TW200723367A - Supporting structure for a heating element, insulating structure, heating device and substrate processing apparatus - Google Patents
Supporting structure for a heating element, insulating structure, heating device and substrate processing apparatusInfo
- Publication number
- TW200723367A TW200723367A TW095111194A TW95111194A TW200723367A TW 200723367 A TW200723367 A TW 200723367A TW 095111194 A TW095111194 A TW 095111194A TW 95111194 A TW95111194 A TW 95111194A TW 200723367 A TW200723367 A TW 200723367A
- Authority
- TW
- Taiwan
- Prior art keywords
- heating element
- power feed
- feed portions
- heating
- heat insulating
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Resistance Heating (AREA)
- Chemical Vapour Deposition (AREA)
- Furnace Details (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005277207A JP4820137B2 (ja) | 2005-09-26 | 2005-09-26 | 発熱体の保持構造体 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200723367A true TW200723367A (en) | 2007-06-16 |
TWI308364B TWI308364B (en) | 2009-04-01 |
Family
ID=37959297
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095111194A TWI308364B (en) | 2005-09-26 | 2006-03-30 | Supporting structure for a heating element, insulating structure, heating device and substrate processing apparatus |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4820137B2 (zh) |
KR (2) | KR100742451B1 (zh) |
CN (2) | CN100452291C (zh) |
TW (1) | TWI308364B (zh) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4331768B2 (ja) * | 2007-02-28 | 2009-09-16 | 東京エレクトロン株式会社 | 熱処理炉及び縦型熱処理装置 |
US8395096B2 (en) | 2009-02-05 | 2013-03-12 | Sandvik Thermal Process, Inc. | Precision strip heating element |
JP5529646B2 (ja) * | 2010-06-25 | 2014-06-25 | 株式会社日立国際電気 | 加熱装置、基板処理装置、基板処理方法及び半導体装置の製造方法 |
DE202009011719U1 (de) * | 2009-08-28 | 2010-10-21 | Eugen Forschner Gmbh | Einrichtung zur Kontaktierung eines beheizbaren Schlauchs |
JP5565188B2 (ja) * | 2010-08-10 | 2014-08-06 | 東京エレクトロン株式会社 | ヒータ装置 |
JP5686467B2 (ja) * | 2010-10-15 | 2015-03-18 | 株式会社日立国際電気 | 基板処理装置及び半導体装置の製造方法 |
JP5802052B2 (ja) * | 2011-05-19 | 2015-10-28 | 株式会社ニューフレアテクノロジー | 半導体製造装置及び半導体製造方法 |
JP5743746B2 (ja) | 2011-06-27 | 2015-07-01 | 東京エレクトロン株式会社 | 熱処理炉及び熱処理装置 |
CN103484934A (zh) * | 2012-06-11 | 2014-01-01 | 绿种子材料科技股份有限公司 | 气相沉积装置及其加热系统 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5506389A (en) * | 1993-11-10 | 1996-04-09 | Tokyo Electron Kabushiki Kaisha | Thermal processing furnace and fabrication method thereof |
JPH07253276A (ja) * | 1994-03-16 | 1995-10-03 | Tokyo Electron Ltd | 熱処理炉及びその製造方法 |
US5855675A (en) * | 1997-03-03 | 1999-01-05 | Genus, Inc. | Multipurpose processing chamber for chemical vapor deposition processes |
KR100682190B1 (ko) * | 1999-09-07 | 2007-02-12 | 동경 엘렉트론 주식회사 | 실리콘 산질화물을 포함하는 절연막의 형성 방법 및 장치 |
JP3598032B2 (ja) * | 1999-11-30 | 2004-12-08 | 東京エレクトロン株式会社 | 縦型熱処理装置及び熱処理方法並びに保温ユニット |
JP2001208478A (ja) * | 2000-01-31 | 2001-08-03 | Tokyo Electron Ltd | 熱処理装置 |
JP4267506B2 (ja) | 2001-01-11 | 2009-05-27 | 株式会社日立国際電気 | プラズマ処理装置 |
JP4350322B2 (ja) * | 2001-04-27 | 2009-10-21 | 株式会社日立国際電気 | 加熱処理装置 |
JP2003213432A (ja) * | 2002-01-24 | 2003-07-30 | Shinko Seiki Co Ltd | プラズマcvd装置用電極 |
JP3881937B2 (ja) * | 2002-07-05 | 2007-02-14 | 株式会社日立国際電気 | 半導体製造装置または加熱装置 |
JP2004221102A (ja) | 2003-01-09 | 2004-08-05 | Hitachi Kokusai Electric Inc | 基板処理装置 |
-
2005
- 2005-09-26 JP JP2005277207A patent/JP4820137B2/ja active Active
- 2005-09-30 KR KR1020050091919A patent/KR100742451B1/ko active IP Right Grant
-
2006
- 2006-03-30 TW TW095111194A patent/TWI308364B/zh active
- 2006-03-31 CN CNB2006100710805A patent/CN100452291C/zh active Active
- 2006-03-31 CN CNU2006200066762U patent/CN2917150Y/zh not_active Expired - Lifetime
- 2006-12-14 KR KR1020060127695A patent/KR100719307B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
JP2007088324A (ja) | 2007-04-05 |
CN100452291C (zh) | 2009-01-14 |
TWI308364B (en) | 2009-04-01 |
KR100719307B1 (ko) | 2007-05-18 |
JP4820137B2 (ja) | 2011-11-24 |
KR100742451B1 (ko) | 2007-07-25 |
CN2917150Y (zh) | 2007-06-27 |
KR20070034978A (ko) | 2007-03-29 |
KR20070034911A (ko) | 2007-03-29 |
CN1941278A (zh) | 2007-04-04 |
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