TW201434723A - Vibratory conveying apparatus - Google Patents

Abstract

Provided is a vibrating carrier which can reduce reaction applying to an installation surface and, at the same time, facilitate the high frequency made for vibration or the speed up for a carrying speed in a simple structure. The vibrating carrier prepared by the present invention comprises: a pair of vibration isolation springs (13a, 13b) in a plate shape a reference mass body (11) which is supported at a front and a back position in a carrying direction of D by the pair of vibration isolation springs an upper mass body (12A) which is placed in the upper side of the reference mass body a lower mass body (12B) which is placed in the lower side of the reference mass body a pair of upper vibration springs (14a, 14b) in a plate shape, which is elastically in contact with the reference mass body and the upper mass body at the front and back positions respectively in the carrying direction a pair of lower vibration springs (15a, 15b) in a plate shape, which is elastically in contact with the reference mass body and the lower mass body at the front and back positions respectively in the carrying direction and in-phase excitation units (16a, 16b) which applies exciting force in order to generate in-phase vibration in the carrying direction between the reference mass body and the upper mass body, and between the reference mass body and the lower mass body.

Description

Vibrating conveyor

The present invention relates to a vibrating conveyor, and more particularly to a conveying mechanism of a conveying device suitable for conveying a component in a straight line.

In general, the vibrating conveyor is configured to elastically support a transport body on a pedestal via a leaf spring, and to excite the transport body by an excitation mechanism such as an electromagnetic drive or a piezoelectric actuator to generate a transport direction. The vibration is directed obliquely upward, whereby a conveyance such as a member is conveyed along a conveyance path formed on the conveyance body. In recent years, since there are many cases where a small electronic device is used as a conveyed material, and the demand for supplying such a small transported object at a high speed is also increased, in many cases, the following device is required: A device that excites by a driving source to arrange and transport minute conveyed objects at a high speed.

In order to satisfy the demand for such high-speed conveyance, there is a common problem in the vibrating conveying device that the reaction force of the conveying body is transmitted to the setting surface and there are other devices facing the surroundings via the setting. The problem of the risk of the vibrational influence is caused, or the conveying body is vibrated in a direction different from the original vibration direction due to the pitching motion or the like of the entire excitation structure for vibrating the conveying body, thereby causing the conveying speed. Depending on the position of the conveying direction, or the direction of the conveying object is different from the conveying direction The vibration causes the problem that the posture is chaotic.

In order to solve the above problems, one method proposed for the prior vibrating conveying device is to support the vibration system via an anti-vibration spring, and to provide a reaction counterweight for vibrating in a phase opposite to the conveying body in the vibration system ( In the inertial body, the vibration of the reaction body is canceled by the vibration of the reaction weight, and the vibration energy transmitted to the installation surface is reduced (for example, Patent Document 1 below). However, in this configuration, since the center of gravity of the conveying body and the reaction weight is shifted in the up and down direction, the pitching motion is generated in the entire apparatus along with the vibration of the conveying body, thereby causing the conveying efficiency to be lowered, and according to the conveying. The position of the direction causes a change in the conveying speed or a disorder in the conveying posture.

Therefore, a vibrating conveyor that suppresses the pitching motion by reducing the shift between the center of gravity of the conveying body and the center of gravity of the reaction weight is known. For example, a structure in which a balance block disposed below the reaction weight is connected to the transport body (for example, Patent Document 2 below) and a piezoelectric type supported by the vibration-proof spring are known. The vibrating portion is connected to the transport body, and a counter weight is disposed between the piezoelectric vibrating portion and the transport body, and the total center of gravity of the piezoelectric vibrating portion and the transport body is connected to the center of gravity of the weight. The straight line is arranged in parallel with the direction of the vibration applied to the conveyed object (for example, Patent Document 3 below); the movable plate connected to the transport body is elastically supported above the fixed frame supported by the vibration-proof spring, and the movable plate A lower weight is attached to the lower portion, and a fixed weight is connected to the upper side of the holder, whereby the center of gravity of the two is close to each other, thereby suppressing the generation of torque (for example, Patent Document 4 below).

[Previous Technical Literature] [Patent Literature]

[Patent Document 1]: Japanese Gazette, JP-A-2-204210

[Patent Document 2]: Japanese Gazette, JP-A-4-39206

[Patent Document 3]: Japanese Gazette, Special Open 2006-248727

[Patent Document 4]: Japanese Gazette, Special Open 2009-298498

However, in the above-described vibrating conveying device having the reaction counterweight, there is a problem in that the structure is complicated in order to make the center of gravity of the conveying body close to or linearly arranged in the center of gravity of the reaction weight. As a result, the size of the apparatus is increased, the manufacturing cost is increased, and the position of the center of gravity needs to be extremely finely set. Therefore, it is difficult to obtain a sufficient effect at a manufacturing site where the state of the conveyed object or the conveying speed changes. In particular, even if there is only a slight shift in the position of the center of gravity, when the driving frequency is increased in order to enable high-speed conveyance, the pitching motion or the up-and-down motion or the like may become severe and an appropriate conveyance state may not be obtained, so that it is difficult to achieve high frequency. Or high speed delivery.

Therefore, the present invention has been made to solve the above problems, and an object of the present invention is to provide a vibration type that can easily reduce the reaction force applied to the installation surface with a simple configuration and achieve high-frequency vibration or high-speed transmission speed. Conveying device.

In view of the above, the vibrating conveyor of the present invention includes: a pair of plate-shaped anti-vibration springs having a plate surface facing the conveying direction; and a reference mass body at a front and rear position of the conveying direction Supported by a pair of the anti-vibration springs; an upper mass body disposed above the reference mass body; a lower mass body disposed below the reference mass body; and a pair of plate-shaped upper vibrating springs The reference mass body and the upper side mass body are elastically connected to each other at a front-rear position in the conveying direction, and have a plate surface facing the conveying direction; a pair of plate-shaped lower side vibration springs are The reference mass body and the lower side mass body are elastically connected to each other at a front and rear position of the conveying direction, and have a plate surface facing the conveying direction; and an in-phase excitation mechanism for the reference mass body An exciting force for generating in-phase vibration in the conveying direction is applied between the upper mass and the reference mass and the lower mass; in the reference mass, the Providing at least one of the upper mass body or the lower mass body a transport path for transporting the transport object; and the in-phase mass body and the lower side mass body by the in-phase excitation mechanism In-phase oscillation when viewed from the conveying direction, and that the reference mass of the mass body and the upper side of the mass body carried out under phase vibration.

According to the present invention, the upper side mass body and the lower side mass body are elastically coupled to the upper and lower sides of the reference mass body respectively supported by the anti-vibration springs at the front and rear positions in the conveying direction via the vibration springs at the front and rear positions in the conveying direction, and When the exciting force is applied by the in-phase excitation mechanism, the upper mass body and the lower mass body vibrate in phase when viewed from the conveying direction, and the reference mass body and the upper mass body and the lower mass body are reversed when viewed from the conveying direction. Phase vibration.

Therefore, it is possible to reduce the position of the center of gravity of the reference mass body and the total gravity center position of the upper side mass body and the lower side mass body in the up and down direction. Since it is moved, the elimination action of the vibration reaction force of the reference mass body and the upper side mass body and the lower side mass body in the conveyance direction can be improved. Further, when the vibration is performed, since the torque applied to the reference mass by the upper mass and the torque applied to the reference mass by the lower mass are opposite to each other, the rotational direction of the reference mass is caused by the vibration. The reaction forces are canceled or weakened each other, so that the pitching motion (rotational motion) can be suppressed. Therefore, the reaction force transmitted to the installation surface via the vibration-proof spring and the reaction force in the vertical direction are weakened, and it is possible to suppress the vibration energy from leaking to the installation surface via the vibration-proof spring. Further, by suppressing the pitching operation, even if the frequency is high, the vibration is not easily disturbed, and the posture of the conveyed object is stabilized. Therefore, high-speed transport can be realized, and the transport speed or transport attitude of the transported object along the transport path can be improved. Uniformity of delivery status.

In the present invention, it is preferable that the in-phase excitation mechanism includes an upper excitation unit and a lower excitation unit, and the upper excitation unit directly applies the excitation between the reference mass and the upper mass. The force, the lower side excitation unit directly applies the exciting force to the reference mass body and the lower side mass body. Thereby, the transmission is directly applied to the upper excitation unit and the lower excitation unit, and the entire configuration of the device can be simplified, and the adjustment of the in-phase excitation mechanism can be easily performed depending on the situation.

In this case, it is preferable that the upper side excitation unit is constituted by a plate-shaped upper piezoelectric driving unit that is inserted into a part of the longitudinal direction of the upper side vibration spring and that faces the conveying direction. The plate surface is flexibly deformed, and the lower side excitation portion is formed of a plate-shaped lower piezoelectric driving portion, and the lower piezoelectric driving portion is inserted into a part of the lower side vibration spring in the longitudinal direction. The plate surface facing the conveying direction is flexibly deformed.

Thereby, the upper piezoelectric driving portion and the lower piezoelectric driving portion are inserted into a part of the upper vibrating spring and the lower vibrating spring that are elastically connected between the reference mass body and the upper mass body and the lower mass body, It is possible to apply an exciting force between the reference mass body and the upper mass body and the lower mass body only via the upper vibrating spring and the lower vibrating spring, so that the reaction force in the rotational direction or the transport direction or the up-and-down direction can be more easily performed. The reaction counteracts or weakens. Here, the upper piezoelectric driving portion and the lower piezoelectric driving portion may be formed by laminating at least one of the front surface and the back surface of the plate-shaped elastic substrate having the plate surface facing the transport direction. The structure of the piezoelectric body.

Further, it is preferable that the upper vibration spring is configured to connect the upper piezoelectric driving portion and the plate-shaped upper side amplification spring having the plate surface facing the conveying direction in series in the longitudinal direction. In this case, the upper piezoelectric driving portion may be connected to the reference mass body side with respect to the upper side amplification spring, or may be connected to the upper mass body side. Similarly, the lower vibration spring is preferably configured such that the lower piezoelectric driving portion and the plate-shaped lower side amplification spring having the plate surface facing the conveying direction are connected in series in the longitudinal direction. In this case, the lower piezoelectric driving portion may be connected to the reference mass body side with respect to the lower side amplification spring, or may be connected to the lower side mass body side with respect to the lower side amplification spring.

In the present invention, it is preferable that the upper piezoelectric driving portion and the lower piezoelectric driving portion are constituted by a plate-shaped piezoelectric driving body, wherein the piezoelectric driving body is respectively located at front and rear positions in the conveying direction Combining with the reference mass body, and a portion of the piezoelectric driving body extending upward from the reference mass body forms the upper side piezoelectric driving portion toward the reference mass body The portion extending in the square forms the lower piezoelectric driving portion, and as a whole, is flexibly deformed toward the plate surface in the conveying direction.

With this configuration, the intermediate portion of the piezoelectric actuator that is integrally formed is coupled to the reference mass body at the front and rear positions in the transport direction, and the upper piezoelectric actuator that extends upward toward the reference mass body excites the upper mass body toward the reference. The lower piezoelectric driving portion extending below the mass body excites the lower mass body, whereby the upper mass body and the lower mass body can be easily and reliably vibrated in the same phase. Further, since the upper mass body and the lower mass body can be excited by the integrated piezoelectric actuator, the height of the entire device can be reduced, and the device configuration can be reduced in size. Further, the integrated piezoelectric actuator is one form of the in-phase excitation mechanism described above.

In the present invention, it is preferable that the upper vibration spring is constituted by an upper piezoelectric driving portion and a plate-shaped upper side amplification spring, and the upper piezoelectric driving portion constitutes the upper excitation portion and a front and rear position in the conveying direction. And extending toward the reference mass body and extending upward of the reference mass body, the upper side amplification spring being coupled to an upper end of the upper piezoelectric driving portion and having a plate surface facing the conveying direction; the lower side The vibration spring is composed of a lower piezoelectric driving portion and a plate-shaped lower side amplification spring, and the lower piezoelectric driving portion constitutes the lower excitation portion, and the reference is at a position before and after the conveying direction. The mass body is coupled to extend downward of the reference mass body, and the lower side amplification spring is coupled to a lower end of the lower piezoelectric driving portion and has a plate surface facing the conveying direction.

Further, in the case where the upper piezoelectric driving portion and the lower piezoelectric driving portion are respectively provided at the front and rear positions in the conveying direction, each of the front and rear positions The piezoelectric driving portion is driven in phase when viewed from the conveying direction.

In the invention, it is preferable that the reference mass body is supported by a pair of the anti-vibration springs from below. The support of the reference mass body by the vibration-proof spring can be performed from an arbitrary direction. However, according to this configuration, the installation area of the entire apparatus can be reduced as compared with the case where the reference mass body is suspended or supported from the side surface.

In the invention, it is preferable that the anti-vibration spring, the upper side vibration spring, and the lower side vibration spring are both disposed in an inclined posture toward one side in the conveying direction. In order to provide a conveying force to the conveyed object on the conveying path, the surface of the conveying path may be vibrated toward the one side in a direction obliquely upward. As a method of realizing such a direction of vibration in the oblique direction, the spring structure is formed such that the spring structure is connected in a stepwise manner via a spacer or the like in the longitudinal direction of the spring structure (vertical direction), and the spring is placed in an inclined posture. It is possible to avoid an increase in the number of parts and to easily generate a conveying force.

In the invention, it is preferable that the conveying path is provided on the upper side mass body. By providing a conveyance path on the upper side mass body disposed in the uppermost of the three mass bodies, it is easy to handle the apparatus or the conveyed material during operation.

In the present invention, it is preferable that the mass of the reference mass body is substantially equal to or greater than a sum of masses of the upper side mass body and the lower side mass body. Since the reference mass body and the upper mass body and the lower mass body cancel the relationship of the reaction force in the transport direction (vibration direction), the mass of the reference mass body is substantially equal to the upper mass body and the lower side mass body. The sum of the masses can improve the elimination effect of the reaction force, and the reference is made by using the anti-vibration spring. Since the mass body is supported by the installation surface and the reference mass body is restricted, the mass of the reference mass body is larger than the sum of the masses, and the amplitude of the reference mass body can be suppressed, and the vibration energy can be suppressed from flowing to the installation surface, and the upper side mass can be suppressed. A more stable vibrational shape can also be achieved in the body and the lower mass.

In the present invention, it is preferable that a mass of the upper mass body is substantially equal to a mass of the lower side mass body, a center-of-gravity interval between the reference mass body and the upper side mass body, and a spring constant and the reference mass The center-of-gravity spacing and the spring constant between the body and the lower mass are substantially equal. According to this configuration, the upper mass body and the lower mass body are symmetrical with respect to the inertial mass and the elastic connection form of the reference mass body, so that the torque is cancelled and the pitching motion can be further reduced.

In the invention, it is preferable that the conveying path is linear, and the conveying direction is a direction along a straight line. The present invention is also applicable to a vibration type conveying device including a rotating vibrator and a spiral conveying path provided on the rotating vibrator, and transmits the conveying object along the spiral conveying path by vibration in the rotating direction. In the case where the conveyed object is conveyed linearly along the linear conveyance path, the structure of the apparatus can be easily configured as shown in the later-described embodiment, and the conveyance speed can be easily improved or conveyed. Stabilization of the state in which the above-described rotating vibrator will rotate around a predetermined axis (tangential direction around the axis) as a conveying direction.

In the invention, it is preferable that the piezoelectric actuator has an integral piezoelectric body extending from the bonding position with respect to the reference mass body to the upper and lower sides. In the piezoelectric actuator described above, for example, the elastic substrate can be formed as an integral member and the upper piezoelectric driving portion and the base above the reference mass body can be formed. An independent piezoelectric body is provided in each of the lower piezoelectric driving portions below the quasi-mass body, and an integrated piezoelectric body extending toward the upper and lower sides is provided as described above, whereby the structure can be easily simplified and the manufacturing cost can be reduced. The uniformity of the vibration modes of the upper and lower sides.

In the invention, it is preferable that the upper piezoelectric driving portion and the lower piezoelectric driving portion have a structure that is substantially vertically symmetrical from a bonding position with respect to the reference mass body. According to this configuration, the upper piezoelectric driving portion and the lower piezoelectric driving portion having the symmetrical structure can obtain a symmetrical operation form on the upper and lower sides.

In the invention, it is preferable that the piezoelectric driving body is disposed on both sides in the width direction with respect to the bonding position of the reference mass, and a piezoelectric body is disposed between the bonding positions. By arranging the piezoelectric body and the reference mass body on both sides in the width direction and arranging the piezoelectric body between the bonding positions, it is possible to ensure uniform bonding rigidity on both sides in the width direction with respect to the reference mass body. A stable excitation state is easily achieved.

According to the present invention, it is possible to provide an excellent effect of the vibrating transport apparatus capable of easily reducing the reaction force applied to the installation surface with a simple configuration and achieving high frequency of vibration or high speed of transport.

10‧‧‧Vibrating conveyor

11‧‧‧Base quality body

11a‧‧‧ front part

11b‧‧‧ Rear

12A‧‧‧Upper mass body

12B‧‧‧Bottom mass body

12c‧‧‧Transportation

13a, 13b‧‧‧ anti-vibration spring

14a, 14b‧‧‧ upper vibration spring

15a, 15b‧‧‧ lower vibration spring

16A‧‧‧Upper Piezoelectric Driver

16B‧‧‧Bottom Piezoelectric Driver

16a, 16b, 16a', 16b', 16a", 16b"‧‧‧ piezoelectric actuator

16au, 16bu, 16pu'‧‧‧ upper piezoelectric drive

16ad, 16bd, 16pd'‧‧‧ lower piezoelectric drive

16d, 16d', 16d"‧‧‧ lower connection structure

16p, 16p"‧‧‧ piezoelectric body

16pu"‧‧‧ upper piezoelectric body

16pd', 16pd"‧‧‧ lower piezoelectric body

16s, 16s', 16s" ‧ ‧ elastic substrate

16t, 16t', 16t"‧‧‧ side joint structure

16u, 16u', 16u"‧‧‧ upper connection structure

17a, 17b‧‧‧Upside flare spring

18a, 18b‧‧‧ lower side expansion spring

19a, 19b‧‧‧ spacers

2‧‧‧Base (Setting surface)

B‧‧‧Vibration direction

D‧‧‧Transport direction

F‧‧‧Transportation orientation

F _1A , F _1B , F _2A , F _2B ‧‧‧

M ₁ , M _2A , M _2B ‧‧‧ quality

R _2A , R _2B ‧‧‧ distance between centers of gravity

Φ _2A , Φ _2B ‧‧‧ phase

Fig. 1 is a schematic perspective view showing the entire configuration of an embodiment of a vibrating conveyor of the present invention.

Figure 2 is a side view of the same embodiment.

Fig. 3(a) is a perspective view of the piezoelectric actuator of the same embodiment, (b) is a side view showing a connection state between the piezoelectric actuator and the upper and lower amplifying springs, and (c) is shown in the connected state. The front view of the piezoelectric actuator.

Fig. 4(a) is a perspective view showing an example of another piezoelectric actuator different from the piezoelectric actuator shown in Fig. 3, (b) is a side view showing a connected state, and (c) is a main body of a piezoelectric actuator. view.

(a) and (b) of Fig. 5 are front views showing examples of other piezoelectric actuators.

(a) and (b) of FIG. 6 are front views showing an example of a connection structure between a piezoelectric actuator and a reference mass which are different from the above-described embodiment.

Fig. 7 is an explanatory view showing the constitution of the principle of the present invention.

Fig. 8 is an explanatory view showing the configuration of the principle of the above embodiment.

Fig. 9 is a side view showing a vibration mode at a certain point in time of a simulation operation as a result of modal analysis in the above embodiment.

Fig. 10 is a side view showing the vibration form at other points in the above simulation operation.

Fig. 11 is a perspective view showing a vibration form at a certain point in time of the above simulation operation.

Fig. 12 is a perspective view showing the vibration mode at the other time points of the above simulation operation.

Next, an embodiment of the present invention will be described in detail with reference to the accompanying drawings. Be explained. First, the overall configuration of the embodiment will be described with reference to Figs. 1 and 2 .

The vibrating transport device 10 of the present embodiment includes a reference mass body 11 , an upper mass body 12A disposed above the reference mass body 11 , and a lower mass body 12B disposed below the reference mass body 11 . The reference mass body 11 is supported by the plate-shaped anti-vibration springs 13a and 13b from the lower side at the front and rear positions of the conveying direction D, wherein the plate-shaped anti-vibration springs 13a, 13b respectively have a direction D in the conveying direction (accurately A plate surface that is substantially opposite to the vibration direction B and is the same as the following. The lower ends of the anti-vibration springs 13a and 13b are fixed to the installation surface or to the base 2 disposed on the installation surface.

Here, the front-rear position in the conveyance direction D means two positions which are apart from each other along the conveyance direction D, that is, the front position refers to the position toward the F side of the conveyance, and the rear position refers to the position opposite to the conveyance direction F. . In addition, in the present specification, the "transport direction D" means a direction in which a conveyed object such as an electronic device is transported in the transport path 12c of the vibrating transport device 10, and the so-called "transported direction F" means a transport direction D. The direction in which the above-mentioned conveyed material advances.

Further, the reference mass body 11 and the upper mass body 12A are elastically connected by the plate-shaped upper side vibration springs 14a and 14b at the front and rear positions in the conveying direction D, wherein the plate-shaped upper side vibration springs 14a, 14b have orientations, respectively. The plate surface of the conveying direction D. That is, the upper mass body 12A is supported by the upper vibrating springs 14a and 14b from the lower side at the front and rear positions in the transport direction D.

Further, the reference mass body 11 and the lower side mass body 12B are transported The front and rear positions of the direction D are elastically connected by the plate-shaped lower side vibration springs 15a and 15b, respectively, which have plate faces facing the conveying direction D. That is, the lower mass body 12B is suspended from above by the lower vibration springs 15a and 15b at the front and rear positions in the transport direction D.

Each of the anti-vibration springs 13a and 13b, the upper vibrating springs 14a and 14b, and the lower vibrating springs 15a and 15b is formed in a plate shape as a whole, and the spring constant of the facing surface of each of the springs is low, and the longitudinal direction is The spring constant of the direction in which the objects connected to the upper and lower sides are connected) is high. Therefore, in the illustrated example, the support rigidity viewed from the vertical direction slightly inclined in the longitudinal direction is high, and the rigidity observed from the vibration direction B slightly inclined in the transport direction D is low. Thereby, the support structure between the reference mass body 11, the upper mass body 12A, and the lower mass body 12B is stabilized, and it is easy to maintain the mutual positional relationship, and the conveyance of the direction F for imparting conveyance to the conveyed object is easily generated. The vibration of the force suppresses the generation of unnecessary vibration that does not contribute to the above-described conveying force or the form that hinders the above-described conveyance.

Here, the width of the anti-vibration springs 13a and 13b is made larger than the width of the other springs to increase the support rigidity in the width direction, and the length of the anti-vibration springs 13a and 13b is longer than the length of the other springs, thereby causing the vibration. The elastic deformation of the direction B is easy. Further, the elastic properties of the above springs can also be adjusted according to the material or the thickness of the plate.

In the present embodiment, the upper vibration springs 14a and 14b are respectively configured by a series arrangement of the upper piezoelectric driving units 16au and 16bu and the plate-shaped upper side amplification springs 17a and 17b. The upper piezoelectric driving units 16au and 16bu are respectively configured. A portion of the piezoelectric actuators 16a and 16b that extends upward toward the reference mass body 11, and the piezoelectric actuators 16a and 16b are respectively coupled (connected and fixed) to the front portion 11a and the rear portion 11b of the reference mass body 11, and the upper side The amplification springs 17a and 17b are connected to the upper ends of the upper piezoelectric driving units 16au and 16bu and have a plate surface facing the conveying direction D.

Similarly, the lower vibration springs 15a and 15b are respectively configured by a series arrangement of the lower piezoelectric driving portions 16ad and 16bd and the plate-shaped lower side amplification springs 18a and 18b, wherein the lower piezoelectric driving portions 16ad and 16bd are formed. It is a portion of the piezoelectric actuators 16a and 16b that extends downward toward the reference mass body 11, and the piezoelectric actuators 16a and 16b are respectively coupled (connected and fixed) to the front portion 11a and the rear portion 11b of the reference mass body 11 The side amplification springs 18a and 18b are connected to the lower ends of the lower piezoelectric driving portions 16ad and 16bd and have a plate surface facing the conveying direction D.

The reference mass body 11 has a configuration in which the front portion 11a and the rear portion 11b located at the front and rear positions in the transport direction D are thinned, and are located in the middle portion of the transport direction D between the front portion 11a and the rear portion 11b. The structure in which the upper and lower sides are protruded is thickened. The intermediate portions in the longitudinal direction of the piezoelectric driving bodies 16a and 16b are fixed to the end faces of the front portion 11a and the rear portion 11b, and the intermediate portions are in the conveying direction D via spacers 19a and 19b constituting a part of the reference mass body 11. The front end and the rearmost position are connected and fixed to the upper end portions of the anti-vibration springs 13a and 13b. Further, the anti-vibration springs 13a and 13b are disposed at the positions on the outer side and the rear side of the lower side vibrating springs 15a and 15b in the transport direction D, thereby improving the stability of the entire vibration system.

The structure of the piezoelectric actuators 16a and 16b of this embodiment is shown in FIG. The piezoelectric actuators 16a and 16b have a metal elastic substrate 16s called a shim plate, and a piezoelectric body bonded and laminated (laminated) to the front and back surfaces of the elastic substrate 16s (piezoelectric Layer) 16p.

The elastic substrate 16s has an upper connection structure (a hole for connection in the illustrated example) 16u and an increase in the lower side with respect to the upper end (the upper and lower ends) of the upper side amplification springs 17a and 17b, respectively. The lower connection structure 16d of the springs 18a, 18b. Further, the elastic substrate 16s has a side connection structure (a protruding portion with a hole protruding in the width direction) 16t with respect to the reference mass body 11 on both sides in the width direction of the intermediate portion in the longitudinal direction thereof, 16t. In this case, the piezoelectric body 16p is disposed on the elastic substrate 16s at an intermediate position in the width direction between the left and right side connecting structures 16t.

In this configuration, since the bonding position of the piezoelectric driving bodies 16a and 16b with respect to the reference mass body 11 is provided on both sides in the width direction of the piezoelectric body 16p, it is difficult to scratch the piezoelectric driving bodies 16a and 16b. The bending deformation operation affects and is reliably coupled to the reference mass body 11 on the left and right sides, whereby the piezoelectric actuators 16a and 16b can be firmly fixed to the reference mass body 11, so that the reference can be made to the upper and lower sides. The mass body 11 reliably applies an exciting force.

Further, the piezoelectric actuators 16a and 16b in the illustrated example have a bimorph structure in which the piezoelectric bodies 16p are disposed on both surfaces of the elastic substrate 16s, but the piezoelectric layers may be disposed only on one surface of the elastic substrate 16s. As the unimorph structure formed by the body, various other known piezoelectric actuators can be used. Further, the piezoelectric driving bodies 16a and 16b have the above-mentioned intermediate portion as an axis of symmetry. The longitudinal direction (upper and lower) has a symmetrical structure and is also symmetrical in the width direction (left and right).

In the piezoelectric actuators 16a and 16b, when a voltage is applied to the front surface and the back surface of the piezoelectric body 16p, the piezoelectric body 16p is deformed in accordance with the voltage, whereby the elastic substrate 16s is bent so as to be bent in the longitudinal direction. Then, by applying an alternating voltage of a predetermined frequency, the piezoelectric driving bodies 16a and 16b vibrate in such a manner as to be flexibly deformed in opposite directions, and the vibration is transmitted via the upper side amplification springs 17a and 17b and the lower side amplification springs 18a and 18b. The vibration between the reference mass body 11 and the upper mass body 12A, the reference mass body 11 and the lower mass body 12B is generated substantially in the vibration direction B in the transport direction D.

Here, the piezoelectric driving bodies 16a and 16b at the front and rear positions in the transport direction D are flexibly deformed in the same phase, and the upper piezoelectric driving portions 16au and 16bu and the lower piezoelectric driving portions 16ad and 16bd are also deformed in the same phase. Therefore, the upper mass body 12A and the lower mass body 12B also vibrate in the same direction in the vibration direction B with respect to the reference mass body 11. At this time, the reference mass body 11 vibrates in the vibration direction B at a phase opposite to the upper side mass body 12A and the lower side mass body 12B to eliminate the inverse of the vibration of the upper side mass body 12A and the lower side mass body 12B in the vibration direction B. force.

Further, the anti-vibration springs 13a and 13b that elastically support the reference mass body 11 (actually, the entire vibration system), the upper vibrating springs 14a and 14b that connect the reference mass body 11 and the upper mass body 12A, and the above-described reference The respective plate surfaces of the lower vibration springs 15a and 15b connected between the mass body 11 and the lower mass body 12B are provided in an attitude inclined obliquely upward with respect to the transport direction D in a direction opposite to the direction F of the conveyance. The direction of inclination The vibration direction B of the entire vibration system is substantially the same.

The vibration direction B generally has an inclination angle in the range of 1 to 10 degrees with respect to the horizontal direction, preferably in the range of 2 to 8 degrees, more preferably in the range of 3 to 6 degrees. As shown in FIG. 2, the vibration in the vibration direction B generates a conveying force for conveying the conveyed object on the conveying path 12c toward the conveying direction F, wherein the conveying path 12c is provided in the upper side mass body 12A.

In the illustrated example, the front portion 11a, the piezoelectric driving body 16a, the spacer 19a, and the anti-vibration spring 13a are placed along the front end portion of the reference mass body 11 by bolts, fixing plates (gaskets, spacers) or the like. The axis _Sax substantially coincident with the vibration direction B described above is connected and fixed. Further, at the rear end portion of the reference mass body 11, the rear portion 11b, the piezoelectric driving body 16b, the spacer 19b, and the anti-vibration spring 13b are along the vibration described above by bolts, fixing plates (gaskets, spacers) or the like. The axis S _bx whose direction B is substantially uniform is connected and fixed.

Here, the axis S _ax and the axis S _bx are parallel to each other, but since the reference mass body 11 is formed in a plate shape or a sheet shape extending linearly substantially along the transport direction D (horizontal direction), the axis S _ax and the axis S _bx are not lines that are consistent with each other. Further, the upper mass body 12A and the lower mass body 12B are also configured in a plate shape or a sheet shape that linearly extends in the transport direction D (horizontal direction).

Further, as shown in the figure, the upper vibrating spring 14a, the lower vibrating spring 15a, the upper vibrating spring 14b, and the lower vibrating spring 15b are preferably arranged substantially linearly from the viewpoint of further reducing the pitching operation.

FIG. 4 shows that it can be directly used in the above embodiment. The structure of the other piezoelectric actuators 16a' and 16b' different from the piezoelectric actuators 16a and 16b described above. The piezoelectric driving bodies 16a', 16b' basically have the same elastic substrate 16s', upper connecting structure 16u', lower connecting structure 16d', and side connecting structure 16t' as described above, but in the following aspects and the above piezoelectric driving The bodies 16a and 16b are different in that the piezoelectric body laminated on the elastic substrate 16s' is vertically cut at a position passing through the intermediate portion (joining position with respect to the reference mass 11) in the longitudinal direction thereof so as to be in the longitudinal direction. Divided into two parts. In other words, the elastic substrate 16s' is formed with an upper piezoelectric body 16pu' disposed above the bonding position and a lower piezoelectric body 16pd' disposed below the bonding position.

In the case of such a configuration, the driving forces of the piezoelectric actuators 16a' and 16b' can be reliably generated in the vertical direction. On the other hand, in this case as well, the entire width direction of the intermediate portion (joining position) in the longitudinal direction can be fixed to the reference mass body 11, thereby achieving a stronger bonding state, thereby improving the up and down symmetry of the vibration system. Sex or balance.

(a) and (b) of Fig. 5 are front views further showing other piezoelectric actuators 16a", 16b". The piezoelectric actuators 16a", 16b" have an elastic substrate 16s", a piezoelectric body 16p" (or an upper piezoelectric body 16pu" and a lower piezoelectric body 16pd"), an upper connection structure 16u", and a lower connection structure 16d. "This is basically the same as the piezoelectric actuator shown in Figs. 3 and 4.

The piezoelectric actuator shown in Fig. 5(a) is a modification of the piezoelectric actuators 16a and 16b, and the planar shape of the elastic substrate 16s is changed, that is, the side connection protruding toward both sides in the width direction is provided instead of The structure 16t is formed to have a rectangular planar shape in which the width is increased as a whole, and a side connecting structure 16t" having a hole or the like is formed at both end portions in the width direction.

Fig. 5(b) is a modification of the piezoelectric actuators 16a' and 16b', and similarly to Fig. 5(a), the planar shape of the elastic substrate 16s" is changed, that is, instead of providing the side connecting structure 16t' Further, a side connecting structure 16t" is formed in a wide width and at both end portions in the width direction.

(a) and (b) of FIG. 6 are different forms of the upper piezoelectric driving portions 16au and 16b and the lower piezoelectric driving portions 16ad and 16bd included in the upper vibrating springs 14a and 14b and the lower vibrating springs 15a and 15b. The main view of the display.

In the example shown in FIG. 6(a), a structure is shown in which the piezoelectric actuators 16a and 16b are vertically integrated (that is, the whole body is flexibly deformed to generate vibration) as described above, and the piezoelectric actuators 16a and 16b are placed up and down. The separate piezoelectric actuators, that is, the upper piezoelectric actuators 16A and the lower piezoelectric actuators 16B are fixed to the reference mass body 11 independently of each other (the vibration is respectively flexed and deformed).

In other words, the lower end of the upper piezoelectric actuator 16A is connected and fixed to the upper portion of the front mass portion 11 (the front portion 11a and the rear portion 11b), and the upper end of the lower piezoelectric actuator 16B is connected and fixed to the reference mass body. 11 (the front portion 11a and the lower portion of the rear portion 11b). In the case of such a configuration, when the upper piezoelectric driving body 16A and the lower piezoelectric driving body 16B are driven in the same phase, the same vibration form as described above can be realized. However, in this case, the upper piezoelectric actuator 16A and the lower piezoelectric actuator 16B are directly adjacent to each other vertically in the front-rear position of the transport direction D, and the upper piezoelectric actuator 16A and the lower piezoelectric are preferably used. The driving body 16B is linearly arranged so as to be disposed on a surface on which the plate faces are continuous with each other.

In FIG. 6(b), the upper piezoelectric actuator 16A is connected and fixed to the upper portion of the reference mass body 11 and the lower piezoelectric actuator 16B is connected and fixed to the lower portion of the reference mass body 11 and FIG. 6(a). The structure is the same, but a part of the reference mass body 11 is disposed between the upper piezoelectric driver 16A and the lower piezoelectric driver 16B instead of the upper piezoelectric driver 16A and the lower piezoelectric driver 16B. Direct adjacency is different on this point. In this case, when the upper piezoelectric driving body 16A and the lower piezoelectric driving body 16B are driven in the same phase, the same vibration form as described above can be realized. In this case, it is preferable that the upper piezoelectric driving body 16A and the lower piezoelectric driving body 16B are arranged linearly so as to be arranged on the surfaces on which the plate faces are continuous with each other. Further, the upper piezoelectric driving body 16A and the lower piezoelectric driving body 16B can be formed in the same configuration as the piezoelectric driving bodies 16a and 16b described above.

Finally, the operation and effect of the vibrating conveyor 10 of the present embodiment will be described with reference to Figs. 7 to 12 . Fig. 7 is an explanatory view showing the principle configuration of the vibration system of the present invention. The symbols of the portions corresponding to the above-described embodiments are denoted by the respective portions in the explanatory drawings.

In the vibration system of the present invention, the upper mass body 12A and the lower mass body 12B are elastically coupled to the upper and lower sides of the reference mass body 11 via the upper side vibration springs 14a and 14b and the lower side vibration springs 15a and 15b. Further, the upper mass body 12A and the lower mass body 12B are respectively applied to the excitation between the upper mass body 12A and the lower mass body 12B and the reference mass body 11 by the piezoelectric actuators 16a and 16b which are the in-phase excitation mechanisms. The force, that is, the exciting force F _2A received from the upper vibrating springs 14a and 14b and the exciting force F _2B received from the lower vibrating springs 15a and 15b are in phase with respect to the reference mass 11 when viewed in the conveying direction D. Perform vibration.

Here, F _1A is an exciting force received by the reference mass body 11 from the upper vibrating springs 14a and 14b, and F _1B is an exciting force received by the reference mass body 11 from the lower vibrating springs 15a and 15b. Therefore, when viewed from the conveying direction D, the phase Φ ₁ of the reference mass body 11 is a phase opposite to the phases Φ _2A and Φ _{2B of the} upper side mass body 12A and the lower side mass body 12B. Therefore, when considering the setting surface 2 as a reference, the reaction force of the conveying direction D by the vibration of the reference mass body 11 is combined with the vibration of the upper side mass body 12A and the lower side mass body 12B. The relationship between the counterforces and the elimination of each other (offset or weakened relationship). As a result, the vibration transmitted to the conveying direction D on the side of the installation surface 2 via the vibration-proof springs 13a and 13b is weakened.

On the other hand, when considering the reference mass body 11 as a reference, the exciting force F _1A received from the upper mass body 12A and the exciting force F _1B received from the lower mass body 12B are all along the vibration direction B. The same direction of the direction, however, the torque of the upper mass body 12A vibrating in phase with each other is opposite to the torque of the lower mass body 12B and is in a mutually canceling relationship (a canceled or weakened relationship). Therefore, the reaction force in the rotational direction received by the reference mass body 11 is weakened, so that the pitching operation is less likely to occur, and the vibration in the vertical direction transmitted to the installation surface 2 side via the anti-vibration springs 13a and 13b is also weakened. Further, as a result, the conveyance state such as the conveyance speed or the conveyance posture of the conveyed object along the longitudinal direction of the conveyance path 12c is also uniformized.

In the present invention, in the vibration system shown in Fig. 7, the piezoelectric body 16a, 16b as the in-phase excitation mechanism is provided, and the upper side mass body is provided. The 12A and the lower mass body 12B actually operate as one mass body, in other words, the upper side mass body 12A and the lower side mass body 12B are restricted to operate as one mass body by the in-phase excitation mechanism, and therefore, the composition has a mass as a mass. Forced (attenuation of two Degree Of Freedom or Two-Mass) of the reference mass body 11 of the body and the other mass body (the upper mass body 12A and the lower mass body 12B) In the vibration system, the piezoelectric actuators 16a and 16b, which are the in-phase excitation mechanisms, apply the exciting force so that the upper mass body 12A and the lower mass body 12B vibrate in phase with respect to the reference mass body 11, The reference mass body 11 as one mass body is elastically coupled to the installation surface 2 via the vibration-proof springs 13a and 13b, and the other mass body is elastically coupled to the reference mass body 11 via the four vibration springs 14a, 14b, 15a, and 15b.

In the vibration system, there are two resonance frequencies ω ₁ and ω ₂ , and the two mass bodies vibrate in opposite phases with each other in the frequency band between the two resonance frequencies ω ₁ and ω ₂ .

In the reverse phase mode of the vibration system having the two mass bodies 11 and 12A+12B, the relationship in which the reaction forces of the transport directions D between the two mass bodies cancel each other is as described above in the present invention, as opposed to As the reference mass body 11 of one mass body, the other mass body is divided into the upper side mass body 12A and the lower side mass body 12B, and the upper side mass body 12A and the lower side mass body 12B are elastically connected to the reference mass body 11 opposite to each other. On the side, therefore, the torque received by the reference mass body 11 also cancels each other.

Here, when the position of the center of gravity of the mass M ₁ of the reference mass body 11 is used as a reference, the torque of the upper mass body 12A is the product of the mass of the upper mass body 12A and the distance between the centers of gravity, that is, M _2A × R _2A , the lower side. The torque of the mass body 12B is similarly M _2B × R _2B . However, the two torques are in opposite directions. The configuration of such a vibration system forms a vibration form substantially different from that of the prior device, and realizes a conveying form that does not depend on the fixing force generated by the installation surface.

In the prior device, in order to secure the conveyance state of the conveyed material on the conveyance path, it is necessary to firmly fix it to the installation surface or to make the base heavy, and in the present invention, in the extreme, even if the anti-vibration spring 13a is to be used When the lower end of 13b is placed on the installation surface such as the soft bedding and is not fixed, or when the lightweight base 2 is not fixed, the vibration form hardly occurs. The change (deterioration), the transport pattern on the transport path 12c is also substantially unchanged.

Further, as clearly shown in the drawing, from the viewpoint of canceling the reaction force in the conveying direction D, M ₁ = M _2A + M _{2B is} actually preferable, and from the viewpoint of canceling the above two torques, Actually, M _2A × R _2A = M _2B × R _2B is preferable, and from the viewpoint of reducing the pitching motion, M _2A = M _2B and R _2A = R _{2B are} actually preferable.

The above configuration and operation and effect are basically obtained based on the configuration shown in Fig. 7 showing the concept of the present invention. However, in the present embodiment, the in-phase excitation mechanism has the upper excitation unit and the lower excitation unit. In addition, the excitation force F _2A (F _1A ) and the excitation force F _2B (F _1B ) are directly and separately provided by the upper excitation unit and the lower excitation unit, whereby the device structure can be simplified and the device structure can be simplified. Adjustment of the excitation side frequency, amplitude, and the like corresponding to, for example, fluctuations in the conveyed object or the conveyance path can be easily performed. In particular, in the present embodiment, the upper piezoelectric driving portions 16au and 16bu inserted into the upper side vibration springs 14a and 14b and the lower piezoelectric driving portion 16ad inserted into the lower side vibration springs 15a and 15b are provided. Since 16bd is excited by the piezoelectric driving method, it is not necessary to separately provide an excitation mechanism in addition to the vibration system, so that the device structure can be formed more easily.

Fig. 8 is a view showing a vibration model of the above embodiment. In the present embodiment, as shown in FIG. 8, the upper side vibration springs 14a, 14b are directly connected to the lower side vibration springs 15a, 15b, and their connection points are connected and fixed to the reference mass body 11. Therefore, the points at which the above-described exciting forces F _1A and F _1B act on the reference mass body 11 coincide with each other, and therefore, the unnecessary vibration caused by the deviation of the acting positions of the exciting forces F _1A and F _1B in the mode shown in Fig. 7 Or the occurrence of torque is reduced. Further, since the upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b are directly connected, it is easy to exchange vibration energy between the upper and lower vibration structural portions, and it is considered that a more stable vibration system can be constructed. Further, in the present embodiment, as clearly shown in the drawing, according to the above configuration, there is an effect that the height of the vibrating conveyor 10 can be reduced.

Further, in the present embodiment, the upper vibrating springs 14a and 14b and the lower vibrating springs 15a and 15b are linearly arranged, and the reference mass bodies are arranged along the axes _Sax and _Sbx which are perpendicular to the straight line and parallel to each other. 11. The connection point between the upper vibrating springs 14a and 14b and the lower vibrating springs 15a and 15b and the support points of the anti-vibration springs 13a and 13b are considered to be such that unnecessary vibration or pitching operation in the rotational direction is less likely to occur.

In particular, the transmission is configured such that the gravity center position of the mass M ₁ of the reference mass body 11 , the gravity center position of the mass M _2A of the upper mass body 12A, and the gravity center position of the mass M _2B of the lower mass body 12B are arranged in parallel with the above-mentioned line. On the straight line, that is, on a straight line perpendicular to the above-described axes S _ax and S _bx , the vibration system can be further stabilized.

In addition, although the inclination angle of the vibration direction is emphasized in FIG. 8, the actual inclination angle is about several degrees as described above, the amplitude of the vibration is also very small, and the rigidity in the longitudinal direction of each spring is very high, so the up-and-down vibration caused by the inclination angle is The impact is small.

Further, in the vibration mode of Fig. 8, M _2A = M _2B , R _2A = R _2B , the upper side vibration springs 14a, 14b, and the lower side vibration springs 15a, 15b have the same length and spring constant, and the anti-vibration springs 13a and 13b The length and spring constant are also the same, but it is not intended to limit the invention and the embodiment. Further, in the illustration, when in the stationary state, the gravity center position of the reference mass body 11 (mass M ₁ ) is located at the center of gravity position of the upper side mass body 12A (mass M _2A ) and the lower side mass body 12B (mass M _2B ). The center of gravity is connected on a straight line.

In the present embodiment, by using the integrated piezoelectric actuators 16a and 16b that are coupled to the reference mass 11 in the intermediate portion in the longitudinal direction, both the upper mass 12A and the lower mass 12B can be reliably and stably applied. Apply an exciting force. In particular, the piezoelectric actuators 16a and 16b are integrally flexibly deformed, and the excitation force of the same phase can be reliably applied to the upper mass body 12A and the lower mass body 12B.

In addition, since the upper piezoelectric driving portions 16au and 16bu and the lower piezoelectric driving portions 16ad and 16bd are disposed on the reference mass body 11 side of the upper vibrating springs 14a and 14b and the lower vibrating springs 15a and 15b, With the upper side amplification springs 17a and 17b or the lower side amplification springs 18a and 18b, it is possible to generate a sufficient amplitude required when the conveyance path is provided in the upper side mass body 12A and the lower side mass body 12B.

9 to 12 are views showing a part of a simulation operation showing a result of modal analysis by the structural model according to the above embodiment. Here, the reference mass body 11, the upper mass body 12A, the lower mass body 12B, the base 2, the anti-vibration springs 13a and 13b, the piezoelectric actuators 16a and 16b, the upper side amplification springs 17a and 17b, and the lower side amplification are used. The materials and dimensions of the springs 18a and 18b, the spacers 19a and 19b, other washers or bolts, and the data of the Young's modulus, Poisson's ratio, and density of each material are analyzed, and the vibration mode of the overall structure is analyzed. According to the analysis results (modal parameters, ie, natural mode, natural vibration frequency, modal damping ratio), a simulation animation is made.

Figures 9 and 11 show the vibration pattern when approaching one of the maximum displacements, and Figures 10 and 12 show the vibration pattern when approaching the other maximum displacement. Further, in the data used for the analysis, when the mass M _{1 of the} reference mass body 11 is set to 1, the mass M _2A of the upper mass body 12A is set to 0.46, and the mass M _{2B of the} lower mass body 12B is set to 0.38.

In the present invention, from the viewpoint of obtaining a stable vibration form, it is preferable that the mass M _{1 of the} reference mass body 11 and the mass of the upper side mass body 12A and the lower side mass body 12B M _2A + M _{2B are} substantially equal (for example, M M _2A + ₁ and the difference between the mass M _2B is 10% M ₁ and M _2A + value of M _2B below), or greater than the sum of the mass M _2A + M _2B.

Further, side mass 12A of the mass M _2A and the lower upper-preferential side mass body member is substantially equal 12B mass M _2B, however, observe these values can be seen, as long as the difference between the mass M _2A and M _2B are also M _2A and M _2B in 30% or less of the value is not a big problem, and more preferably 20% or less.

According to the vibration form shown in the above-described simulation image, the pitching operation hardly occurs, and the respective mass bodies reciprocally reciprocate in the horizontal direction as the transport direction D. Therefore, it is possible to sufficiently obtain the observation in the transport direction D. Uniformity of the transport state (transport speed, transport attitude).

In addition, the vibrating conveyor of the present invention is not limited to the above-described illustrated examples, and various modifications can be added without departing from the scope of the invention. For example, in the above-described embodiment, the piezoelectric actuator or the piezoelectric actuator is used as the in-phase excitation mechanism or the upper excitation unit and the lower excitation unit. However, an electromagnetic actuator may be used. Further, in the above-described embodiment, the piezoelectric actuator or the piezoelectric driving portion is disposed on the reference mass body side, and the amplification spring is disposed on the upper mass body and the lower mass body side. However, the arrangement relationship may be set. The piezoelectric actuator or the piezoelectric driving portion is disposed on the upper mass body and the lower mass body side, and the amplification spring is disposed on the reference mass body side.

10‧‧‧Vibrating conveyor

11‧‧‧Base quality body

11a‧‧‧ front part

11b‧‧‧ Rear

12A‧‧‧Upper mass body

12B‧‧‧Bottom mass body

12c‧‧‧Transportation

13a, 13b‧‧‧ anti-vibration spring

14a, 14b‧‧‧ upper vibration spring

15a, 15b‧‧‧ lower vibration spring

16a, 16b‧‧‧ Piezoelectric actuator

16au, 16bu‧‧‧ upper piezoelectric drive

16ad, 16bd‧‧‧ lower piezoelectric drive

17a, 17b‧‧‧Upside flare spring

18a, 18b‧‧‧ lower side expansion spring

19a, 19b‧‧‧ spacers

2‧‧‧Base (Setting surface)

D‧‧‧Transport direction

F‧‧‧Transportation orientation

Claims (6)

A vibration type conveying device comprising: a pair of plate-shaped vibration-proof springs having a plate surface facing a conveying direction; and a reference mass body which is paired with the pair of front and rear positions in the conveying direction a vibrating spring support; an upper mass body disposed above the reference mass body; a lower side mass body disposed below the reference mass body; and a pair of plate-shaped upper side vibrating springs in the conveying direction The reference mass body and the upper side mass body are elastically connected to each other at a front and rear position, and have a plate surface facing the conveying direction; a pair of plate-shaped lower side vibration springs before and after the conveying direction Positioning the reference mass body and the lower side mass body elastically, respectively, and having a plate surface facing the conveying direction; and an in-phase excitation mechanism for the reference mass body and the upper side mass An exciting force for generating in-phase vibration in the conveying direction is applied between the bodies and between the reference mass and the lower mass; the reference mass, the upper side At least one of the mass body or the lower mass body is provided with a transport path for conveying the transport object; and the in-phase excitation body and the lower side mass body are at the slave center by the in-phase excitation mechanism The in-phase vibration is performed when the transport direction is observed, and the reference mass body and the upper side mass body and the lower side mass body are vibrated in opposite directions when viewed from the transport direction. The vibrating transport device according to claim 1, wherein the in-phase excitation mechanism includes an upper excitation unit and a lower excitation unit, and the upper excitation unit pairs the reference mass and the The exciting force is directly applied between the upper mass bodies, and the lower side excitation unit directly applies the exciting force to the reference mass body and the lower side mass body. The vibrating conveyor according to claim 2, wherein the upper vibrating portion is constituted by a plate-shaped upper piezoelectric driving portion, and the upper piezoelectric driving portion is inserted into a length of the upper vibrating spring a part of the direction and the plate surface of the upper piezoelectric driving portion facing the conveying direction are flexibly deformed; and the lower side excitation portion is constituted by a plate-shaped lower piezoelectric driving portion, the lower side pressing portion The electric drive unit is inserted into a part of the longitudinal direction of the lower side vibration spring, and the plate surface of the lower side piezoelectric drive unit facing the conveyance direction is flexibly deformed. The vibrating conveyor according to claim 3, wherein the upper piezoelectric driving portion and the lower piezoelectric driving portion are constituted by a plate-shaped piezoelectric driving body, wherein the piezoelectric driving The body is respectively coupled to the reference mass body at a front and rear position of the conveying direction, and a portion of the piezoelectric driving body extending upward of the reference mass body forms the upper side piezoelectric driving portion toward the A portion extending below the reference mass body forms the lower piezoelectric driving portion, and as a whole, is flexibly deformed toward the plate surface in the conveying direction. The vibrating conveyor according to any one of claims 1 to 4, wherein the mass of the reference mass is substantially equal to or greater than the mass of the upper mass and the lower mass. with. The vibrating conveyor according to claim 2, wherein the upper vibrating spring is constituted by an upper piezoelectric driving portion and a plate-shaped upper side amplification spring, and the upper piezoelectric driving portion constitutes the upper side excitation a portion that is coupled to the reference mass body and extends upwardly of the reference mass body at a front and rear position of the conveying direction, the upper side amplification spring being coupled to an upper end of the upper piezoelectric driving portion and having an orientation a plate surface in the conveying direction; the lower vibration spring is composed of a lower piezoelectric driving portion and a plate-shaped lower side amplifying spring, and the lower piezoelectric driving portion constitutes the lower excitation portion, and The front and rear positions of the conveying direction are combined with the reference mass body and extend downward of the reference mass body, and the lower side amplification spring is coupled to the lower end of the lower side piezoelectric driving portion and is provided to the conveying The direction of the board.