TW200736636A - Movable probe unit and inspecting apparatus - Google Patents

Movable probe unit and inspecting apparatus

Info

Publication number
TW200736636A
TW200736636A TW096102678A TW96102678A TW200736636A TW 200736636 A TW200736636 A TW 200736636A TW 096102678 A TW096102678 A TW 096102678A TW 96102678 A TW96102678 A TW 96102678A TW 200736636 A TW200736636 A TW 200736636A
Authority
TW
Taiwan
Prior art keywords
probe
signal side
supporting
bases
blocks
Prior art date
Application number
TW096102678A
Other languages
English (en)
Other versions
TWI318303B (en
Inventor
Toshio Fukushi
Kazuyoshi Miura
Hiroki Saitoh
Original Assignee
Nihon Micronics Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Micronics Kk filed Critical Nihon Micronics Kk
Publication of TW200736636A publication Critical patent/TW200736636A/zh
Application granted granted Critical
Publication of TWI318303B publication Critical patent/TWI318303B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measuring Leads Or Probes (AREA)
  • Liquid Crystal (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
TW096102678A 2006-03-31 2007-01-24 Movable probe unit and inspecting apparatus TWI318303B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006100578A JP4989911B2 (ja) 2006-03-31 2006-03-31 可動式プローブユニット及び検査装置

Publications (2)

Publication Number Publication Date
TW200736636A true TW200736636A (en) 2007-10-01
TWI318303B TWI318303B (en) 2009-12-11

Family

ID=38674507

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096102678A TWI318303B (en) 2006-03-31 2007-01-24 Movable probe unit and inspecting apparatus

Country Status (3)

Country Link
JP (1) JP4989911B2 (zh)
KR (1) KR100906728B1 (zh)
TW (1) TWI318303B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI385402B (zh) * 2008-02-15 2013-02-11 Nihon Micronics Kk 探針單元及檢查裝置
CN112924770A (zh) * 2019-11-21 2021-06-08 科美仪器公司 不同尺寸显示板的检查装置

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101019292B1 (ko) 2008-11-27 2011-03-07 주식회사 케피코 총전류 시험용 지그
JP2011089891A (ja) * 2009-10-22 2011-05-06 Micronics Japan Co Ltd 電気的接続装置及びこれを用いる試験装置
CN102884567B (zh) * 2010-06-17 2015-01-28 夏普株式会社 点亮检查装置
KR101316826B1 (ko) * 2013-07-16 2013-10-08 주식회사 한산테크 소형 전자부품 검사용 프로브장치
KR102242643B1 (ko) * 2014-10-30 2021-04-22 주성엔지니어링(주) 유기 발광 장치
CN104407178B (zh) * 2014-11-19 2017-04-19 苏州欧康诺电子科技股份有限公司 一种pcba板测试治具
KR101857619B1 (ko) * 2016-09-20 2018-06-28 임진수 디스플레이 패널 테스트용 컨택터 시스템
KR102081611B1 (ko) * 2019-10-10 2020-02-26 우리마이크론(주) 디스플레이 패널 검사 장치
KR102157311B1 (ko) * 2020-03-03 2020-10-23 주식회사 프로이천 캠승강식 오토 프로브장치
KR102328053B1 (ko) * 2020-07-27 2021-11-17 주식회사 프로이천 컨베이어식으로 위치가 가변되는 서브피시비에 의해 메인보드를 공용화한 어레이 유닛

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3592831B2 (ja) * 1996-02-26 2004-11-24 株式会社日本マイクロニクス プローブユニット及びその調節方法
JPH11137347A (ja) * 1997-11-13 1999-05-25 Sony Corp マガジンラック
JP3480925B2 (ja) * 2000-09-12 2003-12-22 株式会社双晶テック ディスプレイパネル又はプローブブロックの支持枠体
JP2002148280A (ja) * 2000-11-08 2002-05-22 Soushiyou Tec:Kk 検査用プローブブロックの並列搭載ユニット
JP4790997B2 (ja) * 2004-03-26 2011-10-12 株式会社日本マイクロニクス プローブ装置
JP4634059B2 (ja) * 2004-03-26 2011-02-16 株式会社日本マイクロニクス プローブ組立体

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI385402B (zh) * 2008-02-15 2013-02-11 Nihon Micronics Kk 探針單元及檢查裝置
CN112924770A (zh) * 2019-11-21 2021-06-08 科美仪器公司 不同尺寸显示板的检查装置

Also Published As

Publication number Publication date
JP2007271572A (ja) 2007-10-18
JP4989911B2 (ja) 2012-08-01
KR20070098471A (ko) 2007-10-05
KR100906728B1 (ko) 2009-07-07
TWI318303B (en) 2009-12-11

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees