺的振動式搬送裝置由於第丨 、- 可成為正確地沿著搬送方向之方向 樣而 向之振盈亦可被減低而可提高搬送效率。又士下方 的自由端之慣性體及，第i彈性支持體 辰動 及第3彈性支持體的連接 f 2弹性支持體 兩側各別成為被連接至自由度較高的 广： 二=體其可使負载集中緩和，而複：： 容易，且可提高裝置的安定性或耐而久=裝置之設計變成 97115255 200902406 在本發明中’上述第丨彈性支持體及上述第3彈性支持 體!^相反方向傾斜之姿勢安裝較佳。根據此-構成，由 第1搬it體與第2搬送體而可相互地在相反方向搬送 々.且件例如，在途中可一面排除不良零組件另一面於單 1向i、、’、0零組件，且使被排除的零組件送回至相反方向亦 變f可能，因此可實現高速地供給零組件。此處’其對上 f弟1搬送體被平行設置上述第2搬送體，而構成可以用 设在上述第1搬送體之排除部來接受被排除的搬送物，如 此較佳。 〜2發明中’在上述第1搬送體及上述第2搬送體的搬 达向則後離開之2個部位各別設置上述加振體、上述第 體而上述第2彈性支持體及上述第3彈性支持 :後之上述加振體和共通的上述慣性體—起連 位可2較佳。根據此一構成’在搬送方向離開之2個部 2個:支持第1搬送體及第2搬送體，同時，在該 位各別連接加振體，如此而可提高搬送性能。又， ::使:應於上述2個部位之2個加振體連接共通：丄 “ J=早—之振動系統（共振系統）而使振動特性 耐久性，：:振動系統的剛性’同時，可提高各部份之 性又’也可使裝置全體小型化。 在本發明中，上述第J彈性支持體 體及上述第3彈性支持體具有C持 所成之各彈性支持體而具有共通的寬度;== 彈性體’如此較佳。根據此一構成，如；板狀的 星m士咖…... *由板狀的彈性體 搬 97115255 200902406 Ο :方::振動以外的不必要之振動成分減^ 上述—側部份之上方之上述另—側部份被配置成在 另—側部份被配置成在如此幸父佳。藉由使加振體的 搬送體的位置可上方時’則由於在接近 要的振動成體，因此，其可抑制搬送時除必 因該不必要的輕不必要的振動模態，同時，可抑制 加。又，由Λ/ 所向基台㈣出的振動能量之增 抑制不2 搬送體的位置被配置慣性體，盆可 性體之質量及體積增加的優點。 …十也有使慣 的明中’如使上述慣性體配置於和上述加振體重Α 加：：=7據此一構成’藉由使慣性體配置於二 範圍時’則由於可使慣性體和加振體在 一二?：型化’因此，其可-面確保既定的性能另 面使裝置的高度減低。 力 述5=2上述加振體及上述第1彈性支持體、上 述第3彈性支持體之間介存有連接 ::對! ΐ構件對上述加振體的連接位置，相對於連接 彈性支持體、上述第2彈性支持體及上述 平f支持體之連接位置’係被配置於上述基台侧，如 此為佳。根據此-構成’其可提高包含加振體之振動系統 ?第1搬送體及第2搬送體之間之振動結合的強度，同 時’可使裝置構成較低且小型化。 ^ 【實施方式】 97115255 10 200902406 以下用圖示例一起說明本發明之實施形態。圖丨表示本 實施形態之振動式搬送裝置220的第1搬送體構成部份之 搬送塊體221B及第2搬送體構成部份之搬送塊體222B被 •移去後的狀態之前視侧概略斜視圖，圖2係該背面侧斜視 •圖，圖3係該前視圖，圖4係該背面圖，圖5係該右侧視 圖，圖6表示振動式搬送裝置之構成例的概略平面圖。 本實施形態之振動式搬送裝置220，其具備有：其么 ^ 221 ;被配置於此基台221的上方之第丨搬送體222χ (來 照圖6，其由圖1及圖2所示之槽（trough)222A及圖6所 示之搬送塊體222B所構成）；可使第丨搬送體222χ振動 之加振體223 ;被連接在加振體223的一側部份（下端） 之連接構件224 ;被連接至搬送體222與連接構件224之 間之第1彈性支持體225 ;被連接至加振體223的另一側 部份（上端），而構成振動之自由端的慣性體2% ;及， 被連接至連接構件224與基台221之間之第2彈性支持 〇 227。 、 又，在連接構件224之側部（背面侧）被連接固定延長 構件228’在該延長構件228其被連接第3彈性支持體229 之一端（下端），而此一第3彈性支持體229之另一端（上 端）則被連接至第2搬送體222Y(參照圖6,其由圖i及 .圖2所示之槽222C與圖6所示之搬送塊體222])所構 成。）。槽222A與222C被平行設置成大致等高。藉由此 等槽222A、222C而第1搬送體222X與第2搬送體222γ 也大致被平行設置。又，如圖6所示，在第！搬送體222χ 97115255 11 200902406 上形成有直線狀的供給軌道222a，而在第2搬送體222Y 上則形成有直線狀的回收軌道222b，供給執道222a與回 收軌道222b係被構成平行狀。此處，在本實施形態下， . 被設在第1搬送體222X之供給執道222a及被設在第2搬 送體222Y之回收軌道222b係被構成互相在相反方向搬送 零組件。 加振體223係例如以壓電元件所構成。具體而言，此壓 電元件，係在彈性板的正反兩面各別形成壓電體層，藉在 此等壓電體層外加予既定的電壓而構成屈曲狀之雙壓電 (b i morph)型壓電元件。當然，如僅在彈性板的單面形成 壓電體層之單壓電型壓電元件亦可。此等壓電元件，可藉 由自外部供給既定頻率的交流電力而在該頻率下彎曲及 振動。 在本實施形態中，於搬送方向相隔離之前後2個部位， 各別設置上述第1加振體223、連接構件224、第1彈性 I 支持體225及第2彈性支持體227之組群。亦即，在前後 2個部位藉由第1彈性支持體225及第2彈性支持體227 彈性支持第1搬送體222X。 又，被配置於搬送方向前方之加振體223被設在前方之 . 第1彈性支持體225之後方，且被連接至配置在後方的慣 性體226 ;而被配置於搬送方向後方之加振體223則被設 在後方之第1彈性支持體225的前方，且被連接至配置在 前方之慣性體226。亦即，慣性體226被配置在2組加振 體223之前後方向的中間，且2組加振體223 —起被連接 97115255 12 200902406 至共通的慣性體2 2 6。 ^性體m係具有··被連接至加振體m之慣性板 $，被固定於此慣性板226A之慣性塊體226B;而 .^上部^性板226A的下方慣性塊體226β被懸吊而被固 •定，如此所構成。慣性板226A被鄰接配置於搬送體222χ 之正下方，且慣性塊體226b自慣性板226a 方’且位於和加振體223同等高度之範圍。大出向下 G 第1彈性支持體225及第2彈性支持體227 彈性體，例如是妬骚较结Ί J句板狀的 #拉辦997、 頁。第彈性支持體225及第2彈性 ' 被沿著連接方向而配置。藉此，兩彈性支持體 Μ1與第1搬送體222Χ之間具有類似於以單-個 二，性體所構成之情形相似的支持特性。亦即，如第1 偏雜持體Μ5及第2彈性支持體227各被設在前後方向 偏離之位詈日羊，目丨丨政1 i >7 Π 來的輕動方：體223的姿勢呈正交而和本 ΐΐίΐΐ 方向之不必要的振動模態（例如，在上 特性會有惡 線其被配置兩彈性支持體；25、2心 振動模態之發生。又…、…才W了抑制不必要 ^i ^^ ^ 上述各弹性支持體相似，第3彈 ?=之二置成具有和連接方向呈正交之共通直線 千線）之寬度方向的姿勢。因此，一 各板彈簧全部均為且有丑、g官“ 振H克内的 P. , /、有7、通寬度方向之姿勢，因此，苴可 防止不必要振動模態之發生。 口此/、了 又，上述兩彈性支持體225、227之共通的直線，被構 97115255 13 200902406 成為和加振體223之延長方向呈平 振艚？Μ J稽此其可使和加 振體223的延長方向（沿著板面方向）呈 曲振動有效地傳達至第i彈性支 向的弓 第1搬送體222X振動。在本實施η ’而可有效地使 咖於水平方向料在上7藉對搬送越 動，而構成可沿著搬送方方向的振 ^未圖不之零組件搬送者。因此，為了有效地傳達此一振 斜之方向延伸的姿勢==成在讀方向稍稍傾 „ 而且使弟1彈性支持體225为笛9 彈性支持體227成為和其平行方向延伸的姿勢。 體：=Γ3之下端被連接至連接構件224，而加振 性體慣性體226，如此則可容易地使慣 體226接近第！搬送體2m，因此，其 搬送體222Χ和慣性體挪所生之力矩，而_ 率，必要振動模態之產生。又，由於^ 別14塊體226β)被重叠配置在加振體223之高度範 圍’因此二即使慣性體226的質量及體積變大，也可=裝 置220在高度方向構成小型化。 又 如以上所構成之裝置22〇，當在加振體如賦予交流· 力而發生_曲振動時，在加振體223之兩側，連接: 224與慣性體226則會在加振體223的彎曲方向 接構件224之振動藉由基台221作為支點之第^彈梏 體225及第2彈性支持體227而被放大，而在第）搬送辦 2221上發生振動。又，在振動的自由端之慣性體— 97115255 200902406 發生具有和連接構件224呈反相的振動相位之振動。又， 第1搬达體222X (及第2搬送體222Y)及慣性體226係 以反相振動者。 ’' • 又，在本實施形態中，連接構件224藉由延長構件228 •而被連接至第3彈性支持體229上，經由此一第3彈性支 持體229而第2搬送體222γ則成為可振動之構造。亦即， 第1搬送體222Χ和第2搬送體222Υ，在上述振動系統中 (被平行連接，基本上為以同一態樣振動。但是，雖然第^ 彈性支持體225在供給方向之相反側傾斜而第丨搬送體 222X接受向供給方向斜上方之振動，如此之構成，但相 反地第3彈性支持體229則在第1彈性支持體225的相 反側（和回收方向相反側）傾斜，藉此而第2搬送體222γ 則接受和供給方向相反側的回收方向朝斜上方之振動。例 如，當第1彈性支持體225卩3〜15度左右在供給方向之 相反侧傾斜時，則第3彈性支持體229也以3〜15度左右 t在回收方向之相反側（供給方向）傾斜，如此為佳。 在本實施形態中，其和以往的振動式搬送裝置不同者， =使加振體223之一端各被連接至第！彈性支持體225 :'、弟2彈性支持體227，同時’使加振體223之另一端則 •連接至慣性H 226，如此加振體223之—端並不直接且益 •限制地使第1搬送體222X成為振動之構造，因此盆可確 認沿著搬送方向第i搬送體222χ之振動可正維地發生， =上下方向的振盈也被減低。亦即，當以高速錄影機攝影 寺，以往的搬送裝置，其零組件的搬送姿勢有左右不均， 97115255 15 200902406 :戈在上下振盪’或零組件有時會在相反方 形，但在本實施形態中’則1穴 寻之情 送方向正確地被搬送。因此規律地朝向搬 ;丈::也傳達’且零組件之撤送方向也較容易整齊一致： 可使搬送速度提高。 β致且 又，基台221藉由第2彈性支持體227被連接至漳桩# 請，而在此一連接構件224,其藉由構 225被連接至第！搬送體2m 寺體 9 9 Q甘、木^ , J ’ 由於猎由加振體 223其被連接粬性體226，因此，其變 之振動要素被連接在一起，处果 目振動 達之輕動处旦、^ (、·、。果，其可使對基台221所傳 逆I振動月匕1減低，因而斟齟垃 對郇接裝置因為振動所發生之不 良衫a可被減低，同時可抑制噪音之產生。 狀戈構形悲中’由於不須要使用具有特殊複雜形 丄+ 弟1彈性支持體225、第2彈性 及第3彈性支持體229,因此，其可使製造成 在圖示例中加振體m、第i彈性支持體挪、 弟弓早性支持體227及第3彈性支持體229任一者均為以 板狀體所構成。 本案^月人等以則曾建議使連接至第2搬送體挪Y之 第3彈性支持體229被連接至慣性體⑽之構造。此一構 l雖^也可對第2搬送體222γ傳達振動，但慣性體⑽ 、、不是僅在搬送方向往復振動，而是在該往復振動中，以 重。為中〜作往復旋轉再加上往復振動的態樣（如脫殼運 動之振動態樣）’因此，上述構成已被判明其難以使搬送 97115255 16 200902406 物有效地對-邊侧搬送。亦即，在此振動態樣中即使將零 組件配置於慣性體226上的圖3之左右任一側，該零崎 則^時常被移動至重心側（中央部）。相反地，如本實施 形恶般在連接構件224上連接第3彈性支持體229時，則 根據第3彈性支持體229的傾㈣度方向其可確實地將搬 送物搬送。 在本實施形態中，由於藉由第（彈性支持體m鱼第3 彈性支持體229對連接構件224平行連接们搬送體2m 及第2搬送體222Υ，因此，在加振體m上會加予大的 負載（load)。但是在本實施形態中，由於加振體223之一 側部份被連接至第1彈性支持體225與第2彈性支持體 227之間（亦在第3彈性支持體229之間），另一側部份 則被連接域成㈣的自自端之㈣體，因此加振 體M3之兩側則被連接至結合力弱的可動部份，因此，其 可爰矛負載木中在加振體223上，因而可防止加振體223 之損傷。 又，在本實施形態中’如圖i至圖4所示，由於連接構 件224對加振體223的一侧部份（下端）相對地被連接在 下方’而相對於第1彈性支持體225、第2彈性支持體227 (及第3彈性支㈣229 )則相對地被連接在上方，因此， 其可使裝置的高度減低’且可提高加振體223和第i搬送 體222X (及第2搬送體222γ)之振動結合的程度，且可 有效率也將連接構件224之振動傳達至第！搬送體222χ (及第2搬送體222γ)。具體而言，在本實施形態中，連 97115255 200902406 Ϊ,: 224及第1搬送體222X(及第2搬送體222”，雖 動疋亦^目，/旦笛其被構成可以具有大約同等振幅之態樣而振 _ . 1彈性支持體225(及第3彈性支持體229 ) 接i件m Γ間部以具有振動的節點(n〇de)之態樣使連 勒者 /、第1搬送體222x (及第2搬送體222Y)振 以此-態樣振動時’則可有效地將搬送物搬送。又， 222Y及第3彈性支持:表示未設有第2搬送體 同樣者。 支持組229打之振動態樣其基本上也是 目5所示’帛1彈性支持體225及第3彈性支持 产：223及第2彈性支持體227被構成為寬 ====體225及第3彈性支持 羊^大日守’則由第1搬送體222X、第2搬 送體聰、加振體223、連接搆件224、第i彈性 貝性體226及第3彈性支持體229所成的振動系統 1因：振動’其對基台221振動能量的漏出則無法降 29=生】：第1彈性支持體225及第3彈性伽 率尸牛低，而與第2彈性支持體227取得平衡， 々此之構成％ ’則對基台22η則的振動能量之漏出即可降 低’而在上述振動系統中則可產生有效之搬送力。 在此裝置220中’於第2搬送體2m的搬送方向前後 被設有二個第3彈性支持體2 2 9，而用此等二個第3彈性 支持體f9以彈性支持第2搬送體222Υ。第2搬送體222γ 和上述第1搬廷體222Χ被平行配置，而在第丨搬送體“Μ 97115255 18 200902406 的側方與第1搬送體222X之妒详古a、木 太音1由心 Ζλ之搬达方向被平行地配置。在 本貫Μ態中，Μ 1彈性支持體225和第3彈性支持體 229具有大致同等長廣，而料處从，禾ύ泮〖生支持體 對應於此，槽222Α愈222C氺 被配置成大致同等高度。~ ，、以2C也 為不同的高度。 仁疋才日⑽與挪也可構成 此處，因應於零組件之搬送態樣其可採 送塊體222Β和222D。例如，^ R μ 田稱成之搬 β例如如圖6所示之例’在第2搬 、/ 圖6所示，回收軌道222b被配置於比第j 般送體222X上如圖6所示的供給執道22 在供給軌道222a上被搬逆之稠下方而 部Υ所排除的零組件（例如，不良㈣u 時，則可落下至回收執道222b。 〜）被排除 226又之，如在連接構件224與慣性體 - 垂直之姿勢予以安裝加振體223，如此亦 大致太单“ Γ貝性體226的振動方向成為 大致水千，如此則可將慣性體跳的振動和第2 222Υ的振動之間的角度差以及連接構件2 搬送體222Χ的振動之間之自庳$ 動和弟1 网角度差的不平衡現象降低。 圈件供給系統2GG中，台錢3被藉由線 圈弹贯或防振橡膠等適當的防振手段良 台2〇1上，而在此台座2〇3上， ^裝在故置 組件搬误壯罢9 1 η、 ^破°又置她型的振動式零 、衣 以及上述振動式零組件搬送裝置"ο ^動式零組件搬送裝置21〇具有具備螺旋狀搬^〇道 心之碗狀的搬送體川，而此一搬送體2]1被設在^ 97115255 200902406 示之旋轉振動機上。 〜在上述搬送執道211a上進行上升之零組件被以零組件 乂接。卩X而搬至上述供給執道22%上，而在供給軌道Μ% 上/、面被搬送至圖不右側，另一面未成為既定姿勢之零 組件則由零組件排除部γ朝向回收執道㈣上被排除， 而在回收執道222b上朝圖示左側搬送。在回收軌道22加 上被搬送之零組件在零組件返回部z回到搬送體211上， 而沿著搬送軌道211 a被搬送。 又，本發明之振動式搬送裝置並不受限於上述圖示例， 要不脫離本叙明之意旨範圍内其可施加各種變更。例 如’第1彈性支持體與第2彈性支持體以一體彈性構件構 成，或在此彈性構件㈣當部位將連接構件或加振體連 接，如此所構成亦可。又，上述實施形態中，雖然使第工 搬送體222X之搬送方向及第2搬送體222γ的搬送方向構 成相反方向，但本發明並不受限於此一態樣，例如，兩搬 达體之搬送方向構成同一方向亦可，又，3個以上的搬送 體被併設亦可。 ' 【圖式簡單說明】 圖1係本發明之實施形態的振動式搬送裴置之正 斜視圖。 圖2係該實施形態之振動式搬送裝置的背面侧斜視圖。 圖3係該實施形態之前視圖。 ° 圖4係該實施形態之背面圖。 圖5係該實施形態之右侧視圖。 97115255 20 200902406 圖6表示包含該實施形態之振動式搬送裝置的零組件 供給系統之全體構成的平面圖。 【主要元件符號說明】 200 零組件供給系統 201 設置台 202 防振手段 203 台座 210 振動式零組件搬送裝置 211 搬送體 211a 搬送轨道 220 振動式搬送裝置 221 基台 221B 搬送塊體 222 搬送體 222A 、 222C 槽 222B 、 222D 搬送塊體 222a 供給執道 222b 回收執道 222X 第1搬送體 222Y 第2搬送體 223 加振體 224 連接構件 225 第1彈性支持體 226 慣性體 97115255 21 200902406 226A 慣性板 226B 慣性塊體 227 第2彈性支持體 228 延長構件 229 第3彈性支持體 X 零組件交接部 Y 零組件排除部 Ζ 零組件返回部 97115255 22。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 [Prior Art] In order to transport small components such as electronic components, the vibration type (four) is used in the factory. In recent years, such vibrating conveyors have been required to provide 精确, ., α speed and accuracy, while high-speed and high-performance systems = Tian Zhizhi; X', as described above, is a supply place for electronic components, and is required to be equipped with a _nt ing device and other processing equipment. Therefore, it is referred to as vibration of the vibrating conveyor. And the shadow changed to the point of the 5 action. Therefore, it has been proposed from the previous generation that the vibrations generated by the various methods are not transmitted to the outside as much as possible, although they are sucked on the abutment by the rubber or the impeachment. The vibration is used to suppress leakage from the vibrating transport device to the outside. For example, it has been proposed to borrow - one of the elastic support members to connect two units and the transfer body 'at the same time 'to connect the piezoelectric element of the vibration body to the transport body and to make the other end connection) The reaction of the inertial body causes the transfer to be placed under heavy reference to the following patent documents...). Also, 4, such as 'connected and ancient-yfm丄I 曰 “ ° ° ° 在 在 在 基 、 、 、 、 、 、 、 、 、 、 、 、 邓 、 、 邓 邓 邓 邓 邓 邓 邓 邓 邓 邓 、 邓 、 、 、 、 、 、 、 、 、 、 Body, and added on the other side 97115255 200902406 =:== Heavy object 2 makes the above two vibration inverting parts inverting device (for example, refer to the following Patent Document 3). The force is again:: was proposed to borrow the base station In the middle portion thereof, one side of the fulcrum of the vibrating body is connected to the transport body with the fulcrum of the fulcrum, and the following Patent Document 4) is attached to the yoke. In addition, there is also an elastic ^= transporting body and The side of the vibrating body is coupled, and the other side of the vibrating body is connected to be re-enclosed between the inertial body and the base: (see, for example, the following Patent Documents 5, 6, and 7 9) 6 is known. In each of the vibrating transport apparatuses, when the inertia body (heavy object) connected to the vibrating body is connected to the vibrating body, the second: moon & anti-phase vibration, therefore, it is suppressed (Patent Document 1) Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei 10-203624 (Patent Document 2) Japanese Patent Laid-Open No. Hei. No. Hei. No. Hei. No. Hei 9-142630 (Patent Document 5). Japanese Patent Laid-Open No. Hei 9-142630 (Patent Document 6) Japanese Patent Laid-Open No. 3 Japanese Laid-Open Patent Publication No. Hei No. 9-153119 (Patent Document 8) Japanese Patent Publication No. 9 (Patent Document 9) Japanese Patent Application No. 瀬 发明 [Abstract] % (Invented by the Invention) The problem is 97115255 200902406 to = body in each of the two sets, the transport body is connected by the vibrating body to connect two" because: 7 is connected to the earth by the elastic support, so it can not be fully suppressed The flow of self-moving energy (the above-mentioned patent documents, 2 and vibrating can reduce the outflow of vibration energy, but the use of a special structure and shape for the vibrating material is increased, and the manufacturing cost is increased, and the conveyance must be adjusted. Vibration characteristics, etc., the case of moving (the above-mentioned Patent Documents 3 and 4 are soft depending on the situation or the environment), and, because of the fact that the body (weight) connected to the vibrating body is wrongly supported by the elastic support Basically and by the past by rubber On the earth's mouth, the same situation, because of the flow of vibrational energy; on the top, the base is the base of the #士&, the claw-out condition is mainly due to the elasticity of the support between the inertial body and the base. The characteristics can be conveyed to the surface of the installation surface, so that it has a problem that it can not fully reduce (the above-mentioned Patent Documents 5, 6, 7, 8, and 9). In the above-mentioned patent document - one side of the vibrating body, the 捃 〇 〇 、 、 、 、 、 、 、 、 、 已 已 已 已 已 已 已 捃 捃 捃 捃 捃 捃 捃 捃 捃 捃 捃 捃 捃 捃 捃 捃 捃 捃 = = = = = The vibrating body = the damaged load such as the rupture of the vibrating body, etc., can increase the vibration efficiency, and at the same time, the external outflow type conveying device. $ Vibration-reducing body can reduce the vibration of the negative cutting (means for solving the problem) 97115255 200902406 In view of the fact, the vibrating transport m of the present invention has its table; the vibration of the earthmoving body disposed above the base plate a vibrating body (vibratlngbody); connected to the upper one of the transport body and the side of the vibrating body - ^ M 't 7Χ » ^ between the elastic support body, is connected to the other side of the vibrating body The inertial body of the partial end; and, connected to the upper part of the Akt # vibration of the vibration ^ Ά b 'f ^ ; L soil σ 舁 the side of the above-mentioned vibrating body the second between the above-mentioned brother 1 elastic support Elastic support: i:= further includes: a second transport body; and 3=2 is connected to the second transport body and the vibrating body: one share, the first elasticity The support and the second elastic α贞'邛 according to the present invention, the vibrating body is held between the bodies. The movement of the first and second elastic supports (4) and the t-th restraint causes the transfer body vibration support 俨a and the connection between the third elastic support and the second elastic support and the reaction of the inertial body 0*eact_ It is less than = = =, therefore, the transfer of Waiqiu Weeping Mountain + ## violates the abutment' can reduce the difference:|and can improve the diffusion efficiency of vibration, and at the same time: the basin is more vibrating than the 搬The third and the - can be accurately oscillated along the direction of the transport direction and can be reduced to improve the transport efficiency. The inertial body of the free end below the jib and the connection of the i-th elastic support body and the third elastic support body f 2 elastic support bodies are respectively connected to a wide degree of freedom: two = body The load concentration can be moderated, and the complex: is easy, and the stability or durability of the device can be improved. The design of the device becomes 97115255. 200902406 In the present invention, the above-mentioned third elastic support body and the above third elastic support body ^^ It is preferable to install in a posture in which the opposite direction is inclined. According to this configuration, the first transfer body and the second transfer body can be transported in opposite directions to each other. For example, the other side of the defective component can be excluded in the middle of the single direction, i, i, ', 0. It is also possible to return the excluded components to the opposite direction, so that the components can be supplied at a high speed. Here, it is preferable that the second transport body is disposed in parallel with the transport body of the upper body, and the transport object that can be removed by the exclusion portion provided in the first transport body can be configured. In the second aspect of the invention, the vibrating body, the first body, the second elastic support body, and the third member are separately provided at two locations separated from the first transport body and the second transport body. Elastic support: The above-mentioned vibrating body and the common inertial body are preferably two. According to this configuration, two of the two units that are separated in the transport direction support the first transport body and the second transport body, and the vibrating body is connected to each other in this position, so that the transport performance can be improved. In addition, :: the two vibrators in the above two parts are connected in common: J "J = early - the vibration system (resonance system) and the vibration characteristics are durable, :: the rigidity of the vibration system" In the present invention, the J-elastic support body and the third elastic support have a C-supported elastic support body and are common to each other. Width; == Elastomer 'is so good. According to this composition, such as; plate-shaped star m s... ...... by plate-shaped elastic body moving 97115255 200902406 Ο : square:: unnecessary vibration The vibration component is reduced. The above-mentioned other side portion above the side portion is configured to be disposed in the other side portion so that the position of the moving body of the vibrating body can be above. 'Because it is close to the desired vibration, it can suppress the unnecessary unnecessary light vibration mode at the time of transportation, and at the same time, it can suppress the addition. Also, from the Λ/ to the base station (4) The increase in vibration energy is not inhibited. 2 The position of the transport body is configured with an inertial body. The advantages of mass and volume increase of the body. ... Ten also have the habit of making the above-mentioned inertial body and the above-mentioned inertial body Α plus::=7 according to this one constitutes 'by placing the inertial body in the second range At the time of 'the inertial body and the vibrating body can be typed in one?: Therefore, the achievable surface can ensure the performance of the device to reduce the height of the device. 5=2 The above-mentioned vibrating body and the above The elastic support body and the third elastic support body are connected to each other: the connection position of the ΐ member to the vibration absorbing body is supported with respect to the connection elastic support body, the second elastic support body, and the flat f support It is preferable that the connection position of the body is disposed on the base side. According to this configuration, it is possible to improve the vibration system including the vibration-increasing body and the strength of the vibration coupling between the first conveyor and the second conveyor. At the same time, the apparatus configuration can be made low and miniaturized. [Embodiment] 97115255 10 200902406 An embodiment of the present invention will be described below with reference to the drawings. Fig. 丨 shows the first transport of the vibrating transport apparatus 220 of the present embodiment. Body part The transport block 222B of the block body 221B and the second transport body is removed from the front view, and the front side is a perspective view. FIG. 2 is a rear side squint view, and FIG. 3 is a front view. The rear view is shown in Fig. 5, and Fig. 5 is a schematic plan view showing a configuration example of the vibrating transport device. The vibrating transport device 220 of the present embodiment includes: 221; The second transporting member 222A above the base 221 (composed of Fig. 6 and the trough 222A shown in Figs. 1 and 2 and the transporting block 222B shown in Fig. 6); a vibrating body 223 for vibrating the transport body 222; a connecting member 224 connected to one side (lower end) of the vibrating body 223; and a first elastic supporting body 225 connected between the transporting body 222 and the connecting member 224; It is connected to the other side portion (upper end) of the vibrating body 223, and the inertial body 2% constituting the free end of the vibration; and the second elastic supporting jaw 227 connected between the connecting member 224 and the base 221 . Further, on the side portion (back side) of the connecting member 224, the extension member 228' is connected and fixed to the extension member 228, which is connected to one end (lower end) of the third elastic support body 229, and the third elastic support body 229 The other end (upper end) is connected to the second transfer body 222Y (see Fig. 6, which is shown in Fig. 2 and Fig. 2, the groove 222C and the transfer block 222 shown in Fig. 6). ). The grooves 222A and 222C are arranged in parallel to be substantially equal in height. The first conveying body 222X and the second conveying body 222γ are also arranged substantially in parallel by the grooves 222A and 222C. Also, as shown in Figure 6, in the first! The transport body 222 χ 97115255 11 200902406 has a linear supply rail 222a formed thereon, and a linear recovery rail 222b is formed in the second transport body 222Y, and the supply lane 222a and the return rail 222b are formed in parallel. In the present embodiment, the supply lane 222a provided in the first conveyor 222X and the collection rail 222b provided in the second conveyor 222Y are configured to convey the components in opposite directions. The vibrating body 223 is composed of, for example, a piezoelectric element. Specifically, the piezoelectric element has a piezoelectric layer formed on each of the front and back sides of the elastic plate, and a bimorph voltage is formed by applying a predetermined voltage to the piezoelectric layer. Electrical components. Of course, a unipolar piezoelectric element in which a piezoelectric layer is formed only on one surface of an elastic plate may be used. These piezoelectric elements can be bent and vibrated at this frequency by supplying AC power of a predetermined frequency from the outside. In the present embodiment, the group of the first vibrating body 223, the connecting member 224, the first elastic I support 225, and the second elastic support 227 are separately provided at two positions before and after the transport direction is separated. In other words, the first transfer body 222X is elastically supported by the first elastic support body 225 and the second elastic support body 227 at two places. Further, the vibrating body 223 disposed in the forward direction of the transport direction is disposed in the front side of the first elastic support body 225, and is connected to the inertial body 226 disposed at the rear side, and is disposed in the rear of the transport direction. The body 223 is disposed in front of the rear first elastic support body 225 and is connected to the inertial body 226 disposed in the front. That is, the inertial body 226 is disposed in the middle of the front and rear directions of the two sets of the vibrating body 223, and the two sets of the vibrating body 223 are connected to 97115255 12 200902406 to the common inertial body 2 26 . The physical body m has an inertial plate $ connected to the vibrating body m, and is fixed to the inertial block 226B of the inertia plate 226A; and the lower inertial block 226β of the upper plate 226A is suspended It is fixed and so composed. The inertia plate 226A is disposed adjacent to the conveyance body 222A, and the inertia block 226b is located at the same height as the vibration insulator 223 from the inertia plate 226a. Large downwards G The first elastic support 225 and the second elastic support 227 are, for example, # 较 较 997 997 Ί 句 句 句 997 997 997 997 997 997 997 997 997. The first elastic support 225 and the second elastic ' are arranged along the connection direction. Thereby, the two elastic support bodies 与1 and the first transfer body 222 are similarly supported by a case similar to the case of a single body and a body. In other words, the first partial heterogeneous body Μ5 and the second elastic support body 227 are each located in the front-rear direction, and the light-moving side of the body is 223. An unnecessary vibration mode in which the posture is orthogonal and in the direction of the ( ΐΐ (for example, in the upper characteristic there is a wick line which is configured with two elastic supports; 25, 2 heart vibration modes occur. Also...,...W It is not necessary to suppress the above-mentioned elastic support bodies, and the third elastic body is set to have a posture in the width direction of the common straight line which is orthogonal to the connection direction. Therefore, all the leaf springs are all and have ugly, g official "vibration H gram inside P., /, there are 7, the width direction of the posture, therefore, 苴 can prevent unnecessary vibration mode occurs. /, Further, the common straight line of the two elastic supporting bodies 225, 227 is configured to be in a direction of extension with the direction of extension of the vibrating body 223, which is the same as that of the vibrating body 223. In the extension direction (in the direction of the board surface), the first vibration of the bow first transport body 222X is effectively transmitted to the i-th elastic direction. In the present embodiment, the horizontal direction material can be effectively borrowed in the upper direction. When the transfer is more and more, it constitutes a component that can be transported along the direction of the transporter. Therefore, in order to effectively convey the direction in which the direction of the oscillation is extended, the posture is slightly shifted in the read direction. 1 The elastic support body 225 is a posture in which the flute 9 elastic support body 227 extends in the parallel direction. The lower end of the body: = 3 is connected to the connecting member 224, and the vibrating body inertial body 226, so that the inertia 226 can be easily brought close to the first! Since the transport body 2m is used, the transport body 222 Χ and the inertia body are generated by the moment, and the _ rate and the necessary vibration mode are generated. Further, since the 14 blocks 226β) are overlapped and arranged in the height range of the vibrating body 223, the device 220 can be miniaturized in the height direction even if the mass and volume of the inertial body 226 become large. Further, in the device 22A configured as described above, when the vibration is generated by applying the alternating current force to the vibrating body, the two sides of the vibrating body 223 are connected: 224 and the inertial body 226 are in the vibrating body 223. The vibration of the bending direction connecting member 224 is amplified by the second elastic body 225 and the second elastic supporting body 227 which are the fulcrums of the base 221, and the vibration is generated in the first conveying unit 221. Further, the inertial body at the free end of the vibration - 97115255 200902406 generates a vibration having a phase of vibration opposite to that of the connecting member 224. Further, the first moving body 222X (and the second conveying body 222Y) and the inertial body 226 are vibrated in opposite phases. In addition, in the present embodiment, the connecting member 224 is connected to the third elastic support 229 by the extension member 228, and the second elastic body 222 γ is made possible via the third elastic support 229. The structure of the vibration. In other words, the first transfer body 222 Χ and the second transfer body 222 Υ are connected in parallel in the vibration system, and basically vibrate in the same manner. However, the second elastic support body 225 is inclined on the opposite side of the supply direction. While the second transporting body 222X receives the vibration obliquely upward in the supply direction, the third elastic support body 229 is inclined on the opposite side (the side opposite to the collecting direction) of the first elastic supporting body 225. On the other hand, the second transfer body 222γ receives the vibration in the recovery direction on the side opposite to the supply direction, and the third elastic force is oscillated on the opposite side of the supply direction when the first elastic support body 225 is about 3 to 15 degrees. It is preferable that the support body 229 is inclined at the opposite side (supply direction) of the recovery direction by about 3 to 15 degrees t. In the present embodiment, unlike the conventional vibrating transport device, the vibrating body 223 is made. One end is connected to the first elastic support body 225: ', the second elastic support body 227, and the other end of the vibration body 223 is connected to the inertia H 226, so that the end of the vibration body 223 is not Direct and beneficial Since the first conveying body 222X is configured to vibrate, the basin can confirm that the vibration of the i-th conveying body 222 is smoothly generated along the conveying direction, and that the vibration in the vertical direction is also reduced. Machine photography temple, the conventional transport device, the moving position of its components is uneven, 97115255 15 200902406: Ge is oscillating up and down 'or components sometimes in the opposite square, but in this embodiment' The sent direction is correctly transported. Therefore, it is moved regularly; Zhang:: also conveys 'and the direction of evacuation of the components is also relatively easy to align: the transport speed can be increased. β and again, the base 221 by The second elastic support body 227 is connected to the raft pile #, and here a connection member 224 is connected to the second transfer body 2m by the structure 225. 9 9 甘,木^, J ' The vibrating body 223 is connected to the inert body 226, and therefore, the vibrating elements are connected together, and the vibrating of the fruit is at a slight vibration, ^ (, ·, . The reverse I vibration month 1 is reduced, so the smashing device The bad shirt a which is generated for the vibration can be reduced, and the noise can be suppressed at the same time. The shape of the shape is sad. 'Because there is no need to use a special complex shape + the younger elastic support body 225, the second elastic and the third elastic Since the support body 229 is manufactured, it can be manufactured in the illustrated example in which the vibrating body m, the i-th elastic support body, the young arch support 227, and the third elastic support 229 are all in the form of a plate. In the present case, it has been proposed to connect the third elastic support body 229 connected to the second transport body Y to the structure of the inertial body (10). This configuration l can also be used for the second transport. The body 222γ transmits vibration, but the inertial body (10) does not reciprocate only in the transport direction, but is heavy in the reciprocating vibration. For the medium-to-reciprocal rotation and the reciprocating vibration (e.g., the vibrational dynamic sample of the unpacking motion), the above configuration has been found to be difficult to transport the object 97115255 16 200902406 effectively to the side. That is, even if the components are disposed on either side of the left and right sides of Fig. 3 on the inertial body 226 in the vibrational dynamic sample, the zero-saw is often moved to the center of gravity (center portion). On the other hand, when the third elastic support 229 is connected to the connecting member 224 as in the present embodiment, the conveyance can be reliably conveyed in accordance with the tilting direction of the third elastic supporting member 229. In the present embodiment, the elastic body m fish third elastic support body 229 connects the transport body 2m and the second transport body 222 to the connecting member 224 in parallel, so that the vibrating body m is added. In the present embodiment, one side portion of the vibrating body 223 is connected between the first elastic support body 225 and the second elastic support body 227 (also in the third elastic support body). Between 229), the other side is connected to the self-end (four) body of (4), so the two sides of the vibrating body M3 are connected to the movable part with weak coupling force, so The load wood is placed on the vibrating body 223, so that the damage of the vibrating body 223 can be prevented. Further, in the present embodiment, as shown in Figs. i to 4, the connecting member 224 is attached to one side of the vibrating body 223. The portion (lower end) is relatively connected to the lower side, and is relatively connected to the first elastic support body 225 and the second elastic support body 227 (and the third elastic support (four) 229), so that it can be connected to the device. The height is lowered and the vibration of the vibrating body 223 and the i-th conveying body 222X (and the second conveying body 222γ) can be increased. The degree of bonding is also effective to transmit the vibration of the connecting member 224 to the second carrier 222 (and the second carrier 222 γ). Specifically, in the present embodiment, even 97115255 200902406 Ϊ, 224 and (1) The transport body 222X (and the second transport body 222) may be configured to have a similar amplitude, and the elastic support body 225 (and the third elastic support body) may be configured to have approximately the same amplitude. 229) When the splicing portion of the i-piece m is vibrated, the first carrier 222x (and the second carrier 222Y) vibrate in this state. In addition, the 222Y and the third elastic support: the same as the second transport body is not provided. The vibration of the support group 229 is basically the same as shown in item 5. '帛1 elastic support The body 225 and the third elastic support body 223 and the second elastic support body 227 are configured to have a width ====body 225 and a third elastic support sheep ^大日守', and the first transport body 222X and the second transport body The vibration system 1 formed by the Cong, the vibrating body 223, the connecting member 224, the i-th elastic shell 226, and the third elastic support 229 is: The leakage of the vibration energy of the stage 221 cannot be lowered. 29: The first elastic support 225 and the third elastic gamut are low, and the second elastic support 227 is balanced, and the composition is %'. In the vibration system, an effective transfer force can be generated in the vibration system of the table 22n. In the device 220, two third elastic members are provided before and after the transport direction of the second transport body 2m. The second body 222 is elastically supported by the two third elastic supports f9. The second transfer body 222γ and the first transfer body 222 are arranged in parallel, and the side of the second transfer body "Μ 97115255 18 200902406 and the first transfer body 222X are detailed", and the wooden sound is 1 by the heart Ζ The direction of movement is arranged in parallel. In the present state, the elastic support body 225 and the third elastic support body 229 are substantially the same length and length, and the material is corresponding to The groove 222 is cured and the 222C is configured to be substantially equal in height. ~ , and 2C is also a different height. The Renhe talent (10) and the movement can also be formed here, and the component can be collected according to the moving state of the component. For example, as shown in Fig. 6, for example, as shown in Fig. 6, the recovery rail 222b is disposed on the j-th delivery body 222X. When the supply channel 22 shown in FIG. 6 is retracted on the supply rail 222a and the components (for example, defective (four) u) are removed, the drop can be dropped to the recovery 222b. Further, if the connecting member 224 and the inertial body are perpendicular to the posture, the vibrating body 223 is attached, which is also Too single "The vibration direction of the mussel body 226 is approximately water thousand, so that the angle difference between the vibration of the inertial body jump and the vibration of the second 222 以及 and the vibration of the connecting member 2 transport body 222 可 can be made. The unbalance of the angle difference between the movement and the brother 1 is reduced. In the ring supply system 2GG, the Taiwanese money 3 is placed on the pedestal 2〇1 by a suitable anti-vibration means such as a coil spring or an anti-vibration rubber, and is mounted on the pedestal 2〇3, Zhuang 9 1 η, ^ broken ° and her type of vibrating type zero, clothing and the above-mentioned vibrating component transport device " ο movable component transport device 21 〇 has a spiral moving bowl The transport body is transported, and the transport body 2]1 is placed on the rotary vibrating machine shown in ^97115255 200902406. The components that are raised on the transfer path 211a are connected by components.卩X moves to the above-mentioned supply channel 22%, and on the supply track Μ%/, the surface is transported to the right side of the figure, and the other side is not the component of the predetermined posture, and the component exclusion unit γ faces the recovery. (4) It is excluded, and it is transported to the left side of the icon on the recycling road 222b. The component to be transported on the recovery rail 22 is returned to the transport body 211 at the component returning portion z, and is transported along the transport rail 211a. Further, the vibrating conveyor of the present invention is not limited to the above-described examples, and various modifications can be made without departing from the scope of the present invention. For example, the first elastic support member and the second elastic support member may be formed of an integral elastic member, or the elastic member (four) may be connected to the connecting member or the vibrating body at the position. Further, in the above-described embodiment, the transport direction of the first transport member 222X and the transport direction of the second transport body 222γ are opposite directions, but the present invention is not limited to this aspect, for example, two transport bodies The transport direction may be the same direction, and three or more transport bodies may be arranged in parallel. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a vibrating transport apparatus according to an embodiment of the present invention. Fig. 2 is a perspective view showing the back side of the vibrating transport apparatus of the embodiment. Fig. 3 is a front view of the embodiment. ° Fig. 4 is a rear view of the embodiment. Fig. 5 is a right side view of the embodiment. 97115255 20 200902406 Fig. 6 is a plan view showing the overall configuration of a component supply system including the vibrating transport apparatus of the embodiment. [Description of main component symbols] 200 component supply system 201 installation table 202 vibration isolation means 203 pedestal 210 vibration type component transfer device 211 transport body 211a transport rail 220 vibrating transport apparatus 221 base 221B transport block 222 transport body 222A 222C slot 222B, 222D transport block 222a supply ramp 222b recovery ramp 222X first transport body 222Y second transport body 223 vibrator 224 connection member 225 first elastic support body 226 inertial body 97115255 21 200902406 226A inertia plate 226B inertia Block 227 Second elastic support 228 Extension member 229 Third elastic support X Component delivery part Y Component elimination part 零 Component return part 97115255 22