TW200703499A - Semiconductor device fabrication method - Google Patents
Semiconductor device fabrication methodInfo
- Publication number
- TW200703499A TW200703499A TW095111987A TW95111987A TW200703499A TW 200703499 A TW200703499 A TW 200703499A TW 095111987 A TW095111987 A TW 095111987A TW 95111987 A TW95111987 A TW 95111987A TW 200703499 A TW200703499 A TW 200703499A
- Authority
- TW
- Taiwan
- Prior art keywords
- processing chamber
- semiconductor device
- metal film
- fabrication method
- device fabrication
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 2
- 238000005389 semiconductor device fabrication Methods 0.000 title abstract 2
- 238000005530 etching Methods 0.000 abstract 3
- 239000002184 metal Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 abstract 1
- 229930195735 unsaturated hydrocarbon Natural products 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
- H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma & Fusion (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005132622A JP2006310634A (ja) | 2005-04-28 | 2005-04-28 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200703499A true TW200703499A (en) | 2007-01-16 |
TWI299189B TWI299189B (en) | 2008-07-21 |
Family
ID=37235017
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095111987A TWI299189B (en) | 2005-04-28 | 2006-04-04 | Semiconductor device fabrication method |
Country Status (4)
Country | Link |
---|---|
US (1) | US20060246731A1 (zh) |
JP (1) | JP2006310634A (zh) |
KR (1) | KR100769876B1 (zh) |
TW (1) | TWI299189B (zh) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100924611B1 (ko) | 2007-05-11 | 2009-11-02 | 주식회사 하이닉스반도체 | 반도체 소자의 미세 패턴 형성방법 |
US7638441B2 (en) * | 2007-09-11 | 2009-12-29 | Asm Japan K.K. | Method of forming a carbon polymer film using plasma CVD |
US20100003828A1 (en) * | 2007-11-28 | 2010-01-07 | Guowen Ding | Methods for adjusting critical dimension uniformity in an etch process with a highly concentrated unsaturated hydrocarbon gas |
US7632549B2 (en) * | 2008-05-05 | 2009-12-15 | Asm Japan K.K. | Method of forming a high transparent carbon film |
US20100104770A1 (en) * | 2008-10-27 | 2010-04-29 | Asm Japan K.K. | Two-step formation of hydrocarbon-based polymer film |
US9296947B2 (en) * | 2011-03-29 | 2016-03-29 | Zeon Corporation | Plasma etching gas and plasma etching method |
JP5886544B2 (ja) * | 2011-06-14 | 2016-03-16 | ローム株式会社 | 半導体装置およびその製造方法 |
JP2015046459A (ja) * | 2013-08-28 | 2015-03-12 | ソニー株式会社 | エッチング方法、電子デバイスの製造方法および偏光板の製造方法 |
KR20150092581A (ko) * | 2014-02-05 | 2015-08-13 | 삼성전자주식회사 | 배선 구조물 및 그 형성 방법 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6009830A (en) * | 1997-11-21 | 2000-01-04 | Applied Materials Inc. | Independent gas feeds in a plasma reactor |
JPH11293481A (ja) | 1998-04-14 | 1999-10-26 | Toshiba Corp | 薄膜処理方法及びその装置 |
US6010966A (en) * | 1998-08-07 | 2000-01-04 | Applied Materials, Inc. | Hydrocarbon gases for anisotropic etching of metal-containing layers |
JP2000208488A (ja) * | 1999-01-12 | 2000-07-28 | Kawasaki Steel Corp | エッチング方法 |
JP2001044173A (ja) | 1999-07-26 | 2001-02-16 | Kobe Steel Ltd | エッチング方法 |
KR100727834B1 (ko) * | 2000-09-07 | 2007-06-14 | 다이킨 고교 가부시키가이샤 | 드라이 에칭 가스 및 드라이 에칭 방법 |
JP2002093778A (ja) | 2000-09-11 | 2002-03-29 | Toshiba Corp | 有機膜のエッチング方法およびこれを用いた半導体装置の製造方法 |
US6833325B2 (en) * | 2002-10-11 | 2004-12-21 | Lam Research Corporation | Method for plasma etching performance enhancement |
US7147900B2 (en) * | 2003-08-14 | 2006-12-12 | Asm Japan K.K. | Method for forming silicon-containing insulation film having low dielectric constant treated with electron beam radiation |
-
2005
- 2005-04-28 JP JP2005132622A patent/JP2006310634A/ja active Pending
-
2006
- 2006-04-04 TW TW095111987A patent/TWI299189B/zh not_active IP Right Cessation
- 2006-04-06 US US11/398,533 patent/US20060246731A1/en not_active Abandoned
- 2006-04-18 KR KR1020060034840A patent/KR100769876B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2006310634A (ja) | 2006-11-09 |
KR100769876B1 (ko) | 2007-10-24 |
KR20060113409A (ko) | 2006-11-02 |
TWI299189B (en) | 2008-07-21 |
US20060246731A1 (en) | 2006-11-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |