1322715 九、發明說明： 【發明所屬之技術領域】 本發明涉及一種狹縫式塗敷裝置’具體地涉及一種適 用於透過狹縫塗敷方式在平板顯示器用基板上塗敷照相平 版印刷術用光致抗蝕劑等感光液的塗敷作業，並且易於調 整喷嘴切口間隙，從而提高塗敷品質的狹縫式塗敷裝置。 【先前技術】 通常，平板顯示器用基板的製造工藝中，在基板表面 形成預定圖案的工序，主要係以照相平版印刷方式來進 行。 所述照相平版印刷方式，包括在基板表面塗覆一定厚 度的光致抗㈣等感光物冑、以及對塗敷面進行曝光顯 影、触刻等一系列工序。 尤其是，上述塗敷工庠虐、X m k 序廣泛使用具有狹縫式噴出口的 塗敷裝置，而所述塗敷裝晋 发罝文裝有可調整噴嘴噴出口間隙1322715 IX. OBJECTS OF THE INVENTION: 1. The present invention relates to a slit coating apparatus', and more particularly to a method for coating photolithography on a substrate for a flat panel display by slit coating. A slit coating apparatus that improves the coating quality by applying a photosensitive liquid such as a resist and easily adjusting the nozzle slit gap. [Prior Art] In the manufacturing process of a substrate for a flat panel display, a process of forming a predetermined pattern on the surface of the substrate is mainly carried out by photolithography. The photolithography method includes coating a surface of a substrate with a certain thickness of photoreceptor (tetra), and a series of processes such as exposure development and engraving on the coated surface. In particular, the above-mentioned coater raging, X m k sequence widely uses a coating device having a slit type discharge port, and the coating package is equipped with an adjustable nozzle discharge port gap.
的間隙調整裝置。這種間隙調整裝置，—般採用透過螺检 的栓緊力來調整喷出間隙的螺桿調整方式，以及利用流體 壓力來調整噴出間隙的油壓調整方式等。 而上述採用油壓調整方式 式的調整裝置，雖然易於調整 喷出間隙’但是其價格昂貴， r貝而且經過一段時間以後，流 體壓力容易發生變化，因此黨I ^ . 南要隨時調整流體壓力，無法 獲得令人滿意的操作穩定性。 另外，上述採用螺桿調整 + 万式的調整裝置，在噴嘴的 一側，·/口者噴出口切開方向的 丨、 、 —處位置上安裝貫通喷 :間：的螺检’並透過旋擰螺栓以螺栓 二因此所述結構很難對幾十微米（ :、來調整間 行微調。 ）以下的間隙進 並且，調整間隙之後，在塗敷裝置 於受靈卞業過程中，忐 和壓力的影響，螺栓的擰固狀 會出現間吟田一 tU狀態合易發生變化， ]丨糸調整誤差。因此，這種利用 調整間隙的方彳 ” 4的螺距來直接 性。 人滿意的可操作性和操作穩定 爲产：別是’這兩種調整方式所具有的上述問冑，將會成 因^過多不良産品而降低卫作效率和生産效率的主要原 【發明内容】 本發明馨於上述問題而作…的在於提供一種狹縫 式塗敷裝置’該裝置透過以面接觸壓力傳達動力之方式來 調整噴出口間隙，從而改進可操作性及操作穩定性。 爲實現上述目的，本發明提供一種狹縫式塗敷裝置， 其包括：工作臺’其工作臺面上進行對基板塗敷感光液的 塗敷作業；喷嘴本體，其具有狹縫式噴出口，且固定在所 述工作臺面的一側；加壓塊，其被夾入導槽内側，而所述 導槽形成在所述喷嘴本體噴出口的一側；面接觸部，其形 成於加壓塊的一侧表面，並且在與所述導槽内表面的一側 傾斜接觸的狀態下，透過移動加壓塊而在所述導槽内産生 上下方向的接觸壓力；調整部，其與所述加壓塊螺接，並 透過使所述加壓塊沿所述面接觸部的傾斜方向前進或後 1322715 退，而在所述面接觸部產生壓 侧部彎曲變形並向另-側靠近戈^而使所迷喷出口的一 w罪近或向其反方向移動。 平版Π本在進行用於製造平板顯示器基板的照相 千版P刷工藝時，能夠簡單地調整噴嘴的喷出間隙。 尤其是’在調整嘴出口間陴拉 力值，查w A 間隙時，本發明可採用間接動 力傳達方式來進行調整n 加厘塊時，透過加塵塊與導槽的接調整部來移動 .^ 接觸面所産生的面接箱邀 Λ産生及傳遞調整壓力。因此 微碉H 1¾ ® At 僅易於麵作，而且能夠 镟凋間隙，還能防止由於震動和 整狀態的變化，從而可進一步提t擊專原因而造成間隙調 等。 阿可操作性和操作穩定性 【實施方式】 下述係參照附圖說明本發明的 所屬/¾ i 佳八體貫施例，並在 斤屬項域的技術人員能夠實施本 進行說明。由於本發明的具體實體實施例的範圍内 細，因此本發明的權利要求 #種形式實 例β 圍並不限於下述具體實施 圖一是本發明狹縫式塗敷裝 中符號2表示喷嘴本體。 $整體結構示意圖，圖 噴嘴本體2呈長方體，以適 g , 於進仃常規的狹縫塗數， 且如圖一所示固定在設置於輸送 ㈣縫堂敷 上，以便在透過所述輸送裝置 ：側的支撐台Ml (以下簡稱爲“基板”）的過程中：：板顯示器用基Β 液W的塗敷作業。 作光致抗蝕劑等感光 1322715 所述嗔嘴本體2,具有用於喷出感光液W的細長切口， 即狭縫式喷出口 N，其使用耐久性及耐腐蝕性優異的金屬 材料製成。Gap adjustment device. Such a gap adjusting device generally employs a screw adjusting method for adjusting a discharge gap by a bolting force of a screw check, and a hydraulic pressure adjusting method for adjusting a discharge gap by using a fluid pressure. However, the above-mentioned oil pressure adjustment type adjustment device is easy to adjust the discharge gap', but its price is expensive, and after a period of time, the fluid pressure is liable to change, so the party I ^. South should adjust the fluid pressure at any time. Unsatisfactory operational stability is not obtained. In addition, the above-mentioned screw adjustment + 10,000 type adjustment device is used to install a through-spray at the position of the nozzle at the side of the nozzle, and at the position of the nozzle opening and closing direction: With the bolts two, the structure is difficult to tens of micrometers (:, to adjust the inter-row fine-tuning.) The gap below and after adjusting the gap, the influence of the helium and pressure in the coating device during the process of receiving the industry The tightening of the bolt will occur when the tU state of the field is changed, and the error is adjusted. Therefore, the pitch of the square using the adjustment gap is straightforward. The operability and stability of the operation are satisfactory for the production: the above-mentioned questions of the two adjustment methods will cause the cause too much. The main reason for reducing the efficiency and production efficiency of the defective product is that the present invention is capable of adjusting the above problem by providing a slit coating device which adjusts the power by the surface contact pressure. The discharge port gap is improved to improve operability and operational stability. To achieve the above object, the present invention provides a slit type coating apparatus comprising: a workbench' surface on which a substrate is coated with a photosensitive liquid a nozzle body having a slit type discharge port and fixed to one side of the work surface; a pressurizing block which is sandwiched inside the guide groove, and the guide groove is formed at the nozzle body discharge port a side contact portion formed on one side surface of the pressing block, and in a state of being in inclined contact with one side of the inner surface of the guide groove, moving through the pressing block a contact pressure in the vertical direction is generated in the guide groove; the adjusting portion is screwed to the pressing block, and the pressing block is advanced in the oblique direction of the surface contact portion or the rear 1322715 is retracted. The surface contact portion generates a bending deformation of the pressure side portion and moves closer to the other side to cause the sin of the squirting port to move toward or in the opposite direction. The lithographic transcript is used to manufacture a photographic version for the manufacture of the flat panel display substrate. In the P brushing process, the discharge gap of the nozzle can be easily adjusted. Especially when the value of the tension between the outlets of the nozzle is adjusted, and the gap is checked, the indirect power transmission method can be used to adjust the n-plus-block. Move through the adjustment section of the dust block and the guide groove. The contact box generated by the contact surface generates and transmits the adjustment pressure. Therefore, the H 13⁄4 ® At is easy to face and can withstand the gap. Preventing the change of the vibration and the whole state, so that the special cause can be further caused to cause the gap adjustment, etc. A operability and operational stability [Embodiment] The following describes the invention of the present invention with reference to the accompanying drawings. The present invention will be described by those skilled in the art and can be practiced by those skilled in the art. Since the scope of the specific physical embodiment of the present invention is fine, the present invention is not limited to the following examples. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT Figure 1 is a schematic view of a nozzle body in the slit type coating device of the present invention. The overall structure of the nozzle body 2 is a rectangular parallelepiped body, which is suitable for g, and the number of conventional slit coatings is as shown in Fig. 1. The fixing is provided on the transport (four) seam so as to pass through the support table M1 (hereinafter referred to as "substrate") on the side of the transport device:: the coating operation of the plate display with the base liquid W Photosensitive 1322715 as a photoresist, the mouthpiece body 2 has an elongated slit for ejecting the photosensitive liquid W, that is, a slit type discharge port N, which is made of a metal material excellent in durability and corrosion resistance. to make.
所述喷出口 Ν’從連接在所述喷嘴本體2 —側的供給 管L接收感光液而且，所述供應管L與儲存有感光液 W的儲存槽Τ相連接，以便從所述儲存槽τ獲得感光液We 如圖二所示，所述喷出口 N的端部形成有噴出間隙 N1，而且爲了能夠均勻噴出感光液w，整個狹縫狀喷出口 N的間隙寬度均等。 所述喷嘴本體2，透過調整所述噴出間隙Νι的寬度， 來調節感光液W的喷出量。 所述噴出間隙N1，可透過精細加工，亦即，飾刻加工 或者激光加工等方法來形成。 另外，在所述噴嘴本體2上，設有用來調整所述噴出 間隙N1寬度的加壓塊4,所述加壓塊4夾在形成於噴嘴本 體2 —側的導槽6内。 如圖三所示，所述加壓塊4呈塊狀，且夾在所述導槽 6内，並且在沿所述喷出間隙N1切開方向的多個位置上， 可安裝至少一個加壓塊。所述加壓塊由耐久性及耐磨性優 異的金屬材料製成。 如圖二所示，可在噴出間隙N1的一側沿所述噴出 口的切開方向隔開形成一個或兩個以上導槽6。所述導槽 6的大小適用於夾住加壓塊4，且其一側向外開口。 另外，所述加壓塊4的一侧形成有面接觸部，所述面The discharge port Ν' receives a photosensitive liquid from a supply pipe L connected to the nozzle body 2 side, and the supply pipe L is connected to a storage tank ??? in which the photosensitive liquid W is stored, so as to be from the storage tank τ The photosensitive liquid We are obtained. As shown in FIG. 2, the discharge gap N1 is formed at the end of the discharge port N, and the gap width of the entire slit-shaped discharge port N is equal in order to uniformly discharge the photosensitive liquid w. The nozzle body 2 adjusts the discharge amount of the photosensitive liquid W by adjusting the width of the discharge gap Ν. The discharge gap N1 can be formed by fine processing, that is, a process such as embossing or laser processing. Further, the nozzle body 2 is provided with a pressurizing block 4 for adjusting the width of the discharge gap N1, and the pressurizing block 4 is sandwiched in a guide groove 6 formed on the side of the nozzle body 2. As shown in FIG. 3, the pressing block 4 is in the form of a block and is sandwiched in the guiding groove 6, and at least one pressing block can be installed at a plurality of positions in the cutting direction along the ejection gap N1. . The pressurizing block is made of a metal material excellent in durability and wear resistance. As shown in Fig. 2, one or two or more guide grooves 6 may be formed at intervals along the cutting direction of the discharge port on the side of the discharge gap N1. The guide groove 6 is sized to sandwich the pressurizing block 4 and has one side open to the outside. In addition, one side of the pressing block 4 is formed with a surface contact portion, the surface
8 1322715 接觸部具有傾斜面。本發明可透過在所述面接觸部産生的 面接觸壓力來調整喷出間隙N1。 爲此，如圖二所示，本具體實施例在所述加壓塊4上 面形成傾斜面8，而所述傾斜面8傾斜地與所述導槽6的 上表面F面接觸’當所述加壓塊4移動時，透過所述傾斜 面8傳達面接觸壓力，以調整所述噴出間隙ni。 如圖四所示，當所述加壓塊4在所述傾斜面8與所述 導槽6的上表面F相接的狀態下’在朝著所述導槽6的門 口部移動時産生面接觸壓力’而向反方向移動時不產生接 8的面接觸壓力而 下方向傳達。 而且，如圖五所示，由所述傾斜面 産生的調整壓力Q，向所述導槽6的上 使所述噴嘴本體2 —側 N1的一側向另一側靠近 亦即，所產生的調整壓力Q 彎曲變形，從而使所述噴出間隙 或者向其反方向移動。 部10,其在所述導槽6 置。所述調整部1 〇透 4的位置。8 1322715 The contact has an inclined surface. According to the present invention, the discharge gap N1 can be adjusted by the surface contact pressure generated at the surface contact portion. To this end, as shown in FIG. 2, the present embodiment forms an inclined surface 8 on the pressing block 4, and the inclined surface 8 is obliquely in contact with the upper surface F of the guiding groove 6' When the compact 4 moves, the surface contact pressure is transmitted through the inclined surface 8 to adjust the discharge gap ni. As shown in FIG. 4, when the pressing block 4 is in contact with the upper surface F of the guide groove 6 in the state where the inclined surface 8 is in contact with the upper surface F of the guide groove 6, a surface is generated when moving toward the door opening portion of the guide groove 6. When the contact pressure is moved in the opposite direction, the surface contact pressure of the joint 8 is not generated and the lower direction is transmitted. Further, as shown in FIG. 5, the adjustment pressure Q generated by the inclined surface is caused to approach the side of the guide body 6 to the other side of the side of the nozzle body 2, that is, the resulting pressure is generated. The pressure Q is adjusted to be deformed so that the discharge gap moves in the opposite direction. The portion 10 is disposed in the guide groove 6. The adjustment unit 1 passes through the position of 4.
在所述噴嘴本體2上設有調整 内部調整所述加壓塊4的面接觸位 過螺检的結合力來改變所述加壓塊 爲此’在本具體實施例中’如圖二所示，所述調整部 10使用由螺桿部B1和螺帽B2構 摁埕卹S *現螺检’而所述 述加壓塊4按圖示方式螺接，並透過旋摔 所“螺帽B2,使加壓塊4沿著所述螺桿部 ： 從而改變所述加壓塊4的位置。 釉嗥移動 所述調整部H)可使料磨性優異的金屬螺检，而所述 1322715 螺桿部B1的外柱轉成有右螺紋或左螺紋。 而且，所述調整部10可使用螺帽B2爲六角型或四角 型，或者是多角型内凹槽狀的普通螺检，以便用板细或螺 絲刀等各種工具旋擰。 ’、 如圖二所示，所述調整部10固定設置在托架12上， 並且被所述托架12缺在喷嘴本體2上。如圖所示，所 述托架12具有水平部V1和暨直部V2。所述水平部V1插 入於所述導槽6内並用螺检固定，其適用於支樓所述加壓 塊4的底面。所述賢直部V2與所述喷嘴本體2的—側相 接觸，且遮蓋所述導槽6的開口部，而所述調整部1〇的 螺桿部B1貫穿所述賢直部”後，所述螺帽…則如圖所 示般托掛在托架12的外側。 托架12使用财久性及耐磨性優異的金屬材料製成。所 述托架12托住調整冑10，以使其在所述喷嘴本冑2上能 夠穩定地操作。 ％ 所述調整部H)，可透過在某—方向或其反方向旋摔所 述螺帽B2,來改變加壓塊4在所述導槽6内的位置，因此， 能夠適當地調整所述傾斜面8所產生的調整壓力q。 如上所述，本發明具體實施例所涉及的狹缝式塗敷裝 置，如圖六所示’透過旋擰所述調整冑1〇，來改變所述加 麼塊4的位置’並透過這種操作，使上述喷…的竿一 側f曲變形。本發明透過這種間接調整方式，能夠簡單地 調整喷嘴的切口間隙N1。 如上所述，這種利用加壓塊4的間接調整方式，與以The nozzle body 2 is provided with a bonding force for adjusting the surface contact position of the pressing block 4 to adjust the pressing force to change the pressing block for this purpose in the present embodiment as shown in FIG. The adjusting portion 10 uses the screw portion B1 and the nut B2 to configure the shirt S* to be screwed out', and the pressing block 4 is screwed as shown in the figure, and passes through the screw "the nut B2," The pressing block 4 is placed along the screw portion: thereby changing the position of the pressurizing block 4. The glaze moves the adjustment portion H) to enable metal screw inspection with excellent grindability, and the 1322715 screw portion B1 The outer column is converted into a right-hand thread or a left-hand thread. Moreover, the adjusting portion 10 can be a hexagonal or quadrangular type using the nut B2, or a general thread-like inspection of the polygonal inner groove shape, so as to use a thin plate or a screwdriver. And various tools are screwed. 'As shown in Fig. 2, the adjustment portion 10 is fixedly disposed on the bracket 12, and is missing by the bracket 12 on the nozzle body 2. As shown, the bracket 12 has a horizontal portion V1 and a straight portion V2. The horizontal portion V1 is inserted into the guide groove 6 and fixed by screwing, which is suitable for a branch building a bottom surface of the pressing block 4. The straight portion V2 is in contact with the side of the nozzle body 2, and covers an opening portion of the guiding groove 6, and the screw portion B1 of the adjusting portion 1〇 penetrates the straight portion After the "part", the nut... is hung on the outside of the bracket 12 as shown. The bracket 12 is made of a metal material excellent in durability and wear resistance. The bracket 12 holds the adjustment knob 10 so that it can be stably operated on the nozzle body 2. % The adjustment portion H) can change the position of the pressurizing block 4 in the guide groove 6 by rotating the nut B2 in a certain direction or in the opposite direction, so that the adjustment portion can be appropriately adjusted The adjustment pressure q generated by the inclined surface 8. As described above, in the slit coating apparatus according to the embodiment of the present invention, as shown in FIG. 6, 'the position of the adding block 4' is changed by screwing the adjustment 胄1〇 The operation causes the 竿 side of the spray to be deformed. The present invention can easily adjust the slit gap N1 of the nozzle by this indirect adjustment method. As described above, this indirect adjustment method using the pressurizing block 4
10 往利用螺栓的螺矩， 寬的直接調整方目，過拾緊螺栓而使喷出間隙變窄或變 力，並且能夠對間:能夠容易控制用於調整間隙的屋 及操作穩定性。 ^'微調’從而進—步提高可操作性 上表二外二在噴出間隙N1被調整的狀態下，加屋塊4 上表面和底面受播 莹塊4的 向解除接觸力的：=生欲將所述加…沿傾斜面8 下拉緊所述調整=Γ作用力，並在該作用力的作用 之後，能夠最大限产地π，括種結構在調整喷出間隙N1 等原因而向防止所述調整部10受震動或衝擊 離。 向㈣，以維持喷出間隙m的調整狀 因此’如圖一所 根據塗敷要求而利用 N1。 示，對基板G塗敷感光液你時，可 所述調整部1 〇，適當調整噴出間隙 【圖式簡單說明】 圖一係為本發明的狹縫式塗敷裝置的整體結構示意 圖0 圖二係為圖一所示喷嘴本體的結構示意圖。 圖二係為圖二所示加壓塊及導槽的結構示意圖。 圖四係為圖三所示加壓塊與導槽的結合狀態示意圖。 圖五係為用以說明圖二所示面接觸部作用的示意圖。 圖六係為用以說明本發明狹縫式塗敷裝置的嘴出間隙 調整方式的示意圖。 【主要元件符號說明】 1322715 2 :喷嘴本體 4 :加壓塊 6 :導槽 8 :傾斜面 1 0 :調整部 1 2 :托架 G :基板 W :感光液 N :喷出口 Μ:輸送裝置 Ml :支撐台 L :供給管 T :儲存槽 F :上表面 N1 :喷出間隙 B1 :螺桿部 B2 :螺帽 V1 :水平部 V2 :豎直部 Q :調整壓力 1210 To use the bolt's screw moment, the width of the direct adjustment, the tightening of the bolt to narrow or increase the discharge gap, and the ability to easily control the room and operational stability for adjusting the gap. ^ 'fine tuning' and then step by step to improve the operability. In the state where the ejection gap N1 is adjusted, the upper surface and the bottom surface of the roofing block 4 are subjected to the release contact force of the broadcasting block 4: Pulling the adjustment ... along the inclined surface 8 to close the adjustment = Γ force, and after the action of the force, can maximize the production area π, the seed structure is adjusted to the ejection gap N1, etc. The adjustment portion 10 is subjected to vibration or impact. To (4), the adjustment of the discharge gap m is maintained. Therefore, N1 is utilized as shown in Fig. 1 in accordance with the coating requirements. It is shown that when the photosensitive liquid is applied to the substrate G, the adjustment portion 1 can be appropriately adjusted to adjust the discharge gap. [Fig. 1 is a schematic view showing the overall structure of the slit coating device of the present invention. It is a schematic structural view of the nozzle body shown in FIG. Figure 2 is a schematic view showing the structure of the pressing block and the guiding groove shown in Figure 2. Figure 4 is a schematic view showing the combined state of the pressing block and the guide groove shown in Figure 3. Figure 5 is a schematic view for explaining the action of the surface contact portion shown in Figure 2. Fig. 6 is a schematic view for explaining the manner of adjusting the gap of the nozzle of the slit coating apparatus of the present invention. [Description of main component symbols] 1322715 2 : Nozzle body 4 : Pressurizing block 6 : Guide groove 8 : Inclined surface 1 0 : Adjustment part 1 2 : Bracket G : Substrate W : Photosensitive liquid N : Ejection port Μ: Conveying device M1 : support table L : supply pipe T : storage tank F : upper surface N1 : discharge gap B1 : screw portion B2 : nut V1 : horizontal portion V2 : vertical portion Q : adjustment pressure 12