KR20150083011A

KR20150083011A - Vibratory Conveying Apparatus

Info

Publication number: KR20150083011A
Application number: KR1020140145150A
Authority: KR
Inventors: 타로 미무라; 쥰이치 하라; 가즈키 모모세; 야스히로 미나가와; 무네야스 하타코시; 유키 기우치; 유지 고도
Original assignee: 가부시기가이샤 다이신
Priority date: 2014-01-08
Filing date: 2014-10-24
Publication date: 2015-07-16
Also published as: JP5775183B2; JP2015129041A; CN104760803A; TW201529447A

Abstract

The present invention provides a vibratory conveying apparatus which reduces a reaction force, uses a high vibratory frequency or conveys an object at a high speed, and has a simple structure. The vibratory conveying apparatus comprises: a pair of vibration absorbing springs (13a, 13b); a reference weight body (11) supported by the pair of vibration absorbing springs at a front and a rear location in a conveying direction (D); an upper weight body (12A) disposed above the reference weight body; a lower weight body (12B) disposed below the reference weight body; a pair of upper vibratory springs (14a, 14b) which are formed in a plate shape and elastically contact the reference weight body and the upper weight body at the front and the rear location in the conveying direction; a pair of lower vibratory springs (15a, 15b) which are formed in a plate shape and elastically contact the reference weight body and the lower weight body at the front and the rear location in the conveying direction; and an identical phase vibrating means (16a, 16b) to supply a vibratory force in two directions between the reference weight body and the upper weight body and between the reference weight body and the lower weight body, and cause an identical phase vibratory movement in the conveying direction. The upper weight body and the lower weight body vibrate in vibratory directions (BVs, BVt) which are vertically, oppositely inclined by the identical phase vibrating means.

Description

[0001] The present invention relates to a vibratory conveying apparatus,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrating conveying apparatus, and more particularly to a conveying mechanism of a conveying apparatus which is suitable for conveying a component in a linear shape.

Generally, a vibrating-type conveying device is a device in which a conveying body is elastically supported by a plate spring on a base, and the conveying body is excited by an exciting means such as an electromagnetic drive unit or a piezoelectric drive unit, So that the conveyed object such as a part is conveyed along the conveying path formed on the conveying body. 2. Description of the Related Art In recent years, there has been an increase in the number of fine electronic parts as a transported material and a demand for supplying such fine transported materials at high speed. Therefore, a device for transporting fine transported materials at high speed is required Is coming. A common problem of the oscillating conveying apparatuses which are generated when the demand for high-speed conveyance is met is that a reaction force of vibration of the conveying body is transmitted to the installation surface, And the conveying body vibrates in a direction different from the original vibration direction by a pitching operation or the like of the whole vibrating structure for vibrating the conveying body so that the conveying speed changes depending on the position in the conveying direction, And the conveying posture is disturbed.

In order to solve the above problems, one of the methods proposed in the conventional vibratory transfer apparatus is to support a vibration system via a vibration-proof spring and to provide a reaction weight (an inertial body) vibrating in a reverse phase to the carrying body, And the reaction force of the vibration of the carrier is canceled by the vibration of the reaction weight to reduce the vibration energy transmitted on the mounting surface (for example, Patent Document 1 below). However, in such a structure, since the center of the conveying body and the reaction weight are shifted up and down, a pitching motion is generated in the entire apparatus accompanied by the oscillation of the conveying body, thereby lowering the conveying efficiency, The conveying speed is changed or the conveying posture is disturbed. Therefore, it is known that the pitch between the center of the conveying body and the center of the counterweight is reduced to suppress the pitching. For example, a structure in which a balancing weight disposed below a reaction weight is connected to a carrier is proposed (for example, Patent Document 2 below), a structure in which a piezoelectric vibrating portion supported by a vibration- At the same time, a counterweight is disposed between the piezoelectric vibrating portion and the conveying body, and a straight line connecting the central position of the total of the piezoelectric vibrating portion and the conveying body and the center position of the counterweight is set parallel to the vibration direction (Refer to Patent Document 3 below), a movable plate connected to a carrier is elastically supported above a fixed frame supported by a dust-proof spring, a lower weight is connected to the lower side of the movable plate, A structure in which the center of gravity of the two is approximated and the generation of a rotation moment is suppressed by connecting the fixed weight to the upper portion of the frame (see, for example, Patent Document 4 below).

Japanese Patent Application Laid-Open No. 2-204210 Japanese Patent Application Laid-Open No. 4-39206 Japanese Patent Application Laid-Open No. 2006-248727 Japanese Patent Application Laid-Open No. 2009-298498

However, in the vibratory transfer apparatus provided with the conventional counteracting weight, since the structure is complicated in order to approximate the center of the conveying body and the center of the counteracting weight or arrange them in a straight line, the size of the apparatus and the manufacturing cost are increased And at the same time, it is necessary to set the center position extremely precisely. Therefore, there is a problem that it is difficult to obtain a sufficient effect at the manufacturing site where the conditions such as the kind of conveyed article and the conveying speed change. Particularly, even if there is a slight shift in the center position, if the driving frequency is increased to enable high-speed transportation, pitching, vertical movement and the like become serious and proper transporting state can not be obtained. .

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems and it is an object of the present invention to provide a vibration type conveying apparatus which can easily realize high- It is on.

In view of such a situation, the vibrating-type conveying apparatus of the present invention comprises: a pair of vibration-proof springs provided at front and rear positions in the conveying direction, each pair being composed of a leaf spring having a plate surface facing the conveying direction; A lower mass located below the reference mass, and a lower mass located below the reference mass, wherein the reference mass and the upper mass are arranged in the conveying direction A pair of upper vibration springs each including a plate spring structure having a plate surface facing the carrying direction which is elastically connected to each of the front and rear positions, and a pair of upper and lower vibrating springs which elastically connect the reference mass and the lower mass body respectively at front and rear positions in the carrying direction A pair of lower vibration springs including a plate spring portion facing the carrying direction, And an in-phase excitation means for applying a bi-directional force between the reference mass and the lower mass and for causing a vibration on the same phase in the transport direction to occur between the upper mass and the upper mass, Wherein the upper oscillating spring and the lower oscillating spring have an oscillating angle that is inclined to the opposite side in the up-and-down direction, and wherein the oscillating angle of the upper oscillating spring and the lower oscillating spring , And the upper mass and the lower mass vibrate in an inclined direction opposite to the upper and lower directions.

According to the present invention, the upper mass body and the lower mass body are resiliently connected to each other on the upper and lower sides of the reference mass supported by the vibration springs at the front and rear positions in the carrying direction via vibration springs at front and rear positions in the carrying direction, The upper and lower masses oscillate in the same phase as viewed in the transport direction, and the reference mass, the upper mass and the lower mass move in opposite phases in the transport direction. Therefore, it is possible to reduce the offset between the center position of the reference mass and the vertical position of the center position of the upper mass body and the lower mass body, so that the canceling action of the reaction force of the vibration in the carrying direction of the reference mass, have. Further, at the same time, since the rotational moment imparted by the upper mass and the rotational moment imparted by the lower mass with respect to the reference mass are opposite to each other, the reaction force in the rotational direction due to the vibration received by the reference mass is mutually canceled or attenuated , The pitching operation (rotational motion) can be suppressed. Therefore, the reaction force in the conveying direction and the vertical direction transmitted to the mounting surface via the dust-proof spring is reduced, and leakage of the vibration energy to the mounting surface through the dust-proof spring can be suppressed. Further, since the pitching operation is suppressed, even if the frequency is increased, the vibration is not easily disturbed and the posture of the transported article is stabilized. Therefore, high-speed transportation is possible, and the uniformity of the conveying state such as the conveying speed along the conveying path, .

In the present invention, it is preferable that a conveying path for conveying the conveyed matter is provided on at least one of the upper mass body and the lower conveying body, the upper vibration spring and the lower vibration spring have a vibration angle inclined to the opposite side in the vertical direction, The upper mass body and the lower mass body are vibrated in an inclined direction opposite to each other in the up and down direction by the excitation force of the in-phase image obtaining means, so that the one mass in the conveying direction Or the other side can be imparted to the conveyed object. Therefore, it is not necessary to arrange the vibration system as a whole in order to cause a conveying force for the conveyed object, so that the structure can be simplified and the conveying force adjustment operation can be facilitated. Since the vibration directions of the upper mass body and the lower mass body oscillating synchronously are inclined to the opposite sides of the upper and lower sides, the damping effect on the rotational moment of the upper mass body and the vertical direction components of the rotational moment of the lower mass can be enhanced , It becomes possible to reduce the reaction force in the vertical direction that the reference mass receives. Therefore, it is possible to stabilize the conveying condition of the conveyed object on the conveying path, to improve the conveying speed by the high frequency of the apparatus, and to suppress the leakage of the up-and-down vibration to the mounting surface through the vibration springs. Particularly, in the case of achieving a significantly higher frequency of 300 Hz to 1 kHz than the conventional case, even when the dynamic balance is slightly imbalanced in the up and down direction, the conveyed matter is shaken by the up-down vibration, Or the vertical vibration is transmitted from the mounting surface to the surroundings. However, according to the configuration of the present invention, the up-and-down motion of the transported article is reduced by lowering the vertical vibration, and the transported posture of the transported article is stabilized. Therefore, the transported articles can be aligned, sorted, and transported at a high density, It is possible to suppress the propagation of the up-and-down vibration.

In the present invention, as described above, in order for the upper vibration spring and the lower vibration spring to have a vibration angle, for example, the upper vibration spring and the lower vibration spring may be provided in an inclined posture as a whole . In this case, in order for the upper vibration spring and the lower vibration spring to have a vibration angle on the opposite side in the up-and-down direction, the upper vibration spring and the lower vibration spring may be inclined to the opposite side in the up-down direction as a whole. However, in the structure in which the attachment work of the spring is facilitated and the vibration angle is adjustable, the upper vibration spring and the lower vibration spring all have a plurality of spring elements, and the spring elements on the reference mass side And the spring elements on the side of the upper mass and the side of the lower mass have a spring structure disposed on one side in the carrying direction.

In this case, the upper vibrating spring has an upper vibrating spring main body and an upper connecting portion connecting the upper end of the upper vibrating spring main body with the upper mass body in the carrying direction, Wherein an upper side spring element is provided on the one side in the conveying direction with respect to the main body, and the upper side spring element is configured such that the upper side mass body is rotatable about an axis orthogonal to the conveying direction and the vertical direction with respect to the upper side vibrating spring main body Wherein the lower vibration spring has a lower vibration spring main body and a lower connecting portion for connecting the lower end portion of the lower vibration spring main body in the carrying direction with respect to the lower mass body, In the transport direction, The element is provided, the lower spring elements, preferably with respect to the lower spring vibration body is elastically deformed by the lower the mass body can rotate in the transport direction and the vertical direction and which is perpendicular to the axis circumferential form. With this arrangement, in the upper connecting portion and the lower connecting portion, the upper mass member or the lower mass member is disposed with respect to the upper end portion of the upper vibration spring main body or the lower end portion of the lower vibration spring main body via the upper spring element or the lower spring element disposed on the other side in the carrying direction The vibration direction of the conveying path provided for the upper mass body or the lower mass body is shifted in a direction inclined to the opposite side of the upper and lower sides with respect to the conveying direction in the same manner as in the case where the upper vibration spring and the lower vibration spring itself are provided in an inclined posture . In this case, the vibration angles of the upper vibration spring and the lower vibration spring are set such that the distance between the upper connecting end of the upper vibration spring body and the upper spring element in the carrying direction, In the transport direction. Therefore, it is possible to adjust the vibration angle of the upper side vibration spring and the lower side vibration spring only by adjusting the interval by a spacer or the like. Here, the upper spring element or the lower spring element may be formed by connecting the upper vibration spring main body or the lower vibration spring main body and the upper mass body or the lower mass body in a width direction (horizontal direction) orthogonal to the carrying direction and the vertical direction A connecting plate in the form of a leaf spring can be used. The connecting plate is capable of elastically deforming the upper mass body or the lower mass body in the direction in which the upper mass body or the lower mass body rotates about the axis in the width direction with respect to the upper connecting end of the upper vibrating spring body or the lower connecting end of the lower vibrating spring body, . In this case, the upper vibration spring main body is disposed in a posture extending in the vertical direction between the reference mass body and the upper mass body, and the lower vibration spring body is disposed between the reference mass body and the lower mass body It is preferable that they are disposed in a posture extending in the vertical direction. The upper vibration spring and the lower vibration spring can be provided with the vibration angle by providing the upper spring element and the lower spring element in the upper connecting portion and the lower connecting portion as described above. It is possible to cause the conveying force to be generated. Since the upper vibration spring main body and the lower vibration spring main body are in a vertical posture, it is possible to simplify the structure and reduce the up-and-down vibration, so that the stability of the carrying posture can be ensured even if the frequency is increased, It is possible to reduce the leakage of the vibration through the vibration plate.

As another example of the spring structure in which the plurality of spring elements are arranged as described above, the upper vibration spring and the lower vibration spring are vertically divided in the middle of the extending direction (vertical direction), and the lower ends of the divided upper- The upper end of the lower leaf spring portion may be connected in a stepped shape with a spacer or the like having a thickness in the carrying direction interposed therebetween if necessary. In this case, in order for the upper vibration spring and the lower vibration spring to have an inclined angle of inclination to the opposite side in the up-and-down direction, the side where the upper end of the lower leaf spring portion with respect to the lower end of the upper- It is preferable that the side where the upper end of the lower side plate spring portion with respect to the lower end of the upper side plate spring portion of the lower side vibration spring is disposed on the opposite side in the carrying direction. For example, the upper side vibration spring is constituted by a series connection structure of an upper piezoelectric driving part arranged at the lower side and an upper side amplifying spring arranged at the upper side, and a lower piezoelectric driving part in which the lower vibration spring is disposed at the upper side, The lower amplifying spring is connected to one end of the upper amplifying spring on one side in the carrying direction via an interval as required and the lower amplifying spring is connected to the lower end of the lower piezoelectric driving part, The upper end of the spring may be connected to one side (on the above-mentioned side) in the carrying direction with an interval as required. Also in this case, it is preferable that the upper side vibration spring and the lower side vibration spring are all arranged in a posture in which the upper side plate spring portion and the lower side plate spring portion extend in the vertical direction, respectively. Thereby, the structure can be simplified and the up-and-down vibration can be reduced. Therefore, even when the frequency is increased, the stability of the transporting posture can be ensured and the leakage of vibration through the vibration springs can be reduced.

In the present invention, it is preferable that the in-phase excitation means comprises: an upper excitation portion which directly applies the excitation force between the reference mass and the upper mass, and an upper exciter which directly applies the excitation force between the reference mass and the lower mass It is preferable to have the lower-side vibrating part. According to this configuration, the upper exciter and the lower exciter are directly and separately applied with an exciting force, so that the entire structure of the apparatus can be simplified, and the coincident means can be easily adjusted according to the situation. In this case, the upper vibrating part is constituted by the upper piezoelectric driving part and is mounted to a part of the longitudinal direction of the upper vibrating spring, the lower vibrating part is constituted by the lower piezoelectric driving part, and part of the upper vibrating spring in the longitudinal direction As shown in Fig. Thus, the upper piezoelectric driver and the lower piezoelectric driver are mounted on a portion of the upper vibration spring and the lower vibration spring, which elastically connect the reference mass, the upper mass and the lower mass, in the longitudinal direction thereof, so that the distance between the reference mass and the upper mass It is possible to simplify the structure, and at the same time, it becomes possible to easily cancel or attenuate the reaction force generated in the main vibration system. Here, it is preferable that the upper vibrating spring has a structure in which a plate-shaped upper amplification spring having the upper piezoelectric driving portion and a plate surface facing the carrying direction are connected in series. It is also preferable that the lower vibration spring has a structure in which a plate-shaped lower amplifying spring having the upper piezoelectric driving part and a plate surface facing the carrying direction are connected in series. The upper piezoelectric driver and the lower piezoelectric driver have a plate-shaped elastic substrate having a plate surface facing the carrying direction and a piezoelectric substance laminated on at least one of the front and back surfaces of the elastic substrate. The alternating voltage is applied in the thickness direction of the piezoelectric substance Thereby causing the elastic substrate to bend back and forth in the carrying direction, thereby generating vibration.

In this case, the in-phase excitation means is constituted such that both sides in the width direction are coupled to the reference mass in the vertical direction and portions extending above the reference mass form the upper piezoelectric driving portion, It is preferable that the piezoelectric actuator is a plate-like piezoelectric actuator in which the lower portion of the mass body forms the lower piezoelectric driver, and the plate surface as a whole is deflected in an upward and downward direction as a whole. According to this configuration, the upper piezoelectric driving portion, which is extended to the upper side of the reference mass, is connected to both sides in the width direction of the middle portion of the piezoelectric actuator integrally composed of the lower mass Since the driving portion has the lower mass, a stable connection state with respect to the reference mass can be obtained, and the upper mass and the lower mass can be easily and surely vibrated in the same phase reliably by the upper and lower bending deformation. In addition, since the upper mass body and the lower mass body can be provided with the piezoelectric actuator body as a single body, the height of the entire device can be reduced, and the device can be made compact. In this case, it is preferable that the piezoelectric actuator include a piezoelectric member that extends vertically to both sides at the coupling position with respect to the reference mass. In the present invention, for example, it is also possible to constitute the upper piezoelectric driving portion above the reference mass and the lower lower piezoelectric driving portion with separate piezoelectric bodies, while the elastic substrate is integrally formed. However, as described above, by providing a single piezoelectric member extending on both the upper and lower sides of the reference mass as described above, it is possible to enhance the unity of the flexural deformation of the piezoelectric actuator. Therefore, the upper mass member and the lower mass member can be more uniformly excited, The structure can be simplified, the manufacturing cost can be reduced, and the upper and lower vibration modes can be easily made uniform.

In the present invention, it is preferable that the upper piezoelectric driver includes an elastic substrate and a piezoelectric member laminated on the elastic substrate, and the upper amplification spring is integrally formed with the elastic substrate. It is preferable that the lower piezoelectric driver includes an elastic substrate and a piezoelectric member laminated on the elastic substrate, and the lower amplifying spring is integrally formed with the elastic substrate. This eliminates the need to connect at least one of the upper and lower piezoelectric driving parts and at least one of the upper and lower amplifying springs with bolts or the like. Thus, the number of parts and the number of assembling steps can be reduced, The height of the apparatus can be reduced. In particular, it is preferable that the elastic substrate of the upper piezoelectric driving part is formed integrally with the upper amplifying spring, and the elastic substrate of the lower piezoelectric driving part is formed integrally with the lower amplifying spring. In the case where the upper piezoelectric driving portion and the lower piezoelectric driving portion are constituted by integral piezoelectric actuators (when the elastic substrate of the upper piezoelectric driving portion and the elastic substrate of the lower piezoelectric driving portion are integral with each other), the elastic substrate And both the upper side amplification spring and the lower side amplification spring are integrally formed. At this time, the piezoelectric actuator itself can be installed in a vertical posture. It is preferable that the upper amplification spring and the lower amplification spring are formed to be thinner than the upper piezoelectric driver and the lower piezoelectric driver. According to this, damage to the upper piezoelectric driver and the lower piezoelectric driver can be avoided, and the amplitude can be secured by the upper amplification spring and the lower amplification spring.

In the present invention, it is preferable that the integral piezoelectric actuator is formed separately from the upper amplification spring and the lower amplification spring, and the upper side connection structure and the lower side connection structure for connecting and fixing the upper side amplification spring and the lower side amplification spring via bolts, When the structure is provided, it is preferable that the upper connection structure and the lower connection structure are provided by extending the elastic substrate upward and downward from the region where the piezoelectric body is stacked. The thickness of the upper connecting structure and the lower connecting structure is shifted from the thickness range of the region where the piezoelectric body is laminated in the carrying direction so that the upper and lower amplifying springs and the lower amplifying springs It is possible to adjust the vibration angle or change the adjustment range of the vibration angle. The amount of displacement of the upper and lower piezoelectric actuators and the lower and upper amplification springs in the carrying direction has a positive correlation with the vibration angle and the amount of displacement of the thickness range or the spacing of the spacers It can be set by thickness.

In the present invention, the lower end of the upper amplifying spring is fixedly connected to the upper connecting structure in the overlapping state on the one side in the carrying direction, and the upper end of the lower amplifying spring is connected to the lower connecting structure In a direction perpendicular to the first direction. This makes it possible to form the vibration angle irrespective of whether or not the spacer is interposed between the upper amplification spring and the lower amplification spring, the upper piezoelectric driver and the lower piezoelectric driver. In this case, as described above, it is possible to adjust or optimize the vibration angle by providing a displacement of the thickness range between the portion where the piezoelectric body is laminated in the piezoelectric actuator and the upper connecting structure and the lower connecting structure . In addition, since the upper connecting structure and the lower connecting structure are configured to be thinner than the portion where the piezoelectric body is laminated, it is possible to constitute the upper amplifying spring and the lower amplifying spring together with the amplifying action of the flexural deformation generated by the piezoelectric body , The lengths of the upper side amplification spring and the lower side amplification spring can be shortened.

In this case, it is preferable that the upper piezoelectric driver and the lower piezoelectric driver have a structure that is substantially symmetrical with respect to the coupling position with respect to the reference mass. According to this structure, the upper and lower piezoelectric actuators having the symmetrical structure can be symmetrically operated in both the upper and lower sides. When the connection structure in which the piezoelectric actuators integral with the reference mass are combined at both sides in the width direction is adopted as described above, the piezoelectric actuator is configured such that the horizontal line connecting the joining portions on both sides in the width direction is symmetrical, Structure.

In the present invention, it is preferable that the piezoelectric actuators are provided on both sides in the width direction with respect to the reference mass, and the piezoelectric bodies are disposed between the engagement positions. According to this configuration, since the piezoelectric actuator and the reference mass are coupled at both sides in the width direction, and the piezoelectric body is disposed between the coupling positions, uniform stiffness can be secured on both sides in the width direction with respect to the reference mass, It can be easily realized. Particularly, it is possible to prevent the bending deformation of the upper and lower bodies of the piezoelectric actuator from being hindered, and to realize an efficient and stable upper and lower-level driving state. Here, it is preferable that a piezoelectric body integrally formed on both upper and lower sides of the coupling portion is formed in the piezoelectric actuator.

In the present invention, it is preferable that the reference mass is supported from below by the pair of vibration springs. The support of the reference mass by the anti-vibration spring can be carried out from any direction. With this structure, the installation area of the entire apparatus can be reduced as compared with the case where the reference mass is suspended or supported from the side. The pair of anti-vibration springs are each constituted by a plate spring in a vertical posture along a vertical plane perpendicular to the conveying direction (connection direction) from the reference mass toward the mounting face desirable. Since the vibration springs are formed of leaf springs in a vertical posture, vibration components in the vertical direction of the reference mass can be reduced, so that it is possible to stabilize the transporting posture and reduce leakage of vibration to the mounting surface. The pair of anti-vibration springs may be any of the following two configurations in any of the above-described directions of support. One configuration is such that the pair of vibration springs are located at the front and rear support positions in the conveying direction with respect to the position where the upper vibration spring and the lower vibration spring (or the piezoelectric actuator) The reference masses are respectively supported on the reference masses. In this case, the assembling operation of the apparatus is facilitated, and the stability of the main vibrometer in the carrying direction can be enhanced. Another configuration is such that a pair of anti-vibration springs are provided at both the forward and backward support points in the carrying direction with respect to the position where the upper vibration spring and the lower vibration spring (or the piezoelectric actuator) And supports the reference masses on the same side (one side or the other side). In this case, the positional relationship of the reference mass in the transport direction between the position where the reference mass receives the reaction force from the upper vibration spring and the lower vibration spring and the position where the support mass receives the support force from the vibration springs is the same The stability of the main vibration system in the vertical direction and the width direction can be enhanced, and as a result, the conveying mode of the conveyed object can be further stabilized. In particular, even when the conveying speed is increased by raising the driving voltage of the piezoelectric actuator, a uniform conveying speed can be obtained over the entire length of the conveying path, and the conveying posture becomes stable.

In the present invention, it is preferable that the reference mass includes a pair of horizontally anti-vibration springs, each of which is composed of a dust-proof spring and a leaf spring disposed in a horizontal posture along the transport direction, at a position before and after the transport direction It is preferable that they are respectively supported by a dust-proof structure. According to this configuration, since the vibration component in the conveying direction and the vibration component in the vertical direction of the reference mass having mutually different vibration modes can be absorbed by different plate springs, the spring characteristics of the plate springs can be optimized, Leakage of vibration can be further reduced. In this case, a base for supporting the reference mass is provided via the vibration-proof spring, and the base includes an upper support rod to which the vibration-proof spring is connected, and a lower support rod . According to this configuration, in the state where the vibration of the reference mass vibrating in the carrying direction is absorbed by the anti-vibration spring, the remaining small vertical movements are absorbed by the horizontal vibration springs, so that both the vibration in the carrying direction and the vertical movement can be reliably absorbed can do. Further, by providing the horizontal vibration springs having large occupancy planes in the base by supporting the reference mass with the dust-proof springs having small occupancy planes, the space efficiency can be increased and the apparatus can be made compact.

In this case, it is preferable that the connecting directions of the pair of horizontal vibration springs provided at the front and rear positions in the carrying direction from the upper support to the lower support are mutually reversed before and after the conveying direction. According to this configuration, when the horizontal vibration springs provided at the front and rear positions in the carrying direction are vertically flexed and deformed in accordance with the vertical vibration of the main vibration system, the connection directions of the horizontal vibration springs are reversed in the forward and backward directions in the carrying direction , The locus of the arcuate shape of the bending deformation of each horizontal vibration springs is bent to the opposite side in the carrying direction. Therefore, the elastic deformation of the horizontal vibration springs at the front and rear positions in the carrying direction interferes with each other, so that the horizontal vibration springs are less likely to be elastically deformed as the amplitude of the vertical vibration becomes larger. The support stability of the main vibration system can be improved.

In the present invention, it is preferable that the transport path is provided in the upper mass body. As described above, the conveying path may be provided in at least one of the upper mass body and the lower mass body. In particular, by providing the conveying path in the upper mass body, it becomes easy to handle the apparatus and the conveyed object at the time of operation.

In the present invention, it is preferable that the mass of the reference mass is substantially equal to or greater than the sum of the masses of the upper mass and the lower mass. Since the mass of the reference mass, the mass of the upper mass, and the mass of the lower mass are in a relationship canceling out the reaction force in the mutual carrying direction (vibration direction), the mass of the reference mass is substantially equal to the sum of the masses of the upper mass and the lower mass, . However, since the reference mass is supported and restrained by the anti-vibration spring at the same time, the amplitude of the reference mass can be suppressed by increasing the mass of the reference mass relative to the sum of the masses, Since the amplitude can be increased, the vibration energy flowing to the mounting surface can be suppressed, and a sufficient carrying force can be ensured in the upper mass body or the lower mass body, so that a more stable vibration form can be realized.

In the present invention, the mass of the upper mass and the mass of the lower mass are substantially equal to each other, and the center spacing and the spring constant between the reference mass and the upper mass and the center distance between the reference mass and the lower mass, It is preferable that the spring constant is substantially equal. According to this, since the inertia mass and the elastic connection form of the upper mass body and the lower mass body are symmetrically formed with respect to the reference mass, the rotation moment can be canceled to further reduce the pitching operation.

In the present invention, it is preferable that the transport path is a linear shape, and the transport direction is a direction along a straight line. The present invention relates to an oscillatory transfer device having a rotary oscillator in which a direction of oscillation (a tangential direction around an axis) around a predetermined axis is a vibration direction and a spiral-shaped transfer path provided on the rotary oscillator, The present invention is also applicable to a case where conveyed articles are conveyed along a spiral-shaped conveying path by vibration. However, in the case of transporting the transported object linearly along the straight transport path, as shown in the following embodiments, the apparatus structure can be simplified and the transport speed can be improved and the transport state can be easily stabilized .

According to the present invention, it is possible to provide a vibratory transfer device capable of easily achieving high-frequency hydration of a vibration or speeding up of a conveying speed and stabilizing a conveying posture of a conveyed object with a simple structure, It can bring an excellent effect.

Fig. 1 is a side view showing an overall configuration of a vibratory transfer device according to a first embodiment of the present invention. Fig.
2 is a perspective view showing the entire configuration of the first embodiment.
3 is a longitudinal sectional view showing a cross section along a plane indicated by the one-dot chain line III in Fig. 2 of the structure of the apparatus excluding the transport block of the first embodiment.
4 is a front view (a) and a rear view (b) showing the entire configuration of the first embodiment.
5 is a plan view of the structure of the apparatus except for the transport block of the first embodiment.
Fig. 6 is a perspective view (a) showing the structure of the piezoelectric actuator according to the first embodiment; Fig. 6 (b) is a longitudinal sectional view showing the piezoelectric actuator of the first embodiment and the upper connecting portion and the lower connecting portion of the upper mass and the lower mass, (C) showing an enlarged partial cross-sectional view of a part of a longitudinal section thereof, and a vertical sectional view (d) showing an upper connecting portion and a lower connecting portion of the upper mass body and the lower mass body, )to be.
7 is a plan view of the structure of the apparatus except for the transport block of another example;
Fig. 8 is a longitudinal sectional view (a) showing the piezoelectric actuator of the first embodiment and an upper connecting portion and a lower connecting portion of the upper mass and the lower mass, and the piezoelectric actuator of the second embodiment and the upper mass and (B) is a longitudinal sectional view showing the upper connecting portion and the lower connecting portion with respect to the lower mass.
Fig. 9 is an enlarged partial sectional view (along a plane indicated by a two-dot chain line XII in Fig. 2) showing an anti-vibration structure provided in a base that can be used in each embodiment, together with an enlarged plan view of the horizontal vibration-
10 is a side view showing a schematic structure of a transport apparatus according to the third embodiment.
Fig. 11 is a conceptual explanatory view schematically showing the configuration of the main vibration system of each embodiment. Fig.
12 is a schematic configuration diagram schematically showing the configuration of the fourth embodiment.
13 is a schematic configuration diagram schematically showing the configuration of the fifth embodiment.
14 is a side view of the structure of the apparatus except for the transport block of the sixth embodiment.
Fig. 15 is a side view showing the entire structure except the recovery-side transport unit of the transport apparatus of the sixth embodiment. Fig.
16 is a plan view of the structure of the apparatus except for the transport block of the sixth embodiment.
17 is a front view of the structure of the apparatus except for the transport block of the sixth embodiment.
Fig. 18 is a perspective view of the structure of the apparatus except for the transport block of the sixth embodiment as seen from the right side rear view. Fig.
Fig. 19 is a perspective view of the structure of the apparatus, excluding the transport block of the sixth embodiment, as seen from the left side rear view. Fig.
20 is an enlarged side view showing a connection structure of the upper vibration spring of the sixth embodiment.

[First Embodiment]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, with reference to the accompanying drawings, embodiments of a vibrating-type transport apparatus according to the present invention will be described in detail. First, the entire configuration of the first embodiment will be described with reference to Figs. 1 to 5. Fig. Fig. 2 is a perspective view showing the entire configuration of the first embodiment. Fig. 3 is a vertical cross-sectional view showing the structure of the apparatus except for the transport block of the first embodiment. Fig. Is a front view (a) and a rear view (b) showing the overall configuration of the first embodiment, and Fig. 5 is a plan view showing the structure of a device excluding the transport block of the first embodiment.

The vibratory transfer apparatus 10 of the present embodiment includes a reference mass body 11, an upper mass body 12A disposed above the reference mass body 11, and a lower mass body 12A disposed below the reference mass body 11 12B. The reference mass body 11 is supported from below by plate-shaped vibration springs 13a and 13b having plate surfaces facing the carrying direction D at the front and rear positions in the carrying direction D, respectively. The lower ends of the vibration springs 13a and 13b are fixed to the base 2 disposed on the mounting surface. Here, the forward and backward positions in the carrying direction D indicate two positions separated from each other along the carrying direction D, that is, the position in front of the carrying direction D, on the carrying direction F side (one side in the carrying direction D) And the position of the rear side is the position opposite to the carrying direction F (the other side in the carrying direction D). In this specification, the conveying direction D is a direction in which conveyed matter such as an electronic component is conveyed in the conveying path 12t of the oscillating type conveying apparatus 10, and is a conveying direction F Is a direction in which the transported object in the transport direction D advances.

The reference mass body 11 and the upper mass body 12A are arranged at the front and rear positions in the carrying direction D with the upper vibrating spring 14a including a leaf spring- And 14b, respectively. That is, the upper mass body 12A is supported from below by the upper vibration springs 14a and 14b at the front and rear positions in the carrying direction D, respectively. The reference mass body 11 and the lower mass body 12B are arranged at the front and rear positions in the carrying direction D with a lower vibrating spring 15a including a leaf spring- And 15b, respectively. That is, the lower mass body 12B is suspended from the upper side by the lower vibration springs 15a and 15b at the front and rear positions in the carrying direction D, respectively.

The vibration springs 13a and 13b, the upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b all have a plate spring structure which is formed in an overall plate shape and has a plate- The spring constant is low, and the spring constant in the longitudinal direction (direction connecting between the upper and lower sides) is high. In the present embodiment, the leaf spring structures of the vibration springs 13a and 13b, the upper vibration springs 14a and 14b, and the lower vibration springs 15a and 15b are such that the longitudinal direction of each of the vibration springs 13a and 13b, And are attached so as to have a matching vertical posture. Therefore, in the illustrated example, the stiffness in the carrying direction D is low, while the supporting stiffness in the vertical direction and the width direction of each spring is high. As a result, the mutual support structure between the reference mass body 11, the upper mass body 12A and the lower mass body 12B is stabilized and the mutual positional relationship can be easily maintained, and at the same time, The vibration for imparting the conveying force is easily generated while suppressing the occurrence of unnecessary vibration which does not contribute to the conveying force or interferes with the conveying. Here, the vibration-proof springs 13a and 13b are made wider than the other springs to increase the support rigidity in the width direction and make the length longer than other springs to facilitate the elastic deformation in the carrying direction D. However, the elastic properties of the respective springs can be adjusted depending on the material and the thickness of the plate. In this specification, the width direction is a direction orthogonal to both the transport direction D and the vertical direction.

The upper vibrating springs 14a and 14b are disposed on the reference mass body 11 of the piezoelectric actuators 16a and 16b which are coupled to the reference mass body 11 at the front and rear positions in the carrying direction D, And an upper side piezoelectric driving part 16au and 16bu which are parts extending upward of the upper piezoelectric driving part 16au and 16bu and a plate side upper side amplification part 16b connected to the upper ends of the upper piezoelectric driving parts 16au and 16bu, And has a series connection structure with the springs 17a and 17b. In this embodiment, the upper vibrating springs 14a and 14b include upper connecting portions 12AaS and 12AbS, which will be described later, for connecting the upper amplifying springs 17a and 17b and the upper mass 12A. Likewise, the lower vibration springs 15a and 15b are connected to the lower piezoelectric driver 16ad, which is a portion extending downward from the reference mass 11 in the piezoelectric actuators 16a and 16b respectively coupled (fixed and connected) to the reference mass 11. [ Shaped lower amplifying springs 18a and 18b having plate surfaces facing the carrying direction D and connected to the lower ends of the lower piezoelectric drivers 16ad and 16bd. The lower vibration springs 15a and 15b also include lower connection portions 12BaS and 12BbS described later for connecting the lower amplifying springs 18a and 18b and the lower mass 12B.

The piezoelectric actuators 16a and 16b are respectively attached to the front attachment position 11a and the rear attachment position 11b which are located forward and rearward of the reference mass body 11 in the carrying direction D. The reference mass body 11 has an intermediate portion 11ab disposed between the front attachment position 11a and the rear attachment position 11b in the carrying direction D and a middle portion 11ab disposed between the front attachment position 11a and the rear attachment position 11b in the carrying direction D, And a rear portion 11bb disposed behind the rear attachment position 11b in the conveying direction D. The front portion 11aa is disposed in front of the rear attachment portion 11b. The reference mass body 11 is provided at the front attachment position 11a and the rear attachment position 11b which are attachment portions to the piezoelectric actuators 16a and 16b so as not to interfere with the operation of the piezoelectric actuators 16a and 16b Except that the intermediate portion 11ab, the front portion 11aa and the rear portion 11bb are formed thicker than the front attachment position 11a and the rear attachment position 11b, . The middle portion 11ab, the front portion 11aa and the rear portion 11bb of the upper amplification spring 17a and the lower amplification spring 17b are arranged so as not to interfere with the upper mass 12A and the lower mass 12B, (18a) and (18b), respectively. A later-described side connection structure 16t provided at an intermediate portion in the vertical direction of the piezoelectric actuator 16a is fixed to the front attachment position 11a of the reference mass body 11, Side connecting structure 16t, which will be described later, provided at an intermediate portion in the vertical direction of the piezoelectric actuator 16b is fixed to the piezoelectric actuator 11b. The upper end portions of the vibration springs 13a and 13b are connected and fixed to the front end of the front portion 11aa and the rear end of the rear portion 11bb by bolts 19a and 19b described later. Since the vibration springs 13a and 13b are disposed outside the front and rear positions in the carrying direction D relative to the lower vibration springs 15a and 15b as described above, Stability is improved. Particularly, in the reference mass 11 of the present embodiment, the reference mass 11 is disposed outside the front and rear positions in the carrying direction D relative to the front attachment position 11a and the rear attachment position 11b, which are connected to the piezoelectric actuators 16a, The inertia of the reference mass body 11 against the pitching motion along the carrying direction D is increased by providing the front mass portion 11aa and the rear portion 11bb protruding in the vertical direction and having a relatively large mass It is possible to suppress destabilization of the conveying posture of the conveyed object and the entirety of the vertical vibration to the installation surface. Further, in the assembling process of the apparatus, since the vibration springs 13a and 13b can be mounted from the front and rear outside of the carrying direction D after assembling the main vibration system, there is an advantage that the assembling work is facilitated. The front portion 11aa and the rear portion 11bb also function as cover members of the piezoelectric actuators 16a and 16b to be described later.

6A to 6C, the piezoelectric actuators 16a and 16b of the present embodiment are constituted of a metal elastic substrate 16s called a SIMM plate, (Piezoelectric layer) 16p which is laminated (laminated) on both the front and back surfaces of the piezoelectric body. The elastic substrate 16s is provided with a thin wall portion extending at both ends (upper and lower ends) of the extending direction of the elastic substrate 16s. The thin wall portions are connected to the upper side amplification springs 17a and 17b and the lower side amplification springs 18a and 18b Respectively. An upper connection structure 16u and a lower connection structure 16d are formed at the lower ends of the upper amplification springs 17a and 17b and the lower amplification springs 18a and 18b. Although the upper connection structure 16u and the lower connection structure 16d are through holes for connection in the illustrated example, they may be screw holes, bosses, cutouts, etc., and are not particularly limited. The elastic substrate 16s has side connection structures 16t and 16t for the reference mass body 11 on both sides in the width direction of the intermediate portion in the extending direction. The side connecting structure 16t is a protruding portion of a hole portion protruding in the width direction in the illustrated example, but may be a screw hole, a boss, a notch or the like, and is not particularly limited. At this time, the piezoelectric body 16p is disposed on the elastic substrate 16s at an intermediate position in the width direction between the left and right side connection structures 16t. In this way, since the coupling positions with respect to the reference mass body 11 are provided on both sides in the width direction avoiding the piezoelectric body 16p, it is difficult to affect the flexural deformation of the piezoelectric actuators 16a and 16b, The piezoelectric actuators 16a and 16b can be firmly fixed to the reference mass body 11 by being firmly fixed to the reference mass body 11 on both sides of the reference mass body 11. With this reference mass body 11 as a reference, It is possible to surely apply the excitation force to the lower mass 12A and the lower mass 12B.

When the piezoelectric actuators 16a and 16b apply a voltage to the front and rear sides of the piezoelectric body 16p, the piezoelectric body 16p is deformed in accordance with the voltage so that the elastic substrate 16s is bent in the longitudinal direction. The piezoelectric actuators 16a and 16b are alternately bent in a reverse direction to be vibrated by applying an alternating voltage of a predetermined frequency and the vibrations are transmitted to the upper amplifying springs 17a and 17b and the lower amplifying springs 18a and 18b, Thereby causing a vibration along the conveying direction D substantially between the reference mass body 11 and the upper mass body 12A and the lower mass body 12B. The piezoelectric actuators 16a and 16b at the front and rear positions in the carrying direction D are all bent in the same phase so that the upper piezoelectric actuators 16au and 16bu and the lower piezoelectric actuators 16ad and 16bd are in the same phase The upper mass body 12A and the lower mass body 12B also vibrate in the same phase with respect to the reference mass body 11. [ At this time, the reference mass body 11 vibrates in a phase opposite to that of the reference mass body 11 so as to cancel the reaction force due to the vibrations of the upper mass body 12A and the lower mass body 12B. The piezoelectric actuators 16a and 16b of the illustrative examples have a bimorph structure in which the piezoelectric bodies 16p are disposed on both sides of the elastic substrate 16s and the piezoelectric bodies are disposed on only one side of the elastic substrate 16s But may be a unimorph structure or various other types of known piezoelectric actuators. The piezoelectric actuators 16a and 16b have a symmetrical structure in the longitudinal direction (vertical direction) with the intermediate portion (specifically, a horizontal line connecting the side connecting structures 16t on both sides in the width direction) as symmetrical axes , And is symmetrical also in the width direction (left and right) with the axis along the vertical direction at the center in the width direction as a symmetry axis. As a result, it is possible to reliably apply uniform equal-phase excitation force to both of the upper mass body 12A and the lower mass body 12B, and to realize a stable vibration mode with less distortion and a wider view in the width direction.

The elastic substrate 16s of the piezoelectric actuators 16a and 16b is thick in the upper piezoelectric actuators 16au and 16bu and the lower piezoelectric actuators 16ad and 16bd which are arranged in a range in which the piezoelectric elements 16p are laminated, The upper amplifying springs 17a and 17b and the lower amplifying springs 18a and 18b are thinned from the upper piezoelectric actuators 16au and 16bu and the lower piezoelectric actuators 16ad and 16bd. The reasons are as follows. The upper piezoelectric actuators 16au and 16bu and the lower piezoelectric actuators 16ad and 16bd of the piezoelectric actuators 16a and 16b avoid breakage of the elements because the piezoelectric bodies 16p are generally made of ceramics and therefore fragile and fragile. It is necessary to increase the thickness of the elastic substrate 16s to suppress the elastic deformation and limit the amount of flexural deformation of the piezoelectric body 16p. On the other hand, in the upper amplification springs 17a and 17b and the lower amplification springs 18a and 18b, amplitudes of vibrations generated in the upper piezoelectric actuators 16au and 16bu and the lower piezoelectric actuators 16ad and 16bd are amplified, The amount of elastic deformation is increased by thinning the elastic substrate 16s so that the upper mass body 12A and the lower mass body 12B (particularly, the upper mass body 12A provided with the transport path 12t) It is necessary to increase the amplitude of the vibration in the carrying direction. Therefore, the above-described change in the thickness of the elastic substrate 16s is considered to be compatible with the protection (prevention of damage) of the piezoelectric body 16p and the securing of the amplitude of vibration of the upper mass body 12A and the lower mass body 12B Effect.

In the boundary region between the upper piezoelectric actuators 16au and 16bu and the lower piezoelectric actuators 16ad and 16bd and the upper amplifying springs 17a and 17b and the lower amplifying springs 18a and 18b, The sectional shapes of the upper side amplifying springs 14a and 14b and the lower side amplifying springs 15a and 15b are set so that the thicknesses of the upper side amplifying springs 17a and 17b and the lower side amplifying springs 18a and 18b gradually change in the extending direction of the upper side vibrating springs 14a and 14b and the lower side vibrating springs 15a and 15b It is preferable that it is formed in a tapered shape toward the side of the frame. As a result, the stress is concentrated on the local area of the boundary region of the elastic substrate 16s (particularly, the upper side amplification springs 17a and 17b and the lower side amplification springs 18a and 18b) It is possible to avoid that the elastic characteristics of the amplifying springs 17a and 17b and the entire lower amplifying springs 18a and 18b in the longitudinal direction can not be effectively utilized. In particular, as shown in the drawing, the contour of the cross section of the boundary region is formed in a concave curve shape along the extending direction, and the surface or the back surface of the end surface of the upper side amplifying springs 17a, 17b and the lower side amplifying springs 18a, 18b The upper amplification springs 17a and 17b and the lower amplification springs 18a and 18b are preferably smoothly bent so as to smoothly converge on the outline of the lower amplification springs 17a and 17b.

A pair of bolts 19a penetrate both side portions in the width direction of the front portion 11aa and are connected to a pair of side connection structures 16t, 16t are fastened to the intermediate portion 11ab in a state in which they are inserted. Thereby, the piezoelectric actuator 16a is fixed to the reference mass 11 in a state in which the side connecting structure 16t is sandwiched between the front portion 11aa and the middle portion 11ab. In the illustrated example, the bolt 19a holds and fixes the upper end portion of the dustproof spring 13a between the left arm 19c and the front portion 11aa, and the front portion 11aa, the piezoelectric driving body 16a, (11ab). Similarly, a pair of bolts 19b penetrate through both side portions in the width direction of the rear portion 11bb, and a pair of side connection structures 16t and 16t provided on both sides in the width direction of the piezoelectric driving body 16b are respectively inserted To the intermediate portion 11ab. Thereby the piezoelectric actuator 16b is fixed to the reference mass 11 in a state in which the side connecting structure 16t is clamped between the rear portion 11bb and the middle portion 11ab. In the illustrated example, the bolt 19b holds and fixes the upper end portion of the vibration-proof spring 13b between the left arm 19d and the rear portion 11bb, while the rear portion 11bb, the piezoelectric driving body 16b, (11ab).

As shown in Fig. 1, the lower end portions of the anti-vibration springs 13a and 13b are fixedly connected to the upper support base 2A of the base 2. The base 2 includes an upper support table 2A and a lower support table 2B and an upper support table 2A is installed on a lower support table 2B. Horizontal vibration springs 13ah and 13bh, which are plate springs provided in a horizontal posture, are connected between the upper side support 2A and the lower side support 2B. The upper support table 2A is elastically supported above the lower support table 2B by horizontal vibration springs 13ah and 13bh. The horizontal vibration springs 13ah disposed on the front side in the carrying direction D are attached and fixed to the front attachment portion 2Aa of the upper support base 2A on the front side in the carrying direction D, To the front attachment portion 2Ba of the lower support base 2B. The horizontal vibration springs 13bh disposed on the rear side of the carrying direction D are attached and fixed to the rear mounting portion 2Bb of the lower side support 2B on the front side in the carrying direction D, And is attached and fixed to the rear attachment portion 2Ab of the upper support base 2A on the rear side of the base D. In the illustrated example, the left and right side portions of the lower side support 2B are provided with fixing holes (only one fixing hole on one side is shown in FIG. 2) for fixing to the mounting surface (the surface of the other device or the bottom surface of the factory) The upper support base 2A and the lower side mass body 12B have a planar shape in which both side portions on the left and right sides of the central portion in the carrying direction D are formed in a concave shape so as to be fixed to the mounting surface using these fixing holes .

The upper mass body 12A is connected and fixed on the connection block 12Ad to which the upper ends of the upper amplification springs 17a and 17b are connected and on the connection block 12Ad, And a transport block 12Au formed with a transport block 12t. The transport block 12Au generally has a larger length along the transport direction D than the connection block 12Ad and as shown in the figure, And to protrude rearward. The conveying path 12t has a linear shape along the conveying direction D in the illustrated example. The transport path 12t has at least a groove structure capable of accommodating the transported article in its default posture and capable of maintaining the specified posture of the transported article during transport along the transport direction D.

The upper amplifying spring 17a and the lower amplifying spring 18a are connected to the upper mass 12A and the lower mass 12B from the front side in the carrying direction D at the front of the carrying direction D, . Here, the upper connecting portion 12AaS between the upper amplifying spring 17a and the upper mass 12A and the lower connecting portion 12BaS between the lower amplifying spring 18a and the lower mass 12B are arranged in the carrying direction D So that the connection structure is substantially the same. Hereinafter, the upper connecting portion 12AaS will be described with reference to Fig. 5, and the description of the lower connecting portion 12BaS will be omitted.

5, the upper connecting portion 12AaS is provided with a front concave portion 12Aa having a concave shape opening forward in the carrying direction D at the front end portion 12a of the upper mass body 12A in the carrying direction D, And a portion 12aa is formed at the center in the width direction. The pair of end faces on both sides in the width direction of the front end concave portion 12aa of the front end portion 12a is a front end face 12as which is configured to be flat along the width direction. The upper end of the upper amplifying spring 17a is fixed in a state of being in tight contact with the central portion in the width direction of the connecting plate 12AaC from the front side in the carrying direction D by using bolts, The connecting plate 12AaC is formed of an elastic body (metal plate) having a plate shape extending on both sides in the width direction than the upper side amplifying spring 17a and has a front end concave portion 12aa, And is fixed to the upper mass body 12A by a bolt, a left arm or the like in a state of being in tight contact with the front side of the conveying direction D with respect to the front end face 12as. Since the upper amplifying springs 17a are fixed to the central portion in the width direction of the connecting plate 12AaC and both side portions in the width direction of the connecting plate 12AaC are fixed to the upper mass 12A, Are elastically connected to the upper mass body 12A via the connecting plate 12AaC. Here, the connecting plate 12AaC is elastically deformable in the direction of rotating about the axis Txa along the width direction of the connecting plate 12AaC orthogonal to the carrying direction D and perpendicular to the carrying direction Thereby constituting an upper spring element capable of functioning as a torsion spring.

The upper amplification spring 17b and the lower amplification spring 18b are disposed on the upper side mass body 12A and the lower side mass body 12B from the front side in the carrying direction D on the back side of the carrying direction D, The connection is fixed. The upper connecting portion 12AbS between the upper amplifying spring 17b and the upper mass body 12A and the lower connecting portion 12BbS between the lower amplifying spring 18b and the lower mass 12B are arranged in the carrying direction D So that the connection structure is substantially the same. Therefore, the upper connecting portion 12AbS will be described below with reference to Fig. 5, and the description of the lower connecting portion 12BbS will be omitted.

5, in the upper connecting portion 12AbS, a rear concave portion having a concave shape opening rearward in the carrying direction D is provided at the rear end 12b of the upper mass body 12A in the carrying direction D, And a portion 12bb is formed at the center in the width direction. A pair of end faces on both sides in the width direction of the rear end concave portion 12bb of the rear end portion 12b is a rear end face 12bs which is formed flat along the width direction. The upper end of the upper amplifying spring 17b is in a state of being in tight contact with the central portion in the width direction of the connecting plate 12AbC from the front side in the carrying direction D by using bolts, Is fixed. However, in the illustrated example, for example, a spacer 12Absp is interposed between the upper end of the upper side amplifying spring 17b and the connecting plate 12AbC. The connecting plate 12AbC is constituted by an elastic body (metal plate) having a plate shape extending on both sides in the width direction with respect to the upper side amplifying spring 17b and has a rear end concave portion 12bb so that both end portions in the width direction thereof D to the upper mass body 12A in a state of being in tight contact with the pair of rear end surfaces 12bs from the rear side. Since the upper amplifying spring 17b is fixed to the central portion in the width direction of the connecting plate 12AbC and both side portions in the width direction of the connecting plate 12AbC are fixed to the upper mass 12A, Are elastically connected to the upper mass body 12A via the connecting plate 12AbC. Here, the connecting plate 12AaC is configured to be twisted in the twisting direction about the axis Txb along the width direction of the connecting plate 12AbC, which is orthogonal to the carrying direction D and perpendicular to the carrying direction 12AbC Thereby constituting an upper spring element capable of functioning as a spring.

The upper ends of the upper amplification springs 17a and 17b are disposed on the front side in the carrying direction D and the upper ends of the upper amplifying springs 17a and 17b are connected to each other in both the upper connecting portions 12AaS and 12AbS provided at the front and rear positions in the above- The plates 12AaC and 12AbC are fixed to each other via the spacer 12Absp in a state in which they are arranged on the rear side in the carrying direction D. Therefore, a torsion spring is disposed between the upper amplifying springs 17a and 17b and the upper mass 12A in the carrying direction D, behind the upper amplifying springs 17a and 17b in the carrying direction D An upper spring element is interposed. The distance D between the upper amplifying spring 17a and the upper spring element at the upper connecting portion AaS on the front side in the carrying direction D is smaller than the distance in the carrying direction D The distance between the upper side amplifying spring 17b and the upper side spring element in the carrying direction D is made larger by the thickness of the spacer 12Absp.

Next, operation modes of the reference mass body 11, the upper mass body 12A and the lower mass body 12B by the piezoelectric actuators 16a, 16b will be described based on the above-described configuration. The upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b are connected to the reference mass 11 in the fixed position 11p in this embodiment as shown in Fig. . On the other hand, the substantially fixed positions 12Ap and 12Bp of the upper side vibration springs 14a and 14b and the lower side vibration springs 15a and 15b with respect to the upper side mass 12A and the lower side mass 12B, . This is because the connecting plates 12AaC and 12AbC and 12BaC and 12BbC interposed between the upper mass body 12A and the lower mass body 12B are connected to the upper amplifying springs 17a and 17b, (18a, 18b) in the conveying direction (D). That is, the upper spring elements and the lower spring elements corresponding to the torsion springs constituted by the connecting plates 12AaC and 12AbC and 12BaC and 12BbC are made to be higher than the upper amplification springs 17a and 17b and the lower amplification springs 18a and 18b And is connected to the upper mass body 12A and the lower mass body 12B via the upper spring element and the lower spring element so that the upper vibrating springs 14a and 14b and the lower vibrating springs 14b, The upper mass bodies 12A and the lower mass bodies 12A and 15B are arranged in such a manner that they are inclined in the direction toward the rear side in the carrying direction D as the upper and lower mass bodies 12A and 12B are vertically displaced from the fixed position 11p, 12B are vibrated in the vibration directions BVs, BVt (see Fig. 1) inclined with respect to the carrying direction D. That is, the upper mass body 12A oscillates in an obliquely downward direction BVs toward the front side in the carrying direction D and diagonally upward toward the rear side in the carrying direction D while the lower mass body 12B vibrates, And oscillates in an obliquely downward direction toward the front side in the carrying direction D and in a direction BVt diagonally upward toward the rear side in the carrying direction D. [

Therefore, in the case of the present embodiment, the vibration angle [theta] of the upper vibration springs 14a and 14b is set such that the angle difference between the line connecting the fixed position 11p and the fixed position 12Ap and 12Bp ), Which coincides with the vibration angle of the upper mass body 12A with respect to the horizontal plane. Similarly, the vibration angle of the lower vibration springs 15a and 15b coincides with the vibration angle of the lower mass body 12B with respect to the horizontal plane. 6C, the width direction axial lines Txa and Txb (not shown) of the connection plates 12AaC and 12AbC are the same as the widthwise direction axes of the connection plates 12BaC and 12BbC The position of the substantially fixed position 12Ap (12Bp) is shifted to the axial direction (Txa, Txb) according to the characteristics of the upper spring element (lower spring element) (An axis not shown). However, as long as the upper spring element and the lower spring element are disposed on the rear side of the upper amplifying springs 17a and 17b and the lower amplifying springs 18a and 18b in the carrying direction D, the upper vibrating springs 14a, The vibration angle θ described above exists in the upper and lower vibration springs 15a and 15b and the lower vibration springs 15a and 15b and the vibration in the inclined direction in the above described direction occurs in the upper mass body 12A and the lower mass body 12B There is no way.

6 (d), as another example of the first embodiment, the spacer 12Absp (12Bbsp) is replaced with the spacers 12Absp 'and 12Bbsp' having different thicknesses so that the upper side amplifying springs 17a and 17b The distance along the conveying direction D between the lower amplifying springs 18a and 18b and the connecting plates 12AaC and 12AbC and 12BaC and 12BbC can be increased or decreased. '). 7 is a plan view of the main structure of the second embodiment. In this example, by using the spacer 12Absp ', which is thicker than the spacer 12Absp, in the upper connecting portion 12AbS' on the rear side in the carrying direction D, the vibration angle? ' Is larger than the vibration angle (?) Of the first embodiment. In this example, the other configuration is the same as the above-described configuration of the first embodiment, except for the upper connecting portion 12AbS 'shown in Fig. 7 and the unillustrated lower connecting portion similarly configured.

The main body of the upper vibration springs 14a and 14b constituted by the piezoelectric actuators 16a and 16b and the upper side amplifying springs 17a and 17b and the lower side amplifying springs 18a and 18b, 15a and 15b are provided in a vertical posture having a longitudinal direction along a vertical plane orthogonal to the carrying direction D. Therefore, the vibration system can be constructed without tilting the upper and lower piezoelectric actuators 16a and 16b, the upper amplification springs 17a and 17b and the lower amplification springs 18a and 18b. Therefore, the piezoelectric actuators 16a and 16b Even when the main vibration system is operated at a high frequency to excite the main vibration system at a high speed, it is difficult to generate a vibration mode in which no upward and downward bouncing is required, and the conveying posture of the conveyed article can be stabilized. Therefore, the high frequency of the apparatus is facilitated, and it becomes possible to realize a high-speed transportation and a smooth transportation mode.

The upper connecting portions 12AaS and 12AbS disposed on the rear side of the upper connecting ends of the upper amplifying springs 17a and 17b and the lower connecting ends of the lower amplifying springs 18a and 18b in the carrying direction D, The body of the upper vibration springs 14a and 14b and the body of the lower vibration springs 15a and 15b are connected to each other by connecting the upper mass body 12A and the lower mass body 12B via the lower connecting portions 12BaS and 12BaS. The vibration angles? And? 'Can be substantially provided on the upper side vibration springs 14a and 14b and the lower side vibration springs 15a and 15b while maintaining the vertical positions of the spacers 12Absp and 12Absp' The vibration angle (?,? ') Can be easily adjusted by changing the presence or the thickness, or the like. This makes it possible to cause the conveying force to be conveyed in the conveying direction F toward the front side in the conveying direction D on the conveying path 12t formed in the conveying block 12Au, By adjusting the oscillation direction BVs shown in Fig. 1 corresponding to the oscillation angle [theta], [theta] 'at the forward and backward positions in the carrying direction D, the carrying force along the size of the carrying force and the carrying direction D It is possible to control the conveying speed and the conveying mode of the conveyed object.

[Second Embodiment]

8A is a sectional view showing the piezoelectric actuators 16a and 16b and the upper connecting portions 12AaS and 12AbS and the lower connecting portions 12BaS and 12BbS according to the first embodiment. Sectional views showing the piezoelectric actuators 16a ", 16b ", the upper connecting portions 12AaS ", 12AbS ", and the lower connecting portions 12BaS ", 12BbS " In the second embodiment, the elastic substrate 16s "of the piezoelectric actuators 16a", 16b "is arranged in the range in which the piezoelectric body 16p is formed (the upper piezoelectric actuators 16au, 16bu ) And the lower piezoelectric driver 16ad, 16bd), and is thin in the upper portion constituting the upper amplifying springs 17a ", 17b" and the lower portion constituting the lower amplifying springs 18a ", 18b" . However, in the second embodiment, the thickness range of the upper amplification springs 17a ", 17b" and the lower amplification springs 18a ", 18b" is larger than the thickness range of the upper piezoelectric drivers 16au, 16bu and the lower piezoelectric driver 16d in the conveying direction D by 隆 ts with respect to the thickness range of the elastic substrate 16s " In the illustrated example, the upper amplification springs 17a ", 17b" and the rear-side surfaces of the lower amplification springs 18a ", 18b" in the transport direction D are connected to the upper piezoelectric drivers 16au, The surface of the lower side of the lower piezoelectric driving portions 16ad and 16bd in the carrying direction D is formed to extend straightly along the vertical plane. On the other hand, the surface on the front side of the upper amplifying springs 17a ", 17b" and the lower amplifying springs 18a ", 18b" in the carrying direction D is formed by the upper piezoelectric actuators 16au, 16bu, And is greatly retracted toward the rear side in the carrying direction (D) relative to the front side surface of the driving portions (16ad, 16bd) in the carrying direction (D).

In this embodiment also, the boundary between the upper piezoelectric actuators 16au, 16bu and the lower piezoelectric actuators 16ad, 16bd and the upper amplifying springs 17a ", 17b" and the lower amplifying springs 18a "18b" Sectional shape of the elastic amplifying springs 17a and 17b " and the lower amplifying springs 18a ", 18b ", so that the thickness of the elastic amplifying springs 17a & And the lower amplifying springs 18a ", 18b ". In particular, as shown in the drawing, the contour shape on the front side in the carrying direction D of the cross section of the boundary region Of the upper amplifying springs 17a '' and 17b '' and the lower amplifying springs 18a '' and 18b '' on the contour of the front side in the carrying direction D, .

In this case, since the fixed positions 12Ap ", 12Bp " are shifted (offset) to the rear side of the carrying direction D by the amount of the displacement? Tts, the vibration angle? It can be set to be larger than that of the first embodiment. The piezoelectric actuators 16a "and 16b" are provided with the upper amplification springs 17a and 17b and the lower amplification springs 18a and 18b without the upper connection portions 12AaS and 12AbS described in the first embodiment. Is directly connected to the upper mass body 12A and the lower mass body 12B, a certain degree of vibration angle? Can be obtained by the deviation? Tts in the thickness range.

[Regarding all embodiments]

In general, the absolute value of the vibration angle (?,? ',? ") Of the upper vibration springs 14a, 14b and the lower vibration springs 15a, 15b 12A) is preferably an angular value with respect to the horizontal direction within a range of 1 to 10 degrees, preferably 2 to 8 degrees, more preferably 3 to 6 degrees. The upper vibration spring 14a and the lower vibration spring 15a on the front side in the carrying direction D and the upper vibration spring 14b and the lower vibration spring 15b on the rear side in the carrying direction D But it is also possible to optimize the shape of vibration and the shape of distribution of vibration over the entire length of the conveying path 12t according to the configuration of the entire vibration system including the shape and structure of the conveying block 12Au, The upper vibration spring 14a and the lower vibration spring 15a and the upper vibration spring 14b and the lower vibration spring 15b before and after the carrying direction D are set to have mutually different vibration angles . For example, according to the relationship between the apparatus and other apparatuses connected to the front or back of the carrying direction D, the amount of protrusion of the carrying block 12Au toward the front side in the carrying direction D is equal to or larger than the carrying direction D The actual vibration angle changes along the conveying direction D of the conveying route 12t due to the weight balance of the upper mass 12A and the conveying force is disturbed have. At this time, it is possible to adjust the conveying speed along the conveying direction D on the conveying path 12t by setting the vibration angle to be different at the front and rear positions in the conveying direction D. However, the conveying speed is not necessarily adjusted to be uniform along the conveying direction (D), and the conveying speed may be forcibly changed along the conveying direction (D). For example, in the case where a sorting means for rejecting a part of the transported article out of the transporting path 12t on the basis of a transporting posture or a good or bad of an object is provided in the middle of the transporting path 12t, The conveying speed is gradually lowered from the upstream side toward the downstream side so that the conveying density can be consequently uniformed in the conveying direction. The vibration angle of the upper vibration spring 14a and the lower vibration spring 15a at the front position in the carrying direction D and the vibration angle of the upper vibration spring 14b at the rear position in the carrying direction D And the lower vibration springs 15b may be separately adjusted.

On the other hand, the vibration angle of the upper side vibration springs 14a and 14b and the vibration angle of the lower side vibration springs 15a and 15b are set so as to be vertically opposite to each other as described above. In this case as well, the vibration angle of the upper vibration springs 14a and 14b and the vibration angle of the lower vibration springs 15a and 15b may have the same absolute value or may have different absolute values. For example, in order to stabilize the conveying state of the conveyed matter on the conveying path 12t and minimize the leakage amount of vibration in accordance with the effect of gravity on the upper mass body 12A and the lower mass body 12B or the difference in mass, It is preferable to separately adjust the vibration angle of the upper vibration springs 14a and 14b and the vibration angle of the lower vibration springs 15a and 15b.

Next, referring to Fig. 9, the structure of the base 2 that can be commonly used in each of the above embodiments will be described in detail. Fig. The base 2 is composed of upper and lower supports 2A and 2B which are separated from each other and a horizontal vibration spring 13ah is provided between the upper and lower supports 2A and 2B, 13bh are interposed between them to constitute a dustproof structure which is easy to absorb vibration in the vertical direction. The horizontal vibration springs 13ah and 13bh are plate-shaped plate springs arranged in a horizontal posture extending along the conveying direction D. The horizontal vibration springs 13ah and 13bh compensate for the fact that the vibration springs 13a and 13b, which are easy to absorb the vibration in the carrying direction D, are configured to be hard to absorb vibration in the vertical direction. The horizontal vibration springs 13ah provided at the front position in the carrying direction D are provided with a pair of bolts 21Aa arranged in the width direction and a pair of bolts 21Aa arranged in the width direction with respect to the front mounting portion 2Aa of the upper support table 2A As shown in Fig. The front attachment portion 2Ba of the lower support base 2B protrudes in the shape of a strip extending in the width direction to have a flat upper end face and a horizontal vibration springs 13ah are provided on the rear attachment portion 2Ba, And is fixed in a state in which it is in close contact with the upper side by the upper face 21Ba. On the other hand, the horizontal vibration springs 13bh provided in the rearward position in the carrying direction D are provided with a pair of bolts 21Ab arranged in the width direction and a pair of bolts 21Ab arranged on the rear mounting portion 2Ab of the upper support arm 2A, (22Aa). The rear attachment portion 2Bb of the lower support base 2B has a flat upper end surface that protrudes in the shape of a band extending in the width direction and a horizontal vibration springs 13bh are provided on the rear attachment portion 2Bb, And is fixed in a state in which it is in close contact with the upper side by the upper face 21Bb.

The upper support base 2A is provided with bolt accommodating portions 2Aaq and 2Abq which are open at least downward. The bolt receiving portion 2Aaq accommodates the bolt 21Ba so as not to interfere with the bolt accommodating portion 2Aaq and the bolt accommodating portion 2Abq accommodates the bolt 21Bb without interfering with the bolt 21Ba. Likewise, bolt receiving portions 2Baq and 2Bbq, which are open at least upward, are provided on the lower side support 2B. The bolt accommodating portion 2Baq accommodates the bolt 21Aa so that it does not interfere with the bolt 21Ab and the bolt accommodating portion 21Bbq accommodates the bolt 21Ab without interfering with the bolt 21Ab. In the illustrated example, the bolt receiving portions 21Aaq, 21Abq, 21Baq, and 21Bbq are formed as through holes in the upper support base 2A or the lower support base 2B, respectively. However, each bolt accommodating portion may have a structure that can be received in a non-contact state so as not to come in contact with corresponding bolts. For example, the bolt accommodating portion is not limited to the above-described through hole but may be closed by a lid or the like.

In the base 2 constructed as described above, by providing the respective bolt accommodating portions, even if the distance between the upper support table 2A and the lower support table 2B is narrowed, the horizontal vibration springs The height of the base 2 can be reduced because the fixing structure for fixing the base 2 does not come into contact with (not contact with) the other support. In addition, since the vertical distance between the upper support table 2A and the lower support table 2B can be reduced, tilting of the upper support table 2A due to the warping of the horizontal vibration springs 13ah and 13bh can be suppressed. In the present embodiment, the horizontal vibration springs 13ah and 13bh are connected to the upper support table 2A and the lower support table 2B in the conveying direction D, respectively. This makes it difficult for the main vibration system to swing in the width direction, so that the conveying posture of the conveyed object can be stabilized. In particular, in the horizontal vibration springs 13ah and 13bh, the attachment directions viewed in the transport direction D are opposite to each other. That is, in the horizontal vibration springs 13ah, the fixing position of the upper support table 2A with respect to the fixing position with respect to the lower support table 2B is in front of the carrying direction D while the horizontal vibration springs 13bh The fixing position with respect to the upper support table 2A with respect to the fixing position with respect to the lower support table 2B lies behind the transportation direction D. [ As a result, when the upper support table 2A supporting the main vibration system via the anti-vibration springs 13a and 13b vibrates up and down on the lower support table 2B, the curved direction of the arc- The elastic deformation characteristic that the elastic deformation is less likely to occur due to the mutual interference between the horizontal vibration springs 13ah and 13bh due to the mutual difference between the front and rear directions D can be obtained . Therefore, the minute upper and lower movements due to the excitation force of the excitation means itself are absorbed, which does not cause instability of the main vibration system, and it is possible to prevent a large up / down motion and a pitching motion from occurring in the main vibration system.

In the case of the dust-proof structure, when it is necessary to absorb only the vibration in the carrying direction D, the dust-proof springs 13a and 13b may be directly provided on the mounting surface or may be connected to the base without the horizontal vibration springs 13ah and 13bh The vibration damping structure for elastically supporting the main vibration system may have a structure having only a pair of vibration springs 13a and 13b at the front and rear positions in the carrying direction D. In particular, if the driving frequency is 500 Hz or less, there is hardly a problem of small up-and-down vibrations. Therefore, when only the vibration in the carrying direction D of the main vibration system is absorbed, the object of vibration damping can be achieved. In the composite vibration damping structure having the pair of vibration springs 13a and 13b and the pair of horizontal vibration springs 13ah and 13bh described above, the basic function of absorbing the vibration in the carrying direction D and the up- It is only necessary that the vibration-proof spring and the horizontal vibration-proof spring are connected in series between the main vibration system and the mounting surface. For example, the dust-proof structure portion having the dust-proof spring 13a and the horizontal dust-free spring 13ah, and the dust-proof spring 13b and the horizontal dust- 13bh may be arranged so as to be separated from each other at the front and back positions in the carrying direction D. [ The planar shape of the fixing region of the horizontal vibration springs 13ah and 13bh with respect to the upper support base 2A is formed into two circular shapes by the two left and right seats 22Aa and 22Ab, The planar shape of the fixed region with respect to the lower side support 2B of each of the front attachment portion 2Ba and the rear attachment portion 2Bb is formed into a strip shape by the shape of the upper end of the front attachment portion 2Ba and the rear attachment portion 2Bb. However, the planar shape of these fixed regions can be appropriately adjusted in accordance with the elastic deformation characteristics required for the horizontal vibration springs 13ah and 13bh.

[Third embodiment]

10 is a side view showing a schematic structure of a third embodiment of the oscillating type conveying apparatus according to the present invention. In the device 20 of the third embodiment, the vibration springs 13a and 13b at the front and rear in the carrying direction D are arranged at positions corresponding to the corresponding piezoelectric actuators Are arranged in front of the first and second electrodes 16a and 16b. The other structures are the same as those of the above-described embodiments. More specifically, the attachment positions of the vibration-proof springs 13a and 13b with respect to the reference mass body 11 are set so as to correspond to the reference mass body 11 of the corresponding piezoelectric actuators 16a and 16b before and after the carrying direction D, And the vibration springs 13a and 13b extend substantially vertically downward and are attached to the base 2 (actually, the upper support base 2A described above). The front portion 11aa and the rear portion 11bb of the reference mass body 11 are provided on both sides in the width direction (the direction orthogonal to the paper surface in Fig. 10), and the piezoelectric actuators 16a, 16b on both sides in the width direction. The intermediate portion 11ab is constructed as in the above-described embodiment. In the front portion 11aa and the rear portion 11bb of the reference mass body 11, cylindrical spacers 19c and 19d having the same shape and the same dimensions are provided to the piezoelectric actuators 16a and 16b, And the anti-vibration springs 13a and 13b are attached from the front in the carrying direction D. As a result, the positional relationship (front-to-rear relationship) between the piezoelectric actuator 16a connected to the front portion 11aa and the transmission direction D of the anti-vibration spring 13a and the piezoelectric actuator 16b (Front-to-rear relationship) of the dust-proof spring 13b and the dust-proof spring 13b in the carrying direction D are the same as seen in the carrying direction D. The mounting structures of the vibration springs 13a and 13b and the piezoelectric actuators 16a and 16a with respect to the front portion 11aa and the rear portion 11bb are the same as those of the previous embodiment in that a pair of bolts 19a and 19b As shown in Fig.

When the vibratory transfer device is designed to have a low drive frequency (resonant frequency), it is preferable that the vibration mode is a mode other than the original vibration mode having a vibration direction that faces obliquely upward toward the carrying direction F and diagonally downward toward the reverse direction The influence on the conveyance by the vibration mode is not so much a problem. However, if the device structure is designed so as to have a high carrier frequency (resonance frequency) so that the transported object is transported at a high speed, the transported object is likely to jump up and down and left and right on the transport route, Or the conveying posture of the conveyed object changes during conveyance. Further, the conveying speed largely changes along the conveying path, and the uniformity of the conveying speed on the conveying path along the conveying direction D is lost. As a result, the conveying efficiency of the conveying material (actually, the conveying material is supplied to the exit of the conveying path The speed is rate-controlled by a portion having the lowest conveying speed along the conveying path) may be lowered. In the present embodiment, as described above, the sequence in which the piezoelectric actuators 16a and 16b and the vibration springs 13a and 13b are connected to the reference mass body 11 in the transport direction D is the transport direction D The reaction force from the upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b and the reaction force from the vibration springs 13a and 13b when viewed from the reference mass 11 The stability in the vertical direction and the width direction of the entire main vibration system is increased and the positional relationship between the main vibration system And it is considered that generation of the other vibration mode is suppressed. Actually, in the present embodiment, the upward and downward and leftward and rightward jumps of the transported articles are reduced, and the transporting speed along the transport direction D is also made uniform.

[Regarding all embodiments]

11 shows the relationship between the reference mass body 11, the upper mass body 12A and the lower mass body 12B and the upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b according to the respective embodiments described in this specification. Fig. 2 is a schematic block diagram schematically showing a configuration of a main vibration system composed of a main vibration system. In practice, this main vibration system is supported by the vibration springs 13a and 13b, the horizontal vibration springs 13ah and 13bh, and the base 2 as described above, thereby constituting the entire vibration system of each embodiment. Vibrational motion of the main vibration system, the weight of the reference mass ₍₁₁₎ (M 11), and the mass (M _12B) of the mass (M _12A) and the lower mass (12B) of the upper mass (12A), the upper vibration spring (14a The upper vibration angle? Au and the lower vibration angle? Ad on the front side of the carrying direction D and the lower vibration angle? Ad of the lower vibration springs 15a and 15b on the upper side in the carrying direction D, Is determined by the vibration angle [theta] bu and the lower vibration angle [theta] bd. 11, the upper side vibration springs 14a and 14b and the lower side vibration springs 15a and 15b are schematically shown as an inclined spring having an inclination angle corresponding to each of the above vibration angles, unlike the first embodiment Respectively. In each embodiment, the upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b having various structures are configured not to be limited to the inclined springs but to have vibration angles. In the present specification, the vibration angle of the upper vibration springs 14a and 14b refers to the angle of the upper vibration springs 14a and 14b with respect to the horizontal plane in the direction of attraction at the connection point to the upper mass body 12A And the vibration angles of the lower vibration springs 15a and 15b refer to the angles of the lower vibration springs 15a and 15b with respect to the horizontal plane in the excitation direction at the connection point with respect to the lower mass body 12B. When the upper side vibrating springs 14a and 14b and the lower side vibrating springs 15a and 15b are plate-like leaf springs facing each other in the carrying direction D, The angle coincides with the inclination angle with respect to a vertical plane orthogonal to the carrying direction D of the leaf spring. In the present specification, even when the spring structure of the upper vibration spring and the lower vibration spring is different from that of the leaf spring, the upper vibration spring and the lower vibration spring have the same value as the vibration angle obtained by them It is considered equivalent to the leaf spring having the inclination angle with respect to the vertical plane. Therefore, the term inclination angle is used in the same sense as the above vibration angle.

In the present embodiment, the upper vibration angles [theta] a and [theta] bu are inclined upward toward the front side in the carrying direction D and diagonally downward toward the rear side in the carrying direction D, ). The lower vibration angles? Ad and? Bd are all inclined downward toward the front in the carrying direction D and diagonally upward toward the rear in the carrying direction D . Here, in each embodiment, the piezoelectric actuator (16a, 16b) by a reference mass (11) and the excitation force (Fau, Fbu) and, based on the mass to be applied between the upper mass (12A) constituting the means with Statue The exciting forces Fad and Fbd applied between the lower mass 11B and the lower mass 12B are applied in synchronization with the carrying direction D. In this case, as shown in the drawing, it is not necessary that the exciting forces Fau and Fad and the exciting forces Fbu and Fbd respectively applied at the forward and backward positions in the carrying direction D become the external forcing force of the forced vibration system, Only one of the vibrating springs 14a and 14b and the lower vibrating springs 15a and 15b may be provided as an external forcing force, So that external forcings are applied to the main vibration system.

The upper mass body 12A and the lower mass body 12B are synchronized with each other in the transport direction D with respect to the reference mass body 11 so that the upper mass body 12A relative to the reference mass body 11 The rotational moment of the lower mass body 12B is mutually attenuated so that the pitching motion of the form in which the entire main vibration system is oscillated forward and backward in the carrying direction D can be suppressed. In each embodiment, since the vibration direction BVs of the upper mass body 12A and the vibration direction BVt of the lower mass body 12B are inclined in opposite directions to each other in the up-and-down direction, the vibration of the entire main vibration system is suppressed can do. As described above, in each of the embodiments, the pitching motion and the up-and-down vibration are suppressed, so that stabilization of the conveying posture of the conveyed object and leakage of vibration to the mounting surface can be reduced. Particularly, it is believed that the effect of the above-described pitching motion or up-and-down vibration increases the influence on the transported articles and the outside, and therefore, it is considered to be extremely effective in the case of handling high- do.

11, since the upper side vibration springs 14a, 14b and the lower side vibration springs 15a, 15b are shown in an inclined posture so as to be inclined angles corresponding to the vibration angles? Aau,? Bu,? Ad,? Bd, the center of (11A) the mass (M ₁₁₎ center, the center of mass and the lower mass (12B) of the mass (M _12A) of the upper mass _(12A) (M _12B) of the side is not in a straight line. However, in the first to third embodiments, the piezoelectric actuators 16a and 16b and the piezoelectric actuators 16a and 16b constituting the main bodies of the upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b, Since the amplifying springs 17a and 17b and the lower amplifying springs 18a and 18b are installed in a vertical posture, the three centers of masses M ₁₁ and M _12A and M _12B are substantially aligned in a straight line As shown in Fig. In particular, the three center positions may be arranged in the vertical direction. This is because, when the main vibrating system is driven at a high frequency by the piezoelectric actuators 16a and 16b constituting the in-phase excitation means of the present embodiment, an undesired vibration mode is generated or a vibration mode conforming to the carrying purpose is disturbed This is effective in realizing high frequency of the main vibration system while realizing a stable conveying form of the conveyed article.

[Fourth Embodiment]

12 is a schematic configuration diagram showing the configuration of the main vibration system of the fourth embodiment. In this fourth embodiment, the upper vibration springs 24a, 24b (24a, 24b) located above the fixed position 11p with respect to the reference mass body 11 are provided in order to provide the vibration angles (The upper piezoelectric actuators 26au and 26bu and the upper side amplification springs 17a and 17b of the piezoelectric actuators 26a and 26b) and the lower vibration springs 25a and 25b The lower piezoelectric driving parts 26ad and 26bd and the lower amplifying springs 18a and 18b of the driving bodies 26a and 26b are inclined in opposite directions to each other in the vertical direction, theta] bu, [theta] ad, [theta] bd). Thus, since the upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b are both in an inclined posture, the upper connecting portions 12AaS and 12AbS and the lower connecting portions 12BaS and 12BbS, as in the first embodiment, The vibration angle can be obtained.

In the first to fourth embodiments described above, a description is given of a structure in which the piezoelectric actuators 16a, 16b, 26a, 26b and the upper amplification springs 17a, 17b and the lower amplification springs 18a, 18b are integrally formed In the respective embodiments, the piezoelectric actuators 16a, 16b, 26a, and 26b, the upper amplification springs 17a and 17b and the lower amplification springs 18a and 18b are formed as separate components , Or they may be connected by a bolt or a left arm.

[Fifth Embodiment]

13 is a schematic configuration diagram showing the configuration of the main vibration system of the fifth embodiment. In the fifth embodiment, the upper amplifying springs 37a and 37b and the lower amplifying springs 38a and 38b are formed separately from the piezoelectric actuators 36a and 36b, and the piezoelectric actuators 36a and 36b and the upper amplifiers The springs 37a and 37b and the lower amplifying springs 38a and 38b are set to the vertical attitude along the vertical plane orthogonal to the carrying direction D while the upper and lower ends of the piezoelectric actuators 36a and 36b, A bolt or a left arm is used to connect the lower ends of the lower amplifying springs 37a and 37b and the upper ends of the lower amplifying springs 38a and 38b through spacers 39au, 39bu, 39ad, and 39bd having thicknesses in the carrying direction D have. Even in this case, the fixing position 11p of the upper vibration springs 34a and 34b constituted by the upper piezoelectric actuators 36au and 36bu and the upper amplifying springs 37a and 37b with respect to the reference mass 11, A lower vibration spring (not shown) constituted by the lower piezoelectric driving portions 36ad and 36bd and the lower vibration springs 35a and 35b is tilted so that a line connecting the fixed position 12Ap to the mass body 12A A line connecting the fixed position 11p to the reference mass body 11 and the fixed position 12Bp with respect to the lower mass body 12B of the lower mass body 35a and 35b is inclined. Therefore, the vibration angles? Au,? Bu,? Ad,? Bd of the upper vibration springs 34a, 34b and the lower vibration springs 35a, 35b can be set as in the previous embodiment. In this case, the vibration angles? Au,? Bu,? Ad,? Bd can be easily adjusted by changing the thickness of the spacers 39au, 39bu, 39ad, 39bd in the carrying direction D. The upper ends of the lower amplifying springs 38a and 38b of the upper amplifying springs 37a and 37b are connected to the upper connecting structure of the upper piezoelectric driver 36au and the lower connecting structure of the lower piezoelectric driver 36ad and 36bd , And the rear side of the transport direction (D). In this way, a certain degree of vibration can be obtained regardless of whether or not the spacer is interposed.

In each of the embodiments described above, the piezoelectric actuators (16a, 16b, 26a, 26bu, 36au, 36bu) and the lower piezoelectric actuators (16ad, 16bd, 26ad, 26bd, 36ad, 36bd) 16a, 16b, 26a, 26b, 36a, and 36b. However, the structure of the piezoelectric actuator may be such that the upper piezoelectric driver and the lower piezoelectric driver are formed by separate piezoelectric actuators, and the separate piezoelectric actuators are respectively coupled to the reference mass. The piezoelectric body on the elastic substrate is integrally formed with a portion formed in the upper piezoelectric driving portion and a portion formed in the lower piezoelectric driving portion, but may be a structure in which the piezoelectric body is formed separately from the upper piezoelectric driving portion and the lower piezoelectric driving portion.

[Operation and effect of each embodiment]

In the main vibration system of each embodiment described above, the phase of the vibration of the reference mass body 11 is opposite to the phase of the vibration of the upper mass body 12A and the lower mass 12B in the carrying direction D Is 180 degrees). Therefore, when the base 2 is taken as a reference, the reaction force in the carrying direction D due to the vibration of the reference mass 11 and the reaction force synthesized by the vibrations of the upper mass 12A and the lower mass 12B (Canceling or attenuating relationship). As a result, the vibration in the carrying direction (D) transmitted to the base (2) via the vibration springs (13a, 13b) is reduced.

On the other hand, when the reference mass body 11 is taken as a reference, both the reaction force received from the upper mass body 12A and the reaction force received from the lower mass body 12B are the same when viewed in the carrying direction D, Since the rotational moment of the vibrating upper mass body 12A and the rotational moment of the lower mass body 12B are opposite to each other, they cancel each other out (cancel or attenuate). Therefore, the reaction force of the reference mass body 11 in the rotational direction is reduced, the pitching operation is less likely to occur, and the vibration in the vertical direction transmitted to the base 2 via the vibration-proof springs 13a and 13b is also reduced. This also stabilizes the conveying speed of the conveyed object along the longitudinal direction of the conveying path 12t and the conveying state such as the conveying posture.

In the present invention, in the main vibration system shown in Fig. 11, the piezoelectric actuators 16a (16a, 16b), which are coaxial vibrating means for imparting an exciting force to the reference mass 11 in such a manner as to vibrate the upper mass body 12A and the lower mass body 12B in phase, And 16b, the upper mass body 12A and the lower mass body 12B substantially act as one mass body, in other words, they are constrained to operate as one mass body by the in-phase vibrating means. Therefore, one reference mass body 11, which is elastically connected to the base 2 via the vibration-proof springs 13a and 13b, and four vibration springs 14a, 14b, (Damping) vibration system having substantially two degrees of freedom or two mass points having the other mass body (the upper mass body 12A and the lower mass body 12B) elastically connected to each other via the first masses 15a and 15b. In this vibration system, the two resonance frequencies ω1 and ω2 are raised, and the two mass bodies vibrate in opposite phases in the frequency band between the two resonance frequencies ω1 and ω2.

In the reverse phase mode of the vibration system having the two mass bodies 11 and the mass bodies 12A and 12B, the reaction force in the carrying direction D between the two mass bodies is in a mutually offset relationship in terms of the carrying direction D In the embodiment, as described above, since the other mass body is divided into two by the upper mass body 12A and the lower mass body 12B with respect to the reference mass body 11 of one mass body and is elastically connected to the opposite side , And the rotational moments received by the reference mass 11 also cancel each other out. Here, when the center position of the mass M ₁₁ of the reference mass body 11 is taken as a reference, the rotational moment of the upper mass body 12A is a product of the mass and the center-to-center distance, that is, M _12A x R _12A , The rotation moment of the mass body 12B is likewise _M12B x _R12B . However, the rotational moments of the upper mass body 12A and the lower mass body 12B are opposite to each other. The configuration of such a vibration system forms a vibration mode fundamentally different from that of the conventional apparatus and realizes a conveyance mode that does not depend on the fixing force by the installation surface. In the conventional device, in order to secure the conveying form of the conveyed object on the conveying path, it is necessary to securely fix the mounting surface to the mounting surface or to make the weight of the support weight heavy. In the present invention, Even if the lower end is mounted without being fixed on a mounting surface such as a soft futon or mounted without fixing the lightened base 2, there is almost no change (deterioration) in the form of vibration, The form of conveyance on the top does not change much. As can be seen from the figure, it is preferable that M ₁₁ = M _12A + M _12B be substantially canceled in canceling the reaction force in the carrying direction D when considering only the main vibration system. In canceling the two rotational moments, , It is preferable that M _12A x R _12A = M _12B x R _12B is substantially set. In order to reduce the pitching operation, it is preferable that M _12A = M _12B and R _12A = R _12B .

11, which basically represents the concept of the present invention, but in the present embodiment, the above-mentioned in-phase image pickup means (piezoelectric drive body) is constituted by the upper excitation portion (upper piezoelectric drive portion) and the lower excitation portion (Lower piezoelectric driving portion), respectively. By directly and separately applying an exciting force, it is possible to simplify the structure of the device, and at the same time, for example, the frequency or amplitude of the excitation side Can be easily adjusted. Particularly, in the present embodiment, the upper piezoelectric actuators 16au and 16bu mounted on the upper vibration springs 14a and 14b and the lower piezoelectric actuators 16ad and 16bd mounted on the lower vibration springs 15a and 15b are provided Since it is excited by the piezoelectric drive system, it is not necessary to provide a vibrating mechanism separate from the vibration system, so that the device structure can be further simplified.

In the present embodiment, the upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b are directly connected and their connection points are connected and fixed to the reference mass 11. [ Therefore, since the reaction points of the reaction force received from the upper mass body 12A and the lower mass body 12B coincide with each other with respect to the reference mass body 11, unnecessary vibrations and unnecessary moments due to positional shifts of the action points of the upper and lower reaction forces do not occur . Since the upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b are directly connected to each other, it is easy to exchange vibration energy between the upper vibration spring and the lower vibration spring, I think it is possible. Moreover, in the present embodiment, the above-described structure has the effect of reducing the height of the oscillatory transfer device 10. [ The vibration model of FIG. 11 is not limited to the embodiment of the present invention and the present embodiment, but the vibration models of FIGS. _{12A and} _12B , R _{12A and} R _12B , the upper vibration springs 14a and 14b and the lower vibration springs 15a and 15b The length and the spring constant are the same, and the lengths and spring constants of the anti-vibration springs 13a and 13b are the same.

In this embodiment, by using the piezoelectric actuators 16a and 16b each having an intermediate portion in the longitudinal direction coupled to the reference mass 11, it is possible to reliably secure both the upper mass body 12A and the lower mass body 12B And can also give a stable excitation force. Particularly, the piezoelectric actuators 16a and 16b can reliably apply an in-phase excitation force to the two mass bodies 12A and 12B due to the upward / downward bending deformation. The upper piezoelectric actuators 16au and 16bu and the lower piezoelectric actuators 16ad and 16bd are arranged on the side of the reference mass body 11 in the upper side oscillating springs 14a and 14b and the lower side oscillating springs 15a and 15b The upper amplifying springs 17a and 17b disposed on the side of the upper side mass 12A or the lower side amplifying springs 18a and 18b disposed on the side of the lower side mass 12B, It is possible to cause a sufficient amplitude to be required when the conveying path 12t is provided in the conveying path 12B.

In the present embodiment, in addition to the above-described operational effects, the vibration directions? Ba and? Uub, which are the substantially inclined angles of the upper vibration springs 14a and 14b, are set to the vibration directions BVs, which are obliquely upwardly directed to the front side in the carrying direction D, And the vibration angles? Da and? Db which are substantially inclined angles of the lower vibration springs 15a and 15b are set to bring the vibration direction BVt diagonally downward in the forward direction of the carrying direction D The conveying force based on the oscillation angles θau and θbu can be obtained on the conveying path 12t and the upper mass body 12A and the lower mass body 12B can oscillate in the same phase with respect to the reference mass body 11, The vertical vibration of the main vibration system can be reduced. Therefore, even when the vibration system is operated at a high frequency or at a high speed, stabilization of the conveyance posture and uniformity of the conveyance speed can be ensured, and leakage of vibration to the installation surface can be suppressed.

Further, even in a main vibration system in which vertical vibration is less likely to occur as described above, vertical vibration can not be sufficiently suppressed in the case of achieving high frequency. However, in the present embodiment, horizontal vibration springs 13ah and 13bh, which are plate springs provided in a horizontal posture, are interposed between the upper support table 2A and the lower support table 2B of the base 2, It is possible to prevent the stabilization of the transporting posture and the leakage of the vibration energy. Particularly, by connecting the horizontal vibration springs 13ah and 13bh to the transfer direction D between the upper support table 2A and the lower support table 2B, the vibration system supported on the upper support table 2A can be made wide Direction. The direction of attachment of the horizontal vibration springs 13ah and 13bh in the conveying direction D is reversed at the front and rear positions in the carrying direction D so that mutual interference between the two springs It is possible to enhance the stability of the vibration system supported by the vibration system.

The inventors of the present invention actually started the apparatus of the first embodiment and conducted an operation test. Here, as an example, the mass M ₁₁ of the reference mass 11 is 710 g, the mass M _12A of the upper mass 12A is 190 g and the mass _{12A of the} lower mass 12B The mass M _{12B of the} upper supporting table 2A is 59.5 g and the length of the piezoelectric actuators 16a and 16b is 50 mm so that the mass M12B of the upper supporting table 2A is symmetrical up and down, (Maximum width) of the reference mass body 11, the connection block 12Ad and the lower mass body 12B is 72.1 mm, Was set at 35 mm. It was also confirmed that the piezoelectric actuators 16a and 16b were driven at an alternate voltage of 900 to 1200 Hz and the transported material was transported, and as a result, it was possible to transport fine electronic parts and the like at a high speed in a stable attitude even at a high frequency. In this embodiment, both the main bodies of the upper vibration springs 14a and 14b and the main bodies of the lower vibration springs 15a and 15b, which are flexibly vibrated substantially in the carrying direction D, 16bu and the upper amplifying springs 17a and 17b and the lower piezoelectric driving parts 16ad and 16bd and the lower amplifying springs 15a and 15b in the body of the lower vibrating springs 15a and 15b and the lower vibrating springs 15a and 15b, (18a, 18b) are integrally formed so as to reduce the height and stabilize the oscillation. As a result, it is possible to increase the frequency and the speed of the conveying speed to extremely high frequencies as described above, And a stable conveying form of the conveyed article can be realized.

Further, the apparatus of the fifth embodiment shown in Fig. 13 was started and an operation test was carried out. The structure other than the main vibration system is the same as that of the first embodiment. Here, as an example, the mass M ₁₁ of the reference mass 11 is 1110 g, the mass M _12A of the upper mass 12A is 371 g (12Au is 159 g) and the mass M _{12A of the} lower mass 12B The mass M _{12B of the} upper supporting table 2A is 284 g and the length of the main body portion of the piezoelectric actuators 36a and 36b in which the piezoelectric bodies are laminated is 22 mm, And the lengths excluding the fixed portions of the upper side amplification springs 37a and 37b and the lower side amplification springs 38a and 38b are all 13 mm. The vibration angles θau = θad = θbu = θbd = 5.4 degrees and the same values at the front and rear positions in the carrying direction. The height from the mounting surface to the upper surface of the connection block 12Ad is 116.5 mm, The maximum width (maximum width) of the connection block 12Ad and the lower mass 12B was 38 mm. It was confirmed that the piezoelectric actuators 36a and 36b were driven at an alternating voltage of 600 to 700 Hz to transport the transported material, and as a result, it was possible to transport fine electronic components and the like at a high speed in a stable attitude even at a high frequency. In this embodiment, the upper piezoelectric actuators 36au and 36bu, the upper amplifying springs 37a and 37b, and the lower piezoelectric actuators 36ad (36b and 36c) are provided in the upper vibration springs 34a and 34b and the lower vibration springs 35a and 35b, And 36bd and the lower amplification springs 38a and 38b are formed separately from each other and the upper side piezoelectric amplifiers 36au and 36bu and the upper side amplification springs 37a and 37b and the lower side piezoelectric drivers 36ad and 36bd are connected to the lower amplification springs 38a and 38b, Since each of the springs 38a and 38b is provided in a vertical posture in the individual view, it is possible to increase the frequency and the conveying speed as described above, and at the same time, It is considered possible to realize the shape.

In the present invention, the mass M ₁₁ of the reference mass 11 is substantially equal to the sum M _12A + M _12B of the masses of the upper mass 12A and the lower mass 12B (for example, Is 10% or less of the median value of both of them) or larger than the sum of their masses M _12A + M _12B is preferable for obtaining a stable vibration mode. The structure in which the main vibration system is elastically supported via the reference mass 11, that is, the structure in which the reference mass body 11 is connected to the anti-vibration springs 13a, 13b, 13ah, 13bh, Considering that the mass M is provided in the mass 12A (lower mass 12B), in order to increase the stability of the main vibration system and the amplitude of the conveying path, the mass M ₁₁ of the reference mass ₁₁ is basically larger And more preferably at least twice the sum of M _12A + M _12B . Further, the mass of the upper mass _(12A) (M 12A) and the mass of the lower mass _(12B) (M 12B) are substantially the same is preferred, an amplitude which is required in the transport path (12t), effect of the anti-vibration structure in the lower Considering the above numerical values, there is no big problem if the mass ratio of the two is about twice. In trial production of an embodiment of the first example, while the upper side of the conveying path (12t) arranged on the mass body (12A), a significant than M M _12A and _12B, and is about 2 times of the M _12B.

[Sixth Embodiment]

Next, a sixth embodiment of the oscillating-type transport apparatus according to the present invention will be described with reference to Figs. 14 to 20. Fig. The device 30 of the sixth embodiment shows an example in which the fifth embodiment described above is applied to the entire device. Here, the constituent parts corresponding to the fifth embodiment of the sixth embodiment are denoted by the same reference numerals as those of the fifth embodiment, and substantially the same constitution as the fifth embodiment will not be described. In the present embodiment, the vibration-proof springs 13a and 13b, which are basically the same as the third embodiment and have the same reference mass body 11, the upper mass body 12A and the lower mass body 12B, I have. The mounting position of the vibration springs 13a and 13b with respect to the reference mass body 11 before and after the carrying direction is the same as the vertical vibration spring for the reference mass body 11, (In the illustrated example, the front side in the conveying direction) with respect to the engaging position of the engaging portion of the engaging portion, whereby the operation and effect described in the third embodiment can be obtained particularly remarkably. Further, in the present embodiment, upper vibration springs 34a and 34b and lower vibration springs 35a and 35b are provided as in the fifth embodiment. However, unlike the previous embodiment, the base 2 does not have a two-piece structure of the upper support table 2A and the lower support table 2B with the horizontal vibration springs 13ah and 13bh interposed therebetween, have. Further, as shown in FIG. 14, there is provided a structure in which the recovery-side transfer unit 40 is added. The recovery-side transfer unit 40 is provided with a transfer path 42t formed on the transfer block 12Au shown in FIG. 15 along the recovery path 42t formed in the recovery-side transfer block (not shown) provided on the recovery- So that the transported object can be transported in the direction B in the reverse direction to the transport direction F of the transport path 12t.

Fig. 14 shows a device structure including the recovery-side transfer unit 40 but excluding the transfer block 12Au. Fig. 15 shows the structure of the transfer-side transfer unit 40 including the transfer block 12Au, And shows the removed device structure. The recovery side transfer unit 40 includes a base block 42 fixedly attached to the side surface of the base 2 and a plate type dustproof spring 42 attached to the base block 42 at the lower ends thereof before and after the transfer direction D, (43a, 43b). The upper ends of the vibration-proof springs 43a and 43b are respectively attached to the outer side portions at the intermediate positions in the vertical direction of the connecting members 44a and 44b extending in the vertical direction. The lower ends of the plate-like amplifying springs 47a and 47b are connected to the outer side surfaces at the upper ends of the connecting members 44a and 44b and the upper ends of the amplifying springs 47a and 47b are provided before and after the carrying direction D And is connected to the connection block 42Ad.

The inertial mass 41 is disposed on the inner side of the front and rear in the carrying direction D of the connecting members 44a and 44b. Plate-like piezoelectric actuators 46a and 46b are connected between the front end and the rear end of the inertial mass 41 and the inner surfaces of the lower ends of the connecting members 44a and 44b. Each of the piezoelectric actuators 46a and 46b has a piezoelectric body laminated on an elastic substrate and has a piezoelectric body in which the piezoelectric actuators 46a and 46b are subjected to flexural deformation so as to be in phase with respect to each other in the conveying direction D in response to an alternating voltage supplied from a driving circuit Side connecting block 42Ad in the carrying direction D via the connecting members 44a and 44b and the amplifying springs 47a and 47b. Here, in the process of sorting or sorting the articles to be transported in the transport path 12t formed on the collecting-side transport block 12Au, the articles to be transported, which are not aligned in the normal posture, Is removed from the conveying path 12t by a known exclusion means such as a shape of the conveying path 12t or an air flow attaching means or a mechanical operating mechanism and is recovered to the recovery passage 42t disposed laterally. On the basis of the vibration generated by the piezoelectric actuators 46a and 46b, the recovered conveyed object is conveyed on the recovery passage 42t formed in the recovery conveying block (not shown) Is returned in the direction B of the reverse counting, is returned to the upstream side of the conveying route 12t, or is discarded. The side plates 39 and 49 shown in Figs. 16 and 17 are covers that cover the main vibration system and the recovery-side transfer unit from both sides in the width direction.

As shown in Fig. 15, this embodiment has a main vibration system as shown in Fig. 13, and has a plate surface facing the conveying direction D supporting the reference mass body 11 before and after the conveying direction D Shaped vibration springs 13a and 13b. Here, the anti-vibration springs 13a and 13b are attached to the reference mass body 11 by the bolts 19a and 19b and the spacers 19c and 19d, respectively, at the front portion and the rear portion of the reference mass body 11 have. At this time, the vibration-proof spring 13a is connected to the front portion of the reference mass body 11 via the spacer 19c at the forward position in the carrying direction D with respect to the piezoelectric actuator 16a, and the vibration- Is also connected to the rear portion of the reference mass body 11 via the spacer 19d at the forward position in the carrying direction D with respect to the piezoelectric actuator 16b. The spacers 19c and 19d have the same thickness as seen in the carrying direction D so that the distance between the upper ends of the piezoelectric actuators 16a and the vibration springs 13a and the distance between the upper ends of the piezoelectric actuators 16b, And the upper end of the upper end portion 13b are the same.

In the present embodiment, the center positions 11g, 12Ag, and 12Bg of the reference mass body 11, the upper mass body 12A, and the lower mass body 12B are the same in the transport direction D in the stationary state Position. That is, it is preferable that the center positions 11g, 12Ag and 12Bg are all arranged on the same vertical line. Actually, however, the upper mass body 12A provided with the transport path 12t may have various shapes, structures (structures) depending on the conditions of the installation site of the vibratory transport device 30 and the situation before and after the transport path of the transported product. . In particular, the overhang (protruding length) of the upper mass body 12A before and after the transport direction D is set in accordance with the device configuration before and after. 15, the transport block 12Au of the upper mass body 12A protrudes forward more than the rear of the transport direction D, and the center position 12Ag of the transport block 12Au of the upper mass body 12A is larger than that of the reference mass body 11 Is disposed in front of the center position 11g in the carrying direction D. The reference mass body 11 is located on the upper mass body 12A in correspondence with the positional shift of the center position 12Ag of the upper mass body 12A from the center position 11g of the reference mass body 11 in the carrying direction D, The center position 12Bg of the lower mass body 12B is positioned at the center of the reference mass body 11 in the same manner as the center position 12Ag in order to reduce the vertical vibration due to the reaction force received from the lower mass body 12B, And is disposed in front of the position 11g in the carrying direction D. [ As a result, the entire central position of the main vibration system is disposed slightly forward of the center position 11g of the reference mass body 11 in the carrying direction D. [ At this time, it is preferable that the attachment positions of the vibration springs 13a and 13b are equally distant from the center position (not shown) of the entire main vibration system as viewed in the carrying direction D. In the illustrated example, the midpoint between the attachment position of the vibration-proof spring 13a and the attachment position of the vibration-proof spring 13b and the center position of the main vibration system are arranged at the same positions as seen in the carrying direction D.

20 is an enlarged left side view of the upper piezoelectric driver 16Au and the upper amplification spring 37a of the piezoelectric driver 16a constituting the upper oscillating spring 34a of the present embodiment. The piezoelectric actuator 36a includes an elastic substrate 36s and a piezoelectric member 36p laminated on the elastic substrate 36s and is provided with a side connection structure provided on the elastic substrate 36s And is fixed to the front portion of the reference mass body 11 on both sides in the width direction. The piezoelectric member 36p is disposed between the side connection structures as viewed in the width direction and protrudes above and below the height of the side connection structure and is connected to the upper piezoelectric driver 36au and the lower piezoelectric driver 36ad As shown in Fig. The elastic substrate 36s is provided with an upper connection structure 36su and a lower connection structure 36sd (not shown) which are further directed vertically from the region where the piezoelectric body 36p is formed. The lower piezoelectric driver 36ad is configured to be symmetrical in the vertical direction with respect to the horizontal line 36o in the width direction connecting the side connection structures on both sides in the width direction with respect to the upper piezoelectric driver 36au, The piezoelectric actuators 36a are the same as those of the piezoelectric actuators 36a.

The upper piezoelectric driver 36au of this embodiment is connected and fixed to the upper amplification spring 37a via the spacer 39s by bolts 39t or the like. At this time, the lower end of the upper amplifying spring 37a is fixed to the upper connecting structure 36su of the upper piezoelectric driver 36au by overlapping from the rear of the carrying direction D via the spacer 39s. The center line 36x in the thickness direction of the piezoelectric actuator 36a and the center line 37x in the thickness direction of the upper amplification spring 37a are arranged so as to be displaced from each other in the transport direction D. [ 13, the vibration angle? Of the upper vibration spring 34a with respect to the upper mass body 12A (the connection block 12Ad) is set by the deviation between the center line 36x and the center line 36x. In the present embodiment, the vibration angle? Can be adjusted by changing the presence or the thickness of the spacer 39s.

As shown in the figure on the right side of Figure 20, in the case of using the elastic substrate (36s') has a thickness t ₀ uniformly throughout, the center line (36x) and an upper amplification springs (37a) of the piezoelectric actuator (36) the distance between the center line (37x) is of a _{0. 5 (t 0 + t 1} ) + ts. Here, t ₁ is the thickness of the upper amplification spring 37a, and ts is the thickness of the spacer 39s. In this case, the actual vibration angle? 'Becomes an inclination angle seen in the carrying direction D with respect to the vertical line of the line segment connecting the connecting point of the upper amplifying spring 37a and the horizontal line 36o with the upper mass body 12A. However, as in the present embodiment, when the driving frequency of the piezoelectric driving body 36a becomes high frequency, the thickness t ₀ of the elastic substrate 36s Of the vibration of the upper mass body 12A is increased to cause the transported product on the transport path 12t to bounce up and down so that the transporting posture of the transported product There is a possibility that the unevenness of the conveying speed and the overall lowering of the conveying speed. In general, when the vibration frequency is increased, the stability of the vibration system and the stability of the conveyance posture of the conveyed article are improved by lowering the vibration angle [theta] than in the case of the low vibration frequency, thereby improving the conveying efficiency. . Thus, in the present embodiment, the thickness range of the upper connecting structure 36su of the elastic substrate 36s is shifted forward of the carrying direction D, so that the vibration angle? Can be set small. In the illustrated example, the front side of the transport direction (D) than the surface portion of the piezoelectric body (36p) are laminated (t ₀ -t ₂₎ as the conveying direction (D) in the rear side of the upper connecting structure (36su) and arranged to be configured in a stepped shape, and the thickness t ₀ less than the thickness t ₂ of the upper connecting structure (36su). Thus, the center line (36x) and (37x) the deviation amount in the transport direction (D) (t ₂ t ₀ -0.5 +0.5 t ₁ + ts) is the interval 0.5 (t ₀ + t ₁₎ + ts than (t of _0- t ₂ ). In this case also, the sectional shape of the boundary portion between the portion where the piezoelectric body 36p of the piezoelectric driving body 36a is laminated and the upper connection structure 36su (in the illustrated example, the rear side (the left side in the drawing) Surface) preferably has a contour of a concave curve shape so that the thickness gradually changes (decreases) toward the upper connecting structure 36su to be converged to a flat surface.

The upper amplifying springs 37a and 37b and the lower amplifying springs 38a and 38b are connected to the upper connecting structure of the upper piezoelectric drivers 36au and 36bu and the upper connecting structure of the lower piezoelectric driver 36ad, 36bd on the rear side in the carrying direction D with respect to the lower connecting structure. In this way, a certain degree of vibration angle can be obtained irrespective of whether or not the spacer is interposed. The upper connecting structure of the upper piezoelectric actuators 36au and 36bu and the lower connecting structure of the lower piezoelectric actuators 36ad and 36bd are made thinner than the laminated portions of the piezoelectric bodies 36p, 37b and the lower amplification springs 38a, 38b together with the upper amplification springs 37a, 37b and the lower amplification springs 38a, 38b on the upper portion of the structure (the portion where the piezoelectric body 36p is laminated by the bolt, The length of the upper amplification springs 37a and 37b and the length of the lower amplification springs 38a and 38b can be made shorter and consequently the length of the entire amplification springs 37a and 37b can be reduced. It is possible to reduce the height.

The apparatus 30 of the present embodiment was started and actually driven to measure the vibration state of the transport block 12Au and to observe the transported state of the transported article. The starting apparatus is such that the mass of the upper mass body 12A shown in Fig. 15 is 620 g, the height of the center position 12Ag is 110 mm, the mass of the reference mass 11 is 1230 g, the height of the center position 11g is 67 the mass of the lower mass body 12B is 720 g and the height of the center position 12Bg is 27.5 mm and the center position 11g of the reference mass body 11 is the center position of the upper mass body 12A 12Ag were displaced by 9.8 mm on the side of the transporting direction F and the center position 12Bg of the lower mass 12B was displaced 1.5 mm toward the transporting direction F side. Both the upper side oscillating springs 34a and 34b and the lower side oscillating springs 35a and 35b were adjusted to obtain a uniform transport speed along the transport path 12t based on 3.24 degrees. The start device is operated at 343.4 Hz which is slightly higher than the resonance frequency and the amplitude of the conveyance direction D of the transport block 12Au having the transport path 12t (actually the outlet end 12to of the transport path 12t) Was measured by a laser displacement meter to be 0.105 mm, and a rectangular parallelepiped-shaped electronic component having a length of 0.6 mm, a height of 0.3 mm, and a width of 0.3 mm was transported as a transported product. At this time, the amplitudes in the vertical direction of the respective portions of the pixels P ₁ to P _{4 in} the transport block 12Au and the amplitudes in the width direction of the portions of the pixels P ₅ to P ₇ were measured by a laser displacement meter. As a result, in the starting device, the average value of the amplitude in the vertical direction was 0.0085 mm, the average value in the width direction was 0.0083 mm, and the uniformity of conveyance The speed of the conveyance can be obtained, and the bounce and the posture change of the conveyed article are also small. When the driving voltage is increased within the range in which the transported object is smoothly conveyed, the conveying speed increases up to 10 m / min at the maximum. The amplitude in the conveying direction at this time is 0.26 mm, the average value in the vertical direction is 0.02 mm, The average value of the amplitudes in the width direction was 0.012 mm, and no problem occurred. In particular, the position of the transported material can also increase the conveying speed is stable, less irregularity of the amplitude of each of the portions P ₁ ~ P _7, was sufficient uniformity of the transport speed of the conveying path (12t).

It is needless to say that the oscillating transport apparatus of the present invention is not limited to the above-described embodiment, and various modifications can be made within the scope of the present invention. For example, in each of the second to sixth embodiments, the characteristic configuration (presence or absence of spacers at the connection portion, existence of a connection portion, presence or absence of inclination of the entire vibration spring, presence or absence of a step connection structure of the vibration spring, The positional relationship between the piezoelectric actuator and the anti-vibration spring, and the like). However, by substituting the feature points of the first embodiment with each other, It is possible to realize another embodiment.

10: oscillating conveying device
11: reference mass
11a: Front attachment position
11b: rear attachment position
11aa:
11ab: middle part
11bb: rear portion
12A:
12Au: return block
12Ad: Connection block
12B: Lower mass
12c:
12AaS, 12AbS: Upper connection
12BaS, 12BbS: Lower connection
12AaC, 12AbC, 12BaC, 12BbC: connection plate
13a and 13b:
14a, 14b: upper vibration spring
15a, 15b: a lower vibration spring
16a and 16b: piezoelectric actuators
16au, 16bu: upper piezoelectric driver
16ad, 16bd: lower piezoelectric driver
16s: elastic substrate
16p:
16t: side connection structure
17a and 17b:
18a, 18b: a lower side amplifying spring
19a, 19b: Bolt
2: Expectation (installation side)
2A: Upper support
2B: Lower support
13ah, 13bh: horizontal vibration springs
D: conveying direction
F: Direction of return
BVs, BVt: Vibration direction
θ, θ ', θ ": vibration angle (inclination angle)
40: Reciprocating unit

Claims

A pair of anti-vibration springs provided respectively at front and rear positions in the carrying direction, the pair of anti-vibration springs comprising a leaf spring having a plate surface facing the carrying direction,
A reference mass supported by the pair of vibration springs at front and rear positions in the carrying direction,
An upper mass body disposed above the reference mass body,
A lower mass disposed below the reference mass,
A pair of upper vibration springs including a leaf spring structure directed toward the carrying direction for elastically connecting the reference mass and the upper mass body at front and rear positions in the carrying direction,
A pair of lower vibration springs including a leaf spring structure directed toward the carrying direction for elastically connecting the reference mass and the lower mass body at front and rear positions in the carrying direction,
And an in-phase exciting means for imparting an excitation force to both the reference mass and the upper mass and between the reference mass and the lower mass to cause the same phase vibration in the carrying direction,
Wherein at least one of the upper mass body and the lower mass body is provided with a conveying path for conveying the conveyed object,
Wherein the upper vibration spring and the lower vibration spring have an oscillating angle that is inclined to the opposite side in the up and down direction and that the upper mass body and the lower mass body are inclined And the oscillating carrier is oscillated in the direction of the axis.

The method according to claim 1,
Wherein the upper vibration spring has a plurality of spring elements and the spring elements on the upper mass side are arranged on one side in the carrying direction with respect to the spring elements on the reference mass side,
Wherein the lower vibration spring has a plurality of spring elements and the spring element on the upper mass side is arranged on the one side in the carrying direction with respect to the spring element on the reference mass side. Conveying device.

3. The method of claim 2,
Wherein the upper vibrating spring has an upper vibrating spring main body and an upper connecting portion connecting the upper end of the upper vibrating spring main body with the upper mass body in the carrying direction, Wherein the upper spring element is elastically deformed with respect to the upper vibration spring main body such that the upper mass body is rotatable about an axis orthogonal to the carrying direction and the vertical direction,
Wherein the lower oscillating spring has a lower oscillating spring main body and a lower connecting portion connecting the lower end of the lower oscillating spring main body to the lower mass in the carrying direction, And the lower spring element is elastically deformed with respect to the lower vibration spring main body such that the lower mass is rotatable about an axis orthogonal to the carrying direction and the vertical direction .

The method of claim 3,
Wherein the upper vibration spring main body is disposed in a posture extending in the vertical direction between the reference mass and the upper mass body,
Wherein the lower vibration spring main body is disposed in a state of extending in the vertical direction between the reference mass and the lower mass.

3. The method of claim 2,
Wherein the upper vibrating spring has a lower side plate spring portion and an upper side plate spring portion having a lower end connected to the upper side of the lower side plate spring portion so as to be shifted to the one side in the carrying direction,
Wherein the lower vibration spring has a lower leaf spring portion having an upper leaf spring portion and an upper end connected to the lower end of the upper leaf spring portion so as to be shifted to the one side in the carrying direction.

6. The method of claim 5,
Wherein the upper plate spring portion and the lower plate spring portion of the upper vibration spring are arranged in a posture extending in the vertical direction,
Wherein the lower plate spring portion and the upper plate spring portion of the lower vibration spring are arranged in a posture extending in the vertical direction, respectively.

7. The method according to any one of claims 1 to 6,
Wherein said common-
An upper piezoelectric driving part constituting an upper vibrating part for directly applying the exciting force between the reference mass and the upper mass and being mounted in a part of the longitudinal direction of the upper vibrating spring, and an upper piezoelectric driving part between the reference mass and the lower mass And a lower piezoelectric driving part mounted on a part of the lower vibration spring in a longitudinal direction thereof,
Wherein a portion extending in the upper direction of the reference mass forms the upper piezoelectric drive portion and a portion extending below the reference mass is connected to the lower piezoelectric substrate, And a plate-shaped piezoelectric driving body in which a driving portion is formed and the plate surface as a whole is bent and deformed integrally in an up-and-down manner.

8. The method of claim 7,
Wherein the upper vibrating spring has the plate-shaped upper amplifying spring having the upper piezoelectric driving part extending upwardly of the reference mass and the plate surface connected to the upper end of the upper piezoelectric driving part facing the conveying direction,
Wherein the lower vibration spring has a lower piezoelectric amplifying spring extending in the upper direction of the reference mass and a lower amplifying spring in the form of a plate connected to the lower end of the lower piezoelectric driving part and having a plate surface facing the carrying direction Vibratory transport device.

9. The method of claim 8,
Wherein the upper piezoelectric driver and the lower piezoelectric driver have an elastic substrate and a piezoelectric member laminated on the elastic substrate,
Wherein the upper amplifying spring and the lower amplifying spring are integrally formed with the elastic substrate of the upper piezoelectric actuator and the lower piezoelectric actuator.

10. The method of claim 9,
Wherein the elastic substrate is thick in the upper piezoelectric driving part and the lower piezoelectric driving part and is thin in the upper amplifying spring and the lower amplifying spring.

9. The method of claim 8,
Wherein the upper piezoelectric driver and the lower piezoelectric driver have an elastic substrate and a piezoelectric member laminated on the elastic substrate, wherein the elastic substrate has an upper connection structure in which the piezoelectric member is formed upward and downward at a portion where the piezoelectric member is stacked, And a connection structure,
Wherein a lower end of the upper amplifying spring is fixedly connected to the upper connecting structure in a state overlapping with the one side in the carrying direction and the upper end of the lower amplifying spring is fixed to the one side in the carrying direction And is connected and fixed in a state in which it is superimposed on the vibration transmitting member.

7. The method according to any one of claims 1 to 6,
Wherein the pair of vibration springs are arranged such that the upper vibrating spring and the lower vibrating spring or the position at which the piezoelectric actuator is coupled to the reference mass are all the same in the conveying direction And the reference masses are respectively supported on the side of the vibrating-type conveying unit.

7. The method according to any one of claims 1 to 6,
Wherein the reference mass body is provided with a pair of vibration-proof structures in which horizontally-anti-vibration springs constituted by the vibration-proof springs and leaf springs arranged in a horizontal posture along the carrying direction are connected in series at the front and rear positions in the carrying direction Is supported by the oscillation-type transfer device.

14. The method of claim 13,
And a base for supporting the reference mass via the vibration-proof spring is provided. The base has an upper support base to which the vibration-proof spring is connected and a lower support base for supporting the upper support base via the horizontal vibration- .