JP5775183B2 - Vibrating transfer device - Google Patents

Description

  The present invention relates to a vibration type conveying apparatus, and more particularly to a conveying mechanism of a conveying apparatus suitable for conveying parts in a straight line.

  In general, the vibration-type transfer device elastically supports a transfer body on a gantry via a leaf spring, and the transfer body is obliquely inclined in the transfer direction by exciting the transfer body with an excitation means such as an electromagnetic drive body or a piezoelectric drive body. By generating upward vibration, a transported object such as a component is transported along a transport path formed on the transport body. In recent years, there are many fine electronic parts as conveyed objects, and there is an increasing need to supply such fine conveyed objects at high speed. Many apparatuses are required to convey the sheets while aligning them at high speed. A common problem of the vibratory transfer device that occurs when trying to satisfy such high-speed transfer requirements is that the reaction force of the vibration of the transfer body is transmitted to the installation surface, so that other Conveyance occurs when the transport body vibrates in a direction different from the original vibration direction due to the fact that there is a risk of vibrational effects on the devices, and the pitching operation of the entire excitation structure for vibrating the transport body. The speed varies depending on the position in the transport direction, or the transported object vibrates in a direction other than the transport direction and the transport posture is disturbed.

  In order to solve the above problems, one method proposed in the conventional vibration type conveying apparatus supports the vibration system via the vibration-proof spring and has a phase opposite to that of the conveyance body in the vibration system. A reaction weight (inertial body) that vibrates is provided, and the reaction force of the conveyance body is canceled by the vibration of the reaction weight to reduce vibration energy transmitted to the installation surface (for example, the following) Patent Document 1). However, in such a structure, since the center of gravity of the transport body and the reaction weight is shifted up and down, a pitching motion is generated in the entire apparatus due to the vibration of the transport body, thereby reducing the transport efficiency and the position in the transport direction. As a result, the transport speed changes or the transport posture is disturbed. For this reason, there has been known one in which the pitching is suppressed by reducing the deviation between the center of gravity of the carrier and the center of gravity of the reaction weight. For example, a structure in which a counterweight disposed below the reaction weight is connected to the transport body (for example, Patent Document 2 below), and the piezoelectric vibration portion supported by the vibration isolating spring and the transport body are coupled. In addition, a counterweight is disposed between the piezoelectric vibration unit and the transport body, and a straight line connecting the total barycentric position of the piezoelectric vibration unit and the transport body and the barycentric position of the counterweight is a vibration direction given to the transported object. A structure arranged in parallel (for example, Patent Document 3 below), a movable plate connected to the transport body is elastically supported above a fixed frame supported by an anti-vibration spring, and a lower weight is connected below the movable plate. Also known is a structure (for example, Patent Document 4 below) in which a fixed weight is connected above the fixed frame to bring the positions of the centers of gravity close to each other and the generation of rotational moment is suppressed. That.

JP-A-2-204210 JP-A-4-39206 JP 2006-248727 A JP 2009-298498 A

  However, in the above-described conventional vibratory transfer device having a reaction weight, the structure becomes complicated because the center of gravity of the carrier and the center of gravity of the reaction weight are brought close to each other or arranged in a straight line. In addition to incurring an increase in cost, it is necessary to set the position of the center of gravity very precisely. Therefore, it is difficult to obtain a sufficient effect at a manufacturing site where the type of conveyed product, the conveyance speed, and the like change. In particular, even if there is a slight shift in the center of gravity position, increasing the drive frequency to enable high-speed conveyance increases the pitching and vertical movements, making it impossible to obtain an appropriate conveyance state. It is difficult to realize high-speed conveyance.

  Therefore, the present invention solves the above-mentioned problems, and the problem is that a vibration type that can easily realize a high frequency vibration or a high conveyance speed with a simple structure while reducing the reaction force applied to the installation surface. It is to provide a transport device.

  In view of such circumstances, the vibratory transfer device of the present invention is provided with a pair of vibration-proof springs that are respectively provided at front and rear positions in the transfer direction, each of which includes a plate spring having a plate surface facing the transfer direction. A reference mass body supported by vibration-proof springs at front and rear positions in the transport direction, an upper mass body arranged above the reference mass body, a lower mass body arranged below the reference mass body, A pair of upper vibration springs including a leaf spring structure having a plate surface facing the transport direction, which elastically connects the reference mass body and the upper mass body at front and rear positions in the transport direction, and the reference mass body A pair of lower vibration springs including a leaf spring portion facing in the transport direction, and elastically connecting the lower mass body and the lower mass body at front and rear positions in the transport direction, and the reference mass body and the upper mass body And the reference mass body and the lower An in-phase excitation means for applying an excitation force to both of the mass bodies and generating an in-phase vibration in the transport direction, and at least one of the upper mass body and the lower transport body A conveyance path for conveying a conveyance object is provided, and the upper vibration spring and the lower vibration spring have a vibration angle that inclines in opposite directions in the vertical direction, and the vibration force of the in-phase vibration means is The upper mass body and the lower mass body vibrate in directions inclined to opposite sides in the vertical direction.

  According to the present invention, the upper mass body and the lower mass body are elastically connected to the upper and lower positions of the reference mass body supported by the vibration isolation springs at the front and rear positions in the transport direction via the vibration springs at the front and rear positions in the transport direction, respectively. In addition, when the in-phase excitation means gives an excitation force, the upper mass body and the lower mass body vibrate in the same phase as seen in the transport direction, and the reference mass body, the upper mass body, and the lower mass The body vibrates in the opposite phase when viewed in the transport direction. Accordingly, since the vertical shift between the center of gravity position of the reference mass body and the total center of gravity position of the upper mass body and the lower mass body can be reduced, the vibration in the transport direction of the reference mass body, the upper mass body, and the lower mass body can be reduced. The counteracting reaction force can be enhanced. In addition, during vibration, the rotational moment given by the upper mass body and the rotational moment given by the lower mass body with respect to the reference mass body are opposite to each other. Are mutually offset or reduced, so that the pitching motion (rotational motion) can be suppressed. Therefore, the reaction force in the conveying direction and the vertical direction transmitted to the installation surface via the vibration isolation spring is reduced, and leakage of vibration energy to the installation surface via the vibration isolation spring can be suppressed. Furthermore, since the pitching operation is suppressed, vibrations are not easily disturbed even when the frequency is increased, and the posture of the transported object is stabilized, so that high-speed transport is possible, and the transport speed, transport posture, etc. along the transport path The uniformity of the transport state can also be improved.

  In the present invention, at least one of the upper mass body and the lower transport body is provided with a transport path for transporting a transported object, and the upper vibration spring and the lower vibration spring are inclined to opposite sides in the vertical direction. And the upper mass body and the lower mass body vibrate in directions inclined in opposite directions in the vertical direction by the excitation force of the in-phase excitation means. A conveyance force directed toward one side or the other side in the conveyance direction on a conveyance path provided on at least one of the body and the lower conveyance body can be applied to the conveyance object. Therefore, since it is not necessary to incline the entire vibration system in order to generate a transport force for the transported object, it is possible to easily configure the structure and facilitate a work for adjusting the transport force. In addition, since the vibration directions of the upper mass body and the lower mass body that vibrate synchronously are inclined in the opposite directions, the vertical component of the rotational moment of the upper mass body and the rotational moment of the lower mass body Therefore, the vertical reaction force received by the reference mass body can be reduced. Therefore, it becomes possible to stabilize the conveyance state of the conveyed product on the conveyance path, improve the conveyance speed by increasing the frequency of the apparatus, and suppress leakage of vertical vibration to the installation surface via the vibration isolation spring. In particular, when a significantly higher frequency is required than in the past, such as 300 Hz to 1 kHz, even if a slight balance of dynamic balance in the vertical direction is caused, the transported material dances due to vertical vibration, and the transported material is aligned, selected, and dense. There are situations in which it becomes difficult to carry, or vertical vibrations propagate from the installation surface to the surroundings. However, according to the configuration of the present invention, the vertical movement of the conveyed product is reduced by reducing the vertical vibration, and the conveyed posture of the conveyed product is stabilized. The propagation of vertical vibration from the installation surface to the surroundings can be suppressed.

  In the present invention, as described above, in order for the upper vibration spring and the lower vibration spring to have a vibration angle, as an example, the upper vibration spring and the lower vibration spring are respectively installed in an inclined posture. It is good also as a structure to be made. In this case, in order for the upper vibration spring and the lower vibration spring to have mutually opposite vibration angles in the vertical direction, the upper vibration spring and the lower vibration spring are respectively inclined to the opposite sides in the vertical direction as a whole. It may be a posture. However, in order to facilitate the mounting operation of the spring and to adjust the vibration angle, the upper vibration spring and the lower vibration spring both have a plurality of spring elements, respectively, on the side of the reference mass body. It is preferable that the spring element on the side of the upper mass body and the lower mass body with respect to the spring element is arranged on one side in the transport direction.

In this case, the upper vibration spring connects an upper vibration spring body corresponding to a spring element on the reference mass body and an upper end portion of the upper vibration spring body to the upper mass body in the transport direction. An upper spring element corresponding to a spring element on the side of the upper mass body, which is disposed on the one side in the transport direction with respect to the upper vibration spring main body. The upper spring element is elastically deformed in such a manner that the upper mass body can rotate about an axis perpendicular to the transport direction and the vertical direction with respect to the upper vibration spring body, and the lower vibration spring is A lower vibration spring main body corresponding to a spring element on the side of the reference mass body, and a lower connection portion for connecting a lower end portion of the lower vibration spring main body to the lower mass body in the transport direction. The lower connecting portion has the lower vibration It is arranged on the one side of the transport direction than the body, the lower spring element is provided which corresponds to the spring element on the side of the lower mass, said lower spring elements, the lower vibrating spring body On the other hand, it is preferable that the lower mass body is elastically deformed in such a manner that the lower mass body can rotate around an axis perpendicular to the transport direction and the vertical direction. According to this, in the upper connection part and the lower connection part, the upper spring element or the lower part disposed on the other side in the transport direction with respect to the upper end part of the upper vibration spring body or the lower end part of the lower vibration spring body. By connecting the upper mass body or the lower mass body via the side spring element, the upper mass body or the lower mass is the same as when the upper vibration spring and the lower vibration spring are installed in an inclined posture. The vibration direction of the conveyance path provided in the body can be a direction inclined mutually upside down with respect to the conveyance direction. In this case, the vibration angles of the upper vibration spring and the lower vibration spring are determined by the distance in the conveying direction between the upper connection end of the upper vibration spring body and the upper spring element, and the lower connection end of the lower vibration spring body. And the distance in the conveying direction between the lower spring element and the lower spring element. For this reason, it is possible to adjust the vibration angles of the upper vibration spring and the lower vibration spring only by adjusting the interval with a spacer or the like. Here, as the upper spring element or the lower spring element, the upper vibration spring body or the lower vibration spring body and the upper mass body or the lower mass body are orthogonal to the transport direction and the vertical direction. A leaf spring-like connecting plate connected in the width direction (horizontal direction) can be used. This connecting plate can be elastically deformed in a direction in which the upper mass body or the lower mass body rotates about the axis in the width direction with respect to the upper connection end of the upper vibration spring body or the lower connection end of the lower vibration spring body. It functions as a torsion spring. In this case, the upper vibration spring main body is arranged in a posture extending in a vertical direction between the reference mass body and the upper mass body, and the lower vibration spring main body is arranged with the reference mass body. It is desirable to arrange in a posture extending in the vertical direction between the lower mass body. As described above, by providing the upper spring element and the lower spring element in the upper connection part and the lower connection part, the upper vibration spring and the lower vibration spring can be provided with a vibration angle. Even when the side vibration spring body is in a vertical posture, it is possible to generate a conveying force. Since the upper vibration spring main body and the lower vibration spring main body are in a vertical posture, the structure can be simplified and the vertical vibration can be reduced. Therefore, the stability of the conveying posture can be ensured even if the frequency is increased. In addition, it is possible to reduce leakage of vibration through the vibration-proof spring.

As another example of the spring structure in which a plurality of spring elements as described above are arranged, the upper vibration spring and the lower vibration spring are divided vertically in the middle of the extending direction (vertical direction), and the divided upper You may connect the lower end of a side leaf | plate spring part, and the upper end of a lower leaf | plate spring part in a step shape through the spacer etc. which have thickness in a conveyance direction as needed. In this case, in order for the upper vibration spring and the lower vibration spring to have a vibration angle inclined to the opposite sides in the vertical direction, the upper leaf spring portion of the upper vibration spring (the spring element on the upper mass body side) The lower leaf spring portion (corresponding to the spring element on the side of the reference mass body ) with respect to the lower end of the lower vibration spring and the upper leaf spring portion of the lower vibration spring (of the reference mass body). The side where the upper end of the lower leaf spring portion (corresponding to the spring element on the lower mass body side ) with respect to the lower end of the lower end of the lower leaf spring part corresponds to the opposite side when viewed in the conveying direction. What is necessary is just to comprise so that it may become a side. For example, the upper piezoelectric drive unit is arranged in series with an upper piezoelectric drive unit arranged below and an upper amplification spring arranged above, and the lower piezoelectric drive unit arranged below and below the lower vibration spring In the case of a series connection structure with the lower amplification spring disposed in the upper piezoelectric drive unit, the lower end of the upper amplification spring is placed on the one side in the transport direction at the upper end of the upper piezoelectric drive unit, with an interval as necessary. In addition to the connection, the upper end of the lower amplification spring may be connected to one side in the transport direction (the same side as described above) with an interval as needed, to the lower end of the lower piezoelectric drive unit. Also in this case, it is preferable that the upper vibration spring and the lower vibration spring are both arranged in a posture in which the upper leaf spring portion and the lower leaf spring portion respectively extend in the vertical direction. As a result, the structure can be simplified and the vertical vibration can be reduced, so that the stability of the conveying posture can be ensured even when the frequency is increased, and the leakage of vibration through the anti-vibration spring can be reduced. Can do.

  In the present invention, the in-phase excitation means includes an upper excitation unit that directly applies the excitation force between the reference mass body and the upper mass body, the reference mass body, and the lower mass body. It is preferable to have a lower side excitation part which gives the said excitation force directly between. According to this, since the upper excitation unit and the lower excitation unit are configured so as to apply the excitation force directly and separately, the overall structure of the apparatus can be simplified, and in-phase excitation according to the situation can be achieved. The vibration means can be easily adjusted. In this case, the upper excitation unit is configured by an upper piezoelectric drive unit and is incorporated in a part of the length of the upper vibration spring, and the lower excitation unit is configured by a lower piezoelectric drive unit. In addition, it is desirable that the upper vibration spring is incorporated in a part of the length direction. Accordingly, the upper piezoelectric drive unit and the lower piezoelectric drive unit are incorporated in part of the length direction of the upper vibration spring and the lower vibration spring that elastically connect the reference mass body, the upper mass body, and the lower mass body. Thus, an excitation force can be applied between the reference mass body, the upper mass body, and the lower mass body only through the upper vibration spring and the lower vibration spring, so that the structure can be simplified. At the same time, the reaction force generated in the main vibration system can be more easily offset or reduced. Here, it is preferable that the upper vibration spring has a structure in which the upper piezoelectric driving unit and a plate-like upper amplification spring having a plate surface facing the conveyance direction are connected in series. The lower vibration spring preferably has a structure in which the upper piezoelectric drive unit and a plate-like lower amplification spring having a plate surface facing the transport direction are connected in series. The upper piezoelectric drive unit and the lower piezoelectric drive unit have a plate-like elastic substrate having a plate surface facing in the transport direction, and a piezoelectric body laminated on at least one of the front and back surfaces of the elastic substrate. By applying an alternating voltage in the thickness direction of the piezoelectric body, vibration is generated by bending the elastic substrate back and forth in the transport direction.

  In this case, the in-phase excitation means is coupled to both sides of the reference mass body at the intermediate portion in the vertical direction, and a portion extending above the reference mass body includes the upper piezoelectric drive unit. And a portion extending below the reference mass body forms the lower piezoelectric drive portion, and is configured by a plate-like piezoelectric drive body in which the plate surface facing the transport direction as a whole is bent and deformed integrally vertically. It is preferred that According to this, both sides in the width direction of the intermediate portion of the integrally configured piezoelectric driving body are coupled to the reference mass body, and the upper piezoelectric driving section extending above the reference mass body vibrates the upper mass body, thereby The lower piezoelectric drive unit extending below the body vibrates the lower mass body, so that a stable connection state with respect to the reference mass body can be obtained, and at the same time, the upper mass body can be deformed integrally with the upper and lower bodies. And the lower mass body can be vibrated easily and reliably in the same phase. Further, since the upper mass body and the lower mass body can be vibrated with an integral piezoelectric driving body, the height of the entire apparatus can be reduced, and the apparatus can be configured compactly. In this case, it is preferable that the piezoelectric driving body has an integral piezoelectric body that extends in the upper and lower sides from the coupling position with respect to the reference mass body. In the present invention, for example, the upper piezoelectric drive unit above the reference mass body and the lower piezoelectric drive unit below may be formed of separate piezoelectric bodies while integrating the elastic substrate. However, by providing the integral piezoelectric body extending on both the upper and lower sides of the reference mass body as described above, it is possible to improve the integrity of the flexural deformation of the piezoelectric drive body, so that the upper mass body and the lower mass body are more evenly distributed. The structure can be simplified, the manufacturing cost can be reduced, and the upper and lower vibration modes can be made uniform.

  In the present invention, it is preferable that the upper piezoelectric drive unit includes an elastic substrate and a piezoelectric body laminated on the elastic substrate, and the upper amplification spring is configured integrally with the elastic substrate. Preferably, the lower piezoelectric drive unit includes an elastic substrate and a piezoelectric body laminated on the elastic substrate, and the lower amplification spring is configured integrally with the elastic substrate. According to this, since it is not necessary to connect at least one of the upper and lower piezoelectric drive units and at least one of the upper and lower amplification springs with a bolt or the like, the number of parts and assembly man-hours can be reduced and the connection can be reduced. The height of the apparatus can be reduced by the height of the portion. In particular, it is preferable that the elastic substrate of the upper piezoelectric drive unit is configured integrally with the upper amplification spring, and the elastic substrate of the lower piezoelectric drive unit is configured integrally with the lower amplification spring. In addition, when the upper piezoelectric driving unit and the lower piezoelectric driving unit are configured by an integrated piezoelectric driving body (when the elastic substrate of the upper piezoelectric driving unit and the elastic substrate of the lower piezoelectric driving unit are integrated), It is desirable that the elastic substrate of the integral piezoelectric driving body, the upper amplification spring, and the lower amplification spring are all integrally formed. At this time, the piezoelectric driving body itself can be installed in a vertical posture. The upper amplification spring and the lower amplification spring are preferably formed thinner than the upper piezoelectric drive unit and the lower piezoelectric drive unit. According to this, it is possible to avoid the damage of the upper piezoelectric drive unit and the lower piezoelectric drive unit, and at the same time, to secure the amplitude by the upper amplification spring and the lower amplification spring.

  In the present invention, the integrated piezoelectric driving body is configured separately from the upper amplification spring and the lower amplification spring, and is connected and fixed to the upper amplification spring and the lower amplification spring via a bolt, a washer, or the like. When the upper connection structure and the lower connection structure are provided, it is preferable that the upper connection structure and the lower connection structure are provided by extending the elastic substrate upward and downward from the region where the piezoelectric body is laminated. Further, by forming the thickness ranges of the upper connection structure and the lower connection structure so as to be shifted from the thickness range of the region where the piezoelectric bodies are laminated in the conveying direction, the upper amplification spring is formed in accordance with the deviation amount of the thickness range. Since the amount of shift in the transport direction between the lower amplification spring and the lower amplification spring is set, the vibration angle can be adjusted or the adjustment range of the vibration angle can be changed. The amount of deviation in the conveying direction between the upper piezoelectric drive unit and the lower piezoelectric drive unit and the upper amplification spring and the lower amplification spring has a positive correlation with the vibration angle. It can be set by the thickness of the inserted spacer.

  In the present invention, a lower end of the upper amplification spring is connected and fixed in a state of being overlapped on the one side in the transport direction with respect to the upper connection structure, and an upper end of the lower amplification spring is connected to the lower connection structure. It is desirable that the connection is fixed in a state of being superimposed on the one side in the transport direction. Thus, the vibration angle can be formed regardless of whether or not a spacer is interposed between the upper amplification spring and the lower amplification spring and the upper piezoelectric drive unit and the lower piezoelectric drive unit. In this case, the vibration angle is adjusted or optimized by providing a deviation in the thickness range between the piezoelectric layered portion of the piezoelectric driving body and the upper connection structure and the lower connection structure as described above. It becomes easy. Further, by configuring the upper connection structure and the lower connection structure to be thinner than the portion where the piezoelectric bodies are laminated, the upper connection spring and the lower amplification spring function as a portion that performs an amplification action of the bending deformation generated by the piezoelectric body. Therefore, the length of the upper amplification spring and the lower amplification spring can be reduced.

  In this case, it is preferable that the upper piezoelectric drive unit and the lower piezoelectric drive unit have a structure that is substantially vertically symmetrical with respect to the coupling position with respect to the reference mass body. According to this, a symmetrical operation mode can be obtained on both the upper and lower sides by the upper piezoelectric drive unit and the lower piezoelectric drive unit having a symmetrical structure. In addition, when the connection structure in which the piezoelectric drive body integrated with the reference mass body is coupled on both sides in the width direction as described above is adopted, the piezoelectric drive body has a horizontal line connecting the coupling sites on both sides in the width direction. It is preferable to have a vertically symmetrical structure as a symmetry axis.

  In the present invention, it is preferable that the piezoelectric driving body has coupling positions with respect to the reference mass body on both sides in the width direction, and the piezoelectric body is disposed between the coupling positions. According to this, the piezoelectric driving body and the reference mass body are coupled on both sides in the width direction, and the piezoelectric body is disposed between the coupling positions, so that the piezoelectric mass and the reference mass body are even on both sides in the width direction. The coupling rigidity can be ensured, and a stable vibration state can be easily realized. In particular, the upper and lower integrated bending deformation of the piezoelectric driving body is not hindered, and an efficient and stable driving state with the same phase in the upper and lower sides can be realized. Here, it is desirable that the piezoelectric driving body is formed with a piezoelectric body integrally formed across the upper and lower sides of the coupling portion.

  In the present invention, the reference mass body is preferably supported from below by the pair of anti-vibration springs. The reference mass body can be supported by the anti-vibration spring from any direction. However, according to this configuration, the installation area of the entire apparatus can be reduced as compared with the case where the reference mass body is suspended or supported from the side. Can be reduced. The pair of anti-vibration springs are plate springs in a vertical posture along a vertical plane in which a connection direction (length direction) from the reference mass body toward the installation surface (base) is perpendicular to the transport direction. It is preferable that each is comprised. Since the vibration isolating spring is composed of a plate spring in a vertical posture, the vibration component in the vertical direction of the reference mass body can be reduced, so the conveyance posture is stabilized and the leakage of vibration to the installation surface is reduced. It becomes possible. The pair of anti-vibration springs can have either of the following two configurations regardless of the support direction described above. In one configuration, the pair of vibration-isolating springs are arranged in front and rear in the transport direction at positions where the upper vibration spring and the lower vibration spring (or piezoelectric driving body) are coupled to the reference mass body at the support positions in the front and rear in the transport direction. It is the structure which each supports a reference | standard mass body in the outer side. In this case, the assembly operation of the apparatus can be facilitated and the stability of the main vibration system in the transport direction can be enhanced. In another configuration, the pair of vibration-isolating springs are both at the support positions before and after in the transport direction with respect to the position where the upper vibration spring and the lower vibration spring (or the piezoelectric driving body) are coupled to the reference mass body. It is the structure which each supports a reference | standard mass body in the same side (one side or the other side) of a conveyance direction. In this case, the positional relationship in the transport direction between the position where the reference mass body receives the reaction force from the upper vibration spring and the lower vibration spring and the position where the support force is received from the vibration-proof spring is a pair of front and rear in the transport direction. Therefore, the stability of the main vibration system in the vertical direction and the width direction can be improved, and as a result, the conveyance mode of the conveyed product can be further stabilized. In particular, even when the drive voltage of the piezoelectric driving body is increased to increase the transport speed, a uniform transport speed can be obtained over the entire length of the transport path, and the transport posture can be stabilized.

  In the present invention, in the reference mass body, the anti-vibration spring and a horizontal anti-vibration spring composed of leaf springs arranged in a horizontal posture along the conveyance direction are arranged in series at the front and rear positions in the conveyance direction. It is preferably supported by a pair of connected anti-vibration structures. According to this, since the vibration component in the conveyance direction and the vibration component in the vertical direction of the reference mass bodies having different vibration modes can be absorbed by different leaf springs, the spring characteristics of each leaf spring are optimal. Therefore, leakage of vibration to the installation surface can be further reduced. In this case, a base that supports the reference mass body is provided via the vibration-proof spring, and the base includes an upper support to which the vibration-proof spring is connected and the horizontal vibration-proof spring. It is desirable to have a lower support for supporting the upper support. According to this, in the state where the vibration of the reference mass that vibrates in the transport direction is absorbed by the vibration isolating spring, the remaining minute vertical movement is absorbed by the horizontal vibration isolating spring, thereby Both movements can be reliably absorbed in a stable state. Further, by supporting the reference mass body with a vibration isolating spring having a small occupied plane and providing a horizontal vibration isolating spring having a large occupied plane in the base, the space efficiency can be improved and the apparatus can be configured compactly.

  In this case, the direction of the connection from the upper support base to the lower support base of the pair of horizontal anti-vibration springs provided at the front and rear positions in the transport direction is opposite to the front and rear in the transport direction. It is desirable that According to this, when the horizontal anti-vibration springs respectively installed at the front and rear positions in the conveyance direction are bent up and down in response to the vertical vibration of the main vibration system, the connection direction of each horizontal anti-vibration spring is the conveyance direction. As a result, the arc-shaped trajectory of each horizontal anti-vibration spring is bent backward and forward in the transport direction. For this reason, the elastic deformation of the horizontal anti-vibration springs at the front and rear positions in the transport direction interferes with each other, so that the horizontal anti-vibration springs are less likely to elastically deform as the vertical vibration amplitude increases. The support stability of the main vibration system can be enhanced while the structure is configured so as to be able to absorb it reliably.

  In this invention, it is preferable that the said conveyance path is provided in the said upper mass body. As described above, the conveyance path may be provided in at least one of the upper mass body and the lower mass body. However, in particular, by providing a transport path in the upper mass body, it becomes easy to handle the apparatus and the transported object during operation.

  In the present invention, it is preferable that the mass of the reference mass body is substantially equal to or greater than the sum of the masses of the upper mass body and the lower mass body. Since the reference mass body, the upper mass body, and the lower mass body have a relationship in which the reaction force in the conveying direction (vibration direction) cancels each other, the mass of the reference mass body is the sum of the masses of the upper mass body and the lower mass body. It is possible to enhance the counteracting effect of the reaction force. However, since the reference mass body is supported and restrained by the vibration isolation spring, the amplitude of the reference mass body is suppressed by making the mass of the reference mass body larger than the sum of the masses. Since the amplitude of the upper mass body and the lower mass body can be increased at the same time, vibration energy flowing to the installation surface can be suppressed and sufficient transport force is secured in the upper mass body or the lower mass body. And a more stable vibration mode can be realized.

  In the present invention, the mass of the upper mass body and the mass of the lower mass body are substantially equal, the center-of-gravity distance and the spring constant between the reference mass body and the upper mass body, and the reference mass body and the lower mass body. It is preferred that the center of gravity spacing between the side masses and the spring constant are substantially equal. According to this, since the inertia mass and the elastic connection mode of the upper mass body and the lower mass body are configured symmetrically with respect to the reference mass body, the rotational moment can be canceled and the pitching operation can be further reduced.

  In this invention, it is preferable that the said conveyance path is linear shape and the said conveyance direction is a direction along a straight line. The present invention relates to a vibratory conveyance having a rotary vibrator having a vibration direction in a direction around a predetermined axis (tangential direction around the axis) and a spiral conveyance path installed on the rotary vibrator. In the apparatus, the present invention can also be applied to a case where a transported object is transported along a spiral transport path by vibration in the rotation direction. However, when transporting a transported object in a straight line along a straight transport path, as shown in the examples described later, the apparatus structure can be easily configured, and the transport speed is improved and the transport state is stabilized. Can be easily achieved.

  According to the present invention, vibration transfer that can easily realize with a simple structure, reduction of vibration leaking to the installation surface, increase of vibration frequency, increase of the transfer speed, and stabilization of the transfer posture of the transfer object. An excellent effect that an apparatus can be provided can be achieved.

1 is a side view showing an overall configuration of a vibration type conveying apparatus according to a first embodiment of the present invention. It is a perspective view which shows the whole structure of 1st Embodiment. It is a longitudinal cross-sectional view which shows the cross section along the surface shown by the dashed-dotted line III of FIG. 2 of the apparatus structure except the conveyance block of 1st Embodiment. It is the front view (a) and back view (b) which show the whole structure of 1st Embodiment. It is a top view of the apparatus structure except the conveyance block of 1st Embodiment. The perspective view (a) which shows the structure of the piezoelectric drive body of 1st Embodiment, The longitudinal cross-section which shows the piezoelectric drive body of 1st Embodiment, and the upper connection part and lower connection part with respect to the upper mass body and lower mass body FIG. 2B is an enlarged partial cross-sectional view showing a part of the vertical cross-sectional view in an enlarged manner, and a piezoelectric driving body of a different example of the first embodiment and its upper mass body and lower mass body. It is a longitudinal cross-sectional view (d) which shows an upper side connection part and a lower side connection part. It is a top view of the apparatus structure except the conveyance block of a different example. The piezoelectric drive body of the first embodiment, the longitudinal cross-sectional view (a) showing the upper connection portion and the lower connection portion for the upper mass body and the lower mass body, the piezoelectric drive body of the second embodiment, It is a longitudinal cross-sectional view (b) which shows the upper side connection part and lower side connection part with respect to an upper side mass body and a lower side mass body. FIG. 3 is an enlarged partial cross-sectional view (along a plane indicated by a two-dot chain line XII in FIG. 2) showing an anti-vibration structure provided on a base that can be used in each embodiment together with an enlarged plan view of a horizontal anti-vibration spring. It is a side view which shows schematic structure of the conveying apparatus of 3rd Embodiment. It is a conceptual explanatory drawing which shows typically the structure of the main vibration system of each embodiment. It is a schematic block diagram which shows the structure of 4th Embodiment typically. It is a schematic block diagram which shows typically the structure of 5th Embodiment. It is a side view of the apparatus structure except the conveyance block of 6th Embodiment. It is a side view which shows the whole structure except the collection | recovery side conveyance unit of the conveying apparatus of 6th Embodiment. It is a top view of the apparatus structure except the conveyance block of 6th Embodiment. It is a front view of the apparatus structure except the conveyance block of 6th Embodiment. It is the perspective view seen from the right side rear surface of the apparatus structure except the conveyance block of 6th Embodiment. It is the perspective view seen from the left side rear of the apparatus structure except the conveyance block of 6th Embodiment. It is an enlarged side view which shows the connection structure of the upper vibration spring of 6th Embodiment.

[First Embodiment]
Next, an embodiment of a vibratory transfer device according to the present invention will be described in detail with reference to the accompanying drawings. First, the overall configuration of the first embodiment will be described with reference to FIGS. 1 to 5. 1 is a right side view showing the overall configuration of the first embodiment, FIG. 2 is a perspective view showing the overall configuration of the first embodiment, and FIG. 3 is a longitudinal sectional view showing the structure of the apparatus excluding the transport block of the first embodiment. FIG. 4 is a front view (a) and a rear view (b) showing the overall configuration of the first embodiment, and FIG. 5 is a plan view showing the apparatus structure excluding the transport block of the first embodiment.

  The vibrating transfer device 10 of the present embodiment includes a reference mass body 11, an upper mass body 12 </ b> A disposed above the reference mass body 11, and a lower mass body 12 </ b> B disposed below the reference mass body 11. Have The reference mass body 11 is supported from below by plate-shaped anti-vibration springs 13 a and 13 b each having a plate surface facing the transport direction D at the front and rear positions in the transport direction D. The lower ends of these anti-vibration springs 13a and 13b are fixed to the base 2 arranged on the installation surface. Here, the front and rear positions in the transport direction D are two positions separated from each other along the transport direction D, that is, the front position is a position on the transport direction F side (one side of the transport direction D), The position is the position on the side opposite to the transport direction F (the other side in the transport direction D). In the present specification, the conveyance direction D is a direction in which a conveyance object such as an electronic component is conveyed on the conveyance path 12t in the vibration type conveyance device 10, and the conveyance direction F is the conveyance direction D. This is the direction in which the conveyed product advances.

  Further, the reference mass body 11 and the upper mass body 12A are elastically connected by upper vibration springs 14a and 14b including plate spring-like structures each having a plate surface facing the transport direction D at the front and rear positions in the transport direction D. Yes. That is, the upper mass body 12A is supported from below by the upper vibration springs 14a and 14b at the front and rear positions in the transport direction D, respectively. Further, the reference mass body 11 and the lower mass body 12B are elastically connected by lower vibration springs 15a and 15b including plate spring-like structures each having a plate surface facing the transport direction D at the front and rear positions in the transport direction D. Has been. That is, the lower mass body 12B is suspended from above by the lower vibration springs 15a and 15b at the front and rear positions in the transport direction D, respectively.

  The anti-vibration springs 13a and 13b, the upper vibration springs 14a and 14b, and the lower vibration springs 15a and 15b all have a plate spring structure configured in a plate shape as a whole, and springs in directions in which the plate surfaces face each other. The constant is low, and the spring constant in the length direction (the direction connecting the objects connected to the upper and lower sides) is high. In the present embodiment, the leaf spring structures of the anti-vibration springs 13a and 13b, the upper vibration springs 14a and 14b, and the lower vibration springs 15a and 15b have their extending (length) directions aligned with the vertical direction. It is mounted in a vertical position. Therefore, in the illustrated example, the rigidity in the vertical direction and the width direction of each spring is high, whereas the rigidity in the transport direction D is low. Accordingly, the support structure among the reference mass body 11, the upper mass body 12A, and the lower mass body 12B is stabilized, the mutual positional relationship is easily maintained, and the conveyance in the conveyance direction F with respect to the conveyance object is performed. The generation of unnecessary vibration that does not contribute to the transport force or obstruct the transport is easily generated while vibration for applying force is easily generated. Here, the anti-vibration springs 13a and 13b have a width larger than that of the other springs to increase the support rigidity in the width direction, and the length of the anti-vibration springs 13a and 13b is larger than that of the other springs, so that elastic deformation in the transport direction D can be easily performed. I have to. However, the elastic characteristics of each spring can be adjusted by the material and the plate thickness. In the present specification, the width direction is a direction orthogonal to both the transport direction D and the vertical direction.

  In the present embodiment, the upper vibration springs 14a and 14b extend above the reference mass body 11 among the piezoelectric drive bodies 16a and 16b coupled (fixed) to the reference vibration body 11 at the front and rear positions in the transport direction D, respectively. The upper piezoelectric drive parts 16au and 16bu which are parts, and plate-like upper amplification springs 17a and 17b each having a plate surface facing the conveying direction D and connected to the upper ends of the upper piezoelectric drive parts 16au and 16bu. It has a connection structure. In the present embodiment, the upper vibration springs 14a and 14b include upper connection portions 12AaS and 12AbS, which will be described later, for connecting the upper amplification springs 17a and 17b and the upper mass body 12A. Similarly, the lower vibration springs 15a and 15b are lower piezoelectric drive portions which are portions extending downward of the reference mass body 11 among the piezoelectric drive bodies 16a and 16b coupled (fixed) to the reference vibration body 11, respectively. 16ad, 16bd and a plate-like lower amplifying spring 18a, 18b having a plate surface facing the transport direction D, connected to the lower ends of the lower piezoelectric driving portions 16ad, 16bd. The lower vibration springs 15a and 15b also include lower connection portions 12BaS and 12BbS, which will be described later, for connecting the lower amplification springs 18a and 18b and the lower mass body 12B.

  The piezoelectric driving bodies 16a and 16b are respectively attached to the front mounting position 11a and the rear mounting position 11b that are in front and rear in the transport direction D of the reference mass body 11. The reference mass body 11 includes an intermediate portion 11ab disposed between the front mounting position 11a and the rear mounting position 11b in the transport direction D, a front portion 11aa disposed in front of the transport direction D with respect to the front mounting position 11a, And a rear portion 11bb disposed rearward in the transport direction D with respect to the rear attachment position 11b. The reference mass body 11 is configured to be thin in the vertical direction so as not to hinder the operation of the piezoelectric driving bodies 16a and 16b at the front mounting position 11a and the rear mounting position 11b which are mounting portions with respect to the piezoelectric driving bodies 16a and 16b. Except for the place, the intermediate portion 11ab, the front portion 11aa, and the rear portion 11bb are configured to be thicker so as to protrude from the front attachment position 11a and the rear attachment position 11b to the upper and lower sides. The intermediate portion 11ab, the front portion 11aa, and the rear portion 11bb have the same height region as the upper amplification springs 17a and 17b and the lower amplification springs 18a and 18b within a range that does not interfere with the upper mass body 12A and the lower mass body 12B. The structure is thick enough to reach A side connection structure 16t, which will be described later, provided at an intermediate portion in the vertical direction of the piezoelectric driving body 16a is fixed to the front mounting position 11a of the reference mass body 11, and a piezoelectric element is attached to the rear mounting position 11b of the reference mass body 11 at the rear mounting position 11b. A side connection structure 16t, which will be described later, provided at an intermediate portion in the vertical direction of the driving body 16b is fixed. The upper ends of the vibration-proof springs 13a and 13b are connected and fixed to the front end of the front portion 11aa and the rear end of the rear portion 11bb by bolts 19a and 19b described later. The vibration-proof springs 13a and 13b are arranged outside the front and rear positions in the transport direction D with respect to the lower vibration springs 15a and 15b in this way, so that the main vibration when viewed in the direction along the transport direction D is obtained. The stability of the whole system is improved. In particular, in the reference mass body 11 of the present embodiment, the front portion 11aa and the rear portion disposed outside the front and rear positions in the transport direction D with respect to the front mounting position 11a and the rear mounting position 11b connected to the piezoelectric driving bodies 16a and 16b. Since the portion 11bb is configured to protrude in the vertical direction and has a relatively large mass, the inertia against the pitching motion of the reference mass body 11 along the transport direction D can be increased. Instability of the transport posture and propagation of vertical vibration to the installation surface can be suppressed. Further, in the device assembly process, after the main vibration system is assembled, the vibration-proof springs 13a and 13b can be assembled from the front and rear sides in the transport direction D, so that there is an advantage that the assembling work is facilitated. The front part 11aa and the rear part 11bb also function as cover members for the piezoelectric drive bodies 16a and 16b described later.

  As shown in FIGS. 6A to 6C, the piezoelectric driving bodies 16a and 16b of the present embodiment are bonded (laminated) to a metal elastic substrate 16s called a shim plate and both front and back surfaces of the elastic substrate 16s. ) Piezoelectric body (piezoelectric layer) 16p. The elastic substrate 16s includes thin portions extending at both ends (upper and lower ends) in the extending direction, and these thin portions constitute the upper amplification springs 17a and 17b and the lower amplification springs 18a and 18b. ing. An upper connection structure 16u and a lower connection structure 16d are formed at the upper ends of the upper amplification springs 17a and 17b and the lower ends of the lower amplification springs 18a and 18b. The upper connection structure 16u and the lower connection structure 16d are coupling through holes in the illustrated example, but may be screw holes, bosses, cutouts, or the like, and are not particularly limited. The elastic substrate 16s has side connection structures 16t and 16t for the reference mass body 11 on both sides in the width direction of the intermediate portion in the extending direction. The side connection structure 16t is a protruding portion with a hole protruding in the width direction in the illustrated example, but may be a screw hole, a boss, a notch, or the like, and is not particularly limited. At this time, the piezoelectric body 16p is disposed at an intermediate position in the width direction between the left and right side connection structures 16t on the elastic substrate 16s. In this way, since the coupling position with respect to the reference mass body 11 is provided on both sides in the width direction avoiding the piezoelectric body 16p, it is difficult to affect the bending deformation operation of the piezoelectric driving bodies 16a and 16b, and reliably on both the left and right sides. By coupling to the reference mass body 11, the piezoelectric driving bodies 16 a and 16 b can be firmly fixed to the reference mass body 11, and the upper mass body 12 </ b> A and the lower mass body 12 </ b> B on both upper and lower sides with respect to the reference mass body 11. It is possible to reliably apply an excitation force to the.

  The piezoelectric driving bodies 16a and 16b are configured such that when a voltage is applied to the front and back of the piezoelectric body 16p, the piezoelectric body 16p is deformed according to the voltage, whereby the elastic substrate 16s is bent in the length direction. Then, by applying an alternating voltage of a predetermined frequency, the piezoelectric driving bodies 16a and 16b vibrate by alternately bending and deforming in opposite directions, and the vibrations are caused by the upper amplification springs 17a and 17b and the lower amplification springs 18a and 18a. A vibration substantially along the transport direction D is generated between the reference mass body 11, the upper mass body 12A, and the lower mass body 12B via 18b. Here, the piezoelectric driving bodies 16a and 16b at the front and rear positions in the transport direction D are both bent and deformed in the same phase, and the upper piezoelectric driving sections 16au and 16bu and the lower piezoelectric driving sections 16ad and 16bd are also deformed in the same phase. The upper mass body 12A and the lower mass body 12B also vibrate in the same phase with respect to the reference mass body 11. At this time, the reference vibrating body 11 vibrates with an opposite phase so as to cancel the reaction force due to the vibration of the upper mass body 12A and the lower mass body 12B. The piezoelectric driving bodies 16a and 16b in the illustrated example have a bimorph structure in which the piezoelectric bodies 16p are disposed on both surfaces of the elastic substrate 16s, but have a unimorph structure in which the piezoelectric bodies are disposed only on one surface of the elastic substrate 16s. In addition, various other known piezoelectric drivers can be used. The piezoelectric drivers 16a and 16b have a structure that is symmetrical in the length direction (up and down) with the intermediate portion (specifically, a horizontal line connecting the side connection structures 16t on both sides in the width direction) as the axis of symmetry. Also, it is configured symmetrically in the width direction (left and right) with the axis line along the vertical direction of the central portion in the width direction as the axis of symmetry. As a result, an equal in-phase excitation force can be reliably applied to both the upper mass body 12A and the lower mass body 12B, and a stable vibration mode can be realized with little kinking and the like when viewed in the width direction. it can.

  The elastic substrate 16s of the piezoelectric driving bodies 16a and 16b is formed thick in the upper piezoelectric driving sections 16au and 16bu and the lower piezoelectric driving sections 16ad and 16bd configured in the range where the piezoelectric bodies 16p are stacked, and the upper piezoelectric driving is performed. The upper amplifying springs 17a and 17b and the lower amplifying springs 18a and 18b extending further vertically from the portions 16au and 16bu and the lower piezoelectric driving portions 16ad and 16bd are thinly configured. The reason is as follows. Since the piezoelectric body 16p is usually made of ceramic and is fragile and easily broken, the upper piezoelectric driving sections 16au and 16bu and the lower piezoelectric driving sections 16ad and 16bd of the piezoelectric driving bodies 16a and 16b avoid element damage. In order to achieve this, it is necessary to increase the thickness of the elastic substrate 16s to suppress elastic deformation and limit the amount of deformation of the piezoelectric body 16p. On the other hand, the upper amplification springs 17a and 17b and the lower amplification springs 18a and 18b amplify the amplitude of vibrations generated in the upper piezoelectric drive units 16au and 16bu and the lower piezoelectric drive units 16ad and 16bd, and the conveyance force of the conveyed product. In order to obtain sufficient, the elastic substrate 16s is thinned to increase the amount of elastic deformation, and the upper mass body 12A and the lower mass body 12B (especially, the upper mass body 12A provided with the conveyance path 12t) are vibrated in the conveyance direction. It is necessary to enlarge the amplitude of. Therefore, the above-described change in the thickness of the elastic substrate 16s brings about an effect that both protection (damage prevention) of the piezoelectric body 16p and securing of vibration amplitude of the upper mass body 12A and the lower mass body 12B can be achieved.

  Here, in the boundary region between the upper piezoelectric driving portions 16au and 16bu and the lower piezoelectric driving portions 16ad and 16bd and the upper amplification springs 17a and 17b and the lower amplification springs 18a and 18b, the cross-sectional shape of the elastic substrate 16s is Tapered toward the upper amplification springs 17a, 17b and the lower amplification springs 18a, 18b so that the thickness gradually changes in the extending direction of the upper vibration springs 14a, 14b and the lower vibration springs 15a, 15b. Preferably, it is configured. As a result, the stress concentrates locally on the boundary region of the elastic substrate 16s (particularly on the side of the thinner upper amplification springs 17a and 17b and the lower amplification springs 18a and 18b), resulting in a decrease in durability. Or the elastic characteristics of the entire lengthwise direction of the upper amplification springs 17a and 17b and the lower amplification springs 18a and 18b cannot be effectively used. In particular, as in the illustrated example, the contour shape of the cross section of the boundary region is configured as a concave curve along the extending direction, and the surface of the cross section of the upper amplification springs 17a and 17b and the lower amplification springs 18a and 18b or It is desirable that the upper amplification springs 17a and 17b and the lower amplification springs 18a and 18b are smoothly bent and deformed so as to converge smoothly on the contour line on the back surface.

  In the case of the present embodiment, a pair of bolts 19a penetrates a pair of side connection structures 16t and 16t provided on both sides of the piezoelectric driving body 16a through both widthwise portions of the front portion 11aa. The state is fastened to the intermediate portion 11ab. Thereby, the piezoelectric driving body 16a is fixed to the reference mass body 11 in a state where the side portion connection structure 16t is sandwiched between the front portion 11aa and the intermediate portion 11ab. In the illustrated example, the bolt 19a holds and fixes the upper end portion of the vibration-proof spring 13a between the washer 19c and the front portion 11aa, and simultaneously holds and fixes the front portion 11aa, the piezoelectric driving body 16a, and the intermediate portion 11ab. Similarly, in the state where the pair of bolts 19b penetrates the both sides in the width direction of the rear part 11bb and passes through the pair of side connection structures 16t and 16t provided on both sides in the width direction of the piezoelectric driving body 16b, respectively. 11ab. Thereby, the piezoelectric drive body 16b is fixed to the reference | standard mass body 11 in the state by which the said side part connection structure 16t was pinched between back part 11bb and intermediate part 11ab. In the illustrated example, the bolt 19b holds and fixes the upper end portion of the vibration isolating spring 13b between the washer 19d and the rear portion 11bb, and simultaneously holds and fixes the rear portion 11bb, the piezoelectric driving body 16b, and the intermediate portion 11ab.

  As shown in FIG. 1, the lower ends of the anti-vibration springs 13 a and 13 b are connected and fixed to the upper support 2 </ b> A of the base 2. The base 2 includes an upper support 2A and a lower support 2B, and the upper support 2A is installed on the lower support 2B. Horizontal anti-vibration springs 13ah and 13bh made of leaf springs installed in a horizontal posture are connected between the upper support base 2A and the lower support base 2B. The upper support 2A is elastically supported above the lower support 2B by horizontal anti-vibration springs 13ah and 13bh. The horizontal anti-vibration spring 13ah disposed on the front side in the transport direction D is attached and fixed to the front mounting portion 2Aa of the upper support base 2A on the front side in the transport direction D, and the lower support base 2B on the rear side in the transport direction D. Are attached and fixed to the front mounting portion 2Ba. Further, the horizontal anti-vibration spring 13bh disposed on the rear side in the transport direction D is attached and fixed to the rear mounting portion 2Bb of the lower support base 2B on the front side in the transport direction D, and supported on the upper side on the rear side in the transport direction D. It is fixedly attached to the rear mounting portion 2Ab of the base 2A. In the illustrated example, the fixing holes for fixing the installation surface (the base of another device, the floor of the factory, etc.) on the left and right sides of the lower support base 2B (FIG. 2 shows only one fixing hole on one side. In order to enable fixing to the installation surface using these fixing holes, the upper support base 2A and the lower mass body 12B are provided on the left and right sides of the central portion in the transport direction D. Both sides are provided with a planar shape configured in a concave shape.

  In the present embodiment, the upper mass body 12A is connected and fixed on the connection block 12Ad to which the upper ends of the upper amplification springs 17a and 17b are connected, and the transport path 12t is formed on the upper surface. A transport block 12Au. The transport block 12Au is generally longer in the transport direction D than the connection block 12Ad, and protrudes forward and backward from the front end and the rear end of the connection block 12Ad in the transport direction D, as shown in the figure. Installed. The conveyance path 12t is configured in a straight line along the conveyance direction D in the illustrated example. The transport path 12t includes at least a groove structure configured to be able to store a transported object in a predetermined posture and to maintain a predetermined posture of the transported object when transported along the transport direction D.

  In front of the conveyance direction D, the upper amplification spring 17a and the lower amplification spring 18a are connected and fixed to the upper mass body 12A and the lower mass body 12B from the front side in the conveyance direction D. Here, the upper coupling portion 12AaS between the upper amplification spring 17a and the upper mass body 12A and the lower coupling portion 12BaS between the lower amplification spring 18a and the lower mass body 12B are coupled structures along the transport direction D. Are configured to be substantially the same. Below, with reference to FIG. 5, upper connection part 12AaS is demonstrated and description is abbreviate | omitted about lower connection part 12BaS.

  As shown in FIG. 5, in the upper connecting portion 12AaS, a front end recess 12aa configured in a concave shape that opens forward in the transport direction D is formed at the center in the width direction at the front end portion 12a in the transport direction D of the upper mass body 12A. ing. In addition, a pair of end surfaces on both sides in the width direction of the front end recess 12aa of the front end portion 12a is a front end surface 12as that is configured to be flat along the width direction. The upper end portion of the upper amplifying spring 17a is fixed in a state of being in close contact with the central portion in the width direction of the connecting plate 12AaC from the front side in the transport direction D using a bolt and a washer. The connecting plate 12AaC is composed of an elastic body (metal plate) having a plate shape extending on both sides in the width direction relative to the upper amplification spring 17a, straddling the front end recess 12aa, and both end portions in the width direction of the pair of front ends. It is fixed to the upper mass body 12A with bolts, washers and the like while being in close contact with the surface 12as from the front side in the transport direction D. In this way, the upper amplification spring 17a is fixed to the central portion in the width direction of the connecting plate 12AaC, and both sides in the width direction of the connecting plate 12AaC are fixed to the upper mass body 12A. Therefore, the upper mass body 12A is elastically connected to the upper mass body 12A. Here, the connecting plate 12AaC is a torsion spring configured to be elastically deformable in a direction rotating around an axis Txa along the width direction of the connecting plate 12AaC, which is orthogonal to both the transport direction D and the vertical direction. Constitutes a functioning upper spring element;

  On the other hand, also in the rear in the transport direction D, the upper amplification spring 17b and the lower amplification spring 18b are connected and fixed to the upper mass body 12A and the lower mass body 12B from the front side in the transport direction D. Here, the upper coupling portion 12AbS between the upper amplification spring 17b and the upper mass body 12A and the lower coupling portion 12BbS between the lower amplification spring 18b and the lower mass body 12B are coupled structures along the transport direction D. Are configured to be substantially the same. For this reason, in the following, the upper connecting portion 12AbS will be described with reference to FIG. 5, and the description of the lower connecting portion 12BbS will be omitted.

As shown in FIG. 5, in the upper connecting portion 12AbS, the rear end recess 12bb configured in a concave shape that opens rearward in the transport direction D is formed at the center in the width direction at the rear end 12b of the upper mass body 12A in the transport direction D. Is formed. Further, the pair of end surfaces on both sides in the width direction of the rear end recess 12bb of the rear end portion 12b are rear end surfaces 12bs configured to be flat along the width direction. The upper end portion of the upper amplification spring 17b is fixed in a state of being in close contact with the central portion in the width direction of the connecting plate 12AbC from the front side in the transport direction D using a bolt and a washer in the rear end recess 12bb. However, in the illustrated example, as an example, the spacer 12Absp is interposed between the upper end portion of the upper amplification spring 17b and the connecting plate 12AbC. The connecting plate 12AbC is composed of an elastic body (metal plate) having a plate shape extending on both sides in the width direction relative to the upper amplification spring 17b. Are fixed to the upper mass body 12A by bolts, washers and the like in close contact with the pair of rear end surfaces 12bs from the rear side. In this way, the upper amplification spring 17b is fixed to the central portion in the width direction of the connecting plate 12AbC, and both side portions in the width direction of the connecting plate 12AbC are fixed to the upper mass body 12A. Therefore, the upper mass body 12A is elastically connected to the upper mass body 12A. Here, the connecting plate 12AbC functions as a torsion spring configured to be elastically deformable in the torsional direction around the axis Txb along the width direction of the connecting plate 12AbC, which is orthogonal to both the transport direction D and the vertical direction. To obtain an upper spring element.

  In any of the upper coupling portions 12AaS and 12AbS provided at the front and rear positions in the conveyance direction D described above, the upper ends of the upper amplification springs 17a and 17b are arranged on the front side in the conveyance direction D, and the coupling plates 12AaC and 12AbC are conveyed. In a state of being arranged on the rear side in the direction D, they are fixed to each other directly or via the spacer 12Absp. Therefore, between the upper amplification springs 17a and 17b in the transport direction D and the upper mass body 12A, an upper spring element constituting the torsion spring disposed on the rear side in the transport direction D of the upper amplification springs 17a and 17b is provided. Intervene. In addition, in the upper connection part AbS on the rear side in the transport direction D, compared to the distance in the transport direction D between the upper amplification spring 17a and the upper spring element in the upper connection part AaS on the front side in the transport direction D, The distance in the conveying direction D between the amplification spring 17b and the upper spring element is increased by the thickness of the spacer 12Absp.

  Next, based on the above-described configuration, operation modes of the reference mass body 11, the upper mass body 12A, and the lower mass body 12B by the piezoelectric driving bodies 16a and 16b will be described. As shown in FIG. 6B, in this embodiment, the upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b are connected to the reference mass body 11 at a fixed position 11p. On the other hand, the substantially fixed positions 12Ap and 12Bp of the upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b with respect to the upper mass body 12A and the lower mass body 12B are shifted to the rear side in the transport direction D. This is because the connecting plates 12AaC, 12AbC and 12BaC, 12BbC interposed between the upper mass body 12A and the lower mass body 12B in the above-described configuration are more than the upper amplification springs 17a, 17b and the lower amplification springs 18a, 18b. This is because it is arranged behind the transport direction D. That is, the upper spring element and the lower spring element corresponding to the torsion spring constituted by the connecting plates 12AaC, 12AbC and 12BaC, 12BbC are more rearward in the transport direction D than the upper amplification springs 17a, 17b and the lower amplification springs 18a, 18b. The upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b are arranged by being connected to the upper mass body 12A and the lower mass body 12B via these upper and lower spring elements. The upper mass body 12A and the lower mass body 12B are moved in the transport direction D in the same manner as in the case where the upper mass body 12A and the lower mass body 12B are installed so as to incline toward the rear side in the transport direction D as they move away from the fixed position 11p in the vertical direction. On the other hand, it is vibrated in the vibration directions BVs and BVt (see FIG. 1) which are inclined. That is, the upper mass body 12A vibrates in a diagonally upward direction BVs on the front side in the transport direction D and diagonally downward on the rear side in the transport direction D, and the lower mass body 12B moves forward in the transport direction D. It vibrates in a direction BVt that is obliquely downward on the side and obliquely upward on the rear side in the transport direction D.

  Therefore, in the case of the present embodiment, the vibration angle θ of the upper vibration springs 14a and 14b is an angle difference (inclination angle) of a line connecting the fixed position 11p and the fixed positions 12Ap and 12Bp with respect to the vertical plane. Corresponds to the vibration angle of the upper mass body 12A with respect to the horizontal plane. Similarly, the vibration angles of the lower vibration springs 15a and 15b also coincide with the vibration angles of the lower mass body 12B with respect to the horizontal plane. In addition, in the enlarged partial sectional view shown in FIG. 6C, the axis Txa and Txb in the width direction of the connecting plates 12AaC and 12AbC (not shown, but the axis in the width direction of the connecting plates 12BaC and 12BbC is also the same). Although it is illustrated so as to coincide with the position 12Ap (12Bp), the position of the substantial fixed position 12Ap (12Bp) depends on the axes Txa and Txb (illustrated) according to the characteristics of the upper spring element (lower spring element). May not be the same axis). However, as long as the upper and lower spring elements are arranged on the rear side in the transport direction D with respect to the upper amplification springs 17a and 17b and the lower amplification springs 18a and 18b, the upper vibration springs 14a and 14b and the lower The vibration angle θ described above exists in the side vibration springs 15a and 15b, and the vibration in the direction inclined in the above-described direction is generated in the upper mass body 12A and the lower mass body 12B.

  Further, as shown in FIG. 6D, as a different example of the first embodiment, the spacers 12Absp (12Bbsp) are changed to spacers 12Absp ′ and 12Bbsp ′ having different thicknesses, so that the upper amplification springs 17a and 17b and the lower Since the distance along the conveyance direction D between the side amplification springs 18a, 18b and the connecting plates 12AaC, 12AbC and 12BaC, 12BbC can be increased or decreased, the vibration angle θ can be changed to θ ′. FIG. 7 is a plan view of the main structure of the second embodiment. In this example, the spacer 12Absp ′ thicker than the spacer 12Absp is used for the upper connecting portion 12AbS ′ on the rear side in the transport direction D, so that the vibration angle θ ′ on the rear side in the transport direction D is set to the vibration angle of the first embodiment. It is larger than θ. In this example, except for the upper connecting portion 12AbS ′ shown in FIG. 7 and a lower connecting portion (not shown) configured similarly to the above, the other configurations are the same as the above-described configuration of the first embodiment. .

  In the present embodiment, the main bodies of the upper vibration springs 14a and 14b and the main bodies of the lower vibration springs 15a and 15b constituted by the piezoelectric driving bodies 16a and 16b, the upper amplification springs 17a and 17b, and the lower amplification springs 18a and 18b are conveyed. It is installed in a vertical posture having an extending direction along a vertical plane perpendicular to the direction D. For this reason, since the vibration system can be configured without tilting the upper and lower piezoelectric drive bodies 16a and 16b, the upper amplification springs 17a and 17b, and the lower amplification springs 18a and 18b, the piezoelectric drive bodies 16a and 16b are operated at a high frequency. Thus, even if the main vibration system is vibrated at high speed, unnecessary vibration modes such as up and down dance are not easily generated, and the transport posture of the transported object can be stabilized. Accordingly, it is easy to increase the frequency of the apparatus, and it is possible to realize high-speed conveyance and a smooth conveyance mode.

  Further, as described above, the upper connecting portions 12AaS, 12AbS and the lower connecting portions arranged on the rear side in the transport direction D from the upper connecting ends of the upper amplifying springs 17a, 17b and the lower connecting ends of the lower amplifying springs 18a, 18b. By connecting the upper mass body 12A and the lower mass body 12B via the portions 12BaS and 12BaS, the main bodies of the upper vibration springs 14a and 14b and the main bodies of the lower vibration springs 15a and 15b are kept in a vertical posture. However, the upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b can be substantially provided with vibration angles θ and θ ′, and the above-described changes can be made depending on the presence or absence of the spacers 12Absp and 12Absp ′ and the thickness. The vibration angles θ and θ ′ can be easily adjusted. For this reason, on the conveyance path 12t formed in the conveyance block 12Au, it is possible to generate a conveyance force for conveying the conveyance object in the conveyance direction F toward the front side in the conveyance direction D, and in the conveyance direction D. Since it is possible to adjust the magnitude of the conveying force and the distribution of the conveying force along the conveying direction D by adjusting the vibration direction BVs shown in FIG. 1 corresponding to the vibration angles θ and θ ′ at the front and rear positions, The conveyance speed and the conveyance mode can be controlled.

[Second Embodiment]
FIG. 8A is a cross-sectional view showing the piezoelectric drivers 16a and 16b, the upper connecting portions 12AaS and 12AbS, and the lower connecting portions 12BaS and 12BbS according to the first embodiment, and FIG. 8B is a second embodiment. FIG. 6 is a cross-sectional view showing the piezoelectric driving bodies 16a ″ and 16b ″, the upper connecting portions 12AaS ″ and 12AbS ″, and the lower connecting portions 12BaS ″ and 12BbS ″. Also in the second embodiment, the elastic substrate 16s ″ of the piezoelectric driving bodies 16a ″ and 16b ″ is within the range in which the piezoelectric body 16p is formed (the above-described upper piezoelectric driving sections 16au and 16bu and the lower piezoelectric driving sections 16au and 16bu and the lower side). The upper piezoelectric springs 16ad, 16bd) are thick, and the upper part constituting the upper amplification springs 17a ", 17b" and the lower part constituting the lower amplification springs 18a ", 18b" are thinly formed. In the second embodiment, the thickness ranges of the upper amplification springs 17a "and 17b" and the lower amplification springs 18a "and 18b" are such that the elastic substrate 16s of the upper piezoelectric drive portions 16au and 16bu and the lower piezoelectric drive portions 16ad and 16bd. It differs in that it is shifted (biased) backward in the transport direction D by δts with respect to the thickness range of “″. In the illustrated example, the surfaces on the rear side in the transport direction D of the upper amplification springs 17a ″ and 17b ″ and the lower amplification springs 18a ″ and 18b ″ are the upper piezoelectric drive portions 16au and 16bu and the lower piezoelectric drive portion 16ad. , 16bd in the conveying direction D, the surface on the rear side is formed so as to be flat as it is extended along the vertical plane. On the other hand, the front surface in the transport direction D of the upper amplification springs 17a ″ and 17b ″ and the lower amplification springs 18a ″ and 18b ″ are formed on the upper piezoelectric driving portions 16au and 16bu and the lower piezoelectric driving portions 16ad, It is largely retracted toward the rear side in the transport direction D from the front surface in the transport direction D of 16bd.

  Also in this embodiment, the elastic substrate is formed in the boundary region between the upper piezoelectric driving portions 16au and 16bu and the lower piezoelectric driving portions 16ad and 16bd, and the upper amplification springs 17a ″ and 17b ″ and the lower amplification springs 18a ″ and 18b ″. The cross-sectional shape of 16s "is such that the upper amplification springs 17a", 17b "and the lower amplification springs 17a", 17b "and the lower amplification springs 18a", 18b "are gradually changed in thickness in the extending direction. Amplifying springs 18a ", 18b" are tapered toward the sides. In particular, as shown in the example of the drawing, the contour shape on the front side in the transport direction D of the cross section of the boundary region is along the extending direction. The upper amplification springs 17a "and 17b" and the lower amplification springs 18a "and 18b" are configured to converge smoothly on the contour line of the front surface in the conveying direction D. .

  In this case, since the fixed positions 12Ap ″ and 12Bp ″ are shifted (biased) to the rear side in the transport direction D by the deviation δts in the thickness range, the vibration angle θ ″ is compared with the first embodiment. The piezoelectric driving bodies 16a ″ and 16b ″ are not provided with the upper coupling portions 12AaS and 12AbS described in the first embodiment, and the upper amplification springs 17a and 17b and the lower amplification spring 18a. , 18b can be directly connected to the upper mass body 12A and the lower mass body 12B, a certain vibration angle θ can be obtained by the deviation δts in the thickness range.

[Matters concerning all embodiments]
In general, the absolute values of the vibration angles θ, θ ′, θ ″ of the upper vibration springs 14a, 14b and the lower vibration springs 15a, 15b (in particular, the upper mass body 12A provided with the transport path 12t). The angle of the vibration direction BVs) is preferably an angle value with respect to the horizontal direction within a range of 1 to 10 degrees, preferably 2 to 8 degrees, and desirably 3 to 6 degrees. The upper vibration spring 14a and the lower vibration spring 15a, and the upper vibration spring 14b and the lower vibration spring 15b on the rear side in the transport direction D may have the same vibration angle, but the shape of the transport block 12Au, In order to optimize the vibration mode and the vibration distribution mode over the entire length on the transport path 12t according to the structure of the entire vibration system including the structure and the like, the upper vibration springs 14a before and after the transport direction D and Lower vibration spring 1 a, the upper vibration spring 14b, and the lower vibration spring 15b may be set to have mutually different vibration angles, for example, other devices connected to the front or rear in the transport direction D with respect to the apparatus. Depending on the relationship with the apparatus, if the amount of protrusion of the transport block 12Au in the transport direction D on the front side is larger than the amount of protrusion on the rear side in the transport direction D, it is caused by the weight balance of the upper mass body 12A. The substantial vibration angle may vary along the conveyance direction D of the conveyance path 12t, and the conveyance force may vary.At this time, the conveyance angle can be set by making the vibration angle different at the front and rear positions in the conveyance direction D. On the path 12t, the conveyance speed can be adjusted along the conveyance direction D. However, the conveyance speed is not necessarily adjusted so as to be uniform along the conveyance direction D, and is intentionally along the conveyance direction D. Carry For example, in the case where a transported object sorting unit is provided in the middle of the transport path 12t, such as removing a part of the transported object from the transport path 12t based on the transport posture, the quality of the product, or the like. In some cases, the transport speed is gradually decreased from the upstream side to the downstream side of the transport path 12t, so that the transport density can be made uniform in the transport direction as a result. Depending on various situations, the vibration angles of the upper vibration spring 14a and the lower vibration spring 15a at the front position in the transport direction D and the vibrations of the upper vibration spring 14b and the lower vibration spring 15b at the rear position in the transport direction D. The corners may be adjusted separately.

  On the other hand, the vibration angles of the upper vibration springs 14a and 14b and the vibration angles of the lower vibration springs 15a and 15b are set so as to be opposite to each other as described above. Also in this case, the vibration angle of the upper vibration springs 14a and 14b and the vibration angle of the lower vibration springs 15a and 15b may be configured to have the same absolute value, or may be configured to have different absolute values. May be. For example, in accordance with the influence of gravity on the upper mass body 12A and the lower mass body 12B, a difference in mass, or the like, the conveyance state of the conveyed object on the conveyance path 12t is stabilized and the amount of vibration leakage is minimized. Therefore, it is desirable to separately adjust the vibration angles of the upper vibration springs 14a and 14b and the vibration angles of the lower vibration springs 15a and 15b.

  Next, with reference to FIG. 9, the structure of the base 2 that can be commonly used in the above embodiments will be described in detail. As described above, the base 2 is constituted by the upper support 2A and the lower support 2B which are separate from each other, and between the upper support 2A and the lower support 2B, a horizontal anti-vibration spring 13ah, 13bh intervenes to constitute a vibration-proof structure that can easily absorb vertical vibrations. The horizontal anti-vibration springs 13ah and 13bh are plate-like plate springs installed in a horizontal posture extending along the transport direction D. Here, the horizontal anti-vibration springs 13ah and 13bh make up for the point that the anti-vibration springs 13a and 13b that are easy to absorb the vibration in the transport direction D are configured not to easily absorb the vertical vibration. The horizontal anti-vibration spring 13ah installed at the front position in the conveying direction D is fixed to the front mounting portion 2Aa of the upper support 2A by a pair of bolts 21Aa and washers 22Aa arranged in the width direction. Yes. Further, the front mounting portion 2Ba of the lower support 2B protrudes in a band shape extending in the width direction and has a flat upper end surface, and a horizontal vibration-proof spring 13ah is connected to the rear mounting portion 2Ba from above by a bolt 21Ba. It is fixed in close contact. On the other hand, the horizontal anti-vibration spring 13bh installed at the rear position in the transport direction D is fixed to the rear mounting portion 2Ab of the upper support 2A by a pair of bolts 21Ab and washers 22Aa arranged in the width direction. Has been. Further, the rear mounting portion 2Bb of the lower support base 2B protrudes in a band shape extending in the width direction and has a flat upper end surface. With respect to the rear mounting portion 2Bb, a horizontal anti-vibration spring 13bh is attached from above by a bolt 21Bb. It is fixed in close contact.

  The upper support 2A is provided with bolt housing portions 2Aaq and 2Abq that are opened at least downward. The bolt accommodating portion 2Aaq accommodates the bolt 21Ba so as not to conflict, and the bolt accommodating portion 2Abq accommodates the bolt 21Bb so as not to conflict. Similarly, the lower support 2B is provided with bolt housing portions 2Baq and 2Bbq that are open at least upward. The bolt accommodating portion 2Baq accommodates the bolt 21Aa so as not to conflict, and the bolt accommodating portion 21Bbq accommodates the bolt 21Ab so as not to conflict. In the illustrated example, the bolt accommodating portions 21Aaq, 21Abq, 21Baq, and 21Bbq are formed as through holes in the upper support base 2A or the lower support base 2B, respectively. However, each bolt accommodating part may be a structure that can be accommodated in a non-contact state so as not to touch each corresponding bolt. It may be.

  In the base 2 configured as described above, the bolt heads fastened to one of the support bases can be provided even if the distance between the upper support base 2A and the lower support base 2B is reduced by providing each of the bolt housing portions. Since the fixing structure for fixing the horizontal anti-vibration spring such as the portion does not come into contact with (but does not come into contact with) the other support base, the height of the base 2 can be reduced. Further, since the vertical distance between the upper support base 2A and the lower support base 2B can be reduced, tilting of the upper support base 2A due to the bending of the horizontal anti-vibration springs 13ah and 13bh can be suppressed. Further, in the present embodiment, the horizontal anti-vibration springs 13ah and 13bh are connected with the upper support base 2A and the lower support base 2B facing the transport direction D. Thereby, since the main vibration system becomes difficult to swing in the width direction, the transport posture of the transported object can be stabilized. In particular, in the horizontal anti-vibration springs 13ah and 13bh, the mounting directions viewed in the transport direction D are opposite to each other. That is, in the horizontal anti-vibration spring 13ah, the fixed position with respect to the upper support base 2A is in front of the conveyance direction D with respect to the fixed position with respect to the lower support base 2B, whereas in the horizontal anti-vibration spring 13bh, The fixed position with respect to the upper support base 2A is behind the transport direction D with respect to the fixed position with respect to the side support base 2B. As a result, when the upper support 2A that supports the main vibration system via the anti-vibration springs 13a and 13b vibrates up and down on the lower support 2B, the curve of the arc-shaped trajectory during elastic deformation is reduced. Due to the mutual interference between the horizontal anti-vibration springs 13ah and 13bh resulting from the fact that the direction is before and after the transport direction D, an elastic deformation characteristic is obtained that is less likely to be elastically deformed rapidly as the vertical movement amplitude increases. Therefore, although the minute vertical movement caused by the vibration force of the vibration means itself is absorbed, it does not cause instability of the main vibration system and can prevent the main vibration system from causing large vertical movement and pitching operation. .

  If the vibration isolation structure only needs to absorb the vibration in the transport direction D, the vibration isolation springs 13a and 13b are directly installed on the installation surface or connected to a base having no horizontal vibration isolation springs 13ah and 13bh. Thus, the vibration isolation structure that elastically supports the main vibration system may be a structure having only a pair of vibration isolation springs 13a and 13b at the front and rear positions in the transport direction D. In particular, if the drive frequency is 500 Hz or less, minute vertical vibrations are hardly a problem. Therefore, if only vibrations in the conveyance direction D of the main vibration system are absorbed, the purpose of vibration isolation can be achieved. In the composite vibration-proof structure including the pair of vibration-proof springs 13a and 13b and the pair of horizontal vibration-proof springs 13ah and 13bh, the basic function of absorbing the vibration in the transport direction D and the vertical vibration is mainly The anti-vibration spring and the horizontal anti-vibration spring may be connected in series between the vibration system and the installation surface. For example, the upper support 2A is divided into front and rear in the transport direction D, and the vibration isolation structure having the vibration isolation spring 13a and the horizontal vibration isolation spring 13ah, and the vibration isolation spring 13b and the horizontal vibration isolation spring 13bh are provided. It is good also as a structure where a vibration structure part is arrange | positioned in the state mutually isolate | separated in the front-back position of the conveyance direction D. Further, the planar shape of the fixing region of the horizontal anti-vibration springs 13ah and 13bh with respect to the upper support base 2A is formed into two circular shapes by the two washers 22Aa and 22Ab, respectively. The planar shape of the fixed region with respect to 2B is formed in a band shape by the upper end surface shapes of the front mounting portion 2Ba and the rear mounting portion 2Bb. However, the planar shape of these fixed regions can be adjusted as appropriate according to the elastic deformation characteristics required for the horizontal anti-vibration springs 13ah and 13bh.

[Third Embodiment]
FIG. 10 is a side view showing a schematic structure of a third embodiment of the vibratory transfer apparatus according to the present invention. In the apparatus 20 of the third embodiment, the anti-vibration springs 13a and 13b before and after in the transport direction D are arranged in front of the corresponding piezoelectric drivers 16a and 16b before and after in the transport direction D with respect to the transport direction F, respectively. Unlike the above embodiments, the other structures are the same as those in the above embodiments. More specifically, the attachment positions of the vibration-proof springs 13a and 13b with respect to the reference mass body 11 are respectively in the conveyance direction rather than the attachment positions of the corresponding piezoelectric drive bodies 16a and 16b with respect to the reference mass body 11 before and after the conveyance direction D, respectively. In front of D, the anti-vibration springs 13a and 13b extend substantially vertically downward and are attached to the base 2 (actually, the above-described upper support 2A). Further, the front portion 11aa and the rear portion 11bb of the reference mass body 11 are provided on both sides in the width direction (direction orthogonal to the paper surface of FIG. 10), and both sides of the piezoelectric drivers 16a and 16b in the width direction are the same as in the previous embodiment. Is attached to the side connection structure. The intermediate portion 11ab is configured in the same manner as in the above-described embodiment. Further, in the front portion 11aa and the rear portion 11bb of the reference mass body 11, the vibration-proof springs 13a and 13b are respectively connected to the piezoelectric drive bodies 16a and 16b via cylindrical spacers 19c and 19d having the same shape and dimensions. Are attached from the front in the transport direction D. Thereby, the positional relationship (front-rear relationship) of the piezoelectric drive body 16a connected to the front portion 11aa and the vibration isolation spring 13a in the conveyance direction D, and the conveyance of the piezoelectric drive body 16b connected to the rear portion 11bb and the vibration isolation spring 13b. The positional relationship (front-rear relationship) in the direction D is configured to be the same when viewed in the transport direction D. In addition, the attachment structure of the anti-vibration springs 13a and 13b and the piezoelectric driving bodies 16a and 16a to the front part 11aa and the rear part 11bb is a structure fixed by a pair of bolts 19a and 19b, respectively, as in the previous embodiment. ing.

  When the vibratory transfer device is designed to have a low driving frequency (resonance frequency), the original has a vibration direction that is obliquely upward toward the conveyance direction F and obliquely downward toward the opposite direction. The influence on the conveyance by the vibration mode other than the vibration mode is not so serious. However, if the device structure is designed to have a high carrier frequency (resonance frequency) and the conveyed product is conveyed at a high speed, the conveyed item can easily jump up and down and left and right on the conveyance path due to the other vibration modes described above. Therefore, the conveyed product jumps out of the conveyance path, or the conveyance posture of the conveyed product changes during the conveyance. In addition, the conveyance speed greatly changes along the conveyance path, and the uniformity of the conveyance speed on the conveyance path along the conveyance direction D is lost. As a result, the conveyance efficiency of the conveyance object (the actual conveyance object is the exit of the conveyance path) The speed supplied to is controlled by the portion with the lowest transport speed along the transport path). In the present embodiment, as described above, the order in which the piezoelectric driving bodies 16a and 16b and the vibration-proof springs 13a and 13b are connected to the reference mass body 11 in the transport direction D is the same before and after the transport direction D. By being configured as such, the reaction force received from the upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b when viewed from the reference mass body 11, and the support (restraint) received from the vibration isolation springs 13a and 13b. Since the positional relationship along the transport direction D with the force is the same before and after the transport direction D, the stability of the entire main vibration system in the vertical direction and the width direction is increased, and the main vibration system is kinked. It is considered that the occurrence of the other vibration modes is suppressed. Actually, in the present embodiment, the jumping of the conveyed product in the vertical and horizontal directions is reduced, and the conveying speed along the conveying direction D is made uniform.

[Matters concerning all embodiments]
FIG. 11 shows a main mass composed of a reference mass body 11, an upper mass body 12A and a lower mass body 12B, upper vibration springs 14a and 14b, and lower vibration springs 15a and 15b according to each embodiment described in this specification. It is a schematic block diagram which shows the structure of a vibration system typically. Actually, the main vibration system is supported by the vibration isolation springs 13a and 13b, the horizontal vibration isolation springs 13ah and 13bh, the base 2, and the like as described above, so that the entire vibration system of each embodiment can be obtained. Composed. Oscillatory motion of the main vibration system, the mass _{M 11} of the reference mass 11, the mass body _{M 12B} of mass _{M 12A} and the bottom mass body 12B of the upper mass 12A, the upper vibration springs 14a, 14b and the lower vibration spring It is determined by the spring constants 15a and 15b, the upper vibration angle θau and the lower vibration angle θad on the front side in the transport direction D, and the upper vibration angle θbu and the lower vibration angle θbd on the rear side in the transport direction D. In FIG. 11, unlike the first embodiment, the upper vibration springs 14 a and 14 b and the lower vibration springs 15 a and 15 b are schematically illustrated as inclination springs having inclination angles that respectively match the vibration angles. It is shown. In each embodiment, not only the inclined spring but also the upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b having various structures are configured to have vibration angles. In this specification, the vibration angles of the upper vibration springs 14a and 14b are angles with respect to the horizontal plane in the direction of vibration at the connection point of the upper vibration springs 14a and 14b with the upper mass body 12A. The vibration angle 15b refers to an angle with respect to the horizontal plane in the excitation direction at a connection point with respect to the lower mass body 12B of the lower vibration springs 15a and 15b. Here, when the upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b are flat plate springs facing the conveyance direction D, the vibration angle which is an angle of the vibration direction of the plate springs with respect to the horizontal plane. Corresponds to an inclination angle with respect to a vertical plane perpendicular to the conveying direction D of the leaf spring. Further, in this specification, even when the spring structure of the upper vibration spring and the lower vibration spring is different from that of the leaf spring, the upper vibration spring and the lower vibration spring have the vibration angle obtained from them. Since it can be considered to be equivalent to the leaf spring having an inclination angle with respect to a vertical plane having the same value, the term inclination angle is used in the same meaning as the vibration angle.

  In this embodiment, the upper vibration angles θau and θbu both generate a vibration direction BVs that is obliquely upward toward the front side in the transport direction D and that is obliquely downward toward the rear side in the transport direction D. Configured as follows. Further, the lower vibration angles θad and θbd both generate a vibration direction BVt that is directed obliquely downward toward the front side in the conveyance direction D and directed obliquely upward toward the rear side in the conveyance direction D. Composed. Here, in each embodiment, the excitation forces Fau and Fbu applied between the reference mass body 11 and the upper mass body 12A by the piezoelectric driving bodies 16a and 16b constituting the in-phase excitation means, and the reference mass Excitation forces Fad and Fbd applied between the body 11 and the lower mass body 12B are applied in synchronization with the transport direction D. In this case, as shown in the drawing, the excitation forces Fau and Fad and the excitation forces Fbu and Fbd respectively applied at the front and rear positions in the transport direction D do not need to be the external forcing force of the forced vibration system. Only one of the exciting forces may be applied as an external forcing force, or both of the exciting forces are not external forcing forces, and the upper vibration springs 14a and 14b and the lower vibration spring 15a, You may comprise so that an external forcing force may be given to a main vibration system by the vibration means provided separately from 15b.

  If comprised in this way, since the upper mass body 12A and the lower mass body 12B are synchronously vibrated in the transport direction D with respect to the reference mass body 11, the rotation exerted by the upper mass body 12A with respect to the reference mass body 11 Since the moment and the rotational moment exerted by the lower mass body 12B are mutually reduced, it is possible to suppress the pitching motion in such a manner that the entire main vibration system swings back and forth in the transport direction D. In each embodiment, since the vibration direction BVs of the upper mass body 12A and the vibration direction BVt of the lower mass body 12B are inclined in the opposite directions in the vertical direction, the vertical vibration of the entire main vibration system Can be suppressed. Thus, in each embodiment, since the pitching motion and the vertical vibration are suppressed, it is possible to stabilize the transport posture of the transported object and reduce the leakage of vibration to the installation surface. In particular, if the frequency is increased, the effect of the above-mentioned pitching motion and vertical vibration on the transported goods and the outside will increase, so when dealing with the recent increase in the frequency of transport vibration and the increase in transport speed. It seems very effective.

In FIG. 11, since the upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b are illustrated in an inclined posture so as to have inclination angles corresponding to the vibration angles θau, θbu, θad, and θbd, the reference mass the center of gravity of the mass _{M 11} of the body 11A, the center of gravity of the mass _{M 12B} of the center of gravity of the mass _{M 12A} of the upper mass 12A and the bottom mass body 12B are not arranged in a straight line. However, in the first to third embodiments, the piezoelectric drivers 16a and 16b and the upper amplifying spring 17a, which constitute the main body of the upper vibration springs 14a and 14b and the main body of the lower vibration springs 15a and 15b, respectively. Since 17b and the lower amplification springs 18a and 18b are installed in a vertical posture, it becomes easy to _arrange the three centroids of the masses M ₁₁ , M _12A and M _12B substantially on one straight line. In particular, the three centroid positions can be arranged in the vertical direction. This means that when the main vibration system is driven at a high frequency by the piezoelectric driving bodies 16a and 16b constituting the in-phase excitation means of the present embodiment, an unnecessary vibration mode is generated or the vibration mode suitable for the conveyance purpose is present. This is effective in reducing the possibility of obstruction and easily realizing high frequency of the main vibration system while realizing a stable conveyance mode of the conveyed product.

[Fourth Embodiment]
FIG. 12 is a schematic configuration diagram showing the configuration of the main vibration system of the fourth embodiment. In the fourth embodiment, in order to provide the vibration angles θau, θbu, θad, θbd set as described above, the upper vibration springs 24a, 24b (piezoelectric drive bodies) located above the reference mass body 11 from the fixed position 11p. 26a, 26b upper piezoelectric drive portions 26au, 26bu and upper amplification springs 17a, 17b), and lower vibration springs 25a, 25b (lower piezoelectric drive portions 26ad, 26ad, 26b, 26b, 26b below the fixed position 11p). 26bd and the lower amplifying springs 18a, 18b) are configured to incline in opposite directions in the vertical direction, and the respective inclination angles coincide with the vibration angles θau, θbu, θad, θbd. It is configured as follows. As a result, since the upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b are inclined, the upper connection portions 12AaS and 12AbS and the lower connection portions 12BaS and 12BbS as in the first embodiment are provided. Without the vibration angle can be obtained.

  In the first to fourth embodiments described above, the piezoelectric driving bodies 16a, 16b, 26a, 26b and the upper amplification springs 17a, 17b and the lower amplification springs 18a, 18b are integrally configured. However, in each of the embodiments, the piezoelectric driving bodies 16a, 16b, 26a, 26b, the upper amplification springs 17a, 17b, and the lower amplification springs 18a, 18b are formed as separate components, and bolts or washers. For example, the structures may be connected to each other.

[Fifth Embodiment]
FIG. 13 is a schematic configuration diagram showing the configuration of the main vibration system of the fifth embodiment. In the fifth embodiment, the upper amplification springs 37a and 37b and the lower amplification springs 38a and 38b are configured separately from the piezoelectric driving bodies 36a and 36b, and the piezoelectric driving bodies 36a and 36b and the upper amplification springs 37a and 37b and The lower amplification springs 38a and 38b are each in a vertical posture along a vertical plane orthogonal to the transport direction D, and the upper and lower ends of the piezoelectric driving bodies 36a and 36b, and the lower ends and lower sides of the upper amplification springs 37a and 37b. The upper ends of the amplification springs 38a and 38b are connected to each other using bolts, washers or the like via spacers 39au, 39bu, 39ad, and 39bd having a thickness in the transport direction D. Even in this case, the fixed position 11p of the upper vibration springs 34a and 34b constituted by the upper piezoelectric drive portions 36au and 36bu and the upper amplification springs 37a and 37b with respect to the reference mass body 11 and the fixed position 12Ap with respect to the upper mass body 12A. The line (two-dot chain line in the figure) connecting the two sides is inclined, and the fixed positions 11p of the lower vibration springs 35a and 35b constituted by the lower piezoelectric drive portions 36ad and 36bd and the lower vibration springs 35a and 35b with respect to the reference mass body 11 A line (two-dot chain line in the figure) connecting the fixed position 12Bp with respect to the lower mass body 12B is inclined. Therefore, the vibration angles θau, θbu, θad, θbd of the upper vibration springs 34a, 34b and the lower vibration springs 35a, 35b can be set as in the previous embodiment. In this case, the vibration angles θau, θbu, θad, θbd can be easily adjusted by changing the thickness of the spacers 39au, 39bu, 39ad, 39bd in the transport direction D. Here, the lower ends of the upper amplification springs 37a and 37b and the upper ends of the lower amplification springs 38a and 38b are connected to the upper connection structure of the upper piezoelectric drive unit 36au and the lower connection structure of the lower piezoelectric drive units 36ad and 36bd. The connection is fixed in a state of being overlapped on the rear side in the transport direction D. In this way, a certain vibration angle can be obtained regardless of whether or not the spacer is interposed.

  In each of the embodiments described above, the upper piezoelectric drive units 16au, 16bu, 26au, 26bu, 36au, 36bu and the lower piezoelectric drive units 16ad, 16bd, 26ad, 26bd, 36ad, 36bd are integrally formed. The drive bodies 16a, 16b, 26a, 26b, 36a, and 36b are used. However, as the structure of the piezoelectric driving body, the upper piezoelectric driving section and the lower piezoelectric driving section are constituted by separate piezoelectric driving bodies, and these separate piezoelectric driving bodies are respectively coupled to the reference mass body 11. It may be. In addition, the piezoelectric body on the elastic substrate is formed integrally with the portion formed in the upper piezoelectric drive portion and the portion formed in the lower piezoelectric drive portion. It may be a structure formed separately in the drive unit and separated from each other.

[Effects of each embodiment]
In the main vibration system of each embodiment described above, when viewed in the transport direction D, the phase of vibration of the reference mass body 11 is opposite to the phase of vibration of the upper mass body 12A and the lower mass body 12B (phase difference). Is 180 degrees). Therefore, considering the base 2 as a reference, the reaction force in the conveyance direction D due to the vibration of the reference mass body 11 and the combined reaction force due to the vibrations of the upper mass body 12A and the lower mass body 12B cancel each other. Relationship (offset or diminishing relationship). As a result, the vibration in the conveyance direction D transmitted to the base 2 side through the vibration-proof springs 13a and 13b is reduced.

  On the other hand, when the reference mass body 11 is considered as a reference, the reaction force received from the upper mass body 12A and the reaction force received from the lower mass body 12B are in the same direction when viewed in the transport direction D, but are in phase with each other. Since the rotational moment of the upper mass body 12A and the rotational moment of the lower mass body 12B that vibrate in the opposite directions are opposite to each other, they cancel each other out (cancellation or killing relationship). Accordingly, the reaction force in the rotational direction received by the reference mass body 11 is reduced, the pitching operation is less likely to occur, and the vertical vibration transmitted to the base 2 side through the vibration isolation springs 13a and 13b is also reduced. . This also stabilizes the transport state such as the transport speed and transport posture of the transported object along the length direction of the transport path 12t.

  In the present invention, in the main vibration system shown in FIG. 11, in-phase excitation means for applying an excitation force so that the upper mass body 12 </ b> A and the lower mass body 12 </ b> B vibrate in the same phase with respect to the reference mass body 11. By providing the piezoelectric driving bodies 16a and 16b, the upper mass body 12A and the lower mass body 12B substantially operate as one mass body, in other words, operate as one mass body by the in-phase excitation means. To be restrained. For this reason, the reference mass body 11 which is one mass body elastically connected to the base 2 via the vibration isolation springs 13a and 13b, and the four vibration springs 14a, 14b, A forced (damped) vibration system having two degrees of freedom or two masses is formed, which has the other mass bodies (the upper mass body 12A and the lower mass body 12B) elastically connected via 15a and 15b. This vibration system has two resonance frequencies ω1 and ω2 that are high and low, and two mass bodies vibrate in opposite phases in a frequency band between the two resonance frequencies ω1 and ω2.

In the antiphase mode of the vibration system having these two mass bodies 11 and mass bodies 12A and 12B, the reaction forces in the transport direction D between the two mass bodies cancel each other when viewed in the transport direction D. However, in the embodiment, as described above, the other mass body is divided into the upper mass body 12A and the lower mass body 12B with respect to the reference mass body 11, which is one mass body, and elastically opposes each other. Since they are connected, the rotational moments received by the reference mass body 11 are also in a mutually canceling relationship. Here, if the position of the center of gravity of the mass M ₁₁ of the reference mass body 11 is used as a reference, the rotational moment of the upper mass body 12A is the product of the mass and the distance between the center of gravity, that is, M _12A × R _12A , and the lower mass body 12B Similarly, the rotational moment of M _12B × R _12B is obtained. However, the rotational moments of the upper mass body 12A and the lower mass body 12B are opposite to each other. Such a configuration of the vibration system forms a vibration mode that is basically different from that of the conventional apparatus, and realizes a transfer mode that does not depend on the fixing force by the installation surface. In the conventional apparatus, in order to secure the transport state of the transported object on the transport path, it was necessary to firmly fix to the installation surface and increase the weight of the base, whereas in the present invention, extremely speaking, Vibration mode even when the lower ends of the vibration-proof springs 13a and 13b are simply placed without being fixed on an installation surface such as a soft futon, or when the lightened base 2 is installed without being fixed. There is almost no change (deterioration), and the conveyance mode on the conveyance path 12t is hardly changed. As is apparent from the figure, considering only the main vibration system, it is preferable to substantially satisfy M ₁₁ = M _12A + M _12B in order to cancel the reaction force in the transport direction D, and the two rotational moments described above. Is substantially equal to M _12A × R _12A = M _12B × R _12B, and to reduce the pitching operation, substantially M _12A = M _12B and R _12A = R _12B . It is desirable.

  The above configuration and operational effects are basically based on the configuration shown in FIG. 11 showing the concept of the present invention. In the present embodiment, the in-phase excitation means (piezoelectric driving body) is the upper excitation unit. (Upper piezoelectric drive unit) and lower excitation unit (lower piezoelectric drive unit) respectively, and by directly applying the excitation force separately, the device structure can be simplified, for example, It is also possible to easily adjust the frequency, amplitude, and the like on the excitation side in order to cope with variations of the conveyed product and the conveyance path. In particular, in the present embodiment, the upper piezoelectric drive portions 16au and 16bu incorporated in the upper vibration springs 14a and 14b and the lower piezoelectric drive portions 16ad and 16bd incorporated in the lower vibration springs 15a and 15b are provided. Since the vibration is generated by the driving method, it is not necessary to provide a vibration mechanism separate from the vibration system, so that the device structure can be further simplified.

In the present embodiment, the upper vibration springs 14 a and 14 b and the lower vibration springs 15 a and 15 b are directly connected, and the connection point is connected and fixed to the reference mass body 11. Accordingly, since the action points of the reaction force received from the upper mass body 12A and the lower mass body 12B with respect to the reference mass body 11 coincide with each other, unnecessary vibrations and unnecessary moments due to the displacement of the action points of the upper and lower reaction forces are not generated. Does not occur. Further, since the upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b are directly connected, the vibration energy can be easily exchanged between the upper vibration spring and the lower vibration spring, so that it is more stable. It is thought that a simple vibration system can be constructed. Furthermore, in this embodiment, it has the effect that the height of the vibration type conveying apparatus 10 can be reduced by said structure. Note that the vibration model of FIG. 11 does not limit the present invention and the present embodiment at all, but M _12A = M _12B , R _12A = R _12B , upper vibration springs 14 a and 14 b, and lower vibration springs 15 a and 15 b. The length and the spring constant are all the same, and the length and the spring constant of the anti-vibration springs 13a and 13b are also the same.

  In the present embodiment, by using the integral piezoelectric driving bodies 16a and 16b in which the intermediate portion in the length direction is coupled to the reference mass body 11, both the upper mass body 12A and the lower mass body 12B are used. An exciting force can be applied reliably and stably. In particular, the piezoelectric driving bodies 16a and 16b can reliably apply the same-phase excitation force to the mass bodies 12A and 12B by bending deformation integrally with the upper and lower sides. In addition, since the upper piezoelectric drive portions 16au and 16bu and the lower piezoelectric drive portions 16ad and 16bd are arranged on the reference mass body 11 side in the upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b, the upper mass body 12A. When the conveying path 12t is provided in the upper mass body 12A or the lower mass body 12B by the upper amplification springs 17a, 17b or the lower mass springs 18a, 18b arranged on the lower mass body 12B side. Sufficient amplitude required for the can be generated.

  In the present embodiment, in addition to the above-described effects, the vibration angles θua and θub, which are substantial inclination angles of the upper vibration springs 14a and 14b, cause a vibration direction BVs that faces obliquely upward toward the front side in the transport direction D. And the vibration angles θda and θdb, which are substantial inclination angles of the lower vibration springs 15a and 15b, are set to bring the vibration direction BVt obliquely downward toward the front side in the transport direction D, A conveyance force based on the vibration angles θau and θbu can be obtained on the conveyance path 12t, and at the same time, the upper mass body 12A and the lower mass body 12B vibrate in the same phase with respect to the reference mass body 11. Vertical vibration can be reduced. Therefore, even when the vibration system has a high frequency or high-speed conveyance, it is possible to ensure the conveyance posture of the conveyed object and the uniform conveyance speed, and to suppress leakage of vibration to the installation surface. it can.

  Further, even in the main vibration system in which the occurrence of vertical vibration is small as described above, the vertical vibration may not be sufficiently suppressed when the frequency is increased. However, in this embodiment, the vertical vibration is prevented by interposing the horizontal anti-vibration springs 13ah and 13bh made of leaf springs installed in a horizontal posture between the upper support 2A and the lower support 2B of the base 2. Can be efficiently absorbed, and an increase in vertical vibration due to high frequency can be suppressed, so that it is possible to stabilize the transport posture and avoid leakage of vibration energy. In particular, by connecting the horizontal anti-vibration springs 13ah and 13bh in the transport direction D between the upper support base 2A and the lower support base 2B, the vibration system supported on the upper support base 2A is expanded in the width direction. It can be stabilized. In addition, the horizontal anti-vibration springs 13ah and 13bh are mounted on the upper support 2A by the mutual interference between the springs 13h and 13bh when the mounting directions of the horizontal anti-vibration springs 13ah and 13bh viewed in the transport direction D are reversed. The stability of the vibration system can be increased.

The inventors of the present application actually made a prototype of the device of the first embodiment and conducted an operation experiment. Here, as an example, the mass M 11 of the reference mass ₁₁ is 710 g, the mass M _12A of the upper mass _12A is 244.5 g (12Au is 190 g, 12Ad is 55.5 g), and the mass M of the lower mass 12B. _12B is 124.8 g, the mass of the upper support 2A is 59.5 g, the length of the piezoelectric driving bodies 16a and 16b is 50 mm, and they are symmetrical in the vertical and horizontal directions, and the vibration angle θau = θad = 3.91 degrees, θbu = θbd = 5.3 degrees, the height from the installation surface to the upper surface of the connection block 12Ad is 72.1 mm, and the total width (maximum width) of the reference mass body 11, the connection block 12Ad, and the lower mass body 12B is 35 mm. And as a result of driving the piezoelectric drive bodies 16a and 16b with an alternating voltage of 900 to 1200 Hz and transporting the transported object, it was confirmed that a minute electronic component or the like can be transported at a high speed in a stable posture even at a high frequency. . In this embodiment, the main bodies of the upper vibration springs 14a and 14b and the main bodies of the lower vibration springs 15a and 15b that are flexibly vibrated in the conveyance direction D are both installed in a vertical posture, and the upper vibration springs 14a and 14b. In the main body and lower vibration springs 15a and 15b, the upper piezoelectric drive portions 16au and 16bu and the upper amplification springs 17a and 17b, the lower piezoelectric drive portions 16ad and 16bd, and the lower amplification springs 18a and 18b are integrally formed. By being configured to reduce the height and stabilize the vibration, it is possible to increase the frequency up to the extremely high frequency range as described above and increase the conveyance speed, and at the same time, the stable vibration mode It is considered that it is possible to realize a stable conveyance mode of the conveyed product.

In addition, an apparatus of the fifth embodiment shown in FIG. 13 was prototyped and an operation experiment was performed. The structure other than the main vibration system is the same as that of the first embodiment. Here, as an example, the mass M 11 of the reference mass ₁₁ is 1110 g, the mass M _12A of the upper mass _12A is 530 g (371 Au of 12Au, 159 g of 12Ad), the mass M _12B of the lower mass _12B is 666 g, The mass of the upper support 2A is 284 g, the length of the main body portion where the piezoelectric bodies of the piezoelectric driving bodies 36a and 36b are stacked is 22 mm, and is symmetric in the vertical and horizontal directions, and the upper amplification springs 37a and 37b and the lower amplification spring 38a. , 38b, except for the fixed portion, was 13 mm. The vibration angle is θau = θad = θbu = θbd = 5.4 degrees, the same value at the front and rear positions in the transport direction, the height from the installation surface to the upper surface of the connection block 12Ad is 116.5 mm, and the reference mass 11 The total width (maximum width) of the connection block 12Ad and the lower mass body 12B was 38 mm. And as a result of driving the piezoelectric drive bodies 36a and 36b with an alternating voltage of 600 to 700 Hz and transporting the transported object, it was confirmed that fine electronic components and the like can be transported at a high speed in a stable posture even at a high frequency. . In this embodiment, in the upper vibration springs 34a and 34b and the lower vibration springs 35a and 35b, the upper piezoelectric drive units 36au and 36bu and the upper amplification springs 37a and 37b, and the lower piezoelectric drive units 36ad and 36bd and the lower amplification. Although the springs 38a and 38b are configured separately, the upper piezoelectric drive units 36au and 36bu and the upper amplification springs 37a and 37b, and the lower piezoelectric drive units 36ad and 36bd and the lower amplification springs 38a and 38b, respectively. Since each of them is installed in a vertical posture when viewed individually, it is possible to increase the frequency and the transport speed as described above, and at the same time, stable vibration mode and stable transport of transported items. It is considered that the aspect can be realized.

In the present invention, the mass M ₁₁ of the reference mass ₁₁ is substantially equal to the sum M _12A + M _12B of the mass of the upper mass 12A and the lower mass 12B (for example, the difference between the masses is 10% of the intermediate value between them) Or less than the sum M _12A + M _{12B of the} mass is preferable for obtaining a stable vibration mode. However, the main vibration system is elastically supported via the reference mass body 11, that is, the structure in which the reference vibration body 11 is connected to the anti-vibration springs 13a, 13b, 13ah, 13bh, and the conveyance path is on the upper side. In consideration of being provided in the mass body 12A (or the lower mass body 12B), the mass M11 of the reference mass body ₁₁ is fundamental in order to increase the stability of the main vibration system and the amplitude of the conveyance path. Is preferably as large as possible, and is particularly preferably at least twice the sum M _12A + M _12B . Further, it is preferable mass M _12B of mass M _12A and the bottom mass body 12B of the upper mass 12A is almost equal, the amplitude required in the transport path 12t, the influence of the vibration damping system in the lower Considering this, as can be seen from the above numerical values, there is no significant problem as long as the mass ratio between the two is about twice. Above the prototype of the first embodiment, provided with a conveying path 12t in the upper mass _12A, the _{M 12A} is larger than _{M 12B,} is about twice the _{M 12B.}

[Sixth Embodiment]
Next, with reference to FIG. 14 thru | or FIG. 20, 6th Embodiment of the vibration type conveying apparatus which concerns on this invention is described. The device 30 according to the sixth embodiment shows an example in which the device according to the fifth embodiment is applied to the entire device. Here, components corresponding to the fifth embodiment of the sixth embodiment are denoted by the same reference numerals as those of the fifth embodiment, and description of substantially the same configurations as those of the fifth embodiment will be omitted. In the present embodiment, a vibration isolating spring 13a having a reference mass body 11, an upper mass body 12A, and a lower mass body 12B that are basically the same as those of the previous embodiments and attached in the same manner as in the third embodiment. 13b. In the present embodiment, as in the third embodiment, the mounting positions of the anti-vibration springs 13a and 13b with respect to the reference mass body 11 before and after the conveyance direction are relative to the coupling position of the vertical vibration spring and the piezoelectric drive body with respect to the reference mass body 11. It is confirmed that the operational effects described in the third embodiment can be obtained particularly remarkably by being arranged on the same side (the front side in the transport direction in the illustrated example). In the present embodiment, upper vibration springs 34a and 34b and lower vibration springs 35a and 35b similar to those in the fifth embodiment are provided. However, unlike the previous embodiment, the base 2 does not include the two-body structure of the upper support base 2A and the lower support base 2B via the horizontal anti-vibration springs 13ah and 13bh, and is configured integrally. Further, as shown in the front side of FIG. 14, a collection side transport unit 40 is added. This collection side conveyance unit 40 is arranged along a collection path 42t formed in a collection side conveyance block (not shown) installed on the collection side connection block 42Ad, along the conveyance path 12t formed in the conveyance block 12Au shown in FIG. The transported object can be transported in the collection direction B opposite to the transport direction F.

  FIG. 14 shows the apparatus structure including the recovery side transport unit 40 but without the transport block 12Au, and FIG. 15 shows the apparatus structure including the transport block 12Au but without the recovery side transport unit 40. Yes. The collection-side transport unit 40 includes a base block 42 attached and fixed to the side surface of the base 2, and plate-shaped anti-vibration springs 43 a and 43 b each having a lower end attached to the base block 42 before and after the transport direction D. And have. The upper ends of the anti-vibration springs 43a and 43b are respectively attached to outer surface portions at intermediate positions in the vertical direction of the connecting members 44a and 44b having a shape extending in the vertical direction. The lower end portions of the plate-like amplification springs 47a and 47b are connected to the outer surface portions at the upper ends of the connection members 44a and 44b. ing.

  An inertia mass body 41 is disposed on the front and rear inner sides of the connection members 44a and 44b in the transport direction D. Between the front end and the rear end of the inertia mass body 41 and the inner surfaces of the lower ends of the connection members 44a and 44b, plate-like piezoelectric drive bodies 46a and 46b are connected. These piezoelectric driving bodies 46a and 46b each have a piezoelectric body laminated on an elastic substrate, and are in phase with each other when viewed in the transport direction D according to an alternating voltage supplied from a driving circuit (not shown). As a result, the recovery side connection block 42Ad is vibrated in the transport direction D through the connection members 44a and 44b and the amplification springs 47a and 47b. Here, in the process in which the transported objects are aligned or sorted in the transport path 12t formed in the collection-side transport block 12Au, the transported objects are transported as they are for some reason such as those that are not aligned in a predetermined posture or defective products. The transported material that should not go is removed from the transport path 12t by a well-known exclusion means such as the shape of the transport path 12t, an airflow spraying means, or a mechanical operation mechanism, and is recovered in the recovery path 42t disposed on the side. The Then, the recovered transported object is recovered in a direction opposite to the transport direction F on a recovery path 42t formed in a recovery-side transport block (not shown) based on vibrations generated by the piezoelectric drivers 46a and 46b. It is transported to B and returned to the upstream side of the transport path 12t or discarded. Note that the side plates 39 and 49 shown in FIGS. 16 and 17 are covers that cover the main vibration system and the recovery-side transport unit from both sides in the width direction, respectively.

  As shown in FIG. 15, the present embodiment includes the same main vibration system as that shown in FIG. 13, and a plate surface facing the transport direction D that supports the reference mass body 11 before and after the transport direction D. Plate-shaped vibration-proof springs 13a and 13b are provided. Here, the anti-vibration springs 13a and 13b are attached to the reference mass body 11 by bolts 19a and 19b and spacers 19c and 19d, respectively, at the front and rear portions of the reference mass body 11. At this time, the vibration isolating spring 13a is connected to the front portion of the reference mass body 11 via the spacer 19c at the front position in the transport direction D with respect to the piezoelectric driving body 16a, and the vibration isolating spring 13b is also connected to the piezoelectric driving body 16b. It is connected to the rear portion of the reference mass body 11 via a spacer 19d at a front position in the transport direction D. The spacers 19c and 19d have the same thickness as viewed in the transport direction D, and thereby the distance between the upper end portions of the piezoelectric drive body 16a and the vibration isolation spring 13a and the distance between the upper end portions of the piezoelectric drive body 16b and the vibration isolation spring 13b. Are equal.

  In the present embodiment, the center-of-gravity positions 11g, 12Ag, and 12Bg of the reference mass body 11, the upper mass body 12A, and the lower mass body 12B are preferably at the same position in the transport direction D in a stationary state. That is, the center-of-gravity positions 11g, 12Ag, and 12Bg are all preferably arranged on the same vertical line. However, in actuality, the upper mass body 12A provided with the transport path 12t has various shapes and structures according to the conditions of the installation location of the vibration type transport device 30 and the situation before and after the transport path of the transported object. Is required. In particular, the overhang (overhang length) before and after the upper mass body 12A in the transport direction D is set according to the front and rear apparatus configurations. In the apparatus 30 shown in FIG. 15, the transport block 12Au of the upper mass body 12A projects farther forward than the rear in the transport direction D, and its center-of-gravity position 12Ag is ahead of the center-of-gravity position 11g of the reference mass 11 in the transport direction D. Placed in. Then, in response to the positional deviation in the transport direction D from the gravity center position 11g of the reference mass body 11 of the gravity center position 12Ag of the upper mass body 12A, the reference mass body 11 receives from the upper mass body 12A and the lower mass body 12B. In order to reduce the vertical vibration caused by the force, the gravity center position 12Bg of the lower mass body 12B is arranged in front of the conveyance position D with respect to the gravity center position 11g of the reference mass body 11 in the same manner as the gravity center position 12Ag. doing. As a result, the overall center of gravity position of the main vibration system is arranged slightly in front of the center of gravity position 11 g of the reference mass body 11 in the transport direction D. At this time, it is preferable that the mounting positions of the anti-vibration springs 13a and 13b are at an equal distance when viewed in the transport direction D with respect to the center of gravity position (not shown) of the entire main vibration system. In the illustrated example, the intermediate point between the attachment position of the vibration isolation spring 13a and the attachment position of the vibration isolation spring 13b and the center of gravity position of the main vibration system are arranged at the same position when viewed in the transport direction D. .

  FIG. 20 is an enlarged left side view of the upper piezoelectric drive portion 16Au of the piezoelectric drive body 16a and the upper amplification spring 37a constituting the upper vibration spring 34a of the present embodiment. Similarly to the first embodiment, the piezoelectric driving body 36a includes an elastic substrate 36s and a piezoelectric body 36p laminated on the elastic substrate 36s, and both sides in the width direction are formed by side connection structures provided on the elastic substrate 36s. Is fixed to the front portion of the reference mass body 11. The piezoelectric body 36p is disposed between the side connection structures when viewed in the width direction, and projects upward and downward from the height of the side connection structure, and an upper piezoelectric drive section 36au and a lower piezoelectric drive section 36ad (not shown). Z). The elastic substrate 36s is provided with an upper connection structure 36su and a lower connection structure 36sd (not shown) that extend further upward and downward from the region where the piezoelectric body 36p is formed. The lower piezoelectric drive unit 36ad is configured to be vertically symmetrical with respect to the horizontal horizontal line 36o connecting the side connection structures on both sides in the width direction with respect to the upper piezoelectric drive unit 36au, and the piezoelectric drive unit 36b is piezoelectric. Since the configuration is the same as that of the driving body 36a, each of them will be omitted with respect to the following description.

  The upper piezoelectric drive unit 36au of the present embodiment is connected and fixed to the upper amplification spring 37a by a bolt 39t or the like via a spacer 39s. At this time, with respect to the upper connection structure 36su of the upper piezoelectric drive unit 36au, the lower end of the upper amplification spring 37a is overlapped and fixed from the rear in the transport direction D via the spacer 39s. Thereby, the center line 36x in the thickness direction of the piezoelectric driving body 36a and the center line 37x in the thickness direction of the upper amplification spring 37a are arranged so as to be shifted from each other when viewed in the transport direction D. Due to the deviation between the center lines 36x and 37x, the vibration angle θ of the upper vibration spring 34a with respect to the upper mass body 12A (connection block 12Ad) is set as in FIG. In the present embodiment, the vibration angle θ can be adjusted by changing the presence or absence and thickness of the spacer 39s.

As shown on the right side of FIG. 20, in the case of using the elastic substrate 36 s' having a uniform thickness t ₀ throughout, the distance between the center line 37x centerline 36x and the upper amplification spring 37a of the piezoelectric driving body 36 Becomes 0.5 (t ₀ + t ₁ ) + ts. Here, _{t 1} is the thickness of the upper amplification springs 37a, ts is the thickness of the spacer 39s. At this time, the substantial vibration angle θ ′ is an inclination angle as viewed in the transport direction D with respect to a perpendicular line connecting the horizontal line 36o and the connection point of the upper amplification spring 37a to the upper mass body 12A. However, as in this embodiment, when the drive frequency of the piezoelectric driving body 36a is higher frequency, since the thickness t ₀ of the elastic substrate 36s increases, the vibration angle theta 'becomes too large, as a result, the upper mass 12A The vertical component of the vibration increases, and the conveyed product on the conveying path 12t dances in the vertical direction, leading to variations in the conveying posture and conveying speed of the conveyed item, and a general decrease in conveying speed. In general, when the vibration frequency increases, the vibration system stability and the stability of the transport posture of the transported object become higher when the vibration angle θ is smaller than when the vibration frequency is low, and the transport efficiency is improved. As a result, the conveyance speed also increases. Therefore, in the present embodiment, the thickness range of the upper connection structure 36su of the elastic substrate 36s is shifted forward in the transport direction D so that the vibration angle θ can be set small. In the illustrated example, the surface on the rear side in the transport direction D of the upper connection structure 36su is disposed on the front side in the transport direction D by (t ₀ -t ₂ ) from the portion where the piezoelectric bodies 36p are stacked. constructed stepwise, the thickness t ₂ of the upper connecting structure 36su are smaller than the thickness t _0. Thus, the displacement amount in the conveying direction D of the center line 36x and _{37x (t 2 -0.5t 0 + 0.5t} 1 + ts) , and the above distance _{0.5 (t 0 + t 1)} + than ts _{(t 0} - It becomes smaller by t ₂ ). Also in this case, the cross-sectional shape (the surface on the rear side (left side in the drawing) in the conveyance direction D in the illustrated example) of the boundary portion between the portion where the piezoelectric body 36p of the piezoelectric driving body 36a is laminated and the upper connection structure 36su is the upper side. It is preferable to have a concave contour so that the thickness gradually changes (decreases) toward the connection structure 36su and converges on a flat surface.

  In the present embodiment, as in the fifth embodiment, the upper amplification springs 37a and 37b and the lower amplification springs 38a and 38b are connected to the upper connection structure of the upper piezoelectric drive portions 36au and 36bu and the lower piezoelectric drive portions 36ad and 36bd. It is connected and fixed in a state where it is stacked on the rear side in the transport direction D with respect to the lower connection structure. In this way, a certain vibration angle can be obtained regardless of whether or not the spacer is interposed. Further, by configuring the upper connection structure of the upper piezoelectric drive portions 36au and 36bu and the lower connection structure of the lower piezoelectric drive portions 36ad and 36bd to be thinner than the portion where the piezoelectric bodies 36p are laminated, The upper part of the lower connection structure (the part not fixed by bolts, washers or the like on the side where the piezoelectric body 36p is laminated) is generated by the piezoelectric body 36p together with the upper amplification springs 37a and 37b and the lower amplification springs 38a and 38b. Since it can be configured to function as a part that performs the amplification action of the bending deformation, the length of the upper amplification springs 37a and 37b and the lower amplification springs 38a and 38b is made shorter, and as a result, the height of the entire apparatus is reduced. Is possible.

By prototyping the apparatus 30 of this embodiment and actually driving it, the vibration state of the transport block 12Au and the transport state of the transported object were observed. In the prototype device, the mass of the upper mass body 12A shown in FIG. 15 is 620 g, the height of the gravity center position 12Ag is 110 mm, the mass of the reference mass body 11 is 1230 g, the height of the gravity center position 11g is 67 mm, and the lower mass body 12B The mass is 720 g, the height of the gravity center position 12Bg is 27.5 mm, and the gravity center position 12Ag of the upper mass body 12A is 9.8 mm on the side of the conveyance direction F with respect to the gravity center position 11g of the reference mass body 11. The center of gravity 12Bg of the lower mass body 12B was at a position shifted by 1.5 mm toward the conveyance direction F. The upper vibration springs 34a and 34b and the lower vibration springs 35a and 35b are all adjusted with reference to 3.24 degrees so that a uniform conveyance speed is obtained along the conveyance path 12t. This prototype is operated at 343.4 Hz slightly above the resonance frequency, and the amplitude in the transport direction D of the transport block 12Au provided with the transport path 12t (actually the amplitude of the exit end 12to of the transport path 12t) is measured by a laser displacement meter. A rectangular parallelepiped electronic component having a length of 0.6 mm, a height and a width of 0.3 mm was transported as a transported object. At this time, the vertical amplitude of each part shown _P 1 to P ₄ of the transfer block 12Au, and the amplitude of the width direction of each part shown _P 5 to P ₇ was measured by a laser displacement meter. As a result, in this prototype device, the conveyance speed is 3.8 m / min, the average amplitude in the vertical direction is 0.0085 mm, the average amplitude in the width direction is 0.0083 mm, and uniform conveyance is performed over the entire length of the conveyance path 12t. The speed was obtained, and the jumping of the transported object and the posture change were few. Also, when the drive voltage is increased within the range in which the conveyed product is smoothly conveyed, the conveyance speed is increased up to 10 m / min. The amplitude in the conveyance direction at this time is 0.26 mm, and the average value of the amplitude in the vertical direction 0.02 mm and the average amplitude in the width direction was 0.012 mm, and no problem occurred. In particular, even if the transport speed was increased, the posture of the transported object was stable, there was little variation in the amplitudes of the respective parts P _{1 to} P ₇ , and the uniformity of the transport speed along the transport path 12t was sufficient.

  Note that the vibratory conveyance device of the present invention is not limited to the illustrated examples described above, and it is needless to say that various changes can be made without departing from the spirit of the present invention. For example, each of the second to sixth embodiments has a characteristic configuration (the presence or absence of a spacer in the connecting portion, the presence or absence of the connecting portion, the presence or absence of the inclination of the entire vibration spring, the presence or absence of a step connection structure of the vibration spring, and piezoelectric drive. The structure of the first embodiment is replaced with an integral structure and a separate structure of the amplifying spring and a separate structure, the positional relationship between the piezoelectric drive body and the vibration-proof spring, etc., but each feature point between the embodiments is arbitrarily arbitrary. Other embodiments can be easily realized by substituting.

DESCRIPTION OF SYMBOLS 10 ... Vibration type conveying apparatus, 11 ... Reference | standard mass body, 11a ... Front mounting position, 11b ... Back mounting position, 11aa ... Front part, 11ab ... Middle part, 11bb ... Back part, 12A ... Upper mass body, 12Au ... Transport block , 12Ad ... connection block, 12B ... lower mass body, 12c ... transport path, 12AaS, 12AbS ... upper connection part, 12BaS, 12BbS ... lower connection part, 12AaC, 12AbC, 12BaC, 12BbC ... connection plate, 13a, 13b ... Anti-vibration springs, 14a, 14b ... upper vibration springs, 15a, 15b ... lower vibration springs, 16a, 16b ... piezoelectric drive bodies, 16au, 16bu ... upper piezoelectric drive parts, 16ad, 16bd ... lower piezoelectric drive parts, 16s ... Elastic substrate, 16p ... piezoelectric body, 16t ... side connection structure, 17a, 17b ... upper amplification spring, 18a, 18b ... lower amplification 19a, 19b ... bolts, 2 ... base (installation surface), 2A ... upper support, 2B ... lower support, 13ah, 13bh ... horizontal anti-vibration spring, D ... transport direction, F ... transport direction, BVs , BVt: Vibration direction, θ, θ ′, θ ″: Vibration angle (tilt angle) 40: Recovery side transport unit

Claims (14)

A pair of anti-vibration springs, each of which is provided at a front and rear position in the transport direction, and is composed of a leaf spring having a plate surface facing the transport direction;
A reference mass body supported at the front and rear positions in the transport direction by the pair of vibration-proof springs;
An upper mass disposed above the reference mass;
A lower mass disposed below the reference mass;
A pair of upper vibration springs including a leaf spring structure facing in the transport direction, which elastically connects the reference mass body and the upper mass body at front and rear positions in the transport direction;
A pair of lower vibration springs including a leaf spring structure facing the transport direction, which elastically connects the reference mass body and the lower mass body at front and rear positions in the transport direction;
An in-phase that generates an in-phase vibration in the transport direction by applying an excitation force between the reference mass body and the upper mass body and between the reference mass body and the lower mass body. Vibration means;
Comprising
A conveyance path for conveying a conveyance object is provided in at least one of the upper mass body and the lower mass body,
The upper oscillating spring and the lower oscillating spring have vibration angles that are inclined in opposite directions in the vertical direction, and the upper mass body and the lower mass are generated by the excitation force of the in-phase excitation means. The body vibrates in the direction inclined to the opposite sides of the vertical direction,
A vibratory conveying device characterized by the above. The upper vibration spring has a plurality of spring elements, and has a spring structure in which the spring element on the upper mass body side is arranged on one side in the transport direction with respect to the spring element on the reference mass body side. And
The lower vibration spring has a plurality of spring elements, and the spring element on the lower mass body side is arranged on the one side in the transport direction with respect to the spring element on the reference mass body side. Having a structure,
The vibration type conveying apparatus according to claim 1. The upper vibrating spring, an upper vibration spring body, and an upper connecting portion which connects to the transport direction of the upper end of the upper vibrating spring body with respect to the upper mass, the upper-side connecting portion, wherein than the upper oscillating spring body corresponding to the spring element on the side of the reference mass, the disposed in the one side in the transport direction, the upper spring element is provided which corresponds to the spring element on the side of the upper mass, The upper spring element is elastically deformed with respect to the upper vibration spring main body in such a manner that the upper mass body is rotatable around an axis perpendicular to the transport direction and the vertical direction,
The lower vibration spring includes a lower vibration spring main body, and a lower connection portion that connects a lower end portion of the lower vibration spring main body to the lower mass body in the transport direction. the connecting portion than the lower vibrating spring body corresponding to the spring element on the side of the reference mass, the disposed in the one side of the conveying direction, corresponding to the spring element on the side of the lower mass The lower spring element is elastic in such a manner that the lower mass body can rotate about an axis perpendicular to the transport direction and the vertical direction with respect to the lower vibration spring body. Deform,
The vibratory transfer device according to claim 2, wherein The upper vibration spring body is arranged in a posture extending in a vertical direction between the reference mass body and the upper mass body,
The lower vibration spring body is disposed in a posture extending in a vertical direction between the reference mass body and the lower mass body,
The vibratory transfer apparatus according to claim 3. The upper vibration spring includes a lower leaf spring portion corresponding to a spring element on the reference mass body side, and a lower end connected to the upper end of the lower leaf spring portion while being shifted to the one side in the transport direction. An upper leaf spring portion corresponding to a spring element on the upper mass body side ,
The lower vibration spring has an upper leaf spring portion corresponding to a spring element on the reference mass body side, and an upper end connected to the lower end of the upper leaf spring portion while being shifted to the one side in the transport direction. A lower leaf spring portion corresponding to a spring element on the lower mass body side ,
The vibratory transfer device according to claim 2, wherein The upper leaf spring portion and the lower leaf spring portion of the upper vibration spring are each arranged in a posture extending in a vertical direction,
The lower leaf spring portion and the upper leaf spring portion of the lower vibration spring are each arranged in a posture extending in a vertical direction.
The vibratory transfer device according to claim 5. The in-phase excitation means includes
An upper piezoelectric drive unit that constitutes an upper excitation unit that directly applies the excitation force between the reference mass body and the upper mass body and is incorporated in a part of the upper vibration spring in the length direction; A lower piezoelectric drive unit that constitutes a lower excitation unit that directly applies the excitation force between a reference mass body and the lower mass body and is incorporated in a part of the length of the lower oscillation spring And
Both sides in the width direction are coupled to the reference mass body at the intermediate portion in the vertical direction, and a portion extending above the reference mass body forms the upper piezoelectric drive unit and extends below the reference mass body The portion to be formed forms the lower piezoelectric drive unit, and the plate surface facing in the transport direction as a whole is constituted by a plate-like piezoelectric drive body that bends and deforms integrally vertically.
The vibration type conveying apparatus according to any one of claims 1 to 6. The upper vibration spring is a plate-like upper amplification spring provided with the upper piezoelectric drive part extending above the reference mass body and a plate surface connected to the upper end of the upper piezoelectric drive part and facing the transport direction. And having
The lower vibration spring has a plate-like shape provided with the lower piezoelectric drive unit extending above the reference mass body and a plate surface connected to the lower end of the lower piezoelectric drive unit and facing the transport direction. A lower amplification spring,
The vibratory conveyance device according to claim 7. The upper piezoelectric drive unit and the lower piezoelectric drive unit have an elastic substrate and a piezoelectric body laminated on the elastic substrate,
9. The vibratory conveyance according to claim 8, wherein the upper amplification spring and the lower amplification spring are integrally formed with the elastic substrate of the upper piezoelectric drive body and the lower piezoelectric drive body, respectively. apparatus.   10. The vibratory transfer device according to claim 9, wherein the elastic substrate is thick in the upper piezoelectric drive unit and the lower piezoelectric drive unit and thin in the upper amplification spring and the lower amplification spring. The upper piezoelectric drive unit and the lower piezoelectric drive unit include an elastic substrate and a piezoelectric body stacked on the elastic substrate, and the elastic substrate moves upward and downward from a portion where the piezoelectric body is stacked. It has an upper connection structure and a lower connection structure that extend,
A lower end of the upper amplification spring is connected and fixed in a state of being overlapped on the one side in the transport direction with respect to the upper connection structure, and an upper end of the lower amplification spring is connected to the lower connection structure. 9. The vibratory transfer device according to claim 8, wherein the connection is fixed in a state of being overlapped on the one side in the transfer direction. The pair of the vibration-proof springs, the front and rear support portions of the transport direction, the upper vibration spring and if the lower vibration with respect to the position of binding to the negative the reference mass, either the same side of the transport direction The vibratory transfer device according to claim 1, wherein the reference mass body is supported in each of the first to second embodiments.   The reference mass body is a pair in which the anti-vibration spring and a horizontal anti-vibration spring composed of a leaf spring arranged in a horizontal posture along the conveyance direction are connected in series at the front and rear positions in the conveyance direction. The vibration-type transfer device according to any one of claims 1 to 12, wherein each of the vibration-type transfer devices is supported by an anti-vibration structure.   A base for supporting the reference mass body is provided via the vibration isolation spring, and the base includes an upper support base to which the vibration isolation spring is connected, and the upper support base via the horizontal vibration isolation spring. The vibration-type transfer device according to claim 13, further comprising a lower support base that supports the support.

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