200831714 (1) 九、發明說明 【發明所屬之技術領域】 本發明係關於電鍍處理系統所使用之導引裝置，詳細 爲：在塡充有電鍍處理液之電鍍處理用桶槽內，一面使印 刷基板等之被電鍍物移動，一面予以電鍍之電鍍處理系統 所使用之導引裝置。 【先前技術】 作爲電鍍印刷基板等之薄片狀長片形製品（以下稱： 工件）之電鍍處理系統，眾所周知，有於儲存於電鍍處理 用桶槽之處理液中，藉由從桶槽上方吊掛工件，一面對此 工件供電一面移動該工件，對工件表面施以電鍍之電鍍處 理系統。 詳細係如第12、1 3圖所示般，電鍍處理系統S係於 配置在桶槽902上方之長棒903，以吊掛工具905來吊掛 成爲電鍍對象之工件904，於將工件904浸漬於處理液A 之狀態下，沿著棒903移動吊掛工具90 5。然後，藉由對 其間從棒903供電至工件904，來對工件904進行電鍍處 理。 棒903係沿著移動工件904之桶槽902的長邊方向而 水平延伸，且作用爲陰極。因此，以後將棒9 0 3稱爲陰極 棒 903 〇 1 另外，於處理液A之中，延伸於與陰極棒9 0 3同方向 之一對陽極906，係以於桶槽902的寬度方向隔以特定間 200831714 (2) 隔來面對桶槽902的壁面之方式而設置，工件904係於彼 等一對陽極906、906之間平行地配置（參照第12圖）。 然後，在此狀態下，複數工件904係以直列狀態而移 動於電鍍液中，工件904依序被施以電鍍（參照第1 3圖 )。另外，配置於一對陽極906、906之間，且於工件904 ' 之兩側，與桶槽902的長邊方向平行地設置有：在工件 9 04移動於桶槽902內之間，用以使陰極與陽極之間的距 φ 離，具體而言，前述陽極906和與陰極棒903導通之工件 904之間的距離之極間距離保持一定之一對導引裝置901 (參照第12圖）。 藉由導引裝置90 1使極間距離保持一定，電鍍厚度變 得均勻。換言之，導引裝置901雖係用以於桶槽902內使 工件9〇4直直進行者，但是實際上，工件904係一面與導 引裝置901接觸、分開，一面被導引裝置901所導引而行 進於處理液A中。 Φ 然後，於行進中，工件904如與導引裝置901接觸時 ，附著於工件904之電鍍（銅）剝落而附著於導引裝置 9 01，其結果，產生分子的一部份被其他.原子（原子團） 所還原之還原反應，電鍍於導引裝置901析出，有形成短 路電路之虞。如不設置導引裝置90 1，雖不會形成短路電 路，但是爲了使電鍍厚度均勻，使極間距離保持一定之導 引裝置901之設置係不可欠缺。 另一方面，伴隨電鍍處理之進行，爲了使所消耗的處 理液A中的金屬之例如銅的含有量保持一定，需要補充含 -5- (3) 200831714 有多數銅之液體之新的處理液A。因此，考慮從工件904 的兩側噴出處理液A，控制工件的姿勢，倂同處理液a的 補充來使及間距離保持爲一定之方法。 因此本發明者，檢討如第1 4圖所示般，於設置於工 件9 04之兩側，且延伸於工件904的行進方向之一對電鍍 處理液補充用主管907、907，以等間隔排列延伸於對其軸 方向爲下垂之方向的複數枝管908，從多數地形成於枝管 φ 908的長邊方向之噴出孔981，以泵浦壓力朝工件904噴 射電鍍處理液A，藉此以非接觸式之狀態來導引工件904 是否可能。 要以非接觸式之狀態來導引工件904，得知需要：從 位於枝管908的末端之噴出孔981至位於基端之噴出孔 9 8 1爲止，要同樣地吐出電鍍處理液A，及針對排列於主 管907之枝管908之全部，要以同樣壓力均等地吐出電鍍 處理液A。 # 可是，泵浦壓力會依據主管907中之枝管90 8的排列 位置而不同，或儲存於桶槽902內之處理液A的液壓會依 據枝管908中之噴出孔981之形成位置而不同，很難均等 地吐出電鍍處理液A，在非接觸式之狀態導引工件904, 係非常地困難。 在此情形時，將泵浦壓力設定高些，使從噴出孔9 8 1 所吐出的處理液A之量成爲最大時，可以從任何噴出孔 981 —樣地噴出電鍍處理液A。但是，工件904也有其厚 度例如極薄至3 0 // m至5 0 /z m之程度，且撓性之印刷基 -6- 200831714200831714 (1) IX. INSTRUCTIONS OF THE INVENTION [Technical Fields of the Invention] The present invention relates to a guiding device used in a plating treatment system, and in detail: printing is performed in a tank for plating treatment in which a plating treatment liquid is filled A guiding device used in a plating treatment system in which a substrate or the like is moved while being plated. [Prior Art] As a plating treatment system for a sheet-like long sheet-shaped product (hereinafter referred to as a workpiece) such as a plated printed substrate, it is known that it is stored in a treatment liquid for a plating tank, by hanging from above the tank The workpiece is hung, and the workpiece is moved while the workpiece is powered, and an electroplating treatment system is applied to the surface of the workpiece. In detail, as shown in FIGS. 12 and 13 , the plating treatment system S is attached to the long rod 903 disposed above the tub 902, and the workpiece 904 to be plated is suspended by the hanging tool 905 to impregnate the workpiece 904. In the state of the treatment liquid A, the hanging tool 90 5 is moved along the rod 903. The workpiece 904 is then electroplated by supplying power from the rod 903 to the workpiece 904 therebetween. The rod 903 extends horizontally along the longitudinal direction of the barrel 902 of the moving workpiece 904 and functions as a cathode. Therefore, the rod 903 is hereinafter referred to as a cathode rod 903 〇1. Further, among the treatment liquid A, one of the anodes 906 extending in the same direction as the cathode rod 902 is spaced apart in the width direction of the barrel 902. The specific portion 200831714 (2) is disposed so as to face the wall surface of the tub 902, and the workpiece 904 is disposed in parallel between the pair of anodes 906, 906 (see Fig. 12). Then, in this state, the plurality of workpieces 904 are moved in the plating solution in an in-line state, and the workpieces 904 are sequentially plated (see Fig. 13). In addition, disposed between the pair of anodes 906, 906, and on both sides of the workpiece 904', in parallel with the longitudinal direction of the barrel 902, between the workpiece 904 and the barrel 902, The distance between the cathode and the anode is φ, specifically, the distance between the anode 906 and the workpiece 904 that is electrically connected to the cathode rod 903 is kept constant by one of the pair of guiding devices 901 (refer to Fig. 12). . By the guiding means 90 1, the distance between the electrodes is kept constant, and the plating thickness becomes uniform. In other words, although the guiding device 901 is used to straighten the workpiece 9〇4 in the barrel 902, in practice, the workpiece 904 is in contact with and separated from the guiding device 901, and is guided by the guiding device 901. It leads to the treatment liquid A. Φ Then, while the workpiece 904 is in contact with the guiding device 901, the plating (copper) attached to the workpiece 904 is peeled off and attached to the guiding device 901, and as a result, a part of the molecule is generated by the other atom. (Atom group) The reduced reduction reaction is electroplated on the guiding device 901, and a short circuit is formed. If the guiding device 901 is not provided, a short-circuit circuit is not formed, but in order to make the plating thickness uniform, the arrangement of the guiding device 901 in which the distance between the electrodes is kept constant is indispensable. On the other hand, with the progress of the plating treatment, in order to keep the content of the metal such as copper in the treated liquid A to be constant, it is necessary to replenish a new treatment liquid containing a liquid having a large amount of copper of -5- (3) 200831714. A. Therefore, it is considered that the processing liquid A is ejected from both sides of the workpiece 904, and the posture of the workpiece is controlled, and the replenishment of the treatment liquid a is performed to keep the distance between the treatments constant. Therefore, the inventors of the present invention reviewed the plating treatment liquid replenishing main pipes 907 and 907 at equal intervals on one side of the workpiece 904 and extending in the traveling direction of the workpiece 904 as shown in FIG. A plurality of branch pipes 908 extending in a direction in which the axial direction is sag, are formed in a plurality of discharge holes 981 in the longitudinal direction of the branch pipe φ 908, and spray the plating treatment liquid A toward the workpiece 904 at a pumping pressure. The non-contact state is used to guide the workpiece 904. To guide the workpiece 904 in a non-contact state, it is necessary to discharge the plating solution A in the same manner from the ejection hole 981 located at the end of the branch tube 908 to the ejection hole 981 at the base end, and For all of the branch pipes 908 arranged in the main pipe 907, the plating treatment liquid A is uniformly discharged at the same pressure. # However, the pump pressure may be different according to the arrangement position of the branch pipe 90 8 in the main pipe 907, or the hydraulic pressure of the treatment liquid A stored in the tank 902 may be different depending on the formation position of the discharge hole 981 in the branch pipe 908. It is difficult to discharge the plating solution A uniformly and it is extremely difficult to guide the workpiece 904 in a non-contact state. In this case, when the pumping pressure is set higher, and the amount of the treatment liquid A discharged from the discharge port 981 is maximized, the plating treatment liquid A can be ejected from any of the discharge holes 981. However, the workpiece 904 also has a thickness such as extremely thin to the extent of 3 0 // m to 5 0 /z m, and the flexible printing base -6-200831714
板。 因此，處理液A的吐出壓力如太強，工件9 〇 4經不起 作用於工件904之吐出力，工件904在桶槽902內移動中 會不規則移動。另外，於枝管908與枝管908之間，且處 理液A沒有吐出之部位，工件904不受到處理液A的吐 出壓力之影響，工件904通過該部位時，工件904偏向該 部位存在之側而行進。此種情形如存在時，工件9 04會有 φ 彎曲、或損傷之虞。 因此，可以考慮：以框構件對工件9 0 4的周圍加邊框 ，即使工件904與導引裝置90 1接觸，也不會對工件904 造成不好影響之方式，來使用邊框工具（未圖示出）。但 是在薄厚度之工件9 0 4的情形時，安裝邊框工具本身非常 麻煩。此外’銅附者於該工具’消耗多餘之銅。進而也有 電氣或熱消耗增加之問題。 [專利文獻1]專利第2943 070號公報 ❿ [專利文獻2]專利第3 065970號公報 [專利文獻3]日本專利特開2005-213641號公報 【發明內容】 [發明所欲解決之課題] 本發明係有鑑於前述情形所發明者，其欲解決之課題 爲提供：具有即使不需要邊框工具，也可以提升施於工件 之電鍍處理的均勻性之非接觸式導引之電鍍處理系統。 200831714 (5) [解決課題之手段] (1 )爲了達成前述課題，本發明之使用於電鍍處理系 之導引裝置，其特徵爲：係具有：儲存電鍍處理用之處 液的桶槽、及在此桶槽內用以垂吊被施以電鍍處理之薄 狀長片形製品之吊掛工具、及沿著前述桶槽而設置，使 ^ 吊掛工具可以滑動地裝著，並具有作爲陰極功能之陰極 、及設置於前述處理液中，使電子從前述陰極棒移動， φ 前述薄片狀長片形製品夾於其間，且對前述薄片狀長片 製品爲平行地配置之一對陽極、及配置於該一對陽極的 側，於將該薄片狀長片形製品夾於其間之狀態下，將該 片狀長片形製品導引於其進行方向之呈平板狀的一對導 裝置；藉由一面對前述薄片狀長片形製品供電，一面使 述吊掛工具在前述陰極棒上滑動，讓垂吊於前述吊掛工 之前述薄片狀長片形製品在前述處理液中移動，來對前 薄片狀長片形製品施以電鍍之電鍍處理系統，前述一對 • 引裝置之各個，係具有：對於前述薄片狀長片形製品之 行方向爲斜向並聯有複數根，並且從前述桶槽之外部供 ^ 新的處理液之斜管，此斜管係具有：於其長邊方向延伸 _ 縫隙狀噴出孔，藉由經由該噴出孔，將前述新的處理液 向前述薄片狀長片形製品吐出。 本發明之導引裝置，係設置於電鍍處理系統之桶槽 導引裝置係被浸漬於電鍍處理用處理液。 然後，形成於斜管之噴出孔，係延伸於斜管的長邊 向之縫隙狀噴出孔，從噴出孔所被排出之處理液，係爲 統 理 片 該 棒 將 形 內 薄 引 __u一 刖 具 述 導 進 給 之 朝 方 呈 -8- 200831714 (6) 具有與形成有縫隙狀噴出孔之長度尺寸相同尺寸 狀態。 因此，從斜管之噴出孔所被排出之處理液’ 長邊方向並無中斷。換言之，於斜管中延伸於其 ' ，形成有前述處理液之噴出的縫隙狀噴出孔之區 ' 無噴出處理液與不噴出之處，係全部噴出處理液 不會有如以往技術中說明般，工件通過不吐出處 φ 位時，工件與導引裝置接觸，工件偏向有該部位 進。 另外，一對導引裝置之各個，係具有對於薄 形製品之進行方向爲斜向並聯有複數根之斜管， 相鄰之斜管彼此，產生於上下方向交叉之範圍。 會有於一對導引裝置之間與彼等平行配置之工件 進方向中，不被從兩側之斜管吐出的處理液所噴 因此，工件在行進中，藉由從斜管所噴出之 • 經常被推向兩側，而成爲位於一對導引裝置的中 ，從斜管所噴出之處理液的吐出壓力，當然係設 . 設置斜管之導引裝置，且導引裝置中之斜管的設 _ 產生差異。 此結果，工件一面以非接觸式狀態被導引一 桶槽內。換言之，一面保持極間距離成爲一定， 引裝置以非接觸式之狀態對工件進行電鍍處理。 使不需要在對極薄工件施以電鍍處理上必須之邊 也可以提升對工件所施行之電鍍處理的均勻性。 之帶狀的 在斜管之 長邊方向 域中，並 。因此， 理液之部 之側而行 片狀長片 於斜管中 因此，不 ，於其行 §J之處。 處理液， 央。另外 定成不因 置位置而 面行進於 一面對導 因此，即 框工具， -9- 200831714 (7) (2 )另外，本發明之使用於電鍍處理系統之導引裝置， 其特徵爲：係具有：儲存電鍍處理用之處理液的桶槽、及 在此桶槽內用以垂吊被施以電鑛處理之薄片狀長片形製品 之吊掛工具、及沿著前述桶槽而設置，使該吊掛工具可以 滑動地裝著，並具有作爲陰極功能之陰極棒、及設置於前 述處理液中，使電子從前述陰極棒移動，將前述薄片狀長 片形製品夾於其間，且對前述薄片狀長片形製品爲平行地 • 配置之一對陽極、及配置於該一對陽極的內側，於將該薄 片狀長片形製品夾於其間之狀態下，將該薄片狀長片形製 品導引於其進行方向之呈平板狀的一對導引裝置；藉由一 面對前述薄片狀長片形製品供電，一面使前述吊掛工具在 前述陰極棒上滑動，讓垂吊於前述吊掛工具之前述薄片狀 長片形製品在前述處理液中移動，來對前述薄片狀長片形 製品施以電鍍之電鍍處理系統，前述一對導引裝置之各個 ，係具有：從前述桶槽的外部所供給之新的處理液循環於 # 內部之呈框狀的主管、及位於此主管之框內，對於主管爲 斜向並聯有複數根，且以兩端部對主管連結之副管；此副 管係具有：延伸於長邊方向之縫隙狀噴出孔，藉由經由該 噴出孔，將供給至前述主管之新的處理液朝向前述薄片狀 長片形製品吐出。 本發明之導引裝置，係設置於電鍍處理系統之桶槽。 導引裝置係被浸漬於電鍍處理用之處理液。 副管係其兩端與主管連結’可以取得副管內之壓力平 衡，流動於副管內之處理液的壓力爲均勻。另外，形成於 -10· 200831714 (8) 副管之噴出孔，係延伸於副管的長邊方向之縫隙狀的噴出 孔，從噴出孔所被排出之處理液’係爲呈具有與形成有縫 隙狀噴出孔之長度尺寸相同尺寸之帶狀的狀態。 因此，從斜管之噴出孔所被排出之處理液，在斜管之 長邊方向並無中斷。換言之，於斜管中延伸於其長邊方向 ' ，形成有前述處理液之噴出的縫隙狀噴出孔之區域中，並 無噴出處理液與不噴出之處，係全部噴出處理液。因此， φ 不會有如以往技術中說明般，工件通過不吐出處理液之部 位時，工件與導引裝置接觸，工件偏向有該部位之側而行 進。 另外，一對導引裝置之各個，係具有位於呈框狀之主 管的框內，且對主管爲斜向並聯有複數根之副管，於副管 中相鄰之副管彼此，產生於上下方向交叉之範圍。因此， 不會有於一對導引裝置之間與彼等平行配置之工件，於其 行進方向中，不被從兩側之副管吐出的處理液所噴到之處 因此，工件在其行進中，藉由從副管所噴出之處理液 ’經常被推向兩側，而成爲位於一對導引裝置的中央。另 外’從副管所噴出之處理液的吐出壓力，不會因設置副管 之導引裝置，且導引裝置中之副管的設置位置而產生差異 〇 此結果，工件一面以非接觸式狀態被導引一面行進於 桶槽內。換言之，一面保持極間距離成爲一定，一面對導 引裝置以非接觸式之狀態對工件進行電鍍處理。因此，即 -11 - 200831714 (9) 使不需要在對極薄工件施以電鍍處理上必須之邊框工具， 也可以提升對工件所施行之電鍍處理的均勻性。 (3 )其中前述副管，係具有：連結於主管之管體、及形 成於此管體之長邊方向，且將供給至前述主管之前述處理 液予以排出之排出孔、及蓋該排出孔之方式而安裝於前述 ' 管體，用以形成將從該排出孔所被排出之前述處理液暫時 儲存起來之腔體之腔體形成體，於此腔體形成體形成有前 • 述縫隙狀噴出孔，該噴出孔係與前述腔體相通。 藉由於腔體暫時儲存由排出孔所排出之處理液，腔體 內的處理液之壓力得以均勻化。因此，處理液從與腔體相 同之縫隙狀噴出孔一樣地被吐出。 (4)前述腔體形成體，係具有：安裝於前述管體，且爲 了形成呈前述縫隙狀之噴出孔，以一端彼此相對之方式， 組合成尖屋頂形狀之一對組合板、及設置於此一對組合板 之間之至少一對三角板、及用以在位於該三角板的頂點之 • 兩相鄰的二邊安裝前述一對組合板之螺絲、及形成於前述 一對組合板，孔徑比前述螺絲直徑還大，可讓前述螺絲通 過之通孔。 此處所謂尖屋頂形狀，係指打開書本闔放之山形的屋 頂。 對一對組合板之各通孔穿過螺絲，於一對三角板的二 邊個別進行一對組合板之暫時固定。通孔係比螺絲直徑還 大，螺絲係以鬆驰嵌合狀被安裝於通孔。然後，——對組合 板係於以前數暫時固定狀態被安裝之三角板的前述二邊之 -12- 200831714 (10) 上，沿著該二邊的長邊方向而分別導引各組合板，藉此進 行呈縫隙狀噴出孔之間隙調整。如此只以組合板之滑動操 作，能夠簡單地進行間隙調整，所以非常合適。 (5 )斜向安裝於前述主管之副管，其傾斜角度係以前述 薄片狀長片形製品在桶槽內之搬運速度愈快，則從水平面 ^ 至近地點側之角度就愈小之方式來安裝。 藉由如此，即使搬運速度快，也可以提高藉由導引裝 φ 置之副管的非接觸式導引性。因此，依據本發明之導引裝 置，可以稱爲非接觸式導引裝置。 (6)進而本發明係關於使用前述導引裝置之電鍍處理系 統。 藉由使用該電鍍處理系統，工件係一面以非接觸狀態 被導引一面行進於桶槽內。 [發明效果] • 如依據本發明，工件係藉由非接觸式導引裝置而一面 以非接觸狀態被導引一面行進於桶槽內。換言之，一面保 • 持極間距離成爲一定一面以對導引裝置爲非接觸之狀態， 工件被施以電鍍處理。因此，即使不需要對極薄工件施以 電鍍處理上所必要之邊框工具，也可以提升對工件所施予 之電鍍處理的均勻性。此結果，得以提升所被電鍍之工件 的品質。 【實施方式】 -13- 200831714 (11) 針對本發明之實施形態之電鍍處理系統S 1，參照圖 面來做說明。另外，本發明與以往技術不同處，係導引裝 置之構造而已，工件對導引裝置之位置或動作等其他事項 ，係與以往技術中所說明者相同。因此，以導引裝置之說 明爲主，對於與以往技術所說明者相同的部分，只賦予相 同符號，省略其說明，或省略圖示本身。 具有一對之導引裝置1之各個，係具有：呈框形狀（ • 長四角形狀）之主管2、及斜向位於此主管之框內的副管 3 (參照第1〜第4圖）。此種導引裝置1係設置成與桶槽 9 02的長邊方向平行。另外，副管3由於係斜向之管，也 可以改稱爲斜管。副管3係對工件904之行進方向，斜向 傾斜角度α。 主管2係從桶槽902的外部被供應有含有很多銅之新 的處理液A，該新的處理液Α係循環於主管2的內部。然 後，主管2係具有：於將導引裝置1設置於桶槽內時，位 • 於桶槽的靠上部之處與靠下部之處，且個別延伸於水平方 向之一對水平管2 1、2 1、及配置於水平管2 1的兩端，且 . 延伸於垂直方向之左右一對垂直管22、及位於主管2的角 . 落部，連結水平管2 1與垂直管22之作爲連接管之4個90 °的彎管23。藉由將4個90°彎管23設置於主管2的角落 部，得以維持主管2之框形狀。 水平管21係具有：位於桶槽902的靠上部處之上部 水平管21U與位於靠下部處之下部水平管21D。符號21 係作爲此等水平管2 1 U、2 1 D之總稱，而在說明書中使用 -14 - 200831714 (12) 上部水平管2 1 U係以將從桶槽902的外部所供給的新 的處理液A導入導引裝置1內之1個導入管部211、及用 以將副管3連接於主管2之複數連結管部212、及位於倒 入管部2 1 1及連接管部2 1 2之間之中間管2 1 3相連結而成 爲一體之管。導入管部211、連接管部212都是呈三叉（ T形狀）（參照第1、3、4圖）。 導入管部211係三叉中之一管，設置時，突出上方之 上方突出管部211a係與未圖示出之處理液導入管連結。 然後，經由此處理液導入管，新的處理液A從桶槽902的 外部經由導入管部2 1 1而被導入主管2。 另外，在此實施形態中，與前述處理液導入管連接之 上方突出管部211a雖朝向上方，但是並不限定於此，也 可以朝向下方或其他方向。另外，三叉中之剩餘之管，於 設置導入管部2 1 1時，延伸於水平方向之水平管部2 1 1 b 及2 1 1 c係與中間管2 1 3連結。 連接管部212係成爲三叉中之一管，設置時，突出工 件9 04側之工件側突出管部212a係與副管3連結。然後 ，藉由連接管部2 1 2，新的處理液A從主管2循環於副管 3。工件側突出管部2 1 2a係朝向工件904側（參照第3圖 )。另外，三叉珠爭剩餘之管，於設置連接管部2 1 2時， 延伸於水平方向之水平管部212b及212c係與連接連接管 部212彼此之中間管212連結（參照第1、3圖）。於上 部水平管2 1 U中，連接管部2 1 2係有4根。 -15- 200831714 (13) 中間管2 1 3係因應主管2中之副管3的安裝處所，連 接管部212之主管2中之位置因而不同，所以尺寸並不相 同（參照第1、3、4圖）。另外，在上部水平管21U中， 中間管2 1 2爲6根。 * 面對上部水平管2 1 U之下部水平管2 1 D，在此實施形 _ 態中係只具有3根連接管部2 1 2及4根中間管213，並不 具有導入管部211。但是，也可以具有之。 φ 垂直管22係具有位於工件904之行進方向中之上游 (第1、4圖之右側）之上游側垂直管22U及位於工件 9 04之行進方向中之下游（第1、4圖之左側）之下游側垂 直管22L。任何一種都只具有複數的連接管部222及中間 管223，不具有相當於主管2之導入管部211之管，但是 也可以具有之。垂直管22的連接管部222及中間管223 與水平管21之連接管部212及中間管213，只是符號不同 而已，係爲相同形體。符號22係作爲此等垂直管22U、 • 22L之總稱而於說明書中使用。 另外，在本實施例中，於上游側垂直管22U設置有5 根連接管部222，於下游側垂直管22L設置有4根連接管 部222 (參照第4圖）。然後，此等連接管部222之間或 90°彎管23與連接管部222之間，於上游側垂直管2 2U配 置有合計6根中間管223，於下游側垂直管22L配置有合 計5根中間管223。 副管3係對主管2斜向並聯複數根（在此實施形態爲 7根）之狀態下，且對主管2於兩端部相連結。詳細而言 -16- 200831714 (14) ，於排列時，副管3係斜向安裝成下游側比上游側還位於 上方。另外’副管3之各管係依據與主管2連接之處所而 長度不同。 進而副管3係具有延伸於其長邊方向之縫隙狀噴出孔 (以下，縫隙狀噴出孔）3 1，藉由經由該噴出孔3 1，將供 給至主管2之新的處理液A朝向工件904吐出（參照第 1 1 圖）。 φ 作爲爲此之構成要素，副管3係具有：連結於主管2 之管體32、及於此管體32之外表面用以形成腔體C之腔 體形成體3 3、及爲了將副管3安裝於主管2，連結於管體 32的兩端之90°彎管34、34(參照第1、5圖）。 管體3 2係於長邊方向形成有用已將供給至主管2之 前述處理液A排出之多數的排出孔321 (參照第5〜11圖 )° 腔體形成體33係以覆蓋形成於管體32之該等多數排 # 出孔32 1之方式，延伸於其長邊方向而安裝於管體32。然 後，將從排出孔321所被排出之處理液A暫時儲放於藉由 腔體形成體3 3所形成之腔體C (參照第1 1圖以虛線來表 示引出線之處理液A )。然後，於此腔體形成體3 3形成 有縫隙狀噴出孔3 1，該縫隙狀噴出孔3 1係與腔體C相通 〇 爲此，腔體形成體3 3係具有：以一端彼此相對之方 式，組成尖屋頂形狀之一對組合板33 1、331、及設置於該 等一對組合板3 3 1、3 3 1之間之多數三角板3 3 2、及用以將 -17-board. Therefore, if the discharge pressure of the treatment liquid A is too strong, the workpiece 9 〇 4 cannot withstand the discharge force acting on the workpiece 904, and the workpiece 904 moves irregularly during movement in the tank 902. Further, between the branch pipe 908 and the branch pipe 908, the portion of the processing liquid A is not discharged, and the workpiece 904 is not affected by the discharge pressure of the processing liquid A. When the workpiece 904 passes through the portion, the workpiece 904 is biased toward the side where the portion is present. And marching. In this case, if present, the workpiece 94 may have a φ bend or damage. Therefore, it is conceivable to use a frame tool (not shown) by adding a frame to the periphery of the workpiece 904 by the frame member, even if the workpiece 904 is in contact with the guiding device 90 1 and does not adversely affect the workpiece 904. Out). However, in the case of a thin-thickness workpiece 904, the mounting of the bezel tool itself is very troublesome. In addition, the 'copper attached to the tool' consumes excess copper. There is also the problem of increased electrical or thermal consumption. [Patent Document 1] Japanese Patent Publication No. 2 065 970 [Patent Document 3] Japanese Patent Laid-Open Publication No. JP-A No. 2005-213641 (Patent Document) [Problems to be Solved by the Invention] The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a non-contact type plating processing system which can improve the uniformity of a plating process applied to a workpiece even if a bezel tool is not required. 200831714 (5) [Means for Solving the Problem] (1) In order to achieve the above-mentioned problem, the apparatus for guiding a plating treatment system according to the present invention is characterized in that it has a tank for storing a liquid for plating treatment, and a hanging tool for hanging a thin long-shaped product which is subjected to electroplating treatment in the tank, and being disposed along the aforementioned tubing so that the hanging tool can be slidably mounted and has a cathode a cathode for functioning, and for disposing the electrons from the cathode rod, wherein φ the sheet-like elongated product is interposed therebetween, and arranging one pair of anodes in parallel with the sheet-like long product; Disposed on a side of the pair of anodes, and guiding the sheet-like long sheet-shaped article to a pair of guiding devices in a direction of flattening in a state in which the sheet-like elongated product is sandwiched therebetween; When the power is supplied to the sheet-like long sheet-shaped article, the hanging tool is slid on the cathode rod, and the sheet-like long sheet-shaped article hanging from the hanging worker is moved in the treatment liquid. Long flaky The electroplating treatment system is applied to the electroplating, and each of the pair of guiding devices has a plurality of roots in the diagonal direction of the sheet-like long sheet-shaped product, and is supplied from the outside of the barrel. A new inclined tube for treating liquid, the inclined tube having a slit-shaped discharge hole extending in a longitudinal direction thereof, and discharging the new treatment liquid to the sheet-like long sheet-shaped product through the discharge hole. The guiding device of the present invention is a tank guiding device provided in a plating treatment system, which is immersed in a processing liquid for plating treatment. Then, the discharge hole formed in the inclined pipe extends from the long side of the inclined pipe to the slit-shaped discharge hole, and the treatment liquid discharged from the discharge hole is a control piece which is thinned in the shape __u The side of the 刖 述 进 -8 -8-200831714 (6) has the same size as the length of the slit-shaped ejection hole. Therefore, the direction of the longitudinal direction of the treatment liquid discharged from the discharge hole of the inclined pipe is not interrupted. In other words, in the region where the inclined tube extends in the 'and the slit-shaped ejection hole in which the processing liquid is ejected, the portion where the ejection liquid is not discharged and the portion where the ejection liquid is not ejected, the entire ejection processing liquid is not as described in the prior art. When the workpiece passes through the φ position, the workpiece is in contact with the guiding device, and the workpiece is biased toward the portion. Further, each of the pair of guiding means has a plurality of inclined tubes in which the direction in which the thin products are made are obliquely connected in parallel, and the adjacent inclined tubes are formed in a range intersecting each other in the vertical direction. There is a process in which the workpieces are arranged in parallel with each other between the pair of guiding devices, and are not sprayed by the processing liquid discharged from the inclined tubes on both sides. Therefore, the workpiece is ejected from the inclined tube while traveling. • It is often pushed to the sides and becomes the center of a pair of guiding devices. The discharge pressure of the treatment liquid sprayed from the inclined tube is of course set. The guiding device for the inclined tube is provided, and the guiding device is inclined. The setting of the tube _ produces a difference. As a result, the workpiece is guided into a tank in a non-contact state. In other words, while maintaining the distance between the poles constant, the guiding device performs a plating process on the workpiece in a non-contact state. The uniformity of the plating process performed on the workpiece can be improved by eliminating the need for the plating of the extremely thin workpiece. The band is in the direction of the long side of the inclined tube, and . Therefore, on the side of the part of the chemistry, a sheet-like long piece is placed in the inclined tube. Therefore, it is not in the line § J. Treatment liquid, central. In addition, it is determined that the surface is not guided by a position. Therefore, the frame tool, -9-200831714 (7) (2) In addition, the guiding device for the electroplating processing system of the present invention is characterized by: The utility model has a tank for storing a treatment liquid for electroplating treatment, and a hanging tool for hanging the sheet-like long-shaped product processed by the electric ore in the tank, and is arranged along the barrel The hanging tool is slidably mounted, has a cathode rod functioning as a cathode, and is disposed in the processing liquid to move electrons from the cathode rod to sandwich the sheet-like long sheet-shaped product therebetween. The sheet-like long sheet-shaped article is parallel-arranged, disposed on one side of the anode, and disposed on the inner side of the pair of anodes, and the sheet-like long piece is placed in a state in which the sheet-like long sheet-shaped article is sandwiched therebetween The shaped product is guided by a pair of guiding means in a direction of a flat shape; and the hanging tool is slid on the cathode rod by a power supply to the sheet-like long sheet-shaped article, so that the hanging piece is suspended from the cathode rod The aforementioned hanging tool The sheet-like long sheet-shaped article is moved in the treatment liquid to apply a plating treatment system to the sheet-like long sheet-shaped product, and each of the pair of guiding devices has an outer portion from the barrel The supplied new treatment liquid is circulated in the framed main pipe in # internal, and in the frame of the main pipe, the main pipe is connected in the oblique direction in parallel with the main pipe, and the sub pipe is connected to the main pipe at both ends; The slit-shaped discharge hole extending in the longitudinal direction is discharged through the discharge hole, and the new processing liquid supplied to the main pipe is discharged toward the sheet-like elongated product. The guiding device of the present invention is disposed in a tubing of the electroplating treatment system. The guiding device is immersed in the treatment liquid for the plating treatment. The secondary pipe is connected to the main pipe at both ends thereof to obtain a pressure balance in the auxiliary pipe, and the pressure of the treatment liquid flowing in the auxiliary pipe is uniform. In addition, the discharge hole formed in the sub-tube is a slit-shaped discharge hole extending in the longitudinal direction of the sub-tube, and the treatment liquid discharged from the discharge hole is formed and formed. The slit-shaped discharge hole has a strip shape in the same size and length. Therefore, the treatment liquid discharged from the discharge hole of the inclined pipe is not interrupted in the longitudinal direction of the inclined pipe. In other words, in the region in which the slit pipe extends in the longitudinal direction ', and the slit-like discharge hole in which the treatment liquid is discharged is formed, and the discharge treatment liquid is not discharged and the discharge liquid is not discharged, all of the treatment liquid is discharged. Therefore, φ does not cause the workpiece to come into contact with the guiding device when the workpiece does not discharge the portion of the processing liquid as described in the prior art, and the workpiece is biased toward the side of the portion to proceed. In addition, each of the pair of guiding devices has a frame in the frame-shaped main pipe, and the main pipe has a plurality of sub-pipes connected in parallel in the oblique direction, and adjacent sub-pipes in the sub-pipe are generated from each other. The range of direction crossings. Therefore, there is no workpiece arranged in parallel with the pair of guiding devices, and in the traveling direction thereof, the processing liquid discharged from the sub-pipes on both sides is not sprayed, and therefore the workpiece travels therethrough. In the middle, the treatment liquid "sprayed from the sub-tube" is often pushed to both sides to be located at the center of the pair of guiding devices. In addition, the discharge pressure of the treatment liquid sprayed from the sub-tube is not caused by the installation of the sub-tube guide device and the position of the sub-tube in the guide device. As a result, the workpiece is in a non-contact state. The guided side travels in the tank. In other words, while keeping the distance between the poles constant, the workpiece is plated in a non-contact state with the guiding device. Therefore, -11 - 200831714 (9) makes it possible to improve the uniformity of the plating process performed on the workpiece by eliminating the need for a bezel tool which is necessary for plating a very thin workpiece. (3) The sub-pipe has a discharge pipe that is connected to the pipe body of the main pipe and that is formed in the longitudinal direction of the pipe body, and discharges the treatment liquid supplied to the main pipe, and covers the discharge hole. In the above-described manner, the tube body is formed to form a cavity forming body for temporarily storing the processing liquid discharged from the discharge hole, and the cavity forming body is formed with a slit shape. a discharge hole that communicates with the cavity. The pressure of the treatment liquid in the chamber is uniformed by temporarily storing the treatment liquid discharged from the discharge port by the chamber. Therefore, the treatment liquid is discharged in the same manner as the slit-like discharge holes of the cavity. (4) The cavity forming body is provided in the tubular body, and in order to form the slit-shaped discharge holes, one end of the shape of the pointed roof is assembled so as to face each other at one end, and is provided on the composite plate At least one pair of triangular plates between the pair of combined plates, and screws for mounting the pair of combined plates on two adjacent sides of the apex of the triangular plates, and formed on the pair of combined plates, the aperture ratio The aforementioned screw has a large diameter to allow the aforementioned screw to pass through the through hole. The shape of the pointed roof here refers to the roof of a mountain that opens the book. Each of the through holes of the pair of combined plates is passed through a screw, and a pair of the combined plates are temporarily fixed to the two sides of the pair of triangular plates. The through hole is larger than the screw diameter, and the screw is attached to the through hole in a loose fitting shape. Then, on the 1-2-200831714 (10) of the two sides of the triangular plate to which the composite plate is temporarily fixed, the respective composite plates are respectively guided along the longitudinal direction of the two sides. This performs the gap adjustment of the slit-shaped ejection holes. In this way, only the sliding operation of the combination plate can easily perform the gap adjustment, which is very suitable. (5) The auxiliary pipe of the main pipe is obliquely mounted, and the inclination angle thereof is such that the conveying speed of the sheet-like long-shaped product in the tub is faster, and the angle from the horizontal plane to the perigee side is smaller. installation. By doing so, the non-contact guiding property of the sub-tube by the guiding device φ can be improved even if the conveying speed is fast. Therefore, the guiding device according to the present invention may be referred to as a non-contact guiding device. (6) Further, the present invention relates to a plating treatment system using the above-described guiding device. By using the plating processing system, the workpiece is guided in a non-contact state while traveling in the tub. [Effect of the Invention] According to the present invention, the workpiece travels in the tub while being guided in a non-contact state by the non-contact guide. In other words, the workpiece is subjected to a plating treatment while maintaining the distance between the poles to be a certain side so that the guiding device is not in contact with each other. Therefore, even if it is not necessary to apply a bezel tool necessary for the plating treatment to the extremely thin workpiece, the uniformity of the plating treatment applied to the workpiece can be improved. This result improves the quality of the workpiece being plated. [Embodiment] -13-200831714 (11) A plating treatment system S1 according to an embodiment of the present invention will be described with reference to the drawings. Further, the present invention differs from the prior art in that the structure of the guiding device is the same as that described in the prior art, and other matters such as the position and operation of the workpiece to the guiding device. Therefore, the description of the guiding device will be mainly given to the same portions as those described in the prior art, and the same reference numerals will be given thereto, and the description thereof will be omitted or the illustration itself will be omitted. Each of the pair of guiding devices 1 has a main body 2 having a frame shape (• a long square shape) and a sub-tube 3 obliquely positioned in the frame of the main pipe (see FIGS. 1 to 4). Such a guiding device 1 is disposed in parallel with the longitudinal direction of the tub 902. Further, the sub-pipe 3 may be referred to as a tilt pipe because it is an oblique pipe. The sub-pipe 3 is inclined in the direction of travel of the workpiece 904 by an oblique angle α. The main pipe 2 is supplied with a new processing liquid A containing a large amount of copper from the outside of the tub 902, and the new processing liquid is circulated inside the main pipe 2. Then, the main pipe 2 has a position on the upper portion and the lower portion of the tub groove when the guiding device 1 is disposed in the tub, and extends one of the horizontal directions to the horizontal pipe 2 1 . 2 1 and disposed at both ends of the horizontal pipe 2 1 , and a pair of left and right vertical pipes 22 extending in the vertical direction, and a corner at the main pipe 2 , the falling portion, connecting the horizontal pipe 2 1 and the vertical pipe 22 as a connection Tubes of four 90 ° elbows 23. By arranging four 90° elbows 23 at the corners of the main pipe 2, the frame shape of the main pipe 2 can be maintained. The horizontal pipe 21 has a horizontal pipe 21U located above the upper portion of the tub 902 and a horizontal pipe 21D located below the lower portion. Symbol 21 is a general term for these horizontal tubes 2 1 U, 2 1 D, and in the specification - 14 - 200831714 (12) The upper horizontal tube 2 1 U is used to supply new ones from the outside of the tank 902 1 introduction tube portion 211 of the treatment liquid A introduction guide device 1, and a plurality of connection tube portions 212 for connecting the sub tube 3 to the main tube 2, and the pouring tube portion 2 1 1 and the connection tube portion 2 1 The intermediate tubes 2 1 3 between the two are connected to form an integrated tube. Both the introduction tube portion 211 and the connection tube portion 212 have a trigeminal (T shape) (see Figs. 1, 3, and 4). The introduction pipe portion 211 is one of the three forks, and when disposed, the upper protruding pipe portion 211a that protrudes upward is coupled to a processing liquid introduction pipe (not shown). Then, the new processing liquid A is introduced into the main pipe 2 from the outside of the tub 902 via the introduction pipe portion 2 1 1 via the processing liquid introduction pipe. Further, in this embodiment, the upper protruding pipe portion 211a connected to the processing liquid introduction pipe is directed upward, but is not limited thereto, and may be directed downward or in other directions. Further, in the remaining tube of the trifurcation, when the introduction pipe portion 2 1 1 is provided, the horizontal pipe portions 2 1 1 b and 2 1 1 c extending in the horizontal direction are coupled to the intermediate pipe 2 1 3 . The connecting pipe portion 212 is one of the trifurcations. When installed, the workpiece-side protruding pipe portion 212a on the side of the projecting member 904 is coupled to the sub-pipe 3. Then, by connecting the pipe portion 2 1 2, the new process liquid A is circulated from the main pipe 2 to the sub-pipe 3. The workpiece-side protruding tube portion 2 1 2a faces the workpiece 904 side (see FIG. 3). In addition, when the connecting pipe portion 2 1 2 is provided, the horizontal pipe portions 212b and 212c extending in the horizontal direction are connected to the intermediate pipe 212 connecting the connecting pipe portions 212 (refer to Figs. 1 and 3). ). In the upper horizontal pipe 2 1 U, there are four connecting pipe portions 2 1 2 . -15- 200831714 (13) The intermediate pipe 2 1 3 is in accordance with the installation position of the auxiliary pipe 3 in the main pipe 2, and the position in the main pipe 2 of the connecting pipe portion 212 is different, so the sizes are not the same (refer to the first and third, 4 picture). Further, in the upper horizontal pipe 21U, the number of the intermediate pipes 2 1 2 is six. * Facing the lower horizontal pipe 2 1 U lower horizontal pipe 2 1 D, in this embodiment, there are only three connecting pipe portions 2 1 2 and four intermediate pipes 213, and there is no introduction pipe portion 211. However, it can also have it. The φ vertical pipe 22 has an upstream vertical pipe 22U upstream of the traveling direction of the workpiece 904 (the right side of the first and fourth figures) and a downstream of the traveling direction of the workpiece 094 (the left side of the first and fourth figures) The downstream side vertical tube 22L. Any one of the plurality of connecting pipe portions 222 and the intermediate pipe 223 does not have a pipe corresponding to the introduction pipe portion 211 of the main pipe 2, but may have it. The connecting pipe portion 222 of the vertical pipe 22 and the connecting pipe portion 212 and the intermediate pipe 213 between the intermediate pipe 223 and the horizontal pipe 21 are different from each other in the same shape. Symbol 22 is used as a general term for these vertical tubes 22U, 22L and is used in the specification. Further, in the present embodiment, five connection pipe portions 222 are provided in the upstream vertical pipe 22U, and four connection pipe portions 222 are provided in the downstream vertical pipe 22L (see Fig. 4). Then, between the connection pipe portions 222 or between the 90° bend pipe 23 and the connection pipe portion 222, a total of six intermediate pipes 223 are disposed in the upstream vertical pipe 2 2U, and a total of 5 are disposed in the downstream vertical pipe 22L. Root tube 223. The sub-pipe 3 is connected to the main pipe 2 in a state in which the main pipe 2 is obliquely connected in parallel (in this embodiment, seven), and the main pipe 2 is connected to both ends. In detail, -16- 200831714 (14), in the arrangement, the sub-tube 3 is installed obliquely so that the downstream side is located above the upstream side. Further, each of the pipes of the sub-pipe 3 is different in length depending on where it is connected to the main pipe 2. Further, the sub-pipe 3 has slit-shaped discharge holes (hereinafter, slit-like discharge holes) 3 extending in the longitudinal direction thereof, and the new processing liquid A supplied to the main pipe 2 is directed toward the workpiece through the discharge holes 31. 904 spit out (see Figure 1 1). φ is a constituent element for this purpose, and the sub-pipe 3 has a pipe body 32 connected to the main pipe 2, a cavity forming body 3 3 for forming a cavity C on the outer surface of the pipe body 32, and a pair of The tube 3 is attached to the main pipe 2, and is connected to the 90° elbows 34 and 34 at both ends of the pipe body 32 (see Figs. 1 and 5). The tubular body 3 2 is formed with a plurality of discharge holes 321 (see FIGS. 5 to 11) for discharging the processing liquid A supplied to the main pipe 2 in the longitudinal direction. The cavity forming body 33 is formed to cover the pipe body. The plurality of rows #32 of the outlets 32 are attached to the tubular body 32 in a manner extending in the longitudinal direction thereof. Then, the processing liquid A discharged from the discharge hole 321 is temporarily stored in the cavity C formed by the cavity forming body 3 (refer to the processing liquid A in which the lead wire is indicated by a broken line in Fig. 1). Then, the cavity forming body 3 3 is formed with a slit-shaped ejection hole 3 1 which is in communication with the cavity C. For this purpose, the cavity forming body 3 3 has: one end opposite to each other In a manner, one of the shape of the pointed roof is formed on the combination plate 33 1 , 331 , and a plurality of triangular plates 3 3 2 disposed between the pair of composite plates 3 3 1 and 3 3 1 and used to
200831714 (15) 組合板331安裝於該三角板3 32之螺絲 成體3 3所形成之腔體C，係大致呈三角右 組合板3 3 1係其長度尺寸與管體3 2 一軸線上具有與三角板332的數目同數之 第6〜8圖）。另外，通孔3 3 1 h係以與三 間隔相同間隔而形成於組合板33 1的長_ 3 3 1 h係以比前述螺絲3 3 3的直徑還大徑π； 。另外，通孔3 3 1 h並不限定於圓形，也 之跑道形。在該情形時，長軸係以延伸於 長邊方向直行之方向來形成。 三角板3 3 2係立設於管體3 2的外表 圖），因此，抵接三角板332之底邊的部： 體32的曲率而彎曲。將該部分稱爲曲邊 於三角板3 3 2的頂點3 3 2b的兩鄰之二邊 絲3 3 3螺合之螺絲孔3 3 2h係從頂點3 3 2b 成（參照第6、7圖）。 另外，三角板3 32於此實施形態珠固 ，但是也可以如第9圖般，爲直角三角形 螺絲3 3 3係市售之螺絲。 使用由此種構成所形成之副管3， 3 3 1之各通孔3 3 1 h穿過螺絲3 3 3，於三角 別進行一對組合板3 3 1之暫時固定。通子 3 3 3還大直徑，螺絲3 3 3係鬆鬆嵌合狀安 然後，於一對組合板3 3 1以前述暫_ 3 3 3。藉由腔體形 芒狀之中空。 大致相同，於同 通孔3 3 1 h (參照 :角板3 3 2之設置 i方向。進而通孔 『讓螺絲3 3 3通過 【可以作成競技用 與組合板3 3 1的 :面32a(參照第6 汗332a係配合管 〖部。另外，於位 332s 、 332s ，螺 起同距離地形 i係二等邊三角形 體。 對該一對組合板 I板332之兩邊個 L 3 3 1 h係比螺絲 裝於通孔3 3 1 h。 ，固定狀態所安裝 -18- 200831714 (16) 之三角板 332之兩邊 332s、332s之上，藉由沿著二邊 3 32s、3 32s之長邊方向而個別使各組合板331滑動（參照 第1 〇圖之兩箭頭方向所示），來進行縫隙狀噴出孔31的 間隙調整（縫隙調整）。如此只以進行組合板3 3 1之滑動 操作之簡單操作，可以進行間隙調整，極爲合適。 另外，可以調整一對組合板3 3 1、3 3 1、及三角板3 3 2 、及組合板331之通孔331h、及螺絲333來進行縫隙狀噴 • 出孔3 1之間隙調整。 另一方面，安裝於副管3之兩端的9 0°彎管34係被當 成將副管3連結於主管2之接頭來使用。另外，藉由副管 3之主管2中之設置處所，90°彎管34係以單數或雙數被 使用於副管3之各端。於此實施形態中，連結上部水平管 2 1U與上游側垂直管22U之副管3之中，只在連結最長之 副管3的上部水平管21U與副管3之情形時，90°彎管34 係將中間管3 4 1當成接頭使用雙數個（參照第1圖）。 # 由此種構成要素所形成之副管3之對主管2之傾斜角 度α (參照第1圖），係以工件904之桶槽902內中之搬 運速度愈快爲佳而安裝得小些。另外，傾斜角度α係指從 水平面起之近地點側之角度。 接著，說明具備此種導引裝置1之電鍍處理系統S1 之作用效果。 副管3係其兩端連結於主管2，得以取得副管3內中 之壓力平衡。因此，流通於副管3內之處理液的壓力爲均 勻。因此，從副管3所噴出之處理液Α之吐出壓力，依據 -19- 200831714 (17) 副管3之所設置的導引裝置1、另外，導引裝置1中之副 管3之設置位置，不會有差異。 形成於副管3之噴出孔3 1，係延伸於副管3之長邊方 向之縫隙狀噴出孔3 1，從該縫隙狀噴出孔3 1所被排出之 處理液A，係成爲具有與形成縫隙狀噴出孔3 1之長度尺 寸與相同尺寸之帶狀的形態（參照第1 1圖中，以實線表 示引出線之處理液A)。 Φ 因此，從副管3之縫隙狀噴出孔3 1所被排出之處理 液A，於副管3之長邊方向並無中斷。換言之，於副管3 中，於其長邊方向延伸，且形成有處理液A之噴出的縫隙 狀噴出孔31的區域中，並無處理液A之噴出與不噴出之 處所，全部會噴出處理液A。 因此，工件904於行進在一對導引裝置1之間，如以 往技術之說明般，工件9 04通過不吐出處理液A之部位時 ，工件904與導引裝置接觸，工件904偏向有該部位側而 • 行進之問題，於電鍍處理系統S 1中並不會發生。 另外，作成平面狀之一對導引裝置1之各個，係具有 . :位於主管2的框內，且斜向複數根並列於主管2之副管 3，於副管3中相鄰接之副管3彼此中，產生上下方向交 叉之範圍。因此，於一對導引裝置1之間，與彼等平行配 置之工件904於其行進方向中，不會有從兩側之副管3所 吐出的處理液A不接觸到之處所。 因此，工件904於其行進中，藉由從副管3所噴出之 處理液A而經常被推向兩側，成爲位於一對導引裝置1之 -20- 200831714 (18) 中央。 此結果，工件904係一面被一對導引裝置1所導 一面與一對導引裝置1爲非接觸狀態行進於桶槽902 換言之，一面保持極間距離爲一定一面與導引裝置1 接觸之狀態對工件904施以電鍍處理。因此，即使不 在對極薄工件904施以電鍍處理上必須之邊框工具， 以提升對工件904所施行之電鍍處理的均勻性。 副管3係藉由暫時儲放從排出孔被排出從腔體C 理液A，使得腔體C內的處理液A之壓力均勻化。因 處理液A從通過腔體C之縫隙狀噴出孔3 1被吐出。 ，對工件904所施行之電鍍處理可以更爲均勻。 斜向安裝於前述主管2之副管3，其傾斜角度係 述薄片狀長片形製品之桶槽902內的搬運速度愈快爲 安裝成使從水平面起之近地點側的角度小些，搬運速 使快，也可以提高藉由導引裝置1之副管3的非接觸 引性。因此，導引裝置1可以稱爲非接觸式導引裝置 藉由使用導引裝置1，工件9 0 4係一面以非接觸 被導引一面行進於桶槽902內。換言之，可以一面保 間距離爲一定一面與導引裝置1爲非接觸狀態，對 9 04施以電鍍處理。因此，即使不需要在對極薄工件 施以電鍍處理上必須之邊框工具，也可以提升對工件 所施行之電鍍處理的均勻性。此結果，所被電鍍之 904的品質得以提升。 另外，本發明並不只限定於前述之圖示例子，在 引而 內。 爲非 需要 也可 之處 此， 因此 以前 佳而 度即 式導 1 ° 狀態 持極 工件 904 904 工件 不脫 -21 - 200831714 (19) 離本發明之要旨的範圍內，不用說可以加上種種變更。 【圖式簡單說明】 第1圖係電鍍處理系統之導引裝置的斜視圖。 第2圖係第1圖之橫剖面圖。 第3圖係第1圖之平面圖。 第4圖係第2圖之IV-IV線剖面圖。 # 第5圖係副管之斜視圖。 第6 ( a )圖係副管之橫剖面圖，（b )圖係（a )圖之 重要部位放大圖。 第7圖係第5圖之側面圖。 第8圖係第5圖之平面圖。 第9圖係表示三角板的變形例。 第1 0圖係說明進行間隙調整之狀態圖，（a )圖係表 示正進行三角板之位置調節之狀態圖，（b )圖係表示調 ® 整狀態之斜視圖。 第1 1圖係說明處理液從副管之縫隙狀噴出孔噴出之 . 狀態圖。 . 第1 2圖係說明以往之電鍍處理系統之圖。 第13圖係第12圖之XIII-XIII線剖面圖。 第1 4圖係說明以往技術之問題點之斜視圖。 【主要元件符號說明】 1 :導引裝置，2:主管，21:水平管，210:下部水 -22- 200831714 (20) 平管，21U:上部水平管，211 :導入管部，211a 出管部，2 1 1 b :水平管部，2 1 1 c :水平管部，2 之連接管部，212a :工件側突出管部’ 212b :水 212c:管部，213:水平管之中間管，22:垂直管 22L :下游側垂直管，22U :上游側垂直管，222 部，223:垂直管的中間管，23:主管之90°彎· 管（斜管），3 1 :縫隙狀噴出孔（噴出孔），3 2 3 2a :管體之外表面，321 :管體之排出孔，33 : 體，331 :組合板，33 lh :通孔，3 32 :三角板， 邊部，3 3 2h :螺絲孔，3 3 2b :頂點，33 2s、3 3 2s 之二邊，3 3 3 :螺絲，34 :副管之90°彎管，341 ，901:導引裝置，902:電鍍處理用桶槽，903 ，904 :附有抗蝕薄膜之圖案電鍍工件（薄片狀 品），905 :吊掛工具，906 :陽極，907 :主管， 管，98 1 :噴出孔，A :電鍍處理液（處理液）， ，S :電鍍處理系統，s 1 :電鍍處理系統，α : 管之傾斜角度 :上方突 12 :主管 平管部， :連接管 ί，3 :副 •管體， 腔體形成 332a ：曲 :三角板 :中間管 :陰極棒 長片形製 90 8 ：枝 C :腔體 副管對主 -23-200831714 (15) The composite plate 331 is mounted on the cavity C formed by the screw body 3 3 of the triangular plate 3 32, and is generally a triangular right composite plate 3 3 1 having a length dimension and a tubular body 3 2 having an axis on one axis The number of 332 is the same as the number 6 to 8). Further, the through holes 3 3 1 h are formed at the same interval from the three intervals, and the length _ 3 3 1 h formed on the combined plate 33 1 is larger than the diameter of the aforementioned screw 3 3 3 by a diameter π; Further, the through hole 3 3 1 h is not limited to a circular shape, and is also a racetrack shape. In this case, the long axis is formed in a direction extending in the direction of the long side. The triangular plate 3 3 2 is erected on the outer surface of the pipe body 3 2 , and therefore, the portion abutting the bottom edge of the triangular plate 332 is curved by the curvature of the body 32 . This portion is referred to as a screw hole 3 3 2h in which the two adjacent wires 3 3 2 of the apex 3 3 2b of the triangular plate 3 3 2 are screwed from the apex 3 3 2b (refer to Figs. 6 and 7). . Further, the triangular plate 3 32 is bead-fixed in this embodiment, but may be a right-angled triangular screw 3 3 3 as a commercially available screw as in Fig. 9. The through holes 3 3 1 h of the sub-pipes 3, 3 3 1 formed by such a configuration are passed through the screws 3 3 3 to temporarily fix the pair of combined plates 3 3 1 in the triangle. Tongzi 3 3 3 is also large in diameter, and the screw 3 3 3 is loosely fitted. Then, the pair of composite plates 3 3 1 are temporarily _ 3 3 3 . It is hollow by the shape of the cavity. Roughly the same, in the same through hole 3 3 1 h (refer to: yoke 3 3 2 set i direction. Then through hole "let the screw 3 3 3 through [can be used for competitive and composite board 3 3 1: face 32a ( Refer to section 6 of the Khan 332a system. In addition, at positions 332s and 332s, the same-distance terrain i is a equilateral triangle. The two sides of the pair of composite plates I 332 are L 3 3 1 h The screw is mounted on the through hole 3 3 1 h. The fixed state is mounted on the two sides 332s and 332s of the triangular plate 332 of -18-200831714 (16), by the long side direction along the two sides 3 32s, 3 32s The respective combination plates 331 are individually slid (refer to the direction of the two arrows in the first drawing) to perform the gap adjustment (slit adjustment) of the slit-shaped discharge holes 31. This is only a simple operation for performing the sliding operation of the composite plate 3 31. It is extremely suitable to perform the gap adjustment, and it is also possible to adjust the pair of composite plates 3 3 1 , 3 3 1 and the triangular plate 3 3 2 , and the through holes 331h of the combination plate 331 and the screws 333 to perform the slit-like spray. The clearance of the exit hole 3 1 is adjusted. On the other hand, the 90° bend attached to both ends of the auxiliary pipe 3 The 34 system is used as a joint for connecting the sub-pipe 3 to the main pipe 2. Further, by the installation position in the main pipe 2 of the sub-pipe 3, the 90° elbow 34 is used in the singular or double number for each of the sub-pipes 3. In this embodiment, among the sub-pipes 3 connecting the upper horizontal pipe 2 1U and the upstream vertical pipe 22U, only when the upper horizontal pipe 21U and the sub-pipe 3 of the longest sub-pipe 3 are connected, 90° The elbow 34 uses a plurality of intermediate tubes 341 as joints (see Fig. 1). # The inclination angle α of the sub-tube 3 formed by the constituent elements to the main pipe 2 (refer to Fig. 1) It is preferable to install the smaller the conveying speed in the inside of the tub 902 of the workpiece 904. The inclination angle α is the angle of the perigee side from the horizontal plane. Next, the plating provided with the guiding device 1 will be described. The effect of the treatment system S1 is that the secondary pipe 3 is connected to the main pipe 2 at both ends, and the pressure balance in the inside of the sub-pipe 3 is obtained. Therefore, the pressure of the treatment liquid flowing through the sub-tube 3 is uniform. The discharge pressure of the treatment liquid sprayed from the tube 3 is based on -19-200831714 (17) The guiding device 1 provided by 3, in addition, the position of the sub-tube 3 in the guiding device 1 is not different. The ejection hole 31 formed in the sub-tube 3 extends over the long side of the sub-tube 3. In the slit-shaped discharge hole 31, the processing liquid A discharged from the slit-shaped discharge hole 31 has a strip shape having the same length and the same size as that of the slit-shaped discharge hole 31 (see In the figure, the treatment liquid A) of the lead line is indicated by a solid line. Φ Therefore, the treatment liquid A discharged from the slit-shaped discharge hole 31 of the sub-tube 3 is not interrupted in the longitudinal direction of the sub-tube 3. In other words, in the region of the sub-pipe 3 that extends in the longitudinal direction and in which the slit-shaped discharge holes 31 in which the treatment liquid A is ejected are formed, there is no discharge or discharge of the treatment liquid A, and all of the discharge treatment is performed. Liquid A. Therefore, the workpiece 904 travels between the pair of guiding devices 1. As described in the prior art, when the workpiece 906 passes through the portion where the processing liquid A is not discharged, the workpiece 904 comes into contact with the guiding device, and the workpiece 904 is biased toward the portion. Side and • The problem of travel does not occur in the plating system S1. In addition, each of the pair of guiding devices 1 is formed in a frame of the main pipe 2, and the plurality of obliquely connected roots are juxtaposed to the sub pipe 3 of the main pipe 2, and adjacent to the sub pipe 3 The tubes 3 are in a range in which they intersect in the up and down direction. Therefore, between the pair of guiding devices 1, the workpieces 904 arranged in parallel with them are not in contact with the processing liquid A discharged from the sub-pipes 3 on both sides in the traveling direction. Therefore, the workpiece 904 is often pushed to both sides by the processing liquid A ejected from the sub-tube 3 as it travels, and is located at the center of -20-200831714 (18) of the pair of guiding devices 1. As a result, the workpiece 904 is guided by the pair of guiding devices 1 to be in contact with the pair of guiding devices 1 in the non-contact state, and in other words, the workpiece 904 is in contact with the guiding device 1 while maintaining a certain distance between the electrodes. The state is subjected to a plating process on the workpiece 904. Therefore, even if the extremely thin workpiece 904 is not subjected to the bezel tool necessary for the plating treatment, the uniformity of the plating treatment performed on the workpiece 904 is improved. The sub-tube 3 is discharged from the chamber C by the temporary storage and discharge from the discharge hole, so that the pressure of the treatment liquid A in the chamber C is made uniform. The treatment liquid A is discharged from the slit-like discharge hole 31 through the cavity C. The plating treatment performed on the workpiece 904 can be more uniform. The sub-pipe 3 is attached obliquely to the main pipe 2, and the inclination angle thereof is such that the conveying speed in the tub 902 of the laminar elongated product is set to be smaller so that the angle from the near-point side from the horizontal plane is smaller, and the conveying speed is small. The contactlessness of the sub-tube 3 by the guiding device 1 can also be increased. Therefore, the guiding device 1 can be referred to as a non-contact guiding device. By using the guiding device 1, the workpiece 904 is guided in the barrel 902 while being guided in a non-contact manner. In other words, it is possible to apply a plating treatment to 094 in a non-contact state with the guiding device 1 while maintaining a certain distance. Therefore, even if it is not necessary to apply a bezel tool which is necessary for plating a very thin workpiece, the uniformity of the plating treatment performed on the workpiece can be improved. As a result, the quality of the 904 to be plated is improved. Further, the present invention is not limited to the above-described illustrated examples and is incorporated by reference. In the past, it is not necessary to add a workpiece 904 904. The workpiece is not off - 21 - 200831714 (19) Within the scope of the gist of the present invention, it goes without saying that various kinds can be added. change. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view of a guiding device of a plating treatment system. Figure 2 is a cross-sectional view of Figure 1. Figure 3 is a plan view of Figure 1. Fig. 4 is a sectional view taken along line IV-IV of Fig. 2; #第图图5 is an oblique view of the secondary pipe. Figure 6 (a) is a cross-sectional view of the sub-pipe, and (b) is an enlarged view of the important part of the figure (a). Figure 7 is a side view of Figure 5. Figure 8 is a plan view of Figure 5. Fig. 9 is a view showing a modification of the triangular plate. Fig. 10 is a state diagram for performing the gap adjustment, (a) shows a state diagram in which the position of the triangular plate is being adjusted, and (b) shows a perspective view of the adjustment state. Fig. 1 is a view showing a state in which a treatment liquid is ejected from a slit-like discharge hole of a sub-tube. Fig. 1 is a view showing a conventional plating processing system. Figure 13 is a cross-sectional view taken along line XIII-XIII of Figure 12. Fig. 14 is a perspective view showing the problem of the prior art. [Main component symbol description] 1 : Guide device, 2: main pipe, 21: horizontal pipe, 210: lower water-22- 200831714 (20) flat pipe, 21U: upper horizontal pipe, 211: introduction pipe, 211a pipe Department, 2 1 1 b : horizontal pipe section, 2 1 1 c : horizontal pipe section, 2 connection pipe section, 212a: workpiece side protruding pipe section '212b: water 212c: pipe section, 213: pipe of the horizontal pipe, 22: vertical pipe 22L: downstream vertical pipe, 22U: upstream vertical pipe, 222, 223: vertical pipe intermediate pipe, 23: main pipe 90° bend pipe (inclined pipe), 3 1 : slit-like discharge hole (spray hole), 3 2 3 2a : outer surface of the pipe body, 321 : discharge hole of the pipe body, 33 : body, 331 : combination plate, 33 lh : through hole, 3 32 : triangular plate, side portion, 3 3 2h : screw hole, 3 3 2b: apex, 33 2s, 3 3 2s on both sides, 3 3 3 : screw, 34: 90° elbow of the sub-tube, 341, 901: guiding device, 902: barrel for electroplating Groove, 903, 904: pattern plated workpiece with resist film (sheet-like product), 905: hanging tool, 906: anode, 907: main pipe, tube, 98 1 : discharge hole, A: plating treatment solution (treatment Liquid), ,S: plating System, s 1 : electroplating treatment system, α : inclination angle of the tube: upper projection 12: main pipe section, connection pipe ί, 3: sub-pipe body, cavity formation 332a: curved: triangular plate: middle pipe: cathode Rod long piece 90 8 : Branch C: cavity pair tube to main -23-