TW200714534A - Hierarchical in/out stocker device - Google Patents
Hierarchical in/out stocker deviceInfo
- Publication number
- TW200714534A TW200714534A TW094140825A TW94140825A TW200714534A TW 200714534 A TW200714534 A TW 200714534A TW 094140825 A TW094140825 A TW 094140825A TW 94140825 A TW94140825 A TW 94140825A TW 200714534 A TW200714534 A TW 200714534A
- Authority
- TW
- Taiwan
- Prior art keywords
- hierarchical
- upstairs
- downstairs
- delivery
- stocker device
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Forklifts And Lifting Vehicles (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005297436A JP2007106528A (ja) | 2005-10-12 | 2005-10-12 | 階層入出庫式ストッカ装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200714534A true TW200714534A (en) | 2007-04-16 |
Family
ID=38017753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094140825A TW200714534A (en) | 2005-10-12 | 2005-11-21 | Hierarchical in/out stocker device |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2007106528A (zh) |
KR (1) | KR20070040706A (zh) |
CN (1) | CN1948105A (zh) |
TW (1) | TW200714534A (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012012165A (ja) * | 2010-06-30 | 2012-01-19 | Jgc Corp | 処理設備 |
US9845193B2 (en) * | 2012-04-05 | 2017-12-19 | Murata Machinery, Ltd. | Conveyance system |
CN102874534B (zh) * | 2012-10-08 | 2017-03-01 | 上海集成电路研发中心有限公司 | 自动化物料输送系统及其方法 |
CN104925438B (zh) * | 2015-06-04 | 2017-05-10 | 邵一凡 | 智能货柜及基于该智能货柜的物流间接配送方法 |
JP6729438B2 (ja) * | 2017-02-08 | 2020-07-22 | 株式会社ダイフク | 物品搬送設備 |
CN107812649A (zh) * | 2017-11-30 | 2018-03-20 | 江苏金陵智造研究院有限公司 | 一种全自动喷涂生产线及其运行方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06183663A (ja) * | 1992-12-18 | 1994-07-05 | Sony Corp | クリーンルーム用昇降機 |
JPH0812011A (ja) * | 1994-06-28 | 1996-01-16 | Jiyarotsuku:Kk | 倉庫における保管棚への搬送装置 |
JPH10331460A (ja) * | 1997-06-03 | 1998-12-15 | Masaki Shinpo | トランクルーム建造物 |
JP2004100233A (ja) * | 2002-09-09 | 2004-04-02 | Sugiyama Kensetsu Kogyo Kk | 自動倉庫付き共同住宅システム |
-
2005
- 2005-10-12 JP JP2005297436A patent/JP2007106528A/ja active Pending
- 2005-11-21 TW TW094140825A patent/TW200714534A/zh unknown
- 2005-12-21 KR KR1020050126661A patent/KR20070040706A/ko not_active Application Discontinuation
- 2005-12-27 CN CNA2005101341790A patent/CN1948105A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2007106528A (ja) | 2007-04-26 |
KR20070040706A (ko) | 2007-04-17 |
CN1948105A (zh) | 2007-04-18 |
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