TW200808461A - Slit coater - Google Patents

Slit coater Download PDF

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Publication number
TW200808461A
TW200808461A TW096114381A TW96114381A TW200808461A TW 200808461 A TW200808461 A TW 200808461A TW 096114381 A TW096114381 A TW 096114381A TW 96114381 A TW96114381 A TW 96114381A TW 200808461 A TW200808461 A TW 200808461A
Authority
TW
Taiwan
Prior art keywords
guide groove
block
pressurizing block
slit
surface contact
Prior art date
Application number
TW096114381A
Other languages
Chinese (zh)
Other versions
TWI322715B (en
Inventor
Sang-Taek Oh
Kun-Woo Kim
Jae-Il Lee
Original Assignee
Dms Co Ltd
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Filing date
Publication date
Application filed by Dms Co Ltd filed Critical Dms Co Ltd
Publication of TW200808461A publication Critical patent/TW200808461A/en
Application granted granted Critical
Publication of TWI322715B publication Critical patent/TWI322715B/en

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/30—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages
    • B05B1/3033—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages the control being effected by relative coaxial longitudinal movement of the controlling element and the spray head
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like

Abstract

The present invention relates to a slit coater which is applied in the coating operation of photosensitive liquids such as photo-etchants, etc. in the photolithography technology of panel display substrate, and which can greatly improve the performance of adjusting the scarf gap of nozzle. The present invention comprises: a working stage to proceed the operation of coating the photosensitive liquid on the substrate; a nozzle body having a slit ejection opening and fixed on one side of the working stage; a pressurizing block sandwiched inside the guiding groove formed on the side of the slit ejection opening; a surface contact part formed on one side surface of the pressurizing block, and at the state of slantly contacting one side of the inner surface of the said guiding groove, generating the contact pressure in the vertical direction inside the said guiding groove by moving the pressurizing block; an adjustment part connected with the pressurizing block by screw, and generating pressure on the surface contact part by moving the pressurizing block forward or backward along the slant direction of the said surface contact part, thereby bending/deforming one side of the ejection opening, and making the ejection opening approach the other side or move toward the opposite direction.

Description

200808461 九、發明說明： 【發明所屬之技術領域】 本發明涉及一種狹縫式塗敷裝置，具體地涉及一種適 用於透過狹缝塗敷方式在平板顯示器用基板上塗敷照相平 版印刷術用光致抗蝕劑等感光液的塗敷作業，並且易於調 整唷嘴切口間隙，從而提高塗敷品質的狹缝式塗敷裝置。 【先前技術】 通吊，平板顯示器用基板的製造工藝中，在基板表面 形成預定圖案的工序，主要係以照相平版印刷方式來進 行0 所述照相平版印刷方式，包括在基板表面塗覆-定厚 度的光致抗蝕劑等感光物質、以及對塗敷面進行曝光、 影、钱刻等一系列工序。200808461 IX. Description of the Invention: The present invention relates to a slit coating apparatus, and more particularly to a method for coating photolithography on a substrate for a flat panel display by slit coating. A slit coating apparatus that improves the coating quality by applying a photosensitive liquid such as a resist and easily adjusting the gap between the nozzle slits. [Prior Art] In the manufacturing process of a substrate for a flat panel display, a process of forming a predetermined pattern on the surface of the substrate is mainly carried out by photolithography to perform the photolithography method, including coating on the surface of the substrate. A photosensitive material such as a photoresist of a thickness, and a series of processes such as exposure, shadowing, and engraving on the coated surface.

尤其是，上述塗敷工序廣泛使用具有狹縫式噴出口的 塗敷裝置’而所述塗敷裝置安裝有可調整噴嘴噴出口 的間隙調整裝置。這種間隙調整裝置，-般採用透過螺於 的栓緊力來調整噴出間隙的螺桿調整方式，以及利用流二 壓力來调整喷出間隙的油壓調整方式等。 一 而上述採用油壓調整方式的調整裝置，雖然易於調敕 喷出間隙，但是盆價#夂曰主 ^ θ π ^ 疋/、彳貝格卬貝，而且經過一段時間以後，冷 體壓力容易發生變yfh，'，L 刃知玍欠化，因此需要隨時調整流體壓力，盔 獲得令人滿意的操作穩定性。 ' 另外上述抓用螺桿調整方式的調整裝置，在噴嘴 側，/口者贺出Π切開方向的至少_處位置上安裝貫通 5 200808461 出間隙的螺栓，亚透過旋摔 隙，囡If簖、+、4 Μ 乂螺栓的螺距來調整間 隙α此所述結構很難對幾十微米（ 行微調。 卞Q vm)以下的間隙進 並且’調整間隙之後，在塗敷裝置 於受震動和壓力的男變，業匕私中，由 擰固狀態容易發生變化， 曰出現間隙§ 周整誤差。因此’這種 調整間隙的方式盔法择得八人、丈立 的螺距I直接 性。 Mm人滿意的可操作性和操作穩定 4寸別是’這兩種調整方式所且右 S ^ ^ ^ 〃的上述問題，將會成 舄産生過夕不良産品而降低工作 因。 ρ双手和生産效率的主要原 【發明内容】 本發明鐾於上述問題而作，I目的在於提供一種狹縫 式塗敷裝置，該裝置透過以面接觸壓力傳達動力之方式來 調整噴出口間隙，從而改進可操作性及操作穩定性。 爲實現上述目的，本發明提供一種狹縫式塗敷裝置， 其包括^作臺’其工作臺面上進行對基板塗敷感光液的 塗敷作業；噴嘴本體，其具有狹縫式喷出口，且固定在所 述工作臺面的一侧；加壓塊，其被夾入導槽内侧，而所述 導槽形成在所述噴嘴本體噴出口的一侧；面接觸部，其形 成於加壓塊的一側表面，並且在與所述導槽内表面的一側 傾斜接觸的狀態下，透過移動加壓塊而在所述導槽内産生 上下方向的接觸壓力；調整部，其與所述加壓塊螺接，並 透過使所述加壓塊沿所述面接觸部的傾斜方向前進或後 6 200808461 口的一 的照相 > 間接動 來移動 接觸壓 且能夠 間隙調 穩定性 退：在所述面接觸部産生壓力，從而使所述噴出 側部彎曲變形光a 、 λ形亚向另一侧靠近或向其反方向移動。 平版印：本::3: ’在進行用於製造平板顯示器基板 、，工嗇時，能夠簡單地調整噴嘴的噴出間隙 尤 =，在調整噴出口間隙時，本發明可採用 力=!來進行調整。亦即，透過螺栓等調整部 :广’透過加壓塊與導槽的接觸面所產生的面 二=及傳遞調整壓力。因此不僅易於操作，而 :二二還能防止由於震動和衝擊等原因而造成 ;。父化’從而可進-步提高可操作性和操作 【實施方式】 所屬ΙΓ參照附圖說明本發明的較佳具體實施例，並在 =域的技術人員能夠實施本發明具體實施例的範圍内 進仃呪明。由於本發明的呈每 絲 、篮R %例能夠以多種形式實 ，因此本發明的權利要求 例。 水轨圍並不限於下述具體實施 圖一是本發明狹缝式塗 中笾％。士 载衣置的整體結構示意圖，圖 甲付唬2表示噴嘴本體。 噴嘴本體2呈長方體，m 且如同 適用於進行常規的狹缝塗敷， 且如圖一所示固定在設置於輪 % V衣置Μ —側的支撐台Ml 上’以便在透過所述輸送裝署λ/Γ认 f ^ ^ 、裒置“輪送平板顯示器用基板σ (从下簡稱爲“基板”）的滿妒士 、、夜w # 1 的< &中進行光致抗蝕劑等感光 液w的塗敷作業。 7 200808461 W的細長切口， 钱性優異的金屬 所（喷驚本體2’具有用於噴出感光液 即狹縫式Mn N，其使料久性及耐腐 材料製成。 —斤达噴出口 N，從連接在所述噴嘴本體2 —側的供給 官L·接收感光液w ° W ΠΓ 所應管[與儲存有感光液 =子a相連接，以便從所述儲存槽T獲得感光液w。 如圖：所示，所述噴出口 N的端部形成有噴出間隙In particular, in the coating step, a coating device having a slit type discharge port is widely used, and the coating device is provided with a gap adjusting device that can adjust the nozzle discharge port. In the gap adjusting device, the screw adjusting method for adjusting the discharge gap by the bolting force of the screw is generally used, and the hydraulic pressure adjusting method for adjusting the discharge gap by the flow two pressure is used. The above adjustment device using the oil pressure adjustment method, although it is easy to adjust the discharge gap, the pot price is #夂曰主^ θ π ^ 疋/, 彳贝格卬贝, and after a period of time, the cold body pressure is easy The change of yfh, ', L edge knows the under-reaction, so the fluid pressure needs to be adjusted at any time, and the helmet obtains satisfactory operational stability. In addition, the adjustment device for the above-mentioned grasping screw adjustment method is provided with a bolt that penetrates the gap of 200808,061 at the position of at least the _ in the cutting direction of the nozzle, and the sub-transmission gap, 囡If, + , 4 Μ 螺 bolt pitch to adjust the gap α This structure is difficult to enter the gap below tens of micrometers (line fine-tuning. 卞Q vm) and 'after adjusting the gap, the coating device is subjected to vibration and pressure In the case of smuggling, it is easy to change from the state of screwing, and the gap is § week-round error. Therefore, the way of adjusting the gap is to choose the pitch I directness of eight people. Mm people are satisfied with the operability and operation stability. The above-mentioned problems of the two adjustment methods and the right S ^ ^ ^ , will result in the production of bad products and reduce the work. SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object of the present invention is to provide a slit type coating apparatus which adjusts a discharge port gap by transmitting power by surface contact pressure. Thereby improving operability and operational stability. In order to achieve the above object, the present invention provides a slit coating apparatus comprising: a working surface on which a coating liquid is applied to a substrate; and a nozzle body having a slit type ejection port, and a side fixed to the work surface; a pressurizing block that is sandwiched inside the guide groove, and the guide groove is formed at one side of the nozzle body discharge port; and a surface contact portion formed on the pressurizing block a side surface, and in a state of being in inclined contact with one side of the inner surface of the guide groove, a contact pressure in the up and down direction is generated in the guide groove by moving the pressurizing block; an adjusting portion, and the pressurizing The block is screwed, and the contact pressure is moved by moving the pressing block in the oblique direction of the surface contact portion or the photographing of the second port of 2008084,061, and the gap can be adjusted to be stable: The surface contact portion generates a pressure such that the discharge side portion bends and deforms the light a, the λ shape toward the other side toward or in the opposite direction. Lithographic printing: Ben::3: 'When the flat panel display substrate is used for manufacturing, it is possible to easily adjust the ejection gap of the nozzle. In particular, when adjusting the ejection orifice gap, the present invention can be performed by using force =! Adjustment. In other words, the adjusting portion of the bolt is transmitted through the contact surface of the pressing block and the guide groove, and the transfer pressure is transmitted. Therefore, it is not only easy to operate, but also two or two can be prevented from being caused by vibration and shock.父 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Enter the Ming Dynasty. Since the example of the present invention in the form of each wire and basket R can be realized in various forms, the claims of the present invention. The water rail circumference is not limited to the following specific embodiment. Fig. 1 is a % of the slit coating in the present invention. Schematic diagram of the overall structure of the clothing store, Figure 2 shows the nozzle body. The nozzle body 2 has a rectangular parallelepiped shape, m and is suitable for conventional slit coating, and is fixed on the support table M1 disposed on the side of the wheel on the side of the wheel as shown in FIG. 1 to pass through the conveyor. The λ/Γ ff ^ ^, 裒 “ 轮 轮 轮 平板 平板 平板 轮 轮 轮 轮 轮 平板 平板 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板The coating operation of the photosensitive liquid w. 7 200808461 W The elongated slit, the metal with excellent money (the spray body 2' has a slit type Mn N for discharging the photosensitive liquid, which makes the material durability and corrosion resistant material 。 斤 喷 喷 喷 喷 喷 喷 斤 斤 喷 喷 喷 喷 喷 斤 斤 斤 斤 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷 喷The storage tank T obtains the photosensitive liquid w. As shown in the figure, the end of the discharge port N is formed with a discharge gap.

爲了此夠均勻噴出感光液w，整個狹縫狀 N的間隙寬度均等。 、 所述喷驚本體2，透過調整所述噴出間隙N1的寬度， 來調節感光液W的喷出量。 所述噴出間隙犯’可透過精細加工，亦即，蝕刻加工 或者激光加工等方法來形成。 、另外」在所述噴嘴本體2上，設有用來調整所述噴出 間隙N1寬度的加壓塊4,所述加壓塊4失在形成於喷嘴本 體2 —側的導槽6内。 6内 如圖三所示，所述加壓4呈塊狀，且爽在所述導槽 ，並且在沿所述噴出間隙N1切開方向的多個位置上，9 可安裝至少-個加壓塊。所述加壓塊由耐久性及耐磨性優 異的金屬材料製成。 沿所述噴出 。所述導槽 Π 〇 部’所述面 如圖二所示，可在喷出間隙N1的一側， 的切開方向隔開形成一個或兩個以上導样6 的大小適用於夾住加壓塊4，且其一侧向外開 另外，所述加壓塊4的一側形成有面接觸 8 200808461 接觸部具有傾*面。纟發明彳透過在所述面接觸部産生的 面接觸壓力來調整噴出間隙N1。 爲此，如圖一所示，本具體實施例在所述加壓塊4上 面形成傾斜面8，而所述傾斜面8傾斜地與所述導槽6的 上表面F面接觸，當所述加壓塊4移動時，透過所述傾斜 面8傳達面接觸壓力，以調整所述噴出間隙。 如圖四所示，當所述加壓塊4在所述傾斜面8與所述 導槽6的上表面F相接的狀態下，在朝著所述導槽6的開 I5矛夕動犄産生面接觸壓力，而向反方向移動時不産生接 觸壓力。 而且，如圖五所示，由所述傾斜面8的面接觸壓力而 産生的調整壓力Q，向所述導槽6的上下方向傳達。 亦即，所産生的調整壓力Q，使所述噴嘴本體2 一側 彎曲變形，從而使所述喷出間隙N1的一側向另一側靠近 或者向其反方向移動。 在所述喷嘴本體2上没有调整部1〇，其在所述導槽$ 内部調整所述加壓塊4的面接觸位置。所述調整部ι〇透 過螺栓的結合力來改變所述加壓塊4的位置。 爲此，在本具體實施例中，如圖二所示，所述調整部 1〇使用由螺桿部B1和螺帽B2構成的常規螺栓，而所述 螺桿部B1與所述加壓塊4按圖示方式螺接，並透過旋擰 所述螺帽B2’使加壓塊4沿著所述螺桿部Bl的轴線移動， 從而改變所述加壓塊4的位置。 所述調整部10可使用耐磨性優異的金屬螺栓，而所述 9 200808461 螺桿部B1的外柱面形成有右螺紋或左螺紋。 而且，所述調整部10可使用螺帽B2爲六角型或四角 型，或者是多角型内凹槽狀的普通螺栓，以便用扳鉗或螺 絲刀等各種工具旋擰。 如圖二所示，所述調整部〗〇固定設置在托架丨2上， 並且被所述托架12牦掛在噴嘴本體2上。如圖所示，所 述托架12具有水平部V1和豎直部V2。所述水平部v 1插 入於所述導槽6内並用螺栓固定，其適用於支撐所述加壓 籲 塊4的底面。所述豎直部V2與所述噴嘴本體2的一側相 接觸’且遮蓋所述導槽6的開口部，而所述調整部1 〇的 螺桿部B1貫穿所述豎直部V2後，所述螺帽b2則如圖所 示般托掛在托架12的外侧。 托架12使用耐久性及耐磨性優異的金屬材料製成。所 述托架12托住调整部10 ’以使其在所述噴嘴本體2上能 夠穩定地操作。 所述調整部10,可透過在某一方向或其反方向旋擰所 _ 述螺帽B2，來改變加壓塊4在所述導槽6内的位置，因此， 能夠適當地調整所述傾斜面8所産生的調整壓力Q。 如上所述，本發明具體實施例所涉及的狹缝式塗敷裝 置，如圖六所示’透過旋摔所述調整部1 〇，來改變所述加 壓塊4的位置，並透過這種操作，使上述噴出口 n的某一 側彎曲變形。本發明透過這種間接調整方式，能夠簡單地 調整喷嘴的切口間隙N1。 如上所述，這種利用加壓塊4的間接調整方式，與以 10 200808461 往利用螺栓的螺距， 寬的直接調整方式 =緊螺拴而使喷出間隙變窄或變 力，並且能夠對p」比’忐夠容易控制用於調整間隙的壓 及操作穩=對間隙進行微調，從而進一步提高可操作性 上表=在！出間隙N1被調整的狀態下，加壓塊4的 向解除接:===生欲將所述加壓塊4沿傾斜面8 下拉緊所述調整部i。:亦：作? 並在該作用力的作用 之後，能夠|L | k種結構在调整噴出間隙N1 等原二竿止所述調…^ 態。 方向㈣’以維持噴出間隙m的調整狀 根二=示’對基板G塗敷感光液"，可In order to uniformly discharge the photosensitive liquid w, the gap width of the entire slit-like N is uniform. The squirting body 2 adjusts the discharge amount of the photosensitive liquid W by adjusting the width of the discharge gap N1. The discharge gap can be formed by fine processing, that is, etching or laser processing. Further, the nozzle body 2 is provided with a pressurizing block 4 for adjusting the width of the discharge gap N1, and the pressurizing block 4 is lost in the guide groove 6 formed on the side of the nozzle body 2. As shown in FIG. 3, the pressurization 4 is in the form of a block and is cool in the guide groove, and at a plurality of positions along the cutting direction of the discharge gap N1, 9 can be installed with at least one pressurizing block. . The pressurizing block is made of a metal material excellent in durability and wear resistance. Spray along the above. The surface of the guide groove 〇 ′′ is shown in FIG. 2, and one or more guides 6 are formed on the side of the discharge gap N1 in the cutting direction to be suitable for clamping the pressing block. 4, and one side of the opening block is opened, and one side of the pressing block 4 is formed with a surface contact 8 200808461 The contact portion has a tilting surface. The 纟 invention adjusts the discharge gap N1 by the surface contact pressure generated at the surface contact portion. To this end, as shown in FIG. 1, the specific embodiment forms an inclined surface 8 on the pressing block 4, and the inclined surface 8 is obliquely in contact with the upper surface F of the guiding groove 6, when the adding When the compact 4 moves, the surface contact pressure is transmitted through the inclined surface 8 to adjust the discharge gap. As shown in FIG. 4, when the pressing block 4 is in contact with the upper surface F of the guide groove 6 in the state in which the inclined surface 8 is in contact with the upper surface F of the guide groove 6, the opening I5 toward the guide groove 6 is swayed. The surface contact pressure is generated, and the contact pressure is not generated when moving in the reverse direction. Further, as shown in Fig. 5, the adjustment pressure Q generated by the surface contact pressure of the inclined surface 8 is transmitted to the vertical direction of the guide groove 6. That is, the generated adjustment pressure Q causes the nozzle body 2 to be bent and deformed such that one side of the discharge gap N1 approaches the other side or moves in the opposite direction. There is no adjustment portion 1 on the nozzle body 2, which adjusts the surface contact position of the pressurizing block 4 inside the guide groove $. The adjustment portion ι changes the position of the pressurizing block 4 by the bonding force of the bolt. To this end, in the present embodiment, as shown in FIG. 2, the adjusting portion 1 uses a conventional bolt composed of a screw portion B1 and a nut B2, and the screw portion B1 and the pressing block 4 are pressed. The screwing is illustrated, and the pressing block 4 is moved along the axis of the screw portion B1 by screwing the nut B2', thereby changing the position of the pressing block 4. The adjustment portion 10 can use a metal bolt excellent in wear resistance, and the outer cylinder surface of the screw portion B1 of the 9 200808461 is formed with a right thread or a left thread. Further, the adjusting portion 10 may be a hexagonal or quadrangular type using the nut B2, or a polygonal bolt-like ordinary bolt for screwing with various tools such as a wrench or a screwdriver. As shown in FIG. 2, the adjustment portion is fixedly disposed on the bracket 丨2, and is hung on the nozzle body 2 by the bracket 12. As shown, the carriage 12 has a horizontal portion V1 and a vertical portion V2. The horizontal portion v 1 is inserted into the guide groove 6 and bolted, and is adapted to support the bottom surface of the pressurizing portion 4. The vertical portion V2 is in contact with one side of the nozzle body 2 and covers an opening portion of the guide groove 6, and the screw portion B1 of the adjustment portion 1 贯穿 passes through the vertical portion V2. The nut b2 is attached to the outside of the bracket 12 as shown. The bracket 12 is made of a metal material excellent in durability and wear resistance. The bracket 12 holds the adjustment portion 10' so that it can be stably operated on the nozzle body 2. The adjustment portion 10 can change the position of the pressurizing block 4 in the guide groove 6 by screwing the nut B2 in a certain direction or in the opposite direction. Therefore, the tilt can be appropriately adjusted. The adjustment pressure Q generated by the face 8. As described above, the slit coating apparatus according to the embodiment of the present invention changes the position of the pressurizing block 4 by rotating the adjusting portion 1 所示 as shown in FIG. The operation is such that one side of the discharge port n is bent and deformed. The present invention can easily adjust the slit gap N1 of the nozzle by this indirect adjustment method. As described above, the indirect adjustment method using the pressurizing block 4 and the pitch of the bolt using 10 200808461, the wide direct adjustment method = tightening the screw to make the discharge gap narrow or variable, and can be p It is easier to control the pressure for adjusting the gap and the operation is stable than the 'sufficient' = fine adjustment of the gap to further improve the operability on the table = in! In a state where the clearance gap N1 is adjusted, the direction of the pressurizing block 4 is released: === The pressurizing block 4 is pulled down the inclined portion 8 to close the adjustment portion i. : Also: for? And after the action of the force, the |L | k kinds of structures can be adjusted by adjusting the discharge gap N1 and the like. Direction (4)' to maintain the adjustment of the ejection gap m. The root 2 = indicates that the substrate G is coated with the photosensitive liquid "

Ni。 口 〇，適虽調整噴出間隙 【圖式簡單說明】 圖。圖—係為本發明的狹縫式塗敷裝置的整體結構示意 圖，係為圖一所示喷嘴本體的結構示意圖。 圖三係為圖二所示加壓塊及導槽的結構示意圖。 :::為圖三所示加屢塊與導槽的結合狀態示意圖。 ==用以說明圖二所示面接觸部作用的示意圖。 圖/、料用以㈣本發明狹縫式塗 調整方式的示意圖。 置μ出間惊 【主要元件符號說明】 200808461 2 :喷嘴本體 4 :加壓塊 6 :導槽 8 :傾斜面 10 :調整部 12 :托架 G :基板 W :感光液 N :喷出口 Μ :輸送裝置 Ml :支撐台 L ··供給管 T :儲存槽 F ··上表面 N1 :喷出間隙 B1 :螺桿部 B2 :螺帽 VI :水平部 V2 :豎直部 Q :調整壓力 12Ni.口 〇, adjust the ejector gap [simplified diagram] Figure. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the entire structure of a slit coating apparatus of the present invention, which is a schematic view of the structure of the nozzle body shown in Fig. 1. Figure 3 is a schematic view showing the structure of the pressing block and the guiding groove shown in Figure 2. ::: is a schematic diagram of the combined state of the additional block and the guide groove shown in FIG. == is used to illustrate the effect of the surface contact shown in Figure 2. Figure /, material used for (d) schematic diagram of the slit coating adjustment method of the present invention.置μ出惊惊 [Main component symbol description] 200808461 2 : Nozzle body 4 : Pressurizing block 6 : Guide groove 8 : Inclined surface 10 : Adjustment portion 12 : Bracket G : Substrate W : Photosensitive liquid N : Ejection port Μ : Conveying device M1: support table L · · supply pipe T : storage tank F · upper surface N1 : discharge gap B1 : screw portion B2 : nut VI : horizontal portion V2 : vertical portion Q : adjustment pressure 12

Claims (1)

200808461 十、申請專利範圍： 1. 一種狹縫式塗敷裝置，包括： 工作臺， 噴嘴本體 臺面的一侧； 其工作臺面上進行對基板的感光液塗敷作業； ’其具有狹縫式噴出口，且固定在所述工作 所述導槽形成在所述喷 加塊，其被夾入導槽内侧 鳴本體贺出口的一側； 、,·面接觸部’其形成於加壓塊的一侧表面，並且在與所 述導槽内表面的一側傾斜接觸的狀態下，透過移動加壓塊 在所述導槽内產生上下方向的接觸壓力； L调整部’其與所述加壓塊螺接，並透過使所述加壓塊 沿所述面接觸部的傾斜方向前進或後退，在所述面接觸部 f生壓力，從而使所述噴出口的一側彎曲變形並向另一側 罪近或者向其反方向移動。 2·申請專利範圍第丨項所述之狹縫式塗敷裝置，其中，200808461 X. Patent application scope: 1. A slit coating device comprising: a working table, one side of a nozzle body surface; a working surface of the photosensitive liquid on the working surface; 'there is a slit spray An outlet, and fixed in the work, the guide groove is formed in the spray block, and is sandwiched into a side of the guide groove to illuminate the body outlet port; and, the surface contact portion is formed in the pressurization block a side surface, and in a state of being in inclined contact with one side of the inner surface of the guide groove, a contact pressure in the up and down direction is generated in the guide groove through the moving pressurizing block; the L adjustment portion 'which is opposite to the pressurizing block Screwing, and by advancing or retreating the pressing block in the oblique direction of the surface contact portion, generating pressure at the surface contact portion f, thereby bending one side of the discharge port to the other side Sin is near or moving in the opposite direction. 2. The slit coating device according to the invention of claim 2, wherein 所述面接觸部，傾斜地形成在所述加壓塊的上面或下面， 或者上下兩面。 3 _申睛專利範圍第1項所述之狹縫式塗敷裝置，在^ 所述噴出口切開方向的至少一個位置上，設置一個加壓二 或者隔開設置至少兩個加壓塊。 4 ·申请專利範圍第1項所述之狹縫式塗敷裝置，進一 V匕括用於襯托調整部的托架，而在前後移動加壓塊時， 所述把架托住並固定調整部，使其在所述喷嘴本體中一個 特定方向上維持懸掛狀態。 13 200808461 5.申請專利範圍第1項所述之狹缝式塗敷裝置，其中 所述導槽，形成在沿喷出口切開方向的至少一處位置上。 十一、圖式： 如次頁The surface contact portion is formed obliquely above or below the pressurizing block, or both upper and lower sides. In the slit coating apparatus according to the first aspect of the invention, at least one position of the discharge port in the cutting direction is provided with a pressurization two or at least two pressurizing blocks. 4. The slit coating apparatus according to claim 1, wherein the V is included in the bracket for arranging the adjusting portion, and when the pressing block is moved forward and backward, the bracket holds and fixes the adjusting portion. It is maintained in a suspended state in a particular direction in the nozzle body. The slit coating apparatus according to claim 1, wherein the guide groove is formed at at least one position along a cutting direction of the discharge port. XI. Schema: as the next page 1414
TW096114381A 2006-08-09 2007-04-24 Slit coater TWI322715B (en)

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